CN117430289A - A circulating water quality control device and circulating water system - Google Patents
A circulating water quality control device and circulating water system Download PDFInfo
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- CN117430289A CN117430289A CN202311678436.1A CN202311678436A CN117430289A CN 117430289 A CN117430289 A CN 117430289A CN 202311678436 A CN202311678436 A CN 202311678436A CN 117430289 A CN117430289 A CN 117430289A
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
- C02F1/5281—Installations for water purification using chemical agents
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/023—Water in cooling circuits
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/004—Seals, connections
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/007—Modular design
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/06—Controlling or monitoring parameters in water treatment pH
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/40—Liquid flow rate
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
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- Engineering & Computer Science (AREA)
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a circulating water quality regulating and controlling device and a circulating water system, comprising a sedimentation module and a neutralization module which are sequentially connected into an internal circulating water pipeline, and a multi-stage filtering module which is respectively arranged at the input end of the sedimentation module and the input end of the neutralization module; an alkaline treatment unit is arranged in the precipitation module and is used for generating precipitation and precipitation of circulating water; the neutralization module is internally provided with a neutralization alkaline unit which is used for neutralizing and weakening the alkaline water quality of the circulating water treated by the alkaline treatment unit; the filtering module is internally provided with a filtering unit which is used for filtering sediment in the circulating water step by step in a multi-stage filtering mode. The invention can reduce the generation of sediment in the internal circulating water pipeline, so as to reduce the generation of local sediment or corrosion in the cooling pipeline and other parts, and improve the service life of the circulating water system and the cooled parts, thereby increasing the stability of the process.
Description
Technical Field
The invention relates to the technical field of circulating water systems of semiconductor equipment, in particular to a circulating water quality regulating and controlling device and a circulating water system.
Background
The main semiconductor process equipment mainly cools components including the bulb group and the like through a circulating water system, and the circulating water system is provided with an internal circulating water cooling pipeline at the positions of the components requiring cooling, such as the bulb group and the like. In the repeated recycling process of the cooling water, the water quality can change, but the current circulating water system is only provided with a filtering and purifying treatment link, so that the cleaning capability of impurities in the cooling water is limited, the circulating water system can have local precipitation or corrosion phenomena in parts such as a bulb group cooling pipeline of main process equipment, and the local precipitation/corrosion and the like are difficult to effectively monitor through water level/water resistance monitoring, thereby generating potential damages to the service life of a bulb matrix and the internal circulating water system and influencing the process stability.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a circulating water quality regulating device and a circulating water system.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
the invention provides a circulating water quality regulating and controlling device, which comprises a sedimentation module, a neutralization module and a multistage filtering module, wherein the sedimentation module and the neutralization module are sequentially connected into an internal circulating water pipeline, and the multistage filtering module is respectively arranged at the input end of the sedimentation module and the input end of the neutralization module;
an alkaline treatment unit is arranged in the precipitation module and is used for generating precipitation and precipitation of circulating water;
the neutralization module is internally provided with a neutralization alkaline unit which is used for neutralizing and weakening the alkaline water quality of the circulating water treated by the alkaline treatment unit;
the filtering module is internally provided with a filtering unit which is used for filtering sediment in the circulating water step by step in a multi-stage filtering mode.
Further, the method further comprises the following steps: the anti-backflow module is arranged between the output end of the sedimentation module and the input end of the neutralization module, and is internally provided with an anti-backflow unit for preventing circulating water in the neutralization module from flowing back into the sedimentation module, and the filtering module is also arranged on the input end of the anti-backflow module.
Further, the alkaline treatment unit is provided with a first porous alkaline column, the neutralization alkaline unit is provided with a second porous alkaline column, and the alkaline pH value of the second porous alkaline column is smaller than that of the first porous alkaline column; and/or the filtering unit is provided with a screen; and/or the backflow prevention unit is provided with a circulating water flow channel and a one-way baffle plate arranged in the circulating water flow channel, and the one-way baffle plate is arranged to seal the circulating water flow channel in one direction under the action of gravity of backflow circulating water.
Further, reverse osmosis units are further arranged in the neutralization module and the precipitation module, and are respectively positioned at one side of the neutralization alkaline unit close to the input end of the neutralization module and one side of the alkaline treatment unit close to the input end of the precipitation module.
Further, the reverse osmosis unit comprises a reverse osmosis membrane.
Further, the method further comprises the following steps: the PH detection module is provided with a PH detection unit for detecting and feeding back the PH value of circulating water flowing through, and the flow detection module is provided with a flow detection unit for detecting and feeding back the flow velocity of the circulating water flowing through.
Further, the PH detection unit includes a PH meter; and/or the flow detection unit comprises a flow meter.
Further, the sedimentation module, the backflow prevention module and the neutralization module are respectively arranged in the bearing pipe bodies, all the bearing pipe bodies are sequentially connected in a sealing mode through threads, the bearing pipe bodies of the sedimentation module and the neutralization module are also respectively connected with the inner circulating water pipeline through threads in a sealing mode, and the filtration module is respectively arranged at a threaded interface between every two adjacent bearing pipe bodies and at a threaded interface between the bearing pipe bodies of the sedimentation module and the inner circulating water pipeline.
The invention also provides a circulating water system, which is provided with an internal circulating water pipeline and the circulating water quality regulating device, and one or more circulating water quality regulating devices are connected into the internal circulating water pipeline.
Further, the control module judges whether each module in the circulating water quality regulating device is replaced or not according to feedback of the PH detection module and the flow detection module which are respectively arranged on the inner circulating water pipelines at the input end and the output end of the circulating water quality regulating device so as to carry out secondary regulation on precipitation and final PH value of circulating water.
The invention has the beneficial effects that:
(1) By arranging the precipitation module with the alkaline treatment unit and the neutralization module with the neutralization alkaline unit in the internal circulating water pipeline of the circulating water system, an alkaline environment can be created, impurities in circulating water flowing through the precipitation module can form precipitation and separate out in advance, so that the probability of local precipitation and corrosion in a cooling pipeline at parts needing cooling such as a bulb group and the like is reduced, the pH value of the flowing circulating water can be regulated, weak alkaline water quality is formed, and finally the generation of acidic and alkaline environment precipitates in the internal circulating water is reduced.
(2) By arranging the autonomous active backflow prevention module with the baffle plate between the precipitation module and the neutralization module, the baffle plate can naturally drop and close along with gravity, and the backflow pollution problem of circulating water caused by the power shortage of a water pump and the like under special machine conditions such as power failure can be prevented.
(3) Through setting up multistage filtration module, can form multistage filter screen system, progressively filter the sediment and purify quality of water, the filter screen of each level still plays the effect that can prevent the sediment backward flow simultaneously.
(4) By arranging the reverse osmosis unit, the reverse osmosis membrane can be utilized to prevent the backflow of the ion level and prevent the pollution of the pH value between different areas.
(5) PH value and flow rate of circulating water flowing through are detected through setting up PH detection module and flow detection module at the device both ends to feedback the steady operation state of system, in time adjust and change each module, and through two-stage PH regulation and control (one-level is the sediment in advance, the second grade regulates and control pH valve), improved the quality of water of inner circulating water finally.
(6) Each module is connected through the helicitic texture, forms the modularized design, and wherein multistage filter screen sets up in two module junctions, can change newly at any time, makes things convenient for the nimble change and the combination of device part, and the suitability is good, and design flexibility is high, has increased life.
Drawings
FIG. 1 is a schematic view of a circulating water quality control apparatus according to a preferred embodiment of the present invention.
Fig. 2-3 are schematic views illustrating a usage state structure of a backflow prevention unit according to a preferred embodiment of the present invention.
FIG. 4 is a schematic diagram of a circulating water quality control scheme of a circulating water system according to a preferred embodiment of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. Unless otherwise defined, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. As used herein, the word "comprising" and the like means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof without precluding other elements or items.
Aiming at the problems that in the internal circulating water pipeline of the circulating water system of the existing equipment (such as semiconductor process equipment), no relevant water quality regulation and control auxiliary device exists, circulating water is only monitored by means of water level/water resistance, and is only filtered and purified by a conventional filtering facility, the cleaning capability is limited, the circulating water system possibly has local precipitation or corrosion in parts such as a bulb group cooling pipeline of the main process equipment, the local precipitation/corrosion and the like are difficult to monitor, potential damage is caused to the bulb matrix service life and the internal circulating water system, and the stability of the process is influenced.
The following describes the embodiments of the present invention in further detail with reference to the drawings.
Reference is made to fig. 1. The circulating water quality regulating and controlling device 10 is integrally divided into a plurality of mutually connected modules, including a filtering module 11, a precipitation module 16 and a neutralization module 13.
The sedimentation module 16 and the neutralization module 13 are connected in turn in the circulating water direction in an internal circulating water line 20 of a circulating water system of an apparatus (for example, a semiconductor process apparatus). The plurality of filter modules 11 are arranged on the input end of the sedimentation module 16 and the input end of the neutralization module 13 respectively, so that the multistage filter module 11 with the multistage filtering function is formed.
Wherein, the sedimentation module 16 is provided with an alkaline treatment unit for creating an alkaline environment to precipitate the circulating water flowing through.
The neutralization module 13 is provided with a neutralization alkaline unit for neutralizing and weakening the alkaline water quality of the circulating water treated by the alkaline treatment unit, namely weakening the alkaline pH value of the circulating water flowing to the neutralization alkaline unit through the neutralization effect.
The filtering module 11 is provided therein with a filtering unit for filtering the sediment in the circulating water flowing therethrough step by step in a multistage filtering manner to purify the water quality.
Reference is made to fig. 1. In some embodiments, the circulating water quality control apparatus 10 of the present invention further comprises a backflow prevention module 15. The backflow prevention module 15 is arranged between the output end of the precipitation module 16 and the input end of the neutralization module 13; the backflow preventing unit 15 is provided therein for preventing the circulating water, which has entered the neutralization module 13, from flowing back into the precipitation module 16 again. The filter module 11 is also provided at the input of the backflow prevention module 15. I.e. the filter module 11 is a 3-stage filter module 11 comprising 3 filter modules 11. Wherein, 3 filter modules 11 are respectively arranged between the input end of the sedimentation module 16 and the interface of the internal circulating water pipeline 20, between the output end of the sedimentation module 16 and the input end of the backflow prevention module 15, and between the output end of the backflow prevention module 15 and the input end of the neutralization module 13.
In some embodiments, the alkaline treatment unit in the precipitation module 16 is provided with a first porous alkaline column, which creates a slightly more alkaline environment to bind the impurity ions in the circulating water and precipitate them. The neutralization alkaline unit in the neutralization module 13 is provided with a second porous alkaline column, and the alkaline pH value provided by the second porous alkaline column is smaller than that provided by the first porous alkaline column so as to neutralize the slightly strong alkaline environment of the alkaline treatment unit, create a weak alkaline environment, form weak alkaline water quality and finally reduce the generation of acidic and alkaline environmental sediment in the internal circulating water through regulation and control.
In some embodiments, the filter units in the filter module 11 are provided with a screen. The screen mesh not only can gradually filter out precipitated substance impurities and purify water, but also can prevent the inner circulating water pipeline 20 from being blocked, and simultaneously can play a role in preventing the backflow of the precipitate in the lower-level module. Wherein, the screen mesh number in each stage of filter module 11 can be flexibly configured according to the requirement.
Reference is made to fig. 1. In some embodiments, a reverse osmosis unit 14 is also provided in each of the neutralization module 13 and the precipitation module 16. The reverse osmosis unit 14 disposed in the neutralization module 13 is located at one side of the neutralization alkaline unit near the input end of the neutralization module 13, that is, the reverse osmosis unit 14 is located between the filtering module 11 and the neutralization alkaline unit of the stage, for preventing the circulating water of the ion level from flowing back, and preventing the mutual pollution caused by the difference of the ph value between the neutralization module 13 and the backflow preventing module 15. The reverse osmosis unit 14 disposed in the precipitation module 16 is disposed at one side of the alkaline treatment unit near the input end of the precipitation module 16, so as to prevent the precipitated substances from being dissolved in the near-inlet section and being contaminated with each other due to the backflow of the lower pipeline of the device due to concentration gradient and the like during long-term power failure, thereby affecting the life of the lower pipeline and the whole device components.
In some embodiments, reverse osmosis unit 14 comprises a reverse osmosis membrane.
In some embodiments, the circulating water quality control apparatus 10 of the present invention further includes a PH detection module 17 and a flow detection module 18. The PH detection module 17 and the flow detection module 18 are respectively arranged in 2 and are respectively arranged on an internal circulating water pipeline 20 at the input end of the sedimentation module 16 and an internal circulating water pipeline 20 at the output end of the neutralization module 13. The PH detection module 17 is provided with a PH detection unit, which may be, for example, a PH meter, for detecting the PH value of the circulating water flowing therethrough and feeding back the PH value of the circulating water for timely determining the stability of the system. The flow detection module 18 is provided with a flow detection unit, which may be, for example, a flow meter, for detecting the flow rate of the circulating water flowing therethrough, so as to feed back the flow rate of the circulating water for timely determining the maintainability of the system. Through two-stage PH regulation (the first stage is used for pre-precipitation regulation and the second stage is used for final PH value regulation), the internal circulation water quality is finally improved, and the system is always in a stable running state.
Referring to fig. 2-3 and to fig. 1. In some embodiments, the circulating water quality control apparatus 10 of the present invention is disposed on a vertical section of the internal circulating water pipeline 20, forming a vertical modular internal circulating water quality control apparatus 10. The circulating water sequentially enters the sedimentation module 16, the backflow prevention module 15 and the neutralization module 13 which are vertically arranged from the pipe section of the inner circulating water pipeline 20 at the lower position for treatment, and flows out from the output end of the neutralization module 13 into the pipe section of the inner circulating water pipeline 20 at the upper position after treatment. The backflow preventing unit in the backflow preventing module 15 is provided with a tubular circulating water flow channel 151 and a one-way baffle 152 provided in the circulating water flow channel 151. The one-way baffle 152 is provided to conduct the circulating water flow channel 151 when the circulating water flows forward as shown in fig. 2, and to unidirectionally close the circulating water flow channel 151 under the gravity of the circulating water flowing backward as shown in fig. 3 when the circulating water flows backward once. That is, the unidirectional baffle 152 can naturally drop and close along with gravity under the action of gravity of the backflow circulating water, and reverse cut-off the backflow circulating water, so that backflow pollution of the circulating water caused by insufficient power of a water pump and other problems can be prevented under special machine conditions such as power failure, an autonomous active backflow prevention module 15 is formed, and further one-layer deep protection can be provided for manual components such as a valve on the internal circulating water pipeline 20.
In some embodiments, the one-way baffles 152 may be movably installed in pairs on opposite sidewalls within the circulating water flow channel 151. Also, a plurality of pairs of the one-way baffles 152 may be provided along the sidewall of the circulating water flow channel 151, for example, 4 pairs of the one-way baffles 152 are provided as shown in fig. 2 to 3, to enhance the closing effect of the backflow prevention. Further, the upper and lower sides of the fixed end of each unidirectional baffle 152 are respectively provided with a clamping groove structure 153, that is, a pair of clamping groove structures 153 are formed, so as to limit the up-down swing amplitude of the unidirectional baffle 152. Wherein, a clamping groove structure 153 above each one-way baffle 152 is used for ensuring that the one-way baffle 152 at the position is not carried to the deflection amplitude parallel to the side wall of the circulating water flow channel 151 by water flow in normal operation, so as to avoid the possibility that the one-way baffle 152 at the position cannot naturally drop under certain conditions; meanwhile, the other clamping groove structure 153 below the unidirectional baffle 152 is used for limiting the swing amplitude when the unidirectional baffle 152 falls back to the lowest position, so that the mutual interference among the unidirectional baffles 152 caused by unknown position deviation due to inconsistent falling sequence when different unidirectional baffles 152 on the left side and the right side fall back is prevented. Further, for the backflow preventing devices of different models, the upper and lower clamping groove structures 153 with different spacing distances can be correspondingly arranged. Meanwhile, the maximum upward inclination angle of the unidirectional barrier 152 is controlled by setting the protruding length of the detent groove structure 153 in different specifications.
Reference is made to fig. 1. In some embodiments, the sedimentation module 16, the backflow prevention module 15 and the neutralization module 13 are respectively arranged in the bearing pipe bodies 12, and the bearing pipe bodies 12 are sequentially connected in a sealing way by adopting threads; the bearing pipe body 12 of the precipitation module 16 and the internal circulating water pipeline 20 are also respectively connected with the bearing pipe body 12 of the neutralization module 13 and the internal circulating water pipeline 20 in a threaded sealing way. The filter module 11 is separately arranged at the screw thread interface between two adjacent bearing pipe bodies 12 and at the screw thread interface between the bearing pipe body 12 of the sedimentation module 16 and the internal circulating water pipeline 20. The main structure of the circulating water quality control device 10 is divided into three modules (the sedimentation module 16, the backflow prevention module 15 and the neutralization module 13), so that flexible replacement of each module and water quality control components (a screen, an alkaline column, a reverse osmosis membrane and a backflow prevention unit) thereof can be facilitated, and the service life of the whole device is prolonged.
Wherein, three main modules are all integrally packaged through the bearing tube body 12, each main module is relatively independent, and each main module respectively internally forms a functional part in a nested mode. Different modules are connected through a threaded structure, and the multistage filter screen is installed at the joint of two adjacent modules and can be replaced at any time. Through modularized design, the replacement and combination are more flexible and convenient, the adaptability is good, and the design flexibility is high.
Reference is made to fig. 1. The circulating water system of the present invention is provided with the internal circulating water pipe line 20, and the circulating water quality control apparatus 10 of the present invention. Wherein, the circulating water quality regulating device 10 can operate after being connected into the internal circulating water pipeline 20, and one or more circulating water quality regulating devices 10 can be connected into the internal circulating water pipeline 20 according to requirements so as to strengthen the regulating effect.
Refer to fig. 4. The internal circulation water line 20 is provided with an internal circulation water cooling line at a position of a component requiring cooling such as an equipment bulb group (bulb matrix) to cool the equipment bulb matrix by circulating water flowing therethrough. The internal circulation water line 20 (cooling line) is provided with a water level/water resistance monitoring unit, a conventional filter and the like, and the circulation water quality control apparatus 10 of the present invention. And the circulating water system can carry out overall regulation and control of water quality through a control module (not shown).
Initially, the circulating water flowing in the internal circulating water line 20 is conventionally filtered by a filter, and the filtered water quality is monitored and detected by a water level/water resistance monitoring unit. The circulating water meeting the water level/water resistance requirement will provide cooling of the bulb matrix through the internal circulating water cooling pipeline.
In operation, when the water level/water resistance detection result of the water level/water resistance monitoring unit shows that the water level/water resistance detection result reaches the standard (Y), the circulating water quality control apparatus 10 is used as an accessory apparatus, and normally operates in the internal circulating water pipeline 20. When the PH/flow rate detection results of the PH detection module 17 and the flow detection module 18 at the input and output ends of the circulating water quality control device 10 show that the PH/flow rate detection results reach the standard (Y), the circulating water treated by the circulating water quality control device 10 is provided to a conventional filter in the internal circulating water pipeline 20 for conventional filtration, and then is provided to the cooling of the bulb matrix in a circulating manner.
When the detection results of the PH detection module 17 and the flow detection module 18 at the input end and the output end of the circulating water quality control device 10 show out of standard (N), the control module judges, according to feedback, that the water quality control components (screen, alkaline column, reverse osmosis membrane, backflow prevention unit) of each module/unit in the circulating water quality control device 10 are timely adjusted and replaced so as to perform secondary control on precipitation and precipitation of circulating water and final PH.
When the detection result of the water level/water resistance monitoring unit shows that the water level/water resistance exceeds the standard (N), the control module determines whether the circulating water needs to be added or replaced or whether the module/unit component of the circulating water quality control device 10 needs to be added or replaced according to the water level/water resistance and the detection results of the PH detection module 17 and the flow detection module 18 at both ends of the circulating water quality control device 10. After the circulating water is added or replaced, or after the module/unit components of the circulating water quality control apparatus 10 are added or replaced, the circulating water is detected again by the water level/water resistance monitoring unit, so that the circulating control is formed. Thereby effectively ensuring the stable operation of the whole circulating water system.
In summary, the invention reduces the local precipitation and corrosion probability in the cooling pipeline at the parts needing cooling such as the bulb group and the like by leading impurities in the circulating water to form precipitation and separate out in advance, can regulate the pH value of the flowing circulating water, finally reduces the generation of acidic and alkaline environment precipitates in the internal circulating water, and improves the quality of the internal circulating water, thereby prolonging the service life of the cooled parts. Meanwhile, through the modularized design, the device is convenient for flexible replacement and combination of the device components, has good adaptability and high design flexibility, and prolongs the service life of the device.
While embodiments of the present invention have been described in detail hereinabove, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. It is to be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the following claims. Moreover, the invention described herein is capable of other embodiments and of being practiced or of being carried out in various ways.
Claims (10)
1. The circulating water quality regulating and controlling device is characterized by comprising a sedimentation module and a neutralization module which are sequentially connected into an internal circulating water pipeline, and a multi-stage filtering module which is respectively arranged at the input end of the sedimentation module and the input end of the neutralization module;
an alkaline treatment unit is arranged in the precipitation module and is used for generating precipitation and precipitation of circulating water;
the neutralization module is internally provided with a neutralization alkaline unit which is used for neutralizing and weakening the alkaline water quality of the circulating water treated by the alkaline treatment unit;
the filtering module is internally provided with a filtering unit which is used for filtering sediment in the circulating water step by step in a multi-stage filtering mode.
2. The circulating water quality control apparatus of claim 1, further comprising: the anti-backflow module is arranged between the output end of the sedimentation module and the input end of the neutralization module, and is internally provided with an anti-backflow unit for preventing circulating water in the neutralization module from flowing back into the sedimentation module, and the filtering module is also arranged on the input end of the anti-backflow module.
3. The circulating water quality control device according to claim 2, wherein the alkaline treatment unit is provided with a first porous alkaline column, the neutralization alkaline unit is provided with a second porous alkaline column, and the alkaline PH value of the second porous alkaline column is smaller than that of the first porous alkaline column; and/or the filtering unit is provided with a screen; and/or the backflow prevention unit is provided with a circulating water flow channel and a one-way baffle plate arranged in the circulating water flow channel, and the one-way baffle plate is arranged to seal the circulating water flow channel in one direction under the action of gravity of backflow circulating water.
4. The apparatus according to claim 2, wherein the neutralization module and the precipitation module are further provided with reverse osmosis units, and the reverse osmosis units are respectively located at one side of the neutralization alkaline unit near the input end of the neutralization module and one side of the alkaline treatment unit near the input end of the precipitation module.
5. The apparatus for controlling circulating water quality as claimed in claim 4, wherein the reverse osmosis unit comprises a reverse osmosis membrane.
6. The circulating water quality control apparatus of claim 1, further comprising: the PH detection module is provided with a PH detection unit for detecting and feeding back the PH value of circulating water flowing through, and the flow detection module is provided with a flow detection unit for detecting and feeding back the flow velocity of the circulating water flowing through.
7. The apparatus according to claim 6, wherein the PH detecting unit includes a PH meter; and/or the flow detection unit comprises a flow meter.
8. The circulating water quality control device according to claim 2, wherein the sedimentation module, the backflow prevention module and the neutralization module are respectively arranged in bearing pipes, the bearing pipes of the sedimentation module and the neutralization module are sequentially connected in a sealing manner by threads, the bearing pipes of the sedimentation module and the neutralization module are also respectively connected with an internal circulating water pipeline in a sealing manner by threads, and the filtration module is respectively arranged at a threaded interface between two adjacent bearing pipes and a threaded interface between the bearing pipes of the sedimentation module and the internal circulating water pipeline.
9. A circulating water system provided with an internal circulating water pipeline, characterized in that it is further provided with a circulating water quality control apparatus according to any one of claims 1 to 8, one or more of the circulating water quality control apparatuses being connected to the internal circulating water pipeline.
10. The circulating water system of claim 9, wherein the control module judges whether to replace each module in the circulating water quality control device according to feedback of the PH detection module and the flow detection module respectively arranged on the internal circulating water pipeline at the input end and the output end of the circulating water quality control device so as to perform secondary control on precipitation and final PH value of circulating water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311678436.1A CN117430289A (en) | 2023-12-07 | 2023-12-07 | A circulating water quality control device and circulating water system |
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