CN116328452A - Purifying and dedusting equipment - Google Patents
Purifying and dedusting equipment Download PDFInfo
- Publication number
- CN116328452A CN116328452A CN202310610306.8A CN202310610306A CN116328452A CN 116328452 A CN116328452 A CN 116328452A CN 202310610306 A CN202310610306 A CN 202310610306A CN 116328452 A CN116328452 A CN 116328452A
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- air
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- buffer
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- 239000000428 dust Substances 0.000 claims abstract description 56
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 20
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 17
- 238000011010 flushing procedure Methods 0.000 claims description 37
- 239000011521 glass Substances 0.000 claims description 33
- 238000002156 mixing Methods 0.000 claims description 27
- 238000009423 ventilation Methods 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 238000001914 filtration Methods 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 239000012634 fragment Substances 0.000 claims 6
- 239000007789 gas Substances 0.000 description 30
- 230000003749 cleanliness Effects 0.000 description 11
- 230000005484 gravity Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/70—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter
- B01D46/72—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter with backwash arms, shoes or nozzles
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
- Y02A50/2351—Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention provides purifying and dedusting equipment, and relates to the technical field of purifying equipment. The purifying and dedusting equipment comprises a workbench, a liner filter and a vacuum pump; the workbench is provided with a containing cavity, and the containing cavity, the liner type filter and the vacuum pump are sequentially communicated end to end through pipelines to form a circulating loop; the accommodating cavity of the workbench is used for operators to process and charge the silicon carbide long crystal crucible. The purifying and dedusting equipment can clean dust generated in the processing process and the charging process of the silicon carbide long crystal crucible in time with low cost and high efficiency.
Description
Technical Field
The invention relates to the technical field of purifying equipment, in particular to purifying and dedusting equipment.
Background
At present, dust such as carbon powder, silicon carbide powder and the like is easy to generate in the processing process and the charging process of the silicon carbide long crystal crucible, but many factories still process the silicon carbide long crystal crucible (such as crucible cutting or coating heat preservation cotton) and charge the silicon carbide long crystal crucible (such as charging the silicon carbide powder) in a room with lower cleanliness or without the requirement of cleanliness, so that the environment is polluted and the product quality is influenced.
Some factories have also set up specialized clean rooms for processing and charging silicon carbide growth crucibles. However, the clean room occupies a large space, and the cost of houses and purification facilities used is high.
Therefore, how to clean the dust generated in the process of processing and charging the silicon carbide long crystal crucible with low cost, high efficiency and time is a technical problem which needs to be solved rapidly at present.
Disclosure of Invention
The invention aims to provide a purifying and dedusting device which can clean dust generated in the processing process and the charging process of a silicon carbide long crystal crucible in time with low cost and high efficiency.
Embodiments of the invention may be implemented as follows:
the invention provides a purifying and dedusting device, which comprises a workbench, a liner filter and a vacuum pump, wherein the workbench is connected with the liner filter;
the workbench is provided with a containing cavity, and the containing cavity, the liner type filter and the vacuum pump are sequentially communicated end to end through pipelines to form a circulating loop; the accommodating cavity of the workbench is used for operators to process and charge the silicon carbide long crystal crucible.
The beneficial effects of purifying dust collecting equipment that this embodiment provided include:
the accommodating cavity, the liner filter and the vacuum pump of the workbench are communicated end to end in sequence, an operator carries out processing and charging operation of the silicon carbide crystal growth crucible on the workbench, generated dust such as carbon powder, silicon carbide powder and the like is efficiently and timely removed, and clean air after treatment is returned to the workbench for recycling.
In an alternative embodiment, the accommodating cavity of the workbench comprises a buffer cavity, an air supply cavity, a working cavity and a powder-gas mixing cavity which are sequentially communicated, wherein the buffer cavity is used for being communicated with the vacuum pump, and the powder-gas mixing cavity is used for being communicated with the liner type filter;
a fan and a first filter are arranged in the workbench, the fan is arranged between the buffer cavity and the air supply cavity, and the fan is used for sucking air in the buffer cavity into the air supply cavity; the first filter is arranged between the air supply cavity and the working cavity;
the bottom of the working cavity is provided with an operation table which is used for an operator to process and charge the silicon carbide long crystal crucible, the operation table is of a plate structure with holes, and the holes on the operation table can be communicated with the working cavity and the powder-gas mixing cavity;
the workbench is also provided with a sliding glass door which is slidably arranged on the workbench to open or close the working cavity.
Therefore, the purifying and dedusting equipment is separated by adopting a physical method to form four independent cavities, namely a buffer cavity, an air supply cavity, a working cavity and a powder-air mixing cavity, and a plurality of filters are arranged on the whole air channel for processing dust.
In an alternative embodiment, the buffer chamber, the air supply chamber, the working chamber and the powder-gas mixing chamber are sequentially arranged from top to bottom in space, and the bottom wall of the powder-gas mixing chamber is obliquely arranged and is used for being communicated with the lowest position of one end of the liner filter.
Because the dust has the trend of automatic whereabouts under the effect of self gravity, buffer chamber, air supply chamber, working chamber and powder gas mixing chamber set gradually from last to down in the space, be favorable to the dust high-efficient whereabouts to the powder gas mixing chamber of bottom in, the diapire slope setting in powder gas mixing chamber is favorable to guiding the dust to further carry to the inner bag formula filter moreover, improves conveying efficiency.
In an alternative embodiment, the top of the buffer cavity is provided with a ventilation port communicated with the outside of the workbench, and a second filter is arranged in the ventilation port;
the buffer cavity is internally provided with a pressure balancing mechanism at one side close to the ventilation port, the pressure balancing mechanism is used for increasing the opening of a channel of the pressure balancing mechanism when the buffer cavity is in pressure difference with the outside, and the channel is used for communicating the buffer cavity with the outside.
Like this, set up pressure balance mechanism in the cushion chamber, when the pressure in the cushion chamber is too big, the aperture of pressure balance mechanism's passageway increases, and the cushion chamber is discharged air outwards through the second filter, and when the pressure in the cushion chamber is too little, the aperture of pressure balance mechanism's passageway also increases, and the cushion chamber is induced draft to equipment in this moment through the second filter to keep the stable circulation flow of air current in the equipment, also guarantee the homogeneity and the cleanliness factor of air in the equipment and the room.
In an alternative embodiment, the greater the pressure differential, the more the opening of the channel increases.
Thus, the larger the pressure difference is, the higher the ventilation efficiency between the equipment and the outside is, and the uniformity of the air in the equipment and the room is favorably and rapidly achieved.
In an alternative embodiment, the pressure balancing mechanism comprises a first arc-shaped elastic sheet and a second arc-shaped elastic sheet;
one end of the first arc-shaped elastic piece is connected to one side of the ventilation port, the other end of the first arc-shaped elastic piece extends to a buffer air inlet of the buffer cavity, the buffer air inlet is used for communicating a vacuum pump, one end of the second arc-shaped elastic piece is connected to the other side of the ventilation port, and the other end of the second arc-shaped elastic piece extends to the buffer air inlet of the buffer cavity;
the convex surface of the first arc-shaped elastic piece and the convex surface of the second arc-shaped elastic piece are close to each other, the concave surface of the first arc-shaped elastic piece and the concave surface of the second arc-shaped elastic piece are away from each other, a channel is formed between the convex surface of the first arc-shaped elastic piece and the convex surface of the second arc-shaped elastic piece, and the width of the channel is gradually increased from the middle part to two ends of the channel.
In an alternative embodiment, the buffer air inlet of the buffer cavity is formed in the wall plate of the workbench, the first arc-shaped elastic sheet is close to the wall plate relative to the second arc-shaped elastic sheet, a tangent line at the other end of the first arc-shaped elastic sheet is perpendicular to the wall plate or inclined towards the upper side of the wall plate, and a tangent line at the other end of the second arc-shaped elastic sheet is parallel to the wall plate or inclined towards the direction away from the wall plate.
Therefore, the pressure balancing mechanism has simple structure and low cost, and when the air pressure in the equipment is too high or too low, the pressure balancing mechanism is utilized to exchange air with the outside to maintain the balance of the pressure and the stability of the equipment.
In an alternative embodiment, the liner filter comprises a housing, a filter tube, a gas flushing tube, and a gas flushing ring;
an air inlet cavity, a filtering cavity and a dust collecting cavity are sequentially arranged in the shell from top to bottom; an air inlet of the liner type filter is formed in the top of the air inlet cavity, the filter pipe and the air flushing ring are arranged in the filter cavity, and an air outlet communicated with the vacuum pump is formed in the side wall of the filter cavity; the bottom of the dust collection cavity is provided with a dust extraction opening;
the plurality of filter pipes are vertically arranged in the filter cavity, the top ports of the filter pipes are communicated with the air inlet cavity, the side walls of the filter pipes are provided with filter holes, and the bottom ports of the filter pipes are used for falling out dust and are communicated with the dust collecting cavity;
the air flushing rings are sleeved on the peripheries of the plurality of filter pipes, the plurality of air flushing rings are arranged at intervals along the vertical direction, and air flushing holes are formed in the inner wall of the air flushing ring; the air pump is used for blowing air into the air pump so that the air blowing holes spray air to the filter pipes, and dust on the surfaces of the filter pipes and in the filter holes is blown down.
Like this, be equipped with the filter tube in the inner bag formula filter, the powder gas mixture is inhaled in the filter tube under the effect of vacuum pump, and the dust is kept apart in the filter tube, and the air then is arranged to the vacuum pump side, and the gas blow-out is gaseous to blow off the dust in the surface of filter tube and the filtration hole, and the dust gathers in the dust collection cavity under the effect of gravity, can clear up the discharge.
In an alternative embodiment, the inner container type filter further comprises a differential pressure meter, the differential pressure meter is used for monitoring the differential pressure between the inside and the outside of the filter tube, and under the condition that the differential pressure between the inside and the outside of the filter tube exceeds a threshold value, the powder-gas mixing cavity is suspended to ventilate into the inner container type filter, and the air pump is started to spray gas to the filter tube by utilizing the gas flushing holes.
Therefore, whether the filter pipe is blocked or not is judged by the differential pressure meter on the liner filter, and backflushing cleaning or replacement is performed at proper time.
In an alternative embodiment, a travel switch is provided below the sliding glass door, and when the sliding glass door is opened in the upward direction, the travel switch signals to activate the vacuum pump and the blower.
Thus, the operator opens the sliding glass door and the vacuum pump and the blower are automatically started.
In an alternative embodiment, a positioning switch and a limiter are arranged above the sliding glass door, and when the sliding glass door moves up to the positioning switch, the positioning switch sends out a signal to enable the limiter to lock the sliding glass door.
Therefore, when the sliding glass door is in place, the sliding glass door is automatically locked by the limiter so as to be convenient for work development, and when the sliding glass door is required to be downward, the sliding glass door is gently pulled downward.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a purifying and dedusting apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of the external structure of the workbench;
FIG. 3 is a schematic diagram showing a state of the pressure balancing mechanism when there is no pressure difference between the buffer chamber and the outside;
FIG. 4 is a schematic diagram showing the state of the pressure balancing mechanism when the pressure in the buffer chamber is greater than the external pressure;
FIG. 5 is a schematic diagram showing the state of the pressure balancing mechanism when the pressure in the buffer chamber is less than the external pressure;
fig. 6 is a schematic view of a liner filter.
Icon: 100-purifying and dedusting equipment; 1-a workbench; 2-an outer cover; 3-a control screen; 4-lighting lamp; 5-sliding glass door; 6-travel switch; 7-a limiter; 8-a buffer chamber; 9-an air supply cavity; 10-working chamber; 11-a powder-gas mixing cavity; 12-a first filter; 13-a second filter; 14-a liner filter; 15-a ventilation port; 16-buffer inlet; 17-a wall plate; 18-an operation table; 19-a housing; 20-an air inlet cavity; 21-a filter cavity; 22-a dust collection cavity; 23-dust extraction port; 24-filtering pipes; 25-flushing the air pipe; 26-an electric valve; 27-flushing ring; 28-differential pressure gauge; 29-a vacuum pump; 30-a first arc-shaped elastic sheet; 31-a second arc-shaped elastic piece; 32-channels; 33-a fan; 34-separator.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
Referring to fig. 1 and 2, the arrows in fig. 1 indicate the air flow direction, and the present embodiment provides a dust-cleaning and removing apparatus 100, and the dust-cleaning and removing apparatus 100 includes a table 1, a liner filter 14, and a vacuum pump 29.
The workbench 1 is provided with a containing cavity, the containing cavity comprises a buffer cavity 8, an air supply cavity 9, a working cavity 10 and a powder-gas mixing cavity 11 which are sequentially communicated, wherein the buffer cavity 8 and the air supply cavity 9 are separated by a partition 34, the buffer cavity 8 is communicated with a vacuum pump 29, and the powder-gas mixing cavity 11 is communicated with a liner filter 14. In this way, the buffer chamber 8, the air supply chamber 9, the working chamber 10, the powder-air mixing chamber 11, the liner filter 14 and the vacuum pump 29 are sequentially connected end to end through pipes to form a circulation loop.
A fan 33 and a first filter 12 are arranged in the workbench 1, the fan 33 is arranged on a partition 34 between the buffer cavity 8 and the air supply cavity 9, and the fan 33 is used for sucking air in the buffer cavity 8 into the air supply cavity 9; the first filter 12 is installed between the air supply chamber 9 and the working chamber 10, and the first filter 12 is also used as a partition between the air supply chamber 9 and the working chamber 10, wherein the first filter 12 may be an H13 filter. The bottom of the working chamber 10 is provided with an operating platform 18, the operating platform 18 is used for an operator to process and charge the silicon carbide long crystal crucible, the operating platform 18 is of a plate structure with holes, and the holes on the operating platform 18 can be communicated with the working chamber 10 and the powder-gas mixing chamber 11.
The purifying and dedusting equipment 100 is separated by a physical method to form four independent cavities, namely a buffer cavity 8, an air supply cavity 9, a working cavity 10 and a powder-air mixing cavity 11, and a plurality of filters are arranged on the whole air channel for processing dust, and because the resistance of the air channel is overlarge, the air channel is jointly powered by a vacuum pump 29 and a fan 33 to send processed fresh air to an operating platform 18 or discharge the processed fresh air into a room, the environmental cleanliness of the operating platform 18 can reach thousands of levels, and the equipment cost is low.
The workbench 1, the liner filter 14 and the vacuum pump 29 are sequentially communicated end to end, an operator carries out processing and charging operations of the silicon carbide long crystal crucible on the operation table 18, generated dust such as carbon powder, silicon carbide powder and the like is efficiently and timely removed, and then the treated clean air is returned to the workbench 1 for recycling.
Because the dust has the trend of automatically falling under the action of self gravity, the buffer cavity 8, the air supply cavity 9, the working cavity 10 and the powder-gas mixing cavity 11 are sequentially arranged from top to bottom in space, and the dust is beneficial to efficiently falling into the powder-gas mixing cavity 11 at the bottom.
Further, the bottom wall of the powder-gas mixing cavity 11 is obliquely arranged, and one end position for communicating the liner filter 14 is the lowest, so that dust is guided to be further conveyed to the liner filter 14, and conveying efficiency is improved.
The workbench 1 is further provided with an outer cover 2, a control screen 3, an illuminating lamp 4 and a sliding glass door 5, and the sliding glass door 5 is slidably arranged on the workbench 1 so as to open or close the working cavity 10. The cover 2 is disposed outside the sliding glass door 5 and above the sliding glass door 5, and the control screen 3 is mounted on the cover 2. The illumination lamp 4 is installed in the working chamber 10.
A travel switch 6 is arranged below the sliding glass door 5, and a positioning switch and a limiter 7 are arranged above the sliding glass door 5.
The control panel 3 is electrically connected with the blower 33, the travel switch 6, the positioning switch, the limiter 7, the illumination lamp 4, the electric valve 26 (see fig. 6) on the liner filter 14, and the vacuum pump 29.
When the sliding glass door 5 is opened in the ascending direction, the travel switch 6 sends a signal to the control screen 3, and the control screen 3 controls the vacuum pump 29 and the fan 33 to be started. Thus, the operator opens the sliding glass door 5 and the vacuum pump 29 and the blower 33 are automatically started.
When the sliding glass door 5 moves up to the positioning switch, the positioning switch sends a signal to the control screen 3, and the control screen 3 controls the limiter 7 to lock the sliding glass door 5.
Referring to fig. 1, a ventilation port 15 communicating with the outside of the workbench 1 is provided at the top of the buffer chamber 8, and a second filter 13 is provided in the ventilation port 15, wherein the second filter 13 may be an F9 filter; the buffer cavity 8 is also provided with a pressure balance mechanism at one side close to the ventilation port 15, the pressure balance mechanism is used for increasing the opening of a channel 32 of the pressure balance mechanism when the buffer cavity 8 is in pressure difference with the outside, and the channel 32 is used for communicating the buffer cavity 8 with the outside. Like this, set up pressure balance mechanism in the cushion chamber 8, when the pressure in the cushion chamber 8 is too big, the aperture of pressure balance mechanism's passageway 32 increases, and the cushion chamber 8 is discharged air outwards through second filter 13, and when the pressure in the cushion chamber 8 is too little, pressure balance mechanism's passageway 32's aperture also increases, and the cushion chamber 8 is induced drafted to the equipment through second filter 13 this moment to keep the steady circulation flow of air current in the equipment, also guarantee the homogeneity and the cleanliness factor of air in the equipment and the room.
The larger the pressure difference between the buffer chamber 8 and the outside, the more the opening of the passage 32 increases. Thus, the larger the pressure difference is, the higher the ventilation efficiency between the equipment and the outside is, and the uniformity of the air in the equipment and the room is favorably and rapidly achieved.
Specifically, the pressure balancing mechanism includes a first arc-shaped elastic sheet 30 and a second arc-shaped elastic sheet 31; one end of the first arc-shaped elastic piece 30 is connected to one side of the ventilation opening 15, the other end of the first arc-shaped elastic piece 30 extends towards the buffer air inlet 16 of the buffer cavity 8, the buffer air inlet 16 is used for communicating with the vacuum pump 29, one end of the second arc-shaped elastic piece 31 is connected to the other side of the ventilation opening 15, and the other end of the second arc-shaped elastic piece 31 extends towards the buffer air inlet 16 of the buffer cavity 8; the convex surface of the first arc-shaped elastic piece 30 and the convex surface of the second arc-shaped elastic piece 31 are close to each other, the concave surface of the first arc-shaped elastic piece 30 and the concave surface of the second arc-shaped elastic piece 31 are away from each other, a channel 32 is formed between the convex surface of the first arc-shaped elastic piece 30 and the convex surface of the second arc-shaped elastic piece 31, and the width of the channel 32 is gradually increased from the middle part to the two ends of the channel 32.
The buffer air inlet 16 of the buffer cavity 8 is formed in the wall plate 17 of the workbench 1, the wall plate 17 is a side wall of the workbench 1 close to the vacuum pump 29, the first arc-shaped elastic sheet 30 is close to the wall plate 17 relative to the second arc-shaped elastic sheet 31, the tangent line A at the other end of the first arc-shaped elastic sheet 30 is perpendicular to the wall plate 17 or inclines above the wall plate 17, and the tangent line B at the other end of the second arc-shaped elastic sheet 31 is parallel to the wall plate 17 or inclines in a direction away from the wall plate 17. Therefore, the pressure balancing mechanism has simple structure and low cost, and when the air pressure in the equipment is too high or too low, the pressure balancing mechanism is utilized to exchange air with the outside to maintain the balance of the pressure and the stability of the equipment.
Referring to fig. 3, when there is no pressure difference between the buffer chamber 8 and the outside, that is, the air volume delivered by the fan 33 is equal to the air volume input by the vacuum pump 29, the first arc-shaped elastic sheet 30 and the second arc-shaped elastic sheet 31 of the pressure balancing mechanism are basically balanced in stress and do not deform, the width of the channel 32 of the pressure balancing mechanism is basically unchanged, and no air flows in the channel.
Referring to fig. 4, when the pressure in the buffer chamber 8 is greater than the external pressure, that is, the air volume delivered by the fan 33 is less than the air volume input by the vacuum pump 29, the first arc-shaped elastic sheet 30 and the second arc-shaped elastic sheet 31 of the pressure balancing mechanism are affected by the air pressure in the buffer chamber 8 and are relatively far away, the width of the channel 32 of the pressure balancing mechanism is increased, and the buffer chamber 8 releases air to the external.
Referring to fig. 5, when the pressure in the buffer chamber 8 is smaller than the external pressure, that is, the air volume delivered by the fan 33 is larger than the air volume input by the vacuum pump 29, the first arc-shaped elastic sheet 30 and the second arc-shaped elastic sheet 31 of the pressure balancing mechanism are affected by the external air pressure and are relatively far away, the width of the channel 32 of the pressure balancing mechanism is increased, and the external air enters the buffer chamber 8.
As can be seen from fig. 3 to 5, the width of the channel 32 is at a minimum when there is no pressure difference between the buffer chamber 8 and the outside; the width of the channel 32 is greater when the pressure in the buffer chamber 8 is greater or less than the ambient pressure.
Referring to fig. 6, the liner filter 14 includes a housing 19, a filter tube 24, a purge tube 25, a purge ring 27, and a differential pressure gauge 28.
An air inlet cavity 20, a filter cavity 21 and a dust collecting cavity 22 are sequentially arranged in the shell 19 from top to bottom; the air inlet of the liner filter 14 is arranged at the top of the air inlet cavity 20, the filter pipe 24 and the air flushing ring 27 are arranged in the filter cavity 21, and the side wall of the filter cavity 21 is provided with an air outlet communicated with the vacuum pump 29, wherein the filter pipe 24 can be a tubular H11 filter pipe; the bottom of the dust collection cavity 22 is provided with a dust extraction opening 23; the plurality of filter pipes 24 are vertically arranged in the filter cavity 21, the top ports of the filter pipes 24 are communicated with the air inlet cavity 20, the side walls of the filter pipes 24 are provided with filter holes, and the bottom ports of the filter pipes 24 are used for falling out dust and are communicated with the dust collecting cavity 22; the air flushing rings 27 are sleeved on the peripheries of the plurality of filter pipes 24, the plurality of air flushing rings 27 are arranged at intervals along the vertical direction, and air flushing holes are formed in the inner wall of the air flushing ring 27; the air flushing ring 27 is connected to an air pump through an air flushing pipe 25, an electric valve 26 is arranged on the air flushing pipe 25, and the air pump is used for flushing air into the air flushing ring 27, so that the air flushing hole sprays air into the filter pipe 24, and dust on the surface of the filter pipe 24 and in the filter hole is blown off. The gas supplied by the air pump may be nitrogen, and the time for the nitrogen to back flush the filter tube 24 may be set on the electric valve 26.
In this way, the filter tube 24 is provided in the liner filter 14, the powder-gas mixture is sucked into the filter tube 24 under the action of the vacuum pump 29, the dust is isolated in the filter tube 24, the air is discharged to the side of the vacuum pump 29, the gas blown out by the gas-flushing ring 27 blows off the dust on the surface of the filter tube 24 and in the filter holes, and the dust is collected in the dust collecting cavity 22 under the action of gravity, so that the dust can be cleaned and discharged.
The pressure difference meter 28 is used for monitoring the pressure difference between the inside and the outside of the filter tube 24, and when the pressure difference between the inside and the outside of the filter tube 24 exceeds a threshold value, the ventilation of the powder-gas mixing chamber 11 into the liner filter 14 is suspended, and the air pump is started to spray the gas to the filter tube 24 by using the gas-flushing hole. Thus, the pressure difference meter 28 on the liner filter 14 is used to determine whether the filter tube 24 is clogged, and the backflushing cleaning or replacement is performed at proper time.
The operation procedure of the purifying and dust removing apparatus 100 provided in the present embodiment:
1. the operator moves the sliding glass door 5 upwards, the travel switch 6 sends a signal to the control screen 3, and the control screen 3 controls the lighting lamp 4, the vacuum pump 29 and the fan 33 to be started until the sliding glass door 5 is locked on the limiter 7;
2. an operator performs the processing and loading operation of the silicon carbide long crystal crucible on an operation table 18 in the working cavity 10;
3. after the operation is completed, the operator moves the sliding glass door 5 downward until the sliding glass door 5 touches the travel switch 6, turning off the illumination lamp 4, the vacuum pump 29 and the blower 33.
The method can effectively control the requirements of the silicon carbide crystal growth crucible processing and charging processes on cleanliness, and can solve the dust problem generated in the process, thereby improving the product yield.
The beneficial effects of the purifying and dedusting apparatus 100 provided in this embodiment include:
1. the dust generated in the processing process and the charging process of the silicon carbide long crystal crucible can be cleaned off in time with low cost and high efficiency.
2. Forming a working cavity 10 with higher cleanliness in a room with lower cleanliness or without the requirement of cleanliness, simultaneously removing dust such as carbon powder and silicon carbide powder generated in the working cavity 10, and then refluxing the treated clean air into the room or the working cavity 10 for recycling;
3. the purifying and dedusting equipment 100 is physically separated to form four independent cavities, namely a buffer cavity 8, an air supply cavity 9, a working cavity 10 and a powder-air mixing cavity 11, and three filters (a liner filter 14, a first filter 12 and a second filter 13) are arranged on the whole air channel for treating dust, and because the resistance of the air channel is overlarge, the vacuum pump 29 and the fan 33 jointly provide power to vertically send the treated fresh air to the operating platform 18 or discharge the treated fresh air into a room, so that the environmental cleanliness of the operating platform 18 can reach thousands of levels.
4. The buffer chamber 8 is internally provided with a pressure balance mechanism, when the pressure in the buffer chamber 8 is overlarge, the opening of the channel 32 of the pressure balance mechanism is increased, the buffer chamber 8 is exhausted outwards through the second filter 13, when the pressure in the buffer chamber 8 is overlarge, the opening of the channel 32 of the pressure balance mechanism is also increased, and at the moment, the buffer chamber 8 is induced to the equipment through the second filter 13, so that the stable and circular flow of the air flow in the equipment is maintained, and the uniformity and the cleanliness of the air in the equipment and the room are also ensured.
5. The filter tube 24 is arranged in the liner filter 14, the powder-gas mixture is sucked into the filter tube 24 under the action of the vacuum pump 29, dust is isolated in the filter tube 24, air is discharged to the side of the vacuum pump 29, gas sprayed by the gas flushing ring 27 blows off the dust on the surface of the filter tube 24 and in the filter holes, the dust is accumulated in the dust collecting cavity 22 under the action of gravity, and the dust can be cleaned and discharged, and the dust discharged by cleaning can be recycled.
6. Whether the filter tube 24 is blocked or not is judged by the pressure difference meter 28 on the liner filter 14, and backflushing cleaning or replacement is performed at proper time.
The present invention is not limited to the above embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present invention are intended to be included in the scope of the present invention. Therefore, the protection scope of the invention is subject to the protection scope of the claims.
Claims (10)
1. The purifying and dedusting equipment is characterized by comprising a workbench (1), a liner filter (14) and a vacuum pump (29);
the workbench (1) is provided with a containing cavity, and the containing cavity, the liner type filter (14) and the vacuum pump (29) are sequentially communicated end to end through pipelines to form a circulation loop; the accommodating cavity of the workbench (1) is used for an operator to process and charge the silicon carbide long crystal crucible.
2. The purifying and dedusting device according to claim 1, characterized in that the containing cavity comprises a buffer cavity (8), an air supply cavity (9), a working cavity (10) and a powder-gas mixing cavity (11) which are communicated in sequence, wherein the buffer cavity (8) is used for being communicated with the vacuum pump (29), and the powder-gas mixing cavity (11) is used for being communicated with the liner filter (14);
a fan (33) and a first filter (12) are arranged in the workbench (1), the fan (33) is arranged between the buffer cavity (8) and the air supply cavity (9), and the fan (33) is used for sucking gas in the buffer cavity (8) into the air supply cavity (9); the first filter (12) is arranged between the air supply cavity (9) and the working cavity (10);
an operation table (18) is arranged at the bottom of the working cavity (10), the operation table (18) is used for an operator to process and charge the silicon carbide long crystal crucible, the operation table (18) is of a plate structure with holes, and the holes on the operation table (18) can be communicated with the working cavity (10) and the powder-gas mixing cavity (11);
the workbench (1) is further provided with a sliding glass door (5), and the sliding glass door (5) is slidably installed on the workbench (1) so as to open or close the working cavity (10).
3. The purifying and dedusting device according to claim 2, characterized in that the buffer chamber (8), the air supply chamber (9), the working chamber (10) and the powder-gas mixing chamber (11) are arranged in sequence from top to bottom in space, and the bottom wall of the powder-gas mixing chamber (11) is arranged obliquely and is used for being communicated with the lowest position of one end of the liner filter (14).
4. A cleaning and dedusting device according to claim 3, characterized in that the top of the buffer chamber (8) is provided with a ventilation opening (15) communicated with the outside of the workbench (1), and a second filter (13) is arranged in the ventilation opening (15);
the buffer cavity (8) is internally provided with a pressure balance mechanism at one side close to the ventilation port (15), the pressure balance mechanism is used for increasing the opening of a channel (32) of the pressure balance mechanism when the buffer cavity (8) is in pressure difference with the outside, and the channel (32) is used for communicating the buffer cavity (8) with the outside.
5. The purifying and dust removing apparatus according to claim 4, wherein the opening degree of the passage (32) increases more as the pressure difference increases.
6. The purifying and dedusting apparatus according to claim 5, characterized in that the pressure balancing mechanism comprises a first arc-shaped elastic sheet (30) and a second arc-shaped elastic sheet (31);
one end of the first arc-shaped elastic piece (30) is connected to one side of the ventilation opening (15), the other end of the first arc-shaped elastic piece (30) extends towards a buffer air inlet (16) of the buffer cavity (8), the buffer air inlet (16) is used for communicating with the vacuum pump (29), one end of the second arc-shaped elastic piece (31) is connected to the other side of the ventilation opening (15), and the other end of the second arc-shaped elastic piece (31) extends towards the buffer air inlet (16) of the buffer cavity (8);
the convex surface of first arc shell fragment (30) with the convex surface of second arc shell fragment (31) is close to each other, the concave surface of first arc shell fragment (30) with the concave surface of second arc shell fragment (31) deviates from each other, be used for between the convex surface of first arc shell fragment (30) with the convex surface of second arc shell fragment (31) form passageway (32), follow the middle part of passageway (32) is to both ends the width of passageway (32) increases gradually.
7. The purifying and dedusting device according to claim 6, wherein the buffer air inlet (16) of the buffer cavity (8) is formed on a wall plate (17) of the workbench (1), the first arc-shaped elastic sheet (30) is close to the wall plate (17) relative to the second arc-shaped elastic sheet (31), a tangent line of the other end of the first arc-shaped elastic sheet (30) is perpendicular to the wall plate (17) or inclined towards the upper side of the wall plate (17), and a tangent line of the other end of the second arc-shaped elastic sheet (31) is parallel to the wall plate (17) or inclined towards the direction away from the wall plate (17).
8. The purifying and dedusting apparatus according to claim 2, characterized in that the liner filter (14) comprises a housing (19), a filter tube (24), a flushing tube (25) and a flushing ring (27);
an air inlet cavity (20), a filtering cavity (21) and a dust collecting cavity (22) are sequentially arranged in the shell (19) from top to bottom; an air inlet of the liner filter (14) is formed at the top of the air inlet cavity (20), the filter pipe (24) and the air flushing ring (27) are arranged in the filter cavity (21), and an air outlet communicated with the vacuum pump (29) is formed on the side wall of the filter cavity (21); a dust extraction opening (23) is formed in the bottom of the dust collection cavity (22);
the filter pipes (24) are vertically arranged in the filter cavity (21), the top ports of the filter pipes (24) are communicated with the air inlet cavity (20), the side walls of the filter pipes (24) are provided with filter holes, and the bottom ports of the filter pipes (24) are used for falling out dust and are communicated with the dust collecting cavity (22);
the air flushing rings (27) are sleeved on the peripheries of the plurality of filter pipes (24), the plurality of air flushing rings (27) are arranged at intervals along the vertical direction, and air flushing holes are formed in the inner wall of the air flushing rings (27); the air flushing ring (27) is connected to an air pump through the air flushing pipe (25), and the air pump is used for flushing air into the air flushing ring (27) so that the air flushing hole sprays air into the filter pipe (24) to blow off dust on the surface of the filter pipe (24) and in the filter hole.
9. The purifying and dedusting apparatus according to claim 8, wherein the inner container filter (14) further comprises a differential pressure meter (28), the differential pressure meter (28) is used for monitoring the differential pressure between the inside and the outside of the filter pipe (24), and in case the differential pressure between the inside and the outside of the filter pipe (24) exceeds a threshold value, the ventilation of the powder-gas mixing chamber (11) into the inner container filter (14) is suspended, and the air pump is started, and the gas is ejected to the filter pipe (24) by using the gas-flushing hole.
10. The purifying and dedusting device according to claim 2, characterized in that a travel switch (6) is arranged below the sliding glass door (5), and when the sliding glass door (5) is opened upwards, the travel switch (6) sends out a signal to start the vacuum pump (29) and the fan (33);
and a positioning switch and a limiter (7) are arranged above the sliding glass door (5), and when the sliding glass door (5) moves upwards to the positioning switch, the positioning switch sends out a signal to enable the limiter (7) to lock the sliding glass door (5).
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| CN202310610306.8A CN116328452B (en) | 2023-05-29 | 2023-05-29 | Purifying and dedusting equipment |
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|---|---|---|---|
| CN202310610306.8A CN116328452B (en) | 2023-05-29 | 2023-05-29 | Purifying and dedusting equipment |
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| CN116328452A true CN116328452A (en) | 2023-06-27 |
| CN116328452B CN116328452B (en) | 2023-08-08 |
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|---|---|
| CN116328452B (en) | 2023-08-08 |
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