CN118310663A - Gesture adjustable and contact force perception testing platform - Google Patents
Gesture adjustable and contact force perception testing platform Download PDFInfo
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- CN118310663A CN118310663A CN202410683289.5A CN202410683289A CN118310663A CN 118310663 A CN118310663 A CN 118310663A CN 202410683289 A CN202410683289 A CN 202410683289A CN 118310663 A CN118310663 A CN 118310663A
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- 238000001514 detection method Methods 0.000 claims abstract description 38
- 239000000523 sample Substances 0.000 claims abstract description 25
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 238000007689 inspection Methods 0.000 claims 1
- 238000009434 installation Methods 0.000 description 2
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- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Abstract
The invention belongs to the technical field of precision detection equipment, and discloses a gesture-adjustable and contact force sensing detection platform which comprises a base station, a multi-axis displacement station, a gesture adjusting assembly and a contact detection assembly, wherein the base station is provided with a bracket; the multi-axis displacement platform is arranged on the base platform and comprises an X-axis adjusting mechanism, a Y-axis adjusting mechanism and a Z-axis adjusting mechanism; the gesture adjusting assembly comprises a base, an objective table and a first driving mechanism; the contact detection assembly is erected on the bracket and is positioned above the objective table; the contact detection assembly comprises a probe seat, a supporting plate, a pressure sensor and a flexible hinge; the probe seat is connected with the supporting plate through the pressure sensor, and the supporting plate is connected with the bracket through the flexible hinge. With this structural design, can be convenient nimble realization objective table and the multiaxis displacement adjustment and the alignment of probe seat, effectively promote the alignment precision and the stability between the test piece on probe and the objective table then.
Description
Technical Field
The invention relates to the technical field of precision detection equipment, in particular to a gesture-adjustable and contact force sensing detection platform.
Background
When the workpiece is precisely detected, the gesture of the workpiece is required to be continuously adjusted in multiple degrees of freedom until the workpiece is aligned with the contact detection assembly above, the contact detection assembly is uniformly stressed and cannot rigidly collide with the workpiece below when the contact detection assembly is contacted with the workpiece in the process, and meanwhile, the workpiece can be conveniently adjusted, so that the requirements are met, and the gesture-adjustable and contact force sensing detection platform is required to be designed.
Disclosure of Invention
The invention aims to provide a gesture-adjustable and contact force-sensing detection platform, which not only can realize multi-axis adjustment of an objective table, but also can enable the stress of a probe to be more uniform through the arrangement of a pressure sensor and a flexible hinge in a contact detection assembly, and simultaneously, the alignment precision of the probe and a workpiece to be detected is effectively improved.
To achieve the purpose, the invention adopts the following technical scheme:
An attitude-adjustable and contact force-sensing detection platform, comprising:
a base station, on which a bracket is arranged;
the multi-axis displacement platform is arranged on the base platform and comprises an X-axis adjusting mechanism, a Y-axis adjusting mechanism matched with the X-axis adjusting mechanism and a Z-axis adjusting mechanism matched with the Y-axis adjusting mechanism;
the gesture adjusting assembly is arranged above the Z-axis adjusting mechanism and comprises a base matched with the Z-axis adjusting mechanism, an objective table rotationally connected with the base and a first driving mechanism for driving the objective table to rotate around the Z axis;
the contact detection assembly is erected on the bracket and is positioned above the objective table; the contact detection assembly comprises a probe seat, a supporting plate, a pressure sensor and a flexible hinge; the probe seat is connected with the supporting plate through the pressure sensor, and the supporting plate is connected with the bracket through a flexible hinge.
The object stage is characterized in that a connecting piece is arranged on one side wall of the object stage, which is opposite to the first driving mechanism, the connecting piece comprises a first connecting piece and a second connecting piece, one end of the first connecting piece is respectively fastened with the side wall of the object stage, a notch for avoiding the second connecting piece is formed in the first connecting piece, and the other ends of the first connecting piece and the second connecting piece are respectively fastened with the driving end of the first driving mechanism.
The first driving mechanism comprises a first motor fastened with the base, a first screw rod connected with the driving end of the first motor, a driving block connected with the first screw rod, and a tension spring arranged between the driving block and the first motor; the other ends of the first connecting sheet and the second connecting sheet after the cross fit are respectively and correspondingly connected with the two ends of the driving block.
The X-axis adjusting mechanism comprises first guide rails horizontally arranged at intervals along the X-axis direction of the base, a first linear motor arranged between the two first guide rails, and a moving platform connected with the first linear motor and the first guide rails.
The Y-axis adjusting mechanism comprises second guide rails arranged on the motion platform and along the Y-axis direction of the base station, and a second linear motor arranged between the two second guide rails; the second guide rail and the second linear motor are connected with the Z-axis adjusting mechanism.
The Z-axis adjusting mechanism comprises an upper supporting seat and a lower supporting seat which are arranged at intervals, a wedge-shaped seat which is arranged between the upper supporting seat and the lower supporting seat and is in sliding fit with the upper supporting seat and the lower supporting seat, a Z-axis guiding mechanism which is arranged between the upper supporting plate and the lower supporting plate, and a second driving mechanism which is used for driving the wedge-shaped seat to reciprocate and enables the upper supporting plate to be adjusted up and down along the Z-axis guiding mechanism.
The base is fastened with the upper supporting plate, the upper surface of the base is parallel to the table top of the objective table, and a shaft hole matched with the rotary shaft of the objective table is formed in the middle of the base.
The second driving mechanism comprises a second motor fastened with the lower supporting plate, a wire sleeve embedded in one side wall of the frame body of the wedge-shaped seat, and a second screw rod with two ends respectively matched with the second motor and the wire sleeve.
The front surface and the back surface of the wedge-shaped seat are both in sliding connection with the corresponding upper supporting plate and lower supporting plate through third guide rails.
The Z-axis guiding mechanism comprises a guide seat fastened with the lower supporting plate and a fourth guide rail fastened with the guide seat along the Z-axis direction of the base station, and the fourth guide rail is in sliding connection with the upper supporting plate.
The invention has the beneficial effects that: the invention provides a gesture-adjustable and contact force sensing detection platform, which comprises a base station, a multi-axis displacement station, a gesture adjusting component and a contact detection component, wherein the base station is provided with a bracket; the multi-axis displacement platform is arranged on the base platform and comprises an X-axis adjusting mechanism, a Y-axis adjusting mechanism and a Z-axis adjusting mechanism; the gesture adjusting assembly is arranged above the Z-axis adjusting mechanism and comprises a base matched with the Z-axis adjusting mechanism, an objective table rotationally connected with the base and a first driving mechanism for driving the objective table to rotate around the Z axis; the contact detection assembly is erected on the bracket and is positioned above the objective table; the contact detection assembly comprises a probe seat, a supporting plate, a pressure sensor and a flexible hinge; the probe seat is connected with the supporting plate through the pressure sensor, and the supporting plate is connected with the bracket through the flexible hinge. With this structural design, can conveniently nimble realization objective table and the multiaxis of probe seat adjust and aim at, effectively promote the alignment precision and the stability between probe and the work piece that awaits measuring then.
Drawings
FIG. 1 is an isometric view of an adjustable attitude and contact force sensing detection platform of the present invention.
Fig. 2 is an isometric view of the probe mount of fig. 1 separated from the support plate.
Fig. 3 is an isometric view of the Z-axis adjustment mechanism of fig. 1.
Fig. 4 is an isometric view of the attitude adjustment assembly of fig. 1.
Fig. 5 is an exploded view of the attitude adjustment assembly of fig. 4.
Fig. 6 is a partial enlarged view at a in fig. 2.
Detailed Description
The invention is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present invention are shown in the drawings.
In the description of the present invention, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.
Referring to fig. 1 to 6, the wafer probe platform is taken as an example for illustration of the gesture-adjustable and contact force-sensing detection platform provided by the embodiment, and the gesture-adjustable and contact force-sensing detection platform is provided with a multi-axis displacement platform 2, a gesture adjusting component 3 and a contact detecting component 4, so that the adjustment of a shaft of an objective table can be conveniently and flexibly realized, and meanwhile, the alignment precision and stability between a probe and a wafer can be effectively improved through the arrangement of a pressure sensor and a flexible hinge in the contact detecting component 4.
Specifically, the gesture-adjustable and contact force-sensing detection platform comprises a base station 1, a multi-axis displacement station 2, a gesture adjusting component 3 and a contact detection component 4, wherein a support 5 is arranged on the table top of the base station 1, preferably, the support 5 is arranged as a portal frame, the contact detection component 4 is arranged on a beam of the portal frame, the gesture adjusting component 3 is arranged below the contact detection component 4, and the multi-axis displacement station 2 is used for adjusting the position of the gesture adjusting component 3.
Further, the multi-axis displacement stage 2 is mounted on the upper surface of the base 1, and the multi-axis displacement stage 2 includes an X-axis adjustment mechanism 21, a Y-axis adjustment mechanism 22 coupled to the X-axis adjustment mechanism 21, and a Z-axis adjustment mechanism 23 coupled to the Y-axis adjustment mechanism 22; preferably, the X-axis adjusting mechanism 21 includes first guide rails 211 horizontally arranged at intervals in the X-axis direction of the base, a first linear motor 212 arranged between the two first guide rails 211, and a moving platform 213 connected to the first linear motor 212 and the first guide rails 211; the Y-axis adjusting mechanism 22 includes second guide rails 221 provided on the motion platform 213 and along the Y-axis direction of the base, and a second linear motor 222 provided between the two second guide rails 221; wherein the second guide rail 221 and the second linear motor 222 are connected with the Z-axis adjusting mechanism 23. With this structural design, by driving the first linear motor 212 and the second linear motor 222, the posture adjusting assembly 3 provided above the Z-axis adjusting mechanism 23 is driven to move in the X-axis and Y-axis directions of the base, and then the posture adjusting assembly 3 is aligned with the contact detecting assembly 4 above.
Further, in order to adjust the contact force between the wafer and the probe, the Z-axis adjusting mechanism 23 includes an upper support seat 231 and a lower support seat 232 disposed at intervals, a wedge seat 233 disposed between the upper support seat 231 and the lower support seat 232 and slidably engaged with the upper support seat 231 and the lower support seat 232, a Z-axis guiding mechanism 234 disposed between the upper support seat 231 and the lower support seat 232, and a second driving mechanism 235 for driving the upper support seat 231 to adjust up and down along the Z-axis guiding mechanism 234 when the wedge seat 233 reciprocates; preferably, the front and back sides of the wedge-shaped seat 233 are slidably connected with the corresponding upper support seat 231 and lower support seat 232 through a third guide rail; the Z-axis guide mechanism 234 includes a guide base 2341 fastened to the lower support base 232, and a fourth guide rail 2342 fastened to the guide base 2341 in the Z-axis direction of the base, and the fourth guide rail 2342 is slidably connected to the upper support base 231. Further preferably, in order to facilitate the installation of the second driving mechanism 235, the upper support seat 231 and the wedge seat 233 are both provided in a frame shape, and the second driving mechanism 235 which is disposed in the frame and fastened to the lower support seat 232 includes a second motor 2351 fastened to the lower support seat 232, a wire sleeve 2352 embedded in a side wall of the frame of the wedge seat 233, and a second screw rod 2353 with both ends respectively engaged with the second motor 2351 and the wire sleeve 2352.
The Z-axis adjusting mechanism 23 adopting the structural design drives the second screw rod 2353 to rotate through the second motor 2351, and then drives the wedge-shaped seat 233 to move relative to the upper supporting seat 231 and the lower supporting seat 232, and then drives the upper supporting seat 231 to slide along the fourth guide rail 2342 arranged in the Z-axis direction of the base, so that the contact force between the objective table arranged above the Z-axis adjusting mechanism 23 and the probe in the contact detection assembly 4 is adjusted, and meanwhile, the adjustment of the objective table along the Z-axis direction of the base is also realized.
Still further, preferably, the posture adjustment assembly 3 includes a base 31 that is matched with the Z-axis adjustment mechanism 23, a stage 32 that is rotatably connected to the base 31, and a first driving mechanism 33 for driving the stage 32 to rotate around the Z-axis; wherein, the base 31 is fastened with the upper supporting seat 231, the upper surface of the base 31 is parallel to the table surface of the object stage, and the middle part of the base 31 is provided with a shaft hole matched with the rotation shaft of the object stage 32; in order to realize the angle adjustment of the stage 32 around the Z axis direction of the base, a connecting member 321 is disposed on a side wall of the stage 32 opposite to the first driving mechanism 33, preferably, the connecting member 321 includes a first connecting piece 321a and a second connecting piece 321b, one end of each of which is fastened to the side wall of the stage 32, the other ends of the first connecting piece 321a and the second connecting piece 321b are fastened to the driving end of the first driving mechanism 33, and the first connecting piece 321a is provided with a notch for avoiding the second connecting piece 321b, so that the first connecting piece 321a and the second connecting piece 321b are fastened to the first driving mechanism 33 after being in cross fit, and the stage 32 is driven to rotate by the traction of the first driving mechanism 33.
More specifically, the first driving mechanism 33 includes a first motor 331 fastened to the base 31, a first screw 332 connected to a driving end of the first motor 331, a driving block 333 connected to the first screw 332, and a tension spring 334 disposed between the driving block 333 and the first motor 331; the other ends of the first connecting piece 321a and the second connecting piece 321b after cross fitting are respectively connected with the two ends of the driving block 333 correspondingly. The tension spring 334 can compensate the shake between the driving block 333 and the first screw 332 by elasticity, so that the driving block 333 moves more stably. The first driving mechanism 33 with this structural design drives the driving block 333 to reciprocate along the length direction of the first screw 332 under the driving action of the motor through the screw, so that the first connecting piece 321a and the second connecting piece 321b are pulled by the driving block 333, and the objective table 32 is driven to rotate around the shaft hole on the base 31. Thereby satisfying the adjustment of the angle a of the stage 32 about the Z axis.
Furthermore, the above structure satisfies the multi-axis adjustment of the stage 32, and the contact detecting assembly 4 includes a probe seat 41, a support plate 42, a pressure sensor 43, and a flexible hinge 44, so that the force applied when the probe contacts the wafer on the stage 32 is more uniform and the contact force between the probe and the wafer can be adaptively adjusted; when in installation, the probe seat 41 is connected with the supporting plate 42 through the pressure sensor 43, and the supporting plate 42 is connected with the beam of the bracket 5 through the flexible hinge 44. The pressure sensor 43 can be electrically connected with an external electric control device, the external electric control device is electrically connected with the first motor 331 and the second motor 2351 in the multi-axis displacement table 2 and the displacement table assembly 3, so that the displacement of the multi-axis displacement table 2 and the displacement table assembly 3 is controlled by the external electric control device according to the pressure value fed back by the pressure sensor 43, and then the stress is more uniform when a plurality of probes are contacted with a wafer; while also being able to adaptively adjust the contact force between the probe and the wafer through the provision of the flexible hinge 44.
The technical principle of the present invention is described above in connection with the specific embodiments. The description is made for the purpose of illustrating the general principles of the invention and should not be taken in any way as limiting the scope of the invention. Other embodiments of the invention will be apparent to those skilled in the art from consideration of this specification without undue burden.
Claims (10)
1. An attitude-adjustable and contact force-sensing detection platform, comprising:
a base station, on which a bracket is arranged;
the multi-axis displacement platform is arranged on the base platform and comprises an X-axis adjusting mechanism, a Y-axis adjusting mechanism matched with the X-axis adjusting mechanism and a Z-axis adjusting mechanism matched with the Y-axis adjusting mechanism;
the gesture adjusting assembly is arranged above the Z-axis adjusting mechanism and comprises a base matched with the Z-axis adjusting mechanism, an objective table rotationally connected with the base and a first driving mechanism for driving the objective table to rotate around the Z axis;
the contact detection assembly is erected on the bracket and is positioned above the objective table; the contact detection assembly comprises a probe seat, a supporting plate, a pressure sensor and a flexible hinge; the probe seat is connected with the supporting plate through the pressure sensor, and the supporting plate is connected with the bracket through a flexible hinge.
2. The gesture-adjustable and contact force-sensing detection platform according to claim 1, wherein a side wall of the object stage opposite to the first driving mechanism is provided with a connecting piece, the connecting piece comprises a first connecting piece and a second connecting piece, one end of the first connecting piece is respectively fastened with the side wall of the object stage, a notch for avoiding the second connecting piece is formed in the first connecting piece, and the other ends of the first connecting piece and the second connecting piece are respectively fastened with the driving end of the first driving mechanism.
3. The gesture-adjustable and contact force-sensing detection platform according to claim 2, wherein the first driving mechanism comprises a first motor fastened with a base, a first screw rod connected with a driving end of the first motor, a driving block connected with the first screw rod, and a tension spring arranged between the driving block and the first motor; the other ends of the first connecting sheet and the second connecting sheet after the cross fit are respectively and correspondingly connected with the two ends of the driving block.
4. The gesture-adjustable and contact force-sensing detection platform according to claim 1, wherein the X-axis adjusting mechanism comprises first guide rails horizontally arranged at intervals along the X-axis direction of the base, a first linear motor arranged between the two first guide rails, and a moving platform connected with the first linear motor and the first guide rails.
5. The gesture-adjustable and contact force-sensing detection platform according to claim 4, wherein the Y-axis adjusting mechanism comprises a second guide rail arranged on the motion platform and along the Y-axis direction of the base, and a second linear motor arranged between the two second guide rails; the second guide rail and the second linear motor are connected with the Z-axis adjusting mechanism.
6. The gesture-adjustable and contact force-sensing detection platform according to claim 1, wherein the Z-axis adjusting mechanism comprises an upper supporting seat and a lower supporting seat which are arranged at intervals, a wedge-shaped seat which is arranged between the upper supporting seat and the lower supporting seat and is in sliding fit with the upper supporting seat and the lower supporting seat, a Z-axis guiding mechanism which is arranged between the upper supporting plate and the lower supporting plate, and a second driving mechanism which is used for driving the upper supporting plate to adjust up and down along the Z-axis guiding mechanism when the wedge-shaped seat reciprocates.
7. The gesture-adjustable and contact force-sensing detection platform according to claim 6, wherein the base is fastened to the upper support plate, the upper surface of the base is parallel to the surface of the stage, and a shaft hole is formed in the middle of the base, and is matched with the rotation shaft of the stage.
8. The gesture-adjustable and contact force-sensing detection platform according to claim 6, wherein the second driving mechanism comprises a second motor fastened with the lower supporting plate, a wire sleeve embedded in a side wall of the frame body of the wedge-shaped seat, and a second screw rod with two ends respectively matched with the second motor and the wire sleeve.
9. The adjustable gesture and contact force sensing and detecting platform according to claim 6, wherein the front and back surfaces of the wedge-shaped seat are slidably connected with the corresponding upper support plate and lower support plate through third guide rails.
10. The adjustable gesture and contact force sensing inspection platform of claim 6, wherein the Z-axis guiding mechanism comprises a guide holder fastened to the lower support plate, and a fourth guide rail fastened to the guide holder along the Z-axis direction of the base, the fourth guide rail being slidably connected to the upper support plate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2024102283545 | 2024-02-29 | ||
| CN202410228354 | 2024-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118310663A true CN118310663A (en) | 2024-07-09 |
Family
ID=91728300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410683289.5A Pending CN118310663A (en) | 2024-02-29 | 2024-05-29 | Gesture adjustable and contact force perception testing platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118310663A (en) |
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2024
- 2024-05-29 CN CN202410683289.5A patent/CN118310663A/en active Pending
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