CN118451317A - 光学装置及检查方法 - Google Patents
光学装置及检查方法 Download PDFInfo
- Publication number
- CN118451317A CN118451317A CN202180105283.4A CN202180105283A CN118451317A CN 118451317 A CN118451317 A CN 118451317A CN 202180105283 A CN202180105283 A CN 202180105283A CN 118451317 A CN118451317 A CN 118451317A
- Authority
- CN
- China
- Prior art keywords
- light
- reflected light
- reflected
- convex portion
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 545
- 238000007689 inspection Methods 0.000 title claims description 140
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/048971 WO2023127152A1 (ja) | 2021-12-28 | 2021-12-28 | 光学装置および検査方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118451317A true CN118451317A (zh) | 2024-08-06 |
Family
ID=86998482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180105283.4A Pending CN118451317A (zh) | 2021-12-28 | 2021-12-28 | 光学装置及检查方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250155236A1 (https=) |
| EP (1) | EP4459269A4 (https=) |
| JP (1) | JPWO2023127152A1 (https=) |
| CN (1) | CN118451317A (https=) |
| WO (1) | WO2023127152A1 (https=) |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6069539A (ja) * | 1983-09-26 | 1985-04-20 | Toshiba Corp | 表面欠陥検査装置 |
| JPS62235511A (ja) * | 1986-03-11 | 1987-10-15 | Kobe Steel Ltd | 表面状態検査装置 |
| JP2570010B2 (ja) * | 1991-06-30 | 1997-01-08 | 日本電気株式会社 | 表面溝方向判定方法及び装置 |
| JPH05157527A (ja) * | 1991-12-09 | 1993-06-22 | I N R Kenkyusho:Kk | ２次元又は３次元形状測定装置 |
| US5389794A (en) * | 1992-11-25 | 1995-02-14 | Qc Optics, Inc. | Surface pit and mound detection and discrimination system and method |
| US5404247A (en) * | 1993-08-02 | 1995-04-04 | International Business Machines Corporation | Telecentric and achromatic f-theta scan lens system and method of use |
| JP4160434B2 (ja) * | 2003-03-31 | 2008-10-01 | 財団法人鉄道総合技術研究所 | 画像読取装置 |
| JP2005283190A (ja) * | 2004-03-29 | 2005-10-13 | Hitachi High-Technologies Corp | 異物検査方法及びその装置 |
| JP2005291859A (ja) * | 2004-03-31 | 2005-10-20 | Nec Compound Semiconductor Devices Ltd | 微細構造測定方法、微細構造測定装置、および、微細構造解析システム |
| JP2008032669A (ja) * | 2006-07-27 | 2008-02-14 | Oputouea Kk | 光走査式平面外観検査装置 |
| RU2506188C2 (ru) | 2008-08-05 | 2014-02-10 | Алкоа Инк. | Металлические листы и пластины с текстурированными поверхностями, уменьшающими трение, и способы их изготовления |
| US8678316B2 (en) | 2009-01-29 | 2014-03-25 | The Boeing Company | Amorphous metal riblets |
| US8413928B2 (en) | 2009-09-25 | 2013-04-09 | The Boeing Company | Structurally designed aerodynamic riblets |
| DE102010031227A1 (de) | 2010-07-12 | 2012-01-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur Prüfung von Mikrostrukturierungsqualität |
| US20130146217A1 (en) | 2011-12-09 | 2013-06-13 | Nicholas Joseph Kray | Method of Applying Surface Riblets to an Aerodynamic Surface |
| US20140272237A1 (en) | 2013-03-15 | 2014-09-18 | Prc-Desoto International, Inc. | Strippable film assembly and coating for drag reduction |
| JP6186913B2 (ja) * | 2013-06-11 | 2017-08-30 | 富士ゼロックス株式会社 | 計測装置 |
| US10258982B2 (en) | 2014-04-23 | 2019-04-16 | Japan Science And Technology Agency | Combined-blade open flow path device and joined body thereof |
| US9751618B2 (en) | 2015-05-06 | 2017-09-05 | The Boeing Company | Optical effects for aerodynamic microstructures |
| WO2017063040A1 (en) | 2015-10-13 | 2017-04-20 | Bilinsky Henry Claudius | Microstructure patterns |
| DE112017006296B4 (de) | 2017-01-24 | 2023-02-02 | Hitachi, Ltd. | Fluidvorrichtung |
| US20220196569A1 (en) * | 2019-04-24 | 2022-06-23 | Nikon Corporation | Processing system and inspection system |
| US11614106B2 (en) | 2019-08-21 | 2023-03-28 | Lockheed Martin Corporation | Partially submerged periodic riblets |
-
2021
- 2021-12-28 WO PCT/JP2021/048971 patent/WO2023127152A1/ja not_active Ceased
- 2021-12-28 JP JP2023570624A patent/JPWO2023127152A1/ja active Pending
- 2021-12-28 US US18/725,564 patent/US20250155236A1/en active Pending
- 2021-12-28 CN CN202180105283.4A patent/CN118451317A/zh active Pending
- 2021-12-28 EP EP21970032.5A patent/EP4459269A4/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2023127152A1 (https=) | 2023-07-06 |
| WO2023127152A1 (ja) | 2023-07-06 |
| EP4459269A4 (en) | 2025-10-29 |
| US20250155236A1 (en) | 2025-05-15 |
| EP4459269A1 (en) | 2024-11-06 |
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| PB01 | Publication | ||
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