CN117824560A - Film thickness gauge - Google Patents

Abstract

The present invention discloses a film thickness gauge, comprising a lower probe, characterized in that: the upper edge of the lower probe is fixedly connected to the vertical rod of an L-shaped support rod, the end bearing of the horizontal rod of the L-shaped support rod is connected to the support shaft, the lower end of the support shaft is fixedly connected to one end of a straight groove rod, a vertical block of a T-shaped slider is arranged in the slide groove of the straight groove rod, the lower end of the vertical block of the T-shaped slider is fixedly connected to an electric push rod, and the lower end of the telescopic rod of the electric push rod is fixedly connected to an upper probe; the lower probe and the upper probe cooperate with each other to achieve thickness measurement; the lower probe is a hollow cylinder, and a group of evenly arranged circular holes are arranged on the upper side of the lower probe. The present invention can measure the thickness of a film.

Description

A film thickness gauge

Technical Field

The invention relates to the technical field of film thickness measurement, and in particular to a film thickness gauge.

Background technique

Film is a material widely used in various fields, and its thickness is an important parameter affecting its performance and quality. Therefore, it is very necessary to measure the thickness of the film accurately, quickly and non-destructively. At present, the commonly used film thickness measurement methods include mechanical contact, optical reflection, optical transmission, X-ray fluorescence, etc. These methods have their own advantages and disadvantages. For example, mechanical contact thickness gauges may cause damage to the film, optical reflection thickness gauges require accurate knowledge of the optical constants of the film, optical transmission thickness gauges are only suitable for transparent or translucent films, and X-ray fluorescence thickness gauges require the use of special radiation sources, etc. However, the existing thickness gauges are generally handheld and the position of the tester needs to be manually adjusted during measurement. In order to make up for the above shortcomings, it is necessary to design a thickness gauge that can automatically adjust the measurement position.

Summary of the invention

In order to make up for the deficiencies of the prior art, the present invention provides a film thickness gauge capable of measuring the thickness of a film.

The present invention is achieved through the following technical solutions:

A film thickness gauge, comprising a lower probe, characterized in that: the upper edge of the lower probe is fixedly connected to the vertical rod of the L-shaped support rod, the end bearing of the horizontal rod of the L-shaped support rod is connected to the support shaft, the lower end of the support shaft is fixedly connected to one end of a straight groove rod, a vertical block of a T-shaped slider is arranged in the slide groove of the straight groove rod, the lower end of the vertical block of the T-shaped slider is fixedly connected to an electric push rod, and the lower end of the telescopic rod of the electric push rod is fixedly connected to the upper probe;

The lower probe and the upper probe cooperate with each other to achieve thickness measurement;

The lower probe is a hollow cylinder, and a group of evenly arranged circular holes are arranged on the upper side of the lower probe.

As a further limitation of the technical solution, two ends of the straight groove rod are respectively fixedly connected to two ends of a guide shaft, and the guide shaft passes through the vertical block of the T-shaped slider.

As a further limitation of the technical solution, the lower side of the cross bar end of the L-shaped support rod is fixedly connected to a large bevel gear, the large bevel gear meshes with a small bevel gear, the central axis bearing of the small bevel gear is connected to the support shaft, the center of the small bevel gear is fixedly connected to one end of a screw rod, the screw rod is threadedly connected to the cross block of the T-shaped slider, the other end bearing of the screw rod is connected to a screw limit block, and the screw limit block fixes the other end of the straight groove rod.

As a further limitation of the technical solution, a display screen is fixed on the upper side of the cross bar of the L-shaped support bar.

As a further limitation of the technical solution, a motor is fixed on the upper side of the cross bar of the L-shaped support rod, and the output shaft of the motor is fixedly connected to the upper end of the support shaft.

As a further limitation of the present technical solution, a controller is further provided, and the controller controls the motor and the display. The controller can control the display to display the thickness data detected by the upper probe and the lower probe.

As a further limitation of the technical solution, the lower probe is connected to a lower displacement measuring device, and the upper probe is connected to an upper displacement measuring device.

The beneficial effects of the present invention are:

(1) The thickness measurement is realized by using the upper and lower probes to cooperate with each other, with high measurement accuracy;

(2) The electric push rod and bevel gear transmission mechanism are used to realize the automatic lifting and position adjustment of the upper probe, which can be adaptively adjusted according to the test position and is easy to operate;

(3) A displacement meter and display screen are used to display and record thickness data in real time, making it easy to obtain and save test results.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view of the present invention.

FIG. 2 is a second perspective view of the present invention.

FIG. 3 is a third perspective view of the present invention.

FIG. 4 is a perspective view of the present invention.

In the figure: 1. lower probe, 2. round hole, 3. straight groove rod, 4. L-shaped support rod, 5. display screen, 6. motor, 7. large bevel gear, 8. small bevel gear, 9. upper probe, 10. electric push rod, 11. screw limit block, 12. screw, 13. T-shaped slider, 14. guide shaft, 15. support shaft.

Detailed ways

In order to clearly illustrate the technical features of the present solution, the present invention is described in detail below through specific implementation methods and in conjunction with its accompanying drawings 1 to 4. In the description of the present invention, it should be noted that the terms "left", "right", "front", "back", "inside", "outside" and the like indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

The present invention provides a film thickness gauge, comprising a lower probe 1, wherein the upper edge of the lower probe 1 is fixedly connected to the vertical rod of an L-shaped support rod 4, the end bearing of the horizontal rod of the L-shaped support rod 4 is connected to a support shaft 15, the lower end of the support shaft 15 is fixedly connected to one end of a straight groove rod 3, a vertical block of a T-shaped slider 13 is arranged in the slide groove of the straight groove rod 3, the lower end of the vertical block of the T-shaped slider 13 is fixedly connected to an electric push rod 10, and the lower end of the telescopic rod of the electric push rod 10 is fixedly connected to an upper probe 9;

The lower probe 1 and the upper probe 9 cooperate with each other to achieve thickness measurement;

The lower probe 1 is a hollow cylinder. A group of evenly arranged circular holes 2 are provided on the upper side of the lower probe 1. The circular holes 2 are air holes that can generate airflow by convection when a film is placed on the lower probe 1, thereby adsorbing the film on the upper side of the lower probe 1.

The two ends of the straight groove rod 3 are respectively fixedly connected to the two ends of the guide shaft 14, and the guide shaft 14 passes through the vertical block of the T-shaped slider 13. The guide shaft 14 plays a guiding and limiting role to ensure the smooth movement of the T-shaped slider 13 on the straight groove rod 3.

The lower side of the cross bar end of the L-shaped support rod 4 is fixedly connected to the large bevel gear 7, the large bevel gear 7 meshes with the small bevel gear 8, the central axis bearing of the small bevel gear 8 is connected to the support shaft 15, the center of the small bevel gear 8 is fixedly connected to one end of the screw 12, the screw 12 is threadedly connected to the cross block of the T-shaped slider 13, the other end bearing of the screw 12 is connected to the screw limit block 11, the screw limit block 11 fixes the other end of the straight groove rod 3, the large bevel gear 7, the small bevel gear 8 and the screw 12 constitute a transmission mechanism for adjusting the position of the upper probe 9.

A display screen 5 is fixed on the upper side of the crossbar of the L-shaped support rod 4 .

The motor 6 is fixed on the upper side of the crossbar of the L-shaped support rod 4, and the output shaft of the motor 6 is fixedly connected to the upper end of the support shaft 15. The motor 6 is used to drive the support shaft 15 to rotate, thereby driving the small bevel gear 8 and the screw 12 to rotate, thereby realizing the movement of the upper probe 9.

A controller is also provided (the controller adopts the existing technology, which is not shown in the drawings and will not be described in detail), and the controller controls the motor 6 and the display 5. The controller can control the display 5 to display the thickness data detected by the upper probe 9 and the lower probe 1.

The lower probe 1 is connected to a lower displacement measuring device, and the upper probe 9 is connected to an upper displacement measuring device.

The upper displacement measuring device and/or the lower displacement measuring device is a grating scale or a magnetic grating scale.

The controller communicates with the displacement measuring device, which is used to measure the distance between the upper probe and the lower probe, so as to calculate the thickness of the film. The displacement measuring device can be any device capable of accurately measuring displacement, such as a grating ruler or a magnetic ruler.

The present invention may be provided with one displacement measuring device or two displacement measuring devices, which are respectively connected to the upper probe 9 and the lower probe 1 to improve the measurement accuracy.

The method of use is as follows: a film to be measured is placed on the lower probe 1 of the film thickness gauge of the present invention, so that the lower probe 1 is in contact with the film and the upper probe 9 is in contact with the air;

Start the motor 6 to rotate the support shaft 15, the support shaft 15 drives the straight groove rod 3 to rotate, the straight groove rod 3 drives the electric push rod 10 and the upper probe 9 to rotate, and the support shaft 15 drives the small bevel gear 8 to rotate along the large bevel gear 7 meshing with it, the small bevel gear 8 drives the screw 12 to rotate, the screw 12 drives the T-shaped slider 13 threadedly connected to it to move, the T-shaped slider 13 drives the electric push rod 10 and the upper probe 9 to move, and adjust the upper probe 9 to be above the film to be measured;

Start the electric push rod 10 to move the upper probe 9 downward until it fits tightly against the film;

The positions of the lower probe 1 and the upper probe 9 are measured by the lower displacement measuring device and the upper displacement measuring device respectively, and the data are transmitted to the controller;

The controller calculates the thickness of the film according to the position data of the lower probe 1 and the upper probe 9 , and displays the result on the display screen 5 .

The parts not described in detail in the present invention are all known technologies to those skilled in the art. Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not limiting. Although the present invention is described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention can be modified or replaced by equivalents without departing from the purpose and scope of the technical solutions of the present invention, which should be included in the scope of the claims of the present invention.

Claims (6)

1. A film thickness gauge, comprising a lower probe (1), characterized in that: the upper edge of the lower probe (1) is fixedly connected to the vertical rod of the L-shaped support rod (4), the end of the horizontal rod of the L-shaped support rod (4) is connected to the support shaft (15) by a bearing, the lower end of the support shaft (15) is fixedly connected to one end of a straight groove rod (3), a vertical block of a T-shaped slider (13) is arranged in the slide groove of the straight groove rod (3), the lower end of the vertical block of the T-shaped slider (13) is fixedly connected to an electric push rod (10), and the lower end of the telescopic rod of the electric push rod (10) is fixedly connected to the upper probe (9); The lower probe (1) and the upper probe (9) cooperate with each other to achieve thickness measurement; The lower probe (1) is a cylinder with a hollow interior, and a group of evenly arranged circular holes (2) are provided on the upper side of the lower probe (1). 2. A film thickness gauge according to claim 1, characterized in that: the two ends of the straight groove rod (3) are respectively fixedly connected to the two ends of the guide shaft (14), and the guide shaft (14) passes through the vertical block of the T-shaped slider (13). 3. A film thickness gauge according to claim 2, characterized in that: the lower side of the cross bar end of the L-shaped support rod (4) is fixedly connected to a large bevel gear (7), the large bevel gear (7) meshes with a small bevel gear (8), the central axis bearing of the small bevel gear (8) is connected to the support shaft (15), the center of the small bevel gear (8) is fixedly connected to one end of a screw rod (12), the screw rod (12) is threadedly connected to the cross block of the T-shaped slider (13), the other end of the screw rod (12) is bearing-connected to a screw limit block (11), and the screw limit block (11) fixes the other end of the straight groove rod (3). 4. A film thickness gauge according to claim 3, characterized in that a display screen (5) is fixed on the upper side of the crossbar of the L-shaped support rod (4). 5. A film thickness gauge according to claim 4, characterized in that: a motor (6) is fixed on the upper side of the cross bar of the L-shaped support rod (4), and the output shaft of the motor (6) is fixedly connected to the upper end of the support shaft (15). 6. A film thickness gauge according to claim 4, characterized in that: a controller is also provided, the controller controls the motor (6) and the display (5), and the controller can control the display (5) to display the thickness data detected by the upper probe (9) and the lower probe (1).