CN116727302A - A chip detection and selection machine and a chip detection and selection method - Google Patents
A chip detection and selection machine and a chip detection and selection method Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/361—Processing or control devices therefor, e.g. escort memory
- B07C5/362—Separating or distributor mechanisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/02—Measures preceding sorting, e.g. arranging articles in a stream orientating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
本发明涉及芯片生产技术领域,尤其是指一种芯片检测挑选机,其包括机架、第一料仓、送料装置、第一芯片检测装置、芯片抓取装置、扩膜装置、废料回收结构、第二芯片检测装置及贴装工作台,所述送料装置在第一料仓、第一芯片检测装置和扩膜装置之间往复运动;所述芯片抓取装置能在扩膜装置、第二芯片检测装置、废料回收结构和贴装工作台之间往复运动。及芯片检测挑选方法。本发明的的芯片的检测精准度高,将检测合格的芯片逐一有序的贴装在另一载具上,有利于后续的加工,或将检测不合格的芯片之间输送至废料回收结构进行回收。通过第一芯片检测装置对芯片的顶部进行同步快速地检测,提高了芯片的检测效率,实现了芯片的全自动检测和挑选。
The invention relates to the technical field of chip production, and in particular, refers to a chip detection and sorting machine, which includes a frame, a first silo, a feeding device, a first chip detection device, a chip grabbing device, a film expansion device, and a waste recycling structure. The second chip detection device and the mounting workbench, the feeding device reciprocates between the first silo, the first chip detection device and the film expansion device; the chip grabbing device can move between the film expansion device, the second chip There is reciprocating movement between the detection device, the scrap recovery structure and the placement workbench. and chip detection and selection methods. The chip detection accuracy of the present invention is high, and the chips that pass the detection are mounted on another carrier one by one in an orderly manner, which is beneficial to subsequent processing, or the chips that fail the detection are transported to the scrap recycling structure for processing. Recycle. The top of the chip is detected synchronously and quickly through the first chip detection device, which improves the detection efficiency of the chip and realizes fully automatic detection and selection of the chip.
Description
技术领域Technical field
本发明涉及芯片生产技术领域,尤其是指一种芯片检测挑选机及芯片检测挑选方法。The present invention relates to the field of chip production technology, and in particular, to a chip detection and selection machine and a chip detection and selection method.
背景技术Background technique
晶圆圆片附着在膜上,膜封装在不锈钢圆环上,完整的晶圆切割成单个芯片后,需要根据芯片的质量实施分选操作,将缺陷芯片从膜上取走,从而需要对膜上的芯片进行检测挑选。在专利申请号为CN201310007497.5专利申请名称为一种全自动晶粒分选设备及全自动晶粒分选方法的专利中公开了:本设备由晶圆工作台、分选工作台、运输传送系统、晶圆工作台推送装置、分选工作台推送装置、摆臂机构、芯片分选料库,上述七个主要部分组成。本发明改善了现有技术中的传统布局与机械结构,在机体平台上提供了一种优选的布局结构,通过运输传送系统将盘片在工作台、推送装置及芯片分选料库三者之间自如进出进行取放,实现了全自动晶粒分选。在此专利申请中芯片检测效果差,无法对芯片的顶端和底端分别进行精准的检测。另外,此专利申请中缺少废料回收结构,芯片挑选后的缺陷芯片无法直接回收。摆臂机构只能完成芯片的分选动作,摆臂机构的功能和作用单一。因此,缺陷十分明显,亟需提供一种解决方案。The wafer wafer is attached to the membrane, and the membrane is encapsulated on a stainless steel ring. After the complete wafer is cut into individual chips, a sorting operation needs to be performed based on the quality of the chip to remove the defective chips from the membrane, thus requiring the membrane to be The chips on the chip are tested and selected. In the patent application number CN201310007497.5, the patent application title is a fully automatic grain sorting equipment and a fully automatic grain sorting method. It is disclosed that this equipment consists of a wafer workbench, a sorting workbench, and a transportation conveyor. The system, wafer workbench pushing device, sorting workbench pushing device, swing arm mechanism, and chip sorting material library are composed of the above seven main parts. The present invention improves the traditional layout and mechanical structure in the prior art, and provides an optimal layout structure on the machine platform. The discs are placed between the workbench, the push device and the chip sorting library through the transportation and transmission system. It can be picked and placed freely in and out of the room, realizing fully automatic grain sorting. In this patent application, the chip detection effect is poor, and the top and bottom ends of the chip cannot be accurately detected. In addition, this patent application lacks a waste recycling structure, and defective chips cannot be directly recycled after chip selection. The swing arm mechanism can only complete the chip sorting action, and the swing arm mechanism has a single function. Therefore, the flaws are obvious and a solution is urgently needed.
发明内容Contents of the invention
为了解决上述技术问题,本发明的目的在于提供一种芯片检测效果好、缺陷芯片回收方便且摆臂机构能带动芯片进行检测和回收等功能的芯片检测挑选机及芯片检测挑选方法。In order to solve the above technical problems, the purpose of the present invention is to provide a chip detection and selection machine and a chip detection and selection method that have good chip detection effects, convenient recovery of defective chips, and a swing arm mechanism that can drive chips for detection and recovery.
为了实现上述目的,本发明采用如下技术方案:In order to achieve the above objects, the present invention adopts the following technical solutions:
一种芯片检测挑选机,其包括机架及分别设置于机架上的第一料仓、送料装置、第一芯片检测装置、芯片抓取装置、扩膜装置、废料回收结构、第二芯片检测装置和贴装工作台,所述第一料仓内储存有多个载具;所述送料装置在第一料仓、第一芯片检测装置和扩膜装置之间往复运动,以将载具从第一料仓依序输送至第一芯片检测装置和扩膜装置,所述第一芯片检测装置用于对送料装置所输送的载具上的芯片进行检测;所述扩膜装置用于放置载具并能将载具上的薄膜张紧;所述贴装工作台上吸附有载具;所述芯片抓取装置能在扩膜装置、第二芯片检测装置、废料回收结构和贴装工作台之间往复运动,以将扩膜后的载具上的芯片输送第二芯片检测装置,通过第二芯片检测装置对芯片抓取装置所抓取的芯片进行检测后,第二芯片检测装置再将芯片贴装至贴装工作台的载具上或输送至废料回收结构进行回收。A chip detection and sorting machine, which includes a frame and a first silo, a feeding device, a first chip detection device, a chip grabbing device, a film expansion device, a waste recycling structure, and a second chip detection device respectively arranged on the frame device and a mounting workbench. A plurality of carriers are stored in the first bin; the feeding device reciprocates between the first bin, the first chip detection device and the film expansion device to move the carriers from The first material bin is transported to the first chip detection device and the film expansion device in sequence. The first chip detection device is used to detect the chips on the carrier transported by the feeding device; the film expansion device is used to place the carrier. The device can also tighten the film on the carrier; the mounting workbench is adsorbed with the carrier; the chip grabbing device can be used in the film expansion device, the second chip detection device, the waste recycling structure and the mounting workbench. reciprocating movement to transport the expanded chip on the carrier to the second chip detection device. After the second chip detection device detects the chip captured by the chip grabbing device, the second chip detection device then The chip is mounted on the carrier of the placement workbench or transported to the scrap recycling structure for recycling.
进一步地,所述芯片检测挑选机还包括分别设置于机架上的第二送料机构及第二料仓,所述第二送料机构用于将扩膜装置上的载具输送至第二料仓内;所述第二料仓用于存储载具。Furthermore, the chip detection and sorting machine also includes a second feeding mechanism and a second silo respectively provided on the frame. The second feeding mechanism is used to transport the carrier on the film expansion device to the second silo. Inside; the second bin is used to store carriers.
进一步地,所述芯片检测挑选机还包括分别设置于机架上的第三送料机构及第三料仓,所述第三送料机构用于将贴装工作台上的载具输送至第三料仓内或件第三料仓内的载具输送至贴装工作台上;所述第三料仓用于存储载具。Furthermore, the chip detection and sorting machine also includes a third feeding mechanism and a third silo respectively provided on the frame. The third feeding mechanism is used to transport the carrier on the mounting workbench to the third material hopper. The carriers in the warehouse or the third bin are transported to the placement workbench; the third bin is used to store the carriers.
进一步地,所述送料装置包括检测台及分别设置于机架上的转运机构、第一送料机构、调节机构和取料机构;所述调节机构的输出端与检测台连接;所述取料机构用于将第一料仓内的载具取出,所述转运机构能在取料机构、检测台和第一送料机构之间往复运动,以将取料机构取出的载具依次输送至检测台及第一送料机构;所述调节机构用于带动检测台在第一芯片检测装置和转运机构之间往复运动;所述检测台用于吸附载具;所述第一芯片检测装置用于对检测台上的芯片进行检测;所述第一送料机构用于将载具输送至扩膜装置。Further, the feeding device includes a detection platform and a transfer mechanism, a first feeding mechanism, an adjustment mechanism and a material retrieval mechanism respectively arranged on the frame; the output end of the adjustment mechanism is connected to the detection platform; the material retrieval mechanism It is used to take out the carriers in the first bin. The transfer mechanism can reciprocate between the material picking mechanism, the detection platform and the first feeding mechanism to sequentially transport the carriers taken out by the material picking mechanism to the detection platform and The first feeding mechanism; the adjustment mechanism is used to drive the detection platform to reciprocate between the first chip detection device and the transfer mechanism; the detection platform is used to adsorb the carrier; the first chip detection device is used to adjust the detection platform The chip on the chip is detected; the first feeding mechanism is used to transport the carrier to the film expansion device.
进一步地,所述第一送料机构包括设置于机架上的滑轨、设置于滑轨上的直线驱动器、与滑轨滑动连接的夹持件及设置于机架上并分别位于滑轨的两侧的两个放置台,所述转运机构用于将检测后的载具转运至两个放置台上,两个放置台配合以支撑载具,所述夹持件的输出端与直线驱动器连接,所述夹持件能夹持载具,所述直线驱动器用于带动夹持件靠近或远离扩膜装置。Further, the first feeding mechanism includes a slide rail provided on the frame, a linear driver provided on the slide rail, a clamping member slidably connected to the slide rail, and two sides provided on the frame and respectively located on the slide rail. There are two placing platforms on the side. The transfer mechanism is used to transfer the detected carrier to the two placing platforms. The two placing platforms cooperate to support the carrier. The output end of the clamping member is connected to the linear drive. The clamping member can clamp the carrier, and the linear driver is used to drive the clamping member closer to or away from the film expansion device.
进一步地,所述芯片抓取装置包括分别设置于机架上的第一抓取装置机构、中转台和第二抓取装置机构,所述第一抓取装置机构用于在扩膜装置、第二芯片检测装置、废料回收结构和中转台之间往复运动,以将扩膜后的薄膜上的芯片输送至第二芯片检测装置,通过第二芯片检测装置对芯片进行检测后,第一抓取装置机构根据检测结果选择将芯片输送至中转台或废料回收结构;所述第二抓取装置机构用于在中转台和贴装工作台之间往复运动,以将中转台上的芯片输送至贴装至贴装工作台所放置的载具上。Further, the chip grabbing device includes a first grabbing device mechanism, a transfer platform and a second grabbing device mechanism respectively provided on the frame. The first grabbing device mechanism is used to operate between the film expansion device and the third grabbing device. The two chip detection devices, the waste recycling structure and the transfer table move back and forth to transport the chips on the expanded film to the second chip detection device. After the chips are detected by the second chip detection device, the first grab The device mechanism selects to transport the chip to the transfer table or the waste recycling structure according to the detection results; the second grabbing device mechanism is used to reciprocate between the transfer table and the placement workbench to transport the chip on the transfer table to the placement workbench. Mount it on the carrier placed on the placement workbench.
进一步地,所述芯片检测挑选机还包括分别设置于机架上的第一移动机构和第二移动机构,所述扩膜装置与第一移动机构的输出端连接;所述贴装工作台与第二移动机构的输出端连接。Further, the chip detection and sorting machine also includes a first moving mechanism and a second moving mechanism respectively provided on the frame, and the film expansion device is connected to the output end of the first moving mechanism; the mounting workbench is connected to the output end of the first moving mechanism. The output end of the second moving mechanism is connected.
进一步地,所述芯片检测挑选机还包括分别设置于机架上的第二视觉检测装置和第三视觉检测装置,所述第二视觉检测装置用于检测扩膜装置上待抓取的芯片是否移动至第一抓取装置机构的工作端;所述第三视觉检测装置用于检测贴装工作台上的薄膜上的待贴装芯片的位置是否移动至第二抓取装置机构的工作端。Furthermore, the chip detection and sorting machine also includes a second visual detection device and a third visual detection device respectively provided on the frame. The second visual detection device is used to detect whether the chip to be grasped on the film expansion device is Move to the working end of the first grabbing device mechanism; the third visual detection device is used to detect whether the position of the chip to be mounted on the film on the mounting workbench moves to the working end of the second grabbing device mechanism.
进一步地,所述第一抓取装置机构包括设置于机架上的摆臂驱动组件、设置于摆臂驱动组件的输出端的摆臂本体及设置于摆臂本体上的吸料组件,所述摆臂驱动组件用于带动摆臂本体旋转及升降。Further, the first grabbing device mechanism includes a swing arm drive assembly provided on the frame, a swing arm body provided at the output end of the swing arm drive assembly, and a suction assembly provided on the swing arm body. The arm drive assembly is used to drive the swing arm body to rotate and lift.
一种芯片检测挑选方法,其包括前文所述芯片检测挑选机,芯片检测挑选方法步骤如下:A chip detection and selection method, which includes the chip detection and selection machine mentioned above. The steps of the chip detection and selection method are as follows:
步骤一:送料装置将第一料仓内的载具取出,并将载具输送至第一芯片检测装置;Step 1: The feeding device takes out the carrier in the first bin and transports the carrier to the first chip detection device;
步骤二:通过第一芯片检测装置对载具上的多个芯片同步进行检测,并将检测后的信号分别发送至送料装置和芯片抓取装置;Step 2: Use the first chip detection device to simultaneously detect multiple chips on the carrier, and send the detected signals to the feeding device and the chip grabbing device respectively;
步骤三:送料装置继续将检测后的载具输送至扩膜装置,通过扩膜装置放置载具并将载具上的薄膜张紧;Step 3: The feeding device continues to transport the inspected carrier to the film expansion device, where the carrier is placed through the film expansion device and the film on the carrier is tensioned;
步骤四:芯片抓取装置逐一抓取张紧后的载具的薄膜上的芯片至第二芯片检测装置;Step 4: The chip grabbing device grabs the chips on the film of the tensioned carrier one by one to the second chip detection device;
步骤五:通过第二芯片检测装置对芯片抓取装置的芯片进行检测,并将检测后的信号发送至芯片抓取装置;Step 5: Detect the chip of the chip grabbing device through the second chip detection device, and send the detected signal to the chip grabbing device;
步骤六:贴装工作台上吸附有待贴装的载具;若第一芯片检测装置和第二芯片检测装置发送至芯片抓取装置的芯片检测结果均为合格,则芯片抓取装置继续输送芯片至贴装工作台,并将芯片贴装在贴装工作台所吸附的载具上;若第一芯片检测装置或第二芯片检测装置发送至芯片抓取装置的芯片检测结果有一个为不合格,则芯片抓取装置继续输送芯片至废料回收结构,通过废料回收结构对芯片进行回收。Step 6: The mounting workbench absorbs the carrier to be mounted; if the chip detection results sent by the first chip detection device and the second chip detection device to the chip grabbing device are both qualified, the chip grabbing device continues to transport the chip to the placement workbench, and mount the chip on the carrier adsorbed by the placement workbench; if one of the chip detection results sent by the first chip detection device or the second chip detection device to the chip grabbing device is unqualified, Then the chip grabbing device continues to transport the chip to the waste recycling structure, and the chip is recycled through the waste recycling structure.
本发明的有益效果:本发明的结构简单紧凑,通过芯片抓取装置逐一抓取芯片,不但便于第二芯片检测装置对载具上的芯片的底端逐一进行检测,提高了芯片的检测精准度,还便于将检测合格的芯片逐一有序的贴装在另一载具上,有利于后续的加工,或将检测不合格的芯片之间输送至废料回收结构进行回收。送料装置输送载具至第一芯片检测装置,通过第一芯片检测装置对芯片的顶部进行同步快速地检测,提高了芯片的检测效率。通过芯片抓取装置和送料装置分别与各个不同工位配合,实现了芯片的全自动检测和挑选。Beneficial effects of the present invention: The structure of the present invention is simple and compact. The chip grabbing device grabs the chips one by one, which not only facilitates the second chip detection device to detect the bottom ends of the chips on the carrier one by one, but also improves the detection accuracy of the chips. , it also facilitates the orderly placement of qualified chips on another carrier one by one, which is beneficial to subsequent processing, or transports unqualified chips to a scrap recycling structure for recycling. The feeding device transports the carrier to the first chip detection device, and the top of the chip is synchronously and quickly detected by the first chip detection device, thereby improving the detection efficiency of the chip. By coordinating the chip grabbing device and the feeding device with each different work station, fully automatic detection and selection of chips is realized.
附图说明Description of drawings
图1为本发明的立体结构示意图。Figure 1 is a schematic three-dimensional structural diagram of the present invention.
图2为本发明的送料装置、第一料仓和第一芯片检测装置的立体结构示意图。Figure 2 is a schematic three-dimensional structural diagram of the feeding device, the first bunker and the first chip detection device of the present invention.
图3为本发明的送料装置和第一料仓的立体结构示意图。Figure 3 is a schematic three-dimensional structural diagram of the feeding device and the first silo of the present invention.
图4为本发明的局部立体结构示意图。Figure 4 is a partial three-dimensional structural diagram of the present invention.
图5为本发明的第一抓取装置机构的立体结构示意图一。Figure 5 is a schematic diagram of the first three-dimensional structure of the first grabbing device mechanism of the present invention.
图6为本发明的第一抓取装置机构的立体结构示意图二。Figure 6 is a second schematic diagram of the three-dimensional structure of the first grabbing device mechanism of the present invention.
图7为本发明的第一抓取装置机构的局部立体结构示意图。Figure 7 is a partial three-dimensional structural diagram of the first grabbing device mechanism of the present invention.
附图标记说明:Explanation of reference symbols:
1、机架;2、第一料仓;3、送料装置;4、第一芯片检测装置;5、芯片抓取装置;6、扩膜装置;7、废料回收结构;8、第二芯片检测装置;9、贴装工作台;10、第一移动机构;11、第二移动机构;12、第二视觉检测装置;13、第三视觉检测装置;14、顶料装置;15、第二送料机构;16、第二料仓;17、第三送料机构;18、第三料仓;31、检测台;32、转运机构;33、第一送料机构;34、调节机构;35、取料机构;36、滑轨;37、直线驱动器;38、夹持件;39、放置台;51、第一抓取装置机构;52、第二抓取装置机构;53、中转台;54、第一视觉检测装置;55、摆臂驱动组件;56、摆臂本体;57、吸料组件;58、安装座;59、第一旋转驱动器;60、第二旋转驱动器;61、连接组件;62、输出轴;63、偏心轴;64、驱动件;65、摆动件;66、套筒。1. Frame; 2. First silo; 3. Feeding device; 4. First chip detection device; 5. Chip grabbing device; 6. Film expansion device; 7. Waste recycling structure; 8. Second chip detection Device; 9. Mounting workbench; 10. First moving mechanism; 11. Second moving mechanism; 12. Second visual inspection device; 13. Third visual inspection device; 14. Ejecting device; 15. Second feeding device Mechanism; 16. Second silo; 17. Third feeding mechanism; 18. Third silo; 31. Inspection table; 32. Transfer mechanism; 33. First feeding mechanism; 34. Adjustment mechanism; 35. Retrieval mechanism ; 36. Slide rail; 37. Linear drive; 38. Clamp; 39. Placement table; 51. First grabbing device mechanism; 52. Second grabbing device mechanism; 53. Transfer table; 54. First vision Detection device; 55. Swing arm drive assembly; 56. Swing arm body; 57. Suction assembly; 58. Mounting seat; 59. First rotary driver; 60. Second rotary driver; 61. Connection assembly; 62. Output shaft ; 63. Eccentric shaft; 64. Driving part; 65. Swinging part; 66. Sleeve.
具体实施方式Detailed ways
为了便于本领域技术人员的理解,下面结合实施例与附图对本发明作进一步的说明,实施方式提及的内容并非对本发明的限定。In order to facilitate the understanding of those skilled in the art, the present invention will be further described below in conjunction with the embodiments and drawings. The contents mentioned in the embodiments do not limit the present invention.
如图1至图7所示,本发明提供的一种芯片检测挑选机,其包括机架1及分别设置于机架1上的第一料仓2、送料装置3、第一芯片检测装置4、芯片抓取装置5、扩膜装置6、废料回收结构7、第二芯片检测装置8和贴装工作台9,所述第一料仓2内储存有多个载具;所述送料装置3在第一料仓2、第一芯片检测装置4和扩膜装置6之间往复运动,以将载具逐一地从第一料仓2依序输送至第一芯片检测装置4和扩膜装置6,所述第一芯片检测装置4用于对送料装置3所输送的载具上的多个芯片的顶端的表面同步进行检测;所述扩膜装置6用于放置载具并能将载具上的薄膜张紧;所述贴装工作台9上吸附有载具;所述芯片抓取装置5能在扩膜装置6、第二芯片检测装置8、废料回收结构7和贴装工作台9之间往复运动,以将扩膜后的载具的薄膜上的芯片输送第二芯片检测装置8,通过第二芯片检测装置8对芯片抓取装置5所抓取或输送的芯片的底端的表面进行检测后,第二芯片检测装置8根据检测结果选择将芯片贴装至贴装工作台9的载具的薄膜上或输送至废料回收结构7;所述废料回收结构7用于回收芯片。As shown in Figures 1 to 7, the present invention provides a chip detection and sorting machine, which includes a frame 1 and a first bin 2, a feeding device 3, and a first chip detection device 4 respectively arranged on the frame 1 , chip grabbing device 5, film expansion device 6, waste recycling structure 7, second chip detection device 8 and placement workbench 9, the first bin 2 stores multiple carriers; the feeding device 3 Reciprocating movement between the first bin 2, the first chip detection device 4 and the film expansion device 6 to transport the carriers one by one from the first bin 2 to the first chip detection device 4 and the film expansion device 6 in sequence , the first chip detection device 4 is used to simultaneously detect the surfaces of the tops of multiple chips on the carrier transported by the feeding device 3; the film expansion device 6 is used to place the carrier and can place the carrier on the carrier. The film is tensioned; a carrier is adsorbed on the mounting workbench 9; the chip grabbing device 5 can be used between the film expansion device 6, the second chip detection device 8, the waste recycling structure 7 and the mounting workbench 9 The second chip detection device 8 performs a reciprocating motion to transport the chips on the expanded film of the carrier to the second chip detection device 8 . The surface of the bottom end of the chip captured or transported by the chip grabbing device 5 is inspected by the second chip detection device 8 . After detection, the second chip detection device 8 chooses to mount the chip on the film of the carrier of the mounting workbench 9 or transport it to the waste recycling structure 7 according to the detection result; the waste recycling structure 7 is used to recycle the chip.
具体地,所述扩膜装置6和贴装工作台9分别位于芯片抓取装置5的两侧。所述载具包括铁环和薄膜,所述薄膜封装在铁环上,多个芯片分别贴设于薄膜上。所述第一料仓2内储存的载具为满载状态,即载具上贴装有多个芯片;所述贴装工作台9上吸附的载具为空载状态,即载具等待贴装芯片。Specifically, the film expansion device 6 and the mounting workbench 9 are located on both sides of the chip grabbing device 5 respectively. The carrier includes an iron ring and a film, the film is packaged on the iron ring, and a plurality of chips are respectively attached to the film. The carriers stored in the first bin 2 are in a fully loaded state, that is, multiple chips are mounted on the carriers; the carriers adsorbed on the mounting workbench 9 are in an empty state, that is, the carriers are waiting for placement. chip.
一种芯片检测挑选方法,其包括前文所述芯片检测挑选机,芯片检测挑选方法步骤如下:A chip detection and selection method, which includes the chip detection and selection machine mentioned above. The steps of the chip detection and selection method are as follows:
步骤一:送料装置3将第一料仓2内的载具取出,并将载具输送至第一芯片检测装置4;Step 1: The feeding device 3 takes out the carrier in the first bin 2 and transports the carrier to the first chip detection device 4;
步骤二:通过第一芯片检测装置4对载具上的多个芯片的顶端同步进行检测、对载具上的条码进行识别或/和对载具与送料装置3的工作端之间的相对位置检测,并将检测后的信号分别发送至送料装置3和芯片抓取装置5;Step 2: Use the first chip detection device 4 to simultaneously detect the tops of multiple chips on the carrier, identify the barcode on the carrier, or/and determine the relative position between the carrier and the working end of the feeding device 3 Detect and send the detected signals to the feeding device 3 and the chip grabbing device 5 respectively;
步骤三:送料装置3继续将检测后的载具输送至扩膜装置6,通过扩膜装置6放置载具并将载具上的薄膜张紧;Step 3: The feeding device 3 continues to transport the detected carrier to the film expansion device 6, places the carrier through the film expansion device 6 and tensions the film on the carrier;
通过第一芯片检测装置4对载具与送料装置3的工作端之间的相对位置检测,便于送料装置3将载具精准地输送至扩膜装置6上。The first chip detection device 4 detects the relative position between the carrier and the working end of the feeding device 3, so that the feeding device 3 can accurately transport the carrier to the film expansion device 6.
步骤四:芯片抓取装置5逐一抓取张紧后的载具的薄膜上的芯片至第二芯片检测装置8;Step 4: The chip grabbing device 5 grabs the chips on the film of the tensioned carrier one by one to the second chip detection device 8;
步骤五:通过第二芯片检测装置8对芯片抓取装置5抓取的芯片的底端的表面进行检测,并将检测后的信号发送至芯片抓取装置5;Step 5: Use the second chip detection device 8 to detect the surface of the bottom end of the chip captured by the chip grabbing device 5, and send the detected signal to the chip grabbing device 5;
步骤六:贴装工作台9上吸附有待贴装的载具;若第一芯片检测装置4和第二芯片检测装置8发送至芯片抓取装置5的芯片检测结果均为合格,则芯片抓取装置5继续输送芯片至贴装工作台9,并将芯片贴装在贴装工作台9所吸附的载具上;若第一芯片检测装置4或第二芯片检测装置8发送至芯片抓取装置5的芯片检测结果有一个为不合格,则芯片抓取装置5继续输送芯片至废料回收结构7,通过废料回收结构7对芯片进行回收;Step 6: The carrier to be mounted is adsorbed on the mounting workbench 9; if the chip detection results sent by the first chip detection device 4 and the second chip detection device 8 to the chip capture device 5 are both qualified, the chip capture The device 5 continues to transport the chip to the mounting workbench 9, and mounts the chip on the carrier adsorbed by the mounting workbench 9; if the first chip detection device 4 or the second chip detection device 8 sends it to the chip grabbing device If one of the 5 chip test results is unqualified, the chip grabbing device 5 continues to transport the chip to the waste recycling structure 7, and the chip is recycled through the waste recycling structure 7;
步骤七:芯片抓取装置5和送料装置3分别复位。Step 7: The chip grabbing device 5 and the feeding device 3 are reset respectively.
重复上述动作,从而实现芯片的自动检测和挑选。本发明的结构简单紧凑,通过芯片抓取装置5逐一抓取芯片,不但便于第二芯片检测装置8对载具上的芯片的底端逐一进行检测,提高了芯片的检测精准度,还便于将检测合格的芯片逐一有序的贴装在另一载具上,有利于后续的加工,或将检测不合格的芯片之间输送至废料回收结构7进行回收,芯片的输送步骤简单。送料装置3输送载具至第一芯片检测装置4,通过第一芯片检测装置4对芯片的顶部进行同步快速地检测,提高了芯片的检测效率。通过芯片抓取装置5和送料装置3分别与各个不同工位配合,实现了芯片的全自动检测和挑选。Repeat the above actions to achieve automatic detection and selection of chips. The structure of the present invention is simple and compact. The chip grabbing device 5 grabs the chips one by one, which not only facilitates the second chip detection device 8 to detect the bottom ends of the chips on the carrier one by one, improves the detection accuracy of the chips, but also facilitates the detection of the chips. The chips that pass the test are mounted on another carrier one by one in an orderly manner, which is beneficial to subsequent processing, or the chips that fail the test are transported to the scrap recycling structure 7 for recycling. The transport steps of the chips are simple. The feeding device 3 transports the carrier to the first chip detection device 4, and the top of the chip is detected synchronously and quickly through the first chip detection device 4, thereby improving the detection efficiency of the chip. By cooperating with each different work station respectively, the chip grabbing device 5 and the feeding device 3 realize fully automatic detection and selection of chips.
具体地,所述废料回收结构7包括废料回收框,芯片抓取装置5将不合格的芯片输送至废料回收框的上方后松开,芯片自动掉落至废料回收框内进行回收。Specifically, the scrap recycling structure 7 includes a scrap recycling frame. The chip grabbing device 5 transports unqualified chips to the top of the scrap recycling frame and then releases them. The chips automatically fall into the scrap recycling frame for recycling.
进一步地,所述芯片检测挑选机还包括分别设置于机架1上的第二送料机构15及第二料仓16,所述第二送料机构15用于将扩膜装置6上的载具输送至第二料仓16内;所述第二料仓16用于存储载具。具体地,所述第二料仓16升降地设置于机架1上,便于第二料仓16的储料高度与第二送料机构15的输出端相适应。所述第二送料机构15和第二料仓16分别设置于扩膜装置6的周向。Furthermore, the chip detection and sorting machine also includes a second feeding mechanism 15 and a second bunker 16 respectively provided on the frame 1. The second feeding mechanism 15 is used to transport the carrier on the film expansion device 6. to the second bin 16; the second bin 16 is used to store carriers. Specifically, the second silo 16 is disposed on the frame 1 in an elevating manner, so that the material storage height of the second silo 16 can be adapted to the output end of the second feeding mechanism 15 . The second feeding mechanism 15 and the second silo 16 are respectively arranged in the circumferential direction of the film expansion device 6 .
在实际使用过程中,芯片抓取装置5将扩膜装置6的载具上的芯片全部挑选完毕后,然后第二送料机构15再将扩膜装置6上的载具输送至第二料仓16内进行存储,然后送料装置3再将另一满载的载具输送至哭摸装置6,提高了本发明的自动化程度。In actual use, after the chip grabbing device 5 selects all the chips on the carrier of the film expansion device 6, the second feeding mechanism 15 then transports the carriers on the film expansion device 6 to the second silo 16 It is stored in the container, and then the feeding device 3 transports another fully loaded carrier to the touching device 6, which improves the automation level of the present invention.
进一步地,所述芯片检测挑选机还包括分别设置于机架1上的第三送料机构17及第三料仓18,所述第三送料机构17用于将贴装工作台9上的载具输送至第三料仓18内或件第三料仓18内的载具输送至贴装工作台9上;所述第三料仓18用于存储载具。Furthermore, the chip detection and sorting machine also includes a third feeding mechanism 17 and a third bunker 18 respectively provided on the frame 1 . The third feeding mechanism 17 is used to transfer the carrier on the mounting workbench 9 The carriers transported into the third bin 18 or the parts in the third bin 18 are transported to the mounting workbench 9; the third bin 18 is used to store the carriers.
具体地,所述第三料仓18升降地设置于机架1上,便于第三料仓18的储料高度与第三送料机构17的输出端相适应。当贴装工作台9上的载具上贴满芯片后,通过第三送料机构17将贴装工作台9上的载具输送至第三料仓18进行储存,然后第三料仓18上升或下降,使得料仓内的待贴装的载具的高度与第三送料机构17的输出端的高度相适应,然后第三送料机构17再将料仓内待贴装芯片的载具输送至贴装工作台9上等待贴装,进一步提高了本发明的自动化程度。Specifically, the third silo 18 is disposed on the frame 1 in an elevating manner, so that the material storage height of the third silo 18 can be adapted to the output end of the third feeding mechanism 17 . When the carrier on the placement workbench 9 is filled with chips, the carrier on the placement workbench 9 is transported to the third bin 18 for storage through the third feeding mechanism 17, and then the third bin 18 rises or Descend so that the height of the carrier to be mounted in the bin is adapted to the height of the output end of the third feeding mechanism 17, and then the third feeding mechanism 17 transports the carrier of the chip to be mounted in the bin to the placement Waiting for mounting on the workbench 9 further improves the degree of automation of the present invention.
进一步地,所述送料装置3包括检测台31及分别设置于机架1上的转运机构32、第一送料机构33、调节机构34和取料机构35;所述调节机构34的输出端与检测台31连接;所述取料机构35用于将第一料仓2内的载具取出,所述转运机构32能在取料机构35、检测台31和第一送料机构33之间往复运动,以将取料机构35取出的载具依次输送至检测台31及第一送料机构33;所述调节机构34用于带动检测台31在第一芯片检测装置4和转运机构32之间往复运动;所述检测台31用于吸附载具;所述第一芯片检测装置4用于对检测台31上的芯片进行检测;所述第一送料机构33用于将载具输送至扩膜装置6。Further, the feeding device 3 includes a detection platform 31 and a transfer mechanism 32, a first feeding mechanism 33, an adjustment mechanism 34 and a retrieval mechanism 35 respectively provided on the frame 1; the output end of the adjustment mechanism 34 is connected to the detection mechanism. The platform 31 is connected; the retrieval mechanism 35 is used to take out the carrier in the first bin 2, and the transfer mechanism 32 can reciprocate between the retrieval mechanism 35, the detection platform 31 and the first feeding mechanism 33. The carriers taken out by the material picking mechanism 35 are sequentially transported to the detection stage 31 and the first feeding mechanism 33; the adjustment mechanism 34 is used to drive the detection stage 31 to reciprocate between the first chip detection device 4 and the transfer mechanism 32; The detection stage 31 is used to adsorb the carrier; the first chip detection device 4 is used to detect the chip on the detection stage 31 ; the first feeding mechanism 33 is used to transport the carrier to the film expansion device 6 .
在实际使用过程中,取料机构35、调节机构34和第一送料机构33沿转运机构32的输送方向依次设置。通过取料机构35将第一料仓2内的载具取出并将载具输送至转运机构32的输出端的下方,与此同时,调节机构34带动检测台31移动至转运机构32的输出端的下方,然后通过转运机构32将载具从取料机构35输送至检测台31,然后调节机构34继续带动检测台31运动至第一芯片检测装置4的下方,第一芯片检测装置4检测完毕后,调节机构34带动检测台31移动至转运机构32的输出端,转运机构32继续输送此载具至第一送料机构33,通过第一送料机构33再将载具输送至扩膜装置6,等待进一步芯片检测。本发明增设调节机构34,便于检测台31配合转运机构32和第一芯片检测装置4的不同位置需求,有利于载具精准稳定的移动及芯片的快速检测。具体地,所述转运机构32可采用现有的多轴直线模组和夹爪气缸配合的驱动结构,所述调节机构34可采用现有的多轴直线模组,在此不再赘述。所述第一料仓2经由升降驱动器与机架1连接,升降设置的第一料仓2,使得载具在水平方向上的高度与取料机构35的输出端相适应。During actual use, the material picking mechanism 35 , the adjusting mechanism 34 and the first feeding mechanism 33 are arranged in sequence along the conveying direction of the transfer mechanism 32 . The carriers in the first bin 2 are taken out through the retrieval mechanism 35 and transported to below the output end of the transfer mechanism 32. At the same time, the adjustment mechanism 34 drives the detection table 31 to move below the output end of the transfer mechanism 32. , and then the carrier is transported from the picking mechanism 35 to the detection platform 31 through the transfer mechanism 32, and then the adjustment mechanism 34 continues to drive the detection platform 31 to move below the first chip detection device 4. After the first chip detection device 4 completes the detection, The adjustment mechanism 34 drives the detection platform 31 to move to the output end of the transfer mechanism 32. The transfer mechanism 32 continues to transport the carrier to the first feeding mechanism 33, and then transports the carrier to the film expansion device 6 through the first feeding mechanism 33, waiting for further steps. Chip detection. The present invention adds an adjustment mechanism 34 to facilitate the detection platform 31 to meet the different position requirements of the transfer mechanism 32 and the first chip detection device 4, which is beneficial to the accurate and stable movement of the carrier and the rapid detection of chips. Specifically, the transfer mechanism 32 can use the existing multi-axis linear module and the drive structure of the clamping jaw cylinder, and the adjustment mechanism 34 can use the existing multi-axis linear module, which will not be described again here. The first silo 2 is connected to the frame 1 via a lifting drive, and the first silo 2 is raised and lowered so that the height of the carrier in the horizontal direction is adapted to the output end of the picking mechanism 35 .
进一步地,所述第一送料机构33包括设置于机架1上的滑轨36、设置于滑轨36上的直线驱动器37、与滑轨36滑动连接的夹持件38及设置于机架1上并分别位于滑轨36的两侧的两个放置台39,所述转运机构32用于将检测后的载具转运至两个放置台39上,两个放置台39配合以支撑载具,所述夹持件38的输出端与直线驱动器37连接,所述夹持件38能夹持载具,所述直线驱动器37用于带动夹持件38靠近或远离扩膜装置6。Further, the first feeding mechanism 33 includes a slide rail 36 provided on the frame 1 , a linear driver 37 provided on the slide rail 36 , a clamping member 38 slidingly connected to the slide rail 36 and a clamping member 38 provided on the frame 1 The transfer mechanism 32 is used to transfer the detected carrier to the two placement platforms 39 and is located on both sides of the slide rail 36 respectively. The two placement platforms 39 cooperate to support the carrier. The output end of the clamping member 38 is connected to a linear driver 37 , the clamping member 38 can clamp the carrier, and the linear driver 37 is used to drive the clamping member 38 toward or away from the film expansion device 6 .
在实际使用过程中,所述直线驱动器37看采用现有的电机与丝杆配合的驱动结构。通过直线驱动器37带动夹持件38沿滑轨36的长度方向相对于滑轨36滑动,夹持件38靠近载具并夹持位于放置台39上的载具,然后直线驱动器37继续带动载具向靠近扩膜装置6的方向运动,夹持件38穿过两个放置台39后将载具放置于扩膜装置6上。将两个放置台39间分别设置于滑轨36的两个,放置于放置台39上的载具的高度与夹持件38的高度相适应,不但便于夹持件38夹持载具,还能避免对夹持件38的输送运动造成干涉。第一送料机构33的结构简单且巧妙,实现了载具的快速转运。取料机构35、第二送料机构15和第三送料机构17与第一送料机构33的结构相同或相似,所述夹持件38可采用现有的气缸夹爪,在此不再赘述。In actual use, the linear driver 37 adopts an existing driving structure in which a motor and a screw rod cooperate. The linear drive 37 drives the clamping member 38 to slide relative to the slide rail 36 along the length direction of the slide rail 36. The clamping member 38 approaches the carrier and clamps the carrier located on the placement table 39, and then the linear drive 37 continues to drive the carrier. Moving in a direction closer to the film expansion device 6 , the clamping member 38 passes through the two placement stages 39 and then places the carrier on the film expansion device 6 . The two placement platforms 39 are respectively arranged on two of the slide rails 36. The height of the carrier placed on the placement platform 39 is adapted to the height of the clamping member 38. This not only facilitates the clamping member 38 to clamp the carrier, but also facilitates the clamping member 38 to hold the carrier. Interference with the conveying movement of the clamping member 38 can be avoided. The structure of the first feeding mechanism 33 is simple and ingenious, realizing rapid transfer of the carrier. The material picking mechanism 35, the second feeding mechanism 15 and the third feeding mechanism 17 have the same or similar structure as the first feeding mechanism 33. The clamping member 38 can use an existing cylinder clamp, which will not be described again here.
进一步地,所述芯片抓取装置5包括分别设置于机架1上的第一抓取装置机构51、中转台53和第二抓取装置机构52,所述第一抓取装置机构51用于在扩膜装置6、第二芯片检测装置8、废料回收结构7和中转台53之间往复运动,以将扩膜后的薄膜上的芯片输送至第二芯片检测装置8,通过第二芯片检测装置8对芯片进行检测后,第一抓取装置机构51根据检测结果选择将芯片输送至中转台53或废料回收结构7;所述第二抓取装置机构52用于在中转台53和贴装工作台9之间往复运动,以将中转台53上的芯片输送至贴装至贴装工作台9所放置的载具的薄膜上。Further, the chip grabbing device 5 includes a first grabbing device mechanism 51, a transfer platform 53 and a second grabbing device mechanism 52 respectively provided on the frame 1. The first grabbing device mechanism 51 is used for The film expansion device 6, the second chip detection device 8, the waste recycling structure 7 and the transfer table 53 move back and forth to transport the chips on the expanded film to the second chip detection device 8, and pass the second chip detection After the device 8 detects the chip, the first grabbing device mechanism 51 selects to transport the chip to the transfer table 53 or the waste recycling structure 7 according to the detection results; the second grabbing device mechanism 52 is used to transfer the chip to the transfer table 53 and the placement The worktables 9 reciprocate to transport the chips on the transfer table 53 to the film mounted on the carrier placed on the placement worktable 9 .
具体地,所述芯片抓取装置5还包括用于对中转台53上的芯片的位置进行检测的第一视觉检测装置54。在实际使用过程中,第一抓取装置机构51抓取扩膜后的芯片至第二芯片检测装置8进行检测,并将检测合格的芯片输送至中转台53,通过第一视觉检测装置54分析芯片位于中转台53上的位置,然后将芯片的位置信息发送至第二抓取装置机构52,便于第二抓取装置机构52精准的抓取芯片,还有利于第二抓取装置机构52精准地将芯片贴装至贴装工作台9的薄片上,提高了芯片与薄片的位置精度,有利于芯片整齐有序的放置于薄片上。芯片与薄片之间可采用胶黏的方式固定。Specifically, the chip grabbing device 5 also includes a first visual detection device 54 for detecting the position of the chip on the transfer table 53 . During actual use, the first grabbing device mechanism 51 grabs the expanded chips and sends them to the second chip detection device 8 for detection, and transports the qualified chips to the transfer stage 53 for analysis by the first visual detection device 54 The chip is located on the transfer platform 53, and then the position information of the chip is sent to the second grabbing device mechanism 52, which facilitates the second grabbing device mechanism 52 to accurately grab the chip, and also facilitates the second grabbing device mechanism 52 to accurately grab the chip. Mounting the chip on the sheet on the mounting workbench 9 improves the positional accuracy of the chip and the sheet, which is beneficial to placing the chips on the sheet in an orderly manner. The chip and the sheet can be fixed by adhesive.
进一步地,所述芯片检测挑选机还包括分别设置于机架1上的第一移动机构10和第二移动机构11,所述扩膜装置6与第一移动机构10的输出端连接;所述贴装工作台9与第二移动机构11的输出端连接。Further, the chip detection and sorting machine also includes a first moving mechanism 10 and a second moving mechanism 11 respectively provided on the frame 1, and the film expansion device 6 is connected to the output end of the first moving mechanism 10; The mounting workbench 9 is connected to the output end of the second moving mechanism 11 .
当第一抓取装置机构51需要抓取扩膜装置6上的芯片时,第一移动机构10带动扩膜装置6相对于机架1移动,使得待抓取的芯片移动至芯片抓取装置5的下方,便于芯片抓取装置5下一次抓取芯片。当第二抓取装置机构52需要将芯片贴附在贴装工作台9的载具上时,第二移动机构11带动贴装工作台9相对于机架1移动,使得待放置芯片的位置移动至芯片抓取装置5的下方,便于芯片抓取装置5下一次贴装或放置芯片。第一移动机构10和第二移动机构11均可采用直线驱动模组。When the first grabbing device mechanism 51 needs to grab the chip on the film expansion device 6 , the first moving mechanism 10 drives the film expansion device 6 to move relative to the frame 1 so that the chip to be grabbed moves to the chip grabbing device 5 below to facilitate the chip grabbing device 5 to grab the chip next time. When the second grabbing device mechanism 52 needs to attach the chip to the carrier of the placement workbench 9, the second moving mechanism 11 drives the placement workbench 9 to move relative to the frame 1, so that the position where the chip is to be placed moves. to the bottom of the chip grabbing device 5 to facilitate the chip grabbing device 5 to mount or place chips next time. Both the first moving mechanism 10 and the second moving mechanism 11 can adopt linear drive modules.
进一步地,所述芯片检测挑选机还包括分别设置于机架1上的第二视觉检测装置12和第三视觉检测装置13,所述第二视觉检测装置12用于检测扩膜装置6上待抓取的芯片是否移动至第一抓取装置机构51的工作端的下方;所述第三视觉检测装置13用于检测贴装工作台9上的薄膜上的待放置芯片的位置是否移动至第二抓取装置机构52的工作端的下方。Furthermore, the chip detection and sorting machine also includes a second visual detection device 12 and a third visual detection device 13 respectively provided on the frame 1. The second visual detection device 12 is used to detect the chips to be processed on the film expansion device 6. Whether the captured chip moves to below the working end of the first grabbing device mechanism 51; the third visual detection device 13 is used to detect whether the position of the chip to be placed on the film on the mounting workbench 9 moves to the second Below the working end of the gripper mechanism 52 .
在实际使用过程中,通过第一移动机构10带动扩膜装置6相对于机架1移动,使得待抓取的芯片移动至芯片抓取装置5的下方,第二视觉检测装置12检测移动后的待抓取的芯片是否移动到位,进一步提高第一抓取装置机构51抓取芯片的精准度。通过第二移动机构11带动贴装工作台9相对于机架1移动,使得待放置芯片的位置移动至芯片抓取装置5的下方,第二抓取装置机构52将芯片贴装后,第三视觉检测装置13还能对芯片的位置和芯片的顶端的表面进行视觉复检,检测芯片是否贴装到位或芯片表面是否合格,不但进一步提高第二抓取装置机构52抓取芯片的精准度,还提高了芯片的检测精准度。During actual use, the first moving mechanism 10 drives the film expansion device 6 to move relative to the frame 1 so that the chips to be grabbed move below the chip grabbing device 5 , and the second visual detection device 12 detects the moved chips. Whether the chip to be grabbed is moved into place will further improve the accuracy of the first grabbing device mechanism 51 in grabbing the chip. The second moving mechanism 11 drives the mounting workbench 9 to move relative to the frame 1, so that the position where the chip is to be placed moves to the bottom of the chip grabbing device 5. After the second grabbing device mechanism 52 mounts the chip, the third The visual inspection device 13 can also perform a visual re-inspection of the position of the chip and the surface of the top of the chip to detect whether the chip is mounted in place or whether the chip surface is qualified, which not only further improves the accuracy of the second grabbing device mechanism 52 in grabbing the chip, It also improves the detection accuracy of the chip.
进一步地,所述芯片检测挑选机还包括顶料装置14,所述顶料装置14用于将扩膜后的薄片顶起。Furthermore, the chip detection and sorting machine also includes a lifting device 14, which is used to lift the expanded sheet.
在实际使用过程中,所述顶料装置14包括顶料驱动器及设置于顶料驱动器的输出端的顶料件,所述顶料驱动器可采用现有的气缸。通过顶料驱动器带动顶料件向上顶起薄片,顶料件顶起薄片处的芯片向上凸起,便于第一抓取装置机构51吸取。所述顶料件与第二视觉检测装置12的中心轴位于同一竖直线上。第二视觉检测装置12还能将检测到的芯片在薄膜上的位置传递至顶料驱动器,顶料驱动器根据接收到的位置信号带动顶料件运动至第一抓取装置机构51待吸取的芯片的下方并将其顶起,芯片的顶起方便且精准。In actual use, the ejection device 14 includes an ejection driver and an ejection piece provided at the output end of the ejection driver. The ejection driver can use an existing cylinder. The ejector driver drives the ejector member to push up the sheet, and the chip where the ejector member pushes up the sheet bulges upward, making it easier for the first grabbing device mechanism 51 to pick up. The central axis of the ejection piece and the second visual inspection device 12 are located on the same vertical line. The second visual detection device 12 can also transmit the detected position of the chip on the film to the ejection driver. The ejection driver drives the ejection piece to move to the chip to be picked up by the first grabbing device mechanism 51 according to the received position signal. and lift it up. The chip is lifted up conveniently and accurately.
进一步地,所述第一抓取装置机构51包括设置于机架1上的摆臂驱动组件55、设置于摆臂驱动组件55的输出端的摆臂本体56及设置于摆臂本体56上的吸料组件57,所述摆臂驱动组件55用于带动摆臂本体56旋转及升降,以便于吸料组件57转动至扩膜装置6、第二芯片检测装置8和中转台53,还便于吸料组件57吸取或释放芯片。Further, the first grabbing device mechanism 51 includes a swing arm drive assembly 55 disposed on the frame 1 , a swing arm body 56 disposed at the output end of the swing arm drive assembly 55 , and a suction pump disposed on the swing arm body 56 . Material assembly 57, the swing arm driving assembly 55 is used to drive the swing arm body 56 to rotate and lift, so that the suction assembly 57 can rotate to the film expansion device 6, the second chip detection device 8 and the transfer table 53, and also facilitate the suction of materials. Component 57 picks up or releases the chip.
在实际使用过程中,所述摆臂驱动组件55可采用现有的旋转驱动器与升降驱动器配合的结构。所述吸料组件57可采用现有的吸盘组件。通过摆臂驱动组件55带动摆臂本体56和吸料组件57转动,摆臂本体56以摆臂驱动组件55的输出端与摆臂本体56的连接处为轴转动,摆臂本体56上的吸料组件57能精准地旋转至扩膜装置6、第二芯片检测装置8和中转台53的上方,通过摆臂驱动组件55带动摆臂本体56和吸料组件57升降以便于吸料组件57吸取或释放芯片。第一抓取装置机构51的机构简单、芯片的输送精准方便。In actual use, the swing arm driving assembly 55 can adopt an existing structure in which a rotary driver and a lifting driver cooperate. The suction component 57 can use an existing suction cup component. The swing arm body 56 and the suction assembly 57 are driven to rotate by the swing arm driving assembly 55. The swing arm body 56 rotates with the connection between the output end of the swing arm driving assembly 55 and the swing arm body 56 as an axis. The material assembly 57 can accurately rotate to the top of the film expansion device 6, the second chip detection device 8 and the transfer table 53. The swing arm driving assembly 55 drives the swing arm body 56 and the suction assembly 57 to rise and fall to facilitate the suction assembly 57 to absorb the material. Or release the chip. The first grabbing device mechanism 51 has a simple mechanism and can transport chips accurately and conveniently.
进一步地,所述摆臂驱动组件55包括设置于机架1上的安装座58、分别设置于安装座58上的第一旋转驱动器59和第二旋转驱动器60、设置于第一旋转驱动器59的输出端的连接组件61、设置于第二旋转驱动器60的输出端的输出轴62、与输出轴62偏心连接的偏心轴63、一端与偏心轴63转动连接的摆动件65及与摆动件65的另一端转动连接的驱动件64,所述摆臂本体56与连接组件61滑动连接,所述驱动件64用于与摆臂本体56驱动连接;所述第一旋转驱动器59能用于带动连接组件61和摆臂本体56转动;所述第二旋转驱动器60用于带动输出轴62转动,所述输出轴62通过偏心轴63、摆动件65和驱动件64带动摆臂本体56相对于连接组件61升降地滑动。Further, the swing arm driving assembly 55 includes a mounting base 58 provided on the frame 1 , a first rotation driver 59 and a second rotation driver 60 respectively provided on the mounting base 58 , and The connecting component 61 at the output end, the output shaft 62 provided at the output end of the second rotary driver 60 , the eccentric shaft 63 eccentrically connected to the output shaft 62 , the swinging member 65 with one end rotatably connected to the eccentric shaft 63 and the other end of the swinging member 65 The driving member 64 is rotationally connected. The swing arm body 56 is slidingly connected to the connecting assembly 61. The driving member 64 is used for driving connection with the swing arm body 56; the first rotating driver 59 can be used to drive the connecting assembly 61 and the connecting assembly 61. The swing arm body 56 rotates; the second rotary driver 60 is used to drive the output shaft 62 to rotate, and the output shaft 62 drives the swing arm body 56 to rise and fall relative to the connecting assembly 61 through the eccentric shaft 63, the swing member 65 and the driving member 64. slide.
具体地,所述驱动件64的顶端与摆臂本体56抵触,所述摆臂本体56能相对于驱动件64转动,所述输出轴62和偏心轴63均平行于水平面设置。在实际使用过程中,首先,通过吸料组件57吸取需要移动的芯片,然后第一旋转驱动器59带动连接组件61、摆臂本体56和芯片沿竖直轴转动,此时,摆臂本体56相对于驱动件64转动,直至芯片转动至合适位置。然后第二旋转驱动器60带动输出轴62和偏心轴63同步转动,通过偏心轴63带动摆动件65和驱动件64相对于竖直方向上升或下降,然后通过驱动件64带动并支撑摆臂本体56向上运动,或驱动件64向下运动不再支撑摆臂本体56,摆臂本体56在重力的作用下向下运动;摆臂本体56在升降过程中能相对于连接组件61滑动,然后吸料组件57吸取或释放芯片,从而实现芯片的自动化搬运。本发明的芯片运输方便、运输步骤简单。第一旋转驱动器59和第二旋转驱动器60均可采用旋转电机,第一旋转驱动器59和第二旋转驱动器60的运动行程精准,芯片搬运过程中的精准度高;连接组件61、摆臂本体56、驱动件64和偏心轴63的连接结构简单且紧凑,摆臂本体56的旋转和升降运动互不干涉。Specifically, the top end of the driving member 64 conflicts with the swing arm body 56, and the swing arm body 56 can rotate relative to the driving member 64. The output shaft 62 and the eccentric shaft 63 are both arranged parallel to the horizontal plane. In actual use, first, the chips that need to be moved are sucked through the suction component 57, and then the first rotation driver 59 drives the connecting component 61, the swing arm body 56 and the chip to rotate along the vertical axis. At this time, the swing arm body 56 is relatively Rotate the driving member 64 until the chip rotates to the appropriate position. Then the second rotary driver 60 drives the output shaft 62 and the eccentric shaft 63 to rotate synchronously, drives the swing member 65 and the driving member 64 to rise or fall relative to the vertical direction through the eccentric shaft 63, and then drives and supports the swing arm body 56 through the driving member 64 The swing arm body 56 moves upward, or the driving member 64 moves downward and no longer supports the swing arm body 56, and the swing arm body 56 moves downward under the action of gravity; the swing arm body 56 can slide relative to the connecting component 61 during the lifting process, and then absorb material The component 57 absorbs or releases the chip, thereby realizing automated handling of the chip. The chip of the present invention is convenient to transport and has simple transport steps. Both the first rotary driver 59 and the second rotary driver 60 can use rotary motors. The movement strokes of the first rotary driver 59 and the second rotary driver 60 are precise, and the accuracy during chip transportation is high; the connection component 61 and the swing arm body 56 The connection structure between the driving member 64 and the eccentric shaft 63 is simple and compact, and the rotation and lifting movements of the swing arm body 56 do not interfere with each other.
具体地,所述摆臂驱动组件55还包括套设于输出轴62外并与输出轴62键连接的套筒66,所述偏心轴63的一端偏心地设置于套筒66上,所述偏心轴63的另一端与摆动件65转动连接。所述第二抓取装置机构52的结构与第一抓取装置机构51的结构相同或相似,在此不再赘述。Specifically, the swing arm driving assembly 55 also includes a sleeve 66 that is sleeved outside the output shaft 62 and is keyed to the output shaft 62. One end of the eccentric shaft 63 is eccentrically arranged on the sleeve 66, and the eccentric shaft 63 is eccentrically mounted on the sleeve 66. The other end of the shaft 63 is rotatably connected to the swing member 65 . The structure of the second grabbing device mechanism 52 is the same or similar to the structure of the first grabbing device mechanism 51 and will not be described again here.
在实际使用过程中,所述偏心轴63与套筒66为一体式构造,将套筒66与输出轴62键连接后,再将偏心轴63与摆动件65转动连接,然后再将摆动件65与驱动件64连接。偏心轴63、套筒66、输出轴62和驱动件64的结构简单且连接方便。In actual use, the eccentric shaft 63 and the sleeve 66 are of an integrated structure. After the sleeve 66 is keyed to the output shaft 62, the eccentric shaft 63 is rotationally connected to the swinging member 65, and then the swinging member 65 is connected. Connected to drive member 64. The structure of the eccentric shaft 63, the sleeve 66, the output shaft 62 and the driving part 64 is simple and easy to connect.
具体地,第一芯片检测装置4和第二芯片检测装置8现可采用现有的AOI检测组件,所述第一视觉检测装置54、第二视觉检测装置12和第三视觉检测装置13均可用现有的CCD视觉检测装置;所述扩膜装置可采用现有扩膜机构;所述贴装工作台9可采用现有的芯片固晶台,在此不再赘述。Specifically, the first chip detection device 4 and the second chip detection device 8 can now use existing AOI detection components, and the first visual detection device 54 , the second visual detection device 12 and the third visual detection device 13 can all be used. The existing CCD visual inspection device; the film expansion device can use the existing film expansion mechanism; the mounting workbench 9 can use the existing chip solidification platform, which will not be described again here.
本实施例中的所有技术特征均可根据实际需要而进行自由组合。All technical features in this embodiment can be freely combined according to actual needs.
上述实施例为本发明较佳的实现方案,除此之外,本发明还可以其它方式实现,在不脱离本技术方案构思的前提下任何显而易见的替换均在本发明的保护范围之内。The above embodiments are preferred implementation solutions of the present invention. In addition, the present invention can also be implemented in other ways. Any obvious substitutions are within the protection scope of the present invention without departing from the concept of the technical solution.
Claims (10)
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118025829A (en) * | 2024-03-18 | 2024-05-14 | 珠海广浩捷科技股份有限公司 | A filter feeding and receiving device |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103372544A (en) * | 2012-04-12 | 2013-10-30 | 未来产业株式会社 | Sorting system for semiconductor element |
| CN112444734A (en) * | 2020-11-26 | 2021-03-05 | 苏州韬盛电子科技有限公司 | Chip testing machine and chip testing method |
| CN214718557U (en) * | 2021-03-08 | 2021-11-16 | 珠海市科迪电子科技有限公司 | Packaged chip test equipment |
| CN217451052U (en) * | 2022-06-07 | 2022-09-20 | 东莞广达智能科技有限公司 | Chip automated inspection sieving mechanism |
| CN115213113A (en) * | 2022-08-11 | 2022-10-21 | 昂坤视觉(北京)科技有限公司 | A preprocessing system for chip detection |
| CN115283283A (en) * | 2022-09-03 | 2022-11-04 | 韦森特(东莞)科技技术有限公司 | A Mini/Micro LED automatic test equipment and its control method |
| WO2023103493A1 (en) * | 2021-12-06 | 2023-06-15 | 河北圣昊光电科技有限公司 | Double-integrating-sphere based chip test equipment and test method |
| CN116273976A (en) * | 2023-03-27 | 2023-06-23 | 太仓井泉金属制品有限公司 | An anti-error device for frame assembly welding |
| CN220444463U (en) * | 2023-07-18 | 2024-02-06 | 广东吉洋视觉技术有限公司 | A chip picking device |
| CN220542768U (en) * | 2023-07-03 | 2024-02-27 | 广东吉洋视觉技术有限公司 | Visual inspection device of chip |
| CN220611384U (en) * | 2023-08-01 | 2024-03-19 | 广东吉洋视觉技术有限公司 | Chip detection selecting machine |
-
2023
- 2023-08-01 CN CN202310962108.8A patent/CN116727302A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103372544A (en) * | 2012-04-12 | 2013-10-30 | 未来产业株式会社 | Sorting system for semiconductor element |
| CN112444734A (en) * | 2020-11-26 | 2021-03-05 | 苏州韬盛电子科技有限公司 | Chip testing machine and chip testing method |
| CN214718557U (en) * | 2021-03-08 | 2021-11-16 | 珠海市科迪电子科技有限公司 | Packaged chip test equipment |
| WO2023103493A1 (en) * | 2021-12-06 | 2023-06-15 | 河北圣昊光电科技有限公司 | Double-integrating-sphere based chip test equipment and test method |
| CN217451052U (en) * | 2022-06-07 | 2022-09-20 | 东莞广达智能科技有限公司 | Chip automated inspection sieving mechanism |
| CN115213113A (en) * | 2022-08-11 | 2022-10-21 | 昂坤视觉(北京)科技有限公司 | A preprocessing system for chip detection |
| CN115283283A (en) * | 2022-09-03 | 2022-11-04 | 韦森特(东莞)科技技术有限公司 | A Mini/Micro LED automatic test equipment and its control method |
| CN116273976A (en) * | 2023-03-27 | 2023-06-23 | 太仓井泉金属制品有限公司 | An anti-error device for frame assembly welding |
| CN220542768U (en) * | 2023-07-03 | 2024-02-27 | 广东吉洋视觉技术有限公司 | Visual inspection device of chip |
| CN220444463U (en) * | 2023-07-18 | 2024-02-06 | 广东吉洋视觉技术有限公司 | A chip picking device |
| CN220611384U (en) * | 2023-08-01 | 2024-03-19 | 广东吉洋视觉技术有限公司 | Chip detection selecting machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118025829A (en) * | 2024-03-18 | 2024-05-14 | 珠海广浩捷科技股份有限公司 | A filter feeding and receiving device |
| CN118025829B (en) * | 2024-03-18 | 2024-11-29 | 珠海广浩捷科技股份有限公司 | Optical filter material loading receiving device |
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