CN116175295A - A semiconductor graphite tube inner wall grinding device - Google Patents

Abstract

The utility model relates to a semiconductor graphite tube inner wall polishing device, which comprises a supporting frame, wherein a rotating assembly is arranged on the supporting frame and comprises a turntable, the turntable is of a hollow structure, a feeding assembly and a discharging assembly are respectively arranged on the left side and the right side of the turntable, a plurality of bearing plates are fixedly arranged on the turntable, clamping assemblies are respectively arranged on the plurality of bearing plates in a sliding manner, a guide assembly is fixedly arranged in the turntable, a polishing assembly is arranged above the turntable, a dust collection assembly is further arranged in the turntable, the feeding assembly is used for conveying a semiconductor graphite tube, the rotating assembly is used for driving the clamping assembly to rotate, the clamping assembly is used for being matched with the guide assembly to clamp or loosen the semiconductor graphite tube in the rotating process, the polishing assembly is used for polishing the inner wall of the semiconductor graphite tube, the dust collection assembly is used for collecting waste generated in the polishing process, and the discharging assembly is used for outputting the polished semiconductor graphite tube.

Description

A semiconductor graphite tube inner wall grinding device

technical field

The invention relates to the technical field of semiconductor graphite tube processing, in particular to a grinding device for the inner wall of a semiconductor graphite tube.

Background technique

During the processing of the semiconductor graphite tube, it is usually necessary to grind the inner wall of the semiconductor graphite tube, but because the inner diameter of the semiconductor graphite tube is small and the grinding depth is long, there are certain difficulties in the grinding process.

A Chinese utility model whose publication number is CN201820165374.2 discloses a graphite tube inner hole grinding device, which includes a horizontal lathe, and the three-jaw chuck of the horizontal lathe holds the grinding device. The utility model solves the problem of the prior art The grinding device for the inner wall of the pipe needs to accurately control the movement of the longitudinal feed mechanism and the transverse feed mechanism in real time, and the structure and movement mode of the movement mechanism are complex and difficult to operate. However, it needs manual adjustment during use. Graphite tubes are used for loading or unloading, the work efficiency is low, and the labor time is long.

Contents of the invention

The object of the present invention is to aim at the deficiencies of the prior art, to provide a semiconductor graphite tube inner wall grinding device, by setting the turntable feeding assembly and the unloading assembly, to realize the operation of automatic loading and unloading of the semiconductor graphite tube, by setting the turntable to drive The clamping component and the semiconductor graphite tube are rotated, and the work of loading, grinding and unloading is completed during the rotating process, realizing the uninterrupted grinding operation and improving the work efficiency.

Technical solutions of the present invention are as follows:

A device for grinding the inner wall of a semiconductor graphite tube, comprising a support frame, on which a rotating assembly is arranged, the rotating assembly includes a turntable, the turntable is set as a hollow structure, and the left and right sides of the turntable are respectively provided with feeding Assemblies and blanking assemblies, several bearing plates are fixedly arranged on the turntable, clamping assemblies are slidably arranged on several of the carrying plates, guide assemblies are fixedly arranged inside the turntable, and a A grinding assembly, a dust suction assembly is also provided in the turntable, the feeding assembly is used to transport the semiconductor graphite tube, the rotating assembly is used to drive the clamping assembly to rotate, and the clamping assembly is used to Cooperate with the guide assembly to clamp or loosen the semiconductor graphite tube, the grinding assembly is used to grind the inner wall of the semiconductor graphite tube, and the dust suction assembly is used to collect the waste chips generated during the grinding process. The above-mentioned blanking assembly is used to output the polished semiconductor graphite tube.

As a preference, the rotating assembly further includes a fixed seat fixed on the support frame, a rotating shaft rotatably arranged in the fixed seat, a motor seat fixed on the fixed seat, and a motor a fixed on the motor seat, The output shaft of the motor a is fixedly connected to the rotating shaft, and a support rod is fixedly arranged on the support frame, and a rotating seat is fixedly arranged on the supporting rod, and the rotating disk is arranged on the rotating seat, and the rotating disk is fixedly arranged On the rotating shaft, the rotating shaft is rotatably arranged in the rotating seat.

As a preference, the feeding assembly includes a fixed frame a, a conveyor belt a rotatably arranged on the fixed frame a, a feeding box fixedly arranged on the fixed frame a, and a limit plate fixedly arranged on the fixed frame a a, the upper material box is located above the conveyor belt a.

As a preference, a through groove is opened on the bearing plate, a chute a is opened on both sides of the through trough, a chute b is opened on the inner wall of the turntable, and the clamping assembly includes a The slider a in the chute a, the slider b slidably arranged in the chute a, the clamping plate a fixed on the slider a, the clamping plate b fixed on the slider b, the hinged set on The connecting rod a at the bottom of the slider a, the connecting rod b hingedly arranged at the bottom of the slider b, the connecting shaft slidingly arranged in the chute b, and the spring fixedly connected between the connecting shaft and the chute b, the connecting rod Both a and the bottom of the connecting rod b are rotatably arranged on the connecting shaft, and the clamping plate a and the clamping plate b are both arranged in an arc-shaped structure.

As a preference, the guide assembly includes a connecting post fixedly arranged on the rotating seat and a cam fixedly arranged on the connecting post, and the cam is coaxial with the rotating shaft.

As a preference, the grinding assembly includes a fixed plate fixed on the support frame, a cylinder fixed on the fixed plate, a piston rod driven by the cylinder, a rotating rod fixed at the bottom of the piston rod, and a cylinder fixed on the bottom of the piston rod. The grinding rod at the bottom of the rotating rod, the motor b fixed on the piston rod, the pulley a fixed on the rotating rod, the pulley b fixed on the output shaft of the motor b, and the belt connected between the pulley a and the pulley b A slide rail is fixedly arranged on the fixed plate, the motor b is slidably arranged on the slide rail, and the outer diameter of the grinding rod is consistent with the inner diameter of the semiconductor graphite tube.

As a preference, the dust suction assembly includes several suction holes opened on the top of the rotating base, a dust suction pipe fixedly connected to the rotating base, a baffle fixed on the rotating base and a support frame In the vacuum cleaner, there is a gap on the top of the baffle, the suction pipe communicates with the suction hole, and the other end of the suction pipe is fixedly connected to the vacuum cleaner.

As a preference, the unloading assembly includes a fixed frame b, a conveyor belt b rotatably arranged on the fixed frame b, and limiting plates b fixedly arranged on both sides of the fixed frame b.

As a preference, the inner surfaces of the clamping plate a and the clamping plate b are both fixedly provided with several rubber protrusions.

As yet another preference, one side of the baffle is in contact with the inner wall of the turntable, and the other side is in contact with the surface of the cam.

The beneficial effects of the present invention are:

1. The present invention is provided with a loading assembly and a blanking assembly, by setting the conveyor belt a to transport the semiconductor graphite tube to the clamping assembly, and by setting the conveyor belt b to carry out the blanking output of the polished semiconductor graphite tube, realizing automatic The operation of loading and unloading improves work efficiency.

2. The present invention is provided with a rotating assembly, a clamping assembly and a guide assembly. The clamping assembly is driven to rotate by setting a turntable. On the path from the feeding assembly to the grinding assembly, the clamping assembly cooperates with the cam to make the clamping plate a Gradually close the clamping plate b to fix the semiconductor graphite tube. On the path from the feeding and grinding assembly to the blanking assembly, the clamping assembly cooperates with the cam, so that the clamping plate a and the clamping plate b are gradually separated to separate the semiconductor graphite tube. Unclamping realizes automatic clamping and unclamping operations.

3. The present invention is also provided with a dust-absorbing assembly. By arranging a vacuum cleaner, a dust-absorbing hole and a dust-absorbing tube, when the semiconductor graphite tube is polished, under the action of the vacuum cleaner, the waste chips generated by grinding are sucked into the dust-absorbing hole and then It enters the vacuum cleaner through the suction pipe for collection, so as to prevent the waste from grinding from being scattered all over the place and pollute the working environment. In addition, the waste from the vacuum cleaner can be cleaned regularly.

In summary, the present invention has the advantages of high work efficiency and high degree of automation, and is suitable for the technical field of semiconductor graphite tube processing.

Description of drawings

Below in conjunction with accompanying drawing, the present invention will be further described:

Fig. 1 is a semiconductor graphite tube inner wall grinding device;

Figure 2 is an enlarged schematic view of A in Figure 1;

Fig. 3 is the structural representation of rotating assembly;

Fig. 4 is the schematic diagram of front view section of turntable;

Fig. 5 is a schematic side view sectional view of the turntable;

Fig. 6 is a schematic diagram of the state when the semiconductor graphite tube is polished.

Reference signs: 1-support frame; 11-carrying plate; 12-semiconductor graphite tube; 13-through slot; 14-chute a; 15-chute b; 2-rotating assembly; ;23-rotating shaft; 24-motor seat; 25-motor a; 26-support rod; 27-rotary seat; 3-feeding assembly; -Limiting plate a; 4-Blanking assembly; 41-Fixer b; 42-Conveyor belt b; 43-Limiting plate b; 5-Clamping assembly; 51-Slider a; 52-Slider b; 53 - clamping plate a; 54- clamping plate b; 55- connecting rod a; 56- connecting rod b; 57- connecting shaft; 58- spring; 6- guide assembly; 61- connecting column; 62- cam; Grinding assembly; 71-fixed plate; 72-cylinder; 73-piston rod; 74-rotating rod; 75-grinding rod; 76-motor b; 77-pulley a; 78-pulley b; Components; 81-suction hole; 82-suction pipe; 83-baffle; 84-vacuum cleaner; 85-notch; 9-rubber protrusion; 91-sliding rail.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.

Embodiment one

Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

As shown in Figures 1 to 6, a semiconductor graphite tube inner wall grinding device includes a support frame 1, a rotating assembly 2 is arranged on the support frame 1, and the rotating assembly 2 includes a turntable 21, the turntable 21 is arranged as a hollow structure, and the turntable 21 The left and right sides are respectively provided with a loading assembly 3 and a blanking assembly 4, a number of bearing plates 11 are fixedly arranged on the turntable 21, and a clamping assembly 5 is slidably arranged on the several support plates 11, and a guide is fixedly arranged in the turntable 21. Assembly 6, a grinding assembly 7 is arranged above the turntable 21, a dust collection assembly 8 is also arranged in the turntable 21, a feeding assembly 3 is used to transport the semiconductor graphite tube 12, and a rotating assembly 2 is used to drive the clamping assembly 5 to rotate, clamp The holding assembly 5 is used to cooperate with the guide assembly 6 to clamp or loosen the semiconductor graphite tube 12 during the rotation process, the grinding assembly 7 is used to grind the inner wall of the semiconductor graphite tube 12, and the dust suction assembly 8 is used to grind the inner wall of the semiconductor graphite tube 12. Waste chips generated in the process are collected, and the blanking assembly 4 is used to output the polished semiconductor graphite tube 12 .

As shown in Figure 3, the rotating assembly 2 also includes a fixed seat 22 fixedly arranged on the support frame 1, a rotating shaft 23 which is rotatably arranged in the fixed seat 22, a motor seat 24 fixedly arranged on the fixed seat 22, and a motor seat 24 fixedly arranged on the motor The motor a25 on the seat 24, the output shaft of the motor a25 is fixedly connected with the rotating shaft 23, and the support rod 26 is also fixedly arranged on the support frame 1, and the rotating seat 27 is fixedly arranged on the supporting rod 26, and the rotating disk 21 is rotated and arranged on the rotating seat 27 , the turntable 21 is fixedly arranged on the rotating shaft 23, and the rotating shaft 23 is rotatably arranged in the rotating seat 27. When in use, the motor a25 is turned on to drive the turntable 21 to rotate, and the operations of feeding, grinding and unloading are realized during the rotation process. Greatly improved work efficiency.

As shown in Figure 1, the feeding assembly 3 includes a fixed frame a31, a conveyor belt a32 rotatably arranged on the fixed frame a31, a feeding box 33 fixedly arranged on the fixed frame a31, and a limit position fixedly arranged on the fixed frame a31. plate a34, and the feeding box 33 is located above the conveyor belt a32. When in use, several semiconductor graphite tubes 12 are stacked in the loading box 33, and the bottom semiconductor graphite tube 12 falls onto the conveyor belt a32 and is transported to On the clamping assembly 5, the operation of automatic feeding is realized, and the working efficiency is improved.

As shown in Figure 4, a through groove 13 is provided on the carrier plate 11, a chute a14 is provided on both sides of the through groove 13, a chute b15 is provided on the inner wall of the turntable 21, and the clamping assembly 5 includes a chute that is slidably arranged on the chute. The slider a51 in a14, the slider b52 slidably set in the chute a14, the clamping plate a53 fixedly set on the slider a51, the clamping plate b54 fixedly set on the slider b52, the hinged set on the slider The connecting rod a55 at the bottom of a51, the connecting rod b56 hingedly arranged at the bottom of the slider b52, the connecting shaft 57 slidingly arranged in the chute b15 and the spring 58 fixedly connected between the connecting shaft 57 and the chute b15, the connecting rod a55 The bottom of the connecting rod b56 is rotated on the connecting shaft 57, and the clamping plate a53 and the clamping plate b54 are both arranged in an arc structure. When in use, when the clamping assembly 5 is located at the feeding assembly 3, at this time , the spring 58 is compressed, when the feeding assembly 3 transports the semiconductor graphite tube 12 between the clamping plate a53 and the clamping plate b54, driven by the turntable 21, the semiconductor graphite tube 12 rotates to the path of the grinding assembly 7 In the process of rotation, the clamping plate a53 and the clamping plate b54 are gradually closed under the action of the cam 62 to clamp and fix the semiconductor graphite tube 12. At this time, the connecting shaft 57 slides in the chute b15, and the spring 58 Release, so that the semiconductor graphite tube 12 is fixed when it is positioned under the grinding assembly 7, after the semiconductor graphite tube 12 is polished, under the drive of the turntable 21, the semiconductor graphite tube 13 rotates to the path of the blanking assembly 4, The clamping plate a53 and the clamping plate b54 are gradually separated under the action of the cam 62 to loosen the semiconductor graphite tube 12 during the rotation process. At this time, the connecting shaft 57 slides in the chute b15, and the spring 58 is compressed. The operation of automatically fixing the semiconductor graphite tube 12 is realized without manual fixing.

As shown in Fig. 4 and Fig. 5, the guide assembly 6 includes a connecting column 61 fixedly arranged on the rotating seat 27 and a cam 62 fixedly arranged on the connecting column 61, the cam 62 is coaxial with the rotating shaft 23, and when in use, through The cam 62 is provided to realize closing and opening of the clamping plate a53 and the clamping plate b54.

As shown in Figure 2, the grinding assembly 7 includes a fixed plate 71 fixedly arranged on the support frame 1, a cylinder 72 fixedly arranged on the fixed plate 71, a piston rod 73 driven by the cylinder 72, and a piston rod 73 rotated at the bottom of the piston rod 73. The rotating rod 74, the grinding rod 75 fixedly arranged at the bottom of the rotating rod 74, the motor b76 fixedly arranged on the piston rod 73, the pulley a77 fixedly arranged on the rotating rod 74, the pulley b78 fixedly arranged on the output shaft of the motor b76 And the belt 79 that is connected between the pulley a77 and the pulley b78, the fixed plate 71 is also fixedly provided with a slide rail 91, the motor b76 is slidably arranged on the slide rail 91, and the outer diameter of the grinding rod 75 is consistent with the inner diameter of the semiconductor graphite tube 12 , when in use, when the turntable 21 drives the clamping assembly 5 and the semiconductor graphite tube 12 to rotate directly below the grinding assembly 7, at this time, the clamping assembly 5 has fixed the semiconductor graphite tube 12, the cylinder 72 starts to work, and the piston rod 73 moves downwards to drive the rotating rod 74 and the grinding rod 75 to move downward until the grinding rod 75 all extends into the inside of the semiconductor graphite tube 12. At this time, the outer wall of the grinding rod 75 fits with the inner wall of the semiconductor graphite tube 12, and the The motor b76 drives the output shaft of the motor b76 to rotate, thereby driving the rotating rod 74 and the grinding rod 75 to rotate. During the rotation of the grinding rod 75, the inner wall of the semiconductor graphite tube 12 is polished, which improves the precision and efficiency of grinding.

As shown in FIGS. 3 and 4 , the dust suction assembly 8 includes several suction holes 81 opened on the top of the rotating base 27 , a dust suction pipe 82 fixedly connected to the rotating base 27 , and a stopper fixedly arranged on the rotating base 27 . Plate 83 and the vacuum cleaner 84 fixedly arranged on the support frame 1, the top of the baffle plate 83 is provided with a gap 85, the dust suction pipe 82 communicates with the dust suction hole 81, and the other end of the dust suction pipe 82 is fixedly connected with the vacuum cleaner 84, and is used When the vacuum cleaner 84 is turned on, when the semiconductor graphite tube 12 is polished, under the effect of the vacuum cleaner 84, the waste debris generated by the grinding is sucked into the dust suction hole 81 and then enters the dust collector 84 through the dust suction pipe 82 to collect, and the dust collector 84 The scraps of grinding can be cleaned regularly to prevent the scraps of grinding from being scattered all over the place and polluting the working environment.

As shown in Figure 1, the blanking assembly 4 includes a fixed frame b41, a conveyor belt b42 that is rotatably arranged on the fixed frame b41, and a limit plate b43 that is fixedly arranged on both sides of the fixed frame b41. When in use, when the semiconductor graphite tube 12 After polishing, along with the rotation of the turntable 21, the clamping assembly 5 drives the semiconductor graphite tube 12 to rotate to the conveyor belt b42. The bottom of the conveyor belt b42 fits with the top surface of the conveyor belt b42, so that the conveyor belt b42 drives the semiconductor graphite tube 12 to carry out blanking and output, realizing the automatic blanking operation without manual blanking, saving time and effort, and improving work efficiency.

As shown in Figure 5, one side of the baffle plate 83 fits with the inner wall of the turntable 21, and the other side fits with the surface of the cam 62. By setting the baffle plate 83, when the dust suction hole 81 sucks the grinding waste , The baffle plate 83 plays a guiding role for the waste debris, and guides the waste debris into the dust suction hole 81 .

Embodiment two

As shown in Figure 3, wherein the same or corresponding parts with the first embodiment adopt the corresponding reference numerals with the first embodiment, for the sake of simplicity, only the difference from the first embodiment is described below; the second embodiment and the first embodiment One difference is that: the inner surfaces of the clamping plate a53 and the clamping plate b54 are fixedly provided with several rubber protrusions 9 .

Here, the present embodiment can increase the frictional force between the clamping plate a53 and the clamping plate b54 and the semiconductor graphite tube 12 by arranging the rubber protrusion 9 on the inner surface of the clamping plate a53 and the clamping plate b54, on the one hand , so that the clamping plate a53 and the clamping plate b54 clamp the semiconductor graphite tube 12 more firmly, on the other hand, the semiconductor graphite tube 12 will not rotate during grinding, which will affect the quality of grinding.

work process

First, the staff stacks the semiconductor graphite tubes 12 into the loading box 33, and the conveyor belt a32 starts to operate, driving the semiconductor graphite tubes 12 dropped on the conveyor belt a32 to be transported between the clamping plate a53 and the clamping plate b54, Driven by the turntable 21, on the path where the semiconductor graphite tube 12 rotates to the grinding assembly 7, the clamping plate a53 and the clamping plate b54 are gradually closed under the action of the cam 62 during the rotation process, and the semiconductor graphite tube 12 is completely closed. Clamping and fixing, at this time, the connecting shaft 57 slides in the chute b15, and the spring 58 is released, so that the semiconductor graphite tube 12 is fixed when it is positioned under the grinding assembly 7, and when the semiconductor graphite tube 12 rotates to the grinding assembly 7 below, Cylinder 72 starts to work, and piston rod 73 moves downwards and drives rotating bar 74 and polishing rod 75 to move downwards, until polishing rod 75 all stretches into the inside of semiconductor graphite tube 12, at this moment, the outer wall of polishing rod 75 and semiconductor graphite tube 12 The inner wall of the semiconductor graphite tube 12 is fitted together, the motor b76 is turned on, and the output shaft of the motor b76 is driven to rotate, thereby driving the rotating rod 74 and the grinding rod 75 to rotate, and the grinding rod 75 polishes the inner wall of the semiconductor graphite tube 12. When the semiconductor graphite tube 12 is polished Finally, under the drive of the turntable 21, on the path where the semiconductor graphite tube 12 rotates to the blanking assembly 4, the clamping plate a53 and the clamping plate b54 are gradually separated under the action of the cam 62 to separate the semiconductor graphite tube 12 during the rotation process. Pipe 12 is loosened, and at this moment, connecting shaft 57 slides in chute b15, and spring 58 is compressed, and when rotating to conveyor belt b42, conveyor belt b42 carries out output blanking of semiconductor graphite tube 12.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "front and rear", "left and right", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description. It is not intended to indicate or imply that the referred device or component must have a particular orientation, be constructed in a particular orientation, and operate in a particular orientation, and thus should not be construed as limiting the invention.

Of course, in this technical solution, those skilled in the art should understand that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of one element can be one , and in other embodiments, the number of the element may be more than one, and the term "a" cannot be understood as a limitation on the number.

What is described above in conjunction with the accompanying drawings is only a preferred embodiment of the present invention, but the present invention is not limited to the above-mentioned embodiment. It should be pointed out that for those skilled in the art, without departing from the structure of the present invention Various modifications and improvements are made, which should also be regarded as the protection scope of the present invention, and will not affect the effect and practicability of the implementation of the present invention.

Claims (10)

1. A device for grinding the inner wall of a semiconductor graphite tube, comprising a support frame (1), characterized in that: the support frame (1) is provided with a rotating assembly (2), and the rotating assembly (2) includes a turntable (21) , the turntable (21) is set as a hollow structure, and the left and right sides of the turntable (21) are respectively provided with a feeding assembly (3) and an unloading assembly (4), and the turntable (21) is fixed with several a plurality of bearing plates (11), a clamping assembly (5) is slidably arranged on several of the bearing plates (11), a guide assembly (6) is fixedly arranged inside the rotating disk (21), and the rotating disk (21) A grinding assembly (7) is provided above the turntable (21), a dust collection assembly (8) is also provided in the turntable (21), the feeding assembly (3) is used to transport the semiconductor graphite tube (12), and the rotating assembly ( 2) It is used to drive the clamping component (5) to rotate, and the clamping component (5) is used to cooperate with the guide component (6) to clamp or loosen the semiconductor graphite tube (12) during the rotation process, The grinding assembly (7) is used to grind the inner wall of the semiconductor graphite tube (12), the dust collection assembly (8) is used to collect waste generated during the grinding process, and the unloading assembly (4) Used to output the polished semiconductor graphite tube (12). 2. A semiconductor graphite tube inner wall grinding device according to claim 1, characterized in that: the rotating assembly (2) also includes a fixed seat (22) fixed on the support frame (1), and The rotating shaft (23) in the fixed seat (22), the motor seat (24) fixedly arranged on the fixed seat (22), and the motor a (25) fixedly arranged on the motor seat (24), the motor a (25 ) is fixedly connected to the rotating shaft (23), the support frame (1) is also fixedly provided with a support rod (26), the support rod (26) is fixedly provided with a rotating seat (27), and the turntable (21) The rotation is arranged on the rotating seat (27), the said turntable (21) is fixedly arranged on the rotating shaft (23), and the rotating shaft (23) is arranged in the rotating seat (27). 3. A semiconductor graphite tube inner wall grinding device according to claim 1, characterized in that: the feeding assembly (3) includes a fixed frame a (31), a conveying device rotatably arranged on the fixed frame a (31) Belt a (32), the feeding box (33) fixedly arranged on the fixed frame a (31) and the limit plate a (34) fixedly arranged on the fixed frame a (31), the feeding box (33 ) is located above the conveyor belt a (32). 4. The device for grinding the inner wall of a semiconductor graphite tube according to claim 1, characterized in that: the carrier plate (11) is provided with a through groove (13), and both sides of the through groove (13) are provided with There is a chute a (14), the inner wall of the turntable (21) is provided with a chute b (15), and the clamping assembly (5) includes a slider a ( 51), slide block b (52) set in the chute a (14), clamping plate a (53) fixedly set on the slide block a (51), fixedly set on the slide block b (52) The clamping plate b (54), the connecting rod a (55) hinged at the bottom of the slider a (51), the connecting rod b (56) hinged at the bottom of the slider b (52), and the sliding rod a (56) arranged at the bottom of the slide The connecting shaft (57) in b (15) and the spring (58) fixedly connected between the connecting shaft (57) and the chute b (15), the connecting rod a (55) and the connecting rod b (56) The bottoms of both are rotatably arranged on the connecting shaft (57), and the clamping plate a (53) and the clamping plate b (54) are both arranged in an arc-shaped structure. 5. A semiconductor graphite tube inner wall grinding device according to claim 2, characterized in that: the guide assembly (6) includes a connecting column (61) fixedly arranged on the rotating seat (27) and a connecting column (61) fixedly arranged on the connecting The cam (62) on the column (61), the cam (62) is coaxial with the rotating shaft (23). 6. A semiconductor graphite tube inner wall grinding device according to claim 1, characterized in that: the grinding assembly (7) includes a fixed plate (71) fixed on the support frame (1), fixed on a fixed The cylinder (72) on the plate (71), the piston rod (73) driven by the cylinder (72), the rotation rod (74) arranged at the bottom of the piston rod (73) for rotation, and the rotation rod (74) fixedly arranged at the bottom of the rotation rod (74) The grinding rod (75), the motor b (76) fixed on the piston rod (73), the pulley a (77) fixed on the rotating rod (74), and the output shaft of the motor b (76) The pulley b (78) and the belt (79) connected between the pulley a (77) and the pulley b (78), the fixed plate (71) is also fixed with a slide rail (91), the motor b (76) is slidably arranged on the slide rail (91), and the outer diameter of the grinding rod (75) is consistent with the inner diameter of the semiconductor graphite tube (12). 7. The device for grinding the inner wall of semiconductor graphite tube according to claim 5, characterized in that: the dust suction assembly (8) includes several dust suction holes (81) opened on the top of the rotating base (27), fixed The dust suction pipe (82) connected to the rotating seat (27), the baffle plate (83) fixedly arranged on the rotating seat (27) and the vacuum cleaner (84) fixedly arranged on the support frame (1), the said baffle A notch (85) is opened on the top of the plate (83), the dust suction pipe (82) communicates with the dust suction hole (81), and the other end of the dust suction pipe (82) is fixedly connected with the vacuum cleaner (84). 8. A semiconductor graphite tube inner wall grinding device according to claim 1, characterized in that: the blanking assembly (4) includes a fixed frame b (41), a conveying device rotatably arranged on the fixed frame b (41) Belt b (42) and limiting plates b (43) fixedly arranged on both sides of the fixing frame b (41). 9. A semiconductor graphite tube inner wall grinding device according to claim 4, characterized in that: the inner surfaces of the clamping plate a (53) and the clamping plate b (54) are fixedly provided with several rubber protrusions from (9). 10. A semiconductor graphite tube inner wall grinding device according to claim 7, characterized in that: one side of the baffle (83) is attached to the inner wall of the turntable (21), and the other side is attached to the cam (62) ) fit the surface.

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