CN118671033A - A device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer - Google Patents

Abstract

The present invention discloses a device for detecting the surface reflectivity of a silicon wafer of a crystalline silicon solar cell, relates to the technical field of semiconductor detection, and aims to solve the technical problem that existing devices cannot meet the current requirements for silicon wafer detection. The device comprises a detection base, wherein a lifting mechanism is arranged on a carrier frame, a dynamic distance adjustment mechanism is hoisted on the lifting mechanism, and a plurality of flexible light-shielding mechanisms are connected to the dynamic distance adjustment mechanism. The present invention enables the plurality of flexible light-shielding mechanisms to perform flexible clamping detection on a plurality of crystalline silicon solar cell silicon wafers through the dynamic distance adjustment mechanism, significantly reduces the potential risk of damage to the surface of the silicon wafer by dispersing pressure and reducing the contact area, avoids local deformation caused by uneven pressure, thereby improving the accuracy of reflectivity detection, forms a tight fit on the surface of the flexibly clamped silicon wafer, reduces light leakage, and good sealing helps to maintain the shading effect of the detection area during the detection process, thereby improving the accuracy of reflectivity detection.

Description

A device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer

Technical Field

The present invention relates to the field of semiconductor detection technology, and more specifically to a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer.

Background Art

The detection of the reflectivity of the silicon wafer surface of a crystalline silicon solar cell is essentially to evaluate its optical performance by measuring the ability of the silicon wafer to reflect light of a specific wavelength. An ideal detection device should be able to obtain this data efficiently and accurately while avoiding any physical damage to the silicon wafer. However, the existing detection methods have obvious design deficiencies. Crystalline silicon solar cell silicon wafers are usually thin, which makes them very easy to break or deform when subjected to external forces.

However, in the existing detection method, when the silicon wafer is placed between two pressure plates for measurement, even if the pressure is controlled quite accurately, it is inevitable that a certain amount of extrusion stress will be generated on the silicon wafer, thereby increasing the risk of damage. The existing upper and lower pressing detection method also has obvious shortcomings in detection efficiency. Since the silicon wafers need to be pressed, measured and released one by one, this process is time-consuming and difficult to automate and batch process. With the continuous expansion of the scale of the solar cell industry, the requirements for production efficiency are also getting higher and higher. Traditional detection methods can no longer meet the needs of modern production lines.

Moreover, when performing reflectivity detection, light-shielding treatment is usually required. The main reason for light-shielding treatment is to reduce the interference of external ambient light. External light may interact with the detection light source, resulting in inaccurate measurement results. For example, if there is strong stray light in the surrounding environment during the detection process, these lights may be reflected or scattered by the detection sample, and thus mixed into the measured reflected light, making the final measured reflectivity higher. For example, in a laboratory environment, if light-shielding is not done well, natural light coming through the window or indoor lights may affect the test results. At the same time, long-term exposure of the reflectivity detector may have some effects. First, long-term exposure may cause the photosensitive element inside the instrument to overheat, thereby affecting its performance and accuracy. When the photosensitive element works continuously and receives a large amount of light, the heat generated may exceed the normal working range, which may cause deviations in the measurement results. Secondly, long-term exposure will also accelerate the aging and loss of the instrument. In view of this, we propose a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer.

Summary of the invention

The purpose of the present invention is to provide a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer, so as to solve the technical problem that the existing device cannot meet the current silicon wafer detection requirements.

In order to solve the above technical problems, the present invention provides the following technical solutions: a device for detecting the surface reflectivity of a crystalline silicon solar cell silicon wafer, comprising a detection base, a belt conveyor is provided on the detection base, a bearing frame is provided on the detection base near the back of the belt conveyor, a lifting mechanism is provided on the bearing frame at a position directly above the belt conveyor, a dynamic distance adjustment mechanism is suspended on the lifting mechanism, and a plurality of flexible light-shielding mechanisms are connected to the dynamic distance adjustment mechanism;

The dynamic distance adjustment mechanism causes a plurality of the flexible light-shielding mechanisms to be horizontally opposed to each other for flexible clamping detection, and the flexible light-shielding mechanism has two light-shielding states: detection light-shielding and window light-shielding.

Preferably, the lifting mechanism includes a cylinder, a suspension rod, a sliding rod and a suspension block, the cylinder is arranged at a position where the carrier is located directly above the belt conveyor, the suspension rod is connected to the output end of the cylinder, the sliding rod is symmetrically arranged on the carrier, one end of the suspension block is connected to the suspension rod and the sliding rod, and the other end of the suspension block is connected to the dynamic distance adjustment mechanism.

Preferably, the dynamic distance adjustment mechanism includes a shell assembly, a drive assembly and a dynamic assembly, the shell assembly is connected to the bottom end of the suspension block, the drive assembly is arranged inside the shell assembly, the dynamic assembly is connected to a position on the shell assembly close to the drive assembly, and the flexible light-shielding mechanism is connected to the dynamic assembly.

Preferably, the shell assembly includes an outer shell, a back plate, a first pitch variable plate, a second pitch variable plate, a pitch variable groove and a tooth groove, the back plate is connected to the bottom end of the suspension block, the outer shell is installed on the back plate, the drive assembly is connected to one end inside the outer shell, the first pitch variable plate is connected to the other end inside the back plate, the second pitch variable plate is connected to the bottom end of the back plate, the pitch variable groove is opened on the first pitch variable plate and the second pitch variable plate, and the tooth groove is opened on the second pitch variable plate.

Preferably, the driving assembly includes a mounting block, a servo motor, a belt and a movable screw, the mounting block is connected to one end of the housing away from the first pitch variable plate, the servo motor is arranged at one end of the mounting block, the movable screw is rotatably connected to the other end of the mounting block, one end of the belt is connected to the output end of the servo motor, the other end of the belt is connected to the movable screw, and the dynamic assembly is connected to the movable screw.

Preferably, the dynamic component includes a moving block, a slide rail A, a slide rail B and a sliding block, the moving block is movably connected to the moving screw, the slide rail A is connected to the moving block, the slide rail B is slidably connected to the slide rail A, the sliding block is slidably connected to the slide rail B, the slide rail A is arranged vertically, and the slide rail B is arranged horizontally; a limit rod is provided on the sliding block near the first pitch change plate, the limit rod is slidably connected to the pitch change groove, the bottom end of the sliding block is also connected to a mounting column, and the flexible light-shielding mechanism is connected to the mounting column.

Preferably, the flexible light-shielding mechanism includes a flexible clamping component, a light-shielding adjustment component and an air plug component, the top end of the flexible clamping component is connected to the mounting column, the back end of the flexible clamping component is movably inserted on the second variable pitch plate, the light-shielding adjustment component is arranged on the flexible clamping component, and the air plug component is arranged on the flexible clamping component.

Preferably, the flexible clamping assembly includes an installation main rod, a rotating block, a driving shaft, a gear, a rotating shaft and a rubber suction cup, the installation main rod is connected to the installation column, the rotating block is rotatably connected to the bottom end of the installation main rod, one end of the driving shaft is movably inserted on the second pitch change plate, the other end of the driving shaft passes through the installation main rod and is connected to the rotating block, the gear is provided at one end of the driving shaft close to the second pitch change plate, the gear is meshed with the tooth groove, the rotating shaft is rotatably connected to one end of the rotating block away from the driving shaft, the rubber suction cup is connected to one end of the rotating shaft away from the rotating block, and the air plug assembly is provided on the rubber suction cup.

Preferably, the light-shielding adjustment component includes a gear ring groove, a rack plate and a bevel gear A, the gear ring groove is opened on the rotating shaft, the rack plate is arranged on the mounting main rod, the gear ring groove is adapted to the rack plate, and the bevel gear A is arranged on the rotating block near one end of the driving shaft.

Preferably, an air plug hole is provided on the rubber suction cup, and the air plug assembly is arranged on the air plug hole; the air plug assembly includes an air plug cylinder, an internal thread, an air plug column, an air hole groove, an external thread, a bevel gear B and a stopper, the air plug cylinder is provided on the air plug hole, the internal thread is provided inside the air plug cylinder, the air plug column is inserted into the air plug cylinder, the air hole groove is provided in a circular shape at equal intervals on one end of the outer wall of the air plug column, the external thread is provided on the other end of the outer wall of the air plug column, the bevel gear B is provided on one side of the air plug column, the stopper is provided on the other side of the air plug column, and the bevel gear B is adapted to the bevel gear A.

Compared with the prior art, the present invention has the following beneficial effects:

1. The present invention improves the structure of an existing device for detecting the surface reflectance of silicon wafers of crystalline silicon solar cells. A belt conveyor is arranged on a detection base, a carrier frame is arranged on the back of the belt conveyor, a lifting mechanism is arranged on the carrier frame, a dynamic distance adjustment mechanism is hoisted on the lifting mechanism, and a plurality of flexible light-shielding mechanisms are connected to the dynamic distance adjustment mechanism. The present invention enables a plurality of flexible light-shielding mechanisms to perform flexible clamping detection on a plurality of crystalline silicon solar cell silicon wafers through the dynamic distance adjustment mechanism, and significantly reduces the potential risk of damage to the surface of the silicon wafer by dispersing pressure and reducing the contact area, avoids local deformation caused by uneven pressure, thereby improving the accuracy of reflectance detection, and forms a tight fit on the surface of the flexibly clamped silicon wafer to reduce light leakage. Good sealing helps to maintain the shading effect of the detection area during the detection process, thereby improving the accuracy of reflectance detection.

2. The present invention movably sleeves the moving block on the moving screw rod, drives the servo motor to rotate and drives the belt to rotate, and the belt pulls the moving screw rod to rotate. The rotation of the moving screw rod causes the moving block sleeved on the moving screw rod to move in the vertical direction, and the moving block drives the slide rail A to move. Since the slide rail A is also connected to the slide rail B, a number of sliding blocks are slidably connected to the slide rail B. A limiting rod is provided on the sliding block, and the limiting rod is movably inserted in the pitch variable groove. When the slide rail A moves vertically, the sliding block moves on the slide rail B due to the limiting of the limiting rod and the pitch variable groove. The bottom end of the sliding block is connected to a mounting column, and a flexible light-shielding mechanism is connected to the mounting column, so that the flexible light-shielding mechanism moves in position. The pitch variable function allows the clamping device to be adjusted according to the actual size of the silicon wafer to ensure that each silicon wafer can be stably and tightly clamped, which is particularly important for processing silicon wafers of different batches or design requirements.

3. In the present invention, when the main rod is installed to move, the driving shaft and the gear movably inserted on the second pitch-changing plate slide on the pitch-changing groove, and the gear meshes with the tooth groove to rotate the driving shaft, and the driving shaft drives the rotating block to rotate. After the rotating block rotates 180 degrees, the tooth ring groove on the rotating shaft meshes with the rack plate at the top, so that the rotating shaft drives the rubber suction cup to rotate into an opposing state. Due to the pitch-changing groove of the second pitch-changing plate, the rubber suction cup is merged again. Before the rubber suction cup is merged, the bevel gear A rotates to drive the bevel gear B on the air plug column of the air plug assembly to rotate, and the bevel gear B rotates The air plug column is driven to rotate, and the external thread on the air plug column cooperates with the internal thread of the air plug tube, so that the air plug column is screwed out of the threaded part and leaks out of the air hole groove. Due to the air hole groove, air enters the rubber suction cup, resulting in it being unable to generate suction, which facilitates the rubber suction cup to separate from the silicon wafer. At the same time, it is also unable to generate suction during the detection window period when the two rubber suction cups are merged again after separation. The purpose of merging the suction cups during the window period is to reduce the situation where the photosensitive elements inside the instrument are overheated due to long-term exposure, thereby affecting its performance and accuracy, thereby increasing the service life of the equipment and improving the detection quality and efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS

Fig. 1 is a schematic diagram of the overall structure of the present invention;

FIG2 is a front view of the structure of the present invention;

FIG3 is a schematic diagram of the back structure of the lifting mechanism and the dynamic distance adjustment mechanism of the present invention;

FIG4 is a schematic structural diagram of a dynamic distance adjustment mechanism and a flexible light shielding mechanism of the present invention;

FIG5 is a schematic diagram of the front structure of the dynamic pitch adjustment mechanism of the present invention;

FIG6 is a schematic diagram of the structure of the back side of the dynamic distance adjustment mechanism of the present invention;

FIG7 is a schematic structural diagram of a second pitch-variable plate and a flexible light-shielding mechanism of the present invention;

FIG8 is a schematic diagram of a reflectivity detection state of the present invention;

FIG9 is a schematic diagram of a light-shielding state of a detector during a window period of the present invention;

FIG10 is a schematic diagram of the structure of the rubber suction cup and the air plug assembly of the present invention;

FIG11 is an enlarged view of the structure at A of the present invention;

Description of the numbers in the figure:

1. Detection base; 2. Belt conveyor; 3. Carrying frame; 4. Lifting mechanism; 5. Dynamic distance adjustment mechanism; 6. Flexible light-shielding mechanism;

401, cylinder; 402, suspension rod; 403, slide rod; 404, suspension connecting block;

501, housing component; 502, drive component; 503, dynamic component;

601. Flexible clamping assembly; 602. Light-shielding adjustment assembly; 603. Air plug assembly;

5011, housing; 5012, back plate; 5013, first pitch-changing plate; 5014, second pitch-changing plate; 5015, pitch-changing slot; 5016, tooth slot;

5021, mounting block; 5022, servo motor; 5023, belt; 5024, moving screw;

5031, moving block; 5032, slide rail A; 5033, slide rail B; 5034, sliding block; 5035, limit rod; 5036, mounting column;

6011, install the main rod; 6012, rotate the block; 6013, drive the shaft; 6014, gear; 6015, rotate the shaft; 6016, rubber suction cup; 6017, air plug hole;

6021, gear ring groove; 6022, rack plate; 6023, bevel gear A;

6031, air plug cylinder; 6032, internal thread; 6033, air plug column; 6034, air hole groove; 6035, external thread; 6036, bevel gear B; 6037, stopper.

DETAILED DESCRIPTION

As shown in Figures 1 to 11, the present invention relates to a device for detecting the surface reflectance of a crystalline silicon solar cell silicon wafer, comprising a detection base 1, a belt conveyor 2 being provided on the detection base 1, a carrier frame 3 being provided on the detection base 1 near the back of the belt conveyor 2, a lifting mechanism 4 being provided on the carrier frame 3 directly above the belt conveyor 2, a dynamic distance adjusting mechanism 5 being suspended on the lifting mechanism 4, and a plurality of flexible light-shielding mechanisms 6 being connected to the dynamic distance adjusting mechanism 5; wherein the dynamic distance adjusting mechanism 5 causes the plurality of flexible light-shielding mechanisms 6 to be in horizontally opposite flexible clamping detection, and the flexible light-shielding mechanisms 6 have two light-shielding states: detection light-shielding and window light-shielding. The present invention improves the structure of an existing device for detecting the surface reflectance of silicon wafers of crystalline silicon solar cells. A belt conveyor 2 is arranged on a detection base 1, a carrier frame 3 is arranged on the back of the belt conveyor 2, a lifting mechanism 4 is arranged on the carrier frame 3, a dynamic distance adjusting mechanism 5 is hoisted on the lifting mechanism 4, and a plurality of flexible light-shielding mechanisms 6 are connected to the dynamic distance adjusting mechanism 5. The present invention enables a plurality of flexible light-shielding mechanisms 6 to perform flexible clamping detection on a plurality of crystalline silicon solar cell silicon wafers through the dynamic distance adjusting mechanism 5, and significantly reduces the potential risk of damage to the surface of the silicon wafer by dispersing pressure and reducing the contact area, avoids local deformation caused by uneven pressure, thereby improving the accuracy of reflectance detection, and forms a tight fit with the surface of the flexibly clamped silicon wafer to reduce light leakage. Good sealing helps to maintain the shading effect of the detection area during the detection process, thereby improving the accuracy of reflectance detection.

In an embodiment of the present invention, the lifting mechanism 4 includes a cylinder 401, a suspension rod 402, a slide rod 403 and a suspension block 404. The cylinder 401 is arranged at a position where the carrier frame 3 is directly above the belt conveyor 2. The suspension rod 402 is connected to the output end of the cylinder 401. The slide rod 403 is symmetrically arranged on the carrier frame 3. One end of the suspension block 404 is connected to the suspension rod 402 and the slide rod 403, and the other end of the suspension block 404 is connected to the dynamic distance adjustment mechanism 5. In the present invention, a cylinder 401 is arranged at a position where the carrier frame 3 is located directly above the belt conveyor 2. The stroke and return stroke of the cylinder 401 drive the suspension rod 402 and three suspension blocks 404 to descend or ascend. One of the suspension blocks 404 is connected to the suspension rod 402 and the dynamic distance adjustment mechanism 5. The bottom ends of the two outer suspension blocks 404 are connected to the dynamic distance adjustment mechanism 5, and they themselves are movably arranged on the slide rod 403, which improves the stability and prevents the detection instrument from being unable to be horizontally calibrated due to offset during the lifting process, resulting in uneven clamping pressure.

In the embodiment of the present invention, the dynamic distance adjustment mechanism 5 includes a housing component 501, a driving component 502 and a dynamic component 503. The housing component 501 is connected to the bottom end of the suspension block 404, the driving component 502 is arranged inside the housing component 501, the dynamic component 503 is connected to the housing component 501 at a position close to the driving component 502, and the flexible light-shielding mechanism 6 is connected to the dynamic component 503. In the present invention, the housing component 501 is the housing shown in Figures 4 and 5 of the specification, the driving component 502 and the dynamic component 503 are both arranged inside the housing component 501, and the flexible light-shielding mechanism 6 is connected to the portion of the dynamic component 503 extending out of the housing component 501.

As another embodiment of the present invention, the shell assembly 501 includes an outer shell 5011, a back plate 5012, a first pitch change plate 5013, a second pitch change plate 5014, a pitch change slot 5015 and a tooth groove 5016. The back plate 5012 is connected to the bottom end of the suspension block 404, the outer shell 5011 is installed on the back plate 5012, the drive assembly 502 is connected to one end inside the outer shell 5011, the first pitch change plate 5013 is connected to the other end inside the back plate 5012, the second pitch change plate 5014 is connected to the bottom end of the back plate 5012, the pitch change slot 5015 is opened on the first pitch change plate 5013 and the second pitch change plate 5014, and the tooth groove 5016 is opened on the second pitch change plate 5014. In the present invention, the driving component 502 is connected to one end of the inside of the shell 5011, and the first pitch plate 5013 is connected to the other end of the inside of the back plate 5012. The first pitch plate 5013 is fixedly connected to the shell 5011. When the driving component 502 causes the dynamic component 503 to move, the dynamic component 503 is limited by the pitch groove 5015, so that the clamping opening and closing distance of the flexible light-shielding mechanism 6 on the dynamic component 503 changes, so as to adapt to the size and shape of the silicon wafer of the crystalline silicon solar cell. Through its flexibility and adjustability, it can easily adapt to silicon wafers of different sizes and shapes without replacing the fixture or making complicated adjustments.

As another embodiment of the present invention, the driving component 502 includes a mounting block 5021, a servo motor 5022, a belt 5023 and a moving screw 5024. The mounting block 5021 is connected to one end of the housing 5011 away from the first pitch plate 5013, the servo motor 5022 is arranged at one end of the mounting block 5021, the moving screw 5024 is rotatably connected to the other end of the mounting block 5021, one end of the belt 5023 is connected to the output end of the servo motor 5022, the other end of the belt 5023 is connected to the moving screw 5024, and the dynamic component 503 is connected to the moving screw 5024. In the present invention, a mounting block 5021 is symmetrically arranged at one end of the housing 5011 away from the first pitch plate 5013, and a servo motor 5022 is arranged on the mounting block 5021. The servo motor 5022 is driven to rotate to drive the belt 5023 to rotate, and the belt 5023 pulls the moving screw rod 5024 to rotate. The rotation of the moving screw rod 5024 causes the dynamic component 503 mounted on the moving screw rod 5024 to move.

As another embodiment of the present invention, the dynamic component 503 includes a moving block 5031, a slide rail A5032, a slide rail B5033 and a sliding block 5034. The moving block 5031 is movably connected to the moving screw rod 5024, the slide rail A5032 is connected to the moving block 5031, the slide rail B5033 is slidably connected to the slide rail A5032, and the sliding block 5034 is slidably connected to the slide rail B5033. The slide rail A5032 is arranged vertically, and the slide rail B5033 is arranged horizontally. A limit rod 5035 is provided on the sliding block 5034 near the first pitch change plate 5013. The limit rod 5035 is slidably connected to the pitch change groove 5015. The bottom end of the sliding block 5034 is also connected to a mounting column 5036, and the flexible light-shielding mechanism 6 is connected to the mounting column 5036. In the present invention, the moving block 5031 is movably mounted on the moving screw rod 5024, and the servo motor 5022 is driven to rotate to drive the belt 5023 to rotate. The belt 5023 pulls the moving screw rod 5024 to rotate. The moving screw rod 5024 rotates to make the moving block 5031 mounted on the moving screw rod 5024 move in the vertical direction. The moving block 5031 drives the slide rail A5032 to move. Since the slide rail A5032 is also connected to the slide rail B5033, the slide rail B5033 is slidably connected to a plurality of sliding blocks 5034, and a limit rod 5035 is provided on the sliding block 5034. The positioning rod 5035 is movably inserted in the variable pitch groove 5015, so that when the slide rail A5032 moves vertically, the sliding block 5034 moves on the slide rail B5033 due to the limitation of the limiting rod 5035 and the variable pitch groove 5015. The bottom end of the sliding block 5034 is connected to the mounting column 5036, and the mounting column 5036 is connected to the flexible light-shielding mechanism 6, so that the flexible light-shielding mechanism 6 moves in position. The variable pitch function allows the clamping device to be adjusted according to the actual size of the silicon wafer, ensuring that each silicon wafer can be clamped stably and tightly, which is particularly important for processing silicon wafers of different batches or design requirements.

As another embodiment of the present invention, the flexible light-shielding mechanism 6 includes a flexible clamping component 601, a light-shielding adjustment component 602 and an air plug component 603. The top of the flexible clamping component 601 is connected to the mounting column 5036. The back of the flexible clamping component 601 is movably inserted on the second pitch-changing plate 5014. The light-shielding adjustment component 602 is arranged on the flexible clamping component 601. The air plug component 603 is arranged on the flexible clamping component 601. In the present invention, the flexible clamping component 601 is connected to the mounting column 5036, the light-shielding adjustment component 602 and the air plug component 603 are arranged on the flexible clamping component 601, and the back of the flexible clamping component 601 is movably inserted on the second pitch-changing plate 5014, so that when the position of the flexible clamping component 601 moves, the second pitch-changing plate 5014 limits the position of the flexible clamping component 601 so that the state of the flexible clamping component 601 can be adjusted through the light-shielding adjustment component 602.

As another embodiment of the present invention, the flexible clamping assembly 601 includes a mounting main rod 6011, a rotating block 6012, a driving shaft 6013, a gear 6014, a rotating shaft 6015 and a rubber suction cup 6016. The mounting main rod 6011 is connected to the mounting column 5036, the rotating block 6012 is rotatably connected to the bottom end of the mounting main rod 6011, one end of the driving shaft 6013 is movably inserted into the second pitch change plate 5014, and the other end of the driving shaft 6013 is It passes through the installation main rod 6011 and is connected to the rotating block 6012. The gear 6014 is arranged at the end of the driving shaft 6013 close to the second pitch change plate 5014. The gear 6014 is meshed with the tooth groove 5016. The rotating shaft 6015 is rotatably connected to the end of the rotating block 6012 away from the driving shaft 6013. The rubber suction cup 6016 is connected to the end of the rotating shaft 6015 away from the rotating block 6012. The air plug assembly 603 is arranged on the rubber suction cup 6016. In the present invention, the main rod 6011 is connected to the mounting column 5036, the main rod 6011 is connected to the rotating shaft 6015, the rotating shaft 6015 is connected to the rotating block 6012, and the rotating shaft 6015 is connected to the rubber suction cup 6016. The mounting column 5036 drives the main rod 6011 to move, and the main rod 6011 drives the rotating shaft 6015, the rotating block 6012 and the rubber suction cup 6016 to form opposite clamping, thereby achieving the effect of fixing the silicon wafer.

A reflectivity detector is installed inside the rubber suction cup 6016 of the flexible light-shielding mechanism 6 of the present invention. The detector is a detection instrument and principle used in a silicon chip reflectivity detection method based on a filter array disclosed in Chinese Invention Publication No. CN112304904B.

As another embodiment of the present invention, the light-shielding adjustment component 602 includes a gear ring groove 6021, a rack plate 6022 and a bevel gear A6023. The gear ring groove 6021 is opened on the rotating shaft 6015, the rack plate 6022 is arranged on the mounting main rod 6011, the gear ring groove 6021 is adapted to the rack plate 6022, and the bevel gear A6023 is arranged on one end of the rotating block 6012 close to the driving shaft 6013.

The rubber suction cup 6016 is provided with an air plug hole 6017, and the air plug assembly 603 is provided on the air plug hole 6017; the air plug assembly 603 includes an air plug cylinder 6031, an internal thread 6032, an air plug column 6033, an air hole groove 6034, an external thread 6035, a bevel gear B6036 and a stopper 6037. The air plug cylinder 6031 is provided on the air plug hole 6017, and the internal thread 6032 is provided on the air plug cylinder 6 031, the air plug column 6033 is inserted on the air plug tube 6031, the air hole groove 6034 is annularly arranged at one end of the outer wall of the air plug column 6033 at equal intervals, the external thread 6035 is arranged at the other end of the outer wall of the air plug column 6033, the bevel gear B6036 is arranged on one side of the air plug column 6033, the stopper 6037 is arranged on the other side of the air plug column 6033, and the bevel gear B6036 is adapted to the bevel gear A6023. The air plug assembly 603 used in the present invention realizes two light-shielding effects, one is light-shielding in the detection state, and the other is light-shielding of the detector during the detection window period, respectively achieving the effects of improving the detection quality and improving the service life of the equipment. The air plug assembly 603 in the present invention not only makes the suction cup lose suction but also does not affect its light-shielding effect during the window period, further improving the service life and facilitating later maintenance.

In the present invention, when the main rod 6011 is installed to move its position, the driving shaft 6013 and the gear 6014 movably inserted on the second pitch-changing plate 5014 slide on the pitch-changing groove 5015, and the gear 6014 engages with the tooth groove 5016 to rotate the driving shaft 6013, and the driving shaft 6013 drives the rotating block 6012 to rotate. After the rotating block 6012 rotates 180 degrees, the tooth ring groove 6021 on the rotating shaft 6015 engages with the rack plate 6022 at the top, so that the rotating shaft 6015 drives the rubber suction cup 6016 to rotate into a facing state. Due to the pitch-changing groove 5015 of the second pitch-changing plate 5014, the rubber suction cup 6016 is merged again. Before the rubber suction cup 6016 is merged, the bevel gear A6023 rotates the air plug column of the driving air plug assembly 603 The bevel gear B6036 on 6033 rotates, and the rotation of the bevel gear B6036 drives the air plug column 6033 to rotate, and the external thread 6035 on the air plug column 6033 cooperates with the internal thread 6032 of the air plug cylinder 6031, so that the air plug column 6033 is screwed out of the threaded part and leaks out of the air hole groove 6034. Due to the air hole groove 6034, air enters the rubber suction cup 6016, which makes it unable to generate suction, so that the rubber suction cup 6016 is detached from the silicon wafer. At the same time, the two rubber suction cups 6016 are merged again after separation. The purpose of merging the suction cups during the window period is to reduce the situation where the photosensitive elements inside the instrument are overheated due to long-term exposure, thereby affecting its performance and accuracy, thereby increasing the service life of the equipment and improving the detection quality and efficiency.

Working principle: The present embodiment provides a device for detecting the surface reflectivity of a crystalline silicon solar cell wafer. When in use, firstly, a quartz boat with solar cell wafers is placed on a belt conveyor 2. The belt conveyor 2 transports the wafers to the bottom of a lifting mechanism 4. The stroke of the cylinder 401 of the lifting mechanism 4 drives the suspension block 404 to descend. The suspension block 404 drives the back plate 5012 to descend, driving the servo motor 5022 to rotate and drive the belt 5023 to rotate. The belt 5023 pulls the moving screw rod 5024 to rotate. The moving screw rod 5024 rotates so that the moving block 5031 sleeved on the moving screw rod 5024 moves in a vertical direction. The moving block 5031 moves in a vertical direction. 31 drives the slide rail A5032 to move. Since the slide rail A5032 is also connected to the slide rail B5033, the slide rail B5033 is slidably connected to a plurality of sliding blocks 5034. The sliding blocks 5034 are provided with a limit rod 5035. The limit rod 5035 is movably inserted in the variable pitch groove 5015. When the slide rail A5032 moves vertically, the limit rod 5035 and the variable pitch groove 5015 limit the sliding blocks 5034 to move on the slide rail B5033. The bottom end of the sliding blocks 5034 is connected to a mounting column 5036. The mounting column 5036 is connected to a flexible light-shielding mechanism 6, so that the main rod 6011 is installed and moved. The driving shaft 6013 and the gear 6014 on the second pitch changing plate 5014 slide on the pitch changing groove 5015, and the gear 6014 meshes with the tooth groove 5016 to rotate the driving shaft 6013, and the driving shaft 6013 drives the rotating block 6012 to rotate. After the rotating block 6012 rotates 180 degrees, the tooth ring groove 6021 on the rotating shaft 6015 meshes with the rack plate 6022 at the top, so that the rotating shaft 6015 drives the rubber suction cup 6016 to rotate into an opposing state. Due to the pitch changing groove 5015 of the second pitch changing plate 5014, the rubber suction cup 6016 is merged again. Before the rubber suction cup 6016 is merged, the bevel gear A6023 The bevel gear B6036 on the air plug column 6033 of the rotationally driven air plug assembly 603 rotates, and the rotation of the bevel gear B6036 drives the air plug column 6033 to rotate, and the external thread 6035 on the air plug column 6033 cooperates with the internal thread 6032 of the air plug cylinder 6031, so that the air plug column 6033 is screwed out of the threaded part to leak out of the air hole groove 6034. Due to the air hole groove 6034, air enters the rubber suction cup 6016, which makes it unable to generate suction, so that the rubber suction cup 6016 is detached from the silicon wafer. At the same time, after separation, the two rubber suction cups 6016 without suction are merged again to achieve light protection during the detection window period to prevent overheating due to long-term exposure.

The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims (10)

1. The device is characterized by comprising a detection base (1), wherein a belt conveyor (2) is arranged on the detection base (1), a bearing frame (3) is arranged at a position, close to the back surface of the belt conveyor (2), on the detection base (1), a lifting mechanism (4) is arranged at a position, right above the belt conveyor (2), on the bearing frame (3), a dynamic distance adjusting mechanism (5) is hoisted on the lifting mechanism (4), and a plurality of flexible light shielding mechanisms (6) are connected to the dynamic distance adjusting mechanism (5);

The dynamic distance-adjusting mechanism (5) enables a plurality of flexible light-shielding mechanisms (6) to be horizontally and oppositely clamped for detection, and the flexible light-shielding mechanisms (6) are in light-shielding states of light shielding detection and light shielding of an empty window.

2. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 1, wherein the lifting mechanism (4) comprises an air cylinder (401), a hanging rod (402), a sliding rod (403) and a hanging connection block (404), the air cylinder (401) is arranged at a position, right above the belt conveyor (2), of the bearing frame (3), the hanging rod (402) is connected to the output end of the air cylinder (401), the sliding rod (403) is symmetrically arranged on the bearing frame (3), one end of the hanging connection block (404) is connected to the hanging rod (402) and the sliding rod (403), and the other end of the hanging connection block (404) is connected to the dynamic distance adjusting mechanism (5).

3. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 2, wherein the dynamic distance adjusting mechanism (5) comprises a shell component (501), a driving component (502) and a dynamic component (503), the shell component (501) is connected to the bottom end of the hanging block (404), the driving component (502) is arranged inside the shell component (501), the dynamic component (503) is connected to the shell component (501) at a position close to the driving component (502), and the flexible light shielding mechanism (6) is connected to the dynamic component (503).

4. The device for detecting the reflectivity of the surface of a silicon wafer of a crystalline silicon solar cell according to claim 3, wherein the shell component (501) comprises a shell (5011), a back plate (5012), a first distance changing plate (5013), a second distance changing plate (5014), a distance changing groove (5015) and a tooth groove (5016), the back plate (5012) is connected to the bottom end of the hanging block (404), the shell (5011) is mounted on the back plate (5012), the driving component (502) is connected to one end inside the shell (5011), the first distance changing plate (5013) is connected to the other end inside the back plate (5012), the second distance changing plate (5014) is connected to the bottom end of the back plate (5012), the distance changing groove (5015) is formed in the first distance changing plate (5013) and the second distance changing plate (5014), and the tooth groove (5016) is formed in the second distance changing plate (5014).

5. The device for detecting the reflectivity of the surface of a silicon wafer of a crystalline silicon solar cell according to claim 4, wherein the driving assembly (502) comprises a mounting block (5021), a servo motor (5022), a belt (5023) and a moving screw rod (5024), the mounting block (5021) is connected to the housing (5011) and is far away from one end of the first variable-pitch plate (5013), the servo motor (5022) is arranged at one end of the mounting block (5021), the moving screw rod (5024) is rotationally connected to the other end of the mounting block (5021), one end of the belt (5023) is connected to the output end of the servo motor (5022), the other end of the belt (5023) is connected to the moving screw rod (5024), and the dynamic assembly (503) is connected to the moving screw rod (5024).

6. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 5, wherein the dynamic component (503) comprises a moving block (5031), a sliding rail a (5032), a sliding rail B (5033) and a sliding hanging block (5034), the moving block (5031) is movably connected to the moving screw (5024), the sliding rail a (5032) is connected to the moving block (5031), the sliding rail B (5033) is slidingly connected to the sliding rail a (5032), the sliding hanging block (5034) is slidingly connected to the sliding rail B (5033), the sliding rail a (5032) is vertically arranged, and the sliding rail B (5033) is horizontally arranged in a transverse direction;

The position on the sliding hanging block (5034) close to the first variable-pitch plate (5013) is provided with a limiting rod (5035), the limiting rod (5035) is slidably connected to the variable-pitch groove (5015), the bottom end of the sliding hanging block (5034) is further connected with a mounting column (5036), and the flexible light-shielding mechanism (6) is connected to the mounting column (5036).

7. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 6, wherein the flexible light-shielding mechanism (6) comprises a flexible clamping component (601), a light-shielding adjusting component (602) and an air plug component (603), the top end of the flexible clamping component (601) is connected to the mounting column (5036), the back of the flexible clamping component (601) is movably inserted into the second variable-pitch plate (5014), the light-shielding adjusting component (602) is arranged on the flexible clamping component (601), and the air plug component (603) is arranged on the flexible clamping component (601).

8. The device for detecting the reflectivity of the surface of a silicon wafer of a crystalline silicon solar cell according to claim 7, wherein the flexible clamping component (601) comprises a mounting main rod (6011), a rotating block (6012), a driving shaft rod (6013), a gear (6014), a rotating shaft rod (6015) and a rubber suction cup (6016), the mounting main rod (6011) is connected to the mounting main rod (5036), the rotating block (6012) is rotationally connected to the bottom end of the mounting main rod (6011), one end of the driving shaft rod (6013) is movably inserted into the second variable-pitch plate (5014), the other end of the driving shaft rod (6013) penetrates through the mounting main rod (6011) to be connected to the rotating block (6012), the gear (6014) is arranged at one end of the driving shaft rod (6013) close to the second variable-pitch plate (5016), the gear (6014) is in meshed fit with the tooth groove (5016), and the rotating shaft rod (6015) is rotationally connected to the rotating block (6012) and is far away from the rubber suction cup (6016).

9. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 8, wherein the light-shielding adjusting assembly (602) comprises a toothed ring groove (6021), a rack plate (6022) and a bevel gear A (6023), the toothed ring groove (6021) is formed in the rotating shaft lever (6015), the rack plate (6022) is arranged on the mounting main lever (6011), the toothed ring groove (6021) is matched with the rack plate (6022), and the bevel gear A (6023) is arranged at one end, close to the driving shaft lever (6013), of the rotating block (6012).

10. The device for detecting the reflectivity of the surface of the silicon wafer of the crystalline silicon solar cell according to claim 9, wherein the rubber sucker (6016) is provided with a gas plug hole (6017), and the gas plug component (603) is arranged on the gas plug hole (6017);

The air lock assembly (603) comprises an air lock cylinder (6031), an inner thread (6032), an air lock column (6033), an air hole groove (6034), an outer thread (6035), a bevel gear B (6036) and a stop block (6037), wherein the air lock cylinder (6031) is arranged on an air lock hole (6017), the inner thread (6032) is arranged inside the air lock cylinder (6031), the air lock column (6033) is arranged on the air lock cylinder (6031) in an inserting mode, the air hole groove (6034) is formed in one end of the outer wall of the air lock column (6033) in an annular equidistant mode, the outer thread (6035) is arranged on the other end of the outer wall of the air lock column (6033), the bevel gear B (6036) is arranged on one side of the air lock column (6033), and the stop block (6037) is arranged on the other side of the air lock column (6033), and the bevel gear B (6036) is matched with the bevel gear A (6023).