CN118243731A - Polycrystalline silicon rod surface defect detection device and method - Google Patents

Abstract

The present invention relates to the technical field of polysilicon rod production, and provides a polysilicon rod surface defect detection device and method, including a base and a polysilicon rod body, the base is fixedly provided with symmetrically arranged side panels, a horizontal panel is fixedly provided between the side panels, a lifting assembly is installed on the horizontal panel, a driving assembly is installed on the lifting assembly, and an infrared flaw detection test is provided on the driving assembly. During the use of the present invention, the infrared flaw detection tester on the infrared flaw detection tester mounting block is driven by the driving assembly to move horizontally, and the polysilicon rod body to be detected is driven to rotate at the same time, and a comprehensive detection is performed by the infrared flaw detection tester in the circular groove, and this process facilitates the removal and replacement of the polysilicon rod that has been detected, and will not affect the detection of new polysilicon rods, and the dust removal assembly and the collection assembly are used to clean the dust on the polysilicon rod to be detected, effectively improving the detection effect of the device on the polysilicon rod.

Description

A polysilicon rod surface defect detection device and method

Technical Field

The present invention relates to the technical field of polycrystalline silicon rod production, and in particular to a device and method for detecting surface defects of polycrystalline silicon rods.

Background technique

Polysilicon rods have semiconductor properties and are extremely important excellent semiconductor materials. However, trace amounts of impurities can greatly affect their conductivity. They are widely used in the electronics industry as basic materials for manufacturing semiconductor radios, tape recorders, refrigerators, color TVs, video recorders, and electronic computers. They are made by chlorinating dry silicon powder with dry hydrogen chloride gas under certain conditions, followed by condensation, distillation, and reduction. Polysilicon rods need to be inspected for surface defects during production.

In the prior art, a Chinese patent with publication number "CN117054482A" discloses a device and method for detecting surface defects of a polysilicon rod, comprising a detection semi-ring and an adjustment plate. When the polysilicon rod to be detected is fixed and rotated to the position directly below the detection semi-ring, the two groups of detection semi-rings can be pushed to the side positions of the polysilicon rod by the push-out of the third electric hydraulic rod. Then, the infrared measurement unit can be sampled along the surface of the silicon rod by the rotation of the second motors at both ends. This solves the problem that the existing detection device rotates the polysilicon rod to meet the 360-degree image shooting requirement. At this time, the friction of the rolling structure on the silicon rod can easily cause wear on the surface of the silicon rod, thereby misleading subsequent defect detection and increasing the difficulty of processing and analysis.

However, the existing technology still has major deficiencies, such as:

When performing surface defect detection on polysilicon rods, an infrared flaw detector is used to perform detection on the polysilicon rods. The infrared flaw detector is an instrument specially used for flaw detection of cracks, impurities, black spots, shadows, microcrystals and other defects inside silicon blocks, silicon rods and silicon wafers in the production of polysilicon wafers. When detecting polysilicon rods, it is necessary to ensure the cleanliness of the surface of the polysilicon rods. In the scheme described above, it is impossible to perform surface cleaning on the polysilicon rods before testing, which may easily cause some dust to adhere to the surface of the polysilicon rods, resulting in inaccurate detection by the infrared flaw detector. Although personnel can manually clean the polysilicon rods before testing, this not only wastes manpower but also the effect of manual cleaning is not very good, and the problem of missing cleaning of the polysilicon rods may easily occur.

Summary of the invention

The object of the present invention is to provide a device and method for detecting surface defects of polycrystalline silicon rods to solve the problems raised in the above-mentioned background technology.

To achieve the above object, the present invention provides the following technical solutions:

A polycrystalline silicon rod surface defect detection device comprises a base and a polycrystalline silicon rod body, the base is fixedly mounted with symmetrically arranged side plates, a transverse plate is fixedly mounted between the side plates, a lifting assembly is mounted on the transverse plate, a driving assembly is mounted on the lifting assembly, and an infrared flaw detection test is arranged on the driving assembly;

A positioning assembly is disposed on the upper surface of the base and between the two side plates, and the position of the polycrystalline silicon rod body is positioned by the positioning assembly;

The base is provided with a dust removal component, through which the dust on the surface of the polycrystalline silicon rod body is cleaned.

Preferably, the lifting assembly includes a first electric push rod installed on the transverse plate, a lifting plate is fixedly installed on the output end of the first electric push rod, a positioning slide rod is fixedly installed on the lifting plate, and a positioning slide groove used in conjunction with the positioning slide rod is opened on the side plate.

Preferably, the driving assembly is mounted on a first motor on the lifting plate, a reciprocating screw is fixedly mounted on the output end of the first motor, a driving gear is fixedly mounted on the reciprocating screw, a moving block is movably mounted on the reciprocating screw and inside the driving gear, and a crescent pin is movably mounted on the moving block;

A mounting block is fixedly mounted on the moving block, a circular groove is formed on the mounting block, and the infrared flaw detector is mounted inside the circular groove.

Preferably, the positioning assembly includes a rotating assembly, the rotating assembly includes two positioning plates, the two positioning plates are symmetrically arranged on the base and located between the two side plates, a second motor is fixedly mounted on the positioning plates, and a rotating ring is rotatably mounted on the positioning plates and located outside the second motor;

A triangular star-shaped fixing plate is fixedly mounted on the output end of the second motor, a clamping assembly is arranged on the fixing plate, a stabilizing rod is fixedly mounted on the side end surface of the fixing plate, and one end of the stabilizing rod away from the fixing plate is fixedly mounted on the rotating ring.

Preferably, the clamping assembly includes a second electric push rod mounted on a fixed plate, a driven gear is fixedly mounted on the side end surface of the second electric push rod, a positioning block is fixedly mounted on the output end of the second electric push rod, a slot is provided on the positioning block, a third electric push rod is fixedly mounted in the slot, a clamping plate is fixedly mounted on the output end of the third electric push rod, and the driven gear is meshed with the driving gear.

Preferably, the dust removal component includes a third motor and a movable groove, the third motor is mounted on the base, the movable groove is arranged on the lower end surface of the base, a threaded rod is fixedly mounted on the output end of the third motor, a sliding block is movably mounted on the threaded rod, the sliding block is slidably mounted inside the movable groove, a fourth electric push rod is fixedly mounted on the sliding block, a U-shaped ring is fixedly mounted on the output end of the fourth electric push rod, and a cleaning brush is fixedly mounted inside the U-shaped ring.

Preferably, a limiting sliding block is fixedly mounted on the sliding block, and a limiting sliding groove used in conjunction with the limiting sliding block is provided on the inner side surface of the movable groove.

Preferably, a collecting assembly is provided on the base, the collecting assembly comprises a collecting box and a supporting block, a fan is fixedly mounted on the collecting box, a side end surface of the collecting box is connected with a first through pipe, an end of the first through pipe away from the collecting box is connected with a telescopic hose, an end of the telescopic hose away from the first through pipe is connected with a second through pipe, an end of the second through pipe away from the telescopic hose is connected with a shunt pipe, and the shunt pipe is connected with the collecting pipe;

The positioning block is fixedly mounted on the U-shaped ring, and the shunt pipe is fixedly mounted on the supporting block.

Preferably, the upper end surface of the base is provided with a straight through groove used in conjunction with the fourth electric push rod, and the straight through groove is connected to the movable groove.

A method for detecting surface defects of a polycrystalline silicon rod, such as the above-described device for detecting surface defects of a polycrystalline silicon rod, is characterized by comprising the following steps:

S1: When in use, the three polysilicon rod bodies to be inspected are taken between the two fixed plates, and the second electric push rod in the clamping group drives the positioning block to clamp and fix the three polysilicon rod bodies in turn, and then the fourth electric push rod in the dust removal assembly drives the U-shaped ring to rise, so that the cleaning bristles in the U-shaped ring wrap the polysilicon rod bodies to be inspected, and then the third motor drives the sliding block to move, and synchronously drives the U-shaped ring to move, and the surface of the polysilicon rod body is cleaned by the cleaning bristles;

S2: When the cleaning bristles on the U-shaped ring clean the polysilicon rod body, the fan in the collection assembly is started, and the dust raised by the cleaning bristles during cleaning is collected by the collection tube to prevent the dust from contaminating other polysilicon rod bodies on the fixed plate;

S3: After the cleaning is completed, the second motor in the rotating assembly drives the clamping assembly to rotate 120 degrees, so that the polysilicon rod body is in a vertical state;

S4: The driving assembly on the lifting plate is driven down by the lifting assembly, and when the driving gear in the driving assembly and the driven gear on the rotating assembly are meshed, and the circular groove is located outside the body of the polysilicon rod to be tested, the infrared flaw detector on the infrared flaw detector mounting block is driven horizontally by the driving assembly, and the body of the polysilicon rod to be tested is driven to rotate, and a comprehensive test is performed by the infrared flaw detector in the circular groove.

Compared with the prior art, the present invention has the following beneficial effects:

1. In the present invention, the driving assembly on the lifting plate is driven to descend by the lifting assembly, and when the driving gear in the driving assembly and the driven gear on the rotating assembly are meshed, and the circular groove is located outside the body of the polycrystalline silicon rod to be detected, the infrared flaw detector on the infrared flaw detector mounting block is driven by the driving assembly to move horizontally, and the body of the polycrystalline silicon rod to be detected is driven to rotate, and the infrared flaw detector in the circular groove is used to perform a comprehensive test. This process facilitates the removal and replacement of the polycrystalline silicon rod that has been tested, and will not affect the detection of new polycrystalline silicon rods, thereby improving the practicality of the device;

2. In the present invention, the fourth electric push rod in the dust removal assembly drives the U-shaped ring to rise, so that the cleaning bristles in the U-shaped ring wrap the polysilicon rod body to be tested, and then the third motor drives the sliding block to move, and synchronously drives the U-shaped ring to move, and the cleaning bristles are used to clean the surface of the polysilicon rod body, so that the infrared flaw detector has a better effect when performing testing;

3. In the present invention, the fan in the collection component is started, and the dust raised by the cleaning brush during cleaning is collected by a collection tube. The collected dust will be retained in a collection box, which is convenient for personnel to handle later, and effectively prevents the dust from contaminating other polysilicon rod bodies on the fixed plate, further improving the detection effect of the infrared flaw detector on the polysilicon rods.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the overall structure of the present invention;

Fig. 2 is a second schematic diagram of the overall structure of the present invention;

FIG3 is a schematic diagram of the structure of the clamping assembly in the present invention;

FIG4 is a schematic diagram of the structure of the meshing of the driving gear and the driven gear in the present invention;

FIG5 is a cross-sectional view of the base in the present invention;

FIG6 is a schematic diagram of the structure of the rotating assembly in the present invention;

FIG. 7 is a schematic diagram of the structure of the driving assembly in the present invention.

In the figure: 1, base; 2, polysilicon rod body; 3, side plate; 4, horizontal plate; 5, infrared flaw detector; 6, first electric push rod; 7, lifting plate; 8, positioning slide rod; 9, positioning slide groove; 10, first motor; 11, reciprocating screw rod; 12, driving gear; 13, moving block; 14, crescent pin; 15, mounting block; 16, circular groove; 17, positioning plate; 18, second motor; 19, rotating ring; 20, fixed plate; 21, stabilizing rod; 22, second electric push rod; 23, driven gear Gear; 24, positioning block; 25, slot; 26, third electric push rod; 27, clamping plate; 28, third motor; 29, moving slot; 30, threaded rod; 31, sliding block; 32, fourth electric push rod; 33, U-shaped ring; 34, cleaning brush; 35, limiting slider; 36, limiting slide slot; 37, collecting box; 38, supporting block; 39, fan; 40, first through pipe; 41, telescopic hose; 42, second through pipe; 43, diverter pipe; 44, collecting pipe; 45, straight through slot.

Detailed ways

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

Please refer to Figures 1-7, the present invention provides a technical solution:

Embodiment 1:

Please refer to Figures 1-4 and 6-7, a polycrystalline silicon rod surface defect detection device includes a base 1 and a polycrystalline silicon rod body 2, the base 1 is fixedly mounted with symmetrically arranged side panels 3, a transverse panel 4 is fixedly mounted between the side panels 3, a lifting assembly is mounted on the transverse panel 4, the lifting assembly includes a first electric push rod 6 mounted on the transverse panel 4, a lifting plate 7 is fixedly mounted on the output end of the first electric push rod 6, the lifting plate 7 is located below the transverse panel 4, a positioning slide bar 8 is fixedly mounted on the lifting plate 7, a positioning slide groove 9 used in conjunction with the positioning slide bar 8 is opened on the side panel 3, and the positioning slide bar 8 is limitedly slid in the positioning slide groove 9 to effectively ensure the stability of the lifting plate 7 during lifting;

A driving assembly is installed on the lifting assembly, and the driving assembly is installed on the first motor 10 on the lifting plate 7. A reciprocating screw 11 is fixedly installed on the output end of the first motor 10, and a driving gear 12 is fixedly installed on the reciprocating screw 11. A moving block 13 is movably installed on the reciprocating screw 11 and inside the driving gear 12. A crescent pin 14 is movably installed on the moving block 13, and a mounting block 15 is fixedly installed on the moving block 13. A circular groove 16 is opened on the mounting block 15, and the infrared flaw detector 5 is installed inside the circular groove 16. The driving assembly is provided with an infrared flaw detector 5. The number of the infrared flaw detector 5 is multiple, which is convenient for detecting multiple positions of the polycrystalline silicon rod body 2. The circular groove 16 and the polycrystalline silicon rod body 2 to be detected are in the same vertical direction, which is convenient for the infrared flaw detector 5 to detect the polycrystalline silicon rod body 2;

A positioning assembly is provided on the upper surface of the base 1 and between the two side plates 3, and the position of the polysilicon rod body 2 is positioned by the positioning assembly. The positioning assembly includes a rotating assembly, and the rotating assembly includes two positioning plates 17. The two positioning plates 17 are symmetrically arranged on the base 1 and between the two side plates 3. A second motor 18 is fixedly installed on the positioning plates 17, and a rotating ring 19 is rotatably installed on the positioning plates 17 and outside the second motor 18;

A triangular star-shaped fixing plate 20 is fixedly mounted on the output end of the second motor 18, a clamping assembly is provided on the fixing plate 20, a stabilizing rod 21 is fixedly mounted on the side end surface of the fixing plate 20, and one end of the stabilizing rod 21 away from the fixing plate 20 is fixedly mounted on the rotating ring 19, and the stabilizing rod 21 rotates synchronously with the rotating ring 19 to ensure the stability of the fixing plate 20 during rotation;

The clamping assembly includes a second electric push rod 22 mounted on a fixed plate 20, a driven gear 23 is fixedly mounted on the side end surface of the second electric push rod 22, a positioning block 24 is fixedly mounted on the output end of the second electric push rod 22, a slot 25 is provided on the positioning block 24, a third electric push rod 26 is fixedly mounted in the slot 25, a clamping plate 27 is fixedly mounted on the output end of the third electric push rod 26, and the driven gear 23 is meshed with the driving gear 12.

In this embodiment, the driving assembly on the lifting plate 7 is driven to descend by the lifting assembly, and when the driving gear 12 in the driving assembly and the driven gear 23 on the rotating assembly are meshed, and the circular groove 16 is located on the outside of the polycrystalline silicon rod body 2 to be detected, the infrared flaw detector 5 on the mounting block 15 of the infrared flaw detector 5 is driven by the driving assembly to move horizontally, and the polycrystalline silicon rod body 2 to be detected is driven to rotate, and a comprehensive detection is performed by the infrared flaw detector 5 in the circular groove 16. This process facilitates the removal and replacement of the polycrystalline silicon rod that has been tested, and will not affect the detection of new polycrystalline silicon rods, thereby improving the practicality of the device.

Embodiment 2:

Please refer to Figures 1-2 and 5. On the basis of the first embodiment, in order to prevent the dust on the surface of the polycrystalline silicon rod from affecting the detection effect of the infrared flaw detector 5 on the infrared flaw detector 5, a dust removal component is used to avoid this phenomenon. The base 1 is provided with a dust removal component, and the dust on the surface of the polycrystalline silicon rod body 2 is cleaned by the dust removal component. The dust removal component includes a third motor 28 and a movable groove 29. The third motor 28 is installed on the base 1, and the movable groove 29 is arranged on the lower end surface of the base 1. The output end of the third motor 28 is fixedly installed with a threaded rod 30, and a sliding block 31 is movably installed on the threaded rod 30. The sliding block 31 is slidably installed in the movable groove 29. The sliding A fourth electric push rod 32 is fixedly installed on the block 31, and a U-shaped ring 33 is fixedly installed on the output end of the fourth electric push rod 32. The cleaning bristles 34 on the U-shaped ring 33 are used to wrap the polysilicon rod body 2. The cleaning bristles 34 are fixedly installed inside the U-shaped ring 33. A straight through groove 45 used in conjunction with the fourth electric push rod 32 is provided on the upper end surface of the base 1. The fourth electric push rod 32 and the straight through groove 45 are slidably installed, and the straight through groove 45 is connected to the moving groove 29. A limiting slider 35 is fixedly installed on the sliding block 31, and a limiting slider 36 used in conjunction with the limiting slider 35 is provided on the inner side surface of the moving groove 29 to ensure the stability of the sliding block 31 in the moving groove 29.

In this embodiment, the fourth electric push rod 32 in the dust removal assembly drives the U-shaped ring 33 to rise, so that the cleaning bristles 34 in the U-shaped ring 33 wrap the polysilicon rod body 2 to be inspected, and then the third motor 28 drives the sliding block 31 to move, and synchronously drives the U-shaped ring 33 to move, and the cleaning bristles 34 are used to clean the surface of the polysilicon rod body 2, so that the infrared flaw detector 5 can achieve better results during inspection.

Embodiment three:

Please refer to Figures 1-2 and 5. On the basis of Example 1, in order to prevent dust from floating up and affecting other polysilicon rods when the cleaning brush 34 cleans the polysilicon rods, a collecting component is used to avoid this phenomenon. A collecting component is provided on the base 1, and the collecting component includes a collecting box 37 and a supporting block 38. A fan 39 is fixedly installed on the collecting box 37. A dustproof net is provided at the input end of the fan 39 to effectively prevent the dust in the collecting box 37 from clogging the fan 39. The side end face of the collecting box 37 is connected to a first through pipe 40, and the end of the first through pipe 40 away from the collecting box 37 is connected to a telescopic hose 41, and the end of the telescopic hose 41 away from the first through pipe 40 is connected to a second through pipe 42, and the end of the second through pipe 42 away from the telescopic hose 41 is connected to a shunt pipe 43, and the shunt pipe 43 is connected to a collecting pipe 44. The positioning block 24 is fixedly installed on the U-shaped ring 33, and the shunt pipe 43 is fixedly installed on the supporting block 38.

In this embodiment, the fan 39 in the collection assembly is started, and the collection tube 44 is used to collect the dust raised by the cleaning brush 34 during cleaning. The collected dust will be retained in the collection box 37, which is convenient for personnel to handle later, and effectively prevents the dust from contaminating other polycrystalline silicon rod bodies 2 on the fixed plate 20, thereby further improving the detection effect of the infrared flaw detector 5 on the polycrystalline silicon rods.

A method for detecting surface defects of a polycrystalline silicon rod, such as the above-described device for detecting surface defects of a polycrystalline silicon rod, comprises the following steps:

S1: When in use, three polysilicon rod bodies 2 to be inspected are taken between two fixed plates 20, and then the second electric push rod 22 in the clamping group drives the positioning block 24 to clamp and fix the three polysilicon rod bodies 2 in turn, and then the fourth electric push rod 32 in the dust removal assembly drives the U-shaped ring 33 to rise, so that the cleaning bristles 34 in the U-shaped ring 33 wrap the polysilicon rod bodies 2 to be inspected, and then the third motor 28 drives the sliding block 31 to move, and synchronously drives the U-shaped ring 33 to move, and the surface of the polysilicon rod body 2 is cleaned by the cleaning bristles 34;

S2: When the cleaning bristles 34 on the U-shaped ring 33 clean the polycrystalline silicon rod body 2, the fan 39 in the collection assembly is started, and the dust raised by the cleaning bristles 34 during cleaning is collected by the collection pipe 44 to prevent the dust from contaminating other polycrystalline silicon rod bodies 2 on the fixing plate 20;

S3: After the cleaning is completed, the second motor 18 in the rotating assembly drives the clamping assembly to rotate 120 degrees, so that the polycrystalline silicon rod body 2 is in a vertical state;

S4: The driving assembly on the lifting plate 7 is driven to descend by the lifting assembly, and when the driving gear 12 in the driving assembly and the driven gear 23 on the rotating assembly are engaged, and the circular groove 16 is located outside the polycrystalline silicon rod body 2 to be detected, the infrared flaw detector 5 on the mounting block 15 of the infrared flaw detector 5 is driven by the driving assembly to move horizontally, and the polycrystalline silicon rod body 2 to be detected is driven to rotate, and a comprehensive detection is performed by the infrared flaw detector 5 in the circular groove 16.

working principle:

When in use, the three polysilicon rod bodies 2 to be inspected are taken between the two fixed plates 20. After cleaning, the second electric push rod 22 drives the positioning block 24 to clamp and fix the three polysilicon rod bodies 2 in turn. Then, the fourth electric push rod 32 drives the U-shaped ring 33 to rise, so that the cleaning bristles 34 in the U-shaped ring 33 wrap the polysilicon rod bodies 2 to be inspected. Then, the third motor 28 drives the sliding block 31 to slide in the moving groove 29. The sliding of the sliding block 31 will synchronously drive the U-shaped ring 33 to move. When the U-shaped ring 33 moves, the cleaning bristles 34 will clean the surface of the polysilicon rod body 2.

When the cleaning bristles 34 on the U-shaped ring 33 clean the polycrystalline silicon rod bodies 2, the fan 39 is started, and the first through pipe 40, the telescopic hose 41, the second through pipe 42 and the collecting pipe 44 on the shunt pipe 43 are used to collect the dust raised by the cleaning bristles 34 during cleaning. The dust will be collected in the collecting box 37, which can effectively prevent the dust from contaminating other polycrystalline silicon rod bodies 2 on the fixing plate 20.

The second motor 18 then drives the fixing plate 20 to rotate 120 degrees. After the fixing plate 20 rotates, the positioning block 24 on the fixing plate 20 will rotate along with the fixing plate 20, and the polycrystalline silicon rod fixed on the positioning block 24 will rotate synchronously, and finally the polycrystalline silicon rod body 2 is in a vertical state.

The lifting plate 7 is driven to descend by the first electric push rod 6. The lifting plate 7 drives the driving gear 12 of the driving assembly to descend during the descent process. When the driving gear 12 in the driving assembly is meshed with the driven gear 23 on the rotating assembly, and the circular groove 16 is located outside the polysilicon rod body 2 to be detected, the reciprocating screw rod 11 is driven to rotate by the first motor 10. The reciprocating screw rod 11 drives the moving block 13 to move when rotating, and the moving block 13 drives the infrared flaw detector 5 to move horizontally through the mounting block 15 during the movement process.

When the first motor 10 drives the reciprocating screw 11 to rotate, the polysilicon rod body 2 to be inspected is also driven to rotate, and a comprehensive inspection is performed through the infrared flaw detector 5 in the circular groove 16 .

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims (10)

1. The utility model provides a polycrystalline silicon stick surface defect detection device, includes base (1) and polycrystalline silicon stick body (2), its characterized in that: the infrared flaw detection device comprises a base (1), wherein side plates (3) which are symmetrically arranged are fixedly arranged on the base, transverse plates (4) are fixedly arranged between the side plates (3), lifting components are arranged on the transverse plates (4), driving components are arranged on the lifting components, and an infrared flaw detection tester (5) is arranged on the driving components;

A positioning component is arranged on the upper surface of the base (1) and between the two side plates (3), and the position of the polycrystalline silicon rod body (2) is positioned through the positioning component;

The base (1) is provided with a dust removing component, and dust on the surface of the polycrystalline silicon rod body (2) is cleaned through the dust removing component.

2. The device for detecting surface defects of a polycrystalline silicon rod according to claim 1, wherein: the lifting assembly comprises a first electric push rod (6) arranged on a transverse plate (4), a lifting plate (7) is arranged at the output end of the first electric push rod (6), a positioning slide rod (8) is fixedly arranged on the lifting plate (7), and a positioning slide groove (9) matched with the positioning slide rod (8) is formed in the side plate (3).

3. The device for detecting surface defects of a polycrystalline silicon rod according to claim 2, wherein: the driving assembly is arranged on a first motor (10) on the lifting plate (7), a reciprocating screw rod (11) is fixedly arranged at the output end of the first motor (10), a driving gear (12) is fixedly arranged on the reciprocating screw rod (11), a moving block (13) is movably arranged on the reciprocating screw rod (11) and positioned in the driving gear (12), and a crescent pin (14) is movably arranged on the moving block (13);

The infrared flaw detection device is characterized in that an installation block (15) is fixedly installed on the moving block (13), a circular groove (16) is formed in the installation block (15), and the infrared flaw detection tester (5) is installed in the circular groove (16).

4. The device for detecting surface defects of a polycrystalline silicon rod according to claim 2, wherein: the positioning assembly comprises a rotating assembly, the rotating assembly comprises two positioning plates (17), the two positioning plates (17) are symmetrically arranged on the base (1) and are positioned between the two side plates (3), a second motor (18) is fixedly arranged on the positioning plates (17), and a rotating ring (19) is rotatably arranged on the positioning plates (17) and positioned outside the second motor (18);

The output end of the second motor (18) is fixedly provided with a triangular star-shaped fixing plate (20), the fixing plate (20) is provided with a clamping assembly, the side end face of the fixing plate (20) is fixedly provided with a stabilizing rod (21), and one end, far away from the fixing plate (20), of the stabilizing rod (21) is fixedly arranged on the rotating ring (19).

5. The device for detecting surface defects of a polycrystalline silicon rod as set forth in claim 4, wherein: the clamping assembly comprises a second electric push rod (22) arranged on a fixed plate (20), a driven gear (23) is fixedly arranged on the side end face of the second electric push rod (22), a positioning block (24) is fixedly arranged at the output end of the second electric push rod (22), a clamping groove (25) is formed in the positioning block (24), a third electric push rod (26) is fixedly arranged in the clamping groove (25), a clamping plate (27) is fixedly arranged at the output end of the third electric push rod (26), and the driven gear (23) is meshed with a driving gear (12).

6. The device for detecting surface defects of a polycrystalline silicon rod according to claim 5, wherein: the dust removal assembly comprises a third motor (28) and a moving groove (29), the third motor (28) is arranged on the base (1), the moving groove (29) is arranged on the lower end face of the base (1), a threaded rod (30) is fixedly arranged at the output end of the third motor (28), a sliding block (31) is movably arranged on the threaded rod (30), the sliding block (31) is slidably arranged in the moving groove (29), a fourth electric push rod (32) is fixedly arranged on the sliding block (31), a U-shaped ring (33) is fixedly arranged at the output end of the fourth electric push rod (32), and cleaning bristles (34) are fixedly arranged in the U-shaped ring (33).

7. The apparatus for detecting surface defects of a polycrystalline silicon rod as set forth in claim 6, wherein: the limiting sliding block (35) is fixedly arranged on the sliding block (31), and a limiting sliding groove (36) matched with the limiting sliding block (35) for use is formed in the inner side surface of the moving groove (29).

8. The apparatus for detecting surface defects of a polycrystalline silicon rod as set forth in claim 6, wherein: the collecting assembly is arranged on the base (1), the collecting assembly comprises a collecting box (37) and a supporting block (38), a fan (39) is fixedly arranged on the collecting box (37), a first through pipe (40) is communicated with the side end face of the collecting box (37), a telescopic hose (41) is communicated with one end, far away from the collecting box (37), of the first through pipe (40), a second through pipe (42) is communicated with one end, far away from the first through pipe (40), of the telescopic hose (41), a shunt pipe (43) is communicated with one end, far away from the telescopic hose (41), of the second through pipe (42), and a collecting pipe (44) is communicated with the shunt pipe (43);

The positioning block (24) is fixedly arranged on the U-shaped ring (33), and the shunt tube (43) is fixedly arranged on the supporting block (38).

9. The apparatus for detecting surface defects of a polycrystalline silicon rod as set forth in claim 4, wherein; the upper end face of the base (1) is provided with a straight through groove (45) matched with the fourth electric push rod (32), and the straight through groove (45) is communicated with the moving groove (29).

10. A method of a device for detecting surface defects of a polycrystalline silicon rod, based on the device for detecting surface defects of a polycrystalline silicon rod according to claim 8, comprising the steps of:

S1: when the cleaning brush hair (34) in the U-shaped ring (33) wraps the polycrystalline silicon rod body (2) to be detected, the sliding block (31) is driven to move through the third motor (28), the U-shaped ring (33) is synchronously driven to move, and the surface of the polycrystalline silicon rod body (2) is cleaned through the cleaning brush hair (34);

S2: when cleaning bristles (34) on the U-shaped ring (33) clean the polysilicon rod body (2), a fan (39) in the collecting assembly is started, and dust floating during cleaning of the cleaning bristles (34) is collected by utilizing a collecting pipe (44), so that pollution of the dust to other polysilicon rod bodies (2) on the fixed plate (20) is avoided;

S3: after cleaning, the second motor (18) in the rotating assembly drives the clamping assembly to rotate 120 degrees, so that the polycrystalline silicon rod body (2) is in a vertical state;

S4: the driving assembly on the lifting plate (7) is driven to descend through the lifting assembly, the driving gear (12) in the driving assembly is meshed with the driven gear (23) on the rotating assembly, the circular groove (16) is arranged on the outer side of the polycrystalline silicon rod body (2) to be detected, then the driving assembly drives the infrared flaw detector (5) on the mounting block (15) of the infrared flaw detector (5) to horizontally move, and meanwhile the polycrystalline silicon rod body (2) to be detected is driven to rotate, and comprehensive detection is carried out through the infrared flaw detector (5) in the circular groove (16).