CN117607068B - Accurate testing method for laser damage threshold of optical material - Google Patents
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- 239000000463 material Substances 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 title claims abstract description 35
- 238000012360 testing method Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 31
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000004364 calculation method Methods 0.000 abstract description 4
- 238000004886 process control Methods 0.000 abstract description 3
- 238000010998 test method Methods 0.000 abstract description 2
- 239000005371 ZBLAN Substances 0.000 description 11
- 239000005304 optical glass Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000003902 lesion Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
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- G—PHYSICS
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention discloses an accurate test method for laser damage threshold of an optical material, which is characterized in that the surface of the optical material to be tested is enabled to generate L-shaped damage tracks with uniform width, the widths of the transverse axis and the longitudinal axis of the L-shaped damage tracks are directly measured, and the laser damage threshold test is carried out by combining a data fitting method, so that the artificial factors for measuring the size of a damage pit and the calculation errors of the laser damage threshold caused by the uncertainty factors such as the irregularity of the shape of the damage pit can be reduced, and the accuracy of the laser damage threshold test is effectively ensured. The irradiation times of the method for detecting the laser beam quality of the optical material to be detected are adjustable and controllable, the widths of the transverse axis and the longitudinal axis of the L-shaped damage track generated on the surface of the optical material to be detected are uniform, and the quality of the laser beam can be rapidly, simply and intuitively judged by comparing the widths of the transverse axis and the longitudinal axis. The method has the advantages of simple process control operation, high repeatability and good stability of the test result, and can be suitable for S-on-1 laser damage test.
Description
Technical Field
The invention belongs to the field of laser damage threshold testing, and particularly relates to an accurate testing method for an optical material laser damage threshold.
Background
The optical material is used as a key component in the laser and plays an important role in controlling laser transmission, improving laser performance, improving laser efficiency and the like. In recent years, with the development of high-power laser technology, the laser energy density and the thermal load born by the optical element are also increased, which also brings a serious challenge of laser damage resistance to corresponding optical materials. Therefore, accurately evaluating the damage characteristics of the laser light to the optical material has important referential significance for evaluating the laser tolerance and application range of the optical element.
The laser damage threshold refers to the minimum laser energy intensity that causes permanent damage to the material. The laser damage threshold of the optical material may be obtained by a data fitting method. The data fitting method needs to consider various factors including the energy density of the laser, the acting time, the size of the light spot, the state of the laser, the diameter of the damaged pit and the like. Although the factors such as energy density, action time, spot size and laser state can be improved through experimental design and devices to reduce errors, the accuracy of measuring the diameter of the damaged pit is affected by factors such as human factors and uncertainty factors such as the irregularity of the shape of the damaged pit. This may result in limited accuracy of the fit results, which in turn may result in differences in the calculated laser damage threshold results. Figure 1 shows the damage profile of an optical material under the action of a laser, including irregular and regular damage pits. Even if different measuring methods are adopted for the regular damage pits, as shown in fig. 2, the diameter of the smallest circle with the largest circle tangent to the inner circle and the smallest circle tangent to the outer circle is measured, the diameter of the damage pits may be significantly deviated, so that the calculation result of the laser damage threshold of the optical material is affected, and a larger error is generated. Meanwhile, when the laser damage threshold of the optical material is tested, the damage condition of the surface of the material is directly affected by the quality of the laser beam, the laser with poor beam quality can lead to uneven energy distribution, the material is excessively heated and damaged in a local area, and the calculation of the laser damage threshold of the material is error. Therefore, how to quickly judge the quality of the laser beam, and accurately measure the size of the damage pit to accurately calculate the laser damage threshold of the optical material is important.
Disclosure of Invention
The invention aims to solve the technical problems of the prior art, and provides an accurate testing method for the laser damage threshold of an optical material, which has the advantages of simple process control operation, high repeatability and good stability of a testing result, can effectively ensure the accuracy of the laser damage threshold test, realizes quick, simple and visual judgment on the quality of a laser beam, and is suitable for the S-on-1 laser damage test.
The technical scheme adopted for solving the technical problems is as follows: an accurate test method for an optical material laser damage threshold comprises the following steps of
S1, polishing an optical material to be tested;
S2, irradiating the optical material to be detected at least three times in a laser direct writing mode, wherein the incident laser power of each irradiation is different, and after each irradiation, an L-shaped damage track formed by sequentially overlapping a plurality of circular damage pits is generated on the surface of the optical material to be detected;
S3, calculating the average value of the widths of the transverse axis and the longitudinal axis of each L-shaped damage track based on the widths of the transverse axis and the longitudinal axis of at least three L-shaped damage tracks, and taking the average value as the diameter D of a round damage pit irradiated each time;
s4, establishing a data fitting straight line between the square D 2 of the diameter D of the circular damage pit and the logarithm lnE in of the incident laser energy E in through the formula (1):
Determining the slope of the data fitting straight line according to the established data fitting straight line, wherein the slope is the spot radius omega 0 of the laser; when D 2 =0, it indicates that no damage happens at this time, and the corresponding incident laser energy E in is the laser damage energy threshold E th;
After determining the laser damage energy threshold E th and the spot radius ω 0 of the laser, the corresponding laser damage threshold F th is calculated using equation (2):
Preferably, in each irradiation process, the optical material to be measured is moved at a constant speed, and the lengths of the transverse axis and the longitudinal axis of the generated L-shaped damage track are respectively not smaller than 100 μm.
Compared with the prior art, the invention has the following advantages:
1. Different from the traditional method for measuring the diameter of the damage pit, the method provided by the invention has the advantages that the L-shaped damage track with uniform width is generated on the surface of the optical material to be measured, the widths of the transverse axis and the longitudinal axis of the L-shaped damage track are directly measured, the laser damage threshold test is carried out by combining a data fitting method, the artificial factors for measuring the size of the damage pit and the calculation errors of the laser damage threshold caused by the uncertainty factors such as the irregularity of the shape of the damage pit can be reduced, and the accuracy of the laser damage threshold test is effectively ensured;
2. The irradiation times of the method for detecting the laser beam quality of the optical material to be detected is adjustable and controllable, the widths of the transverse axis and the longitudinal axis of the L-shaped damage track generated on the surface of the optical material to be detected are uniform, and the quality of the laser beam can be rapidly, simply and intuitively judged by comparing the widths of the transverse axis and the longitudinal axis;
3. the method has the advantages of simple process control operation, high repeatability and good stability of the test result, and can be suitable for S-on-1 laser damage test.
Drawings
FIG. 1 is a diagram of a conventional optical material laser damage pit morphology;
FIG. 2 is a schematic diagram of a prior art method for measuring the diameter of a lesion pit;
fig. 3 is a schematic diagram showing the state of laser direct writing in example 1;
FIG. 4 is a morphology graph of four "L" shaped damage tracks obtained by laser direct writing in example 1;
FIG. 5 is a topography of an "L" shaped damage track obtained when the laser beam quality is poor;
fig. 6 is a straight line fitted with data of ZBLAN optical glass obtained by the conventional method and the method of the present invention.
Detailed Description
The present invention will be described in further detail below with reference to the embodiments of the drawings, but the scope of the present invention should not be limited thereto.
Fluoride ZrF 4-BaF2-LaF3-AlF3 -NaF optical glass (hereinafter referred to as ZBLAN optical glass) is used as an optical material to be measured, after polishing treatment is carried out on the optical material, the size of a damage pit is measured by adopting the method and the traditional method shown in FIG. 2, and a laser damage threshold is calculated by using a data fitting method.
1. Example 1: the method of the invention
Assuming that the ZBLAN optical glass is irradiated by short pulse Gaussian laser with the wavelength of 800nm, the pulse width of 150fs and the repetition frequency of 1kHz, the average incident laser power is gradually increased to 10mW from 4mW at intervals of 2mW, the ZBLAN optical glass is irradiated four times by adopting a laser direct writing mode, the incident laser power of each irradiation is different, in the irradiation process, the ZBLAN optical glass is transversely and uniformly moved at the speed of 20 mu m/s for 10 seconds through motor driving, the ZBLAN optical glass is longitudinally and uniformly moved at the speed of 20 mu m/s for 5 seconds through motor driving, under the continuous action of laser, an L-shaped damage track formed by sequentially overlapping a plurality of circular damage pits is generated on the surface of the ZBLAN optical glass, and the lengths of the transverse axis and the longitudinal axis of the generated L-shaped damage track are respectively not smaller than 100 mu m. Fig. 3 is a schematic diagram showing the state of laser direct writing in example 1. Fig. 4 is a topography of four "L" shaped damage tracks obtained by laser direct writing in example 1.
The widths of the upper part of the vertical axis, the middle part of the vertical axis and the middle part of the horizontal axis of the four L-shaped damage tracks are respectively measured, and the measurement results are shown in Table 1. The widths of the four L-shaped damage tracks are found to have extremely high uniformity, the errors of width measurement are all within 0.5 mu m, and the quality of the laser beam can be judged to be good. And when the quality of the laser beam is poor, referring to fig. 5, the difference between the width measurement of the vertical axis and the horizontal axis of the "L" -shaped damage track is large.
Table 1: the method of the invention is based on the measurement result of the width of the L-shaped damage track under different powers
Based on the widths of the horizontal and vertical axes of the four "L" shaped damage tracks in table 1, the average value of the widths of the horizontal and vertical axes of each "L" shaped damage track was calculated as the diameter D of the circular damage pit per irradiation. A data fit line between the square D 2 of the diameter D of the circular lesion pit and the logarithm lnE in of the incident laser energy E in is established by formula (1):
Determining the slope of the data fitting straight line according to the established data fitting straight line, wherein the slope is the spot radius omega 0 of the laser; when D 2 =0, it indicates that no damage happens at this time, and the corresponding incident laser energy E in is the laser damage energy threshold E th;
After determining the laser damage energy threshold E th and the spot radius ω 0 of the laser, the corresponding laser damage threshold F th is calculated using equation (2):
in example 1, the linear fitness calculated for the laser damage threshold was 99.60% based on the damage track width measurement.
2. Comparative example 1: conventional method
Assuming that the ZBLAN optical glass is irradiated by a short pulse gaussian laser with a wavelength of 800nm, a pulse width of 150fs and a repetition frequency of 1kHz, the average incident laser power is gradually increased to 10mW at intervals of 2mW from 4mW, and to ensure experimental accuracy, the circular damage pit diameter of the ZBLAN optical glass is measured by irradiating 3 times at different positions under the same power (the measurement results are shown in table 2), and the laser damage threshold is calculated.
Table 2: diameter measurement result of circular damage pit under different powers by traditional method
Based on the circular lesion-pit diameters in table 2, an average value of each circular lesion-pit diameter was calculated, as such: establishing a data fitting straight line between the square D 2 of the diameter D of the circular damage pit and the logarithm lnE in of the incident laser energy E in through the formula (1), and determining the slope of the data fitting straight line according to the established data fitting straight line, wherein the slope is the spot radius omega 0 of the laser; when D 2 =0, it indicates that no damage happens at this time, the corresponding incident laser energy E in is the laser damage energy threshold E th, and after determining the laser damage energy threshold E th and the spot radius ω 0 of the laser, the corresponding laser damage threshold F th is calculated using formula (2).
In comparative example 1, the linear fitness calculated by the laser damage threshold was 95.67% based on the damage track width measurement result.
3. Comparing the results of the two methods
Figure 6 shows the data fitting lines for ZBLAN optical glasses obtained by the conventional method and the method of the present invention. The laser damage threshold value obtained by the method is 1.05-1.13J/cm 2, and the relative error of the laser damage threshold value test is 7.3%; the laser damage threshold obtained by using the traditional method is 0.99-1.26J/cm 2, and the relative error of the laser damage threshold test is 24.5%. The relative error of the traditional method is 3.3 times that of the method, which shows that the laser damage threshold error obtained by the test of the method is smaller and the repeatability is better.
Claims (2)
1. The method for accurately testing the laser damage threshold of the optical material is characterized by comprising the following steps of
S1, polishing an optical material to be tested;
S2, irradiating the optical material to be detected at least three times in a laser direct writing mode, wherein the incident laser power of each irradiation is different, and after each irradiation, an L-shaped damage track formed by sequentially overlapping a plurality of circular damage pits is generated on the surface of the optical material to be detected;
S3, calculating the average value of the widths of the transverse axis and the longitudinal axis of each L-shaped damage track based on the widths of the transverse axis and the longitudinal axis of at least three L-shaped damage tracks, and taking the average value as the diameter D of a round damage pit irradiated each time;
s4, establishing a data fitting straight line between the square D 2 of the diameter D of the circular damage pit and the logarithm lnE in of the incident laser energy E in through the formula (1):
Determining the slope of the data fitting straight line according to the established data fitting straight line, wherein the slope is the spot radius omega 0 of the laser; when D 2 =0, it indicates that no damage happens at this time, and the corresponding incident laser energy E in is the laser damage energy threshold E th;
After determining the laser damage energy threshold E th and the spot radius ω 0 of the laser, the corresponding laser damage threshold F th is calculated using equation (2):
2. The method for accurately testing the laser damage threshold of the optical material according to claim 1, wherein the optical material to be tested is moved at a constant speed in each irradiation process, and the lengths of the transverse axis and the longitudinal axis of the generated L-shaped damage track are respectively not smaller than 100 μm.
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| JP4528075B2 (en) * | 2003-09-19 | 2010-08-18 | 独立行政法人科学技術振興機構 | Laser damage evaluation method for optical materials |
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