CN116246997B - Jacking device for automated material production and automated material production equipment - Google Patents
Jacking device for automated material production and automated material production equipment Download PDFInfo
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- CN116246997B CN116246997B CN202310206938.8A CN202310206938A CN116246997B CN 116246997 B CN116246997 B CN 116246997B CN 202310206938 A CN202310206938 A CN 202310206938A CN 116246997 B CN116246997 B CN 116246997B
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- ejector pin
- thimble
- guide seat
- slide rail
- cap
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/62—Plastics recycling; Rubber recycling
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Abstract
The application relates to a jacking device for automatic production of materials and automatic production equipment of the materials, which comprises a thimble adjusting structure and a thimble cap structure; the thimble adjusting structure controls the thimble of the thimble cap structure to lift in a stepping driving eccentric rotation mode; the thimble cap structure absorbs the material disc to be separated in a negative pressure adsorption mode. According to the jacking device for the automatic production of the materials, on one hand, the ejector pin is matched with the negative pressure adsorption mode to realize pressure jacking, so that the separation of the materials in the material disc to be separated from the material disc adhesive film is facilitated; on the other hand, the lifting of the thimble is realized in a mode of driving the eccentric rotation in a stepping way, which is beneficial to accurately controlling the fine position of the lifting of the thimble and is beneficial to large-scale repeated error-free application in batches; on the other hand, the thimble cap structure is easy to be matched to realize replacement of the thimble, and is favorable for adapting to various material trays to be separated with different specifications and material separation thereof; on the other hand, the structure design is ingenious, and the method is beneficial to being applied to miniature materials such as miniature chips.
Description
Technical Field
The application relates to the field of chip automatic production, in particular to a jacking device for automatic material production and automatic material production equipment.
Background
A wafer may be processed into a plurality of chips (chips) that are placed on top of a film commonly known as a blue film or glue film prior to separation, and typically are separated one by one prior to use.
Chinese patent publication No. CN101752204a discloses a method for separating a chip from a plastic film and a method for taking out the chip, wherein a thimble device including a scraper is used, the chip is first positioned at a first position above the thimble device, the chip is horizontally moved by a suitable distance along a first direction, and the scraper of the thimble device is substantially located adjacent to an edge portion of the chip; opening vacuum to adsorb the chip and the adhesive film downwards; moving a scraping plate of the thimble device upwards to prop against the adhesive film on the back of the chip; the chip and the adhesive film are horizontally moved along a second direction by a distance equal to the length of the chip, wherein the second direction is opposite to the first direction, and the chip and the adhesive film can be separated.
However, the above technology needs to use a scraping plate when the chips are separated, which causes a risk of damaging the chips, and in addition, the chips need to be moved together with the adhesive film, resulting in low separation efficiency.
The utility model discloses a chinese patent with publication No. CN218447858U, a device convenient to separation of blue membrane and chip is disclosed, including hollow blue membrane frame, X, Y axle actuating mechanism and separating mechanism, separating mechanism includes the base, Z axle actuating mechanism, the separating tube, the thimble, thimble fixing base and buffer assembly, the separating tube passes through Z axle actuating mechanism and base sliding connection, and the slip direction is the upper and lower direction that is close to or keeps away from the blue membrane frame, the bottom intercommunication vacuum negative pressure machine of separating tube, the symmetry is equipped with two spouts on the inner wall of separating tube, the both sides of thimble fixing base all are equipped with the connecting block, connecting block and spout sliding connection, the thimble can be dismantled with the thimble fixing base and be connected, buffer assembly installs in the spout, and be located connecting block and be close to the top one side of separating tube. The technology is aimed at chips with different specifications, the ejector pins can be conveniently replaced, and in addition, the sliding speed and the jacking height of the ejector pins can be limited through the arrangement of the buffer assembly, so that the chips are prevented from being damaged.
However, the above-mentioned technical structure is limited greatly, it is not suitable for separating small chip especially microchip, and it utilizes the elastic force of the spring to buffer and slow down the structure design of the speed that connecting block and thimble slide, has seriously affected its application in microchip.
Disclosure of Invention
Based on the above, it is necessary to provide a jacking device and an automatic material production device for automatic material production, which can be applied to automatic separation of chips and other production processes.
In one embodiment, a jacking device for automatic production of materials comprises a thimble adjusting structure and a thimble cap structure;
the thimble adjusting structure controls the thimble of the thimble cap structure to lift in a stepping driving eccentric rotation mode;
the thimble cap structure absorbs the material disc to be separated in a negative pressure adsorption mode, and the thimble is lifted to separate the material of the material disc to be separated from the material disc adhesive film.
According to the jacking device for the automatic production of the materials, on one hand, the ejector pin is matched with the negative pressure adsorption mode to realize pressure jacking, so that the separation of the materials in the material disc to be separated from the material disc adhesive film is facilitated; on the other hand, the lifting of the thimble is realized in a mode of driving the eccentric rotation in a stepping way, which is beneficial to accurately controlling the fine position of the lifting of the thimble and is beneficial to large-scale repeated error-free application in batches; on the other hand, the thimble cap structure is easy to be matched to realize replacement of the thimble, and is favorable for adapting to various material trays to be separated with different specifications and material separation thereof; on the other hand, the structure design is ingenious, and the method is beneficial to being applied to miniature materials such as miniature chips.
In one embodiment, the thimble cap structure comprises a floating block, an air pipe joint, a thimble guide seat, a thimble structure and a thimble cap;
the floating block is arranged below the thimble guide seat, the thimble structure is arranged on the thimble guide seat, the thimble cap is arranged on the thimble guide seat, and the thimble of the thimble structure is arranged on the floating block and has a penetrating state and a retracting state relative to the thimble cap under the action of the floating block; the ejector pin cap is matched with the ejector pin guide seat to form a negative pressure chamber, the ejector pin structure is accommodated in the negative pressure chamber, and the air pipe joint is used for communicating a vacuum pump with the negative pressure chamber;
the thimble adjusting structure comprises a stepping motor, an inductor, an eccentric cam and a connecting plate;
the thimble guide seat, the stepping motor and the inductor are all fixed on the connecting plate, the stepping motor is electrically connected with the inductor, the eccentric cam is installed on an output shaft of the stepping motor, the eccentric cam is adjacent to the inductor and is contacted with the floating block, and the eccentric cam is used for abutting the floating block at different positions under the drive of the output shaft so as to control the position of the thimble, so that the thimble is in a penetrating state or a retracting state; the eccentric cam is also used for driving the stepping motor to reversely step by step to rotate by the sensor when rotating to the sensor, so that the eccentric cam adjusts the rotating direction.
Further, in one embodiment, the connecting plate is provided with a shaft groove, the output shaft passes through the shaft groove, and the eccentric cam and the stepping motor are respectively located at two sides of the connecting plate.
Further, in one embodiment, the slider includes a body, a deformed protruding structure, a fixing portion, and an elastic member;
the deformation protruding structure and the fixing part are arranged on the body and are respectively positioned on two sides of the body, and the fixing part is arranged under the thimble guide seat or the first guide seat thereof;
the floating block is provided with a yielding groove between the deformation protruding structure and the body, and the deformation protruding structure has a deformation state in the yielding groove relative to the body;
the elastic piece penetrates through the body and is installed on the floating block, and the thimble is arranged on the elastic piece.
Further, in one embodiment, the slider further includes a motion receiving base mounted on the elastic member, and the ejector pin is disposed on the motion receiving base.
In one embodiment, the thimble adjusting structure further comprises an air cylinder mounting seat, a first sliding rail and an air cylinder;
The first slide rail and the cylinder are both fixed on the cylinder mounting seat, the connecting plate is arranged on the first slide rail, the cylinder is in driving connection with the connecting plate so that the connecting plate slides on the first slide rail, and the connecting plate is used for preliminarily positioning the thimble cap structure to match with the eccentric cam to realize accurate positioning.
Further, in one embodiment, the thimble adjusting structure further comprises a cylinder connecting block, a cylinder limiting block and a limiting screw;
the output part of the air cylinder is connected with the connecting plate through the air cylinder connecting block;
the cylinder limiting block is fixed on the cylinder mounting seat and provided with a limiting groove;
the cylinder connecting block part holding is in the spacing groove, the spacing screw install in on the cylinder stopper and at least part adjustable be located in the spacing groove, the spacing screw through its protrusion in the length in the spacing groove, the restriction cylinder connecting block in the maximum height in the spacing groove.
In one embodiment, the thimble adjusting structure further comprises an adjusting plate, a second sliding rail, a second adjusting screw and a second adjusting block;
the second sliding rail and the second adjusting block are both fixed on the adjusting plate, the cylinder mounting seat is arranged on the second sliding rail, and the second adjusting screw is fixed on the cylinder mounting seat and is in threaded connection with the second adjusting block, so as to control the cylinder mounting seat to slide on the second sliding rail; the second sliding rail and the first sliding rail are provided with mutually perpendicular sliding directions.
In one embodiment, the thimble adjusting structure further comprises a base, a third adjusting block, a third adjusting screw and a third sliding rail;
the third adjusting block and the third sliding rail are both fixed on the base, the adjusting plate is arranged on the third sliding rail, and the third adjusting screw is fixed on the adjusting plate and is in threaded connection with the third adjusting block for controlling the adjusting plate to slide on the third sliding rail; the third sliding rail, the second sliding rail and the first sliding rail have mutually perpendicular sliding directions in a three-dimensional space.
Further, in one embodiment, the thimble adjustment structure further includes a first screw adjustment connecting plate and a second screw adjustment connecting plate; one end of the first screw-adjusting connecting plate is connected with the adjusting plate, the other end of the first screw-adjusting connecting plate is connected with the base in a screw-connecting mode, and the first screw-adjusting connecting plate is used for enabling the adjusting plate to slide on the third sliding rail in a loosening state and preventing the adjusting plate from sliding on the third sliding rail in a fastening state; one end of the second screw adjusting connecting plate is connected with the adjusting plate, the other end of the second screw adjusting connecting plate is connected with the cylinder mounting seat in a screw mode, and the second screw adjusting connecting plate is used for enabling the cylinder mounting seat to slide on the second sliding rail in a loosening state and preventing the cylinder mounting seat from sliding on the second sliding rail in a fastening state.
In one embodiment, the eccentric cam has a sensing piece, and the sensor is a photoelectric sensor, and the sensor is used for driving the stepping motor to reversely rotate in a stepping manner when sensing light blocked by the sensing piece.
In one embodiment, the sensing piece is provided with a fan-shaped structural member, and the sensor is used for driving the stepping motor to reversely rotate in a stepping manner when light is shielded by the fan-shaped structural member.
In one embodiment, the thimble guide holder comprises a first guide holder, a first sealing ring, a second guide holder and a second sealing ring;
the second guide seat is fixed on the first guide seat and is sealed with the first guide seat through the first sealing ring, and the thimble cap is arranged on the second guide seat and is sealed with the second guide seat through the second sealing ring;
the first guide seat, the second guide seat and the thimble cap form the negative pressure chamber together, and the air pipe joint is fixed on the first guide seat and communicated with the negative pressure chamber through the first guide seat; and/or the number of the groups of groups,
the thimble guide seat also comprises a floating shaft, and the floating shaft is positioned in the negative pressure cavity;
The floating shaft is fixed on the floating block or an elastic piece thereof, the thimble structure is arranged on the floating shaft, and the floating shaft is used for driving the thimble structure to move relative to the thimble cap under the action of the floating block so as to enable the thimble to have the penetrating state and the retracting state.
Further, in one embodiment, the thimble structure further includes a thimble fixing seat and a thimble locking cap, the thimble fixing seat is mounted on the thimble guide seat, the thimble is detachably mounted on the thimble fixing seat, and the thimble locking cap is mounted on the thimble fixing seat and locks the thimble in a fastening state.
Further, in one embodiment, the thimble cap is provided with a passing pinhole and an adsorption hole, the thimble is arranged in the passing pinhole in a penetrating manner to be abutted against the material on the film of the material disc to be separated, and the adsorption hole is used for contacting the film at other positions of the material disc to be separated.
In one embodiment, the material is a chip.
In one embodiment, a material automatic production device comprises a feeding device, a discharging device and the jacking device for material automatic production according to any embodiment;
The feeding device is used for conveying a material disc to be separated to a thimble cap structure of the jacking device for automatic production of the materials;
the discharging device is used for collecting materials which are separated from the material disc to be separated and the material disc adhesive film.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments or the conventional techniques of the present application, the drawings required for the descriptions of the embodiments or the conventional techniques will be briefly described below, and it is apparent that the drawings in the following descriptions are only some embodiments of the present application, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.
Fig. 1 is a schematic structural diagram of an embodiment of a jacking device for automatic production of materials according to the present application.
FIG. 2 is a schematic view of the structure of the thimble cap of the embodiment shown in FIG. 1.
Fig. 3 is an exploded view of the embodiment of fig. 2.
FIG. 4 is a schematic view of the slider structure of the embodiment of FIG. 3.
Fig. 5 is another schematic representation of the embodiment of fig. 1.
Fig. 6 is an enlarged schematic view at a of the embodiment shown in fig. 5.
Fig. 7 is an enlarged schematic view of embodiment B of fig. 6.
Fig. 8 is a schematic diagram showing a comparison of the states of the embodiment shown in fig. 7.
FIG. 9 is a schematic view of the thimble adjustment structure of the embodiment shown in FIG. 1.
Fig. 10 is an exploded view of the embodiment of fig. 9.
FIG. 11 is another schematic view of the embodiment of FIG. 1.
Fig. 12 is an enlarged schematic view of embodiment C of fig. 11.
Reference numerals:
the device comprises a thimble adjusting structure 100, a base 101, a third adjusting block 102, a third adjusting screw 103, a third sliding rail 104, an adjusting plate 105, a second sliding rail 106, a cylinder mounting seat 107, a first sliding rail 108, a cylinder 109, a stepping motor 110, an inductor 111, an induction piece 112, an eccentric cam 113, a connecting plate 114, a cylinder connecting block 115, a cylinder limiting block 116, a limiting screw 117, a first screw adjusting connecting plate 118, a second adjusting screw 119, a second adjusting block 120, a second screw adjusting connecting plate 121, a shaft groove 122 and a limiting groove 123;
thimble cap structure 200, slider 218, air tube connector 219, first guide holder 220, first seal ring 221, second guide holder 222, floating shaft 223, second seal ring 224, thimble fixing base 225, thimble locking cap 226, thimble 227, thimble cap 228, needle passing hole 229, adsorption hole 230, thimble guide holder 231, body 232, deformation protrusion structure 233, relief groove 234, fixing portion 235, elastic member 236, action receiving base 237, thimble structure 238;
A show-through state 300, a zoom-in state 400.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and the like are used in the description of the present application for the purpose of illustration only and do not represent the only embodiment.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" on a second feature may be that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through intermedial media. Moreover, a first feature "above," "over" and "on" a second feature may be a first feature directly above or obliquely above the second feature, or simply indicate that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely under the second feature, or simply indicating that the first feature is less level than the second feature.
Unless defined otherwise, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and/or" as used in the description of the present application includes any and all combinations of one or more of the associated listed items.
The application discloses a jacking device for automatic production of materials and automatic production equipment of the materials, which comprises a part of structures or all structures of the following embodiments; namely, the jacking device for automatic material production and the automatic material production equipment comprise part of or all of the following technical characteristics. In one embodiment of the application, a jacking device for automatic production of materials comprises a thimble adjusting structure and a thimble cap structure; the thimble adjusting structure controls the thimble of the thimble cap structure to lift in a stepping driving eccentric rotation mode; the thimble cap structure absorbs the material disc to be separated in a negative pressure adsorption mode, and the thimble is lifted to separate the material of the material disc to be separated from the material disc adhesive film. According to the jacking device for the automatic production of the materials, on one hand, the ejector pin is matched with the negative pressure adsorption mode to realize pressure jacking, so that the separation of the materials in the material disc to be separated from the material disc adhesive film is facilitated; on the other hand, the lifting of the thimble is realized in a mode of driving the eccentric rotation in a stepping way, which is beneficial to accurately controlling the fine position of the lifting of the thimble and is beneficial to large-scale repeated error-free application in batches; on the other hand, the thimble cap structure is easy to be matched to realize replacement of the thimble, and is favorable for adapting to various material trays to be separated with different specifications and material separation thereof; on the other hand, the structure design is ingenious, and the method is beneficial to being applied to miniature materials such as miniature chips.
In one embodiment, a jacking device for automatic production of materials is shown in fig. 1, and includes a thimble adjustment structure 100 and a thimble cap structure 200; the thimble adjusting structure 100 controls the thimble of the thimble cap structure 200 to lift in a stepping driving eccentric rotation mode; the thimble cap structure 200 absorbs the material disc to be separated in a negative pressure adsorption mode, and the thimble is lifted to separate the material of the material disc to be separated from the material disc adhesive film. When the ejector pin is lifted, the material is lifted from the tray adhesive film, so that the material is separated from the tray adhesive film, the material can be removed in a sucking mode in the state, and then the ejector pin is lowered to continuously process another material of the tray to be separated.
As shown in FIG. 2, in one embodiment, the thimble cap structure 200 comprises a slider 218, an air tube connector 219, a thimble guide seat 231, a thimble structure 238, and a thimble cap 228; the floating block 218 is installed under the thimble guide seat 231, the thimble cap 228 is covered on the thimble guide seat 231, the thimble cap 228 cooperates with the thimble guide seat 231 to form a negative pressure chamber, the thimble structure 238 is installed on the thimble guide seat 231, the thimble structure 238 is accommodated in the negative pressure chamber, and the air pipe connector 219 is used for communicating a vacuum pump with the negative pressure chamber. Further, in one embodiment, the number of the air connectors 219 is two, one of which is connected to the vacuum pump and the negative pressure chamber, and the other is connected to the air valve and the negative pressure chamber, and is used for controlling the air suction from the negative pressure chamber and the external air supply into the negative pressure chamber. By means of the design, the negative pressure state of the negative pressure cavity is controlled rapidly and accurately through the cooperation of the vacuum pump, so that the material tray adhesive film of the material tray to be separated is adsorbed accurately, the material tray to be separated and the material separation of the material tray to be separated are achieved, and the material of the material tray to be separated is separated from the material tray adhesive film.
Referring to fig. 3, in one embodiment, the thimble guide holder 231 includes a first guide holder 220, a first seal ring 221, a second guide holder 222, and a second seal ring 224; the second guide seat 222 is fixed on the first guide seat 220 and is sealed with the first guide seat 220 through the first sealing ring 221, and the thimble cap 228 is covered on the second guide seat 222 and is sealed with the second guide seat 222 through the second sealing ring 224; the first guide seat 220, the second guide seat 222 and the thimble cap 228 together form the negative pressure chamber, and the air pipe connector 219 is fixed on the first guide seat 220 and is communicated with the negative pressure chamber through the first guide seat 220; in one embodiment, the thimble guide seat 231 further includes a floating shaft 223, and the floating shaft 223 is located in the negative pressure chamber; the floating shaft 223 is fixed on the slider 218 or the elastic member 236 thereof, the ejector pin structure 238 is mounted on the floating shaft 223, and the floating shaft 223 is configured to drive the ejector pin structure 238 to move relative to the ejector pin cap 228 under the action of the slider 218, as shown in fig. 6 and 7, so that the ejector pin 227 has the extended state 300, or as shown in fig. 8, the floating shaft 223 is configured to drive the ejector pin structure 238 to move relative to the ejector pin cap 228 under the action of the slider 218, so that the ejector pin 227 has the retracted state 400. The design is beneficial to realizing a lifting structure of reciprocating motion, has compact and simple overall structure and has the advantage of simple structure.
As shown in FIG. 3, in one embodiment, the ejector pin structure 238 includes an ejector pin 227, and further, the ejector pin structure 238 further includes an ejector pin fixing base 225 and an ejector pin locking cap 226, the ejector pin fixing base 225 is mounted on the ejector pin guide seat 231, the ejector pin 227 is detachably mounted on the ejector pin fixing base 225, and the ejector pin locking cap 226 is mounted on the ejector pin fixing base 225 and locks the ejector pin 227 in a fastened state. In one embodiment, the thimble adjustment mechanism 100 controls the thimble 227 of the thimble cap mechanism 200 to lift in a step-driven eccentric rotation manner; the thimble cap structure 200 absorbs the material disc to be separated in a negative pressure adsorption mode, and is lifted up through the thimble 227 to separate the material of the material disc to be separated from the material disc adhesive film; ejector pins 227 of ejector pin structure 238 are disposed on slider 218 and have an ejected state 300 relative to ejector pin cap 228 as shown in FIG. 7 and a retracted state 400 relative to ejector pin cap 228 as shown in FIG. 8 under the influence of slider 218; the floating axle 223 is configured to drive the ejector pin structure 238 to move relative to the ejector pin cap 228 under the action of the slider 218, so that the ejector pin 227 has the retracted state 400 and the extended state 300. By means of the design, jacking structures suitable for materials with different miniature sizes can be provided for equipment, and the problem that the materials are easy to adhere to a material loading tray adhesive film, namely a blue film, when the miniature materials are taken by a miniature chip is solved, so that universality of the equipment is realized, and high precision and high stability of automatic feeding are achieved.
In combination with fig. 7 and 8, in one embodiment, the thimble cap 228 is provided with a pinhole 229 and an adsorption hole 230, the thimble 227 is disposed in the pinhole 229 in a penetrating manner to abut against the material on the film of the material disc to be separated, and the adsorption hole 230 is used for contacting the film at other positions of the material disc to be separated. In one embodiment, the material is a chip. The embodiment of the application relates to automatic production equipment for material semiconductors, which can realize the separation of materials and trays of multi-specification miniature semiconductors, especially multi-specification chips, in the automatic equipment. The existing equipment has no structure, leakage can occur in the material taking process, and the problems of inaccurate material taking position, low efficiency and the like are solved due to the adhesion of the blue film placed with the incoming material when the incoming material is taken.
In order to improve the separation efficiency, in one embodiment, the number of the ejector pins 227 is at least two, and each ejector pin 227 is regularly arranged; further, in one embodiment, each of the pins 227 is arranged in a linear shape or a matrix shape. Further, in one embodiment, at least one material position is spaced between each ejector pin 227, that is, at least two materials separated at a time, and at least one other material that is not separated is spaced between each ejector pin. Such a design facilitates the separation of multiple materials, such as multiple chips, at a time.
In order to precisely control the lifting height of the ejector pins and avoid damaging materials during the lifting process, further, in one embodiment, as shown in fig. 4, the slider 218 includes a body 232, a deformation protrusion 233, a fixing portion 235, and an elastic member 236; the deformation protrusion structure 233 and the fixing portion 235 are both disposed on the body 232 and are respectively located at two sides of the body 232, and the fixing portion 235 is mounted under the thimble guide seat 231 or the first guide seat 220 thereof; referring to fig. 5 and 6, the slider 218 has a relief groove 234 formed between the deformation protrusion structure 233 and the body 232, and the deformation protrusion structure 233 has a deformation state in the relief groove 234 relative to the body 232; referring to fig. 3, the elastic member 236 is mounted on the slider 218 through the body 232, and the ejector pin 227 is disposed on the elastic member 236. Further, in one embodiment, the slider 218 further includes a motion receiving base 237 mounted on the elastic member 236, and the ejector pin 227 is disposed on the motion receiving base 237.
In each embodiment, as shown in fig. 9 and 10, the thimble adjustment structure 100 includes a stepping motor 110, an inductor 111, an eccentric cam 113, and a connecting plate 114; the stepper motor 110 and the sensor 111 are both fixed to the connection plate 114, and the stepper motor 110 is electrically connected to the sensor 111. Referring to fig. 5 and 6, the thimble guide seat 231 is fixed on the connecting plate 114; in one embodiment, the first guide seat 220 of the thimble guide seat 231 is fixed on the connecting plate 114. The eccentric cam 113 is mounted on the output shaft of the stepper motor 110, the eccentric cam 113 is adjacent to the sensor 111, the eccentric cam 113 is in contact with the slider 218, the eccentric cam 113 is used for abutting against the slider 218 in different positions under the driving of the output shaft to control the position of the ejector pin 227, so that the ejector pin 227 is in the out state 300 or the ejector pin 227 is in the retracted state 400; that is, the eccentric cam 113 and the slider 218 are always in contact, for example, they form point contact or line contact, and when the topmost end of the eccentric cam 113 is located at different arc points, the protruding height of the ejector pin 227 is different, so as to realize accurate limitation of ejection height, and achieve the purpose of separating the material from the tray adhesive film. The eccentric cam 113 is further configured to drive the stepping motor 110 to reversely step-rotate by the sensor 111 when rotating to the sensor 111, so that the eccentric cam 113 adjusts the rotation direction. Further, by controlling the eccentric distance between the eccentric cam 113 and the axis of the stepping motor 110, the design can control the ascending and descending distance of the thimble, and form precise reciprocating stroke control, so that the lifting mechanism with simple structure and precise position is provided, the operation failure rate is low, and the possibility of damaging materials is extremely low, and the lifting mechanism is applicable to sampling separation or scale separation.
Further, in one embodiment, as shown in fig. 10, the connecting plate 114 is provided with a shaft slot 122, the output shaft passes through the shaft slot 122, and the eccentric cam 113 and the stepper motor 110 are respectively located on two sides of the connecting plate 114. By means of the design, the overall dimension of the jacking device for automatic production of materials is reduced through the balance design of the two sides, so that the distribution density of the jacking device for automatic production of materials is increased, a material separation array is formed, and further, large-batch separation treatment of a small factory building is achieved, and the separation efficiency and the separation capacity are improved in a limited production area.
In one embodiment, as shown in fig. 11 and 12, the thimble adjustment structure 100 further includes a cylinder mounting seat 107, a first sliding rail 108, and a cylinder 109; the first slide rail 108 and the air cylinder 109 are both fixed on the air cylinder mounting seat 107, the connecting plate 114 is arranged on the first slide rail 108, the air cylinder 109 is in driving connection with the connecting plate 114 so that the connecting plate 114 slides on the first slide rail 108, and the air cylinder 109 is used for preliminarily positioning the thimble cap structure 200 to match with the eccentric cam 113 to realize accurate positioning; further, the accurate positioning jacking materials are realized in a stepping driving eccentric rotation mode, so that the materials are separated from the tray adhesive film, the thimble structure and the thimble cap are driven to integrally slide from the first sliding rail through the cylinder driving thimble guide seat if necessary, and therefore, the quick rough positioning is realized, and the positioning of the thimble along a space rectangular coordinate system in a three-dimensional space is facilitated by combining the embodiment with the second sliding rail and the third sliding rail.
In order to avoid damaging the material during the lifting, further, in one embodiment, as shown in fig. 12, the thimble adjustment structure 100 further includes a cylinder connection block 115, a cylinder stopper 116, and a stopper screw 117; the output part of the cylinder 109 is connected with the connecting plate 114 through the cylinder connecting block 115; the cylinder limiting block 116 is fixed on the cylinder mounting seat 107 and provided with a limiting groove 123; the cylinder connecting block 115 is partially accommodated in the limiting groove 123, the limiting screw 117 is mounted on the cylinder limiting block 116 and is at least partially adjustably positioned in the limiting groove 123, and the limiting screw 117 protrudes out of the length of the limiting groove 123 through the limiting screw, so that the maximum height of the cylinder connecting block 115 in the limiting groove 123 is limited. The design is favorable to protecting materials, and especially the jacking device matched with the limit screw to enable the automatic production of the materials is suitable for separation treatment of materials with different specifications.
In one embodiment, as shown in fig. 9 and 10, the thimble adjustment structure 100 further includes an adjustment plate 105, a second sliding rail 106, a second adjustment screw 119, and a second adjustment block 120; the second sliding rail 106 and the second adjusting block 120 are both fixed on the adjusting plate 105, the cylinder mounting seat 107 is disposed on the second sliding rail 106, and the second adjusting screw 119 is fixed on the cylinder mounting seat 107 and is screwed with the second adjusting block 120, so as to control the cylinder mounting seat 107 to slide on the second sliding rail 106; the second sliding rail 106 and the first sliding rail 108 have sliding directions perpendicular to each other. Thus, the positioning adjustment in the two-dimensional direction is realized.
In one embodiment, as shown in fig. 9 and 10, the thimble adjustment structure 100 further includes a base 101, a third adjustment block 102, a third adjustment screw 103, and a third sliding rail 104; the third adjusting block 102 and the third sliding rail 104 are both fixed on the base 101, the adjusting plate 105 is arranged on the third sliding rail 104, and the third adjusting screw 103 is fixed on the adjusting plate 105 and is screwed with the third adjusting block 102, so as to control the adjusting plate 105 to slide on the third sliding rail 104; the third sliding rail 104, the second sliding rail 106 and the first sliding rail 108 have sliding directions perpendicular to each other in a three-dimensional space. Thus realizing the positioning adjustment in the three-dimensional direction.
Further, in one embodiment, as shown in fig. 9 and 10, the thimble adjustment structure 100 further includes a first screw adjustment connecting plate 118 and a second screw adjustment connecting plate 121; one end of the first screw connection plate 118 is connected to the adjustment plate 105, and the other end is screw-connected to the base 101, so as to enable the adjustment plate 105 to slide on the third slide rail 104 in a loose state, and prevent the adjustment plate 105 from sliding on the third slide rail 104 in a fastened state; one end of the second screw connection plate 121 is connected to the adjustment plate 105, and the other end is screw-connected to the cylinder mounting seat 107, so as to enable the cylinder mounting seat 107 to slide on the second sliding rail 106 in a loose state, and prevent the cylinder mounting seat 107 from sliding on the second sliding rail 106 in a fastened state. The design is beneficial to simply and conveniently adjusting the relative position of the thimble and the material disc to be separated, is beneficial to accurately adjusting the position of the thimble in the lifting direction before jacking separation, and ensures that the thimble only needs to move in the lifting direction in the subsequent jacking operation process.
As shown in fig. 9 and 10, in one embodiment, the eccentric cam 113 has a sensing piece 112, the sensor 111 is a photoelectric sensor, and the sensor 111 is used for driving the stepper motor 110 to reversely rotate in a stepping manner when light is blocked by the sensing piece 112. In one embodiment, the sensing piece 112 has a fan-shaped structural member, and the sensor 111 is used for driving the stepper motor 110 to reversely rotate in a stepping manner when light is blocked by the fan-shaped structural member. The design is favorable for realizing repeated motion with low failure rate, and has low realization cost and small occupied space, thus having higher applicability.
The following is a detailed description of the jacking device for automatic production of materials according to the present application, with reference to fig. 1 to 12.
The jacking device mainly comprises a thimble adjusting structure 100, a thimble cap structure 200, a vacuum pump, an air valve and related electric control equipment.
The thimble adjustment structure 100 includes a base 101; a third adjusting block 102, a third adjusting screw 103, a third sliding rail 104 and an adjusting plate 105 which are arranged on the base 101; a second slide rail 106 and a cylinder mount 107 mounted on the adjusting plate 105; a first slide rail 108 mounted on the cylinder mount 107 and a cylinder 109; a connecting plate 114 connected to the first slide rail 108; the stepping motor 110, the sensor 111, the cylinder connecting block 115, the cylinder limiting block 116 and the limiting screw 117 are positioned on the connecting plate 114; an eccentric cam 113 and a sensing piece 112 are mounted on the stepping motor 110.
Thimble cap structure 200 includes slider 218, air fitting 219, first guide pad 220: the first sealing ring 221, the second guiding seat 222 and the thimble fixing seat 225 are arranged on the first guiding seat 220, the second sealing ring 224 is arranged on the second guiding seat 222, the thimble locking cap 226 and the thimble 227 are arranged on the thimble fixing seat 225, and the thimble cap 228 is arranged on the second guiding seat 222.
The principle of the thimble adjusting structure is described as follows: the cylinder 109 drives the connecting plate 114 through the first sliding rail 108, so that the thimble cap structure is driven to move to the required height for coarse positioning, the stepping motor 110 starts to start, the eccentric cam 113 is driven to move, and the thimble cap structure 200 is driven to move.
The principle of the thimble cap structure 200 is described as follows: the stepping motor 110 drives the center of the eccentric cam 113 to be eccentric with the motor shaft, the eccentric center distance is the distance that the thimble 227 in the thimble cap structure can reciprocate up and down, the eccentric cam 113 contacts with the floating block 218, the floating block 218 is driven to move up and down when the eccentric cam 113 rotates, and the difference between the highest point and the lowest point is the distance between the axis of the stepping motor 110 and the axis of the eccentric cam 113.
The floating block 218 in the stepping motor 110 of the thimble cap structure 200 is connected with the floating shaft 223, the thimble fixing seat 225 is connected with the thimble 227, when the maximum stroke is lifted, the thimble 227 passes through the passing needle hole 229 on the thimble cap 228, the material is lifted from the material-feeding blue film to a height exceeding the height, and the air pipe connector 219 is vacuumized, so that the negative pressure state formed inside the whole thimble cap structure 200 is close to the vacuum state, namely, the negative pressure state formed inside the thimble cap 228 is close to the vacuum state, for example, the blue film of the material-feeding blue film is adsorbed on the thimble cap 228, and the material and the blue film are better separated.
The specific structure of the jacking device for automatic production of materials can be used as a general jacking device of equipment, the structure driven by the stepping motor 110 is driven by the eccentric cam 113 to vertically reciprocate in the direction vertical to the stepping motor 110 by 90 degrees, and according to different reciprocating stroke requirements, only the size of the eccentric cam 113 and the eccentric distance between the eccentric cam 113 and the axis of the stepping motor 110 are required to be adjusted, and the rest overall shape and principle of the structure are unchanged, so that the jacking device has very strong universality.
In one embodiment, a material automatic production device comprises a feeding device, a discharging device and the jacking device for material automatic production according to any embodiment; the feeding device is used for conveying a material disc to be separated to a thimble cap structure of the jacking device for automatic production of the materials; the discharging device is used for collecting materials which are separated from the material disc to be separated and the material disc adhesive film. By the design, on one hand, the ejector pin is matched with the negative pressure adsorption mode to realize pressure jacking, so that the separation of materials in the material disc to be separated from the material disc adhesive film is facilitated; on the other hand, the lifting of the thimble is realized in a mode of driving the eccentric rotation in a stepping way, which is beneficial to accurately controlling the fine position of the lifting of the thimble and is beneficial to large-scale repeated error-free application in batches; on the other hand, the thimble cap structure is easy to be matched to realize replacement of the thimble, and is favorable for adapting to various material trays to be separated with different specifications and material separation thereof; on the other hand, the structure design is ingenious, and the method is beneficial to being applied to miniature materials such as miniature chips.
It should be noted that other embodiments of the present application further include a jacking device and an automatic material production device, which are formed by combining the technical features of the above embodiments and are capable of implementing automatic material production.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of the application should be determined from the following claims.
Claims (11)
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| CN202310206938.8A CN116246997B (en) | 2023-03-06 | 2023-03-06 | Jacking device for automated material production and automated material production equipment |
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