CN1163000A - Display panel with electrically-controlled waveguide-routing - Google Patents

Abstract

A flat panel display is based on a new switching technology for routing laser light among a set of optical waveguides and coupling that light toward the viewer. The switching technology is based on poled electro-optical structures. The display technology is versatile enough to cover application areas spanning the range from miniature high resolution computer displays to large screen displays for high definition television formats. The invention combines the high brightness and power efficiency inherent in visible semiconductor diode laser sources with a new waveguide electro-optical switching technology to form a dense two-dimensional addressable array of high brightness light emissive pixels.

Description

Display panel with electrically-controlled waveguide route

The invention relates to the device (particularly some optics are provided with) that utilizes electric field controls to come the transmission of control energy (particularly light beam).Furtherly, the present invention is about polarized structure (comprise regularly polarized structure) and electrode, can allow the luminous energy control transmission providing between the electrode under the control electric field.The invention still further relates to the brand-new type of surface plate optical display.

But Fig. 1 describes a kind of prior art of grating of electrical-optical switching, and in this structure, periodically the electrode of moulding hereinafter will illustrate the not electrode structure of moulding of subsurface material as the element that can form grating.One input beam 12 is coupled to an electrical-optical active material 2 and electrical-optical active material 2 comprises a kind of permanent grating 6 that can be light-operated.When the voltage source 10 that is coupled to above-mentioned grating electrode was cut off, above-mentioned input beam continued transmission and passes above-mentioned material and form output beam 16.When the grating electrode voltage source is closed, input beam continues to propagate by material to form output beam 16.When the grating control voltage source is switched on, in this material, produce an index modulation grating, the part of input beam is coupled to a reflection output beam 14.This material has an electro-optical activity polairzed area 4 (single farmland is arranged), and has identical polarity to be penetrated with electrode structure.One first electrode 6 and one second electrode 7 are formed interdigital structure on a common face 18 of substrate.When supply is during voltage between electrode, the vertical component of electric field (along the path of light beam 12) has opposite signal alternately, thereby staggered just forms a grating with negative index conversion to produce.Two conductors 8 are coupled to voltage source between this two electrode, the intensity of these voltage source control gratings.

Second common problem of the prior art of EO and even substrate of use and shaped electrode piezo-electric device is that the electric field that is energized increases and rapid the decline along with the distance with electrode.Figure is almost completely washed off when the distance of itself and electrode equals the characteristic dimension of figure.This problem is more serious in grating, because its characteristic dimension is very little.Only can provide modulated effect by the formed existing grating of interdigital structure electrode at shallow superficial layer.EO structure and diameter are very weak greater than the interaction of the waveguide of characteristic dimension.Can use the long grating cycle among than the interaction device of high order, the shortage of above-mentioned resolution has seriously limited efficient once again.The minimum light gate length of effective interaction of prior art is about 10 microns.Need a kind of method to keep efficient, no matter high aspect ratio (ratio that the width ratio characteristic size of light beam is produced) based on the EO equipment of minor structure.Need a kind of switchable molding structure to continue in whole section width of waveguide and even greater than the light beam that is not directed.

There are some relevant prior aries to use light source to be coupled waveguiding structure at present to be applied in the display aspect.

Wei Tenan (J.Viitanem) and Racal draw (J.Lekkala) at the 1976th phase of SPIE the 293rd to 302 page of " light LCD " of delivering in 1993, " high resolution image " and its reference) look back and use the guided wave principle to be coupled the feature of the flat-panel screens that liquid crystal switches, many designs wherein have been discussed, and all designs have the common principle of design of aftermentioned.A modulated light source mechanically scans by the active waveguide of a row electrical-optical, and these waveguides form the column element of display.The parallel electrode of one row forms the line position of display, and observer in delegation's space bit of using electro-optic effect is derived and be scattered to light from waveguide, and the two-dimensional array that therefore forms pixel is formed.

In this prior art, in the waveguide that only is limited in forming by optical core material and the refraction refractive index of optical core material greater than cladding material on every side.Usually, being limited in light in this core is forced to " leakage " in required locus and goes out outside the core of waveguide.Because the refractive index difference between this core and the lining material reduces in the electrical-optical mode thereby has destroyed waveguiding effect along a certain distance, the electrical-optical active material is can be at in-core (to reduce refractive index) or in lining material (to increase refractive index, lining material be an activity in people's such as Wei Tenan document) on the principle.In some document, the technology of destroying waveguiding effect is called " waveguide bolt (waveguide tap) ".

The light that " leakage " goes out is diffracted into a scattering center through a free space, at scattering center light towards the observer to form the picture rope of display.Spatially limited again from the light that the destroyed waveguide spills, on the contrary according to the standard diffraction theory at regional intramedullary expansion because only outwards propagated by destroyed waveguide fragment place, the two dimension of light expansion causes three problems.

At first, because it is very little before to be limited in the interior diffraction of light angle of waveguide, cause long reciprocation length (the obvious component of luminous energy can must leave the core district before beholder's scattering), this interval that will limit scattering center is greater than one millimeter, and this effect causes lower resolution displays that low pixel pack density is arranged.

Second point, the two dimension expansion of light beam make it can not collect big component and make it towards the observer in scattering center in fact, cause low power efficiency.

Thirdly, the expansion of the two dimension of light beam causes big scattering center, thereby makes Pixel Dimensions become big, also reduces monitor resolution.

The result of pixel large-spacing must lead length with long wave to cover the enough pixels that are used for display, and display must be operated in waveguiding effect loses big zone afterwards, causes the reduction of efficient once again.Therefore, existing design shortcoming is low pixel packed density, big Pixel Dimensions and low power efficiency.

Addressing these problems required is exactly to develop a kind of closely knit, efficient, low-loss electrical-optical waveguide switch, it makes from train wave and derives next whole beam direction and push a narrow solid angle, make the switching light beam can be directed to a pixel scattering center effectively or enter another waveguide (connecting another scattering center), this measure condenses upon scattering center with light beam, and makes display efficiency and pixel packed density to maximum.

No. 5106181 United States Patent (USP) (in April, 1992) and No. 5009483 United States Patent (USP) (in April, 1991), the another kind of embodiment that uses " waveguide bolt " method of it " optical waveguide display system " of Rockwell three generations (Rockwell III) prompting.The Rockwell three generations point out a kind of display, and it uses waveguide that photoconduction is drawn at the same time the row.Light is linked coating from waveguide, and electro-optic effect is used in the coating.Though this structure is different from the suggested persons of people such as above-mentioned Wei Tenan, the shortcoming of this display also is that low picture element density and efficient are not good.

People such as Tarui are called the another kind of version of No. 5045847 United States Patent (USP) (in September, 1991) prompting " waveguide bolt " method of " flat display pannel " in name, it uses a kind of planar waveguiding structure and by a stratification core material of being made up of silicon nitride and silicon spread layer.The light that is come by laser diode source is limited in the one side waveguide, till having a voltage to stride across the core of waveguide.By voltage the core refractive index is reduced, thereby light can be left from waveguiding structure.This display has above-mentioned shortcoming, and efficient is not good, because all pixels are thrown light on simultaneously, still once has only a pixel to be energized, therefore, no matter when, light has only sub-fraction to be directed to the observer.

Nelson (Nelson) is called in No. 5083120 United States Patent (USP) of " use light leak lead flat-panel displays " (in January, 1992) and shows that a kind of light leak is led and be used as a display background light in name.The light that comes from light source (a for example laser diode) is imported into photoconduction, so that the even illumination of delegation to be provided in display.A bias light and a row ferroelectric liquid crystals optical gate are united to make display picture element.At this moment, waveguide only is used to replace LCD display fluorescent commonly used and adiaphorous " waveguide bolt " or switch.

People such as Xi Cun be called in name propose in No. 4640592 United States Patent (USP) (in February, 1987) of " optical display unit that among the liquid core waveguide, uses the thermoforming bubble " a kind of with many liquid-filled many light or waveguide as the row display, these waveguides are arranged on above a series of heating electrodes.When well heater is switched on, in waveguide core, form bubble, therefore with light scattering to the observer.When scanning each row waveguide in regular turn, the laser engine formula ground of modulation promptly forms the display image.Even this method is inserted little scattering center in the core district and solved " waveguide bolt " some problems that method caused, the sequential of heating process will make display not have enough fast framework speed to come video display, not use waveguide switch in this design.

Existing technology is all used the parallel input waveguide of light source direct-drive, because switching machinery known in the art can't enter desired capable waveguide with effectively switching from the light that comes out of supply waveguide, diode matrix lamp people such as people's such as waveguide bundle illumination, Tarui slab guide excitation and Nelson He Xi village time when causing people's such as people such as Wei Tenan and Xi Cun heavy waveguide bundle illuminated scan device, Rockwell three generations.Yet the simple structure (light is entered single waveguide and is directed to pixel by being coupled at this place) of a display needs the full two-dimensional array of two continuous switches with the illumination pixel at least, and one of them selects row waveguide and another selects pixel.Though prior art can be made pixel switch more difficultly, yet the capable switch that waveguide connects can not must there be above-mentioned waveguide bolt.Between the waveguide to be coupled efficient low light spread at two-dimentional diffraction because the switch area inner waveguide destroys the back, thereby switch of needs enter another waveguide so that switches light is condensed efficiently.

The integrated optical frequency waveguide of Bake (Becker) and Zhang Shi (Chang) can not be used for doing display, because it does not comprise that " waveguide bolt " or additive method allow the observer of light directive before pixel format who propagates in waveguide.In addition, the manufacturing of switch is to use the interdigital electrode of before described (cooperating shown in Figure 1) and does not comprise any electrode structure that is formed with.This switch designs has a high insertion loss that switches, and therefore can not be applied to need the occasion of a large amount of switches in same waveguide, for example the switch data bus-bar of display or communications applications.

Prior art problems can be made a summary as follows: (1) is because big pixel separation can't be made the HIGH RESOLUTION display, (2) Di Xiaoshuai " waveguide bolt " limited the brightness of display, (3) because optical loss causes low power efficiency, and (4) power can't switch to another waveguide effectively.

Flat-panel displays according to the present invention is based on a novel handoff technique so that laser is directed and optocoupler connected to the observer in one group of optical waveguide, and handoff technique has been based on utmost point electrical-optical structure.This display technology is multi-functional, is enough to adapt to the multinomial application of the large-screen display from the HIGH RESOLUTION graphoscope to the high resolution TV format.The present invention is with high brightness and the power efficiency and the new waveguide electrical-optical handoff technique combination in semiconductor visual diode laser source, to form the dense two-dimentional addressable array of high-luminance light emission pixel.

The invention provides a kind of all solid state, panchromatic high resolution display, can be used for showing information and complete dynamically HDTV that robot calculator produces, to obtain high-performance and available battery-driven high brightness indicator.The present invention also provide can be portable the HIGH RESOLUTION display.

Under following detailed description and the cooperation of appended diagram, can further understanding be arranged to the present invention.

Illustrate

Fig. 1 is a modulator that has interdigital electrode according to prior art;

Fig. 2 is a kind of general embodiment that is used for the interactional switchable grating of body light beam according to of the present invention;

Fig. 3 is an embodiment who utilizes a kind of waveguide retrodirective reflector of switchable grating;

Fig. 4 is the embodiment of the electrode structure of a back reflection device that is used to have three same surperficial top electrodes that are arranged on crystal;

Fig. 5 is an embodiment who is used for the electrode structure of sampling device, and two electrodes wherein are being set on the similar face of crystal;

Fig. 6 is an embodiment who is used for the electrode structure of sampling device, wherein has taper three electrodes at interval and is arranged on the similar face of crystal;

Fig. 7 is the T-shape embodiment of the crossing waveguide coupling device of a polarization;

Fig. 8 is the X-shape embodiment of the crossing waveguide coupling device of a polarization;

Fig. 9 is the embodiment of the waveguide output coupling device of a polarization, outputs to outside the planar waveguide;

Figure 10 is the polarize embodiment of directed coupling device of a parallel waveguide;

Figure 11 is the top view that has shown the X crossing waveguide coupling device of the input and output wave mode distribution that substitutes;

Figure 12 is one and has the embodiment that is coupled the X crossing waveguide coupling device of district's geometric configuration with the taper of tapered electrode gap excitation;

Figure 13 is one and has the general embodiment that is coupled the X crossing waveguide coupling device of district's geometric configuration and electrode pattern;

Figure 14 is the piece type optics embodiment of a tunable frequency polarization electric light retrodirective reflector;

Figure 15 is the waveguide embodiment of a tunable frequency polarization electric light retrodirective reflector;

Figure 16 has electric light coating and the piece type optics embodiment of the tunable frequency electric light retrodirective reflector of the independent drive of polarize grating and coating;

Figure 17 is the waveguide embodiment of the electric light retrodirective reflector of a frequency multiplication polarization;

Figure 18 is the key diagram of a phase shift polarization grating;

Figure 19 is the embodiment of a multicycle grating reflector;

Figure 20 is the key diagram of the frequency response curve of two kinds of devices with polycyclic and different free spectral ranges;

Figure 21 is the embodiment of a double grating tunable mirror;

Figure 22 is the schematic illustration of an integrated calibrating device that is made of the double grating with scalable optical path length;

Figure 23 is an embodiment who has the changeable connection wye of double grating of phase shifter;

Figure 24 is the embodiment of a poled waveguide mode converter;

Figure 25 is an embodiment who uses the waveguide router of waveguide mode transducer;

Figure 26 is the embodiment of a switchable parallel waveguide resonator;

Figure 27 is the embodiment of one three arm waveguide calibrating device;

Figure 28 is the embodiment of a disc waveguide calibrating device;

Figure 29 A is an embodiment with modulator/attenuator of controlled polarization intermediate structure;

Figure 29 B is the embodiment of an adjustable lens structure;

Figure 30 is an embodiment with total internal reflection (TIR) waveguide switch of the polarization of changeable poled waveguide short segments;

Figure 31 is the embodiment of a double T IR waveguide switch;

Figure 32 is the embodiment that a TIR TURP with changeable non-polarized waveguide stub changes the beam steering device;

Figure 33 be one not with the embodiment of the two position poled waveguide routers of TIR;

Figure 34 is an embodiment with polarized T IR switch array of 50% switch packing density;

Figure 35 is an embodiment with polarized T IR switch array of 100% switch density;

Figure 36 is the embodiment of the twi guide structure of a High Density Packaging structure that is used to have the permanent tuned reflective mirror and the asymmetric loss zone of intersection;

Figure 37 is an embodiment with switchable waveguide array of TIR switch;

Figure 38 is an embodiment with switchable waveguide array of grating switch;

Figure 39 A is an embodiment who has the m * m communication switching array of system's control line;

Figure 39 B is an embodiment with 3 * 3 switching arrays of WDM ability;

Figure 40 is an embodiment who has the two dimension switching array of pixel element;

Figure 41 is an embodiment who has the one dimension switching array of the pixel element that is coupled to data track;

Figure 42 is the embodiment that a utilization can be selected the changeable spectroanalysis instrument of a grating reflector part and a detector array;

Figure 43 is the synoptic diagram of the sound multi-coated interference instrument structure of a polarization;

Figure 44 is the embodiment of the acoustic transducer of a polarization;

Figure 45 is the embodiment of the tunable coherent detector of a multifrequency light wave;

Figure 46 is an embodiment who utilizes the low-loss switchable waveguide beam splitter in single polarization district;

Figure 47 is an embodiment who utilizes the low-loss switchable waveguide beam splitter in multipolarization district;

Figure 48 is a synoptic diagram that is used for the critical design element of 1 * 3 waveguide beam splitter;

Figure 49 is a multilayer storehouse that is shown as the active waveguide assembly of scalable phased array modulator;

Figure 50 is the embodiment of the scalable waveguide attenuator of a prior art;

Figure 51 is the embodiment of a multipolarization section scalable waveguide attenuator;

Figure 52 is an embodiment who has the structure of utilizing angle broadening polarization grating widening frequency band;

Figure 53 is an embodiment with structure of utilizing the curvilinear waveguides widening frequency band;

Figure 54 be one can automatically controlled polarization lens embodiment.

Figure 55 is an embodiment who has used the Laser feedback device of periodic polarized reverberator.

Figure 56 is an embodiment who has used the Laser feedback device of periodic polarized waveguide reflector.

Figure 57 is an embodiment who has used the Laser feedback device of a plurality of feedback gratings that are switched.

Figure 58 is the embodiment of a wavelength tuning adjustable focus system.

Figure 59 introduces the generalized embodiment figure according to display equipment of the present invention.

Figure 60 is the sectional view of generalized embodiment among Figure 59.

Figure 61 is the enforcement illustration of a tri-color beam combiner.

Figure 62 is the enforcement illustration of a plane external reflection device, and mirror wherein passes through substrate.

Figure 63 is the enforcement illustration of a plane external reflection device, and substrate is passed through in dispersing with diffuse reflection wherein.

Figure 64 is the enforcement illustration of a plane external reflection device, and mirror wherein leaves from substrate surface.

Figure 65 is the enforcement illustration of a plane external reflection device, and dispersing with diffuse reflection wherein left from substrate surface.

Figure 66 is that an another kind of pixel switch structure that is combined into the attenuator structure of Figure 50 or Figure 51 is implemented illustration.

Figure 67 is the enforcement illustration of grating reflector outside the plane.

Figure 68 is the enforcement illustration that the absorber that is used for display picture element/deflector light hides, and light shown in it hides and being oppositely arranged of pixel.

Figure 69 is the enforcement illustration that one absorber/deflector light hides, and it goes out substrate surface with the bias light local derviation.

Figure 70 is the enforcement illustration that one absorber/deflector light hides, and it goes into substrate with the bias light local derviation.

Figure 71 is the enforcement illustration that one absorber/deflector light hides, and it absorbs bias light in fact.

Figure 72 is the enforcement illustration of a part that is used to drive the electrode pattern of the normality two dimension switching array that is similar to Figure 34.

Figure 73 is the enforcement illustration of switch outside the plane in a multiple-level stack waveguide distribution structure, and it imports reflected light in the substrate.

Figure 74 is the enforcement illustration of switch outside the plane in a multiple-level stack waveguide distribution structure, and it imports substrate plane with reflected light.

Figure 75 is the enforcement illustration of-90 ° of grating waveguide switches, wherein is with three input waveguide form introductions.

Figure 76 is the enforcement illustration of a bank indicator.

Figure 77 is the enforcement illustration that the light directive texture of a plurality of parallel supply waveguides, a plurality of partial reflection device and tuner is arranged.

Figure 78 is the display device structure figure by laser array supply.

Figure 79 is the enforcement illustration that is coupled to many laser arrays of interdigital waveguide.

Figure 80 be outside the plane waveguide be coupled the enforcement illustration.

Figure 81 is the enforcement illustration of the used dual polarization display device structure of three dimensional display.

Should with claim relate to particularly with the described structure of Figure 59-81.With reference to figure 2, Fig. 2 has shown the general embodiment of device 11 of the present invention, and it is the dielectric devices of a graphical polarization.This device be basically one can be automatically controlled stacking-type dielectric luminous energy diverter, or say more quickly and easily, be one can electric reflector for switching.In a preferred embodiment, the present invention is a block reflective optical system in lithium niobate ferroelectric crystal 20, and automatically controlled switching device is the grating 22 of a polarization, and it is made up of the farmland of 36 and 38 two types the polarization of alternately arranging.

Farmland---it can be Any shape or size---be one wherein some material behavior be approximate constant physical region.The farmland of a polarization is a zone in a kind of material, and wherein molecular group has a kind of directivity, and these molecular group substantial registration (or partly aiming at), or direction that is called as polarised direction of approximate alignment.The farmland that many types are arranged, they comprise: the farmland of the atomic structure of Dui Zhuning in different directions, have the molecule of aligning of parameter of change of the non-linear activity of various pictures or electrooptical coefficient and so on or the farmland of atomic structure, farmland with atomic structure of non-preferred direction, zone by different electrodes activation, just as the farmland that the polairzed area limited that polarised direction systematically changes on whole zone that takes place under polymkeric substance that polarizes with localizing electrode and the fused silica situation, the farmland of random orientation molecule, with extended, domain structure at random: the farmland on the sub-farmland of random polarization in the farmland.A polarization structure is the set on each independent farmland.The zone of patterned polarization is a kind of zone in the material, and wherein the farmland in the zone is polarized to more than a kind of farmland type according to space diagram.According to the character of polarization method, may exist system deviation between the figure that applies that uses in figure after the polarization and the polarization process process.The border of figure also may some be irregular, and may be not exclusively identical with the figure that applies, if particularly polarization is processed when not being under the control fully.Owing to use electric field to come control device, thus this device is illustrated as a kind of patterned polarization dielectric medium, so material must be dielectric, can not damage so that can stand required electric field.Typical polarization process also is to finish with the electric field that a material must be able to bear.Generally speaking, we represent the ability to bear of material to required field minimum in using with dielectric.

In operation, input beam 40 incides on the crystal and passes crystal along an optical axis.Optical axis is perpendicular to the phase front of light beam, and is to be determined by the mean place of the Luminance Distribution of light beam on wave front in propagating.Optical axis is straight line in homogeneous material, but is comprising the shaped form waveguide, in several situations such as nonhomogeneous media, and may be crooked in reflection or diffraction structure.Input beam 40 preferably has enough little spot size 21 on whole crystal length, make it can not bored a hole by crystal, causes undesirable power attenuation and mode transformation.In block interaction means as shown in Figure 2, farmland 36 and 38 must penetrate the enough distances of substrate 20, makes them can be at least overlap mutually with the part of input beam 40.Grating 22 is with respect to input beam 40 horizontally sets.The plane 34 of this expression grating 22 is transverse to the axis of input beam 40.We say that two lines (or single line and a plane, or two planes) are that the horizontal meaning is that they are not parallel mutually.Because grating is transverse to light beam 40, light beam passes the part of the structure of grating 22 at least.

Light beam 40 produces from an optical frequency source (not shown), and has a kind of wavelength and make this light beam do not absorbed by crystal basically, and makes photorefractive effect can not make the light beam significant deformation.The optical frequency source apparatus can comprise one or more can provide enough brightness that grating reflector 22 accepts wavelength in the scope to produce the light stimulus device of a useful switching output beam 44.Output beam can be coupled in same on-chip other element, or can be coupled to it in the external device (ED), and in this case, the output surface that light beam therefrom passes preferably is coated with not reflectance coating.Reflectance coating can not be a multi-layer dielectric coating, has the single quarter-wave coating of very suitable refraction materials, or sol-gel coating.Driver can be any light source, comprises laser instrument, light emitting diode, arc lamp, discharge lamp, or even incandescent lamp, as long as can reach suitable frequency spectrum brightness.Suitable frequency spectrum brightness can directly be provided by one or more drivers, provides indirectly, or is provided by above-mentioned several drivers combinations from one or more frequency transformation (frequency multiplication, mixing, or parameter amplifies) driver.Absorption effect is limited in about scope of 400 to 4000nm to wavelength.The effect of anaclasis phenomenon is with structure, wavelength, and the change of alloy and polarization structure and changing, we suppose that it is under the control here, thereby the distortion of any light beam all is within the acceptable limit.

Grating 22 is to be formed or limited by the border 34 that replaces two types the farmland of arranging.First type farmland 36 has electric light (E-O) coefficient different with second type of farmland 38, therefore is applied to the different variation that uniform electric field between electrode 24 and 26 has caused the refractive index in two types farmland.Because therefore the phase velocity of refraction index changing ripple exists impedance mismatching in the zone of different refractive indexes or phase velocity.The zone 36 opposite sensings of polarised direction that have with respect to other farmland type 38 and raw wafers 20 shown in polarised direction arrow 39,41, help to make material to reach the purpose of this variations in refractive index in material.We represent the polarised direction opposite with some reference directions with opposite sensing.(a kind of alternative method of available electric field controls grating realizes according to sheltering in the polymer film at the width of cloth, within the zone 36 or outside the E-O coefficient of this polymer film destroyed.) uniform electric field that puts on structure 22 produced a refraction index modulation.The figure of index modulation adds on the index distribution that is pre-existing in; The simplest being configured in do not have index modulation when not applying electric field, and responds the electric field generation refractive-index grating that applies linearly.The one-period 48 of grating 22 is the distances between the border, two farmlands, has fully comprised a zone corresponding to each farmland type.

A kind of alternative method that realizes refractive-index grating is used to stress application field, polairzed area and is obtained.The photoelasticity response of material produces different variations in refractive index at different polarized areas.For example can be by at high temperature on the end face of substrate, laying thin film, the method for cool to room temperature applies permanent stress field then.For example, can cause stress to concentrate by etching away a film.

Polarization element 36 and 38 alternately arrange full whole grating 22, between them not at interval.If the farmland of available additional type utilizes the variable range farmland at interval by dissimilar farmlands can form more complicated alternately spread geometry.Use for some, grating 22 is a kind of grating of uniform period as shown in Figure 2, makes to reappear in the cycle at other in the farmland type that is included in along in the one-period of the length direction of grating 22.For other application, this helps the change cycle to obtain for example a plurality of spectrum peaks or the wideer such advantage of spectral bandwidth.We with grating one vocabulary show comprise might kind geometric configuration and the array of periodic discernible structure.

The periodic refractive index grating can provide virtual photon in the interaction between light beam.This shows that optical grating construction can provide momentum for interaction, but is not energy.In order to interact, must preserve energy and momentum, when needs increase momentum when satisfying these two kinds of preservation relations simultaneously, grating is useful.The periodicity of grating has determined can be used for interactional momentum.The intensity of grating has determined " brightness " of virtual photon bundle.The quantity that light beam passes the cycle in the grating cross section has been determined the bandwidth of available virtual photon momentum.Because the restriction of bandwidth interacts and only carries out in a specific frequency spectrum scope (or a plurality of spectral range) of light frequency.Therefore mounting for grating itself has frequency selectivity, and generally operates near a nominal wavelength.

For example, in the process of as shown in Figure 2 simple reflex at a certain angle, the photon of input beam 40 has the light frequency identical with the photon of output beam 44 and 42, thereby observes energy and preserve.But the momentum of the photon in input beam 40 and the output beam 44 that has changed direction is different; In order to produce reflection process, grating 22 must provide the variation of momentum, as shown in vector Figure 43 relevant with Fig. 2.Grating 22 provides empty (momentum is arranged but do not have energy) photon for interaction, so that can preserve momentum.With i ^ThThe momentum vector that wave mode is relevant, k _i=2 π n _i/ λ _i, equal the effective refractive index n that 2 π multiply by this wave mode _iLong-pending wavelength X divided by that ripple _i, and it points to the direction of propagating.The value of momentum vector is also referred to as propagation constant.In the situation of single periodic optical grating, momentum vector k ₁The directed in orthogonal of=2 π/Λ is in grating surface, and it can have the wavelength value Λ in any Fourier transform that is present in grating.Therefore with the propagation constant k of 50% load cycle grating ₁Relevant light (grid stroke and width at interval) at interval is Λ/2.Also can be by regulating, for example, the reflectivity of light beam, or change the means in grating cycle with dilatometry or other method and come tuning interactional frequency.According to how using a given device, a refractive index structures can have a frequency spectrum that can be used for interactional wavelength and direction vector.Also can be used for the interaction that what is called " higher-order " grating interacts to many virtual photons." higher-order " grating be a kind of have one with the grating of being preserved the relevant cycle in required cycle by momentum that integer removed.Required momentum virtual photon is to obtain from the harmonic wave of " higher-order " grating.The condition of the momentum that can preserve by this method is commonly referred to as Bragg condition, and therefore grating of the present invention is a Bragg grating, and the incident angle on grating is to be used to Bragg angle interior or the resonance frequency component.The interact dual preservation of this energy and momentum all is necessary for any energy beam, and no matter this energy beam is a light beam, microbeam, beam of sound, still any other ripple class form of energy that comprises the energy field that changes in time and change.Have only the use of grating to change, be used for the impedance modulation of different-energy form, make the figure of structure to be coupled with ripple class form of energy with generation.

In Fig. 2, refractive-index grating plays frequency-selecting luminous energy router or reverberator.The wave beam of (can be interactional with the one or more virtual photons) characteristic frequency in the interaction bandwidth is called as wave beam in the band, and the energy beam of other frequency is called as the outer wave beam of band.Grating 22 has peaked half a bandwidth of whole width that is equivalent to as the grating reflection efficient of the function of light frequency.When refractive-index grating exists (grating " open-minded "), the light beam with the light frequency within the bandwidth of grating with around the angle 46 of the normal 47 of optical grating construction from optical grating reflection.Be with outer light beam along the optical axis identical, and launch by crystal, form part emitting output light bundle 42 with the identical direction of input beam with input beam.An intensity (also it can be envisioned as the intensity of virtual photon) that puts on the electric field controls index modulation in the zone that comprises grating, the ratio of the power in the output beam 42 of adjusting emission and the output beam 44 of reflection.

For a weak back reflection grating (it does not all exhaust input beam), half maximum bandwidth Δ λ of overall with is provided by following formula: $\mathrm{\Δ\λ}=\frac{{\mathrm{\λ}}^2}{2.24\mathrm{nL}}---\left(1\right)$

Wherein:

The vacuum wavelength of λ=input beam.

The refractive index of n=light beam and

The length of L=grating.

For high reflection grating, effective length is less than the total length of grating, thereby strengthened bandwidth.

Two types farmland can demonstrate refringence before applying electric field.In this case, a permanent refractive-index grating follows polarization switchable refractive index grating to exist simultaneously.When applying electric field, according to polarity, the clean modulation (grating intensity) of refractive index may increase or reduce.Then produce the situation (the refractive-index grating value is near zero) of " grating cuts off (grating off) " at a particular value that applies electric field.Then can be by applying any other field intensity " open-minded " grating.If counter-rotating applies the polarity of electric field, for example, a refractive-index grating that doubles original permanent grating intensity will be produced.

Polarization grating texture ratio prior art of the present invention has two main advantages.At first, the polarization domain structure can have border very clearly, and for the virtual photon momentum provides a strong Fourier coefficient, it is several times as much as the momentum in corresponding basic grating cycle.This is very useful in the occasion that can not carry out photoetching owing to the little physical dimension that requires.Secondly, even also can produce strong refraction rate modulated grating under the larger-size situation of light wave shape comparing with the grating cycle.This is impossible in the even polarization substrate with the patterned electrodes excitation, because weaken along with the increase electric field that leaves the electrod-array plan range is modulated into exponentially, has lost most modulation during the cycle when distance equals grating.Polarization method can produce the polarization profile with very large depth-width ratio, or the ratio of the great farmland degree of depth and width.Utilize the electric field polarization technology, obtained depth-width ratio above 250: 1.Because we use basically electrode uniformly, we have obtained good static penetrability; Owing to have dark domain wall, can carry out good modulation to whole light beam.

Grating also can be a kind of two-dimentional variations in refractive index array, and grating has the periodicity on the both direction in this case.Therefore the virtual photon that provides of grating can provide the momentum of both direction.This can be used in, and for example, exports several light beams from a single grating.

In this preferred embodiment, ferroelectric crystal is a kind of commercially available Z-cutting lithium niobate monocrystal sheet.According to the polarization farmland direction of polarization method and hope, also can use to comprise X-, Y-and angle-cutting are at other interior cutting mode.Manufacturing step comprises initial polarization and electrode manufacturing.First clean crystal (for example using the oxygen plasma ashing) before handling is to remove all hydrocarbons and other pollutant from polishing and handling process.In order to control polarization, used mask and handled electrode, with the figure that the applies electric field surface and that pass wafer of setting up a wafer, described in the 08/239th, No. 799 U.S. Patent application of application on May 9th, 1994 like that.In applying the process of polarized electric field, regulate polarization pattern in zone 36, to produce polarization domain reverse.Say simply, wafer 20+Z surface 23 on the silicon dioxide of deposition one deck several micron thickness.The silicon dioxide film attenuate on the zone 36 of wishing farmland counter-rotating or remove, utilize the metal film of a kind of liquid electrode or deposition, so that on patterned silicon dioxide, produce a good equipotential surface, apply an electric field that surpasses about 24kV/mm then, and make+current potential on Z surface 23 is higher than-current potential on Z surface 25.Use this technology, made the ferroelectric crystal polarization of lithium niobate, produced the have opposite polarity figure on two types farmland of (farmland counter-rotating).The value of the electrooptical coefficient on two types of farmlands is identical, although they have opposite polarity.

Except this optimization technique, utilize inside diffusion method, ion exchange process and alternately the electric field polarization technology also in ferroelectric material, obtained the farmland counter-rotating.Accomplish to utilize titanium to pass through the inside diffusion technique of heat enhancing and in lithium niobate, formed the farmland.The triangle of reversal zone has limited the interaction efficient on small size farmland, but can mainly be used in the macrocyclic waveguide assembly.Shown that in the salt bath that contains rubidium and barium ion wherein the potassium ion in the crystal is replaced by rubidium ion by the figure polarization of ion-exchange in KTP.Utilizing the magnetic field polarization that replaces magnetic field technique is preferable methods, and it has also all shown successful experience in lithium niobate and lithium tantalate.The all solid iron electric materials that comprise KTP and barium titanate can the polarization of electricity consumption field domain inversion technique.(so-called solid was represented to keep its structure in stage regular hour, Leng Que fluid for example, glass, cross-linked polymer etc.)

Produce grating with different qualities with different technology.Electric field polarization makes the farmland alignment in the crystal, and can refractive index not cause essential change, but ion-exchange and diffusion technique have caused change of refractive really in polarized area.Permanent refractive-index grating follows changeable polarization grating to exist simultaneously when using these technology of back.

Generally speaking, two kinds of dissimilar farmlands are arranged, at least the first type farmland is polarized.Although only need two types farmland, utilize the farmland of additional type can make more complicated switchable grating structure.Can second kind of farmland type reverse polarization do not polarized, or polarize, and it is distinguished by its particular electrical vivacity that has (for example, electric light or piezo-optic coefficient) with other angle.For example, in some applications, can be with lower cost from unpolarized lithium niobate crystal chip manufacturing installation, the substrate wafer comprises the farmland of a plurality of random orientations in this case.The farmland of polarization has uniform directivity, and the directivity in other farmland then is at random.According to the type of device, the details of random figure will influence the performance of device.As another example, the second type farmland vertically first kind is directed or with other angle orientation, the difference in the electroresponse still can produce useful automatically controlled structure.Also can a kind of in advance without polarization and on the molecule rank, in the material of random orientation, for example in the silicon dioxide or polymkeric substance of fusion, form the polarization farmland.Polarization process makes the material structure orientation forming the first farmland type, constitutes and the second farmland type is zone by the unpolarized or random orientation in the material.

In a substitute technology, can form polarization structure by the electroactive coefficient that changes selectively or destroy in the zone that is equivalent to the second farmland type.Do not need to change the orientation of the atomic structure in these zones: if change is electroactive in zone, second farmland, the farmland is just inequality.For example in non-linear polymer, can electrooptical coefficient be lost efficacy with irradiation, and produce electro-active region in the irradiation shadow zone.Also shown identical effect in lithium niobate, wherein proton exchange has been destroyed nonlinear factor.Also can in many other materials,---the most of nonlinear materials that comprise KTP and this class of lithium tantalate---use photoirradiation, electron bombard, and/or ion bombardment reaches the purpose that changes electrooptical coefficient.

In the lithium niobate, the electric field E that applies along the z axle of crystal ₃Cause extraordinary refractive index δ n _eChange, δ n _eProvide with following formula: ${\mathrm{\&delta;n}}_e=\frac{r_{33}{E}_3{\mathrm{<figure-callout\; id="3"\; label="n\; e"\; filenames="A9519499001521.png"\; state="\{\{state\}\}">n</figure-callout>}}_e^{}}{2}---\left(2\right)$

R wherein ₃₃It is suitable electrooptic nonlinear spectrum number.Because r ₃₃Be nonlinear constant maximum in the lithium niobate, in actual device, preferably utilize the variation of extraordinary refractive index.(the nonlinear constant r that in ordinary refractive index, changes owing to apply electric field E3 ₁₃Be one and compare r ₃₃Little coefficient 3.6.) in order to utilize the variation in extraordinary refractive index, light wave must be along the z axle polarization of material.In a Z-sliced crystal, this polarization is called as TM.(in the TE polarization, electric vector is positioned on the plane of plane of crystal.Only in addition important nonlinear factor is r ₁₅, it is applying electric field E ₁Or E ₂The time be coupled TE and TM ripple.)

Because the variations in refractive index that in polarization structure, causes quite little (electric field of the 10V/ μ m that applies along the z axle of lithium niobate substrate, change of refractive δ n _eOnly be 1.6 * 10 ^-3), the grating reflector among Fig. 2 has very strong dependence of angle.The Brewster angle of weak refraction index changing is 45 °, and therefore when the angle of the plane of grating and light beam phase front is 45 °, grating will be launched any TE polarized wave fully.Therefore, can be used as polarizer by handle assembly.Beam reflected will always be polarized 45 ° of incident angles.When if TM wave reflection coefficient is high, (can arrange enough grating cycles and the high electric field that applies to improve reflection coefficient), the extinction ratio of polarizer also can be very high on working direction.Certainly, when vertical incidence, the reflection between twice polarization is because this effect and as broad as long (although because other effect is distinct, for example, aforesaid different electrooptical coefficient).The total internal reflection device that operates in glancing incidence is away from the Brewster angle, and because this effect only has very little difference in reflection.

Wafer material can be any polarizable solid dielectric material, comprises ferroelectric material, polymer thin-film material, and some non-crystalline materials, for example as fused silica and so on also can be polarized and produce many according to useful device of the present invention.The material of polarization also can be the on-chip film that is deposited on a kind of second material.Polarizable films in many successfully are deposited on the substrate, fused silica for example, lithium niobate, potassium niobate, barium titanate, zinc paste, the II-VI material, and various polymkeric substance etc.Used many kinds of substrates, comprised MgO, silicon, gallium arsenide, lithium niobate, and the various glass that comprise quartzy and fused silica.But for the farmland that TURP changes, they must be made up of electrooptical material, and this material has by applying the variations in refractive index that electric field causes.

After the polarization step, preferably remove liquid electrode and silicon dioxide masking film.Face dielectric material with reference to figure 2, the first electrodes 24 and second electrode 26 again, so that a kind of device is provided, in order to produce the electric field of control grating.(in the face of material means its position near material but needn't touch, the surface of the material that almost aligns a but fixing gap size needn't be arranged, and comprise the situation of the additional materials of the various sizes that are placed on the material top.) electrode 24 and 26 be made up of the conductive material deposition technology of preferably utilizing standard is with the be laid in opposed surface of crystal of the mode of space interval.Even the surface may be bending and/or uneven as the part of bigger solid, claim that also these electrodes are on opposite plane.These electrodes can be to be formed by any material that enough charge transfer can be provided, so that reach suitable field intensity, thereby can encourage the grating of polarization in the time consistent with application time.For example, electrode can be by aluminium, gold, and titanium, metal materials such as chromium, conductive paint, epoxy resin, semiconductor material, or the light transmissive material of indium and tin-oxide and so on, and the liquid conductor of salt solusion and so on is selected to form.They also can opposed face 23 and 25, and has by air, printing opacity cushion, and/or other material gap of filling.Only need an electrode because can be at this electrode and any current potential reference substance---external ground plane for example, one second electrode, or a plurality of electrode---between to set up a potential voltage poor.Owing to set up a electric field pattern to the voltage that electrode applies, set up device so electrode is an electric field by the electrode decision.Certainly also need the voltage and current source.The set-up mode of electrode makes the control electric field apply by active volume of the present invention, what it can be by a figure polairzed area or an optical grating constitution.

In the occasion of metal electrode, one of preferred combination is deposited on the coating of electrode below, and to reduce optical loss, optical loss is to take place when the part of guiding wave mode extends to metal electrode.Be installed in the occasion on same surface at a plurality of electrodes, coating should enough approach, and keeping high electric field, but wants enough thick, to reduce optical loss.Also can above electrode, use another coating, to reduce the possibility that punctures.

A Control of Voltage source 32 (or a potential source) provides current potential, to activate grating through connecting line 30 drive electrodes.The electrode that is activated is polarized toward each other according to the polarity that applies voltage.The voltage of voltage source produces an enough big electric field by the polairzed area, quite a large amount of light is switched to the light beam 44 that is switched output.The voltage of voltage source is transformable, so that provide a device to control two power ratios in the output beam.In fact, if electric field is enough high, can form a catoptron that electricity activates with all input beams of long optical grating reflection.For lower electric field, grating has formed a partial reflection device.The Control of Voltage source can be a battery, a piezoelectric transformer, the generator of a gas-powered, or the may command source of the electric current of any other type and current potential.The controller of time variant voltage when control device 32 also can contain a generation, and provide electric current so that to use the voltage on the required frequency shift electrode 24 and 26.Control device 32 also can have a plurality of outputs that can control multiple arrangement, and it can be according to some figure temporary order.Source 32 can have by the input of computing machine or Other Instruments, is used for the control input of manual or automatically controlled its function.

For fear of unnecessary repetition, be to be understood that the various variations of explaining with reference to figure 2 are applicable to the embodiment of following statement, and the various variations of statement also are applicable to Fig. 2 with reference to the following drawings.

With reference now to Fig. 3,, it has shown waveguide embodiment of the present invention.Specifically say, present embodiment be one automatically controlled, the frequency selective waveguide retrodirective reflector.All light beams in this device are limited in the two dimension by an optical waveguide 64, and it passes a surface of the polarizable dielectric material of the substrate 60 that forms device 61.

Although a waveguide is to exist diffraction effect still can allow ripple to pass through its length to propagate, and flexible any structure.An optical waveguide is to limit by having an elongated area with respect to the refractive index of surrounding medium increase.The guiding of ripple or the intensity of restriction depend on wavelength, refractive index difference and guiding width.Stronger restriction causes narrower wave mode usually.Waveguide can be supported a plurality of light wave types or only support single wave mode that this depends on the intensity of restriction.Usually, a kind of light wave type is by its electromagnetic field two-dimentional geometrical shape, and its polarization state and its wavelength are distinguished.The waveguide in a birefringent material or the polarization state of asymmetrical guide are typical linear polarizations.But common polarization state can comprise not parallel polarized component, and oval and unpolarized component, particularly when ripple has big bandwidth.If refringence enough little (for example, Δ n=0.003) and waveguide enough narrow (for example, W=4 μ m), waveguide will only limit the single transverse mode (lowest-order wave mode) in a certain wavelength coverage so.If waveguide is arranged on the surface of a substrate, what make waveguide exists the asymmetric of refractive index up and down, has a cutoff in refringence or duct width, does not have the restriction of wave mode under it.Waveguide (for example can be arranged in the substrate, use inside diffusion), on substrate (for example, by the zone around etching away, or by applying a coating and etching away all parts) except the band that limits waveguide, in substrate (for example, by the substrate of several processing in conjunction with or be bonded together).In all occasions, we pass substrate at said waveguide.The light wave type of propagating in waveguide has a horizontal size, and it is relevant with all limiting parameters, is not only duct width.

Substrate is lithium niobate monocrystal preferably, be formed with two opposite, surface 63 that separates by wafer thickness and 65 chip.Two opposed surface need not be parallel, or smooth.Waveguide is preferably made by existing technology, the proton exchange (APE) of for example annealing on surface 63.As an alternative, can use ion, rather than proton, inwardly discrete to or ion-exchange in substrate material.The APT waveguide adds the megacryst extraordinary refractive index, has formed to be used for along z-axle polarization optical waveguide.For the Z-sliced crystal, this is equivalent to TM polarization wave mode.Waveguide by substitute technology forms for example inwardly is diffused into titanium in the lithium niobate, can support TM and TE polarization.

Preferably waveguide design for only supporting a single lowest-order transverse mode, to eliminate the complicacy relevant with the higher-order wave mode.The higher-order transverse mode has the propagation constant that is different from the lowest-order wave mode and higher scattering loss, and this may throw into question in some applications.But the multimode waveguide may be preferably for some application, for example propagates for high power.

A kind of alternative structure is by exerting pressure, rather than directly applies electric field and encourage grating.The effect of exerting pressure is identical indirectly: rely on piezoelectric effect, the stress that applies produces an electric field, the refractive index on electric field and change farmland.But, if pressure texture does not mechanically for example then need to apply and keeps energy to keep stress.This alternative method also is applicable to other similar implementation method of the present invention of the following stated as other method described here.

In case determined the size of waveguide, then can produce the photomask that is used for waveguide, and with a kind of in many known lithography process technology figure transfer to on-chip mask material.Mask material can be SiO ₂, tantalum or other metal, or other acid resisting material.In order to make an APE waveguide, the substrate material of sheltering is immersed in the benzoic acid of thawing, with the used proton of lithium ion in the exchange crystal from acid.Can get over the refractive index waveguide to the rank of gained then and about 300 ℃, anneal a few hours,, and produce a kind of low-loss waveguide with high electroactive coefficient so that proton deeper is diffused in the crystal.

Except inside diffusion and ion-exchange two-dimensional waveguide, also can form plane and two-dimentional ridged or streaky waveguide.Can form slab guide by deposit electroactive material on the substrate of low-refraction.The deposition technology that is used for the waveguide manufacturing is known, and it comprises liquid phase epitaxy (LPE) molecular beam epitaxy (MBE), flame hydrolysis, rotation, and sputter.Ridge waveguide can process from these slab guides, uses job operation to have, for example, and lifting (lift-off), wet etching, or for example such dry ecthing of reactive ion etching (RIE).Slab guide also can be used in the present invention, is used in especially in the device that utilizes variable diffraction to leave grating.

Grating 62 in the present embodiment is provided with perpendicular to optical waveguide 64, and optical waveguide is passed substrate.Grating is made of a type farmland 66 and one second type farmland 68, and it needn't the extend through substrate.For example, when using inwardly diffusion or ion-exchange polarization active material, counter-rotating farmland 66 generally extends to a limited degree of depth in the material.When the activity (or reducing electro-optical activity) of utilizing ion bombardment or UV irradiation to destroy material when reaching polarization, also can form the part farmland.

The light beam 80 of input incides in the waveguide, and is coupled in the waveguide.Be coupled and be meant that power---for example strides across an interface---to another regional transmittance process from certain general border of an area spans, or between two parallel or angled waveguides, or between a slab guide and bar corrugated waveguide, or between single mode and multimode waveguide, or the like.When grating was opened, the part of input beam was coupled in the output beam 82 of getting back to a retroeflection.The retroeflection of grating need not fully, i.e. the grating scope internal reflection at several years angle in the opposite direction, and most of light are caught in waveguide and form the light beam of a complete retroeflection.When causing the light beam of retroeflection to enter waveguide 64, the imperfection of retroeflection is coupled loss.When cutting off, grating (is adjusted to " cut-out " position when controlling electric field, wherein refractive-index grating has almost nil minimum value, typically at zero electric field), input beam continues to propagate by waveguide, with the output beam 84 that forms an emission on identical direction.In piece type device, the intensity of grating can change with voltage source 76, to control two power ratios in the output beam.

First electrode 70 and second electrode 72 are in the face of the opposed surface of dielectric material 60.Substrate is a dielectric, do not damage because it can bear the electric field that applies, but as long as electric current does not cause harmful effect to the performance of device, it needs not to be a kind of desirable insulator.Electrode can be formed by any conductive material.Must there be a kind of device to utilize first electrode structure to set up an electric field that passes dielectric material.

Electrode has connected at least two elements that form first type polarization structure of grating.This field penetration that shows that electrode produces arrives at least two elements.Therefore, these elements can be by electric field-activate.Two leads 74 are connected in two electrodes to Control of Voltage source 76, to provide electric field in the zone that forms at the intersection by waveguide 64 and polarization structure 62.Lead can be that any material forms, and Any shape can be arranged, and it has enough electric conductivity at operating frequency, so that can charge to the required degree of using to electrode.Lead can be circular, and is flat, concentric cable, or integrated guiding figure conductor, and also they can be resistance, electric capacity, semiconductor, or electric leakage dielectric.

Perhaps, electrode can be arranged to any way, so long as allow the electric field quilt across being applied on the electroactive material.For example, electrode can alternately be arranged in the on-chip different layers, and active material is located between the electrode.This structure can produce high electric field with low-voltage, and to being deposited on the amorphous state active material on the electrode material, for example silicon dioxide and some polymkeric substance are particularly useful.

Polarization structure 62 is preferably dark than waveguide, makes the intersection between waveguide 64 and the polarization structure 62 have the lateral dimension of the wave mode in the waveguide and the longitudinal size of grating.

Fig. 4,5 and 6 have shown alternative electrode structure, wherein electrode is installed on the common plane of dielectric material 189.Because the coplanar electrodes structure has high electric field when allowing low-voltage, so these structures are particularly useful for the embodiment of use waveguide 180 lead beam of the present invention.Because electrode is near the waveguide cross section of passing grating, these electrode structures have special meaning for the low-voltage control of grating 182.In electrode structure shown in Figure 4 186, first electrode 170 and second electrode 172 on same surface to dielectric material.Even the plane may be the sweep of bigger geometric configuration, these electrodes also are to be called at grade.First electrode is arranged on the top of the waveguide part that comprises several optical grating elements, and each optical grating element is made up of the graded area of a first kind farmland 184 and one second type magnetic domain 185.Second electrode be arranged on first electrode around.Between the electrode along the distance of waveguide approximately constant, so that required uniform electric field is arranged along waveguide axis along the waveguide axis direction.Also can change electrode separation to form the taper field intensity that weakens gradually, as shown in the device 188 of Fig. 6.The voltage source 174 that is connected between two electrodes placing as shown in Figure 4 can produce electric field between electrode.The largest component of electric field intensity 176 electroactive waveguide the zone in perpendicular to material surface.For the such ferroelectric crystal of lithium niobate, this electric field structure activates maximum electrooptical coefficient r ₃₃, set up the variations in refractive index that is used for the TM light beam.For the electric field of the 10V/ μ m that applies in lithium niobate and the light beam of wavelength 1.5 μ m, the intensity of the first rank grating is 40cm ^-1

For each electrode structure, need a kind of device 178 electrode is connected on the voltage source.---for example lead---is electrically connected between the terminal of the potential source of the electrode of device for forming this device, a conductive material.In all electrode structures, each electrode generally has a district, or pad, or contact contacts with supply lines.Pad preferably has enough big size, to reduce the placement tolerance on being electrically connected, is convenient to combination.Can use then, for example, ultrasound wave, heating, or the such wire-bonds technology of conductive epoxy resin connects wires on the pad.Another kind method is, can be with a direct contact electrode of spring-loaded electric conductor sheet, and to realize being electrically connected of required and voltage source.In the accompanying drawings, electrode is general enough big, and itself uses as contact pins.

Fig. 5 has shown the another kind of embodiment of coplanar-electrode structure, and wherein first electrode 171 and second electrode 173 are arranged on the either side of optical waveguide.When two electrodes crossing over so placement applied current potential, the largest component of electric field intensity 177 was parallel to substrate surface.For Z-cutting ferroelectric crystal, setting up variations in refractive index that is used for the TM polarized lightwave and the electrooptical coefficient that applies electric field is r ₁₃For for the light beam that applies electric field and 1.5 mum wavelengths of the 10V/ μ m in the lithium niobate, it is 12cm that the first rank grating is coupled constant ^-1

Perhaps, for the TE waveguide, active electrooptical coefficient can be switched to be used for two kinds of structures.To the occasion of electric field intensity perpendicular to chip surface, suitable coefficient is r ₁₃, being parallel to the occasion of chip surface for electric field intensity, the electrooptical coefficient of use is r ₃₃Same situation can be used for X-or Y-sliced crystal, or middle sliced crystal.

Change as another of the structure of Fig. 5, electrode is a unsaturated mercury discharge lamp, makes one of them electrode almost cover waveguide 180, and another electrode then is arranged on the side.In this structure, the wave guide zone below the strong vertical electric field of responding under the edge of adjacent electrode passes one of electrode with preponderating.

In Fig. 6, electrode 175 and 179 and contre electrode 181 separate, form taper.When applying when crossing over these electrode application voltage, this structure produces the electric field intensity of a taper, highfield to the right and weak electric field left." taper " means any parameter and has the general spatial variations that is worth another value from, is linearity or dull and do not particularly point out this variation; This parameter can be the gap, width, and density, refractive index, thickness, load cycle, or the like.Therefore compare a little less than the caused variations in refractive index in the right side in the variations in refractive index that in the polarization farmland on the waveguide 180 left side, causes.Perhaps, this is useful, for example, is used to obtain the very full-reflector of narrow bandwidth, need extend the length of interaction area at this.In the non-normal incidence angle apparatus, as shown in Figure 7 and Figure 8, this taper can be used for a specific input wave mode preferably is coupled in the specific output wave mode.

In all electrode structures, the voltage range that applies can be from a constant value to vertiginous signal or pulse signal, and can apply any polarity between two electrodes.Suitably select magnitude of voltage in given application, to avoid damaging electroactive material and material on every side suddenly.

When applying a consistent electric field by this class material of lithium niobate, the electric charge that accumulates on electrode may cause the dc shift of the electric field intensity that increases in time.The polarity that changes voltage source every now and then can be eliminated this variation, thereby makes electric field intensity get back to its total head again.If the electric field between averaging time approaches zero, the net charge drift also will level off to zero.For the responsive application of drift, must reduce the anaclasis susceptibility of material carefully, for example by inside diffusion MgO, and preferably operate under the situation of dc fields not having.

Superficial layer help to prevent electric field breakdown and with the light contact loss of electrode.Since light beam from the teeth outwards or near surface propagate, therefore loss is even more important for waveguide assembly.This point also is applicable to the polarization of active material, and electric light switches.The maximum vector component of the electric field between two coplanar electrodes is parallel to material surface.The transparent material layer that has high dielectric strength by one of deposit between wave guide zone and electrode can reduce breakdown problem and light loss problem widely.Silicon dioxide is the good example of of this material.Since also may puncture in surface and the air of itself between two electrodes, also can the similar high dielectric strength material of deposit one deck at the top of electrode.

Fig. 7 and Fig. 8 have shown two embodiment of automatically controlled frequency selective waveguide coupling device.In Fig. 7, a pair of two-dimensional waveguide is passed the one side of a dielectric material, and intersects T shape structure of 118 formation at an angle mutually, constitutes three-way device.The grating of being made up of a first kind farmland 104 and one second type farmland 102 100 is in two waveguide intersections (volume that is occupied jointly by the light wave type in two waveguides), and shape is in an angle with it.Peak value variations in refractive index in the intersection preferably equals the peak value variations in refractive index in the waveguide.If (by inside diffusion, ion-exchange, etching etc.) are finished in the manufacturing of T shape structure in a step, can finish said circumstances.Be place two waveguides in follow-up step in a kind of alternative method, this crossing waveguide to shop drawings 8 is a most convenient, but its peak value variations in refractive index in intersecting area is the twice of the variations in refractive index in the waveguide, and this is unwanted.Usually, the selection of the periodicity of grating and angle makes that the phase matching of reflection process is to be finished by the virtual photon momentum in the grating bandwidth.For preferably being coupled between the output beam 114 in the input beam in the band in first waveguide and second waveguide 108, the incident angle of input beam equals the angle that diffraction leaves grating.At this moment, the angular bisector between two waveguides is perpendicular to the border, farmland of the grating in the planar waveguide.

A light beam 112 incides in first waveguide 106, and is coupled in first waveguide 106.First electrode 120 and second electrode 122 are arranged on the same surface of dielectric material, make when one is connected to two voltage sources 124 connections on the electrode by conductor 126, have set up an electric field in the intersecting area of waveguide.Electric field relies on the intensity by the grating in the electrooptical effect control intersecting area, the band inner light beam from first waveguide is coupled in second waveguide, with the output beam 114 that forms a reflection.When cutting off grating, input beam propagates into first waveguide segment downwards with continuing to be dominant, forms the output beam 116 of emission under very little loss.Perhaps, in waveguide, can use the backpropagation light beam, make input beam enter second waveguide 108, and be switched by interaction and to enter output waveguide 106 with grating.

In single wave mode system, grating intensity preferably distributes in non-homogeneous mode in the space, makes the lowest-order high bass wave that enters waveguide 106 be coupled to the lowest-order high bass wave of waveguide 108.By regulating the geometric configuration of electrode, the load cycle of regulating electrode gap and adjusting grating can modulated grating intensity.Also can be by a kind of bandwidth that improves grating in many known technologies, chirp for example, phase shift and use the multicycle structure.

The size that is coupled the district is limited, is the restriction that is subjected to the size of the overlapping intersecting area of their wave mode between the waveguide in the geometric configuration of Fig. 7 and Fig. 8.In order to obtain to be used for the high net interaction intensity of a given electric field intensity, be necessary to strengthen the size of waveguide, to produce a bigger intersecting area.But big waveguide is a multimode, and it may be inappropriate for some application.If use adiabatic expansion and contraction, can obtain the advantage of big intersecting area and single wave mode waveguide simultaneously.It is a narrow waveguide that input waveguide 106 begins, and increases on width when approaching intersecting area adiabaticly.Output waveguide 108 has big width at intersecting area, and catching most reflected light, and its adiabatic ground on width little by little is reduced to a narrow waveguide.The adiabatic diminishing idea of input and/or output waveguide can be used in many intersecting areas as herein described.

Corner 158 with reference to 8, two waveguides 136 of figure and 138, intersect, form a four-way device to cause X.This device is multi-functional waveguide switch, because it produces two blocked operations (light beam 142 enters light beam 146 and 148, and light beam 144 enters light beam 148 and 146) simultaneously.The grating of being made up of the first kind farmland 134 and the second type farmland 132 130 is arranged in two intersecting areas between the waveguide, with two waveguides one angle is arranged.Select the angle of grating, make in the plane of waveguide bisector of angle between two waveguides perpendicular to the border of grating.

First input beam 142 incides first waveguide 136 and is coupled to waveguide 136, the second input beams 144 and is coupled to second waveguide 138.First electrode 150 and second electrode 152 are arranged on the dielectric material, make when being connected two voltage sources 154 between the electrode when opening, and set up an electric field at the intersecting area of waveguide.Intensity by the refractive-index grating of electrooptical effect electric field controls in intersecting area.When grating was opened, the part of component was coupled to second waveguide from first waveguide in the band of first input beam, to form one first output beam 146.Meanwhile, be coupled in first waveguide from the part of component in the band of second input beam of second waveguide, to form one second output beam 148.In addition, any component that does not switch of the out of band components of two light beams and band inner light beam continues down to propagate in their waveguides separately, to form the extra section of suitable output beam.Therefore, for two light beams of many optical frequencies component, the single-frequency components in two output beams can be switched in two output beams.

Waveguide can only be one section, and this moment, it was connected to that to be positioned at substrate outside or make on other optical element of one with same substrate.For example, waveguide segment can be connected to pump laser, optical fiber, and crossing waveguide, other switchable grating is on mirror device and other element.A crossing waveguide switch array should comprise a light handover network.

In Fig. 9, waveguide is coupled another embodiment of switch.The domain wall of grating is the surface 157 that is set to be not orthogonal to crystal 158 now, makes input beam 159 in the waveguide 160 be reflected out outside the crystrallographic plane, to form a reflection output beam 161.As in the past, unreflected light beam continues via duct propagation, with the output beam 162 that forms an emission.Printing opacity first electrode---it can be made of indium tin oxide---is placed on the surface of dielectric material 158, and cross at grating waveguide part above.One second electrode structure 164---it can have the absorbability of pair light---is placed on the material.As described herein, second electrode is arranged to many any in selecting to construct: be arranged in as shown in Figure 7 around first electrode, be arranged in material 158 opposition sides as shown in Figure 2, as shown in Figure 6 taper configurations.Two electrodes are connected on the voltage source 154 by two leads 156, the power division ratio of the band inner light beam between its control emission light beam 162 and the folded light beam 161.Perhaps, electrode structure shown in can image pattern 5 like that, this moment, two electrodes all were opaque.

With reference to figure 9, domain wall is preferably formed by the electric field polarization of ferroelectric crystal again, and ferroelectric crystal cuts at an angle with z-axle 165.Owing to the electric field polarization farmland is preferential downwards by the z axle, the crystal that cuts with angle of this technology polarization causes the border to be parallel to the z axle, and identical with the folded angle in plane.Crystal-cut angle 166 is preferably 45 °, and the propagation of the light in the crystrallographic plane can be reflected outside the substrate perpendicular to material surface (any angle all can be used).Farmland shown in Figure 9 is the plane, but can be configured to more generally structure.Plane grating will produce a flat output phase front from a flat input phase front.If as a large-scale reverberator that does not have waveguide, a collimation input beam will produce a collimation output beam with shown device.This device is useful as piece type reverberator, if for example light beam is from the incident of the device outside, if or waveguide at an end of device, and a segment distance is arranged between the reverberator of the end of waveguide and polarization.Yet, because application requirements focuses in some occasion---for example fetch data, therefore preferably can produce the output phase front of a bending from the light beam of a collimation from optical disk reading.By graphically, on the upper surface of substrate shown in Figure 9, form the farmland of one group of bending, because the farmland counter-rotating is preferentially along the propagation of z axle, so can be polarised to one group of crooked farmland in the main body of material.Therefore, when by an electric field excitation, the farmland that can form a group recessed (or epirelief) is to set up columniform lens.Use the same method and to form wedge shape and the more complicated and surperficial spatial structure that intersects at an angle.

In a kind of alternative method, if when Polarization technique is propagated border, farmland and z-axle at an angle, can be with the Z-sliced crystal as substrate.For example, titanium (Ti) inwardly is diffused into produces the triangle farmland that can be used for beam reflection is gone out plane of crystal in the Z-sliced crystal of lithium niobate.Be generally about 30 ° by the angle that inwardly diffuses to form, make that the input beam of grating of incident will be by approximately to become 60 ° angle to reflect the surface with plane of crystal with respect to the farmland on surface.Then, can draw output beam with a prism, or in (it can polish at an angle) output from the rear surface after the top surface total internal reflection.

Shown E of electrode structure excitation ₃Component, and an E ₁Or E ₂Component.Variations in refractive index of a TM polarization incoming wave experience, this variations in refractive index are that extraordinary and ordinary refractive index variation reach combination.

In Figure 10, shown the embodiment of a directed coupling device of switchable waveguide.In fact one first waveguide 204 is parallel to one second waveguide 206 on certain-length.Because light beam propagation close to each other and at similarity direction, their central shaft has been moved.Central shaft is coaxial never, makes waveguide can not intersect.But waveguide segment is quite close in the position that is limited by coupling device length, makes the cross direction profiles of light wave type of two waveguides overlap more or less.Therefore the propagation of two wave modes is to be coupled (meaning is that the refractive index afterbody overlaps) at least with fading away.The part that fades away of wave mode field is in the overseas decay part exponentially of the high-index regions of waveguide.The propagation constant relevant with each wave mode of two waveguides is the equation k=2 π n by the direction of propagation _Eff/ λ determines.Effective refractive index n _EffBe light speed in a vacuum and the ratio of the group velocity of propagation, it changes according to the wave mode in the waveguide.n _EffValue be to distribute with the overlapping decision of the wave structure that is directed by wave mode.

The width of two waveguides is preferably different, therefore the propagation constant of the wave mode in two waveguides is also different, makes when grating cuts off, and being coupled between the wave mode is not phase matching.(the refraction distribution refractive index of two waveguides is scalable also, to produce different propagation constants.) when grating cuts off, any input beam 210 in first waveguide will continue to propagate in waveguide, to form the output beam 214 of output first waveguide 204.When grating was opened, the propagation constant of two waveguides of grating compensation poor made being coupled between two wave modes become phase matching, and 212 outputs of output beam in the band, second waveguide 206.Be coupled in order to optimize, suitably selective light grid cycle Λ makes the propagation constant in two waveguides equal grating constant (in range of allowable error).The propagation constant of two waveguides can be selected to equate, is coupled between two waveguides when grating is cut off.In this case, open grating and will reduce being coupled between two waveguides.

The intensity decision of grating is coupled constant, and it defines the degree that is coupled between two waveguides.Along the length of the juncture area of two waveguides, power comes and goes with sine wave between waveguide and propagates, and makes to be coupled at first from first waveguide to second waveguide, gets back to first waveguide then.Distance in the particular waveguide wave mode between two positions of peak power is the pulsation length that is coupled waveguide (best length) of called optical imaging.This pulsation length depends on the intensity of grating.

One first electrode 220 and one second electrode 222 are arranged on material surface, when applying electric field with box lunch between two electrodes, set up the electric field of crossing grating region 202.Utilize a conductive material 224 that a voltage source 226 is connected in two electrodes.The intensity of the Control of Voltage grating by being applied to grating, thereby also controlled pulsation length between two waveguides.

The propagation constant of two waveguides depends on wavelength very much.Since the momentum of virtual photon basically or on leading be fix (promptly, it is determined by indeclinable parameter in application), power only is transmitted to second waveguide near single-frequency, and the frequency span of single-frequency is to be determined by the length that is coupled the zone.According to grating intensity, the variable partition of input beam is as output beam 212 outputs second waveguide that is coupled in the band, and the outer part of the band of input beam is together exported from first waveguide with the rest parts of band inner light beam as the output beam 214 of emission simultaneously.

Being coupled between two wave modes can several mode electric light controls, comprise the intensity that is coupled between the wave mode, increase the overlapping of wave mode, or change the effective refractive index of one of them waveguide.Above the control of said electric light to be coupled be preferable methods.Be coupled effectively in order to make between two wave modes in the waveguide, the input beam forescatering, this needs the minimum light grid cycle.

Perhaps, described in conjunction with Fig. 2 as mentioned, be coupled the combination that grating can be permanent and switchable grating.We describe in detail and how to finish this purpose at this.After forming required cycle farmland, can the chemical etching substrate, to form concavo-convex grating, its cycle and polarized structure are identical.For preferred lithium niobate material, etching can be finished under the step of further not sheltering, because the etched speed difference in dissimilar farmlands.For example, hydrofluorite (HF) to lithium niobate-etching on z farmland significantly (＞100x) faster than+z farmland.Therefore, the z-sliced crystal is immersed in 50% the HF solution, by the farmland of the first kind constitute regional etched, and keep not etched basically by the zone that the second type farmland constitutes.This step produces and forever is coupled grating, itself can be used to produce between two waveguides be coupled.After applying electrode, can encourage the polarization grating to produce the additional refractive index of the refraction grating of superposition on the grating of etched substrate.Can control etched depth, the effective refractive index that makes the permanent etch grating cause changes and can partly or wholly be compensated for by the grating that electric light when electrode encourages with a kind of polarity causes, refractive-index grating doubles on another kind of polarization simultaneously.Therefore produce a kind of grating of recommending, grating can switch between a kind of unactivated state and a kind of strong state of activation whereby.

When etching region is had high electrooptical coefficient and near the electrooptical material of the refractive index of substrate by a kind of---for example polymkeric substance or printing opacity liquid crystal---when being full of, etched grating also is useful.The etching region that is filled with preferably extends downwardly into light beam.When applying a voltage by the filling etching region, the refractive index of compaction material also is to change near the refractive index of the remainder of waveguide.

Perhaps, the wave mode of can electric light revising in two waveguides is overlapping.For example, the refractive index in the zone between two waveguides can improve.This falls the restriction that has reduced waveguide, and has expanded each wave mode amount of space toward each other, has strengthened overlapping.Implement the method, can be with respect to transverse to the zone between two waveguides of pole reversal polarization of the substrate of waveguide.If electrode extends across two waveguides and their zone line, a voltage that applies will increase the refractive index in zone between the waveguide, reduce two refractive indexes in the waveguide simultaneously.Result that wave mode restriction reduces has increased overlapping between two kinds of wave modes and has been coupled.Must carefully in waveguide, not cause not need reflection or wave mode be coupled loss, it can take place at the edge of polairzed area.These losses can drop to minimum, for example make the geometric configuration of polarized area or electrode become taper, make wave mode change and take place along waveguide adiabaticly, so that minimum is reduced in reflection.The adiabatic change meaning is meant and the balance maintenance process that takes place under a finite rate variation very slowly by contrast.Under this occasion, it means redistributes speed with energy this variation is very slow by contrast, and it is that diffraction owing in the waveguide produces that energy is redistributed, and keeps the wave mode feature of the light in the waveguide.

The third method that is coupled that changes between two waveguides is the effective refractive index that a relative waveguide changes another.Therefore, changed the propagation constant of waveguide, this has changed phase-matching condition again.This effect can make its symbol of electrooptical coefficient and maximizing on the contrary mutually of another waveguide by one of them waveguide of polarization.At this moment, being coupled grating can be permanent or switchable grating.One first electrode has covered two waveguides and the zone between them, and second electrode can be arranged on the both sides of first electrode.One puts on the propagation constant increase that two electric fields between the electrode cause a waveguide, and another propagation constant is reduced, thereby makes the difference of two propagation constants reach maximum.Grating is coupled process maximal efficiency when the difference of propagation constant is a particular value.By the tuning voltage that applies, control phase mates as required.This effect can be used for setting up the wave filter of a tunable wave length.

The parallel waveguide that shows among Figure 10 can be uneven, and waveguide even can not be straight.For example, change the steric interaction intensity between the waveguide if desired, this purpose can be finished by the space interval of regulating between the waveguide.Certainly, these modifications can be applicable to parallel waveguide embodiment described below.

With reference to Figure 12 and 13, it has shown the alternate embodiment that is used to control the crossing waveguide coupling device that folded light beam distributes.In each embodiment, the junctional area of crossing over two waveguides is not fully extended in the zone that grating covers.The motivation of understanding these optical grating constructions sees also Figure 11.Look it and how to construct, power coupling structure 282 can make it be coupled to the space distribution distortion of the wave mode 284 in the output waveguide.The power coupling device of---for example 90 °---intersecting areas 280 between the waveguide of setting that spatially cover two fully with mitre uniformly and equably will produce an output beam and distribute for example asymmetric distribution 286.When input beam passed through power coupling structure or grating, the power in the input beam reduced.In the occasion of right angle intersection, the power match that the dullness near field distribution of folded light beam (near field profile) and the input beam reduces.The shortcoming of asymmetric distribution 286 is single wave mode structure, and the power that wherein only has part to be coupled can be stayed in the waveguide.Most of power will lose from waveguide.

For single wave mode device, it needs in Gauss's formula spatial configuration 288 of lowest-order wave mode that a kind of structure is coupled to power output waveguide.For reaching this purpose, zone 282 must extend outwardly into the afterbody that fades away that is directed wave mode, and must modulate---shape modulation or be coupled the local strength of grating by space adjusting power---net interaction.Figure 12 and 13 has shown that the geometric configuration arrangement that utilizes grating reaches the method for this purpose.Also can be by be coupled " load cycle " of spatial modulation grating in the zone 282 at power, by changing the exponent number of the grating in selecting the zone, and in the automatically controlled occasion that is coupled, the intensity (pass through to regulate the spacing of electrode as shown in Figure 6, or circulate by regulating electrode load in the occasion of grating electrode structure) that applies electric field by taperization is finished this purpose.The load cycle of grating is meant each the cycle mark that is occupied by a given farmland type; Load cycle can be with change in location.

In Figure 12, shown a device 300 with grating of having revised, wherein grating region 310 has covered part, but is not the rectangle junctional area of whole two quadrature waveguides 316 and 318.When the grating un-activation, input beam 302 by waveguide 316, to export as output beam 308 with being deflected.The width 304 and 305 of the size of junctional area and two waveguides is complementary.A zonule of power coupling structure appears on any point in the junctional area will cause a given traversing section part of the beam distribution in the input waveguide to be coupled in the given traversing section of a beam distribution in the output waveguide.Reflected beams distribute to be what the propagation sum of the distribution that is coupled from these phase places constituted.Described grating region 310 is leg-of-mutton, has triangle summit 311,312 and 313.The grating region shape can change into and not be leg-of-mutton, and can modulate local grating intensity.The accurate shape that is coupled the grating region that characteristic preferably changes in waveguide chien shih list wave mode is with the duct propagation technique computes of having set up, for example beam propagation method.

Figure 13 has explained another embodiment that single wave mode is coupled mounting for grating 340.Grating region 350 be one lenticular, wherein at the turning 351 a bit with waveguide 346 and 348 and light beam 330 and 342 shared, and opposite turning 352 is a bit shared with waveguide and light beam 342 and 332.The advantage of this structure is exactly that power major part in the light beam stage casing is reflected, and the density of light is the highest at this place, therefore has been coupled the power between the lowest-order wave mode in two waveguides 346 and 348 preferably.The preferable shape of grating region also is coupled the constant decision by grating.

Be arranged on the surface with the same substrate of waveguide with reference to Figure 12 and 13, one first electrodes 320, above grating region, second electrode 322 be arranged on same surface first electrode around.Two distance between electrodes are certain as shown in Figure 13, or can dwindle gradually along a direction as shown in figure 12.A Control of Voltage source 324 is connected in two electrodes by two leads 326.Thereby can apply an electric field by grating region activating one of electrooptical coefficient, and change being coupled between input beam and the output beam.

For illustrative purposes, Figure 12 has also shown a taper input waveguide section 287 and a taper deferent segment 289.Input beam 285 expands by conical section 287 increasing juncture area adiabaticly, and has therefore increased the total reflection from grating 310.The light beam 285 that grating can expand now is towards output beam 308 reflections.Arrive words if desired, output waveguide also can comprise a conical section 289 to reduce the width of output beam.(perhaps, if necessary, can keep the width of output beam, switch interaction with the light beam that is used for after a while.)

Grating can extend beyond the junctional area of two waveguides.A grating that extends along input waveguide can make the remnants of junctional area back launch light and remove from waveguide, generally be to enter the radiation wave mode.The grating that extends makes that the cross-talk between the optical channel is reduced to minimum in the switching array, and one of them independent waveguide can have the more than one signaling channel of propagating along its length.

Special design of the present invention is a device that is used for tuning grating.Shown among Figure 14-17 and can finish this tuning several embodiment.With reference to Figure 14, it is a block electro-optical device 400, and the intensity of one of them vertical incidence reflection grating and central wavelength are by single voltage source 426 controls.This device is by a patterned polarization optical grating constitution, its by two on the opposed surface of material and the electrode electric light that is connected on the voltage source 426 by conductor 424 activate.The intensity of grating and central frequency are simultaneously tuning by the single voltage between two electrodes that are applied to device.The mean refractive index of grating is with the electric field change that applies, cause the central wavelength and the proportional variation of electric field of grating, by to the summation of the weighting variations in refractive index in various types of farmlands, calculate the mean refractive index of a single grating in the cycle in the grating of one-period.Weighting factor is the physical length 416 and 418 of the farmland of each type along the light path of input beam 404.The condition of frequency modulation be weighting be not equal to zero with number, make the result that mean refractive index changes becomes electric field change.

The product of the actual range of refractive index and light beam process is called as light path.(, replacing refractive index) with effective refractive index for waveguide device.Substantially equate (approximately equal in the error range of determining by application demand) if cross over the average light path on two class farmlands, in the grating that two class farmlands are arranged, obtain 50% load cycle.Mean value is taken from many follow-up farmlands, with the possibility of the grating that allows chirp, non-periodic or other more universal classes.Usually, the farmland can have different refractivity and different electrical-optical coefficient.Being used for tuning general condition represents with the actual range of advancing on dissimilar farmlands.For every kind of farmland, (it is leading to take advantage of 2 π/λ) to provide full light phase for the light path of being advanced by light.Yet, (take advantage of the product of 2 π/λ) to provide the variation of phase place in leading by the electric field that is applied, suitable electrical-optical coefficient and actual range.The mean change of the refractive index of this ripple experience equals the leading summation that changes of phase place in all farmlands of the light wave process in the section that length of material is 1 (taking advantage of λ/2 π 1).Mean refractive index changes according to δ λ/λ=δ n/n determines variation in the peak value reciprocation wavelength.Wavelength in grating intensity and the structure changes simultaneously, but this variation simultaneously may be undesirable.Design this structure and keep sufficiently high grating intensity at the application of crossing over whole wavelength tuning range so that finish tuning working point.Perhaps, can use as following referring to figs. 16 and 17 the separation tuning structure of describing.

Can realize variation in the mean refractive index by distinct methods.A kind of mode is that non-at random electrical-optical effect farmland 414 is arranged alternately with electrical-optical effect farmland 412.The electrical-optical active region is the polarization farmland, but not electrical-optical effect farmland can be by random polarization or non-polarized or forbid radiation.Therefore, electric field causes that the mean value of crossing over this grating index increases Δ n _AvgIn the random polarization structure of Figure 14, Δ n _AvgEqual to act on the variations in refractive index in the farmland 412 and the product of load cycle.Load cycle equals length 418 divided by length 418 and 416 sums.The tunability that uses this technology to reach in a random polarization structure is λ Δ n _Avg/ n, wherein λ is that optical wavelength, n are intrinsic (effectively) refractive indexes of material.Suppose the wavelength in the lithium niobate be 1.55 μ m, electric field be 10V/ μ m, for 50% load cycle structure, its tuning range is 1.1nm.

When in the bandwidth of input beam 404 at grating, this grating is coupled to light beam in the retroeflection output beam 402; Otherwise input beam forms transmission output beam 406.Have same electrical-spectrum number but polarity is opposite as two types farmlands, the situation reverse as the farmland, then the running status with the grating of 50% load cycle is opposite.Under one situation of back, because being supported by the variations in refractive index on another kind of farmland, the variations in refractive index on first kind farmland loses, so do not change mean refractive index.Its centre frequency of reverse raster untuned on 50% load cycle farmland.

The another kind of method of realization average effective refraction index changing is to use non-50% load cycle in unequal length 416 ≠ 418 polarization farmland districts in the reverse raster of farmland.The tunability that uses this technology to obtain is (2D-1) Δ n λ/n, and wherein D is the load cycle (D＞0.5) of maximum farmland type.For example, for 75% load cycle, the wavelength in the lithium niobate is that 1.55 μ m, electric field are 10V/ μ m, and then tuning range is 0.54nm.The farmland reverse raster is that the grating of non-eq effect is strong than the second class farmland also.

Figure 15 illustrates the waveguide device 440 that uses identical mean refractive index effect.In this case, the average effective refractive index of waveguide 442 changes with the electric field that grating centre wavelength changes that causes that is applied in grating region 450.Control of Voltage source 466 is used for applying electric field between first electrode 460 that preferably is arranged on the material similar face and second electrode 462.Can realize the average effective refractive index by the various geometric configuratioies that comprise non-electrical-optical effect farmland or have a farmland reverse raster of 50% load cycle.In the time of in input beam 455 is in the grating bandwidth, grating is coupled to light beam in the retroeflection output beam 444; Otherwise input beam forms transmission output beam 446.

A kind of method that strengthens the tuning performance of grating in the waveguide device 480 is to superpose the second electrical-optical material 482 to form overlayer, as shown in figure 16 on waveguide.The ripple that this overlayer reply is propagated in waveguide is transparent and tackle electric field-sensitive so that its refractive index of scalable correction.Partly determine the average effective refractive index by this tectal refractive index.The comparable substrate of second material has higher electrical-optical coefficient.Liquid crystal and polymkeric substance are the better examples that can be used as covering layer material.The refractive index in the preferred close control of the refractive index of coating district is propagated in overlayer to guide most of light beam.

For this embodiment, on substrate, center on first electrode 502 by second electrode 504, be used to apply the electric field of crossing over polarization grating 490.Electrode preferably is arranged on below the overlayer directly on substrate.If first electrode 502 is set directly at waveguide 484 tops, as shown in figure 16, then must make by light transmissive material.The yet configurable any side at waveguide 484 of electrode does not require the material printing opacity in this case.Third electrode 506 is provided with on the overlayer top, above the waveguide and first electrode.For this embodiment, the centre wavelength of this grating and intensity can be controlled respectively.By first voltage source, the 510 control grating intensities of linking first and second electrodes with two leads 513,514, by the centre wavelength that is connected in second voltage source, the 512 control gratings between first and second electrodes with two leads 514,515.In another kind of electrode structure, only use two electrodes, two electrodes preferably all are arranged on the covering layer material top, so that its induction field sees through covering layer material and optical grating construction itself on the grating.With a voltage source control center wavelength and grating intensity, rather than independent control.

The amount of the tuning performance that electricity consumption-light action overlayer realizes depends on which part lead beam propagates in overlayer.If two refractive indexes relatively near so that have 10% light beam in overlayer, to propagate, the mean change in the effective refractive index of bootmode then equal to change in the overlayer refractive index 10%.Overlayer variations in refractive index for 0.1, adjustability are greatly about the order of magnitude of 7nm.

Figure 17 illustrates the embodiment of the independent tunable optical gate device of being made up of the grating 530,532,534 that can independently control 520.This grating is connected with all gratings in input beam 522, forward beam 523 and folded light beam 524 paths.In this structure each independent grating also be one among a small circle in continuously-tuning.Each grating among Figure 17 has first electrode 542 and second electrode 544 that is wired to Control of Voltage network 552.A grating can be switched to conducting at every turn so that in little passband, once only reflect a wavelength, or can simultaneously a plurality of gratings be switched to logical, to produce the programmable optical wave filter that centre wavelength and bandwidth can be separated to control.Can be by comprising that grating itself is implemented in the above-mentioned improvement of multicycle possibility in each grating.

This structure can realize for bulk or as catheter device.Under latter event, on substrate, make optical waveguide 528 so that waveguide and polarization grating intersect.Grating farmland 536 can only extend through waveguide and not need to extend through all directions of material.Two electrodes preferred (for higher field intensity) are deposited on the same surface of substrate as waveguide.Second electrode of all gratings can connect as shown in the figure so that be electrically connected the quantity minimum.

On the other hand, independently the addressable optical grating construction can be a block device, can omit waveguide 528 in the case, makes polarized area 530,532 and 534 so that overlapping with the light wave type of propagating with enough appropriate depth ground.Two electrodes controlling each grating are arranged on the optimum position of material opposite face aptly, so that the electric field transmission is preferred, shown in the single grating example of Figure 12.By grating-electrode group being separated and the comparable scope of substrate thickness, or by increase set potential electrode alternately can make adjacent gratings that interelectrode electric field edge causes the intersection excitation minimum.

The method of another kind of tuning grating is the temperature that changes action material.Because two kinds of effects produce tuning: thermal expansion and heat-luminous effect.For different materials, any thermoinduction of arranging of two kinds of effects is tuning.In lithium niobate, bigger effect is thermal expansion, and its maximum (a axle) expansion coefficient Δ L/L is+14 * 10 ^-6℃ ^-1, and plain shaft Δ n ₀The negativethermo-optic coefficient of/n is+5.6 * 10 ^-6℃ ^-1For 100 ℃ temperature range, the combination of these two kinds of effects provides total wavelength tuning range of 2.6nm.

For many purposes, wish to produce polarization grating with generalized frequency content.For example need many reciprocations peak value, or interactive bandwidth of broadening simply.For realizing this purpose, certain mode of needs employing is determined the figure corresponding to the polarized area border of the given mathematical function that comprises the frequency that requires.Figure 18 shows in the result that comprises under the unifrequency situation of any phase shift.With reference to Figure 18, can merge light phase shift 564 and 565 to improve its wavelength structure in one or more positions along sine function 560.Provide the average level of this function by straight line 561.Also show the counterparty's wave function 562 with identical phase shift, polarization is handled attainable as passing through.Be to realize the conversion of continuous function to square wave function, the district 570 that curve 560 exceeds sinusoidal wave mean value 561 is corresponding to one type farmland, and the district 572 of curve 560 subaverages 561 is corresponding to second type farmland.The Fourier transform of square-wave curve 562 will have identical frequency component with the conversion of sine function 560 in the low-frequency range below the sine wave freuqency harmonic wave.The generalized frequency that this method works in any kind distributes, as long as this bandwidth is no more than the sub-fraction of carrier frequency.

Implement phase-shifted grating at this available any device of describing like that in for example such as Fig. 2, the position that can determine domain wall 34 in the grating 22 by figure 562 rather than the periodic function of Figure 18.The polarization mask control pattern of phase shifts of the required figure of available introducing.

Available similar techniques is stipulated any a plurality of periodic optical grating.Each cycle that appears in the grating is to be represented with Fourier series (or integration) by the corresponding sinusoidal wave of required amplitude.All ripples add and form a composite wave together.Composite wave on the occasion of the farmland of part corresponding to one type, and its negative loop is corresponding to second type farmland.The quantity of stacked grating can increase to any amount on principle, limited by accessible minimum dimension.

Figure 19 illustrates the another kind of method of making stacked multicycle mounting for grating 580.Wherein disclosed two grating waveguide structures, have in this structure switchable monocycle polarization grating 582 and one in waveguide with the interactive permanent release grating 584 of a single beam.Discharging grating top deposition one deck coating 588 to reduce the loss of the afterbody that dies down when the guide wave wave mode and metal electrode generation when overlapping.This coating is the significant design that all elements described herein are preferably changed, and should be applied between each electrode structure and the adjacent light waveguide.Use a coating to reduce the possibility that punctures here on the electrode in all elements that also can describe.

In the supercycle structure, by pair of electrodes 602 and 604 switch can be automatically controlled grating, electrode is linked Control of Voltage source 608 by lead 606.First electrode, 602 preferred centres above waveguide, and second electrode 604 is at waveguide either side and parallel with first electrode.Described device is one to have restriction input beam 590, and the waveguide assembly of the waveguide 586 of transmission output beam 592 and reflection output beam 594.

Available a lot of mode constitutes the multicycle grating.For example, can be with a plurality of independent peak in the frequency spectrum as a multi-frequency feedback reflector mirror.In the single grating in two suitable cycles that the combination startup is handled, can realize two kinds of operations (for example phase matching and reflection).Last example can make two kinds of first-class effects of polarization wave mode make grating by the phase place and the amplitude of regulating its element, makes an insensitive element of polarization.

The another kind of useful improvement of periodic structure is the chirp cycle.The length of this cycle along optical grating construction increases gradually or reduces, so that centre frequency changes to the other end from an end of grating.Therefore, the wavelength bandwidth of this grating is broadened to surpassing the wavelength bandwidth of a constant periodic optical grating.The chirp of crossing over grating differs and is decided to be linearity: many different wave lengths reflections that can be implemented in the frequency space (for example square wave, Lorentz type) according to the variation of chirp rate distribute.As mentioned above, also can spatially regulate the load cycle and/or the intensity of excitation electrical field, to improve the intensity of chirped grating different piece.Can control the load cycle of grating on request by mask.By regulating the control of the electrode gap shown in example electric field intensity among Fig. 6.

In comprising two separately optical grating constructions with multi-peak structure, can realize the wide spectrum tunable devices, shown in Figure 21 and 22.Figure 20 illustrated the ultimate principle of these devices and described multi-peak pectination transmission (or reflection) and distributed 620 and 622, as the function of the light frequency of these two gratings.First grating distribution 620 has the transmission peak value that is separated by the period 1 626, and second grating distribution 622 has the peak value that is separated by second round 624, and second round is slightly different with the period 1.The main design of this device is to make this device only in the overlapping definite frequencies operations from two curves (frequency ν 1) peak value.Broach by tuning toward each other grating transmission peak value is realized tuning.Different transmission peak values in two broach will be overlapped in the different range of frequency displacement relatively so that the clean transmission of combination grating jump to individually than single heat or the tuning wavelength coverage that reaches of electrical-optical wide the wavelength coverage of Duoing.In the example of Figure 20, the peak intervals difference is 10%, if the frequency of first grating increases 10% of frequency interval 626, next higher frequency peak causes big ten times of the tuning amounts of effective deviation ratio with overlapping.

The guide wave embodiment of this device shown in Figure 21, wherein two gratings 650 and 652 are arranged in the single waveguide 642.Output beam 644 partly reflexes to light beam 643 and is transmitted as light beam 645.First electrode 666 and second electrode 668 are arranged on around first grating 650, trigger this grating so that be connected to first voltage source 662 of electrode.Third electrode 664 is with around second electrode is arranged on second grating 652.By being connected to second and second voltage source 660 control, second grating of third electrode.In the preferred embodiment, each grating is a multi-peak structure as described in Figure 20, and this device forms a frequency hopping tuned reflector.According to the curve of Figure 20, optical grating constitution is the broadband reflection device, mainly reflects all the incident radiation frequencies except that the higher uniformly-spaced frequency broach of transmission.Therefore, cascaded fiber grating will reflect all frequencies in the frequency range shown in Figure 20, except 1 liang of transmission peak value overlapping of ν.If arrange two grating reflection, so that increase phase place in folded light beam 643, transmitted spectrum will equal the product of two transmission curves 620 and 622 substantially.When to the centre frequency of one of grating when tuning, will jump to next adjacent peak value at the single transmission peak value of ν 1, and then next, by that analogy.This structure is to particularly useful as the electric tuning receiver in wavelength-division multiplex (WDM) communication system for example.This receiver can be made the output light that only detects special frequency band, and insensitive to the light of other frequency.

As above finding, supposing to have the electric field in the anti-phase grating in farmland of 75% load cycle is 10V/ μ m, optical grating construction can be offset about 0.5nm.If the width of single frequency peak value 628 is narrower than 1/100 of frequency interval, this continuous tuning coverage is used in leap and perhaps produces the discontinuous tuning of 50nm scope in the structure 640 of 100 frequency bands.

Should point out,, then only can mainly use the Moire effect to realize this device with the monochromatic light grid structure of transmission spectrum with curve 622 if known input light frequency for example only is in the transmission frequency band of curve 620 among Figure 20.By the centre frequency of tuning frequency spectrum 622, can select any required frequency band and with remaining reflection.The T type structure of Fig. 7 has its specific meaning in this case: the input beam 112 that will comprise the multi-frequency component by optical grating construction 100 (being configured for said tuning) is divided into single transmitted light beam 116 of can be detected or handling with other method and the folded light beam 114 that comprises all other frequency components.The power that comprises in the light beam 114 does not lose, but can be routed to other node in the communication network for example.

Other variation can form this basic structure, and wherein, for example the frequency spectrum of Figure 20 is independent grating reflection curve rather than transmission curve.In this case, when the frequency of reflection polarization mutually on time, this structure according to the relative phase of reflection wave by reflectivity as a standard.Otherwise the clean reflection of composite structure mainly is the summation of the reflectivity curve of two independent structures.

By regulating the relative phase that two optical path length 653 between the grating optimize two reflections may be very important.Can between two grating inlets 654 and 655, use an electrical-optical structure (shown in example among Figure 22) control relative phase, to regulate optical path length 653.For the input wavelength of lithium columbate crystal and 1.5 μ m, triggering between grating distance needs 250 μ m at least, to regulate up to the relative phase between two light beams of ± π, (use is applied in the z axle of 10V/ μ m electric field).If this grating is not to be designed for tuning (constituting its mean refractive index and the independent from voltage that is applied), control the intensity (rather than its frequency) of one of grating arbitrarily through the electric field that applies at its electrode.If two gratings are tuning together, can cause the close limit continuous tuning.As the another kind of mode of Electron Excitation or replenish, the phase place of two reflections and the peak wavelength of grating can change together by the heat or the machinery control of chip.

Figure 22 schematically illustrates two grating reflectors 633 and 634 that separated and formed integration standard device 640 with characteristic Free Spectral Range (FSR) by phase shifter section 635.(structure 630 is basic identical with the structure among Figure 21, but has increased phase shifter section, by encouraging the electrode transverse to the electrical-optical material sections of waveguide 636 to form).For simplicity, we consider the situation of even monocycle grating, but indivedual grating is generally more complicated structure.This grating can be fixed or by Electron Excitation.The voltage that is applied to phase shifter section 635 by adjusting can make and depart from two grating reflection increase light beam in reference frequency phase place.If divide the frequency of opening two gratings, also will increase phase place at the light beam of second frequency by a plurality of FSR.Because the optical path length between FSR and two gratings is inversely proportional to, the density of standard reflection peak structure has been determined in the selection of optical path length.For example, the high reflection grating of two weak points that separated by 220 μ m in lithium niobate can have the optical grating reflection peak value that is separated by a plurality of 1nm.Multi-peak structure 620 that Figure 20 describes or each of 622 can be implemented as the integration standard device.

Figure 23 illustrates double grating breeches joint embodiment, and wherein two gratings 690 and 692 are crossed over two waveguides that separate 682 and 684 and extended.Breeches joint has an input and a plurality of output waveguide that can be in a plane or the space usually.Two waveguides are connected to first waveguide 686 by breeches joint 688.Between second waveguide 682 and the 3rd waveguide 684, divide the power in the input beam 691 that opens the light, so that nearly 50% input beam 691 incides each grating.Two gratings can have simple reflection configuration, maybe can have a series of high reflection peaks.Grating can be permanent, or also can be electronic control, and electrode 694 and 696 excitation gratings are set in this case.Then, cross over wafer (or another way be on the plane identical, similar Figure 21 is in abutting connection with other electrode) common electrode 698 is set with waveguide.

The relative optical path length of two branches of waveguide can be regulated by the electrode 689 that is configured in top, electrical-optical active region.By the voltage on the control phase adjusting electrode 689, scalable two backpropagation folded light beams have same phase at it when breeches joint meets.Reflected wave pattern has the discontinuous wavefront distribution of phase place according to the relative phase stack of two ripples and the center that is formed on.Along with the combination wave propagation, phase shift influences the spatial concentration of light wave type in the boot section strongly.If it has same phase, it distributes and then forms the symmetrical wave mode that is coupled to input waveguide lowest-order wave mode effectively, to form retroeflection output beam 693.Two folded light beams that add out-phase at breeches joint will have the very low any symmetrical wave mode (for example lowest-order wave mode) that is coupled to waveguide 686.If waveguide 686 is single wave modes, this reflected energy will be got rid of from waveguide.Therefore, by the optical path length of regulating one of Y type arm, can will reflect rapidly from almost 100% being adjusted to almost near zero value with electrode 689.In addition, if in one of described tunable structure grating is implemented as the electronic tuning reverberator herein, the modulation reflection characteristic can move on in the different spectral district.

With reference to Figure 24, the switchable waveguide wave mode converter 720 that uses polarization grating 722 is shown.Input wave mode and output wave mode are preferably supported in waveguide 730 simultaneously, and it can be two transverse modes or two polarization wave modes (for example TE and TM).Two kinds of wave modes in waveguide have the different propagation constants of being determined by the effective refractive index of wave mode usually.Grating 722 is by the electrode 740 and 742 electric excitations that are coupled to potential source 744 by line 746.Selective light grid cycle Λ (724) is so that the propagation constant extent in two waveguides equals grating constant 2 π n/ Λ.When the grating conducting, grating compensates the poor of two duct propagation constants, so that be coupled phase matching between two wave modes.Should set grating intensity and the device reciprocation length in grating, so that power circuit is preferred to the output wave mode from the input wave mode.(lithium niobate is γ to the net rate of the power transfer of another kind of wave mode by the electrical-optical coefficient from a kind of wave mode ₅₁) intensity and electric field intensity determines.

For two kinds of transverse modes, it is coupled space stack and the grating intensity that depends on the following two kinds of wave modes of the situation that optical grating construction is arranged.Two kinds of wave modes can be passed through symmetry and quadrature, even so that the wave mode phase matching, not conversion in symmetrical structure.In this case, phase matching structure itself can be made into asymmetric to eliminate this problem.In the preferred embodiment of Figure 24, can introduce asymmetric by the electric field of excitation polarization structure.The vertical component of electric field is reverses sign in the middle of two electrodes 740 and 742.Preferably electrode is arranged on waveguide central authorities, so that the conversion of the wave mode between the transverse mode of different symmetries is preferred.When being coupled the transverse mode of identical symmetry, it is reversed to very: the phase matching structure should be made symmetry now so that conversion is preferred.Also can use several distinct methods.A kind of three-electrode structure has the electric field vertical component and an asymmetric horizontal component of a symmetry.One of electrical-optical coefficient that can be coupled in conjunction with level uses this horizontal component of electric field to be coupled different symmetrical wave modes.Perhaps, polarization structure can have the anti-phase plane of dividing waveguide substantially equally, and the symmetrical components of available electric field are coupled the wave mode (for vertical electric field, being horizontal component of electric field under the two electrode situations) of different symmetries under three electrode situations in this case.

Because the propagation constant of two kinds of wave modes depends on wavelength strongly, its interactive beat length also depends on wavelength.Therefore, for the given length that is coupled the district between two kinds of wave modes, the power that is coupled to second wave mode is to frequency sensitive.This is coupled has associated frequency span.For given grating intensity, input beam is coupled to the output wave mode of leaving as the output beam that is coupled in the part band, and the remainder of input beam leaves first waveguide as the transmission output beam.

Structure shown in Figure 24 also can be used for being coupled between TE and the TM polarization wave mode.Electrical-optical coefficient gamma for example ₅₁Can make between two orthogonal polarizations in the lithium columbate crystal and be coupled.As previously mentioned, the selective light grid cycle is so that grating constant equals to propagate between two wave modes the poor of transmission.Select reciprocation length so that power transmits preferred.

A kind of waveguide such as the inside diffuse titanium waveguide of supporting TE and TM wave mode is used to polarise and can enters or leave in the application of converter.A kind of waveguide such as the proton exchange waveguide of only supporting a kind of polarization (TE in TM in the z cutting lithium niobate substrate or x cutting or the y cutting) can be used for only requiring in the application of single polarization.This single polarization waveguide can be used as the very effective wave filter that is used for other polarization.Because of the diffraction polarization components that makes the mistake dissipates rapidly from waveguide, only will guide polarization to stay in the waveguide.For example, proton exchange waveguide 731 can be played the effect of only guiding input polarization or output polarization on demand.If grating is coupled by force and correctly selects reciprocation length and electric field, this device can be used as the photomodulator with excellent transmission and extinction characteristic.The modulator that constitutes with the proton exchange waveguide is all input light that correctly polarized of transmissive basically, and produce the low-down transmitted light that is coupled to the vertical polarization wave mode.Another kind of mode, input waveguide can be that the inside titanium that spreads is to accept arbitrary polarization in the input.The index distribution of waveguide that forms two light beams is preferably similar, so that the distribution of TE and TM wave mode is overlapping good, and makes and is coupled the efficient maximum.

For triggering γ ₅₁Coefficient applies electric field along crystal Y or X-axis.The electrode structure that reaches suitable direction of an electric field depends on crystal-cut.For having along the z sliced crystal of the waveguide of x axle orientation, first and second electrodes can be arranged on the either side of waveguide.On the other hand, for having along the y sliced crystal of the waveguide of x axle orientation, first electrode can be set directly at the waveguide top, and second electrode can be arranged on the either side of waveguide, is parallel to first electrode.

Extend because whole substrate (for example 0.5mm or thicker) can be passed through in the polarization farmland in the grating 722, the structure of Figure 24 also can be used for controllable overall polarization converter.In this case, do not need waveguide 730, and the electrode optimum is formed on the either side of the whole thin plate of polarization material.

With reference to Figure 25, the switching light beam guides 700 that comprises Y type power splitter 702 and transverse mode converter 704 is shown.The transverse mode converter similar fashion work of wave mode converter to describe with top relevant Figure 24.Optical grating construction 706 phase matching are from inciding waveguide 708 lowest-order (symmetry) wave mode to the next one of the waveguide energy conversion of high-order (asymmetric) wave mode more.Select the length and the intensity of the overlapping interaction region of waveguide and optical grating construction, become the asymmetric wave mode of higher-order so that will be similar to the single symmetrical wave mode power transfer of half input.In addition, the optical path length between selective light lattice wave type converter part 704 and the Y type phase-splitter 702 is so that the phase place of two wave modes constructively increases and increases devastatingly in another branch 713 at one of y-branch 712.Consequently power mainly is routed to the waveguide 712 of constructive interference, has only little power another branch 713 of bleeding.In this case, the backpropagation power in the waveguide 713 is excluded outside the backpropagation wave mode in the waveguide 708 after being coupled to wave mode coupling device 704 substantially.This device forms an effective power router and is oppositely forming isolation structure at forward.

By regulating the optical path length between grating wave mode converter part 704 and the Y type phase-splitter 702, output power can be switched to waveguide 713 from waveguide 712.This is by the relative optical path length of regulating lowest-order wave mode and higher-order wave mode so that two wave modes slippage π phase place relatively mutually, so produce constructive interference and produce in waveguide 712 that destruction interference carries out in waveguide 713.By using voltage source 714 exciting electrodes to 711 and 709, electro-optic effect in substrate 703 changes refractive index under the electrode 711 to be regulated in optical path length and realizes in the part 705 that relative optical path length regulates, and substrate 703 preferably lithium niobate (but can be to such as lithium tantalates, KTP, GaAs, InP, AgGaS ₂, any electrical-optical material of crystal quartz etc. and so on ripple with transparency).Select the propagation distance of waveguide 708 under electrode 711 with driving voltage, so that the relative phase of two wave modes is changed quantum volueris at least.

Grating 706 can be the permanent grating made from any technology known in the art.Yet, preferred for the function that makes this device, wish that the power in symmetry and asymmetric wave mode is almost completely equal.In existing manufacturing technology, be difficult to the enough control of realization to reach this purpose, therefore need in grating intensity, do some adjustment.Use at least some can realize this modulability by the polarized light gate part of electrode 709 and 710 excitations, electrode 709 and 710 is driven by power supply 715, and itself can be used to finish desired wave mode conversion, or the intensity of regulating the permanent grating of combination polarization.

Input waveguide 708 preferably is embodied as a single wave mode waveguide that comprises (preferably adiabatic) tapering 701, to allow guiding two wave modes between transverse mode coupling device 704 and Y type phase-splitter 702.Waveguide 712 and 713 preferably all is single wave mode.Also can use other wave mode in this device, as long as its symmetry is opposite, for the interconnection purpose, what need most is to go between with the work of lowest-order wave mode in input and output.Middle excitation wave mode is not too important, and for example can be a higher asymmetric wave mode.

Figure 26 illustrates the changeable resonator 750 of a parallel waveguide, and wherein input waveguide 752 is coupled to parallel waveguide 754 along interaction region 753.Grating reflector 755 and 756 is crossed over waveguide 754 configurations in the mode of propagating back reflected light in waveguide.Should form the integration standard device that is coupled to input waveguide 752 to reverberator and the waveguide 754 that separates.Selection is coupled the length in district 753 and is coupled the interval of parallel waveguide in the district, so that the sub-fraction T of required input beam 757 is coupled in the waveguide 754.Be coupled to light resonance between reverberator 755 and 756 of standard structure 754,755 and 756, and be coupled out two main output channels: forward-propagating ripple 759 in waveguide 752 and backpropagation ripple 758.Round-robin is coupled to each of two output channels 758 and 759 with sub-fraction T power in standard.

With regard to any standard, the integration standard device has a frequency to accept structure, and this structure has the width of deciding on resonator losses, comprises a plurality of peak values in frequency control, and equals free spectral range at interval.If one of the light frequency of input beam 757 and these resonance frequencies coupling, round-robin power will be promoted to by P in standard _Cir=P _IncT/ (T+ Γ/2) ²The value P that determines _Circ, P wherein _IncBe the incident power in the waveguide 752, Γ is the standard loss, does not comprise the forward-propagating ripple 759 that is coupled in the waveguide 752 and the output of backpropagation ripple 758, and is coupled and low-loss a little less than the hypothesis.The output with backpropagation in waveguide 752 is coupled ripple formation reflection wave 758 from standard.Reflective power in the light beam 758 equals P on resonance peak _Ref=P _Inc/ (1+ Γ/2T) ²As T " during Γ/2, all incident powers are reflected substantially.In waveguide 752, be coupled the not coupling portion out-phase (in cavity resonance) of ripple and incoming wave 757 from standard, and two light beams interfere devastatingly, produce low amplitude output beam 759 with the output of forward-propagating.Because two light beam amplitudes do not wait the residual power P in the output beam 759 _Trans=P _Inc/ (1+2T/ Γ) ²Be not equal to zero, but can be very approaching zero.If make to be coupled Γ and to compare very greatly with the standard loss, the transmission of this device is suppressed (then is 26dB as T=10 Γ) widely.The very low-loss reverberator of frequency broach place conduct that this structure is then being separated by FSR.

This device can switch by the optical path length that changes between two reverberators 755 and 756. Electrode 761 and 762 is set between catoptron 755 and 756, produces electric field to pass waveguide 754.With power supply 763 exciting electrodes, change the effective refractive index of the substrate under the electrode 761 by electro-optic effect, thereby change the optical path length between catoptron and make the resonance shift of integration standard device.If resonance shift is greater than one of frequency span of resonance width or incident beam, because the circulating power in the standard is suppressed to about P _IncT/4, reflection will drop to zero, and transmission will be raised to 100% basically.

Shown in previous drawings and explanation, grating 755 and 756 can be permanent grating, or they can be the polarization gratings by electrode excitation.If grating 756 is polarization gratings, can switch this device by cutting off grating.Along with grating 756 cuts off, promptly not reflect, the loss of incident wave 757 equals to be coupled constant T, but has eliminated comb structure now and only carry out frequency displacement by electrode 761.The difference of switching function can be more obvious between two operation wave modes, for example is wideband input signal, must cut off reflection rather than only change its frequency at this.For the unifrequency input beam, can be by changing optical path lengths with electrode 761 or by cutting off Q that catoptron 756 destroys resonators toggle reflections equably.Yet if keep the reflectivity of catoptron 756 and with only the be shifted frequency spectrum of standard of electrode 761, other frequency component of broadband incoming wave will be reflected, this may be extremely undesirable during some is used.

If T and Γ are less, the power P of in standard, setting up _CircMay be quite big, and can be used in for example application such as the second harmonic generation.In this was used, the accurate phase matching (QPM) in the part of lithium niobate substrate regularly polarization structure or may be introduced in interaction region itself between catoptron 756 and interaction region 753.Tuning to one of resonance frequency of standard then so that consistent with the phase matching frequency of QPM frequency multiplier.Owing to set up factor P _Circ/ P _IncSquare, the power that produced is set up the frequency conversion efficiency that has strengthened device.If enough big consequently other resonance mode of FSR is not by while injection locking, the height reflection that occurs in this frequency also can be used for the pumping optical injection-locked in desired frequency.Geometry with reference to Figure 21 and the 22 linear Integrated standards of describing also can be used to finish same purpose above.

For making the power of setting up between the reverberator 755 and 756 in the standard preferred, must make the loss minimum in the resonator.Being coupled of Figure 26 can not " impedance matching ", and the processing of setting up cavity with integral body as known in the art is similar, regulates the input that is coupled to resonator by partly not carrying out destruction interference and offset being coupled to incident beam in the cavity.This is the condition of standard transmission interference peak.As mentioned above, what taken place in the integrated morphology is that transmitted light beam almost can be cancelled, and sets up power simultaneously in the resonator that is coupled, but a strong reflection ripple occurs.This reflection wave can be eliminated in the disc waveguide structure, as Figure 27 and 28 illustrated.

If desired, can make the output 751 that is directly proportional with power cycle in the standard by grating 756, or another kind of mode is by grating 755.

Three arm standards 760 shown in Figure 27, this three arms standard 760 comprise that an input waveguide 752, a parallel waveguide are coupled 753, toroidal cavity resonator, three grating reflectors 767,768 and 769 that are made of three waveguide segments 764,765 and 766 in district.The optical path length that forms between the electrode 761 and 762 is regulated part and is chosen wantonly.Grating reflector 767 is set so that the power that arrives from waveguide 764 preferably reflexes to waveguide 765.In single wave mode system, the design grating is (with its electrode, space structure if any), so that come the lowest-order wave mode of self-waveguide 764 to be coupled to the lowest-order wave mode of waveguide 765.Grating 768 and 769 structural similarities are so that power is preferably from waveguide 765 to waveguide 766 and then to waveguide 764, with the optical path length of determining, FSR, light loss coefficient be coupled Fabry-Perot resonator of coefficient T formation with input waveguide 752.Now, impedance matching is possible, and when being coupled the resonator total kilometres loss factor that coefficient T equals to be coupled less than output loss, mainly is to be coupled district's realization in 753 o'clock.If the phase matching frequency multiplier is arranged in the resonator, the outer transfer power of round-robin basic frequency beam not can be regarded as a loss in the total kilometres loss in the resonator.

If incident beam 757 incides on the device with the frequency of one of resonance of equaling three arm standards, power will be crossed over the parallel waveguide interaction region and be coupled to this standard and set up circulating power P _Circ=P _IncT/ (T+ Γ) ²Because this loop configuration, power is mainly from waveguide 764 to waveguide 765,766, and gets back to a direction circulation of 764.752 only have one singly to be coupled ripple and it is in forward-propagating from the standard to the waveguide.The remainder that output is coupled ripple and incoming wave 757 carries out destruction interference, forms weak transmitted wave 759.Transmission power P in the output beam 759 _TransBy P _Trans=P _Inc(1-Γ/T) ²/ (1+ Γ/T) ²Provide, if Γ=T, its value is zero, as the impedance matching condition.In this case, all incident powers flow into resonator.In the impedance matching state, two light beam amplitudes equate, and transmission power is reduced to zero.Except that the reflection that comes self-waveguide 752 discontinuous places, in light beam 758, do not have reflective power substantially, can make reflection minimum in the waveguide 752 by good design.

Grating 767 or any other grating can constitute switchable grating, in this case, but by closing the quality Q of grating criterion of failure device, eliminate whole comb structure, but stay the optical loss that some cause because of the power that is coupled to waveguide 764.Grating 768 is crossed in bootable output beam 751 transmissions, and/or by grating 767 or 769.

Figure 28 illustrates disc waveguide standard 770.As previously mentioned, input waveguide 752 is coupled to waveguide 772 in parallel interaction region 753.Interaction region 753 comprises the grating (though not needing) among Figure 28, is coupled in a kind of useful selection in Figure 26,27 and 28 the standard geometry to emphasize grating.A part of Feedback of Power that waveguide 772 will occur from section 753 with a crooked closed path (any geometric configuration is arranged, comprise the many loops of current potential that band intersects) is to interaction region 753.As previously mentioned, provide electrode 761 and 773 also therefore to regulate FSR, though they are arranged on the identical faces of substrate in this case to allow regulating optical path length.Flat region 771 is provided, can wherein can prepares some according to being applied in of standard structure and reuse function element.If standard device 770 is used for frequency multiplication, help the frequency multiplication structure is inserted the flat region, for example Huan 771 parts go out the regulation of disc waveguide but must make with frequency inverted optocoupler company.

Device 770 is similar the function of others and device 760.Can occupy less surface region and install 760 on substrate, the loss of device 770 in standard is lower, if diameter is 1cm or bigger then all the more so.

Device 760 and 770 can play a part to set up the frequency multiplication cavity, arrives the feedback minimum of light source in cavity.They also can be there not being the incision of retroeflection situation to give the transmission of deciding frequency, to use in the application that comprises optical communication.

In WDM communication, can carry many communication channels of separating by its optical wavelength on the optical fiber.For detecting channel, the light in required wavelength zone must at first separate with the residue channel that is routed to other destination.This separation function is carried out by channel lower line filter (channel droppingfilter).The channel lower line filter is the communicator that uses in wavelength-division multiplex (WDM) environment.Need channel by the single Transmission Fibers of the multiplexed leap of Bearer Channel on different wave length.It is to allow for Route Selection or testing goal and the channel lower line filter that extracts individual channel that in this system one reuses element.Ideal fiber extracts light all in the channel by good extinction ratio basically so that can use identical wavelength not have cross-talk in the network of back.Owing to a plurality of channel lower line filters can be installed on any given circuit, the insertion loss of out of band components must be very low.It is preferably switchable, so that channel can roll off the production line in the destination, and behind this sign off, this channel can continue by this position to another kind of destination.Corresponding with the channel lower line filter is line filter on the channel, adds channel and the not obvious power propagation that influences in other channel to optical fiber.Transmission and reflective filter labor in [HL91, KHO87].Top multiple structure can be used for the channel lower line filter, comprises with reference to figure 7,10,26,27 and 28 devices of describing.

It is that out of band components is had low-loss channel lower line filter that the T type grating of Fig. 7 is coupled waveguide.Compare with the grating of prior art, need very long grating owing to reach 99.9% outer being coupled at component in the band, this structure is had any problem to cross-talk.Owing to use the ability of the higher-order grating that has the sharp interface of crossing over the whole extension of waveguide to make the strength ratio prior art that is coupled of period polarized grating of the present invention obviously improve.And prior art is used shallow waveguide to make overlapping preferred restriction between shallow grating and the waveguide, because our optical grating construction is crossed over the whole extension of the waveguide degree of depth, more low-loss waveguiding structure that can use the degree of depth and width to equate substantially.This structure also can be used as line filter on the channel.

If press people such as Haus at 1992 the tenth phase 57-62 pages or leaves " narrow band light channel lower line filter " of a J. lightwave technology civilian described structure grating, the device of Figure 10 also is a channel lower line filter.Our contribution grating that only is to polarize is coupled technology in this case, can make between the waveguide to be coupled strongly in short distance, thereby reduce the difficulty of making high efficiency more senior grating.

By with the resonance of standard be tuned to the channel frequency that extracts from input waveguide 752, device 750,760 and 770 can be used as the channel lower line filter.If the integration standard device is near impedance matching, all power at resonance frequency place are sent to standard basically.In the circular geometry of Figure 27 and 28, transmission in the waveguide 752 and reflective power can be reduced to any degree that requires, make cross-talk minimum.The light corresponding with the requirement channel is extracted out (rolling off the production line) from input waveguide fully, does not promptly stay reflection also not stay transmission.In the linear geometry structure of Figure 26, some light losses in reflection, not obvious reduction detection efficiency, but may cause the cross-talk problem at communication network.Partly go up and connect and to detect the signal that carries in the light by the waveguide that detecting device is placed on standard with optocoupler in the waveguide.Perhaps, detecting device can be coupled to 764,765 among output waveguide 754 among Figure 26 for example, Figure 27 or 766 and Figure 28 in one of 794.Under the situation of device 760, by the reflection of regulating one of resonator grating reflector 767,768 or 769 the sub-fraction circulating power is coupled to as the continuous part that is used for waveguide shown in the output beam 751 outward and finishes outer being coupled.Those continuous waveguides parts also can be connected to the port of other device, can be discrete devices or are integrated on the same substrate.Under the situation of device 770, parallel waveguide output coupling device (having or no-raster) can be arranged on the flat region 771 of annular.Though only have the sub-fraction circulating power can be coupled to these ports outward, because the foundation that produces causes total outer power that is coupled can be very near 100% of the channel power that enter waveguide 752 in the standard.Represent that with adjacent waveguide 794 output is coupled, and produces output beam 751.

Circular geometry has advantage aspect extinction ratio (extinction ratio height when light separation efficient is high) and low cross-talk, this is owing to can regulate so that almost whole power transmission enters into standard them.All standard devices can be designed to that the band outer light beam is had very low insertion loss.All devices of Figure 26-28 can pass through phase shift electrode 761 and 762 (with 763 among Figure 28) and switch.

As previously mentioned, avaivable electrode 761 is regulated optical path length with displacement integration standard device resonance frequency.Can this mode directly select required passage.Perhaps, pass through the optional majority of this a technology passage with top with reference to figure 20,21 and 22 methods of describing; If the FSR of choice criteria device is slightly different with channel spacing, available Moire effect selects to have the wide interval passage of minimum continuous tuning.(select preferably is to make FSR equal the frequency span that channel spacing adds that several times of channel bandwidths and standard resonant bandwidth obtain when twining).

Along with the variation of structure 750,760 and 770, can be coupled district 753 by the top grating assist type coupling device enforcement of describing with reference to Figure 10.Its advantage is arranged like this, and in the polarization grating was implemented, scalable was coupled coefficient T.Particularly to toroidal cavity resonator design 760 and 770, scalable is coupled and helps to realize impedance matching.Along with further variation, can on the same one side of substrate, electrode be set, as mentioned above, to obtain the low voltage excitation.

For example, be introduced in the waveguide 766 if be added to the signal of output beam 759, if or its be coupled to flat region 771 through waveguide 794, Figure 27 and 28 structure also can be used as line filter on the efficient channel.The preferred impedance matching of these input reciprocations.

With reference to figure 29A, the waveguide modulator/attenuator 800 that uses polarization section 806 is shown.The function of polarization section 806 is that (switchably) collects the light that sends from input waveguide section 802, and when output waveguide section 804 is connected it is transmitted into output waveguide section 804.In this device, input beam 820 is coupled to input waveguide 802.Polarization section 806 is between input waveguide section and output waveguide section 804.The permanent waveguide that the input and output waveguide segment preferably can be made by any standard technique that comprises inside diffusion and ion-exchange.Section 806 is the interior reverse polarization district of an even polarization substrate preferably, so that its refractive index is as broad as long substantially and do not have waveguiding effect when electric field cuts off.Section 806 is waveguide segments as shown in Figure 29 A.(alternately constitute with several different geometric ways, for example, convex lens structures, a concavees lens structure or between many these class components, transmit the composite structure of light: see Fig. 9).Make its connection by applying electric field through section 806.Electric field changes the refractive index of polarization section and peripheral region.Owing to polarized (preferably reverse polarization) according to substrate material, by applying correct electric polarity, the refractive index of this section is increased with respect to material around, the formation waveguide by section 806 with having nothing in common with each other.Can increase the refractive index of inboard, waveguide border, maybe can reduce the refractive index in the outside, border.When this polarization section conducting, form the continuous waveguide of a connection input and output section.This be by waveguide is linked together, alignment on same axle, and the wave mode of preferably mating input and output waveguide 802 and 804 distributes and realizes so that its transverse mode distributes to regulate the width of polarization section.

Along with the polarization section is cut off, input beam is not limited in the polarized area, so that light beam is fully expanded by diffraction before arriving the output waveguide section.If the interval of input and output waveguide segment is more much bigger than Rayleigh (Rayleigh) scope of non-lead beam, so that beam spread only has the sub-fraction input beam will be coupled to the output waveguide section to form output beam 822 to the much bigger size of specific output waveguide.By length, the power transmission amount under the dissengaged positions can be reduced to desired degree with respect to Rayleigh range regulation section 806.

The position adjustments of input and output waveguide end polarization section 806 end positions are so that the loss minimum that uncontinuity causes relatively.Because permanent waveguide has a diffusion term, poled waveguide has a noncoherent boundary, be added to the refractive index that is pre-existing in the refraction index changing in the switching section, need between litho institute's deckle circle of waveguide 802 and 804 and polarization section 806 ends, leave the little gap that is equivalent to half diffusion length.For further reducing the reflection and the loss of waveguide 802 and 806 joint portions, by make exciting electrode 810 slightly the section of being shorter than 806 or by make electrode width near its end be taper also help in the section of making 806 variations in refractive index begin to be taper, in both cases, utilize the reduction of electric field by edge effect.

A remarkable aspect of this structure is can make the reflective power minimum under conducting and cut-out two states.Along with cut-out, reflection is reflected domination by the remnants of waveguide 802 ends 803.By being reduced gradually, refringence can make this reflection minimum.By " " square inhibition of transmission comes the reflection of self-waveguide 804 ends 805 in cut-out.Under " conducting " state,, form smooth boundary rather than sharp change interface and can make this reflection minimum still by reduce the refringence of structure 806 gradually along the direction of propagation.

When polarized area was energized owing to the refractive index in the border increases, the border of the polarized area that is energized laterally limited light beam.If the degree of depth of polarized area equals the degree of depth of waveguide 802 and 804, the polarization segment boundary also limits this light beam in vertical direction.Yet, be difficult in the control polarization degree of depth in the z cutting lithium niobate crystal chip.Make dark farmland polarization the easiest, and adopt several different one of measure to obtain restriction in vertical dimension.Method for optimizing is to arrange electrode so that electric field amplitude descends in vertical dimension.This is by the homonymy electrode structure shown in Figure 29 A, rather than is arranged on that the electrode of substrate opposite side realizes.By making two interelectrode gap turn narrow and can reducing the penetration depth of electric field by the width that reduces the entire electrode structure.

In addition or as another kind of mode, permanent waveguide a little less than can in the space between the input and output waveguide, making one, itself be not enough to transmit a lot of energy, but its with polarization section 806 in the refractive index that produces raise and can preferably light be limited in two dimension after combining so that basically all light are sent to output waveguide 804.This is by the about 0.6 times of realization that for example the permanent variations in refractive index (with respect to substrate) in the section is adjusted to variations in refractive index in waveguide 802 and 804.If " conducting " variations in refractive index in the section 806 is adjusted to about 0.5 times of same value, the combination variations in refractive index is enough to reach rational guiding, and permanent variations in refractive index is then not enough.Under " conducting " state, wave mode is limited in two lateral dimensions, firmly gets many even the toggle refractions rate that produces in polarized area changes comparable desired waveguide dimensions: the significant depth of " conducting " waveguide is mainly determined by permanent variations in refractive index.Smooth sea is led and can be made in second masks, or can make in the same step that defines weak waveguide segment with a narrower weak mask section.

As a kind of alternative relatively, the district between the input and output waveguide can be a slab guide, and propagation mode can be in minimum diffraction in one dimension in this case.Connecting under the situation of a polarized area to increase required horizontal qualification, and no matter than slab guide darker variations in refractive index is arranged.Because the waveguide under two kinds of situations on two dimension limits by two kinds of independent techniques and realizes, therefore can form any the ratio of width to height is arranged basically the switchable waveguide of the ratio of the degree of depth (duct width with).With constructed, the proton exchange of preferably annealing is handled can make plane and channel waveguide.Can use separately definition slab guide of proton exchange step and channel waveguide.Finish the waveguide manufacture process by annealing, variations in refractive index is diffused into the desired degree of depth downwards during this period, and the optical activity of recording materials.Two groups of waveguides identical time span of preferably annealing is though can do one group part annealing darker before the second proton exchange step is carried out.

A kind of reusing replaced whole, the evenly permanent waveguide that is to use transverse to polarization section 806, and uses the Electron Excitation section to cut off waveguide.In this case, select electric polarity to suppress the refractive index in the polarized area, the degree of depth of polarized area is dark (in fact, this is having its advantage aspect wave mode diffusion) very.This switching waveguide is generally conducting (being transmission), and need apply electric field it is cut off.Normally closed and normal off switch structure has its advantage with regard to its behavior during power failure, so the important point is that the present invention can provide two kinds of patterns.For the waveguide in the section 806 is cut off, need one with permanent waveguide in the variations in refractive index approximately equal responded to opposite variations in refractive index also.The varying effect of state is very little along with the electric field degree of depth is in " cut-out ", and this is that light spreads institute extremely consumingly because it is enough to suppress most of waveguide.

Do not need slab guide, and can on bidimensional, realize limiting by the finite depth Polarization technique.Several Polarization techniques (for example such as the ion-exchange among inside diffusion of the titanium in lithium niobate and the lithium tantalate and the KTP) produce the polarization to finite depth, may optimize to form a POLARIZATION CHANNEL waveguide it by certain depth.Yet these technology produce variations in refractive index with polarization, form some permanent waveguides slightly according to processing parameter.Any manufacturing poled waveguide section in can constructing with " normally closed " or " normal off " according to this variations in refractive index intensity.

Preferably produce electric fields by crossing over two electrode application voltage, two electrodes and poled waveguide section are arranged in same crystal face.First electrode 810 is arranged on the polarized area, and second electrode 812 is arranged near first electrode, one side or the many sides.For the z sliced crystal, this constitutes the d33 electrical-optical coefficient of excitation substrate.Voltage source 816 is to be connected to electrode through two leads 814 substantially, so that provide driving voltage for device.This device can be used as numeral or non-linear simulation modulator.Full forward voltage is defined as the minimum voltage of loss of crossing over polarized area.Off voltage is defined as and will drops to the voltage of required degree to being coupled of output waveguide section.Variation can be with this device as analog modulator or variable attenuator continuously between forward voltage and off voltage.

In another kind of structure, structure 806 forms switches curved waveguide, aligns with input waveguide 802 and output waveguide 804 once more.This tactic pattern is called as " whispering gallery " wave mode, under the few cases, the wave mode on the less and inside edge of curvature limit become with the inboard waveguide edge of waveguide irrelevant.For bigger curvature, wave mode is a kind of improved whispering gallery wave mode, provides some restriction by the waveguide inside edge.This polarization structure provides another advantage outside changeable property, promptly the sharp-pointed refractive index on its outer wall has greatly been improved the qualification of the improvement whispering gallery wave mode of propagating in curved waveguide.In this case, the input and output waveguide needn't be coaxial or parallel, may increase forward and isolate under dissengaged positions.If the input and output waveguide is arranged mutually at angle along its axle, structure 806 can be the curved waveguide section that has single-curvature radius or taper radius-of-curvature, is used for preferably being coupled between them power when 806 conductings of curved waveguide structure.

Figure 29 B illustrates another kind of structure 801, it is a switching lens modulator/attenuator, the prismatic structure in its stage casing 806 is made into the lens-type structure, and the product of wherein local optical path length and local (putting in marks) refractive index reduces along with the lateral separation from the axle of waveguide 802 and 804 is square ground.The lens-type structure is set so that the end 805 of output waveguide 804 is assembled or focused on to its light beam that will send from input waveguide 802 ends 803 821.Allow the light wave diffraction to leave end 803 and scioptics type structure 807.Should point out that in this structure, a plurality of elements can be placed adjacent one another, to increase clean focusing effect.Refractive index in the increase district 807 is to obtain focusing effect.If the peripheral region with district's 807 reverse directions polarization, if or the electrical-optical coefficient of peripheral region opposite with the electrical-optical coefficient of distinguishing 807, the interval between lens also can be used as the focal region.(district that lens are 807 form and be excited to concavees lens than the low-refraction value) as the convergent lens structure.Electrode 810 is arranged on the structure 806, and it is adjacent with electrode 810 that electrode 812 is arranged on this structure outside, but the desired gap that is separated by.During the dead electrode, light beam is dispersed continuously, and only has little power to focus on waveguide end 805 again.When switch was connected, light beam focused on again, and sub-fraction power is continuously by waveguide 804.In conducting state, need vertical constraints so that the collection of useful power does not then need at dissengaged positions.For example, can provide uniform planar waveguide 835 that vertical constraints is provided by the whole surface of crossing over structure graph as required.If polarization is deep into substrate, also can provide vertical and limit by lens-type structure 806, focus on again as the suitable harvest energy of electric field reduction of depth function and with energy and get back to waveguide end 805.Certainly, the structure of Figure 29 B also can be used under all non-existent other situation of one or two waveguide 802 and 804.

With reference to Figure 30, polarization total internal reflection (TIR) the luminous energy diverter 830 that uses a poled waveguide section is shown.This figure explanation is used for the two the combination of polarization TIR reverberator and the poled waveguide section that is used for low insertion loss of high toggle reflections.Input waveguide 832 is crossed over entire device and is extended.Polarized area 836 is crossed over waveguide with an angle 848 and is extended, and forms the TIR interface that is used for when polarized area is encouraged by electrical-optical at the duct propagation light beam.Part polarized area also forms the poled waveguide section 837 that is connected to output waveguide section 834.Poled waveguide section and output waveguide section are arranged with respect to input waveguide with the twice of angle 848.Voltage source 846 is for switch provides Electron Excitation, and links switch by two leads 844.

With reference to the accompanying drawings, define polarized area 836 by six vertical planes, one of them face with equal the TIR angle and less than the low-angle 848 of the critical angle of the total internal reflection that is used for required electrode excitation transverse to waveguide 832.This face is the TIR reflecting interface.Ensuing three the continuous vertical planes of this polarized area surround an outshot in waveguide 832 outsides.This outshot is the switchable waveguide section.Ensuing two vertical planes are unimportant, can intersect 90 ° with the waveguide border and with it.

The farmland district of the substrate outside 836 (836 and) is characterised in that static index distribution, is not have the space distribution that applies refractive index under the electric field situation.When applying the excitation electrical field distribution by these farmlands, they will have and the different excitation index distribution of corresponding static distribution.Activation profile also has a scope according to applying the accessible scope of electric field.The mutual close advantage arranged side by side in two types farmlands is that two electric field responses in the farmland can be opposite, and providing to cross over to distinguish side by side has the excessive of twice variations in refractive index.Under the situation of refractive index or refraction change, this excessively forms a reflection boundary, and its reflectance is big with the reflection that single type farmland obtains.

When the switch conducting, the TIR interface is left in the input beam reflection that is coupled to waveguide, propagates into the poled waveguide section downwards, and enters output waveguide section 834 formation deflection output beams 854.When switch cut off, input beam passed the propagation of polarization interface and continues and forms not deflection output beam 852 by input waveguide.Because lower in the variations in refractive index at TIR interface, reflection is very low under dissengaged positions.Separate because permanent waveguide segment 834 is several wave mode exponential decay length of origin self-waveguide 832, the power attenuation that light beam causes because of scattering when Zone switched is also very low." cut-out " switch is sightless for waveguide basically, produces low-down loss in input waveguide.The added losses of switch area are compared with the equal length of dead waveguide and are called as insertion loss under dissengaged positions, when input waveguide is that special needs hang down insertion loss when having the bus of many polarization switchs.

Must derive from Si Nieer (Snell) law less than maximum or critical TIR angle θ c with respect to the angle θ (848) of input waveguide at the polarization interface: $\mathrm{\&theta;}\&le;{\mathrm{\&theta;}}_c=\mathrm{co}{s}^{-1}(1-\frac{2\left|\mathrm{\&Delta;n}\right|}{n})\&infin;2{\sqrt{\frac{\left|\mathrm{\&Delta;n}\right|}{n}}}^{\left(3\right)}$ Wherein the refractive index of θ=TIR angle (angle between waveguide and the polarization interface) n=wave guide zone and the electrical-optical of each side refractive index of Δ n=polarization border change

Because variations in refractive index occurs in each side on the polarization border of contrary sign, effective refractive index is changed to 2 Δ n.This expression formula hypothesis slowly changes (thermal insulation) away from the variations in refractive index on border.Because effective refractive index becomes twice, the maximum handoff angle that can reach with the TIR switch that polarizes is increased to pair of electrodes and the prior art switch at the interface of not polarizing Doubly.Because it has increased the maximum storage density of using an accessible switch array of TIR switch, so this is a raising clearly.

Because refractive index change delta n depends on polarization, critical angle θ c depends on the polarization of input beam.For example, in z cutting lithium niobate, have vertical electric field E ₃, the TM ripple is by r ₃₃Very sensitive to the variation in the supernormal refraction rate, and the TE ripple is by r ₁₃Very sensitive to the variation in the common refractive index.Because r ₃₃" r ₁₃, easier switching TM ripple.Use the waveguide of annealing proton exchange very convenient, this be since they only extremely in the ripple institute of z direction polarization.On the other hand, propagate at x-cutting y-in the lithium niobate of (or y-cutting x-propagates), the TE ripple has higher variations in refractive index.Should point out, in this case, must change electrode structure, so that produce electric field component in the z of substrate plane direction rather than vertical direction.

It is selected that the design angle of actual TIR switch must preferably be changed the back in several factors.To be switched wave mode comprises that two horn shapes distribute (in the plane is made in waveguide and outside the plane), if duct width difference in two planes, two horn shapes distribute can be different.In the given plane angle content of wave mode almost cover δ Φ=± λ/π w _O, w wherein _OBe the 1/e in this plane ²The wave mode contraction section.We wish most of light at the TIT boundary reflection, because of incident angle must be than critical angle θ _cAngle content ε Φ in little about switching planar waveguide.The size of angle content δ Φ and contraction section is inversely proportional to, but is that we wish preferred storage density therefore.Angle content on the direction of wave mode outside planar waveguide also must be considered, owing to it also works to effective incident angle, though its geometry is more complicated.

The another kind of mode of producing the TIR switch is that strain field replaces electric field, or increases by a strain field outside electric field.Strain field is convenient to implement in permanent mode most; Electric field is the most effective when producing change of reflection.The oriented strain field that is applied to the border, farmland produces different the variation in refractive index, produce a refractive index by photoelastic effect at refracting interface in two farmlands.As above-mentioned with reference to as described in the figure 2, can be by sample be heated to high temperature, deposition one deck has the film of different heat expansion coefficient, and cool to room temperature produce strain field.Strain field will be produced by etching the figure that bar area for example is applied on the film around the gap in film.Then, excitation changes on the border, farmland can to use this strain field.If the film that applies is a dielectric,, can applies electric field and arrive polarized area by dielectric as long as the deposition of electrode is not change strain field on request.This film is the low film of absorptance preferably, so that it can directly contact substrate, rather than is separated by cushion.

Polarized area comprises a part of input waveguide and the interface perpendicular to the duct propagation axle.It is as follows that the input waveguide that comprises the TIR crossing interface partly defines switch length: $L=W\cot \left(\mathrm{\&theta;}\right)\&infin;\frac{W}{\mathrm{\&theta;}}---\left(4\right)$

Wherein θ such as front are defined

The switch length that L=measures along input waveguide and

The W=duct width

Therefore, for making switch size minimum, must do duct width as far as possible little.For the space critical applications, the preferably single wave mode of waveguide segment.For example, if the width of single wave mode waveguide is 4 μ m, largest refractive index changes delta n is 0.0015, and refractive index is 2.16, and TIR angle θ then is 3 ° and the switch length L is 76 μ m.

Poled waveguide section and input waveguide form the angle that equals 2 θ, and it is the deflection angle at TIR interface.For the folded light beam wave mode that will depart from the TIR interface effectively matches the poled waveguide section, polarization Duan Yingyu input waveguide has intimate identical transverse mode and distributes.Can realize the effective wave profile coupling by the width of selection poled waveguide and the appropriate combination of refringence.Poled waveguide is half side after the waveguide that is occupied by the switch interface to intersect with input waveguide.Determine the accurate size and the position of waveguide, so that handle the wave mode that the near field wave mode distribution of sending preferably matches the waveguide of representing with the direction of propagation and cross direction profiles from total internal reflection.For the coupling between poled waveguide section and the permanent waveguide segment 834 also is so, is similar to top with reference to the described content of figure 29A.

On the permanent waveguide segment base basis is the continuation of poled waveguide section.The polarization segment length depends on the preferred loss in input waveguide and the switching waveguide.The not scattering process between the deflected beam when breaking for avoiding switch to rise in the input waveguide, permanent waveguide segment must separate a segment distance (at least one optical wavelength) with input waveguide.For the bus waveguide that has many switchs, the loss in the input waveguide must be reduced to the value that is inversely proportional to switch quantity.The form of light beam is distributed in waveguide and extends a specific range outside the diffusion edge in the input waveguide, is exponential damping at this place.If permanent segment and input waveguide separate several exponential damping constants, loss can be reduced to the acceptable degree of bus waveguide.

The length of polarization section also influences the loss in the folded light beam.Because the roughness of high wall, the loss ratio that causes poled waveguide section per unit length is the loss height of diffused waveguide not.In addition, there is above-mentioned wave mode transition loss, can distributes and make wave mode transition loss minimum by preferably mating this wave mode at each end of waveguide.If the polarization section is lacked (the Rayleigh scope that is equivalent to light beam), transmitted light beam does not convert the wave mode of polarization section in fact to, thereby reduction is coupled loss.The preferred length of polarization section depends on input waveguide and switches the relative loss factor that can bear in the interior light beam of waveguide.

Under the situation of waveguide segment modulator/attenuator shown in Figure 29 A, in switching waveguide 837, need that wave mode is had vertical constraints.Above-described identical option can be implemented at this.Figure 30 illustrates a slab guide 835, with beam limit in being parallel to the plane of substrate surface.Because slab guide is even, the loss at its dissengaged positions can not impact to waveguide switch convergence point in its existence.Also can implement alternate manner and replace slab guide or its some combination, comprise that the design electric field degree of depth is to obtain vertical constraints, use short degree of depth polarization, use the partial waveguide that enlarges by the electric field induction variations in refractive index, and use the complete permanent waveguide of closing by the field excitation polarized area.The two kinds of alternative in back have because of adjacent refractive index is discontinuous and cause light beam by the higher shortcoming of the loss of waveguide 832.

Horizontal constraints also is a problem of preferably changing in the switch area.If require high switching efficiency, preferably has bigger TIR reflection angle.Incoming wave 851 left-half at first reflect interface 838 and form the right half part reflection wave.Yet after the reflection, the right half part of reflection wave is not restricted in lateral dimension, arrives waveguide segment 837 up to it.During its not restricted passing through, will expand, and make the light beam power that is coupled to output waveguide 834 reduce sub-fraction because of diffraction.This effect has reduced the efficient of switch in its conducting state.Yet, the duct width that average not guiding is divided apart from the sine value that is limited at 848 4 times at angle approx.The incoming wave right half part is by still restricted behind the waveguide segment 837, up to its because of waveguide 832 right half side cause permanent variations in refractive index to reflect to leave interface 838 till.Then, match output waveguide 834 preferably.Two parts of input beam 851 stand the undesirable reflection that comes self-waveguide 832 sides after 838 reflections of TIT surface.Because this surface is identical with the angle on beam propagation axle and surface 838, but sub-fraction refractive index difference is only arranged, and only is part rather than total reflection from this surface, this reflection also increases the switch loss.

For making reverberator efficient preferred and to make waveguide loss minimum, electrode design be an importance of this switch.Two electrodes of preferred use trigger switchs.First electrode 840 is arranged on 838 tops, TIR interface, and second electrode 842 is arranged on first electrode next door, and is adjacent with this interface.The major parameter of preferredization is the interval of two electrodes and the distance between first electrode edge and the polarization border, and electrode edge and polarization border can be overlapping, also can be not overlapping.The required voltage of two interelectrode intervals influence these devices of excitation, and penetrate substrate and produce the width of the electric field pattern of refractive index change profile.The electrode needs that further separate are high voltage more, but produces the electric field that more extends to the substrate degree of depth than near the electrode that separates.

The electric field penetration depth is very important than the Islam Ghusl reflection to obtaining.Because ionization electrode electric field far away more is weak more, the induction variations in refractive index on polarization border also reduces with the degree of depth, and is the same with the TIR angle.Become in a certain certain depth variations in refractive index that is called as significant depth and to be not enough to keep of the total reflection of light beam central ray in the angle of switching construction.Because the value that is reflected under the minimum TIR value descends rapidly with variations in refractive index, the TIR catoptron is inoperative in fact in this degree of depth.For the high clean reflection that enters waveguide 837 and 834, can adjust this designs, so that in waveguide 832, produce significant depth below the main Electric Field Distribution.

By second main operating parameters of electrode design influence is the penetrating of reflection wave evanescent field outside TIR interface 838.Though do not have the power transmissive under conducting state outside the TIR interface, penetration by electromagnetic fields TIR surface is equivalent to the distance of a wavelength.Also have the dependence of space to applying electric field outside the TIR surface, electric field intensity reduces (actual is reverse) in the close district of other electrode 842.Therefore, variations in refractive index reduces outside the TIR interface.Should be noted that in electric field substantial variations takes place before evanescent field decay to an insignificant value, or power leaked the TIR interface.Preferable case is first electrode and the overlapping segment distance in polarization interface, changes and enough selected this segment distances of electric field stability are arranged outside interface 838 at largest refractive index.

First electrode is also crossed over poled waveguide section 836 and is extended, and may enter adjacent region.Lead the shape that 834 power preferably changes to determine two electrodes in this district 836 of excitation by making to flow through waveguide segment and enter permanent wave.Can use other electrode to improve the electric field intensity in the polarized area.For example, if second electrode forms U-shaped around extending, the electric field of first electrode below on average increases, but it forms the waveguide that some resembles projection, possibly can't provide desirable index distribution.

The TIR switch is a luminous energy router and also can be used as a modulator.If voltage source continuous variable, modulator then for simulation, have nonlinear relationship between voltage and reflectivity.Along with the increase of applying voltage, the degree of depth at total reflection interface increases, and produces adjustable incoming wave 854 that reflects into continuously from ripple 851.This modulator can be used for reflection or transmission wave mode, and whether transmission required zero or 100% when depending on voltage take-off.For special nonlinear application, the non-linear function as voltage of reflection and transmission coefficient comes in handy, and for example receiver is the logarithm sensitivity to signal level.

Figure 31 illustrates the TIR switch that has two TIR reverberators.If require to increase the angle between output waveguide 834 and the input waveguide 832, can add the 2nd TIR interface 839.Angle between input waveguide 832 and the output waveguide 834 is the twice among Figure 30, and can double again and again by adding additional TIR interface.To have an angle 849 to set up interface 839 with relative interface 838, this angle equals the twice of angle 848.(if increase the TIR interface, follow-up TIR interface should have under the situation of equal angular 838 at the TIR interface of front relatively to be increased).Because double T IR catoptron makes light away from input waveguide 832, consequently permanent waveguide 834 can directly lean against the end of polarized area 836, waveguide 932 is not caused obvious loss, therefore no longer needs the switching waveguide part 837 of Figure 30.In addition, provide vertical constraints in the polarized area 836.Constitute polarized area 836 and output waveguide 834 and alignment, so that the Electric Field Distribution of propagating is preferably mated the local lowest-order wave mode Electric Field Distribution of input waveguide 832 in TIR chain and waveguide segment.After the TIR reverberator, when matching permanent waveguide 834 with convenient switch conducting, deflected beam forms output beam 854.

Shape by the inboard border of input waveguide reflection definition input waveguide 832 outside polarized areas of passing through TIR catoptron one by one.This preferred guiding of determining from two TIR mirror reflects the time, to have realized waveguide wave mode inside edge on inboard border.

The TIR that Figure 32 illustrates band polarization TIR switch 831 switches the light beam guides, and this guides has an electronics to switch waveguide segment.In this structure, distinguish 836 reverse polarizations, be positioned at after the interface 838, and as previously mentioned by pair of electrodes 840 and 842 excitations, electrode is by voltage source 846 excitations that connected through conductor 844.Select excitation polarity to change once more with the negative index that produces from input beam 851 directions.During the switch conducting, light beam leaves TIR interface 838 and reflexes to permanent waveguide 834, but different with Figure 31, does not have the poled waveguide section to connect them between the two.Replacing electrode 842 extends on the mesozone between input waveguide and the output waveguide 834.Applying electric field by the district between the input border of the lateral boundaries of 832 sections of the input waveguides that comprises the TIR reflection boundary and output waveguide 834 can form and be coupled waveguide segment.As in the past, determine the distributed in three dimensions of electric field by electrode and Maxwell equation.The electric field that is produced by this electrode produces the positive refracting power variation by electro-optic effect, and required switching waveguide segment is provided.As mentioned above, also constitute this waveguide segment and alignment, so that the input wave mode preferably is coupled to output wave mode 854.As the replacement that this and any TIR switch is implemented, output waveguide can have the input waveguide place that can ignore the gap to begin.This substitute mode has higher insertion loss when switch cuts off (leading directly to) structure.

With reference to Figure 33, the two positions waveguide router that uses the polarization section is shown, not based on total internal reflection.But polarized area 866 forms the waveguide segment of electric excitation, crosses over input waveguide 862 with a low-angle.When applying electric field, the refractive index in the section 866 increases, and the refractive index in the adjacent region reduces in the input waveguide.Therefore input beam 880 is coupled to the poled waveguide section at least in part.When switch cut off, input beam continued to propagate by input waveguide, to form the output beam 882 that does not switch.If desired all or most of input light are switched to output waveguide 864 and leave this device as the output beam 884 through switching, this low-angle can become taper adiabaticly, forms low loss waveguide bends.

At least apply electric field with the excitation waveguide with two electrodes span polarized areas.First electrode 870 is arranged on poled waveguide section top, and the adjacent setting with first electrode of second electrode 872.Second electrode 872 is adjacent with first electrode and can be positioned at the both sides of poled waveguide section, to reach the high power distribution ratio.As previously mentioned, through conductor 844 exciting electrodes, use slab guide 835, or electric field descends with the degree of depth, or one of other method described here obtains to switch the vertical constraints of propagation mode by power supply 846.

With reference to Figure 34, several polarization TIR switch is placed side by side and is formed array 900.The polarized area 912 and 914 that forms the TIR interface is provided with one by one along waveguide 910.Each polarized area has identical crystal orientation, and crystal z axle is opposite with all the other crystal in district 912 and 914.The others of this structure and many variations are described with reference to Figure 30 in the above.

Encourage each switch respectively with the multi-output voltages Controlling Source 926 of linking electrode by lead 928.When all switchs cut off, input beam 902 propagated into input waveguide 910 downwards to form the insignificant output beam 904 that do not switch of loss.If the first switch conducting, the TIR interface is left in the input beam reflection, so that form the first reflection output beam 908 in waveguide 916.If first switch cuts off and the second switch conducting, the 2nd TIR interface is left in the input beam reflection, so that form the second reflection output beam 906 in waveguide 918, to follow-up switch by that analogy.This many switchs structure can be extended to n switch.

Electrode is configured in each TIR interface as mentioned above.One or more in the electrode 920,922 and 924 as the negative electrode of a switch and the anode of another switch.For example, voltage be applied to second electrode 922 and first and third electrode 920 and 924 between, form output beam 906 to encourage second switch.Preferably should extend to the TIR near interface of polarized in advance section 912 as the electrode 922 of anode and negative electrode, cover a waveguide segment of the TIR interface and the polairzed area 914 of a polarized area 914 simultaneously.A part of structure only is shown, two complete polarization sections 912 and 914 and complete electrodes 922 are wherein arranged.This structure can be duplicated complete electrode by alignment and be duplicated n switch with the polarization section.

For avoiding cross-talk in the passage, can not see that the mode of any electrical-optical variations in refractive index applies voltage up to entering on electrode till being energized switch with input beam.For example,, can between electrode 922 and 924, apply voltage for encouraging the TIR interface of second polarized area 914, make electrode 920 and 922 and in the past electrode keep same potential.

Though the total length of polarized area is longer than L, the distance that the given area occupies along waveguide equals defined L.Therefore the linear array that has the TIR switch of 100% storage density has new polarized area in beginning every the distance L place.Be referred to as 100% storage density and be since under this density adjacent region only in waveguide the medial angle of polarized area be in contact with one another.Because some light that guides in the structure that is formerly polarized escapes to the next polarization structure that contacts with this structure, it is disadvantageous that adjacent region is in contact with one another.

We point out in the above, and the bight that contacts with polarized area formerly is that two vertical planes by polarized area form, and its position is unimportant.Make the polarized area width in this bight, inboard one side attenuation by moving these faces, can make these districts no longer be in contact with one another arrangement, leak thereby reduce luminous energy.For example, by being reduced by half, 90 ° of length transverse to the face of waveguide can make medial angle move to the waveguide middle part.It is now parallel with the TIR interface to be used for the face parallel with waveguide, and becomes an important position surface.It is " intensive storage " polarized area that our weighing-appliance has the polarized area of this geometric configuration.(exist alternate manner to realize making the purpose of light leak minimum, for example between two unessential, add the 7th vertical plane, but this variation having another advantage as previously mentioned aspect the intensive storage).

Figure 35 illustrates a kind of structure, wherein is used for the intensive storage geometric configuration of polarized area and makes the polarization of adjacent polarized area that the linear density of switch is doubled by use.Laterally the interface of the polarized area of process waveguide is identical now, but only is used for shifting along waveguide axis.Polarized area therefore will be along waveguide lamination securely, make the switch doubled in density.In fact, owing to the polarised direction identical (in the preferred case substrate perfact polarization) of other district, only there is opposite district spatially to define fully with substrate.Figure 35 illustrates the district 952 and 954 of two opposite polarization.Can think that the TIR interface is first or input face and second or output face of polarized area, the not switches light of transmission enters or leaves the dead polarized area probably respectively in waveguide 950.

The TIR interface that is used for output beam 946 is formed between first (input) face in polarization substrate and reverse polarization district 952, by electrode 966 excitations.The TIR interface that is used for output beam 947 is formed between second (output) face and polarization substrate in reverse polarization district 952, by electrode 967 excitations.The TIR interface that is used for output beam 948 is formed between polarization substrate and reverse polarization district 954 first, by electrode 968 excitations.The TIR interface that is used for output beam 949 is formed between second of reverse polarization district 954 and the polarization substrate, by electrode 969 excitations.Electrode extends on corresponding TIR interface along the switching waveguide segment that is connected to permanent output waveguide 956,957,958 and 959.One or more preferred in the electrode 966,967,968,969 and 970 as the negative electrode of a switch and the anode of another switch.Therefore, each electrode extends in parallel along the whole length at last switch TIR interface.

Each switch is applied electric field and can switch respectively through conductor 928 by voltage source 926.When all switchs cut off, input beam 942 propagated into bus waveguide 950 formation one downwards and does not switch output beam 944.When the first switch conducting, the input beam reflection is left its corresponding TIR interface and is coupled to the first output waveguide section 956, to form the first reflection output beam 946.Corresponding follow-up switch, input beam reflection leave corresponding follow-up TIR interface and are coupled to waveguide segment 957,958 or 959 to form reflection output beam 947,948 or 949.The typical set of voltage is not exist the light from adjacent switch to disturb on the electrode: all disconnect at preceding switch.For example, all last electrodes are remained on same potential and can realize this purpose as switching electrode.This many switchs structure can be extended to n switch.

The upstream extremity of intensive storage polarized area need be extended to significantly outside input waveguide 950 edges, keep the angle of vertical surface with respect to waveguide.This extend to catch the total index number afterbody of input waveguide wave mode, and all the other inessential locating surfaces of the intensive storage polarized area that extended are released waveguides 950, thereby eliminates optical loss.(upstream and downstream is defined as the direction of propagating with respect to input beam 942).

If design the switching waveguide of polarized area as mentioned above with reference to Figure 30, the interval of output waveguide becomes identical with its width in high density storage, so that it is included into slab guide.Come in handy for some using planar output waveguide, can use the polarization of second in each switch TIR interface to separate output waveguide.Described with reference to Figure 31 and in a switch, used two TIR interfaces.Should point out that under the situation of Figure 35, the geometric configuration of polarized area is slightly different, to realize lamination.Extend " output waveguide " part of intensive storage polarized area and rotate an angle 3 θ with respect to input waveguide 942, keep the parallel of its face around end, a TIR interface.Should " output waveguide " part therefore become the 2nd TIR reflector segment.

The width of the 2nd TIR reflector segment is than input waveguide big approximately 50%.Wave mode in the 2nd TIR reflector segment is propagated the distance that side within it is not restricted to about 2W/sin θ, and wherein W has been defined as duct width.The power that any diffraction that occurs in this side will cause being coupled to output waveguide 956-959 reduces.Should keep this distance less than about Rayleigh scope.Under the situation of 4.5 ° of TIR angles work, total not limiting distance is about 100 μ m, is approximately equal to the Rayleigh scope of blue beam in the wide waveguide of 4 μ m.Making the preferred a solution of this switch array performance is the permanent decrement (not deterioration electrical-optical coefficient) that key position in the 2nd TIR reflector segment increases by a refractive index.This key position is by the inwall that extends intensive storage polarized area with by the district that is defined as polarized area 836 inwalls with reference to Figure 31 definition.Permanent refractive index decrement its during from two continuous T IR mirror reflects the optimum position in the wave mode restriction define a permanent wave conductive boundary.The refractive index decrement that is increased is reduced to zero gradually when it arrives input waveguide, by clipping enough refractive index decrement area away from waveguide the loss that is added to input waveguide is obviously reduced.The refractive index decrement is not disturbed the TIR function (in fact helpful) at previous TIR interface yet.

Therefore, the light beam that has switched makes the full-scale deflection angle of switch be doubled to 4 θ from two continuous TIR boundary reflections.By doubling output angle, make the space can equal the output waveguide use of input waveguide for width, equal the width in its closeest structure at interval.

Output waveguide is linked the polarized area among Figure 35 in the final corner of the 2nd TIR reverberator, be θ with respect to the angle at the 2nd TIR interface, and preferably aims at so that collect the light reflection of leaving the 2nd TIR interface.Two TIR reverberators that preferably will be used for given switch do not have the waveguide segment of intervention ground and connect.Can make the path minimum of the deflected beam that must in poled waveguide, transmit like this, cause because of wall is coarse and asymmetric and may have higher loss than permanent channel waveguide.

In another kind polarization border structure, the border between two adjacent polarized areas can be crooked TIR structure.The wave mode of this structure also is a whispering gallery formula wave mode, may be improved by inboard borderline some restriction of waveguide.Make the enough little so that whispering gallery wave mode of radius-of-curvature on polarization border and the more powerful waveguide wave mode that is coupled between two types of waveguides that matched well be arranged, in wave mode at angular distribution in enough big actual total internal reflection generation.

Figure 36 illustrates and is used for the more dual crossing waveguiding structure 980 of high storage density.This structure has two kinds of improvement: an asymmetric loss waveguide intersects 997 and 90 ° of catoptrons 976 and 977.Density increases along with the adding of second input waveguide 982 that is parallel to first input waveguide 984, and first and second waveguides make storage density double on the same surface of substrate 981 effectively.Switch element 983 and 985 is as one of the variation of above-mentioned polarization TIR switch diagrammatic illustration, but the available any integrated light shifter of describing herein replaces, and therefore, we are not described in detail this switch in this or Figure 36.(the also available embodied in other described herein of this switch, for example the grating switch of describing with reference to figure 7, the coupling device of describing with reference to Figure 10, the divider of describing with reference to Figure 25 and the guiding switch of describing with reference to Figure 33.)

First input beam 992 propagates into first waveguide downwards, and second input beam 994 upwards propagates into second waveguide.Two light beams can send from Different Light, or initiatively or by flow separator are sent through one by same light source.When relevant switch cut off, input beam 992 and 994 was propagated by it and is formed not deflection output beam 993 and 995 respectively.If relevant switch conducting, 994 deflections of first input beam enter output beam 996, and second input beam, 992 deflections simultaneously enter output beam 998.

In asymmetrical guide intersection 997, two waveguides intersect mutually, regulate index distribution, and increasing slightly with loss in the waveguide is that cost makes the loss minimum in another waveguide.Two crossing waveguides are toward each other to arrange (being illustrated as 90 ° herein) than mitre, so that the crossover loss minimum.With reference to the geometric configuration of Figure 36, second deflected beam 998 is crossed over first waveguide 984 (in this case, switched output beam and can be parallel to output waveguide 986 and 988 propagation).Waveguide 988 separates leaving gap 990 and 991 at the place, point of crossing with waveguide 984.Make the loss minimum in the waveguide 984 like this, produce asymmetric loss structure, in this structure, the loss height in the loss ratio zone of intersection in the waveguide 988 in the waveguide 984.For ease of the back narration, we claim asymmetric intersection to have than low-loss along waveguide is " fixed point ".Asymmetric intersection 997 is along waveguide 984 fixed points.If gap 990 and 991 wideer than several exponential damping length of wave mode in the waveguide 984, decussate texture can not provide added losses to waveguide 984 substantially.Can a plurality of asymmetric decussate textures be fixed a point successively along waveguide 984 then, to produce the low-loss waveguide of the many waveguides of intersection.Gap 990 and 991 will produce some reflections and scattering to the light beam of propagating 998 in disconnecting waveguide 988, require can make the gap width minimum under low-loss combination restriction in two waveguides.For making the optical loss that comes the light beam 998 propagated in the comfortable waveguide 988 in the decussate texture minimum, can modulating it is reduced gradually transverse to the index distribution of duct propagation axle or along waveguide axis.Its objective is in waveguide 984, to keep very low-loss, make loss minimum in the waveguide 988 simultaneously.If variations in refractive index is less and compare variation with the variations in refractive index of waveguide 984 itself slowly then can realize this purpose in the district adjacent with waveguide 984.(is for substrate in these all alleged variations in refractive index).

Loss in second waveguide has two parts: one is that the discontinuous reflection that causes of refractive index causes, and another causes because of the diffraction expansion.Determine reflection loss by variations in refractive index size and its conical distribution in the waveguide in waveguide end and side.For example, if identical in the variations in refractive index of two waveguide core, all be Δ n=0.003, will be at the clean reflection loss at four interfaces less than 5%, can reduce the correction that the accurate index distribution of reflection causes and can ignore.Because gap width is more much smaller than free space Rayleigh scope usually, diffraction loss even lower.For example, if the degree of depth of the narrowest wave mode size is 2 μ m, suppose that the material refractive index is 2.2, wavelength is 0.5 μ m, and the Rayleigh scope then is 55 μ m.Suppose that gap width is 3 μ m, the diffraction loss in each gap is less than 1%.If the waveguide degree of depth is 4 μ m, diffraction loss is littler in fact.Make the diffraction loss minimum by increasing the big I of waveguide with respect to gap size.

Usually, there is an index distribution " gap " 900 adjacent zones of intersection.Define this index distribution with respect to the substrate refractive index.Refractive index can be reduced to another value of the adjacent zone of intersection gradually from a value that equals waveguide 988 index distribution in the gap.The pith of the zone of intersection is the volume that the light wave type of waveguide 984 is propagated therein.For making the loss minimum in the waveguide 984, index distribution is much smaller near the refractive index ratio waveguide 984 in this pith the zone of intersection.

The crossing waveguide geometric configuration that has asymmetric optical loss can change combination by many how much.For example, can use three or more input waveguides for switching output waveguide transverse to a plurality of point of crossing of input waveguide.Selection to preferred waveguide also can be carried out in many ways, preferably it is selected on the meaning of point of crossing loss minimum.We have discussed a preferred waveguide is parallel example.Yet, in more complicated system, have preferred waveguide intersected with each other, and intersect the preferred waveguide that not preferred waveguide obtains.Its application is depended in the selection that how to realize the intersection of preferred waveguide.Waveguide decussate texture in a device can be that asymmetric loss intersection and gap width are any combination that zero symmetrical loss intersects.

Switch (for example TIR switch) for the small angle deflection light beam can provide the rotary device of the additional beam such as 976 and 977, so that obtain the big angle of cut at the waveguide infall.Light beam rotary device 976 and 977 preferably vertical minitype reflector are installed in the fixed position.By substrate material is moved in its volume, stay next flat vertical surface (roughness preferably lower) and the angle orientation in reflected light preferably downwards led output waveguide 986 or 988 adjacent to form each minitype reflector with waveguide.Can adopt the conventional process technology to make minitype reflector, comprise that the two can define the geometric configuration of catoptron under the help of mask with the laser ablation of for example high power excimer laser or ion beam milling.Can fill in the volume with low-refraction, low-loss material, for example aluminium oxide or silicon dioxide are polluted and are kept the total internal reflection properties of catoptron to prevent mirror surface.

Preferably with minitype reflector with respect to the angular setting of the input of one of waveguide to total internal reflection is provided.The minitype reflector volume is preferably much bigger than optical wavelength at the thickness of its reflecting surface vertical direction, so that reflecting light fadout afterbody is by the leakage minimum of minitype reflector.Adjustment is with respect to the angle of other waveguide, so that the middle direction of propagation of folded light beam is parallel to other waveguide axis.Adjust the position of minitype reflector so that the optocoupler from a waveguide to another waveguide connects preferred.The preferred catoptron of adjusting is in the position of land, so that " center of gravity " of two light beams that illuminates mirror surface is at same position.Catoptron so that whole wave mode is all reflected, comprises that the index in the light beam tail reduces intensity transverse to the length of incident and the folded light beam twice greater than duct width.Be diffracted into minitype reflector from the light of one of waveguide wave mode input by the waveguide land, before being coupled to the output waveguide wave mode, return by reflection of waveguide land and diffraction with reflection angle.Near catoptron between two waveguides land preferably remains on in the Rayleigh scope of confine optical beam is not compared among a small circle, and duct width can be realized in 2 to 5 micrometer ranges.

The structure of Figure 36 makes, and the big interdigital array of switches light distribution waveguide becomes possibility.Total 980 is duplicated repeatedly along a pair of input waveguide, produces one group of staggered output waveguide (source is meant from one specific " source " luminous power that input waveguide obtains) herein, with the little figure that replaces source (figure rentage).Each input waveguide can be connected to a large amount of output waveguides, as long as switching device has very little insertion loss, as top situation about listing with element described here.Because asymmetric decussate texture increases the loss of the low input waveguide of the not obvious increase of more input waveguide or influences it divides luminous intensity distribution to many output waveguides on long distance ability in other waveguide (comprising that additional switch, minitype reflector, asymmetrical guide intersect and staggered output waveguide) top.It will moderately increase the required light source power of each additional input waveguide, so that transmit equal-wattage to the end of its corresponding output waveguide.Can parallel use and institute's as many input waveguide that requires with the big as far as possible total luminous power of distribution.Its output waveguide can use the method for Figure 36 staggered with many different graphics.Use grating reflector to replace the TIR switch can obtain identical result.If grating reflector with bigger angle orientation, then no longer needs minitype reflector with respect to input waveguide.

The structure that the preceding paragraph is described is a kind of one-to-many structure, and wherein output of each switch follows each to import a plurality of switchs.Many inputs can't be linked same output.Need a kind of many-one structure.Obtain the multi-to-multi structure by combination one-to-many and many-one structure.

The waveguide array 1060 that Figure 37 illustrates the TIR switch is arranged in the many-one structure.Shown in the structure, two input waveguides 1072 and 1074 switch to a output beam 1070 in the output waveguide 1076 with two input beams 1062 and 1064.Input TIR switch 1090 and 1092, and output switch 1094 and 1096 is described with reference to figure 30-32 and 36 in front, therefore only it is briefly showed, for clarity sake omit many elements (for example electrode, contact, power source, controller, vertical constraints device, the polarized area degree of depth, output waveguide Limit Type).As described in reference Figure 36, input TIR switch is aligned to the forward-propagating light beam, and output TIR switch is aligned to the backpropagation light beam.Switch 1090 and 1092 switches basically simultaneously, as switch 1094 and 1096, owing to need the two to finish power is injected output switch 1076.As with reference to shown in Figure 36, when switch 1090 or 1094 conductings, light beam 1062 and 1064 sub-fraction switch to waveguide 1078 or 1084 respectively.Remaining input beam propagates into an outgoing route along the extension of input waveguide becomes light beam 1066 or 1068, its can be used to other element or with its beam dump to absorb or to scatter to outside the system.Minitype reflector is set so that in the future self-waveguide 1078 and 1084 light beam reflex to waveguide 1080 or 1086 respectively.Under its conducting state, TIR switch 1092 or 1096 receives the light beam of propagating respectively in waveguide 1080 or 1086, form output beam 1070.If desired light beam 1062 is switched to output beam 1070, obviously, switch 1096 and all follow-up switchs must disconnect.(otherwise, needed most of beam reflection is gone out waveguide 1076).Other switches the also suitable similar restriction of light beam in many switchs array all.

As said treatment substrate 1098, to produce illustrated structure.When switch 1090 or 1094 cut off, input beam was propagated by switch district 1090 or 1094, and its loss can be ignored, then (if desired transverse to waveguide 1076, in asymmetric intersection), and occur with output beam 1066 or 1068 respectively, can be used as the input of additional switch.

Also can provide the additional input waveguide, be coupled to waveguide 1076 (or as need and not to be coupled), repeat this structure with alter mode in output beam 1070 directions.Also can provide additional output waveguide, be coupled to input waveguide 1072 and/or 1074 if desired, repeat this structure with alter mode at light beam 1066 and 1068 directions.

Figure 38 illustrates grating reflector array 1210 with the multi-to-multi structure.Shown in the structure, two input waveguides 1222 and 1224 switch to two output beams 1220 and 1221 in two output waveguides 1226 and 1228 that come close to or in contact with this input waveguide with two input beams 1212 and 1214.The grating TIR switch 1230,1232,1234 and 1236 that comprises grating 1238,1240,1244 and 1246 is described with reference to figure 7,8,12 and 13 in front, therefore only it is briefly showed, for clarity sake omit many elements (for example electrode, contact, power source, controller, vertical constraints device, the polarized area degree of depth, polarized area taper or electrode gap).When switch 1230 or 1232 conductings, the sub-fraction of light beam 1212 switches to output beam 1220 or 1221 respectively.Remaining input beam propagates into an outgoing route along the extension of input waveguide becomes light beam 1250, its can be used to some other element or with its beam dump to absorb or to scatter to outside the system.When switch 1234 or 1236 conductings, the sub-fraction of light beam 1214 switches to output beam 1220 or 1221 respectively.Remaining input beam propagates into an outgoing route along the extension of input waveguide becomes light beam 1252, its can be used to some other element or with its beam dump to absorb or to scatter to outside the system.

As said treatment substrate 1248, to produce illustrated structure.When switch cut off, input beam was propagated by switch region (if desired, wherein waveguide can constitute asymmetric intersection), and occurred as output beam 1250 or 1252 respectively, can be used as the input of additional switch.Waveguide can maybe can be the asymmetric intersection that does not influence grating 1238,1240,1244 and 1246 positions in fact mutually with simple wide-angle combination.Should point out that actual grating can be the part of covering substrate and the single large-scale grating that is only encouraged in different switchs district by the requirement electrode.For example, if grating is made of the polarization farmland, it is used to allow whole substrate to be polarized to grating like this, can make production simpler.On the other hand, grating can be arranged in striated or other cohort.

Also can provide the additional input waveguide, be coupled to waveguide 1226 or 1228 (or as need and not to be coupled), repeat this structure with alter mode in the direction of output beam 1220 and 1221.Also can provide additional output waveguide, be coupled to input waveguide 1222 and/or 1224 if desired, repeat this structure with alter mode at light beam 1250 and 1252 directions.

Figure 39 A schematically illustrates the application example of another kind of switch array in n * n communication Route Selection is used.In this was used, the luminous power in the input optical channel was routed to the output optical channel with minimal losses and minimum cross-talk.Controller is set up the addressable path between two passages.Form a simple square array by the structure that repeats Figure 38, up to n input be arranged in left side and n export be arranged in bottom, switch is positioned at all n of waveguide ²Individual joining place.The angle of cut can be any proper angle.In this structure, realize a passage is switched to another passage by one of excitation switch.Light beam intersects with less cross-talk amount mutually at the waveguide infall, can preferably reduce the cross-talk amount by making the waveguide geometry shape.This structure can connect between any input and any output independently one to one.Be also pointed out that this connection can be two-way, so that in fact can pass through passage same use of both direction simultaneously.Shown in switch as the application-specific of grating, but also available as form n * n input and output by the structure of duplicating Figure 37 with reference to the described double T IR switch of Figure 37, or with known or any other light handoff technique of having found with its enforcement.Should point out that under the situation of TIR switch, the light data routing is by intersecting the summit between the input and output waveguide, but by near another waveguide the intersection.According to the geometry in particular of switch, the input and output waveguide can be shown in Figure 37,38 and 39 wide-angle, or an oblique angle intersects.Under the situation that waveguide tilts to intersect, do not need the fixed reflector 1088 and 1082 in the double T IR switching geometric configuration.

Have in the simple square geometric configuration of n parallel input waveguide at this, have an input waveguide to be connected to nearest output waveguide, form preferable case with lowest loss by single switch.Another extreme aspect, have a waveguide to intersect transverse to the individual waveguide of 2 (n-1) that switch to output waveguide farthest.The connection of this worst case will have much higher loss than the connection of preferable case.For reducing the maximum insertion loss of switch array structure, can adopt described asymmetric cross connection with reference to Figure 36.Intersect at it transverse to the loss that preferably helps worst case to connect along the asymmetric intersection that inputs or outputs one optical propagation direction fixed point in the waveguide in each waveguide.Clearly, because using of asymmetric switch will help some toggle path as cost with other switch in middle combination, this structure can not generalize in inner waveguide.Need a kind of algorithm of selecting asymmetric intersection preferred orientations.A kind of good mode that disposes asymmetric intersection is in each direction only about half of intersection of fixing a point.The individual intersection point of observing on the diagonal line upper left side of n (n-1) (not comprising diagonal line) is mainly used in distribute energy to the right.Therefore this intersection point should be along input waveguide direction fixed point and bottom-right intersection point should be fixed a point in the direction of output waveguide.In bi-directional configuration, the intersection point on the diagonal line should be simple symmetrical intersection point, and the simple diagonal line that is referred to herein as asymmetric intersection point is arranged.Can use other to arrange according to the different application figure, but this arrangement to general objects is better.

(wherein n＞m) arranges " input " line and m are individual " output " the full connecting line between the line that only allows n for n * m.At this, because all circuits are two-way, " input " with " output " only is used for identifying purpose.Additional n-m " system " circuit can be used for monitoring with broadcast capability in system's control.For example, if circuit A wishes to be connected to circuit B, it will be at this function transmitting system request, up to replying.For example, circuit m+3 can be used for all " input " circuits of scanning system request.(monitor " output " circuit for similar circuit is provided, need the large-scale matrix circuit, the n shown in Figure 39 A * n matrix for example, wherein the m bar circuit in m * m circuit subgroup offers the user., a circuit, for example circuit n-2 can be used for monitoring " output " circuit).In monitoring, system will connect corresponding to " input " or " output " the continuous grating of circuit, and whether detection line moves.If any operation in the circuit of being monitored can make some power switch to monitoring detector by connecting with the grating of monitoring detector on same line successively.Article one, the circuit of operation has the excitation reverberator that is connected to another selected circuit.Yet, will leak some power during by the excitation reverberator, formation can detect light beam by monitoring detector.When the monitoring detector of linking circuit m+3 in this example switches to switch 1255 (for the purpose of concrete it being drawn as a grating switch) conducting and receives request from circuit A, whether control system is busy with detection line B.When this connection was arrived circuit n-2 by switch 1253, the remaining light beam that connects the switch leakage by circuit B was in operation warning system circuit B.If do not detect operation, system request will send to circuit A and B the two (may pass through same monitoring cable if it has multichannel transmission/receiving ability, maybe may pass through the system line that separates), and switch 1254 can be closed to connect.

Even will disturb some communicating to connect of having set up and may move of other interchannel owing to partly connect with switch from the corresponding required row of all outputs of given input, being used for one to one, the interior circuit of connection basis m * m switch unit is not suitable for broadcast capability.Be suitable for most broadcasting from system line as the illustrated m of Figure 39 A * m switch unit " outside ".(output that " the inboard corner " of geometric configuration is " input " circuit 1 on the side and " " have the preferable case that the waveguide of lowest loss connects between the circuit 1 on the side).Broadcasting as example, shown in circuit C be connected among Figure 39 A great majority or own " output " circuits by grating 1256 operation ground.Only part conducting of switch 1256 on the circuit C is so that there is enough power to be sent to each " output " circuit.Can use similar agreement to connect between the situation lower channel in simple communication when preventing to broadcast conflicts.Only set up broadcasting with inoperative channel and connect, system can lump together channel group and/or wait for individual channel so that allow they broadcasting.

Be to improve switching efficiency, waveguide can be bigger multimode waveguide, and the adiabatic extender of describing with other places under the situation of single wave mode communication network connects single wave mode input and output port 1 to m.

The top total of describing with reference to figure 39A can be used as asynchronous transmission wave mode switch, or any point-to-point communication is used.An effective variation of this structure is the multi-wavelength operation that is used for the WDM network.Can use polarization grating switch, or use tuning tunable fixed grating such as the said wavelength selective light switch of implementing that enters and leave the specific communications frequency band.In the WDM network, needed is to switch specific wavelength at interchannel, and does not influence other wavelength that may transmit (two-way) in same channel.For selecting reflection frequency to transmit the tunable switch of other class frequency simultaneously substantially in WDM spectrum, the simple geometric shape of Figure 39 A is suitable.Yet, if use the switching grating of single operation frequency, the access path that each wavelength need separate.

Figure 39 B illustrates the switching WDM communication network 1260 that has separate path, is used for each frequency that network uses.This example is used for bifrequency WDM network, but extends to any amount of communication frequency.Figure 39 B illustrates " input " waveguide 1276 that is connected to three port one a, 2a and 3a, and " output " the waveguide 1276 that is connected to three port one b, 2b and 3b is shown.Waveguide forms 9 intersection points.At each intersection point, have three and be connected to each " input " and each " output " additional optical path.Additional path is identical in this example, and comprises three types.First kind optical path 1266 comprises a pair of fixed frequency toggle reflections device, and two reverberators can reflect first in two signal bands of wdm system.Output that reverberator is preferably transverse to relevant with this intersection point " input " and " " grating of waveguide, and reflect corresponding waveguide and be connected to the power in first frequency band between the additional waveguide segment of two gratings.The second class optical path 1268 comprises a pair of fixed frequency toggle reflections device, and two reverberators can reflect second in two signal bands of wdm system.In addition, the grating that reverberator is preferably placed transverse to respective waveguide, and reflect corresponding waveguide and be connected to the power in second frequency band between the additional waveguide segment of two second gratings.The 3rd class optical path 1270 comprises a pair of frequency independence toggle reflections device, and two reverberators can reflect two signal bands of wdm system.The TIR reverberator that the 3rd class optical path can be connected with stationary mirror by waveguide is to implementing (described with reference to Figure 37).

In this case, port one a, 2a, 1b and 2b add relevant waveguide 1276,1277 and form one 2 * 2 handover networks, and this network can " input " port and any " output " be switched the double frequency passage simultaneously between the port any.The control port 3a of system and the 3b that have relevant waveguide 1276,1277 provide monitoring and system communication function.For example, between port 2a and 1b, switch the first frequency of wdm system if desired, relevantly with first kind optical path 1266 be connected to the two switch conductings of port 2a and 1b at the waveguide intersection point, the waveguide by connecting two switchs between port 2a and 1b in first frequency Route Selection luminous power.If all frequencies relevant with given port are routed to the another port, 1270 of switch and the 3rd class optical paths are in the intersection point conducting corresponding with two-port.Owing to switch two WDM frequencies between any two interchannels, can trigger two corresponding optical paths 1266 and 1268, therefore in 2 * 2 networks optical path 1270 actual be unnecessary.Yet in having the more high level communication network of many WDM frequencies, because it will have minimal losses, it is desired that the full range of a list connects.

A kind of two-dimentional one-to-many routing structure has been shown among Figure 40.The first row waveguide Route Selection switch comes one luminous power to be connected to each row of pixel waveguide from input waveguide.Thin portion structure at this not shown this switch only illustrates with raster mode at this, but can implement by several different modes." pixel " switch two-dimensional array will leave the merit of pixel in " pixel location " orientation.(power is decided on using difference in the pixel location what happens).Double-deck switch is used to arrive all pixels.This structure can be used for display, startup or control procedure or device, or read the particular form data.In a kind of occasion in back, the operation that the flow of power direction is installed mutually on the contrary is just like a many-one directive texture.

Input beam 1342 transmits in input waveguide 1352 and is coupled in many pixel waveguides 1354 one of them by switching device two-dimensional array 1356.Switching device 1364 can be as the grating switch, as mentioned in conjunction with Fig. 7,8,12,13 and 38 is described, or can be as the TIR switch, as mentioned in conjunction with Figure 30-32 and 37 described, or can be as other switchable elements.Described light beam 1344 switches to a pixel waveguide by switching device 1358, and it is switched element 1360 switching for the second time at this, forms the light beam 1346 that passes to pixel element 1362.Pixel element 1362 can by shown in waveguide segment and separate with waveguide 1354, maybe can lean against a bit of distance in the waveguide, the switches light sub-fraction is passed through by pixel element.

Under the situation of display application, described pixel element can be the radiation that is used to produce from the light 1342 of substrate 1348.This pixel element can be to be in substrate 1348 lip-deep rough spots (patchs), or the miniature minute surface in oblique angle, or is used for the coarse oblique angle micro mirror of light scattering, or the fluorescence concave point, or produces other devices of visible light.Under the situation of display, input beam 1342 can comprise several colors, in this case, described waveguide can waveguide to all colors, described switch can be coupled all colors.Sequentially to the scanning of waveguide switch, to produce the image of display.The grating switch can be realized do not need what modification but the TIR switch is used for this purpose by the multicycle grating.If be single mode waveguide, then they effectively waveguide to the light beam of minimal wave length.Preferably this input beam 1342 is carried out external modulation (comprising the color component that they are all), so that conversion element is simple on-off device.Note,, and can follow electrical connection, then can cross over each file waveguide one single electrode is set, to encourage delegation's pixel switch if pixel element is provided with in the mode of about straight line.

Under the situation of the projection display, need a supplementary lens, collecting light, and they are heavily converged on the screen of certain (big) distance of these lens by all pixels emissions in the array.These lens preferably should have a good axle external characteristics, so that focusing surface is reasonably flattened and it should have an enough big numerical aperture (NA) on screen, to collect the major part by the light of this cell array radiation.The scattering that a lens matrix is coupled on the pixel structure with the light beam that reduces to be produced by each lens will be favourable, thereby reduce (expensive) the NA demand on projection lens.The another kind of mode that realizes this situation is to make waveguide be decremented to the maximum possible size of pixel again.It is relatively easy that pixel is decremented to big lateral dimension, is difficult but obtain a kind of dark waveguide.Can form big pixel by a wide waveguide and a long grating coupling device are coupled.

The light that distributes in routing structure also can be used to the process of motivation, for example at DNA reader or allergy reader, or under the situation of protein reader.In above-mentioned each particular case, utilization can be prepared the separation arrays of DNA or allergy or protein by the fluorescence labeling of photoactivation.Can be activation during each pixel by a kind of preparation of a kind of molecule of row or molecule.During different pixels light is carried out electric scanning, the speed of this scanning and order can be determined according to the result.Can collect fluorescence, so that detect by an outer lens and detecting device.Yet, use for some, collect and the radiation emitted ripple is directed to a luminous energy pick-up unit and the radiation of source light is controlled, be favourable for resembling speed (with its lens) and waveguiding structure itself.Depend on required illumination and collect form, these lens can be collimation lenses, reunion focus lens, or even the lens that can produce divergent beams that can expect.The focal length of scioptics separates the end of collimation lens with waveguide, so that the light beam of this emission (with collecting) is parallel substantially.To come and go the lot of materials that moves by addressing inquires to light beam if exist, collimation lens is very useful.By object distance the end of reunion focus lens from this waveguide separated, the inverse of this object distance is relevant with the difference of the inverse of the inverse of image distance and focal length, and wherein image distance is the distance from lens to required imaging light beam spot.If desired sampling is focused on the little luminous point and irradiation and or read it from waveguide, then to use the reunion focus lens.Utilize one to generate scattered beam by the lens that separate less than the distance of its focal length and waveguide.If near the ripple of lens to be scattered on two planes be different, then from this lens output beam need not to be around.Produce light beam around straightforward procedure (in the defocused smallest spot of meeting again) be to realize beginning around light beam at an end of this waveguide, this can be by designing realization to waveguide, or realize by dwindling waveguide gradually.These lens preferably have the empty footpath of suitable numerical value, with the whole ripple that allows self-waveguide with according to using it are focused on a diffraction limited point or collimated light beam.

Pixel element 1362 can be any element in the above-mentioned situation, and it can directly combine with the material that will be activated, or by cooperating combination indirectly with a outer plate that this material has combined.Each resembles fast element can comprise an aforesaid collimation lens, so that a switch array can be coupled by imaging light beam spot and the lens arra in a public substantially focusing surface.(in this case, public substantially mean in the Rayleigh at true focusing surface (Rayleigh) zone about, distortion may take place in widely owing to aberration).If described routing structure also is used to detect fluorescent radiation, then preferably in pixel element 1362 use a kind of reflecting body to replace scatterer, this reflecting body radiation be coupled back its from waveguide.Be energized this coupling and just being kept as long as be used for the switch of a certain given pixel.If desired, can before switching to another pixel element, light source be cut off, so that solve the decay of radiation.

When being used as the data reader use, the direction that light is propagated from direction shown in Figure 40 conversely.The light that comprises data from an equipment is collected at each pixel element, and is coupled to the route waveguiding structure, this route waveguiding structure, with its waveguide to being fed back into waveguide 1352.What be connected to waveguide 1352 is a detecting device that is used for reading of data.This detecting device is through being connected to this waveguide simultaneously at a waveguide 1352 and a spectroscope that is used between the light source that data medium throws light on.Pixel element 1366 (or being " pixel ") preferably is coupled through lens and each data spot, passes through the light of structure 1350 to collect selected route, and is sent to data medium.The lens that are coupled also are used to collect from the light of this data medium reflection or emission with its heavy end that focuses on the waveguide that is coupled with this pixel element.Data can be in target volume, and in such cases, lens can be configured to and parallel beam, and data can be on target surface, in such cases, different pixel elements can be corresponding the different tracks on the rotation magneto-optic disk data storage face (for example CD).The structure lens make its mode with a kind of diffraction limited heavily focus on the light from pixel on the data spot.By different pixels and different track combination, can realize electronically switching by track ground, there is not time delay substantially.

Different pixels also can be coupled on the not coplanar of data medium.This is useful for the data that read in a plurality of that are recorded on these medium, to increase whole memory capacity.Switching between each face also can be by realizing in the switching that is coupled between the pixel of coplanar not electronically.

In addition, several different pixel elements can be focused on by the track of (preferably being orthogonal to) given trace and be cut apart on each position that the part of xsect separates.When course deviation,, follow the tracks of to replace mechanically by between pixel, switching and realizing electronically just following the tracks of.Need a sensor and electronic equipment that course deviation is detected, need a controller to be used to switch to required pixel.Can detect signal intensity in the different channels or signal to noise ratio (snr), to determine preferred (right is the most accurate) channel.If the converter along waveguide 1352 is made into 4 pass joints rather than 3 pass joints, the 4th leg exposes at the edge of substrate, and then detector array 1368 can be provided with by the mode of aiming at the 4th leg.Each detecting device 1367 is aimed at each row individually, is used to detect the power that returns from each row.If use detecting device 1367, in order to make the maximizes power of returning, be about 50% for the preferred reflectance of the grating that is provided with along waveguide 1352 from data medium on the detector array 1368.If in the upstream of router topology, waveguide 1352 an independent spectroscope is set, it preferably reflects also is 50%.

Note, activate by the switch along input waveguide or pixel waveguide partly being activated the part that can realize different pixels.Can adjust switching device 1364 by the mode that applies electric field, to change their reflection coefficient.The switch that the required part of using simultaneously in another pixel of some Tong Guo confessions in the light beam activates sends.Many pixels activate has special meaning in course deviation correction situation, because a plurality of detecting device also can be built in the router one 350.For example, if three different pixels on three different lines of routing structure 1350 will be activated simultaneously, then their corresponding pixel row switch will need partly to be activated.Described controller need calculate, to determine the activation of suitable a plurality of switchs.Ignore the loss of switch, for preferred SNR, in order on its each self-detector, to produce the intensity that equates, first switch corresponding with first pixel column should be activated, to reflect about 3/16 incident light, second switch corresponding with second pixel column should be activated, to reflect about 1/4 the residue light by first switch, should be activated with the last switch corresponding, to reflect about 1/2 the residue light by preceding two switchs with the 3rd pixel column.Suppose 100% and 100% the light collection efficiency of being reflected into from medium, then about 15% incident light is reflected to each detecting device.With the light beam that receives on the single detecting device in the situation of single pixel be preferred 25% relatively, this result is pretty good (preferred switch activates=50% reflectivity).Really, adopt three optical beam ratios only to want many with the light of a beam dump.Electronics is followed the tracks of will produce more low-cost, faster and more reliable data reading/writing device.

Can adopt the performance of the combination in any raising data storage device of these methods (electronics is followed the tracks of and switched, and switch on the electronic data plane and electronics is followed the tracks of).Also need a kind of method to realize that electronic variable focuses on, and is used for removing potentially from drive unit the motion (except the rotation of medium) of all machineries.As described, utilize a zone plate lens can realize that by the wavelength that changes light beam 1342 electronic variable focuses on below with reference to Figure 54.

As shown in the figure, the routing structure of Figure 40 is a polarization structure, and 90 degree grating switchs only reflect the TM pattern.As a result, only can use light-splitting method according to intensity.It will be very favorable can using polarizing beam splitter, because this will produce the factor of 4 times of increases in the signal intensity of a given light intensity.Yet, need switching construction to shift and separate this two kinds of polarizations then.Though can realize the polarization relation of each TIR switch with an insignificant abundant tangent line TIR angle, exist the storage density loss using very low angle to switch in the geometry.

Figure 41 shows a linear array that is set up as the strong polarization relevant with switch of data reader 1370.Described switch by by the TM polarization and in excitation switch 1372 by high beam reflected 1342 activate use waveguides 1376 and 1378 (such as the titanium scattering waveguide in the lithium niobate) be two kinds of polarizations carry out waveguide to.Pixel element is by realizing with the miniature minute surface 1347 of integral lens 1380 combinations.Data spot (for example 1382) is set in the track on the dish 1386 of axle 1388 rotations.The orthogonal polarized light that birefringence data spot (or separative sign) on this data track reflects is collected by lens 1380, and reunion Jiao gets back to waveguide 1378, and is reflected back on the ripple spigot surface with TE polarization by miniature minute surface.Because TE mould both is polarized and the transmission that is used to reflect with different non-phase matching with the Brewster angle of grating, so it transmits the detecting device 1367 of reflected back detector array 1368 not by switch.(replacedly, if this switch is a TIR switch, then TE wave reflection rate is slight in the TM ripple, and most of TE ripple sends by this switch, shines on this detecting device.) if another switch 1373 is energized rather than switch 1372, light beam will propagate into different pixel 1375, and according to the calibration of this pixel 1375 and its lenticule 1381 by or focus on another data track, perhaps another datum plane, perhaps same track but have the lateral deviation of several track widths of several branches (whether being used for track according to this pixel 1375 switches, datum plane switches, or tracking Control).

Structural many variations of describing at reference Figure 40 and 41 are conspicuous, such as can be to any switch orientation in this router, with change light on this plane the direction of propagation in this; In a specific installation, polytype switch can be used, and higher switch level can be added.Other variations are too numerous to enumerate.

Figure 42 shows a changeable integrated spectralyzer 930.Input beam stops after entering input waveguide 932 certain distances.Input beam 912 can be relayed in another waveguide, or it can be a free space beam that is aligned with mould coupling, so that it is preferred to arrive the power of waveguide 932.Equipment 930 is provided with one and is used for and will relays restriction planar waveguide 835 planar.Scattering in the plane of light beam 927 in planar waveguide that the end face of input waveguide penetrates, up to it by till the integral lens element 925.This integral lens has a refractive index that has improved with respect to this slab guide, and wherein this slab guide is in one and defines from optical axis and reduce in the border of optical thickness on square ground approximately.If (if it has an index that is lowered, then optical thickness increases on square ground approximately.) these lens can pass through mask diffraction or ion-exchange manufacturing, perhaps it also can be opposite polarized section (a reverse poled segment) by electrode excitation.

Lens 925 make beam alignment, and this light beam forwards at least one in three grating parts 929,931 and 933 then to.Described grating is formed by each unit (cell), and each unit is a farmland, from background material these farmland differences is come, and according to using difference the different interval amount is arranged.Described unit has and is different from the constant of substrate and maybe can adjusts refractive index, and different unit can have different farmland types.Constant farmland type for example comprises scattering region, ion-exchange zone, etching area, particle radiation zone and the common zone of improving one's methods and forming by any refractive index type.Described grating part can be by etching, ion-exchange, or inwardly diffuse to form, in this case, these gratings are nonvolatil, but are formed by the utmost point (poled) territory at the grating shown in this preferred embodiment.Electrode 932,934 and 936 is used to encourage respectively described grating together with public electrode 938.For for simplicity, public electrode can be set at the opposite side of substrate as shown, perhaps is provided with around electrode 932,934 and 936, to be used for low voltage excitation.

Row can form be pressed in unit in indivedual gratings, to form required periodicity in required direction, so that the virtual photon with required momentum to be provided.They can be by rows, limiting some specific plane, these planes have with by the vertical virtual photon momentum in the plane of the momentum that between-line spacing limited.At this moment, along have by in the row between each unit the plane every the momentum that is limited also will have the virtual photon that has momentum.In order to make the retroreflection phase matching, the virtual photon momentum just in time is the twice of incident photon momentum, and in the opposite direction by waveguide to.Any other reflection process has less momentum, and is directed to transverse to the incident axle.Thereby the periods lambda of between-line spacing is partly relevant with incident wavelength λ, and wherein Λ is amount λ/2n _EffMark.In the ordinary course of things, the unit can be separated by a range distribution, and this range distribution is along with the change in location by grating, determined by the spatial frequency spectrum (determining by fourier transform) along the unit of this distribution so that make along the virtual photon momentum of any incident axle.

By the potential state of adjustment respective electrode, grating 929,931, or have at least one to be switched in 933.In Figure 42, grating 929 is energized.The grating that is energized provides virtual photon to the incident photon, and the phase matching scattering process is to an outbound course, has a plurality of output beams 935 and 937 of different wave length with formation, and output beam is separated on angle according to its wavelength.From the output beam scioptics 939 that are energized grating 929, lens 939 heavily focus on this output beam on the detector array 941.This detecting device is one group of sensor, is set up the part that receives output beam and detects being used for, and preferably be bonded to as shown in figure on the edge of device 930.Yet if need device 930 is integrated on the bigger substrate, this substrate also can not need an edge in this position.At this moment, can use other methods (such as the vertical refraction mirror) that extract light beam to be refracted in the detector array with a part with light beam 935,937.Sensing device approximately is arranged in the Rayleigh zone of focussing plane of output lens 939, and in this position, the input beam angle can be mapped to the output beam position.Because grating is mapped to the output beam angle with input wavelength, the collimation input beam causes different wave length will be mapped to diverse location on focussing plane, and the spatial resolution of wavelength depends on the characteristic of grating.It is relevant with the power spectrum of input beam 921 to detect gained power (being the function of detector location in the array 941).Therefore, device 930 is spectralyzers.If when input beam was divided into the channel that occupies several different channels, it also can be a multi-channel detector, and this device is configured channel dispersion to predetermined detection device or one group of detecting device.

By different gratings are connected, this device is in the effect of different frequency scope.For example, if grating 931 or 933 is energized, then dispersed light is focused on the different piece of different detector arrays 943 or extension detector array 941 by lens 939.The frequency range of grating is determined to the angle of light beam and the periodicity of grating by grating.Shown grating 931 has a more shallow angle to light beam, so that selected high light frequency scope when it is energized.Grating 933 has horizontal each other polycyclic, so that can select a plurality of overlapping frequency ranges.A plurality of frequencies can be mapped to the border, polar region, and are described with reference to Figure 18 as mentioned.The polarization element of grating 933 generally can be by on the plane that comes perpendicular to two main virtual photon momentum directions.The phasing on plane is to be decided by the process that required grating component frequency is made a copy of the border, farmland.Yet general grating can have momentum component in all directions, and in such cases, the border, farmland of causing can not be organized in the plane, except that may be on a main direction.

One transmitted light 913 is integrated lens 907 and focuses on an output waveguide section 909 again, and forming output beam 911, it comprises not at least a portion with the outer part of band of the interactive input beam 921 of grating.

Switched useful variation of scope frequency spectrum analyser and the elements combination of Figure 42 and 30-35, its key concept comes from such fact, and promptly the spectral range of grating can be by changing its angle or being equivalent to this source point and by displacement.In this changed, it used a waveguide routing structure to be switched to allow this source point.The waveguide switch is set at one or more positions on the input waveguide 923 (and may in transmit waveguide) to produce a collimated source waveguide array, and input beam 921 can switch therein.All waveguides all stop at grade, preferably on the focusing surface of input lens 925.The remainder of frequency spectrum analyser remains unchanged, though have a plurality of inputs, it is unnecessary extra grating 931 and 933.A plurality of separations of having switched waveguide adjust according to application, to reach the required changeable spectral range of analyzer 930.

Figure 43 shows a kind of polarized sound wave multi-coated interference structure 953.Incident acoustic wave 972 can be a main body or surface acoustic wave.Polarized structure is fabricated in the zone 955 of a piezoelectric substrate 965, and it comprises the farmland 963 and 964 of two kinds of forms.As everyone knows, reversal of poles causes acoustic wave segment reflection (for example people's such as Miller United States Patent (USP) 4,410,823).Influenced by the interval at the interface between the polar region to the reflection of light beam 973 and to the transmission of light beam 961.If need high reflection and low transmission, adjacent interfaces should equal the long integral multiple of 1/2 sound wave at interval.If need high transmission and lowly pass a structure reflectingly, this interval should equal the integral multiple that 1/4 sound wave length adds 1/2 wave length of sound.By one wherein the near interface that changes of acoustic impedance the polar region of proper number is provided, can make and not reflect (AR) structure, the phase place of suppose reflection wave is selected to different with reflection wave phase place from this interface but amplitude is identical.

Figure 44 shows a kind of polarized main body acoustic wave transducer 971.One incident acoustic beam 972 is incident on the polar region of the piezoelectricity substrate 965 that comprises pair of electrodes 974,975.This polar region comprises and is preferably opposite two kinds of farmlands 963 and 964.By the long reverse polarization direction of per 1/2 sound wave, the electric field of being responded in each polar region by sound wave can be chosen as identical.At this moment, can use single electrode to pick up induced voltage but not the interdigital electrode of prior art.Use electrode 974 and 975 to detect the existence of incoming wave 972.Output voltage (drawing and be found in electric controller 978 by conductor 979) is with sinusoidal variations (for a narrow-band) and be the time and the function of the amplitude relevant with the amplitude of this sound wave.As mentioned above, if polarized interface is spaced apart 1/2 wavelength, perhaps structure does not need in a given enforcement as a high reverberator yet.This feature can alternately be eliminated at the interface, interval by 1/4 and 1/3 place at wavelength shown in Figure 44.At this moment, this structure is a reflectance coating not, to eliminate unwanted reflection.Because almost whole sound wave penetrates polarized structure, its energy can almost completely be inhaled into detected electrons equipment at this place, and described structure 971 is a tuning detecting device of effective acoustic energy.The bandwidth of this structure is inversely proportional to the sound wave number of cycles, and it drops in the polarized structure that is covered by electrode.Its efficient is relevant with the acoustic path length under electrode.Therefore, bandwidth is relevant with the efficient of detecting device, and can adjust by the size that changes detecting device.

Structure 971 can be as an acoustical generator, and it mainly is the opposite process of operation.Frequency with the sound wave that will be energized provides an electric signal relevant with the time between two electrodes.The piezoelectric modulus of substrate produces one-period property tension force and produces a pair of sound wave under frequency of sound wave, one of them is 961 in working direction transmission, and another 973 thief is in the opposite direction transmitted.If need only produce a ripple, can merge high-efficient single direction generator of manufacturing by installing 953 and 971, can be made into the full-reflector that is used for unwanted ripple and install 953.If this full-reflector is to be directed with unwanted ripple folder an angle of 90 degrees, and the wave phase that is reflected is selected to and required sound wave homophase, and then these two ripples will appear on the same direction, as same single ripple.

A variation of the structure among Figure 44 is that strain starts formula light reciprocation device.In this device, the utmost point gets 964 and 963 by strain place excitation, the change that produces refractive index by photoelastic effect.Now, structure 975 is a strain induction attenuator, and it can be deposited on the substrate 965 under temperature rises, so that make the different heat expansion coefficient of film and substrate at room temperature produce a strain field.This mechanical type strain field is after photoelastic stretcher effect, and the variations in refractive index that changes from the farmland to the farmland in substrate produces the substrate with moulding refractive index once again, and it also can be used for other occasions as herein described.If the deposition process of electrode does not influence required strain field, use the electric field of electro-optic effect to merge with photoelastic effect.

The tuning coherent detector that the structure 890 of Figure 45 is used for a pair of light wave.Its tuning manner makes it only can detect frequency difference between the light wave in a specific bandwidth (about required central authorities " resonance " difference on the frequency).Under the simplest situation, this device is formed at equal interval between interdigital electrode 885 and 886, and its formation has the periodic structure that the cycle is Λ.At a given instant, appear at two incoming frequencies in the input beam 887 produce an electric field in waveguide 888 conoscope image, its space periodic depends on optical frequency rate variance and substrate 889 refractive index in optical frequency.Under a frequency difference, (this moment, the space periodic of conoscope image equaled periods lambda) electrode structure is to be in resonant condition, and owing to the inductive displacement electric charge at the waveguide top, electrode will be excited to a potential difference (PD).

Frequency response characteristic is relevant with a sinusoidal chi square function, and its resonance frequency determines that by the optical frequency difference two light waves are 2 π in the polarized phase shift of grating in the cycle at this place.After electrode structure is formulated, need cushion 891 to reduce the loss of transmission light wave.If its thickness much smaller than periods lambda, can not reduce induced potential intensity in fact at this.Conoscope image has a low frequency component, and it vibrates with the difference on the frequency between two light waves.Therefore, the electronic signal of being picked up via waveguide wire 979 by electric controller 978 also is to vibrate under this frequency difference.The amplitude of electronic signal is very big under the resonance frequency difference, and drops to other frequency differences according to the device bandwidth, and it is relevant with the inverse of pulsation period number in the interdigital electrode structure.

Interdigital electrode also can be constructed with the multifrequency component, so that have several resonance frequencies, or so that responsive bandwidth is made amendment.Please note that this device also can be to multistage sensitivity.If with 1/2 period ratio be narrow than this electrode, will have obvious response at the odd harmonic place of resonance difference frequency.Have asymmetry by pointer is moved relative to each other to make along waveguide axis, can produce response even-order harmonic.Higher-order response only can improve reducing under the response of first rank, and this can be by with electrode centering and increase its bandwidth it is minimized toward each other, and last, waveguide 888 is not strictly necessary.It can be omitted, but detected ripple should be brought to very close to the electrode part, so that picking up signal is preferably changed.

Figure 46 shows a low-loss suitching type waveguide separation vessel 780, this device has a permanent Y type waveguide separation vessel 774, it is made of an input waveguide section, this input waveguide section is widened and is entered a Y type contact and be branched off into two output waveguide sections 775 and 776,775 and 776 can be as the path of the light that is incident on input section.The width of input and output section and index preferably equate.Separation vessel 780 also has a polarized structure 778, and its electrical-optical coefficient is positioned at the zone of Y shape separation vessel 774.Polar region 778 can be near the skim the substrate top, and it can have multilayer, or extensible by whole substrate.Other parts of substrate can be polarized or non-polarised.Pair of planar electrode 777,779 is arranged on the waveguide top close to each otherly, and wherein an electrode 777 covers the part of an output waveguide 775, and another electrode 779 then covers the part of another output waveguide 776.Electrode is plane, so that make facility and functionating: if it is provided with the surface for smooth or crooked, their unanimities.The edge 781 of electrode 777 is striding across waveguide 775 at very shallow angle, and forms the level and smooth inner edge continuously of waveguide 776 at the connection wye place.Similarly, the edge 783 of electrode 779 strides across waveguide 776 with very shallow angle, and forms the level and smooth inner edge continuously of waveguide 775 at the connection wye place.When electrode is energized toward each other and a polarity chron arranged, the refractive index below electrode 777 reduces, and the refractive index below electrode 779 increases.As a result, an excitation region below electrode edge 781 forms a waveguide border, almost completely changes input beam 789 over to output beam 784, has only seldom power another output beam 782 that bleeds.The refractive index that electrode 779 belows are increased helps luminous energy diversion border 781.When applying opposite electrode between electrode, input beam almost completely changes other output beams 782 over to.If do not apply voltage, if structural symmetry, then power input is evenly assigned to two output ports.Therefore, this structure is the 3dB separation vessel, and it can be entered a wherein direction by the electric beam waveguide that switches under low-loss.

Electrode 777,779 is taper away from Y shape structure 774 in the structure input, to form the progressive low refracting sphere towards waveguide, make the light loss minimum.The smoothing effect of distribution of electrostatic produces very level and smooth refraction transition refractive index below two electrodes.The leap output waveguide is preferably pressed from both sides an angle of 90 degrees to reduce the wastage with waveguide away from the electrode of Y stub area.

Y shape separation vessel can produce the separate ratio different with 3dB by lining up asymmetric mode when electric field is closed, this can finish by deviation angle that increases one of them waveguide and/or the deviation angle that reduces another waveguide.This handoff functionality operation supposes to have enough big electric field to be applied on the electrode almost as a dissymmetrical structure and a symmetrical structure are arranged.Though very big asymmetry is arranged, extinction ratio (ratio between the power in power in the connection waveguide and the disconnection waveguide) can be kept very big.Yet at two leg places of asymmetric suitching type waveguide separation vessel, light loss will be different slightly.Therefore, device 780 can be constructed with the separation vessel of any required segregation ratio, and can be switched under good efficiencies and high extinction ratio.

But this device cascade is to allow two switchings between the above output waveguide.For example, if the input end of one similar 780 second device that output waveguide 775 is connected to, its power can be passive or on one's own initiative by the extra a pair of waveguide of incision.Can finish 16 with the four groups of switchs (being respectively 1,2,4 and 8) that are similar to 780 and switch outlet line.Power-division ratios between these circuits is not equating under the switching state, or is being any other power-division ratios.When these switchs are energized, a single output waveguide can be connected, a single output waveguide can be cut off, or the combination of any output waveguide can be switched on and cut off.

The direction of propagation of light in device can be reverse, and this moment, the input above any in output port 775 and 776 can be switched to occur from input port.Do not apply voltage if having, to be coupled to input port and an attenuation (being 3dB under the situation at symmetrical mounting) is arranged at the power of each output port.When electric field is switched on, be in " connection " power in the waveguide and under low-loss very, linked input port, simultaneously, be in that " " power in the waveguide leaves from the input waveguide diffraction very effectively in cut-out.Described " cut-out " waveguide and this input port separate basically.

Perhaps, a mirror image device can back-to-back be connected with switch, and input waveguide is combined, and forms one 2 * 2 switch or router.Input on a pair of waveguide port in office switches to other arbitrary waveguides to port.Similarly, can carry out cascade, to produce one n * n switch/router.

Figure 47 shows the alternative embodiment 790 of the suitching type waveguide separation vessel that uses multipole district.In this structure, be reinforced along the rate variance of toggle refractions on the border of each waveguide in Y shape zone, thereby more preferably optical mode be restricted to a narrower district, and make and enter the remnants that are cut off output waveguide and be coupled reduction.Each side along the input waveguide 774 of Y shape Disengagement zone has two polar regions 785 and 786, and shallow angle, the border 787,788 of this polar region strides across output waveguide 775 and 776, and forms the level and smooth inner edge continuously of waveguide 776,775 at the connection wye place.The border of polar region attenuates with the slow startup of permission electrical activation variations in refractive index from input waveguide at leisure, and they are locating to cross over output waveguide to reduce light loss away from connection wye (electric field reduces in fact herein).Electrode 791,792 is arranged on 785,786 tops, polar region in fact.

One potential difference (PD) is applied on the electrode, and encouraging an electric field, it is for the static form and pass between the electrode and around the space of electrode.This field penetration polar region and peripheral region cause the variations in refractive index of photophase form.This local light variations in refractive index is long-pending relevant with internal field's direction and local electrical-optical coefficient.The polar region is preferably centered on by the district that opposite polarity is arranged, and this moment, the symbol of its electrical-optical coefficient was opposite with the peripheral region.At interface 787 and 788 places sharp-pointed variations in refractive index is arranged, in a waveguide side wherein, refractive index reduces at the interface place, to produce waveguide away from low-index regions to trend.Opposite side for waveguide is then opposite.If the electric field that applies is enough big, then has the interface that reduces refractive index and form the waveguide border.Because the smooth connection of waveguide introducing face is as the extension on the inboard border of the output waveguide of crossing over from the polar region, thereby input beam is gone into this output waveguide by waveguide.The light that, then enters " cut-out " waveguide if it is progressive that the curvature on border is drawn in waveguide leaks very low.Loss in the input is very low, and this is lentamente near waveguide because of the polar region.Loss at the connection wye place is very low, this be because extend to a polar region part outside the bonding land reduced " cut-out " output waveguide waveguide draw effect, and strengthened that " " waveguide of output waveguide is drawn in connection.

As a kind of replacement, the polar region can be centered on by polarized material not, at this, 787,788 places still have unexpected variations in refractive index at interface, make the effect of this device, but when the polar region is when being centered on by the antipole formed material, its refractive index only is half of value of gained, make apply electric field must be higher.Described in the past various changes also can be applicable to this device.

Figure 48 shows the main design element of one 1 * 3 switch, and how design element shown here shows that the device 780 with Figure 46 changes 1 * 3 switch that a single polar region and shaped electrode are arranged into.This device comprises a permanent branch-waveguide, and it has required number of branches n (n=3).This waveguide is by a polar region, and this polar region extends to than waveguide depths (being used for good extinction ratio) and significantly outside the bonding land, waveguide is to separate (for example three of its width times) by large-spacing at this place more.Several zones are to be limited by the waveguide border, extend smoothly by it and get back in the input waveguide border, and pass through its normal boundary of distance leap output waveguide outside the bonding land significantly.At this (n is arranged ²+ the district that 2n-2)/2 so limits.It is useful making an outmost district extend to outside the outermost waveguide outward, so that input attenuates.Above each district, be provided with electrode separately, a little gap is arranged between all electrodes, but the electric breakdown of this gap when being enough to prevent to encourage.

For operating this device, electric field is applied to each district independently and its polarity depends on whether relevant district is limited in the necessary waveguide.For example, 5 districts in Figure 48 then are energized according to Table I.As previously mentioned, electric field level is adjusted, and produces a good waveguide with the border along the adjacent region that is energized with opposed polarity and draws the border.

The district	Number of electrodes	Middle top	The bottom
				1	+	-	-
2	+	+	-
				3	-	+	-
4	-	+	+
				5	-	-	+

Table I

Perhaps, the design element of Figure 48 also shows how device among Figure 47 is transformed into 1 * 3 switch with multipole district, and this device comprises a permanent branch-waveguide, and it has required number of branches n (n=3).Several zones are to be limited by the waveguide border, extend smoothly by it and get back in the input waveguide border, and pass through its normal boundary of distance leap output waveguide outside the bonding land significantly.It is useful making an outmost district extend to outside the outermost waveguide outward, so that input attenuates.Each district is with polarized with the adjacent region reverse direction with public boundary.There is the zone of equipolarization direction can shared summit at the most.The input waveguide district preferably in contrast to the most inboard district (promptly the district of close input waveguide) polarized.In Figure 48, the most inboard district is denoted as district 2 and district 4, causes to have only based on the option program of the polarity in district and distinguishes and 4 oppositely polarized, with time zone 1,3,5 (they are the output waveguide district) are by forward polarization (identical with the peripheral region direction, if the peripheral region is polarized).If use 4 output waveguides, 9 districts are then arranged, wherein 6 reverse polarizations comprise all output waveguide districts.Therefore, the separation vessel of even number output waveguide has some advantages, because have only the output waveguide district polarization of even number separation vessel to polarize in contrast to a voltage substrate, its advantage is for having the restriction of increasing and high transmission is arranged to be used at final cut-point " on-state, and preferable oppositely completely cutting off arranged at " cut-outs " state.Above each district, be provided with electrode separately.

For operating this device, electric field be applied to each district independently and its polarity now for opposite.Polarity is by following two factors decision: whether relevant district is limited in the necessary waveguide, and the polarity of polar region, below.For example, if apply a positive polarity produces refractive index to a positive polarization district increase, then its selective rule is: if district forward polarization, its Electron Excitation polarity just is being chosen to be (if this district is in necessary waveguide) or negative (if this district outside); If district reverse polarization (bear), its polarity is chosen to be negative (is in necessary waveguide as if this district) or just (as if this district outside).Be the preferred polarised direction in district shown in the Table II, n=3 and its three output ports are as shown in figure 48 at this moment.The design of 1 * n and n * n switch can draw in 47 and 48 the description from about Figure 46.

The district	Polarised direction	The top	The middle part	The bottom
					1	-	-	+	+
2	+	+	+	-
					3	-	+	-	+
4	+	-	+	+
					5	-	+	+	-

Table II

Plane described here element can be become to comprise the equipment of electrical-optical control and the multi-layer three-dimension structure of waveguide assemblies by lamination.By the polarizable film (preferably polymkeric substance) and buffer compartment absciss layer (can be dielectric material or conductive material) of alternately laying or be provided with the electrical-optical activity, to make the three-dimensional structure of above-mentioned slab guide and switch.The advantage of the structure of lamination comprise by by every the farther cross-talk that waveguide component caused isolate.The structure of lamination also can be reached higher power handling capability, because more luminous power can be dispensed among each layer.If wish distributing independent waveguide in display device, also can use independent stratum.

In case be placed on the suitable substrate, use above-described technology can finish the polarization of above-mentioned active optical waveguide/switchable layer.For an active layer and other active layer are isolated, the cushion with low index is necessary, and is designed in the direction vertical with above-mentioned plane and sets up required guiding.For example, can use the cushion of silicon dioxide.Then be a ground plane and a thick cushion, can utilize a metal level to make this ground plane, because it and the isolation of above-mentioned optical activity layer.Above-mentioned cushion also must be able to bear the voltage that is applied between above-mentioned different electrode layer and the ground plane.Among polymkeric substance, a big zone can be polarized, and go radiotechnology by aforesaid UV, and desired zone is by optionally depolarization, to produce guide properties, even after a printing opacity cushion (for example silicon dioxide is laid).Perhaps, can electric mode carry out polarization.With polymkeric substance, the depolarization that utilizes UV to go radiation that one deck is carried out will not influence the one deck thereafter, and this is because the shielding that metal ground plane provided below of above-mentioned pad.Utilizing standard masks and coating technology to set the electrode and the conductive path of metal then, then is another dielectric buffer layer and next active layer.Above-mentioned cushion is answered flattened so that the loss among ensuing active optical waveguide/switchable layer minimizes.As long as setter needs, the process of above-mentioned interpolation layer can be repeated.

For a kind of variation of active path of above-mentioned polarized device lamination manufacturing and the used manufacturing technology of electrode is to coat an insulation course at above-mentioned electrical-optical layer, be doped or be injected into insulation course with rear impurity, in above-mentioned cushion, produce the electrical conductance figure to utilize standard photography etching mask technology.Above-mentioned electrode is incorporated into above-mentioned cushion can make the thickness that is stacked in device together reduce to minimum.

The mixed device of being made up of different electrical-optical active materials is used to improve the manufacturing complicacy.For example, the first electrical-optical active layer that comprises waveguide device can be fabricated in the lithium niobate substrate, and it also can be used for supporting substrate.Then provide a cushion and electrode layer for above-mentioned lithium niobate device.Subsequently, the two buffer insulation layers of clamping a conductive plane are coated on the described device, next active layer is set subsequently, this active layer can be a kind of polarizable polymkeric substance.Ensuing several layers is established as described above, and is polarized and by the body plan figure.Conductive plane between cushion can be used as electrode allowing the regional polarization of each polymeric layer, and the several layers before can making it is not subjected to the influence of polarization process.

For example, the lamination waveguide array can be as the turning facilities of controlling usefulness for free space beam.By the waveguide component of Electron Excitation and addressing individually by stacked together and align with a source array tightly to form controllable phased array to launch optical radiation.As previously mentioned, can adjust the relative phase of above-mentioned light beam by the voltage that changes on polarized zone.By adjusting these phase places with linear ramp, can be from the light of waveguide array emission fast by inswept in the plane of last array.Thereby the linear array of the device on a plane can be only in this plane interscan.Yet when polarized waveguide array plane vertically was integrated in the three-dimension integrally device, the light beam launched of this device can be guided in the two dimension certainly.

The pattern control that a kind of extension of this conception of species is to use a lamination waveguide optical grating reverberator to be carried out to multimode laser rod array.Above-mentioned waveguide lamination is coincide to dock a laser diode array by ground, space.By controlling the phase place of above-mentioned each element, the emission modular form of multicomponent laser rod can Be Controlled.For example, in the equipment that does not need single mode waveguide restriction, multimode or whole array can be laminated in together, the power handling capability of the polarized equipment that is switched with increase.

Figure 49 shows an embodiment of phased array waveguide laminate portion 1630, and for clarity sake, of only showing waveguide is single-row.Optical radiation 1640 sees through some waveguides 1638 and enters lamination 1630, and above-mentioned waveguide 1638 is made in the electrical-optical active film 1650 (such as polarizable polymkeric substance).At this, the input beam 1640 that illustrates is spaced apart, to represent identical wavelength but the light beam of out of phase is arranged.Light is along waveguide 1638 transmission, and they meet with polarized zone 1634 therein, utilize technology described herein in this zone, and refractive index can be revised electronically.The phase place that light beam 1642 is illustrated in each light wave is adjusted the output that is output into the later phased array of divided beams (its phase place is aligned) with generation individually.

Many other input and output ripple situations are possible.For example, the waveguide component district of can throwing light on of the single-mode laser bundle with flat phase front, it strides across the spatial model of laser beam with after-applied phase delay arbitrarily, allows this light beam to be handled electronically in free space thus.Utilize this method the directional beam control device will than current machinery or the A-O device is quicker and more miniaturization.Utilization is in this description or light well known in the art-electric pick device can detect in the described laminated device or the existence of outer phase differential or multifrequency composition, so that provide prompting message for a feedback loop.

In the aftermentioned mode, by electrode alternately is set, cushion, and polarizable material, here Biao Shi device section 1630 is made on the substrate 1632 (for example silicon dioxide).Depositing a wide area plane electrode 1654 (is made by opaque metal film or transparent conductive material, indium tin oxide for example), be an electrical isolation cushion 1652 (for example silicon dioxide) subsequently, this electrical isolation cushion 1652 is also as the boundary layer that is configured in waveguide 1638 in lower floor's polarizable material 1650.On the top of this polarizable material layer 1650, another cushion 1652 is added on it to form the waveguide border, with the after-applied shaped electrode 1636 that is used to encourage polarized structure.Another cushion 1652 is added subsequently, is specifically to make this shaped electrode and following one deck-another wide area plane electrode 1654 electrical isolations.Shaped electrode 1636 only separates by a thick cushion and a plane electrode, and separates by cushion and polarizable material and other plane electrodes.Apply electric field because need to cross over polarizable material, should be so cross over the electricity isolation of polarizable material less than the isolation of only crossing over cushion.Hierarchical sequence between the two wide area plane electrodes is repeated, and to the last till one deck polarizable material 1650, afterwards, only needs to add cushion 1652, and the final insulation course 1652 of shaped electrode 1636 and optics is to finish above-mentioned lamination.By integrated and joining technique electrical lead 1646 and 1648 difference contact electrodes 1636 and 1654 well known in the art, and be connected to voltage distribution control module 1644.

Voltage control unit 1644 has dual purpose: encourage above-mentioned polarized device respectively and make they and the electric field isolation that is used for controlling adjacent exciting element layer.In fact, voltage control unit 1644 can be some set that are coupled floating power supply, but wherein clamps the voltage Be Controlled between the electrode 1636 and 1654 of an active layer, and need not to change the voltage difference at any other active layer two ends.

Polarized zone of 1634 expressions, zone with one or more farmlands, one of electrode 1636 expression that do not broken or by segmentation or graphing zone, it has one or more insulation components.Waveguide lamination 1630 is described as the equipment that is used for phase control, but the waveguide rhythmo structure can comprise combination a plurality of arbitrarily of polarized device described here (on the optics series connection or otherwise structure).

Figure 50 shows the adjustable attenuator 1400 of a prior art.One input waveguide 1402 is transverse to an electrical-optical active region of substrate 1404.Input beam 1406 spreads into an output waveguide 1408 along this input waveguide, forms output beam 1410.Electrode 1412,1414 and 1416 are set on this waveguide, with convenient electrode 1414 with respect to a given polarity (plus or minus) of electrode 1412 and 1416 when being energized, because electro-optic effect has a refraction index changing in above-mentioned waveguide region section 1418, under above-mentioned electrode and near this electrode part.This electrode structure is arbitrarily and can is that different and comparable prior art constructions shown in Figure 50 is more complicated, but all the common factor of figure is when they are excited to a voltage, and they will be reduced in the refractive index of core and increase the refractive index of peripheral region.

When the electric field that applies did not exist, the loss of above-mentioned waveguide segment was low, and it is mainly determined by the scattering that is caused by the roughness along described wave guide wall.Yet when electric field was applied in, above-mentioned loss can be added to a very large value.Three electrode figure allow to change when occurring in outside this waveguide when a positive refracting power, and negative index change occurs among this waveguide, make significantly that refractive index distribution variable is gentle to broaden.When electric field was provided, the part that is modified of the waveguide 1418 under described electrode had very wide lowest-order mode profile from the input 1402 and the output 1408 of this waveguide.As a result, when input beam 1416 imports part 1418 into and when the optocoupler in the part 1418 is connected back to output waveguide 1408, pattern is coupled loss and all can takes place.If refraction index changing is enough big, below this lowest-order pattern drops to and ends, the light that sends from the end face of waveguide 1402 almost freely diffraction to substrate, begin to cause the big loss that is coupled in waveguide 1408.

When a given pattern enter described waveguide be modified part 1418 time, the change of the index distribution of this section of being modified has reduced overlapping between any mode profile of its intensity distributions and described modification part 1418.If section 1418 is multimodes, several transmission modes and radiation mode will be energized.If section 1418 is single modes, then various modes will be energized.The combination of these patterns is transmitted to the far-end of this section 1418 then, and is coupled to output waveguide part 1408, and at this, only the sub-fraction of described light is got back in a kind of pattern of described waveguide to form output beam 1410.Be applied to the voltage of described electrode by control, can the loss in equipment 1400 from very low be adjusted to very high.

The size that can obtained maximum loss depends on described refraction index changing is energized the size in zone, their length, and depend on that whether this input and output waveguide is that single mode still is a multimode.In a kind of variation of its geometric configuration, two electrodes only may be set on waveguide segment 1418, thereby reduce the refractive index in this waveguide segment and make refractive index be increased to a side but not both sides.Its function is once more as an attenuator, but unaccepted radiation field will tend to leave described equipment towards a described side that is increased refractive index.The ability of the radiation that this guiding is lost is advantageous in hope in to some systems that are rejected light and control.Absorber also can the section of being placed in 1418 downstream (in one or both sides), to prevent to be rejected light other local other functions of disturbing in system.

Figure 51 shows a polarized switching attenuator 1420.This equipment is a kind of improvement of prior art equipment shown in Figure 50, and wherein polarized zone is used to increase the resolution of refraction index changing, and increases the uncontinuity of refractive index, is increased in the damping capacity that a single step function obtains thus.Zone 1422 and 1424 is with oppositely by electrical-optical polarized opposite with material around.(as an alternative, material around can be not polarized, or do not have photoelectric coefficient, or it is only polarized with the direction opposite with regional 1422 and 1424) contre electrode 1426 covers polarized zone and material around top.It is energized relevant with electrode 1428 and 1430, to produce a refraction index changing in polairzed area 1422,1424 and material around.The working method of the working method of equipment 1420 and the said equipment 1400 is similar.Be applied in voltage and reduce and the index distribution of waveguide segment 1418 is widened, reduced the pattern of output waveguide 1408 with the pattern that in section 1418, encourages by the input wave beam between being coupled.In this structure, in the beginning of the waveguide region 1448 that is modified, the change of described index distribution is very violent, so loss is bigger.As long as differ from the pattern that is coupled with unexcited waveguide segment with being energized the pattern that waveguide segment 1418 is coupled, just can the quantity and the shape of polarized waveguide segment 1422 and 1424 be changed.This equipment can be made into high loss under the situation that is not electrically excited, and adjusts to low-loss under the electric excitation situation.In such cases, be electrically excited the part that zone and/or polarized zone form the structure of waveguide segment 1418.Waveguide segment 1418 can be configured in many ways self, and the most attractive is that in this case, this equipment is identical with the switching waveguide modulator of Figure 29 if it does not exist and does not have excitation fully.

As mentioned above, these equipment can cascade to increase maximum decay.

The equipment of Figure 50 and Figure 51 also can be by (" the point ") light source as a kind of variable intensity localization.The light of propagating in waveguide 1402 is constrained to the path of only following this waveguide, till a voltage is applied to this electrode structure.When waveguiding effect being reduced or when destroying by changing refractive index, partly or entirely will the propagating of original confined light beam according to the free space diffraction theory.This diffracted beam will continue to propagate with direction forward, and beam area is expanded in two dimension and big core greater than waveguide 1408 simultaneously.Away from this electrode structure one suitably apart from part, described beam area can occupy the major part of substrate pore sizes, is rendered as a pointolite from coming near the locus of described electrode structure for the observer.

If desired, can use this technology to make a kind of one dimension localization light source.Waveguide segment 1418 among Figure 50 and 51 can be embedded in one and utilize in the planar waveguiding structure that prior art makes, when being added on this electrode structure with a convenient appropriate voltage level, the horizontal restriction of mould is destroyed and vertical constraints in the described slab guide keeps.Therefore, described beam area is expanded in one dimension, and light is restricted on the narrow plane.

Figure 52 shows a polarizer apparatus 1500 with polarization grating of widening the angle.Shown in be used to add wide bandwidth method be a kind of alternative with reference to bandwidth modifications of describing such as Figure 18.As shown in the figure, one-period structure 1500 has some polairzed areas 1502, and they preferably are polarized to a polairzed area of structure 1504, is provided with as required such as other structures of waveguide and electrode and grating.The central axial line that input beam is propagated is crossed on farmland 1502, and its figure can be strict periodic, has 50% dutycycle.Align along the line of pointing with the finger or gesticulate out around the end face of this polairzed area from an alignment.At a segment distance place that enters described material, its surface configuration is duplicated in each polairzed area.Consequently a kind of structure with polarization and the change in its cycle have linear relation with lateral attitude in described polarization substrate.The input beam 1508 of penetrating this polairzed area can be that a Gaussian beam of freely propagating (if being polarized by the degree of depth in these farmlands) or its can be limited in the waveguide 1512.According to the function of grating, this input beam can be coupled to an output beam 1510 filtered or that frequency is converted, or is coupled to retroreflection light beam 1514.Periodic regime in the optical grating construction (thus to its bandwidth) depends on the width of this light beam and point 1506 interval apart from the axis of this light beam.By adjusting this tittle, can on the minimum value of determining by the first rank amount of cycles that is fit to above-mentioned grating, increase the bandwidth of this polarization structure fully.Maximum required angle to polarized border has restriction, thereby structure shown in Figure 52 can not unrestrictedly be expanded.Yet, by several sections cascades can be obtained a long interaction region together.In order to make the relevant maximum between each section, should not be modified along the junction of cycle between each section on the farmland of light beam central axial line.

Reduced interactive intensity though increase the bandwidth of grating, it makes the equipment that uses this grating insensitive widely to the small frequency drift.For example, the frequency multiplier equipment that uses the angle to widen grating more can be tolerated temperature drift.The example of Another Application is a channel decline wave filter, because it must use the high light grid, so its tendency has narrow bandwidth.The use that grating is widened at the angle makes the passband of widening can accept the signal of communication of high bandwidth.Described angle is widened grating and can also be applied in other optical grating constructions discussed above.

Having some to implement the angle widens the alternative embodiment of grating and does not follow above-mentioned figure.For example, the angle in grating cycle and along the relation between the distance of propagating axis may be than linearity more complicated.During some that are present in one of described grating end for most of mutual power are used, secondary or index variation may be more suitable.The grating type that technology also is applicable to prior art is widened at the angle, such as scattering, and ion-exchange and etched grating.

Figure 53 shows and uses another angle of curved waveguide to widen equipment.In this kind situation, polairzed area 1522 has parallel face, and the angle of those faces tilts with respect to the local direction of propagation in the waveguide.Secondly, utilize the heterogeneity of the ripple of the different Fourier compositions that experience grating that above-mentioned bandwidth is widened.This curved waveguide has the loss higher than straight wave guide, but does not need big curvature.Several sections shown in Figure 53 can be connected in together, for example forms along a straight basically forward and backward sinuous waveguiding structure of line.

Figure 54 shows controlled polarization lens 1530.The farmland 1532,1534,1536 and 1538 that is provided with is polarized in the electrical-optical substrate 1540 with one heart, and its polarity is opposite with the polarity of this substrate.Two transparency electrodes 1542 and 1544 are placed on the opposite sides (about described polairzed area) of described equipment.When an electric field was applied between two electrodes, the refractive index of this polairzed area increased according to polarity or reduces.The geometric configuration of this polairzed area is determined by the diffraction demand of the light wave that focuses on given color.Interval between the border changes on square ground approximately with radius.For example, if described application need focuses on plane wave on one round dot, then this polairzed area will be (being used for equally focusing on two planes) of circle, and along with the diameter of described polairzed area increases, the quantity of above-mentioned polairzed area is reduced, and therefore above-mentioned polairzed area is separated.The border of described polairzed area is determined by the phase place with respect to the output wave of the incoming wave on the face of this lens arrangement.The relative phase of each ripple changes to π, and border, a polairzed area just occurs.For example, if the ripple that comes is a plane wave, be constant then along its phase place of this surface.If the ripple of going out is convergent ripple (will focus on away from described the point), then it is that a spherical wave and the phase change in this spherical wave determine described border substantially.Lens 1530 are to have the phase-plate that postpones according to institute's making alive adjustable phase, and above-mentioned farmland occupies the Fresnel territory of target.

For the plane wave that makes a given color focuses on, provide one to be enough to make this plane wave voltage of (or leading) π that lags behind.Every kind of different frequency all has the different focal that the different Fresnel domain structure by polarization lens 1530 limits.Higher frequency has long focal length.If not scattering, each wavelength all preferably focuses on same voltage.This voltage can be adjusted, so that the scattering in the substrate material 1540 is compensated.If adjust this voltage away from preferred value, the amount that then is focused the light on the described point is reduced, because from the not no longer optimum ground interpolation of phase place of the light of same area.They interfere partial destruction ground, have reduced pure intensity.

Figure 55 shows a laser instrument feedback assembly 1450.Lasing light emitter is by amplifier area 1452, and rear reflector 1454 and a low reflection output area 1456 are formed, and described low reflection output area 1456 for example can be a non-reflecting coatings window.Though common laser instrument will have another high reverberator, in the present invention, this high reverberator is cancelled, so that a grating feedback assembly can be controlled the vibration of this laser instrument.Reflection from output area 1456 and coupling device 1458 is sufficiently low, if so that not from the additional feedback of external source, this laser instrument is not launched laser.Described outer counter feed links 1458 and polarization material 1460 of system by an optocoupler to be formed, when this polarization material 1460 reflects light beam from image intensifer during by an electric field excitation.Because the reflectance spectrum of polarization material 1460 can be very narrow on the frequency space, so it can select a narrow zone, laser instrument can carry out work around single-frequency or a plurality of frequency of decision grating according to the distribution in grating cycle in this zone.If the resonator cavity long enough is so that FSR is on the rank identical with the width of this reflectance spectrum, then this composite set will be with single vertical pattern vibration.

The device 1458 that is used for being coupled luminous energy between described image intensifer and material 1460 is collected the output mould of laser instruments and its heavy polarization material that focuses on.Coupling device can comprise one or more following parts by multiple replacement contexture: high numerical aperture lens, and for example GRIN (graded index) is aspheric, diffraction, or the multielement spherical lens; Tapered transmission line; Couple from waveguide to the waveguide enemy use the situation press close to adjuster and aligner.Coating is not preferably reflected on the surface of this coupling device 1460.The AR coating can be a kind of multilayer dielectric coated, or the sol gel coating, or has the quarter-wave layer (geometric means of two adjacent medium) of the material of appropriate index.If described material is integrally polarized, the preferred focusing in this material 1460 has the Rayleigh zone of the equal in length in approximate and this polarized zone.If having one, this material is used to limit the waveguide of propagating light beam, then this optocoupler links system and lasing mode preferably should be converted to mode profile in this waveguide porch, according to phase place anterior angle, radius-of-curvature, and breadth wise dimension, the required mode coupling of this mode profile and this waveguide.Described polarization structure is made up of at least two types farmland, and they are preferably reciprocally polarized.Polarization material has electrode 1462 and 1464, and they cross over the extension of polarized zone also can be by power supply 1466 electric excitations.When a voltage was applied on two electrodes, the induction field in described material changed refractive index, and refractive index will partly change according to polarised direction and electric field intensity.By property induction period structure in polarization, can produce electric may command periodic modulation according to refractive index.

For amplifier 1452 provides necessary annex and excitation to produce a gain of light coefficient on the elongated area with central optical axis feature.The light belt of this amplifier is wide to be carried out restriction according to the process that produces gain.Described bandwidth is the width (typically being the 3dB full bandwidth) of gain profiles: this gain is as the relation of the function of light frequency.The semiconductor diode technology (such as InGaAs, AlGaAS, AlGaInP, InGaAsP, ZnSe, GaN is favourable for big bandwidth is provided InSb), though they do not provide high-power capacity.Reflective optical system 1454 is feedback mirrors, and it can be an integral mirror of aiming at and mating by the radius and the phase front of this pattern, so that the mode reflection of propagating out this amplifier back is returned himself.Perhaps, under the situation of orthoron, (Nd:YAG, Er:YAG, Nd:LiNbO ₃, Er:LiNbO ₃And the various combinations of rare oxidative ionic and crystallization or glass matrix), it can be a face of described amplifier, and it and described waveguide vertically attach or be polished.If the geometric configuration of resonator cavity is a ring (allowing the propagation of the light of single direction), then this reflective optical system is a multicomponent structure of being made up of at least two elements, to collect from the light that does not pass through this amplifier of material 1460 reflections, focus on again on the material 1460 with the light of aiming at and will returning by this amplifier, it will have once more with its before by the time modular character that had.

The reciprocation of several light beams and period polarized material 1460 is possible.If selection cycle is the multiple for the required cycle of light in reflection amplifier 1452 does not gain, then this device will be as one (higher-order) Control and Feedback mirror.When voltage 1466 was switched on, laser instrument can be opened, and produced in the bandwidth of grating thus and did not reflect.By the described voltage of modulation, this laser instrument output is exaggerated modulation then, the variation because this laser instrument vibration is directly proportional with this electric field intensity.Modulation control device 1466 provides required voltage and current to set up the required electric field as the function of time in material 1460.Also can be by making described laser instrument locked mode with a frequencies operations modulation control device, this frequency equals the multiple of the round trip frequency of light between material 1460 and the laser instrument reverberator 1454.Because with identical frequency the reflectivity of polarization structure 1450 is modulated, the light beams of resonance tend to split into (or a plurality of) pulse between two feedback mirrors 1450 and 1454, certainly it with described round trip frequency loop around pulsation.If frequency be the round trip frequency multiple (1x, 2x, 3x ...), then described pulse will be high near reverberator 1450 these reflectivity at every turn.At higher multiple, reflectivity kept for high one time than weak point, so produced one than short pulse, tended to reflect extra-pulse that multiples form with other height at round trip in the transmission time but may need some to install with inhibition.Also can this extra-pulse be suppressed, also can pass through modulated amplifier 1452, or suppress by other devices that comprise common optional feature by the component that applies a signal with the round trip frequency to reverberator 1450.A light output can be extracted into light beam 1468 or 1649.

By using feedback assembly 1450 to make laser frequency stable, because the cycle reverberator is only with specific frequency work.The incident frequency outside, the bandwidth of polarized structure is not reflected.In a simple structure, determine this bandwidth by the inverse of the first rank grating periodicity, this first rank grating cycle adapts with the length that comprises the polairzed area of described frequency content.Have in the multiply periodic more complicated structure at one, bandwidth is determined by the fourier transform along the polarization structure of the sub-multiple angle of the incident and the folded light beam direction of propagation.Because feedback only comes across during the limited frequency field, can be much narrower so install 1450 output frequency than the output frequency of a free-running laser oscillator, polarization structure is replaced by an independent mirror in the free-running laser oscillator.If the bandwidth of this reflection can be compared with the interval of the vertical pattern of the extended cavity that is formed by reverberator 1454 and polarization structure, then this device will be worked with the single-frequency pattern.

Stability features is a particular importance under the situation of semiconductor diode laser device, and gain is very high and be the broadband in this laser instrument.Owing to be the diode laser device, so that all unwanted internal reflections (such as the reflection from output area 1456) all should preferably be maintained at is very low (for example 10 ^-3Below) degree.According to the degree of depth of field and the preferred voltage of application, electrode 1462 and 1464 can be in the homonymy or the opposition side of structure.The resonator cavity that comprises laser instrument and toggle reflections device also can be a ring resonator, rather than linear resonant cavity shown in Figure 5.As known in the art, need some additional optics to form described ring resonator, not vertical from the reflection of polarization material 1460 with incident light.The cycle of grating and angle must be able to be adjusted, so that the virtual photon that is added in the reciprocation produces momentum conservation between the input and output photon.The angle and the cycle of polarization grating determined in this restriction.

Figure 56 shows a feedback assembly 1470 with waveguide.One waveguide 1470 can be set in the polarization material 1460 and arrive a long distance to limit light beam.This need reciprocation length with the device that produces big reflection in and be useful especially in all light transmit in waveguide therein the integrating device.Shown in Figure 56, waveguide laser 1474 (for example semiconductor diode laser device or diode vacuum solid laser instrument) can dock with this waveguide and be coupled, so that firm and operation effectively.In butt joint was coupled, optocoupler linked the AR of system 1458 for coating on surface 1475 and 1477, and it must keep aiming at aligning and assembly structure.The waveguide of image intensifer 1474 and polarization substrate 1460 is aligned, so that have the preference degree with the phase front of the pattern of propagation waveguide 1472 from the light field phase front towards this substrate that this image intensifer penetrates: identical angle, radius, and lateral dimension.Necessarily in a Rayleigh zone, the deviation that they are aimed at axle should be less than the part of lateral dimension at the interval of two waveguides.Waveguide in one of waveguide 1472 or the amplifier 1476 can be tapered, so that this stack is preferably changed.In waveguide device, be unnecessary for polairzed area 1478 and the 1480 whole substrates 1460 that extend through.Electrode 1482,1484 and 1486 is set on the polairzed area by waveguide 1472 crosscuts.When with respect to electrode 1482 and 1486, when electrode 1484 is energized, in this waveguide, generate the refractive index figure, its structure is determined by the structure of polarization substrate basically.This refractive index figure can be as the reverberator as describing among Figure 55, and/or can be as the coupling device that is coupled with above-mentioned other waveguides.In the end opposite by port one 488 or amplifier 1489, a light output can be taken out from this device.

A frequency multiplier can be set in the substrate 1460, if substrate material is a kind of nonlinear optical material, and such as lithium niobate, Lithium tantalate, or the words of KTP.Accurate phase matching frequency multiplier can be mounted the part as the feedback optical grating construction, before or after it.If optical grating construction is provided with a plurality of reflection frequency, then this image intensifer 1452 or 1474 can be sensed to press the two or more hunting of frequencys in its gain bandwidth (GB).In this case, the non-linear frequency converter can be a summation frequency mixer rather than frequency multiplier, and perhaps several said apparatus can be cascaded to form the multi-frequency combination of multi-frequency output.

The above-mentioned polarization structure that relates to, the various variations of the pattern of its excitation and its use also can be applicable in the combination with the exterior light amplifier.Especially, by the adjustable grating of the structure of Figure 55 and 56 and Figure 14 and 15 is made up respectively, can realize frequency-tunable laser.As previously mentioned, tuning by arranging the polarization optical grating construction to realize, so that mean refractive index changes with the field that applies.The frequency of the feedback of image intensifer 1452 or 1474 frequency of operation origin self poling structure 1460 determines, thereby, can modulate output frequency by the mean refractive index of modulating this polarization structure.Change mean refractive index and changed the momentum vector of photon, and do not change momentum vector by the virtual photon of grating contribution.After mean refractive index changed, old reflection frequency was no longer to reflecting preferably phase matching; Peak reflectivity has moved on to a new frequency.

Utilization is with reference to the structures that Figure 55 and 56 describes, adds as the change described in Figure 14 and 15 mean refractive index, but a frequency modulation of body plan (FM) laser instrument.Show that with " modulation " this vocabulary changing is the function of some parameter, under the situation here, this parameter is the time, as has the pulsation of high or low dutycycle, sinusoidal variation, or the variation with any instantaneous relation.A control system control voltage can be provided and apply required electric current, to adapt to transient change required in the electric field.

Typically, be used for the grating reflection rate of preferred feedback needs of semiconductor laser less than 10%.Remaining light can be used for output.Can make this laser instrument with TM or the operation of TE polarization mode, this depends on the restriction of light beam on the lenticular lenses in waveguide.The relative gain that polarises in scattering in the grating and the booster element.Because the intensity of grating is controllable,, thereby make the output power maximum so reflectivity is adjustable to make the output of laser instrument to be coupled maximization.

Similarly, described grating can be used to form reverberator passive or the assembling cavity.Because laser instrument depends on the relative reflectance of input coupling device and the ratio of this cavity loss to being coupled of a cavity,, and therefore provide and this resonator cavity impedance matching so variable reflectivity input coupling device provides a kind of means that make this parametric optimizationization.

In a cavity, the present invention also can be used to monopulse conversion, mode locking, or the chamber discharges, and has very little or do not have chirp for lower-wattage CW source (for example semiconductor laser), in addition, tuning current potential can make this laser instrument be used as communication, the source of spectroscope and far-end sensing.

Figure 57 shows preferably diode laser device 1474 of Wavelength-selective laser instrument 1490 these laser instruments of being controlled by the switch array, and waveguide 1476 butt joints are coupled to waveguide 1472 in substrate 1461.Face 1475 and 1477 is preferably coated, so as image intensifer 1474 will be not according to the reflectivity emission of himself face.Described substrate can support any substrate of switch 1492, this switch can accomplished in many ways, the TIR switch that comprises Figure 30-32 and 34-35, the grating switch structure of Fig. 7-8 and 12-13, the coupling device of Figure 10 and 26-28, Figure 23,25,33 and the separation vessel of 46-48, or any other the known optical waveguide switching construction that maybe will discuss at present.TIR switch 1492 has fully been described in the above, in the figure only schematically expression.When they were on position, these switchs were sent to one of waveguide 1494 relevant with this switch again to the luminous energy from amplifier downwards.In described waveguide, be provided with a not reflector array 1496, here shown in grating.This grating is with characteristic frequency reflection incident light, and laser instrument is launched laser in the bandwidth of this grating.Shown in optical grating element point to the more or less point 1498 of distance so that apart from the cycle of this laser instrument grating far away be little by little to shorten.By selecting the switch relevant, can select the frequency of the required work of laser instrument with the required grating cycle.Light frequency is determined by geometric configuration, can obtain the linear optical wavelength of separating by a constant switching interval.If desired, can select any wavelength interval in the storage density capacity of this arrangement.Because the low insertion loss of TIR switch and the storage density of Qi Gao can be provided with a large amount of switchs along waveguide 1472.The inclination output waveguide is stack up very compactly also.

Output beam can take out from the rear surface of image intensifer 1474 becomes light beam 1489, or also can become light beam 1488 from waveguide 1472 taking-ups, because the TIR switch will leak the light of sub-fraction laser instruments along waveguide 1472.Many replacement structures of describing such as reference Figure 56 have also related to this structure.For example, this reflector array can be by the fixed grating that utilizes many technology to make, or switches grating and form.It can be made up of unified optical grating construction, and the different light path length that wherein arrive this grating select to be used for the different FSR of laser chamber, produces the single mode operation with the array selected at the spectrum peak at a very narrow interval.It in addition can be formed by array along a fixed mirror of waveguide 1494, it can coatedly be used for high reflection or variable wavelength reflection.In addition, the different interval of described mirror provides chance for adjust switchable laser chamber path on big scope.

One of the part of the structure of Figure 57 is to utilize the adjustable lay the grain modulator of guides 1492 again, and the feedback reflector device in one of the waveguide 1494.If waveguide 1472 is made into and does not produce reflection, as for example making its width gradual change, be guides 1492 more subsequently to zero, then this laser instrument is reflected by the feedback of bearing by reverberator 1496.By adjusting the amount of the luminous energy that returns through the motivational feedback of guides 1492 again, can control the output characteristics of laser instrument.Can modulate laser instrument by this way, this moment, reverberator 1496 can be a fixed grating or or even the fixed mirror in a broadband.Utilize grating reflector, have the advantage of a fixed frequency, thereby this laser instrument can be by depth modulation, and do not have frequency displacement, produced almost pure amplitude modulation(PAM).If with the integral multiple of cavity round trip time guides 1492 is again modulated, then this device is a mode locking device and produces a pulsation output.The time that the described round trip time is taken by the coaxial alignment pulse is to turn back to the direction in its original position and the cavity.By using different switchs, can change the length of this cavity, to change the interval of pulse.By using two different switchs simultaneously, also might centering pulse frequently produce discrimination, this medium-frequency pulse tends to increase with the mode locking frequency with the high order of magnitude multiple of round trip time.By being modulated, the centre frequency of this reverberator can obtain frequency modulation (PFM).At this moment, this reverberator 1496 preferably is made into the described adjustable grating as Figure 14-22.

Figure 58 shows wavelength tuning adjustable focus system 1 550.Diffraction concentrating element 1522 and being combined in of a tunable optical source 1554 such as the zone plate lens (or such as opaque body or etched zone plate) of Figure 54 provide new capacity in the data storage field.When a zone plate and an adjustable frequency combination of light sources, arrive the distance of focus point by tuning described light source adjustment.This ability is of great use for the multi-layer data memory device, and data are read and write from the data surface 1556 that builds up data storage medium 1558 with various distances in this equipment.If the waveguide of this light source is by tuning (as describing by various means above us), the distance from described zone plate to focus point is correspondingly adjusted.

The frequency-tunable laser that selection is used to drive the multiaspect data-storage system is the Optical Maser System of a based semiconductor diode laser device 1560, according to carrying out tuning from the feedback of the electric tuning grating of having described such as us 1562.This laser instrument also can be by frequency multiplication in phase matching part 1564 surely, and the use that this hour angle is widened the polarization grating is to make the reception of this frequency multiplier wide being enough to that become accept the important tuning method for optimizing of source laser device.Lens combination 1566 is aimed at and around laser instrument output, is prepared for finally focusing on zone plate lens 1552.

Because zone plate also can make divergent beams focus on again, so lens combination not necessarily.Yet, need to form one by this zone plate around light beam because it will produce the spot definition of minimum, thereby produce high density data read/write capacity.Device 1562,1564 and 1566 can be fabricated in the waveguide of same substrate, (and with the mode of one of described outer reverberator combination) can be integrated with the zone plate lens on this substrate back if desired, to become little in light weight, the unit that can start rapidly of volume in data-storage system.

More than, invention has been described with reference to specific embodiment.For a person skilled in the art, other embodiment are conspicuous.Therefore, except claims show, the present invention is not constituted the restriction of part of the present invention.The generality of A display is described

The main application fields of handoff technique is among the field of optical display as described in the present invention, particularly the emissivity optical display.Figure 59 describes a kind of calcspar of display device 1001, and Figure 60 is the cross section view that the line A-A along Figure 59 is got.The intensity of the visible light that can produce from light source 1000 and come or the optical frequency original device (or light source) of infrared light is by a beam modulator 1002 modulation.Grow degree when visible optical information therefore is encoded into above-mentioned light beam a kind of.This modulated light beam is linked an optical waveguide 1006 (after this be called as distribute waveguide) by above-mentioned coupler 1004, with the various modes of knowing altogether can be in a kind of surface of suitable substrate material 1028 or on the surface processing to make above-mentioned optical waveguide 1006.

Above-mentioned distribution waveguide 1006 props up at least one optical waveguide 1014 (after this being called as the pixel waveguide) with an angle, and above-mentioned angle is enough to make above-mentioned pixel waveguide to separate one section suitable distance with distributing waveguide.Figure 59 is presented at that above-mentioned angle is 90 ° among the preferred embodiment.The parallel pixel waveguide of one row forms for the used scanning linear of above-mentioned display.

Above-mentioned distribution waveguide is connected by a beam direction structure (being made up of a row luminous energy guides 1008) in the bonding land with above-mentioned pixel waveguide.Above-mentioned luminous energy guides can be any propagation that makes the light in above-mentioned distribution waveguide and is directed to or switches to method active or passive in the required pixel waveguide.The example of passive luminous energy guides comprises directivity waveguide coupling device, dispersion waveguide, grating coupling device, star defeated formula coupling device, mode splitter and Bragg grating reverberator.Luminous energy guides initiatively is according to electrical-optical, sound-optical or hot-running of light principle.Some examples of optics guides initiatively comprise by the directivity coupling device of voltage starting, total internal reflection (TIR) switch, disperse the waveguide switch, Bragg grating reflection-type switch, various electrical-optical switch according to the running of mode switch principle, the polarization control switch TE-TM mode converter of passive polarization mode separation vessel combination (for example with), sound-optical switching device (for example SAW filtrator and modulator) and any polarized switching construction that is taken as model that comes into question in this manual.The beam direction device based on a kind of active of a kind of distortion of above-mentioned TIR switch is used in above-mentioned preferred embodiment.A kind of mirror that is fixed (person shown in Figure 32) can be comprised by above-mentioned beam direction device so that above-mentioned distribution waveguide with become 90 ° as the angle of waveguide.After this this beam direction device is called as the distribution switch.

In case light is propagated among above-mentioned pixel waveguide, by starting the luminous energy diverter 1016 (after this being called as the pixel switch) that can be controlled by electronic type, light is directed to a bit (after this be called as location of pixels or be called pixel for short) required on the substrate 1028.Above-mentioned pixel switch is to use the changeover module (passive energy diverter) of the active of above-mentioned operation principles.The example of pixel switch comprises by the directivity coupling device of voltage starting, total internal reflection (TIR) switch, disperse the waveguide switch, Bragg grating reflection-type switch, various electrical-optical switch according to the running of mode switch principle, polarization control switch a kind of TE-TM mode converter of passive polarization mode separation vessel combination (for example with), sound-optical switching device (for example SAW filtrator and modulator), cut off switch, the liquid crystal waveguide switch, waveguide blocking method and any polarized switching construction that is taken as model that comes into question in this manual of any other that sound-optical switching device (for example SAW wave filter and modulator) comes into question in the skill of going ahead of the rest before.The preferred embodiment of above-mentioned pixel switch is based on a kind of distortion of above-mentioned TIR switch.

The light beam that passes in above-mentioned pixel waveguide 1014 is imported output waveguide sections 1017 (after this being called as the reverberator waveguide) by above-mentioned pixel switch 1016 and arrives required location of pixels on the surface at above-mentioned substrate.Above-mentioned reverberator waveguide can be included in the waveguide on a bidimensional waveguide, a plane in the above-mentioned body substrate or the some short section or the long section of free space propagation segment.

Above-mentioned luminous energy (or light) is penetrated above-mentioned substrate surface subsequently and towards the observer, is used in the surface that is arranged on above-mentioned substrate or lip-deep a kind of optical reflection unit 1018 (after this being called as the on-plane surface reverberator).Above-mentioned nonplanar reverberator can be a kind of in many micro mirrors and the part of its function light that to be guiding before propagate among above-mentioned output waveguide is left above-mentioned planar waveguide.Passed a pixel that constitutes the information of leaving aforementioned display device to above-mentioned observer's light from each of these small reflectors 1018 with, and after this above-mentioned reverberator 1018 will be used with ' pixel ' speech.Among Figure 59, the inventor illustrates the pixel 1019 of conducting and the pixel of turn-offing simultaneously.The array of pixel is organized into a kind of arrangement of common row dative.Each pixel can address with the position of going with its row.This array of pixel constitutes above-mentioned display screen.

Light leaves after the surface of above-mentioned substrate, hit on the scattering screen 1026 of an optics, the scattering screen 1026 of optics is transformed into the light beam that more disperses to the light beam of propagating forward, and this light beam that more disperses has the distribution of angle of propagation (with respect to the normal direction of above-mentioned substrate) so that an observer to observe by a polar angle θ (with respect to the normal direction of above-mentioned substrate surface).If the light beam that occurs from above-mentioned display screen can distribute near the Lambertian angle, no matter then the position angle why, in from 0 to 90 ° total polar angle, it is same bright that above-mentioned display screen all will seem.Other angle is distributed can be used to reach different viewing angle specifications.Above-mentioned scattering screen 1026 can be made into a kind of optical element of separation.

The present invention starts above-mentioned distribution (or row) switch with a timing sequence and forms image with above-mentioned pixel (or capable) switch on aforementioned display device, so that the light of being launched by above-mentioned reverberator forms a kind of " scanning field scanning ", and the present invention produces the similar mode that electron beam is scanned in the cathode ray tube (CRT) of standard of mode of this scanning field.Above-mentioned distribution switch and above-mentioned pixel switch are coupled to a kind of generation device by a kind of electronic structure.This generation device can be and is enough to produce voltage to start any type of voltage generator of above-mentioned switch, for example DC electric power supply device, battery, a circuit (be called as and drive electronic unit).The electrode of above-mentioned distribution switch 1008 is linked some row switchs and is driven electronic unit 1010, and above-mentioned distribution switch 1008 is driven electronic unit 1010 by above-mentioned row switch and drives.Plurality of pixels electrode structure 1020 connects some row and drives electronic unit 1012, and above-mentioned pixel switch 1016 is driven electronic unit 1012 by above-mentioned row and drives.

In the scanning of above-mentioned scanning field, the present invention modulates the intensity of above-mentioned light source in regular turn and above-mentioned pixel is switched and started so that each pixel receives the intensity of corresponding its locus among above-mentioned image.Any all can be by standardized video (video) form as the example of the form of display message of the present invention.In the simplest structure, the position of above-mentioned active pixel 1019 (light is launched from these pixels) is scanned from left to right, each row so produce the information of framing from the top to bottom, and the inverse that scans the required time of whole location of pixels is called as " frame rate ".

Display of the present invention differs from the CRT monitor of standard, because the time that the light that comes from above-mentioned emission pixel continues is long not as the time that above-mentioned pixel switch is activated.To pixel format be 640 * 480 and its framing (frame) rate be the display of the high information capacity of 80Hz, be shorter than 50ns during this period of time.When the frame update rate is higher than 80Hz, eyes descend rapidly to the susceptibility of flash of light, even in the more sensitive part of the vision of periphery.

A kind of embodiment of the present invention is a kind of full-color display.Light source of the present invention comprises that 1000 are reached this effect with three kinds of intensity sources of different central wavelength (look) running.For reaching preferred effect, above-mentioned light source is based on diode laser to produce the light near 630nm, 530nm and 470nm.The propagation of the wavelength that waveguide 1006 and 1014 can be designed to support that these are different can be supported the propagation of the wavelength that these are different just as above-mentioned switch 1008 and 1016.The present invention increases a kind of characteristics and gives above-mentioned light source 1000, that is a kind of connection device enters a waveguide with the output of making up three kinds of laser, but so that their coverlet group waveguides subsequently and switch control.The details of the characteristics that increase below will be described.

Please note that above-mentioned laser enters the display of Figure 59 from the lower right, because a frame information is to be scanned from upper left the beginning.Among a frame information, the present invention scans independently row with a kind of sequence, and next the switch near laser is activated.The rise time of above-mentioned switch changes fast that direction of light enters new selecteed waveguide and the influence that is not subjected to stay any electric charge of last electrode.The advantage of this measure is not influence above-mentioned pixel rate the fall time of above-mentioned switch, allows fall time long through drawing the time of liter.Really, can cooperate from above-mentioned electrode a segment length fall time and recover energy so that power consumption is minimum.Because similar reason, the order of the stimulation of more above-mentioned row are identical (tending to above-mentioned laser).If above-mentioned fall time, the present invention can adopt the delay of scanning of a display to arrive their low-loss state to allow whole distribution switchs at the end of each row, allows light by first pixel at these row greater than the above-mentioned rise time.This delay should be the several times of the time of subduing of above-mentioned distribution parallel operation.Similarly, the present invention can adopt a kind of delay so that time enough to be provided above-mentioned pixel switch to be loosened at the end of this frame information.

Since the many different version that the inventor can use each element shown in Figure 59 to be constructing a kind of specific embodiment of display of the present invention, the inventor will describe the variation of these elements in detail and indicate which kind of variation can be selected with as the preferred embodiments of the present invention.B. light source

Any light source that can be linked a waveguide can be as supplying the used optical excitation device of display of the present invention.Above-mentioned light source can have any wavelength in visible light at spectrum, ultraviolet light, the infrared light district.The embodiment of single transmit district optical excitation device comprises the low capacity white heat and the fluorescence light source of laser, light emitting diode (LED) and the high brightness of any pattern.The embodiment of multiple emitter area light source comprise laser or LED array, be arranged in a line or be scattered in the white heat and the fluorescence light source of light range of distribution of two dimension.For several reasons, the employed solid-state laser of the preferred embodiments of the present invention is semiconductor diode laser light source (after this being called as " diode laser ").At first, a LASER Light Source can be connected to a waveguide and the highest efficient of any light source is arranged, and makes by this to control the required electronics of aforementioned display device and minimize.Secondly, above-mentioned diode-laser light source is a kind of effective converter that convertible electric energy becomes luminous energy, and the electricity needs of aforementioned display device is minimized.Three, the inventor makes above-mentioned diode with semiconductor processing techniques, therefore allows aforementioned display device and uses light source cheaply.

The visible diode laser in market can be created in the light of visible region medium wavelength greater than 620nm, and this diode laser can be used among the red monochrome display.In order to obtain a kind of full-color display, also need be at wavelength among the green district (near 530nm) and the wavelength (near 470nm) among the blue light district.Use nonlinear optical device (in present technique, being regarded a kind of frequency multiplier), just from the wavelength of infrared diode laser instrument acquisition among green district and blue region.The embodiment of above-mentioned frequency multiplier comprises the build nonlinear crystal, for example KDP, LiNbO ₃, KTP, LiTaO ₃, SBN and BaTiO ₃With nonlinear wave guide structure manufactured among above-mentioned build frequency multiplier crystal or use the nonlinear polymer waveguide that polarity is arranged.In a preferred embodiment of the invention, above-mentioned frequency multiplier is a kind of polarized structure regularly, and the material that is used to make regular polarized structure is the polarized material of periodicity of nonlinear optics, for example LiNbO ₃, KTP, LiTaO ₃, SBN, and BaTiO ₃Ferroelectric crystal.Since the substrate material of aforementioned display device can be made from these materials, aforementioned display device and frequency multiplier can be integrated into single wafer.

With this frequency multiplier (for example), the diode laser of 1060nm can be by frequency multiplication to obtain the green light of 530nm, and the diode laser of 940nm can be by frequency multiplication to obtain the blue light of 470nm.The efficient that shows above-mentioned multiplicative process in the laboratory surpasses 50%.The inventor can use this technology to obtain the required whole visible wavelength of display.

The diode solid-state laser can be regarded for the used light source of display of the present invention.The green diode laser of compact substance is visible on the market, and blue diode laser is demonstrated among the laboratory.The fibre laser that the frequency that comprises diode light-source is doubled, the diode YAG, the YLF that are doubled to up-conversion lasing, frequency and the main laser material of other the crystal that impurity is arranged.

Now, among there has been the laboratory in the direct visible solid-state semiconductor laser that operates among blue light and the green light district (made from the semiconductor material of for example zinc selenide (with the neon gallium)) and if its life-span is extended and these light sources become commercialized, then can become the preferred light source of display of the present invention.

Among the preferred embodiments of the present invention, above-mentioned laser and frequency multiplier are arranged on a slice substrate with displays separated.Subsequently, the inventor uses optical fiber to connect or docks and connects to connect this combination and the waveguide in display.The efficient of separating two each unit of combination lifting.Laser can be connected to wafer by butt joint or by upside-down mounting on above-mentioned wafer in the etched ditch.To be coupled be firm in butt joint, do not need extra element and with automatic alignment techniques be compatible.Among preferred embodiment, the degree of depth with among the waveguide tapering of width is used in above-mentioned frequency multiplier wafer (or above-mentioned diode laser wafer) so that above-mentioned zlasing mode size cooperates above-mentioned frequency multiplier waveguide dimensions to obtain preferred joint efficiency.Can obtain degree of depth tapering in frequency multiplier with two waveguide manufacturing steps.First step produces dark waveguide and tapering, and second step produces shallow waveguide (connecting above-mentioned tapering).By this way, above-mentioned laser can be connected to the waveguide of above-mentioned single-mode frequency multiplier effectively.As a kind of alternative, above-mentioned laser diode can directly be connected to identical substrate as aforementioned display device.This allows above-mentioned frequency multiplier, feedback stability element, wavelength colligator to be integrated among identical wafer with other element.If the efficient height, then above-mentioned direct connectivity scenario has cost advantage.C, modulator

The intensity that above-mentioned beam modulator 1002 can change above-mentioned laser shows to deal with forever fully to obtain a kind of frequency span.The above-mentioned frequency span of preferred effect that obtains is greater than above-mentioned picture element scan rate.This frequency span surpasses 25MHz to 640 * 480 pixel VGA displays that the 80Hz turnover rate is arranged.Said modulator preferably has ability many grey color range intensity levels of regenerating.Said modulator is preferably caught up with and is stated frequency multiplier and equally be fabricated on the identical wafer.

Known several different beam modulators can meet above requirement.First method is to modulate above-mentioned diode laser intensity with the electric current of the above-mentioned diode laser of modulation supply.Since above-mentioned diode laser gain spectrum also changes along with electric current, frequency change is followed such modulation.If above-mentioned diode laser is used to direct illumination aforementioned display device (as red AlGaInP diode), then such frequency change is not a problem, because eyes can't be felt such light.Yet if the output power of above-mentioned diode laser drives a frequency multiplication unit to make green or blue light beam, such frequency modulation (PFM) is exactly a problem, this is because become narrow (in about 100 the factor of 0.1nm, depending on the structure and the design parameter of frequency multiplier) of acceptance of multiplication efficiency curve of the function of laser frequency.In one situation of back, above-mentioned diode laser frequency of operation must be stabilized within the above-mentioned frequency multiplier acceptance scope, though needn't operate in the single-frequency pattern.(the multi-mode operation increases conversion efficiency really.) use outer grating to feed back (or in any this skill known additive method) in conjunction with the electrical feedback control loop, can to reach frequency stabilization.Use the method for diffusion in for example known worn-out etching of screen or the body that above-mentioned grating is incorporated in the above-mentioned waveguide.Above-mentioned grating centre frequency is the vibration of electrical-optical or heat, and uses a photodiode to monitor the intensity of the electric power that its frequency is doubled.In the frequency content of the photodiode signal of above-mentioned dither by as the error signal and be transfused to above-mentioned electronic feedback loop to control above-mentioned diode laser frequency.Above-mentioned laser frequency is cooperated in order to obtain the required optimal wavelength of effective frequency multiplication, produce visible light.Grating stable (returning to the abundant inhibition of the pseudoreflex of above-mentioned diode laser) might use the modulation technique that changes above-mentioned diode laser electric current in addition because in said frequencies by above-mentioned grating FEEDBACK CONTROL.Can the above-mentioned diode laser electric current of modulation be an important advantage, because this technology makes in above-mentioned laser power consumption reduce to minimum.

Second kind of modulator approach is to use known modulator design to make independently modulator (may among above-mentioned substrate 1028).It is the Mach-Zehnder interference modulator that the modulator design of standard has a kind of example.Be described as preceding any electrical-optical switch and also can be used as above-mentioned modulating equipment 1002.The preferred embodiments of the present invention use the internal reflection optics switch that is depicted among Figure 30 as said modulator, because it is closely knit, use and above-mentioned TIR switch 1008 and 1016 identical polarization skill, and its input intensity and voltage concern that no-float is to supply the grey contrast system of numerical digit.When above-mentioned output beam is the output that is reflected of above-mentioned switch, the grey color range of above-mentioned pixel almost has linear relationship with the input voltage of above-mentioned switch.D, light connection device

Above-mentioned smooth connection device 1004 is from above-mentioned light source 1000 and the light that comes is connected to above-mentioned distribution waveguide 1006.Known many different technology can be reached a kind of high joint efficiency.Some examples of the technology that these are known comprise that build lens light beam row, above-mentioned laser diode are connected with the fiber of above-mentioned lasing light emitter to above-mentioned substrate to the butt joint of aforesaid substrate 1028.Preferred embodiment is that fiber connects because it efficient and inexpensive and allow above-mentioned diode laser source 1000 and modulator 1002 manufactured independently with packing.Therefore, above-mentioned light source packing can be removed from substrate 1028, separately the tissue of limit efficiency and the tissue that limits the aforementioned display device panel efficiency when producing above-mentioned laser.The light output of above-mentioned light source 1000 enters a fiber output terminal to reach the connection of above-mentioned light source to the aforementioned display device panel.Use known standard techniques can connect above-mentioned fiber output terminal to above-mentioned distribution waveguide 1006.

Among the preferred embodiment of full-color version of the present invention, use a tri-color beam colligator (preferably be depicted in Figure 61 among the coupling device of being assisted) packaging together and be connected to a waveguide three lasing light emitters by grating.Above-mentioned light beam colligator is connected to identical waveguide 1044 to last 0 red laser beam of stating 1050, above-mentioned green laser beam 1052 with above-mentioned blue laser beam 1054, makes the light of having propagated among above-mentioned waveguide 1044 that minimum loss is only arranged simultaneously.This colligator is reached combined laser output 1056, fails 1056 through the laser of combination and is imported into above-mentioned waveguide 1006 subsequently.Above-mentioned red laser beam 1050 is linked above-mentioned waveguide 1044 from above-mentioned waveguide 1042, uses the temporary transient waveguide that is connected and fixed index, release of pressure or polarized grating 1056 and makes the propagation parameter of the input pattern 1050 in waveguide 1042 be engaged in the waveguide 1044 of red wavelength.Above-mentioned blue laser beam 1054 is linked above-mentioned waveguide 1044 from above-mentioned waveguide 1046, uses the temporary transient waveguide that is connected and fixed index, release of pressure or polarized grating 1058 and makes the propagation parameter of the input pattern 1056 in waveguide 1046 be engaged in the waveguide 1044 of blue wavelength.This be a kind of be used to efficient be combined in three power in the waveguide enter a waveguide known standard techniques and.This instructions is providing the further discussion of the parallel waveguide coupling device of being assisted by grating before with reference to Figure 10, above-mentioned parallel waveguide coupling device of being assisted by grating has a polarized grating.The frequency span of the coupling device of being assisted by the grating frequency span than the separation of three kinds of look wavelength usually is narrow a lot, consequently Be Controlled and the optimization independently of the power in each color beam.Above-mentioned coupling device of being assisted by grating is fit to three waveguide color beams are led in conjunction with entering same wave expeditiously.

The coupling device 1040 that above-mentioned three looks are assisted by grating is preferably caught up with to state and blue is implemented on the identical substrate chip with the frequency multiplier of green light source and the modulator of above-mentioned blueness and green light source.Identical wafer is all linked in these three diode laser sources.In addition, have another modulator and be placed in after the above-mentioned light beam colligator (also might on identical wafer), give three kinds of colors to supply bias voltage correction simultaneously.Bias voltage correction is that a kind of intensity modulated and must being used to compensates when stimulating different pixels by the different optical power downslide between above-mentioned colligator and each pixel that length caused of the wavelength that light beam stopped.E, substrate material

For display 1001 used substrates 1028 are a kind of solid-state materials, and this solid-state material anyly can be done very flatly and is enough to keep the electrical-optical active material of the photography etching permission of whole display screen area.Above-mentioned distribution (with pixel) waveguide and switch be fabricated among this sheet substrate material or on.Among preferred embodiment, above-mentioned electrical-optical TIR switch is formed by a kind of polarization process, so above-mentioned substrate or must be polarizable electrical-optical active material at above-mentioned on-chip thin film.Some examples of suitable electrical-optical active solid material are the wafer (LiNbO for example from the ferroelectric crystal of build ₃, KTP, LiTaO ₃, SBN, BaTiO ₃), the polarized electrical-optical polymkeric substance on suitable support material (for example glass or plastic cement), at the film of the ferroelectric crystalline material of suitable support material (for example be configured to allow single crystal film to grow up build crystallization substrate) (LiNbO for example ₃, KTP, LiTaO ₃).

The preferred embodiments of the present invention are used lithium niobate (LiNbO ₃) wafer 1028.LiNbO ₃When in stylobate, growing to 6 inches of diameters, it be good electrical-optical active material and in the whole major diameter crystalline material except silicon cost minimum.F, distribution and pixel waveguiding structure

Among the preferred embodiments of the present invention, single assigned waveguide 1006 connects whole pixel waveguides, distributes switch to be used to from distributing waveguide transmits light to the pixel waveguide.Generally speaking, a kind of coupling arrangement is that any light that makes arrives the method for pixel waveguide from distributing waveguide.Among other embodiment, the overabsorption waveguide can be used to form the bus-bar that distributes waveguide.The pixel waveguide is parallel to each other, occupies whole display area, and distributing between waveguide and the pixel waveguide has individual big angle (for example 90 °), and near one side of display screen.

Selected so that the above-mentioned waveguide support of waveguide parameter (width, the degree of depth and index variation Δ n) is for three kinds of single-modes that color is used.The shortest light beam wavelength (470nm) is only short by 25% than the longest light beam wavelength (630nm), so that waveguide can be selected to be supported in the used lowest order mode formula of three kinds of colors in the identical waveguide.The multi-mode waveguide also can be used, but the relevant higher radiation loss of these waveguides needs blurred background (flash of light) degree of higher power input and increase display screen.

The waveguide that is used among the present invention is fabricated among a kind of electrical-optical material, for example by substrate material as defined above.Among the preferred embodiments of the present invention, waveguide is manufactured on LiNbO with the annealing proton exchange process (APE) of standard ₃Among.Another kind of available at LiNbO ₃In the waveguide manufacture process be diffusion process in the titanium body.One of these waveguide manufacture processes or two can be used to make switch shown in Figure 30.Other substrate material can use known different waveguide manufacture process to obtain these materials.G, distribution switch

Distributing the major requirement of switch 1008 is when it is cut off, and it must have and is close to zero loss.This requirement is the application for display, because the light beam that is directed should not be subjected to any considerable loss when distributing switch by hundreds of, to transmit enough power to the last distribution switch among the distribution waveguide.The preferred embodiments of the present invention use TIR reflection switch and polarized waveguide part as shown in figure 30 to reach this requirement.Other main specifications is that above-mentioned distribution switch must bend light beam and allows in a little wafer size to make big display area to be close to 90 °.A switch that is close to flat micromirror reverberator (fixed mirror is otherwise known as) and Figure 30 of 90 ° is share, shown in the part of Figure 36, comprise input waveguide 984, switch 985, micro mirror 977, output waveguide 986 (asymmetric loss waveguide four-way piece 997 is optional in the simplest display architectures with waveguide 982 with extra switch 983).When TIR switch 985 is cut off, polarized part is transparent fully, and light beam is along distributing waveguide to move on.When voltage was placed in as 30 TIR switch electrode, light was sent to pixel waveguide 986 and low loss is only arranged from waveguide 984.Instructions is described the used manufacturing technology of preferred embodiment of micro mirror 977 in front with reference to Figure 36.

Other changing method formula can be used to that luminous energy is entered or leave waveguide and transmit between waveguide.The TIR switch of Figure 30-32 or Figure 34-36 or Figure 33,46 and 47 the ripple switch that is directed can be used.Fig. 7,12 and 13 grating switch also are available replacement schemes.Replacement scheme (for example electrical-optical switch of the non-polarized property of interdigital electrode) in the preceding case can be used to replace grating.Fig. 8, four switchs of 12 and 13 can be used among some special structure, for example the waveguide coupling device switch of the on-plane surface switch 168 of Fig. 9 or Figure 10 and 26-28.Fig. 2-6,14-17,19 and the reflection switch of 21-23 can share to instruct a catoptrical part to enter an output waveguide with the upstream shunt.Other handoff technique (handoff technique before being included in the case or the handoff technique of not invented as yet) also can be used, as long as these technology transfers distribute sizable part of the power of propagating among the waveguide (or a pixel waveguide) to enter a pixel waveguide (or a nonplanar reverberator) one.H, pixel switch

Pixel switch 1016 forms the array of a two dimension in flat-panel screens.The major requirement of pixel switch with distribute switch require similarity be it when being cut off, have to be close to zero loss.Therefore, the preferred embodiments of the present invention use switchable total internal reflection (before being discussed with reference to figure 30-32) to obtain required low loss running.This switch is used to obtain optical power and it is imported reverberator waveguide and on-plane surface reverberator from the pixel waveguide.A kind of alternative embodiment can use switchable grating reflector (before being discussed with reference to figure 7 and Fig. 8).I, on-plane surface reverberator

Therefore direction to any direction (comprising and surperficial rectangular component) that on-plane surface reverberator (also being called as the optical reflection apparatus) expression changes the propagation that comes light from above-mentioned surface also makes light leave the mechanism on above-mentioned surface.The primary element of on-plane surface reverberator comprises the light energy reflected border, it with rectangular plane, the path of light beam in the reflectivity uncontinuity is arranged.Above-mentioned on-plane surface reverberator also can comprise can scattering or the material of the wavelength of commutating optical beam.The example of above-mentioned on-plane surface reverberator comprises catoptron, scattering concave point and is connected grating and wavelength Conversion fluorescence object lens.

In order to make a light beam only produce low loss, can use an output waveguide 1017 (after this being called as the reverberator waveguide) from the pixel switch to the on-plane surface reverberator.Since above-mentioned waveguide is very shortly (to reach an adjacent pixel waveguide from a pixel waveguide at most.Above-mentioned reflector locations can preferably be changed so that the bias light that is reflected minimizes, and contrast ratio is minimized.If above-mentioned on-plane surface reverberator is near above-mentioned waveguide, they can produce " flash of light " or a background illumination facing to the bigger solid angle of the light that is scattered and in above-mentioned pixel, even in above-mentioned pixel during not by above-mentioned waveguide switched system assigned address.Minimum flash of light occurs in the mirror position midway of above-mentioned pixel waveguide, in this position, has been sent to below the degree of above-mentioned surface duct and above-mentioned reverberator by the major part of the light of above-mentioned waveguide scattering and enters above-mentioned substrate.In this position, two adjacent waveguides equate the contribution of above-mentioned flash of light.

Figure 62 to 67 shows several embodiment of above-mentioned on-plane surface reverberator 1018.Above-mentioned on-plane surface reflection is a kind of permanent structure; The pixel that is braked is selected by the two-dimensional array of above-mentioned pixel switch.Figure 62 describes the sectional view of a TIR on-plane surface reverberator 1100, and its output is by above-mentioned substrate.90 ° of deviation mirror 1108 reflection input beams 1110 become output beam 1104, the above-mentioned rear surface 1112 of directive by above-mentioned substrate 1101.Above-mentioned mirror 1108 can reach complete internal reflection or it can have a suitable reflective coating as a good reverberator.One deck scattering screen 1026 or fluorescence coating 1113 can be painted on the above-mentioned rear surface 1112.The pixel light beam 1110 that leaves above-mentioned pixel switch and be incident on above-mentioned deviation mirror is propagated in a reverberator waveguide 1017 or 1102.Above-mentioned waveguide makes above-mentioned light beam become two dimension to produce a light beam spot at above-mentioned deviation mirror (pattern of the above-mentioned waveguide that coincide).Among position around the above-mentioned deviation mirror, above-mentioned light beam must be by a waveguide restriction, and it can be limited among the slab guide (on the surface of above-mentioned crystal).Among the situation of 100% waveguide packed bulk density, permanent channel waveguide can not be formed.In this case, the inventor wishes to have the waveguide on a plane, or input beam 1110 can directly be propagated and not by the restriction of the waveguide between above-mentioned mesozone from above-mentioned polarized TIR switch.

Above-mentioned deviation mirror is preferably flat, above-mentioned input beam with 45 ° from above-mentioned mirror reflects, enter the meet at right angles substrate of orthogonal of surface with above-mentioned crystal.Above-mentioned reflected beams is dispersed to produce a luminous point on the bottom surface 1112 of above-mentioned substrate according to Gao Shi beam propagation principle.The luminous point of one 4 micron diameter in above-mentioned deviation mirror can produce the luminous point of one 36 micron diameter at the back side of the lithium columbate crystal of one deck 0.5 millimeters thick.

The preferred embodiments of the present invention are with the 1/e of each pixel ²The intensity light beam diameter overlaps on the scattering screen 1026.Can't reach this overlappingly if substrate 1100 is too thin, substrate 1100 may be arranged on the support material of printing opacity of suitable thickness to reach required overlapping.The example of above-mentioned support material comprises glass, plastic cement and silicon dioxide.Change a mode,, but suitable radius-of-curvature is arranged to expand above-mentioned 1/e if above-mentioned mirror surface 1108 is not flat ²Diameter becomes required size, or comes scattered beam to produce the luminous point of the required size of tool on above-mentioned curtain 1026 if above-mentioned folding mirror is originally penetrated enough roughness, then can form above-mentioned 1/e on the surface of the lithium niobate ²Spot definition overlapping.The bottom surface 1112 of another kind of embodiment is coated with one deck optical fluorescence or coat of colo(u)r 1113, and after stimulating fluorescence coating 1113, it can send required display color with on-plane surface reverberator transmission light in above-mentioned waveguide.For example, fluorescence coating is also removed the demand to the scattering screen that separates.

Can use many skill (comprising that laser ablation, active-ion-etch (RIE), active ion beam etching (RIBE), ion beam grind and Wet-type etching) to make the deviation mirror 1108 shown in Figure 62.What the inventor preferred is that Wet-type etching also will be at following description Wet-type etching.The inventor is passed to one deck chromium cover on the material of deviation mirror 1108 with the photography countermark technology of standard.The lithium niobate layer is subsequently by bubble several hours and temperature is about 80 ℃ among hydrofluorite.Please noting should the strict stirring that limits hydrofluorite in etched process.Low material in the bottom of etching concave point transmits the restriction etch-rate and very fast at the etch-rate at edge, because the etched ion at the edge has higher quality to transmit.Many materials have some good properties with along the natural plane etching, so if the minute surface that is bent aligns with one of these natural faces, will there be lower residual roughness on result's etched surface.

As the technology that substitutes, with above-mentioned sample simultaneously etched cover can control the slope of etch wall.Through the edge tilt of the characteristic that makes above-mentioned cover at above-mentioned mirror, among etching, relevant slope can be transferred to above-mentioned substrate.Change above-mentioned cover, etched composition and stirring rate, the controllable characteristics geometric configuration.

Use proton exchange or polarization can change the shape of the composition in etched interval being controlled each etching concave point.The inventor known in lithium niobate one by the etch-rate in the zone of proton exchange greater than not by the etch-rate of proton exchange crystal.Above-mentioned by the substrate of proton exchange through roasting, etch-rate is changed by the commutativity xsect with above-mentioned, so that etching process produces a kind of oblique surface.The inventor can revise the correct shape on this surface through the temperature of the amount of adjusting proton exchange and roasting.

Use pulse laser ablation also can form above-mentioned mirror.Above-mentioned substrate material is covered by one deck reflecting material (for example aluminium).By the angle between the surface of the laser that aimed at and above-mentioned substrate be 45 ° with through the skill facet that hides a bending of worn-out formation.Laser can form a little luminous point (once only containing a slice catoptron) or form a line (laser is once by an inswept row catoptron).Can be chosen in duration in the laser pulse each time and energy so that the roughness of above-mentioned dielectric surface material becomes minimum to produce a reflecting surface, afterwards, can be chosen in time among each laser pulse and energy so that the roughness of above-mentioned dielectric surface material becomes minimum to produce a catoptron, subsequently, hydrofluoric acid etch can be used so that above-mentioned mirror surface is smooth-going.

Can adopt similar mode, use active ion to grind or the reactive ion beam grinding, to form above-mentioned catoptron.Must remove a segment distance to the ion gun that is aimed at from above-mentioned sample, so that the angle between above-mentioned sample and the laser is 45 °.This etching pattern also forms coarse surface, and if necessary, the inventor can use hydrofluorite to make this uneven surface become smooth-going.The inventor can use the preferable control and the fastest manufacturing of any combination to obtain above-mentioned reverberator of above-mentioned technology.

Catoptron shown in Figure 62 and waveguide are preferably by light-transmittable layer 1106 protections of one deck low-index material (for example aluminium oxide).Above-mentioned material has enough low refractive index and makes above-mentioned catoptron all be enough to complete internal reflection to the angled channel width of the reflection of three kinds of colors of aforementioned display device.Be the lithium niobate substrate that oxidized aluminium covers, incident angle all can produce complete internal reflection greater than 36 ° light.If above-mentioned surperficial 1108 is not a TIR reverberator, it can be the height reflection of conventional art.

Figure 63 presents a kind of alternate embodiment of on-plane surface reverberator, wherein the concave point scattering of light quilt among above-mentioned crystal of propagating among the waveguide 1102.Scattering concave point 1116 is in conjunction with the function of above-mentioned catoptron and scattering screen.Among this embodiment, the light that comes from each pixel is dispersed among the above-mentioned substrate and leaves the opposing face of above-mentioned crystal.Among preferred embodiment, the normal direction cone angle 1114 of the light that is scattered can not surpass above-mentioned 36 ° TIR angle, so that the major part of above-mentioned light is left above-mentioned substrate and the directive observer.Above-mentioned face below can by layer overlay not reflecting material to reduce the optical energy loss that produces because of reflection.

Among preferred embodiment, the Wet-type etching process that is stirred forms above-mentioned scattering concave point 1116.The scattering concave point is 45 ° at its edge, and the angle when consequently the above-mentioned light beam that is directed 1110 is scattered between its middle surface that is scattered angle and above-mentioned substrate is 90 °.Must adjust to preferred situation to the convexity of the above-mentioned concave point in the plane that comprises above-mentioned waveguide and surface-normal to obtain the preferable range at the visual angle beyond above-mentioned substrate.Since above-mentioned concave point is the circular or oval-shaped concave point in the surface of above-mentioned substrate, also among the plane vertical, dispersed with the plane of above-mentioned part from the light that the side of above-mentioned waveguide 1102 is scattered.The curvature of the concave point in the surface of above-mentioned substrate can be adjusted and irrelevant above-mentioned convexity, and obtaining by this is foursquare pixel region haply.If above-mentioned concave point surface is coarse, the extra emission that above-mentioned scattering of light caused reduces above-mentioned two preferred curvature.Since the required cone angle 1114 of the above-mentioned light that is scattered is big, then can make the surperficial chap of above-mentioned concave point through the above-mentioned etching process that is stirred (or through improving etched temperature), form the required reflecting surface of dispersing by this.As a kind of alternative, the inventor can use laser or ion beam to ablate and make above-mentioned concave point.A kind of additional absorption layer 1168 is placed in the substrate back and improves contrast ratio to absorb low glancing incidence bias light.1168 pairs of normal incident beams 1104 of above-mentioned absorption layer or 1114 absorption be lower than 50% so that can not bring too high brightness.

Figure 64 describes the another kind of embodiment of above-mentioned on-plane surface reverberator, and among this embodiment, above-mentioned input beam is reflected onto outside the end face of above-mentioned crystal.Mirror 1126 is made of a reflector structure, and this reflector structure comprises flat 45 ° of skew walls and the vertical wall of one side, this two face the wall and meditate between, material is removed from substrate.Input beam 1110 enters above-mentioned reflector structure and propagates at vertical interface 1122 and strides across above-mentioned reflector structure and leave above-mentioned reflector structure from 45 ° of skew walls reflections.The end face of reflected beams 1124 by above-mentioned substrate is with the above-mentioned scattering screen that throws light on.It is identical to make the method that all methods of this reflector structure can be used with making the structure shown in Figure 62.For the reflection that makes surface 1126 has preferred effect, surface 1126 can be by layer overlay reflective coating, for example aluminium.Should supply this layer reflective coating with angle 1121, so that surface 1122 is hidden us and is not therefore spread reflective coating less than 90 °.Among preferred embodiment, normal plane 1122 should be spread not reflecting material, in order to reach this purpose, can keep substrate 1100 to be in an angle so that exposing surface 1122 in the process of implementing coating.

At last, sample is by layer overlay photic zone 1106, for example silicon dioxide or aluminium oxide.Surface 1126 may be coarse with/or crooked to strengthen dispersing of the light that penetrated from this part.

Figure 65 illustrates that direct light leaves the embodiment on the plane of above-mentioned crystal, and therein, a scattering concave point direct light is left the end face of above-mentioned crystal.As in the situation shown in Figure 64, input beam 1110 penetrates a vertical interface and enters reflector structure and scattering and leave the scattering interface of the bending on above-mentioned etched regional opposition side.The light beam 1134 that is scattered (running through any coating 1106) preferably has Lambertian and distributes so that the full cone of 2 π sterad to be provided.Is identical to the requirement of the incident angle of light beam and the shape of curvature with requirement to the light that enters the concave point of scattering shown in Figure 63.

Figure 66 describes a kind of alternative embodiment that the pixel switch 1016 shown in Figure 59 combines with scattering concave point 1018.In such an embodiment, the variable intensity light source described with reference to Figure 50 and 51 of this instructions is used to make a kind of light emission pixel.Go into Zone switched 1420 (or 1400) of pixel at the light beam 1406 that waveguide 1402 (with pixel waveguide 1014 equities in Figure 59) is propagated, pixel 1420 (or 1400) in Figure 66 and pixel switch 1016 equities in Figure 59.If the voltage of supply Zone switched 1420 is closed, then above-mentioned light beam is output waveguide 1408 guiding.Then, it is Zone switched that output beam 1410 propagates into next pixel.When above-mentioned voltage is activated, the waveguide of the two dimension in Zone switched 1148 is destroyed and above-mentioned as previously mentioned light beam is propagated in the waveguide 1409 on plane.Shown among Figure 66 1441, above-mentioned light beam is expansion freely in one dimension.In Zone switched 1148 best propagation distance, above-mentioned beam diameter is expanded to and is enough to make above-mentioned light beam to have considerable part to be blazed abroad via scattering concave point 1018 and arrives the observer.These scattering concave points can be as this explanation any in the described concave point shape of above cooperation Figure 63-65.Figure 66 describes to make efficient to reach two maximum scattering concave points 1018.This embodiment can work and its cost is to lower efficiency to become original half with single scattering concave point.

To a requirement of this switching structure be between the limit of above-mentioned waveguide and above-mentioned scattering concave point distance even as big as make output beam 1410 be not subjected to considerable scattering loss evil and simultaneously by scattering concave point 1018.The efficient that this requires to set up minimum packed bulk density and limits this embodiment.Since less duct width can make the diffraction angle θ of light beam 1411 bigger,, can increase the density of above-mentioned bag by dwindling the width of waveguide 1402.

Above-mentioned etching concave point also can be occupied by a fluorescent target device.Any material, solid or liquid are as long as it can increase the density of above-mentioned bag from one or more photon of optical excitation device beam absorption and with the width of identical or different waveguides 1402.

Above-mentioned etching concave point also can be occupied by a fluorescent target device.Any material, solid or liquid, as long as it can launch luminous energy again from one or more photon of optical excitation device beam absorption and with identical or different wavelength, all can be as the fluorescent target device.For three look displays, each color may be created within the fluorescent targets different in the different etching concave points.Preferably in a kind of system, use the single wavelength of illumination to excite whole fluorescent targets.The fluorescent target that comprises the etching concave point has optical configuration so that the major part of above-mentioned incident beam absorbed by above-mentioned fluorescent target, and above-mentioned input beam take advantage of surplus part not from above-mentioned concave point reflection or towards the observer.The restriction and the structure and the roughness of fluorescent target concave point to scattering concave point curvature and roughness discussed above is irrelevant.In a preferred embodiment, a reverberator quilt also is used in above-mentioned fluorophor back and the outlying observation person, so that fluorescence is backward arrived the observer by retro-reflection.

Direct illumination and fluorescent target device also can be used to produce above-mentioned three look displays.For example, a kind of fluorescent target can be excited (for example blue light) to produce red light or blue light by a kind of coloured light.Therefore, blue light can directly be shown (using one of non-planar mirror shown in Figure 62 to 67) with other two kinds of coloured light that form in two fluorophor.Change kind of a mode, when a fluorophor by blue light or red light or the beam excitation of the third frequency is arranged and produce green beam, red beam and blue light beam directly are shown.

A kind of alternate embodiment of the present invention is included in using to up-conversion fluorescence body target material or to up-conversion of above-mentioned location of pixels.Infrared ray is transmitted and switches and arrive above-mentioned location of pixels by waveguide of the present invention, these location of pixels coat or the filling wavelength to up-conversion, be referred to herein as upwards conversion medium or to upconverter.Above-mentionedly comprise the standard fluorescence body to up-conversion, for example crystal is the glass of main rare earths ion, sulfur oxide, dyestuff and interpolation rare earth.These media see through direct excitation infrared ray are converted to visible light, use single or multi-wavelength, by absorbing two or more infrared ray photons.In low-intensity, therefore the intensity that is launched be proportional to the quadratic power or the higher power of laser intensity.At above-mentioned fluorophor (being higher than several watts/square centimeters usually) when saturated, the intensity of pixel may directly be directly proportional with laser power.Fluorophor (the Yb in nucleus for example ³⁺-Er ³⁺, Yb ³⁺-Ho ³⁺, Yb ³⁺-Tm ³⁺) be upwards some embodiment of conversion plan that can produce blue light, green light and red light with infrared ray.It is found that infrared ray in these fluorophor-to-visible light conversion efficiency surpass 10% and motivated frequency bands overlapping well with infrared laser diode wavelength on the market.As mentioned above, above-mentioned excitation beam can be spatially and/or is temporarily doubled to assemble on above-mentioned pixel.

In the present invention, infrared ray is directed to wherein the upwards specific pixel location of conversion medium.The coating technology (for example spin coating or sputter) that can use standard and appearance technology (for example hiding worn-out etching) are to settle above-mentioned upwards conversion medium.In an embodiment of the present invention, infrared ray is transferred into location of pixels by waveguide.At this, (above-mentioned upwards conversion medium is placed in these zones, and light intensity is the highest in these zones in some zones or recess in above-mentioned waveguide end.These zones or recess can be subjected to coating revising surface reflection, thereby improve the guiding of the exciting light that enters above-mentioned fluorophor and change the emission angle that leaves from above-mentioned fluorophor.Alternatively, the on-plane surface reverberator can be used to reflect the etched or not etched surface of the above-mentioned infrared ray that is directed to aforementioned display device, be made into a continuity point or uniform outer surface layer at this above-mentioned fluorophor, its Pixel Dimensions quilt is in the size decision of the infrared beams that is refracted on above-mentioned surface.For whole embodiment, can increase an opaque coating with the non-pixel region of filling to determine pixel region better and to eliminate infrared ray and the visible light backscatter.

Need two or more photons to produce visible light to upconverter, and because above-mentioned exciting light is limited in certain location of pixels at most, and the above-mentioned light intensity maximum that excites in this location of pixels, suppressed from visible light backscatter and switch cost that above-mentioned waveguide is left powerfully, caused the high correlative value of display.Since in these media, excite degree quite high, need any wavelength stabilized laser.Because the above-mentioned upwards illumination of conversion medium is incoherent, so the problem relevant with LASER SPECKLE also is eliminated.The guiding infrared ray is that most electrical-optical active material has higher damage critical value and so visible wide infra-red intensity of tolerable ratio near infrared ray by the relevant advantage of waveguide.

One or more plant fluorophor and pigment can be used in the aforementioned display device to produce monochrome display or color monitor.Laser excitation can cooperate the single wavelength light beam or cooperate many laser to work with optical maser wavelength.Single fluorophor can be launched multicolour, and this depends on intensity, time and the wavelength of the light beam that excites it.Therefore according to the cross products intensity of injecting the pixel that comprises this fluorophor, can select to comprise the color of pixel of this fluorophor.For example, if one upwards conversion medium sent blue light from the exciting of two IR photons of light beam 1 and sent green light from the exciting of photon of light beam 1 and 2 respectively, then above-mentioned blue light intensity and green light intensity are proportional to I respectively ₁ ²With I ₁* I ₂, I wherein ₁With I ₂Be respectively the intensity of light beam 1 and light beam 2.This mode can be eliminated the needs of inventor to frequency multiplier, directly produces ruddiness from red (AlGaInp) diode laser.

In whole display embodiments, above-mentioned excitation laser can be continuous wave (CW) or pulse, as long as pulse repetition rate is the multiple (or pulse repetition rate is high more a lot of than pixel switching rate) of above-mentioned pixel switching rate.Yet, use pulse laser aspect conversion efficiency, advantage to be arranged with the nonlinear fluorophor that is excited.Pulse excitation also allows further temporary transient control pixel intensity and color.Fluorophor has intermediate level, and these energy levels can be kept several microseconds after the beginning one-photon excitation, therefore allows regularly multipath transmission with control pixel radiance.In the fluorescence excitation scheme, originally the energy level that is produced by one or more infrared ray photon can directly be thus lifted to higher energy level, this higher energy level can be launched (or relaxing and emission) visible light subsequently, or they can relax to lower energy level after initially exciting and then are provoked into other energy level (this energy level with different wavelength emission, or relax and emission).Pulse excitation also allows higher peak power to enter saturatedly to drive above-mentioned media, relaxes signal-to the processing requirements of-light by this.

Only use the color monitor of this fluorophor target to need multiple single fluorophor target or multiple laser and the fluorophor target that excites with emission wavelength of at least a laser and a plurality of fluorophor targets of tool different emission, multiple laser and tool.A plurality of fluorophor targets in the color monitor square formation can be combined into single position and controlled by single waveguide or be divided into adjacent areas and respectively by different waveguide control with form in conjunction with after single pixel element.

In preferred embodiment, be that three kinds of primary colors use a kind of laser to excite a kind of fluorophor respectively based on the color monitor of fluorescent target.Waveguide and switching construction can make above-mentioned three kinds of optical maser wavelengths arbitraryly sees through the branch ligand array that separates and arrives their fluorescence pixel target, but this effective packing that causes is put effective packed bulk density that density is monochrome display.Preferable methods is to distribute multiple optical maser wavelength and selection only by a kind of wavelength or red to produce, blue, the green light of a kind of wavelength combinations excited fluorescent body by identical branch ligand array.Above-mentioned laser can be combined into single wavelength by the beam synthesis shown in Figure 61 or be gone in the shared circuit by TIR switch shown in Figure 30 multiplication in time.

Figure 67 describes the another kind of alternate embodiment of above-mentioned on-plane surface reverberator.In this embodiment, an on-plane surface coupling device 1146 is used to make the direction of pixel light beam 1144 haply perpendicular to above-mentioned substrate surface.Monotype input waveguide 1102 can have adiabatic expansion 1142 and it is coupled multi-mode waveguide 1143, wherein only has the lowest order mode formula to be excited.Be placed in permanent grating 1146 on the above-mentioned multi-mode waveguide by phase matching so that light scattering and perpendicular to the surface of above-mentioned crystal.Above-mentioned grating is the optical grating construction that reflects, and wherein utilizes any known method, and in the core or top layer of above-mentioned waveguide, manufacturing is reflected the refractive index of discontinuous situation formula and produced above-mentioned grating.For example, can pass through the tangible ion implantation process in above-mentioned waveguide core or top layer, or pass through arrangement, form the uncontinuity of reflection coefficient as the tangible dielectric structure on above-mentioned top layer.If excite above-mentioned multi-mode waveguide with many spatial models, the cycle of above-mentioned grating can prolong its length and be adjusted to allow the most phase matching to above-mentioned pattern, improves being coupled efficient by this.The intensity of above-mentioned grating can change along its length, so that the intensity of the light beam that is scattered can be adjusted to a kind of required form.

Can make above-mentioned grating by the surface of the above-mentioned substrate of etching or the top layer of waveguide, in this case, the inventor can obtain variable grating intensity by change the degree of depth of etched ditch modulation along grating length.The inventor can obtain above-mentioned requirements by the duty cycle that change strides across the mask in each cycle of above-mentioned grating.The Wet-type etching that above-mentioned etching preferably is not stirred is so that low-qualityer transmission causes more shallow etching in narrower zone.In addition, the selected length that cooperates above-mentioned grating of the width of multi-mode waveguide, so that it is identical in two kinds of sizes substantially with divergence to be left the size of light beam of above-mentioned grating by diffraction.As described above, a scattering screen can be placed in from one section required distance of above-mentioned on-plane surface grating mirror, produces required the dispersing of above-mentioned illumination.Above-mentioned grating preferably has the made protective seam of transparent material 1106 (for example silicon dioxide).For making above-mentioned grating, the inventor can be with direct writing technology (for example full figure photography or e-light beam lithography) with the above-mentioned substrate of mask.

In order to reduce flash of light and to increase the display contrast ratio, can use refractor or absorber.Light refraction device or absorber can be placed in above-mentioned on-plane surface reverberator and enclose with the refraction bias light, otherwise bias light can get on the above-mentioned reverberator and cause flash of light, reduce contrast ratio.Each refractor or absorber have all been done to optimize and have been arranged, so that it covers an on-plane surface reverberator at least.Since the main source of above-mentioned background light is the leakage of waveguide, many bias lights are propagated with identical direction with the light in pixel waveguide 1014.Therefore above-mentioned refractor or absorber are arranged at the upstream of the main direction of propagation of above-mentioned background light at least, to be blocked to above-mentioned major part backlight.The pixel region 1151 that Figure 68 presented has an optical refraction device or absorber 1153, and light refraction device or absorber 1153 surround an end of non-planar mirror structure 1152 and its reverberator waveguide 1149.As mentioned above, the light in pixel waveguide 1147 is switched and enters reverberator waveguide 1149 in pixel Zone switched 1148.Refractor or absorber areas 1153 are dark in being enough to cover whole on-plane surface reflector region 1152.If it is the absorber layer, the absorbability of above-mentioned absorber and thickness are adjusted so that the wide amplitude fading that advances towards above-mentioned on-plane surface reverberator.The design of above-mentioned refractor and absorber relies on the direction of above-mentioned on-plane surface reverberator, does not enter the image direction because they should not reflect above-mentioned background light.Above-mentioned refractor is designed to leave above-mentioned image with opposite direction refracted ray.

Figure 69 describes a kind of light refraction device 1157, and its refraction above-mentioned background light leaves the surface of equipment 1155.In this example, nonplanar reverberator 1152 is arranged at an orientation to guide above-mentioned image light by the substrate shown in Figure 62 and 63.Refractor 1157 similar Figure 64 and 65 on-plane surface reverberators of being described 1130 or 1140 design.Preferably reduce to minimum from the refraction of the vertical plane 1154 of above-mentioned refractor, because the flash of light of the pixel one of very much all can causing of being reflected of bias light 1156 any before any.Curved surface 1158 be coated with coating with reflection also/or absorb to see through the light of above-mentioned vertical plane.By this way, there is not the penetrable refractor 1157 of any light.It is darker and wide by refraction of optical beam device 1157 is made than on-plane surface reverberator 1152, and, the flash of light on adjacent pixels is minimized by above-mentioned reverberator being placed on (but can not too closely disturb of the illumination of the above-mentioned display light beam that is switched) in its shade to above-mentioned reverberator.Light non-transmittable layers 1168 is laid down on the back of above-mentioned substrate to reduce the bias light of propagating in this substrate.Because its short path length, display light beam 1114 only part are absorbed in light non-transmittable layers 1168, therefore, above-mentioned background light (oblique propagation) is the powerful absorption of quilt in by the longer path of above-mentioned absorber.

Figure 70 is the sectional view of a light refraction device 1161, and light refraction device 1161 reflects the above-mentioned background light and the substrate of access arrangement 1163.When on-plane surface reverberator 1152 is arranged at an orientation and leaves equipment 1163 surperficial with guiding image light 1124, can use this structure.Refractor 1161 similar Figure 64 and 65 on-plane surface reverberators of being described 1100 and 1120 design.Once more, on-plane surface reverberator 1152 is placed in the shade 1159 of refractor 1161, and can use a rear surface absorption layer.

Figure 71 describes a section 1167 of an optical absorber 1166 (being placed in the upstream of an on-plane surface reverberator 1152).Whole optical density (OD)s of above-mentioned absorber and length must be high enough to reduce significantly the intensity by any light wave of above-mentioned absorber.Above-mentioned absorber should hang down to avoid in above-mentioned complete substrate and the reflection on the interface between the above-mentioned absorber areas with respect to the change in refraction rate of above-mentioned substrate.The direction of the input face by making above-mentioned absorber areas is complied with the direction reflection away from direction of display and other pixel orientation, and the inventor can minimize the effect of residual reflection.

In the mode that spreads in the body a kind of absorbing material (for example chromium) is placed on required zone, or the close material of any light is put into above-mentioned refractor/muffler body (being made in above-mentioned substrate surface), can make above-mentioned absorber layer.

Light refraction device or absorber can be placed between above-mentioned distribution waveguide and the above-mentioned pel array.Above-mentioned refractor/absorber should be staggered with above-mentioned pixel waveguide, so that they stay some gaps, and the bias light that is produced by above-mentioned distribution waveguide can pass through these gaps.Be tilted an obtuse angle to above-mentioned distribution waveguide yet these refractor/absorbers are arbitrary, so that their shade overlaps each other and does not have the gap.Remainder by the bias light of above-mentioned distribution waveguide generation impacts its back or distally by the substrate of staring at this.Can be configured in the absorber plane of back so that the bias light of oblique propagation can effectively be eliminated.The far lateral side of above-mentioned substrate can be coated with not reflecting material (and/or absorbing material), so that above-mentioned background light is absorbed from above-mentioned substrate, is effectively caught and absorbs at this bias light.

The part of the light that spills from above-mentioned waveguide returns to cause the flash of light problem from opposition side 1112 bounce-backs of above-mentioned substrate.Do not using face 1112 as scattering layer or be coated with among the embodiment of light contact layer of one deck fluorescence or pigment, to glisten be favourable to supply one deck absorbing coating to reduce to this surface.Figure 63,64,65,69 and 70 describes such absorption layer 1168.It must be low so that the reflection of leaving from above-mentioned interface minimizes that yet the relevant coefficient of above-mentioned coating changes.Further, when display direction is to pass above-mentioned substrate, above-mentioned display light should not decayed in a large number.In the back of above-mentioned substrate, use diffused chromium layer in a kind of body, can reach this three purposes simultaneously.Above-mentioned chromium body diffused layer can be absorbed in the light in the whole visible region powerfully and very little spectrum change is only arranged in its absorption intensity.If at first the 8 microns chromium layers of being spread 10% weight, 6% light is greatly slightly lost in the absorption of display light in whole visible light in the mode that spreads in the body for the bottom of above-mentioned lithium niobate substrate, this loss is very little, can be left in the basket.Yet above-mentioned background light (propagating in 3 ° of wafer plane) is by about 300 microns absorber and be attenuated about 90%.The manufacturing of required chromium layer need be in the evaporation of the chromium of the about 500nm on the above-mentioned back side, then with about 1100 ℃ roasting about 30 minutes.Can change these numerals at either side with two or three according to the compensation adjustment in other Fabrication parameter.

At last,, be drawn out of, just wish to coat complete opaque material (losing on the padded coaming), only stay opening at above-mentioned on-plane surface reverberator low on the full wafer surface from the surface of above-mentioned substrate if display light is shown in Figure 64,65 and 67.The advantage of this measure is (for example waveguide and switch) to eliminate flash of light from the zone between the above-mentioned reverberator.J, electrode

Figure 72 describes the synoptic diagram for the used pixel electrode structure of the preferred embodiments of the invention.Each electrode 1164 is made up of a plurality of pixel portions branch, the electrode 922 that the similar Figure 34 of each pixel portion is described, and these pixel portion all are coupled in the array, and this array stops waveguide 1014 or 1162.In Figure 72, above-mentioned array is that linear row and many electrodes are become closer to each other to form a square formation of exciting electrode by cloth.Each pixel electrode is arranged on the polarization border that forms a TIR interface and on a waveguide that is switched partly.In addition, each electrode extends beyond above-mentioned polarization border and enters a part that is extended that can form for the second used electrode of adjacent pixels.Above-mentioned polarized zone, above-mentioned reverberator waveguide and above-mentioned on-plane surface reverberator all are not depicted among Figure 72.Pair of electrodes is used to be activated at the whole TIR reverberators in the delegation.The major part of above-mentioned reverberator can be grounded and only stay the next one to be received on the driving voltage an appointed time, in this case, and the electrode that is excited and two adjacent electrodes decision electric fields.This electrode has a kind of irregular structure, so that the electric all UNICOM of switch in single row and adjacent electrode does not intersect.

The ground plate that a slice reduces RF is added in the generation of the radiowave that comes in order to reduce from the electrode on above-mentioned panel surface.In order to achieve this end, the processed surface of above-mentioned substrate is coated with one deck barrier material of high conductive capability.If above-mentioned on-plane surface reverberator instructs above-mentioned light to leave the end face of above-mentioned substrate, then above-mentioned barrier material must also be printing opacity or porose in the position of above-mentioned on-plane surface reverberator.Above-mentioned barrier material can be made into than between the above-mentioned electrode every thinner to reduce electric capacity and to be coated with layer of conductive material, this layer conductive material forms a ground plane.As another kind of alternative, above-mentioned conductive material can be printing opacity, for example indium-Xi-oxide.The control of K, electronics

Electronic component through particular design will be used to drive aforementioned display device.The needed electronic component of the preferred embodiments of the invention is classified into four groups: (1) laser diode drive and luminous power control, (2) modulator, (3) waveguide guiding electronic component and (4) central controller.

Above-mentioned laser diode drive is responsible for the output of red, green, blue color light source and keeps a constant level.If above-mentioned laser itself is modulated, the constant level of power is illustrated in the power level of specific gray scale in exciting.The inventor needs about two volts voltage starting above-mentioned semiconductor diode laser, and required electric current relies on required output power, and it is a function of the size and the illumination intensity of above-mentioned display screen.Photodiode is used to measure at the power of whole three diode laser wavelength (and any by the wavelength of frequency multiplication) with any vital point (for example after the wavelength-modulated device in integral body).Above-mentioned control electronic component will be taked the peak power output of above-mentioned diode laser termly and adjust above-mentioned maximum supply of current is not subjected to any aging effect slowly with the output power of keeping them influence.Because must make the power measurement unanimity in the work of aforementioned display device, so above-mentioned functions is by above-mentioned central controller transmission (and may really be done in above-mentioned central controller).Above-mentioned laser driver is the optical frequency of the above-mentioned diode laser of may command (relevant with their acceptance of frequency multiplier) also.If the laser frequency of above-mentioned frequency multiplier or central frequency drift, the central wavelength of then above-mentioned feedback grating is done the adjustment relevant with the central wavelength of this frequency multiplier, till the power that the quilt of maximum doubles is optimum.If above-mentioned laser is that relative frequency can be controlled by a backfeed loop with a kind of continuous not modulated current drives.If above-mentioned laser power is modulated, the said frequencies controller will be more complicated, the inapparent interference modulation because finishing the said frequencies induction.In the example of back, frequency control is preferably in " extremely " time be done (when laser is not shown, for example between the continuous line or frame of display screen).When wanting, adjust the whole electric currents that enter three laser diodes with dimmer control less than peaked brightness.In addition, if be not preferred in the ratio of the power of different wavelength, above-mentioned laser diode can be controlled and the second backfeed loop adjustment by a kind of concentration and colourity relative to each other.

Three modulators (modulator is handled a kind of display) are controlled at power and color in the whole pixels that stride across aforementioned display device.The optimum configuration of these modulators is that a modulator is mixed a color channel.Since it is from a key decision that the preferred embodiments of the invention make each required voltage of electrical-optical modulator (technology of Figure 30) of apparatus non-linear voltage-reflectivity relation.Since yet above-mentioned voltage-reflectivity closes the major part grey color range intensity of convergence coefficient all in the scope that ties up to it, said modulator provides a kind of relation of several near-linears between voltage and grey degree.The continuous pixels of aforementioned display device is scanned, and each color modulation device provides suitable intensity to arrive its colour component in each pixel simultaneously.In a preferred embodiment of the invention, also have the 3rd modulator, this 3rd modulator is called as bias modulator and modulates the intensity of three combined coloured light.The purpose of above-mentioned bias modulator is the loss of length of the variation of the waveguide of compensation between laser and pixel.Can be according to key compensation information (getting) to obtain the 3rd modulator from the waveguide length mutation analysis.Also can be from the measurement of an appointed productive unit is derived above-mentioned key data to allow because symmetry compensation of the scrambling of the loss that produces with asymmetric effect (shortcoming that comprises optics).Alternatively, can finish above-mentioned bias voltage modulation at the separate modulation device above-mentioned three kinds of color channel every kind of color channel of (separating), or in above-mentioned colors of image modulator, combine with above-mentioned image modulator from above-mentioned image modulator.

Above-mentioned waveguide guiding electronic component is controlled above-mentioned switch execution sequence.The light of propagating in above-mentioned distribution waveguide with the pixel rate of the used 24.6MHz of the simple VGA structure with 80Hz frame rate, is switched in above-mentioned pixel (OK) waveguide one by one.Column electrode decision which pixel when scan columns that is activated is illuminated.The switching of row is relatively slow, is approximately 38.4KHZ for simple VGA structure.Because the electric capacity of short branch distribution electrode is far below long pixel electrode, above-mentioned dispensing controller is selected to be switched with the speed of steepest, makes the required drive current of aforementioned display device reduce to minimum.Why Here it is preferably switches above-mentioned grid with the distribution electrode.Higher capacitance pixel column electrode is with low rate work.Two kinds of used switching sequences of control are preferably continuous, though also can realize substituting line scanning with similar control.

Above-mentioned central controller preferably has microprocessing capability and is responsible for coordinating the function of above-mentioned electronic component modulus.It preferably has control line, so that identical electronic component modulus can be used for showing different forms, for example VGA (640 * 480), 800 * 600,1024 * 768,1600 * 1288, HDTV, or the like.If the quantity of pixel is not energized in extraneous pixel less than the quantity that is embodied in the pixel in the particular display.Along with higher pixel is calculated the display device listing, identical electronic driver still can be used to drive them, pinions several input control lines at most.L, diffusion type screen

Fan diffuser 1026 is to disperse the surface, can make screen that the preferred large stereo visual angle of 2 π radians is arranged.Minute surface on-plane surface reverberator beam reflected promptly is separated from the surface that comprises reverberator in Figure 62, is separated into it always and arrives at till the fan diffuser 1026.Its degree of separating is decided by the distance of pixel, and promptly neighbor must be overlapping more than 30 percent, so forms continuous image.This diffusing surface can be the rear surface 1112 that comprises waveguide substrate, or a kind of separate substance is as placing or be fitted in on-chip silicon diode.The screen surface roughening is to form the discrete particles of size distribution, and distribution should reach required angle diffusion and distribute.

Shown in Figure 63, in a preferred embodiment, the on-plane surface reverberator is the non-specular surface decollator, but not the array 1116 of plane reflector constitutes screen.So, then the diffusion type screen is also nonessential.1116 constitute pixel in this case, and light generally is dispersed in the perspective view of 2 π radians in lambert's strength range.

Using hope for some narrows solid angle to the display light heading line off.For a given display light luminous energy, when the angular regions that comprises from display was watched, concentrated luminous energy can improve brightness.For instance, when needs are preserved battery luminous energy, keeping brightness to reduce Laser Driven luminous energy with the display solid angle that narrows, is a kind of useful makeshift.M, control speckle

Speckle is a kind of observable phenomenon, self-diffusion surface reflection or propagation and make in the space laser that links up form a kind of fine grain image.Make the laser disc of the even illumination of a laser speckle of bright dark areas occur because interfere, the size of indivedual speckles is big because of little Pixel Dimensions than pupil in this display, with regard to perfection links up, when observer's moving-head, pixel changes randomly, and each pixel has the independent speckle group of itself can produce the hundred-percent modulation of pixel.Such visual experience is a kind of display of distortion, watches uncomfortablely, and existing several known systems can be eliminated the speckle phenomenon, and its most of technology is that the speckle group is moved to homogenising in the space.

Have several modes can eliminate the impact of speckle on consciousness, at first, if laser is with the pattern work of single length frequency, Wavelength of Laser can be less than 50 milliseconds and change speckles down and penetrate the ratios that surpass a speckle district and scan it by a kind of.Secondly, laser can multiple length frequency the pattern operation, each length pattern produces different speckles when other length patterns of combination, between different mode, because of the vibration of different frequency, different mode is interfered down, staggered speckle also forms, and its speed is fast far beyond the eyes finding usually, and these staggered speckles are discovered with single situation fully.Being disturbed formed speckle by speckle itself is stable in the space, but the appearing as at random of its crest and trough, under multiplex mode, these speckles are overlapped in the outlook, and on average come apace along with the increase of pattern quantity.In this case, eyes are only discovered single light district.Three, display can be designed to be used in the multiplex mode waveguide but not the single-mode waveguide, because each waveguide mode has a different spaces to distribute, it forms different speckle groups, and about ten groups of waveguide modes promptly are enough to relax the speckle problem.Preferred embodiment uses a multiple length pattern visible laser to reduce the speckle phenomenon.N, the stratification of dividing ligand array

It is useful being used as the lamination waveguiding structure with colour video display unit, and wherein each layer distributes one of three component colors that separate to each location of pixels.In a preferred embodiment, Figure 72 and Figure 74 are that a 3-D stacks array structure is used in the example explanation in colour video display unit with 1600 and 1601 of one of pixel cell, be with polymer film 1602, silica 1 604 shown in this display and pass waveguide surface 1606, the electrode 1607 that is deposited on the solubility substrate 1620 constituted, every layer individually addressing of pixel sense-finding switch quilt, and controlled by multiple output voltage control interface as described in Figure 34 simultaneously.Lamination waveguide 1608 can end at the on-plane surface reverberator or end in decollator as previously mentioned on the surface at miter angle on the location of pixels, to make the permanent on-plane surface TIR unit reverberator 1610 as shown in Figure 73, makes light 1616 pass substrate.Another alternative method, the waveguide 1608 of lamination can end at a surface vertical with the waveguide 1612 of external fluorescent device or away from the light reflection 1618 of the coating surface 1614 of substrate, this similar is in shown in Figure 64 and Figure 65.O, display making step conclusion

The plane making step of preferred embodiment is as follows:

1 is used for the electric field pole and the switchable grating of the substrate of TIR switching construction.

2, be used for making the proton exchange and the thermal treatment of waveguide and integral lens.

3, the grating crossed of the etching of micromirror and other etchings.

4, the outer silicon diode of waveguide inserts.

5, be used for making the metal deposit of the electrode that micromirror reflection and excitation switching and modulator are provided.

6, the driving electronics is integrated.

7, the laser merging is coupled with input.P, the embodiment that replaces

Alternate embodiment of the present invention is switched the tri-color beam that merges as among Figure 75 for using grating.This structure can connect among Figure 59 member 1004 or be made among Figure 60 substrate 1028 or be used for generation source 1000.This three waveguide can be parallel and common formation and distributes conveyer and form multiple waveguide dispense switch 1008, or the three can be used on other positions and other environment.The green blue input light 1186 of input light 1184, the three waveguides, 1176 restrictions of input light 1182, the second waveguides 1174 restrictions that first waveguide, 1172 restrictions are red.This dispense switch is by forming to Fig. 7,8,11,12 three voltage drive gratings similar to 13 those shown, this grating is switchable and exciting electrode is arranged, the wavelength that must will be transmitted to the light of waveguide during each grating manufacturing reflects it, these gratings reflect light perpendicular to distributing the waveguide conveyer, it is reflected into narrow wavestrip, and the light beam that therefore surpasses other wavelength of grating does not reflect.Collected and focus on again from three light that distribute the waveguides emission by an integrated optical lens system 1178, it focuses the light beam in pixel waveguide 1180 to form pixel light beam 1188, this lens combination should suitably be coupled to the pixel waveguide with reflected light, because the length of reflection grating is much longer than the width of waveguide, must focus on output waveguide again so present light beam.Member 1170 is the beam combiner of a dichromatism.

The shape of grating, work period and interval should be designed so that the reflective-mode section is after passing lens combination, can coincide with waveguide 1180 consistent preference pattern sections, this distribution waveguide should be operated under the lowest hierarchical level pattern, so that reflective-mode is coupled to the waveguide of single-mode pixel effectively, for the luminous energy of the best is coupled, slab guide should be placed in 1180 of waveguide 1172,1174,1176 and lens 1178 and waveguides, and whole substrate across structure 1170 is alternately covered in this slab guide.

Integral lens is a permanent refractive index modulation structure, can proton exchange, non-diffusion or etching realize.Because the realization of high index of refraction refraction and the dispersion lower than etching lens are so the technology of proton exchange is preferred.

Figure 36 shows the alternate embodiment of a waveguide distribution structure, wherein, two or more light beams are separated to be limited to a set of dispense waveguide and one group of pixel waveguide, surpassing two groups of above distribution waveguides and pixel waveguide can this kind arrangement implement, this arrangement mode is distributed on waveguides 982 and 984 for the parallel adding of distribution waveguide of increase and at other, the pixel waveguide that increases crisscrosses the distribution waveguide of previous Asymmetric Loss, similarly in distributing conveyer 997 minimum mode is reduced in loss.

Present embodiment is useful to the high density display especially, and switch 983 and 985 length are greater than required pixel space in the display, and multiple color can be allocated in above-mentioned each waveguide or waveguide can one group three, and each represents a color.If output waveguide be used to carry laser light energy from pixel switch to the on-plane surface reverberator, then the Asymmetric Loss waveguide is staggered should be used to avoid the very big loss of pixel waveguide.

Distribute the conveyer of waveguide also quite useful in large-scale or high optics luminous energy display, wherein the optical destructive in waveguide is inevitable.If laser intensity surpasses and destroys boundary (about 10MW every square centimeter in lithium niobate) in the waveguide, laser can be understood the havoc waveguide and form pit or fragmentation or metal area, therefore must keep intensity destroying under the boundary with the safety coefficient of twice, so the total luminous energy of restriction is in the propagation (in about 800 milliwatts of 4 square micron lithium niobate waveguides) of waveguide, if need more multipotency, available waveguide conveyer carries the aggregate demand energy.

Other embodiment are displays, the pixel switch 1018 that passive optical energy router is used for Figure 59, the example of previous existing passive optical energy router, passive optical energy router separates it with light ray propagation in the predetermined portions of pixel waveguide, and it is directed into the reverberator waveguide, the reverberator waveguide can be arbitrary length of joining what arbitrary curvature, and it ends at an on-plane surface reverberator at last.The locus of on-plane surface reflector array can form a static image, these have each pixel waveguide of its unique single group on-plane surface reverberator, be to connect its position and with a dispense switch to distribute waveguide, the image relevant with given pixel waveguide can drive the action that dispense switch is opened and closed.Q, electricity watt formula display

Figure 76 shows that a display 1200 divides into the synoptic diagram of electricity watts 1202, and electricity watt is the subarray of pixel, and it is similar to the related data shown in Figure 59, Be Controlled independently.Several electric watt can be arranged at together and be controlled to form a display by merging, in the present embodiment, each electric watt is made on the single substrate to keep the login of pixel between electric watt, because it should be sightless for the beholder that display is divided into electric watt, each lasing light emitter that is placed in itself of electric watt, it comes from the diode laser array 1204 and 1206 that uses distribution waveguide 1206, so make display emission than the bigger laser light energy of the single lasing light emitter embodiment of Figure 59, a projection display is also had superiority especially.

Generally speaking, can distinguish by distinct methods for electric watt, for example, they can have different substrates, different electrode excitation things, different lasing light emitters.Among Figure 76, electric watt is passed a different waveguide with emission light and distinguishes.Diode laser array 1204 is connected in waveguide conveyer 1206 and 1208, and divider 1008 is not all showed in Figure 76 with pixel 1016 switches and electrode.

Have at least a waveguide to take light to electric watt of array from each conveyer, the light waveguide distributes and can install in many ways, for example, first waveguide of low order conveyer is taken light to the electricity on low order the right watt in Figure 76, next waveguide is then taken to the left side, waveguide on other bottom lines also is so, and conveyer 1208 can be used for the similar next line of taking extremely electric watt of light, and only part is showed among the figure.The electricity that other conveyers can be used to add by construction watt, an or single laser array can be used for providing light to many waveguides is delivered to many conveyers then and enters in the electricity watt again, or uses these methods to do a combination.

The laser of supplying each waveguide is looked display and need be modulated it with video communications, and its excitation display device electrode of selecting row and row is luminous in given time.For a full-color display, several waveguides can be sent a given electricity watt, or several laser beam can be combined into a waveguide of issuing each electricity watt.Conveyer 1206 is regarded as parallel waveguide, because edge and its space that it is positioned at display are exercisable, the light of the waveguide in each conveyer by switch 1008 and 1016 and electronic component enter the electricity watt waveguide, comprised the waveguide in a packed bulk density optimization district shown in the conveyer 1208, wherein the separation situation of waveguide was weakened before crossing display.

Because the gross space of waveguide is little than being split up into of pixel between electric watt, waveguide closely need be combined, for example, if all spaces are all available, perhaps 10 4 microns waveguides can meet 100 microns inherent pixel pitch effectively.Because between an on-plane surface reverberator 1018 and a neighbor waveguide untapped space is arranged, it is necessary starting along the distribution conveyer of line direction.Yet at an intensive display in the ranks, only four or five waveguides can be suitable for, and in example backward, conveyer can be separated out sub-conveyer, its along space work of adjacent lines till it arrives electricity watt.If conveyer is along column direction work, at least more staggered reverberator waveguides 1017 (because of its angle of deviation), for the compensation of setting up a single display device causes an extra loss, these and the staggered of reverberator waveguide have Asymmetric Loss staggered, but the loss meeting in the staggered many conveyer boundaries of reverberator waveguide changes widely, when each electricity watt luminous energy is assigned with waveguide luminous energy and limits, display luminous energy can be coupled the waveguide number of laser and increases along with increase.

As shown in the figure, each in electricity watt distributes a waveguide and a light source to be coupled, and light source is to modulate according to electric watt pixel excitation group, and this electrode excitation group also watt separates according to the electricity of display.The selector switch of row and row is to repeat periodically between display electricity watt, and row of each electricity watt can be eliminated simultaneously with row, and for example, if a VGA has 16 electricity watt, each electricity watt contains 160 * 120 pixels, and the 160th row and the 120th is listed as and encourages simultaneously on the display.160 row are by continuous sweep and repeat, and the situation of row is as the same, for reaching 80 hertz plane rate, row is scanned with 1.53MHz, row are scanned with 9.6KHz, and electricity watt can directly align each other and to pile up up or by piling up in a quadrate array, or may one staggered in.

Electricity watt display also can be used for making large area display, in the present embodiment, the multiple imaging pixel array is manufactured on the substrate that separates, and be connected in second substrate of glass or plastic cement, shown in Figure 59, make for each electric watt, and separate sub-viewing area mode as one and operate, laser light can be connected to each electricity and watt come from the outer rim of using fiber to connect laser light, and it is from light source to suitable electricity watt.

Figure 77 shows the alternate embodiments of three look displays, wherein distributes reverberator 1272 and 1274 only to reflect from distributing waveguide 1262 and the 1264 part light to pixel waveguide 1292 and 1294.This distribution reverberator is not a kind of switch but a kind of optical energy router of permanent passivity, its effect as same tool light beam luminous energy divider.The method for optimizing of making this class luminous energy divider is for distributing one of waveguide junction etching to favour the narrow shallow groove that distributes waveguide 45 degree at two.The application of this display preferably can distribute the reflection coefficient of reverberator to be used with it by adjusting each, so can make about equally power enter each with the waveguide 1292 and 1294 that distributes waveguide to link to each other in.The adjustment of reflectivity must be decided according to the number that is bonded in distribution waveguide upper reflector and the length and the loss coefficient of waveguide itself.Every tool reverberator is utilize to change the width of etching groove or the degree of depth and adjust its reflectivity.If, then this multiple distribution wave guide can be merged into the single structure body owing to distribute the staggered generation such as the 997 described asymmetry losses of Figure 36 element of waveguide.The distribution waveguide of this class is waveguide preferred and low loss under identical staggered situation.Other distribution type waveguide also meets above-mentioned institute and says.

In addition, each pixel waveguide comprises a separate modulator 1282 and 1284, because the modulator of an array is arranged in this structure, therefore, luminous energy abandonment control for each modulation back light beam is necessary, so can remove unnecessary light and prevent to cause background light.This luminous energy abandons control and can be implemented by the mode of several phase trans-substitutions.It can be waveguide, it can propagating light away from modulator, pass pixel and leave the edge of (or penetrating) luminous energy attract substrates.Enough little as if this bend loss, then be good selection, when still big as if loss, then the waveguide meeting is abandoned along with the length increase of luminous energy attract substrates and with most luminous energy.It also can be a kind of refraction of optical beam device that luminous energy abandons control, is similar to the mentioned structure of Figure 69 and Figure 70.As mentioned above, other luminous energy that are different from display direction must abandon, and the luminous energy of abandonment should absorb as much as possible.It is near a kind of absorbing material of each modulator that is placed in that other alternative luminous energy abandon control.Waveguide can guide removes light to one and fills up the groove of absorbing material, or passes the absorption region of a non-diffusion, as above-mentioned chromium coating zone.Pixel switch and on-plane surface reverberator are preferred embodiment equally, shown in Figure 59.One of advantage of this structure is that the required high electric current of high-speed driving electronic component drags effect and can be eliminated and help low frequency (38.4 KHz) modulator array.Ditto described, pixel switch is capable to be driven with 384 KHz for the simple and easy VGA of 80 hertz of scan rates for one.R, projection display

Figure 78 is the embodiment of a laser bar-pumped monochrome display.Laser instrument 1302 is light sources, and it comprises a plurality of semiconductor diode laser groups on a wafer, and with display in the pixel wave guide array of substrate 1,300 one sides be coupled.Distribute waveguide then not need so embodiment.During the manufacturing of laser beam and display, the laser amplifier is the waveguide separation degree adjustment of low display at the separation degree of laser beam, be adjusted to wave guide about equally till.It is right that laser array on the light beam and pixel waveguide array are arranged in.Be coupled the mode that can utilize a kind of limit to be coupled and realize, this mode make luminous energy pass through lithium niobate crystal chip (prominent connect be coupled or lens are coupled) on one side the wave guide end points and be coupled with waveguide.The mode that other has a kind of plane to be coupled realizes being coupled, and promptly luminous energy is coupled through the surface and the waveguide of lithium niobate crystal chip.Each pixel waveguide preferably can be selected reverberator 1304 with the frequency as the diode laser frequency stabilization across crossing a modulator 1306.Make one group of pixel switching array 1016 along each waveguide.Each pixel switch folded light beam to on-plane surface reverberator 1018.Simultaneously, the on-plane surface reverberator 1019 of a tandem is driven, to such an extent as to all modulators move simultaneously.

Multiple laser beam can be done simple variation in this structure, can be used as the luminous energy of single display device, more can be used to increase total effectively luminous energy.If the laser excitation electrode can be made discriminatively and be tapped into independently easily, then modulator can alternately be worked in laser beam, yet compare with gallium arsenic modulator, it is to be relatively easy to that modulator on the lithium niobate substrate is reached the control electronic component, because fixedly electronics is to the control electrode of modulator on the surface under identical interlayer, its fixed line work is easy.If laser frequency doubles, the doubling frequency district that then polarizes also can be along with waveguide, stilt and above-mentioned control gear are periodically handled.At last, the laser amplifier can be coupled one group of waveguide array, and this class waveguide can form and distribute conveying device and the display of this device connection electricity watt covering.In fact, the display shown in Figure 78 promptly be with by the electricity of single file multiple row watt formed.

Display luminous energy demand under Figure 78 structure is very high, because exist multiplex laser light source and limit the demand of other numerous wave guide luminous energy without any a waveguide.It is quite special that the high-light-energy display is used for projection display, and the consideration of this display is to use the technical standard projection optics technology of knowing altogether to project on the diffusion type screen with substrate separation.This projection optics technology is collected from most of light of display emission and it is focused on the screen again, makes spectators directly to see, for example, this video screen can be used as the screen in large-scale project video screen or the cinema.For a projection display, the fixed angle of launching light from individual pixel should be as far as possible little, that is hinting that level and smooth surface should be used for the on-plane surface reverberator.Waveguide has a bigger interlaced area that its advantage is also arranged for reflection wave, promptly its can reduce scatter and disappear and make pixel or reflection waveguide tapered also can reduce lost.

Imagescope among Figure 78 can increase to full-color, promptly adds each color pixel waveguide and gets final product.The size of waveguide outward appearance must closely combine effectively for making three independently pixel waveguides (respectively representing a kind of color).For example, if it is blue that laser beam 1302 produces, then a laser array that produces green can be coupled with the another side of display, and it is coupled technology as blue laser beams, but along with green pixel waveguide and blue pixel wave guide are interlaced, its direction of propagation is in the other direction comparatively speaking.As mentioned above, blueness produces visible light with the infrared laser array that the green laser array may include change overtones band zone.If the red laser array is coupled with different technologies and display waveguide, then the red laser array also can be coupled with the staggered of pixel waveguide simultaneously.For example, if blue and green light are told pah to the limit is coupled, red beam can be the surface and is coupled, and is coupled in the processing on the surface, and blue and green waveguide can not have substantial loss by the red laser light beam.

Figure 79 and Figure 80 show that a surface is coupled processor 1310, and laser beam is the waveguide that is coupled a planar substrates in 1310.Three groups of laser beam 1312,1314 and 1316 are coupled to the 3rd group of waveguide of waveguide array 1318, and each laser beam has a waveguide array, and it is coupled between the mirror every equating with the surface that is designed to accept laser beam output at interval.Laser beam 1312 has two groups of wave guides 1320 and 1322 in the legend, but the laser beam of whole group can have more laser amplifier, 1320 and 1322 is arranged side by side with waveguide 1324 and 1326 on substrate, laser beam 1312 ranks in the surface and is coupled on lens array 1328 and 1330, self-excitation optical waveguide 1320 and 1322 emitted light beams are coupled from 1328 and 1330 are reflected into a folded light beam the mirror, it is transmitted to waveguide 1324 and 1326 in coaxial mode.Waveguide 1320,1322,1324 and 1326 size are adjusted to the maximal value that approximately makes this type of folded light beam be coupled situation.The remaining waveguide that is coupled mirror away from the surface can weaken under other purpose demands, as for the amplification performance of laser beam 1312 and doubling or modulate or switch or show at substrate 1332 medium frequencys backward.

Other diode bars 1314 and 1316 also can as directed similar approach on substrate, be coupled with waveguide and, waveguide and the different diode bars composition that can interlock in a different manner.

Figure 80 is depicted as an expansion vertical area, and it passes the member that is positioned at one of rotating mirror 1330 among Figure 79.The surface is coupled the manufacturing of mirror 1330 can be with reference to each described technology of figure 62-67.Coating 1334 is in waveguide 1326, this coating is the transparency material that has than low-refraction, and for example silicon or ground, its thickness are enough to comprise several in 1326 coefficient attenuation lengths under propagating, if impaired structure is arranged on coating, to the unlikely great influence that causes of the loss of waveguide 1326.Reflectance coating 1331 moderately is coated on the surface that the angle is arranged in 1330, and vertical plane 1333 can not be coated any reflective coating, so coating 1331 must be used on certain angle.Be coupled loss if reduce by 1333 Fresnel, then can coat not reflecting material on 1333 surface.Coating 1336 preferably can be used for the facet of the front of diode laser, so can make the laser facet that is contacted with substrate 1332 unlikely impaired.If install easily, then holder 1338 can be attached to 1312 the surface and the one side of substrate 1332 by coupling device 1340, and is if 1338 have good thermal conductivity coefficient and be connected with the heat conductor of heat radiation, then also quite useful for the heat radiation of diode laser.S, three-dimensional display

Utilize array technique set forth herein that three-dimensional stereopsis is shown, in stereo display, each eyes eyeball is observed a slightly different image, finish in this related art in the past, for example, the image of projection pairwise orthogonal polarisation is on screen, put on the glasses screen of cross-polarized light again, this technology since head movement throw into question, the athletic meeting of excuse portion with two images separately rotating part enter each other, the method that substitutes prior art is to use the glasses of one group of circular eyeglass, it comprises the light valve of two independent switches, that is to say, when the left eye light valve is opened, the right eye light valve is closed, and vice versa.Synchronization indicators to two different alternating images of generation can be created stereoeffect.This technology is subjected to the influence of display switch speed and limits to some extent,, previous ghost produces the image of a confusion because can being overlapped in the new image in another eyes eyeball, the further method that has been used to constitute the circular eyeglass glasses is to comprise two miniscopes that separate (LCD or CRT), it all shows two images simultaneously to every eyes eyeball, the same problem that has on weight and the price with prior art of this technology.In each the demonstration, eyes are only seen an image, because of another image is covered by some object.

Same effect can be realized by the embodiment of the following stated.The preferred embodiment of explanation in legend 59, that the light that is transmitted to the observer from display can be designed to polarization light and need not re-use the film polarizer, they so can make relevant three-dimensional display polarization light technology realize and not have initially loss, because must use film polarizer formation polarisation effect with CRT or efficient that LCD display causes.If tir switch is used, then two groups of polarisations can be passed the binary polarisation by fixed line and support waveguide, but the reflection coefficient of tir switch must so can design an effective display with pure TM much larger than TM polarisation (the Z section of lithium niobate substrate).If switch is the guillotine type switch, only there is a polarisation to be accompanied by by the light beam of TM polarisation (is preferred profile at the Z of lithium niobate substrate section) from junction (Brewster angle) reflection of 90 degree waveguides.

Because waveguide switch has a short reciprocation length, to occupy the space be possible less than 100 microns to a pixel in the technology described herein.Make that so screen diagonal can be manufactured less than the high display of resolving of three inches VGA, these small-sized displays can be installed on the glasses of circular eyeglass of above-mentioned prior art.

This display in this uses, be better than CRT or LCD part be its substrate actual be transparent, because the light tight zone of on-plane surface reverberator produces a pixel, therefore transparent substrate can make the 100 times of ground of area between the pixel dwindle, and just the area of light tight display is less than one of percentage.If the diffusion type screen is used as the part of the described on-plane surface reverberator of Figure 63 and manufactured, then if the observer focuses on outward a bit of image plane with eyes, transparent phenomenon can appear in display.Under this situation, the display of new line type or " looking logical " head fixed can realize that this technology can be applied to multiple display, comprises implementing virtual reality sight, home entertaining and military aircraft.

Figure 81 sets forth the embodiment of a tight dimensional image display, this three-dimensional display comprises two groups of pel arrays 1706 and 1708, it uses identical designing and producing and be oriented on two substrates 1702 and 1704 that separate, pointed as Figure 81 axe shape mark, array 1708 has been rotated by 90 degrees with respect to array 1706, the light cross-polarized lightization that like this then light that be emitted to the observer by array 1706 has been launched with array 1708.The angle of display is the right angle shown in line 1710, and it can make two images that good coincidence effect is arranged.Because substrate thickness is less than 0.5 millimeter, the light of being launched by combined display can occur from the phenomenon on plane much at one, as long as array 1708 usefulness shown in Figure 64 and 65 the on-plane surface reverberator and array 1706 uses as the on-plane surface reverberator that Figure 62 and 63 shows, can realize that two arrays are had much at one the plane of departure.Though the quadrate array of pixel, just confirms the arrangement of the on-plane surface reverberator of each array by marginal data and can recognize the light cross-polarized lightization of array 1706 and array 1708 emissions, then appoint and close aspect ratio and all can use.

The operation of two group patterns is as the employed technology of display among Figure 59.The observer has on one pair of glasses that polarizer is arranged, polarizer is a perpendicular array, so a pair of eyes only can be seen the light that array sent, the shown image of each array formats to reach stereoscopic visual effect with known technology, if lens are used to throw the bigger view screen of image plane to, then present embodiment can be used as the application of a Direct observation or a three-dimensional projection.

Explanation of the present invention please refer to described specific embodiment, and other embodiment are very clear in the general technology of related art techniques, and therefore, except additional claim specified (it constitutes the part that the present invention describes), the present invention is not limited by other.

Claims (56)

1. beam direction element comprises:

A kind of solid-state material is in order to transmission light;

At least a first conductivity type material forms one first electrode, and described first electrode contacts described solid-state material;

One pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state material;

A plurality of output waveguide sections, it is along described plane and transverse to described solid-state material, one of them output waveguide Duan Zaiyi first cross-connecting area is transverse to described pixel waveguide segment;

One active light diverter is arranged near described first cross-connecting area, and described active light diverter will reflex to described output waveguide section from the described light that comes as the sonic wave guide section, optionally apply an electric field on described first electrode; And

Optical reflector device, its be arranged on the described plane selected position and with described output waveguide section conllinear, so that light is projected outside the described one side.

2. according to the element of claim 1, wherein said light diverter comprises a suitching type inner full-reflection device.

3. according to the element of claim 1, wherein said light diverter comprises a suitching type grating reflector.

4. according to the element of claim 1, wherein said light diverter comprises a waveguide switch.

5. beam direction structure, it is used to form and uses an array according to the element of claim 1 at least, so that at least one second cross-connecting area to be provided, also comprises:

One distributes waveguide, and it leans against at described second cross-connecting area on the pixel waveguide segment of at least one described element, and each second cross-connecting area has the active light orientor that is located at described second cross-connecting area, light is directed in the described pixel waveguide segment.

6. according to the beam direction structure of claim 5, also comprise a fixed mirror, it is located between described smooth orientor and the described light diverter, with guide lights in described plane.

7. according to the element of claim 1, wherein said light reflecting device comprises:

Light reflection boundary in described solid-state material, described reflection boundary strides across a surface discontinuous refractive index, and described surface presss from both sides an angle transverse to a light path and with incident light.

8. according to the element of claim 1, wherein said reflective optical system comprises:

In described solid-state material and the optical grating construction of refractive index is arranged, described optical grating construction is formed by the refractive index of a discontinuous pattern, and its refractive index is transverse to the incident light transmission axle and in the incident light plane.

9. according to the element of claim 1, wherein at least one optical reflector device comprises:

The fluorescent target device, it is located on the described plane one location of pixels with described output waveguide section conllinear.

10. according to the element of claim 1, also comprise an electrode relevant with described light diverter, described electrode is arranged in described first cross-connecting area with the control light path.

11., also comprise a plurality of electrodes according to the element of claim 5, be arranged at the ranks pattern and link to each other with described first and second cross-connecting area, total row of described electrode are connected to a common described electric conductor of electric conductor and then are coupled to a device that produces.

12. according to the element of claim 5, also comprise an optical frequency original device, it comprises a light stimulus device that is coupled described distribution waveguide.

13. according to the element of claim 12, also comprise a frequency multiplication device, it is coupled described light stimulus device and is energized the device excitation.

14. according to the element of claim 13, wherein said frequency multiplication device is a regular polarized structure in described solid-state material, and wherein said solid-state material be one non-linear can regularly polarized luminescent material.

15., also comprise a beam modulator that is located at the output of described light stimulus device according to the element of claim 12.

16. according to the element of claim 15, wherein said photomodulator and described solid-state material are combined as a whole.

17. according to the element of claim 12, comprise a plurality of distribution waveguides, wherein said light stimulus device is a solid-state laser.

18. according to the element of claim 12, comprise a plurality of distribution waveguides, wherein said light stimulus device is the solid-state laser array with the monocrepid integrated setting.

19. according to the element of claim 12, wherein said solid-state laser alignment, with the energy of guiding transverse to described solid-state material plane, described plane comprises mirror and imports described distribution waveguide with the irradiation that will inject.

20. according to the element of claim 19, wherein said solid-state laser is for alternately being coupled described distribution waveguide.

21. element according to claim 5, also comprise an optical frequency original device, it comprises a plurality of laser pumping devices, each driver is used to produce the light beam of the different optical frequencies of tool, one light beam colligator system is coupled each laser pumping device, with with the combination of different optical frequency light beam, described light beam colligator output is coupled described distribution waveguide.

22. according to the element of claim 5, also comprise a waveguide cross conformation, it has asymmetric loss and is used to a plurality of distribution waveguide segments parallel in described second cross-connecting area, wherein at least one distribution waveguide segment has the first refraction partition coefficient in a zone of intersection; And wherein

Described at least one pixel waveguide segment is transverse to described at least one distribution waveguide segment, having near one second refraction partition coefficient the described zone of intersection of described distribution waveguide segment obviously to be less than the described first refraction partition coefficient.

23. the element according to claim 1 also comprises:

One waveguide decussate texture, it has asymmetric loss, and to be used to a plurality of pixel waveguide segments parallel in described first cross-connecting area, wherein at least one pixel waveguide segment has the first refraction partition coefficient in a zone of intersection; And wherein

At least one described output waveguide section is transverse to described at least one pixel waveguide segment, having near the second refraction distributive law the described zone of intersection of described pixel waveguide obviously to be less than the described first refraction partition coefficient.

24. the element according to claim 1 also comprises:

Be arranged near the device of described reflector arrangement,, observe the axle projection along one to prevent the false light irradiation so that the false light irradiation around described reflective optical system is covered.

25. according to the element of claim 24, wherein said masking device comprises that a reverberator is to derive the false light irradiation outside the described observation axle.

26. according to the element of claim 24, wherein said masking device comprises that a light absorber is with the irradiation of interception false light.

27. the element according to claim 1 also comprises:

Observe the device that the axle surface is provided with along described solid-state material and transverse to one, to absorb the false light irradiation of not derived described solid-state material by described reflective optical system.

28. the element according to claim 1 also comprises:

Along described solid-state material and transverse to the surperficial device that is provided with of an observation axle, to cover the false light irradiation of not derived described solid-state material by described reflective optical system.

29. a beam direction structure comprises:

One solid-state material is in order to transmission light;

One distributes waveguide segment, and it is along plane of described solid-state material and transverse to described solid-state material;

At least one pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state material, and each pixel waveguide segment leans against described distribution waveguide pipeline section at a cross-connecting area;

At least one passive smooth orientor, it is arranged on described cross-connecting area, and the described light part that described passive smooth orientor is used for coming from described distribution waveguide reflexes to the described picture waveguide segment; And

One photomodulator is used to each described at least one pixel waveguide segment, to modulate the described part of described light respectively.

30. the beam direction structure according to claim 29 also comprises:

One output waveguide, it absorbs from described at least one pixel waveguide segment and the light that comes; And

Optical reflector device, its be located at position selected on the described plane and with described output waveguide section conllinear, so that light is projected outside the described plane.

31. beam direction structure according to claim 29, wherein a plurality of is to be provided with along described distribution ducts section by the light orientor, each passive smooth orientor is by a selected amount of light, and with its benefit amount reflection, described selected amount is for setting up according to a required distribution pattern.

32. a display equipment comprises:

One solid-state material is used to transmit light;

At least one pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state material;

A plurality of output waveguide sections, in described solid-state material, described output waveguide section leans against on described at least one pixel waveguide pipeline section at a plurality of interface points place along described flat transverse for it, and is coupled to receive from the next luminous energy of described at least one pixel waveguide segment; And

Optical reflector device, its be located at position selected on the described plane and with described output waveguide section conllinear, so that light is projected outside the described plane.

33. the device according to claim 32 also comprises:

One distributes waveguide segment, and it leans against described at least one pixel waveguide segment at selected cross-connecting area place, and each interface point has the active light orientor that is located at described cross-connecting area, light is directed to once again in described at least one pixel waveguide segment.

34. according to the device of claim 33, comprise a plurality of electrodes, selected electrode is arranged on described cross-connecting area, with the path of control light.

35. the device according to claim 32 also comprises:

One first distributes waveguide segment, and it leans against first group of described pixel waveguide segment at the first chosen cross-connecting area, and each first cross-connecting area has an active light orientor at selected cross-connecting area, with light is imported once again first group of described pixel waveguide segment one of them; And

One second distributes waveguide segment, and it leans against second group of described pixel waveguide segment at the second chosen cross-connecting area, and each second cross-connecting area has an active light orientor at selected cross-connecting area, with light is imported once again second group of described pixel waveguide segment one of them.

36. according to the device of claim 35, wherein said first waveguide pipeline section and described second waveguide segment are staggered; And wherein

Described optical reflector device is arranged among the two-dimensional array corresponding with the image element of a display.

37. according to the device of claim 35, wherein:

With described first to distribute first group of the relevant described reflective optical system of waveguide be ranks arrangement in first electric watt of display; And

Distribute second group of the relevant described reflective optical system of waveguide to tie up to ranks arrangement in second electric watt of the display with described second.

38. according to the device of claim 32, wherein said optical reflector device comprises:

Light reflection boundary in described solid-state material, there is the refractive index that strides across a surface discontinuously described reflection boundary, and described surface then presss from both sides an angle transverse to a light path and with incident light.

39. a display equipment comprises:

One solid-state material is used to transmit light;

At least one first conductivity type material forms one first electrode, and described electrode contacts described solid-state material;

At least one pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state material;

A plurality of output waveguide sections, it is along described plane and transverse to described solid-state material, described output waveguide section leans against described pixel waveguide segment in a plurality of cross-connecting areas;

A plurality of automatically controlled light diverters, each light diverter system is transverse to a cross-connecting area wherein, and described light diverter can reflex to described output waveguide section from the light that described pixel waveguide segment comes; And

The fluorescent target device, its be located on the described plane selected location of pixels and with described output waveguide section conllinear, under light stimulus, light is penetrated described plane once again.

40. the display equipment according to claim 39 also comprises:

One optical reflector device, its be located on the described plane each location of pixels and with selected output waveguide section conllinear, so that light is projected outside the described plane.

41. a three-dimensional display apparatus comprises:

One solid-state material has the first surface district and the second surface district of aliging with a shared observation axle, and described solid-state material is used for transmitting light;

Each first and second surface region comprises array, is made up of following elements:

At least one first conductivity type material forms one first electrode, and described first electrode contacts described solid-state material;

At least one pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state material;

A plurality of output waveguide sections, it is along described plane and transverse to described solid-state material, described output waveguide section goes out to lean against described pixel waveguide segment in a plurality of cross-connecting areas; And

A plurality of automatically controlled light diverters, each light diverter system is transverse to a cross-connecting area wherein, and described light diverter can reflex to described output waveguide section from the light that the pixel waveguide segment comes;

Wherein the described array of each separation is to be subject to the light that guiding again has a difference light polarization.

42. according to the display equipment of claim 41, the array of wherein said separation ties up to transverse to the orthogonal angles of observing axle and is polarized.

43. according to the display equipment of claim 41, the pixel of the array of wherein said separation system is along observing directly alignment of axle.

44. according to the display equipment of claim 41, the pixel of the array of wherein said separation system is along observing the eccentric shaft alignment.

45. a display equipment comprises:

One solid-state material is used for transmitting light;

At least one first conductivity type material forms one first electrode, and described first electrode contacts described solid-state material;

One optical frequency original device, the frequency multiplication device that it comprises the light stimulus device of first frequency and is coupled to described light stimulus device and is encouraged by light stimulus device institute driver;

At least one pixel waveguide segment, it is along plane of described solid-state material and transverse to described solid-state electric Jie's property material;

A plurality of output waveguide sections, it is along described plane and transverse to described solid-state material, described output waveguide section leans against described pixel waveguide segment in a plurality of cross-connecting areas; And

A plurality of automatically controlled light diverters, each light diverter system is transverse to a cross-connecting area wherein, and described light diverter can reflex to described output waveguide section from the light that described pixel output waveguide section is come.

46. the display equipment according to claim 45 also comprises:

The fluorescent target device, its be arranged on location of pixels selected on the described plane and with described output waveguide section conllinear, under light stimulus light is penetrated outside the described plane once again, wherein to turn to be that each fluorescent target device is set to a light.

47. the display device according to claim 45 also comprises:

One optical reflector device, its be arranged on the plane each location of pixels and with selected output waveguide section conllinear, projecting outside the described plane near the light the described phosphorus destination apparatus.

48. according to the display equipment of claim 45, wherein said frequency multiplication device is for periodically having an electrode structure in described solid-state material.

49. a device that divides luminous intensity distribution in a volume comprises:

The light path device is used to transmit light;

A plurality of a plurality of optocouplers that are used for described light path device and are arranged in one of described volume pattern connect the district; And

The optocoupler of may command energy field connects device, and it connects the district at described optocoupler and is coupled to described light path device, controllably described light is distributed in the described volume.

50. a method of dividing luminous intensity distribution in a volume comprises:

In described volume, transmit light along many light paths; And

Described light controllably is distributed in the described volume, and its distribution is to select according to a plurality of uses that are coupled energy field in the district of described light path.

51. method according to claim 51, wherein said allocation step is included in switches the energy field between one first state and one second state, wherein under described first state, all light is directed in one first light path and under described second state in a selected optocoupler even district in fact, and all in described selected optocoupler even district only are directed in one second light path in fact.

52., also be included in an input described optical modulation got to the step of described light path according to the method for claim 51.

53. according to the method for claim 51, also be included in the step of the described light of modulation in a plurality of parallel zones, wherein said parallel zone is in the input of arriving described energy path and between the next a plurality of outputs of described light path.

54. a beam direction element comprises:

The multi-disc solid-state material, with transmitting beam, described solid-state material sheet forms at least one first device plane and one second device plane;

In each described first and second device plane:

One first conductivity type material forms one first electrode;

One pixel waveguide segment, it is transverse to described solid-state material;

At least one is transverse to the output waveguide section of described solid-state material, and described at least one output waveguide section ties up to one first cross-connecting area transverse to described pixel waveguide segment.

One active light diverter, it is located near described first cross-connecting area, is optionally applying under the electric field from described first electrode, will come light to reflex to described output waveguide section from described pixel waveguide segment with the active light diverter; And

Light reflecting device, its be arranged on select location and with described output waveguide section conllinear, so that light is projected outside the described plane.

55. element according to claim 54, comprise that also one deck is located at the material layer that the allowed energy between the described solid-state material sheet passes through at least, described layer has ripple reciprocation characteristic on the border with described solid-state material sheet, thereby along described solid-state material sheet guiding energy waves.

56. according to the element of claim 54, also comprise one with the relative plane electrode of described first electrode, to keep the electric field that waits sheet other sheet by described.

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