CN117086544A - A quartz boat assembly machine - Google Patents
A quartz boat assembly machine Download PDFInfo
- Publication number
- CN117086544A CN117086544A CN202311071317.XA CN202311071317A CN117086544A CN 117086544 A CN117086544 A CN 117086544A CN 202311071317 A CN202311071317 A CN 202311071317A CN 117086544 A CN117086544 A CN 117086544A
- Authority
- CN
- China
- Prior art keywords
- clamping
- chuck
- quartz boat
- axis
- assembly
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
- B23K37/04—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
- B23K37/0426—Fixtures for other work
- B23K37/0435—Clamps
- B23K37/0443—Jigs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本发明涉及石英舟加工技术领域，特别是涉及一种石英舟组立机，使用机械设备完全替代石墨模具，解决现有技术中一套模具只能组立一种样式石英舟的问题。本发明包括工作台、组立装置、夹持装置和卡盘角度调节装置，组立装置包括卡盘、固定座、X轴滑台，夹持装置包括夹持端、夹持组件、Y轴滑台、Z轴升降装置和背板，卡盘角度调节装置包括角度调节杆和传动组件，组立装置和夹持装置配合使用实现单根石英舟槽棒的精准定位，再通过组立装置和角度调节装置配合使用实现制备不同样式的石英舟产品，有效提高产品的生产效率、产品的品质和产品的多样性。
The invention relates to the technical field of quartz boat processing, and in particular to a quartz boat assembly machine that uses mechanical equipment to completely replace graphite molds and solves the problem in the prior art that one set of molds can only assemble one style of quartz boat. The invention includes a workbench, an assembly device, a clamping device and a chuck angle adjustment device. The assembly device includes a chuck, a fixed seat, and an X-axis slide table. The clamping device includes a clamping end, a clamping component, and a Y-axis slide. The table, Z-axis lifting device and back plate, the chuck angle adjustment device includes the angle adjustment rod and transmission assembly, the assembly device and the clamping device are used together to achieve the precise positioning of a single quartz boat groove rod, and then through the assembly device and angle The adjustment device is used in conjunction to prepare different styles of quartz boat products, effectively improving product production efficiency, product quality and product diversity.
Description
Technical Field
The invention relates to the technical field of quartz boat processing, in particular to a quartz boat assembling machine.
Background
In the prior art, as the quartz boat products are various in variety and not all the same in size, most manufacturers fix the positions of quartz boat groove bars by manufacturing various graphite die lap joints in the production process, thereby achieving the purpose of assembling the quartz boat. However, in this way, each new type of quartz boat is assembled, a corresponding graphite mold needs to be additionally manufactured, and a large amount of graphite mold cost is consumed; because the graphite mold which moves independently is easy to shift in the production process, the lap joint efficiency is lower, and the labor and material resources are wasted in the process of re-building.
Chinese patent CN 209754391U discloses a positioning fixture for welding quartz boat, comprising a graphite base and a graphite side plate fixedly connected with the graphite base; the graphite base is provided with a sliding block I and a sliding block II which slide back and forth along the upper surface body and are oppositely arranged, and the sliding block I and the sliding block II are respectively perpendicular to the graphite side plates; a groove rod positioning support frame for supporting a quartz boat groove rod is arranged between the sliding block I and the sliding block II; the groove bar positioning support frame comprises two opposite supporting side plates and a connecting beam for connecting the two supporting side plates, wherein the supporting side plates comprise a first step for supporting an upper groove bar and a second step for supporting a lower groove bar.
The technical scheme solves the problems that the lap joint of the graphite mold is easy to displace and the efficiency is low, but the following defects are also present:
according to the technical scheme, when the quartz boat is welded and positioned, all groove bars of the quartz boat are required to be placed on the first-order steps and the second-order steps in advance, so that the follow-up welding is inconvenient, and the quality of the quartz boat is affected;
according to the technical scheme, the quartz boat part is positioned only by virtue of the sliding blocks I and II, so that the fact that the sliding blocks are not displaced during welding after positioning cannot be ensured, the quartz boat part fails to be positioned, and the quality of a quartz boat is affected;
the technical scheme is used for supporting the groove rod positioning support frame of the quartz boat groove rod, the structure of the groove rod positioning support frame is fixed, and only a single type of quartz boat can be assembled, so that the requirements of various quartz boat products are not met;
according to the technical scheme, the base and the side plates are made of graphite, the graphite is not completely separated, and the cost of a graphite die is consumed.
Disclosure of Invention
The invention aims at overcoming the defects of the prior art, provides a quartz boat assembling machine, uses mechanical equipment to completely replace graphite dies, solves the problem that one set of dies can only assemble one type of quartz boat in the prior art, and effectively improves the production efficiency, the quality and the diversity of products.
In order to achieve the above purpose, the following technical scheme is adopted:
a quartz boat assembling machine comprises a workbench, an assembling device, a clamping device and a chuck angle adjusting device,
the assembling device comprises a chuck, a fixed seat and an X-axis sliding table, wherein the fixed seat is a fixed seat A and a fixed seat B which are symmetrically arranged, the fixed seat A is arranged on a workbench, the fixed seat B is arranged on the X-axis sliding table, the X-axis sliding table is arranged on the workbench, the chuck is rotatably arranged on the fixed seat through a rotating shaft, the centers of the chuck A on the fixed seat A and the chuck B on the fixed seat B are positioned on the same horizontal line, and the chuck A and the chuck B respectively clamp two side plates of the quartz boat;
the clamping device comprises a clamping end, a clamping assembly, a Y-axis sliding table, a Z-axis lifting device and a back plate, wherein the Y-axis sliding table is arranged on the workbench, the back plate is arranged on the Y-axis sliding table, the Z-axis lifting device is arranged on the back plate, the clamping assembly is arranged on a lifting plate 4 of the Z-axis lifting device, the clamping end is arranged on the clamping assembly, and the clamping end is positioned in the working distance between the chuck A and the chuck B;
the chuck angle adjusting device comprises an angle adjusting rod and a transmission assembly, the angle adjusting rod is arranged on the workbench, the angle adjusting rod is respectively connected with rotating shafts of the chuck A and the chuck B through the transmission assembly, synchronous rotation of the chuck A and the chuck B is guaranteed, and the transmission assembly comprises a transmission belt (8) and a belt pulley.
Further, the clamping assembly comprises a clamping arm A, a clamping arm B and a transverse sliding device, wherein the clamping arm A is fixedly arranged on the lifting plate, the clamping arm B is arranged on the lifting plate through the transverse sliding device, the clamping ends are respectively arranged at the front ends of the clamping arm A and the clamping arm B, quartz boat groove bars with different lengths can be clamped, and the clamping stability is ensured.
Further, the transverse sliding device comprises a sliding seat and a transverse sliding way, the clamping arm B is installed on the sliding seat, the sliding seat is slidably installed on the transverse sliding way, the transverse sliding way is installed on the lifting plate, and the transverse sliding device is operated in a manual mode to conveniently adjust the distance between the clamping arm A and the clamping arm B.
Further, the clamping surface of the clamping end is a V-shaped groove, so that the quartz boat groove rod can be clamped stably.
And in the first step, displacement sensors are further arranged on the X-axis sliding table, the Y-axis sliding table, the Z-axis lifting device and the chuck angle adjusting device respectively, so that accurate positioning of the groove bars during assembling of the quartz boat is ensured.
Further, the chuck angle adjusting device is controlled manually.
Further, the X-axis sliding table is controlled manually.
Further, the Y-axis sliding table is controlled manually.
Further, the Z-axis lifting device is controlled manually.
The invention has the beneficial effects that:
(1) According to the invention, the X-axis sliding table, the Y-axis sliding table and the Z-axis lifting device are arranged, and corresponding displacement sensors are arranged at the same time, and the movement of the sliding table and the lifting device is controlled in a manual mode so as to drive the assembling device and the clamping device arranged on the sliding table to move, so that the accurate positioning of the slot rod during assembling the quartz boat is realized;
(2) According to the invention, the chuck angle adjusting device is arranged, the angle adjusting rods are respectively connected with the rotating shafts of the chuck A and the chuck B through the transmission assembly, and the rotation of the angle adjusting rods is controlled manually so as to drive the chuck A and the chuck B to synchronously rotate, and the chuck angle adjusting device is also provided with the displacement sensor, so that the accuracy of the rotation angle of the chuck is ensured, and various quartz boat products are assembled;
(3) The invention adopts a mode of precisely positioning the groove bars of the single quartz boat and then welding, thereby improving the welding quality and assembling various quartz boat products.
In conclusion, the invention can ensure accurate positioning of each quartz boat groove rod, ensure welding quality of each quartz boat groove rod, and can assemble various quartz boat products, thereby improving production efficiency, reducing production cost and the like.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of the back structure of the present invention;
fig. 3 is an enlarged view of the Z-axis lifting device.
As shown in the figure: 1. a work table; 2. a clamping end; 3. a back plate; 4. a lifting plate; 5. a slide; 6. a transverse slideway; 7. an angle adjusting lever; 8. a drive belt; 9. an upper stop block; 10. and (5) a lower supporting block.
Detailed Description
Example 1
Referring to the drawings, FIGS. 1-2 are schematic views of the present example, a quartz boat assembly machine as shown in the drawings comprises a workbench 1, an assembly device, a clamping device and a chuck angle adjusting device,
the assembling device comprises a chuck, a fixed seat and an X-axis sliding table, wherein the fixed seat is a fixed seat A and a fixed seat B which are symmetrically arranged, the fixed seat A is arranged on the workbench 1, the fixed seat B is arranged on the X-axis sliding table, the X-axis sliding table is arranged on the workbench 1, the chuck is rotatably arranged on the fixed seat through a rotating shaft, and the centers of the chuck A on the fixed seat A and the chuck B on the fixed seat B are positioned on the same horizontal line;
the X-axis sliding table comprises an X-axis sliding plate, an X-axis sliding rail, an X-axis transmission screw rod and a sliding block, wherein the X-axis sliding rail is arranged on the workbench 1, the X-axis sliding plate is arranged on the sliding rail through the sliding block, one end of the X-axis transmission screw rod is arranged on the X-axis sliding plate and is a sliding end, a fixing seat B is arranged at the sliding end, the other end of the X-axis transmission screw rod is arranged on the workbench 1 through a bearing assembly and is a transmission end, the X-axis transmission screw rod is externally connected with an X-axis hand wheel, and the X-axis hand wheel is connected with the transmission end of the X-axis transmission screw rod through a fan-shaped gear set and is positioned on one side of an operation surface of the assembly device;
the clamping device comprises a clamping end 2, a clamping assembly, a Y-axis sliding table, a Z-axis lifting device and a back plate 3, wherein the Y-axis sliding table is arranged on the workbench 1, the back plate 3 is arranged on the Y-axis sliding table, the Z-axis lifting device is arranged on the back plate 3, the clamping assembly is arranged on a lifting plate 4 of the Z-axis lifting device, the clamping assembly comprises a clamping arm A, a clamping arm B, a sliding seat 5 and a transverse sliding way 6, the clamping arm A is fixedly arranged on the lifting plate 4, the clamping arm B is arranged on the sliding seat 5, the sliding seat 5 is slidably arranged on the transverse sliding way 6, the transverse sliding way 6 is arranged on the lifting plate 4, the transverse sliding way 6 is externally connected with a sliding seat hand wheel, the clamping ends 2 are respectively arranged at the front ends of the clamping arm A and the clamping arm B, the clamping surfaces of the clamping ends 2 are V-shaped grooves, and the clamping ends 2 are positioned in the working space between the chuck A and the chuck B;
the Y-axis sliding table comprises a Y-axis sliding plate, a Y-axis sliding rail, a Y-axis transmission screw and a sliding block, wherein the Y-axis sliding rail is arranged on the workbench 1, the Y-axis sliding plate is arranged on the Y-axis sliding rail through the sliding block, one end of a Y-axis power transmission screw is arranged on the Y-axis sliding plate and is a sliding end, the backboard 3 is arranged at the sliding end, and the other end of the Y-axis transmission screw is arranged on the workbench 1 through a bearing assembly and is a transmission end; the transmission end of the Y-axis transmission screw rod is externally connected with a Y-axis hand wheel, and the Y-axis hand wheel is positioned on one side of the operation surface of the assembling device;
the Z-axis lifting device is shown in fig. 3 and comprises a lifting plate 4, a Z-axis sliding rail, a Z-axis transmission screw, a sliding block, an upper stop block 9 and a lower supporting block 10, wherein the Z-axis sliding rail is arranged on the back plate 3, the lifting plate 4 is arranged on the Z-axis sliding rail through the sliding block, the Z-axis transmission screw is arranged on the back plate 3 through a bearing assembly, the lifting plate 4 is connected with the Z-axis transmission screw through the upper stop block 9 and the lower supporting block 10, the lifting plate 4 is clamped by the upper stop block 9 and the lower supporting block 10 to prevent the lifting plate 4 from falling, and a Z-axis hand wheel is arranged at the top of the Z-axis transmission wire;
the chuck angle adjusting device comprises an angle adjusting rod 7 and a transmission assembly, wherein the angle adjusting rod 7 is respectively connected with rotating shafts of the chuck A and the chuck B through the transmission assembly, the transmission assembly comprises a transmission belt 8 and a belt pulley, the angle adjusting rod 7 is externally connected with an angle hand wheel, the angle hand wheel is connected with the angle adjusting rod 7 through a fan-shaped gear set, and the angle hand wheel is positioned on one side of an operation surface of the assembling device;
and displacement sensors are respectively arranged on the X-axis sliding table, the Y-axis sliding table, the Z-axis lifting device and the chuck angle adjusting device.
The specific application method of the embodiment is as follows: the two side plates of the quartz boat are clamped on the chuck A and the chuck B respectively, the X-axis hand wheel is operated to enable the fixing seat B to slide outwards to leave an operation space, then the quartz boat groove rod is placed in the clamping end 2, the Y-axis hand wheel is operated to enable the Y-axis sliding table to slide forwards, the clamping end 2 clamping the quartz boat groove rod is conveyed into the operation space reserved by the chuck A and the chuck B, the assembling position of the quartz boat groove rod in the Y-axis direction is accurately positioned through the displacement sensor on the Y-axis sliding table, the Z-axis hand wheel is operated to enable the clamping end 2 to lift, and the assembling position of the quartz boat groove rod in the Z-axis direction is accurately positioned through the displacement sensor on the Z-axis lifting device. After the Y axis and the Z axis are precisely positioned, the fixing seat B is slowly slid inwards, the working distance between the chuck A and the chuck B is precisely controlled through the displacement sensor of the X axis sliding table, the chuck A and the chuck B are guaranteed to clamp the quartz boat groove rod, then the two side plates of the quartz boat groove rod and the quartz boat are welded together by an operator, and the purpose that a single quartz groove rod is precisely positioned and welded is achieved. After welding, the clamping end 2 is loosened, the Y-axis hand wheel is operated to enable the Y-axis sliding table to slide backwards, the clamping end 2 is taken away from the working area of the assembling device, then the angle hand wheel is operated to drive the angle adjusting rod 7 to rotate, then the chuck A and the chuck B are driven to synchronously rotate, the chuck rotating angle is accurately positioned through the displacement sensor on the chuck angle adjusting device, the clamping end 2 clamps a new quartz boat grooved bar, and the welding is realized after the accurate positioning of the Y-axis direction and the Z-axis direction, so that various quartz boat products are assembled.
Example 2
According to the technical scheme implemented in the embodiment 1, the displacement sensor can be a grating ruler displacement sensor, and the main ruler is respectively arranged on the X-axis sliding table, the Y-axis sliding table, the Z-axis lifting device and the chuck angle adjusting device; the digital display device is arranged on the quartz boat assembly machine, and as shown in fig. 1-2, the digital display device comprises a display group A, a display group B, a display host and a display bracket, the display host is fixedly arranged on the backboard 3, and the display group A is arranged on the side surface of the display host; the display support is arranged on the other side face of the display host, the display set B is arranged on the display support, signals sent by the main ruler are reflected on the display set A and the display set B through the display host, and the assembling position of the quartz boat groove rod is conveniently and accurately positioned.
The present invention is not limited to the present embodiment, and any equivalent concept or modification within the technical scope of the present invention is listed as the protection scope of the present invention.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311071317.XA CN117086544A (en) | 2023-08-24 | 2023-08-24 | A quartz boat assembly machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311071317.XA CN117086544A (en) | 2023-08-24 | 2023-08-24 | A quartz boat assembly machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117086544A true CN117086544A (en) | 2023-11-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311071317.XA Pending CN117086544A (en) | 2023-08-24 | 2023-08-24 | A quartz boat assembly machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117086544A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118385865A (en) * | 2024-06-27 | 2024-07-26 | 连云港太平洋半导体材料有限公司 | Quartz boat assembly forming and welding tool |
| CN119080385A (en) * | 2024-09-02 | 2024-12-06 | 江苏宏旭石英科技有限公司 | Intelligent quartz rod welding machine and control method thereof |
| CN119115378A (en) * | 2024-10-22 | 2024-12-13 | 东海县和泰电光源有限公司 | A quartz boat assembly forming and welding tool |
| CN120736917A (en) * | 2025-08-29 | 2025-10-03 | 沈阳星光新材料有限公司 | Bonding method of recrystallized silicon carbide crystal boat part and flexible special fixture thereof |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000173943A (en) * | 1998-12-04 | 2000-06-23 | Toshiba Ceramics Co Ltd | Jig for manufacturing semiconductor wafer boat made of quartz and manufacturing method using the same |
| JP2002137928A (en) * | 2000-10-27 | 2002-05-14 | Tosoh Quartz Corp | Welding method for quartz glass component and vertical wafer port assembly apparatus |
| CN205953832U (en) * | 2016-08-30 | 2017-02-15 | 沈阳汉科半导体材料有限公司 | Vertical boat assembly welding machine |
| CN211102408U (en) * | 2019-11-25 | 2020-07-28 | 湖北万泉建设工程有限公司 | Positioning device for main reinforcement of steel reinforcement cage |
| CN218465700U (en) * | 2022-09-19 | 2023-02-10 | 浙江泓芯半导体有限公司 | False tool that connects of quartz boat |
| CN218487531U (en) * | 2022-07-19 | 2023-02-17 | 河南省公路工程局集团有限公司 | Auxiliary assembly is used in steel reinforcement cage construction |
| CN218657454U (en) * | 2022-11-15 | 2023-03-21 | 沈阳汉科半导体材料有限公司 | Cage boat assembly welding machine table |
| CN220612844U (en) * | 2023-08-24 | 2024-03-19 | 大连晶博半导体材料科技有限公司 | Quartz boat assembling machine |
-
2023
- 2023-08-24 CN CN202311071317.XA patent/CN117086544A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000173943A (en) * | 1998-12-04 | 2000-06-23 | Toshiba Ceramics Co Ltd | Jig for manufacturing semiconductor wafer boat made of quartz and manufacturing method using the same |
| JP2002137928A (en) * | 2000-10-27 | 2002-05-14 | Tosoh Quartz Corp | Welding method for quartz glass component and vertical wafer port assembly apparatus |
| CN205953832U (en) * | 2016-08-30 | 2017-02-15 | 沈阳汉科半导体材料有限公司 | Vertical boat assembly welding machine |
| CN211102408U (en) * | 2019-11-25 | 2020-07-28 | 湖北万泉建设工程有限公司 | Positioning device for main reinforcement of steel reinforcement cage |
| CN218487531U (en) * | 2022-07-19 | 2023-02-17 | 河南省公路工程局集团有限公司 | Auxiliary assembly is used in steel reinforcement cage construction |
| CN218465700U (en) * | 2022-09-19 | 2023-02-10 | 浙江泓芯半导体有限公司 | False tool that connects of quartz boat |
| CN218657454U (en) * | 2022-11-15 | 2023-03-21 | 沈阳汉科半导体材料有限公司 | Cage boat assembly welding machine table |
| CN220612844U (en) * | 2023-08-24 | 2024-03-19 | 大连晶博半导体材料科技有限公司 | Quartz boat assembling machine |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118385865A (en) * | 2024-06-27 | 2024-07-26 | 连云港太平洋半导体材料有限公司 | Quartz boat assembly forming and welding tool |
| CN118385865B (en) * | 2024-06-27 | 2024-10-29 | 连云港太平洋半导体材料有限公司 | A quartz boat assembly forming and welding tool |
| CN119080385A (en) * | 2024-09-02 | 2024-12-06 | 江苏宏旭石英科技有限公司 | Intelligent quartz rod welding machine and control method thereof |
| CN119115378A (en) * | 2024-10-22 | 2024-12-13 | 东海县和泰电光源有限公司 | A quartz boat assembly forming and welding tool |
| CN119115378B (en) * | 2024-10-22 | 2025-02-25 | 东海县和泰电光源有限公司 | A quartz boat assembly forming and welding tool |
| CN120736917A (en) * | 2025-08-29 | 2025-10-03 | 沈阳星光新材料有限公司 | Bonding method of recrystallized silicon carbide crystal boat part and flexible special fixture thereof |
| CN120736917B (en) * | 2025-08-29 | 2025-11-07 | 沈阳星光新材料有限公司 | A bonding method for recrystallized silicon carbide boat components and its flexible special fixture |
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