Surface smoothness processing device and method
Technical Field
The invention relates to the field of superhard template surface polishing, in particular to a surface smoothness treatment device and method.
Background
With the advent of the global 5G age, the integrated circuit industry would have seen unprecedented significant opportunity to develop, and the market demand for integrated circuit chips in the 5G communications device field would be expected to increase in the coming years. The 5GPCB superhard template is an important part of a manufacturing process for manufacturing integrated circuit chips, has a market scale of hundreds of millions, and has very high entering threshold for enterprises due to extremely high requirements on the processing process, particularly high flatness, high hardness, high corrosion resistance, high expansion coefficient and the like, belongs to the category of high-end manufacturing industry, and needs to polish the surface of the 5GPCB superhard template when the 5GPCB superhard template is produced, so that the smoothness treatment on the surface of the 5GPCB superhard template is realized.
But current superhard template surface smooth processing equipment is in the use, can not effectually realize carrying out the centre gripping fixed to superhard template for superhard template is when carrying out polishing, rocks easily, causes polishing not meticulous enough, and to the installation of superhard template, can not realize the position control, and then causes the placing of superhard template not enough convenient, causes the injury scheduling problem to operating personnel easily.
Disclosure of Invention
In order to overcome the defects, the invention provides a surface smoothness treatment device and a surface smoothness treatment method, which are used for solving the problems that the superhard template is inconvenient to place, the injury of operators is easy to cause, stable clamping and fixing cannot be realized and the like.
The invention is realized in the following way:
The surface smoothness processing device comprises a pushing mechanism and a clamping mechanism, wherein the clamping mechanism is fixedly arranged at the upper part of the pushing mechanism;
The pushing mechanism comprises a first servo electric cylinder, one end of the first servo electric cylinder is fixedly provided with a first positioning plate, two sides of the first positioning plate are respectively welded with a second positioning plate, pushing blocks are movably arranged in the first positioning plate and the second positioning plate, one end of each pushing block is movably connected with an output shaft of the first servo electric cylinder, lifting plates are attached to the upper parts of two sides of each pushing block, two ends of each pushing block are movably connected with the lifting plates through pushing rods, two sides of each lifting plate are respectively welded with a connecting plate, and the upper parts of the connecting plates are fixedly connected with first mounting plates;
The clamping mechanism is fixedly arranged on the upper portion of the first mounting plate and comprises a second servo electric cylinder and a clamping seat, the second mounting plate is welded at the rear end of the first mounting plate, the clamping seat is fixed on the first mounting plate, the second servo electric cylinder is fixed on the second mounting plate, an output shaft of the second servo electric cylinder is fixedly connected with an adjusting block, a pushing groove is formed in the clamping seat, the adjusting block is movably arranged in the pushing groove, adjusting grooves are formed in two sides of the clamping seat, an adjusting plate is movably connected to the inner side of the adjusting groove, a clamping groove is formed in the inner side end face of the clamping block, a rod groove is formed in the lower end of the inner side of the clamping seat, a spring groove is formed in the lower portion of the rod groove, two adjusting rods are movably connected to each other, one ends of the two adjusting rods are connected with the adjusting block in a fitting mode, the other ends of the adjusting rods are movably connected to the lower portion of the adjusting plate, the spring groove is movably connected to the two ends of the adjusting plate, and the spring groove is fixedly connected to the two ends of the adjusting plate respectively.
In one embodiment of the invention, the automatic feeding device further comprises a bottom plate, the pushing mechanism is fixedly arranged on the upper portion of the bottom plate, namely, the first positioning plate and the second positioning plate are welded on the upper portion of the bottom plate, and the first servo electric cylinder is fixedly arranged on the upper portion of the bottom plate.
In one embodiment of the invention, a vertical plate is welded at the tail end of the bottom plate, a placing plate is welded at the top of the vertical plate, and a reinforcing triangular plate is welded between the two ends of the placing plate and the vertical plate.
In one embodiment of the invention, a third servo electric cylinder is fixedly arranged at the upper part of the placement plate, an output shaft of the third servo electric cylinder penetrates through the placement plate and is connected with a mounting frame, a servo motor is fixedly arranged in the mounting frame, and the output end of the servo motor is connected with a polishing plate through a clamping joint.
In one embodiment of the invention, a sliding groove is formed in the inner side of the lower part of the second positioning plate, a limit bar is fixedly arranged on the inner side of the upper part of the second positioning plate, sliding blocks are fixedly arranged on two sides of the pushing block, the sliding blocks on two sides slide in the sliding groove, and the limit bar is movably arranged among the lifting plate, the connecting plate and the first mounting plate.
In one embodiment of the invention, a second pin shaft is connected between the lifting plates at two sides, one ends of the two push rods are respectively and movably connected with the second pin shaft, a first notch and a second notch are respectively formed at two ends of the pushing block, a first pin shaft is arranged between the first notch and the second notch, the other ends of the two push rods are respectively and movably connected with the first pin shaft, an output shaft of the first servo electric cylinder penetrates through the first positioning plate and is connected with an L-shaped plate, and the L-shaped plate is movably connected with the first pin shaft at one end.
In one embodiment of the invention, the pushing groove is communicated with the rod groove, both sides of the adjusting block and the end part of the adjusting rod are respectively provided with an inclined surface, so that the joint connection is facilitated, the rear end of the clamping block is provided with the connecting groove, and the upper end of the adjusting plate is movably connected in the connecting groove through the connecting rod.
In one embodiment of the invention, a first connector is welded at the upper part of the adjusting plate, the first connector is movably connected inside the adjusting groove through a third pin shaft, a second connector is welded at the lower part of the adjusting plate, and the second connector is movably connected with one end of the adjusting rod through a fourth pin shaft.
In one embodiment of the invention, a supporting column is fixedly arranged in the middle of the upper surface of the clamping seat, limiting grooves are formed in two sides of the clamping seat, limiting blocks are welded on two sides of the clamping block respectively, and the limiting blocks are connected in the limiting grooves in a sliding mode respectively.
The application method of the surface smoothness treatment device comprises the following steps:
the method comprises the steps of S1, firstly, mounting and fixing equipment, namely, fixedly mounting a bottom plate on an equipment platform through bolts, or fixedly mounting supporting legs on the bottom plate for supporting, keeping the balance stability of the bottom plate, welding a vertical plate on the tail end of the bottom plate, welding a placement plate on the top of the vertical plate, mounting and fixing a third servo electric cylinder through the placement plate, penetrating an output shaft of the third servo electric cylinder through the placement plate, and connecting an installation frame, wherein a servo motor is fixedly mounted in the installation frame, and the output end of the servo motor is connected with a polishing plate through a clamping connector, so that the polishing plate is moved and rotated, and further, the superhard template is subjected to surface polishing treatment;
S2, placing and clamping the superhard template: placing the superhard template on the upper part of a clamping seat of a clamping mechanism, namely on a supporting column on the upper surface of the clamping seat, wherein the supporting column is a silica gel rubber column, supporting the superhard template is realized, then a second servo electric cylinder is started, so that the second servo electric cylinder can push a regulating block, a push groove is formed in one end of the clamping seat, the regulating block is movably positioned in the push groove, a rod groove and a spring groove are formed in the inner end of the lower part of the clamping seat, regulating grooves are formed in two sides of the clamping seat, regulating plates are movably arranged in the inner part of the regulating groove, the upper end of each regulating plate is movably connected in the regulating groove through a first connecting head and a third pin shaft, regulating rods are movably connected to the two sides of the inner part of the rod groove respectively through a second connecting head and a fourth pin shaft, springs are connected to the two ends of each regulating rod in the inner part of the spring groove, the two ends of each spring are respectively fixedly connected with the lower part of the regulating plate, the two ends of each regulating block are movably provided with the clamping block, the connecting grooves are formed in the rear end of each clamping block, the top end of each regulating plate is movably connected in the connecting groove, the connecting grooves are movably connected to the inner sides of the connecting grooves through connecting pins, and the regulating rods are movably connected to the inner sides of the regulating grooves, and the regulating plates are movably connected to the two sides of the regulating plates through the regulating blocks respectively through the second connecting heads and the upper ends and the regulating blocks;
S3, limiting movement of the clamping blocks, wherein limiting grooves are formed in two sides of the clamping seat, limiting blocks are fixedly arranged in two sides of the clamping blocks, and the limiting blocks are movably arranged in the limiting grooves, so that the clamping blocks can keep balanced stability when moving, and movement deviation or falling cannot be caused;
S4, pushing and supporting the superhard templates, wherein a pushing mechanism is fixedly arranged at the upper part of a bottom plate, after the superhard templates are clamped and fixed, a first servo electric cylinder in the pushing mechanism is started, a first positioning plate and a second positioning plate in the pushing mechanism are welded on the bottom plate, so that effective fixed installation is realized, stability of equipment is maintained, namely, the output ends of the first servo electric cylinder push the pushing blocks, sliding grooves are formed in the lower parts of the two sides of the second positioning plate, pushing blocks are movably arranged between the second positioning plates, sliding blocks are fixedly arranged on the two sides of the pushing blocks, namely, the sliding blocks are slidably connected in the sliding grooves through the sliding blocks, the pushing blocks can stably move, a first notch and a second notch are formed in the two ends of the pushing blocks, a first pin shaft is arranged in the first notch and the second notch, namely, the output ends of the first servo electric cylinder are movably connected to the first pin shaft through an L-shaped plate, the upper ends of the pushing blocks are provided with lifting plates, lifting plates are attached to the lifting plates are arranged between the lifting plates on the two sides, the lifting plates are movably connected to the second pin shaft through the second pin shaft, and the second mounting plate is fixedly connected to the mounting plate through the second pin shaft, and the mounting plate can be fixedly arranged on the second mounting plate;
S5, limiting movement is realized by lifting, wherein a limiting strip is fixedly arranged on the inner side of the second positioning plate, and is movably arranged among the lifting plate, the connecting plate and the first mounting plate, namely, when the first servo electric cylinder pushes the pushing block, the pushing block and the lifting plate keep horizontal pushing through the actions of the second positioning plate, the sliding groove, the sliding block and the limiting strip, and when the lifting plate falls off the limiting strip, the lifting plate is lifted by the push rod at the moment, so that the clamping mechanism is pushed upwards, and the superhard template is pushed upwards;
S6, polishing the superhard template, namely after pushing up the superhard template, starting a third servo electric cylinder to realize the adjustment of the height of the mounting frame, and then starting a servo motor in the mounting frame, so that the servo motor can drive the polishing plate to realize the surface polishing of the superhard template.
The beneficial effects of the invention are as follows:
According to the superhard template clamping device, when the superhard template clamping device is used, clamping and fixing are achieved through the clamping mechanism, namely the adjusting rod is pushed through the second servo electric cylinder and the adjusting block, the adjusting rod can drive the adjusting plates on the two sides to conduct angle adjustment, the adjusting plate can drive the clamping block to move, the clamping block can effectively and fixedly clamp the superhard template, stability of the superhard template is kept, shaking or shifting cannot be caused when the superhard template is polished, the spring is arranged, reset of the adjusting plates on the two sides can be effectively achieved through the spring, clamping of the superhard template is conveniently released, pushing of the clamping mechanism is achieved through the pushing mechanism, namely the pushing block is driven to move through the first servo electric cylinder, the pushing block moves in the second positioning plate, and the pushing block is connected with the lifting plate through the pushing rod, so that the clamping mechanism can push the lifting plate to carry the superhard template to conveniently polish, the superhard template is effectively clamped and fixed, and the superhard template is conveniently placed and installed.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic illustration of a pushing mechanism according to the present invention;
FIG. 3 is a schematic top view of a portion of the pushing mechanism of the present invention;
FIG. 4 is a schematic bottom view of a portion of the pushing mechanism of the present invention;
FIG. 5 is a schematic view of a clamping mechanism according to the present invention;
FIG. 6 is a cross-sectional view of the clamping mechanism of the present invention;
fig. 7 is a schematic view of a portion of a clamping mechanism according to the present invention.
In the figure, 1, a pushing mechanism; 101, first servo cylinder, 102, first positioning plate, 103, second positioning plate, 104, sliding groove, 105, limit bar, 106, pushing block, 107, first notch, 108, second notch, 109, first pin, 110, push rod, 111, L-shaped plate, 112, slide block, 113, lifting plate, 114, second pin, 115, connecting plate, 116, first mounting plate, 117, second mounting plate, 2, clamping mechanism, 201, second servo cylinder, 202, clamping seat, 203, pushing groove, 204, adjusting block, 205, adjusting groove, 206, adjusting plate, 207, first connecting head, 208, third pin, 209, second connecting head, 210, fourth pin, 211, rod groove, 212, adjusting rod, 213, spring groove, 214, spring, 215, clamping block, 216, clamping groove, 217, connecting groove, 218, limiting block, 219, limiting groove, 220, supporting column, 3, bottom plate, 4, vertical plate, 5, placing plate, 6, reinforcing plate, 7, third servo motor, 8, adjusting plate, 9, 10, polishing plate.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments of the invention, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the invention.
Referring to fig. 1-7, in a first embodiment:
The invention provides a technical scheme that the surface smoothness treatment device comprises a pushing mechanism 1 and a clamping mechanism 2, wherein the clamping mechanism 2 is fixedly arranged at the upper part of the pushing mechanism 1;
The pushing mechanism 1 comprises a first servo electric cylinder 101, a first positioning plate 102 is fixedly arranged at one end of the first servo electric cylinder 101, second positioning plates 103 are respectively welded at two sides of the first positioning plate 102, a pushing block 106 is movably arranged in the first positioning plate 102 and the second positioning plate 103, one end of the pushing block 106 is movably connected with an output shaft of the first servo electric cylinder 101, lifting plates 113 are attached to the upper parts of two sides of the pushing block 106, two ends of the pushing block 106 are movably connected with the lifting plates 113 at two sides through pushing rods 110, connecting plates 115 are respectively welded at the upper parts of the lifting plates 113 at two sides, and a first mounting plate 116 is fixedly connected with the upper parts of the connecting plates 115;
the clamping mechanism 2 is fixedly arranged on the upper portion of the first mounting plate 116, the clamping mechanism 2 comprises a second servo electric cylinder 201 and a clamping seat 202, the second mounting plate 117 is welded at the rear end of the first mounting plate 116, the clamping seat 202 is fixed on the first mounting plate 116, the second servo electric cylinder 201 is fixed on the second mounting plate 117, an output shaft of the second servo electric cylinder 201 is fixedly connected with an adjusting block 204, a push groove 203 is formed in the clamping seat 202, the adjusting block 204 is movably arranged in the push groove 203, adjusting grooves 205 are formed in two sides of the clamping seat 202, an adjusting plate 206 is movably connected in the adjusting groove 205, a clamping block 215 is movably connected to the upper portion of the adjusting plate 206, a clamping groove 216 is formed in the inner end face of the clamping block 215, a rod groove 211 is formed in the lower end of the inner portion of the clamping seat 202, a spring groove 213 is formed in the lower portion of the rod groove 211, two adjusting rods 212 are movably connected with two adjusting rods 212, two adjusting rods 212 are movably connected with two ends of the adjusting plate 212, and two ends of the adjusting plate 206 are movably connected with the two ends of the adjusting plate 214, and the two ends of the adjusting plate 206 are movably connected with the two ends of the adjusting plate 214.
In order to realize the fixed installation of the pushing mechanism 1, in this embodiment, preferably, the pushing mechanism further includes a bottom plate 3, where the pushing mechanism 1 is fixedly installed on an upper portion of the bottom plate 3, that is, the first positioning plate 102 and the second positioning plate 103 are welded on an upper portion of the bottom plate 3, and the first servo cylinder 101 is fixedly installed on an upper portion of the bottom plate 3.
In order to achieve the installation and fixation of the equipment and maintain the connection strength, in this embodiment, preferably, the tail end of the bottom plate 3 is welded with a vertical plate 4, the top of the vertical plate 4 is welded with a placement plate 5, and reinforcing triangular plates 6 are welded between two ends of the placement plate 5 and the vertical plate 4.
In order to realize polishing treatment on the superhard template, so that smoothness treatment can be realized on the surface of the superhard template, in this embodiment, preferably, a third servo electric cylinder 7 is fixedly installed on the upper portion of the placement plate 5, an output shaft of the third servo electric cylinder 7 penetrates through the placement plate 5 to be connected with a mounting frame 8, a servo motor 9 is fixedly installed inside the mounting frame 8, and the output end of the servo motor 9 is connected with a polishing plate 10 through a clamping connector.
In order to maintain the movement stability of the pushing block 106 and maintain the movement stability of the lifting plate 113, in this embodiment, preferably, a sliding groove 104 is formed on the inner side of the lower portion of the second positioning plate 103, a limit bar 105 is fixedly disposed on the inner side of the upper portion of the second positioning plate 103, sliding blocks 112 are fixedly disposed on two sides of the pushing block 106, the sliding blocks 112 on two sides are slidably disposed in the sliding groove 104, and the limit bar 105 is movably disposed among the lifting plate 113, the connecting plate 115 and the first mounting plate 116.
In order to realize the effective connection to lifter plate 113 and realize pushing up lifter plate 113, in this embodiment, preferably, both sides be connected with second round pin axle 114 between the lifter plate 113, two the one end of push rod 110 respectively with second round pin axle 114 swing joint, first notch 107 and second notch 108 have been seted up respectively to the both ends of pushing block 106, install first round pin axle 109 between first notch 107 and the second notch 108, two the other end of push rod 110 respectively swing joint is in on the first round pin axle 109, the output shaft of first servo electric jar 101 runs through first locating plate 102 is connected with L template 111, L template 111 swing joint is in on the first round pin axle 109 of one end.
In order to realize that the adjusting block 204 can push the adjusting rod 212, make the adjusting rod 212 can carry out angle adjustment to the adjusting plate 206, and in order to realize connecting the grip block 215, make the adjusting plate 206 can drive the grip block 215 and carry out the centre gripping superhard template, in this embodiment, preferably, push away the groove 203 with the pole groove 211 is linked together, the both sides of adjusting block 204 with the tip of adjusting rod 212 all sets up the inclined plane, is convenient for carry out laminating connection, spread groove 217 has been seted up to the rear end of grip block 215, the upper end of adjusting plate 206 is in through connecting rod swing joint the inside of spread groove 217.
In order to realize movable installation of the adjusting plate 206 and enable the adjusting plate 206 to be connected with the adjusting rod 212, in this embodiment, preferably, a first connecting head 207 is welded on the upper portion of the adjusting plate 206, the first connecting head 207 is movably connected to the inside of the adjusting groove 205 through a third pin 208, a second connecting head 209 is welded on the lower portion of the adjusting plate 206, and the second connecting head 209 is movably connected with one end of the adjusting rod 212 through a fourth pin 210.
In order to realize placing the superhard template and realizing limiting the movement of the clamping block 215 and keeping stability, in this embodiment, preferably, the middle part of the upper surface of the clamping seat 202 is fixedly provided with a supporting column 220, two sides of the clamping seat 202 are provided with limiting grooves 219, two sides of the clamping block 215 are respectively welded with limiting blocks 218, and the limiting blocks 218 are respectively and slidably connected in the limiting grooves 219.
The second embodiment is different from the first embodiment in that in order to realize effective movement of the polishing equipment in the X axis and Y axis directions, a fourth servo electric cylinder can be arranged on the placing plate 5, and the third servo electric cylinder 7 is driven to move by the fourth servo electric cylinder, so that the polishing equipment can be effectively moved in the X axis and Y axis directions, and omnibearing movement and polishing can be effectively realized;
in order to collect the dust of the superhard template after polishing and grinding, the dust collecting mechanisms are arranged on two sides of the bottom plate 3, and the dust can be collected by the suction fan, so that the environment is prevented from being polluted.
The using steps of the invention are as follows:
The method comprises the steps of firstly, mounting and fixing equipment, namely fixedly mounting a bottom plate 3 on an equipment platform through bolts, or fixedly mounting supporting legs on the bottom plate 3 for supporting, keeping balance stability of the bottom plate 3, welding a vertical plate 4 on the tail end of the bottom plate 3, welding a placement plate 5 on the top of the vertical plate 4, mounting and fixing a third servo electric cylinder 7 through the placement plate 5, enabling an output shaft of the third servo electric cylinder 7 to penetrate through the placement plate 5, connecting an installation frame 8, fixedly mounting a servo motor 9 in the installation frame 8, connecting an output end of the servo motor 9 with a polishing plate 10 through a clamping joint, and moving and rotating the polishing plate 10 to further realize surface polishing treatment of a superhard template;
Secondly, placing and clamping the superhard template: placing the superhard template on the upper part of a clamping seat 202 of a clamping mechanism 2, namely a supporting column 220 on the upper surface of the clamping seat 202, wherein the supporting column 220 adopts a silica gel rubber column to support the superhard template, then starting a second servo electric cylinder 201 to enable the second servo electric cylinder 201 to push an adjusting block 204, a push groove 203 is formed at one end of the clamping seat 202, the adjusting block 204 is movably positioned in the push groove 203, a rod groove 211 and a spring groove 213 are formed in the inner end of the lower part of the clamping seat 202, adjusting grooves 205 are formed in two sides of the clamping seat 202, an adjusting plate 206 is movably arranged in the adjusting grooves 205, the upper end of the adjusting plate 206 is movably connected in the adjusting grooves 205 through a first connecting head 207 and a third pin 208, adjusting rods 212 are movably connected at two sides of the inner part of the rod groove 211, two ends of each adjusting rod 212 are respectively connected with the adjusting plate 206 through a second connecting head 209 and a fourth pin 210, and the spring 214 is connected in the spring slot 213, two ends of the spring 214 are respectively and fixedly connected with the lower part of the adjusting plate 206, two ends of the upper surface of the clamping seat 202 are movably provided with the clamping blocks 215, the rear ends of the clamping blocks 215 are provided with the connecting slots 217, the top ends of the adjusting plate 206 are movably connected in the connecting slots 217 through connecting rods, and the end parts of the clamping blocks 215 are provided with the clamping slots 216, namely, when the second servo cylinder 201 pushes the adjusting block 204, the adjusting block 204 pushes the adjusting rods 212 on two sides, so that the adjusting rods 212 can push the adjusting plates 206 on two sides downwards and outwards, further, the upper ends of the adjusting plates 206 can inwards move under the connection of the first connecting joints 207, the adjusting plates 206 clamp and fix the superhard templates on the supporting columns 220 through the clamping slots 216, the stability is kept;
the third step, the limit movement of the clamping block 215, wherein limit grooves 219 are formed on two sides of the clamping seat 202, limit blocks 218 are fixedly arranged on two sides of the clamping block 215, and the limit blocks 218 are movably positioned in the limit grooves 219, so that the clamping block 215 can keep balance stability when moving, and cannot cause movement deviation or falling;
A pushing mechanism 1 is fixedly arranged at the upper part of a bottom plate 3, after the super-hard template is clamped and fixed, a first servo electric cylinder 101 in the pushing mechanism 1 is started, a first positioning plate 102 and a second positioning plate 103 in the pushing mechanism 1 are welded on the bottom plate 3, so that effective fixed mounting is realized, the stability of equipment is maintained, namely, the output end of the first servo electric cylinder 101 pushes a pushing block 106, sliding grooves 104 are formed at the lower parts of two sides of the second positioning plate 103, a pushing block 106 is movably arranged between the second positioning plates 103, sliding blocks 112 are fixedly arranged at two sides of the pushing block 106, namely, the pushing block 106 can be kept to stably move through sliding blocks 112, a first notch 107 and a second notch 108 are formed at two ends of the pushing block 106, a first pin shaft 109 is arranged in the first notch 107 and the second notch 108, namely, the output end of the first servo electric cylinder 101 is movably connected to the first pin shaft 109 through an L111, the first pin shaft 109 is movably connected to the two ends of the pushing block 106, a second pin shaft 113 is respectively arranged at two ends of the pushing block 106, a lifting plate 113 is fixedly connected to the two sides of the second pin shaft 116, and the lifting plate 116 is fixedly connected to the second pin shaft 116 through a lifting plate 116, and the lifting plate 116 is fixedly arranged at two ends of the lifting plate 117, and the lifting plate 116 is fixedly connected to the two sides of the lifting plate 116 is arranged at the two sides of the lifting plate 116, and the lifting plate 116 is fixedly connected to the lifting plate 116, and the lifting plate is fixedly connected with the lifting plate 116, and the lifting plate is mounted at the lifting plate, and the lifting plate is mounted on the lifting plate, and the lifting plate is mounted;
the fifth step, the limit movement realizes the lifting, wherein a limit bar 105 is fixedly arranged on the inner side of the second positioning plate 103, and the limit bar 105 is movably arranged between the lifting plate 113, the connecting plate 115 and the first mounting plate 116, namely, when the first servo electric cylinder 101 pushes the pushing block 106, the pushing block 106 and the lifting plate 113 keep horizontal pushing under the action of the second positioning plate 103, the sliding groove 104, the sliding block 112 and the limit bar 105, and when the lifting plate 113 falls off the limit of the limit bar 105, the push rod 110 lifts the lifting plate 113 at the moment, so that the clamping mechanism 2 is pushed upwards, and the superhard template is pushed upwards;
And step six, polishing the superhard template, namely after pushing the superhard template up, starting a third servo electric cylinder 7 to adjust the height of the mounting frame 8, and then starting a servo motor 9 in the mounting frame 8, so that the servo motor 9 can drive a polishing plate 10 to polish the surface of the superhard template.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, and various modifications and variations may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.