CN118624090A - A multifunctional finger air pressure tester - Google Patents
A multifunctional finger air pressure tester Download PDFInfo
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- CN118624090A CN118624090A CN202410935255.0A CN202410935255A CN118624090A CN 118624090 A CN118624090 A CN 118624090A CN 202410935255 A CN202410935255 A CN 202410935255A CN 118624090 A CN118624090 A CN 118624090A
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- 238000003825 pressing Methods 0.000 description 2
- 230000008685 targeting Effects 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
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- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
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Abstract
本发明涉及手指气压检测技术领域，尤其涉及一种多功能手指气压检具；包括底板，所述底板上放置有待检测手指，所述待检测手指的宽度方向上设有水平调节结构，所述待检测手指的长度方向上设有竖直调节结构，所述底板上对应待检测手指气孔的位置开设有至少一个盲孔，所述待检测手指的上方设有盖板，所述盖板的下端内嵌有压块，所述压块对应待检测手指气孔的位置开设有导气通孔，所述盖板的侧面开设有与导气通孔相适配的气道。本发明提供的一种多功能手指气压检具，不仅能够将手指气压检测功能从机械手整体设备中脱离出来，还能够实现对多规格尺寸的手指进行气压检测，适用范围较广，结构简单，操作方便，灵活性高。
The present invention relates to the field of finger air pressure detection technology, and in particular to a multifunctional finger air pressure gauge; comprising a base plate, a finger to be detected is placed on the base plate, a horizontal adjustment structure is provided in the width direction of the finger to be detected, a vertical adjustment structure is provided in the length direction of the finger to be detected, at least one blind hole is provided on the base plate corresponding to the air hole of the finger to be detected, a cover plate is provided above the finger to be detected, a pressure block is embedded in the lower end of the cover plate, an air guide hole is provided in the pressure block corresponding to the air hole of the finger to be detected, and an air duct adapted to the air guide hole is provided on the side of the cover plate. The multifunctional finger air pressure gauge provided by the present invention can not only separate the finger air pressure detection function from the overall manipulator equipment, but also realize air pressure detection of fingers of multiple specifications and sizes, with a wide range of applications, simple structure, convenient operation and high flexibility.
Description
技术领域Technical Field
本发明涉及手指气压检测技术领域，尤其涉及一种多功能手指气压检具。The invention relates to the technical field of finger air pressure detection, and in particular to a multifunctional finger air pressure detection tool.
背景技术Background Art
在半导体制程中，涉及多道工序，每道工序都是由一定的设备和工艺来完成的。晶圆搬运机器人能将晶圆由设备外部传入设备腔内加工处理的设备。典型的圆搬运机器人将晶圆(WAFER)逐片传入处理腔内，并取回已加工过的晶圆。In the semiconductor manufacturing process, there are multiple processes involved, and each process is completed by certain equipment and processes. The wafer handling robot can transfer wafers from the outside of the equipment to the equipment chamber for processing. A typical wafer handling robot transfers wafers (WAFER) into the processing chamber one by one and retrieves the processed wafers.
目前，通常采用搭载在机械手上的手指检测功能对手指进行气压检测，而由于实际工况不同，因此采用的手指也多种多样，若采用上述检测方法，则需要采用不同机械手设备对不同的手指进行气压检测，适用范围较窄，针对性较强，灵活性较差。At present, the finger detection function mounted on the robot is usually used to detect the air pressure of the finger. Due to different actual working conditions, the fingers used are also various. If the above detection method is adopted, different robot equipment is required to perform air pressure detection on different fingers. The scope of application is narrow, the targeting is strong, and the flexibility is poor.
为此，本发明提供了一种多功能手指气压检具。To this end, the present invention provides a multifunctional finger air pressure testing tool.
发明内容Summary of the invention
基于此，有必要针对上述技术问题，提供一种多功能手指气压检具。Based on this, it is necessary to provide a multifunctional finger air pressure gauge to address the above technical issues.
为了实现上述目的，本发明的技术方案如下：In order to achieve the above object, the technical solution of the present invention is as follows:
一种多功能手指气压检具，包括底板，所述底板上放置有待检测手指，所述待检测手指的宽度方向上设有用于限制待检测手指左右移动的水平调节结构，所述水平调节结构与底板之间可拆卸连接，所述待检测手指的长度方向上设有用于待检测手指前后移动的竖直调节结构，所述竖直调节结构与底板之间可拆卸连接，所述底板上对应待检测手指气孔的位置开设有至少一个盲孔，所述待检测手指的上方设有盖板，所述盖板的下端设有与水平调节结构、竖直调节结构相适配的防移动结构，所述盖板的下端内嵌有压块，所述压块对应待检测手指气孔的位置开设有导气通孔，所述盖板的侧面开设有与导气通孔相适配的气道，所述气道的输入端处可拆卸连接有气管连接头。A multifunctional finger air pressure gauge comprises a base plate, a finger to be detected is placed on the base plate, a horizontal adjustment structure for limiting the left and right movement of the finger to be detected is provided in the width direction of the finger to be detected, the horizontal adjustment structure is detachably connected to the base plate, a vertical adjustment structure for moving the finger to be detected forward and backward is provided in the length direction of the finger to be detected, the vertical adjustment structure is detachably connected to the base plate, at least one blind hole is provided at a position corresponding to an air hole of the finger to be detected on the base plate, a cover plate is provided above the finger to be detected, an anti-movement structure compatible with the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate, a pressure block is embedded in the lower end of the cover plate, an air guide hole is provided in the pressure block corresponding to the position of the air hole of the finger to be detected, an air duct compatible with the air guide hole is provided on the side of the cover plate, and an air pipe connector is detachably connected to the input end of the air duct.
具体的，所述水平调节结构包括第一水平伸缩板和第二水平伸缩板，所述第一水平伸缩板和第二水平伸缩板对称布设于待检测手指的左右两侧，所述第一水平伸缩板和第二水平伸缩板均为L型结构，所述第一水平伸缩板和第二水平伸缩板的水平段均开设有第一调节腰槽，所述底板上对应第一调节腰槽的位置开设有第一内螺纹孔。Specifically, the horizontal adjustment structure includes a first horizontal telescopic plate and a second horizontal telescopic plate, which are symmetrically arranged on the left and right sides of the finger to be detected, and the first horizontal telescopic plate and the second horizontal telescopic plate are both L-shaped structures. The horizontal sections of the first horizontal telescopic plate and the second horizontal telescopic plate are both provided with a first adjustment waist groove, and a first internal threaded hole is provided on the bottom plate at a position corresponding to the first adjustment waist groove.
具体的，所述竖直调节结构为竖直伸缩板，所述竖直伸缩板布设于待检测手指的后端，且竖直伸缩板设置于第一水平伸缩板和第二水平伸缩板之间，所述竖直伸缩板为L型结构，所述竖直伸缩板的水平段开设有第二调节腰槽，所述底板上对应第二调节腰槽的位置开设有第二内螺纹孔。Specifically, the vertical adjustment structure is a vertical telescopic plate, which is arranged at the rear end of the finger to be detected, and the vertical telescopic plate is arranged between the first horizontal telescopic plate and the second horizontal telescopic plate. The vertical telescopic plate is an L-shaped structure, and the horizontal section of the vertical telescopic plate is provided with a second adjustment waist groove, and a second internal threaded hole is provided on the bottom plate at a position corresponding to the second adjustment waist groove.
具体的，所述盖板的下端对应第一水平伸缩板、第二水平伸缩板和竖直伸缩板的位置开设有沟槽，用于盖板的前后左右移动，所述防移动结构为卡槽，所述第一水平伸缩板和第二水平伸缩板上对应卡槽的位置均设有相适配的凸起结构，用于盖板移动至合适安装位置后，限制盖板移动。Specifically, grooves are provided at the lower end of the cover plate corresponding to the positions of the first horizontal telescopic plate, the second horizontal telescopic plate and the vertical telescopic plate, which are used for the front, back, left and right movement of the cover plate. The anti-movement structure is a card slot, and the positions corresponding to the card slots on the first horizontal telescopic plate and the second horizontal telescopic plate are provided with matching protruding structures, which are used to limit the movement of the cover plate after the cover plate is moved to a suitable installation position.
具体的，所述盖板的顶部还开设有用于安装把手的内置螺纹孔。Specifically, a built-in threaded hole for installing a handle is also provided on the top of the cover plate.
具体的，所述底板的底面四角位置还设有可调节地脚。Specifically, adjustable feet are provided at the four corners of the bottom surface of the base plate.
本发明的优点及有益效果在于：The advantages and beneficial effects of the present invention are:
本发明提供的一种多功能手指气压检具，不仅能够将手指气压检测功能从机械手整体设备中脱离出来，还能够实现对多规格尺寸的手指进行气压检测，适用范围较广，结构简单，操作方便，灵活性高。The multifunctional finger air pressure gauge provided by the present invention can not only separate the finger air pressure detection function from the overall manipulator equipment, but also realize air pressure detection on fingers of various specifications and sizes. It has a wide range of applications, a simple structure, easy operation and high flexibility.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明实施例中一种多功能手指气压检具的结构示意图；FIG1 is a schematic structural diagram of a multifunctional finger air pressure tester according to an embodiment of the present invention;
图2为本发明实施例中底板的俯视图；FIG2 is a top view of a bottom plate in an embodiment of the present invention;
图3为本发明实施例中第一水平伸缩板的结构示意图；FIG3 is a schematic diagram of the structure of a first horizontal telescopic plate in an embodiment of the present invention;
图4为本发明实施例中竖直伸缩板的结构示意图；FIG4 is a schematic diagram of the structure of a vertical telescopic plate in an embodiment of the present invention;
图5为本发明实施例中盖板的仰视图；FIG5 is a bottom view of the cover plate in an embodiment of the present invention;
图6为本发明实施例中底板上装配待检测手指的结构示意图。FIG. 6 is a schematic diagram of the structure of assembling a finger to be detected on a bottom plate in an embodiment of the present invention.
附图标记：底板1、可调节地脚2、待检测手指3、第一水平伸缩板4、第二水平伸缩板5、竖直伸缩板6、气管连接头7、盖板8、把手9、第一内螺纹孔10、盲孔11、第二内螺纹孔12、第一调节腰槽13、凸起结构14、第二调节腰槽15、沟槽16、卡槽17、压块18、导气通孔19、气孔20。Figure numerals: base plate 1, adjustable foot 2, finger to be detected 3, first horizontal telescopic plate 4, second horizontal telescopic plate 5, vertical telescopic plate 6, trachea connector 7, cover plate 8, handle 9, first internal threaded hole 10, blind hole 11, second internal threaded hole 12, first adjustment waist groove 13, protruding structure 14, second adjustment waist groove 15, groove 16, slot 17, pressure block 18, air guide hole 19, air hole 20.
具体实施方式DETAILED DESCRIPTION
为了使本发明的目的、技术方案及优点更加清楚明白，下面通过具体实施方式结合附图对本发明做进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，并不用于限定本发明。In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below through specific implementation methods in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.
为了解决现有通常采用搭载在机械手上的手指检测功能对手指进行气压检测情况，存在的需要采用不同机械手设备对相应手指进行气压检测、灵活性较差、适用范围较窄以及针对性较强的缺陷，本申请提供了一种多功能手指气压检具，该检具能够实现单独使用，解决了将手指气压检测功能从机械手整体设备中脱离出来的技术问题，同时该检具还适用于多规格尺寸的手指进行气压检测，结构简单，操作方便，实用性高。In order to solve the problem that the existing finger pressure detection function mounted on the manipulator is usually used to detect the air pressure of the finger, the defects of needing to use different manipulator equipment to detect the air pressure of the corresponding finger, poor flexibility, narrow scope of application and strong targeting, the present application provides a multifunctional finger air pressure gauge, which can be used alone, solves the technical problem of separating the finger air pressure detection function from the overall manipulator equipment, and at the same time, the gauge is also suitable for air pressure detection of fingers of various specifications and sizes, with a simple structure, easy operation and high practicality.
参考附图1-5所示，该多功能手指气压检具主要由底板1、水平调节结构、竖直调节结构、盖板8、压块18和可调节地脚2等结构组成。1-5 , the multifunctional finger air pressure gauge is mainly composed of a base plate 1 , a horizontal adjustment structure, a vertical adjustment structure, a cover plate 8 , a pressure block 18 and an adjustable foot 2 .
在其中一个实施例中，底板1上放置有待检测手指3，在待检测手指3的宽度延伸方向上设有用于限制待检测手指3左右移动的水平调节结构，水平调节结构与底板1之间可拆卸连接，其中，参考附图3和附图6，水平调节结构包括第一水平伸缩板4和第二水平伸缩板5，第一水平伸缩板4和第二水平伸缩板5对称布设于待检测手指3的左右两侧，第一水平伸缩板4和第二水平伸缩板5均为L型结构，第一水平伸缩板4和第二水平伸缩板5的水平段均开设有第一调节腰槽13，底板1上对应第一调节腰槽13的位置开设有第一内螺纹孔10；第一水平伸缩板4和第二水平伸缩板5之间的距离取决于待检测手指3的宽度，在第一水平伸缩板4和第二水平伸缩板5的水平段均开设第一调节腰槽13，利用螺栓穿过第一调节腰槽13并螺纹连接在第一内螺纹孔10内，以便将第一水平伸缩板4和第二水平伸缩板5固定在底板1上，起到限制待检测手指3左右移动的目的，同时，在本实施例中，在第一水平伸缩板4和第二水平伸缩板5的第一调节腰槽13数量均为两个，两个第一调节腰槽13平行且并列设置，可有效提高第一水平伸缩板4和第二水平伸缩板5的安装稳定性。In one of the embodiments, a finger 3 to be detected is placed on the base plate 1, and a horizontal adjustment structure for limiting the left and right movement of the finger 3 to be detected is provided in the width extension direction of the finger 3 to be detected, and the horizontal adjustment structure is detachably connected to the base plate 1, wherein, referring to Figures 3 and 6, the horizontal adjustment structure includes a first horizontal telescopic plate 4 and a second horizontal telescopic plate 5, and the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 are symmetrically arranged on the left and right sides of the finger 3 to be detected, and the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 are both L-shaped structures, and the horizontal sections of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 are both provided with a first adjustment waist groove 13, and a first internal threaded hole is provided at a position corresponding to the first adjustment waist groove 13 on the base plate 1. 10; The distance between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 depends on the width of the finger to be detected 3. The first adjusting waist groove 13 is opened in the horizontal section of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5. Bolts are passed through the first adjusting waist groove 13 and threadedly connected in the first internal threaded hole 10 so as to fix the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 on the base plate 1, so as to limit the left and right movement of the finger to be detected 3. At the same time, in this embodiment, there are two first adjusting waist grooves 13 in the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5, and the two first adjusting waist grooves 13 are arranged in parallel and side by side, which can effectively improve the installation stability of the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5.
在其中一个实施例中，在待检测手指3的长度方向上设有用于待检测手指3前后移动的竖直调节结构，竖直调节结构与底板1之间可拆卸连接，其中，参考附图4和附图6，竖直调节结构为竖直伸缩板6，竖直伸缩板6布设于待检测手指3的后端，且竖直伸缩板6设置于第一水平伸缩板4和第二水平伸缩板5之间，竖直伸缩板6为L型结构，竖直伸缩板6的水平段开设有第二调节腰槽15，底板1上对应第二调节腰槽15的位置开设有第二内螺纹孔12；在第一水平伸缩板4和第二水平伸缩板5之间布设用于抵住待检测手指3后端的竖直伸缩板6，利用第一水平伸缩板4、第二水平伸缩板5和竖直伸缩板6三者的协同作用，能够实现对待检测手指3前后移动的限制，同时，在竖直伸缩板6的水平段开设第二调节腰槽15，利用螺栓穿过第二调节腰槽15并螺纹连接在第二内螺纹孔12内，以便将竖直伸缩板6固定在底板1上，并且竖直伸缩板6的调节位置取决于待检测手指3气孔20的长度，同时，在本实施例中，在竖直伸缩板6的第二调节腰槽15数量为两个，两个第二调节腰槽15平行且并列设置，可有效提高竖直伸缩板6的安装稳定性。In one of the embodiments, a vertical adjustment structure for moving the finger 3 to be detected forward and backward is provided in the length direction of the finger 3 to be detected, and the vertical adjustment structure is detachably connected to the bottom plate 1, wherein, referring to Figures 4 and 6, the vertical adjustment structure is a vertical telescopic plate 6, the vertical telescopic plate 6 is arranged at the rear end of the finger 3 to be detected, and the vertical telescopic plate 6 is arranged between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5, the vertical telescopic plate 6 is an L-shaped structure, the horizontal section of the vertical telescopic plate 6 is provided with a second adjustment waist groove 15, and a second internal threaded hole 12 is provided at a position corresponding to the second adjustment waist groove 15 on the bottom plate 1; a vertical adjustment plate 15 for supporting the finger to be detected is arranged between the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 The vertical telescopic plate 6 at the rear end of 3 can limit the forward and backward movement of the finger 3 to be detected by the synergistic effect of the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6. At the same time, a second adjustment waist groove 15 is opened in the horizontal section of the vertical telescopic plate 6, and a bolt is passed through the second adjustment waist groove 15 and threadedly connected in the second internal threaded hole 12, so as to fix the vertical telescopic plate 6 on the bottom plate 1, and the adjustment position of the vertical telescopic plate 6 depends on the length of the air hole 20 of the finger 3 to be detected. At the same time, in this embodiment, there are two second adjustment waist grooves 15 in the vertical telescopic plate 6, and the two second adjustment waist grooves 15 are arranged in parallel, which can effectively improve the installation stability of the vertical telescopic plate 6.
在其中一个实施例中，底板1上对应待检测手指3气孔20的位置开设有至少一个盲孔11，其中，参考附图2，盲孔11的数量为3个，盲孔11的大小、深度可根据待检测手指3气孔20大小进行设计，同时，本申请涉及的底板1可适用于单气孔手指，双气孔手指及三气孔手指的调节。In one of the embodiments, at least one blind hole 11 is provided on the base plate 1 at a position corresponding to the air hole 20 of the finger 3 to be detected, wherein, referring to FIG. 2 , the number of the blind holes 11 is 3, and the size and depth of the blind holes 11 can be designed according to the size of the air hole 20 of the finger 3 to be detected. At the same time, the base plate 1 involved in the present application can be suitable for the adjustment of single-hole fingers, double-hole fingers and triple-hole fingers.
在其中一个实施例中，参考附图5，待检测手指3的上方设有盖板8，盖板8的下端设有与水平调节结构、竖直调节结构相适配的防移动结构，盖板8的下端内嵌有压块18，压块18对应待检测手指3气孔20的位置开设有导气通孔19，盖板8的侧面开设有与导气通孔19相适配的气道，气道的输入端处可拆卸连接有气管连接头7；其中，盖板8的下端对应第一水平伸缩板4、第二水平伸缩板5和竖直伸缩板6的位置开设有沟槽16，用于盖板8的前后左右移动，防移动结构为卡槽17，第一水平伸缩板4和第二水平伸缩板5上对应卡槽17的位置均设有相适配的凸起结构14，用于盖板8移动至合适安装位置后，限制盖板8移动；盖板8的顶部还开设有用于安装把手9的内置螺纹孔；在盖板8上端设置内置螺纹孔可搭载把手9，便于安装把手9，起到方便拿取盖板8的作用，在盖板8的下端设置有与水平调节结构、竖直调节结构相对应的沟槽16，以便实现盖板8的前后左右移动，当盖板8移动至合适安装位置后，由于在盖板8下端设有的防移动结构（卡槽17），能够与第一水平伸缩板4和第二水平伸缩板5上相应凸起结构14相配合，能够防止盖板8移动。In one of the embodiments, referring to FIG. 5, a cover plate 8 is provided above the finger 3 to be detected, and an anti-movement structure compatible with the horizontal adjustment structure and the vertical adjustment structure is provided at the lower end of the cover plate 8. A pressure block 18 is embedded in the lower end of the cover plate 8, and an air guide hole 19 is provided at the position of the pressure block 18 corresponding to the air hole 20 of the finger 3 to be detected. An air duct compatible with the air guide hole 19 is provided on the side of the cover plate 8, and an air pipe connector 7 is detachably connected to the input end of the air duct; wherein, a groove 16 is provided at the lower end of the cover plate 8 corresponding to the position of the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6, which is used for the front, back, left and right movement of the cover plate 8, and the anti-movement structure is a card slot 17, and the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 correspond to The positions of the card slots 17 are all provided with corresponding protruding structures 14, which are used to limit the movement of the cover plate 8 after the cover plate 8 is moved to a suitable installation position; the top of the cover plate 8 is also provided with a built-in threaded hole for installing the handle 9; the built-in threaded hole is provided at the upper end of the cover plate 8 to carry the handle 9, which is convenient for installing the handle 9 and plays a role in facilitating the taking of the cover plate 8, and the lower end of the cover plate 8 is provided with grooves 16 corresponding to the horizontal adjustment structure and the vertical adjustment structure to realize the front, back, left and right movement of the cover plate 8. When the cover plate 8 is moved to a suitable installation position, the anti-movement structure (card slot 17) provided at the lower end of the cover plate 8 can cooperate with the corresponding protruding structures 14 on the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 to prevent the cover plate 8 from moving.
在其中一个实施例中，在盖板8的下端内嵌有压块18，该压块18可根据待检测手指3的规格尺寸替换使用对应规格尺寸的压块18，参考附图1，该图纸上的待检测手指3为单气孔手指，由于压块18上设置导气通孔19，与盖板8相连通，能够实现导气的目的。In one of the embodiments, a pressure block 18 is embedded in the lower end of the cover plate 8. The pressure block 18 can be replaced with a pressure block 18 of corresponding specifications and dimensions according to the specifications and dimensions of the finger 3 to be detected. Referring to Figure 1, the finger 3 to be detected in the drawing is a single-hole finger. Since an air guide hole 19 is provided on the pressure block 18 and is connected to the cover plate 8, the purpose of air conduction can be achieved.
在其中一个实施例中，底板1的底面四角位置还设有可调节地脚2，利用可调节地脚2，可根据实际需要调整底板1的使用高度，灵活性强。In one of the embodiments, adjustable feet 2 are provided at the four corners of the bottom surface of the base plate 1. By using the adjustable feet 2, the use height of the base plate 1 can be adjusted according to actual needs, which has high flexibility.
在其中一个实施例中，本发明的多功能手指气压检具，在使用前，首先根据实际待检测手指3的规格，选择与之匹配的压块18，并将压块18安装在盖板8的下端，随后根据实际待检测手指3的尺寸，分别将第一水平伸缩板4、第二水平伸缩板5和竖直伸缩板6装配在底板1上，能够实现对待检测手指3的限位固定，随后将盖板8扣合在待检测手指3上，前后左右移动盖板8，直至盖板8下的卡槽17与第一水平伸缩板4和第二水平伸缩板5上相应凸起结构14相配合，以防止盖板8移动；在检测气压过程中，在气管连接头7处外接气压表工装以及气源，以达到通气的目的，同时，在待检测手指3上需要放置晶圆堵住气孔20，压板的导气通孔19对准待检测手指3气孔20，通过压块18以及盖板8的整体结构自身重量压紧待检测手指3气孔20，以达到密封效果。In one embodiment, the multifunctional finger air pressure gauge of the present invention, before use, firstly selects a matching pressing block 18 according to the specifications of the actual finger 3 to be detected, and installs the pressing block 18 at the lower end of the cover plate 8, and then assembles the first horizontal telescopic plate 4, the second horizontal telescopic plate 5 and the vertical telescopic plate 6 on the bottom plate 1 according to the size of the actual finger 3 to be detected, so as to achieve the limit fixation of the finger 3 to be detected, and then buckles the cover plate 8 on the finger 3 to be detected, and moves the cover plate 8 forward, backward, left and right until the cover plate The card slot 17 under 8 cooperates with the corresponding protruding structure 14 on the first horizontal telescopic plate 4 and the second horizontal telescopic plate 5 to prevent the cover plate 8 from moving; in the process of detecting the air pressure, an external pressure gauge tooling and an air source are connected to the air pipe connector 7 to achieve the purpose of ventilation. At the same time, a wafer needs to be placed on the finger to be detected 3 to block the air hole 20, and the air guide hole 19 of the pressure plate is aligned with the air hole 20 of the finger to be detected 3, and the air hole 20 of the finger to be detected is pressed by the pressure block 18 and the overall structure of the cover plate 8 The weight of the self-weight of the self-weight of the cover plate to achieve a sealing effect.
以上内容是结合具体的实施方式对本发明所做的进一步详细说明，不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本发明的保护范围。The above contents are further detailed descriptions of the present invention in combination with specific implementation methods, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111595869A (en) * | 2020-05-22 | 2020-08-28 | 格力电器（石家庄）有限公司 | A kind of air conditioning component detection auxiliary positioning device and detection equipment |
| CN112345174A (en) * | 2020-10-30 | 2021-02-09 | 歌尔微电子有限公司 | Air tightness detection device and method |
| CN215726590U (en) * | 2021-09-24 | 2022-02-01 | 佰电科技(苏州)有限公司 | Air tightness detection jig |
| CN217132462U (en) * | 2021-12-31 | 2022-08-05 | 强龙科技（苏州）有限公司 | Quick airtight detection tool |
| CN217466119U (en) * | 2022-06-23 | 2022-09-20 | 东莞悦达机电科技有限公司 | Airtightness detection jig |
| CN217637852U (en) * | 2022-05-25 | 2022-10-21 | 珠海市美宸电子科技有限公司 | Air tightness detection jig |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111595869A (en) * | 2020-05-22 | 2020-08-28 | 格力电器（石家庄）有限公司 | A kind of air conditioning component detection auxiliary positioning device and detection equipment |
| CN112345174A (en) * | 2020-10-30 | 2021-02-09 | 歌尔微电子有限公司 | Air tightness detection device and method |
| CN215726590U (en) * | 2021-09-24 | 2022-02-01 | 佰电科技(苏州)有限公司 | Air tightness detection jig |
| CN217132462U (en) * | 2021-12-31 | 2022-08-05 | 强龙科技（苏州）有限公司 | Quick airtight detection tool |
| CN217637852U (en) * | 2022-05-25 | 2022-10-21 | 珠海市美宸电子科技有限公司 | Air tightness detection jig |
| CN217466119U (en) * | 2022-06-23 | 2022-09-20 | 东莞悦达机电科技有限公司 | Airtightness detection jig |
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