CN116483084A - Method, device, medium and terminal for simulating movement range of wafer robot based on QT platform - Google Patents
Method, device, medium and terminal for simulating movement range of wafer robot based on QT platform Download PDFInfo
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- CN116483084A CN116483084A CN202310432453.0A CN202310432453A CN116483084A CN 116483084 A CN116483084 A CN 116483084A CN 202310432453 A CN202310432453 A CN 202310432453A CN 116483084 A CN116483084 A CN 116483084A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
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- B25J9/00—Programme-controlled manipulators
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- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
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- G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
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- G05D1/0231—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means
- G05D1/0238—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using obstacle or wall sensors
- G05D1/024—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using obstacle or wall sensors in combination with a laser
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- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0231—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means
- G05D1/0246—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using a video camera in combination with image processing means
- G05D1/0253—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using a video camera in combination with image processing means extracting relative motion information from a plurality of images taken successively, e.g. visual odometry, optical flow
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Abstract
The invention provides a method, a device, a medium and a terminal for simulating the movement range of a wafer robot based on a QT platform, which provide a mode for simulating various movement scenes of the wafer robot for a user by making an application program by utilizing the characteristics of strong QT expressive force and cross-platform; meanwhile, great convenience is provided for the specific application service scene of the demonstration equipment for the client, the requirement on the professional technical capability of the service personnel is reduced, and the practical value is high. The simulation virtual environment and the real motion control algorithm are adopted for butt joint, which is equal to providing an infinite field, and can meet the requirements of collision detection and test of the wafer robot in the moving range under different environmental conditions.
Description
Technical Field
The present disclosure relates to the field of wafer robots, and in particular, to a method, an apparatus, a medium, and a terminal for simulating a movement range of a wafer robot based on a QT platform.
Background
The wafer handling robot is special robot equipment for wafer position movement of a chip manufacturer, and in the installation and use process, related movement range adjustment is often carried out according to the actual places of all manufacturers and the positions of other matched equipment, but because the chip production process requires higher space cleanliness, engineers of the equipment manufacturer are not allowed to enter into internal debugging. In order to reduce the interference and damage to the production environment caused by the actual installation process as much as possible, the related evaluation and test on the actual action requirement of the model equipment are often needed, so that the risk can be reduced, and the efficiency is improved.
The former model device is to actually manufacture a physical model device, or to manufacture a rough simulation model through mechanical drawing software or MATLAB. The physical model has strong intuitiveness, but has higher manufacturing cost, longer time and easy damage. Mechanical drawing and MATLAB simulation models, although having the advantages of complete parameters and diagrammable results, have less ideal display effect, are often simple model schematic, are difficult to add interactive logic, cannot be deployed on mobile equipment, are difficult to operate for non-professional staff, have no visual impact force, and are not beneficial to sales promotion of products by business staff.
Disclosure of Invention
In view of the above drawbacks of the prior art, an object of the present application is to provide a method, an apparatus, a medium and a terminal for simulating a movement range of a wafer robot based on a QT platform, which are used for solving the problems of too simple model, difficulty in interaction, difficulty in operation and the like in the prior art.
To achieve the above and other related objects, a first aspect of the present application provides a method for simulating a movement range of a wafer robot based on a QT platform, including: constructing a 2D morphological model and a working scene model of the wafer robot; establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method; a man-machine interaction interface is constructed by utilizing a UI interface in the QT platform, so that the wafer robot simulation demonstration is carried out in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment, and the adjustment action of the wafer robot is controlled; a safe operation area is preset in the working scene model so as to control the wafer robot to move in the safe operation area according to a preset track, and collision detection is carried out on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
In some embodiments of the first aspect of the present application, the collision detection method further includes: and when any joint part exceeds the safe operation area in the process of moving the end effector of the wafer robot to the target position or any part of the wafer robot collides so as not to complete the preset action, sending a prompt for modifying the moving track and modifying the moving track of the wafer robot in response to the motion modification instruction.
In some embodiments of the first aspect of the present application, the step of moving any joint portion of the end effector of the wafer robot toward the target position beyond the safe operation area includes: and in the process of moving the end effector of the wafer robot to the target position, detecting the coordinate positions of all joint parts of the wafer robot in real time to judge whether all joint parts of the wafer robot exceed the safe operation area.
In some embodiments of the first aspect of the present application, the case that any part of the wafer robot collides so that the predetermined action cannot be completed includes: in the process that the end effector of the wafer robot moves to the target position, judging whether collision accidents occur between each connecting rod and each joint part of the wafer robot and each device according to the size and the installation position coordinates of each device in the working scene model.
In some embodiments of the first aspect of the present application, the building a 2D morphological model and a working scene model of the wafer robot includes: 2D model construction is carried out on the wafer robot body according to the actual connecting rod length and the combination mode of the wafer robot; and constructing a working scene model of the wafer robot so that the wafer robot displays the motion condition in the actual working scene during simulation demonstration.
In some embodiments of the first aspect of the present application, the modeling the kinematic parameters of the wafer robot using the D-H modeling method includes: establishing a D-H connecting rod coordinate system, acquiring connecting rod parameters and joint parameters of the wafer robot, and constructing a D-H parameter table; and establishing a forward kinematics model and an inverse kinematics model of the wafer robot according to the D-H parameter table, and solving a forward and inverse kinematics equation.
In some embodiments of the first aspect of the present application, the D-H parameter table includes parameters: θ, d, a, α, where θ represents the rotation angle around the z-axis; d represents the distance between two adjacent common vertical lines on the z axis; a represents the length of each public vertical line; the angle α represents the angle between two adjacent z-axes.
To achieve the above and other related objects, a second aspect of the present application provides an apparatus for simulating a movement range of a wafer robot based on a QT platform, including: the model construction module is used for constructing a 2D morphological model and a working scene model of the wafer robot; establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method; the motion simulation module utilizes a UI interface in the QT platform to construct a man-machine interaction interface so as to carry out simulation demonstration on the wafer robot and control the adjustment action of the wafer robot in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment; the collision detection module is used for presetting a safe operation area in the working scene model so as to control the wafer robot to move in the safe operation area according to a preset track and perform collision detection on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
To achieve the above and other related objects, a third aspect of the present application provides a computer-readable storage medium having stored thereon a computer program which, when executed by a processor, implements the method of simulating a wafer robot movement range based on a QT platform.
To achieve the above and other related objects, a fourth aspect of the present application provides an electronic terminal, including: a processor and a memory; the memory is used for storing a computer program; the processor is configured to execute the computer program stored in the memory, so that the electronic terminal executes the method for simulating the movement range of the wafer robot based on the QT platform.
As described above, the method, the device, the medium and the terminal for simulating the movement range of the wafer robot based on the QT platform have the following beneficial effects:
(1) The method utilizes the characteristics of strong QT expressive force and cross-platform, and provides a mode for simulating various motion scenes of the wafer robot for users in a mode of manufacturing application programs; meanwhile, great convenience is provided for the specific application service scene of the demonstration equipment for the client, the requirement on the professional technical capability of the service personnel is reduced, and the practical value is high.
(2) The simulation virtual environment and the real motion control algorithm are adopted for butt joint, which is equal to providing an infinite field, and can meet the requirements of collision detection and test of the wafer robot in the moving range under different environmental conditions.
Drawings
Fig. 1 is a flow chart of a method for simulating a movement range of a wafer robot based on a QT platform according to an embodiment of the present application.
Fig. 2 is a schematic diagram of a wafer robot carrying operation according to an embodiment of the present application.
Fig. 3A is a schematic diagram showing a general expression of a link structure relationship and parameters of a wafer robot according to an embodiment of the present application.
FIG. 3B is a schematic view illustrating a joint transformation structure of the wafer robot according to one embodiment of the present application
Fig. 4 is a schematic view of a working safety area of a wafer robot according to an embodiment of the present application.
Fig. 5A is a schematic diagram illustrating a wafer robot in different stages according to an embodiment of the present application.
Fig. 5B is a schematic diagram illustrating a wafer robot in different stages according to an embodiment of the present application.
Fig. 5C is a schematic diagram illustrating a wafer robot in different stages according to an embodiment of the present application.
Fig. 5D is a schematic diagram illustrating a wafer robot in different stages according to an embodiment of the present application.
Fig. 6 is a schematic structural diagram of an apparatus for simulating a movement range of a wafer robot based on a QT platform according to an embodiment of the present application.
Fig. 7 is a schematic structural diagram of an electronic terminal according to an embodiment of the present application.
Detailed Description
Other advantages and effects of the present application will become apparent to those skilled in the art from the present disclosure, when the following description of the embodiments is taken in conjunction with the accompanying drawings. The present application may be embodied or carried out in other specific embodiments, and the details of the present application may be modified or changed from various points of view and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict.
It is noted that in the following description, reference is made to the accompanying drawings, which describe several embodiments of the present application. It is to be understood that other embodiments may be utilized and that mechanical, structural, electrical, and operational changes may be made without departing from the spirit and scope of the present application. The following detailed description is not to be taken in a limiting sense, and the scope of embodiments of the present application is defined only by the claims of the issued patent. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. Spatially relative terms, such as "upper," "lower," "left," "right," "lower," "upper," and the like, may be used herein to facilitate a description of one element or feature as illustrated in the figures as being related to another element or feature.
In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," "held," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context indicates otherwise. It will be further understood that the terms "comprises," "comprising," "includes," and/or "including" specify the presence of stated features, operations, elements, components, items, categories, and/or groups, but do not preclude the presence, presence or addition of one or more other features, operations, elements, components, items, categories, and/or groups. The terms "or" and/or "as used herein are to be construed as inclusive, or meaning any one or any combination. Thus, "A, B or C" or "A, B and/or C" means "any of the following: a, A is as follows; b, a step of preparing a composite material; c, performing operation; a and B; a and C; b and C; A. b and C). An exception to this definition will occur only when a combination of elements, functions or operations are in some way inherently mutually exclusive.
In order to solve the problems in the background art, the invention provides a method, a device, a medium and a terminal for simulating the movement range of a wafer robot based on a QT platform, which aim to simulate the movement of the wafer robot in an actual working scene through the QT platform so as to conveniently demonstrate the application of the wafer robot in different scenes to clients and perform collision detection.
Meanwhile, in order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions in the embodiments of the present invention will be further described in detail by the following examples with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Before explaining the present invention in further detail, terms and terminology involved in the embodiments of the present invention will be explained, and the terms and terminology involved in the embodiments of the present invention are applicable to the following explanation:
(1) QT: QT is a cross-platform c++ application development framework, and is also a development environment that integrates various modules and tools. QT includes a library of classes for creating Graphical User Interfaces (GUIs), i.e., QT GUI modules, that allow for the rapid development of attractive, easy-to-use desktop applications. Meanwhile, QT also provides support for networks, databases, XML, scripts, multithreading and the like, so that a developer can develop application programs more conveniently. QT is widely used as a piece of open source software in various fields such as mobile devices, embedded systems, desktop systems, and the like. The Qt has a rich and comprehensive C++ graphic library, and the basic packaging modules mainly comprise a Core module, an OpenGL module, an SQL module, an XML module, a Network module, a Test module and the like, and the packaging modules support multithreading operation, so that the capability of developing large-scale complex engineering projects by Qt software is greatly improved. The Qt Creator is a new lightweight integrated development environment which is promoted by Nokia corporation, has powerful functions, simple operation interface and simple configuration environment, and can rapidly and conveniently complete development tasks by utilizing a Qt application framework. The Qt Creator includes functions such as project creation wizard, high-level C++ programming language code editor, browse files, and graphical GDB debug front-end.
(2) Wafer robot: wafer robots are generally robots used in semiconductor manufacturing that are responsible for transferring wafers (round pieces of semiconductor material) from one process to another in a manufacturing flow. These robots may also perform other tasks such as measuring and inspecting the wafer surface to ensure consistency in the quality of the final product. Wafer robots play a key role in semiconductor manufacturing processes, they can provide extremely high precision and repeatability, thereby improving the efficiency and quality of semiconductor manufacturing.
(3) The Denavit-Hartenberg (D-H) model is a mathematical model describing the pose of a robot and the motion between joints, and is widely used in the robotics field. It was proposed by Jacques Denavit and Richard S.Hartenberg in 1955 and is widely used in robotics. The D-H model uses four parameters to describe the relative position and rotation between each joint in the robotic system, by which the motion between joints in the robotic system can be described as a simple matrix multiplication. This is very important for robot control and path planning, as it allows the movements of the robot to be described by a simple formula. In summary, the Denavit-Hartenberg (D-H) model provides a standardized method to describe movements between joints in a robotic system. By using the D-H parameter table, the motion of the robot can be described in a simple matrix multiplication form and can be conveniently applied to robot control and path planning.
The embodiment of the invention provides a method, a device, a medium and a terminal for simulating the movement range of a wafer robot based on a QT platform. With respect to implementation of a method of simulating a wafer robot moving range based on a QT platform, an exemplary implementation scenario of simulating a wafer robot moving range based on a QT platform will be described.
QT is an open-source cross-platform C++ development framework, has excellent graphic display effect and higher development efficiency, can easily generate cool interfaces through the QT, is often used in desktop client development, has better cross-platform characteristics, and can be conveniently deployed on various mobile equipment platforms only by one development. Compared with a solid model and a MATLAB simulation model, the model demonstration is more convenient and attractive by using the QT development application program. The cross-platform characteristic can be used for model demonstration by directly using a mobile phone or a tablet personal computer when different application occasions are suitable, such as when a PC is inconvenient to use.
Referring to fig. 1, a flow chart of a method for simulating a movement range of a wafer robot based on a QT platform according to an embodiment of the present application is shown, and the method mainly includes the following steps:
Step S11: and constructing a 2D morphological model and a working scene model of the wafer robot.
In this embodiment, the building a 2D morphological model and a working scene model of the wafer robot includes: 2D model construction is carried out on the wafer robot body according to the actual connecting rod length and the combination mode of the wafer robot; and constructing a working scene model of the wafer robot so that the wafer robot displays the motion condition in the actual working scene during simulation demonstration.
It should be noted that, in the actual working process of the wafer robot, considering the specificity of the production environment, the working environment of the wafer robot needs to be accurately and truly simulated so as to achieve the best simulation demonstration effect. Referring to fig. 2, a 2D morphological model and a working scene model of a wafer robot are constructed using QT rendering, the wafer robot body includes a mounting base 1, a link 2, a joint 3, and an end effector 4 of the wafer robot, and an apparatus in the working scene of the wafer robot generally includes: a wafer cassette 5 for storing wafer disks; the calibrator 6 is used for calibrating the positions of the wafer discs; and the working position 7 is used for carrying out production, processing and other operations on the wafer disc. In the process of establishing the working scene model, the range of the working area, the sizes of various devices and the coordinates of the installation positions are in one-to-one correspondence with the actual scene, so that the effect of simulation can be achieved.
Step S12: and establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method.
In this embodiment, the method for establishing a kinematic parametric model of a wafer robot by using a D-H modeling method includes: establishing a D-H connecting rod coordinate system, acquiring connecting rod parameters and joint parameters of the wafer robot, and constructing a D-H parameter table; and establishing a forward kinematics model and an inverse kinematics model of the wafer robot according to the D-H parameter table, and solving a forward and inverse kinematics equation.
It should be noted that, the rotation between the joints of the wafer robot should follow a certain mechanical parameter association, such as a rod length, a coupling ratio, a rotation angle range limit, a motor rotation speed, and a movement direction, because the actual motion of the robot is completed by the rotation of the motor, the end effector and the coordinates of each joint should also be associated with the rotation angle of each joint, so that the effect of representing the actual scene through simulation demonstration can be played.
Further, it is known from classical robotics that the Denavit-Hartenberg (D-H) model describes a very simple method of modeling robot links and joints, which can be used in any robot configuration, regardless of the structural order and complexity of the robot. As described in connection with (a) in fig. 3A, a D-H link coordinate system is established as follows: the z axis: along the axis of the joint line, the axis at the n+1th joint is z n A shaft; the x-axis: z of nth joint along common perpendicular to two adjacent coordinate axes n-1 The common perpendicular between the axis and the axes of the n+1 joints determines x n A shaft; y axis: determined by the right-hand spiral rule; the origin of coordinates of the nth link coordinate system is set at the x n Axis and z n The intersection of the axes.
In some examples, the D-H parameters include: θ, d, a, α, where θ represents the rotation angle around the z-axis; d represents the distance between two adjacent common vertical lines on the z axis; a represents the length of each public vertical line; the angle α represents the angle between two adjacent z-axes to form a D-H parameter table.
Specifically, θ represents the rotation angle when the latter link at a certain joint is parallel or collinear with the former link after rotating around its z-axis, θ n+1 Represents x n+1 Coordinate axis and x n An included angle between the coordinate axes; d represents the distance between two common perpendicular lines (usually corresponding to two connecting rods) of three axes at three joints in succession, d n+1 Represents x n Axis and x n+1 The distance between the shafts on the n+1th joint axis, also known as the plumb line offset; a represents the length of a common vertical line (usually corresponding to the length of a section of connecting rod) between adjacent joints, a n+1 Representing z n Axis and z n+1 The distance between the shafts along the common vertical line; alpha represents the included angle between the axes of two adjacent joints, alpha n+1 Representing the axis z n And z n+1 The angle between the axes.
FIG. 3B illustrates how the slave is represented using a D-H modelA process of moving the joint n to the position of the joint n+2 by a linear motion such as rotation, translation, or the like. The forward motion is transformed by first winding z n Shaft rotation theta n+1 So that x is n And x n+1 Parallel to each other because of a n And a n+1 Are all perpendicular to z n Of axis, thus about z n Shaft rotation theta n+1 Making them parallel and coplanar (as shown in (B) and (c) of fig. 3B); along z n Axial translation d n+1 Distance, such that x n And x n+1 Collinear due to x n And x n+1 Has been parallel and perpendicular to z n An axis along z n The movement may cause them to overlap each other (as shown in (c) and (d) of fig. 3B); and then along x which has been rotated n Axial translation a n+1 Such that x is n And x n+1 At this time, the origins of the two reference coordinate systems are at the same position (as shown in (d) and (e) in fig. 3B); finally, z is n Around axis x n+1 Rotation alpha n+1 So that z n Axis and z n+1 The axes are aligned, at which time the coordinate systems n and n+1 are fully coincident, and thus the process of transforming from one coordinate system to the next is completed (as shown in (f) and (g) of fig. 3B), i.e., the end effector of the wafer robot is moved to the target position by performing the axis rotation and translation. The inverse motion then requires inverting the equation to reverse the angle or translation distance that each axis needs to be rotated using the pre-arrival coordinates.
Step S13: and constructing a man-machine interaction interface by utilizing a UI interface in the QT platform so as to carry out simulation demonstration on the wafer robot and control the adjustment action of the wafer robot in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment.
It should be noted that, the man-machine interaction interface uses the interface development tool provided by the QT platform to plan the man-machine interface of the software, provide a concise man-machine interaction interface, and realize the operation of the interaction interface through interface buttons and physical keys. And the software internally uses a message mechanism special for QT-signal and slot to carry out message transmission, and a control command is sent to the motion controller through a Modbus protocol, so that the control of the wafer robot is realized. The simulation demonstration model can be connected to external equipment such as a mobile phone or a tablet, demonstration can be performed on the mobile phone or the tablet, and the actions of the wafer robot can be controlled through operation buttons or touch control components of the mobile phone and the tablet. Further, the wafer robot can be controlled to reach a designated target position or move according to a predetermined track through an operation button of the man-machine interaction interface. The access external device can control the wafer robot to reach a specified target position or move according to a preset track through an operation button or a touch control component of the mobile phone or the tablet, such as an operation direction control key.
Step S14: a safe operation area is preset in the working scene model so as to control the wafer robot to move in the safe operation area according to a preset track, and collision detection is carried out on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
In this embodiment, the collision detection method further includes: and when any joint part exceeds the safe operation area in the process of moving the end effector of the wafer robot to the target position or any part of the wafer robot collides so as not to complete the preset action, sending a prompt for modifying the moving track and modifying the moving track of the wafer robot in response to the motion modification instruction.
In some examples, during the movement of the end effector of the wafer robot to the target position, detecting the coordinate positions of the joint parts of the wafer robot in real time to determine whether the joint parts of the wafer robot exceed the safe operation area; and judging whether collision accidents occur between each connecting rod and each joint part of the wafer robot and each device according to the size and the installation position coordinate information of each device in the working scene model.
As described with reference to fig. 4 and fig. 5A-5D, a safe operation area needs to be preset to determine the movement range of the wafer robot and perform collision detection during the movement process of the wafer robot at different stages when performing simulation demonstration in a working scene. The dashed line frame range shown in fig. 4 is a safe operation area, fig. 5A-5D are motion scenes of the wafer robot at different stages in operation, in which fig. 5A is a stage in which the end effector of the wafer robot clamps the wafer in the wafer cassette, fig. 5B is a stage in which the end effector of the wafer robot clamps the wafer to the aligner for position calibration, fig. 5C is a stage in which the end effector of the wafer robot clamps the calibrated wafer to the work position, and fig. 5D is a stage in which the end effector of the wafer robot clamps the wafer to the work position for processing.
Specifically, the setting of the safe operation area range is smaller than the range of the working scene model, so that the wafer robot is prevented from being excessively close to boundaries such as walls in the motion process of different stages in an actual working scene, and the wafer robot is prevented from being damaged. Therefore, when the wafer robot moves according to the preset track, and the wafer robot is subjected to collision detection during the operation of the end effector of the wafer robot, the collision detection modes comprise the following various conditions:
Case 1: before reaching the target position, in an actual working scene of the wafer robot, a preparation position of critical contact of the target position exists, namely, a position which is about to reach the target position but not reach the target position is needed to stop the current action at the preparation position and carry out safety confirmation, namely, whether the current action reaches an x coordinate value of the preparation position or not is confirmed on an x axis, then the current action moves on a y axis to reach a y coordinate value of the preparation position, finally the current action moves on a z axis to finally reach a z coordinate value of the preparation position so as to reach the coordinate position of the preparation position, and after confirming safety, an operation instruction is released for the wafer robot so as to enable the end effector to reach the target position, wherein the corresponding operation is that a wafer disc is placed on the working position to carry out operations such as processing and the like on the wafer disc.
Case 2: in the process that the end effector of the wafer robot moves towards the target position, other joints of the wafer robot possibly exceed the boundary of the safe operation area, so that the coordinate positions of all joint parts of the wafer robot are detected in real time to judge whether all joint parts of the wafer robot exceed the safe operation area, and if the condition that the joint parts exceed the safe operation area exists, the movement track of the wafer robot is adjusted to avoid safety accidents in actual work.
Case 3: in the process of moving the end effector of the wafer robot to the target position, various devices such as a calibrator, a working position and the like are further included in the working scene, and relevant size and position data can be established in the QT platform according to size and coordinate information of the wafer robot body, each device and the size and coordinates of a relevant movement range in a certain working scene. Judging whether each connecting rod and each joint part of the wafer robot collide with each device according to the size and the mounting position coordinates of each device in the working scene model, and if collision with each device in the working scene model occurs or preset actions are difficult to complete, adjusting relevant motion parameters of the wafer robot.
It should be noted that, constructing a scene and a view based on the QT platform includes: deriving a scene class QLdScene, a view class QLdView and a window class QLdDockWidget which are suitable for front-end programming by deriving the scene class QGraphicScene, the view class QGraphicView and the window class QLdDockWidget provided by QT; in the scene view structure of the QT, model view programming is realized by using the primitives by the scene view structure, the primitives are added into the scene as constituent elements, different view classes bind the same scene, so that the same scene is observed through the different view classes, and the attributes of the primitives are modified in one scene to be fed back to other view class objects observing the same scene. Based on the Qt graphic view frame, setting a sponge cutting graphic display scene QGraphiscscope, a view QGraphiscsView and a graphic primitive QGraphicsItem, setting the whole graphic primitive as a parent class, and setting each element in the graphic primitive as a child class. The QGratics view class in the QT platform provides an efficient and easy-to-use collision detection function of irregular shapes, and the related collision event and objects participating in collision can be obtained by reloading a member function shape () thereof, adding physical edge shapes such as points, straight lines, arcs, rectangles and the like into the virtual function through the QPatterPath class, and combining the physical edge shapes in the QGratics view class. The collision detection function required by the simulation software can be realized through the acquired related information.
It should be noted that, in the embodiment of the present invention, the type of robot is a wafer robot, which is different from a common industrial robot (such as a logistics robot, a sweeping robot or a transfer robot), and the operation object of the wafer robot is a wafer disc, and those skilled in the art should know that the wafer disc is very noble and fragile, and because the wafer disc is very thin, the operable space of the wafer robot is very narrow and the operation range is fine, so the operation mode of the common industrial robot cannot be parallel-shifted to the operation of the wafer disc. Therefore, in the embodiment of the invention, the preparation positions close to the critical contact of the target position are preset in the x axis, the y axis and the z axis respectively, and are specially set for the fine control of the wafer robot, so that the safety of the end effector and each joint can be comprehensively and carefully checked in each preparation position, and collision accidents at any part of the end effector or the wafer robot can be avoided.
Fig. 6 is a schematic structural diagram of a high-speed information board fault detection device based on a monitoring screen according to an embodiment of the present invention. In this embodiment, the high-speed information board fault detection device 600 based on the monitoring screen includes: the model construction module 601 constructs a 2D morphological model and a working scene model of the wafer robot; establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method; the motion simulation module 602 constructs a man-machine interaction interface by utilizing a UI interface in the QT platform so as to carry out simulation demonstration of the wafer robot and control the adjustment action of the wafer robot in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment; the collision detection module 603 presets a safe operation area in the working scene model to control the wafer robot to move in the safe operation area according to a preset track and perform collision detection on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
It should be noted that: the high-speed information board fault detection device based on the monitoring picture provided by the embodiment only uses the division of the program modules to exemplify when the high-speed information board fault detection is performed, in practical application, the processing allocation can be completed by different program modules according to the need, namely, the internal structure of the device is divided into different program modules so as to complete all or part of the processing described above. In addition, the high-speed information board fault detection device based on the monitoring image provided in the above embodiment and the method embodiment for simulating the movement range of the wafer robot based on the QT platform belong to the same concept, and the detailed implementation process of the device is shown in the method embodiment, which is not repeated here.
The invention also provides a computer readable storage medium, on which a computer program is stored, which when being executed by a processor implements the method for simulating the movement range of a wafer robot based on a QT platform.
Those of ordinary skill in the art will appreciate that: all or part of the steps for implementing the method embodiments described above may be performed by computer program related hardware. The aforementioned computer program may be stored in a computer readable storage medium. The program, when executed, performs steps including the method embodiments described above; and the aforementioned storage medium includes: various media that can store program code, such as ROM, RAM, magnetic or optical disks.
In the embodiments provided herein, the computer-readable storage medium may include read-only memory, random-access memory, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, flash memory, U-disk, removable hard disk, or any other medium that can be used to store desired program code in the form of instructions or data structures and that can be accessed by a computer. In addition, any connection is properly termed a computer-readable medium. For example, if the instructions are transmitted from a website, server, or other remote source using a coaxial cable, fiber optic cable, twisted pair, digital Subscriber Line (DSL), or wireless technologies such as infrared, radio, and microwave, then the coaxial cable, fiber optic cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwave are included in the definition of medium. It should be understood, however, that computer-readable and data storage media do not include connections, carrier waves, signals, or other transitory media, but are intended to be directed to non-transitory, tangible storage media. Disk and disc, as used herein, includes Compact Disc (CD), laser disc, optical disc, digital Versatile Disc (DVD), floppy disk and blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers.
As shown in fig. 7, a schematic structural diagram of an electronic terminal according to an embodiment of the present invention is shown, including: at least one processor 701, memory 702, at least one network interface 704, and a user interface 706. The various components in the device are coupled together by a bus system 705. It is to be appreciated that the bus system 705 is employed to facilitate connection communications between these components. The bus system 705 includes a power bus, a control bus, and a status signal bus in addition to the data bus. But for clarity of illustration the various buses are labeled as bus systems in fig. 7.
The user interface 706 may include, among other things, a display, keyboard, mouse, trackball, click gun, keys, buttons, touch pad, or touch screen, etc.
It is to be appreciated that the memory 702 can be either volatile memory or nonvolatile memory, and can include both volatile and nonvolatile memory. The nonvolatile Memory may be a Read Only Memory (ROM), a programmable Read Only Memory (PROM, programmable Read-Only Memory), which serves as an external cache, among others. By way of example, and not limitation, many forms of RAM are available, such as static random Access Memory (SRAM, staticRandom Access Memory), synchronous static random Access Memory (SSRAM, synchronous Static RandomAccess Memory). The memory described by embodiments of the present invention is intended to comprise, without being limited to, these and any other suitable types of memory.
The memory 702 in the embodiments of the present invention is used to store various kinds of data to support the operation of the electronic terminal 700. Examples of such data include: any executable programs for operating on the electronic terminal 700, such as the operating system 7021 and application programs 7022; the operating system 7021 contains various system programs, such as a framework layer, a core library layer, a driver layer, etc., for implementing various basic services and handling hardware-based tasks. The application programs 7022 may include various application programs such as a media player (MediaPlayer), a Browser (Browser), and the like for implementing various application services. The method for simulating the movement range of the wafer robot based on the QT platform provided by the embodiment of the invention can be included in the application program 7022.
The method disclosed in the above embodiment of the present invention may be applied to the processor 701 or implemented by the processor 701. The processor 701 may be an integrated circuit chip having signal processing capabilities. In implementation, the steps of the above method may be performed by integrated logic circuits of hardware in the processor 701 or by instructions in the form of software. The processor 701 may be a general purpose processor, a digital signal processor (DSP, digital Signal Processor), or other programmable logic device, discrete gate or transistor logic device, discrete hardware components, or the like. The processor 701 may implement or perform the methods, steps, and logic blocks disclosed in embodiments of the present invention. The general purpose processor 701 may be a microprocessor or any conventional processor or the like. The steps of the accessory optimization method provided by the embodiment of the invention can be directly embodied as the execution completion of the hardware decoding processor or the execution completion of the hardware and software module combination execution in the decoding processor. The software modules may be located in a storage medium having memory and a processor reading information from the memory and performing the steps of the method in combination with hardware.
In an exemplary embodiment, the electronic terminal 700 may be implemented by one or more application specific integrated circuits (ASIC, application Specific Integrated Circuit), DSPs, programmable logic devices (PLDs, programmable Logic Device), complex programmable logic devices (CPLDs, complex Programmable LogicDevice) for performing the aforementioned methods.
In summary, the present application provides a method, a device, a medium and a terminal for simulating a movement range of a wafer robot based on a QT platform, and the present invention provides a way for simulating various movement scenes of the wafer robot for a user by making an application program by utilizing the characteristics of strong QT expressive force and cross-platform; meanwhile, great convenience is provided for the specific application service scene of the demonstration equipment for the client, the requirement on the professional technical capability of the service personnel is reduced, and the practical value is high. The simulation virtual environment and the real motion control algorithm are adopted for butt joint, which is equal to providing an infinite field, and can meet the requirements of collision detection and test of the wafer robot in the moving range under different environmental conditions. Therefore, the method effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles of the present application and their effectiveness, and are not intended to limit the application. Modifications and variations may be made to the above-described embodiments by those of ordinary skill in the art without departing from the spirit and scope of the present application. Accordingly, it is intended that all equivalent modifications and variations which may be accomplished by persons skilled in the art without departing from the spirit and technical spirit of the disclosure be covered by the claims of this application.
Claims (10)
1. A method for simulating a wafer robot movement range based on a QT platform, comprising:
constructing a 2D morphological model and a working scene model of the wafer robot;
establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method;
a man-machine interaction interface is constructed by utilizing a UI interface in the QT platform, so that the wafer robot simulation demonstration is carried out in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment, and the adjustment action of the wafer robot is controlled;
a safe operation area is preset in the working scene model so as to control the wafer robot to move in the safe operation area according to a preset track, and collision detection is carried out on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
2. The method for simulating a wafer robot movement range based on the QT platform of claim 1, wherein the means for collision detection further comprises:
and when any joint part exceeds the safe operation area in the process of moving the end effector of the wafer robot to the target position or any part of the wafer robot collides so as not to complete the preset action, sending a prompt for modifying the moving track and modifying the moving track of the wafer robot in response to the motion modification instruction.
3. The method of simulating a range of motion of a wafer robot based on the QT platform of claim 2, wherein the step of exceeding the safe operating area at any joint location during the movement of the end effector of the wafer robot to the target location includes:
and in the process of moving the end effector of the wafer robot to the target position, detecting the coordinate positions of all joint parts of the wafer robot in real time to judge whether all joint parts of the wafer robot exceed the safe operation area.
4. The method for simulating a movement range of a wafer robot based on the QT platform of claim 2, wherein the collision of any part of the wafer robot so that a predetermined action cannot be completed comprises:
In the process that the end effector of the wafer robot moves to the target position, judging whether collision accidents occur between each connecting rod and each joint part of the wafer robot and each device according to the size and the installation position coordinate information of each device in the working scene model.
5. The method for simulating a range of motion of a wafer robot based on the QT platform of claim 1, wherein the constructing a 2D morphological model and a working scene model of the wafer robot includes:
2D model construction is carried out on the wafer robot body according to the actual connecting rod length and the combination mode of the wafer robot;
and constructing a working scene model of the wafer robot so that the wafer robot displays the motion condition in the actual working scene during simulation demonstration.
6. The method for simulating a movement range of a wafer robot based on the QT platform of claim 1, wherein the modeling the kinematic parameters of the wafer robot using the D-H modeling method includes:
establishing a D-H connecting rod coordinate system, acquiring connecting rod parameters and joint parameters of the wafer robot, and constructing a D-H parameter table;
and establishing a forward kinematics model and an inverse kinematics model of the wafer robot according to the D-H parameter table, and solving a forward and inverse kinematics equation.
7. The method for simulating a wafer robot moving range based on the QT platform of claim 6, wherein the D-H parameter table includes parameters of: θ, d, a, α, where θ represents the rotation angle around the z-axis; d represents the distance between two adjacent common vertical lines on the z axis; a represents the length of each public vertical line; the angle α represents the angle between two adjacent z-axes.
8. A device for simulating a wafer robot movement range based on a QT platform, comprising:
the model construction module is used for constructing a 2D morphological model and a working scene model of the wafer robot; establishing a kinematic parameter model of the wafer robot by adopting a D-H modeling method;
the motion simulation module utilizes a UI interface in the QT platform to construct a man-machine interaction interface so as to carry out simulation demonstration on the wafer robot and control the adjustment action of the wafer robot in a mode of controlling the wafer robot through the man-machine interaction interface or accessing external equipment;
the collision detection module is used for presetting a safe operation area in the working scene model so as to control the wafer robot to move in the safe operation area according to a preset track and perform collision detection on the wafer robot in the operation process of an end effector of the wafer robot; the collision detection method comprises the following steps: the end effector of the wafer robot moves towards the target position according to a preset track, stops the current action and carries out safety confirmation when the x-axis, the y-axis and the z-axis reach the preparation position close to the critical contact of the target position respectively, and releases an operation instruction for the wafer robot after safety confirmation so as to enable the end effector to reach the target position for corresponding operation.
9. A computer-readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, implements a method of simulating a wafer robot movement range based on the QT platform as claimed in any of claims 1 to 7.
10. An electronic terminal, comprising: a processor and a memory;
the memory is used for storing a computer program;
the processor is configured to execute the computer program stored in the memory, so that the electronic terminal performs the method for simulating the movement range of the wafer robot based on the QT platform according to any one of claims 1 to 7.
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