CN116097565A - 弹性波元件以及通信装置 - Google Patents

弹性波元件以及通信装置 Download PDF

Info

Publication number
CN116097565A
CN116097565A CN202180051011.0A CN202180051011A CN116097565A CN 116097565 A CN116097565 A CN 116097565A CN 202180051011 A CN202180051011 A CN 202180051011A CN 116097565 A CN116097565 A CN 116097565A
Authority
CN
China
Prior art keywords
bus bar
edge portion
region
cavity
central region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180051011.0A
Other languages
English (en)
Chinese (zh)
Inventor
野添惣一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of CN116097565A publication Critical patent/CN116097565A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180051011.0A 2020-08-28 2021-08-27 弹性波元件以及通信装置 Pending CN116097565A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020144341 2020-08-28
JP2020-144341 2020-08-28
PCT/JP2021/031584 WO2022045307A1 (ja) 2020-08-28 2021-08-27 弾性波素子及び通信装置

Publications (1)

Publication Number Publication Date
CN116097565A true CN116097565A (zh) 2023-05-09

Family

ID=80355405

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180051011.0A Pending CN116097565A (zh) 2020-08-28 2021-08-27 弹性波元件以及通信装置

Country Status (4)

Country Link
US (2) US12489418B2 (https=)
JP (1) JPWO2022045307A1 (https=)
CN (1) CN116097565A (https=)
WO (1) WO2022045307A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023195523A1 (ja) * 2022-04-08 2023-10-12 株式会社村田製作所 弾性波装置
WO2023243351A1 (ja) * 2022-06-17 2023-12-21 京セラ株式会社 弾性波装置、および通信装置
WO2024034528A1 (ja) * 2022-08-12 2024-02-15 京セラ株式会社 弾性波装置、複合フィルタ及び通信装置
JP2025179286A (ja) * 2022-11-08 2025-12-10 京セラ株式会社 弾性波共振子および通信装置
US12609671B2 (en) * 2024-03-18 2026-04-21 Rf360 Singapore Pte. Ltd. High Q electroacoustic resonator

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012257019A (ja) * 2011-06-08 2012-12-27 Murata Mfg Co Ltd 弾性波装置
CN105337586A (zh) * 2015-12-03 2016-02-17 天津大学 兰姆波谐振器
US20160087187A1 (en) * 2014-05-29 2016-03-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitive coupled resonator and filter device with comb electrodes and support pillars separating piezoelectric layer
CN107534428A (zh) * 2015-04-24 2018-01-02 株式会社村田制作所 弹性波装置
CN109328431A (zh) * 2016-06-27 2019-02-12 株式会社村田制作所 弹性波滤波器装置
WO2020100949A1 (ja) * 2018-11-14 2020-05-22 京セラ株式会社 弾性波装置、分波器および通信装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007312164A (ja) * 2006-05-19 2007-11-29 Hitachi Ltd 圧電薄膜共振器並びにそれを用いた高周波フィルタ及び高周波モジュール
WO2013150814A1 (ja) * 2012-04-04 2013-10-10 株式会社村田製作所 通信装置
JP5436729B1 (ja) * 2012-04-25 2014-03-05 京セラ株式会社 弾性波素子、分波器および通信モジュール
WO2014133084A1 (ja) * 2013-02-27 2014-09-04 京セラ株式会社 弾性波素子、分波器および通信モジュール
US9281800B2 (en) * 2014-01-24 2016-03-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Resonator filter device having narrow pass-band
US9660349B2 (en) * 2015-06-29 2017-05-23 Northrop Grumman Systems Corporation Multiferroic surface acoustic wave antenna
WO2019065666A1 (ja) * 2017-09-27 2019-04-04 株式会社村田製作所 弾性波装置
KR102670034B1 (ko) * 2018-12-06 2024-05-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012257019A (ja) * 2011-06-08 2012-12-27 Murata Mfg Co Ltd 弾性波装置
US20160087187A1 (en) * 2014-05-29 2016-03-24 Avago Technologies General Ip (Singapore) Pte. Ltd. Capacitive coupled resonator and filter device with comb electrodes and support pillars separating piezoelectric layer
CN107534428A (zh) * 2015-04-24 2018-01-02 株式会社村田制作所 弹性波装置
CN105337586A (zh) * 2015-12-03 2016-02-17 天津大学 兰姆波谐振器
CN109328431A (zh) * 2016-06-27 2019-02-12 株式会社村田制作所 弹性波滤波器装置
WO2020100949A1 (ja) * 2018-11-14 2020-05-22 京セラ株式会社 弾性波装置、分波器および通信装置

Also Published As

Publication number Publication date
JPWO2022045307A1 (https=) 2022-03-03
WO2022045307A1 (ja) 2022-03-03
US20260051871A1 (en) 2026-02-19
US12489418B2 (en) 2025-12-02
US20240030891A1 (en) 2024-01-25

Similar Documents

Publication Publication Date Title
JP7433268B2 (ja) 弾性波装置、分波器および通信装置
CN116097565A (zh) 弹性波元件以及通信装置
CN113302840A (zh) 弹性波装置、分波器以及通信装置
US20220224305A1 (en) Acoustic wave device
CN110771039B (zh) 弹性波装置、分波器以及通信装置
US12413203B2 (en) Acoustic wave device
US20240154595A1 (en) Acoustic wave device
US20250023548A1 (en) Acoustic wave device
JP2024125406A (ja) 弾性波装置及び通信装置
JP2019180064A (ja) 弾性波フィルタ、分波器および通信装置
US20240380379A1 (en) Acoustic wave device
US20240372525A1 (en) Acoustic wave device and method for manufacturing acoustic wave device
US20240014793A1 (en) Acoustic wave device and method for manufacturing acoustic wave device
JP2025038204A (ja) 弾性波装置、フィルタ、分波器及び通信装置
JP7714113B2 (ja) 弾性波素子、モジュール及び通信装置
US20230308072A1 (en) Acoustic wave device
KR102827988B1 (ko) 음향파 장치
WO2023033032A1 (ja) 弾性波素子、分波器および通信装置
US20240339986A1 (en) Elastic wave device, filter, splitter, and communication device
JP7421557B2 (ja) 弾性波装置及び通信装置
US20240030886A1 (en) Acoustic wave device
US20240297634A1 (en) Acoustic wave device
WO2023085210A1 (ja) 弾性波装置、フィルタ、分波器及び通信装置
US20230344413A1 (en) Filter device
WO2025084127A1 (ja) 弾性波装置、分波器及び通信装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination