CN116586656A - Piezoelectric ceramic bending vibration type thin-wall part hole drilling device - Google Patents

Piezoelectric ceramic bending vibration type thin-wall part hole drilling device Download PDF

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CN116586656A
CN116586656A CN202310545424.5A CN202310545424A CN116586656A CN 116586656 A CN116586656 A CN 116586656A CN 202310545424 A CN202310545424 A CN 202310545424A CN 116586656 A CN116586656 A CN 116586656A
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plate
piezoelectric
hole
bottom plate
vibration mechanism
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王良
张亚勋
王鹤然
苏东浩
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Northeast Electric Power University
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Northeast Dianli University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B41/00Boring or drilling machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B47/00Constructional features of components specially designed for boring or drilling machines; Accessories therefor
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

本发明公开了一种压电陶瓷弯曲振动式薄壁件孔钻削加工装置,该装置包括底板、支撑板、安装板、压电振动机构和运动轴,底板上有横向和纵向通槽,还有与底板螺纹连接的载件板,底板与支撑板、支撑板与安装板之间由螺纹连接,支撑板设置用于移动压电振动机构的竖直通槽,安装板中间有通孔,通孔四周有螺纹孔,压电振动机构设有法兰,与安装板螺纹连接实现固定,压电振动机构设有4个安装扇形压电陶瓷的内嵌槽,且沿其轴线方向设有安装运动轴的内螺纹通孔。本发明通过压电陶瓷的两个正交方向弯曲振动复合致动,振动幅值与施加信号的电压幅值成正比,通过调整信号的电压幅值可调整钻头的螺旋速度,保证不同厚度薄壁件孔的加工质量。

The invention discloses a piezoceramic bending vibration type thin-walled part hole drilling processing device, the device comprises a base plate, a support plate, a mounting plate, a piezoelectric vibration mechanism and a moving shaft, the base plate has transverse and longitudinal through grooves, and There is a carrier plate screwed to the bottom plate, the bottom plate and the support plate, the support plate and the installation plate are connected by threads, the support plate is provided with a vertical slot for moving the piezoelectric vibration mechanism, and there is a through hole in the middle of the installation plate, through which There are threaded holes around the hole, and the piezoelectric vibration mechanism is provided with a flange, which is threaded with the mounting plate to achieve fixation. Shaft internally threaded through hole. The present invention is actuated by bending vibration in two orthogonal directions of piezoelectric ceramics. The vibration amplitude is proportional to the voltage amplitude of the applied signal. By adjusting the voltage amplitude of the signal, the screw speed of the drill bit can be adjusted to ensure different thicknesses and thin walls. The processing quality of the hole.

Description

压电陶瓷弯曲振动式薄壁件孔钻削加工装置Piezoelectric ceramic bending vibration drilling device for thin-walled parts

技术领域technical field

本发属于机械加工技术领域,具体涉及一种压电陶瓷弯曲振动式薄壁件孔钻削加工装置。The invention belongs to the technical field of mechanical processing, and in particular relates to a piezoceramic bending vibration type thin-walled part hole drilling processing device.

背景技术Background technique

随着高端装备制造业的快速发展,薄壁件因其具有重量轻、成本低、节省材料等突出特点,被广泛应用于航空航天、汽车工业等领域。但薄壁件由于自身刚性差、强度低等原因导致其加工一直是较为棘手的问题,特别是薄壁件的孔加工,在传统孔的钻削加工中,钻头的转速对孔的加工影响较大,钻头转速过低会导致产生严重的塑性变形,而转速过高时由于钻头及被加工薄壁件温度急剧上升会产生较大的热塑性变形,由此可见,对于不同厚度的薄壁件,在进行孔的钻削加工时,应有相应匹配的钻头转速。然而,现有孔的钻削加工装置多采用电磁电机致动,电磁电机的输出转速通常为一固定值,难以根据被加工薄壁件的厚度调整钻头转速,进而难以保证不同厚度薄壁件孔的加工质量。With the rapid development of high-end equipment manufacturing industry, thin-walled parts are widely used in aerospace, automobile industry and other fields due to their outstanding features such as light weight, low cost and material saving. However, due to the poor rigidity and low strength of thin-walled parts, the processing of thin-walled parts has always been a difficult problem, especially the hole processing of thin-walled parts. If the drill speed is too low, it will cause serious plastic deformation, and when the speed is too high, the temperature of the drill bit and the thin-walled parts will rise sharply, resulting in large thermoplastic deformation. It can be seen that for thin-walled parts of different thicknesses, When drilling holes, there should be a corresponding matching drill speed. However, most of the existing hole drilling devices are driven by electromagnetic motors. The output speed of the electromagnetic motor is usually a fixed value. It is difficult to adjust the drill speed according to the thickness of the thin-walled parts to be processed, and it is difficult to ensure that the holes of different thickness thin-walled parts processing quality.

发明内容Contents of the invention

发明目的:本发明是为了实现薄壁件孔加工时钻头转速连续可调,进而满足不同厚度薄壁件孔加工的质量要求,而提出的压电陶瓷弯曲振动式薄壁件孔钻削加工装置。Purpose of the invention: The present invention proposes a piezoceramic bending vibration type thin-walled hole drilling device in order to realize the continuous adjustment of the drill bit speed when processing thin-walled parts, and to meet the quality requirements of thin-walled parts with different thicknesses. .

技术方案:一种压电陶瓷弯曲振动式薄壁件孔钻削加工装置,包括底板、支撑板和安装板,还包括压电振动机构和运动轴;所述底板与支撑板通过螺栓呈正相交位置连接,支撑板与安装板也呈正相交连接;Technical solution: A piezoceramic bending vibration drilling device for thin-walled parts, including a base plate, a support plate, and a mounting plate, as well as a piezoelectric vibration mechanism and a motion shaft; the base plate and the support plate are in an orthogonal position through bolts connection, the support plate and the mounting plate are also connected in a positive intersection;

安装板的中间位置设置有通孔,该通孔的四周均匀设置有螺纹孔,用于连接压电振动机构固定用的法兰,所述法兰的压位于电振动机构的顶部;The middle position of the mounting plate is provided with a through hole, and the periphery of the through hole is evenly provided with threaded holes, which are used to connect the flange used for fixing the piezoelectric vibration mechanism, and the pressure of the flange is located on the top of the electric vibration mechanism;

压电振动机构沿圆周方向均匀设置有大小、形状均一致的内嵌槽,用于安装扇形压电陶瓷,压电振动机构沿其轴线方向还设置有内螺纹通孔;运动轴设置有外螺纹,与压电振动机构的内螺纹通孔旋合连接,在扇形压电陶瓷的振动激励下实现运动轴沿轴线方向的螺旋进给运动,运动轴的底端连接有钻头。The piezoelectric vibrating mechanism is evenly provided with embedded grooves of uniform size and shape along the circumferential direction, which are used to install fan-shaped piezoelectric ceramics. The piezoelectric vibrating mechanism is also provided with internal thread through holes along its axial direction; the motion shaft is provided with external threads , is screwed and connected with the internal thread through hole of the piezoelectric vibration mechanism, and realizes the helical feed movement of the motion shaft along the axial direction under the vibration excitation of the fan-shaped piezoelectric ceramics, and the bottom end of the motion shaft is connected with a drill bit.

进一步的,底板上设置有个横向通槽和个纵向通槽,底板上设置有载件板,载件板的上下表面均设置有螺纹孔,上表面螺纹孔用于安装被加工零件,下表面螺纹孔与穿过底板的横向通槽或者纵向通槽的螺栓连接实现载件板的紧固连接,底板的底部设置个圆柱支撑腿,底板的侧面设置有个螺纹孔,通过螺栓实现与支撑板紧固连接。Further, a horizontal through groove and a longitudinal through groove are arranged on the base plate, a carrier plate is arranged on the base plate, threaded holes are arranged on the upper and lower surfaces of the carrier plate, the threaded holes on the upper surface are used for installing the processed parts, and the lower surface The threaded holes are connected with the bolts passing through the horizontal or vertical slots of the bottom plate to realize the fast connection of the carrier board. A cylindrical support leg is set at the bottom of the bottom plate, and a threaded hole is set on the side of the bottom plate, and the support plate is realized by bolts. Fasten the connection.

优选的,支撑板的顶部设置有2个平行的竖直通槽,安装板的侧面设置有2个螺纹孔,2个螺栓穿过支撑板上的竖直通槽拧紧于安装板侧面上的螺纹孔,实现安装板与支撑板的紧固连接。Preferably, the top of the support plate is provided with 2 parallel vertical through grooves, and the side of the mounting plate is provided with 2 threaded holes, and 2 bolts pass through the vertical through grooves on the support plate and are tightened to the threads on the side of the mounting plate. holes to realize the fast connection between the mounting plate and the supporting plate.

优选的,压电振动机构的每个内嵌槽中均安装偶数片扇形压电陶瓷。Preferably, an even number of sector-shaped piezoelectric ceramics is installed in each embedded groove of the piezoelectric vibration mechanism.

优选的,扇形压电陶瓷的两个扇形边所对圆心角为86度。Preferably, the central angle subtended by the two sector sides of the sector-shaped piezoelectric ceramic is 86 degrees.

优选的,底板和安装板位于支撑板的同一侧。Preferably, the bottom plate and the installation plate are located on the same side of the support plate.

本发明的有益效果:本发明所提出的压电陶瓷弯曲振动式薄壁件孔钻削加工装置与现有薄壁件孔的钻削加工装置完全不同,本发明采用压电陶瓷的逆压电效应致动,通过两个正交方向的弯曲振动复合在螺纹旋合处形成椭圆振动轨迹,进一步驱动运动轴实现螺旋进给运动输出。激励压电陶瓷产生的振动幅值与施加电信号的电压幅值大小成正比,进而通过调整施加信号的电压幅值大小可以调整运动轴(即钻头)的螺旋进给速度,这样可以针对不同厚度的薄壁件调整相应的钻头转速以保证不同厚度薄壁件孔的加工质量。Beneficial effects of the present invention: The piezoceramic bending vibration type thin-walled part hole drilling device proposed by the present invention is completely different from the existing thin-walled part hole drilling device. Effect actuation, through the combination of bending vibrations in two orthogonal directions, an elliptical vibration track is formed at the screw joint, and the motion axis is further driven to realize the helical feed motion output. The vibration amplitude generated by exciting piezoelectric ceramics is proportional to the voltage amplitude of the applied electrical signal, and then by adjusting the voltage amplitude of the applied signal, the screw feed speed of the motion axis (ie, the drill bit) can be adjusted, which can be aimed at different thicknesses. For thin-walled parts, adjust the corresponding drill speed to ensure the processing quality of holes in thin-walled parts with different thicknesses.

附图说明Description of drawings

图1所示为压电陶瓷弯曲振动式薄壁件孔钻削加工装置的结构图;Fig. 1 shows the structural diagram of the piezoceramic bending vibration type thin-walled part hole drilling processing device;

图2所示为压电陶瓷弯曲振动式薄壁件孔钻削加工装置的底部结构图;Fig. 2 shows the bottom structure diagram of piezoelectric ceramic bending vibration type thin-wall part hole drilling processing device;

图3所示为扇形压电陶瓷的结构图,其中“+”和“-”代表相应压电陶瓷的极化方向。Figure 3 shows the structural diagram of the fan-shaped piezoelectric ceramics, where "+" and "-" represent the polarization directions of the corresponding piezoelectric ceramics.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention.

参照图1、图2和图3,本发明包括底板1、支撑板2、安装板3、压电振动机构4和运动轴5,底板1上设置有2个横向通槽101和2个纵向通槽103,底板1上设置有载件板6,载件板6的上下表面均设置有螺纹孔,上表面的螺纹孔用于安装被加工零件,下表面的螺纹孔与穿过底板1的横向通槽101或者纵向通槽103的螺栓8连接实现载件板6的紧固连接,此外,载件板6的上表面还设置有凹槽结构,以避免钻削加工时钻头7破坏载件板6,底板1上的横向通槽101可用于载件板6的横向调整移动,纵向通槽103可用于载件板6的纵向调整移动,底板1的底部设置4个圆柱支撑腿102,该4个支撑腿102的底端应处于同一平面,以保证整个加工装置的水平放置;底板1的侧面设置有2个螺纹孔,通过螺栓8实现与支撑板2的紧固连接,连接后支撑板2与底板1呈正交位置关系。支撑板2的顶部设置有2个平行的竖直通槽201,安装板3的侧面设置有2个螺纹孔,2个螺栓8穿过支撑板2上的竖直通槽201拧紧于安装板3侧面上的螺纹孔,实现安装板3与支撑板2的紧固连接,连接后支撑板2与安装板3呈正交位置关系,支撑板2上的2个竖直通槽201可用于安装板3和压电振动机构4整体的上下移动,以使钻头7接近被加工零件;底板1和安装板3须位于支撑板2的同一侧,相对布置。Referring to Fig. 1, Fig. 2 and Fig. 3, the present invention comprises a base plate 1, a support plate 2, a mounting plate 3, a piezoelectric vibrating mechanism 4 and a motion shaft 5, and the base plate 1 is provided with two transverse through grooves 101 and two longitudinal through grooves. Slot 103, the base plate 1 is provided with a carrier board 6, the upper and lower surfaces of the carrier board 6 are provided with threaded holes, the threaded holes on the upper surface are used to install the processed parts, and the threaded holes on the lower surface are connected with the transverse direction passing through the base plate 1. The bolt 8 connection of the through groove 101 or the longitudinal through groove 103 realizes the fastening connection of the carrier plate 6. In addition, the upper surface of the carrier plate 6 is also provided with a groove structure to avoid the drill bit 7 from damaging the carrier plate during drilling. 6. The horizontal through groove 101 on the bottom plate 1 can be used for the horizontal adjustment and movement of the carrier plate 6, and the longitudinal through groove 103 can be used for the longitudinal adjustment and movement of the carrier plate 6. The bottom of the bottom plate 1 is provided with 4 cylindrical support legs 102, the 4 The bottom ends of the two support legs 102 should be on the same plane to ensure the horizontal placement of the entire processing device; the side of the bottom plate 1 is provided with 2 threaded holes, and the fastening connection with the support plate 2 is realized by bolts 8. After connecting the support plate 2 It is in an orthogonal positional relationship with the bottom plate 1. The top of the supporting plate 2 is provided with two parallel vertical through-slots 201, and the side of the mounting plate 3 is provided with two threaded holes, and two bolts 8 pass through the vertical through-slots 201 on the supporting plate 2 and are screwed onto the mounting plate 3 The threaded holes on the side realize the fast connection between the mounting plate 3 and the supporting plate 2. After the connection, the supporting plate 2 and the mounting plate 3 are in an orthogonal position relationship. The two vertical slots 201 on the supporting plate 2 can be used for the mounting plate 3 and the piezoelectric vibration mechanism 4 move up and down as a whole, so that the drill bit 7 is close to the processed part; the bottom plate 1 and the mounting plate 3 must be located on the same side of the support plate 2 and arranged oppositely.

进一步的,安装板3的中间位置设置有通孔301,该通孔301的四周均匀设置有4个螺纹孔;压电振动机构4的整体横截面为圆环形,压电振动机构4的顶部设置有法兰401,该法兰401的横截面直径大于压电振动机构4其他部分的横截面直径,法兰401四周均匀设置有4个通孔,用于穿过4个螺栓8与安装板3上的4个螺纹孔连接实现压电振动机构4的紧固连接,压电振动机构4沿圆周方向均匀设置有4个大小、形状均一致的内嵌槽,用于安装扇形压电陶瓷9,压电振动机构4沿其轴线方向还设置有内螺纹通孔;运动轴5设置有外螺纹,其与压电振动机构4的内螺纹通孔旋合连接,在扇形压电陶瓷9产生的两个正交弯曲振动复合作用下实现运动轴5沿轴线方向的螺旋进给运动,运动轴5的底端连接有钻头7,用于被加工零件的钻削加工。Further, a through hole 301 is provided in the middle of the mounting plate 3, and four threaded holes are uniformly arranged around the through hole 301; the overall cross section of the piezoelectric vibration mechanism 4 is circular, and the top of the piezoelectric vibration mechanism 4 A flange 401 is provided, and the cross-sectional diameter of the flange 401 is larger than that of other parts of the piezoelectric vibration mechanism 4. Four through holes are uniformly arranged around the flange 401 for passing through the four bolts 8 and the mounting plate. The four threaded holes on the 3 are connected to realize the fast connection of the piezoelectric vibration mechanism 4. The piezoelectric vibration mechanism 4 is evenly provided with 4 embedded grooves of the same size and shape along the circumferential direction, which are used to install the fan-shaped piezoelectric ceramics 9 , the piezoelectric vibrating mechanism 4 is also provided with an internally threaded through hole along its axial direction; the motion shaft 5 is provided with an external thread, which is screwed and connected with the internally threaded through hole of the piezoelectric vibrating mechanism 4. The helical feed movement of the motion shaft 5 along the axial direction is realized under the combined action of two orthogonal bending vibrations. The bottom end of the motion shaft 5 is connected with a drill bit 7 for drilling the processed parts.

进一步的,本发明涉及的底板1、支撑板2和安装板3的形状均为矩形。Further, the shapes of the bottom plate 1 , the support plate 2 and the installation plate 3 involved in the present invention are all rectangular.

进一步的,压电振动机构4的每个内嵌槽中均安装偶数片扇形压电陶瓷9,以便于施加激励电信号。Further, an even number of sector-shaped piezoelectric ceramics 9 is installed in each embedded groove of the piezoelectric vibrating mechanism 4, so as to apply an excitation electric signal.

具体的,该扇形压电陶瓷9的两个扇形边所对圆心角为86度,沿同一圆周方向的4个扇形压电陶瓷9布置如图3所示,其中相对的两个扇形压电陶瓷的极化方式相反,施加相位为φ的激励电信号后,一个压电陶瓷变厚另一个压电陶瓷变薄,进而使得整体产生一个方向的弯曲振动,另一对相对布置的扇形压电陶瓷的极化方式与此类似,施加相位为φ±90°(φ+90°用于一个方向的螺旋进给,φ-90°用于另一个方向的螺旋进给)电信号激励后产生另一个方向的弯曲振动,这两个弯曲振动的方向存在正交的位置关系,通过两个正交方向的振动复合,进而使得压电振动机构的螺纹旋合区域产生椭圆振动轨迹,进一步通过螺纹旋合摩擦驱动运动轴产生螺旋运动输出,进而带动运动轴5端部的钻头7对被加工件实现钻削加工。Specifically, the central angle of the two fan-shaped sides of the sector-shaped piezoelectric ceramic 9 is 86 degrees, and the arrangement of the four sector-shaped piezoelectric ceramics 9 along the same circumferential direction is shown in Figure 3, wherein the two opposite sector-shaped piezoelectric ceramics In contrast to the polarization mode, after applying an excitation electrical signal with a phase of φ, one piezoelectric ceramic becomes thicker and the other piezoelectric ceramic becomes thinner, which in turn causes the whole to generate bending vibration in one direction, and the other pair of oppositely arranged fan-shaped piezoelectric ceramics The polarization mode of the machine is similar to this, and the electric signal excitation with a phase of φ±90° (φ+90° is used for the screw feed in one direction, and φ-90° is used for the screw feed in the other direction) generates another There is an orthogonal positional relationship between the two directions of bending vibration. Through the combination of vibrations in the two orthogonal directions, the thread screwing area of the piezoelectric vibration mechanism produces an elliptical vibration trajectory, and further through the thread screwing The friction-driven motion shaft generates a helical motion output, and then drives the drill bit 7 at the end of the motion shaft 5 to realize drilling processing on the workpiece.

Claims (6)

1. The utility model provides a piezoceramics bending vibration formula thin wall spare hole bores processingequipment, includes bottom plate (1), backup pad (2) and mounting panel (3), its characterized in that: the piezoelectric vibration device also comprises a piezoelectric vibration mechanism (4) and a motion shaft (5); the bottom plate (1) is connected with the supporting plate (2) at a positive intersection position through bolts (8), and the supporting plate (2) is also connected with the mounting plate (3) at a positive intersection position;
the middle position of the mounting plate (3) is provided with a through hole (31), threaded holes are uniformly formed in the periphery of the through hole (31) and are used for being connected with a flange (41) for fixing the piezoelectric vibration mechanism (4), and the pressure of the flange (41) is positioned at the top of the piezoelectric vibration mechanism (4);
the piezoelectric vibration mechanism (4) is uniformly provided with embedded grooves with uniform size and shape along the circumferential direction and used for mounting sector piezoelectric ceramics (9), and the piezoelectric vibration mechanism (4) is also provided with an internal thread through hole along the axial direction; the moving shaft (5) is provided with external threads, is screwed with an internal thread through hole of the piezoelectric vibration mechanism (4), realizes spiral feeding movement of the moving shaft (5) along the axial direction under the vibration excitation of the fan-shaped piezoelectric ceramics (9), and the bottom end of the moving shaft (5) is connected with a drill bit (7).
2. The piezoelectric ceramic bending vibration type thin-walled workpiece drilling device according to claim 1, wherein: the device is characterized in that a transverse through groove (11) and a longitudinal through groove (13) are formed in the bottom plate (1), a carrier plate (6) is arranged on the bottom plate (1), threaded holes are formed in the upper surface and the lower surface of the carrier plate (6), the threaded holes in the upper surface are used for mounting processed parts, and the threaded holes in the lower surface and the transverse through groove (11) penetrating through the bottom plate (1);
or the bolts (8) of the longitudinal through grooves (103) are connected to realize the fastening connection of the carrier plate (6), 4 cylindrical supporting legs (1-2) are arranged at the bottom of the bottom plate (1), 2 threaded holes are formed in the side face of the bottom plate (1), and the fastening connection with the supporting plate (2) is realized through the bolts.
3. The piezoelectric ceramic bending vibration type thin-walled workpiece drilling device according to claim 1, wherein: the top of backup pad (2) is provided with 2 parallel vertical logical grooves (201), and the side of mounting panel (3) is provided with 2 screw holes, and 2 screw bolts pass vertical logical groove (201) on backup pad (2) and screw down the screw hole on mounting panel (3) side, realize mounting panel (3) and backup pad (2) fastening connection.
4. The piezoelectric ceramic bending vibration type thin-walled workpiece drilling device according to claim 1, wherein: an even number of fan-shaped piezoelectric ceramics (9) are arranged in each embedded groove of the piezoelectric vibration mechanism (4).
5. The piezoelectric ceramic bending vibration type thin-walled workpiece drilling device according to claim 4, wherein: the central angle of the two fan-shaped edges of the fan-shaped piezoelectric ceramic (9) is 86 degrees.
6. The piezoelectric ceramic bending vibration type thin-walled workpiece drilling device according to claim 1, wherein: the bottom plate (1) and the mounting plate (3) are positioned on the same side of the supporting plate (2).
CN202310545424.5A 2023-05-16 2023-05-16 Piezoelectric ceramic bending vibration type thin-wall part hole drilling device Pending CN116586656A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1418747A (en) * 2002-12-26 2003-05-21 北京航空航天大学 Method and equipment for drilling micro-holes with variable parameter vibration drill
CN101227157A (en) * 2007-12-28 2008-07-23 清华大学 Piezoelectric screw driver using Langevin vibrator structure
CN205674296U (en) * 2016-06-02 2016-11-09 江西华讯实业有限公司 A kind of puncher for menifold processing
CN211478391U (en) * 2019-12-24 2020-09-11 邱美美 Fixing device of oscilloscope electronic probe
KR20210078751A (en) * 2019-12-19 2021-06-29 한국기계연구원 Precision cutting device using ultrasonic vibration

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1418747A (en) * 2002-12-26 2003-05-21 北京航空航天大学 Method and equipment for drilling micro-holes with variable parameter vibration drill
CN101227157A (en) * 2007-12-28 2008-07-23 清华大学 Piezoelectric screw driver using Langevin vibrator structure
CN205674296U (en) * 2016-06-02 2016-11-09 江西华讯实业有限公司 A kind of puncher for menifold processing
KR20210078751A (en) * 2019-12-19 2021-06-29 한국기계연구원 Precision cutting device using ultrasonic vibration
CN211478391U (en) * 2019-12-24 2020-09-11 邱美美 Fixing device of oscilloscope electronic probe

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