CN117604630A - A single crystal diamond growth equipment with stratified control function of raw gas concentration - Google Patents

Abstract

The invention provides a single crystal diamond growth equipment with a layered control function of raw material gas concentration, and relates to the field of diamond growth. The invention includes an ionization chamber, a microwave system, an ionization cylinder, a controller, a heat exchanger, a gas supply pipeline and a supply air pump. The ionization cylinder is arranged inside the ionization chamber, and the air outlet of the supply air pump is connected to the bottom of the heat exchanger. An air supply structure is provided between the air ports. The air supply structure installed in the present invention not only controls the circulation flow of the raw gas between the ionization cylinder, the heat exchanger and the supply air pump, but also ensures the balance of the supply and discharge of the raw gas, and cools the raw gas; the rotating air diffusion pipe It cooperates with multiple flow control valves to control the uniform distribution of the concentration of raw gas inside the ionization tube, and the upper driving assembly controls the reciprocating push assembly to vibrate the ionization tube, avoiding the degradation of diamond production quality caused by sticking diamond inside the ionization tube, and ensuring diamond production. the quality of.

Description

A single crystal diamond growth equipment with layered control function of raw gas concentration

Technical field

The invention relates to a diamond growth equipment, specifically a single crystal diamond growth equipment with a raw material gas concentration stratified control function, and belongs to the technical field of diamond growth.

Background technique

Diamond is an excellent semiconductor material. Its high thermal conductivity, high electron and hole mobility, high dielectric breakdown field, low dielectric loss and wide band gap surpass the performance of most materials.

However, the naturally occurring type IIb diamond with semiconductor properties is so rare that the published research, technology or methods all use the naturally occurring relatively large amount or the artificially grown type IIa diamond as the substrate material for semiconductor wafer processing. .

Therefore, chemical vapor deposition (CVD) is used to grow diamond. The chemical vapor deposition (CVD) diamond growth technology needs to ionize the raw material gas during the production process. After the raw material gas is introduced into the ionization box through the gas supply pipeline, there will be problems inside the ionization box. The farther away from the gas supply pipeline, the lower the density of the raw material gas, and the concentration of the raw material gas cannot be controlled, resulting in a reduction in the quality of diamond growth.

Contents of the invention

In order to solve the above problems, the present invention is realized through the following technical solutions: a single crystal diamond growth equipment with a layered control function of raw gas concentration; including an ionization chamber, a microwave system, an ionization cylinder, a controller, a heat exchanger, and a gas supply. Pipeline and feed air pump, the ionization cylinder is arranged inside the ionization chamber, and an air supply structure is provided between the air outlet of the feed air pump and the air inlet at the bottom of the heat exchanger; the air supply structure includes an upper driving assembly, an air diffusion pipe and The lower shunt and discharge assembly has a plurality of flow control valves, air pressure sensors and dividing plates arranged inside the diffuser tube from top to bottom; a plurality of chutes are provided at the bottom of the outer side of the diffuser tube; the top of the diffuser tube A first telescopic tube is provided between the upper driving component and the second telescopic tube between the bottom of the diffuser tube and the lower diverging and discharging component. A reciprocating pushing component is provided between the upper driving component and the ionization cylinder.

Preferably, the gas outlet of the heat exchanger is equipped with a one-way valve, and the gas supply pipeline is fixedly installed on the top of the one-way valve. The setting of the one-way valve prevents the raw material gas in the gas supply pipeline from flowing back into the heat exchanger, making the supply The air pipeline plays the role of transporting raw gas to the inside of the diffuser pipe. The air outlet of the feed air pump is installed on one side of the air supply pipe. The heat exchanger and the controller are fixedly installed on both sides of the ionization chamber. The air supply pipe A short tube is rotatably connected to one end. The bottom end of the short tube penetrates the ionization chamber and is rotatably connected to the ionization chamber through a bearing. The bottom end of the short tube is fixedly connected to the first telescopic tube.

Preferably, the upper driving assembly includes a driven gear, a transmission gear, a forward and reverse motor and a reciprocating screw. The forward and reverse motor drives the transmission gear to rotate through the reciprocating screw, drives the meshed driven gear to rotate, and drives the diffuser tube to rotate. The driven gear meshes with one side of the transmission gear. The driven gear is fixedly sleeved on the outside of the damper. The reciprocating screw is fixedly installed between the transmission gear and the output end of the forward and reverse motors. The reciprocating screw penetrates the ionization chamber. And it is rotationally connected with the ionization chamber through bearings.

Preferably, the reciprocating pushing assembly includes a nut pair, which is sleeved on the outside of the reciprocating screw rod. A fixed horizontal plate is fixedly connected to one side of the nut pair, and a striking rod is fixedly connected to the bottom of the fixed horizontal plate. The outer side of the striking rod The sleeve is equipped with a fixed bending plate. When the reciprocating screw rod rotates, the driving nut pair moves up and down, so that the impact rod moves up and down to continuously hit the ionization cylinder. The fixed bending plate is fixedly connected between the ionization chamber and the forward and reverse motors. The ionization cylinder There are multiple dampers fixedly connected between the outer bottom and the ionization chamber. The constant impact of the impact rod will cause the ionization tube to vibrate inside the ionization chamber.

Preferably, the top end of the diffuser tube penetrates the ionization tube and is rotationally connected to the ionization tube through a bearing. A plurality of the flow control valves are fixedly connected to the interior of the diffuser tube, and the plurality of flow control valves are fixedly connected to the diffuser tube. There is a gas guide elbow, multiple flow control valves work, and the raw material gas is sprayed into the interior of the ionization tube through the gas guide elbow. The partition plate is fixedly connected to the inside of the diffuser tube, and the air pressure sensor is fixedly connected to the top of the partition plate.

Preferably, the outer fixed sleeve of the air diffuser pipe is provided with a rubber cover, the chute is opened outside the air diffuser pipe and is arranged inside the rubber cover, the outer top fixed sleeve of the air diffuser pipe is provided with a one-way bearing, and the one-way bearing A magnet column is provided on the top. The magnet column fixed to the ionization tube is adsorbed and fixed to the outer ring of the one-way bearing to limit the connection plate and prevent the connection plate and cleaning frame from shaking. The magnet column is fixedly connected to the top of the inner cavity of the ionization tube.

Preferably, a connecting plate is fixedly connected to one side of the one-way bearing, and a cleaning rack is fixedly connected to one end of the connecting plate. The cleaning rack rotates inside the ionization cylinder, and the cleaning rack in contact with the inner wall of the ionization cylinder scrapes the air inlet from the inner wall of the ionization cylinder. Wipe to prevent the diamond generated by the ionization tube from sticking to the ionization tube. The bottom end of the cleaning rack extends to the bottom of the chute.

Preferably, the bottom end of the air dispersion pipe runs through the ionization cylinder and is rotatably connected to the ionization cylinder through a bearing. The lower shunt and discharge assembly includes an air extraction pipe, a separation box and a three-way valve. At the bottom of the tracheal cavity, the second telescopic tube is fixedly connected between the bottom of the air extraction pipe and the normally closed end of the three-way valve. An air induction pipe is fixedly connected between the air extraction pipe and the normally open end of the three-way valve. Inside the separation box A filter tube is provided.

Preferably, a rubber sleeve is fixedly connected to the top of the air extraction pipe, and the rubber sleeve is arranged inside the air diffusion pipe. The inside of the rubber sleeve is large at the top and small at the bottom, ensuring that all diamonds enter the air extraction pipe from the inside of the air diffusion pipe. The tube is fixedly connected to the top of the inner cavity of the separation box. A discharge elbow is fixedly connected between the filter tube and the separation box. One end of the discharge elbow is fixedly connected to a collection box. Diamonds are trapped inside the filter tube and pass through. The discharge elbow fixed at the bottom of the filter tube enters the collection box for temporary storage, and a control valve is fixedly connected to one end of the collection box.

Preferably, an air return pipe is fixedly connected between the three-way valve and the air inlet end of the air extraction pump, the air outlet end of the air extraction pump is provided at the bottom of the air inlet of the heat exchanger, and a plurality of inclined plates are fixedly connected inside the air return pipe. , a plurality of the inclined plates are staggeredly distributed inside the return pipe, and a flared pipe is fixedly connected to the bottom of the return pipe. The particles are collected into the interior of the flared pipe under the action of gravity, and finally the particles enter the waste material threaded at the bottom of the flared pipe. Inside the box, a waste box is provided with a threaded sleeve at the outer bottom of the expanded tube. The waste box can be disassembled by rotating the waste box away from the outer bottom of the expanded tube.

The present invention provides a single crystal diamond growth equipment with a layered control function of raw gas concentration, which has the following beneficial effects:

1. This single crystal diamond growth equipment with stratified control function of raw gas concentration has a gas supply structure installed between the ionization chamber, ionization cylinder, and heat exchanger, which not only controls the flow of raw gas between the ionization cylinder, heat exchanger, The circulating flow between the supply air pumps also ensures the balance of the supply and discharge of the raw gas, and cools the raw gas; at the same time, the air supply structure composed of the upper driving assembly, the air diffuser pipe and the lower shunt and discharge assembly, through the rotating air diffuser pipe and Multiple flow control valves cooperate to control the uniform distribution of the concentration of raw gas inside the ionization tube, and the upper driving assembly controls the reciprocating push assembly to vibrate the ionization tube, avoiding the degradation of diamond production quality caused by diamond sticking inside the ionization tube, and ensuring the quality of diamond production. quality. The lower splitting and discharging assembly provides different paths for raw gas circulation and diamond collection when meeting the needs of raw gas circulation. It can satisfy the raw gas circulation without collecting the fine particles in the raw gas as diamond products.

2. For this single crystal diamond growth equipment with stratified control function of raw gas concentration, when the forward and reverse motors are reversed, the rotation direction of the diffuser tube is the self-locking direction of the one-way bearing, so the diffuser tube drives the connecting plate to rotate through the one-way bearing. , the rotating connecting plate drives the cleaning rack to rotate inside the ionization tube, and the cleaning rack in contact with the inner wall of the ionization tube scrapes the air intake on the inner wall of the ionization tube to prevent the diamond generated by the ionization tube from sticking to the ionization tube, ensuring that the raw gas and the ionization tube are The mass of diamond produced by the inner wall reaction.

Description of drawings

Figure 1 is a schematic diagram of the overall structure of the present invention;

Figure 2 is a schematic structural diagram of the short tube of the present invention;

Figure 3 is a schematic structural diagram of the air supply pipeline of the present invention;

Figure 4 is a schematic structural diagram of a fixed horizontal plate according to the present invention;

Figure 5 is a schematic structural diagram of the rubber cover of the present invention;

Figure 6 is a schematic structural diagram of the diffuser tube of the present invention;

Figure 7 is a partial structural schematic diagram of the partition plate of the present invention;

Figure 8 is a schematic structural diagram of the separation box of the present invention;

Figure 9 is a partial structural schematic diagram of the air return pipe of the present invention;

Figure 10 is a schematic structural diagram of the air induction tube of the present invention.

Explanation of reference signs: 1. Ionization chamber; 2. Microwave system; 3. Ionization cylinder; 4. Heat exchanger; 5. Feed air pump; 6. One-way valve; 7. Gas supply pipe; 8. First telescopic tube ; 9. Diffusion pipe; 10. Flow control valve; 11. Air bend; 12. Divider plate; 13. Air pressure sensor; 14. Chute; 15. Driven gear; 16. Transmission gear; 17. Fixed bend plate; 18. Forward and reverse motors; 19. Reciprocating screw rod; 20. Nut pair; 21. Fixed horizontal plate; 22. Impact rod; 23. Rubber cover; 24. One-way bearing; 25. Magnet column; 26. Connecting plate ; 27. Cleaning rack; 28. Air extraction pipe; 29. Second telescopic pipe; 30. Separation box; 31. Filter pipe; 32. Discharge elbow; 33. Collection box; 34. Control valve; 35. Air induction pipe; 36. Three-way valve; 37. Air return pipe; 38. Inclined plate; 39. Expanded pipe; 40. Waste box; 41. Rubber sleeve; 42. Air pump; 43. Damper; 44. Short pipe.

Detailed ways

Embodiments of the present invention provide a single crystal diamond growth equipment with a layered control function of raw material gas concentration.

Please refer to Figure 1, Figure 2, Figure 3, Figure 4, Figure 5, Figure 6, Figure 7, Figure 8, Figure 9 and Figure 10, including ionization chamber 1, microwave system 2, ionization tube 3, controller, heat exchanger 4, gas supply pipe 7 and feed air pump 5, the ionization cylinder 3 is installed inside the ionization chamber 1, the air outlet of the heat exchanger 4 is installed with a one-way valve 6, the gas supply pipe 7 is fixedly installed on the top of the one-way valve 6, and the gas supply pipe 7 is installed on the top of the one-way valve 6. The air outlet of the feed air pump 5 is installed on one side of the air supply pipe 7. The heat exchanger 4 and the controller are fixedly installed on both sides of the ionization chamber 1. There is a gas outlet between the air outlet of the feed air pump 5 and the air inlet at the bottom of the heat exchanger 4. The air supply structure controls the circulating flow of raw gas between the ionization cylinder 3, the heat exchanger 4, and the supply air pump 5. The heat exchanger 4 cools down the raw gas in the circulation and increases the distance between the raw gas and the inner wall of the ionization cylinder 3. temperature difference;

The air supply structure includes an upper driving assembly, an air diffuser 9 and a lower shunt and discharge assembly. The raw gas extracted by the supply air pump 5 is transported to the inside of the gas supply pipe 7, and the raw gas discharged from the heat exchanger 4 also enters the gas supply pipe 7. Internally, the one-way valve 6 is provided to prevent the raw gas in the air supply pipe 7 from flowing back into the heat exchanger 4. The short tube 44 is internally connected to the diffuser tube 9 through the first telescopic tube 8, so the air supply pipe 7 passes through the short tube 44. The raw material gas is transported into the diffuser pipe 9 . A plurality of flow control valves 10, air pressure sensors 13 and partition plates 12 are arranged inside the diffuser tube 9 from top to bottom; the top of the diffuser tube 9 penetrates the ionization cylinder 3 and is rotationally connected to the ionization cylinder 3 through bearings. Multiple flow control valves 10 are all fixedly connected to the inside of the diffuser tube 9, the partition plate 12 is fixedly connected to the inside of the diffuser tube 9, the air pressure sensor 13 is fixedly connected to the top of the partition plate 12, the working supply air pump 5 injects raw material gas into the inside of the diffuser tube 9, so that The air pressure in the space at the top of the internal partition plate 12 of the diffuser pipe 9 increases. The air pressure sensor 13 detects the internal air pressure of the diffuser pipe 9 in real time. The air pressure value detected by the air pressure sensor 13 is displayed on the electrically connected controller. The staff can display the data according to the displayed data. Dissolve the internal air pressure state of the trachea 9 to prepare for the next step of work.

When the air pressure value reaches the predetermined value, the controller controls the upper drive component to work;

The upper driving assembly includes a driven gear 15, a transmission gear 16, a forward and reverse motor 18 and a reciprocating screw 19. The reciprocating screw 19 is fixedly installed between the transmission gear 16 and the output end of the forward and reverse motor 18. The reciprocating screw 19 penetrates the ionization chamber. 1 and is rotationally connected to the ionization chamber 1 through bearings, so that the transmission gear 16 is installed on the top of the ionization chamber 1 as shown in Figure 1. The driven gear 15 is meshed with one side of the transmission gear 16. The driven gear 15 is fixedly sleeved on the outside of the short tube 44. The short tube 44 is rotatably connected to the air supply pipe 7. The short pipe 44 of the air supply pipe 7 is rotatably connected to the ionization chamber 1. Rotation connection, so when the driven gear 15 fixed on the outside of the short tube 44 rotates, the rotation of the short tube 44 will not affect the air supply pipe 7 and provide support for the rotation of the driven gear 15. The bottom end of the short tube 44 is connected to the first telescopic Pipe 8 is fixedly connected.

The working forward and reverse motor 18 drives the output end to install a reciprocating screw rod 19 to rotate. The fixed transmission gear 16 of the reciprocating screw rod 19 rotates synchronously. The rotating transmission gear 16 drives the meshed driven gear 15 to rotate. The driven gear 15 is fixed internally. The short tube 44 rotates, the first telescopic tube 8 fixed by the short tube 44 rotates, the diffuser tube 9 fixed at the bottom of the first telescopic tube 8 rotates, the diffuser tube 9 installed by the rotation of the ionization tube 3 rotates, and the diffuser tube 9 is in the ionization tube 3 Make a constant rotation.

An air guide elbow 11 is fixedly connected between the multiple flow control valves 10 and the air diffuser pipe 9. When the multiple flow control valves 10 are working, the high-pressure raw gas inside the air diffuser pipe 9 passes through the flow control valve 10 and the air guide elbow 11. The interior of the ionization cylinder 3 is sprayed, and the diffuser tube 9 rotates to distribute the raw material gas to various positions on the inner wall of the ionization cylinder 3, thereby reducing the time required for the raw material gas to fill the interior of the ionization cylinder 3. Since the output flows of the multiple flow control valves 10 decrease sequentially from top to bottom, the flow rate of the raw material gas injected into the interior of the ionization cylinder 3 from the multiple air guide elbows 11 decreases sequentially from top to bottom, and the heavier raw gas flows under the gravity. A sinking phenomenon will occur naturally under the action of Build quality degradation issue.

The reciprocating pushing component includes a nut pair 20. The nut pair 20 is sleeved on the outside of the reciprocating screw rod 19. One side of the nut pair 20 is fixedly connected to a fixed horizontal plate 21. The bottom of the fixed horizontal plate 21 is fixedly connected to an impact rod 22. The impact rod 22 is sleeved on the outside. There is a fixed bending plate 17. One end of the fixed bending plate 17 is fixedly connected to the forward and reverse motors 18. As shown in Figure 4, the other end of the fixed bending plate 17 is fixedly connected to the ionization chamber 1, so the fixed bending plate 17 fixes the forward and reverse motors 18. Installed inside the ionization chamber 1.

The fixed bent plate 17 cannot rotate, so the impact rod 22 inside the fixed bent plate 17 cannot rotate, and the fixed horizontal plate 21 fixed by the impact rod 22 cannot rotate, so the nut that fixes the horizontal plate 21 cannot The pair 20 is limited and cannot rotate, and the rotation of the reciprocating screw rod 19 cannot drive the nut pair 20 to rotate. And the bottom end of the striking rod 22 only penetrates the fixed bending plate 17, so the striking rod 22 can move up and down. The rotating reciprocating screw rod 19 drives the outer nut pair 20 to move up and down. The nut pair 20 drives the fixed fixed horizontal plate 21 to move up and down, causing the fixed impact rod 22 of the fixed horizontal plate 21 to move up and down. The up and down moving impact rod 22 continuously impacts and ionizes. Barrel 3.

A first telescopic tube 8 is provided between the top of the diffuser tube 9 and the upper driving assembly, a second telescopic tube 29 is provided between the bottom of the diffuser tube 9 and the lower shunt and discharge assembly, and a second telescopic tube 29 is provided between the upper drive assembly and the ionization cylinder 3 Push the assembly back and forth.

A telescopic first telescopic tube 8 is installed at the top of the diffuser tube 9 that is rotatably connected inside the ionization tube 3. A telescopic second telescopic tube 29 is installed at the bottom of the diffuser tube 9. Therefore, the entire ionization tube 3 can move up and down. The plurality of dampers 43 installed between the bottom of the ionization tube 3 and the ionization chamber 1 can only expand and contract up and down, so the ionization tube 3 fixedly installed by the plurality of dampers 43 can move up and down. The continuous impact of the impact rod 22 will cause the ionization tube 3 to vibrate inside the ionization chamber 1, shaking off the sticky diamond on the inner wall of the ionization tube 3, and preventing the sticky diamond inside the ionization tube 3 from affecting the reaction between the raw material gas and the inner wall of the ionization tube 3.

A plurality of chute 14 is provided at the outer bottom of the diffuser tube 9 , and the plurality of chute 14 is provided at the bottom of the inner cavity of the ionization tube 3 . The bottom end of the diffuser tube 9 penetrates the ionization tube 3 and passes through the bearing and the ionization tube 3 Turn the connection. The lower splitting and discharging assembly includes an air extraction pipe 28, a separation box 30 and a three-way valve 36. The outer top of the air extraction pipe 28 is rotated at the bottom of the inner cavity of the diffuser pipe 9 through a bearing. The separation box 30 passes through the air extraction pipe 28 and the second telescopic tube 29. It is internally connected with the diffuser tube 9 .

The second telescopic tube 29 is fixedly connected between the bottom of the air extraction pipe 28 and the normally closed end of the three-way valve 36. An air induction pipe 35 is fixedly connected between the air extraction pipe 28 and the normally open end of the three-way valve 36. As shown in Figure 10, the separation box A filter tube 31 is provided inside 30. The bottom of the inner cavity of the ionization cylinder 3 is connected to the inside of the diffuser tube 9 through the chute 14. The inside of the diffuser tube 9 is connected to the exhaust pipe 28. The exhaust tube 28 is connected to the separation box 30 through the fixed second telescopic tube 29. Internal connectivity.

When the air pump 42 works at low power, the air pump 42 always starts to pump air through the three-way valve 36, because the three-way valve 36 always starts to connect with the air intake pipe 35, the second telescopic tube 29, the air exhaust pipe 28 and the plurality of chutes 14. The bottom of the inner cavity of the ionization cylinder 3 is connected, and the air extraction pump 42 extracts the gas at the bottom of the inner cavity of the ionization cylinder 3 through the three-way valve 36, the air bleed pipe 35, the air extraction pipe 28, and multiple chutes 14. At this time, the internal gas replenishment speed of the ionization cylinder 3 A stable cycle is formed with the speed at which it is extracted, and the outlet end of the air extraction pump 42 is connected to the air inlet of the heat exchanger 4. During the cycle, the gas is cooled by the heat exchanger 4, increasing the temperature difference between the raw material gas and the inner wall of the ionization cylinder 3, increasing The speed of the reaction between the raw material gas and the inner wall of the ionization cylinder 3 increases the diamond generation speed.

When the air pump 42 works at high power, the three-way valve 36 works and the air pump 42 cooperates with the normally closed end to open. The air pump 42 pumps air through the normally closed end of the three-way valve 36, and the normally closed end of the three-way valve 36 is connected to the separation box 30, so The air extraction pump 42 extracts the gas at the bottom of the inner cavity of the ionization cylinder 3 through the separation box 30, the second telescopic tube 29, the air extraction pipe 28, the air diffusion pipe 9 and the plurality of chutes 14. The high-speed flowing gas forms a negative pressure at the bottom of the inner cavity of the ionization cylinder 3. Pressure is applied to extract the diamonds at the bottom of the inner cavity of the ionization cylinder 3. When the airflow carrying diamonds passes through the inside of the separation box 30, the diamond particles are intercepted by the filter tube 31 fixed inside the separation box 30, completing the diamond collection work.

Specifically, the supply air pump 5 is first controlled to extract the raw material gas and transport it to the inside of the diffuser tube 9 through the air supply pipe 7. The partition plate 12 and the air pressure sensor 13 are arranged at the top of the inner cavity of the diffuser tube 9 to form a pressurizing chamber. The air pressure sensor 13. Real-time detection of the internal air pressure of the pressurizing chamber. When the internal air pressure of the pressurizing chamber reaches a predetermined value, the controller controls the upper driving assembly to drive the diffusion pipe 9 to rotate. At the same time, the controller controls the operation of multiple flow control valves 10.

The output flows of the multiple flow control valves 10 decrease in sequence from top to bottom, so the speed of the raw gas injected into the interior of the ionization cylinder 3 from the multiple air guide elbows 11 decreases in sequence from top to bottom, and the rotating diffuser tube 9 drives multiple flows. The control valve 10 and the plurality of air guide elbows 11 distribute the raw material gas into the interior of the ionization cylinder 3 under rotational motion.

Since the raw material gas will naturally sink under the action of gravity, the raw material gas with higher concentration in the upper part automatically sinks to supplement the raw material gas in the lower part, so that the concentration of the raw material gas inside the ionization cylinder 3 is evenly distributed, ensuring that the ionization cylinder 3 generates diamond through ionization. the quality of. During the process of ionizing the inside of the ionization tube 3 to generate diamond, the reciprocating pushing assembly, under the action of the upper driving assembly, and the constant impact of the impact rod 22 will cause the ionization tube 3 to vibrate inside the ionization chamber 1, and the diamond in the inner cavity of the ionization tube 3 will be vibrated. Shake it off to prevent the position where the ionization reaction is sent on the inner wall of the ionization tube 3 from being covered by diamond, and ensure the quality of the diamond generated by the reaction between the ionization tube 3 and the raw material gas.

After the upper drive assembly works for a period of time, the lower shunt and discharge assembly works. At this time, the air pump 42 works at low power, and at this time, the air pump 42 passes through the three-way valve 36, the normally open end, the air intake pipe 35, the second telescopic pipe 29, The air extraction pipe 28 and the plurality of chutes 14 are connected with the bottom of the inner cavity of the ionization cylinder 3. The air extraction pump 42 works to extract air through the normally open end of the three-way valve 36, the air induction pipe 35, the second telescopic tube 29, the air extraction pipe 28 and the plurality of chutes 14. Gas at the bottom of the inner cavity of ionization cylinder 3.

At this time, the multiple flow control valves 10 replenish the raw material gas speed into the ionization cylinder 3, and form a stable state with the speed at which the gas that settles to the bottom of the inner cavity of the ionization cylinder 3 after the ionization reaction is extracted. The gas extracted by the air extraction pump 42 is transported to Inside the heat exchanger 4, the gas is cooled by the cold air of the heat exchanger 4 and then transported to the inside of the air supply pipe 7. After the gas is mixed with the gas delivered to the inside of the gas supply pipe 7 by the supply air pump 5, it is transported to the diffuser pipe by the gas supply pipe 7. 9, and is eventually evenly distributed into the interior of the ionization cylinder 3 and reacts with the inner wall of the ionization cylinder 3 to generate diamond, so that the raw material gas flows through the supply air pump 5, the air supply pipe 7, the air diffusion pipe 9, and the air return pipe 37 under the control of the air supply structure. , the heat exchanger 4 circulates, and the raw material gas is cooled during the flow process, increasing the temperature difference between the raw material gas and the internal temperature of the ionization cylinder 3, and increasing the diamond generation speed.

After the raw gas processing is completed, the lower shunt and discharge assembly is controlled to work at high power, and the air pump 42 is operated at high power while controlling the three-way valve 36 to work. The normally closed end of the three-way valve 36 is opened and the normally open end is closed. The air pump 42 passes through the three-way valve. When the normally closed end of the valve 36 is used for air extraction, the gas at the bottom of the inner cavity of the ionization cylinder 3 can be extracted through the separation box 30, the second telescopic tube 29, the air extraction tube 28, the diffuser tube 9 and the plurality of chutes 14. The high-speed flowing gas is The negative pressure formed at the bottom of the inner cavity of the ionization cylinder 3 controls the flow of diamonds falling to the bottom of the inner cavity of the ionization cylinder 3. The airflow carrying diamonds enters the separation box 30 and is intercepted and collected by the filter tube 31.

Therefore, the air supply structure installed between the ionization chamber 1, the ionization cylinder 3, and the heat exchanger 4 in this application not only controls the circulation flow of the raw material gas between the ionization cylinder 3, the heat exchanger 4, and the feed air pump 5 , also ensures the balance of raw gas supply and discharge, and cools the raw gas; at the same time, the gas supply structure composed of the upper driving component, the diffuser pipe 9 and the lower shunt and discharge component, through the rotating diffuser pipe 9 and multiple flow control valves 10 In conjunction with controlling the uniform distribution of the concentration of raw material gas inside the ionization tube 3, and the upper driving component controlling the reciprocating push component to vibrate the ionization tube 3, the ionization tube 3 is prevented from deteriorating in the quality of diamond production caused by diamond sticking inside the ionization tube 3, and the quality of diamond production is ensured. The lower splitting and discharging assembly provides different paths for raw gas circulation and diamond collection when meeting the needs of raw gas circulation. It can satisfy the raw gas circulation without collecting the fine particles in the raw gas as diamond products.

Please refer to Figure 2, Figure 5 and Figure 6 again. The outer fixed sleeve of the diffuser pipe 9 is provided with a rubber cover 23. The chute 14 is opened on the outer side of the diffuser pipe 9 and arranged inside the rubber cover 23. The fixed sleeve on the outer top of the diffuser pipe 9 is provided with a rubber cover 23. The one-way bearing 24 is provided with a magnet column 25 on the top of the one-way bearing 24. The magnet column 25 is fixedly connected to the top of the inner cavity of the ionization cylinder 3. One side of the one-way bearing 24 is fixedly connected with a connecting plate 26, and one end of the connecting plate 26 is fixedly connected with a cleaning device. Frame 27, the bottom end of the cleaning frame 27 extends to the bottom of the chute 14.

Specifically, during the working process of the upper driving assembly, the forward and reverse motors 18 change working states regularly. When the forward and reverse motors 18 work in forward or reverse rotation, they drive the transmission gear 16 to rotate forward or reverse through the reciprocating screw 19, and the transmission The gear 16 drives the engaged driven gear 15 to rotate forward or reverse, and the internally fixed short tube 44 rotates forward or reverse. The short tube 44 drives the diffuser tube 9 to rotate forward or reverse, and the short tube 44 passes through the first telescopic tube. 8. Make the diffuser tube 9 rotate forward or reverse inside the ionization tube 3.

When the forward and reverse motors 18 rotate in reverse, the direction of rotation of the air diffuser 9 is the self-locking direction of the one-way bearing 24, so the air diffuser 9 drives the self-locking one-way bearing 24 to rotate as a whole, and the one-way bearing 24 drives the fixed connecting plate. 26 rotates, the rotating connecting plate 26 drives the fixed cleaning rack 27 to rotate inside the ionization tube 3, and the cleaning rack 27 in contact with the inner wall of the ionization tube 3 scrapes the air inlet of the ionization tube 3 to prevent the diamond generated by the ionization tube 3 from sticking. On the ionization cylinder 3, the quality of the diamond generated by the reaction between the raw material gas and the inner wall of the ionization cylinder 3 is ensured.

There is a magnet column 25 adsorbed on the top of the one-way bearing 24. When the air diffuser 9 rotates forward, the rotation direction of the air diffuser 9 is not the self-locking direction of the one-way bearing 24. At this time, the fixed magnet column 25 of the ionization tube 3 is outside the one-way bearing 24. The ring is adsorbed and fixed to limit the position of the connecting plate 26 to prevent the connecting plate 26 and the cleaning frame 27 from shaking.

Please refer to Figure 1, Figure 5, Figure 6, Figure 7, Figure 8, Figure 9 and Figure 10 again. The top of the exhaust pipe 28 is fixedly connected with a rubber sleeve 41. The rubber sleeve 41 is arranged inside the diffuser pipe 9, and the filter pipe 31 is fixedly connected. At the top of the inner cavity of the separation box 30, a discharge elbow 32 is fixedly connected between the filter tube 31 and the separation box 30. One end of the discharge elbow 32 is fixedly connected to a collection box 33, and one end of the collection box 33 is fixedly connected to a control valve 34. A return pipe 37 is fixedly connected between the three-way valve 36 and the air inlet end of the air extraction pump 42. The air outlet end of the air extraction pump 42 is arranged at the bottom of the air inlet of the heat exchanger 4. A plurality of inclined plates 38 are fixedly connected inside the air return pipe 37. The inclined plates 38 are staggeredly distributed inside the air return pipe 37. The bottom of the return pipe 37 is fixedly connected with a flared pipe 39, and a waste box 40 is threaded at the bottom of the flared pipe 39.

Specifically, a rubber cover 23 is fixedly mounted on the outside of the diffuser tube 9, and the chute 14 is provided on the inner wall of the rubber cover 23. The rubber cover 23 cooperates with the ionization cylinder 3 to form a relatively sealed space through which the high-power air extraction pump 42 can pass. When the normally closed end of the three-way valve 36, separation box 30, second telescopic tube 29, air extraction tube 28, diffuser tube 9 and multiple chutes 14 extract the gas at the bottom of the inner cavity of the ionization cylinder 3, the rubber cover 23 reduces the range of negative pressure generation. , increase the intensity of the negative pressure generated at the bottom of the inner cavity of the ionization tube 3, and suck the diamond at the bottom of the inner cavity of the ionization tube 3 into the inside of the diffuser tube 9.

The diamonds that enter the inside of the diffuser tube 9 enter the inside of the exhaust tube 28 through the rubber sleeve 41. The inside of the rubber sleeve 41 is large at the top and small at the bottom. This ensures that all the diamonds enter the inside of the exhaust tube 28 from the inside of the diffuser tube 9 and prevents the diamonds from being trapped between the diffuser tube 9 and the exhaust tube 28. There is accumulation at the installation place of the exhaust pipe 28. When the airflow containing diamond passes through the filter tube 31, the diamonds are trapped inside the filter tube 31, and the diamonds enter the collection box 33 for temporary storage through the discharge elbow 32 fixed at the bottom of the filter tube 31.

When the diamond processing is completed, the control valve 34 that controls the fixed collection box 33 is opened, and the diamond stored in the inclined collection box 33 is discharged.

When the air extraction pump 42 operates at low power, the three-way valve 36 is usually connected to the bottom of the inner cavity of the ionization cylinder 3 through the air intake pipe 35, the second telescopic tube 29, the air extraction pipe 28 and a plurality of chutes 14. The air extraction pump 42 passes through the three-way The valve 36 is always open, the air bleed pipe 35, the air extraction pipe 28, and multiple chutes 14 extract the gas at the bottom of the inner cavity of the ionization cylinder 3. The gas directly enters the inside of the three-way valve 36 through the air bleed pipe 35, and the gas will not be filtered by the filter tube 31 to avoid The particles in the gas are intercepted by the filter tube 31 and mixed with the final diamond product.

Moreover, a return pipe 37 is fixedly connected between the air inlet end of the air pump 42 and the three-way valve 36. Before the gas enters the air pump 42, it needs to pass through the interior of the return pipe 37. The gas collides with multiple inclined plates 38 fixed inside the return pipe 37. The particulate matter in the gas is trapped and adsorbed by the inclined plate 38 , and the particulate matter is trapped inside the air return pipe 37 .

When the air pump 42 stops working, beat the air return pipe 37 to cause it to vibrate, so that the particles inside the return pipe 37 are collected into the inside of the expanded pipe 39 under the action of vibration and gravity, and the particles fall into the waste box at the bottom of the expanded pipe 39 40 inside, the particulate matter is collected. The waste box 40 can be disassembled by rotating the waste box 40 away from the outer bottom of the flared tube 39 .

The output end of the air extraction pump 42 is connected to the air inlet of the heat exchanger 4, and the gas extracted by the air extraction pump 42 enters the inside of the heat exchanger 4 and is cooled down.

Claims (10)

1. A single crystal diamond growth equipment with a layered control function of raw gas concentration, including an ionization chamber (1), a microwave system (2), an ionization cylinder (3), a controller, a heat exchanger (4), and a gas supply Pipeline (7) and feed air pump (5), the ionization cylinder (3) is arranged inside the ionization chamber (1), and is characterized by: An air supply structure is provided between the air outlet of the feed air pump (5) and the air inlet at the bottom of the heat exchanger (4). The air supply structure controls the flow of the raw gas between the ionization cylinder (3), the heat exchanger (4), and the air inlet. Circulation flow between the material and air pumps (5); The air supply structure includes an upper driving assembly, an air diffusion pipe (9) and a lower shunt and discharge assembly. A plurality of flow control valves (10) and air pressure sensors (13) are arranged inside the air diffusion pipe (9) from top to bottom. and the dividing plate (12), and the upper driving assembly controls the diffusion tube (9) to rotate inside the ionization cylinder (3); A plurality of chutes (14) are provided at the outer bottom of the diffuser tube (9). The lower shunt and discharge assembly extracts the raw material gas or diamond that sinks to the bottom of the inner cavity of the ionization tube (3) through the plurality of chutes (14). particles; a first telescopic tube (8) is provided between the top of the diffuser tube (9) and the upper driving assembly, and a second telescopic tube (8) is provided between the bottom of the diffuser tube (9) and the lower shunt and discharge assembly. 29); A reciprocating pushing assembly is provided between the upper driving assembly and the ionization cylinder (3). The ionization cylinder (3) installed on the first telescopic tube (8) and the second telescopic tube (29) is controlled by the reciprocating pushing assembly in the ionization chamber (1). The inside vibrates up and down. 2. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 1, characterized in that: the air outlet of the heat exchanger (4) is equipped with a one-way valve (6), so The air supply pipe (7) is fixedly installed on the top of the one-way valve (6), the air outlet of the supply air pump (5) is installed on one side of the air supply pipe (7), the heat exchanger (4) and the controller They are respectively fixedly installed on both sides of the ionization chamber (1). One end of the gas supply pipe (7) is rotatably connected to a short tube (44). The bottom end of the short tube (44) penetrates the ionization chamber (1) and is connected with the ionization chamber (1). 1) Rotatingly connected through bearings, the bottom end of the short tube (44) is fixedly connected to the first telescopic tube (8). 3. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 2, characterized in that: the upper driving assembly includes a driven gear (15), a transmission gear (16), and a forward and reverse motor. (18) and the reciprocating screw (19), the driven gear (15) meshes with one side of the transmission gear (16), the driven gear (15) is fixedly sleeved on the outside of the damper (43), the The reciprocating screw rod (19) is fixedly installed between the transmission gear (16) and the output end of the forward and reverse motor (18). The reciprocating screw rod (19) penetrates the ionization chamber (1) and rotates with the ionization chamber (1) through bearings. connect. 4. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 3, characterized in that: the reciprocating pushing assembly includes a nut pair (20), and the nut pair (20) is sleeved on the reciprocating wire. Outside the rod (19), a fixed horizontal plate (21) is fixedly connected to one side of the nut pair (20), and a striking rod (22) is fixedly connected to the bottom of the fixed horizontal plate (21). The striking rod (22) The outer sleeve is provided with a fixed bending plate (17). The fixed bending plate (17) is fixedly connected between the ionization chamber (1) and the forward and reverse motors (18). The outer bottom of the ionization tube (3) is connected to the ionization chamber (18). 1) There are multiple dampers (43) fixedly connected between them. 5. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 1, characterized in that: the top of the diffuser tube (9) penetrates the ionization tube (3) and is connected with the ionization tube (3). ) are rotationally connected through bearings, a plurality of the flow control valves (10) are fixedly connected inside the diffuser pipe (9), and a guide is fixedly connected between the plurality of flow control valves (10) and the diffuser pipe (9). Air bend pipe (11), the dividing plate (12) is fixedly connected to the inside of the diffuser pipe (9), and the air pressure sensor (13) is fixedly connected to the top of the dividing plate (12). 6. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 1, characterized in that: a rubber cover (23) is fixed on the outside of the diffuser tube (9), and the The chute (14) is opened outside the air diffuser tube (9) and is arranged inside the rubber cover (23). A one-way bearing (24) is fixedly mounted on the top of the outside of the air diffuser tube (9). The one-way bearing (24) ) is provided with a magnet column (25) on the top, and the magnet column (25) is fixedly connected to the top of the inner cavity of the ionization cylinder (3). 7. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 6, characterized in that: one side of the one-way bearing (24) is fixedly connected with a connecting plate (26), so A cleaning rack (27) is fixedly connected to one end of the connecting plate (26), and the bottom end of the cleaning rack (27) extends to the bottom of the chute (14). 8. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 1, characterized in that: the bottom end of the diffuser tube (9) penetrates the ionization tube (3) and is connected to the ionization tube through a bearing. The barrel (3) is rotatably connected, and the lower distributing and discharging assembly includes an air extraction pipe (28), a separation box (30) and a three-way valve (36). The outer top of the air extraction pipe (28) is rotatably mounted on the diffuser pipe (28) through a bearing. 9) At the bottom of the inner cavity, the second telescopic tube (29) is fixedly connected between the bottom of the air extraction pipe (28) and the normally closed end of the three-way valve (36). The air extraction pipe (28) and the three-way valve (36) ) There is an air intake pipe (35) fixedly connected between the two normal ends, and a filter pipe (31) is provided inside the separation box (30). 9. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 8, characterized in that: a rubber sleeve (41) is fixedly connected to the top of the exhaust pipe (28), and the rubber The sleeve (41) is arranged inside the diffuser tube (9), the filter tube (31) is fixedly connected to the top of the inner cavity of the separation box (30), and the filter tube (31) and the separation box (30) are fixedly connected with Discharge elbow (32), one end of the discharge elbow (32) is fixedly connected to a collection box (33), and one end of the collection box (33) is fixedly connected to a control valve (34). 10. A single crystal diamond growth equipment with stratified control function of raw gas concentration according to claim 8, characterized in that: the three-way valve (36) and the air inlet end of the air pump (42) are fixed between each other. An air return pipe (37) is connected, and the air outlet end of the air extraction pump (42) is arranged at the bottom of the air inlet of the heat exchanger (4). A plurality of inclined plates (38) are fixedly connected inside the air return pipe (37). The inclined plates (38) are staggered inside the air return pipe (37). The bottom of the air return pipe (37) is fixedly connected with a flared pipe (39). The outer bottom of the flared pipe (39) is threaded with a Scrap Box (40).