CN115803597B - 位移检测装置以及转矩传感器 - Google Patents

位移检测装置以及转矩传感器

Info

Publication number
CN115803597B
CN115803597B CN202180041788.9A CN202180041788A CN115803597B CN 115803597 B CN115803597 B CN 115803597B CN 202180041788 A CN202180041788 A CN 202180041788A CN 115803597 B CN115803597 B CN 115803597B
Authority
CN
China
Prior art keywords
electrode
displacement
gap
predetermined direction
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180041788.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN115803597A (zh
Inventor
若林一贵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of CN115803597A publication Critical patent/CN115803597A/zh
Application granted granted Critical
Publication of CN115803597B publication Critical patent/CN115803597B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/14—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft
    • G01L3/1407—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs
    • G01L3/1428—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers
    • G01L3/1442—Rotary-transmission dynamometers wherein the torque-transmitting element is other than a torsionally-flexible shaft involving springs using electrical transducers involving electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
CN202180041788.9A 2020-06-12 2021-06-07 位移检测装置以及转矩传感器 Active CN115803597B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-102337 2020-06-12
JP2020102337 2020-06-12
PCT/JP2021/021475 WO2021251311A1 (ja) 2020-06-12 2021-06-07 変位検出装置及びトルクセンサ

Publications (2)

Publication Number Publication Date
CN115803597A CN115803597A (zh) 2023-03-14
CN115803597B true CN115803597B (zh) 2025-11-07

Family

ID=78846273

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180041788.9A Active CN115803597B (zh) 2020-06-12 2021-06-07 位移检测装置以及转矩传感器

Country Status (5)

Country Link
US (1) US11815416B2 (https=)
JP (1) JPWO2021251311A1 (https=)
CN (1) CN115803597B (https=)
DE (1) DE112021003244T5 (https=)
WO (1) WO2021251311A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023105643A1 (ja) * 2021-12-07 2023-06-15 ファナック株式会社 変位検出装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6880408B1 (en) * 2002-04-26 2005-04-19 Bbnt Solutions Llc Mechanical amplifier systems and methods
JP2019190639A (ja) * 2018-04-27 2019-10-31 マツダ株式会社 摩擦締結装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2482724A1 (fr) * 1980-05-16 1981-11-20 Testut Aequitas Procede de fixation des armatures dans un instrument de pesage a transducteur capacitif et l'instrument de pesage ainsi obtenu
JPH0634158Y2 (ja) * 1988-06-24 1994-09-07 マックス株式会社 製図機のブレーキ装置
US5024099A (en) * 1989-11-20 1991-06-18 Setra Systems, Inc. Pressure transducer with flow-through measurement capability
JP2001272290A (ja) 2000-03-23 2001-10-05 Autogard Japan:Kk トルク測定装置
US6700173B1 (en) * 2002-08-20 2004-03-02 Memx, Inc. Electrically isolated support for overlying MEM structure
JP2012018157A (ja) * 2010-06-10 2012-01-26 Panasonic Electric Works Co Ltd ポジションセンサ
US8739868B2 (en) 2010-11-29 2014-06-03 Schlumberger Technology Corporation System and method of strain measurement amplification
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US10416030B2 (en) * 2015-01-26 2019-09-17 Wacoh-Tech Inc. Force sensor
JP6092326B2 (ja) * 2015-07-29 2017-03-08 株式会社トライフォース・マネジメント トルクセンサ
KR101804297B1 (ko) 2016-02-23 2017-12-04 (주)아이투에이시스템즈 변위증폭 메카니즘을 이용한 힘센서 및 이를 포함하는 중량측정장치
JP6100448B1 (ja) 2016-07-20 2017-03-22 株式会社トライフォース・マネジメント トルクセンサ
CN108088359B (zh) * 2016-11-21 2019-07-26 清华大学 便携式轮廓仪及轮廓扫描显微镜和系统
KR102242625B1 (ko) * 2016-12-27 2021-04-20 아이펙스 가부시키가이샤 토크 센서
JP6532040B2 (ja) 2017-05-29 2019-06-19 株式会社トライフォース・マネジメント トルクセンサ
JP6626075B2 (ja) * 2017-11-28 2019-12-25 ファナック株式会社 変位検出方式の６軸力センサ
JP6865976B2 (ja) 2019-05-09 2021-04-28 株式会社トライフォース・マネジメント トルクセンサ
JP6771794B1 (ja) * 2020-02-25 2020-10-21 株式会社トライフォース・マネジメント 力覚センサ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6880408B1 (en) * 2002-04-26 2005-04-19 Bbnt Solutions Llc Mechanical amplifier systems and methods
JP2019190639A (ja) * 2018-04-27 2019-10-31 マツダ株式会社 摩擦締結装置

Also Published As

Publication number Publication date
JPWO2021251311A1 (https=) 2021-12-16
US20230175902A1 (en) 2023-06-08
US11815416B2 (en) 2023-11-14
CN115803597A (zh) 2023-03-14
DE112021003244T5 (de) 2023-03-30
WO2021251311A1 (ja) 2021-12-16

Similar Documents

Publication Publication Date Title
CN110088584B (zh) 力矩传感器
US11085836B2 (en) Force sensor that detects at least one of a force in each axial direction and a moment around each axis in an XYZ three-dimensional coordinate system
JP3286979B2 (ja) 回転変位検出器の組み付け構造
JP6673979B2 (ja) 変位検出方式の力センサ
CN209979107U (zh) 一种扭矩测量装置及其结构件与过载保护机构
CN115803597B (zh) 位移检测装置以及转矩传感器
CN107407607A (zh) 扭矩传感器
CN110462357A (zh) 具有适度柔性的高可靠性扭矩传感器
JPH106274A (ja) 力覚センサ装置
CN111183337A (zh) 轴向力传感器及具有该传感器的机器人夹持器和机器人
KR102235970B1 (ko) 정전용량형 토크센서
US12584808B2 (en) Torque sensor element and torque sensor
JP2012189516A (ja) トルクセンサ
US10775250B2 (en) Torque sensor
JP5764609B2 (ja) ブッシュ分力検出装置
EP1061326B1 (en) Reseat system of a touch signal probe with a contact point double displacer
JP7692863B2 (ja) 力覚センサ
KR20230123723A (ko) 정전 용량형 6축 힘/토크 센서
CN111829714A (zh) 多自由度力和力矩传感器及机器人
JP7587041B2 (ja) トルクセンサ
CN106932123B (zh) 一种手腕传感器
KR101766982B1 (ko) 외부 간섭 디커플링이 가능한 정전용량형 토크센서
JP2023167923A (ja) センサ装置
JP2023051285A (ja) 力覚センサ
JP2543464B2 (ja) 航空機操縦装置に用いる多軸多重フォ―スセンサ

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant