CN117816589A - Chip detection and sorting equipment and method - Google Patents

Abstract

The invention discloses chip detection and separation equipment and a method, wherein the chip detection and separation equipment comprises a material tray, wherein a plurality of chip placing grooves for placing chips are formed in the material tray; the conveying device is used for conveying the material tray and comprises a feeding conveying line group and a discharging conveying line group which are arranged in parallel; the device comprises a detection device, a turnover device and a detection device, wherein the detection device comprises a first visual detection mechanism and a second visual detection mechanism which are respectively arranged on a feeding conveying line group and a discharging conveying line group, and the turnover device comprises a turnover assembly capable of moving back and forth between the feeding conveying line group and the discharging conveying line group, and the turnover assembly can turn over a chip detected by the first visual detection mechanism; and the sorting device is arranged on the blanking conveying line group and used for sorting chips detected by the second visual detection mechanism. The invention effectively improves the detection efficiency while realizing the multi-surface detection of the chip.

Description

Chip detection and sorting equipment and method

Technical Field

The present invention relates to the field of chip detection technology, and in particular to a chip detection and sorting device and method.

Background technique

With the rapid development of the semiconductor industry, the production of semiconductor chips is gradually moving towards automation and standardization. In the chip production process, appearance inspection is an important part, mainly used to detect whether there are defects on the chip surface, so as to provide a reference for the subsequent production of the chip. During the inspection, a tray loaded with multiple chips is sent to the inspection equipment, and the inspection equipment performs synchronous inspections on the multiple chips on the tray, and then removes the unqualified products on the tray. However, since the chip is loaded on the tray as a loading carrier, the side of the chip facing the tray is blocked by the tray, making it difficult to directly perform appearance inspection. In addition, the coordination between the various mechanisms of the existing inspection equipment is poor, resulting in low overall inspection efficiency.

Summary of the invention

In order to overcome the above-mentioned shortcomings, the object of the present invention is to provide a chip detection and sorting device and method, which can effectively improve the detection efficiency while realizing multi-faceted detection of the chip.

In order to achieve the above objectives, one of the technical solutions adopted by the present invention is: a chip detection and sorting device, comprising:

A material tray, on which a plurality of chip placement slots for placing chips are provided;

A conveying device for conveying a material tray, comprising a loading conveying line group and a unloading conveying line group arranged in parallel; wherein the loading conveying line group comprises a first conveying line and a second conveying line arranged in parallel, the first conveying line is used to convey a material tray without chips placed thereon, and the second conveying line is used to convey a material tray with chips placed thereon;

The detection device includes a first visual detection mechanism and a second visual detection mechanism respectively arranged on the loading conveying line group and the unloading conveying line group.

The flipping device includes a flipping assembly that can reciprocate between the loading conveying line group and the unloading conveying line group, and the flipping assembly can flip the chip after being inspected by the first visual inspection mechanism;

The sorting device is arranged on the unloading conveying line group and is used for sorting the chips after being inspected by the second visual inspection mechanism.

The beneficial effects of the chip detection and sorting equipment of the present invention are:

1. In the conveying device, the upper and lower material conveying of the material tray is realized through the cooperation of the loading conveying line group and the unloading conveying line group; in the detection device, the first visual detection mechanism is set to take photos of the unobstructed front side of the chip in the material tray, and then the chip is turned over by the flipping assembly so that the obstructed back side of the chip can be flipped to be exposed; the exposed back side of the chip is then photographed and detected by the second visual detection mechanism, thereby realizing multi-sided detection of the chip without human intervention; finally, the defective or waste products are removed by the sorting device. The present invention meets the demand for multi-sided detection of chips through the cooperation of the conveying device, the detection device, the flipping device and the sorting device, and effectively improves the detection efficiency;

2. In the feeding conveyor line group, the first conveyor line and the second conveyor line are set to cooperate with the flipping operation of the flipping component: when the tray with chips and the tray without chips are conveyed to the working range of the flipping component, the flipping component first flips the tray without chips so that the chip placement slot of the tray faces downward; then the tray is placed on the tray with chips so that the chip placement slots of the two trays are connected one by one; then the two trays are flipped so that the chips are transferred to the tray without chips, and the chips have completed the flipping action. Through the cooperation of the two trays, the closed space formed by the stacking of the two trays can be used to limit the chips to prevent the chips from slipping during the subsequent flipping process; and the flipped chips can be directly transferred to another tray to achieve the synchronous loading of the flipped chips by the empty tray (tray without chips), so as to facilitate the subsequent appearance inspection of the flipped chips.

Furthermore, the first conveyor line and the second conveyor line both include a conveyor frame for receiving the material tray, one end of the conveyor frame is provided with a stacking mechanism, and the other end is provided with a material taking station for the turning device to take the material. The material taking station is provided with a material tray lifting part and a material taking limit part, respectively. The material tray lifting part is used to lift the material tray away from the conveyor frame; the material taking limit part is used to limit the position of the material tray on the material taking station.

In the chip production process, in order to improve efficiency, the trays loaded with chips are usually circulated in a stacked manner. Therefore, in actual application, multiple stacked trays are placed on the first conveyor line and the second conveyor line. Based on this, a destacking mechanism is arranged on the conveyor frame to destacking the stacked trays, so as to facilitate the detection device to perform visual inspection of each tray; and a tray lifting part is arranged on the material picking station to enable the tray to be separated from the conveyor frame, and then the material picking position of the tray is limited by the setting of the material picking limit part.

Further, the flipping assembly includes a lifting drive unit, a flipping drive unit and a tray clamping unit. The tray clamping unit is used to clamp one or two trays, and the tray clamping unit can drive the clamped trays to flip under the action of the flipping drive unit; the flipping drive unit is installed on the lifting drive unit, and can drive the tray clamping unit to shake up and down under the action of the lifting drive unit.

The tray clamping part clamps one or two trays, which facilitates the stacking and clamping of the two trays (clamping two trays at the same time) or the detaching and clamping (clamping only one tray); when the tray clamping part clamps the two trays at the same time, the two trays can be turned over synchronously through the driving of the turning-over driving part, so that the chips in the upper tray can enter the lower tray under the action of their own weight, and then cooperate with the driving of the lifting driving part to drive the tray clamping part and the two trays to shake up and down synchronously, so that the chips can smoothly enter the lower tray under the shaking action, thereby achieving the purpose of flipping the chips.

Further, the tray clamping portion includes a clamping frame matching the shape of the tray, and the clamping frame is evenly distributed with a plurality of clamping members for clamping one or two trays; the clamping members include a clamping drive member and a clamping block, and the clamping block includes a clamping block body, an upper stop plate, and a lower stop plate, and the upper stop plate and the lower stop plate are respectively located on the upper and lower end surfaces of the clamping block body, so as to limit the positions of the upper and lower end surfaces of the tray; the height of the clamping block body matches the stacking height of the two trays, and the clamping block body can simultaneously abut against two adjacent side surfaces of the tray.

The height of the clamping block body is matched with the stacking height of the two trays, and then through the cooperation of the upper stop plate and the lower stop plate, when the clamping block body clamps the two trays, the upper stop plate and the lower stop plate can respectively abut against the upper and lower end surfaces of the two stacked trays, thereby limiting the stacking height of the two trays to avoid the trays from slipping on the clamping block body during the subsequent flipping process, thereby ensuring the reliability of chip flipping. For the case of clamping only a single tray (no chip is placed on the tray), the upper stop plate and the lower stop plate can limit the sliding range of the single tray on the clamping block body to avoid the single tray from slipping off the clamping block body.

Further, the unstacking mechanism includes a unstacking lifting assembly, a material tray splitting assembly, and a knocking assembly. The unstacking lifting assembly is used to drive the stacked material trays to rise or fall; the material tray splitting assembly includes a splitting plate that can be inserted into the material tray, and the knocking assembly includes a knocking part relatively arranged on both sides of the material tray, and the knocking part is used to knock the material tray with the splitting plate inserted therein to cause the material tray to shake.

The stacking lifting assembly is used to drive the material tray to move up and down, so as to move any material tray into the working area of the material tray splitting assembly, so as to realize the stacking of material trays at different heights; then, the splitting plate of the material tray splitting assembly is inserted into the material tray to limit the material tray, and then the material tray (i.e., the upper material tray) and the material tray below it (i.e., the lower material tray) can be split; and then the knocking assembly is used to knock the upper material tray, so that the chip connected to the upper material tray can fall back into the lower material tray under the action of the vibration force, thereby avoiding chip damage and chip position displacement during splitting, and ensuring smooth stacking action.

Furthermore, two groups of conveying components are arranged on the conveyor frame, and each group of conveying components is provided with a pushing component that can reciprocate between the destacking mechanism and the material-retrieving station; and the two pushing components are staggered along the conveying direction of the material tray to push different material trays respectively. The two staggered pushing components can utilize the time difference formed by the staggering to realize that while one pushing component drives the material tray to move to the material-retrieving station, the other pushing component rotates to the destacking mechanism to wait for the next destacking material tray; so as to improve the overall conveying efficiency of the material tray.

Specifically, the pusher assembly includes a pusher base plate, a pusher rod that can be lifted and lowered is provided on the side of the pusher base plate away from the material taking station, and a stopper plate that can abut against the material tray under the action of a stopper driving member is provided on the side facing the processing station; when the pusher rod is at the highest point, the pusher rod can abut against the material tray, and when the pusher rod is at the lowest point, the pusher rod is located below the material tray. The stopper plate cooperates with the pusher rod to limit the positions of both sides of the material tray, thereby ensuring the stability of the material tray during transportation.

Further, the sorting device includes a fixed base, a sorting lifting plate, a distance adjusting mechanism, and a suction mechanism. The sorting lifting plate is slidably arranged on one side of the fixed base and can be lifted and lowered under the action of a first driving member; the distance adjusting component includes a distance adjusting substrate slidably arranged on the sorting lifting plate in a vertical direction, and the distance adjusting substrate is evenly distributed with multiple distance adjusting carriers in a horizontal direction. The multiple distance adjusting carriers can move in a direction close to or away from each other under the action of a second driving member; the suction component includes a suction part arranged one by one in correspondence with the distance adjusting carriers, and each suction part includes a suction rod that can be independently lifted and lowered.

The distance adjusting component and the material suction component are arranged on the sorting lifting plate, and the lifting and lowering movement of the sorting lifting plate can be used to drive the distance adjusting component and the material suction component to perform overall lifting and lowering movement; in the distance adjusting component, the distance between two adjacent distance adjusting substrates is changed by moving the distance adjusting carrier plate towards or away from each other, thereby realizing the distance change between the material suction parts, so as to facilitate the adjustment of the distance between the material suction parts according to the distance of the placement slots on the material tray, so that the material suction parts can be aligned with the chips in the placement slots; and in the material suction part, by arranging a suction rod that can be lifted and lowered independently, it is convenient to select the corresponding material suction part according to the condition of the chip in the placement slot (qualified or unqualified), so as to realize the chip sorting action (i.e., suck out the unqualified products, while the qualified products remain in the placement slot), and the sorting flexibility is higher.

Furthermore, the distance-adjusting substrate is provided with distance-adjusting slots which are arranged one-to-one with the distance-adjusting carriers, and the distance between any two adjacent distance-adjusting slots in the horizontal direction gradually increases from top to bottom; and at the same height, the horizontal distance between any two adjacent distance-adjusting slots is the same; the distance-adjusting carrier includes a carrier body, and the upper end of the carrier body is provided with a moving part which can move along the corresponding distance-adjusting slot, and the moving part is located in the corresponding distance-adjusting slot, and its two ends are respectively abutted against the inner side walls of the corresponding distance-adjusting slot.

By limiting the distance adjustment slots, multiple distance adjustment slots can be arranged symmetrically with respect to the central axis, and the inclination of the distance adjustment slots gradually increases from the direction close to the central axis to the direction away from the central axis. This is to ensure that the distance change between two adjacent distance adjustment carriers can remain the same during the movement of the distance adjustment carrier along the distance adjustment slots, so as to adapt to the chip placement slots evenly arranged on the material tray. Then, the distance between the carrier bodies is driven to change by the movement of the moving parts in the distance adjustment slots.

It should be noted that if a distance-adjusting slot is also provided at the central axis, the distance-adjusting slot should be arranged vertically so that the distance-adjusting carrier plate moving along the distance-adjusting slot always moves vertically.

The second technical solution adopted by the present invention is: a chip detection and sorting method, comprising the following steps:

Place the trays with chips and the trays without chips at the designated positions of the loading conveyor line group respectively;

The trays with chips and the trays without chips are transported toward the flipping device, and during the transport process, the first visual inspection mechanism takes photos of the trays with chips for inspection;

The flipping component stacks the tray without chips and the tray with chips upside down and then flips them over, so that the flipped chips can be transferred to the tray without chips;

The flipping assembly conveys the tray with the flipped chips to the unloading conveying group, and the second visual inspection mechanism takes photos of the tray with the flipped chips for inspection;

The sorting device sorts the chips according to the detection results of the first visual detection mechanism and the second visual detection mechanism.

The beneficial effects of the chip detection and sorting method of the present invention are:

The chip is flipped over by the cooperation of two material trays and a flipping assembly, and then the first visual inspection mechanism and the second visual inspection mechanism respectively perform visual inspection on the chip before and after flipping, so as to realize multi-sided inspection of the chip; finally, the chip is sorted by a sorting device to separate the qualified chips from the unqualified chips.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic structural diagram of a chip detection and sorting device according to an embodiment of the present invention;

FIG2 is a schematic diagram of the structure of a machine according to an embodiment of the present invention;

FIG3 is a schematic structural diagram of a material tray according to an embodiment of the present invention;

4 is a schematic structural diagram of a feed end of a second conveyor line according to an embodiment of the present invention;

FIG5 is a partial enlarged view of the portion A in FIG4 ;

FIG6 is a schematic structural diagram of a second conveyor line according to an embodiment of the present invention;

7 is a schematic structural diagram of a pusher assembly according to an embodiment of the present invention;

FIG8 is a schematic structural diagram of a flipping device according to an embodiment of the present invention;

9 is a schematic structural diagram of a material taking station according to an embodiment of the present invention;

FIG10 is a schematic structural diagram of a flip assembly of the present invention;

FIG11 is a partial enlarged view of the portion B in FIG10 ;

FIG12 is a schematic structural diagram of a clamping member of the present invention;

FIG13 is a schematic diagram of the structure of the detection device of the present invention;

FIG14 is a schematic structural diagram of a sorting device according to the present invention;

FIG. 15 is a schematic structural diagram of the distance-adjustable carrier plate of the present invention.

In the figure:

1- material tray; 11- chip placement slot; 12- hand-held lifting edge; 13- limit slot;

2- conveying device; 21- first conveying line; 211- conveying frame; 212- angle steel; 22- second conveying line; 23- qualified product conveying line; 24- reject conveying line; 25- unstacking mechanism; 251- unstacking lifting assembly; 252- splitting plate; 253- knocking cylinder; 26- conveying assembly; 27- pushing assembly; 271- pushing base plate; 272- pushing rod; 273- stopping driving member; 274- stopping plate; 28- tray lifting part; 29- limiting clamping block;

3-detection device; 31-first visual detection mechanism; 32-second visual detection mechanism; 33-3D detection mechanism;

4-turning device; 41-lifting drive unit; 411-lifting base plate; 412-first linear module; 413-second linear module; 414-shaking base; 42-turning drive unit; 421-turning frame; 422-detection sensor; 423-detection plate; 43-tray clamping unit; 431-clamping frame; 432-clamping drive member; 433-clamping block; 4331-clamping block body; 4332-upper stop plate; 4333-lower stop plate; horizontal drive unit-44;

5-sorting device; 51-fixed base; 52-sorting lifting plate; 53-first driving member; 54-adjustable distance base plate; 541-adjustable distance slot hole; 55-adjustable distance carrier plate; 56-second driving member; 57-suction rod;

6-machine; 61-protective cover.

Detailed ways

The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

Example

Referring to the accompanying drawings 1-2, a chip detection and sorting device of the present invention includes a material tray 1, a conveying device 2, a detection device 3, a flipping device 4, and a sorting device 5, wherein the conveying device 2 is used to convey the material tray 1, and includes a loading conveying line group and a unloading conveying line group arranged in parallel. The detection device 3 includes a first visual detection mechanism 31 and a second visual detection mechanism 32 respectively arranged on the loading conveying line group and the unloading conveying line group. The flipping device 4 includes a flipping assembly that can reciprocate between the loading conveying line group and the unloading conveying line group, and the flipping assembly can flip the chip after being detected by the first visual detection mechanism 31. The sorting device 5 is arranged on the unloading conveying line group, and is used to sort the chips after being detected by the second visual detection mechanism 32.

Furthermore, referring to FIG. 1 , the chip detection and sorting equipment includes a machine platform 6, on which the conveying device 2, the detection device 3, the flipping device 4 and the sorting device 5 are all arranged, and the machine platform 6 is also provided with a protective cover 61 that can cover the conveying device 2. The protective cover 61 is provided with a loading and unloading port on one side of the conveying device 2 and is connected to the conveying device 2.

As shown in FIG. 2 , the loading conveyor line group includes a first conveyor line 21 and a second conveyor line 22 arranged in parallel, wherein the first conveyor line 21 is used to convey a tray 1 without chips, and the second conveyor line 22 is used to convey a tray 1 with chips. The unloading conveyor line group includes a qualified product conveyor line 23 and at least one defective product conveyor line 24. Exemplarily, two defective product conveyor lines 24 are provided to facilitate the sorting operation of the sorting device.

In actual application, in order to improve efficiency, the trays 1 are mostly loaded in a stacked form. As shown in FIG3 , the tray 1 is in the shape of a flat plate, on which are provided a plurality of chip placement grooves 11 arranged in a rectangular array, and the groove depth of the chip placement grooves 11 is adapted to the thickness of the chip. The tray 1 is provided with hand-held lifting edges 12 on both sides along its length direction, and with limit slots 13 on both sides along its width direction. When multiple trays 1 are stacked, the lower end surface of the upper layer of the tray 1 can abut against the upper end surface of the lower layer of the tray 1, so that the chip placement grooves 11 on the lower layer of the tray 1 can be in a closed state, thereby limiting the slipping of the chips from the chip placement grooves 11 during the transportation of the stacked trays 1.

It is located to ensure that the appearance inspection of the chips on each tray 1 can be performed. In some embodiments, the loading ends of the first conveyor line 21 and the second conveyor line 22 need to be equipped with a destacking mechanism for splitting the trays. Specifically, referring to Figures 4-5, the first conveyor line 21 and the second conveyor line 22 both include a conveyor frame 211 for receiving the tray 1, and one end of the conveyor frame 211 is provided with a destacking mechanism 25, and the other end is provided with a material taking station for the turning device 4 to take the material.

Specifically, referring to Figure 5, the unstacking mechanism 25 includes a unstacking lifting assembly 251, a material tray splitting assembly, and a knocking assembly. The unstacking lifting assembly 151 is used to drive the stacked material trays 1 to rise or fall; the material tray splitting assembly includes a splitting plate 252 that can be inserted into the material tray limiting slot 13 under the action of a splitting driving member (such as a cylinder), and the knocking assembly includes a knocking part relatively arranged on both sides of the material tray 1, and the knocking part is used to knock the material tray 1 with the splitting plate 252 inserted therein to cause the material tray 1 to shake.

When the stacked material tray 1 is placed on the loading end of the conveyor frame 211, the destacking lifting component 251 is started to move the stacked material tray 1 up and away from the conveyor frame 211; when the second layer of material trays from bottom to top (hereinafter referred to as the "upper material tray") is located in the working area of the splitting component, the splitting plate 252 is inserted into the limiting slot 13 of the upper material tray to support and limit the upper material tray; the knocking component is started so that the knocking part can knock on both sides of the upper material tray 1. At this time, the chip connected to the lower end of the upper material tray can fall back into the chip placement groove of the lowest material tray (hereinafter referred to as the "lower material tray") under the action of vibration; the destacking lifting component 251 is started to drive the lower material tray to move down to the conveyor frame 211. At this time, due to the support of the splitting plate 252 to the upper material tray, the upper material tray and the remaining material trays above it can remain motionless, and then the lower material tray is split.

That is, it can be understood that the unstacking mechanism 21 of this embodiment adopts an unstacking method from bottom to top, and the setting of the knocking component can avoid the problem of chips from the stacked trays being skewed and hooked to the upper tray during transportation, thereby avoiding the problem of chip damage during the unstacking process.

In some embodiments, the knocking part includes a knocking cylinder 253 installed on the conveyor frame 211, the piston rod of the knocking cylinder 253 faces the material tray 1, and the piston rod is provided with a knocking surface that can abut against the side of the material tray 1. Furthermore, the conveyor frame 211 is also provided with angle steels 212 corresponding to the number of corners of the material tray 1, so as to limit and guide the lifting and lowering movement of the material tray 1.

In some embodiments, the disassembling and lifting assembly includes a splitting and lifting cylinder installed on a conveying frame 211, and the splitting and lifting cylinder is provided with a lifting top plate for receiving the material tray 1, and the size of the lifting top plate is smaller than the size of the material tray 1, so that when the material tray 1 is located on the lifting top plate, the four corners of the material tray 1 can be exposed on the lifting top plate.

In some embodiments, referring to FIG. 6 , the conveyor frame 211 is provided with two groups of conveying components 26 along a direction perpendicular to the conveying direction of the material tray, and each group of conveying components 26 is provided with a pushing component 27 that can reciprocate between the stacking mechanism 25 and the material picking station; and the two pushing components 27 are staggered along the conveying direction of the material tray 1 to push different material trays 1 respectively.

Specifically, referring to FIG7 , the pushing assembly 27 includes a pushing base plate 271. A push rod 272 that can be raised and lowered is provided on the side of the pushing base plate 271 away from the material picking station. When the push rod 272 is at the highest point, the push rod 272 can abut against the material tray 1 to push the material tray 1 to move; when the push rod 272 is at the lowest point, the push rod 272 is located below the material tray 1 to prevent the push rod 272 from touching the moving material tray 1 during the process of rotating to the loading end.

Since the two groups of pushing components 27 are respectively located on both sides of the conveying frame 211, in order to avoid interference between the two groups of pushing components 27, the contact point of the push rod 272 on the material tray 1 is bound to be biased towards the side of the material tray 1, and pushing the material tray 1 from the side of the material tray 1 may cause the material tray 1 to deflect due to uneven force. Based on this, a stop plate 274 that can abut against the material tray 1 under the action of the stop drive 273 is provided on the side of the pushing substrate 271 facing the material taking station. Specifically, a hinge seat is installed on the pushing substrate 271, and the hinge seat is hinged with the stop plate 274 through a pin shaft. The stop drive 273 includes a stop cylinder arranged along the conveying direction of the material tray 1, and the stop cylinder is installed on the pushing substrate 271, and the piston rod of the stop cylinder faces the stop plate 274. A torsion spring is mounted on the pin shaft, one end of the torsion spring is connected to the stop plate 274, and the other end is connected to the hinge seat. The stop plate 274 is pushed by the stop cylinder, so that the stop plate 274 can be driven to rotate along the hinge seat, so that the stop plate 274 can abut against the material tray 1 in a flipped state.

It should be noted that the transmission component 26 can adopt the synchronous belt drive in the prior art, which will not be described in detail in this embodiment.

In some embodiments, as shown in Figures 8-9, the material taking station is provided with a material tray lifting part 28 and a material taking limiting part, respectively. The material tray lifting part 28 is used to lift the material tray 1 to leave the conveyor frame 211, and its structure can refer to the stacking lifting assembly 251. The material taking limiting part is used to limit the position of the material tray 1 on the material taking station, and it includes at least one group of limiting parts that can move toward or away from each other, and each group of limiting parts includes two limiting clamps 29 arranged oppositely, and each limiting clamp 29 can move in the direction of approaching or away from the material tray 1 under the action of a limiting driving part (such as a linear cylinder). And the height of the limiting clamp 29 is adapted to the height of the two stacked material trays 1, so that the limiting clamp 29 can not only limit the position of a single material tray 1, but also limit the position of the two stacked material trays 1 synchronously.

The first conveyor line 21 and the second conveyor line 22 are arranged in the feeding conveyor line group to cooperate with the flipping operation of the flipping assembly. Specifically, in some embodiments, as shown in FIG8 , the flipping assembly includes a lifting drive unit 41, a flipping drive unit 42 and a tray clamping unit 43. The tray clamping unit 43 is used to clamp one or two trays 1, and the tray clamping unit 43 can drive the clamped trays 1 to flip under the action of the flipping drive unit 42; the flipping drive unit 42 is installed on the lifting drive unit 43, and can drive the tray clamping unit 43 to shake up and down under the action of the lifting drive unit 43.

For the convenience of description, the tray 1 without chips placed thereon and transported by the first conveyor line 21 is set as the first tray, and the tray 1 with chips placed thereon and transported by the second conveyor line 22 is set as the second tray. During operation, firstly, the first tray is clamped by the tray clamping part 43, and then the first tray is flipped by the flipping driving part 42 so that the chip placement slot 11 faces downward; the lifting driving part 41 drives the first tray to move downward and stack it on the second tray, and then the tray clamping part 43 clamps the first tray and the second tray at the same time, and the first tray and the second tray are synchronously flipped by the flipping driving part 42, so that the second tray is flipped to the top of the first tray. At this time, the chip on the second tray completes the flipping action and enters the chip placement slot 11 of the first tray under the action of gravity; then the first tray and the second tray are driven by the lifting driving part 41 to shake up and down synchronously, so that the chip stuck on the second tray can smoothly enter the chip placement slot 11 of the first tray under the shaking action, and at this time, the chip located in the first tray is the flipped chip; and then the second tray can be taken away by the tray clamping part 43. At this time, there is no chip in the second tray taken away by the tray clamping part 43, and the chip placement groove 11 is facing downward. Therefore, the second tray taken away by the tray clamping part 43 can be used as the above-mentioned first tray in the next turning operation.

Since the first material tray and the second material tray have the same structure and the depth of the chip placement groove 11 inside them is adapted to the thickness of the chip, when the two material trays 1 are stacked, the spacing between the connected chip placement grooves 11 on the first material tray and the second material tray (the minimum spacing between the connected chip placement grooves 11 is 2 times the depth of a single chip placement groove) should be smaller than the width and length of the chip to inhibit the chip from rotating between the two chip placement grooves 11, so that the flipping of the chip can only be achieved by flipping the material tray 1.

In some embodiments, as shown in Figures 10-11, the tray clamping portion 43 includes a clamping frame 431 that matches the shape of the tray 1, and a plurality of clamping members for clamping one or two trays are evenly distributed on the clamping frame 431. Furthermore, the clamping members are arranged at the corners of the clamping frame 431, and include a clamping block 433 that reciprocates along the diagonal direction of the clamping frame 431 under the action of a clamping drive member 432 (such as a linear cylinder), and the clamping block 433 can abut against two adjacent side surfaces of the tray 1 at the same time.

Since the clamping block 433 clamps the tray 1 from the side of the tray 1, and when the clamping block 433 clamps two stacked trays 1, since a chip is placed on one tray 1, if the two trays 1 slip on the clamping block 433 after being stacked, it is easy to cause a gap between the two trays 1, and there is a risk of the chip slipping. Therefore, in some embodiments, the structure of the clamping block 433 is improved. Specifically, as shown in Figure 12, the clamping block 433 includes a clamping block body 4331, an upper stop plate 4332, and a lower stop plate 4333. The upper stop plate 4332 and the lower stop plate 4333 are respectively located on the upper and lower end surfaces of the clamping block body 4331 to limit the position of the upper and lower end surfaces of the tray 1; the height of the clamping block body 4331 matches the stacking height of the first tray and the second tray, and the clamping block body 4331 is provided with a first abutting surface and a second abutting surface that can respectively abut on two adjacent side surfaces of the tray 1.

The height of the clamping block body 4331 is matched with the stacking height of the two material trays 1, and then through the cooperation of the upper stop plate 4332 and the lower stop plate 4333, when the clamping block body 4331 clamps the two material trays 1, the upper stop plate 4332 and the lower stop plate 4333 can respectively abut against the upper and lower end surfaces of the two stacked material trays 1, thereby limiting the stacking height of the two material trays 1, so as to avoid the material tray 1 from slipping on the clamping block body 4331 during the subsequent flipping process, and ensure the reliability of chip flipping. For the case of clamping only a single material tray (no chip is placed on the material tray), the upper stop plate 4332 and the lower stop plate 4333 can limit the sliding range of the single material tray on the clamping block body 4331, and avoid the single material tray from slipping off the clamping block body 4331.

In some embodiments, the flipping driving unit 42 includes a flipping frame 421 and a flipping driving member (not shown in the figure). The flipping frame 421 is fixedly connected to the lifting driving unit 41, and is provided with a receiving space for receiving the tray clamping unit 43. The tray clamping unit 43 is located in the receiving space, and both ends of the clamping frame 431 are respectively rotatably connected to the flipping frame 41. The flipping driving member (such as a flipping cylinder) is installed on the flipping frame 41 to drive the tray clamping unit 43 to flip.

Furthermore, since the material tray 1 is flipped to realize the turning over of the chip, that is, the chip needs to be flipped 180°, in order to detect the flipping angle of the material tray 1, a detection sensor 422 can be set on the flipping frame 421, and a detection plate 423 can be set on the clamping frame 431. When the clamping frame 431 is flipped, the detection plate 423 is flipped immediately and enters or leaves the detection range of the detection sensor 422, so that the flipping angle can be detected.

In some embodiments, as shown in FIG. 10 , the lifting drive unit 41 includes a lifting base plate 411 that can move horizontally under the action of the horizontal drive unit 44, and the lifting base plate 411 is provided with a lifting plate that can move up and down under the action of the first linear module 412, and the lifting plate is provided with a shaking base 414 that can move up and down under the action of the second linear module 413, and the shaking base 414 is fixedly connected to the flip frame 421. And the linear motion stroke of the second linear module 413 is smaller than the linear motion stroke of the first linear module 412. Through the cooperation of the second linear module 413 and the shaking base 414, the up and down shaking of the flip frame 421 can be quickly realized by utilizing a smaller linear motion stroke, and the lifting and lowering drive of the lifting plate by the first linear module 412 is to realize the clamping or release of the material tray 1 on the conveying device 2. Exemplarily, the first linear module 412 and the second linear module 413 can adopt the linear screw module in the prior art. It should be noted that, under the action of the horizontal driving unit 44 , the flipping assembly can be moved to the first conveyor line 21 , the second conveyor line 22 , the qualified product conveyor line 23 or the waste product conveyor line 24 .

The flipping method of the chip flipping assembly is as follows: flip the first tray without chips so that the chip placement slot is facing downward; stack the first tray on top of the second tray with chips, and align and limit the first tray and the second tray so that the chip placement slots on the first tray can be aligned one by one with the chip placement slots on the second tray; clamp the stacked first tray and the second tray at the same time, and flip them so that the second tray is located above the first tray; drive the flipped first tray and the second tray to shake up and down synchronously; after placing the first tray and the second tray after shaking up and down to the designated positions, remove the second tray located on top, at this time, the chip on the first tray is the flipped chip.

In order to facilitate the separation of the first tray and the second tray after flipping, a splitting plate 252 that can be inserted into the tray 1 is also provided on the material taking station. The working principle of the splitting plate 252 can refer to the stacking mechanism. The working process of the chip flipping assembly is described in detail below:

When the first material tray (without chips) and the second material tray (with chips) are moved to the material picking stations of the first conveyor line 21 and the second conveyor line 22 respectively, the material tray lifting part 28 on the first conveyor line 21 lifts the first material tray to the specified loading position, and the corresponding limiting member of the material picking limiting member moves in the direction close to the first material tray to limit the position of the first material tray; then the material picking limiting member returns to its original position; at the same time, the material tray lifting part 28 on the second conveyor line 22 lifts the second material tray to the specified loading position, and the corresponding limiting member of the material picking limiting member moves in the direction close to the second material tray to limit the position of the second material tray; then the material picking limiting member returns to its original position;

The horizontal driving part 44 drives the flipping assembly to move above the material taking station of the first conveyor line 21, and the first linear module 412 drives the lifting plate to move downward, and moves the clamping frame 431 to fit onto the first material tray; the clamping member then clamps the first material tray; the first linear module 412 drives the lifting plate to move upward, so that the material tray clamping part 43 drives the first material tray to move upward and away from the first conveyor line 21; the flipping driving part is started, and the material tray clamping part 43 then drives the first material tray to flip until the chip placement slot 11 of the first material tray faces downward;

The horizontal driving part 44 drives the flipping assembly to move above the material picking station of the second conveyor line 22, and the first linear module 412 drives the lifting plate to move downward, and causes the tray clamping part 43 to drive the first tray to move above the second tray; the clamping part then releases the first tray, and the first tray falls onto the second tray; the limiting part of the material picking limiting part then limits the first tray and the second tray to align the first tray with the second tray; then the material picking limiting part returns to its original position; the flipping assembly continues to descend until the clamping frame 431 is fitted onto the first tray, The first material tray is placed on the second material tray; the clamping member then clamps the first material tray and the second material tray at the same time; the first linear module 412 drives the lifting plate to move up, so that the material tray clamping part 43 drives the first material tray and the second material tray to move up and away from the first conveyor line 21; the flipping driving member is started, and the material tray clamping part 43 then drives the first material tray and the second material tray to flip synchronously until the chip placement slot 11 of the second material tray faces downward, at this time, the chip placement slot 11 of the first material tray faces upward, and the chip located in the second material tray can move down to the chip placement slot of the first material tray under the action of its own weight;

The second linear module 413 drives the shaking base 414 to shake up and down, and the flip frame 421 then drives the tray clamping part 43 to shake up and down, so that the chip stuck in the chip placement slot 11 of the first tray or the second tray can smoothly enter the designated position of the chip placement slot 11 of the first tray;

The horizontal drive unit 44 drives the flipping assembly to move to the unloading conveying group, the first linear module 412 drives the lifting plate to move downward, and the tray clamping unit 43 immediately drives the first tray and the second tray to enter the tray lifting unit 28; the clamping member releases the first tray and the second tray, and the splitting plate 252 is immediately inserted into the second tray, and the tray lifting unit 28 immediately drives the first tray to move downward, so that the second tray is separated from the first tray; then the second linear module drives the tray clamping unit 43 to move up a short distance (the height of one tray), and then the clamping member clamps the second tray located above; the first linear module 412 drives the tray clamping unit 43 to move up, and at this time, the chip loaded on the first tray is the flipped chip.

In order to ensure the stability of flipping, the flipping action of the flipping assembly is relatively gentle, and it is difficult to adapt to the conveying speed of the conveying device for the material tray. Therefore, in actual application, two groups of independently operating flipping assemblies can be arranged on the horizontal drive unit 44 to improve the flipping efficiency.

It should be noted that, in order to ensure that both sides of the chip can be inspected, as shown in FIG. 13, the first visual inspection mechanism 31 should be set on the second conveyor line 22 to visually inspect the chip that has not been turned over; the second visual inspection mechanism 32 is set on the unloading conveyor group to visually inspect the chip after turning over. For the unloading position of the material tray after turning over, any conveyor line in the unloading conveyor line group (hereinafter referred to as "unloading conveyor line") can be selected, and the second visual inspection mechanism 32 is set on the unloading conveyor line to inspect the chip after turning over.

Furthermore, in actual applications, for some complex chips, such as chips with pins, the pins may become crooked during the production process, and visual inspection can only perform plane inspection. Therefore, in some embodiments, the inspection device also includes a 3D inspection mechanism 33 installed on the second conveyor line 22 to perform 3D inspection on the chip.

When the detection device completes the detection of the chips, the control center can know which chips on the tray are qualified and which chips are defective based on the detection results, and then send the sorting results to the sorting device 5, which then sorts the chips on the tray.

Specifically, as shown in Figures 14-15, the sorting device 5 includes a fixed base 51, a sorting lifting plate 52, a distance adjustment mechanism, and a suction mechanism. The fixed base 51 can reciprocate between the qualified product conveying line 23 and the waste product conveying line 24. The sorting lifting plate 52 is slidably arranged on one side of the fixed base 51, and can be lifted and lowered under the action of the first driving member 53. The distance adjustment mechanism includes a distance adjustment substrate 54 slidably arranged on the sorting lifting plate 52 in the vertical direction, and the distance adjustment substrate 54 is evenly distributed with a plurality of distance adjustment carriers 55 in the horizontal direction. The plurality of distance adjustment carriers 55 can move in a direction close to or away from each other under the action of the second driving member 56; the suction mechanism includes a suction part arranged one by one with the distance adjustment carrier 55, and each suction part includes a suction rod 57 that can be lifted and lowered independently.

Due to the different chip specifications, the size of the chip placement slots 11 on the tray 1 and the spacing between two adjacent chip placement slots 11 will also be different. Therefore, the spacing between the suction parts can be changed by setting the distance adjustment mechanism, so as to adapt to the sorting of chips of different specifications. When in use, first move the fixed base 51 to the unloading conveyor line, and move the tray 1 along the unloading conveyor line to the operating range of the sorting device 5; use the second driving member 56 to drive multiple distance-adjusting carriers 55 to move in a direction close to or away from each other, so that the spacing between two adjacent distance-adjusting carriers 55 is adapted to the spacing of the chip placement slots 11 on the tray 1, so that the suction part located on the distance-adjusting carrier 55 can align with the chip in the corresponding chip placement slot 11; then the first driving member 53 drives the sorting lifting plate 52 to move to the set height, so as to drive the suction part to move to the suction range of the tray 1; then drive the suction rod 57 to move down to absorb the chip on the tray 1. Since the suction rod 57 can be raised and lowered independently, a corresponding suction part can be selected according to the condition of the chips in the chip placement slot 11 to suck out unqualified chips.

Exemplarily, when the unloading conveyor line group includes one qualified product conveyor line 23 and two defective product conveyor lines 24, one of the defective product conveyor lines 24 can be used as the unloading conveyor line of the tray (i.e., the flip assembly places the flipped tray 1 on the conveyor line), and an empty tray is placed on the other defective product conveyor line 24 and the qualified product conveyor line 23; then, the chips in the tray on the unloading conveyor line are sorted by the suction part, and the qualified chips are transferred to the empty tray on the qualified product conveyor line 23, and the unqualified chips are transferred to the empty tray of the other defective product conveyor line 24. Alternatively, the qualified product conveyor line 23 is directly used as the unloading conveyor line of the tray, and the suction part only removes the unqualified chips, while the qualified chips remain in the tray 1 of the unloading conveyor line. At this time, the two defective product conveyor lines 24 can be used to remove chips with different quality problems (such as one defective conveyor line 24 is used to remove chips with defects in 3D detection, and the other defective conveyor line 25 is used to remove chips with defects in visual detection). In actual application, the chip sorting can be adjusted according to actual needs and is not limited by this embodiment.

In some embodiments, as shown in FIG. 15 , a pair of vertical rails arranged in the vertical direction are symmetrically arranged on one side of the sorting lifting plate 52 facing the distance adjustment mechanism, and a horizontal rail arranged in the horizontal direction is arranged between the pair of vertical rails. The distance adjustment substrate 54 is slidably arranged on the pair of vertical rails, and the distance adjustment carrier 55 is slidably arranged on the horizontal rail. Distance adjustment slots 541 arranged one-to-one corresponding to the distance adjustment carrier 55 are arranged on the distance adjustment substrate 54, and the distance adjustment carrier 55 can move along the corresponding distance adjustment slots 541. The distance between any two adjacent distance adjustment slots 541 in the horizontal direction gradually increases from top to bottom. And at the same height, the horizontal distance between any two adjacent distance adjustment slots 541 is the same.

Since the chip placement slots 11 on the tray 1 are evenly arranged, when adjusting the spacing between the spacing-adjusting carriers 55, it is necessary to ensure that the spacing between the two spacing-adjusting carriers 55 always remains the same. Therefore, in this embodiment, the plurality of spacing-adjusting slots 541 are arranged symmetrically about the central axis, and the inclination amplitude of the plurality of spacing-adjusting slots 541 from the direction close to the central axis to the direction away from the central axis is gradually increased, so that in the process of the spacing-adjusting carrier 55 moving along the spacing-adjusting slots 541, the spacing change between two adjacent spacing-adjusting carriers 55 can always remain the same.

It should be noted that if a distance adjustment slot 541 is also provided at the central axis, the distance adjustment slot 541 should be arranged vertically so that the distance adjustment carrier 55 moving along the distance adjustment slot 541 always moves vertically. For example, there are seven distance adjustment slots 541, and the distance adjustment slot 541 in the middle is arranged in the vertical direction, and the other distance adjustment slots 541 are symmetrically arranged on both sides of the distance adjustment slot 541 in the middle.

In some embodiments, the distance-adjustable carrier 55 includes a carrier body, the upper end of which is provided with a column rod that can move along the corresponding distance-adjustable slot hole 541. The column rod is located in the corresponding distance-adjustable slot hole 541, and its two ends are respectively abutted against the inner side walls of the corresponding distance-adjustable slot hole 541.

In some embodiments, a position detection mechanism is provided on one side of the sorting lifting plate 52, and a detection plate that can enter the detection range of the position detection mechanism is provided on the distance adjustment substrate 54.

The working process of the chip detection and sorting equipment of the present invention is as follows:

Manually place the stacked trays without chips and the stacked trays with chips on the loading ends of the first conveyor line 21 and the second conveyor line 22 respectively; the destacking mechanisms 25 on the first conveyor line 21 and the second conveyor line 22 destacking the stacked trays respectively, so that the single first tray and the second tray can be moved to the corresponding material picking station respectively with the cooperation of the conveying assembly 26 and the push plate assembly 27; while the second tray moves along the second conveyor line 22, the first visual inspection mechanism 31 and the 3D inspection mechanism 33 perform appearance inspection on the chips on the second tray;

The flipping assembly stacks the first tray upside down on the second tray and flips the first tray and the second tray so that the chips on the second tray can be transferred to the first tray. At this time, the chips on the first tray are the flipped chips.

The flip assembly conveys the first tray to the unloading conveyor line, and the second visual inspection mechanism 32 performs appearance inspection on the chips in the first tray; then the first tray moves to the operating range of the sorting device 5;

The sorting device 5 sorts the chips according to the appearance inspection result, so that the qualified chips enter the qualified product conveying line 23 and the unqualified chips enter the waste product conveying line 24.

It should be noted that in actual applications, in order to ensure that the chip maintains its original placement direction (i.e., the placement direction of the chip on the second tray) after the appearance inspection, the chip can be turned over by the flipping assembly after the second visual inspection mechanism 32 performs an appearance inspection on the chip, and then sorted by the sorting device 5.

The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The utility model provides a chip detects sorting facilities which characterized in that: comprising

The material tray is provided with a plurality of chip placing grooves for placing chips;

the conveying device is used for conveying the material tray and comprises a feeding conveying line group and a discharging conveying line group which are arranged in parallel; the feeding conveyor line group comprises a first conveyor line and a second conveyor line which are arranged in parallel, wherein the first conveyor line is used for conveying a tray without chips, and the second conveyor line is used for conveying the tray with chips;

The detection device comprises a first visual detection mechanism and a second visual detection mechanism which are respectively arranged on the feeding conveying line group and the discharging conveying line group,

the turnover device comprises a turnover assembly capable of moving back and forth between the feeding conveying line set and the discharging conveying line set, and the turnover assembly can turn over the chip detected by the first visual detection mechanism;

and the sorting device is arranged on the blanking conveying line group and used for sorting chips detected by the second visual detection mechanism.

2. The chip inspection and sorting apparatus according to claim 1, wherein: the first conveying line and the second conveying line both comprise a conveying frame for receiving the material tray, one end of the conveying frame is provided with a folding mechanism, and the other end of the conveying frame is provided with a material taking station for taking materials by the turn-over device; the material taking station is respectively provided with a material tray jacking part and a material taking limiting part, and the material tray jacking part is used for jacking the material tray to be away from the conveying rack; the material taking limiting part is used for limiting the position of the material tray on the material taking station.

3. The chip sorting apparatus according to claim 1, wherein: the turnover assembly comprises a lifting driving part, a turnover driving part and a tray clamping part, wherein the tray clamping part is used for clamping one or two trays, and the tray clamping part can drive the clamped trays to turn under the action of the turnover driving part; the turnover driving part is arranged on the lifting driving part and can drive the material tray clamping part to shake up and down under the action of the lifting driving part.

4. The chip inspection and sorting apparatus according to claim 3, wherein: the tray clamping part comprises a clamping frame matched with the tray, and a plurality of clamping pieces for clamping one or two trays are uniformly distributed on the clamping frame; the clamping piece comprises a clamping driving piece and a clamping block, the clamping block comprises a clamping block body, an upper stop plate and a lower stop plate, and the upper stop plate and the lower stop plate are respectively positioned on the upper end face and the lower end face of the clamping block body and used for limiting the positions of the upper end face and the lower end face of the material disc; the height of the clamping block body is matched with the stacking height of the two trays, and the clamping block body can be simultaneously abutted to two adjacent side surfaces of the trays.

5. The chip inspection and sorting apparatus according to claim 2, wherein: the folding mechanism comprises a folding lifting assembly, a material tray splitting assembly and a knocking assembly, wherein the folding lifting assembly is used for driving the stacked material trays to ascend or descend; the tray split assembly comprises a split plate which can be inserted into the tray, the knocking assembly comprises knocking parts which are oppositely arranged at two sides of the tray, and the knocking parts are used for knocking the tray inserted with the split plate so that the tray shakes.

6. The chip inspection and sorting apparatus according to claim 2, wherein: two groups of conveying assemblies are arranged on the conveying rack, and each group of conveying assemblies is provided with a pushing assembly capable of reciprocating between the folding mechanism and the material taking station; and the two pushing assemblies are arranged in a staggered manner along the conveying direction of the material trays so as to respectively push different material trays.

7. The chip inspection and sorting apparatus according to claim 6, wherein: the pushing assembly comprises a pushing substrate, a push rod capable of moving up and down is arranged on one side of the pushing substrate away from the material taking station, and a stop plate capable of being abutted to the material tray under the action of a stop driving piece is arranged on one side of the pushing substrate facing the processing station; when the push rod is at the highest point, the push rod can be abutted on the material tray, and when the push rod is at the lowest point, the push rod is positioned below the material tray.

8. The chip inspection and sorting apparatus according to claim 1, wherein: the sorting device comprises a fixed base, a sorting lifting plate, a distance adjusting mechanism and a material sucking mechanism, wherein the sorting lifting plate is arranged on one side of the fixed base in a sliding manner and can lift and move under the action of a first driving piece; the distance adjusting assembly comprises a distance adjusting base plate which is arranged on the sorting lifting plate in a sliding manner along the vertical direction, a plurality of distance adjusting carrier plates are uniformly distributed on the distance adjusting base plate along the horizontal direction, and the distance adjusting carrier plates can move towards a direction approaching to or away from each other under the action of a second driving piece; the material sucking assembly comprises material sucking parts which are arranged in one-to-one correspondence with the distance-adjusting carrier plates, and each material sucking part comprises a material sucking rod capable of independently lifting and moving.

9. The chip inspection and sorting apparatus according to claim 8, wherein: the distance adjusting base plates are provided with distance adjusting slots which are arranged in one-to-one correspondence with the distance adjusting carrier plates, and the distance between any two adjacent distance adjusting slots along the horizontal direction is gradually increased from top to bottom; and on the same height, the horizontal spacing between any two adjacent distance-adjusting slotted holes is the same; the distance-adjusting carrier plate comprises a carrier plate body, wherein a moving part capable of moving along the corresponding distance-adjusting slot hole is arranged at the upper end part of the carrier plate body, the moving part is positioned in the corresponding distance-adjusting slot hole, and two ends of the moving part are respectively abutted to the inner side wall of the corresponding distance-adjusting slot hole.

10. A chip detection and sorting method is characterized in that: comprises the following steps of

Respectively placing a tray filled with chips and a tray not filled with chips on the appointed positions of the feeding conveyor line group;

conveying a tray with chips and a tray without chips to the direction of a turnover device, and photographing and detecting the tray with chips by a first visual detection mechanism in the conveying process;

the turnover assembly performs turnover after reversely stacking the tray without the chip and the tray with the chip, and enables the turned chip to be transferred into the tray without the chip;

The turnover assembly conveys the tray provided with the turned chip to the blanking conveying set, and the second visual detection mechanism performs photographing detection on the tray provided with the turned chip;

the sorting device sorts the chips according to the detection results of the first visual detection mechanism and the second visual detection mechanism.