CN117425816A - Optical analysis device - Google Patents
Optical analysis device Download PDFInfo
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- CN117425816A CN117425816A CN202280039991.7A CN202280039991A CN117425816A CN 117425816 A CN117425816 A CN 117425816A CN 202280039991 A CN202280039991 A CN 202280039991A CN 117425816 A CN117425816 A CN 117425816A
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- Prior art keywords
- light
- optical fiber
- pipe
- adapter
- optical
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- 230000003287 optical effect Effects 0.000 title claims abstract description 57
- 238000004458 analytical method Methods 0.000 title claims abstract description 32
- 239000013307 optical fiber Substances 0.000 claims abstract description 47
- 238000005259 measurement Methods 0.000 claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 7
- 239000012530 fluid Substances 0.000 description 6
- 239000004809 Teflon Substances 0.000 description 5
- 229920006362 Teflon® Polymers 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000004813 Perfluoroalkoxy alkane Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Abstract
The optical analysis device of the present invention is provided with a measurement unit (1), wherein the measurement unit (1) irradiates a conduit (10) through which a measurement object flows with light source light, and guides the light transmitted through the conduit (10) to an optical fiber. The measuring unit (1) is composed of an adapter (11) and a bracket (14), wherein the adapter (11) is provided with a holding hole with a diameter corresponding to the diameter of the pipeline (10), the pipeline (10) inserted into the holding hole is held, and the bracket (14) can be used for fixing 1 in a replaceable manner in a plurality of adapters (11) respectively corresponding to pipelines (10) with different diameters. The adapter (11) has the following functions: the light source light from the optical fiber on the irradiation side irradiates the pipe (10) inserted into the holding hole, and the light transmitted through the pipe (10) is converged and guided to the optical fiber on the detection side.
Description
Technical Field
The present invention relates to an optical analysis device for analyzing a measurement object using light.
Background
In the semiconductor cleaning process, there is an apparatus for controlling the concentration of a fluid such as a chemical liquid for cleaning a wafer by a near infrared absorption method. As a method of measuring a fluid, there are a method of measuring from outside a pipe and a method of measuring a fluid by forming a part of a pipe (refer to patent document 1 and patent document 2).
Fig. 9 is a diagram showing a configuration of a process line disclosed in patent document 1. A wet cleaning station for use in the cleaning process of semiconductors is shown in fig. 9. The wet cleaning station is provided with a recirculation pipe consisting of a tank 101, a filter 102 and a pump 103 connected together in a closed circuit via a teflon (registered trademark) tube 100. Tank 101 can hold various fluids such as a cleaning solution, a drain solution, or an etching solution.
The light transmission device 104 irradiates the teflon tube 100 with a light beam such as an infrared light beam or a near infrared light beam emitted from the end of the optical cable 105, and guides the light transmitted through the teflon tube 100 to a light receiving sensor (not shown) via the optical cable 106. Thus, for example, spectrometry for measuring chemical composition, characteristics, and the like of the fluid circulating in the teflon tube 100 can be realized.
Fig. 10 is a diagram showing a configuration of an analysis device for a semiconductor manufacturing system disclosed in patent document 2. An analysis device for a semiconductor manufacturing system is provided with a quartz glass sample cell 200 for storing a sample, a device body 201, and optical fibers 202 and 203 for connecting the sample cell 200 and the device body 201. For example, the sample cell 200 is disposed on the pipe portion 204 through which various cleaning liquids and the like for cleaning the semiconductor wafer W flow, and thus concentration control of the cleaning liquids and the like can be performed in the pipeline.
Light source light emitted from a light source 205 of the apparatus main body 201 is irradiated to the sample cell 200 via the optical fiber 202 and the lens 208. The photodetector 206 receives the transmitted light after passing through the sample cell 200 via the lens 209 and the optical fiber 203. The spectroscopic analysis unit 207 determines whether or not the inner wall of the sample cell 200 is stained, based on the light received by the photodetector 206.
The conventional structure has a problem that it is difficult to realize an optimal optical system according to the diameter of a pipe on which a measuring unit (the light transmitting device 104 in the example of fig. 9, and the lenses 208 and 209 in the example of fig. 10) is mounted. Specifically, the curved surface of the tunnel 300 acts like a lens for the light source light 301 entering the tunnel 300, and when the diameter of the tunnel 300 is large as in the example of fig. 11A or the diameter of the tunnel 300 is small as in the example of fig. 11B, the intensity of the light entering the light receiving portion 302 (the incident end of the optical cable 106 in the example of fig. 9 and the incident end of the optical fiber 203 in the example of fig. 10) behind the tunnel changes.
When the intensity of the light incident on the light receiving portion 302 changes, the accuracy of measuring the concentration of the fluid flowing in the pipe 300 is adversely affected. To correct this problem, the optical system of the measurement section needs to be optimized according to the pipe 300.
Prior art literature
Patent literature
Patent document 1: japanese patent No. 4414223
Patent document 2: japanese patent laid-open No. 2008-164487
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an optical analysis device capable of optimizing the amount of light at a light receiving portion that receives light after passing through a pipe, regardless of the diameter of the pipe.
Technical means for solving the problems
The optical analysis device of the present invention is characterized by comprising: a measurement unit configured to irradiate light from the 1 st optical fiber to a pipe through which a measurement object flows, and to guide the light after passing through the pipe to the 2 nd optical fiber; a light source unit configured to emit the light source light to the measurement unit via the 1 st optical fiber; a light detection unit configured to receive light transmitted through the duct via the 2 nd optical fiber; and the 1 st optical fiber and the 2 nd optical fiber, the measuring section being constituted by an adapter formed with a grip hole having a diameter corresponding to a diameter of the pipe, configured to grip the pipe inserted into the grip hole, and a bracket configured to replaceably fix 1 of the plurality of adapters respectively corresponding to the pipes having different diameters, the adapter having the functions of: light from the 1 st optical fiber is irradiated to the pipe inserted into the grip hole, and light after passing through the pipe is converged and guided to the 2 nd optical fiber.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, various adapters corresponding to pipes having different diameters, respectively, are prepared, and the adapters are provided with a function of irradiating light from the 1 st optical fiber to the pipe and guiding light after passing through the pipe to the 2 nd optical fiber, whereby the influence of the difference in diameter of the pipe can be reduced, and the light intensity at the light receiving portion (the incident end of the 2 nd optical fiber) of the light after passing through the pipe can be optimized regardless of the diameter of the pipe.
Drawings
Fig. 1A and 1B are sectional views of an adapter of the present invention.
Fig. 2 is a diagram showing the configuration of an optical analysis device according to an embodiment of the present invention.
Fig. 3A is a perspective view of an adapter according to an embodiment of the present invention.
Fig. 3B is a cross-sectional view of an adapter according to an embodiment of the present invention.
Fig. 4 is a perspective view showing a state of holding a pipe by means of an adaptor according to an embodiment of the present invention.
Fig. 5A and 5B are cross-sectional views of an adapter and a pipe according to an embodiment of the present invention.
Fig. 6A and 6B are sectional views illustrating a method of mounting an adapter on a bracket according to an embodiment of the present invention.
Fig. 7A and 7B are cross-sectional views showing another example of the adapter according to the embodiment of the present invention.
Fig. 8 is a block diagram showing an exemplary configuration of a computer for realizing an optical analysis device according to an embodiment of the present invention.
Fig. 9 is a diagram showing a configuration of a conventional process line.
Fig. 10 is a diagram showing a configuration of an analysis device for a conventional semiconductor manufacturing system.
Fig. 11A and 11B are diagrams illustrating a change in light intensity of the light receiving portion due to a change in pipe diameter.
Detailed Description
[ principle of the invention ]
In the present invention, by attaching an optical element typified by a lens to an adapter attachable to a measuring portion, an adapter corresponding to a pipe having a different diameter can be realized. Fig. 1A is a sectional view of the adaptor 11A in the case where the diameter of the pipe 10 is large, and fig. 1B is a sectional view of the adaptor 11B in the case where the diameter of the pipe 10 is small. Reference numeral 40 denotes light source light incident on the pipe 10, and 41 denotes a light receiving portion of the measuring section.
By selecting the curvatures of the lenses 12a, 12b, 13a, 13b attached to the adapters 11a, 11b, the intensity of light incident on the light receiving section 41 can be made the same regardless of the pipe diameters. In the present invention, since the external dimensions of the adapters 11a and 11b are the same, it is not necessary to change the dimensions of the measuring portions to which the adapters 11a and 11b are attached. In addition, there is no need to change the optical system such as a lens and a mirror of the measuring section. The adapter itself may have a function as a light-transmitting element as described later.
Embodiments of the present invention will be described below with reference to the accompanying drawings. Fig. 2 is a diagram showing the configuration of an optical analysis device according to an embodiment of the present invention. The optical analysis device is composed of a measuring section 1, a main body section 2, and an optical cable 3 connecting the measuring section 1 and the main body section 2.
The measuring unit 1 includes, for example, an adapter 11 for holding a tube 10 made of a light-transmitting material such as teflon or PFA (perfluoroalkoxyalkane) through which a measurement object such as a liquid flows, a holder 14 for interchangeably fixing 1 of the plurality of adapters 11 each corresponding to the tube 10 having a different diameter, an irradiation-side optical system 15 such as a mirror or the like provided in a passage 141 of the holder 14 for guiding light from a light source of the optical cable 3 to a lens 12 on an incident side of the adapter 11, a connector 17 such as a mirror provided in a passage 142 of the holder 14 for guiding light emitted from the lens 13 on an emission side of the adapter 11 to the optical cable 3, and a connector 18 for fixing one optical fiber of the optical cable 3 to the holder 14 and the other optical fiber 18 for fixing the other optical fiber of the optical cable 3 to the holder 14.
The main body 2 includes a light source 20, a light detection unit 21, and an analysis unit 22, the light source 20 being, for example, a halogen lamp or a semiconductor laser, which emits light source light, the light detection unit 21 receiving the light transmitted through the pipe 10 in the measurement unit 1 via the optical cable 3, and the analysis unit 22 analyzing the measurement object based on the light received by the light detection unit 21.
In the present embodiment, a two-core optical cable is used as the optical cable 3. The light source light emitted from the light source unit 20 is guided to the measurement unit 1 via an optical fiber (1 st optical fiber) of the optical cable 3, and is irradiated to the duct 10. The light transmitted through the duct 10 is guided to the main body 2 via the other optical fiber (the 2 nd optical fiber) of the optical cable 3, and is incident on the light detection unit 21. In addition, although the dual-core optical cable is used in the present embodiment, it is needless to say that the optical cable on the irradiation side and the optical cable on the detection side may be separately provided.
The analysis unit 22 analyzes the measurement object based on the light received by the light detection unit 21. As an example of the analysis, there is calculation of the concentration of a component contained in a measurement object. A method for calculating the concentration of a component is disclosed in, for example, japanese patent application laid-open No. 2014-106160. The analysis performed by the analysis unit 22 is not limited to calculation of the component concentration.
The analysis unit 22 may determine whether or not the pipe 10 is abnormal such as dirt, and may not perform analysis of the measurement object itself. A determination method is disclosed in patent document 2, for example.
Next, the structure of the measuring unit 1 of the present embodiment will be described in more detail. Fig. 3A is a perspective view of the adaptor 11, and fig. 3B is a sectional view of the adaptor 11. For example, a grip hole 111 into which the pipe 10 is inserted is formed in the longitudinal direction in the resin adaptor 11. Further, in order to elastically expand and contract the diameter of the grip hole 111, a notch 112 extending from one side surface of the adapter 11 to the grip hole 111 is formed in the adapter 11.
Further, window holes 113 and 114 are formed in the adapter 11 so as to be orthogonal to the grip hole 111, and the window holes 113 and 114 reach the grip hole 111 from a side perpendicular to the side where the notch 112 is formed. Lenses 12 and 13 (optical elements) are fitted and fixed to the windows 113 and 114.
The characteristics (e.g. focal length) of the lenses 12, 13 are designed for each tube 10 (each adapter 11) in the following manner: when the measuring section 1 is assembled, the intensity of light incident on the light receiving section 41 (the incident end of the 2 nd optical fiber) of the measuring section 1 is fixed irrespective of the diameter of the pipe 10.
In fig. 4, a state in which the pipe 10 is held by the adaptor 11 is shown. The diameter of the grip hole 111 of the adaptor 11 is set to be slightly smaller than the diameter of the corresponding pipe 10 in a state where the pipe 10 is not inserted. As described above, the adapter 11 is formed with the notch 112 for elastically expanding and contracting the diameter of the grip hole 111. Thus, when the pipe 10 is inserted into the grip hole 111, the fitting 11 grips the pipe 10 in a secure manner.
In the adaptor 11, the diameter of the grip hole 111 varies according to the diameter of the corresponding pipe 10, but the external dimensions are the same. For example, as shown in fig. 5A and 5B, in the adaptor 11a corresponding to the pipe 10a and the adaptor 11B corresponding to the pipe 10B, the diameters D1 and D2 of the grip holes 111a and 111B are different, but the external dimensions A1 and A2 are the same.
As shown in fig. 6A, a groove 140 for mounting the connector 11 is formed in the resin or metal bracket 14, for example. The depth A1 and width A2 of the groove 140 are the same as the height A1 and width A2 of the adapter 11 (11 a, 11 b). Accordingly, as shown in fig. 6B, the adaptor 11 in a state of holding the pipe 10 can be fitted into the groove 140 of the bracket 14, and thus, various kinds of adaptors 11 corresponding to pipes 10 having different diameters can be replaceably attached to the same bracket 14.
Further, passages 141, 142 communicating with the groove 140 are formed in the bracket 14. An irradiation side optical system 15 such as a mirror of the lens 12 guiding the light source light to the incidence side of the adapter 11 is provided in the passage 141. The inside of the passage 142 is provided with a detection-side optical system 16 such as a mirror that guides light emitted from the lens 13 on the emission side of the adapter 11 to the optical cable 3.
Further, a connector 17 for fixing the exit end of the 1 st optical fiber of the optical cable 3 to the holder 14 is attached to the end of the passage 141 on the opposite side of the groove 140. A connector 18 for fixing the incident end of the 2 nd optical fiber of the optical cable 3 to the holder 14 is installed at the end of the passage 142 on the side opposite to the groove 140. In this way, the assembly of the measuring section 1 is completed.
As shown in fig. 2, the light source light emitted from the light source unit 20 of the main body unit 2 is guided to the measuring unit 1 via the 1 st optical fiber of the optical cable 3, passes through the passage 141 of the holder 14, is reflected by the irradiation side optical system 15, and is incident on the lens 12 on the incidence side of the adapter 11. The light transmitted through the lens 12 and the duct 10 is converged by the lens 13 on the exit side of the adapter 11 and reflected by the detection side optical system 16, passes through the passage 142 of the holder 14, and is incident on the 2 nd optical fiber of the optical cable 3. The operation of the main body 2 is the same as described above.
As described above, in the present embodiment, by preparing various adapters 11 corresponding to the pipes 10 having different diameters, respectively, and changing the characteristics of the lenses 12, 13 for each pipe 10 (each adapter 11) according to the corresponding pipe 10, the influence of the difference in diameter of the pipe 10 can be reduced, and the optimum light receiving amount can be obtained at all times regardless of the diameter of the pipe 10. In the present embodiment, by changing the characteristics of the lenses 12 and 13 for each pipe 10 (each adapter 11) according to the corresponding pipe 10, it is no longer necessary to change the optical systems 15 and 16 such as lenses and mirrors on the side of the holder 14 according to the pipe 10.
In the present embodiment, the light source unit 20, the light detection unit 21, and the analysis unit 22 are provided in the main body unit 2, but the light source unit 20, the light detection unit 21, and the analysis unit 22 may be separately provided.
In the present embodiment, the lenses 12 and 13 are mounted on the adapter 11, but the adapter itself may be provided with a function as a light-transmitting element. Examples of the adapter in this case are shown in fig. 7A and 7B. Fig. 7A is a sectional view of the adaptor 11a in the case where the diameter of the pipe 10 is large, and fig. 7B is a sectional view of the adaptor 11B in the case where the diameter of the pipe 10 is small. In the example of fig. 7A and 7B, the adapters 11a and 11B are made of a light-transmitting material. 120a, 120b, 130a, 130b are portions that function as lenses. The method of mounting the adapter 11 (11 a, 11 b) on the bracket 14 is identical to that described above.
The optical characteristics of the adapter 11 are designed for each pipe 10 (each adapter 11) in the following manner: the intensity of light incident on the light receiving portion 41 (the incident end of the 2 nd optical fiber) of the measuring portion 1 is fixed irrespective of the diameter of the pipe 10. By providing the adapter 11 with the function as a light-transmitting element in this way, the same effect as in the case of attaching the lenses 12, 13 to the adapter 11 can be obtained.
The analysis unit 22 of the present embodiment can be realized by a computer including CPU (Central Processing Unit), a storage device, and an interface to the outside, and a program for controlling these hardware resources. The configuration of this computer is illustrated in fig. 8. The computer includes a CPU 400, a storage device 401, and an interface device (I/F) 402. The light source section 20, the light detection section 21, and the like are connected to the I/F402. The CPU 400 executes the processing described in the present embodiment in accordance with the program stored in the storage device 401.
Industrial applicability
The invention can be applied to an optical analysis device.
Symbol description
1 … measuring section, 2 … main body section, 3 … optical cable, 10 … tube, 11a, 11b … adapter, 12a, 12b, 13a, 13b … lens, 14 … mount, 15 … irradiation side optical system, 16 … detection side optical system, 17, 18 … connector, 20 … light source section, 21 … light detection section, 22 … analysis section, 111a, 111b … holding hole, 112 … notch, 113, 114 … aperture, 140 … slot, 141, 142 … channel.
Claims (6)
1. An optical analysis device, comprising:
a measurement unit configured to irradiate light from the 1 st optical fiber to a pipe through which a measurement object flows, and to guide the light after passing through the pipe to the 2 nd optical fiber;
a light source unit configured to emit the light source light to the measurement unit via the 1 st optical fiber;
a light detection unit configured to receive light transmitted through the duct via the 2 nd optical fiber; and
the 1 st optical fiber and the 2 nd optical fiber,
the measuring part is composed of an adapter and a bracket,
the adapter is formed with a grip hole having a diameter corresponding to the diameter of the pipe, is configured to grip the pipe inserted into the grip hole,
the bracket is configured to be capable of replaceably fixing 1 of the plurality of adapters respectively corresponding to the pipes of different diameters,
the adapter has the following functions: light from the 1 st optical fiber is irradiated to the pipe inserted in the grip hole, and the light after passing through the pipe is converged and guided to the 2 nd optical fiber.
2. The optical analysis device according to claim 1, wherein,
the adapter has an optical element configured to irradiate light from the 1 st optical fiber to the pipe inserted into the grip hole and to condense light after passing through the pipe to guide the light to the 2 nd optical fiber,
the characteristics of the optical element are set such that the intensity of light incident to the 2 nd optical fiber is fixed irrespective of the diameter of the pipe.
3. The optical analysis device according to claim 1, wherein,
the adapter functions as a light-transmitting element that irradiates light from the 1 st optical fiber to the duct inserted into the grip hole, and condenses and guides the light after passing through the duct to the 2 nd optical fiber,
the optical characteristics of the adapter are set such that the intensity of light incident to the 2 nd optical fiber is fixed irrespective of the diameter of the pipe.
4. The optical analysis device according to any one of claim 1 to 3, wherein,
the external dimensions of the plurality of adapters respectively corresponding to the pipes of different diameters are the same,
the bracket is provided with a groove configured to be fitted with 1 of the plurality of adapters to fix the adapters.
5. The optical analysis device according to any one of claims 1 to 4, wherein,
the holder is provided with an optical system configured to irradiate light source light from the 1 st optical fiber to the duct through the adapter, and to guide light condensed by the adapter through the duct to the 2 nd optical fiber.
6. The optical analysis device according to any one of claims 1 to 5, wherein,
the analyzer is further provided with an analyzer configured to analyze the measurement object based on the light received by the light detector.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021093412A JP2022185655A (en) | 2021-06-03 | 2021-06-03 | Optical analyzing device |
| JP2021-093412 | 2021-06-03 | ||
| PCT/JP2022/009639 WO2022254852A1 (en) | 2021-06-03 | 2022-03-07 | Optical analysis device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117425816A true CN117425816A (en) | 2024-01-19 |
Family
ID=84324209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280039991.7A Pending CN117425816A (en) | 2021-06-03 | 2022-03-07 | Optical analysis device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2022185655A (en) |
| CN (1) | CN117425816A (en) |
| WO (1) | WO2022254852A1 (en) |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2972906B2 (en) * | 1996-03-08 | 1999-11-08 | 水道機工株式会社 | Optical house |
| EP1010975A1 (en) * | 1998-12-14 | 2000-06-21 | SCITEX DIGITAL PRINTING, Inc. | Liquid concentration optical sensor |
| US9279746B2 (en) * | 2012-02-16 | 2016-03-08 | Endress+ Hauser Conducta Inc. | Inline optical sensor with modular flowcell |
| JP6249886B2 (en) * | 2014-06-11 | 2017-12-20 | 株式会社堀場製作所 | Optical measuring cell and optical analyzer |
| BR112017006363B1 (en) * | 2014-09-29 | 2021-06-29 | Bd Kiestra B.V. | APPARATUS FOR OPTICAL INSPECTION OF SMALL VOLUMES OF LIQUID SAMPLES AND BOWLS FOR THE SAME |
| JP7060409B2 (en) * | 2018-03-05 | 2022-04-26 | 株式会社 堀場アドバンスドテクノ | Manufacturing method of optical measuring cell, optical analyzer, and optical measuring cell |
| JP7229084B2 (en) * | 2019-04-19 | 2023-02-27 | 株式会社 堀場アドバンスドテクノ | optical analyzer |
-
2021
- 2021-06-03 JP JP2021093412A patent/JP2022185655A/en active Pending
-
2022
- 2022-03-07 WO PCT/JP2022/009639 patent/WO2022254852A1/en active Application Filing
- 2022-03-07 CN CN202280039991.7A patent/CN117425816A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022254852A1 (en) | 2022-12-08 |
| JP2022185655A (en) | 2022-12-15 |
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