CN116888743A - 肖特基势垒二极管 - Google Patents

肖特基势垒二极管 Download PDF

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Publication number
CN116888743A
CN116888743A CN202280016981.1A CN202280016981A CN116888743A CN 116888743 A CN116888743 A CN 116888743A CN 202280016981 A CN202280016981 A CN 202280016981A CN 116888743 A CN116888743 A CN 116888743A
Authority
CN
China
Prior art keywords
outer peripheral
schottky barrier
barrier diode
trench
anode electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280016981.1A
Other languages
English (en)
Chinese (zh)
Inventor
有马润
藤田实
川崎克己
平林润
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of CN116888743A publication Critical patent/CN116888743A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/60Schottky-barrier diodes 
    • H10D8/605Schottky-barrier diodes  of the trench conductor-insulator-semiconductor barrier type, e.g. trench MOS barrier Schottky rectifiers [TMBS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/113Isolations within a component, i.e. internal isolations
    • H10D62/115Dielectric isolations, e.g. air gaps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/875Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being semiconductor metal oxide, e.g. InGaZnO
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/20Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
CN202280016981.1A 2021-02-25 2022-01-28 肖特基势垒二极管 Pending CN116888743A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021028799A JP7669159B2 (ja) 2021-02-25 2021-02-25 ショットキーバリアダイオード
JP2021-028799 2021-02-25
PCT/JP2022/003329 WO2022181203A1 (ja) 2021-02-25 2022-01-28 ショットキーバリアダイオード

Publications (1)

Publication Number Publication Date
CN116888743A true CN116888743A (zh) 2023-10-13

Family

ID=83049239

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280016981.1A Pending CN116888743A (zh) 2021-02-25 2022-01-28 肖特基势垒二极管

Country Status (6)

Country Link
US (1) US12520510B2 (https=)
EP (1) EP4300586A4 (https=)
JP (1) JP7669159B2 (https=)
CN (1) CN116888743A (https=)
TW (1) TWI803189B (https=)
WO (1) WO2022181203A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI905790B (zh) * 2023-09-21 2025-11-21 日商Tdk股份有限公司 半導體裝置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6191447B1 (en) * 1999-05-28 2001-02-20 Micro-Ohm Corporation Power semiconductor devices that utilize tapered trench-based insulating regions to improve electric field profiles in highly doped drift region mesas and methods of forming same
US8610235B2 (en) * 2011-09-22 2013-12-17 Alpha And Omega Semiconductor Incorporated Trench MOSFET with integrated Schottky barrier diode
JP6296445B2 (ja) 2014-02-10 2018-03-20 ローム株式会社 ショットキーバリアダイオード
DE102016106967B4 (de) * 2016-04-15 2024-07-04 Infineon Technologies Ag Halbleiterbauelemente und ein Verfahren zum Bilden eines Halbleiterbauelements
JP6845397B2 (ja) 2016-04-28 2021-03-17 株式会社タムラ製作所 トレンチmos型ショットキーダイオード
JP6932997B2 (ja) * 2017-05-25 2021-09-08 富士電機株式会社 半導体装置及びその製造方法
JP7045008B2 (ja) 2017-10-26 2022-03-31 Tdk株式会社 ショットキーバリアダイオード
JP7165322B2 (ja) * 2018-03-30 2022-11-04 Tdk株式会社 ショットキーバリアダイオード
JP6626929B1 (ja) * 2018-06-29 2019-12-25 京セラ株式会社 半導体デバイス及び電気装置
JP6980116B2 (ja) * 2018-08-22 2021-12-15 三菱電機株式会社 酸化物半導体装置及びその製造方法
US20210036166A1 (en) * 2019-08-01 2021-02-04 AZ Power, Inc MERGED PiN SCHOTTKY (MPS) DIODE WITH MULTIPLE CELL DESIGN AND MANUFACTURING METHOD THEREOF

Also Published As

Publication number Publication date
WO2022181203A1 (ja) 2022-09-01
US20240055536A1 (en) 2024-02-15
TWI803189B (zh) 2023-05-21
JP7669159B2 (ja) 2025-04-28
EP4300586A1 (en) 2024-01-03
TW202239009A (zh) 2022-10-01
JP2022129918A (ja) 2022-09-06
US12520510B2 (en) 2026-01-06
EP4300586A4 (en) 2025-01-15

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