CN115966497A

CN115966497A - Feeding and discharging mechanism for silicon wafer drying machine

Info

Publication number: CN115966497A
Application number: CN202211700999.1A
Authority: CN
Inventors: 陈宏�; 陆进进; 吴佳杰
Original assignee: Zhangjiagang Ultrasonic & Electric Co ltd
Current assignee: Zhangjiagang Ultrasonic & Electric Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-04-14

Abstract

The application discloses last unloading mechanism for silicon chip drier, including the drier main part, be equipped with a plurality of basket of flowers standing grooves in the drier main part, the outer edge of drier main part is gone up to rotate and is connected with the annular plate, be equipped with annular tooth on the outer wall of annular plate, the meshing is connected with first gear on the annular tooth, first gear is connected with first motor, it is equipped with first constant head tank to correspond on the annular plate in every basket of flowers standing groove outside, be equipped with the second constant head tank on the annular plate between the adjacent first constant head tank, the top of drier main part is equipped with the lifter plate, the bottom mounting of lifter plate has a plurality of translation electric jar, a plurality of translation electric jar and a plurality of basket of flowers standing groove one-to-ones set up, the translation electric jar sets up on the radius of drier main part, cooperation sliding connection has basket of flowers anchor clamps on the translation electric jar, the top of lifter plate is fixed with elevating system. This go up unloading mechanism realizes automatic unloading of going up through the structure cooperation, avoids manual operation, and degree of automation is high, raises the efficiency.

Description

Feeding and discharging mechanism for silicon wafer drying machine

Technical Field

The application relates to the technical field of silicon wafer drying, in particular to a feeding and discharging mechanism for a silicon wafer drying machine.

Background

Among the prior art, the silicon chip is placed in the basket of flowers, then place the basket of flowers in the drier spin-dry through centrifugal force, place the basket of flowers in the basket of flowers standing groove of drier and spin-dry by the manual work at present and also take out the basket of flowers by the manual work, this kind of mode inefficiency and inconvenient taking from top to bottom influence the efficiency of spin-drying.

Disclosure of Invention

The invention aims to provide a feeding and discharging mechanism for a silicon wafer drying machine, which overcomes the defects in the prior art.

In order to achieve the purpose, the invention provides the following technical scheme:

the embodiment of the application discloses a go up unloading mechanism for silicon chip drier, including the drier main part, be equipped with a plurality of basket of flowers standing grooves in the drier main part, its characterized in that: the outer edge of drier main part is gone up to rotate and is connected with the annular plate, be equipped with annular tooth on the outer wall of annular plate, the meshing is connected with first gear on the annular tooth, first gear is connected with first motor, every correspond on the annular plate in the basket of flowers standing groove outside and be equipped with first constant head tank, and is adjacent be equipped with the second constant head tank on the annular plate between the first constant head tank, the top of drier main part is equipped with the lifter plate, the bottom mounting of lifter plate has a plurality of translation electric jar, and is a plurality of translation electric jar is with a plurality of basket of flowers standing groove one-to-one sets up, the setting of translation electric jar is on the radius of drier main part, the last cooperation sliding connection of translation electric jar has basket of flowers anchor clamps, the top of lifter plate is fixed with elevating system.

Preferably, in the above loading and unloading mechanism for the silicon wafer spin dryer, the outer edge of the spin dryer body and the bottom surface of the annular plate are respectively provided with an annular slide rail and an annular slide block which are matched with each other.

Preferably, in the above feeding and discharging mechanism for the silicon wafer drying machine, the lifting mechanism includes a pair of racks, a pair of second gears, a fixing frame and a second motor, the pair of racks is vertically disposed at the top end of the lifting plate, the pair of second gears are respectively engaged with the pair of racks, the pair of gears are fixedly sleeved on the connecting shaft, the connecting shaft is rotatably connected with the fixing frame, the second motor is fixed on the fixing frame and drives the connecting shaft to rotate, a pair of vertical rails is fixed on the upper end surface of the lifting plate, a pair of sliding blocks is convexly disposed in the fixing frame, and the pair of sliding blocks is vertically and slidably connected with the pair of vertical rails.

Preferably, in the above loading and unloading mechanism for the silicon wafer drying machine, the second positioning grooves are arranged in the middle of the adjacent first positioning grooves.

Preferably, in the loading and unloading mechanism for the silicon wafer drying machine, the first positioning grooves are uniformly arranged.

Preferably, in the feeding and discharging mechanism for the silicon wafer drying machine, the annular teeth and the annular plate are integrally formed.

Preferably, in the above loading and unloading mechanism for the silicon wafer drying machine, the first positioning groove is the same as the second positioning groove.

Compared with the prior art, the invention has the advantages that:

this go up unloading mechanism realizes automatic unloading of going up through the structure cooperation, avoids manual operation, and degree of automation is high, raises the efficiency.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.

FIG. 1 is a perspective view of a loading and unloading mechanism for a silicon wafer dryer in an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described in detail below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.

Referring to fig. 1, the feeding and discharging mechanism for a silicon wafer drying machine in this embodiment includes a drying machine main body 1, a plurality of basket placing grooves 2 are arranged in the drying machine main body 1, an annular plate 3 is rotatably connected to an outer edge of the drying machine main body 1, annular teeth 4 are arranged on an outer wall of the annular plate 3, first gears 5 are connected to the annular teeth 4 in a meshed manner, the first gears 5 are connected to a first motor 6, a first positioning groove 7 is correspondingly arranged on the annular plate 3 outside each basket placing groove 2, a second positioning groove 8 is arranged on the annular plate 3 between adjacent first positioning grooves 7, a lifting plate 9 is arranged above the drying machine main body 1, a plurality of translation electric cylinders 10 are fixed to the bottom end of the lifting plate 9, the translation electric cylinders 10 are arranged in one-to-one correspondence with the basket placing grooves 2, the translation electric cylinders 10 are arranged on a radius of the drying machine main body 1, flower baskets 11 are slidably connected to the translation electric cylinders 10 in a matched manner, and a lifting mechanism 12 is fixed to the top end of the lifting plate 9.

Further, the outer edge of the dryer body 1 and the bottom surface of the annular plate 3 are respectively provided with an annular slide rail (not shown) and an annular slide block (not shown) which are matched with each other.

Further, the lifting mechanism 12 includes a pair of racks 1201, a pair of second gears 1202, a fixing frame 1203 and a second motor 1204, the pair of racks 1201 is vertically disposed on the top end of the lifting plate 9, the pair of second gears 1202 is respectively engaged with the pair of racks 1201, the pair of gears 1202 is fixedly sleeved on the connecting shaft 1205, the connecting shaft 1205 is rotatably connected with the fixing frame 1203, the second motor 1202 is fixed on the fixing frame 1203 and drives the connecting shaft 1205 to rotate, a pair of vertical rails 1206 is fixed on the upper end surface of the lifting plate 9, a pair of sliders 1207 is convexly disposed in the fixing frame 1203, and the pair of sliders 1207 is vertically slidably connected with the pair of vertical rails 1206.

Further, a second positioning groove 8 is provided in the middle of the adjacent first positioning groove 7.

Further, the plurality of first positioning grooves 7 are uniformly arranged.

Further, the ring teeth 4 are formed integrally with the ring plate 3.

Further, the first positioning groove 7 is identical to the second positioning groove 8.

In this technical scheme, the mechanism that basket of flowers anchor clamps snatched with the basket of flowers cooperation among the prior art, and first constant head tank and second constant head tank are the prior art of cooperation basket of flowers joint, and unloading mechanism is gone up in this automation through the structure cooperation realization to go up, avoids manual operation, and degree of automation is high, raises the efficiency.

The specific implementation principle is as follows:

the method comprises the steps that firstly, baskets are fed from one side through other mechanical arms, the baskets are fed into a first positioning groove one by one through the cooperation of a first gear and annular teeth, the baskets are ensured to be placed in all the first positioning grooves, a second gear rotates to drive a lifting plate to descend, basket clamps on a translation electric cylinder clamp the baskets in the first positioning grooves, a second spring drives the lifting plate to move upwards, the basket clamps move to the positions above a basket placing groove of a spin dryer through the driving of the electric cylinder, the second gear drives the lifting plate to move downwards to place the baskets in the basket placing groove, the baskets on all the first positioning grooves are placed into the spin dryer at one time, the spin dryer starts to spin-dry, the baskets are placed into a second positioning groove one by one through the cooperation of other mechanical arms and the first gear in the spin-drying process, after the spin-drying is completed, all clamping grooves in the spin dryer are placed into the first positioning grooves synchronously through the cooperation of the lifting plate, the electric cylinder and the annular teeth, all baskets are placed into a second positioning groove through the cooperation of the lifting plate, the electric cylinder and the spin dryer, and then all the baskets are taken out from the positioning grooves to the outside of the spin dryer, and the spin dryer are taken out, and the positioning grooves are taken out. So repeatedly, utilize the dislocation relation of first constant head tank and second constant head tank to and a plurality of electric jar and anchor clamps complex snatch in step, realize high efficiency's automatic feeding, the effect is better, avoids manual operation.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.

The foregoing is merely a detailed description of the present application, and it should be noted that modifications and embellishments could be made by those skilled in the art without departing from the principle of the present application, and these should also be considered as the protection scope of the present application.

Claims

1. The utility model provides an go up unloading mechanism for silicon chip drier, includes the drier main part, be equipped with a plurality of basket of flowers standing grooves in the drier main part, its characterized in that: the outer edge of drier main part is gone up to rotate and is connected with the annular plate, be equipped with annular tooth on the outer wall of annular plate, the meshing is connected with first gear on the annular tooth, first gear is connected with first motor, every correspond on the annular plate in the basket of flowers standing groove outside and be equipped with first constant head tank, and is adjacent be equipped with the second constant head tank on the annular plate between the first constant head tank, the top of drier main part is equipped with the lifter plate, the bottom mounting of lifter plate has a plurality of translation electric jar, and is a plurality of translation electric jar is with a plurality of basket of flowers standing groove one-to-one sets up, the setting of translation electric jar is on the radius of drier main part, the last cooperation sliding connection of translation electric jar has basket of flowers anchor clamps, the top of lifter plate is fixed with elevating system.

2. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the outer edge of the spin dryer main body and the bottom surface of the annular plate are respectively provided with an annular slide rail and an annular slide block which are matched with each other.

3. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the lifting mechanism comprises a pair of racks, a pair of second gears, a fixing frame and a second motor, the racks are vertically arranged at the top end of the lifting plate, the second gears are respectively connected with the racks in a meshed mode, the gears are fixedly sleeved on the connecting shaft in a sleeved mode, the connecting shaft is rotatably connected with the fixing frame, the second motor is fixed on the fixing frame and drives the connecting shaft to rotate, a pair of vertical rails is fixed on the upper end face of the lifting plate, a pair of sliding blocks is arranged in the fixing frame in a protruding mode, and the sliding blocks are connected with the vertical rails in a vertically sliding mode.

4. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the second positioning groove is arranged in the middle of the adjacent first positioning groove.

5. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the first positioning grooves are uniformly arranged.

6. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the annular teeth and the annular plate are integrally formed.

7. The loading and unloading mechanism for the silicon wafer drying machine as claimed in claim 1, wherein: the first positioning groove is the same as the second positioning groove.