CN116246997A - Jacking device for automatic material production and automatic material production equipment - Google Patents

Abstract

The application relates to a jacking device for automatic production of materials and automatic production equipment of the materials, comprising a thimble adjusting structure and a thimble cap structure; the thimble adjusting structure controls the thimble of the thimble cap structure to lift in a stepping driving eccentric rotation mode; the thimble cap structure absorbs the material disc to be separated in a negative pressure adsorption mode. According to the jacking device for the automatic production of the materials, on one hand, the ejector pin is matched with the negative pressure adsorption mode to realize pressure jacking, so that the separation of the materials in the material disc to be separated from the material disc adhesive film is facilitated; on the other hand, the lifting of the thimble is realized in a mode of driving the eccentric rotation in a stepping way, which is beneficial to accurately controlling the fine position of the lifting of the thimble and is beneficial to large-scale repeated error-free application in batches; on the other hand, the thimble cap structure is easy to be matched to realize replacement of the thimble, and is favorable for adapting to various material trays to be separated with different specifications and material separation thereof; on the other hand, the structure design is ingenious, and the method is beneficial to being applied to miniature materials such as miniature chips.

Description

Jacking device for automatic material production and automatic material production equipment

technical field

This application relates to the field of automatic chip production, in particular to a jacking device for automatic production of materials and automatic production equipment for materials.

Background technique

A wafer can be processed into multiple chips (Chips). Before separation, these chips are placed on a film commonly known as blue film or adhesive film. Before using the chips, these chips usually need to be separated one by one.

The Chinese patent with the publication number CN101752204A discloses a method for separating a chip from an adhesive film and a method for taking out a chip, in which a thimble device including a scraper is used, and the chip is first positioned at the first position above the thimble device, along the first Move the above-mentioned chip horizontally with an appropriate distance in the direction. The scraper of the thimble device is generally located near the edge of the above-mentioned chip; turn on the vacuum to absorb the chip and the adhesive film downward; move the scraper of the thimble device upward to hold the chip The adhesive film on the back; the chip and the adhesive film can be separated from the adhesive film by moving the chip and the adhesive film horizontally along the second direction for a distance of one chip length, wherein the second direction is opposite to the first direction.

However, the above-mentioned technology needs to use a scraper when separating the chip, which will cause the risk of damaging the chip. In addition, the chip needs to move together with the adhesive film, resulting in low separation efficiency.

The Chinese patent with the publication number CN218447858U discloses a device that facilitates the separation of the blue film and the chip, including a hollow blue film frame, X and Y axis drive mechanisms and a separation mechanism. The separation mechanism includes a base, a Z axis drive mechanism, and a separation tube. , thimble, thimble fixing seat and buffer assembly, the separation tube is slidingly connected with the base through the Z-axis drive mechanism, and the sliding direction is the up and down direction close to or away from the blue membrane frame, the bottom of the separation tube is connected to the vacuum negative pressure machine, and the inner wall of the separation tube There are two chute symmetrically on the top, and there are connecting blocks on both sides of the thimble fixing seat. near the top side of the separation tube. This technology can easily replace the thimble for chips of different specifications. In addition, the setting of the buffer component can limit the sliding speed and jacking height of the thimble to avoid damage to the chip.

However, the above-mentioned technical structure has relatively large limitations, and is not suitable for separating small chips, especially microchips, and its structural design of using the elastic force of the spring to buffer and decelerate the sliding speed of the connecting block and the thimble has seriously affected its application in microchips.

Contents of the invention

Based on this, it is necessary to provide a lifting device for automatic material production and automatic material production equipment, which can be applied to automatic separation of chips and other production processes.

In one embodiment, a jacking device for automatic material production, including a thimble adjustment structure and a thimble cap structure;

The thimble adjusting structure controls the lifting of the thimble of the thimble cap structure in a step-driven eccentric rotation manner;

The thimble cap structure absorbs the material disc to be separated by negative pressure adsorption, and lifts up through the thimble to separate the material of the material disc to be separated from the film of the material disc.

The lifting device for the automatic production of the above-mentioned materials, on the one hand, realizes the pressure lifting by means of thimble and negative pressure adsorption, which is beneficial to realize the separation of the material in the material tray to be separated from the film of the tray; on the other hand, it uses stepping to drive eccentric rotation It is beneficial to accurately control the fine position of the thimble lifting, and is conducive to large-scale repetitive error-free applications in batches; on the other hand, it is easy to cooperate with the thimble cap structure to realize the replacement of thimbles, which is conducive to adapting to various Specifications of the to-be-separated material tray and material separation; on the other hand, due to the ingenious structural design, it is beneficial to be applied to micro materials such as micro chips.

In one of the embodiments, the thimble cap structure includes a floating block, an air pipe joint, a thimble guide seat, a thimble structure and a thimble cap;

The floating block is installed under the thimble guide seat, the thimble structure is installed on the thimble guide seat, the thimble cap is arranged on the thimble guide seat, and the thimble structure's thimble is arranged on the thimble guide seat. On the floating block, and under the action of the floating block, it has a penetrating state and a retracting state relative to the thimble cap; the thimble cap cooperates with the thimble guide seat to form a negative pressure chamber, and the thimble structure accommodates In the negative pressure chamber, the air pipe joint is used to communicate with the vacuum pump and the negative pressure chamber;

The thimble adjustment structure includes a stepping motor, an inductor, an eccentric cam and a connecting plate;

The thimble guide seat, the stepping motor and the inductor are all fixed on the connecting plate, and the stepping motor is electrically connected to the inductor, and the eccentric cam is installed on the stepping motor On the output shaft of the eccentric cam, the eccentric cam is adjacent to the sensor and in contact with the floating block, and the eccentric cam is used to abut against the floating block at different positions driven by the output shaft to control the The position of the thimble makes the thimble in the transparent state or the retracted state; the eccentric cam is also used to drive the stepper motor to reverse step rotation when it rotates to the inductor , so that the eccentric cam adjusts the direction of rotation.

Further, in one of the embodiments, the connecting plate is provided with a shaft slot, the output shaft passes through the shaft slot, and the eccentric cam and the stepping motor are respectively located on both sides of the connecting plate.

Further, in one of the embodiments, the floating block includes a body, a deformed protrusion structure, a fixing part and an elastic part;

Both the deformable protruding structure and the fixing part are arranged on the body and are respectively located on both sides of the body, and the fixing part is installed under the thimble guide seat or its first guide seat;

The floating block is provided with a relief groove between the deformable protruding structure and the body, and the deformable protruding structure has a deformed state in the relief groove relative to the body;

The elastic member passes through the body and is installed on the floating block, and the thimble is arranged on the elastic member.

Further, in one of the embodiments, the floating block further includes an action receiving platform installed on the elastic member, and the thimble is arranged on the action receiving platform.

In one of the embodiments, the thimble adjusting structure further includes a cylinder mounting seat, a first slide rail and a cylinder;

Both the first slide rail and the air cylinder are fixed on the cylinder mounting seat, the connecting plate is arranged on the first slide rail, and the connecting plate is driven and connected by the air cylinder so that the connecting plate is on the Sliding on the first slide rail is used for preliminary positioning of the thimble cap structure to cooperate with the eccentric cam to achieve precise positioning.

Further, in one of the embodiments, the thimble adjustment structure further includes a cylinder connection block, a cylinder limit block and a limit screw;

The output part of the cylinder is connected to the connection plate through the cylinder connection block;

The cylinder limit block is fixed on the cylinder mounting seat and has a limit slot;

The connecting block of the cylinder is partially accommodated in the limiting groove, the limiting screw is installed on the limiting block of the cylinder and is at least partly adjustable in the limiting groove, and the limiting screw passes through The length it protrudes from the limiting groove limits the maximum height of the cylinder connection block in the limiting groove.

In one of the embodiments, the thimble adjustment structure further includes an adjustment plate, a second slide rail, a second adjustment screw and a second adjustment block;

Both the second slide rail and the second adjustment block are fixed on the adjustment plate, the cylinder mount is arranged on the second slide rail, and the second adjustment screw is fixed on the cylinder mount and screwed with the second adjustment block, used to control the sliding of the cylinder mounting seat on the second slide rail; wherein, the second slide rail and the first slide rail have mutually perpendicular sliding direction.

In one of the embodiments, the thimble adjustment structure further includes a base, a third adjustment block, a third adjustment screw and a third slide rail;

Both the third adjustment block and the third slide rail are fixed on the base, the adjustment plate is arranged on the third slide rail, the third adjustment screw is fixed on the adjustment plate and The third adjusting block is screwed, and is used to control the sliding of the adjusting plate on the third slide rail; wherein, the third slide rail, the second slide rail and the first slide rail are three-dimensionally Spaces have sliding directions perpendicular to each other.

Further, in one of the embodiments, the thimble adjustment structure further includes a first screw connection plate and a second screw connection plate; one end of the first screw connection plate is connected to the adjustment plate, and the other end is screwed connected to the base, used to enable the adjustment plate to slide on the third slide rail in a loose state, and prevent the adjustment plate from sliding on the third slide rail in a fastened state; One end of the second screw-adjusting connecting plate is connected to the adjustment plate, and the other end is screwed to the cylinder mounting seat for enabling the cylinder mounting seat to slide on the second slide rail in a loosened state , and prevent the cylinder mount from sliding on the second slide rail in a fastened state.

In one of the embodiments, the eccentric cam has a sensing piece, and the sensor is a photoelectric sensor, and the sensor is used to drive the stepper motor to reversely step and rotate when the light is blocked by the sensing piece. .

In one embodiment, the sensing sheet has a fan-shaped structure, and the sensor is used to drive the stepping motor to reversely step and rotate when sensing light is blocked by the fan-shaped structure.

In one of the embodiments, the thimble guide seat includes a first guide seat, a first sealing ring, a second guide seat and a second sealing ring;

The second guide seat is fixed on the first guide seat and is sealed with the first guide seat through the first sealing ring, and the thimble cap is arranged on the second guide seat and passed through the first guide seat. The second sealing ring is sealed with the second guide seat;

The first guide seat, the second guide seat and the thimble cap jointly form the negative pressure chamber, the air pipe joint is fixed on the first guide seat and passes through the first guide seat communicating with the negative pressure chamber; and/or,

The thimble guide seat also includes a floating shaft, and the floating shaft is located in the negative pressure chamber;

The floating shaft is fixed on the floating block or its elastic member, the thimble structure is installed on the floating shaft, and the floating shaft is used to drive the thimble structure relative to the floating block under the action of the floating block. The thimble cap moves so that the thimble has the transparent state and the retracted state.

Further, in one of the embodiments, the thimble structure further includes a thimble fixing seat and a thimble locking cap, the thimble fixing seat is installed on the thimble guide seat, and the thimble is detachably installed on the thimble On the fixing seat, the thimble locking cap is installed on the thimble fixing seat and locks the thimble in a fastened state.

Further, in one of the embodiments, the thimble cap is provided with a pin hole and an adsorption hole, and the thimble is passed through the pin hole to contact the material on the film of the material tray to be separated, The adsorption holes are used to contact the film at other positions of the material disc to be separated.

In one of the embodiments, the material is a chip.

In one of the embodiments, an automatic production equipment for materials, including a feeding device, a feeding device, and a jacking device for the automatic production of materials described in any embodiment;

The feeding device is used to transport the material tray to be separated to the thimble cap structure of the jacking device for the automatic production of the material;

The unloading device is used to collect the material separated from the material tray to be separated and the film of the tray.

Description of drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the following will briefly introduce the accompanying drawings that need to be used in the description of the embodiments or the conventional technology. Obviously, the accompanying drawings in the following description are only examples For some embodiments of the application, those skilled in the art can also obtain other drawings based on these drawings without creative work.

Fig. 1 is a schematic structural view of an embodiment of a jacking device for the automatic production of materials described in the present application.

Fig. 2 is a structural schematic diagram of the thimble cap structure of the embodiment shown in Fig. 1 .

FIG. 3 is an exploded schematic diagram of the structure of the embodiment shown in FIG. 2 .

FIG. 4 is a schematic structural diagram of the slider of the embodiment shown in FIG. 3 .

Fig. 5 is a schematic diagram of another identification of the embodiment shown in Fig. 1 .

FIG. 6 is an enlarged schematic view of A of the embodiment shown in FIG. 5 .

FIG. 7 is an enlarged schematic view of B of the embodiment shown in FIG. 6 .

FIG. 8 is a schematic diagram of state comparison of the embodiment shown in FIG. 7 .

FIG. 9 is a structural schematic diagram of the ejector pin adjustment structure of the embodiment shown in FIG. 1 .

FIG. 10 is an exploded schematic diagram of the structure of the embodiment shown in FIG. 9 .

FIG. 11 is a schematic diagram of another direction of the embodiment shown in FIG. 1 .

FIG. 12 is an enlarged schematic view of point C of the embodiment shown in FIG. 11 .

Reference signs:

Thimble adjustment structure 100, base 101, third adjustment block 102, third adjustment screw 103, third slide rail 104, adjustment plate 105, second slide rail 106, cylinder mount 107, first slide rail 108, cylinder 109, Stepping motor 110, inductor 111, induction plate 112, eccentric cam 113, connection plate 114, cylinder connection block 115, cylinder limit block 116, limit screw 117, first screw adjustment connection plate 118, second adjustment screw 119 , the second adjustment block 120, the second screw connection plate 121, the shaft groove 122, the limit groove 123;

Thimble cap structure 200, floating block 218, air pipe joint 219, first guide seat 220, first sealing ring 221, second guide seat 222, floating shaft 223, second sealing ring 224, thimble fixing seat 225, thimble locking cap 226, thimble 227, thimble cap 228, needle hole 229, adsorption hole 230, thimble guide seat 231, body 232, deformation protruding structure 233, give way groove 234, fixed part 235, elastic member 236, action receiving platform 237, Thimble structure 238;

The out state 300 and the retracted state 400 .

Detailed ways

In order to make the above-mentioned purpose, features and advantages of the present application more obvious and understandable, the specific implementation manners of the present application will be described in detail below in conjunction with the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the application. However, the present application can be implemented in many other ways different from those described here, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

It should be noted that when a component is referred to as being “fixed on” or “set on” another component, it may be directly on the other component or there may also be an intervening component. When a component is said to be "connected" to another component, it may be directly connected to the other component or there may be intervening components at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for the purpose of illustration only and do not represent the only implementation Way.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features. In the description of the present application, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

In this application, unless otherwise clearly specified and limited, a first feature is "on" or "under" a second feature, which means that the first feature is directly in contact with the second feature, or that the first feature and the second feature are indirectly in contact with each other. contact through an intermediary. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the level of the first feature is higher than that of the second feature. "Below", "beneath" and "under" the first feature may mean that the first feature is directly below or obliquely below the second feature, or it just means that the level of the first feature is smaller than that of the second feature.

Unless otherwise defined, all technical and scientific terms used in the description of the present application have the same meaning as commonly understood by those skilled in the technical field of the present application. The terms used in the description of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The term "and/or" used in the specification of the present application includes any and all combinations of one or more related listed items.

The present application discloses a jacking device and automated material production equipment for automatic material production, which includes part or all of the structures of the following embodiments; that is, the jacking device for automatic material production and automatic material production equipment includes the following Some technical features or all technical features. In one embodiment of the present application, a jacking device for automatic production of materials includes a thimble adjustment structure and a thimble cap structure; the thimble adjustment structure controls the thimble lifting of the thimble cap structure by stepping and driving eccentric rotation; The thimble cap structure absorbs the material disc to be separated by negative pressure adsorption, and lifts up through the thimble to separate the material of the material disc to be separated from the film of the material disc. The lifting device for the automatic production of the above-mentioned materials, on the one hand, realizes the pressure lifting by means of thimble and negative pressure adsorption, which is beneficial to realize the separation of the material in the material tray to be separated from the film of the tray; on the other hand, it uses stepping to drive eccentric rotation It is beneficial to accurately control the fine position of the thimble lifting, and is conducive to large-scale repetitive error-free applications in batches; on the other hand, it is easy to cooperate with the thimble cap structure to realize the replacement of thimbles, which is conducive to adapting to various Specifications of the to-be-separated material tray and material separation; on the other hand, due to the ingenious structural design, it is beneficial to be applied to micro materials such as micro chips.

In one embodiment, a jacking device for automatic production of materials is shown in Figure 1, which includes a thimble adjustment structure 100 and a thimble cap structure 200; The thimble of the thimble cap structure 200 is raised and lowered; the thimble cap structure 200 absorbs the material disc to be separated by negative pressure adsorption, and is lifted by the thimble to separate the material of the material disc to be separated from the film of the material disc. When the thimble is lifted, the material is lifted from the film of the tray, so that the material is separated from the film of the tray. In this state, the material can be removed by suction, and then the thimble is lowered to continue processing the material tray to be separated. another material.

As shown in Figure 2, in one of the embodiments, the thimble cap structure 200 includes a floating block 218, a gas pipe joint 219, a thimble guide seat 231, a thimble structure 238 and a thimble cap 228; the floating block 218 is installed on the Under the thimble guide seat 231, the thimble cap 228 is covered on the thimble guide seat 231, the thimble cap 228 cooperates with the thimble guide seat 231 to form a negative pressure chamber, and the thimble structure 238 is installed on the thimble The thimble structure 238 is accommodated in the negative pressure chamber, and the air pipe joint 219 is used to communicate with the vacuum pump and the negative pressure chamber. Further, in one of the embodiments, the number of the air pipe joints 219 is two, one of which communicates with the vacuum pump and the negative pressure chamber, and the other communicates with the air valve and the negative pressure chamber, respectively for receiving The control pumps air from the negative pressure chamber and supplements external air into the negative pressure chamber. Such a design, through the cooperation of the vacuum pump, is conducive to quickly and accurately controlling the negative pressure state of the negative pressure chamber, so as to accurately absorb the material tray film of the material tray to be separated, and realize the separation of the material tray and its materials. , that is to realize the separation of the material in the material tray to be separated from the film of the tray.

3, in one embodiment, the thimble guide seat 231 includes a first guide seat 220, a first seal ring 221, a second guide seat 222 and a second seal ring 224; the second guide seat 222 is fixed On the first guide seat 220 and sealed with the first guide seat 220 through the first sealing ring 221, the thimble cap 228 is covered on the second guide seat 222 and passed through the first guide seat 220 Two sealing rings 224 are sealed with the second guide seat 222; the negative pressure chamber is jointly formed between the first guide seat 220, the second guide seat 222 and the thimble cap 228, and the trachea The joint 219 is fixed on the first guide seat 220 and communicates with the negative pressure chamber through the first guide seat 220; in one embodiment, the thimble guide seat 231 also includes a floating shaft 223, the The floating shaft 223 is located in the negative pressure chamber; the floating shaft 223 is fixed on the floating block 218 or its elastic member 236, the thimble structure 238 is installed on the floating shaft 223, and the floating shaft 223 It is used to drive the thimble structure 238 to move relative to the thimble cap 228 under the action of the floating block 218, as shown in FIG. 6 and FIG. 7, so that the thimble 227 has the transparent state 300, or as As shown in FIG. 8 , the floating shaft 223 is used to drive the thimble structure 238 to move relative to the thimble cap 228 under the action of the floating block 218 , so that the thimble 227 has the retracted state 400 . Such a design is conducive to the realization of a reciprocating jacking structure, and the overall structure is compact and simple, and has the advantage of a simple structure.

As shown in Figure 3, in one of the embodiments, the thimble structure 238 includes a thimble 227, further, the thimble structure 238 also includes a thimble fixing seat 225 and a thimble locking cap 226, and the thimble fixing seat 225 is installed On the thimble guide seat 231, the thimble 227 is detachably mounted on the thimble fixing seat 225, and the thimble locking cap 226 is installed on the thimble fixing seat 225 and locked in a fastened state The thimble 227 . In one of the embodiments, the thimble adjustment structure 100 controls the lift of the thimble 227 of the thimble cap structure 200 in a step-by-step driving eccentric rotation manner; The thimble 227 is lifted to separate the material of the material tray to be separated from the film of the tray; the thimble 227 of the thimble structure 238 is arranged on the floating block 218, and has a The penetrating state 300 relative to the thimble cap 228 is shown in FIG. 7 , and the retracted state 400 relative to the thimble cap 228 is shown in FIG. 8 ; Under the action, the thimble structure 238 is driven to move relative to the thimble cap 228 , so that the thimble 227 has the transparent state 300 and the retracted state 400 . Such a design can provide the equipment with a jacking structure suitable for materials of different micro sizes, and solve the problem that micro materials such as micro chips are easy to stick to the plastic film of the feeding tray, that is, the blue film, so as to realize the safety of the equipment. Versatility, high precision and high stability of automatic feeding.

7 and 8, further, in one embodiment, the thimble cap 228 is provided with a needle hole 229 and an adsorption hole 230, and the thimble 227 is passed through the needle hole 229 to abut against The material on the film of the material tray to be separated, the adsorption hole 230 is used to contact the film at other positions of the material plate to be separated. In one of the embodiments, the material is a chip. Each embodiment of the present application relates to automatic production equipment for material semiconductors, which can realize the separation of multi-standard micro-semiconductors, especially multi-standard chips, from the material tray in the automatic equipment. Separated from the blue film, it assists the automatic feeding nozzle to take out the material, making the automatic operation more accurate. Existing equipment does not have this structure, material leakage will occur during the retrieving process, the incoming material will stick to the blue film placed on the incoming material when retrieving, the retrieving position is inaccurate, and the efficiency is low.

In order to improve separation efficiency, in one of the embodiments, the number of the thimbles 227 is at least two, and each of the thimbles 227 is regularly arranged; further, in one of the embodiments, each of the thimbles 227 is regularly arranged in a straight line shape or matrix shape etc. Further, in one of the embodiments, there is at least one material position between each ejector pin 227 , that is, at least one material that is not separated is separated between at least two materials that are separated each time. Such a design is beneficial to separate multiple materials such as multiple chips at one time.

In order to precisely control the lifting height of the thimble and avoid damage to the material during the lifting process, further, in one embodiment, as shown in FIG. part 235 and elastic part 236; the deformation protruding structure 233 and the fixing part 235 are both arranged on the body 232 and are respectively located on both sides of the body 232, and the fixing part 235 is installed on the thimble guide Seat 231 or its first guide seat 220; with reference to Figure 5 and Figure 6, the floating block 218 has a relief groove 234 between the deformation protruding structure 233 and the body 232, and the deformation protruding The structure 233 has a deformed state in the relief groove 234 relative to the body 232; referring to FIG. on the elastic member 236 . Further, in one of the embodiments, the floating block 218 further includes an action receiving platform 237 installed on the elastic member 236 , and the thimble 227 is arranged on the action receiving platform 237 .

In each embodiment, as shown in Figure 9 and Figure 10, the thimble adjustment structure 100 includes a stepping motor 110, an inductor 111, an eccentric cam 113 and a connecting plate 114; and, the stepping motor 110 and the induction The sensors 111 are fixed on the connection board 114 , and the stepper motor 110 is electrically connected to the inductor 111 . Referring to FIG. 5 and FIG. 6 , the thimble guide seat 231 is fixed on the connection plate 114 ; in one embodiment, the first guide seat 220 of the thimble guide seat 231 is fixed on the connection plate 114 . And, the eccentric cam 113 is installed on the output shaft of the stepping motor 110, the eccentric cam 113 is adjacent to the inductor 111, and the eccentric cam 113 is in contact with the slider 218, the eccentric The cam 113 is used to abut against the floating block 218 at different positions driven by the output shaft to control the position of the thimble 227, so that the thimble 227 is in the transparent state 300 or the thimble 227 is in the stated position. The retracted state 400; that is, the eccentric cam 113 and the floating block 218 are always in a contact state, for example, the two form point contact or line contact. When the topmost ends of the eccentric cam 113 are at different arc points, the thimble The protruding heights of 227 are different, so as to realize the precise limit of the ejection height, so as to achieve the purpose of separating the material from the film of the tray. The eccentric cam 113 is also used to drive the stepper motor 110 to rotate in a reverse step direction by the inductor 111 when it rotates to the sensor 111 , so that the eccentric cam 113 can adjust the direction of rotation. Furthermore, such a design, by controlling the eccentricity design of the eccentric cam 113 and the axis of the stepper motor 110, can control the up and down lift distance of the thimble, forming a precise reciprocating stroke control, thereby providing a simple structure and accurate position. The jacking mechanism has a low operation failure rate, and the possibility of damage to the material is extremely small, and it is applicable to both sampling separation and scale separation.

Based on the consideration of reducing the occupied area, further, in one of the embodiments, as shown in FIG. The cam 113 and the stepping motor 110 are respectively located on two sides of the connecting plate 114 . Such a design, through the balanced design on both sides, is conducive to reducing the overall size of the lifting device for the automatic production of the material, thereby helping to increase the distribution density of the lifting device for the automatic production of the material, forming a material separation array, and then Realize large-scale separation processing in small workshops, and improve separation efficiency and production capacity in a limited production area.

In one of the embodiments, as shown in Figure 11 and Figure 12, the thimble adjustment structure 100 also includes a cylinder mounting seat 107, a first slide rail 108 and a cylinder 109; the first slide rail 108 and the cylinder 109 are all fixed on the cylinder mounting seat 107, the connecting plate 114 is arranged on the first slide rail 108, and the cylinder 109 drives and connects the connecting plate 114 so that the connecting plate 114 is on the first sliding rail 108. Sliding on the slide rail 108 is used to initially position the thimble cap structure 200 to cooperate with the eccentric cam 113 to achieve precise positioning; Membrane separation, if necessary, the thimble guide seat can be driven by the cylinder to drive the thimble structure and the thimble cap to slide from the first slide rail as a whole, so as to achieve rapid and rough positioning. Combined with the embodiment with the second slide rail and the third slide rail later, It is beneficial to the positioning along the space rectangular coordinate system in the three-dimensional space, and accurately controls the position of the thimble.

In order to avoid damage to materials during jacking, further, in one embodiment, as shown in Figure 12, the thimble adjustment structure 100 also includes a cylinder connection block 115, a cylinder limit block 116 and a limit screw 117; The output portion of the cylinder 109 is connected to the connection plate 114 through the cylinder connection block 115; the cylinder limit block 116 is fixed on the cylinder mounting seat 107 and has a limit groove 123; the cylinder connection block 115 part Accommodated in the limiting groove 123, the limiting screw 117 is installed on the cylinder limiting block 116 and at least partially adjustable in the limiting groove 123, the limiting screw 117 passes through it The length protruding from the limiting groove 123 limits the maximum height of the cylinder connecting block 115 in the limiting groove 123 . Such a design is beneficial to the protection of the materials, especially the jacking device for automatic production of the materials with the limit screw is suitable for the separation and treatment of various materials of different specifications.

In one embodiment, as shown in Figures 9 and 10, the thimble adjustment structure 100 further includes an adjustment plate 105, a second slide rail 106, a second adjustment screw 119 and a second adjustment block 120; the second Both the slide rail 106 and the second adjustment block 120 are fixed on the adjustment plate 105, the cylinder mount 107 is arranged on the second slide rail 106, and the second adjustment screw 119 is fixed on the cylinder On the mounting base 107 and screwed with the second adjustment block 120, it is used to control the sliding of the cylinder mounting base 107 on the second slide rail 106; wherein, the second slide rail 106 is connected with the first slide rail 106 The sliding rails 108 have sliding directions perpendicular to each other. In this way, the positioning adjustment in the two-dimensional direction is realized.

In one of the embodiments, as shown in Figure 9 and Figure 10, the thimble adjustment structure 100 further includes a base 101, a third adjustment block 102, a third adjustment screw 103 and a third slide rail 104; the third adjustment Both the block 102 and the third slide rail 104 are fixed on the base 101, the adjustment plate 105 is arranged on the third slide rail 104, and the third adjustment screw 103 is fixed on the adjustment plate 105 And screwed with the third adjustment block 102, used to control the adjustment plate 105 to slide on the third slide rail 104; wherein, the third slide rail 104, the second slide rail 106 and the The first sliding rails 108 have sliding directions perpendicular to each other in three-dimensional space. In this way, the positioning adjustment in the three-dimensional direction is realized.

Further, in one of the embodiments, as shown in FIG. 9 and FIG. 10 , the thimble adjustment structure 100 also includes a first screw connection plate 118 and a second screw connection plate 121; the first screw connection One end of the plate 118 is connected to the adjustment plate 105, and the other end is screwed to the base 101, for enabling the adjustment plate 105 to slide on the third slide rail 104 in the loosened state, and when fastened prevent the adjustment plate 105 from sliding on the third slide rail 104; one end of the second screw connection plate 121 is connected to the adjustment plate 105, and the other end is screwed to the cylinder mounting seat 107 for The cylinder mount 107 is allowed to slide on the second slide rail 106 in the loose state, and the cylinder mount 107 is prevented from sliding on the second slide rail 106 in the fastened state. Such a design is conducive to simply and conveniently adjusting the relative position of the thimble and the material tray to be separated, and is conducive to accurately adjusting the position of the thimble in the lifting direction before jacking and separation, so as to ensure that during the subsequent jacking operation, the The thimble only needs to move in the lifting direction.

As shown in Fig. 9 and Fig. 10, in one of the embodiments, the eccentric cam 113 has a sensor 112, the sensor 111 is a photoelectric sensor, and the sensor 111 is used to sense that light is detected by the sensor When 112 is blocked, the stepper motor 110 is driven to rotate in reverse steps. In one embodiment, the sensing sheet 112 has a fan-shaped structure, and the sensor 111 is used to drive the stepping motor 110 to reversely step and rotate when the light is blocked by the fan-shaped structure. Such a design is conducive to realizing repetitive motion with a low failure rate, and has low cost and small footprint, so it has high applicability.

The following will continue to describe the jacking device for the automatic production of materials described in this application in conjunction with FIGS. 1 to 12 .

The jacking device mainly includes a thimble adjusting structure 100 and a thimble cap structure 200, and may also include a vacuum pump, an air valve and related electric control equipment.

The thimble adjustment structure 100 includes a base 101; a third adjustment block 102, a third adjustment screw 103, a third slide rail 104, and an adjustment plate 105 installed on the base 101; a second slide rail 106 installed on the adjustment plate 105, a cylinder Mounting seat 107; the first slide rail 108 and cylinder 109 installed on the cylinder mounting seat 107; the connection plate 114 connected on the first slide rail 108; the stepper motor 110, inductor 111, cylinder positioned on the connection plate 114 The connection block 115 , the cylinder limit block 116 , the limit screw 117 ; the eccentric cam 113 and the induction plate 112 installed on the stepper motor 110 .

The thimble cap structure 200 includes a floating block 218, an air pipe joint 219, a first guide seat 220: and a first sealing ring 221 installed on the first guide seat 220, a second guide seat 222 and a thimble holder 225, which are installed on the second guide seat 220. The second sealing ring 224 on the guide seat 222 , the thimble locking cap 226 and the thimble 227 installed on the thimble fixing seat 225 , and the thimble cap 228 installed on the second guide seat 222 .

The principle of the thimble adjustment structure is explained as follows: the cylinder 109 drives the connecting plate 114 through the first slide rail 108, thereby driving the thimble cap structure to move to the required height for rough positioning, the stepping motor 110 starts to drive the eccentric cam 113 to move, thereby driving the thimble Cap structure 200 movements.

The principle of the thimble cap structure 200 is explained as follows: the stepper motor 110 drives the eccentric cam 113. The center of the cam is eccentric to the motor shaft. Point contact, when the eccentric cam 113 rotates, it drives the floating block 218 to move up and down, and the difference between the highest point and the lowest point is the distance between the axis of the stepper motor 110 and the axis of the eccentric cam 113 .

In the stepper motor 110 of the thimble cap structure 200, the floating block 218 is connected to the floating shaft 223, and the thimble holder 225 is connected to the thimble 227. When the maximum stroke is lifted, the thimble 227 will pass through the needle hole 229 on the thimble cap 228, beyond The height is the height at which the material is lifted from the feeding blue film. At the same time, the air pipe joint 219 is evacuated to form a negative pressure state inside the entire thimble cap structure 200 or even close to a vacuum state, that is, a negative pressure state is formed inside the thimble cap 228, for example Close to the vacuum state, the blue film of material feeding is adsorbed on the thimble cap 228, so that the material and the blue film can be separated better.

The specific structure of the jacking device for the automatic production of the above materials can be used as a general jacking device for the equipment. Driven by the eccentric cam 113, the structure driven by the stepping motor 110 can be vertically positioned in a direction 90° perpendicular to the stepping motor 110. Reciprocating motion, for different reciprocating stroke requirements, only need to adjust the size of the eccentric cam 113 and the eccentric distance between the eccentric cam 113 and the axis of the stepping motor 110, and the overall shape and principle of the structure remain unchanged, so it has strong versatility.

In one of the embodiments, an automatic material production equipment includes a feeding device, a feeding device, and a jacking device for the automatic production of materials described in any embodiment; the feeding device is used to transport the material tray to be separated The thimble cap structure of the jacking device for the automatic production of the material; the unloading device is used to collect the material separated from the material tray to be separated and the film of the tray. Such a design, on the one hand, uses the thimble to cooperate with the negative pressure adsorption method to realize the pressure lift, which is beneficial to realize the separation of the material in the material tray to be separated from the film of the tray; It is conducive to accurate control of the fine position of the thimble lifting, and is conducive to large-scale repetitive error-free application in batches; on the other hand, it is easy to cooperate with the structure of the thimble cap to realize the replacement of the thimble, which is conducive to adapting to various specifications of materials to be separated The disk and its material are separated; on the other hand, due to the ingenious structural design, it is beneficial to apply to micro materials such as micro chips.

It should be noted that other embodiments of the present application also include jacking devices and automatic material production equipment formed by combining the technical features of the above-mentioned embodiments, which can be implemented for automatic production of materials.

The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, all possible combinations of the technical features in the above-mentioned embodiments are not described. However, as long as there is no contradiction in the combination of these technical features, should be considered as within the scope of this specification.

The above-mentioned embodiments only express several implementation modes of the present application, and the description thereof is relatively specific and detailed, but should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of this application should be based on the appended claims.

Claims (10)

1. The jacking device for automatic material production is characterized by comprising a thimble adjusting structure (100) and a thimble cap structure (200);

The thimble adjusting structure (100) drives the thimble (227) of the thimble cap structure (200) to lift in a stepping and eccentric rotation mode;

the thimble cap structure (200) absorbs the material disc to be separated in a negative pressure adsorption mode, and the thimble cap structure is lifted through the thimble (227) to separate the material of the material disc to be separated from the material disc adhesive film.

2. The jacking device for automated production of materials as claimed in claim 1, wherein the thimble cap structure (200) includes a slider (218), an air tube connector (219), a thimble guide seat (231), a thimble structure (238), and a thimble cap (228);

the floating block (218) is arranged below the thimble guide seat (231), the thimble structure (238) is arranged on the thimble guide seat (231), the thimble cap (228) is covered on the thimble guide seat (231), the thimble (227) of the thimble structure (238) is arranged on the floating block (218), and the floating block (218) has a penetrating state (300) and a retracting state (400) relative to the thimble cap (228); the thimble cap (228) is matched with the thimble guide seat (231) to form a negative pressure chamber, the thimble structure (238) is accommodated in the negative pressure chamber, and the air pipe connector (219) is used for communicating a vacuum pump with the negative pressure chamber;

The thimble adjusting structure (100) comprises a stepping motor (110), an inductor (111), an eccentric cam (113) and a connecting plate (114);

the thimble guide seat (231), the stepping motor (110) and the inductor (111) are all fixed on the connecting plate (114), the stepping motor (110) is electrically connected with the inductor (111), the eccentric cam (113) is installed on an output shaft of the stepping motor (110), the eccentric cam (113) is adjacent to the inductor (111) and is in contact with the floating block (218), and the eccentric cam (113) is used for abutting against the floating block (218) at different positions under the drive of the output shaft so as to control the position of the thimble (227), so that the thimble (227) is in a penetrating state (300) or a retracting state (400); the eccentric cam (113) is further configured to drive the stepping motor (110) to reversely rotate in a stepping manner by the sensor (111) when rotating to the sensor (111), so that the eccentric cam (113) adjusts the rotation direction.

3. The jacking device for automatic production of materials according to claim 2, wherein the thimble adjusting structure (100) further comprises a cylinder mounting seat (107), a first slide rail (108) and a cylinder (109);

the first slide rail (108) and the air cylinder (109) are both fixed on the air cylinder mounting seat (107), the connecting plate (114) is arranged on the first slide rail (108), the air cylinder (109) is in driving connection with the connecting plate (114) so that the connecting plate (114) slides on the first slide rail (108) and is used for preliminarily positioning the thimble cap structure (200) to be matched with the eccentric cam (113) to realize accurate positioning.

4. The jacking device for automated production of materials according to claim 3, wherein the thimble adjustment structure (100) further comprises an adjustment plate (105), a second slide rail (106), a second adjustment screw (119), and a second adjustment block (120);

the second sliding rail (106) and the second adjusting block (120) are both fixed on the adjusting plate (105), the cylinder mounting seat (107) is arranged on the second sliding rail (106), and the second adjusting screw (119) is fixed on the cylinder mounting seat (107) and is in threaded connection with the second adjusting block (120) for controlling the cylinder mounting seat (107) to slide on the second sliding rail (106); the second sliding rail (106) and the first sliding rail (108) have mutually perpendicular sliding directions.

5. The jacking device for automatic material production according to claim 4, wherein the thimble adjusting structure (100) further comprises a base (101), a third adjusting block (102), a third adjusting screw (103) and a third sliding rail (104);

the third adjusting block (102) and the third sliding rail (104) are both fixed on the base (101), the adjusting plate (105) is arranged on the third sliding rail (104), and the third adjusting screw (103) is fixed on the adjusting plate (105) and is in threaded connection with the third adjusting block (102) for controlling the adjusting plate (105) to slide on the third sliding rail (104); the third sliding rail (104), the second sliding rail (106) and the first sliding rail (108) have mutually perpendicular sliding directions in a three-dimensional space.

6. The jacking device for automatic material production according to claim 2, wherein the eccentric cam (113) is provided with a sensing piece (112), the sensor (111) is a photoelectric sensor, and the sensor (111) is used for driving the stepping motor (110) to reversely rotate in a stepping manner when sensing light shielded by the sensing piece (112).

7. The jacking device for automatic material production according to claim 6, wherein the sensing piece (112) is provided with a fan-shaped structural member, and the sensor (111) is used for driving the stepping motor (110) to reversely rotate in a stepping manner when light is shielded by the fan-shaped structural member.

8. The jacking device for automatic material production according to claim 2, wherein the thimble guide seat (231) comprises a first guide seat (220), a first sealing ring (221), a second guide seat (222) and a second sealing ring (224);

the second guide seat (222) is fixed on the first guide seat (220) and is sealed with the first guide seat (220) through the first sealing ring (221), and the thimble cap (228) is covered on the second guide seat (222) and is sealed with the second guide seat (222) through the second sealing ring (224);

The first guide seat (220), the second guide seat (222) and the thimble cap (228) form the negative pressure chamber together, and the air pipe connector (219) is fixed on the first guide seat (220) and is communicated with the negative pressure chamber through the first guide seat (220); and/or the number of the groups of groups,

the thimble guide seat (231) further comprises a floating shaft (223), and the floating shaft (223) is positioned in the negative pressure chamber;

the floating shaft (223) is fixed on the floating block (218) or an elastic piece (236) thereof, the thimble structure (238) is mounted on the floating shaft (223), and the floating shaft (223) is used for driving the thimble structure (238) to move relative to the thimble cap (228) under the action of the floating block (218), so that the thimble (227) has the penetrating state (300) and the retracting state (400).

9. The jacking device for automated production of materials as claimed in any one of claims 1 to 8, wherein the materials are chips.

10. An automatic material production device, which is characterized by comprising a feeding device, a discharging device and a jacking device for automatic material production according to any one of claims 1 to 9;

the feeding device is used for conveying a material disc to be separated to a thimble cap structure (200) of the jacking device for automatic production of the materials;

The discharging device is used for collecting materials which are separated from the material disc to be separated and the material disc adhesive film.

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