CN117712017A - A new type of flower basket lifting mechanism - Google Patents
A new type of flower basket lifting mechanism Download PDFInfo
- Publication number
- CN117712017A CN117712017A CN202311788729.5A CN202311788729A CN117712017A CN 117712017 A CN117712017 A CN 117712017A CN 202311788729 A CN202311788729 A CN 202311788729A CN 117712017 A CN117712017 A CN 117712017A
- Authority
- CN
- China
- Prior art keywords
- plate
- lifting
- fixed
- basket
- limiting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3402—Mechanical parts of transfer devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本发明提供了一种新型花篮提升机构,涉及硅片花篮输送领域,包括主支架、安装板、固定板、气压缸、限位组件、连接组件、提升座、转运台、辅助限位组件和转动组件,所述主支架对称设有两组,两组所述主支架上均等间距设有多组安装孔,两组所述主支架之间通过安装孔配合螺栓可拆卸安装有固定板,所述固定板位于两组主支架的中端,所述固定板的顶部固定有气压缸,所述气压缸与限位组件固定连接,所述气压缸通过限位组件与主支架滑动连接,所述主支架的下端对称设有对硅片花篮进行提升的提升座,所述限位组件与提升座之间通过连接组件固定;本发明采用可移动式的气压缸,可以通过调整固定板的安装位置,进而可以根据需要调整气压缸的高度,增加本装置的功能性。
The invention provides a new type of flower basket lifting mechanism, which relates to the field of silicon wafer flower basket transportation, including a main bracket, a mounting plate, a fixed plate, a pneumatic cylinder, a limiting component, a connecting component, a lifting seat, a transfer platform, an auxiliary limiting component and a rotating assembly, the main brackets are symmetrically provided with two groups, and the two groups of main brackets are provided with multiple sets of mounting holes at equal intervals. A fixing plate is detachably installed between the two groups of main brackets through the mounting holes and bolts, and the The fixed plate is located at the middle end of the two sets of main brackets. A pneumatic cylinder is fixed on the top of the fixed plate. The pneumatic cylinder is fixedly connected to the limiting assembly. The pneumatic cylinder is slidingly connected to the main bracket through the limiting assembly. The lower end of the bracket is symmetrically provided with a lifting seat for lifting the silicon wafer flower basket. The limiting component and the lifting seat are fixed by a connecting component; the present invention uses a movable pneumatic cylinder, which can be adjusted by adjusting the installation position of the fixed plate. Furthermore, the height of the pneumatic cylinder can be adjusted as needed to increase the functionality of the device.
Description
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311788729.5A CN117712017B (en) | 2023-12-25 | 2023-12-25 | Novel basket of flowers hoist mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311788729.5A CN117712017B (en) | 2023-12-25 | 2023-12-25 | Novel basket of flowers hoist mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117712017A true CN117712017A (en) | 2024-03-15 |
| CN117712017B CN117712017B (en) | 2024-11-15 |
Family
ID=90162157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311788729.5A Active CN117712017B (en) | 2023-12-25 | 2023-12-25 | Novel basket of flowers hoist mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117712017B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119153386A (en) * | 2024-09-05 | 2024-12-17 | 苏州玖钧智能装备有限公司 | Multi-arm support type silicon wafer flower basket adsorption lifting structure |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN208385377U (en) * | 2018-07-11 | 2019-01-15 | 苏州映真智能科技有限公司 | Active gaily decorated basket load system |
| CN110060937A (en) * | 2018-01-18 | 2019-07-26 | 江西宝群电子科技有限公司 | A kind of silicon wafer inserting piece device |
| WO2022233170A1 (en) * | 2021-05-07 | 2022-11-10 | 拉普拉斯(无锡)半导体科技有限公司 | Wafer guiding system for silicon wafers |
| CN218371487U (en) * | 2022-10-09 | 2023-01-24 | 常州捷佳创智能装备有限公司 | Lifting mechanism of silicon wafer basket and drying and curing furnace device |
| WO2023087560A1 (en) * | 2020-11-19 | 2023-05-25 | 拉普拉斯(无锡)半导体科技有限公司 | Feeding and discharging system for silicon wafer |
| CN219393369U (en) * | 2023-04-06 | 2023-07-21 | 苏州市超越研创智能装备有限公司 | Wafer warpage brush correction assembly |
-
2023
- 2023-12-25 CN CN202311788729.5A patent/CN117712017B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110060937A (en) * | 2018-01-18 | 2019-07-26 | 江西宝群电子科技有限公司 | A kind of silicon wafer inserting piece device |
| CN208385377U (en) * | 2018-07-11 | 2019-01-15 | 苏州映真智能科技有限公司 | Active gaily decorated basket load system |
| WO2023087560A1 (en) * | 2020-11-19 | 2023-05-25 | 拉普拉斯(无锡)半导体科技有限公司 | Feeding and discharging system for silicon wafer |
| WO2022233170A1 (en) * | 2021-05-07 | 2022-11-10 | 拉普拉斯(无锡)半导体科技有限公司 | Wafer guiding system for silicon wafers |
| CN218371487U (en) * | 2022-10-09 | 2023-01-24 | 常州捷佳创智能装备有限公司 | Lifting mechanism of silicon wafer basket and drying and curing furnace device |
| CN219393369U (en) * | 2023-04-06 | 2023-07-21 | 苏州市超越研创智能装备有限公司 | Wafer warpage brush correction assembly |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119153386A (en) * | 2024-09-05 | 2024-12-17 | 苏州玖钧智能装备有限公司 | Multi-arm support type silicon wafer flower basket adsorption lifting structure |
| CN119153386B (en) * | 2024-09-05 | 2025-05-23 | 苏州玖钧智能装备有限公司 | A multi-arm supported silicon wafer basket adsorption and lifting structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117712017B (en) | 2024-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A new type of flower basket lifting mechanism Granted publication date: 20241115 Pledgee: Bank of China Limited by Share Ltd. Nanjing Jiangning branch Pledgor: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Registration number: Y2025980010092 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20241115 Pledgee: Bank of China Limited by Share Ltd. Nanjing Jiangning branch Pledgor: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Registration number: Y2025980010092 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A new type of flower basket lifting mechanism Granted publication date: 20241115 Pledgee: Bank of China Limited by Share Ltd. Nanjing Jiangning branch Pledgor: NANJING TOPSTEK AUTOMATION EQUIPMENT CO.,LTD. Registration number: Y2026980009481 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |