CN117109821A - Vacuum box helium leak detection system - Google Patents
Vacuum box helium leak detection system Download PDFInfo
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- CN117109821A CN117109821A CN202311027143.7A CN202311027143A CN117109821A CN 117109821 A CN117109821 A CN 117109821A CN 202311027143 A CN202311027143 A CN 202311027143A CN 117109821 A CN117109821 A CN 117109821A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
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- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a vacuum box helium leak detection system, which belongs to the technical field of helium leak detection, and comprises: the vacuum box, the inner chamber of vacuum box is equipped with the box pump of evacuating that detects the work piece for make the vacuum box be in the vacuum state, the box pump of evacuating is established on the vacuum box, is used for making the work piece pump of evacuating that detects the work piece be in the vacuum state, the work piece pump of evacuating is established on the vacuum box, is used for retrieving the recovery system of helium, recovery system establishes on the vacuum box, is used for detecting the leak detector of helium, the leak detector is established on the vacuum box, the vacuum box includes: the bottom plate, box fixed mounting is on the top of bottom plate, and the recovery system that is used for retrieving helium through setting up of this invention, and then can solve present vacuum box helium leak hunting work and have a small amount of helium outflow's problem in going on the in-process, and then can avoid extravagant to a certain extent, reduce cost's input.
Description
Technical Field
The invention relates to the technical field of helium leakage detection, in particular to a vacuum box helium leakage detection system.
Background
Helium leak detection is carried out on a vacuum box, helium is used as a tracer gas according to the basic leak detection principle of helium leak detection, a workpiece is filled in the vacuum box, and then the leakage condition of the workpiece can be judged rapidly and accurately with high precision through a helium leak detector. However, a small amount of helium flows out in the process of carrying out the helium leak detection work of the vacuum box, the cost of the helium is relatively expensive, if the outflow of the helium is extremely easy to cause waste, and large-size workpieces are easy to displace in the process of being put into the vacuum box, so that the normal detection is influenced, and even the workpieces are possibly damaged. Therefore, the vacuum box helium leak detection system is invented.
Disclosure of Invention
The present invention has been developed in view of the above-described and/or other problems associated with existing vacuum box helium leak detection systems.
It is therefore an object of the present invention to provide a vacuum box helium leak detection system that solves the above-identified problems.
In order to solve the technical problems, according to one aspect of the present invention, the following technical solutions are provided:
a vacuum box helium leak detection system, comprising:
the inner cavity of the vacuum box is provided with a detection workpiece;
a box pump for making the vacuum box in a vacuum state, the box pump being provided on the vacuum box;
a workpiece pump for evacuating the inspection workpiece in a vacuum state, the workpiece pump being provided on the vacuum box;
the recovery system is used for recovering helium and is arranged on the vacuum box;
a leak detector for detecting helium gas, said leak detector being disposed on a vacuum box.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the vacuum box includes:
a bottom plate;
the box, box fixed mounting is on the top of bottom plate.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the vacuum box further comprises:
the box door assembly is used for sealing the box body and is arranged on the bottom plate;
the fixing component is used for fixing the detection workpiece;
the movable assembly is used for driving the detection workpiece to move, is arranged on the box body, and is provided with a fixing assembly.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the door assembly includes:
the two ends of the top of the bottom plate are fixedly provided with side plates, and a box body is arranged between the two groups of side plates;
the backup pad, backup pad fixed mounting is on the top between two sets of curb plates.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the door assembly further includes:
the first air cylinder is fixedly arranged on the supporting plate;
the baffle, the output of first cylinder passes through piston rod fixed mounting baffle, and the baffle can shelter from the opening of box.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the moving assembly includes:
the two ends of the box body are fixedly provided with the second air cylinders;
the output end of each group of second air cylinders is fixedly provided with a moving plate through a piston rod;
the servo motor is fixedly arranged in the movable plate;
the bearing plate is fixedly installed on the output shaft of the servo motor, and the top of the bearing plate is detachably connected with the detection workpiece through the fixing assembly.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the fixing assembly includes:
the top of the bearing plate is provided with four groups of fixing plates which are fixedly arranged in an annular arrangement;
the second air cylinders are fixedly arranged on each group of the fixing plates;
the stripper plate, the output of second cylinder passes through piston rod fixed mounting stripper plate, and is equipped with the detection work piece between four groups of stripper plates.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the recovery system includes:
the evacuating pump is arranged on the vacuum box and is communicated with the detection workpiece;
the recovery pump is arranged on the vacuum box and is communicated with the detection workpiece;
the high-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece;
the low-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the recovery system further comprises:
the compressor is arranged between the high-pressure tank and the low-pressure tank and is arranged on the vacuum box;
and a helium concentration analyzer is arranged between the detection workpiece and the high-pressure tank, and the helium concentration analyzer is arranged on the vacuum box.
As a preferable scheme of the vacuum box helium leak detection system, the invention comprises the following steps: the method for detecting the helium leakage of the vacuum box comprises the following specific steps:
step one: opening a vacuum box, and placing a workpiece to be detected in the vacuum box;
step two: closing the vacuum box;
step three: vacuumizing the vacuum box to 30kPa;
step four: vacuumizing the detection workpiece to 75kPa;
step five: vacuumizing the vacuum box to 30Pa;
step six: vacuumizing the detection workpiece to 2kPa;
step seven: filling helium into the detection workpiece until the helium is 10kPa, at the moment, carrying out low-pressure leak detection, and after the low-pressure test is finished, increasing the helium detection pressure to 75kPa, at the moment, carrying out high-pressure leak detection test;
step eight: recovering helium in the detection workpiece until the vacuum degree is 2kPa;
step nine: filling the atmosphere into the detection workpiece to 75kPa;
step ten: filling the vacuum box with air to 75kPa;
step eleven: simultaneously breaking the empty parts of the detection workpiece and the vacuum box, and filling the air to 101kPa;
step twelve: opening a vacuum box;
step thirteen: and taking and detecting the workpiece.
Compared with the prior art:
1. by arranging the recovery system for recovering helium, the problem that a small amount of helium flows out in the process of carrying out the current vacuum box helium leakage detection work can be solved, so that waste can be avoided to a certain extent, and the investment of cost is reduced;
2. the fixing assembly is used for fixing the detection workpiece, so that the detection workpiece can be extruded and fixed from four directions, and the detection workpiece can be extruded and fixed from four directions, so that the detection workpiece with various sizes can be fixed;
3. through setting up the removal subassembly, have the effect that can drive the detection work piece and remove, remove through driving the detection work piece, and then can stretch out the vacuum box with fixed subassembly to can dismantle the detection work piece;
4. through setting up the chamber door subassembly, not only can be convenient for close or open the effect that carries out control to the vacuum chamber, still have easy operation reliable effect.
Drawings
FIG. 1 is a schematic flow chart of the present invention;
FIG. 2 is a schematic flow diagram of a recovery system of the present invention;
FIG. 3 is a schematic front view of a vacuum box of the present invention;
FIG. 4 is an enlarged schematic view of the structure A in FIG. 3 according to the present invention;
FIG. 5 is a schematic top view of a vacuum box of the present invention;
FIG. 6 is a schematic view of a partial structure of a door assembly according to the present invention;
FIG. 7 is a schematic top view of a fastening assembly according to the present invention;
fig. 8 is a schematic flow chart of the working principle of the invention.
In the figure: the base plate 10, the case 20, the side plate 31, the support plate 32, the first cylinder 33, the baffle 34, the second cylinder 41, the carrier plate 42, the moving plate 43, the servo motor 44, the fixing plate 51, the second cylinder 52, the pressing plate 53.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
The present invention provides a vacuum box helium leak detection system, referring to FIGS. 1-8, comprising: the device comprises a vacuum box, a box evacuating pump for enabling the vacuum box to be in a vacuum state, a workpiece evacuating pump for enabling a detection workpiece to be in a vacuum state, a recovery system for recovering helium gas, and a leak detector for detecting the helium gas;
the inner chamber of vacuum box is equipped with detects the work piece, and the box pump of evacuating is established on the vacuum box, and the work piece pump of evacuating is established on the vacuum box, and recovery system establishes on the vacuum box, and the leak detector is established on the vacuum box, and wherein, leak detector part mainly comprises helium mass spectrum leak detector, control valve and calibration part etc. helium mass spectrum leak detector adopts Anhui appearance helium mass spectrum leak detector, advanced technology, stable performance, installation maintenance is convenient.
As shown in fig. 1:
evacuating and pressure maintaining to check leakage:
when leak detection is performed, firstly placing a workpiece into a vacuum box, closing the vacuum box after connection is completed, opening V3 at the moment, closing other valves, pre-vacuumizing the vacuum box, carrying out pressure maintaining on the workpiece for a plurality of seconds after the vacuum box is evacuated to a certain value, keeping pressure if the workpiece does not have a large leak, continuously evacuating the vacuum box and the workpiece to a set value, and if the workpiece cannot keep pressure within a set time, indicating that the workpiece has the large leak, wherein the system can automatically give an audible and visual alarm, the system needs to be stopped, and then opening the vacuum box to take down the workpiece;
detecting middle leakage:
if the workpiece has no large leakage, the system automatically opens V4 to vacuumize the detected workpiece, at the moment, the vacuum box and the workpiece are vacuumized at the same time, when the pressure of the vacuum box is vacuumized to 30Pa, and when the pressure of the workpiece reaches 2000Pa, the leak detector is automatically started to measure the helium background in the current vacuum box and record the value, (the system can subtract the background value from the measured leakage rate value during leak detection to ensure that the display value is the actual leakage rate of the workpiece), then closes V4, opens V5 to charge low-pressure helium gas into the workpiece, and detects the leakage of the workpiece. The system automatically judges whether the workpiece is qualified or not and gives a prompt or audible and visual alarm;
detecting microleakage:
if the middle leakage is not found, continuously filling high-pressure helium with specified pressure into the workpiece, simulating the working environment of the workpiece to detect micro leakage, and giving an alarm if a system with unqualified workpiece is not found, otherwise giving a prompt by the system;
helium recovery:
after the micro leakage detection is finished, the micro leakage detection automatically enters a recovery system, after the recovery is finished, the system closes V1, V3, V4 and V5, pauses the leak detector, opens V6 and V7, deflates the vacuum box and the workpiece, takes the workpiece off, and finishes the leak detection.
The vacuum box includes: the device comprises a bottom plate 10, a box body 20, a box door assembly for sealing the box body 20, a fixing assembly for fixing a detection workpiece and a moving assembly for driving the detection workpiece to move;
the box 20 is fixedly installed on the top of the bottom plate 10, the box door assembly is arranged on the bottom plate 10, the moving assembly is arranged on the box 20, and the moving assembly is provided with a fixing assembly.
The chamber door assembly includes: a side plate 31, a support plate 32, a first cylinder 33, and a baffle 34;
the two ends of the top of the bottom plate 10 are fixedly provided with side plates 31, a box body 20 is arranged between the two groups of side plates 31, a supporting plate 32 is fixedly arranged on the top end between the two groups of side plates 31, a first air cylinder 33 is fixedly arranged on the supporting plate 32, the output end of the first air cylinder 33 is fixedly provided with a baffle 34 through a piston rod, and the baffle 34 can cover the opening of the box body 20;
working principle: the baffle 34 is driven to lift by the first air cylinder 33, when the baffle 34 is positioned at the opening of the box body 20, the box body 20 is in a closed state, and when the box body 20 is positioned above the box body 20, the box body 20 is in an open state.
The moving assembly includes: a second cylinder 41, a moving plate 43, a servo motor 44, and a carrier plate 42;
the two ends of the box body 20 are fixedly provided with the second air cylinders 41, the output end of each group of the second air cylinders 41 is fixedly provided with the movable plate 43 through a piston rod, the servo motor 44 is fixedly arranged in the movable plate 43, the output shaft of the servo motor 44 is fixedly provided with the bearing plate 42, the top of the bearing plate 42 is detachably connected with the detection workpiece through a fixing component, an audible and visual alarm, a vacuum measuring device and the like can be arranged on the box body 20 according to requirements, and the vacuum measuring device adopts Pirani vacuum measurement;
working principle: the moving plate 43 is moved by the second air cylinder 41, and when the moving plate 43 moves, the carrying plate 42 is driven to move, wherein the carrying plate 42 can be rotated by the servo motor 44.
The fixed subassembly includes: a fixing plate 51, a second cylinder 52, and a pressing plate 53;
four groups of fixing plates 51 are fixedly arranged on the top of the bearing plate 42 in an annular arrangement, a second air cylinder 52 is fixedly arranged on each group of fixing plates 51, an extrusion plate 53 is fixedly arranged at the output end of the second air cylinder 52 through a piston rod, and detection workpieces are arranged among the four groups of extrusion plates 53;
working principle: after the detection workpiece is placed on the carrier plate 42 by an external manipulator or other tool, the pressing plate 53 is moved toward the detection workpiece by the second cylinder 52 until the pressing plate 53 presses the detection workpiece, so that the detection workpiece can be pressed and fixed from four directions.
The recovery system includes: an evacuating pump, a recovery pump, a high-pressure tank, a low-pressure tank, a compressor and a helium concentration analyzer;
the vacuum pump is arranged on the vacuum box and is communicated with the detection workpiece, the recovery pump is arranged on the vacuum box and is communicated with the detection workpiece, the high-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece, the low-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece, a compressor is arranged between the high-pressure tank and the low-pressure tank and is arranged on the vacuum box, a helium concentration analyzer is arranged between the detection workpiece and the high-pressure tank, and the helium concentration analyzer is arranged on the vacuum box;
the recovery system has the functions of helium pressure and concentration monitoring and helium automatic supplementing, and when the system detects that the concentration or the pressure of helium is lower than a set value, a valve is automatically opened to supplement high-purity helium;
after the detected workpiece is evacuated by V7, V7 is closed, V1 is opened, helium is filled into the workpiece, after the specified pressure is reached, V1 is closed, V2 is opened, high-pressure helium in the workpiece automatically flows into a low-pressure tank after the detection is completed, then V2 is closed, V3 is opened, residual helium in the workpiece is pumped out by a mechanical pump and is sent into a recovery tank, when the pressure in the recovery tank rises to a preset value, V4 and V5 are opened, and a compressor compresses the helium in the recovery tank to the high-pressure tank, because 100 percent recovery is impossible, when the pressure or the concentration in the high-pressure tank is lower than the specified value, V6 is required to be opened to supplement pure helium so as to keep enough pressure and concentration of the helium in the high-pressure tank.
The method for detecting the helium leakage of the vacuum box comprises the following specific steps:
step one: opening a vacuum box, and placing a workpiece to be detected in the vacuum box;
step two: closing the vacuum box;
step three: vacuumizing the vacuum box to 30kPa;
step four: vacuumizing the detection workpiece to 75kPa;
step five: vacuumizing the vacuum box to 30Pa;
step six: vacuumizing the detection workpiece to 2kPa;
step seven: filling helium into a detection workpiece until the helium is 10kPa, at the moment, carrying out low-pressure leak detection, after the low-pressure test is finished, increasing the helium detection pressure to 75kPa, and at the moment, carrying out high-pressure leak detection test, wherein the helium detection of a shaft transmission and magnetic transmission workpiece can be carried out, the test is carried out under the state that the helium is required to be introduced into the shaft transmission equipment, and the test is carried out under the state that the ventilation is not required to be carried out by the magnetic transmission;
step eight: recovering helium in the detection workpiece until the vacuum degree is 2kPa;
step nine: filling the atmosphere into the detection workpiece to 75kPa;
step ten: filling the vacuum box with air to 75kPa;
step eleven: simultaneously breaking the empty parts of the detection workpiece and the vacuum box, and filling the air to 101kPa;
step twelve: opening a vacuum box;
step thirteen: and taking and detecting the workpiece.
In addition, an electric control part matched with the system can be arranged outside the system;
the electric control part is specifically as follows:
the electrical control part adopts PLC control to organically combine the leak detector, the vacuum box and the inflation recovery part, so that the control system is more coordinated and reliable, and various information such as the evacuation time, the vacuum degree of the workpiece and the vacuum box, the inflation pressure, the time, the alarm value, the leakage rate and the like are set by operation display on the touch screen; the system can respectively set different parameters according to the type of the workpiece to be detected, and the parameters are stored in the system for selection when production is required; the system can store parameters of various workpieces, and corresponding prompts are needed when the parameters are set;
after the robot puts the workpiece into the vacuum box, vacuumizing, helium filling, leakage detecting and helium recycling are automatically performed according to the program, and the work, the recognition, the control and the alarm are performed, and the display is performed by touching the display screen;
the electrical control has the following functions:
1. all parameters of the equipment can be displayed and modified on the touch screen, and meanwhile, the types of the parameters of the equipment with the password protection function are divided into: user parameters and system parameters, wherein the user enters a corresponding grade parameter setting system according to different permission passwords to perform parameter setting operation;
2. when the system alarm occurs, a sound prompt is provided, and after the alarm confirmation is pressed, the initial operation interface is returned.
3. The components (including vacuum pump, gas compressor, etc.) can be manipulated and commissioned on the touch screen.
4. The manual operation screen is provided, and the manual operation has the same procedure function as the automatic operation.
5. The PLC state monitoring picture is arranged, so that the running condition of each part of the equipment can be clearly displayed, and the real-time monitoring and control of the system running are realized;
6. the system has the function of accumulating the number of unqualified boxes after each startup and can be manually cleared.
7. Has fault diagnosis function.
8. The system has the functions of self-calibration, interlocking protection and alarm, and an emergency stop button, so that the system is ensured to run reliably and safely and the safety of a detected workpiece is ensured.
Although the invention has been described hereinabove with reference to embodiments, various modifications thereof may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, the features of the disclosed embodiments may be combined with each other in any manner as long as there is no structural conflict, and the exhaustive description of these combinations is not given in this specification merely for the sake of omitting the descriptions and saving resources. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (10)
1. Vacuum box helium leak hunting system, its characterized in that includes:
the inner cavity of the vacuum box is provided with a detection workpiece;
a box pump for making the vacuum box in a vacuum state, the box pump being provided on the vacuum box;
a workpiece pump for evacuating the inspection workpiece in a vacuum state, the workpiece pump being provided on the vacuum box;
the recovery system is used for recovering helium and is arranged on the vacuum box;
a leak detector for detecting helium gas, said leak detector being disposed on a vacuum box.
2. The vacuum box helium leak detection system of claim 1, wherein said vacuum box comprises:
a bottom plate (10);
the box body (20), box body (20) fixed mounting is on the top of bottom plate (10).
3. The vacuum box helium leak detection system of claim 2, wherein said vacuum box further comprises:
the box door assembly is used for sealing the box body (20) and is arranged on the bottom plate (10);
the fixing component is used for fixing the detection workpiece;
the movable assembly is used for driving the detection workpiece to move, is arranged on the box body (20), and is provided with a fixed assembly.
4. The vacuum box helium leak detection system of claim 3 wherein said box door assembly comprises:
the side plates (31) are fixedly arranged at the two ends of the top of the bottom plate (10), and a box body (20) is arranged between the two groups of side plates (31);
and a support plate (32), wherein the support plate (32) is fixedly arranged on the top end between the two groups of side plates (31).
5. The vacuum box helium leak detection system of claim 4, wherein said box door assembly further comprises:
a first cylinder (33), the first cylinder (33) being fixedly mounted on the support plate (32);
the baffle (34) is fixedly arranged at the output end of the first air cylinder (33) through a piston rod, and the baffle (34) can cover the opening of the box body (20).
6. The vacuum box helium leak detection system of claim 3 wherein said moving assembly comprises:
the second air cylinders (41) are fixedly arranged at the two ends of the box body (20);
the output ends of each group of second cylinders (41) are fixedly provided with the moving plates (43) through piston rods;
a servo motor (44), the servo motor (44) being fixedly mounted in the moving plate (43);
the bearing plate (42), the output shaft of servo motor (44) fixed mounting bearing plate (42), and the top of bearing plate (42) is through fixed subassembly detachable connection detection work piece.
7. The vacuum box helium leak detection system of claim 6, wherein said fixture assembly comprises:
the top of the bearing plate (42) is provided with four groups of fixing plates (51) in an annular arrangement and fixed manner;
the second air cylinders (52) are fixedly arranged on each group of the fixed plates (51);
the extrusion plate (53), the output of second cylinder (52) passes through piston rod fixed mounting extrusion plate (53), and is equipped with between four group extrusion plates (53) and detects the work piece.
8. The vacuum box helium leak detection system of claim 1, wherein said recovery system comprises:
the evacuating pump is arranged on the vacuum box and is communicated with the detection workpiece;
the recovery pump is arranged on the vacuum box and is communicated with the detection workpiece;
the high-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece;
the low-pressure tank is arranged on the vacuum box and is communicated with the detection workpiece.
9. The vacuum box helium leak detection system of claim 8, wherein said recovery system further comprises:
the compressor is arranged between the high-pressure tank and the low-pressure tank and is arranged on the vacuum box;
and a helium concentration analyzer is arranged between the detection workpiece and the high-pressure tank, and the helium concentration analyzer is arranged on the vacuum box.
10. The vacuum box helium leak detection system of claim 1, further comprising a vacuum box helium leak detection method comprising the steps of:
step one: opening a vacuum box, and placing a workpiece to be detected in the vacuum box;
step two: closing the vacuum box;
step three: vacuumizing the vacuum box to 30kPa;
step four: vacuumizing the detection workpiece to 75kPa;
step five: vacuumizing the vacuum box to 30Pa;
step six: vacuumizing the detection workpiece to 2kPa;
step seven: filling helium into the detection workpiece until the helium is 10kPa, at the moment, carrying out low-pressure leak detection, and after the low-pressure test is finished, increasing the helium detection pressure to 75kPa, at the moment, carrying out high-pressure leak detection test;
step eight: recovering helium in the detection workpiece until the vacuum degree is 2kPa;
step nine: filling the atmosphere into the detection workpiece to 75kPa;
step ten: filling the vacuum box with air to 75kPa;
step eleven: simultaneously breaking the empty parts of the detection workpiece and the vacuum box, and filling the air to 101kPa;
step twelve: opening a vacuum box;
step thirteen: and taking and detecting the workpiece.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311027143.7A CN117109821A (en) | 2023-08-14 | 2023-08-14 | Vacuum box helium leak detection system |
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| CN202311027143.7A CN117109821A (en) | 2023-08-14 | 2023-08-14 | Vacuum box helium leak detection system |
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| CN120721313A (en) * | 2025-08-29 | 2025-09-30 | 苏州元脑智能科技有限公司 | Leak detection equipment and liquid cooling plate leak detection method |
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Country or region after: China Address after: No. 800 Songda Road, Qingpu District, Shanghai, 201799 Applicant after: ZENNER Metering Technology (Shanghai) Ltd. Address before: 201799 building 4, 6558 Yinggang East Road, Qingpu District, Shanghai Applicant before: ZENNER Metering Technology (Shanghai) Ltd. Country or region before: China |