CN118371212A - Disilane preparation device and process - Google Patents
Disilane preparation device and process Download PDFInfo
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- CN118371212A CN118371212A CN202410824703.XA CN202410824703A CN118371212A CN 118371212 A CN118371212 A CN 118371212A CN 202410824703 A CN202410824703 A CN 202410824703A CN 118371212 A CN118371212 A CN 118371212A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/26—Drying gases or vapours
- B01D53/261—Drying gases or vapours by adsorption
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
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Abstract
The invention discloses a disilane preparation device and a disilane preparation process, and relates to the technical field of disilane preparation. Also discloses a disilane preparation process, which comprises the following steps: adding reactants into a reaction kettle for reaction, enabling the generated silane and disilane mixed gas to enter a fluid cavity through a three-way air inlet pipe, and filtering impurities under the action of a multiple activated carbon plate; the filtered mixed gas enters the molecular sieve adsorption tower through a three-way gas outlet pipe to remove the chlor-silicon gas in the mixed gas. The invention is convenient for automatic replacement of the activated carbon plate by arranging the filtering part, and the negative pressure part pumps the gas in the fluid cavity and forms a negative pressure state, so that the gas is prevented from leaking when the saturated activated carbon plate is cleaned, and the production safety is improved; through the cooperation of air current portion and negative pressure portion, can make new active carbon plate and saturated active carbon plate carry out the change of one-to-one and supply, save the process, improve production efficiency.
Description
Technical Field
The invention belongs to the technical field of disilane preparation, and particularly relates to a disilane preparation device and process.
Background
Disilane is an organosilicon compound which is composed of silicon, hydrogen and carbon, in which silicon atoms are bonded to two methyl groups and two hydrogen atoms; disilane is a colorless gas, commonly used as a precursor of silica gel and silicone rubber, and also has applications in the field of semiconductor industry and the like; it has good chemical stability and thermal stability, and the reaction needs to be carried out under a certain temperature and pressure in the preparation process, and a catalyst is usually needed to promote the reaction.
The patent with publication number CN117160185B discloses a silane and disilane mixed gas separation and purification device and a method thereof, the device comprises an adsorption box, wherein a three-way air inlet pipe and a molecular sieve adsorption tower are communicated with the adsorption box, a rectifying tower group is communicated with the molecular sieve adsorption tower, a waste frame is arranged on the adsorption box, the adsorption box is divided into two filtering spaces by a baffle plate, and a first active carbon plate and a second active carbon plate are arranged in the filtering spaces; the device also comprises a blocking assembly, which is used for intermittently blocking the two filtering spaces; a shielding assembly is arranged at the communication part between the waste frame and the storage box; when the blocking assembly blocks the filtering space, the driving mechanism drives the blocking assembly to be opened, so that the first activated carbon plate falls into the waste frame, and drives the second activated carbon plate to move through the transmission mechanism to realize replacement; the device can avoid the trouble of stopping the machine when the activated carbon plates are saturated, and can also realize automatic replacement and supplement between the activated carbon plates.
The technical scheme has the following problems:
1. like the above-mentioned equipment, effective filtration area is less, and filtration efficiency remains to be improved.
2. After plugging one of the filtering spaces, the inside of the filtering space is provided with residual mixed gas, when the active carbon plate is replaced, the residual mixed gas can enter the waste frame along with the active carbon plate, when a worker needs to open the active carbon plate inside the waste frame to clean the active carbon plate, the residual gas inside the waste frame is diffused into the air, so that the air is polluted, and meanwhile, the body of the worker is injured.
3. When the active carbon plate in the storage box is too much, the compression degree of the spring to the active carbon plate is large, the active carbon plate is not easy to fall, and when the active carbon plate in the storage box is too little, the active carbon plate is easy to fall, and the problem easily occurs in the replacement process of the active carbon plate due to the fact that the pressure of the spring is not constant, so that normal filtering work is affected.
Therefore, it is necessary to invent an disilane preparation apparatus and process to solve the above problems.
Disclosure of Invention
The invention aims at solving the technical problems and provides a disilane preparation device and a disilane preparation process, which are used for solving the problems in the background art.
The invention provides an disilane preparation device, which comprises a filter box, wherein two ends of the filter box are respectively communicated with a three-way air inlet pipe and a three-way air outlet pipe, one end of the three-way air inlet pipe is communicated with a reaction kettle, one end of the three-way air outlet pipe is communicated with a molecular sieve adsorption tower, a plurality of fluid cavities are arranged in the filter box, a plurality of storage boxes and material receiving boxes are respectively arranged at the upper end and the lower end of the filter box, and each material receiving box and each storage box are respectively corresponding to the fluid cavities, and the disilane preparation device further comprises: the filter parts are arranged into two groups and comprise annular frames, the annular frames are rotatably arranged in the fluid cavity, a plurality of active carbon plates are arranged in the annular frames, and the filter parts can realize the replacement of the active carbon plates when rotating; the negative pressure parts are arranged in two groups and comprise piston plates, the piston plates are arranged in the material receiving box in a sealing sliding manner, and the negative pressure parts can suck the residual mixed gas in the fluid cavity into the material receiving box and generate negative pressure in the fluid cavity when in movement; the air flow parts are arranged into two groups, the air flow parts are arranged between the storage box and the material receiving box and comprise push plates, the push plates are arranged in the material receiving box in a sealing sliding manner, and the negative pressure parts push the air flow parts in the moving process to enable air flow in the air flow parts to extrude the activated carbon plates in the storage box. Preferably, a plurality of limit grooves are formed in the annular frame, the activated carbon plates are installed in the limit grooves, a plurality of filter screens are fixedly installed on the outer wall of the annular frame, a driving motor is fixedly installed at one end of the annular frame, and the driving motor is fixedly installed at one end of the filter box.
Preferably, the two ends of the material receiving box are respectively provided with a first cavity and a second cavity.
Preferably, the piston plate slides in the first cavity in a sealing way, and a first pipeline is communicated between the first cavity and the fluid cavity, an electric telescopic piece is fixedly installed between the piston plate and the first cavity, one end, far away from the electric telescopic piece, of the piston plate is fixedly provided with a plurality of push rods, and the push rods are used for pushing the dropped activated carbon plate.
Preferably, the push plate is sealed to slide in the second cavity, and a first communication hole is formed between the second cavity and the fluid cavity.
Preferably, the two plugging parts are arranged, the plugging parts are arranged at two ends of the bottom of the filter box and comprise rectangular frames, the rectangular frames are fixedly arranged at the upper ends of the negative pressure parts, and the negative pressure parts can trigger the plugging parts to release the sealing of the fluid cavity when moving; the rectangular frame is fixedly arranged at the upper end of the piston plate, and the inner wall of the first communication hole is rotatably provided with a sealing plate.
Preferably, a second communication hole is formed between each fluid cavity and the corresponding storage box.
Preferably, the inside fixed mounting of storage tank has a piston cylinder, and the intercommunication has the second pipeline between piston cylinder and the second cavity, the inside sealed slip of piston cylinder has the piston rod, the one end fixed mounting of piston rod has the diaphragm, the diaphragm can promote a plurality of activated carbon plates in the storage tank.
Preferably, both ends of the activated carbon plate are fixedly provided with sliding blocks, a sliding groove is formed between the first communication hole and the second cavity, and the sliding blocks can move along the sliding groove.
The invention also discloses a disilane preparation device and a disilane preparation process, wherein the disilane preparation device comprises the following steps:
step one, adding raw materials or reactants into a reaction kettle, and reacting under the action of the reaction kettle;
Step two, the silane and disilane mixed gas generated in the reaction kettle enters a fluid cavity through a three-way air inlet pipe, and water impurities are filtered under the action of a multiple activated carbon plate;
And step three, the filtered mixed gas enters a molecular sieve adsorption tower through a three-way gas outlet pipe to remove the chlor-silicon gas in the mixed gas, and finally the disilane product is obtained.
The beneficial effects of the invention are as follows:
1. According to the invention, the driving motor drives the annular frame to correspond to the first communication hole and the second communication hole respectively, and the active carbon plate is automatically replaced by matching the negative pressure part, the air flow part and the plugging part, so that the convenience of replacing the active carbon plate is improved, and the overall production efficiency is ensured.
2. According to the invention, through the cooperation of the push plate, the second pipeline, the piston cylinder, the piston rod, the transverse plate, the electric telescopic piece, the piston plate and the push rod, the sealing part can be opened timely when the active carbon plate is automatically replaced, so that the active carbon plate with saturated adsorption can be ensured to automatically fall down, and the replacement preparation work is prepared; on the other hand, in the process of pushing the falling activated carbon plates with saturated adsorption and collecting, the standby activated carbon plates above can automatically fall through the related components, so that the falling and collecting of the activated carbon plates with saturated adsorption are utilized to promote the falling of a new standby activated carbon plate, the preparation for replacing the new activated carbon plates is carried out, one-to-one replacement and preparation work are carried out, the pressure of the activated carbon plates in the storage box can be kept constant in the extruded process, and further, each activated carbon plate is easy to fall, and the smooth operation of replacing the activated carbon plates is ensured.
3. According to the invention, the piston plate, the first pipeline and the electric telescopic piece suck the residual mixed gas in the fluid chamber into the piston plate, so that negative pressure is generated in the fluid chamber, the mixed gas is prevented from entering between the push plate and the piston plate along with the active carbon plate when the active carbon plate is replaced, the problem of gas leakage when the active carbon plate is cleaned is solved, and the production safety is improved.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the internal structure of the filter box of the present invention.
Fig. 3 is a schematic cross-sectional view of the receiving box, the filtering box and the storage box of the invention.
Fig. 4 is an enlarged schematic view of the structure of fig. 3 a in the present invention.
Fig. 5 is a schematic view of the structure of the filtering portion of the present invention.
Fig. 6 is a schematic view of the structure of the air flow section of the present invention.
FIG. 7 is a schematic diagram showing the cooperation of the sliding block and the sliding slot structure according to the present invention.
Fig. 8 is a schematic view of a rectangular frame to seal plate support structure of the present invention.
FIG. 9 is a schematic view of the rectangular frame-to-seal plate of the present invention shown detached from the support structure.
Fig. 10 is a schematic view showing a structure of the negative pressure portion in a first extended state of the present invention.
Fig. 11 is a schematic view showing a structure of the negative pressure portion in a second extended state of the present invention.
In the figure: 1. a filter box; 2. a three-way air inlet pipe; 3. a three-way air outlet pipe; 4. a reaction kettle; 5. a molecular sieve adsorption tower; 6. a fluid chamber; 7. a material receiving box; 8. a filtering part; 9. a negative pressure part; 10. an air flow section; 11. a storage box; 12. an activated carbon plate; 13. a blocking part; 701. a first cavity; 702. a second cavity; 801. an annular frame; 802. a limit groove; 803. a filter screen; 804. a driving motor; 901. a piston plate; 902. a first pipeline; 903. an electric telescopic member; 904. a push rod; 101. a push plate; 102. a first communication hole; 103. a piston cylinder; 104. a second pipeline; 105. a piston rod; 106. a cross plate; 107. a second communication hole; 121. a slide block; 122. a chute; 131. a rectangular frame; 132. and (5) sealing the plate.
Detailed Description
The technical solutions of the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which are obtained by a person skilled in the art based on the embodiments of the present application, fall within the scope of protection of the present application.
The invention provides a disilane preparation device as shown in figures 1 to 3, which comprises a filter box 1, wherein two ends of the filter box 1 are respectively communicated with a three-way air inlet pipe 2 and a three-way air outlet pipe 3, the three-way air inlet pipe 2 and the three-way air outlet pipe 3 are arranged into a Y-shaped structure, two ends of the filter box 1 are respectively provided with two air inlets and two air outlets, two pipelines of the three-way air inlet pipe 2 are communicated with the two air inlets, two pipelines of the three-way air outlet pipe 3 are communicated with the two air outlets, and electromagnetic valves are respectively arranged in the two pipelines of the three-way air inlet pipe 2 and the three-way air outlet pipe 3.
One end of the three-way air inlet pipe 2 is communicated with a reaction kettle 4, one end of the three-way air outlet pipe 3 is communicated with a molecular sieve adsorption tower 5, and the reaction kettle 4 and the molecular sieve adsorption tower 5 are all in the prior art and are not described in detail herein. The inside of rose box 1 is provided with a plurality of fluid chamber 6, and the upper and lower both ends of rose box 1 are provided with a plurality of storage tank 11 and receipts workbin 7 respectively, and each receipts workbin 7 and storage tank 11 correspond with fluid chamber 6 respectively, and storage tank 11 is used for storing new activated carbon sheet 12, and receipts workbin 7 is used for storing activated carbon sheet 12 after the saturation.
When in use, the mixed gas enters the corresponding fluid cavity 6 through the three-way air inlet pipe 2, is filtered by the internal filtering part 8, and is discharged to the molecular sieve adsorption tower 5 through pipelines at two ends of the three-way air outlet pipe 3 after being filtered. When the activated carbon plate 12 in the filtering part 8 in one of the fluid chambers 6 reaches saturation, the solenoid valve is started to close the pipelines corresponding to the three-way air inlet pipe 2 and the three-way air outlet pipe 3 at the two ends of the fluid chamber 6, then the activated carbon plate 12 which is adsorbed and saturated in the filtering part 8 is replaced, and the other fluid chamber 6 can still normally carry out filtering operation, so that the activated carbon plate 12 can be replaced without stopping, the convenience of replacing the activated carbon plate 12 is improved, and the overall production efficiency is also ensured.
The structure of the filter unit 8 is designed to increase the filtering area of the mixed gas and to facilitate replacement of the activated carbon sheet 12.
As shown in fig. 2, 3, 5 and 7, the filtering parts 8 are arranged in two groups, the filtering parts 8 comprise an annular frame 801, the annular frame 801 is rotatably arranged in the fluid cavity 6, an annular supporting part matched with the annular frame 801 is arranged in the fluid cavity 6, the middle part of the annular supporting part is communicated, the annular supporting part plays a role in limiting the activated carbon plate 12, and the activated carbon plate 12 is prevented from being separated from the limiting groove 802; and the inside of annular frame 801 is provided with a plurality of activated carbon plates 12, and filter unit 8 can realize changing activated carbon plate 12 when rotating, and activated carbon plate 12 can set up to two, three, four etc. more, along with the increase of activated carbon plate 12 quantity, has also increased the filterable area of gas mixture simultaneously. The inside of annular frame 801 has offered a plurality of spacing grooves 802, and the activated carbon sheet 12 is installed in spacing groove 802, along with the increase of activated carbon sheet 12 quantity, and the quantity of spacing groove 802 also increases thereupon, and the outer wall fixed mounting of annular frame 801 has a plurality of filter screens 803, and filter screens 803 are used for ventilating, and the one end fixed mounting of annular frame 801 has driving motor 804, and driving motor 804 is connected with control system electricity, and this driving motor 804 is step motor, and driving motor 804 fixed mounting is in the one end of rose box 1. The two ends of the activated carbon plate 12 are fixedly provided with the sliding blocks 121, the sliding grooves 122 are formed between the first communication holes 102 and the second cavity 702, the sliding blocks 121 can move along the sliding grooves 122, and the activated carbon plate 12 can be prevented from tilting in the falling process, so that the stability of the activated carbon plate 12 is improved; a second communication hole 107 is provided between each fluid chamber 6 and the corresponding locker 11.
When the activated carbon plate 12 is saturated by adsorption and needs to be replaced, the driving motor 804 drives the annular frame 801 to rotate, so that the first activated carbon plate 12 at the upper end rotates to the first communication hole 102, at this time, the first activated carbon plate 12 is separated from the limiting groove 802 under the action of self weight, after the first activated carbon plate 12 is separated from the limiting groove 802, the sliding blocks 121 at two ends of the activated carbon plate 12 fall into the second cavity 702 along the sliding grooves 122 in the first communication hole 102, and then the driving motor 804 drives the annular frame 801 to rotate to the second communication hole 107 again, so that the new activated carbon plate 12 is manually installed in the limiting groove 802.
The driving motor 804 drives the annular frame 801 to respectively correspond to the first communication hole 102 and the second communication hole 107, so that the activated carbon plate 12 is replaced; by adding a plurality of limiting grooves 802 in the annular frame 801, more active carbon plates 12 can be conveniently installed, and the filtering area of mixed gas is increased.
After the fluid chamber 6 is sealed, the mixed gas will remain in the fluid chamber, when the activated carbon plate 12 is replaced, the mixed gas will enter the second chamber 702 along with the activated carbon plate 12, when the activated carbon plate 12 in the second chamber 702 is full, the worker can clean the activated carbon plate 12 in the second chamber 702, and the mixed gas entering the space between the push plate 101 and the piston plate 901 is diffused into the air, thereby polluting the air or damaging the body of the worker.
As shown in fig. 2 to 11, the negative pressure parts 9 are provided in two groups, and include piston plates 901, the piston plates 901 are slidably and sealingly provided in the interior of the material receiving box 7, and the negative pressure parts 9 can suck the mixed gas remaining in the fluid chamber 6 into the interior thereof and generate negative pressure in the fluid chamber 6 when moving. The two ends inside the material receiving box 7 are respectively provided with a first cavity 701 and a second cavity 702, the piston plate 901 slides in the first cavity 701 in a sealing way, a first pipeline 902 is communicated between the first cavity 701 and the fluid cavity 6, an electric telescopic piece 903 is fixedly arranged between the piston plate 901 and the first cavity 701, the electric telescopic piece 903 is electrically connected with a control system, a plurality of push rods 904 are fixedly arranged at one end, far away from the electric telescopic piece 903, of the piston plate 901, and the push rods 904 are used for pushing the dropped activated carbon plates 12.
The air flow parts 10, the air flow parts 10 are arranged into two groups, the air flow parts 10 are arranged between the storage box 11 and the material receiving box 7, the air flow parts comprise a push plate 101, the push plate 101 is arranged in the material receiving box 7 in a sealing sliding manner, and the negative pressure part 9 pushes the air flow parts 10 in the moving process so that the air flow in the air flow parts can extrude the activated carbon plates 12 in the storage box 11. The push plate 101 slides in the second cavity 702 in a sealing manner, the two ends of the push plate 101 are provided with protruding blocks, the push plate 101 can move along the sliding groove 122 in the axial direction through the matching of the protruding blocks and the sliding groove 122, the second cavity 702 is identical to the storage box 11 in space, a first communication hole 102 is formed between the second cavity 702 and the fluid cavity 6, a piston cylinder 103 is fixedly arranged in the storage box 11, a second pipeline 104 is communicated between the piston cylinder 103 and the second cavity 702, a piston rod 105 slides in the piston cylinder 103 in a sealing manner, a transverse plate 106 is fixedly arranged at one end of the piston rod 105, and the transverse plate 106 can push a plurality of activated carbon plates 12 in the storage box 11.
The shutoff portions 13, shutoff portions 13 set up into two sets, and shutoff portions 13 set up in the bottom both ends of rose box 1, and shutoff portions 13 correspond to fluid chamber 6, and it includes rectangular frame 131, and rectangular frame 131 fixed mounting is in the upper end of negative pressure portion 9, and negative pressure portion 9 can trigger shutoff portions 13 when the motion and relieve the sealed of fluid chamber 6. The rectangular frame 131 is fixedly arranged at the upper end of the piston plate 901, the inner wall of the first communication hole 102 is rotatably provided with the sealing plate 132, the two ends of the bottom of the filter tank 1 are provided with long grooves corresponding to the two ends of the rectangular frame 131, the two ends of the rectangular frame 131 axially move in the long grooves, the diameter of a rectangular hole in the middle of the rectangular groove is larger than or equal to that of the sealing plate 132, the two ends of the sealing plate 132 are provided with air bags, when the sealing plate 132 is in a closed state, the air bags plug the sliding grooves 122, mixed gas is prevented from entering the material collecting tank 7, and the air bags cannot influence the rotation of the sealing plate 132.
When the driving motor 804 drives the first activated carbon plate 12 at the upper end of the annular frame 801 to rotate to the first communication hole 102, the controller controls the electric telescopic member 903 to move, as shown in fig. 10, the electric telescopic member 903 stretches out by a first length to drive the piston plate 901 and the push rod 904 to move towards the second cavity 702, the piston plate 901 sucks the residual mixed gas in the fluid cavity 6 into the piston plate 901 through the first pipeline 902 in the moving process, at this moment, negative pressure is generated in the fluid cavity 6, and the mixed gas is prevented from entering the cavity between the push plate 101 and the piston plate 901 when the activated carbon plate 12 is replaced, and is diffused into the air to cause pollution when the activated carbon plate 12 is cleaned.
When the electric telescopic member 903 extends out of the first length, the piston plate 901 drives the rectangular frame 131 to move, one end of the rectangular frame 131 away from the electric telescopic member 903 is separated from the support of the sealing plate 132, the sealing plate 132 turns downwards after being short of the support and is separated from the seal of the first communicating hole 102, at this time, the activated carbon plate 12 in the limiting groove 802 is separated, the separated activated carbon plate 12 falls into the first communicating hole 102 and moves downwards along the sliding groove 122, and after the activated carbon plate 12 reaches the preset position, one side of the activated carbon plate 12 contacts with one end of the push rod 904.
As shown in fig. 11, the controller controls the electric telescopic member 903 to extend out by a second length, and drives the piston plate 901 and the push rod 904 to push the saturated activated carbon plate 12 to move towards one end far away from the electric telescopic member 903, the moving distance is the thickness of the activated carbon plate 12, the saturated activated carbon plate 12 drives the push plate 101 in the moving process, the push plate 101 pushes the gas in the second cavity 702 in the moving process and conveys the gas into the piston cylinder 103 through the second pipeline 104, at this time, the gas in the piston cylinder 103 pushes the piston rod 105 and the cross plate 106 to move, the cross plate 106 pushes the multiple activated carbon plates 12 in the storage box 11 to move in the moving process, and moves the thickness of one activated carbon plate 12, at this time, the annular frame 801 is corresponding to the second communication hole 107 under the action of the driving motor 804, the pushed activated carbon plate 12 falls into the limit groove 802 through the second communication hole 107 to be replenished, after the first activated carbon plate 12 is replaced, the electric telescopic member 903 drives the piston plate 901, the push rod 904, the piston frame 131 and the sealing plate 132 to reset, at this time, the rectangular frame 131 is driven by the rectangular frame 131 in the reset rectangular frame in the resetting process and the rectangular frame 131 is driven to move to the rectangular frame 132 to move, at this time, and the sealing plate 132 is completely overturned, and the sealing plate 132 is completely moves to the sealing plate 132 is contacted with the sealing plate 132 in the position in the process, at this time, and the sealing plate 132 is completely and the sealing plate is completely and moved to the sealing plate 132 is reversely moved in the position by the sealing plate is moved in the position and the sealing position is completely and moved to the sealing plate is moved to the sealing plate 132. The above operation is repeated when the second activated carbon sheet 12 and the third activated carbon sheet 12 are replaced.
The driving motor 804 drives the annular frame 801 to correspond to the first communication hole 102 and the second communication hole 107 respectively, and the automatic replacement of the activated carbon plate 12 is realized through the matching of the negative pressure part 9, the air flow part 10 and the plugging part 13, so that the convenience of replacing the activated carbon plate 12 is improved, and the overall production efficiency is also ensured. Through the cooperation of push pedal 101, second pipeline 104, piston cylinder 103, piston rod 105, diaphragm 106, electric telescopic 903, piston plate 901 and push rod 904, further promoted the active carbon plate 12 in the storage tank 11 and can keep pressure invariable by the extruded in-process, and then guarantee that every active carbon plate 12 all easily drops. The mixed gas remained in the fluid cavity 6 is sucked into the interior of the piston plate 901, the first pipeline 902 and the electric telescopic piece 903 under the action of the piston plate 901, so that negative pressure is generated in the fluid cavity 6, the mixed gas is prevented from entering between the push plate 101 and the piston plate 901 along with the activated carbon plate 12 when the activated carbon plate 12 is replaced, the problem of gas leakage occurs when the activated carbon plate 12 is cleaned, and the production safety is improved.
The invention also discloses a disilane preparation process, which comprises the following steps:
Step one, adding raw materials or reactants into a reaction kettle 4, and reacting under the action of the reaction kettle 4;
step two, the mixed gas of silane and disilane generated in the reaction kettle 4 enters the fluid cavity 6 through the three-way air inlet pipe 2, and water impurities are filtered by the mixed gas under the action of the multiple activated carbon plates 12;
and step three, the filtered mixed gas enters a molecular sieve adsorption tower 5 through a three-way gas outlet pipe 3, and the chlorsilane gas in the mixed gas is removed, so that an disilane product is finally obtained.
The embodiments of the present application have been described above with reference to the accompanying drawings, in which the embodiments of the present application and features of the embodiments may be combined with each other without conflict, the present application is not limited to the above-described embodiments, which are merely illustrative, not restrictive, of the present application, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are protected by the present application.
Claims (10)
1. The utility model provides a disilane preparation facilities, includes rose box (1), the both ends of rose box (1) communicate respectively has tee bend intake pipe (2) and tee bend outlet duct (3), the one end intercommunication of tee bend intake pipe (2) has reation kettle (4), the one end intercommunication of tee bend outlet duct (3) has molecular sieve adsorption tower (5), a serial communication port, the inside of rose box (1) is provided with a plurality of fluid chambers (6), the upper and lower both ends of rose box (1) are provided with a plurality of storage tank (11) and receipts workbin (7) respectively, and every receipts workbin (7) and storage tank (11) correspond with fluid chamber (6) respectively, still include:
The filter parts (8) are arranged in two groups, the filter parts (8) comprise annular frames (801), the annular frames (801) are rotatably arranged in the fluid cavity (6), a plurality of active carbon plates (12) are arranged in the annular frames (801), and the filter parts (8) can realize the replacement of the active carbon plates (12) when rotating;
The negative pressure parts (9) are arranged in two groups, the negative pressure parts (9) comprise piston plates (901), the piston plates (901) are arranged in the material receiving box (7) in a sealing sliding manner, and the negative pressure parts (9) can suck the residual mixed gas in the fluid cavity (6) into the interior of the material receiving box and generate negative pressure in the fluid cavity (6) when in motion;
The air flow parts (10), the air flow parts (10) are arranged into two groups, the air flow parts (10) are arranged between the storage box (11) and the material receiving box (7), the air flow parts comprise push plates (101), the push plates (101) are arranged in the material receiving box (7) in a sealing sliding manner, and the negative pressure parts (9) push the air flow parts (10) in the moving process so that air flow in the air flow parts can extrude the activated carbon plates (12) in the storage box (11).
2. The disilane preparation device according to claim 1, wherein a plurality of limiting grooves (802) are formed in the annular frame (801), the activated carbon plate (12) is installed in the limiting grooves (802), a plurality of filter screens (803) are fixedly installed on the outer wall of the annular frame (801), a driving motor (804) is fixedly installed at one end of the annular frame (801), and the driving motor (804) is fixedly installed at one end of the filter box (1).
3. The disilane preparation device according to claim 1, wherein the two ends of the receiving box (7) are respectively provided with a first cavity (701) and a second cavity (702).
4. The disilane preparation device according to claim 2, wherein the piston plate (901) is hermetically slid in the first cavity (701), a first pipeline (902) is communicated between the first cavity (701) and the fluid cavity (6), an electric telescopic piece (903) is fixedly installed between the piston plate (901) and the first cavity (701), a plurality of push rods (904) are fixedly installed at one end, far away from the electric telescopic piece (903), of the piston plate (901), and the push rods (904) are used for pushing the dropped activated carbon plate (12).
5. The disilane preparation device according to claim 2, wherein the push plate (101) is hermetically slid in the second cavity (702), and a first communication hole (102) is formed between the second cavity (702) and the fluid chamber (6).
6. The disilane preparation device according to claim 5, further comprising two plugging portions (13), wherein the plugging portions (13) are arranged in two groups, the plugging portions (13) are arranged at two ends of the bottom of the filter box (1) and comprise rectangular frames (131), the rectangular frames (131) are fixedly arranged at the upper ends of the negative pressure portions (9), and the negative pressure portions (9) can trigger the plugging portions (13) to release the sealing of the fluid cavity (6) when moving; the rectangular frame (131) is fixedly arranged at the upper end of the piston plate (901), and the sealing plate (132) is rotatably arranged on the inner wall of the first communication hole (102).
7. An disilane preparation apparatus according to claim 1, wherein a second communication hole (107) is provided between each of the fluid chambers (6) and the corresponding storage tank (11).
8. The disilane preparation device according to claim 4, wherein a piston cylinder (103) is fixedly installed in the storage box (11), a second pipeline (104) is communicated between the piston cylinder (103) and the second cavity (702), a piston rod (105) is hermetically slid in the piston cylinder (103), a transverse plate (106) is fixedly installed at one end of the piston rod (105), and the transverse plate (106) can push a plurality of activated carbon plates (12) in the storage box (11).
9. The disilane preparation device according to claim 5, wherein the two ends of the activated carbon plate (12) are fixedly provided with sliding blocks (121), a sliding groove (122) is formed between the first communication hole (102) and the second cavity (702), and the sliding blocks (121) can move along the sliding groove (122).
10. An disilane preparation process applied to an disilane preparation device according to claim 1, comprising the following steps:
step one, adding raw materials or reactants into a reaction kettle (4), and reacting under the action of the reaction kettle (4);
step two, the silane and disilane mixed gas generated in the reaction kettle (4) enters the fluid cavity (6) through the three-way air inlet pipe (2), and water impurities are filtered under the action of the multiple activated carbon plates (12);
And step three, the filtered mixed gas enters a molecular sieve adsorption tower (5) through a three-way gas outlet pipe (3) to remove the chlorsilane gas in the mixed gas, and finally the disilane product is obtained.
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| EP0689861A1 (en) * | 1994-06-24 | 1996-01-03 | Friatec Ag Keramik- Und Kunststoffwerke | Gas filter |
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