Disclosure of Invention
The invention aims to provide a feeding measurement device for silicon chip sorting, which is used for solving the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions: a material loading measuring device for silicon chip is selected separately, includes frame, workstation, flower blue tilting mechanism, material loading transfer chain, temporary storage mechanism, transplanting mechanism, measuring mechanism and unloading mechanism, install the workstation in the frame, install material loading conveying mechanism on the workstation, follow the direction of delivery of material loading conveying mechanism installs flower blue tilting mechanism, temporary storage mechanism, measuring mechanism and unloading mechanism in proper order, temporary storage mechanism's top is provided with transplanting mechanism.
Preferably, the flower blue tilting mechanism includes displacement subassembly, upset subassembly, inserted sheet flower blue, clamping assembly and locating component, install two upset subassemblies on the displacement subassembly, two all placed the inserted sheet flower blue on the upset subassembly, the one end of inserted sheet flower blue is provided with locating component, two all install the clamping assembly that is used for the centre gripping inserted sheet flower blue on the upset subassembly, the displacement subassembly includes X axis nature module and Z axis nature module, the both ends of X axis nature module all are provided with L shape limiting plate, install first movable plate on the slip table of X axis nature module, two Z axis nature modules are installed to the interval on the first movable plate, two all install first lifter plate on the slip table of Z axis nature module, install the base plate on the first lifter plate.
Preferably, the turnover mechanism comprises a first motor and a first supporting plate, the output end of the first motor is fixedly connected with the input end of a speed reducer, the speed reducer is installed on a substrate, the output end of the speed reducer is fixedly connected with a rotating shaft, the rotating shaft is rotatably installed on a first bearing seat, two ends of the rotating shaft are fixedly provided with adapter plates, the adapter plates are fixedly connected with a rotating plate, and the rotating plate is fixedly connected with the first supporting plate.
Preferably, the inserting flower basket comprises a front substrate and a rear substrate, a first side plate is arranged between the front substrate and the rear substrate, a first sheet placing rack used for bearing silicon wafers is arranged on the first side plate, a positioning clamping rod is further arranged between the front substrate and the rear substrate, the clamping assembly comprises two L-shaped clamping plates and two movable clamping blocks, the L-shaped clamping plates are installed on one side of the first supporting plate at intervals, the two L-shaped clamping plates are installed on one side of the L-shaped clamping plates, a first limiting block is installed on the two movable clamping blocks, a second limiting block is installed on the movable clamping blocks, the movable clamping blocks are installed on a first pushing plate, the first pushing plate is fixedly connected with a piston rod of a first cylinder, the first cylinder is installed on a cylinder mounting plate, the other side of the first supporting plate is installed on the cylinder mounting plate, linear bearings are installed at two ends of the cylinder mounting plate, one end of the guide rod is fixedly connected with the first pushing plate, the positioning assembly comprises a rotary pressing block and a U-shaped pressing plate, two sides of the rotary pressing block are respectively installed on two sides of the rotary pressing block, a rotary pressing block is installed on a rotary pressing block, a rotary pressing block is fixedly connected with a rotary shaft, and a rotary shaft is installed on a rotary shaft, and a rotary sensor is installed on a rotary shaft support.
Preferably, the feeding conveying mechanism comprises a plurality of first feeding conveying lines and second feeding conveying lines, the structures of the second feeding conveying lines and the first feeding conveying lines are the same, the first feeding conveying lines are connected end to end, the first feeding conveying lines comprise second supporting plates, three second bearing seats are respectively arranged at two ends of each second supporting plate at intervals, a first driven wheel is rotatably arranged on each second bearing seat, a first supporting plate is arranged at the bottom of each second supporting plate, the first supporting plates are arranged on a third bottom plate, motor mounting seats are arranged on the third bottom plate, second motors are arranged on the motor mounting seats, the output ends of the second motors are fixedly connected with first rotating shafts, three first driving wheels are arranged on the first rotating shafts at intervals, two first fixing plates are arranged at the bottom of each second supporting plate at intervals, first tensioning wheels are respectively arranged on the first fixing plates and the first supporting plates at intervals, first electric sensors are arranged on the first driven wheels, first driving wheels and the first tensioning wheels, second electric sensors are arranged on the second supporting plates around first supporting plates, second electric sensors are arranged on the second supporting plates, and second supporting plates are arranged on the second supporting plates, and light-sensing devices are arranged on the second supporting plates.
Preferably, the temporary storage mechanisms are arranged at two sides of the feeding conveying mechanism, the temporary storage mechanisms comprise temporary storage conveying lines and guide assemblies, the temporary storage conveying lines are provided with the guide assemblies, the temporary storage conveying lines comprise second side plates, the second side plates are provided with two second driven wheels, the third bearing seats are respectively arranged at two ends of the second side plates, the second driven wheels are rotatably arranged on the third bearing seats, the second supporting plates are respectively arranged at the bottoms of the two second side plates, the second movable plates are respectively arranged at the bottoms of the second supporting plates, regulating blocks are respectively arranged on the second movable plates, kidney-shaped step holes are formed in the regulating blocks, sliding blocks are respectively arranged at two ends of the sliding rails in a sliding manner at the bottoms of the two second movable plates, the sliding rails are arranged on the fourth bottom plate, the two ends of the fourth bottom plate are respectively provided with a fourth bearing seat, the two fourth bearing seats are rotatably provided with a second rotating shaft, one end of the second rotating shaft is provided with a first driving belt wheel, the first driving belt wheel is in driving connection with a first driving belt wheel through a first driving belt, the first driving belt wheel is arranged at the output end of a third motor, the third motor is arranged on a first motor mounting plate, the first motor mounting plate is arranged on the fourth bottom plate, the fourth bottom plate is provided with a plurality of threaded holes, the two ends of the second side plate are respectively provided with a third sensor bracket, the third sensor bracket is provided with a third photoelectric sensor, the second rotating shaft is provided with two external splines, the two external splines are sleeved with an internal spline shaft, the internal spline shaft is provided with a second driving wheel, the internal spline shaft is arranged on a second supporting plate through a bearing, and four second tensioning wheels are rotatably arranged on the second supporting plate, and second belts are wound on the four second tensioning wheels, the second driving wheel and the second driven wheel.
Preferably, the guide assembly comprises a third cylinder, two third cylinders are arranged and respectively mounted at two ends of a fifth bottom plate, the fifth bottom plate is mounted on the first supporting frame, a piston rod of the third cylinder is fixedly connected with the second pushing plate, a third supporting plate is mounted on the second pushing plate, guide plates are mounted on the third supporting plate, and three guide wheels are rotatably mounted on the guide plates.
Preferably, the transplanting mechanism comprises an X-axis linear module, the X-axis linear module is arranged on a portal frame, a third movable plate is arranged on a sliding table of the X-axis linear module, a Z-axis linear module is arranged on the third movable plate, a second lifting plate is arranged on a sliding table of the Z-axis linear module, a first support is arranged on the second lifting plate, a fourth support plate is arranged at the bottom of the first support, a fourth motor is arranged on the fourth support plate, the output end of the fourth motor is fixedly connected with a bidirectional screw rod, two screw rods and nuts are sleeved on the bidirectional screw rod, sliding plates are arranged at the bottoms of the screw rods and the bottoms of the sliding plates, a connecting plate is arranged at the bottoms of the connecting plate, and a second device rack is arranged on the clamping plate.
Preferably, the measuring mechanism comprises a second support, a fifth support plate is arranged at the top of the second support, a chute is formed in the fifth support plate, a sliding block is arranged in the chute in a sliding mode, the sliding block is fixedly connected with the L-shaped support, a camera is arranged on the L-shaped support, the sliding block is in threaded connection with a screw rod, the screw rod is in threaded connection with an installation seat, a light source support is arranged below the camera, and a light source is arranged on the light source support.
Preferably, the unloading mechanism includes the third support, installs the third fixed plate on the third support, installs the gallows on the third fixed plate, the bottom mounting of gallows has the absorption bottom plate, two accommodation holes have been seted up on the absorption bottom plate, accommodation hole inside is provided with the sucking disc, and the sucking disc passes through trachea and vacuum generator intercommunication, install the second motor mounting panel on the absorption bottom plate, install the fifth motor on the second motor mounting panel, the output of fifth motor and fifth driving shaft fixed connection, the even interval is installed the third action wheel on the fifth driving shaft, the both ends of fifth driving shaft pass through the bearing and install on the fourth fixed plate, and the fourth fixed plate is installed on the second motor mounting panel, the mid-mounting of second motor mounting panel has the fifth fixed plate, equal movable mounting has the third idler on fourth mounting panel, third idler and third idler are equipped with the third driving pulley and third driving shaft fixed connection, the fourth idler is equipped with the fourth driving pulley around the fourth driving bearing frame, the fifth idler is equipped with the driving pulley is installed to the second, the driving pulley is installed around the second driving pulley, the driving pulley is installed to the second end is connected with the driving pulley, the transmission shaft is installed to the second end is connected with the fourth driving pulley.
The technical scheme provided by the embodiment of the application has at least the following technical effects or advantages:
1. the basket turnover mechanism is arranged, and the insert basket can be driven to move in the X-axis and Z-axis directions through the X-axis linear module and the Z-axis linear module, so that manual operation is reduced, and the working efficiency is improved;
2. the two sides of the inserting flower basket can be clamped and fixed through the clamping assembly, the positioning clamping rods are clamped and positioned through the first limiting block and the second limiting block, and the two ends of the inserting flower basket are clamped and fixed through the positioning assembly, so that the inserting flower basket clamp is fastened and fixed on the first supporting plate, and the inserting flower basket is prevented from shifting in the overturning process;
3. the feeding conveying mechanism is arranged, so that the silicon wafers on the inserting piece basket can be sequentially conveyed, manual operation is reduced, and the working efficiency is improved;
4. the temporary storage mechanism is arranged, so that the silicon wafer can be temporarily stored on the temporary storage conveying line, the measurement mechanism is prevented from being stopped and waiting during silicon wafer feeding, the continuous operation of silicon wafer measurement is realized, the silicon wafer feeding efficiency is improved, the silicon wafer on the temporary storage conveying line can be guided through the guide component, the position of the silicon wafer is favorably corrected, the silicon wafer is prevented from deviating from the conveying direction, and meanwhile, the distance between two second belts is adjusted by pushing the second moving plate to move so as to adapt to the conveying of the silicon wafers with different scales;
5. The measuring mechanism is arranged, and the detection of the surface defects of the silicon wafer can be realized by matching the linear array camera with an infrared light source;
6. the blanking mechanism is arranged, unqualified silicon wafers can be blanked to the recovery material box, unqualified silicon wafers are prevented from flowing into the next working procedure, and blanking of the silicon wafers is further achieved.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-12, the present invention provides a technical solution: the utility model provides a material loading measuring device for silicon chip is selected separately, includes frame 1, workstation 2, flower blue tilting mechanism 3, material loading transfer chain 4, temporary storage mechanism 5, transplanting mechanism 6, measuring mechanism 7 and unloading mechanism 8, install workstation 2 on the frame 1, install material loading conveying mechanism 4 on the workstation 2, follow the direction of delivery of material loading conveying mechanism 4 installs flower blue tilting mechanism 3, temporary storage mechanism 5, measuring mechanism 7 and unloading mechanism 8 in proper order, the top of temporary storage mechanism 5 is provided with transplanting mechanism 6, flower blue tilting mechanism 3, material loading transfer chain 4, temporary storage mechanism 5, transplanting mechanism 6, measuring mechanism 7 and unloading mechanism 8 respectively with controller electric connection.
The flower basket turnover mechanism 3 in this embodiment includes displacement subassembly 31, upset subassembly 32, inserted sheet flower basket 33, clamping assembly 34 and locating component 35, install two upset subassemblies 32 on the displacement subassembly 31, two inserted sheet flower basket 33 has all been placed on the upset subassembly 32, the one end of inserted sheet flower basket 33 is provided with locating component 35, two clamping assembly 34 for centre gripping inserted sheet flower basket 33 has all been installed on the upset subassembly 32, displacement subassembly 31 includes X axis nature module 3101 and Z axis nature module 3104, X axis nature module 3101 installs on workstation 2, X axis nature module 3101's both ends all are provided with L limiting plate 3102, install first movable plate 3103 on the slip table of X axis nature module 3101, install two Z axis nature modules 3104 at intervals on the first movable plate 3103, install first lifter plate 3105 on two slip tables of Z axis nature module 3104, install base plate 3203 on the first lifter plate 5. Through being provided with X axis nature module 3101 and Z axis nature module 3104, can realize the removal in X axis and the Z axial direction simultaneously, reduce manual operation, improved work efficiency.
The turnover mechanism 32 in this embodiment includes a first motor 3201 and a first support plate 3210, an output end of the first motor 3201 is fixedly connected with an input end of a speed reducer 3202, the speed reducer 3202 is installed on a substrate 3203, an output end of the speed reducer 3202 is fixedly connected with a rotating shaft 3204, the rotating shaft 3204 is rotatably installed on a first bearing seat 3205, the first bearing seat 3205 is installed on a first bottom plate 3203, a buffer support 3206 is installed on the first bottom plate 3203, a buffer 3207 is installed on the buffer support 3206, the buffer 3207 is used for providing a buffering effect for an adapter plate 3208, damage to the adapter plate 3208 in the rotating process is reduced, service life of the device is prolonged, two ends of the rotating shaft 3204 are fixedly installed with the adapter plate 3208, the adapter plate 3209 is fixedly connected with a rotating plate 3209, the rotating plate 3209 is fixedly connected with the first support plate 3210, and the first support plate 3210 is used for placing a flower basket 33.
The insert flower basket 33 in this embodiment includes a front substrate 3301 and a rear substrate 3302, a first side plate 3303 is disposed between the front substrate 3301 and the rear substrate 3302, a first wafer rack 3304 for carrying silicon wafers is disposed on the first side plate 3303, a plurality of support pins 3305 are symmetrically and fixedly connected to the top of the front substrate 3301 and the bottom of the rear substrate 3302, and a positioning clamping rod 3306 is further disposed between the front substrate 3301 and the rear substrate 3302.
The clamping assembly 34 in this embodiment includes two L-shaped clamping plates 3401 and two movable clamping blocks 3402, two L-shaped clamping plates 3401 are installed on one side of a first supporting plate 3210 at intervals, two first limiting blocks 3403 are installed on one side of each L-shaped clamping plate 3401, two second limiting blocks 3404 are installed on each movable clamping block 3402, each movable clamping block 3402 is installed on a first push plate 3405, the first push plate 3405 is fixedly connected with a piston rod of a first cylinder 3406, the first cylinder 3406 is installed on a cylinder mounting plate 3407, the cylinder mounting plate 3407 is installed on the other side of the first supporting plate 3210, linear bearings 3408 are installed at two ends of the cylinder mounting plate 3407, each linear bearing 3408 is sleeved on a guide rod 3409, and one end of each guide rod 3409 is fixedly connected with the first push plate 3405.
The locating component 35 in this embodiment includes rotatory briquetting 3501 and U-shaped clamp plate 3502, rotatory briquetting 3501 cross section is L shape structure, and U-shaped clamp plate 3502 is all installed to rotatory briquetting 3501's both sides, rotatory briquetting 3502's middle part is articulated with the one end of rotation axis 3503, and rotation axis 3503's the other end and the piston rod fixed connection of second cylinder 3504, second cylinder 3504 is installed on second bottom plate 3505, rotatory briquetting 3501's one end is articulated with articulated seat 3506, articulated seat 3506 is installed on second bottom plate 3505, second bottom plate 3505 is installed on first layer board 3210, install first sensor support 3507 on the second bottom plate 3505, install first photoelectric sensor 3508 on the first sensor support 3507.
In this embodiment, the feeding conveying mechanism 4 includes a plurality of first feeding conveying lines and second feeding conveying lines, the second feeding conveying lines are located on one side of the first feeding conveying lines, the second feeding conveying lines and the first feeding conveying lines are identical in structure, the first feeding conveying lines are connected end to end, the first feeding conveying lines include a second supporting plate 401, three second bearing seats 402 are installed at intervals at two ends of the second supporting plate 401, a first driven wheel 403 is rotatably installed on the second bearing seats 402, a first supporting plate 404 is installed at the bottom of the second supporting plate 401, a second motor mounting seat 406 is installed on the third bottom plate 405, a second motor 407 is installed on the motor mounting seat 406, three first driving wheels 409 are installed at intervals on the first rotating shaft 408, two first fixing plates 410 are installed at intervals at the bottom of the second supporting plate 401, two first driving wheels 414 and second driving wheels 411 are installed on the first supporting plate 403, a second driving wheel 415 is installed on the second supporting plate, and a first guide plate 411 is installed on the second supporting plate.
The temporary storage mechanisms 5 in this embodiment are provided with two temporary storage mechanisms 5, the two temporary storage mechanisms 5 are located at two sides of the feeding conveying mechanism 4, the temporary storage mechanisms 5 comprise a temporary storage conveying line and a guide component, the temporary storage conveying line is provided with the guide component, the temporary storage conveying line comprises a second side plate 501, the second side plate 501 is provided with two pieces, the two ends of the second side plate 501 are provided with a third bearing seat 502, the third bearing seat 502 is rotatably provided with a second driven wheel 503, the bottoms of the two second side plates 501 are provided with a second supporting plate 504, the bottoms of the two second supporting plates 504 are provided with a second moving plate 505, the two second moving plates 505 are provided with an adjusting block 506, the bottoms of the two second moving plates 505 are provided with kidney-shaped step holes 507, the bottoms of the two second moving plates 505 are provided with sliding blocks 508, the two sliding blocks 508 are respectively arranged at two ends of the sliding rail 509 in a sliding way, the sliding rail 509 is arranged on a fourth bottom plate 510, the fourth bottom plate 510 is arranged on a bottom plate bracket 511, the two ends of the fourth bottom plate 510 are respectively provided with a fourth bearing seat 512, the two fourth bearing seats 512 are rotatably provided with a second rotating shaft 513, one end of the second rotating shaft 513 is provided with a first driving belt wheel 514, the first driving belt wheel 514 is in transmission connection with a first driving belt wheel 516 through a first driving belt 515, the first driving belt wheel 516 is arranged at the output end of a third motor 517, the third motor 517 is arranged on a first motor mounting plate 518, the first motor mounting plate 518 is arranged on the fourth bottom plate 510, the four bottom plate 510 is provided with a plurality of threaded holes 519, the two ends of the second side plate 501 are respectively provided with a third sensor bracket 524, a third photosensor 525 is mounted on the third sensor bracket 524.
Two external splines are mounted on the second rotating shaft 513 in this embodiment, an internal spline shaft 520 is sleeved on the two external splines, a second driving wheel 521 is mounted on the internal spline shaft 520, the internal spline shaft 521 is mounted on the second supporting plate 504 through a bearing, four second tensioning wheels 522 are rotatably mounted on the second supporting plate 504, W-shaped arrangement is formed between the four second tensioning wheels 522 and the second driving wheel 521, a second belt 523 is wound on the four second tensioning wheels 522, the second driving wheel 521 and the second driven wheel 503, and a collecting box is arranged at one end of the second belt 523. Through promoting the second movable plate 505 to remove, regulating block 506, second backup pad 504 and second curb plate 501 also follow the removal to drive the second belt 523 and remove, adjust the interval between two second belts 523, adapt to the transport of different scale silicon chip, after the second belt 523 adjusts to suitable position, pass the waist shape step hole 507 of regulating block 506 and the screw hole 519 spiro union of third bottom plate 510 through the bolt, thereby fix regulating block 506, second backup pad 504 and second curb plate 501, avoid taking place to slide in the transportation process.
The guide assembly in this embodiment includes a third cylinder 526, two third cylinders 526 are provided, two third cylinders 526 are respectively installed at two ends of a fifth bottom plate 527, the fifth bottom plate 527 is installed on a first support frame 528, a piston rod of the third cylinder 526 is fixedly connected with a second push plate 529, a third support plate 530 is installed on the second push plate 529, a guide plate 531 is installed on the third support plate 530, and three guide wheels 532 are rotatably installed on the guide plate 531. The second push plate 529 is driven to move by the two third cylinders 526, and the third support plate 530, the guide plate 531 and the guide wheels 532 also move along with the movement, so that the two groups of guide wheels 532 are driven to move in opposite directions, and the incoming silicon wafer can be guided.
The transplanting mechanism 6 in this embodiment includes an X-axis linear module 601, the X-axis linear module 601 is mounted on a portal frame 602, a third moving plate 603 is mounted on a sliding table of the X-axis linear module 601, a Z-axis linear module 604 is mounted on the third moving plate 603, a second lifting plate 605 is mounted on a sliding table of the Z-axis linear module 604, a first support 606 is mounted on the second lifting plate 605, a fourth support plate 607 is mounted at the bottom of the first support 606, a fourth motor 608 is mounted on the fourth support plate 607, an output end of the fourth motor 608 is fixedly connected with a bidirectional threaded screw, two screw nuts are sleeved on the bidirectional threaded screw, sliding plates 609 are mounted at the bottoms of the screw nuts, a connecting plate 610 is mounted at the bottoms of the sliding plates 609, a clamping plate 611 is mounted at the bottoms of the connecting plate 610, and a second positioning rack 612 is mounted on the clamping plate 611.
The measuring mechanism 7 in this embodiment includes a second bracket 701, a fifth support plate 702 is installed at the top of the second bracket 701, a chute 703 is provided on the fifth support plate 702, a sliding block 704 is slidably provided in the chute 703, the sliding block 704 is fixedly connected with an L-shaped bracket 705, a camera 706 is installed on the L-shaped bracket 705, the sliding block 704 is in threaded connection with a screw 707, the screw 707 is in threaded connection with an installation seat 708, a light source bracket 709 is provided below the camera 706, a light source 710 is installed on the light source bracket 709, a protective cover 711 is provided on an outer cover of the light source bracket 709, and a square hole is provided at the top of the protective cover 711. The camera 706 is a line camera, the light source 710 is an infrared light source, and the detection of the surface defects of the silicon wafer can be realized by matching the line camera with the infrared light source.
The blanking mechanism 8 in this embodiment includes a third bracket 801, a third fixing plate 802 is mounted on the third bracket 801, a hanging bracket 803 is mounted on the third fixing plate 802, an adsorption bottom plate 804 is mounted at the bottom of the hanging bracket 803, two accommodating holes are formed in the adsorption bottom plate 804, a sucker 805 is arranged in each accommodating hole, the sucker 805 is communicated with a vacuum generator through an air pipe, a second motor mounting plate 806 is mounted on the adsorption bottom plate 804, a fifth motor 807 is mounted on the second motor mounting plate 806, an output end of the fifth motor 808 is fixedly connected with the fifth driving shaft 808, three third driving wheels 809 are mounted on the fifth driving shaft 808 at equal intervals, two ends of the fifth driving shaft 808 are mounted on a fourth fixing plate 810 through bearings, the fourth fixing plate 810 is mounted on the second motor mounting plate 806, a fifth fixing plate 811 is mounted in the middle of the second motor mounting plate 806, the fourth fixing plate 810 and the fifth fixing plate 811 are respectively and movably provided with a third tensioning wheel 812, the two ends of the absorption bottom plate 804 are respectively and fixedly connected with three fourth mounting plates 813, the three fourth mounting plates 813 are respectively and movably provided with a third driven wheel 814, the third driving wheel 809, the third tensioning wheel 812 and the third driven wheel 814 are respectively and rotatably provided with a third belt 815, the lower part of the absorption bottom plate 804 is provided with a recycling box 816, the recycling box 816 is arranged on the second supporting frame 818 through a box bracket 817, the lower part of the absorption bottom plate 804 is also provided with a blanking bottom plate 819, the blanking bottom plate 819 is arranged on a supporting column 820, the two ends of the blanking bottom plate 819 are respectively provided with a fifth bearing seat 821, the fifth bearing seat 821 is rotatably provided with a transmission shaft 822, the two ends of the transmission shaft 822 are respectively provided with a transmission wheel 823, a fourth belt 824 is arranged between the transmission wheels 823 in a winding manner, the middle part of transmission shaft 822 is installed second drive pulley 825, and second drive pulley 825 passes through second drive belt 826 and is connected with the transmission of second driving pulley 827, and second driving pulley 827 installs the output at sixth motor 828, and sixth motor 828 installs on third motor mounting panel 829, and third motor mounting panel 829 installs at the middle part of support column 820.
The working principle of the invention is as follows: a plurality of silicon chips are placed on a first chip rack 3304 of an inserting flower basket 33, the inserting flower basket 33 is placed on a first supporting plate 3210, the inserting flower basket 33 is sensed through a first photoelectric sensor 3508 and a sensing signal is sent to a controller, a first air cylinder 3406 of the controller works to push a first push plate 3405 to move, a movable clamping block 3402 and a second limiting block 3404 also move along with the movement, so that the movable clamping block 3402 is matched with an L-shaped clamping plate 3401 to clamp and fix two sides of the inserting flower basket 33, a positioning clamping rod 3306 is clamped and positioned through a first limiting block 3403 and a second limiting block 3404, a second air cylinder 3504 acts to push a rotating shaft 3503 to move, the rotating shaft 3503 drives a U-shaped pressing plate 3502 and a rotating pressing block 3501 to rotate, the rotating pressing block 3501 is matched with a rotating plate 3209 to clamp and fix two ends of the inserting flower basket 33, the inserting flower basket 33 is prevented from shifting in the overturning process, after the insert basket 33 is fixed, the first motor 3201 works to drive the speed reducer 3202 to rotate, the rotating shaft 3204, the adapter plate 3208, the rotating plate 3209 and the first supporting plate 3210 also rotate along with the rotation, so that the insert basket 33 is driven to rotate 90 degrees, the first X-axis linear module 3101 works to drive the first moving plate 3103, the first Z-axis linear module 3104 and the insert basket 33 to move to one end of the feeding conveying line 4, the first Z-axis linear module 3104 works to drive the insert basket 33 to move downwards, so that the silicon chip on the insert basket 33 moves to the first belt 412 of the feeding conveying line 4, the second photoelectric sensor 416 senses the silicon chip and sends an induction signal to the controller, the controller controls the second motor 407 to work, the second motor 407 works to drive the first driving wheel 409 to rotate, the first driving wheel 409 drives the first belt 412 to move, the first belt 412 drives the temporary storage mechanism 5, the second X-axis linear module 601 works to drive the third moving plate 603, the second Z-axis linear module 604 and the second wafer placing rack 612 to move above the silicon wafer, the second Z-axis linear module 604 works to drive the second lifting plate 605 and the second wafer placing rack 612 to move downwards, so that the second wafer placing rack 612 moves onto the silicon wafer, the fourth motor 608 works to drive the bidirectional threaded screw to rotate, the bidirectional threaded screw drives the two screw nuts to move, the sliding plate 609, the clamping plate 611 and the second wafer placing rack 612 also move along with the movement, the clamping plate 611 clamps two ends of the silicon wafer, so that the two ends of the silicon wafer are placed in the second wafer placing rack 612, the second Z-axis linear module 604 and the second X-axis linear module 601 work to drive the silicon wafer to move onto the second belt 523 of the temporary storage mechanism 5, the fourth motor 608 works to drive the bidirectional threaded screw to rotate, the bidirectional threaded screw drives the two screw nuts to move, the sliding plate 609, the clamping plate 611 and the second sheet placing rack 612 also move along with the movement, the clamping plate 611 loosens two ends of the silicon sheet, the silicon sheet falls onto the second belt 523, the third photoelectric sensor 525 at the starting end of the second belt 523 senses the silicon sheet and sends a sensing signal to the controller, the controller controls the third motor 517 to work, the third motor 517 works to drive the first driving belt pulley 516 to rotate, the first driving belt pulley 514, the second rotating shaft 513, the internal spline shaft 520 and the second driving wheel 521 are driven to rotate by the first driving belt 515, the second driving wheel 521 drives the second belt 523 to move, the third photoelectric sensor 525 at the tail end of the second belt 523 senses the silicon sheet and sends a sensing signal to the controller, the controller controls the third motor 517 to stop working, so that temporary storage of the silicon sheet is realized, when measurement of the silicon sheet is required, the silicon wafer temporarily stored in the temporary storage mechanism 5 can be transplanted onto the feeding conveying line 4 through the transplanting mechanism 6, the silicon wafer is conveyed to the measuring mechanism 7 through the feeding conveying line 4, the camera 706 detects the silicon wafer, after detection is completed, when the camera 706 detects that the silicon wafer is unqualified, the controller controls the blanking mechanism 8 to stop working, the silicon wafer is conveyed into the recovery box 816 through the feeding conveying line 4, when the camera 706 detects that the silicon wafer is qualified, the fifth motor 807 works to drive the driving shaft 808 to rotate, the third driving wheel 809 also rotates along with rotation, so that the third belt 815 is driven to move, the third belt 815 is matched with the sucking disc 805 to convey the silicon wafer to the fourth belt 824, the sixth motor 828 works to drive the second driving belt 827 to rotate, the second driving belt 825 is driven to rotate through the second driving belt, the driving shaft 822 and the driving wheel 823 also rotate along with rotation, so that the fourth belt 824 is driven to move, and the fourth belt 824 is driven to perform blanking.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.