CN118651526A - Epitaxial wafer carrier with protection function - Google Patents

Epitaxial wafer carrier with protection function Download PDF

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Publication number
CN118651526A
CN118651526A CN202411150689.6A CN202411150689A CN118651526A CN 118651526 A CN118651526 A CN 118651526A CN 202411150689 A CN202411150689 A CN 202411150689A CN 118651526 A CN118651526 A CN 118651526A
Authority
CN
China
Prior art keywords
epitaxial wafer
wafer box
sleeve
box
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202411150689.6A
Other languages
Chinese (zh)
Other versions
CN118651526B (en
Inventor
徐新华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Lishui Zhongxin Wafer Semiconductor Technology Co ltd
Original Assignee
Zhejiang Lishui Zhongxin Wafer Semiconductor Technology Co ltd
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Priority to CN202411150689.6A priority Critical patent/CN118651526B/en
Publication of CN118651526A publication Critical patent/CN118651526A/en
Application granted granted Critical
Publication of CN118651526B publication Critical patent/CN118651526B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D55/00—Accessories for container closures not otherwise provided for
    • B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
    • B65D55/14—Applications of locks, e.g. of permutation or key-controlled locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/005—Side walls formed with an aperture or a movable portion arranged to allow removal or insertion of contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B65D25/10—Devices to locate articles in containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D79/00—Kinds or details of packages, not otherwise provided for
    • B65D79/02—Arrangements or devices for indicating incorrect storage or transport
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2015—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum in an at least partially rigid container
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1911—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like
    • H10P72/1912—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by materials, roughness, coatings or the like characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1914—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The invention discloses an epitaxial wafer carrier with a protection function, which relates to the technical field of epitaxial wafer carriers, and comprises an epitaxial wafer box with an opening at the side part, and further comprises: the sealing door plate is covered at the opening of the epitaxial wafer box in a sealing way; the first supporting pieces are arranged on the side walls of the epitaxial wafer boxes and are used for supporting the epitaxial wafer boxes; the limiting frame is movably arranged between the first supporting piece and the epitaxial wafer box, can slide between the first supporting piece and the epitaxial wafer box and can limit the first supporting piece; according to the invention, the first elastic part is arranged, when the mechanical arm is used for placing the epitaxial wafer, if the mechanical arm is carelessly touched with the first supporting piece, only a single first elastic part is deformed due to the arrangement of the first elastic part, so that the problem that all the first supporting pieces shake due to the fact that the mechanical arm is touched by mistake is avoided, and the protection effect on the epitaxial wafer is further improved.

Description

Epitaxial wafer carrier with protection function
Technical Field
The invention relates to the technical field of epitaxial wafer carriers, in particular to an epitaxial wafer carrier with a protection function.
Background
The epitaxial wafer is a precise product, and the epitaxial wafer after production needs special protection to avoid damage in the transportation process; in the prior art, when the epitaxial wafer is transported, most of the epitaxial wafer is only wrapped with a layer of protective film and fixed by a bracket made of foam materials, so that the epitaxial wafer is prevented from being damaged due to collision, but the protection effect of the form is poor; in order to improve the protection effect on the epitaxial wafer, a plurality of types of special carriers are designed and put into use.
The utility model discloses an epitaxial wafer case as the patent of publication number CN206395091U, including the case, the case includes box body and lid, the box body inboard is equipped with the buffer layer, with internal division board that is equipped with, the division board both sides all are equipped with the buffer layer, be equipped with on the division board and get the piece groove, the lid inboard is equipped with the fixed block, and it not only can fix the epitaxial wafer in the transportation of epitaxial wafer, but also can be fine prevent to produce in the transportation and vibrate the damage to the epitaxial wafer to get and put the epitaxial wafer easily.
Although the epitaxial wafer can be buffered, damped and protected by the patent, the mechanical arm is easy to touch by mistake when the epitaxial wafer is placed, so that the whole epitaxial wafer storage box vibrates, and the epitaxial wafer is easy to damage.
Therefore, it is necessary to provide an epitaxial wafer carrier with a protection function to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to provide an epitaxial wafer carrier with a protection function, and aims to solve the problem that the whole epitaxial wafer storage box is vibrated and epitaxial wafers are easily damaged due to the fact that the mechanical arm is easy to touch by mistake when the epitaxial wafers are placed in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions: epitaxial wafer carrier with protect function, including the epitaxial wafer box that the lateral part has the opening, still include: the sealing door plate is covered at the opening of the epitaxial wafer box in a sealing way; the first supporting pieces are arranged on the side walls of the epitaxial wafer boxes and are used for supporting the epitaxial wafer boxes; the limiting frame is movably arranged between the first supporting piece and the epitaxial wafer box, can slide between the first supporting piece and the epitaxial wafer box and can limit the first supporting piece; the sliding rod is arranged on the limiting frame and penetrates through the epitaxial wafer box to be connected with the epitaxial wafer box in a sealing sliding manner; the conical lock sleeve is sleeved at one end of the sliding rod, which is positioned outside the epitaxial wafer box, and is connected with the side wall of the epitaxial wafer box through a fixing piece; the locking piece is sleeved outside the conical lock sleeve, is pressed and can be locked with the conical lock sleeve into a whole; the clamping sleeve is positioned on one side, far away from the conical lock sleeve, of the locking piece, can be matched with the locking piece in a clamping manner, is connected with the epitaxial wafer box through the first elastic piece, is also connected with the epitaxial wafer box through the elastic layer, and can be separated from the locking piece under the elastic action of the first elastic piece when the locking piece is clamped with the clamping sleeve into a whole.
As a preferable technical scheme of the invention, the first supporting piece comprises a first elastic part connected with the side wall of the epitaxial wafer box; the first bearing part is arranged on one side, away from the epitaxial wafer box, of the first elastic part.
As a preferable technical scheme of the invention, the limiting frame comprises two vertical rods which are symmetrically arranged; and the connecting rod is used for connecting the two vertical rods, and the side wall of the middle circumference of the connecting rod is connected with the sliding rod.
As a preferable technical scheme of the invention, the locking piece comprises a circular ring part which is in clamping fit with the clamping sleeve; the second elastic parts are arranged at one end, close to the conical lock sleeve, of the annular part, the number of the second elastic parts is two, the second elastic parts are symmetrically arranged, and the second elastic parts are parallel to a bus of the conical lock sleeve; the barb is arranged at one end of the second elastic part far away from the circular ring part and is in locking fit with the conical lock sleeve, so that the locking piece and the conical lock sleeve are locked into a whole.
As a preferable technical scheme, the epitaxial wafer box further comprises a base which is detachably connected to the bottom of the epitaxial wafer box; the through holes are formed in the base, and the number of the through holes is at least four; the top column is arranged at the bottom of the epitaxial wafer box; the external thread pipe is arranged in the through hole and is communicated with the inner cavity of the epitaxial wafer box, an exhaust valve is arranged in part of the external thread pipe, and a protective gas inlet valve is arranged in the rest of the external thread pipe; the threaded sleeve is arranged in the through hole and is rotationally connected with the through hole, and the threaded sleeve is in threaded fit connection with the external threaded pipe.
As a preferable technical scheme, the invention further comprises a crown block butt joint which is arranged at the top of the epitaxial wafer box and detachably connected with the epitaxial wafer box and is used for butt joint with the carrying crown block; and the reinforcing ribs are arranged at the top of the epitaxial wafer box, and the number of the reinforcing ribs is multiple.
As a preferable technical scheme, the epitaxial wafer box further comprises two handles which are symmetrically arranged on two sides of the epitaxial wafer box.
As a preferable technical scheme of the invention, a door frame is arranged at the opening of the epitaxial wafer box, and a flange is arranged on the inner wall of the door frame; the sealing door plate is arranged in the door frame and is in sealing fit with the door frame; the door lock mechanisms are arranged in two groups in a linear array and are arranged on the sealing door plate; and the linkage mechanism is arranged between the two groups of door lock mechanisms and is used for linking the two groups of door lock mechanisms.
As a preferable technical scheme of the invention, the door lock mechanism comprises two locking openings symmetrically arranged on a door frame; the locking plate is arranged on the sealing door plate, can be matched with the locking opening for locking, and is in up-and-down limiting sliding connection with the sealing door plate; the rotary table is rotationally connected to the sealing door plate through a rotary shaft; the number of the arc-shaped grooves is two, and the two arc-shaped grooves are arranged on the turntable in a circumferential array; and the fixing column is arranged in the arc-shaped groove.
As a preferable technical scheme of the invention, the linkage mechanism comprises a first gear which is rotationally connected with the sealing door plate; and the second gears are meshed with the first gears and are coaxially connected with the turntable.
The invention has the technical effects and advantages that:
1. According to the invention, through the mutual matching among the first supporting part, the limiting frame, the sliding rod, the conical lock sleeve, the locking part, the clamping sleeve and the like, after the sealing door plate is installed, the clamping sleeve is pressed, the clamping sleeve moves and drives the locking part to the locking part, when the locking part moves to abut against the side wall of the conical lock sleeve, the first elastic part is pushed to elastically deform under the action of the side wall corresponding to the bus of the conical lock sleeve, so that the barb and the conical lock sleeve are locked into a whole, and the shaking condition is avoided.
2. According to the invention, through the mutual matching among the first supporting piece, the limiting frame, the sliding rod, the conical lock sleeve, the locking piece, the clamping sleeve and the like, after the locking piece and the conical lock sleeve are locked into a whole, the clamping sleeve is released, the clamping sleeve is not pressed any more, and the clamping sleeve is pushed to be separated from the circular ring part under the elastic action of the first elastic piece, so that preparation is made for the follow-up.
3. According to the invention, through the mutual matching among the first supporting piece, the limiting frame, the sliding rod, the conical lock sleeve, the locking piece, the clamping sleeve and the like, when the vacuum packaging belt is vacuumized, the vacuum packaging belt generates vacuum and extracts negative pressure, and the vacuum packaging belt moves the extrusion clamping sleeve towards the locking piece, so that the first elastic piece is always in a compressed state, and in the transportation process, if the vacuum packaging belt is damaged, the vacuum packaging belt is not compressed on the first elastic piece any more due to the fact that the vacuum packaging belt is communicated with the atmosphere, and the clamping sleeve is restored to the original state under the elastic action of the first elastic piece, so that the damage of the packaging bag is warned.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention.
Fig. 2 is an exploded view of the connection parts between the susceptor and the epitaxial wafer box according to the present invention.
FIG. 3 is an exploded view of an epitaxial wafer cassette and a seal door panel of the present invention.
Fig. 4 is a schematic view of a door lock mechanism according to the present invention.
Fig. 5 is a front view of the structure of fig. 4 in accordance with the present invention.
Fig. 6 is a schematic plan view of the whole structure in the present invention.
FIG. 7 is a schematic view showing the connection of the conical lock sleeve, the fixing member, the locking member, the clamping sleeve, the first elastic member and the elastic layer structure in the present invention.
FIG. 8 is a schematic view of a clamping sleeve, a locking member and a fixing member according to the present invention.
In the figure: 1. epitaxial wafer box; 2. sealing the door plate; 3. a first support; 301. a first elastic portion; 302. a first support part; 4. a limiting frame; 401. a vertical rod; 402. a connecting rod; 5. a conical lock sleeve; 6. a fixing member; 7. a locking member; 701. a circular ring portion; 702. a second elastic part; 703. a barb; 8. a clamping sleeve; 9. a first elastic member; 10. an elastic layer; 11. a slide bar; 12. a base; 13. a top column; 14. an external threaded tube; 15. a thread sleeve; 16. an exhaust valve; 17. a shielding gas inlet valve; 18. crown block butt joint; 19. a door frame; 20. a door lock mechanism; 2001. locking the opening; 2002. a lock plate; 2003. a turntable; 2004. an arc-shaped groove; 2005. fixing the column; 21. a linkage mechanism; 2101. a first gear; 2102. and a second gear.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides an epitaxial wafer carrier with a protection function as shown in fig. 1 to 8, which comprises an epitaxial wafer box 1 with an opening at the side part, and further comprises: the sealing door plate 2 is covered at the opening of the epitaxial wafer box 1 in a sealing manner; according to the epitaxial wafer box, the epitaxial wafer box 1 and the sealing door plate 2 are arranged, and the epitaxial wafer box 1 and the sealing door plate 2 form a closed space for accommodating the epitaxial wafer.
The first supporting members 3 are arranged on the side walls of the epitaxial wafer box 1 and are used for supporting the epitaxial wafer.
Specifically, the first support member 3 includes a first elastic portion 301 connected to a sidewall of the epitaxial wafer 1; the first support portion 302 is disposed on a side of the first elastic portion 301 facing away from the epitaxial wafer 1. According to the invention, the first elastic part 301 is arranged, when the mechanical arm is used for placing the epitaxial wafer, if the mechanical arm is touched with the first supporting piece 3 carelessly, only a single first elastic part 301 is deformed due to the arrangement of the first elastic part 301, so that the shaking of other first supporting pieces 3 caused by touching one of the first elastic parts in the prior art is avoided; the first supporting portion 302 is provided, so that the epitaxial wafer can be supported.
The limiting frame 4 is movably arranged between the first supporting piece 3 and the epitaxial wafer box 1, can slide between the first supporting piece 3 and the epitaxial wafer box 1 and can limit the first supporting piece 3; according to the invention, the limiting frame 4 is arranged, after packaging and before transportation, the first supporting piece 3 can be limited by adjusting the position of the limiting frame 4, and in the transportation process, the first supporting piece 3 is prevented from shaking, so that friction damage is generated between the epitaxial wafer and the first supporting piece 3.
The slide bar 11 is arranged on the limiting frame 4 and penetrates through the epitaxial wafer box 1 to be connected with the epitaxial wafer box 1 in a sealing sliding manner; according to the invention, the slide bar 11 penetrates through the epitaxial wafer box 1, so that the slide bar 11 can only slide along the length direction of the slide bar 11.
Specifically, the limiting frame 4 includes two vertical rods 401 symmetrically arranged; according to the invention, the vertical rod 401 is abutted against the first supporting piece 3 by pushing the limiting frame 4, so that the first supporting piece 3 is limited, and the first supporting piece 3 is prevented from shaking, so that the epitaxial wafer is damaged.
A connecting rod 402 for connecting the two vertical rods 401, the middle peripheral side wall of which is connected with the slide bar 11; according to the invention, the sliding rod 11 is arranged, and the limiting frame 4 can be driven to move by pushing the sliding rod 11, so that the position of the limiting frame 4 is adjusted, and the first supporting piece 3 is limited.
The conical lock sleeve 5 is sleeved at one end of the sliding rod 11 positioned outside the epitaxial wafer box 1 and is connected with the side wall of the epitaxial wafer box 1 through the fixing piece 6.
The locking piece 7 is sleeved outside the conical lock sleeve 5, and the locking piece 7 is pressed, so that the locking piece and the conical lock sleeve 5 can be locked into a whole.
Specifically, the locking piece 7 includes a circular ring part 701 in clamping fit with the clamping sleeve 8; according to the invention, the circular ring part 701 is used for being clamped with the clamping sleeve 8, the clamping groove is formed in one end, away from the conical lock sleeve 5, of the circular ring part 701, and the protrusion matched with the clamping groove is formed in the outer side wall of the clamping sleeve 8.
The second elastic parts 702 are arranged at one end of the annular part 701 close to the conical lock sleeve 5, the number of the second elastic parts is two, the second elastic parts 702 are symmetrically arranged, and the second elastic parts 702 are parallel to the bus of the conical lock sleeve 5; the invention is parallel, so that the locking piece 7 can be matched with the conical lock sleeve 5 after being locked.
A barb 703, which is disposed at an end of the second elastic portion 702 away from the circular ring portion 701, is in locking engagement with the tapered lock sleeve 5, so that the locking member 7 is locked with the tapered lock sleeve 5 as a unit.
The clamping sleeve 8 is positioned on one side, far away from the conical lock sleeve 5, of the locking piece 7, can be matched with the locking piece 7 in a clamping manner, is connected with the epitaxial wafer box 1 through the first elastic piece 9, is also connected with the epitaxial wafer box 1 through the elastic layer 10, and can enable the clamping sleeve 8 to be separated from the locking piece 7 under the action of the elastic force of the first elastic piece 9 when the locking piece 7 is clamped with the clamping sleeve 8 and the locking piece 7 is locked with the conical lock sleeve 5 into a whole.
After the installation of the sealed door plate 2 is completed, the clamping sleeve 8 is pushed to move towards the tapered lock sleeve 5 after the elastic force of the first elastic element 9 is overcome, and the clamping sleeve 8 and the locking element 7 are locked into a whole at this time, so that the clamping sleeve 8 moves and drives the locking element 7 to the locking element 7, when the locking element 7 moves to abut against the side wall of the tapered lock sleeve 5, the second elastic part 702 is pushed to elastically deform under the action of the side wall corresponding to the bus of the tapered lock sleeve 5, and when the barb 703 is pushed to the end, connected with the fixing element 6, of the tapered lock sleeve 5, the barb 703 and the tapered lock sleeve 5 are locked into a whole under the elastic force of the second elastic part 702.
Then release joint cover 8, no longer press against joint cover 8, under the effect of first elastic component 9 elasticity, promote joint cover 8 to keeping away from locking piece 7 direction and remove, because locking piece 7 and toper lock sleeve 5 lock as an organic whole, and toper lock sleeve 5 is connected with epitaxial wafer 1 again, under the effect of first elastic component 9 elasticity, promote joint cover 8 and circle ring portion 701 separation.
Usually after accomplishing sealedly epitaxial wafer box 1, often can establish one deck vacuum packaging area at epitaxial wafer box 1 overcoat, then to vacuum packaging area extraction vacuum again, because vacuum packaging area produces vacuum, extraction negative pressure, vacuum packaging area will extrude joint cover 8 to locking piece 7 direction removal to make first elastic component 9 be in compression state all the time, in the transportation, if vacuum packaging area is damaged, because vacuum packaging area and atmosphere intercommunication, vacuum packaging area no longer compresses first elastic component 9, under the effect of first elastic component 9 elasticity, make joint cover 8 resume the original state, thereby play warning wrapping bag damage.
The epitaxial wafer cassette also comprises a base 12 which is detachably connected to the bottom of the epitaxial wafer cassette 1; the invention is used for supporting the bottom of the epitaxial wafer box 1 by arranging the base 12. The through holes are formed in the base 12, and the number of the through holes is at least four; a top column 13 disposed at the bottom of the epitaxial wafer cassette 1; the external thread pipe 14 is arranged in the through hole and is communicated with the inner cavity of the epitaxial wafer box 1, an exhaust valve 16 is arranged in one part of the external thread pipe 14, and a protective gas inlet valve 17 is arranged in the other part of the external thread pipe 14; a threaded sleeve 15 which is placed in the through hole and is rotatably connected with the through hole, and is in threaded fit connection with the external threaded pipe 14; the invention is provided with the exhaust valve 16 for exhausting the gas in the epitaxial wafer box 1, and the protective gas inlet valve 17 for flushing the protective gas into the epitaxial wafer box 1.
The device also comprises a crown block butt joint 18 which is arranged at the top of the epitaxial wafer box 1 and detachably connected with the epitaxial wafer box 1, and is used for butt joint with a carrying crown block; according to the invention, the crown block butt joint 18 is fixed on the top of the epitaxial wafer box 1 through bolts, so that the crown block butt joint 18 is convenient to replace and maintain; the reinforcing ribs are arranged at the top of the epitaxial wafer box 1, and a plurality of reinforcing ribs are arranged; according to the invention, the epitaxial wafer box 1 is prevented from deforming by arranging the reinforcing ribs.
The epitaxial wafer box also comprises two handles which are symmetrically arranged at two sides of the epitaxial wafer box 1; the invention facilitates the movement of the epitaxial wafer box 1 by arranging the handle.
A door frame 19 is arranged at the opening of the epitaxial wafer box 1, the inner wall of which is provided with a flange.
And the sealing door plate 2 is arranged in the door frame 19 and is in sealing fit with the door frame 19.
The door lock mechanisms 20 are arranged in two groups in a linear array, and are arranged on the sealing door plate 2; the present invention locks the sealing door 2 and the epitaxial wafer cassette 1 into one body by the door lock mechanism 20.
A linkage mechanism 21 interposed between the two sets of door lock mechanisms 20 for linkage of the two sets of door lock mechanisms 20; the present invention provides a link mechanism 21, and two sets of door lock mechanisms 20 are simultaneously opened and closed by the link mechanism 21.
Further, specifically, the door lock mechanism 20 includes two locking openings 2001 symmetrically formed in the door frame 19; the locking plate 2002 is arranged on the sealing door plate 2, can be matched with the locking opening 2001 for locking, and is in up-and-down limiting sliding connection with the sealing door plate 2; a turntable 2003 rotatably connected to the sealing door panel 2 through a rotation shaft; the number of the arc-shaped grooves 2004 is two, and the two arc-shaped grooves 2004 are arranged on the turntable 2003 in a circumferential array; a fixed post 2005 disposed within the arcuate slot 2004. According to the invention, through the mutual matching among the locking notch 2001, the locking plate 2002, the turntable 2003, the arc-shaped groove 2004, the fixed column 2005 and the like, the turntable 2003 rotates, and the fixed column 2005 slides along the length direction of the locking plate 2002 under the action of the arc-shaped groove 2004, so that locking and unlocking are realized.
Further, specifically, the linkage mechanism 21 includes a first gear 2101 rotatably connected to the sealing door panel 2; the invention rotates the first gear 2101, the first gear 2101 rotates to drive the second gear 2102 to rotate, the second gear 2102 rotates to drive the first gear 2101 to rotate, the first gear 2101 rotates to drive the turntable 2003 to rotate, the turntable 2003 rotates, and the fixed post 2005 slides along the length direction of the locking plate 2002 under the action of the arc groove 2004, so that linkage locking or unlocking is finally realized.
When an epitaxial wafer is placed on the epitaxial wafer box 1, the first elastic part 301 is arranged, and when the mechanical arm drives the epitaxial wafer to move and places the epitaxial wafer in the epitaxial wafer box 1, if the mechanical arm is in false touch with other first supporting pieces 3 due to the problem of identification precision or other faults, the first elastic part 301 is an elastic part, so that only the first supporting pieces 3 which are in false touch are rocked, and therefore one of the first supporting pieces 3 is not in false touch as in the prior art, and all the first supporting pieces 3 in the whole epitaxial wafer box 1 are rocked.
After the epitaxial wafer is placed, the sealing door plate 2 is covered at the opening of the epitaxial wafer box 1, and the door lock mechanism 20 and the epitaxial wafer box 1 are locked through the linkage mechanism 21, so that the sealing door plate 2 and the epitaxial wafer box 1 are sealed.
Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present invention.

Claims (10)

1.具有保护功能的外延片载具，包括侧部带有开口的外延片盒（1），其特征在于，还包括：密封门板（2），其密封覆盖于外延片盒（1）开口处；1. An epitaxial wafer carrier with a protective function, comprising an epitaxial wafer box (1) with an opening on the side, characterized in that it also comprises: a sealing door plate (2) which seals and covers the opening of the epitaxial wafer box (1); 多个阵列设置的第一承托件（3），其设置于外延片盒（1）侧壁，其用于对外延片承托支撑；A plurality of first supporting members (3) arranged in an array, which are arranged on the side wall of the epitaxial wafer box (1) and are used to support the epitaxial wafer; 限位架（4），其活动置于所述第一承托件（3）与外延片盒（1）之间，其能够在所述第一承托件（3）与外延片盒（1）之间滑动，能够对所述第一承托件（3）进行限位；a limiting frame (4), which is movably disposed between the first supporting member (3) and the epitaxial wafer box (1), and is capable of sliding between the first supporting member (3) and the epitaxial wafer box (1), and is capable of limiting the position of the first supporting member (3); 滑杆（11），其设置于所述限位架（4）上，且贯穿所述外延片盒（1）与外延片盒（1）密封滑动连接；A sliding rod (11), which is arranged on the limiting frame (4) and passes through the epitaxial wafer box (1) and is sealed and slidably connected to the epitaxial wafer box (1); 锥形锁套（5），其套设于所述滑杆（11）位于外延片盒（1）外的一端，且通过固定件（6）与外延片盒（1）侧壁连接；A conical locking sleeve (5), which is sleeved on one end of the slide bar (11) located outside the epitaxial wafer box (1) and is connected to the side wall of the epitaxial wafer box (1) via a fixing member (6); 锁止件（7），其套设于所述锥形锁套（5）外，按压所述锁止件（7），其能与所述锥形锁套（5）锁止为一体；A locking member (7) is sleeved outside the conical locking sleeve (5), and when the locking member (7) is pressed, it can be locked together with the conical locking sleeve (5); 卡接套（8），其位于所述锁止件（7）远离锥形锁套（5）的一侧，其能与所述锁止件（7）卡接配合，其通过所述第一弹性件（9）与外延片盒（1）连接，其还通过弹性层（10）与外延片盒（1）连接，当所述锁止件（7）与卡接套（8）卡接，且所述锁止件（7）与锥形锁套（5）锁止为一体时，在所述第一弹性件（9）弹力作用下，能使所述卡接套（8）与锁止件（7）分离。A snap-fit sleeve (8) is located on a side of the locking member (7) away from the conical locking sleeve (5), and can be snap-fitted with the locking member (7). The snap-fit sleeve (8) is connected to the epitaxial wafer box (1) via the first elastic member (9), and is also connected to the epitaxial wafer box (1) via the elastic layer (10). When the locking member (7) and the snap-fit sleeve (8) are snap-fitted, and the locking member (7) and the conical locking sleeve (5) are locked as a whole, the snap-fit sleeve (8) can be separated from the locking member (7) under the elastic force of the first elastic member (9). 2.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，2. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: 所述第一承托件（3）包括与所述外延片盒（1）侧壁连接的第一弹性部（301）；The first supporting member (3) comprises a first elastic portion (301) connected to a side wall of the epitaxial wafer box (1); 第一承托部（302），其设置于所述第一弹性部（301）背离外延片盒（1）一侧。A first supporting portion (302) is arranged on a side of the first elastic portion (301) facing away from the epitaxial wafer box (1). 3.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，3. The epitaxial wafer carrier with protection function according to claim 1, characterized in that: 所述限位架（4）包括两个对称设置的竖直杆（401）；The limiting frame (4) comprises two symmetrically arranged vertical rods (401); 连接杆（402），其用于将两个所述竖直杆（401）连接，其中部周侧壁与滑杆（11）连接。A connecting rod (402) is used to connect the two vertical rods (401), wherein the peripheral side wall thereof is connected to the sliding rod (11). 4.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，所述锁止件（7）包括与所述卡接套（8）卡接配合的圆环部（701）；4. The epitaxial wafer carrier with protective function according to claim 1, characterized in that the locking member (7) comprises a circular ring portion (701) engaged with the clamping sleeve (8); 第二弹性部（702），其设置于所述圆环部（701）靠近锥形锁套（5）的一端，其数量为两个，且呈对称设置，其所述第二弹性部（702）与锥形锁套（5）母线相平行；A second elastic portion (702) is arranged at one end of the annular portion (701) close to the conical locking sleeve (5), and there are two of them, which are symmetrically arranged, and the second elastic portion (702) is parallel to the generatrix of the conical locking sleeve (5); 倒钩（703），其置于所述第二弹性部（702）远离圆环部（701）的一端，其与所述锥形锁套（5）锁止配合，使所述锁止件（7）与锥形锁套（5）锁止为一体。The barb (703) is disposed at one end of the second elastic portion (702) away from the annular portion (701), and is locked with the conical locking sleeve (5) so that the locking member (7) and the conical locking sleeve (5) are locked as a whole. 5.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，还包括基座（12），其可拆卸连接于所述外延片盒（1）底部；5. The epitaxial wafer carrier with protective function according to claim 1, characterized in that it also comprises a base (12) which is detachably connected to the bottom of the epitaxial wafer box (1); 通孔，其开设于所述基座（12）上，其数量至少为四个；through holes, which are opened on the base (12), and the number of through holes is at least four; 顶柱（13），其置于所述外延片盒（1）底部；A top column (13) placed at the bottom of the epitaxial wafer box (1); 外螺纹管（14），其置于通孔内且与外延片盒（1）内腔相连通，一部分所述外螺纹管（14）内设有排气阀门（16），剩余部分所述外螺纹管（14）内设有保护气体进气阀（17）；An externally threaded tube (14) is placed in the through hole and communicates with the inner cavity of the epitaxial wafer box (1), a portion of the externally threaded tube (14) is provided with an exhaust valve (16), and a remaining portion of the externally threaded tube (14) is provided with a protective gas inlet valve (17); 螺纹套（15），其置于所述通孔内且与通孔转动连接，其与所述外螺纹管（14）螺纹配合连接。A threaded sleeve (15) is disposed in the through hole and rotatably connected to the through hole, and is threadably connected to the externally threaded tube (14). 6.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，还包括天车对接头（18），其设置于外延片盒（1）顶部，且与外延片盒（1）可拆卸连接，其用于与搬运天车进行对接；6. The epitaxial wafer carrier with protective function according to claim 1, characterized in that it also comprises a crane docking head (18), which is arranged on the top of the epitaxial wafer box (1) and is detachably connected to the epitaxial wafer box (1), and is used for docking with the transport crane; 加强筋，其置于所述外延片盒（1）顶部设有，其数量有多个。A reinforcing rib is disposed on the top of the epitaxial wafer box (1), and there are a plurality of reinforcing ribs. 7.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，还包括两个把手，其对称设置于外延片盒（1）两侧。7. The epitaxial wafer carrier with protective function according to claim 1, characterized in that it also comprises two handles which are symmetrically arranged on both sides of the epitaxial wafer box (1). 8.根据权利要求1所述的具有保护功能的外延片载具，其特征在于，所述外延片盒（1）开口处设有门框（19），其内壁设有凸缘；8. The epitaxial wafer carrier with protective function according to claim 1, characterized in that a door frame (19) is provided at the opening of the epitaxial wafer box (1), and a flange is provided on the inner wall thereof; 密封门板（2），其置于门框（19）内且与门框（19）密封配合；A sealed door panel (2) is placed in the door frame (19) and is in sealing cooperation with the door frame (19); 门锁机构（20），其数量为两组且呈线性阵列设置，其置于所述密封门板（2）上；Door lock mechanisms (20), which are in two groups and arranged in a linear array and are placed on the sealed door panel (2); 联动机构（21），其置于两组所述门锁机构（20）之间，用于两组所述门锁机构（20）联动。A linkage mechanism (21) is disposed between the two sets of door lock mechanisms (20) and is used for linkage of the two sets of door lock mechanisms (20). 9.根据权利要求8所述的具有保护功能的外延片载具，其特征在于，所述门锁机构（20）包括两个呈对称开设在门框（19）上的锁口（2001）；9. The epitaxial wafer carrier with protective function according to claim 8, characterized in that the door lock mechanism (20) comprises two lock openings (2001) symmetrically opened on the door frame (19); 锁板（2002），其置于所述密封门板（2）上，其能与锁口（2001）配合锁止，其与密封门板（2）上下限位滑动连接；A lock plate (2002) is placed on the sealing door plate (2), which can cooperate with the lock port (2001) for locking, and is slidably connected to the sealing door plate (2) in an upper and lower limit position; 转盘（2003），其通过转轴转动连接于密封门板（2）上；A rotating disk (2003) is rotatably connected to the sealing door panel (2) via a rotating shaft; 弧形槽（2004），其数量为两个，两个所述弧形槽（2004）呈圆周阵列开设在转盘（2003）上；There are two arc-shaped grooves (2004), and the two arc-shaped grooves (2004) are arranged in a circular array on the rotating disk (2003); 固定柱（2005），其置弧形槽（2004）内。The fixed column (2005) is placed in the arc-shaped groove (2004). 10.根据权利要求9所述的具有保护功能的外延片载具，其特征在于，10. The epitaxial wafer carrier with protection function according to claim 9, characterized in that: 所述联动机构（21）包括与密封门板（2）转动连接的第一齿轮（2101）；The linkage mechanism (21) comprises a first gear (2101) rotatably connected to the sealing door panel (2); 第二齿轮（2102），其数量为两个，其与所述第一齿轮（2101）啮合且与转盘（2003）同轴心连接。The second gears (2102), two in number, are meshed with the first gears (2101) and are coaxially connected to the rotating disk (2003).
CN202411150689.6A 2024-08-21 2024-08-21 Epitaxial wafer carrier with protection function Active CN118651526B (en)

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