CN116456567B - Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly - Google Patents
Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly Download PDFInfo
- Publication number
- CN116456567B CN116456567B CN202310450417.7A CN202310450417A CN116456567B CN 116456567 B CN116456567 B CN 116456567B CN 202310450417 A CN202310450417 A CN 202310450417A CN 116456567 B CN116456567 B CN 116456567B
- Authority
- CN
- China
- Prior art keywords
- water
- thin
- wall
- cylinder structure
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 124
- 238000005452 bending Methods 0.000 claims abstract description 41
- 238000000605 extraction Methods 0.000 claims abstract description 35
- 239000011148 porous material Substances 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims description 31
- 230000000903 blocking effect Effects 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 15
- 230000005684 electric field Effects 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 description 14
- 230000000694 effects Effects 0.000 description 9
- 238000013461 design Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
Abstract
The invention discloses a cooling structure and a water-cooling arc cavity assembly for a superconducting ECR ion source, wherein the cooling structure for the superconducting ECR ion source comprises the following components: the arc cavity outer cylinder comprises a thin-wall outer cylinder structure and an outer flange positioned at the outer side of one axial end of the thin-wall outer cylinder structure, and a plurality of water holes are formed in the outer flange at intervals along the circumferential direction; the arc cavity inner cylinder comprises a thin-wall inner cylinder structure sleeved by the thin-wall outer cylinder structure and an inner side flange positioned at the end part of the thin-wall inner cylinder structure far away from the outer side flange, wherein a mounting position for arranging a plasma extraction electrode is arranged in the middle of the inner side flange, and a plurality of independent bending pipelines are arranged around the mounting position in the inner side; and the thin-wall outer cylinder structure and the thin-wall inner cylinder structure are matched to form a plurality of independent pore passages which are respectively communicated with the water through holes, and one bending pipeline is communicated with at least two independent pore passages so as to form a water inlet pipeline and a water outlet pipeline. The invention can fully cool the superconducting ECR ion source arc cavity and the plasma electrode.
Description
Technical Field
The invention relates to the technical field of superconducting ECR ion source restraint devices, in particular to a cooling structure for a superconducting ECR ion source and a water-cooling arc cavity assembly.
Background
In normal temperature coils or full permanent magnet ECR ion sources, lower microwave power (less than 2 KW) and lower frequencies (less than 18 GHz) are typically used. The water cooling design of the arc cavity of the ion source adopts straight cylinder single-way in and out, and the plasma electrode is not cooled, so that the ion source can meet the requirements under the working conditions of lower magnetic field, lower microwave frequency and lower microwave power.
Because of the high charge state, heavy ion beam such as Bi 31+ required by physical users, a high charge state superconducting ECR ion source needs to be developed with a microwave operating power of 5KW. The arc cavity length and the volume of the ion source are far greater than those of the conventional ion source, so that the original arc cavity design cannot meet the ion source with higher requirements. It is therefore desirable to provide a cooling structure that is capable of sufficiently cooling the superconducting ECR ion source arc chamber and the plasma electrode.
Disclosure of Invention
In view of the foregoing, it is an object of the present invention to provide a cooling structure and a water-cooled arc chamber assembly for a superconducting ECR ion source, which aims to sufficiently cool the cooling structure of the superconducting ECR ion source arc chamber and the plasma electrode.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
A cooling structure for a superconducting ECR ion source according to an embodiment of the first aspect of the present invention includes: the arc cavity outer cylinder comprises a thin-wall outer cylinder structure and an outer flange positioned at the outer side of one axial end of the thin-wall outer cylinder structure, and a plurality of water holes are formed in the outer flange at intervals along the circumferential direction; the arc cavity inner cylinder comprises a thin-wall inner cylinder structure sleeved by the thin-wall outer cylinder structure and an inner side flange positioned at the end part of the thin-wall inner cylinder structure far away from the outer side flange, wherein an installation position for arranging a plasma extraction electrode is arranged in the middle of the inner side flange, and a plurality of independent bending pipelines are arranged around the installation position in the inner side flange; and the thin-wall outer cylinder structure is matched with the thin-wall inner cylinder structure to form a plurality of independent pore canals which are respectively communicated with the water through holes, and one bending pipeline is communicated with at least two independent pore canals so as to form a water inlet pipeline and a water outlet pipeline.
According to some embodiments of the present invention, the number of the water through holes and the number of the independent channels are six, the number of the bending pipelines is three, and each two of the independent channels are communicated with the same bending pipeline.
According to some embodiments of the invention, the inboard flange comprises: a peripheral wall located in the peripheral direction; the middle wall body is positioned in the middle, the middle position of the middle wall body is provided with the installation position, the middle wall body is provided with a protruding end which is used for being connected with the peripheral wall body to form the bending pipeline, and two ends of the bending pipeline, which are far away from each other, are respectively provided with a water inlet which is communicated with the water inlet pipeline and a water outlet which are communicated with the water outlet pipeline; and one end of the water blocking column is arranged on the peripheral wall body between the water inlet and the water outlet, and the other end extends towards the inside of the bending pipeline and forms a water passing port with the intermediate wall body.
According to some embodiments of the invention, the water deflector column is adapted to be detachably connected to the peripheral wall.
According to some embodiments of the present invention, a fixed circular hole is drilled on the peripheral wall body located right between the water inlet and the water outlet, and the water blocking column is configured to be cylindrical and adapted to be inserted into the fixed circular hole; the thin-wall outer cylinder structure covers the outer side of the water retaining column to be abutted against the water retaining column.
According to some embodiments of the present invention, the outer peripheral wall surface of the thin-walled inner cylinder structure is attached to the inner wall surface of the thin-walled outer cylinder structure, one of the outer peripheral wall surface and the inner wall surface of the thin-walled outer cylinder structure is provided with six water channels uniformly distributed along the circumferential direction, the other one of the outer peripheral wall surface and the inner peripheral wall surface is suitable for covering part of the openings of the water channels to form the independent pore channels, and the openings at two ends of the water channels respectively correspond to the water inlets and the water outlets of the water channels and the inner side flanges.
According to some embodiments of the invention, the thin-walled inner cylinder structure and the thin-walled outer cylinder structure are assembled by a close sliding fit.
A water-cooled arc chamber assembly according to an embodiment of the second aspect of the invention for ion source confinement of a plasma, the water-cooled arc chamber assembly comprising: a cooling structure for a superconducting ECR ion source as claimed in any of the foregoing; and the plasma extraction electrode is arranged as a mounting via hole, the plasma extraction electrode is detachably arranged in the mounting via hole, a through hole is formed in the middle of the plasma extraction electrode, one side, close to the inner space of the thin-wall inner cylinder structure, of the plasma extraction electrode is a plane, and the other side, deviating from the plane, is arranged as a conical surface which accords with an electric field required by ion extraction.
According to some embodiments of the invention, the plasma extraction electrode comprises a cylindrical body and a convex ring arranged at the periphery of one end of the cylindrical body, wherein the through hole is arranged in the middle of the cylindrical body; the mounting position is set to the shoulder hole, the shoulder hole is including being close to the first hole section of thin wall inner tube structure inner space, and deviate from the second hole section of thin wall inner tube structure inner space, first hole section is suitable for setting up the cylindricality body, second hole Duan Shiyu sets up the bulge loop.
According to some embodiments of the invention, the outer circumferential surface of the cylindrical body is in close contact with the bore wall of the first bore section.
According to some embodiments of the invention, the collar is attached to the second bore section by a screw lock.
Due to the adoption of the technical scheme, the invention has at least the following advantages:
1. Cooling water is input from a plurality of water through holes arranged on the outer side flange, and flows through independent pore passages communicated with the water through holes, bending pipelines communicated with the independent pore passages, other independent pore passages communicated with the bending pipelines and the water through holes communicated with the other independent pore passages in sequence, so that the cooling water can cool the thin-wall inner cylinder structure and the inner side flange;
2. The continuous flow of cooling water enables effective cooling;
3. The cooling water flowing through the bending pipeline can absorb heat to the plasma extraction electrode on the installation position to cool;
4. The independent pore channels are separated so as to avoid the formation of a waterway short circuit between the water inlet pipeline and the water outlet pipeline, and the bending pipelines are independently arranged around the installation phase so as to avoid the mixed flow of cooling water between the bending pipelines;
5. According to the magnetic field characteristics of the ion source, a plurality of independent pore channels are arranged to pass through the weak field distribution positions, so that the weak field positions can be sufficiently cooled.
Drawings
FIG. 1 is a schematic cross-sectional view of a water-cooled arc chamber assembly according to some embodiments of the invention;
FIG. 2 is another schematic cross-sectional view of a water-cooled arc chamber assembly according to some embodiments of the invention;
FIG. 3 is a further schematic cross-sectional view of a water-cooled arc chamber assembly according to some embodiments of the invention;
FIG. 4 is a schematic view of the configuration of an inner arc chamber barrel in a water cooled arc chamber assembly according to some embodiments of the invention;
FIG. 5 is a schematic view of the structure of an arc chamber outer barrel in a water cooled arc chamber assembly according to some embodiments of the invention;
FIG. 6 is a schematic diagram of a plasma extraction electrode in a water-cooled arc chamber assembly according to some embodiments of the invention;
Fig. 7 is a schematic structural view of the plasma extraction electrode shown in fig. 6 at another view angle.
The reference numerals in the drawings:
100. an arc chamber outer cylinder;
110. a thin-wall outer cylinder structure;
120. An outer flange;
130. A water through hole;
140. independent pore canal;
200. An arc cavity inner cylinder;
210. A thin-wall inner cylinder structure;
220. an inner flange;
221. A mounting position;
230. bending the pipeline;
240. An intermediate wall body;
300. Water blocking column;
400. A plasma extraction electrode;
410. a cylindrical body;
420. A convex ring;
430. and a through hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the azimuth or positional relationship indicated by the terms "upper", "lower", "front", "rear", etc. are based on the azimuth or positional relationship shown in the drawings, and are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the system or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus should not be construed as limiting the present invention.
In the description of the present invention, it should be noted that, unless explicitly stated and limited otherwise, the terms "mounted," "disposed," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The invention provides a cooling structure for a superconducting ECR ion source and a water-cooling arc cavity assembly, which aim to solve the problem of sufficient cooling of the superconducting ECR ion source, and can effectively improve the yield of the superconducting ECR ion source and optimize the performance of the ion source. Based on the embodiment and the beneficial effects of the invention, the ion source can reliably work under 5KW microwave power, can provide Bi 31+ strong-current high-charge ion beam current, can reach the leading level internationally, and plays an irreplaceable role on a large scientific device HIRFL of the recent physical research institute of the Chinese academy of sciences.
The cooling structure and the water-cooled arc chamber assembly for the superconducting ECR ion source according to the embodiments of the present invention are described in detail below with reference to the accompanying drawings.
Example 1:
Referring to fig. 1 to 5, a cooling structure for a superconducting ECR ion source according to an embodiment of the first aspect of the present invention includes: an arc chamber outer cylinder 100 and an arc chamber inner cylinder 200; the arc cavity outer cylinder 100 comprises a thin-wall outer cylinder structure 110 and an outer flange 120 positioned outside one axial end of the thin-wall outer cylinder structure 110, wherein the outer flange 120 is provided with a plurality of water through holes 130 at intervals along the circumferential direction; the arc cavity inner cylinder 200 comprises a thin-wall inner cylinder structure 210 sleeved by the thin-wall outer cylinder structure 110 and an inner side flange 220 positioned at the end part of the thin-wall inner cylinder structure 210 far away from the outer side flange 120, wherein an installation position 221 for arranging a plasma extraction electrode 400 is arranged in the middle of the inner side flange 220, and a plurality of independent bending pipelines 230 are arranged around the installation position 221; and, the thin-walled outer cylinder structure 110 and the thin-walled inner cylinder structure 210 are cooperatively formed with a plurality of independent channels 140 respectively communicated with the plurality of water through holes 130, and one bending pipeline 230 is communicated with at least two independent channels 140 so as to be capable of forming a water inlet pipeline and a water outlet pipeline.
In this embodiment, the plurality of independent channels 140 and the water through holes 130 are divided into a plurality of groups according to bending, and each group of independent channels 140 and water through holes 130 can be at least two, wherein at least one independent channel 140 and water through hole 130 are used for water inlet, and at least one independent channel 140 and water through hole 130 are used for water outlet, that is, each group of independent channels 140 and water through holes 130 and one bending pipeline 230 are formed with at least one water inlet pipeline and at least one water outlet pipeline. It is understood that each set of the independent channels 140 and the water through holes 130 and one bending pipeline 230 are an independent cooling unit, and optionally, different numbers of cooling units are provided according to actual needs, and/or the cooling units include different numbers of independent channels 140 and water through holes 130.
Specifically, cooling water is input from some water through holes 130 provided on the outer flange 120, and flows through the independent hole channels 140 communicated with the water through holes 130, the bending pipeline 230 communicated with the independent hole channels 140, another independent hole channel 140 communicated with the bending pipeline 230, and the water through holes 130 communicated with the other independent hole channel 140 in sequence, so that the cooling water can have the effect of cooling the thin-walled inner cylinder structure 210 and the inner flange 220. It should be noted that, when the cooling water flows, it can directly absorb the heat of the inner arc chamber tube 200.
Further, the cooling water is driven to continuously flow, thereby effectively cooling the locations through which the cooling water flows. Considering the cooling requirement of the plasma extraction electrode 400, the bending pipeline is closely arranged around the installation site 221, so that the cooling water flowing through the bending pipeline 230 can absorb heat to the plasma extraction electrode 400 arranged on the installation site 221 to effectively cool.
Further, the plurality of independent channels 140 are separated from each other to avoid a water short circuit between the water inlet pipeline and the water outlet pipeline, and the plurality of bending pipelines 230 are independently arranged around the mounting position 221 to avoid mixed flow of cooling water.
It should be noted that, in the cooling structure for a superconducting ECR ion source according to the embodiment of the present invention, the weak field distribution positions are calculated according to the magnetic field characteristics of the ion source, so that the plurality of independent channels 140 are disposed to pass through the weak field distribution positions, thereby enabling sufficient cooling at the weak field.
Alternatively, referring to fig. 1 to 4, in the present embodiment, the number of the water through holes 130 and the number of the independent channels 140 are six uniformly in the circumferential direction, the number of the bending pipes 230 is three uniformly in the circumferential direction, and each two independent channels 140 are communicated with the same bending pipe 230. In this way, the six weak fields can be sufficiently cooled according to the magnetic field characteristics of the ECR ion source.
Specifically, in the present embodiment, the independent cells 140 are disposed at 60-degree intervals in the circumferential direction of the thin-walled inner cylinder structure 210, and the independent cells 140 are disposed to extend in the axial direction of the thin-walled inner cylinder structure 210. Optionally, the inner flange 220 is divided into three equally divided modules in the circumferential direction for respectively providing three bending pipes 230.
However, the present design is not limited thereto, in other embodiments, the water through holes 130 and the independent channels 140 are uniformly arranged in other numbers, such as 12, in the circumferential direction, and the arrangement mode of the bending pipelines 230 and the connection mode with the independent channels 140 are adaptively adjusted to ensure the cooling effect, which is not limited specifically.
Alternatively, referring to fig. 1 to 4, in the present embodiment, the inner flange 220 includes: a peripheral wall located in the peripheral direction; the middle wall body 240 is positioned in the middle, the middle position of the middle wall body 240 is provided with a mounting position 221, the middle wall body 240 is provided with a convex end which is used for being connected with the peripheral wall body to form a bending pipeline 230, and two ends of the bending pipeline 230 which are far away form each other are respectively provided with a water inlet which is communicated with a water inlet pipeline and a water outlet which is communicated with a water outlet pipeline; and a water retaining column 300, wherein one end of the water retaining column 300 is arranged on the peripheral wall body between the water inlet and the water outlet, and the other end extends towards the inside of the bending pipeline 230 and forms a water passing port with the intermediate wall body 240. It will be appreciated that the provision of water barrier 300 can define the flow of cooling water through the water ports adjacent intermediate wall body 240, i.e., can cause each flow of cooling water to curve through the region adjacent plasma extraction electrode 400, thereby increasing the cooling effect.
Optionally, intermediate wall body 240 has a triangular-like shape in cross section with three protruding ends connected to the peripheral wall body so as to be able to enclose with outer Zhou Biti three separate areas of bending tubing 230.
Without loss of generality, in this embodiment, water barrier column 300 is adapted to be removably connected to the peripheral wall. In this way, the detachable connection mode can simplify the processing technology, does not need integral processing, reduces the processing cost, and in addition, can also facilitate the replacement of the water blocking column 300. It should be noted that the detachable connection of water blocking column 300 to the peripheral wall body is understood as: before the arc chamber inner cylinder 200 is sleeved on the arc chamber outer cylinder 100, the water blocking column 300 and the peripheral wall body are of a mutually detachable connection structure.
However, the present design is not limited thereto, and in other embodiments, the water blocking column 300 and the outer Zhou Biti may be connected by an integral molding process.
Further, referring to fig. 1 and 3, in this embodiment, a fixed circular hole is drilled on the outer peripheral wall body located right between the water inlet and the water outlet, and the water blocking column 300 is configured to be cylindrical and adapted to be inserted into the fixed circular hole; the thin-walled outer cylinder structure 110 covers the outside of the water blocking column 300 to abut against the water blocking column 300. As such, water blocking column 300 may be an alternative way of achieving a detachable connection with the outer peripheral wall.
Specifically, in the present embodiment, the water blocking column 300 can divide the bending pipe 230 into two parts for water inflow and water outflow, respectively. The size and shape of the water blocking column 300 are matched with those of the fixed circular hole, and when the water blocking column 300 is inserted into the outer peripheral surface of the fixed circular hole, the fixed circular hole can be sealed. The water blocking column 300 can realize axial limiting with the fixed round hole by arranging a limiting step surface and the like, and can realize limiting fixation and enhanced sealing effect by the abutting action of the thin-wall outer barrel structure 110.
Alternatively, referring to fig. 1 to 4, in the present embodiment, the outer peripheral wall surface of the thin-walled inner cylinder structure 210 is attached to the inner wall surface of the thin-walled outer cylinder structure 110, and one of the outer peripheral wall surface and the inner peripheral wall surface is provided with six water channels uniformly distributed along the circumferential direction, and the other is suitable for covering part of the openings of the water channels to form the independent duct 140, and the openings at both ends of the water channels correspond to the water inlets and the water outlets provided by the water through holes 130 and the inner flange 220, respectively. Thus, as an alternative way of providing the independent duct 140, in this embodiment, the water channel is opened on the surface of the structure, and the processing method is simple and easy, for example, the processing can be performed by a milling method.
Illustratively, six water channels uniformly distributed along the circumferential direction are formed on the outer circumferential wall surface of the thin-walled inner cylinder structure 210, the water channels have openings facing the outer direction, the water through holes 130 formed on the outer flange 120 extend to the inner wall surface of the thin-walled outer cylinder structure 110 and are communicated with the end openings of the water channels, and the inner wall surface of the thin-walled outer cylinder structure 110 covers the openings except the end communicated with the water through holes 130, and the water channels are close to the bottom of the end groove of the inner flange 220 for communicating the water inlet with the water outlet.
In this embodiment, after the arc chamber outer cylinder 100 is sleeved with the arc chamber inner cylinder 200 in place, the arc chamber outer cylinder 100 and the arc chamber inner cylinder can be firmly connected through a welding process, and the tightness of a waterway is ensured to prevent water leakage.
Further, in the present embodiment, the thin-walled inner cylinder structure 210 is assembled with the thin-walled outer cylinder structure 110 by a close sliding fit. It can be appreciated that when the arc chamber outer cylinder 100 and the arc chamber inner cylinder 200 are assembled, the assembly is realized by the relative sliding of the thin-wall inner cylinder structure 210 and the thin-wall outer cylinder structure 110, which has the advantages of simple and easy operation and can form the independent duct 140. Additionally, the outer peripheral wall surface of the thin-walled inner cylinder structure 210 is closely attached to the inner wall surface of the thin-walled outer cylinder structure 110, so that the independent openings 140 can be independent.
Example 2:
Referring to fig. 1 to 7, a water-cooled arc chamber assembly according to an embodiment of a second aspect of the present invention is for an ion source to confine plasma and includes: any of the cooling structures for a superconducting ECR ion source of example 1; and the plasma extraction electrode 400, the mounting position 221 is set as a mounting via hole, the plasma extraction electrode 400 is detachably arranged in the mounting via hole, the middle of the plasma extraction electrode 400 is provided with a through hole 430, one side of the plasma extraction electrode 400, which is close to the inner space of the thin-wall inner cylinder structure 210, is a plane, and the other side, which is away from the plasma extraction electrode, is set as a conical surface which accords with an electric field required by ion extraction. Wherein the taper on the plasma extraction electrode 400 is optionally set to a specific angle to be able to meet the electric field required for ion extraction.
The plasma extraction electrode 400 is detachably arranged in a manner that facilitates operations such as disassembly, replacement, and the like.
It should be noted that the above explanation of the embodiments and advantageous effects of the cooling structure for the superconducting ECR ion source is also applicable to the water-cooled arc chamber assembly of the present embodiment, and is not developed in detail herein to avoid redundancy.
Further, referring to fig. 6 and 7, in the present embodiment, the plasma extraction electrode 400 includes a cylindrical body 410 and a convex ring 420 disposed at an outer periphery of one end of the cylindrical body 410, and a through hole 430 is disposed in the middle of the cylindrical body 410; the mounting location 221 is configured as a stepped hole comprising a first hole section adjacent to the inner space of the thin-walled inner barrel structure 210, and a second hole section facing away from the inner space of the thin-walled inner barrel structure 210, the first hole section being adapted to provide the cylindrical body 410, the second hole Duan Shiyu providing the collar 420. In this way, the cooling effect can be ensured by the adaptation of the cylindrical body 410 to the first hole section of the stepped hole, and the collar 420 can be used for fixing the plasma extraction electrode 400 on the one hand, and can also cover the junction of the cylindrical body 410 and the stepped hole on the other hand, to further ensure the cooling effect.
Further, the outer circumferential surface of the cylindrical body 410 is in close contact with the wall of the first hole section.
Without loss of generality, in the present embodiment, the collar 420 is attached to the second hole section by a screw lock, so that a detachable connection of the collar 420 with the inner flange 220 can be achieved. Specifically, the second hole section has a plane connected to the first hole section, on which a plurality of threaded holes are disposed at intervals, and a plurality of holes corresponding to the threaded holes are disposed on the collar 420 at intervals for screws to pass through to lock the collar 420 to the second hole section. The screw locking mode has the advantage of simple and convenient disassembly and assembly, and can be conveniently carried out in the outer side direction of the arc cavity.
However, the present design is not limited thereto, and in other embodiments, the collar 420 may be detachably connected to the second hole section by other structures, such as a turnbuckle connection.
It should be noted that, in the embodiment of the present invention, since the plasma extraction electrode 400 and the mounting via are configured in a tightly-matched stepped shape, the heat conduction between the two can be increased, thereby improving the cooling effect on the plasma extraction electrode 400. By combining the arrangement of the water cooling structure, the invention has excellent cooling effect on the superconducting ECR ion source.
It should be noted that "and/or" in the whole text includes three schemes, taking "a and/or B" as an example, including a technical scheme, a technical scheme B, and a technical scheme that a and B meet simultaneously.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. A cooling structure for a superconducting ECR ion source comprising:
The arc cavity outer cylinder comprises a thin-wall outer cylinder structure and an outer flange positioned at the outer side of one axial end of the thin-wall outer cylinder structure, and a plurality of water holes are formed in the outer flange at intervals along the circumferential direction;
the arc cavity inner cylinder comprises a thin-wall inner cylinder structure sleeved by the thin-wall outer cylinder structure and an inner side flange positioned at the end part of the thin-wall inner cylinder structure far away from the outer side flange, wherein an installation position for arranging a plasma extraction electrode is arranged in the middle of the inner side flange, and a plurality of independent bending pipelines are arranged around the installation position in the inner side flange;
The thin-wall outer cylinder structure and the thin-wall inner cylinder structure are matched to form a plurality of independent pore canals which are respectively communicated with the water through holes, and one bending pipeline is communicated with at least two independent pore canals to form a water inlet pipeline and a water outlet pipeline;
Six water through holes and six independent pore passages are uniformly arranged along the circumferential direction, three bending pipelines are uniformly arranged along the circumferential direction, and every two independent pore passages are communicated with the same bending pipeline;
the inboard flange includes:
a peripheral wall located in the peripheral direction;
The middle wall body is positioned in the middle, the middle position of the middle wall body is provided with the installation position, the middle wall body is provided with a protruding end which is used for being connected with the peripheral wall body to form the bending pipeline, and two ends of the bending pipeline, which are far away from each other, are respectively provided with a water inlet which is communicated with the water inlet pipeline and a water outlet which are communicated with the water outlet pipeline; and
And one end of the water blocking column is arranged between the water inlet and the water outlet, and the other end extends towards the inside of the bending pipeline and forms a water passing port with the intermediate wall.
2. The cooling structure for a superconducting ECR ion source of claim 1,
The water retaining post and the peripheral wall body are suitable for detachable connection.
3. The cooling structure for a superconducting ECR ion source of claim 2,
A fixed round hole is drilled on the peripheral wall body positioned right between the water inlet and the water outlet, and the water retaining column is arranged in a cylindrical shape and is suitable for being inserted into the fixed round hole;
The thin-wall outer cylinder structure covers the outer side of the water retaining column to be abutted against the water retaining column.
4. A cooling structure for a superconducting ECR ion source according to any one of claim 1 to 3,
The periphery wall surface of the thin-wall inner cylinder structure is attached to the inner wall surface of the thin-wall outer cylinder structure, six water passing grooves are formed in one of the periphery wall surface and the inner wall surface of the thin-wall outer cylinder structure, the six water passing grooves are uniformly distributed along the circumferential direction, the other water passing groove is suitable for being covered with part of openings of the water passing grooves to form independent pore channels, and openings at two ends of the water passing grooves correspond to the water passing holes and the water inlet and the water outlet arranged on the inner side flange respectively.
5. The cooling structure for a superconducting ECR ion source of claim 4,
The thin-wall inner cylinder structure and the thin-wall outer cylinder structure are assembled through close sliding fit.
6. A water-cooled arc chamber assembly for ion source confining a plasma, the water-cooled arc chamber assembly comprising:
A cooling structure for a superconducting ECR ion source according to any of claims 1 to 5; and
The plasma extraction electrode, the installation position sets up to the installation via hole, the plasma extraction electrode can dismantle locate the installation via hole and the centre has seted up the through-hole, the plasma extraction electrode is close to one side of thin wall inner tube structure inner space is the plane, and the opposite side that deviates from sets up to the conical surface that accords with the required electric field of ion extraction.
7. The water cooled arc chamber assembly of claim 6 wherein,
The plasma extraction electrode comprises a cylindrical body and a convex ring arranged on the periphery of one end of the cylindrical body, and the through hole is arranged in the middle of the cylindrical body;
The mounting position is set to the shoulder hole, the shoulder hole is including being close to the first hole section of thin wall inner tube structure inner space, and deviate from the second hole section of thin wall inner tube structure inner space, first hole section is suitable for setting up the cylindricality body, second hole Duan Shiyu sets up the bulge loop.
8. The water cooled arc chamber assembly of claim 7 wherein,
The outer peripheral surface of the cylindrical body is in close contact with the hole wall of the first hole section; and/or
The collar is attached to the second bore section by a screw lock.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310450417.7A CN116456567B (en) | 2023-04-24 | 2023-04-24 | Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310450417.7A CN116456567B (en) | 2023-04-24 | 2023-04-24 | Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116456567A CN116456567A (en) | 2023-07-18 |
| CN116456567B true CN116456567B (en) | 2024-06-18 |
Family
ID=87128533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310450417.7A Active CN116456567B (en) | 2023-04-24 | 2023-04-24 | Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116456567B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117939766A (en) * | 2024-01-18 | 2024-04-26 | 中国科学院近代物理研究所 | Direct-cooling type plasma electrode for ultra-high power ECR ion source |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180066576A (en) * | 2016-12-09 | 2018-06-19 | (주)트리플코어스코리아 | Arc plasma waste gas treatment apparatus |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6548817B1 (en) * | 1999-03-31 | 2003-04-15 | The Regents Of The University Of California | Miniaturized cathodic arc plasma source |
| KR101041026B1 (en) * | 2008-09-01 | 2011-06-13 | 한국에너지기술연구원 | Hollow type plasma torch, Combusition apparatus plasma/gas bunner and method of melting using the appratus |
| KR100965491B1 (en) * | 2009-11-02 | 2010-06-24 | 박영배 | Complex plasma generating device |
| US9305749B2 (en) * | 2014-02-10 | 2016-04-05 | Applied Materials, Inc. | Methods of directing magnetic fields in a plasma source, and associated systems |
| CN106935459B (en) * | 2015-12-31 | 2019-06-18 | 核工业西南物理研究院 | A kind of long pulse high power ion source electrode grid cooling water channel and vacuum seal structure |
| CN206314022U (en) * | 2016-12-19 | 2017-07-07 | 中国航天空气动力技术研究院 | A kind of welding structure tubular pole |
| CN207603979U (en) * | 2017-11-30 | 2018-07-10 | 武汉天和技术股份有限公司 | Water cooling multi-chamber anode construction |
| CN110600355B (en) * | 2018-06-13 | 2021-12-24 | 财团法人工业技术研究院 | Plasma processing apparatus |
| GB201813451D0 (en) * | 2018-08-17 | 2018-10-03 | Spts Technologies Ltd | Plasma apparatus |
| CN108901115B (en) * | 2018-09-19 | 2019-06-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of plasma generator |
| CN109238624B (en) * | 2018-09-20 | 2019-08-23 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of mixing chamber for plasma wind tunnel |
| US12022600B2 (en) * | 2019-10-02 | 2024-06-25 | Korea Hydro & Nuclear Power Co., Ltd. | Plasma torch |
| CN113611586A (en) * | 2021-08-05 | 2021-11-05 | 安徽费曼尔科技有限公司 | ECR ion source device |
-
2023
- 2023-04-24 CN CN202310450417.7A patent/CN116456567B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180066576A (en) * | 2016-12-09 | 2018-06-19 | (주)트리플코어스코리아 | Arc plasma waste gas treatment apparatus |
Non-Patent Citations (1)
| Title |
|---|
| 高功率密度蒸发冷却ECR离子源磁体线圈研制;熊斌等;电机与控制学报;20160131;第20卷(第01期);22-28 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116456567A (en) | 2023-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN116456567B (en) | Cooling structure for superconducting ECR ion source and water-cooling arc cavity assembly | |
| US6515252B1 (en) | Plasma torch cartridge and plasma torch equipped therewith | |
| US20130292363A1 (en) | Non-transferred and hollow type plasma torch | |
| US7476869B2 (en) | Gas distributor for ion source | |
| US10170269B2 (en) | Magnetron having a cooling structure | |
| US7439521B2 (en) | Ion source with removable anode assembly | |
| ITTO20090317A1 (en) | COOLING SYSTEM FOR HIGH VOLTAGE POWER DENSITY ELECTRIC MOTOR, IN PARTICULAR ELECTRIC AXIAL FLOW MOTOR | |
| JP2022132708A (en) | Cooling block and industrial magnetron | |
| CN101812667A (en) | Magnetron sputtering plating film cathode device | |
| EP1982345B1 (en) | Ion source with removable anode assembly | |
| US7425711B2 (en) | Thermal control plate for ion source | |
| KR100791562B1 (en) | Cartridge for a plasma torch and plasma torch fitted therewith | |
| US7566883B2 (en) | Thermal transfer sheet for ion source | |
| CN116390318B (en) | Water-cooling micro-channel arc cavity for ultra-high power ECR ion source | |
| KR101810473B1 (en) | Flange, apparatus for accelerating electron beam, and radioactive source system using the same | |
| US11346330B1 (en) | Additively manufactured components for electric propulsion thrusters | |
| CN213522490U (en) | Insulation structure for multi-pole plasma generator | |
| CN214014602U (en) | Drift tube | |
| CN213662040U (en) | Small anode for multi-pole plasma generator | |
| CN112839422B (en) | Insulating structure for multipole plasma generator | |
| KR102101493B1 (en) | Plasma Torch | |
| CN210247127U (en) | Plasma generator | |
| EP4044772A1 (en) | Plasma torch | |
| US3546522A (en) | Induction plasma generator with gas sheath forming chamber | |
| CN2836418Y (en) | Water-cooled radiator for microwave magnetron |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |