CN118407119B - A high temperature heater taking device - Google Patents
A high temperature heater taking device Download PDFInfo
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- CN118407119B CN118407119B CN202410666097.3A CN202410666097A CN118407119B CN 118407119 B CN118407119 B CN 118407119B CN 202410666097 A CN202410666097 A CN 202410666097A CN 118407119 B CN118407119 B CN 118407119B
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- 230000005540 biological transmission Effects 0.000 claims description 31
- 239000003638 chemical reducing agent Substances 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 6
- 239000000725 suspension Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 16
- 230000000903 blocking effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000005571 horizontal transmission Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000005570 vertical transmission Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002231 Czochralski process Methods 0.000 description 1
- 206010053615 Thermal burn Diseases 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Resistance Heating (AREA)
Abstract
本发明涉及单晶炉设备领域，更具体地说，涉及一种高温加热器拿取装置，包括：用于连接机械驱动臂的安装件和设置在安装件上的取放驱动件；以及拿取部件，拿取部件与安装件连接；取放驱动件与拿取部件连接，以驱动拿取部件进行第一状态和第二状态的切换，第一状态时，拿取部件对高温加热器的内壁和外壁进行抵紧锁定，实现高温加热器与安装件位置的相对锁定；第二状态时，拿取部件解除对高温加热器的锁定，使高温加热器可卸至预设位置。本发明可实现对高温加热器的稳定固定，防止高温加热器坠落受损；且拿取部件可适用于不同尺寸的加热器，适用范围较广。
The present invention relates to the field of single crystal furnace equipment, and more specifically, to a high-temperature heater picking device, comprising: a mounting member for connecting a mechanical driving arm and a pick-and-place driving member arranged on the mounting member; and a picking component, the picking component is connected to the mounting member; the pick-and-place driving member is connected to the picking component to drive the picking component to switch between a first state and a second state, in the first state, the picking component presses and locks the inner wall and the outer wall of the high-temperature heater to achieve relative locking of the position of the high-temperature heater and the mounting member; in the second state, the picking component releases the lock on the high-temperature heater, so that the high-temperature heater can be unloaded to a preset position. The present invention can achieve stable fixation of the high-temperature heater to prevent the high-temperature heater from falling and being damaged; and the picking component can be applied to heaters of different sizes, and has a wide range of applications.
Description
Technical Field
The invention relates to the field of single crystal furnace equipment, in particular to a high-temperature heater taking device.
Background
The Czochralski method is one of the main methods for drawing a single crystal silicon rod, and is characterized in that raw material polysilicon is placed into a quartz crucible of a single crystal furnace, the raw material polysilicon is heated and melted by a graphite heater, and then the single crystal silicon rod is drawn through the processes of temperature adjustment, seeding, shouldering, shoulder turning, constant diameter, ending, furnace stopping and the like. In the single crystal Czochralski process, after the crystal bar is pulled, the single crystal furnace is turned on, and the heater is taken out.
At present, when the furnace is disassembled, the heater is taken out by manual operation, and because the temperature in the furnace is high, the taking-out time of the heater is prolonged, the invalid working hours are increased, the efficiency is low, and meanwhile, operators are easy to scald in a high-temperature environment. The tool structure for taking out the heater in the prior art is simple, and the tool structure is not only not applicable to heaters with different sizes, but also can not effectively fix the heater when taking out the heater.
For example, patent application number 201320529525.5 and a tool for taking out a heater in a Czochralski single crystal growing furnace comprise two heater lifting parts which are arranged oppositely, and are characterized in that each heater lifting part comprises an extraction frame and a bottom support, each bottom support consists of a bottom plate and a clamping support which are integrally arc-shaped, each clamping support is fixed on the peripheral arc of the bottom plate and forms an included angle of more than 90 degrees with the bottom plate, each extraction frame is of a stepped frame structure with a closed upper end, and the bottom end of each extraction frame is fixed on the bottom plate of each bottom support. This frock structure is comparatively simple, needs manual operation, not only can't be applicable to not unidimensional heater, and can't effectively fix the heater when taking out, and the heater rocks easily and falls, leads to the damage of expensive single crystal growing furnace heater.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a high-temperature heater taking device.
The technical scheme adopted by the invention is as follows:
a high-temperature heater taking device comprises a mounting piece for connecting a mechanical driving arm and a taking and placing driving piece arranged on the mounting piece, and a taking component, wherein the taking component is connected with the mounting piece, the taking and placing driving piece is connected with the taking component to drive the taking component to switch between a first state and a second state, the taking component tightly props and locks the inner wall and the outer wall of the high-temperature heater in the first state to realize the relative locking of the high-temperature heater and the mounting piece, and the taking component releases the locking of the high-temperature heater in the second state to enable the high-temperature heater to be detachable to a preset position.
Further, the mounting piece comprises a top plate used for being connected with the mechanical driving arm, the top plate is connected to the cross mounting frame used for being connected with the taking component through a plurality of supporting bodies, the taking and placing driving piece comprises an electro-hydraulic push rod connected to the top plate, and the electro-hydraulic push rod penetrates through the extending end of the center guide hole of the cross mounting frame to be connected with the taking component.
Further, the component of taking includes the atress board of being connected with the end that stretches out of electrohydraulic push rod, and the atress board outside evenly encircles and rotates four atress connecting rods of connection, and four atress connecting rods are connected with four atress lock arms, and the top sliding fit of four atress lock arms is in the I-shaped slide of cross mounting bracket four sides.
Further, a locking roller is rotatably arranged on the outer side of the stress locking arm, and the axis of the locking roller is collinear with the axis of the electro-hydraulic push rod.
Further, the stress seat fixedly connected with the bottom of the stress lock arm is positioned at the outer side of the lock roller and used for supporting the bottom of the high-temperature heater.
The device comprises a stress seat, a movable carrier, a plurality of bearing shafts, a plurality of clamping rings, a distance measuring sensor, a signal value controller and a controller, wherein the fixed carrier is fixedly arranged on a stress lock arm, the bearing shafts are slidably arranged on the fixed carrier, the tops of the bearing shafts are fixedly connected with the movable carrier, the movable carrier is connected with the fixed carrier through the bearing pressure springs sleeved on the bearing shafts, the bottoms of the bearing shafts are fixedly clamped under the fixed carrier, the distance measuring sensor is arranged on the fixed carrier, and when the distance between the movable carrier and the fixed carrier is smaller than a preset distance value, the distance measuring sensor transmits the signal value controller, and the controller drives the four stress lock arms of a taking part to increase locking force on the high-temperature heater through a taking and placing driving piece.
Further, the stress locking arm is in sliding fit with two bearing rods, two ends of the two bearing rods are respectively connected with the side blocking body and the suspension bracket, and the side blocking body is connected with the stress locking arm through a tensioning pressure spring sleeved on the bearing rods; the side baffle body and the hanging frame are respectively positioned at the inner end and the outer end of the stress lock arm, the hanging frame is positioned above the outer side of the locking roller, two outer baffle rollers are matched in a longitudinal sliding hole of the hanging frame in a sliding way, an upper plate frame connected with the tops of the two outer baffle rollers is connected with the hanging frame through two supporting pressure springs sleeved on the outer baffle rollers, and the upper plate frame is connected with an outer baffle driver on the cross-shaped mounting frame.
Further, the four external gear drivers are connected with the power assembly arranged on the cross mounting frame, so that the upper plate frame is pulled through the cooperation of the power assembly and the external gear drivers, and the upper plate frame is pulled to drive the external gear roller to slide towards the lower side of the hanging frame and lean against the outer side of the high-temperature heater.
Further, the axis of the outer baffle roller is parallel to the axis of the locking roller, the outer baffle roller is positioned at the outer side of the locking roller, and a chamfer is arranged at the bottom of the outer baffle roller.
Further, a first sprocket is arranged at the output end of the speed reducer arranged on the upper plate frame, and the first sprocket is connected with a second sprocket arranged on the two outer baffle rollers through a chain.
The outer gear transmission device comprises a vertical pipe body, a central gear, four planetary gears, four vertical force transmission shafts, four force transmission bevel gears, four transverse force transmission shafts, a sliding pipe body, a rope winding wheel and a pulling rope, wherein the vertical pipe body is rotatably arranged on a cross mounting frame, the central gear is meshed with the four planetary gears, the four planetary gears are fixedly matched with the four vertical force transmission shafts which are rotatably arranged on the cross mounting frame, the four force transmission bevel gears are fixedly arranged on the four vertical force transmission shafts and are meshed with the force bearing bevel gears on the four transverse force transmission shafts, the four transverse force transmission shafts are rotatably arranged in the four I-shaped slide ways of the cross mounting frame, the sliding pipe body is rotatably arranged on the top of the four force bearing locking arms, the rope winding wheel is fixedly connected with the pulling rope, the pulling rope moving end is connected with the upper plate frame, the flange in the sliding pipe body is slidably matched with the axial groove of the transverse force transmission shaft, the axial groove is arranged along the axial direction of the transverse force transmission shaft, and the power assembly comprises an output motor arranged on the cross mounting frame, and the output gear on the output motor is meshed with the central gear or one planetary gear.
Compared with the picking and placing tool in the prior art, the high-temperature heater picking device is internally provided with the mounting piece which can be connected with the mechanical driving arm, so that the high-temperature heater can conveniently move to the high-temperature heater to be picked under the control of the mechanical driving arm, the picking part can be controlled to pick or place the high-temperature heater through the picking driving piece, the inner wall and the outer wall of the high-temperature heater are tightly abutted and locked by the picking part, the relative locking of the positions of the high-temperature heater and the mounting piece is realized, the stable fixing of the high-temperature heater can be realized, the high-temperature heater is prevented from falling and being damaged, and the picking part can be suitable for heaters with different sizes and has wider application range.
In order to make the above objects, features and advantages of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of a first direction according to an embodiment of the present invention;
FIG. 2 is an overall schematic diagram of a second direction provided by an embodiment of the present invention;
FIG. 3 is an overall schematic diagram of a third direction provided by an embodiment of the present invention;
FIG. 4 is an overall cross-sectional view provided by an embodiment of the present invention;
FIG. 5 is a schematic structural view of a mounting member according to an embodiment of the present invention;
FIG. 6 is a schematic view of a first direction of a picking unit according to an embodiment of the present invention;
FIG. 7 is a schematic view of a second direction of a picking unit according to an embodiment of the present invention;
FIG. 8 is a schematic view of a part of a pick-up unit according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of a force-bearing seat according to an embodiment of the present invention;
FIG. 10 is a schematic diagram of an external gear transmission according to an embodiment of the present invention;
Fig. 11 is a schematic partial structure of an external gear transmission according to an embodiment of the present invention.
The drawing shows the mounting member 100, the top plate 101, the supporting body 102, the cross mounting frame 103, the picking and placing driving member 200, the picking and placing member 300, the force receiving plate 301, the force receiving connecting rod 302, the force receiving lock arm 303, the locking roller 304, the carrying rod 305, the side blocking body 306, the hanging frame 307, the tension compression spring 308, the outer blocking roller 309, the upper plate frame 310, the supporting compression spring 311, the transverse screw 312, the distance limiting nut 313, the chain wheel two 314, the speed reducer 315, the force receiving seat 400, the fixed carrier 401, the carrying shaft 402, the movable carrier 403, the carrying compression spring 404, the clamping ring 405, the outer blocking driver 500, the vertical pipe body 501, the central gear 502, the planetary gear 503, the vertical force transmission shaft 504, the force transmission bevel gear 505, the transverse force transmission shaft 506, the force receiving bevel gear 507, the sliding pipe 508, the rope winding wheel 509, the tension rope 510 and the power assembly 600.
Detailed Description
In order to make the technical solutions of the embodiments of the present invention more clearly and completely described below with reference to the drawings in the embodiments of the present invention, it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
Example 1
Referring to fig. 1-11, the high temperature heater taking device provided by the invention comprises a mounting piece 100 for connecting a mechanical driving arm and a taking and placing driving piece 200 arranged on the mounting piece 100, and a taking and placing component 300, wherein the taking and placing driving piece 200 is connected with the mounting piece 100 to drive the taking and placing component 300 to switch between a first state and a second state, the first state is that the taking and placing component 300 tightly locks the inner wall and the outer wall of the high temperature heater to realize the relative locking of the position of the high temperature heater and the mounting piece 100, and the second state is that the taking and placing component 300 releases the locking of the high temperature heater to enable the high temperature heater to be detachable to a preset position.
The working principle and the technical effect of the technical scheme are as follows:
The invention relates to a high-temperature heater taking device, which is suitable for taking and placing a circular ring type high-temperature heater used by a single crystal furnace, wherein when the high-temperature heater taking device is used, a mounting piece 100 is connected with a mechanical driving arm, the mechanical driving arm can be a multi-shaft mechanical arm purchased in the market so as to drive the high-temperature heater taking device to move in multiple directions, the mechanical driving arm controls the high-temperature heater taking device to move downwards after a taking part 300 moves above the single crystal furnace, so that the taking part 300 is gradually contacted with the high-temperature heater, and the taking part 300 is controlled by a taking driving piece 200 to tightly lock the inner wall and the outer wall of the high-temperature heater, so that the stable clamping and fixing of the high-temperature heater are realized, the high-temperature heater is convenient to take or discharge, the high-temperature heater is prevented from falling and damaging, and the taking part 300 can be suitable for heaters with different sizes, and has a wider application range.
The mounting member 100 comprises a top plate 101 connected with a mechanical driving arm, a plurality of bolt connectors are arranged on the top plate 101 so as to be connected with the mechanical driving arm, the top plate 101 is connected with a cross mounting frame 103 connected with a taking part 300 through a plurality of supporting bodies 102, the structural strength is good, the stability is high, the taking and placing driving member 200 comprises an electro-hydraulic push rod connected with the top plate 101, the electro-hydraulic push rod penetrates through the extending end of a central guide hole of the cross mounting frame 103 to be connected with the taking part 300, and the first state and the second state of the taking part 300 can be controlled to be switched after the electro-hydraulic push rod is started so as to achieve taking or placing of the high-temperature heater.
Example two
Referring to fig. 1-11, the picking member 300 includes a force-bearing plate 301 connected to the extending end of the electro-hydraulic push rod, four force-bearing connecting rods 302 are uniformly and rotatably connected around the outer side of the force-bearing plate 301, the four force-bearing connecting rods 302 are connected to four force-bearing locking arms 303, and the tops of the four force-bearing locking arms 303 are slidably fitted in the h-shaped slides on the four sides of the cross mounting frame 103.
The working principle and the technical effect of the technical scheme are as follows:
according to the high-temperature heater taking device, when a taking component 300 needs to be controlled to take a high-temperature heater, four stress locking arms 303 are controlled to be inserted into the inner side of the high-temperature heater through a multi-axis mechanical arm, the high-temperature heater is of a generally annular structure, therefore the four stress locking arms 303 are arranged in the high-temperature heater taking device, the stability of taking the high-temperature heater is improved conveniently, an electrohydraulic push rod is started, the stress plate 301 is controlled to move downwards by the electrohydraulic push rod, one ends of the four stress connecting rods 302 are driven to move downwards by the stress plate 301, the other ends of the four stress connecting rods 302 drive the stress locking arms 303 to move outwards in an I-shaped slideway on the four sides of the cross mounting frame 103 until the four stress locking arms 303 are pressed against the inner ring surface of the high-temperature heater, the high-temperature heater is tightly fixed, then the high-temperature heater is controlled to be separated from a single crystal furnace through the multi-axis mechanical arm, and the high-temperature heater is taken, and the four stress locking arms 303 are made of high-temperature resistant and corrosion resistant materials, such as stainless steel, high-temperature alloy or special ceramic, and the high-temperature resistant alloy is preferred.
The outer side of the stress locking arm 303 is rotationally provided with a locking roller 304, and the axis of the locking roller 304 is collinear with the axis of the electrohydraulic push rod. The stress seat 400 fixedly connected with the bottom of the stress locking arm 303 is positioned at the outer side of the locking roller 304 and is used for supporting the bottom of the high-temperature heater.
When the four stress locking arms 303 move outwards in the I-shaped slide ways on the four sides of the cross mounting frame 103, the four locking rollers 304 can be controlled to move outwards, so that the four locking rollers 304 are tightly propped against the inner ring surface of the high-temperature heater, and are supported at the bottom of the high-temperature heater through the four stress seats 400 fixedly connected with the bottoms of the four stress locking arms 303, the high-temperature heater can be conveniently taken out, and after the high-temperature heater is cooled, the high-temperature heater is controlled to rotate on the four locking rollers 304, thereby observing whether the high-temperature heater is deformed or not, and facilitating maintenance or cleaning of different positions of the high-temperature heater.
The stress seat 400 comprises a fixed carrier 401 fixedly arranged at the bottom of the stress locking arm 303, a plurality of bearing shafts 402 are slidably arranged on the fixed carrier 401, the tops of the plurality of bearing shafts 402 are fixedly connected with a movable carrier 403, the movable carrier 403 is connected with the fixed carrier 401 through a plurality of bearing pressure springs 404 sleeved on the bearing shafts 402, a clamping ring 405 fixedly arranged at the bottom of more than one bearing shaft 402 is abutted to the lower part of the fixed carrier 401, a ranging sensor is arranged on the fixed carrier 401, and when the distance between the movable carrier 403 and the fixed carrier 401 is smaller than a preset distance value, the ranging sensor transmits a signal value controller, and the controller drives four stress locking arms 303 of the taking part 300 through the taking and placing driving piece 200 to increase locking force on the high-temperature heater.
The structure of the force-bearing seat 400 not only can simply support the bottom of the high-temperature heater, but also can prevent the high-temperature heater from being damaged because the thickness of the side wall of the high-temperature heater is small, so that the high-temperature heater cannot adopt larger top pressure in the clamping process by the four locking rollers 304, so that sliding can possibly occur in the high-temperature heater taking process, the clamping stability is problematic, the top pressure needs to be enhanced to a certain extent, but the moment is controlled by naked eyes, an untimely temperature base is easy to exist, therefore, a ranging sensor is arranged on the fixed carrier 401, the high-temperature heater generates larger pressure on the movable carrier 403 when the high-temperature heater slides downwards, the movable carrier 403 drives the plurality of bearing shafts 402 to slide downwards on the fixed carrier 401, and compresses the bearing pressure springs 404 sleeved on the bearing shafts 402, the bearing pressure springs 404 can play a role of buffering and damping, the influence on the high-temperature heater in the high-temperature heater taking process is reduced, and the distance between the movable carrier 403 and the fixed carrier 401 is smaller than a preset distance value, the distance between the high-temperature heater and the high-temperature heater is easy to cause damage to the high-temperature heater through the locking arm controller, and the high-temperature heater is prevented from being damaged by the high-temperature heater, and the high-temperature heater is further, and the high-temperature heater is driven, and the high temperature heater is more stable, and stressed by the high temperature heater.
The two bearing rods 305 are slidably matched on the stress locking arm 303, two ends of the two bearing rods 305 are respectively connected with the side baffle body 306 and the hanging frame 307, the side baffle body 306 is connected with the stress locking arm 303 through a tensioning pressure spring 308 sleeved on the bearing rods 305, the side baffle body 306 and the hanging frame 307 are respectively positioned at the inner end and the outer end of the stress locking arm 303, the hanging frame 307 is positioned above the outer side of the locking roller 304, two outer baffle rollers 309 are slidably matched in longitudinal sliding holes of the hanging frame 307, an upper plate frame 310 connected with the tops of the two outer baffle rollers 309 is connected with the hanging frame 307 through two supporting pressure springs 311 sleeved on the outer baffle rollers 309, and the upper plate frame 310 is connected with an outer baffle driver 500 on the cross-shaped mounting frame 103. The axis of the outer baffle roller 309 is parallel to the axis of the locking roller 304, the outer baffle roller 309 is positioned outside the locking roller 304, and the bottom of the outer baffle roller 309 is provided with a chamfer.
In order to further enhance the stability of taking the high-temperature heater and prevent the high-temperature heater from falling, the invention is internally provided with an outer baffle roller 309 for carrying out jacking limit on the outer ring surface of the high-temperature heater, and eight outer baffle rollers 309 are arranged in total, so that the outer ring surface of the high-temperature heater is effectively protected; because the internal structure of the single crystal furnace is compact, the space between the high temperature heater and the heat preservation ring is small, when the single crystal furnace is tightly propped against the inner ring surface of the high temperature heater through the four locking rollers 304, the outer baffle rollers 309 are positioned above the high temperature heater and are not contacted with the high temperature heater, when the high temperature heater rises and is gradually taken out to the upper side of the single crystal furnace, the four outer baffle drivers 500 in the single crystal furnace are started, the four outer baffle drivers 500 drive the four upper plate frames 310 to move downwards, each upper plate frame 310 drives the two outer baffle rollers 309 to slide downwards in the longitudinal sliding holes of the hanging frame 307 and compress the supporting pressure springs 311, and in a normal state, the bottoms of the upper plate frames 310 and the two outer baffle rollers 309 are inserted into the longitudinal sliding holes of the hanging frame 307 and are not separated from the longitudinal sliding holes of the hanging frame 307 in a state that the supporting pressure springs 311 are positioned above the hanging frame 307; when the two outer baffle rollers 309 slide downwards in the longitudinal sliding holes of the hanging frame 307, as the outer baffle rollers 309 are positioned outside the locking rollers 304, the bottom of the outer baffle rollers 309 is provided with chamfers, so that the outer baffle rollers 309 can be gradually released from the outer ring surface of the high-temperature heater and slide downwards to be tightly attached to the outer ring surface of the high-temperature heater, and as the two ends of the two bearing rods 305 are respectively connected with the side baffle bodies 306 and the hanging frame 307, the side baffle bodies 306 are connected with the stressed locking arms 303 through tensioning pressure springs 308 sleeved on the bearing rods 305, so that the positions of the hanging frame 307 are not fixed, the distance that the suspension bracket 307 moved to the outside is different, drives the side shield 306 to compress the range of compression of tensioning pressure spring 308 also different, makes two outer shield rollers 309 paste on the high temperature heater through tensioning pressure spring 308, both can improve the stability when the high temperature heater is taken, can reduce the damage that hard clamping caused the high temperature heater again.
The output end of the speed reducer 315 mounted on the upper plate frame 310 is provided with a first sprocket wheel which is connected with a second sprocket wheel 314 mounted on two outer baffle rollers 309 through a chain. Because the high temperature heater may have deformation during the use, in order to make the positions of the four locking rollers 304 tightly propped against the inner ring surface of the high temperature heater be in a perfect position, after the high temperature heater is taken to the upper part of the single crystal furnace, in order to improve the stability of shipment, the high temperature heater can be controlled to rotate, the propping position is adjusted, during the adjustment, the speed reducer 315 is controlled to start, the sprocket I on the speed reducer 315 drives the two sprockets II 314 to rotate through a chain, thereby controlling the two outer baffle rollers 309 on the two sprockets II 314 to rotate, and the high temperature heater can be controlled to rotate on the four locking rollers 304 through the rotation of the outer baffle rollers 309 and the support of the four locking rollers 304 and the stress seat 400 so as to be adjusted to the optimal position.
The four external gear drivers 500 are connected with the power assembly 600 arranged on the cross mounting frame 103 and connected with the stress locking arm 303, so that the upper plate frame 310 is pulled by the cooperation of the power assembly 600 and the external gear drivers 500, and the upper plate frame 310 is pulled to drive the external gear roller 309 to slide downwards the hanging frame 307 and lean against the outer side of the high-temperature heater. The external gear transmission 500 comprises a vertical pipe body 501 rotatably arranged on a cross mounting frame 103, a central gear 502 on the vertical pipe body 501 is meshed with four planetary gears 503, the four planetary gears 503 are fixedly matched with four vertical transmission shafts 504 rotatably arranged on the cross mounting frame 103, four transmission bevel gears 505 fixedly arranged on the four vertical transmission shafts 504 are meshed with stress bevel gears 507 on the four horizontal transmission shafts 506, the four horizontal transmission shafts 506 are rotatably arranged in four I-shaped slide ways of the cross mounting frame 103, a sliding pipe body 508 sleeved on the four horizontal transmission shafts 506 is rotatably arranged on the top of the four stress locking arms 303, a rope winding wheel 509 fixedly connected on the sliding pipe body 508 is fixedly connected with a pulling rope 510, the movable end of the pulling rope 510 is connected on an upper plate frame 310, flanges in the sliding pipe body 508 are slidably matched in axial grooves of the horizontal transmission shafts 506, the axial grooves are arranged along the axial directions of the horizontal transmission shafts 506, and the power assembly 600 comprises an output motor arranged on the cross mounting frame 103, and an output gear on the output motor is meshed with the central gear 502 or one planetary gear 503.
After the output motor is started, the sun gear 502 or one planetary gear 503 can be meshed with the output gear to rotate, when the sun gear 502 or one planetary gear 503 rotates, the four planetary gears 503 can be driven to rotate, so that the four vertical force transmission shafts 504 are driven to rotate, the four vertical force transmission shafts 504 can be driven to rotate on the four horizontal force transmission shafts 506 through the meshing of the four force transmission bevel gears 505 and the four force bearing bevel gears 507, the four horizontal force transmission shafts 506 drive the four sliding tube bodies 508 to rotate through the matching of the axial grooves and the flanges, the four sliding tube bodies 508 control the four rope pulleys 509 to rotate when rotating, and therefore the rope pulleys 509 control the tension ropes 510 to wind or loosen, when the tension ropes 510 wind, the upper plate frame 310 can be controlled to move downwards, when the tension ropes 510 loosen, the upper plate frame 310 is reset upwards under the action of the elasticity of the supporting pressure springs 311, and the tension ropes 510 keep a state of being straight under the action of the elasticity of the supporting pressure springs 311; in the invention, the control of the plurality of upper plate brackets 310 can be realized through one motor, and the sliding pipe body 508 is rotatably arranged on the stress locking arm 303, so that the movement of the stress locking arm 303 does not influence the control of the rope winding wheel 509, and the invention has good stability and strong practicability.
The upper end of the outer side of the stress locking arm 303 is fixedly connected with a transverse screw 312, the middle of the transverse screw 312 is slidably arranged in a transverse hole of the hanging frame 307, a distance limiting nut 313 in threaded connection with the transverse screw 312 is blocked on the inner side surface of the hanging frame 307, the initial position of the hanging frame 307 is conveniently regulated and limited, the minimum distance between an outer blocking roller 309 and a locking roller 304 on the hanging frame 307 is conveniently regulated, annular high-temperature heaters with different wall thicknesses are conveniently clamped, and during regulation, the hanging frame 307 is controlled to slide on the transverse screw 312, and then the distance limiting nut 313 is rotated to be blocked on the inner side surface of the hanging frame 307.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed, mechanically connected, electrically connected, or communicable with each other, directly connected, indirectly connected through an intervening medium, or in communication between two elements or in an interactive relationship between two elements, unless otherwise explicitly specified. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Although embodiments of the present invention have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the invention would be readily apparent to those skilled in the art, and accordingly, the invention is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (3)
1. A high temperature heater pick-up device, comprising:
the device comprises a mounting piece for connecting a mechanical driving arm and a picking and placing driving piece arranged on the mounting piece;
The taking component is connected with the mounting piece; the device comprises a high-temperature heater, a mounting part, a taking and placing driving part, a first locking part, a second locking part and a first locking part, wherein the taking and placing driving part is connected with the taking part to drive the taking part to switch between a first state and a second state, and the taking part is used for tightly propping and locking the inner wall and the outer wall of the high-temperature heater to realize the relative locking of the positions of the high-temperature heater and the mounting part in the first state;
The mounting piece comprises a top plate used for being connected with the mechanical driving arm, wherein the top plate is connected to a cross mounting rack used for being connected with the taking component through a plurality of supporting bodies;
the picking component comprises a stress plate connected with the extending end of the electro-hydraulic push rod, four stress connecting rods are uniformly and circularly connected to the outer side of the stress plate, the four stress connecting rods are connected with four stress locking arms, and the tops of the four stress locking arms are in sliding fit in the I-shaped slide ways on the four sides of the cross mounting frame;
The outer side of the stress locking arm is rotationally provided with a locking roller, and the axis of the locking roller is collinear with the axis of the electrohydraulic push rod;
The stress seat fixedly connected with the bottom of the stress lock arm is positioned at the outer side of the lock roller and used for supporting the bottom of the high-temperature heater;
The stress seat comprises a fixed carrier fixedly arranged on the stress lock arm, a plurality of bearing shafts are arranged on the fixed carrier in a sliding way, the tops of the bearing shafts are fixedly connected with a movable carrier, and the movable carrier is connected with the fixed carrier through a plurality of bearing pressure springs sleeved on the bearing shafts; the fixed carrier is provided with a ranging sensor, when the distance between the movable carrier and the fixed carrier is smaller than a preset distance value, the ranging sensor transmits a signal value controller, and the controller drives four stressed lock arms of the taking part to increase the locking force on the high-temperature heater through the taking and placing driving part;
The two ends of the two bearing rods are respectively connected with the side baffle body and the suspension bracket, and the side baffle body is connected with the stressed locking arm through a tensioning pressure spring sleeved on the bearing rods; the side baffle body and the hanging frame are respectively positioned at the inner end and the outer end of the stress locking arm, the hanging frame is positioned above the outer side of the locking roller, the two outer baffle rollers are matched in a sliding way in a longitudinal sliding hole of the hanging frame, and an upper plate frame connected with the tops of the two outer baffle rollers is connected with the hanging frame through two supporting pressure springs sleeved on the outer baffle rollers;
The four external gear drivers are connected with a power assembly arranged on the cross mounting frame so as to pull the upper plate frame through the cooperation of the power assembly and the external gear drivers, and the upper plate frame is pulled to drive the external gear roller to slide downwards the hanging frame and lean against the outer side of the high-temperature heater;
The external gear driver comprises a vertical pipe body rotationally arranged on a cross mounting frame, a central gear on the vertical pipe body is meshed with four planetary gears, the four planetary gears are fixedly matched with four vertical force transmission shafts rotationally arranged on the cross mounting frame, four force transmission bevel gears fixedly arranged on the four vertical force transmission shafts are meshed with stress bevel gears arranged on four horizontal force transmission shafts, the four horizontal force transmission shafts are rotationally arranged in four I-shaped slide ways of the cross mounting frame, a sliding pipe body sleeved on the four horizontal force transmission shafts is rotationally arranged on the top of four stress locking arms, a rope winding wheel fixedly connected with a pulling rope is fixedly connected on the sliding pipe body, the movable end of the pulling rope is connected on an upper plate frame, a flange in the sliding pipe body is slidingly matched in an axial groove of the horizontal force transmission shaft, the axial groove is arranged along the axial direction of the horizontal force transmission shaft, and the power assembly comprises an output motor arranged on the cross mounting frame, and the output gear on the output motor is meshed with the central gear or one planetary gear.
2. The high temperature heater taking device according to claim 1, wherein the axis of the outer baffle roller is parallel to the axis of the locking roller, the outer baffle roller is located outside the locking roller, and a chamfer is formed at the bottom of the outer baffle roller.
3. The high temperature heater taking device according to claim 1, wherein the output end of the speed reducer arranged on the upper plate frame is provided with a first chain wheel, and the first chain wheel is connected with a second chain wheel arranged on the two outer baffle rollers through a chain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410666097.3A CN118407119B (en) | 2024-05-28 | 2024-05-28 | A high temperature heater taking device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410666097.3A CN118407119B (en) | 2024-05-28 | 2024-05-28 | A high temperature heater taking device |
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| Publication Number | Publication Date |
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| CN118407119A CN118407119A (en) | 2024-07-30 |
| CN118407119B true CN118407119B (en) | 2025-02-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202410666097.3A Active CN118407119B (en) | 2024-05-28 | 2024-05-28 | A high temperature heater taking device |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853474A (en) * | 2021-02-26 | 2021-05-28 | 连智(大连)智能科技有限公司 | Automatic thermal field dismantling equipment for Czochralski single crystal silicon furnace |
| CN116793844A (en) * | 2023-06-29 | 2023-09-22 | 广州市盛通建设工程质量检测有限公司 | Building material strength detection equipment and detection method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4830425B2 (en) * | 2005-09-27 | 2011-12-07 | アイシン精機株式会社 | Parts horizontal holding and conveying device |
| CN203462161U (en) * | 2013-08-28 | 2014-03-05 | 河北宁晋松宫半导体有限公司 | Tool for taking out heater in Czochralski crystal grower |
| CN206157269U (en) * | 2016-11-10 | 2017-05-10 | 温州永泰电器有限公司 | Device is put with getting of a section of thick bamboo that keep warm to heater |
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- 2024-05-28 CN CN202410666097.3A patent/CN118407119B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853474A (en) * | 2021-02-26 | 2021-05-28 | 连智(大连)智能科技有限公司 | Automatic thermal field dismantling equipment for Czochralski single crystal silicon furnace |
| CN116793844A (en) * | 2023-06-29 | 2023-09-22 | 广州市盛通建设工程质量检测有限公司 | Building material strength detection equipment and detection method |
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| CN118407119A (en) | 2024-07-30 |
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