CN116272042A - A filter drying system for PSPI resin - Google Patents

Abstract

The invention discloses a PSPI resin filtering and drying system, which comprises a barrel, wherein a filter vat is arranged in the barrel, a cavity is arranged between the filter vat and the inner wall of the barrel, a back blowing pipe, an exhaust pipe, a water inlet pipe and a feed pipe are arranged on a top plate of the barrel, a vacuum pipe and a drying air flow inlet pipe are arranged on the side wall of the barrel, and a liquid discharge pipe are arranged on a bottom plate of the barrel; the bottom of filter vat is equipped with bowl form filter, and the bottom of bowl form filter is connected with vibrating device, is equipped with powder trap, spray set and feed inlet on the roof of filter vat, and powder trap is connected with the exhaust tube respectively and blowback union coupling through giving vent to anger hose and blowback hose, and spray set passes through water inlet hose and water piping connection, and the feed inlet passes through feed hose and is connected with the inlet pipe. The PSPI resin filtering and drying system adopting the structure has the advantages of high filtering precision, good sealing performance, low loss, high yield, no slurry leakage of liquid, no blockage in filtering, high drying efficiency and small occupied space.

Description

A filter drying system for PSPI resin

technical field

The invention relates to the technical field of PSPI resin purification and drying, in particular to a filter drying system for PSPI resin.

Background technique

Photosensitive polyimide (PSPI) is a kind of organic material with imide ring and photosensitive gene on the polymer chain, which has excellent thermal stability, good mechanical properties, chemical and photosensitive properties. Photosensitive polyimide It is a high-end product in polyimide. PSPI resin, as a bottleneck material in the field of semiconductor advanced packaging and photoresist, is becoming increasingly important for localization. Because of its high technical barriers, large investment in research and development and pilot scale-up research, and extremely difficult industrialization, the preparation of PSPI resin has not been effectively broken through, especially in the filtration, purification and drying of PSPI resin, which is full of difficulties, for example, Blockage, long drying time, long process route lead to large system footprint, etc. In order to solve the above problems, it is necessary to provide a novel filter drying system for PSPI resin.

Contents of the invention

The purpose of the present invention is to provide a filtration and drying system for PSPI resin, which can effectively solve the problems of clogging and long drying time, improve the working efficiency of the process system, save the floor area of the entire system, and improve the quality of resin purification.

In order to achieve the above object, the invention provides a filter drying system of PSPI resin, comprising a cylinder, a filter bucket is provided in the cylinder, a cavity is provided between the filter bucket and the inner wall of the cylinder, so The top plate of the cylinder body is provided with a blowback pipe, an air extraction pipe, a water inlet pipe and a feed pipe, and the side wall of the cylinder body is provided with a vacuum pipe and a dry air inlet pipe connected with the cavity. The bottom plate of the body is provided with a discharge pipe and a discharge pipe, the discharge pipe is connected with the cavity, a discharge valve, a conductivity meter and a drainage flowmeter are arranged on the discharge pipe, and the discharge pipe The material pipe is connected with the bottom of the filter barrel, and the discharge pipe is provided with a discharge valve;

The bottom of the filter bucket is provided with a bowl-shaped filter plate, and the bowl-shaped filter plate is provided with evenly distributed bumps. The device is connected, the top plate of the filter barrel is provided with a powder trap, a spray device and a feed port, the spray device is located in the middle of the top plate of the filter barrel, and the powder trap passes through the air outlet soft The pipe and the blowback hose are respectively connected with the suction pipe and the blowback pipe, the spray device is connected with the water inlet pipe through the water inlet hose, and the feed port is connected with the water inlet pipe through the feed hose. Feed tube connection.

Preferably, the discharge valve is located at one end of the discharge pipe close to the filter barrel, and the discharge valve is an upward opening valve.

Preferably, an air intake valve is provided on the back blowing pipe, an air outlet valve is provided on the air extraction pipe, a water inlet valve is provided on the water inlet pipe, a feed valve is provided on the feed pipe, and a feed valve is provided on the suction pipe. A control valve is arranged on the vacuum pipe, and a drying valve is arranged on the dry air inlet pipe.

Preferably, the bowl-shaped filter plate includes a bowl bottom filter plate and a bowl wall filter plate integrally connected, and the included angle between the bowl bottom filter plate and the bowl wall filter plate is 75°.

Preferably, the bumps are rivet-shaped bumps.

Preferably, one end of the air outlet hose, the water inlet hose and the feed hose near the filter barrel is provided with a check valve.

Preferably, the inner diameter of the discharge pipe is equal to the diameter of the filter plate at the bottom of the bowl.

Therefore, the present invention adopts the filter drying system of the PSPI resin of above-mentioned structure, has following beneficial effect:

1. Effectively solve the problem of filter clogging: the unique design of bowl-shaped filter plate forms an effective filter area and effectively avoids the residue of resin on the filter plate; the bottom of the filter barrel is fixed on the vibrating device through a buffer connector. Start-stop switch, after starting, the filter barrel can vibrate, the resin will be loosened, and the clogged gap will be released to maintain the filtration capacity of the gap.

2. Effectively improve the efficiency of filtration and drying; the top of the system has an exhaust pipe to achieve vacuum drying to improve drying efficiency; for resins that are easy to harden, a certain temperature gas is introduced through the bottom dry air inlet pipe at the bottom to fluidize and dry the resin and take away the resin Moisture can significantly improve the drying efficiency; the exhaust pipe at the top of the system is connected to the powder collector to prevent the blockage of the exhaust pipe and prevent the loss of materials and improve the drying yield.

3. Effectively solve the agglomeration phenomenon in the resin drying process: there are rivet-like bumps on the filter plate, which can collide and pulverize the formed agglomerate resin in time to improve the drying effect; the vibration device can also be crushed to a certain extent The phenomenon of resin agglomeration can be selectively used in the drying process according to the situation.

4. The system can integrate multiple functions on a set of equipment, which effectively solves the problems of complex process routes, low production efficiency, high risk of material transfer, and introduction of foreign impurities, especially the large space occupation.

The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

Description of drawings

Figure 1 is a schematic diagram of an embodiment of a filter drying system for PSPI resin of the present invention.

reference sign

1. Cylinder body; 2. Filter barrel; 3. Cavity; 4. Blowback pipe; 5. Exhaust pipe; 6. Water inlet pipe; 7. Feed pipe; 8. Inlet valve; 9. Outlet valve; Water valve; 11, feed valve; 12, vacuum tube; 13, dry air inlet pipe; 14, control valve; 15, drying valve; 16, drain pipe; 17, discharge pipe; 18, drain valve; 19 , conductivity meter; 20, drainage flow meter; 21, discharge valve; 22, bowl-shaped filter plate; 23, rivet-shaped bump; 24, buffer connector; 25, vibration device; 26, powder trap; 27. Spraying device; 28. Air outlet hose; 29. Blowback hose; 30. Water inlet hose; 31. Feed hose; 32. Check valve.

Detailed ways

Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

As shown in the figure, a filtering and drying system for PSPI resin includes a cylinder body 1, a filter bucket 2 is arranged inside the cylinder body 1, and a cavity 3 is arranged between the filter bucket 2 and the inner wall of the cylinder body 1. The top plate of the cylinder body 1 is provided with a blowback pipe 4, an air extraction pipe 5, a water inlet pipe 6 and a feed pipe 7, an air inlet valve 8 is arranged on the blowback pipe 4, an air outlet valve 9 is arranged on the air extraction pipe 5, and an air outlet valve 9 is arranged on the water inlet pipe 6. A water inlet valve 10 is provided, and a feed valve 11 is provided on the feed pipe 7 . The side wall of the cylinder 1 is provided with a vacuum tube 12 connected with the cavity 3 and a dry air inlet tube 13. The vacuum tube 12 is provided with a control valve 14, and the vacuum tube 12 can vacuum the cylinder 1. At this time The liquid absorbed by the PSPI resin in the filter barrel 2 is separated from the PSPI resin due to the pressure difference, and is quickly discharged from the barrel 1 through the cavity 3 to increase the drying efficiency. The dry air inlet pipe 13 is provided with a dry valve 15 which can control the opening and closing of the dry air inlet pipe 13 .

A discharge pipe 16 and a discharge pipe 17 are arranged on the bottom plate of the cylinder body 1 , the liquid discharge pipe 16 communicates with the cavity 3 , and the liquid discharge pipe 16 can discharge the liquid in the cavity 3 . The discharge pipe 16 is provided with a discharge valve 18 , a conductivity meter 19 and a drainage flowmeter 20 , and the opening and closing of the discharge valve 18 is judged by the numerical display on the discharge valve 18 , the conductivity meter 19 and the drainage flowmeter 20 . The discharge pipe 17 communicates with the bottom of the filter barrel 2, and the discharge pipe 17 is provided with a discharge valve 21. The discharge valve 21 is located at the end of the discharge pipe 17 close to the filter barrel 2, and the discharge valve 21 is an upward opening valve. , The upper opening valve can prevent a small part of the slurry from entering the discharge pipe 17 to affect the drying effect. The inner diameter of discharge pipe 17 is equal to the diameter of the filter plate at the bottom of the bowl, preventing material from accumulating on the filter plate at the bottom of the bowl.

The bottom of the filter barrel 2 is provided with a bowl-shaped filter plate 22, and the bowl-shaped filter plate 22 includes an integrally connected bowl bottom filter plate and a bowl wall filter plate, and the included angle between the bowl bottom filter plate and the bowl wall filter plate is 75° , The filter plate at the bottom of the bowl can form an effective filtering area, effectively avoiding liquid residue on the filter plate. The bowl-shaped filter plate 22 is provided with evenly distributed bumps, and the bumps are rivet-shaped bumps 23, which can collide and pulverize the formed mass resin in time to improve the drying effect.

The bottom of the bowl-shaped filter plate 22 is connected to the vibrating device 25 fixed at the bottom of the cavity 3 through the buffer connector 24. The vibrating device provides vibration energy for the filter barrel 2 to increase the filtration efficiency and increase the impact and crushing effect of the lump resin. The top plate of the filter barrel 2 is provided with a powder trap 26 , a spray device 27 and a feeding port, and the spray device 27 is located in the middle of the top plate of the filter barrel 2 . The powder catcher 26 is connected to the suction pipe 5 and the blowback pipe 4 respectively through the air outlet hose 28 and the blowback hose 29. The powder catcher 26 can collect the PSPI resin blown by the airflow during the drying process, The blowback hose 29 can blow the PSPI resin collected by the powder trap 26 back to the filter barrel 2, preventing the loss of the PSPI resin and preventing the powder trap 26 from clogging. The spraying device 27 is connected with the water inlet pipe 6 through the water inlet hose 30 , and the feed port is connected with the feed pipe 7 through the feed hose 31 . The air outlet hose 28, the water inlet hose 30 and the feed hose 31 are all provided with a check valve 32 near the end of the filter barrel 2, and the check valve 32 prevents the PSPI resin from entering the outlet hose 28 and the water inlet when it is blown up by the air flow. The hose 30 and the feed hose 31 in turn cause a pipe blockage.

During use, utilize the filter drying system of PSPI resin of the present invention to realize the filtration, purification and drying process of PSPI resin slurry according to the following steps:

Step 1: Add PSPI resin slurry: use the feed pipe 7 to transport the PSPI resin slurry to the filter tank 2, the resin solids are intercepted and left in the filter tank 2 through the bowl-shaped filter plate 22, and the filtrate enters through the gap of the bowl-shaped filter plate 22 The cavity 3 is discharged through the drain pipe 16.

Step 2: rinse the resin solids: use the water inlet pipe 6 to deliver pure water to the filter barrel 2, and the pure water will rinse the intercepted resin solids through the spray device 27.

Step 3: Soak the solid resin: when the conductivity detected by the conductivity meter 19 on the drain pipe 16 reaches 80-100us/cm, close the drain valve 18, switch to soaking, and soak the resin solid for 4 hours.

Step 4: Remove the filtrate: open the drain valve 18 to discharge the filtrate, and at the same time perform the following operations to increase the discharge speed of the filtrate: open the control valve 14 and use the vacuum tube 12 to vacuum the cylinder 1, and perform 1-5 Minutes later, the pores of the bowl-shaped filter plate 22 will be gradually blocked and the drainage flow shown on the drainage flowmeter 20 will become smaller. At this time, the vibrating device 25 will be started, and the vibration will be transmitted to the filter bucket 2 by the buffer connector 24 until When the drainage flow rate displayed on the drainage flow meter 20 is 0, close the control valve 14 on the vacuum pumping pipe 12 to stop vacuuming, and open the drying valve 15 on the dry air inlet pipe 13 to break the vacuum, and stop the vibration after breaking the vacuum for 1 minute Device 25. The vibrating device can make the resin in the pores move due to vibration, thereby improving the drainage efficiency.

Step 5: Drying: keep the drying valve 15 on the dry air inlet pipe 13 open, and open the air outlet valve 9 on the exhaust pipe 5 at the same time to keep the negative pressure in the filter bucket 2, and enter the inside of the filter bucket 2 through the dry air inlet pipe 13 The gas has a certain temperature and can quickly dry the resin. During the drying process, the resin solid will clump into a ball, and when the spherical resin solid touches the rivet-shaped bump 23, the spherical resin solid will break, so as to achieve the effect of accelerating drying; when the moisture content of the resin solid is less than a certain level, the resin solid will Blown up by the purge airflow at the bottom, in order to avoid the loss of resin solids in this process, the powder trap 26 will play a role in trapping resin powder. The intake valve 8 blows out the trapped resin in time to ensure the working efficiency of the trap.

Step 6: Resin solids are bagged and packaged: first use the opening and closing of the unloading valve 21 to sample the resin solids. After the moisture content of the resin solids meets the specified value, close the drying valve 15 on the air intake pipe 13 of the dry air flow and the air extraction pipe 5. The gas outlet valve 9 and the inlet valve 8 on the blowback pipe 4 open the unloading valve 21 to carry out the discharging, bagging and packing of the resin solid.

Therefore, the present invention adopts the PSPI resin filtration and drying system with the above-mentioned structure, effectively solves the problems of clogging and long drying time, improves the working efficiency of the process system, saves the floor space of the entire system, and improves the quality of resin purification.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that: it still Modifications or equivalent replacements can be made to the technical solutions of the present invention, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims (7)

1. A filter-drying system for PSPI resin, characterized in that: the filter comprises a barrel, wherein a filter vat is arranged in the barrel, a cavity is formed between the filter vat and the inner wall of the barrel, a top plate of the barrel is provided with a back blowing pipe, an exhaust pipe, a water inlet pipe and a feed pipe, a side wall of the barrel is provided with an vacuumizing pipe and a drying air flow inlet pipe which are communicated with the cavity, a bottom plate of the barrel is provided with a liquid discharge pipe and a liquid discharge pipe, the liquid discharge pipe is communicated with the cavity, the liquid discharge pipe is provided with a liquid discharge valve, a conductivity meter and a water discharge flowmeter, the liquid discharge pipe is communicated with the bottom of the filter vat, and the liquid discharge pipe is provided with a discharge valve;

the bottom of filter vat is equipped with bowl form filter, be equipped with evenly distributed's lug on the bowl form filter, the bottom of bowl form filter is passed through the buffer connection spare and is fixed vibrating device in cavity bottom is connected, be equipped with powder trap, spray set and feed inlet on the roof of filter vat, spray set is located the roof middle part of filter vat, powder trap pass through give vent to anger hose and blowback hose respectively with the exhaust tube is connected with the blowback union coupling, spray set pass through the water inlet hose with advance water piping connection, the feed inlet pass through the feed hose with the feed pipe is connected.

2. The filter-drying system for PSPI resin according to claim 1, wherein: the discharge valve is located the row material pipe is close to the one end of filter vat, just the discharge valve is the exhibition valve.

3. The filter-drying system for PSPI resin according to claim 2, wherein: the back-blowing pipe is provided with an air inlet valve, the exhaust pipe is provided with an air outlet valve, the water inlet pipe is provided with a water inlet valve, the water inlet pipe is provided with a feed valve, the exhaust pipe is provided with a control valve, and the dry air inlet pipe is provided with a dry valve.

4. A PSPI resin filter drying system according to claim 3, wherein: the bowl-shaped filter plate comprises a bowl bottom filter plate and a bowl wall filter plate which are connected integrally, and an included angle between the bowl bottom filter plate and the bowl wall filter plate is 75 degrees.

5. The filter-drying system for PSPI resin according to claim 4, wherein: the lug is a rivet-shaped lug.

6. The filter-drying system for PSPI resin according to claim 5, wherein: and one end of the air outlet hose, the water inlet hose and one end of the feeding hose, which is close to the filter vat, are provided with check valves.

7. The filter-drying system for PSPI resin according to claim 6, wherein: the inner diameter of the discharge pipe is equal to the diameter of the bowl bottom filter plate.

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