CN116854358A - Laser splitting method and device and main control equipment thereof - Google Patents
Laser splitting method and device and main control equipment thereof Download PDFInfo
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- CN116854358A CN116854358A CN202310703100.XA CN202310703100A CN116854358A CN 116854358 A CN116854358 A CN 116854358A CN 202310703100 A CN202310703100 A CN 202310703100A CN 116854358 A CN116854358 A CN 116854358A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
本发明公开一种激光裂片方法,包括:控制激光发射器发射激光光束,激光光束经由反射组件的反射入射至振镜模组,振镜模组包括激光振镜和调焦组件;控制激光振镜工作,以使从振镜模组出射的激光光束沿预设裂片路径移动;以及调整调焦组件与待裂片玻璃之间的距离,以使激光光束在待裂片玻璃的表面形成的光斑的直径保持一致,待裂片玻璃已经过贝塞尔切割。本发明公开的激光裂片方法解决玻璃裂片质量不稳定、效率较低、良率较低等问题。此外,本发明还公开一种激光裂片装置及主控设备。
The invention discloses a laser splitting method, which includes: controlling a laser transmitter to emit a laser beam, and the laser beam is incident on a galvanometer module through reflection of a reflective component. The galvanometer module includes a laser galvanometer and a focusing component; controlling the laser galvanometer Work to make the laser beam emitted from the galvanometer module move along the preset split path; and adjust the distance between the focusing component and the glass to be split so that the diameter of the spot formed by the laser beam on the surface of the glass to be split is maintained Consistently, the split glass has been Bezier cut. The laser splitting method disclosed in the present invention solves the problems of unstable glass splitting quality, low efficiency, and low yield rate. In addition, the invention also discloses a laser splitting device and main control equipment.
Description
技术领域Technical field
本发明涉及玻璃加工技术领域,特别涉及一种激光裂片方法及其装置、主控设备。The invention relates to the technical field of glass processing, and in particular to a laser splitting method and its device and main control equipment.
背景技术Background technique
在建筑玻璃、汽车玻璃、电子玻璃等领域,大块玻璃的分片方法通常是用具有一定硬度的刀轮或者金刚砂,施加一定压力并划过玻璃表面,从而在其表面形成一道V型切割槽,然后通过冲击块、顶针、超声波振动或人工掰片,实现主体跟废料的分裂。In the fields of architectural glass, automotive glass, electronic glass and other fields, the method of slicing large pieces of glass is usually to use a cutter wheel or emery with a certain hardness to apply a certain pressure and scratch the surface of the glass, thereby forming a V-shaped cutting groove on the surface. , and then separate the main body and waste materials through impact blocks, ejector pins, ultrasonic vibration or manual breaking.
然而,在刀轮切割过程中,由于刀轮的大小、平稳度、压力决定了切割边缘的质量,因此增加了切割的不稳定因素。其次,刀轮切割工艺,切割崩口较大,需要预留较多的边缘部分进行后续的机械倒角研磨,导致倒角工序耗费较长时间,降低整线产能,同时增加了磨轮损耗和生产成本。再者,目前的掰片方法不适用较小的R角、C角、U型角,废料很难脱离主体部分,导致裂片良率很低。However, during the cutting process of the cutter wheel, the size, smoothness, and pressure of the cutter wheel determine the quality of the cutting edge, thus increasing the instability of the cutting. Secondly, the cutter wheel cutting process has a large cutting chip, which requires more edge parts to be reserved for subsequent mechanical chamfering and grinding. This causes the chamfering process to take a long time, reduces the production capacity of the entire line, and increases the wear and tear of the grinding wheel and production. cost. Furthermore, the current chip breaking method is not suitable for small R-angle, C-angle, and U-shaped corners. It is difficult for the waste to separate from the main part, resulting in a low chip yield rate.
现有技术通常采用移载装置带动激光裂片头移动的方式对玻璃产品进行裂片。裂片过程中,激光裂片头始终与玻璃产品相互垂直,即激光与贯穿整个玻璃产品的切割线相互垂直。由于激光裂片头需要沿着玻璃产品的切割线进行移动,其中,切割线包括形成玻璃主体的主体切割线和去除边缘废料的辅助切割线,因此,激光裂片头的移动路径较长且移动速度较慢,导致裂片效率较低。The existing technology usually uses a transfer device to drive the laser cleavage head to move to split glass products. During the splitting process, the laser splitting head is always perpendicular to the glass product, that is, the laser is perpendicular to the cutting line that runs through the entire glass product. Since the laser cleavage head needs to move along the cutting line of the glass product, which includes the main cutting line that forms the main body of the glass and the auxiliary cutting line that removes edge waste, the laser cleavage head has a longer moving path and a faster moving speed. Slow, resulting in less efficient splitting.
发明内容Contents of the invention
本发明的主要目的是提出一种激光裂片方法及其装置、主控设备,旨在解决玻璃裂片质量不稳定、效率较低、良率较低等问题。The main purpose of the present invention is to propose a laser splitting method, its device, and main control equipment, aiming to solve the problems of unstable glass splitting quality, low efficiency, and low yield.
为实现上述目的,本发明提出一种激光裂片方法,所述激光裂片方法包括:In order to achieve the above object, the present invention proposes a laser splitting method, which includes:
控制激光发射器发射激光光束,所述激光光束经由反射组件的反射入射至振镜模组,所述振镜模组包括激光振镜和调焦组件;Control the laser transmitter to emit a laser beam, and the laser beam is reflected by the reflective component and is incident on the galvanometer module. The galvanometer module includes a laser galvanometer and a focusing component;
控制所述激光振镜工作,以使从所述振镜模组出射的激光光束沿预设裂片路径移动;以及Control the operation of the laser galvanometer so that the laser beam emitted from the galvanometer module moves along a preset split path; and
调整所述调焦组件与待裂片玻璃之间的距离,以使所述激光光束在所述待裂片玻璃的表面形成的光斑的直径保持一致,所述待裂片玻璃已经过贝塞尔切割。The distance between the focusing component and the glass to be split is adjusted so that the diameter of the light spot formed by the laser beam on the surface of the glass to be split is consistent, and the glass to be split has been Bessel cut.
优选地,所述调焦组件包括沿所述激光光束的出射方向依次间隔设置的双凹透镜和双凸透镜,调整所述调焦组件与待裂片玻璃之间的距离包括:Preferably, the focusing component includes a biconcave lens and a biconvex lens arranged at intervals along the emission direction of the laser beam. Adjusting the distance between the focusing component and the glass to be split includes:
调整所述双凹透镜与所述待裂片玻璃之间的距离;或者Adjust the distance between the biconcave lens and the glass to be split; or
调整所述双凸透镜与所述待裂片玻璃之间的距离。Adjust the distance between the lenticular lens and the glass to be split.
优选地,当所述振镜模组的数量为一个时,控制激光发射器发射激光光束之前,所述激光裂片方法还包括:Preferably, when the number of the galvanometer module is one, before controlling the laser transmitter to emit the laser beam, the laser splitting method further includes:
调整所述待裂片玻璃的位置,以使所述振镜模组与所述待裂片玻璃的中心相对。Adjust the position of the glass to be split so that the galvanometer module is opposite to the center of the glass to be split.
优选地,当所述振镜模组的数量为多个时,控制激光发射器发射激光光束之前,所述激光裂片方法还包括:Preferably, when there are multiple galvanometer modules, before controlling the laser emitter to emit the laser beam, the laser splitting method further includes:
调整所述待裂片玻璃的位置,所述待裂片玻璃包括多个定点;以及调整所述振镜模组的位置,以使每一所述振镜模组与所述定点一一对应。Adjust the position of the glass to be split, the glass to be split includes a plurality of fixed points; and adjust the position of the galvanometer module so that each of the galvanometer modules corresponds to the fixed point one-to-one.
本发明进一步提出一种主控设备,所述主控设备包括:The present invention further proposes a main control device, which includes:
存储器,用于存储程序指令;以及memory for storing program instructions; and
处理器,用于执行所述程序指令以实现如上所述的激光裂片方法。A processor configured to execute the program instructions to implement the laser fragmentation method as described above.
本发明进一步还提出一种激光裂片装置,所述激光裂片装置包括:The invention further proposes a laser splitting device, which includes:
激光发射器,用于发射激光光束;Laser transmitter for emitting laser beam;
反射组件;reflective components;
振镜模组,包括激光振镜和调焦组件;以及Galvanometer module, including laser galvanometer and focusing components; and
控制器,分别与所述激光发射器、所述振镜模组电性连接,所述控制器被配置为执行:A controller, electrically connected to the laser transmitter and the galvanometer module respectively, and the controller is configured to execute:
控制所述激光发射器发射激光光束,所述激光光束经由所述反射组件的反射入射至所述振镜模组;Control the laser transmitter to emit a laser beam, and the laser beam is incident on the galvanometer module through reflection by the reflective component;
控制所述激光振镜工作,以使从所述振镜模组出射的激光光束沿预设裂片路径移动;以及Control the operation of the laser galvanometer so that the laser beam emitted from the galvanometer module moves along a preset split path; and
调整所述调焦组件与待裂片玻璃之间的距离,以使所述激光光束在所述待裂片玻璃的表面形成的光斑的直径保持一致,所述待裂片玻璃已经过贝塞尔切割。The distance between the focusing component and the glass to be split is adjusted so that the diameter of the light spot formed by the laser beam on the surface of the glass to be split is consistent, and the glass to be split has been Bessel cut.
优选地,所述调焦组件包括双凹透镜和双凸透镜,所述双凹透镜和所述双凸透镜沿所述激光光束的出射方向依次间隔设置;所述控制器被配置为执行:Preferably, the focusing component includes a biconcave lens and a biconvex lens, and the biconcave lens and the biconvex lens are arranged at intervals along the emission direction of the laser beam; the controller is configured to perform:
调整所述双凹透镜与所述待裂片玻璃之间的距离;或者Adjust the distance between the biconcave lens and the glass to be split; or
调整所述双凸透镜与所述待裂片玻璃之间的距离。Adjust the distance between the lenticular lens and the glass to be split.
优选地,所述振镜模组还包括调节电机,所述双凹透镜和所述双凸透镜两者中至少一者设置于所述调节电机;所述控制器分别与所述激光振镜、所述调节电机电性连接,所述控制器还被配置为执行:Preferably, the galvanometer module further includes an adjustment motor, at least one of the biconcave lens and the biconvex lens is provided on the adjustment motor; the controller is respectively connected to the laser galvanometer and the To adjust the electrical connection of the motor, the controller is further configured to perform:
控制所述调节电机将所述双凹透镜或者所述双凸透镜向靠近所述待裂片玻璃的方向或者向远离所述待裂片玻璃的方向移动。The adjustment motor is controlled to move the biconcave lens or the biconvex lens in a direction closer to the glass to be split or in a direction away from the glass to be split.
优选地,所述激光裂片装置包括至少一个振镜模组,当所述激光裂片装置包括多个振镜模组时,所述多个振镜模组间隔呈阵列排布。Preferably, the laser splitting device includes at least one galvanometer module. When the laser splitting device includes a plurality of galvanometer modules, the plurality of galvanometer modules are arranged in an array at intervals.
优选地,所述激光裂片装置还包括校正平台和固定架,所述固定架设置于所述校正平台,所述激光发射器、所述反射组件以及所述振镜模组设置于所述固定架,所述振镜模组与所述校正平台相对设置。Preferably, the laser fragmentation device further includes a correction platform and a fixed frame, the fixed frame is provided on the correction platform, and the laser emitter, the reflective component and the galvanometer module are provided on the fixed frame. , the galvanometer module is arranged opposite to the correction platform.
本发明技术方案的有益效果在于:通过控制激光振镜工作,使得激光光线的扫描范围不受透镜最大视场角的限制,能够实现大幅面的扫描范围。同时,调整调焦组件与待裂片玻璃之间的距离,能够调整激光光线在待裂片玻璃表面形成的光斑的大小,从而确保不论激光光线移动至待裂片玻璃表面的何处,在待裂片玻璃表面形成的光斑的大小均保持一致。振镜模组通过激光振镜和调焦组件之间的配合,能够实现3D动态聚焦扫描,同时,振镜模组将光斑整形为大光斑模式,利用激光振镜极快的跳转速度和加减速特性,极大地提高了裂片效果和效率,能够超快速地对超大幅面的玻璃进行裂片。The beneficial effect of the technical solution of the present invention is that by controlling the operation of the laser galvanometer, the scanning range of the laser light is not limited by the maximum field of view of the lens, and a large-format scanning range can be achieved. At the same time, adjusting the distance between the focusing component and the glass to be split can adjust the size of the spot formed by the laser light on the surface of the glass to be split, thereby ensuring that no matter where the laser light moves to the surface of the glass to be split, The size of the spots formed remains consistent. The galvanometer module can achieve 3D dynamic focus scanning through the cooperation between the laser galvanometer and the focusing component. At the same time, the galvanometer module shapes the light spot into a large spot mode, taking advantage of the extremely fast jump speed and acceleration of the laser galvanometer. The deceleration characteristics greatly improve the splitting effect and efficiency, and can split ultra-large-format glass ultra-fast.
附图说明Description of the drawings
图1为本发明实施例提供的激光裂片装置的示意图。Figure 1 is a schematic diagram of a laser splitting device provided by an embodiment of the present invention.
图2为本发明第一实施例提供的激光裂片装置的内部结构示意图。Figure 2 is a schematic diagram of the internal structure of the laser splitting device provided by the first embodiment of the present invention.
图3为图1所示的激光裂片装置的调焦组件的示意图。FIG. 3 is a schematic diagram of the focusing assembly of the laser splitting device shown in FIG. 1 .
图4为本发明第二实施例提供的激光裂片装置的内部结构示意图。Figure 4 is a schematic diagram of the internal structure of the laser splitting device provided by the second embodiment of the present invention.
图5为本发明实施例提供的激光裂片方法的流程图。Figure 5 is a flow chart of a laser fragmentation method provided by an embodiment of the present invention.
图6为本发明实施例提供的激光裂片方法的子流程图。Figure 6 is a sub-flow chart of the laser fragmentation method provided by the embodiment of the present invention.
图7为图5所示的待裂片玻璃的俯视图。FIG. 7 is a top view of the glass to be split shown in FIG. 5 .
图8为图6所示的振镜模组与待裂片玻璃之间的距离关系图。Figure 8 is a diagram showing the distance relationship between the galvanometer module shown in Figure 6 and the glass to be split.
图9为本发明实施例提供的主控设备的结构示意图。Figure 9 is a schematic structural diagram of a main control device provided by an embodiment of the present invention.
本发明目的的实现、功能特点及优点将结合实施例,参照附图做进一步说明。The realization of the purpose, functional features and advantages of the present invention will be further described with reference to the embodiments and the accompanying drawings.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的方案进行清楚完整的描述,显然,所描述的实施例仅是本发明中的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present invention.
需要说明,本发明实施例中所有方向性指示(诸如上、下、左、右、前、后……)仅用于解释在某一特定姿态(如附图所示)下各部件之间的相对位置关系、运动情况等,如果该特定姿态发生改变时,则该方向性指示也相应地随之改变。It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiment of the present invention are only used to explain the relationship between components in a specific posture (as shown in the drawings). Relative positional relationship, movement conditions, etc., if the specific posture changes, the directional indication will also change accordingly.
还需要说明的是,当元件被称为“固定于”或“设置于”另一个元件上时,它可以直接在另一个元件上或者可能同时存在居中元件。当一个元件被称为是“连接”另一个元件,它可以是直接连接另一个元件或者可能同时存在居中元件。It should also be noted that when an element is referred to as being "mounted" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is said to be "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
另外,在本发明中涉及“第一”、“第二”等的描述仅用于描述目的,而不能理解为指示或暗示其相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。另外,各个实施例之间的技术方案可以相互结合,但是必须是以本领域普通技术人员能够实现为基础,当技术方案的结合出现相互矛盾或无法实现时应当认为这种技术方案的结合不存在,也不在本发明要求的保护范围之内。In addition, descriptions involving "first", "second", etc. in the present invention are for descriptive purposes only and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In addition, the technical solutions in various embodiments can be combined with each other, but it must be based on the realization by those of ordinary skill in the art. When the combination of technical solutions is contradictory or cannot be realized, it should be considered that such a combination of technical solutions does not exist. , nor within the protection scope required by the present invention.
请结合参看图1和图2,、图1为本发明实施例提供的激光裂片装置的示意图,图2为本发明第一实施例提供的激光裂片装置的内部结构示意图。激光裂片装置1用于对超大幅面的玻璃进行裂片。Please refer to FIGS. 1 and 2 in conjunction. FIG. 1 is a schematic diagram of a laser cleavage device provided by an embodiment of the present invention. FIG. 2 is a schematic diagram of the internal structure of a laser cleavage device provided by a first embodiment of the present invention. The laser splitting device 1 is used to split ultra-large format glass.
激光裂片装置1包括激光发射器10、反射组件20、振镜模组30以及控制器40。其中,控制器40分别与激光发射器10、振镜模组30电性连接。振镜模组30包括激光振镜31和调焦组件32。激光发射器10用于发射激光光束。在本实施例中,控制器40被配置为执行控制激光发射器10发射激光光束,激光光束经由反射组件20的反射入射至振镜模组30;控制激光振镜31工作,以使从振镜模组30出射的激光光束沿预设裂片路径移动;调整调焦组件32与待裂片玻璃之间的距离,以使激光光束在待裂片玻璃的表面形成的光斑的直径保持一致。其中,待裂片玻璃已经过贝塞尔切割。The laser splitting device 1 includes a laser transmitter 10 , a reflective component 20 , a galvanometer module 30 and a controller 40 . Among them, the controller 40 is electrically connected to the laser transmitter 10 and the galvanometer module 30 respectively. The galvanometer module 30 includes a laser galvanometer 31 and a focusing component 32 . The laser transmitter 10 is used to emit laser beams. In this embodiment, the controller 40 is configured to control the laser transmitter 10 to emit a laser beam, and the laser beam is incident on the galvanometer module 30 through the reflection of the reflective component 20; and controls the laser galvanometer 31 to work so that the laser beam is incident on the galvanometer module 30. The laser beam emitted from the module 30 moves along the preset splitting path; the distance between the focusing component 32 and the glass to be split is adjusted to keep the diameter of the spot formed by the laser beam on the surface of the glass to be split consistent. Among them, the glass to be split has been Bezier cut.
具体地,激光发射器10为CO2激光器,激光发射器10发出的激光光束的光斑直径为9毫米,波长为10.6微米。Specifically, the laser transmitter 10 is a CO2 laser, and the laser beam emitted by the laser transmitter 10 has a spot diameter of 9 mm and a wavelength of 10.6 microns.
反射组件20包括第一反射镜21、第二反射镜22和第三反射镜23。其中,第一反射镜21、第二反射镜22和第三反射镜23均为全反射镜。激光发射器10发射的激光光束依次经过第一反射镜21、第二反射镜22和第三反射镜23入射至激光振镜31,后经过调焦组件32出射至振镜模组30的外部。The reflective assembly 20 includes a first reflective mirror 21 , a second reflective mirror 22 and a third reflective mirror 23 . Among them, the first reflecting mirror 21, the second reflecting mirror 22 and the third reflecting mirror 23 are all total reflection mirrors. The laser beam emitted by the laser transmitter 10 sequentially passes through the first reflector 21 , the second reflector 22 and the third reflector 23 and is incident on the laser galvanometer 31 , and then passes through the focusing assembly 32 and is emitted to the outside of the galvanometer module 30 .
玻璃经过贝塞尔切割工艺后形成待裂片玻璃,通过激光发射器10、反射组件20和振镜模组30之间的配合,使得激光光束在待裂片玻璃的表面形成圆型聚焦光斑,圆型聚焦光斑能够保证激光能量在待裂片玻璃的切割线两侧的均匀性和最优分布。待裂片玻璃强烈吸收10.6um波长的激光,几乎所有的激光能量都被待裂片玻璃表面吸收,能量沿着切割线,进而在待裂片玻璃体内进行传递,因此激光热量在切割线上形成应力分布,应力释放使得废料从待裂片玻璃上分离,达到裂片的效果,同时又不会将待裂片玻璃融化。After the glass is cut through the Bessel cutting process, the glass to be split is formed. Through the cooperation between the laser emitter 10, the reflection component 20 and the galvanometer module 30, the laser beam forms a circular focused spot on the surface of the glass to be split. The focused spot can ensure the uniformity and optimal distribution of laser energy on both sides of the cutting line of the glass to be split. The glass to be split strongly absorbs the 10.6um wavelength laser. Almost all the laser energy is absorbed by the surface of the glass to be split. The energy is transmitted along the cutting line and then inside the glass body to be split. Therefore, the laser heat forms a stress distribution on the cutting line. Stress relief causes the waste material to separate from the glass to be split, achieving the effect of splitting without melting the glass to be split.
调焦组件32可以实时改变激光光束的发散角,以实现调焦,从而补偿待裂片玻璃幅面内中心以外聚焦点的光程差,同时协同配合激光振镜31的X振镜镜片和Y振镜镜片,实现激光光束在整个工作平面内任意图形的扫描。The focusing component 32 can change the divergence angle of the laser beam in real time to achieve focus adjustment, thereby compensating for the optical path difference of the focus point outside the center of the glass to be split, and at the same time cooperates with the X galvanometer lens and Y galvanometer lens of the laser galvanometer 31 The lens enables the laser beam to scan any pattern within the entire working plane.
在本实施例中,控制器40调整调焦组件32与待裂片玻璃之间的距离,以使激光光束沿预设裂片路径移动时,在待裂片玻璃的表面形成的光斑的直径保持一致。具体地,激光光束在预设裂片路径上形成的光斑的直径大小相同。由于激光光束倾斜的缘故,激光光束在待裂片玻璃的表面的不同地方形成的光斑的圆度会存在细微的差异。比如,激光光束在垂直待裂片玻璃的表面形成的光斑的圆度稍优于激光光束在预设裂片路径上形成的光斑的圆度。可以理解的是,激光光束照射至预设裂片路径时,光程随着激光光束的移动而改变,但通过调焦组件的作用,光斑的直径基本相同。因此,不论激光光束移动至预设裂片路径的哪一个位置,激光光束在预设裂片路径上形成的光斑的直径是相同的。In this embodiment, the controller 40 adjusts the distance between the focusing component 32 and the glass to be split, so that when the laser beam moves along the preset splitting path, the diameter of the light spot formed on the surface of the glass to be split remains consistent. Specifically, the diameters of the light spots formed by the laser beam on the preset split path are the same. Due to the tilt of the laser beam, there will be slight differences in the roundness of the spots formed by the laser beam at different places on the surface of the glass to be cracked. For example, the roundness of the spot formed by the laser beam on the surface of the vertical glass to be split is slightly better than the roundness of the spot formed by the laser beam on the preset splitting path. It can be understood that when the laser beam irradiates the preset split path, the optical path changes as the laser beam moves, but through the action of the focusing component, the diameter of the spot is basically the same. Therefore, no matter where the laser beam moves on the preset split path, the diameter of the spot formed by the laser beam on the preset split path is the same.
在本实施例中,控制器40用于执行激光裂片方法。激光裂片方法的具体过程将在下文详细描述。其中,控制器40的相关功能可以由一个设备实现,也可以由多个设备共同实现,还可以是由一个设备内的一个或多个功能模块实现,在此不做具体限定。可以理解的是,上述功能既可以是硬件设备中的网络元件,也可以是在专用硬件上运行的软件功能,或者是硬件与软件的结合,或者是平台(例如,云平台)上实例化的虚拟化功能。In this embodiment, the controller 40 is used to perform the laser fragmentation method. The specific process of the laser fragmentation method will be described in detail below. Among them, the relevant functions of the controller 40 can be implemented by one device, or can be implemented by multiple devices together, or can be implemented by one or more functional modules in one device, which are not specifically limited here. It can be understood that the above functions can be either network elements in hardware devices, software functions running on dedicated hardware, or a combination of hardware and software, or instantiated on a platform (for example, a cloud platform) Virtualization capabilities.
激光裂片装置1的3D动态聚焦扫描振镜,即振镜模组30为前聚焦式振镜,因此,从振镜模组30出射的激光光束的扫描范围不受透镜最大视场角的限制,实现了大幅面的扫描范围。同时,激光光束的光斑通过调焦组件32整形为大光斑模式,利用激光振镜31极快的跳转速度和加减速特性,极大的提高了裂片效果和效率,裂片精度高,稳定性好。The 3D dynamic focusing scanning galvanometer of the laser splitting device 1, that is, the galvanometer module 30 is a front-focusing galvanometer. Therefore, the scanning range of the laser beam emitted from the galvanometer module 30 is not limited by the maximum field of view angle of the lens. A large-format scanning range is achieved. At the same time, the spot of the laser beam is shaped into a large spot mode through the focusing component 32, and the extremely fast jump speed and acceleration and deceleration characteristics of the laser galvanometer 31 are used to greatly improve the splitting effect and efficiency, with high splitting accuracy and good stability. .
请结合参看图3,其为本发明实施例提供的调焦组件的示意图。在一些实施例中,调焦组件32包括双凹透镜321和双凸透镜322,双凹透镜321和双凸透镜322沿激光光束的出射方向依次间隔设置。控制器40还被配置为执行调整双凹透镜321与待裂片玻璃之间的距离,或者,调整双凸透镜322与待裂片玻璃之间的距离。Please refer to FIG. 3 , which is a schematic diagram of a focusing assembly provided by an embodiment of the present invention. In some embodiments, the focusing component 32 includes a biconcave lens 321 and a biconvex lens 322, which are spaced apart in sequence along the exit direction of the laser beam. The controller 40 is further configured to adjust the distance between the biconcave lens 321 and the glass to be broken, or to adjust the distance between the biconvex lens 322 and the glass to be broken.
可以理解的是,控制器40可以调整双凹透镜321与待裂片玻璃之间的距离,控制器40也可以调整双凸透镜322与待裂片玻璃之间的距离。激光光束先经过双凹透镜321,再经过双凸透镜322。其中,双凹透镜321对激光光束起扩束作用,双凸透镜322对激光光束起聚焦作用。It can be understood that the controller 40 can adjust the distance between the biconcave lens 321 and the glass to be split, and the controller 40 can also adjust the distance between the biconvex lens 322 and the glass to be split. The laser beam first passes through the biconcave lens 321 and then passes through the biconvex lens 322. Among them, the biconcave lens 321 plays a role in expanding the laser beam, and the biconvex lens 322 plays a role in focusing the laser beam.
在本实施例中,双凹透镜321与激光振镜31相邻设置,双凸透镜322位于双凹透镜321远离激光振镜31的一侧。在一些可行的实施例中,双凸透镜322与激光振镜31相邻设置,双凹透镜321位于双凸透镜322远离激光振镜31的一侧。In this embodiment, the biconcave lens 321 is arranged adjacent to the laser galvanometer 31 , and the biconvex lens 322 is located on the side of the biconcave lens 321 away from the laser galvanometer 31 . In some feasible embodiments, the lenticular lens 322 is disposed adjacent to the laser galvanometer 31 , and the biconcave lens 321 is located on the side of the lenticular lens 322 away from the laser galvanometer 31 .
控制器40对双凹透镜321或者双凸透镜322的具体调整过程将在下文详细描述。The specific adjustment process of the biconcave lens 321 or the biconvex lens 322 by the controller 40 will be described in detail below.
请结合参看图4,其为本发明第二实施例提供的激光裂片装置的内部结构示意图。在一些实施例中,振镜模组30还包括调节电机33,双凹透镜321和双凸透镜322两者中至少一者设置于调节电机33。控制器40分别与激光振镜31、调节电机33电性连接。控制器40还被配置为执行控制调节电机33将双凹透镜321或者双凸透镜322向靠近待裂片玻璃的方向或者向远离待裂片玻璃的方向移动。Please refer to FIG. 4 , which is a schematic diagram of the internal structure of a laser splitting device according to a second embodiment of the present invention. In some embodiments, the galvanometer module 30 further includes an adjustment motor 33 , and at least one of the biconcave lens 321 and the biconvex lens 322 is provided on the adjustment motor 33 . The controller 40 is electrically connected to the laser galvanometer 31 and the adjustment motor 33 respectively. The controller 40 is also configured to control the adjustment motor 33 to move the biconcave lens 321 or the biconvex lens 322 in a direction closer to the glass to be split or in a direction away from the glass to be split.
可以理解的是,控制器40可以控制双凹透镜321向靠近待裂片玻璃的方向移动,可以控制双凹透镜321向远离待裂片玻璃的方向移动,也可以控制双凸透镜322向靠近待裂片玻璃的方向移动,还可以控制双凸透镜322向远离待裂片玻璃的方向移动。It can be understood that the controller 40 can control the biconcave lens 321 to move in a direction closer to the glass to be split, can control the biconcave lens 321 to move in a direction away from the glass to be split, and can also control the biconvex lens 322 to move in a direction close to the glass to be split. , the lenticular lens 322 can also be controlled to move away from the glass to be split.
在本实施例中,当双凹透镜321设置于调节电机33时,双凸透镜322固定不动;当双凸透镜322设置于调节电机33时,双凹透镜321固定不动。具体地,调节电机33可以使双凹透镜321或者双凸透镜322在一定行程内移动,进而能够调节双凹透镜321和双凸透镜322之间的间距,从而可以改变激光光束的发散角,以实现调焦。In this embodiment, when the biconcave lens 321 is installed on the adjusting motor 33, the biconvex lens 322 is fixed; when the biconvex lens 322 is installed on the adjusting motor 33, the biconcave lens 321 is fixed. Specifically, the adjusting motor 33 can move the biconcave lens 321 or the biconvex lens 322 within a certain stroke, thereby adjusting the distance between the biconcave lens 321 and the biconvex lens 322, thereby changing the divergence angle of the laser beam to achieve focus adjustment.
在一些可行的实施例中,双凹透镜321和双凸透镜322均可设置于调节电机33,调节电机33可以根据实际情况同时移动双凹透镜321和双凸透镜322,以调整双凹透镜321和双凸透镜322之间的间距。In some feasible embodiments, both the biconcave lens 321 and the biconvex lens 322 can be disposed on the adjustment motor 33. The adjustment motor 33 can move the biconcave lens 321 and the biconvex lens 322 simultaneously according to the actual situation to adjust the relationship between the biconcave lens 321 and the biconvex lens 322. spacing between.
在一些实施例中,激光裂片装置1包括至少一个振镜模组30。当激光裂片装置1包括多个振镜模组30时,多个振镜模组30间隔呈阵列排布。In some embodiments, the laser cleavage device 1 includes at least one galvanometer module 30 . When the laser splitting device 1 includes multiple galvanometer modules 30, the multiple galvanometer modules 30 are arranged in an array at intervals.
可以理解的是,振镜模组30的数量可以根据待裂片玻璃的尺寸进行设置。举例来说,当待裂片玻璃需要分割一个2000mm*2000mm的主体玻璃时,可以采用一个振镜模组30进行裂片;当待裂片玻璃需要分割四个2000mm*2000mm的主体玻璃时,可以采用四个振镜模组30进行裂片。即是说,可以采用多个振镜模组30拼接的方式来实现更大幅面待裂片玻璃的裂片需求。当激光裂片装置1设置有多个振镜模组30时,多个振镜模组30间隔设置,且呈阵列状排布。It can be understood that the number of galvanometer modules 30 can be set according to the size of the glass to be split. For example, when the glass to be split needs to split a main glass of 2000mm*2000mm, a galvanometer module 30 can be used to split; when the glass to be split needs to split four main glasses of 2000mm*2000mm, four main glasses of 2000mm*2000mm can be used. The galvanometer module 30 performs splitting. That is to say, multiple galvanometer modules 30 can be spliced together to meet the splitting requirements of larger-format glass to be split. When the laser splitting device 1 is provided with multiple galvanometer modules 30, the multiple galvanometer modules 30 are spaced apart and arranged in an array.
针对不同尺寸的待裂片玻璃,激光裂片装置1能够灵活选择单个或者多个振镜模组30,适用性非常强。For different sizes of glass to be split, the laser splitting device 1 can flexibly select single or multiple galvanometer modules 30, and has very strong applicability.
请再次参看图1,在一些实施例中,激光裂片装置1还包括校正平台50和固定架60,固定架60设置于校正平台50。激光发射器10、反射组件20以及振镜模组30设置于固定架60,振镜模组30与校正平台50相对设置。Please refer to FIG. 1 again. In some embodiments, the laser splitting device 1 further includes a calibration platform 50 and a fixing bracket 60 . The fixing bracket 60 is disposed on the calibration platform 50 . The laser emitter 10 , the reflective component 20 and the galvanometer module 30 are arranged on the fixed frame 60 , and the galvanometer module 30 is arranged opposite to the calibration platform 50 .
具体地,固定架60设置于校正平台50的一侧,控制器40设置于校正平台50。第一反射镜21与激光发射器10相对设置,第二反射镜22与第一反射镜21相对设置,第三反射镜23与第二反射镜22相对设置,振镜模组30与第三反射镜23相对设置。振镜模组30的出光口(图未示)朝向校正平台50。当进行裂片时,待裂片玻璃放置于校正平台50的平面上。Specifically, the fixing bracket 60 is disposed on one side of the calibration platform 50 , and the controller 40 is disposed on the calibration platform 50 . The first reflector 21 is disposed opposite to the laser transmitter 10 , the second reflector 22 is disposed opposite to the first reflector 21 , the third reflector 23 is disposed opposite to the second reflector 22 , the galvanometer module 30 is disposed opposite to the third reflector 22 . The mirrors 23 are arranged opposite each other. The light outlet (not shown) of the galvanometer module 30 faces the calibration platform 50 . When performing splitting, the glass to be split is placed on the plane of the correction platform 50 .
在本实施例中,振镜模组30设置于激光发射器10的上方,激光发射器10发射的激光光束沿平行校正平台50平面的第一方向传播,并入射至第一反射镜21。激光光束经过第一反射镜21的反射沿垂直校正平台50平面的第二方向传播,并入射至第二反射镜22。其中,第二方向与第一方向垂直。激光光束经过第二反射镜22的反射沿平行校正平台50平面的第三方向传播,并入射至第三反射镜23。其中,第三方向与第一方向相反。激光光束经过第三反射镜23的反射沿平行校正平台50平面的第四方向传播,并入射至振镜模组30。其中,第四方向与第三方向垂直。激光光束经过振镜模组30的作用,沿垂直校正平台50平面的第五方向传播。其中,第五方向与第二方向相反。In this embodiment, the galvanometer module 30 is disposed above the laser transmitter 10 , and the laser beam emitted by the laser transmitter 10 propagates along the first direction parallel to the plane of the correction platform 50 and is incident on the first reflector 21 . The laser beam is reflected by the first reflecting mirror 21 and propagates along the second direction perpendicular to the plane of the correction platform 50 and is incident on the second reflecting mirror 22 . Wherein, the second direction is perpendicular to the first direction. The laser beam is reflected by the second reflector 22 and propagates along the third direction parallel to the plane of the correction platform 50 , and is incident on the third reflector 23 . Among them, the third direction is opposite to the first direction. The laser beam is reflected by the third mirror 23 and propagates along the fourth direction parallel to the plane of the correction platform 50 , and is incident on the galvanometer module 30 . Among them, the fourth direction is perpendicular to the third direction. The laser beam passes through the action of the galvanometer module 30 and propagates along the fifth direction of the vertical correction platform 50 plane. Wherein, the fifth direction is opposite to the second direction.
请结合参看图5,其为本发明实施例提供的激光裂片方法的流程图。激光裂片方法应用于激光裂片装置1,用于对待裂片玻璃进行裂片,使废料从待裂片玻璃上分离,从而得到主体玻璃。其中,待裂片玻璃已经过贝塞尔切割。Please refer to FIG. 5 , which is a flow chart of a laser fragmentation method according to an embodiment of the present invention. The laser splitting method is applied to the laser splitting device 1 to split the glass to be split, so that the waste material is separated from the glass to be split, thereby obtaining the main glass. Among them, the glass to be split has been Bezier cut.
激光裂片方法具体包括如下步骤。The laser fragmentation method specifically includes the following steps.
步骤S102,控制激光发射器发射激光光束。Step S102, control the laser transmitter to emit a laser beam.
控制器40控制激光发射器10发射激光光束。其中,激光光束经由反射组件20的反射入射至振镜模组30。The controller 40 controls the laser transmitter 10 to emit a laser beam. The laser beam is reflected by the reflective component 20 and is incident on the galvanometer module 30 .
步骤S104,控制激光振镜工作,以使从振镜模组出射的激光光束沿预设裂片路径移动。Step S104, control the operation of the laser galvanometer so that the laser beam emitted from the galvanometer module moves along the preset split path.
在本实施例中,激光振镜31包括X振镜镜片和Y振镜镜片(图未示),控制器40控制X振镜镜片和Y振镜镜片之间协同配合,使得从振镜模组30出射的激光光束在整个工作平面内能够实现任意图形的扫描,从而得到主体玻璃。In this embodiment, the laser galvanometer 31 includes an X galvanometer lens and a Y galvanometer lens (not shown). The controller 40 controls the cooperative cooperation between the X galvanometer lens and the Y galvanometer lens, so that the slave galvanometer module The laser beam emitted by 30° can scan any pattern in the entire working plane to obtain the main glass.
具体地,控制器40通过控制X振镜镜片和Y振镜镜片的振动,使激光光束沿着预设裂片路径对待切割玻璃的主体切割线进行加热,再对辅助切割线进行加热。在热胀冷缩的作用下,应力从切割线的方向释放,则待切割玻璃裂开,从而使得边缘废料从待切割玻璃上分离出来得到主体玻璃。其中,预设裂片路径为预先设定好的激光光束在待裂片玻璃表面的移动路径。Specifically, the controller 40 controls the vibration of the X galvanometer lens and the Y galvanometer lens, so that the laser beam heats the main cutting line of the glass to be cut along the preset split path, and then heats the auxiliary cutting line. Under the action of thermal expansion and contraction, the stress is released from the direction of the cutting line, and the glass to be cut cracks, so that the edge waste is separated from the glass to be cut to obtain the main glass. The preset fragmentation path is a preset moving path of the laser beam on the surface of the glass to be fragmented.
以图7所示的待裂片玻璃为例,待裂片玻璃设有主体切割线ABCD(如图中粗线所示)和分别位于A、B、C、D四个角的辅助切割线(如图中细线所示)。激光光束先沿着主体切割线进行移动,再依次沿着四个角的辅助切割线进行移动。举例来说,激光光束可以沿着ABCDA形成的逆时针方向移动,以完成主体切割线的分割;再依次沿A角、B角、C角、D角的辅助切割线移动,以完成辅助切割线的分割。可以理解的是,由于激光振镜31能够实现激光光束的快速跳转,且跳转速度极快,因此,由于激光振镜31的加速与减速速度极快,使得激光光束裂片主体切割线的效率比现有技术提高了2倍;由于激光振镜31的跳转速度极快,使得激光光束裂片辅助切割线时,可以直接从A角跳转到B角,再依次跳转至C角和D角,相对于现有技术,激光光束的移动路径减少了一个主体切割线的周长,综合效率比现有技术提高3-4倍。Taking the glass to be split shown in Figure 7 as an example, the glass to be split is provided with a main cutting line ABCD (shown as a thick line in the figure) and auxiliary cutting lines located at the four corners A, B, C, and D (as shown in the figure). shown by the thin line). The laser beam first moves along the main cutting line, and then moves along the auxiliary cutting lines at the four corners. For example, the laser beam can move in the counterclockwise direction formed by ABCDA to complete the segmentation of the main cutting line; and then move along the auxiliary cutting lines of angle A, B, C, and D in order to complete the auxiliary cutting line. of division. It can be understood that since the laser galvanometer 31 can realize the rapid jump of the laser beam, and the jump speed is extremely fast, therefore, due to the extremely fast acceleration and deceleration speed of the laser galvanometer 31, the efficiency of the cutting line of the laser beam splitting body is reduced. It is 2 times higher than the existing technology; due to the extremely fast jumping speed of the laser galvanometer 31, when the laser beam splits to assist the cutting line, it can directly jump from A to B, and then jump to C and D in sequence. Angle, compared to the existing technology, the moving path of the laser beam reduces the circumference of a main cutting line, and the overall efficiency is 3-4 times higher than the existing technology.
步骤S106,调整调焦组件与待裂片玻璃之间的距离,以使激光光束在待裂片玻璃的表面形成的光斑的直径保持一致。Step S106: Adjust the distance between the focusing component and the glass to be split so that the diameter of the spot formed by the laser beam on the surface of the glass to be split remains consistent.
控制器40调整调焦组件32与待裂片玻璃之间的距离。The controller 40 adjusts the distance between the focusing assembly 32 and the glass to be broken.
调整调焦组件与待裂片玻璃之间的距离具体包括:控制器40调整双凹透镜321与待裂片玻璃之间的距离,或者,控制器40调整双凸透镜322与待裂片玻璃之间的距离。Adjusting the distance between the focusing component and the glass to be split specifically includes: the controller 40 adjusting the distance between the biconcave lens 321 and the glass to be split, or the controller 40 adjusting the distance between the biconvex lens 322 and the glass to be split.
在本实施例中,控制器40通过调节电机33调整双凹透镜321和双凸透镜322之间的距离,可以实时改变激光光束的发散角,以实现实时调焦,从而补偿待裂片玻璃幅面内中心以外聚焦点的光程差,确保不论光斑沿预设裂片路径移动到何处,光斑在待裂片玻璃表面的大小均保持一致,从而保证裂片的稳定性。即是说,光斑在预设裂片路径上的直径均保持一致。In this embodiment, the controller 40 adjusts the distance between the biconcave lens 321 and the biconvex lens 322 by adjusting the motor 33, and can change the divergence angle of the laser beam in real time to achieve real-time focusing, thereby compensating for areas outside the center of the glass to be broken. The optical path difference of the focusing point ensures that no matter where the light spot moves along the preset split path, the size of the light spot on the surface of the glass to be split remains consistent, thereby ensuring the stability of the split. That is to say, the diameter of the light spot remains consistent along the preset split path.
上述实施例中,通过控制激光振镜工作,使得激光光线的扫描范围不受透镜最大视场角的限制,能够实现大幅面的扫描范围。同时,调整调焦组件与待裂片玻璃之间的距离,能够调整激光光线在待裂片玻璃表面形成的光斑的大小,从而确保不论激光光线移动至待裂片玻璃表面的何处,在待裂片玻璃表面形成的光斑的大小均保持一致。振镜模组通过激光振镜和调焦组件之间的配合,能够实现3D动态聚焦扫描,同时,振镜模组将光斑整形为大光斑模式,利用激光振镜极快的跳转速度和加减速特性,极大地提高了裂片效果和效率,能够超快速地对超大幅面的玻璃进行裂片。In the above embodiment, by controlling the operation of the laser galvanometer, the scanning range of the laser light is not limited by the maximum field of view angle of the lens, and a large-format scanning range can be achieved. At the same time, adjusting the distance between the focusing component and the glass to be split can adjust the size of the spot formed by the laser light on the surface of the glass to be split, thereby ensuring that no matter where the laser light moves to the surface of the glass to be split, The size of the spots formed remains consistent. The galvanometer module can achieve 3D dynamic focus scanning through the cooperation between the laser galvanometer and the focusing component. At the same time, the galvanometer module shapes the light spot into a large spot mode, taking advantage of the extremely fast jump speed and acceleration of the laser galvanometer. The deceleration characteristics greatly improve the splitting effect and efficiency, and can split ultra-large-format glass ultra-fast.
在本实施例中,当振镜模组30的数量为一个时,控制激光发射器10发射激光光束之前,控制器40调整待裂片玻璃的位置,以使振镜模组30与待裂片玻璃的中心相对。In this embodiment, when the number of the galvanometer module 30 is one, before controlling the laser transmitter 10 to emit the laser beam, the controller 40 adjusts the position of the glass to be split so that the galvanometer module 30 is in contact with the glass to be split. The center is opposite.
具体地,将经过贝塞尔切割的待裂片玻璃传输至校正平台50后,控制器40可以控制设置于校正平台50的调整模组(图未示)对待裂片玻璃进行调整,以使振镜模组30的出光口与待裂片玻璃的中心正对。也就是说,调整过程中,振镜模组30已预先调整好位置并固定不动,仅需要调整待裂片玻璃的位置即可。其中,出光口与中心的连线和待裂片玻璃的平面垂直。Specifically, after the Bessel-cut glass to be split is transferred to the correction platform 50, the controller 40 can control an adjustment module (not shown) provided on the correction platform 50 to adjust the glass to be split, so that the galvanometer mold The light outlet of the group 30 is directly opposite to the center of the glass to be split. That is to say, during the adjustment process, the galvanometer module 30 has been pre-adjusted and fixed, and only the position of the glass to be split needs to be adjusted. Wherein, the line connecting the light outlet and the center is perpendicular to the plane of the glass to be split.
在一些可行的实施例中,控制器40也可以将待裂片玻璃固定不动后,仅调整振镜模组30的位置。在另一些可行的实施例中,振镜模组30的调整可以由执行人员进行操作,在此不做限定。In some feasible embodiments, the controller 40 can also only adjust the position of the galvanometer module 30 after the glass to be broken is fixed. In other possible embodiments, the adjustment of the galvanometer module 30 can be performed by an executive, which is not limited here.
控制激光发射器10发射激光光束之前,执行人员需要对振镜模组30进行高精度校正,以调整扫描幅面、工作距离和光斑大小等。Before controlling the laser transmitter 10 to emit a laser beam, the operator needs to perform high-precision calibration on the galvanometer module 30 to adjust the scanning format, working distance, spot size, etc.
具体地,根据需要得到的主体玻璃的幅面调整振镜模组30与校正平台50之间的工作距离。举例来说,当主体玻璃的幅面,即扫描幅面为2000毫米*2000毫米时,工作距离可以设置为2400毫米。即是说,将振镜模组30与校正平台50之间的距离设置为2400毫米。Specifically, the working distance between the galvanometer module 30 and the correction platform 50 is adjusted according to the required format of the main body glass. For example, when the width of the main glass, that is, the scanning width, is 2000mm*2000mm, the working distance can be set to 2400mm. That is to say, the distance between the galvanometer module 30 and the correction platform 50 is set to 2400 mm.
另外,控制激光发射器10发射激光光束之前,还需要根据需要设置激光发射器10的能量和频率。举例来说,若待裂片玻璃的厚度为4毫米,则待裂片玻璃的临界能量密度约为0.2J/cm2,相应地,激光发射器10的功率选择85w@10kHz,激光光束质量M2=1.2。当然,在保证能量密度的情况下,提高激光发射器10的功率,光斑可以调整地更大,更加有利于裂片效率的提升。In addition, before controlling the laser transmitter 10 to emit a laser beam, the energy and frequency of the laser transmitter 10 need to be set as needed. For example, if the thickness of the glass to be split is 4 mm, the critical energy density of the glass to be split is about 0.2J/cm 2 . Correspondingly, the power of the laser transmitter 10 is selected to be 85w@10kHz, and the laser beam quality M 2 = 1.2. Of course, while ensuring the energy density, by increasing the power of the laser emitter 10, the spot can be adjusted to be larger, which is more conducive to improving the splitting efficiency.
在一些实施例中,还需要在控制激光发射器10发射激光光束之前,采用调光治具调整光路,使激光光束能够从振镜模组30的中心通过,并垂直于校正平台50的平面。具体地,调整激光裂片装置1的螺旋纽,以使激光光束的焦点位于工作面上,调整中心焦点后,用小型内六角将螺旋纽锁紧。In some embodiments, before controlling the laser emitter 10 to emit the laser beam, it is also necessary to use a dimming fixture to adjust the optical path so that the laser beam can pass through the center of the galvanometer module 30 and be perpendicular to the plane of the calibration platform 50 . Specifically, adjust the screw button of the laser splitting device 1 so that the focus of the laser beam is on the working surface. After adjusting the central focus, lock the screw button with a small internal hexagon.
在一些实施例中,还需要在控制激光发射器10发射激光光束之前,校准焦平面(BOX面)。具体地,粗略找正BOX面的焦点,以使得校正BOX面时,激光光束大致能够在工作面聚焦,激光光束能够在工作平面打出可见可测量的BOX边框。具体可以通过调整音圈的Z值来找到最理想的焦点。粗略校准BOX面后,利用CCD图像传感器(Charge coupled Device,CCD)进行精准校准。在保持校正精度的情况下,旋转螺旋纽,将校正平面内的光斑调整到合适的大小。其中,光斑的大小由待裂片玻璃的厚度决定。In some embodiments, it is also necessary to calibrate the focal plane (BOX plane) before controlling the laser transmitter 10 to emit the laser beam. Specifically, the focus of the BOX surface is roughly aligned, so that when the BOX surface is corrected, the laser beam can be roughly focused on the working surface, and the laser beam can create a visible and measurable BOX frame on the working surface. Specifically, you can find the ideal focus by adjusting the Z value of the voice coil. After rough calibration of the BOX surface, a CCD image sensor (Charge coupled Device, CCD) is used for precise calibration. While maintaining the correction accuracy, rotate the screw button to adjust the light spot in the correction plane to an appropriate size. Among them, the size of the light spot is determined by the thickness of the glass to be split.
具体地,为了达到最快的裂片效率和最佳的裂片效果,光斑的直径需要覆盖到贯穿整个待裂片玻璃厚度的切割线。则,光斑的直径d与待裂片玻璃的厚度t之间需要满足:d≥t*tanθ。其中,θ表示激光光束与垂直方向之间的夹角。Specifically, in order to achieve the fastest splitting efficiency and the best splitting effect, the diameter of the light spot needs to cover the cutting line that runs through the entire thickness of the glass to be split. Then, the diameter d of the light spot and the thickness t of the glass to be split need to satisfy: d≥t*tanθ. Among them, θ represents the angle between the laser beam and the vertical direction.
如图8所示,由于激光光束沿预设裂片路径移动时,θ的大小会发生改变。其中,当激光光束移动到预设裂片路径的角落时,θ最大。因此,将激光光束移动到主体玻璃的幅面的四个角时,激光光束与垂直方向之间的夹角作为θ的最大值。具体地,由于振镜模组30与待裂片玻璃的中心相对,则扫描幅面与振镜模组30和待裂片玻璃之间的距离存在如下关系:其中,r表示幅面长度的一半,/>表示待裂片玻璃的中心到主体玻璃的幅面的四个角之间的距离,H表示振镜模组30与待裂片玻璃之间的竖直距离。As shown in Figure 8, as the laser beam moves along the preset split path, the size of θ will change. Among them, θ is the largest when the laser beam moves to the corner of the preset split path. Therefore, when the laser beam is moved to the four corners of the main body glass, the angle between the laser beam and the vertical direction serves as the maximum value of θ. Specifically, since the galvanometer module 30 is opposite to the center of the glass to be split, the scanning width has the following relationship with the distance between the galvanometer module 30 and the glass to be split: Among them, r represents half of the format length,/> represents the distance between the center of the glass to be split and the four corners of the main glass, and H represents the vertical distance between the galvanometer module 30 and the glass to be split.
由上述可得, From the above we can get,
举例来说,若主体玻璃的幅面为2000mm*2000mm,厚度为4mm,振镜模组30和待裂片玻璃之间的距离H为2400mm,则r为1000mm,光斑的直径d至少为2.33mm。For example, if the format of the main glass is 2000mm*2000mm, the thickness is 4mm, the distance H between the galvanometer module 30 and the glass to be split is 2400mm, then r is 1000mm, and the diameter of the light spot d is at least 2.33mm.
相应地,振镜模组30的中心到主体玻璃四角的光程可以表示为:L2=2r2+H2;最大光程差可以表示为:其中,L表示光程。可以理解的是,最大光程差表示振镜模组30到切割线之间的距离与振镜模组30到待裂片玻璃之间的距离之差。以上述主体玻璃的幅面为例,则振镜模组30的中心到主体玻璃四角的光程L为2785.6mm,最大光程差为385.6mm。Correspondingly, the optical path from the center of the galvanometer module 30 to the four corners of the main body glass can be expressed as: L2=2r2+H2; the maximum optical path difference can be expressed as: Among them, L represents the optical path. It can be understood that the maximum optical path difference represents the difference between the distance between the galvanometer module 30 and the cutting line and the distance between the galvanometer module 30 and the glass to be split. Taking the above-mentioned format of the main glass as an example, the optical path L from the center of the galvanometer module 30 to the four corners of the main glass is 2785.6 mm, and the maximum optical path difference is 385.6 mm.
请结合参看图6,其为本发明实施例提供的激光裂片方法的子流程图。当振镜模组30的数量为多个时,执行步骤S102之前,激光裂片方法还包括如下步骤。Please refer to FIG. 6 , which is a sub-flow chart of the laser splitting method provided by the embodiment of the present invention. When the number of galvanometer modules 30 is multiple, before step S102 is performed, the laser splitting method further includes the following steps.
步骤S202,调整待裂片玻璃的位置。Step S202, adjust the position of the glass to be broken.
控制器40调整待裂片玻璃的位置。具体地,将经过贝塞尔切割的待裂片玻璃传输至校正平台50后,控制器40可以控制设置于校正平台50的调整模组(图未示)对待裂片玻璃进行调整,以使待裂片玻璃放置准确。在本实施例中,待裂片玻璃包括多个定点。其中,定点的数量和大小根据待裂片玻璃的大小进行设置。The controller 40 adjusts the position of the glass to be broken. Specifically, after the Bessel-cut glass to be split is transferred to the correction platform 50, the controller 40 can control an adjustment module (not shown) provided on the correction platform 50 to adjust the glass to be split, so that the glass to be split is Accurate placement. In this embodiment, the glass to be split includes multiple fixed points. Among them, the number and size of fixed points are set according to the size of the glass to be split.
举例来说,当待裂片玻璃需要分割为四个主体玻璃时,待裂片玻璃设有四个定点,每一定点为一个主体玻璃的中心点。For example, when the glass to be split needs to be divided into four main glasses, the glass to be split is provided with four fixed points, and each fixed point is the center point of a main glass.
步骤S204,调整振镜模组的位置,以使每一振镜模组与定点一一对应。Step S204, adjust the position of the galvanometer module so that each galvanometer module corresponds to a fixed point one-to-one.
控制器40逐一调整振镜模组30的位置,以使得一个振镜模组30与一个定点正对。The controller 40 adjusts the positions of the galvanometer modules 30 one by one so that one galvanometer module 30 is directly opposite to a fixed point.
上述实施例中,通过多个振镜模组拼接的方式可以实现更大幅面玻璃的裂片,针对大小不同尺寸的产品,可灵活选择振镜模组的数量,适用性非常强。In the above embodiment, the splicing of multiple galvanometer modules can achieve larger-format glass slits. For products of different sizes, the number of galvanometer modules can be flexibly selected, and the applicability is very strong.
请结合参看图9,其为本发明实施例提供的主控设备的结构示意图。主控设备70包括存储器71和处理器72。存储器71用于存储程序指令,处理器72用于执行程序指令以实现上述激光裂片方法。Please refer to FIG. 9 , which is a schematic structural diagram of a main control device provided by an embodiment of the present invention. The main control device 70 includes a memory 71 and a processor 72 . The memory 71 is used to store program instructions, and the processor 72 is used to execute the program instructions to implement the above-mentioned laser splitting method.
其中,处理器72在一些实施例中可以是一中央处理器(Central ProcessingUnit,CPU)、控制器、微控制器、微处理器或其它数据处理芯片,用于运行存储器71中存储的程序指令。In some embodiments, the processor 72 may be a central processing unit (CPU), a controller, a microcontroller, a microprocessor or other data processing chips, and is used to run program instructions stored in the memory 71 .
存储器71至少包括一种类型的可读存储介质,该可读存储介质包括闪存、硬盘、多媒体卡、卡型存储器(例如,SD或DX存储器等)、磁性存储器、磁盘、光盘等。存储器71在一些实施例中可以是计算机设备的内部存储单元,例如计算机设备的硬盘。存储器71在另一些实施例中也可以是计算机设备的外部存储设备,例如计算机设备上配备的插接式硬盘、智能存储卡(Smart Media Card,SMC)、安全数字(Secure Digital,SD)卡、闪存卡(FlashCard)等。进一步地,存储器71还可以既包括计算机设备的内部存储单元也包括外部存储设备。存储器71不仅可以用于存储安装于计算机设备的应用软件及各类数据,例如实现激光裂片方法的代码等,还可以用于暂时地存储已经输出或者将要输出的数据。The memory 71 includes at least one type of readable storage medium, including flash memory, hard disk, multimedia card, card-type memory (eg, SD or DX memory, etc.), magnetic memory, magnetic disk, optical disk, etc. The memory 71 may in some embodiments be an internal storage unit of the computer device, such as a hard disk of the computer device. In other embodiments, the memory 71 may also be an external storage device of the computer device, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), a secure digital (Secure Digital, SD) card equipped on the computer device, FlashCard, etc. Further, the memory 71 may also include both an internal storage unit of the computer device and an external storage device. The memory 71 can not only be used to store application software installed on the computer equipment and various types of data, such as codes for implementing the laser splitting method, etc., but can also be used to temporarily store data that has been output or is to be output.
以上所述的仅为本发明的部分或优选实施例,无论是文字还是附图都不能因此限制本发明保护的范围,凡是在与本发明一个整体的构思下,利用本发明说明书及附图内容所作的等效结构变换,或直接/间接运用在其他相关的技术领域均包括在本发明保护的范围内。What is described above is only part or preferred embodiments of the present invention. Neither the text nor the drawings can therefore limit the scope of protection of the present invention. All contents of the description and drawings of the present invention are used under the overall concept of the present invention. Equivalent structural transformations, or direct/indirect application in other related technical fields are included in the scope of protection of the present invention.
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102905839A (en) * | 2010-03-30 | 2013-01-30 | Imra美国公司 | Laser-based material processing apparatus and methods |
| CN106891096A (en) * | 2017-04-27 | 2017-06-27 | 东莞市盛雄激光设备有限公司 | A kind of laser cutting device and cutting method |
| CN106994564A (en) * | 2017-04-27 | 2017-08-01 | 东莞市盛雄激光设备有限公司 | A kind of laser cutting device and its cutting method |
| CN209969874U (en) * | 2019-03-21 | 2020-01-21 | 英诺激光科技股份有限公司 | Laser cutting system for ground glass |
| CN111338096A (en) * | 2020-03-26 | 2020-06-26 | 吉林大学 | An excitation light three-dimensional focusing scanning system and its image scanning method |
| KR20210135716A (en) * | 2020-05-06 | 2021-11-16 | 한국전기연구원 | Laser surface treatment method and apparatus thereof |
| CN114105466A (en) * | 2021-12-22 | 2022-03-01 | 华中科技大学 | Large-width laser hole cutting method for glass |
| CN114436519A (en) * | 2022-02-10 | 2022-05-06 | 深圳市吉祥云科技有限公司 | Large-breadth glass laser high-speed cutting and sheet breaking method and device |
-
2023
- 2023-06-13 CN CN202310703100.XA patent/CN116854358A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102905839A (en) * | 2010-03-30 | 2013-01-30 | Imra美国公司 | Laser-based material processing apparatus and methods |
| CN106891096A (en) * | 2017-04-27 | 2017-06-27 | 东莞市盛雄激光设备有限公司 | A kind of laser cutting device and cutting method |
| CN106994564A (en) * | 2017-04-27 | 2017-08-01 | 东莞市盛雄激光设备有限公司 | A kind of laser cutting device and its cutting method |
| CN209969874U (en) * | 2019-03-21 | 2020-01-21 | 英诺激光科技股份有限公司 | Laser cutting system for ground glass |
| CN111338096A (en) * | 2020-03-26 | 2020-06-26 | 吉林大学 | An excitation light three-dimensional focusing scanning system and its image scanning method |
| KR20210135716A (en) * | 2020-05-06 | 2021-11-16 | 한국전기연구원 | Laser surface treatment method and apparatus thereof |
| CN114105466A (en) * | 2021-12-22 | 2022-03-01 | 华中科技大学 | Large-width laser hole cutting method for glass |
| CN114436519A (en) * | 2022-02-10 | 2022-05-06 | 深圳市吉祥云科技有限公司 | Large-breadth glass laser high-speed cutting and sheet breaking method and device |
Non-Patent Citations (2)
| Title |
|---|
| 曾家刚主编: "《工程训练教程》", 31 January 2020, 成都:西南交通大学出版社, pages: 161 - 164 * |
| 王忠林等主编: "《激光加工设备与工艺》", 30 September 2011, 武汉:华中科技大学出版社, pages: 33 - 34 * |
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