CN116620846A - Substrate distributing machine and control method thereof - Google Patents

Abstract

The invention provides a substrate distributor, which is used for driving a substrate in a mother box to move to a plurality of sub boxes, wherein the mother box and the sub boxes belong to a material box, and the distributor comprises: the mechanical arm assembly drives the base plate of the mother box to move towards the placement station of the child box; the cabinet body comprises a containing cavity for containing the mechanical arm component, wherein a moving component is further arranged in the containing cavity, and a substrate placing station of the moving component with a mover box and one substrate in the mother box are positioned on the same horizontal plane; and the position resistance alarm assembly is fixedly arranged at the end part of the mechanical arm assembly, and the mechanical arm assembly and the position resistance alarm assembly are matched to drive the substrate in the mother box to move towards one substrate placing station of the sub-boxes. Through robotic arm subassembly and remove subassembly and hinder position alarm component cooperation, drive the base plate and follow female box to the motion of sub-box to prevent to appear dropping, breaking, mistake touch gold thread or damage gold thread's condition in the extraction process.

Description

A substrate distributor and its control method

technical field

The invention relates to the field of distributing machines, in particular to a substrate distributing machine.

Background technique

At present, the lead frame or substrate on which several chips are mounted is relatively thin and soft. After the wire bonding process, the many gold wires connecting the connection points of the chip and the lead frame or substrate are also extremely fragile. The materials are manually extracted for collection and distribution. It is easy to drop, break, touch the gold wire by mistake and damage the gold wire during operation.

At the same time, manually checking the work order information for the material distribution operation is prone to information reading errors, wrong quantity distribution, and missing materials.

Contents of the invention

In order to solve the above technical problems, the present invention proposes a substrate distributing machine, which is used to drive the substrate in the mother box to move to multiple sub-boxes. Both the mother box and the sub-boxes belong to the material box. The distributing machine includes:

The mechanical arm assembly drives the substrate of the mother box to move towards the child box;

Cabinet, which includes:

An accommodating chamber for accommodating the mechanical arm assembly, and a moving assembly is also provided in the accommodating chamber, and the moving assembly drives the substrate placement station of the sub-box to be at the same level as one of the substrates in the mother box;

The resistance alarm component is fixed at the end of the mechanical arm component, and the mechanical arm component and the resistance alarm component cooperate to drive the substrate in the mother box to move to one of the substrate placement stations in the sub-box.

Preferably, the resistance alarm assembly includes: a positioning block, the positioning block is fixedly arranged on the end of the four-axis robot arm, and the lower surface of the positioning block is fixedly provided with a first slide rail, and the length direction of the first slide rail is A slide block is arranged for moving, and the slide block is fixedly connected with a push plate, and an alarm reset assembly is set between the push plate and the positioning block.

Preferably, the alarm reset assembly includes: a first sensor fixedly arranged on the lower surface of the positioning block, the first sensor is provided with a transmitting block and a receiving block, the push plate is detachably connected to a baffle, and the push plate passes through The slider moves along the length direction of the first slide rail until the baffle is set between the transmitting block and the receiving block, the first sensor triggers the distributor to stop working;

The first magnet arranged on the positioning block, the push plate is fixedly connected with the second magnet that cooperates with the first magnet. initial position. The push plate in the alarm reset assembly drives the baffle to move between the transmitting block and the receiving block after resistance, so as to trigger the first sensor and drive the device to stop working, and when it resumes working, it cooperates with the second magnet through the first magnet To achieve a quick reset.

Preferably, the push plate is provided with a first waist-shaped hole, and the baffle is provided with a blocking portion, and the blocking portion passes through the first waist-shaped hole to cooperate with the launching block and the receiving block, and the blocking portion The plate is provided with a second waist-shaped hole, and the push plate is provided with a locking hole, and the locking hole is matched with the second waist-shaped hole through bolts. The first waist-shaped hole cooperates with the resistance part, thereby ensuring that when the push plate is displaced by resistance, the first waist-shaped hole can effectively limit the displacement of the push plate to prevent too much displacement from leaving the magnetic range of the magnet. The phenomenon that the board cannot be reset.

Preferably, the moving assembly includes: a second slide rail fixedly arranged in the accommodating cavity, a first moving plate is fixed on the second slide rail, and a mother carrier that drives the mother box to move is fixed on the first moving plate. A stage moving module and a sub-carrier moving module that drives multiple sub-boxes to move.

Preferably, the mobile module of the mother carrier includes: a first support plate fixedly connected with the first mobile plate, the first support plate is fixedly connected with a first pneumatic cylinder in the height direction, and the output shaft of the first pneumatic cylinder is set There is a first positioning plate, and the first pneumatic cylinder drives the first positioning plate to move along the height direction of the first support plate, and the first positioning plate is fixedly connected with a clamping assembly matched with the female box.

Preferably, the sub-stage moving module includes: a third slide rail fixedly arranged on the first moving plate, a second translation plate is provided for moving along the length direction of the third slide rail, and the first moving plate is fixedly connected with A drive assembly, the drive assembly drives the second translation plate to move along the length direction of the third slide rail, the length direction of the second translation plate is provided with a plurality of clamping tables that cooperate with the sub-boxes, and the clamping tables are The assembly clamps the sub-box.

Preferably, the clamping table is provided with a rectangular clamping plate, and the clamping assembly includes: limit blocks fixedly arranged on two vertical sides of the clamping table, the clamping table is fixedly connected with a second pneumatic cylinder, and the rectangular The other two vertical sides of the clamping plate are equipped with a clamping block that cooperates with the second pneumatic cylinder. The clamping block is driven by the second pneumatic cylinder to cooperate with the sub-box or the mother box, and the sub-box or the mother box is combined with the limit block. Clamping, the rectangular clamping plate is provided with a first detection port, both the sub-box and the mother box are provided with a second detection port that cooperates with the first detection port, and the clamping table is fixedly connected with a second sensor, The second sensor passes through the first detection port and the second detection port to sense the material of the sub-box and the mother box.

Preferably, a control method for a substrate powder machine, comprising:

S1: place the material box on each clamping table;

S2: Scan the work order number to query the system or manually input, and set the material distribution or collection mode of this work;

S3: The PCL program compares the number of boxes actually sensed by the sensor of the clamping table according to the number of boxes set;

S4: The four-axis mechanical arm drives the push plate to move, and drives different sub-boxes to align with the mother box through the moving component. The push plate drives the substrate in the mother box to move to each sub-box until all the substrates in the mother box are pushed out;

S5: When a material jam occurs during the pushing process of the push plate, the first sensor at the bottom of the push plate is triggered, the four-axis mechanical arm stops working, and an alarm is issued to remind personnel to deal with it.

The present invention has the following advantages:

1. Through the cooperation of the mechanical arm component, the moving component and the resistance alarm component, the substrate is driven from the mother box to the sub-box, so as to prevent falling, breaking, accidentally touching the gold wire or damaging the gold wire during the extraction process.

2. When there is a material jam, the alarm reset component will trigger an alarm to reduce the phenomenon of substrate damage caused by forced material pushing.

3. The push plate in the alarm reset component drives the baffle to move between the transmitting block and the receiving block after resistance, so as to trigger the first sensor and drive the device to stop working, and when it resumes working, it passes the first magnet and the second Magnet fit for quick reset.

4. When the push plate is displaced due to resistance, the first waist-shaped hole can effectively limit the displacement of the push plate, preventing the phenomenon that the push plate cannot be reset due to too much displacement and out of the magnetic range of the magnet.

Description of drawings

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments.

FIG. 1 is a schematic diagram of the overall structure of a substrate distributor in an embodiment of the present invention;

Fig. 2 is a schematic diagram of a partial structure of the substrate distributor in the embodiment of the present invention;

Fig. 3 is a partial structural schematic diagram 2 of the substrate distributor in the embodiment of the present invention;

Fig. 4 is a schematic diagram of the partial structure of the substrate distributor in the embodiment of the present invention;

Fig. 5 is an enlarged view of the local structure of the substrate distributor in the embodiment of the present invention;

6 is a schematic diagram of the overall structure of the mechanical components of the substrate distributor in the embodiment of the present invention;

Fig. 7 is a schematic diagram of a partial structure of the mechanical components of the substrate distributor in the embodiment of the present invention;

Fig. 8 is an enlarged view of a partial structure of the mechanical components of the substrate distributor in the embodiment of the present invention.

In the figure: 1. Four-axis mechanical arm; 2. Cabinet body; 201. Accommodating cavity; 3. Positioning block; 4. First slide rail; 5. Slide block; 6. Push plate; 603. First waist-shaped hole; 7, the first sensor; 701, the transmitting block; 702, the receiving block; 8, the baffle plate; 9, the first magnet; 10, the second magnet; 11, the second slide rail; 12, the first moving plate; 13, the first 14. The first pneumatic cylinder; 15. The first positioning plate; 16. The third slide rail; 17. The drive assembly; 18. The clamping platform; 19. The limit block; 20. The second pneumatic cylinder.

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.

The present invention will be described in further detail below in conjunction with examples and specific implementation methods.

As shown in Figure 1, a substrate distribution machine is used to drive the substrate in the mother box to move to multiple sub-boxes. Both the mother box and the sub-boxes belong to the material box. The substrate moves to the placement station of the sub-box, wherein the robot arm assembly adopts the existing four-axis robot arm 1 .

The distributing machine also includes: a cabinet body 2, the cabinet body 2 is provided with an accommodating chamber 201 for accommodating the mechanical arm assembly, the accommodating chamber 201 is provided with a discharge port, and the two parallel side walls of the discharge port are fixedly connected with a safety grating. When the feeder is working, the safety grating is in working state, when the items outside the storage chamber 201 enter the storage chamber 201 through the safety grating, the safety grating is triggered and the equipment stops working.

There is also a moving assembly cooperating with the four-axis robot arm 1 in the accommodation chamber 201 , and the moving assembly drives the substrate placement station of the sub-box to be at the same level as one of the substrates in the mother box.

As shown in Fig. 1 and Fig. 3, the moving assembly includes: a second slide rail 11 fixedly arranged in the accommodation cavity 201, a first moving plate 12 is arranged on the second slide rail 11, and the first moving plate 12. The mobile module of the mother carrier that drives the movement of the mother box and the mobile module of the sub-carrier that drive the movement of multiple sub-boxes are fixed.

Wherein, the moving module of the mother carrier drives the mother box to move until one of the substrates in the mother box is at the same level as the placement station of a sub-box in the moving module of the sub-carrier.

As shown in Figures 1 to 3, wherein, the mother carrier mobile module includes: a first support plate 13 fixedly connected to the first mobile plate 12, the first support plate 13 is arranged perpendicular to the first mobile plate 12, and the second A supporting rib is provided at a position perpendicular to the first supporting plate 13 on the moving plate 12 , and the supporting rib further strengthens the fixing strength between the first supporting plate 13 and the first moving plate 12 .

The height direction of the first support plate 13 is fixedly connected with the first air cylinder 14, the output shaft of the first air cylinder 14 is provided with the first positioning plate 15, and the first air cylinder 14 drives the first positioning plate 15 along the height of the first support plate 13. Direction movement (conventional guide rail movement mode), the first positioning plate 15 is fixedly connected with a clamping assembly that cooperates with the mother box.

The first positioning plate 15 is driven by the first pneumatic cylinder 14 to move along the height direction of the first support plate 13 , thereby adjusting the height between the mother box and the lower surface of the receiving cavity 201 .

As shown in Figures 1 to 5, the sub-stage mobile module includes: a third slide rail 16 fixedly arranged on the first moving plate 12, the third slide rail 16 moves along the length direction and is provided with a second translation plate, the first The moving plate 12 is fixedly connected with a drive assembly 17, and the drive assembly 17 drives the second translation plate to move along the length direction of the third slide rail 16. The length direction of the second translation plate is provided with a plurality of clamping tables 18 that cooperate with the sub-boxes. The stage 18 clamps the sub-cassettes through the clamping assembly.

The drive assembly 17 can use an existing motor to drive the ball screw to rotate, thereby driving the second translation plate to move along the length direction of the third slide rail 16 . The driving assembly 17 can also adopt an existing driving method, which mainly drives the second translation plate to move along the length direction of the third sliding rail 16 .

The driving assembly 17 drives the second translation plate to move along the lengthwise direction of the third slide rail 16 , thereby driving the placement stations of different sub-boxes to be at the same level as one of the substrates in the mother box.

As shown in FIG. 5 , the clamping table 18 is provided with a rectangular clamping plate, which is used for placing the mother box or the daughter box.

The clamping assembly includes: limiting blocks 19 fixedly arranged on the two vertical sides of the clamping platform 18, and the limiting blocks 19 perform preliminary positioning on the two vertical right-angled sides of the mother box or the child box.

The clamping table 18 is fixedly connected with a second pneumatic cylinder 20, and the other two vertical sides of the rectangular clamping plate are provided with a clamping block that cooperates with the second pneumatic cylinder 20, and the clamping block and the sub-box or sub-box are driven by the second pneumatic cylinder 20 Cooperate with the mother box and clamp the sub-box or the mother box with the limit block 19. The rectangular clamping plate is provided with a first detection port, and both the sub-box and the mother box are provided with a second detection port that cooperates with the first detection port. , the clamping table 18 is fixedly connected with a second sensor, and the second sensor passes through the first detection port and the second detection port to sense the material of the sub-box and the mother box.

The dispensing machine also includes: a resistance alarm component, which is fixed at the end of the mechanical arm component, and the mechanical arm component and the resistance alarm component cooperate to drive the substrate in the mother box to move to one of the substrate placement stations in the sub-box.

As shown in Figure 1, Figure 6 and Figure 7, the resistance alarm assembly includes: a positioning block 3, the positioning block 3 is fixedly arranged on the end of the four-axis mechanical arm 1, and the lower surface of the positioning block 3 is fixedly provided with a first slide rail 4. The first slide rail 4 is provided with a slider 5 for moving in the length direction, and the slider 5 is fixedly connected with the push plate 6 , and an alarm reset assembly is arranged between the push plate 6 and the positioning block 3 .

The four-axis mechanical arm 1 drives the push plate 6 to cooperate with the substrate in the mother box, and drives the substrate in the mother box to move to the placement station of the sub-box. Since the placement station of the sub-box is at the same level as the substrate, the push plate 6 The substrate is pushed through the mother box to the placement station of the daughter box.

If the placement station of the substrate and the sub-box is not at the same level or other special circumstances will cause a material jam, the alarm reset component will send out a buzzing alarm, and the dispenser will display an alarm message to remind people to deal with it.

As shown in Figures 7 and 8, the alarm reset assembly includes: a first sensor 7 fixedly arranged on the lower surface of the positioning block 3, the first sensor 7 is provided with a transmitting block 701 and a receiving block 702, and the push plate 6 is detachably connected with a The baffle plate 8 and the push plate 6 are forced to move along the length direction of the first slide rail 4 through the slider 5 until the baffle plate 8 is set between the transmitting block 701 and the receiving block 702, the first sensor 7 is triggered, and the distributor stops Work.

The first magnet 9 that is arranged on the positioning block 3, the push plate 6 is fixedly connected with the second magnet 10 that cooperates with the first magnet 9, when the distributor resumes work, the first magnet 9 cooperates with the second magnet 10 to drive the push plate. Plate 6 returns to the initial position.

The first magnet 9 and the second magnet 10 in the above-mentioned alarm reset assembly cooperate to drive the push plate 6 back to the initial position, mainly because the first magnet 9 and the second magnet 10 are in a suspended state, and because the first magnet 9 and the second magnet 10 adopts a circular magnet, and the magnetic field of the circular magnet is along the axis direction of the circular magnet, so when the two reset, the axes of the first magnet 9 and the second magnet 10 coincide, and the reset effect is better.

The push plate 6 is provided with a first waist-shaped hole 603, the baffle 8 is provided with a resistance portion, the resistance portion passes through the first waist-shaped hole 603 and cooperates with the transmitting block 701 and the receiving block 702, and the baffle plate 8 is provided with a second waist The push plate 6 is provided with a locking hole, and the locking hole is matched with the second waist-shaped hole through a bolt. The second waist-shaped hole is mainly to facilitate the adjustment of the positional relationship between the baffle plate 8 and the push plate 6, thereby adjusting the occurrence of material jams. response distance.

When the push plate 6 is displaced by resistance, the first waist-shaped hole 603 can effectively limit the displacement of the push plate 6, preventing the phenomenon that the push plate 6 cannot be reset due to too much displacement and out of the magnetic range of the magnet.

As shown in Figures 1 to 8, during work, technicians or other automation equipment drive the mother box to be placed on the clamping assembly of the main carrier mobile module, and at the same time drive the sub-box to be placed on the clamping assembly of the sub-carriage mobile module. components, and clamp the mother box and multiple sub-boxes through the clamping components.

After the clamping is completed, one of the child boxes is driven by the moving module of the sub-carrier, and the mother box is driven by the moving module of the mother carrier until one of the substrates in the mother box is at the same level as the placement station of the child box. The four-axis robotic arm 1 drives the push plate 6 to move, and the push plate 6 cooperates with the moving component to drive the substrate to move from the mother box to the sub-box until the substrate is completely moved to the placement station of the sub-box, and the four-axis robotic arm 1 drives the push plate 6. The movement distance is the distance set before the equipment works.

After the substrate of one of the sub-boxes is placed, the movement of the next sub-box is driven by the moving module of the sub-carrier, and the movement of the mother box is driven by the moving module of the mother carrier until one of the substrates in the mother box and the sub-box are placed. The stations are at the same level, and the four-axis mechanical arm 1 drives the push plate 6 to move, and the push plate 6 drives the substrate to move from the mother box to the sub-box until the substrate is completely moved to the placement station of the sub-box. The substrates in the mother box cooperate with the placement stations of different sub-boxes.

When a material jam occurs, the four-axis mechanical arm 1 drives the push plate 6 to move, and the push plate 6 drives the substrate to move from the mother box to the sub-box placement station. When a material jam occurs, the push plate 6 cannot continue to move, and the push plate 6 The sliding block 5 moves along the length direction of the first slide rail 4, and the first magnet 9 breaks away from the second magnet 10 at the same time.

The baffle 8 moves along the first waist-shaped hole 603 until the baffle 8 moves between the transmitting block 701 and the receiving block 702, the first sensor 7 is triggered, the equipment stops working and an alarm is issued, and the technician checks the problem, and the problem is checked. Finally, under the action of the first magnet 9 and the second magnet 10, the slider 5 on the push plate 6 moves along the length direction of the first slide rail 4 and returns to the initial position.

As shown in Figures 1 to 8, a control method for a substrate powder machine includes:

S1: place the material box on each clamping platform 18;

Among them, this product relies on the existing PLC program as the main control, the control program is mainly based on the existing software for programming processing, and the PLC program input by the technician cooperates with the software for signal processing.

The PLC program combined with the existing software control is mainly responsible for controlling the displacement distance of the moving components, the movement of the four-axis robotic arm 1, the signals sent by each sensor and the entire workflow, and the entire workflow is set through the PLC.

Wherein, a second sensor is provided at the bottom of each clamping table 18 for sensing the presence or absence of a magazine.

S2: Scan the work order number to query the system or manually input, and set the material distribution or collection mode of this work;

Among them, the material box, quantity, material type, material quantity, and the material quantity of each sub-material box need to be set in the aggregate mode.

S3: The PCL program compares the number of material boxes actually sensed by the second sensor of the clamping table 18 according to the set number of material boxes;

Among them, the PLC program compares the number of material boxes actually sensed by the second sensor on the clamping table 18 according to the number of material boxes set, such as whether the numbers are consistent. One start button to start the device, the double start button is mainly to provide safety during operation, to ensure that both hands of the technician are placed on the start button. Further improve the safety of the feeder when it is working.

S4: The four-axis robot arm 1 drives the push plate 6 to move, and drives different sub-boxes to align with the mother box through the moving component. The push plate 6 drives the substrates in the mother box to move to each sub-box until all the substrates in the mother box are pushed out. ;

Wherein, the clamping table 18 with the material box is placed, and the material box is clamped by the clamping assembly. The limit block 19 of each clamping table 18 is equipped with an inductor, and the sensor is used to sense whether the material box is clamped in place. The next step starts after all inductions are in place.

Among them, the sub-carrier module aligns the two sides of the first clamping platform 18 with the sub-box with the two sides of the clamping platform 18 with the mother box from left to right. Drive the clamping platform 18 of mother box to move up and down the clamping platform 18 of mother box to its child box clamping platform 18.

Wherein, the second sliding rail 11 cooperates with the first moving plate 12 to drive the entire moving assembly to move back and forth, and cooperates with the four-axis robot arm 1 to drive the substrate in the mother box to move to the placement station of one of the sub-boxes.

S5: When a material jam occurs during the pushing process of the push plate 6, the first sensor 7 at the bottom of the push plate 6 is triggered, the four-axis robot arm 1 stops working, and an alarm is issued to remind personnel to deal with it.

Among them, when the four-axis mechanical arm 1 drives the push plate 6 to push materials, each clamping table 18 is fixed with a second sensor that shines upward. When material is pushed from above, the second sensor senses and records the amount of material. When the four-axis robot arm 1 reaches the position where the material is pushed in place, it sends a completion signal to the PLC.

If a material jam occurs during the material pushing process, the first sensor 7 is triggered, a signal is generated to the PLC, the feeder stops working, and a chirping alarm is generated, and an alarm message is displayed at the same time to remind technicians to handle.

After the processing is completed, press the reset button, the four-axis mechanical arm 1 and all the material boxes return to the initial position, and the technicians overhaul the stuck material point, and the distributor restarts after the overhaul is completed.

Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention.

Claims (10)

1. The utility model provides a base plate feed divider for drive the base plate in the female box to a plurality of sub-boxes motion, female box and sub-box all belong to the magazine, its characterized in that, feed divider includes:

the mechanical arm assembly drives the base plate of the mother box to move towards the placement station of the child box;

cabinet body, it includes:

the accommodating cavity is used for accommodating the mechanical arm assembly, a moving assembly is further arranged in the accommodating cavity, and the substrate placing station of the moving assembly with the mover box and one substrate in the mother box are positioned on the same horizontal plane;

and the position resistance alarm assembly is fixedly arranged at the end part of the mechanical arm assembly, and the mechanical arm assembly and the position resistance alarm assembly are matched to drive the substrate in the mother box to move towards one substrate placing station of the sub-boxes.

2. The substrate handler of claim 1, wherein the robotic arm assembly is a four-axis robotic arm.

3. The substrate handler of claim 2, wherein the resistance alarm assembly comprises: the positioning block is fixedly arranged at the end part of the four-axis mechanical arm, a first sliding rail is fixedly arranged on the lower surface of the positioning block, a sliding block is movably arranged in the length direction of the first sliding rail, the sliding block is fixedly connected with a push plate, and an alarm reset assembly is arranged between the push plate and the positioning block.

4. The substrate handler of claim 3, wherein the alert reset assembly comprises: the first sensor is fixedly arranged on the lower surface of the positioning block, the first sensor is provided with a transmitting block and a receiving block, the push plate is detachably connected with a baffle plate, the push plate is stressed to move along the length direction of the first sliding rail through the sliding block, and the first sensor triggers the material distributor to stop working until the baffle plate is arranged between the transmitting block and the receiving block;

the first magnet is arranged on the positioning block, the pushing plate is fixedly connected with the second magnet matched with the first magnet, and when the material distributor resumes working, the first magnet and the second magnet are matched to drive the pushing plate to return to the initial position.

5. The substrate dispenser of claim 4, wherein the push plate is provided with a first waist-shaped hole, the baffle plate is provided with a blocking portion, the blocking portion penetrates through the first waist-shaped hole to be matched with the transmitting block and the receiving block, the baffle plate is provided with a second waist-shaped hole, and the push plate is provided with a locking hole, and the locking hole is matched with the second waist-shaped hole through a bolt.

6. The substrate handler of claim 1, wherein the moving assembly comprises: the second sliding rail is fixedly arranged in the accommodating cavity, a first moving plate is arranged on the second sliding rail in a moving mode, and the first moving plate is fixedly provided with a mother carrier moving module for driving the mother box to move and a child carrier moving module for driving the plurality of child boxes to move.

7. The substrate handler of claim 6, wherein the master carrier movement module comprises: the first supporting plate is fixedly connected with the first moving plate, the first pneumatic cylinder is fixedly connected with the first supporting plate in the height direction, the first positioning plate is arranged on an output shaft of the first pneumatic cylinder, the first pneumatic cylinder drives the first positioning plate to move along the height direction of the first supporting plate, and the first positioning plate is fixedly connected with a clamping assembly matched with the female box.

8. The substrate handler of claim 7, wherein the subcarrier station moving module comprises: the third sliding rail is fixedly arranged on the first moving plate, the second moving plate is arranged in the moving mode in the length direction of the third sliding rail, the first moving plate is fixedly connected with a driving assembly, the driving assembly drives the second moving plate to move along the length direction of the third sliding rail, a plurality of clamping tables matched with the sub-boxes are arranged in the length direction of the second moving plate, and the clamping tables clamp the sub-boxes through the clamping assembly.

9. The substrate handler of claim 8, wherein the clamping table is provided with a rectangular clamping plate, the clamping assembly comprising: the limiting blocks are fixedly arranged on two vertical sides of the clamping table, the second pneumatic cylinder is fixedly connected to the clamping table, the clamping block matched with the second pneumatic cylinder is arranged on the other two vertical sides of the rectangular clamping plate, the clamping block is driven to be matched with the sub-box or the mother box through the second pneumatic cylinder, the sub-box or the mother box is clamped by combining the limiting blocks, the rectangular clamping plate is provided with a first detection opening, the sub-box and the mother box are respectively provided with a second detection opening matched with the first detection opening, the second sensor is fixedly connected to the clamping table, and the second sensor penetrates through the first detection opening and the second detection opening to perform material induction on the sub-box and the mother box.

10. A control method for the substrate powder machine according to any one of claims 1 to 9, characterized by comprising:

s1, placing a material box on each clamping table;

s2: the method comprises the steps of inquiring or manually inputting a scanning work order number to a system, and setting a material distributing or collecting mode of the current work;

s3: the PCL program compares the set material box number with the material boxes actually sensed by the clamping table sensor;

s4: the four-axis mechanical arm drives the pushing plate to move, and drives different sub-boxes to align with the main box through the moving assembly, and the pushing plate drives the substrate in the main box to move towards each sub-box until all the substrates in the main box are pushed;

s5: when the clamping phenomenon occurs in the pushing plate pushing process, the first sensor at the bottom of the pushing plate is triggered, the four-axis mechanical arm stops working, and a sounding alarm is sent out to remind a person to process.