CN115786880B

CN115786880B - Lifting flip mechanism

Info

Publication number: CN115786880B
Application number: CN202310086579.7A
Authority: CN
Inventors: 杨成武
Original assignee: Tianjin Zhengwei Semiconductor Technology Co ltd
Current assignee: Tianjin Zhengwei Semiconductor Technology Co ltd
Priority date: 2023-02-09
Filing date: 2023-02-09
Publication date: 2023-05-05
Anticipated expiration: 2043-02-09
Also published as: CN115786880A

Abstract

A flip-up and down mechanism comprising: the locking unit is provided with a connecting shaft for connecting the anchor ear with the anchor ear; the guide unit is provided with a guide plate and a screw rod which are connected with the connecting shaft, wherein the guide plate is provided with a non-curve guide groove and a rotation direction assembly connected with the connecting shaft; the screw rod is controlled to rotate so as to drive the connecting shaft to drive the hoop to move along the height direction of the screw rod, and the rotating component drives the connecting shaft to move along the route where the guide groove is located, so that the hoop can move in a lifting mode or can turn over while lifting. The lifting flip mechanism can lock the cavity cover and automatically separate the cavity cover from the cavity, and can drive the cavity cover to automatically lift and flip so as to finish flip of the cavity cover; the cavity cover can be driven to return to the initial position again for installation and alignment; structural design is reasonable and the controllability is strong, can not appear impurity or dust and drop on the workstation when the clearance chamber lid is inside yet, and the clearance is effectual and efficient.

Description

Lifting flip mechanism

Technical Field

The invention belongs to the technical field of chemical vapor deposition auxiliary equipment, and particularly relates to a lifting flip mechanism.

Background

The existing chemical vapor deposition equipment for diamond processing needs to clean a cavity after processing is completed, and a cavity cover needs to be opened during cleaning. The weight of the cavity cover is about 50KG, the existing cavity cover is manually opened, and the cavity cover cannot be separated from the cavity for a long time after the cavity cover is opened because the cavity is in a vacuum state, so that the cavity cover needs to be manually supported for a certain period after the cavity cover is opened, and the cavity cover is placed back to the original position after being cleaned. The manual flip is influenced by personal capability, so that the disassembly quality and the disassembly efficiency are purely different; meanwhile, the manual flip cover is time-consuming and labor-consuming, and the chamber base is extremely easy to collide with, so that the disassembly and assembly risk is large.

Disclosure of Invention

The invention provides a lifting flip mechanism, which solves the technical problems of poor disassembly and assembly quality, low efficiency and high safety risk in the existing manual disassembly and assembly process.

In order to solve at least one of the technical problems, the invention adopts the following technical scheme:

a flip-up and down mechanism comprising:

the locking unit is provided with a connecting shaft for connecting the anchor ear with the anchor ear;

the guide unit is provided with a guide plate and a screw rod which are connected with the connecting shaft, wherein the guide plate is provided with a non-curve guide groove and a rotation direction assembly connected with the connecting shaft;

the screw rod is controlled to rotate so as to drive the connecting shaft to drive the hoop to move along the height direction of the screw rod, and the rotating component drives the connecting shaft to move along the route where the guide groove is located, so that the hoop can move in a lifting mode or can turn over while lifting.

Further, the turning angle of the anchor ear is equal to the angle change value of the turning component relative to the initial position.

Further, the lower section part and the upper section part of the guide groove are straight line sections which are arranged in a staggered way, and the middle part of the guide groove is an inclined section which is connected with the upper section part and the lower section part and is inclined towards one side of the central axis of the guide plate;

the lower section is arranged on one side edge of the guide plate;

the included angle between the middle part and the lower section part is smaller than 30 degrees.

Further, the length of the straight line segment of the lower section is longer than that of the straight line segment of the upper section; and the lower section part is overlapped with one of the lead screws along the length direction of the connecting shaft.

Further, the turning component is arranged on one side of the guide plate, which is close to the anchor ear, and comprises a lifting bearing, a rotating bearing and a connecting frame for connecting the lifting bearing and the rotating bearing;

the lifting bearing is connected with one end, far away from the hoop, of the connecting shaft;

the connecting frame has a certain length;

the connecting frame is connected with the lifting bearing and hinged with the rotating bearing;

the turning angle of the anchor ear is the same as the change angle of the connecting frame relative to the horizontal and transverse included angle.

Further, the lifting bearing and the connecting shaft are coaxially arranged, and the lifting bearing slides on a track parallel to the height direction of the screw rod together with the anchor ear through the connecting shaft;

in the moving process from bottom to top, the connecting frame uses the center of the rotary bearing as the center of a circle, gradually moves obliquely upwards from a position which is horizontally arranged, and the included angle between the connecting frame and the horizontal transverse position is gradually changed from 0 degree to 90 degrees.

Further, when the included angle between the connecting frame and the horizontal transverse position is increased from 0 degrees, the lifting shaft bears the rotation of the connecting frame driving side and linearly moves upwards until the connecting line of the lifting bearing, the rotating bearing and the connecting frame is overlapped with the sliding track of the lifting bearing.

Further, the diameter of the lifting bearing is larger than that of the rotating bearing;

the middle line of the end part of the lifting bearing is provided with a strip hole, and the connecting frame is embedded in the strip hole and connected with the lifting bearing.

Further, a guide seat is arranged at the end part of the rotary bearing, the guide seat is matched with the guide groove, and the guide seat drives the rotary bearing to move along the track where the guide groove is located.

Furthermore, the guide plate and the screw rod are vertically arranged in parallel, and the screw rod is arranged close to one side of the anchor ear.

Further, the guide unit further comprises a guide rod arranged in parallel with the lead screw, and the guide rod is arranged between the guide plate and the lead screw;

one end of the connecting shaft is provided with a bearing seat matched with the guide rod, and the other end of the connecting shaft is provided with a thread block matched with the screw rod.

Further, the device also comprises a fixing unit which comprises a base, a top plate and a protective cover, wherein the two ends of the guide plate and the screw rod are respectively connected to the base and the top plate;

the top plate, the guide plate and the lead screw are all arranged in the protective cover, and the anchor ear is arranged outside the protective cover.

Further, the device also comprises a driving unit arranged in the protective cover and comprising a servo motor, a speed reducer and a transmission assembly, wherein the servo motor and the speed reducer are suspended on the top plate; the drive assembly is configured above the top plate.

Further, the transmission assembly comprises a first gear connected with the speed reducer, a second gear connected with the screw rod, and a chain connecting the first gear and the second gear.

The lifting flip mechanism designed by the invention can lock the cavity cover and automatically separate the cavity cover from the cavity, and can drive the cavity cover to automatically lift and flip so as to finish flip of the cavity cover; the cavity cover can be driven to return to the initial position again for installation and alignment; structural design is reasonable and the controllability is strong, can not appear impurity or dust and drop on the workstation when the clearance chamber lid is inside yet, and the clearance is effectual and efficient.

Drawings

FIG. 1 is a schematic view of a flip-up and down mechanism with a chamber lid;

FIG. 2 is a schematic view of another angle of the lift flip mechanism with a cavity cover and without a shield;

FIG. 3 is a rear view of the lift flip mechanism with a cavity cover and without a shield;

fig. 4 is a rear view of the guide unit without the guide plate;

fig. 5 is a perspective view of a guide unit without a guide plate;

fig. 6 is an enlarged view of a portion a in fig. 5;

FIG. 7 is a block diagram of a guide plate;

FIG. 8 is a trace diagram of a spin-on assembly;

FIG. 9 is a top view of the lift flip mechanism without the shield;

FIG. 10 is a partial cross-sectional view of the lift flip mechanism without the shield;

fig. 11 is a front perspective view of the hood-less flip-up and down mechanism.

In the figure:

10. fixing unit 11, base 12, top plate

13. Protective cover 20, locking unit 21 and anchor ear

22. Connecting shaft 23, bearing seat 24 and screw block

25. Guide holder 30, guide unit 31 and guide plate

311. Guide groove 312, lower section 313, upper section

314. Middle portion 315, track one 316, track two

32. Screw 33, guide rod 34, and lifting bearing

35. Swivel bearing 36, coupling 37, fixing rod

40. Drive unit 41, servo motor 42, and speed reducer

43. Gear one 44, gear two 45 and chain

50. Cavity cover

Description of the embodiments

The invention will now be described in detail with reference to the drawings and specific examples.

This embodiment proposes a lifting flip mechanism, as shown in fig. 1-3, comprising:

a fixing unit 10 configured with a base 11, a top plate 12 provided in parallel with the base 11, and a shield 13 for protection;

the locking unit 20 is provided with a hoop 21 for clamping the cavity cover 50 and a connecting shaft 22 connected with the hoop 21, an open groove for the hoop 21 to move up and down is formed in the protective cover 13, and the hoop 21 passes through the open groove of the protective cover 13 to be arranged in an external suspension manner;

a guide unit 30 configured with a guide plate 31 connected to the coupling 22, a pair of lead screws 32, and a pair of guide rods 33, both ends of the guide plate 31, the lead screws 32, and the guide rods 33 being fixed to the base 11 and the top plate 12, respectively, wherein the guide plate 31 is provided with a non-curved guide groove 311 and a rotation direction assembly connected to the coupling 22;

a driving unit 40 configured with a servo motor 41, a speed reducer 42, and a transmission assembly fixed on the top plate 12;

the driving unit 40, the guiding unit 30 and the partial locking unit 20 are all arranged in the protective cover 13, a starting signal is sent, the servo motor 41 drives the speed reducer 42 to rotate together, the screw rod 32 is controlled to rotate through the transmission component, the connecting shaft 22 is driven to drive the hoop 21 to move along the height direction of the screw rod 32, the rotating component drives the connecting shaft 22 to move along a non-curved route where the guiding groove 311 is located, the hoop 21 is lifted and moved or turned while being lifted and turned, and the turning angle of the hoop 21 is equal to the angle change value of the rotating component rotating relative to the initial position. That is, when the connecting shaft 22 moves along the straight line segment in the guide groove 311, the rotating component drives the connecting shaft 22 and the anchor ear 21 to do straight line lifting movement; when the connecting shaft 22 moves along the nonlinear section in the guide groove 311, the rotating component drives the connecting shaft 22 and the anchor ear 21 to lift and turn over at the same time, and the change value of the horizontal and transverse included angle alpha of the rotating component relative to the anchor ear 21 in the turning process is the turning angle of the anchor ear 21, wherein the change value of the included angle alpha is the angle difference relative to the initial position.

As shown in fig. 9 to 11, the guide plate 31, the lead screw 32 and the guide rod 33 are all vertically arranged in parallel between the base 11 and the top plate 12; in order to further improve the stability between the top plate 12 and the base 11, a pair of fixing rods 37 are further provided on the outer sides of the pair of screw rods 32 near the screw rods 32, and the fixing rods 37 are arranged in the same row as the screw rods 32. The lead screw 32 is arranged close to one side of the anchor ear 21, the guide plate 31 is arranged far away from one side of the anchor ear 21, and the guide rod 33 is arranged between the guide plate 31 and the lead screw 32; the guide rod 33 has two optical axes, and is aligned with the two lead screws 32 in front.

One end of the connecting shaft 22, which is close to the anchor ear 21, is provided with a threaded block 24 matched with the screw rod 32, and the other end is provided with a bearing seat 23 matched with the guide rod 33; the end of the bearing seat 23 far away from the thread block 24 is further provided with a guide seat 25, the central axis of the bearing seat 23 and the guide seat 25 are arranged in a staggered mode, namely, the axial direction of the connecting shaft 22 and the guide seat 25 are arranged in a staggered mode, the guide seat 25 is coaxially connected with a rotary bearing 35 in the rotary assembly, the guide seat 25 is matched with a guide groove 311, the screw rod 32 is matched with the thread block 24, the bearing seat 23 is driven to move along the height direction of the guide rod 33 through the connecting shaft 22, and the bearing seat 23 is also driven to slide along a non-curve structure track path in the guide groove 311 along with the guide seat 25.

The guide plate 31 is a slat type structure which is respectively clamped and matched with the long grooves arranged on the base 11 and the top plate 12; the base 11 is connected with the protective cover 13 through screws, and the top plate 12 is fixed in a groove of the protective cover 13; the fixing rods 37 are fixedly connected to the base 11 and the top plate 12 through nuts, respectively, the guide rods 33 are fixed to the base 11 through locking nuts, and are fixed to the top plate 12 through locking bolts, respectively.

The connecting shaft 22 drives the anchor ear 21, is connected with the screw rod 32 through the thread block 24 and is connected with the guide rod 33 through the bearing seat 23, so that the screw rod 32 is driven to rotate, the screw rod 32 drives the thread block 24 to move up and down along the height direction of the screw rod 32, and the guide rod 33 and the bearing seat 23 serve as guide, so that the connecting shaft 22 and the anchor ear 21 can move up and down together. The bearing block 23 is fixed on a lock nut on the guide rod 33 through a screw, and the guide seat 25 is connected to the guide plate 31 through a guide groove 311.

As shown in fig. 3 and 7, the guide slot 311 is a slot hole with a long strip structure, and includes a straight line segment of the lower segment 312, a straight line segment of the upper segment 313, and an intermediate segment 314 connecting the lower segment 312 and the upper segment 313, where the lower segment 312 and the upper segment 313 are straight line segments arranged in a side-by-side vertical offset manner, the upper segment 313 is arranged near the central axis of the guide plate 31, the lower segment 312 is arranged near the outer side of the guide plate 31, and the intermediate segment 314 is an inclined segment inclined from the lower segment 312 toward the upper segment 313, that is, an inclined segment inclined toward the central axis of the guide plate 31.

The connection among the lower section 312, the middle section 314 and the upper section 313 is a cambered surface connection, wherein the lower section 312 is arranged at one side of the guide plate 31 and is overlapped with the position of one screw 32; the upper portion 313 is provided at a position on the side of the guide plate 31 near the center axis thereof. The upper section 313 and the lower section 312 are both straight sections, and the length of the straight section of the lower section 312 is longer than that of the straight section of the upper section 313, so that the hoop 21 is lifted and moved for a longer distance after the cavity cover 50 is horizontally clamped and fixed, and then the overturning of the hoop is controlled, so that the cavity cover 50 can be prevented from being knocked during overturning. The length of the inclined section of the middle part 314 is larger than that of the straight section of the upper section 313 and smaller than that of the straight section of the lower section 312, so as to facilitate the change of the position of the lifting bearing 34 in the rotating assembly, and under the condition that the hoop 21 is ensured to be horizontally placed on the cavity cover 50, a sufficient moving track can be provided when the middle part 314 of the inclined section moves for one section, so that the hoop 21 can turn over 90 degrees with the cavity cover 50.

The included angle θ between the middle portion 314 and the lower portion 312 is smaller than 30 °, and the small angle facilitates the width between the upper portion 313 and the lower portion 312 to be reduced, and facilitates the control of the rotating assembly on the connecting shaft 22, so that the rotating assembly can be turned over more flexibly.

As shown in fig. 4-7, the rotating assembly is disposed on the side of the guide plate 31 adjacent to the anchor ear 21 and is connected to the bearing housing 23. The rotating assembly comprises a lifting bearing 34, a rotating bearing 35 and a connecting frame 36 connecting the lifting bearing 34 and the rotating bearing 35, and the rotating assembly is arranged on one side of the guide plate 31 close to the screw 32, namely on the inner side of the guide plate 31. The length of the connecting frame 36 is fixed, and the length between the center point of the connecting frame 36 and the connecting lifting bearing 34 and the center point of the connecting rotating bearing 35 is the horizontal distance between the lower section 312 and the upper section 313 in the guide groove 311.

The diameter of the lifting bearing 34 is larger than that of the rotating bearing 35, and the connecting frame 36 is fixedly connected with the lifting bearing 34 and hinged with the rotating bearing 35. A strip hole is arranged at the center line of the end part of the lifting bearing 34, and a connecting frame 36 is embedded in the strip hole and fixedly connected with the lifting bearing 34; and the lifting bearing 34 is hinged with the connecting shaft 22, and the lifting bearing 34 can drive the connecting shaft 22 to rotate along the axial direction.

As shown in fig. 8, the lifting bearing 34 is coaxially arranged with the connecting shaft 22, and slides on a first rail 315 parallel to the height direction of the screw rod 32 together with the anchor ear 21 through the connecting shaft 22; the rotary bearing 35 is coaxially disposed with the guide holder 25, and slides on a nonlinear track two 316 formed by the guide holder 25 along the guide groove 311.

One end of the rotating bearing 35 is fixed on the bearing seat 23, the other end is connected with the connecting frame 36 and the guide seat 25 in sequence, the rotating bearing 35 is hinged with the connecting frame 36, in the whole ascending movement process, the rotating bearing 35 slides on a second rail 316 formed by the connecting frame 36 along the guide groove 311, and the connecting frame 36 and the lifting bearing 34 are fixed, so that the connecting frame 36 can provide an inclined upward supporting force for the lifting bearing 34 in the ascending process, and the lifting bearing 34 is driven by the connecting frame 36 to ascend along the first rail 315, and meanwhile, the length of the connecting frame 36 is unchanged. In the vertical movement process of the lifting bearing 34, the lifting bearing 34 is driven by the connecting frame 36 to rotate along the axial direction of the lifting bearing 34, so that the hoop 21 is driven to rotate through the connecting shaft 22; the lifting bearing 34 rotates while ascending, thereby ensuring the balance with the movement of the swivel bearing 35.

In the course of the movement direction being vertically upward, the direction in which the link 36 rotates and the direction in which the lifting bearing 34 rotates are both as shown in fig. 8. Specifically, the connecting frame 36 rotates clockwise relative to the horizontal direction by taking the axis of the rotary bearing 35 as the center of a circle, and the rotation angle is α; the lifting bearing 34 is supported by the connecting frame 36 in the axial direction to form a tensioning force, in order to balance the supporting force of the connecting frame 36, the lifting bearing 34 is turned around by taking the axle center thereof as the center of a circle to release the tensioning force supported by the connecting frame 36, and rotates in the opposite direction to the connecting frame 36, namely, the lifting bearing 34 rotates in the anticlockwise direction by taking the axle center thereof as the center of a circle, accordingly, the connecting shaft 22 drives the hoop 21 to turn around in the anticlockwise direction, namely, the turning direction of the hoop 21 is the direction corresponding to the front of an operator, and the turned angle is shown in fig. 2.

When the angle between the link 36 and the horizontal transverse position becomes larger from 0, the lifting bearing 34 is driven by the link 36 to linearly move upward while rotating until the connecting lines of the lifting bearing 34, the rotating bearing 35 and the link 36 overlap with the first rail 315 on which the lifting bearing 34 slides. The specific description is as follows:

during the movement of the anchor ear 21 from bottom to top, the connecting frame 36 moves from a position horizontally and transversely with respect to the center of the swivel bearing 35 as a center, and the included angle α between the connecting frame and the horizontal and transverse position is gradually changed from 0 to 90 °. That is, in the process between the initial position a and the position b, the elevating bearing 34, the link 36 and the swivel bearing 35 are all positioned on the same horizontal line, that is, the initial included angle α with the horizontal transverse position is 0. During the movement of the straight section of the lower section 312, the lifting bearing 34 and the swivel bearing 35 are moved upwards synchronously and in the same direction, balanced by the connection of the connecting frame 36, so that the anchor ear 21 is lifted vertically upwards during this process.

As the rod guide 25 passes through position b and gradually enters position c, it starts to enter the inclined section of the intermediate section 314 from the lower section 312, at which time the lifting bearing 34 is still moved upward in the vertical straight direction of the first rail 315. Because the length of the connecting frame 36 is unchanged, when the rotating bearing 35 moves along the second rail 316 which is inclined upwards along with the guide seat 25, the lifting bearing 34 is driven by the connecting frame 36 to rise to a position higher than the position of the rotating bearing 35. When entering position c, the angle α of the link 36 with respect to the horizontal increases from 0 to 25 °, i.e. the difference in rotation angle with respect to the initial position is 25 °; correspondingly, the rotation angle of the lifting bearing 34 is 25 °, and the rotation direction of the connecting frame 36 is opposite to the rotation direction of the lifting bearing 34, that is, the rotation direction of the anchor ear 21 is opposite to the rotation direction of the connecting frame 36. The reverse rotation of the lifting bearing 34 is to maintain the support of the lifting bearing 34 by the link 36, and the lifting bearing 34 is rotated by a certain angle during the lifting process to release the tension force formed by the support of the link 36.

Moving up the inclined section, the angle a of the link 36 to the horizontal increases gradually to 60 ° when moving to position d, i.e. the difference in rotation angle with respect to the initial position is 60 °. In this process, the rotating bearing 35 continues to move upwards gradually, the lifting bearing 34 is supported by the connecting frame 36 to continuously move upwards and simultaneously rotate, so as to drive the hoop 21 to synchronously turn over, at this time, the turning angle of the hoop 21 is 60 degrees, the included angle alpha between the connecting frame 36 and the horizontal and transverse direction is the same, and the rotating direction of the connecting frame 36 is continuously opposite to the rotating direction of the hoop 21.

Along with the ascending movement of the guide seat 25 along the second rail 316, when the guide seat 25 moves to the position e, the guide seat 25 moves to the straight line section of the upper section 313, the connecting frame 36 drives the lifting bearing 34 to reach the top of the first rail 315, that is, to be positioned at the top of the guide groove 311, at this time, the connecting lines of the lifting bearing 34, the rotating bearing 35 and the connecting frame 36 form a vertical straight line and overlap with the first rail 315 slid by the lifting bearing 34; the position of the connecting shaft 22 is locked and cannot move. The angle alpha of the link 36 with respect to the horizontal is increased to 90 deg., i.e. the difference in rotation angle with respect to the initial position is 90 deg.. Correspondingly, the overturning angle of the anchor ear 21 is 90 degrees, so that the anchor ear 21 drives the cavity cover 50 to overturn by 90 degrees outwards, and then the ascending overturning is finished.

At this time, the cavity cover 50 can be scrubbed, after scrubbing, the driving unit 40 is controlled to drive the connecting shaft 22 to vertically move downwards along the height of the screw rod 32, and meanwhile, the rotating assembly drives the connecting shaft 22 to return to the lowest point along the original path of the guide groove 311, so that the hoop 21 carries the cavity cover 50 and reversely turns 90 degrees while descending, and the position of the hoop is changed into horizontal and transverse downward arrangement from the vertical outward position; gradually lowering to its initial position along the horizontal downward position to complete the complete flip movement.

In the process that the connecting shaft 22 gradually rises from the lowest point position a to the position e, the lifting bearing 34 always moves along the linear track where the first track 315 is positioned; the swivel bearing 35 moves along the second rail 316, i.e., moves along the non-linear path track formed by the guide groove 311 until the movement to the lower section 312 is completed. In the process, the connecting frame 36 is gradually changed from the horizontal setting to the inclined upward setting and finally to the vertical upward setting; the connecting shaft 22 drives the anchor ear 21 to vertically ascend initially and the anchor ear 21 is horizontally arranged, namely, the posture of the outer wall surface of the clamping and fixing cavity cover 50 is unchanged all the time; after the lifting bearing 34 starts to move upwards from the position b, the lifting bearing 34 drives the hoop 21 to lift upwards to perform overturning movement until the lifting bearing moves to the position e, and overturning is stopped, wherein the overturning angle is 90 degrees relative to the angle difference of the initial position. The hoop 21 is finally arranged vertically outwards after being rotated by 90 degrees from the horizontal transverse arrangement, namely the inner cavity of the cavity cover 50 is arranged outwards, so that personnel can conveniently clean impurities in the inner cavity of the cavity cover 50.

Further, the protective cover 13 in the fixing unit 10 is a detachable structure, and includes a housing and an upper cover, wherein the lower end of the housing is fixed on the base 11, the upper end of the housing is fixed on the top plate 12 and wraps the top plate 12 therein, and the upper cover is in an arc surface structure, is matched with the top plate 12, and covers the top plate 12. The top plate 12, the guide plate 31, the screw 32, the fixing rod 37 are all arranged in the protective cover 13, and the anchor ear 21 is arranged outside the protective cover 13. The shield 13 may be used to protect portions of the locking unit 20, the guide unit 30, and the driving unit 40 and to prevent minute amounts of lubricant on the screw 32, the coupling shaft 22 from splashing onto the chamber cover 50.

The output end of the servo motor 41 is connected with a speed reducer 42, the output end of the speed reducer 42 is fixed on the top plate 12, and the servo motor 41 and the speed reducer 42 jointly form a power source of the whole flip mechanism, so that the whole lifting process is stable and reliable. The servo motor 41 and the speed reducer 42 are suspended on the top plate 12; the drive assembly is configured above the top plate 12. The transmission assembly includes a first gear 43 connected to the speed reducer 42, two second gears 44 connected to the two lead screws 32, respectively, and a chain 45 connecting the first gear 43 and the two second gears 44.

Further, the speed reducer 42 is connected with the first gear 43 and is fixed on the top plate 12 through a nut; the top of the screw rod 32 is connected with a second gear 44, the lower end of the screw rod 32 is connected with a fixed bearing fixed on the base 11, the base 11 is provided with a counter bore for placing the fixed bearing, and the fixed bearing for connecting the lower end of the screw rod 32 is placed in the counter bore; the second gear 44 is fixed to the top plate 12 by screws.

The whole flip-up process: given an electric signal, the servo motor 41 rotates to drive the speed reducer 42 to rotate along with the electric signal, the speed reducer 42 drives the first gear 43 to rotate, the first gear 43 drives the second gear 44 connected with the lead screw 32 to drive through the chain 45, and the second lead screw 32 is driven to rotate by the second gear 44; the two lead screws 32 synchronously rotate in the same direction, so that the threaded blocks 24 matched with the lead screws 32 are driven to move up and down along the height direction of the lead screws 32. Correspondingly, the bearing seat 23 moves up and down synchronously with the screw block 24 along the height direction of the guide rod 33 through the connecting shaft 22; the hoop 21 locks the cavity cover 50 on the chemical vapor deposition equipment to realize the lifting function. When the bearing seat 23 and the thread block 24 together drive the anchor ear 21 to rise along the height of the guide groove 311 to the inclined line section position b of the middle part 314 to start to move gradually to the position c through the connecting shaft 22, the height of the vertical rising position of the lifting bearing 34 along the first track 315 is larger than that of the position of the rotating bearing 35 along the second track 316 because the previous horizontal connecting position of the lifting bearing 34 and the rotating bearing 35 is changed into an inclined upward connecting position; driven by the connecting frame 36, the rotating bearing 35 drives the anchor ear 21 to rotate anticlockwise through the connecting shaft 22, the connecting frame 36 rotates clockwise, and the angle of forward turning of the anchor ear 21 driven by the rotating bearing 35 is the same as the angle difference of clockwise rotation of the connecting frame 36 relative to the horizontal direction, and the directions are opposite.

In the process from the position a to the position b, the connecting frame 36, the lifting bearing 34 and the rotating bearing 35 are horizontally arranged, the included angle alpha between the connecting frame 36 and the horizontal and transverse direction is 0, and accordingly, the anchor ear 21 only vertically ascends and does not overturn. In the process from the position b to the position e, the connecting frame 36 is gradually changed from the horizontal transverse arrangement to the vertical inclined upward arrangement, the connecting frame rotates clockwise by taking the axle center of the rotary bearing 35 as the circle center, correspondingly, the lifting bearing 34 starts to rotate anticlockwise by taking the axle center of the lifting bearing as the circle center under the action of the supporting tension force of the connecting frame 36 so as to keep the balance of the connection stress of the lifting bearing and the connecting frame 36, and in the process, the lifting bearing 34 drives the hoop 21 to do a straight line lifting action through the connecting shaft 22 and to turn anticlockwise, and further drives the cavity cover 50 to realize the action of lifting and turning the cover. When the guide seat 25 drives the rotating bearing 35 to move to the position e, namely, when the rotating bearing 35 enters the straight line section of the upper section 313, the lifting bearing 34, the rotating bearing 35 and the connecting frame 36 are in a vertical straight line, so that the guide seat 25 is clamped in the guide groove 311 and locks the overturning position of the cavity cover 50, at the moment, the included angle alpha of the connecting frame 36 relative to the horizontal and transverse direction becomes 90 degrees, and correspondingly, the lifting bearing 34 drives the hoop 21 to overturn anticlockwise by 90 degrees.

In the descending process, the guide seat 25 drives the rotary bearing 35 to start to move downwards along the second rail 316, and the lifting bearing 34 drives the anchor ear 21 to start to move downwards along the first rail 315, which is omitted in the drawing. In the process from the position e to the position b, the connecting frame 36 starts to rotate anticlockwise and reversely by taking the axle center of the rotary bearing 35 as the center of a circle, and gradually reduces the angle alpha between the connecting frame and the horizontal transverse direction; correspondingly, the lifting bearing 34 drives the hoop 21 to gradually descend and turn clockwise through the connecting shaft 22, and the turning angle of the hoop 21 is the absolute value of the angle difference between the included angle alpha of the connecting frame 36 relative to the horizontal transverse direction and the initial position of the connecting frame, namely, the turning angle of the hoop 21 is equal to the difference between 90 degrees and the included angle alpha of the connecting frame 36 relative to the horizontal transverse direction when the hoop 21 descends. When the swivel bearing 35 moves to the position b, the angle α between the connecting frame 36 and the horizontal is 0, and the difference between the angle α and the initial lowered position is 0, the hoop 21 is turned clockwise by 90 ° and returns to the horizontal downward direction, and at this time, the opening of the cavity cover 50 is also downward, and the position orientation when it is opened is the same. Moving from the position b to the position a, the connecting frame 36 is horizontally and transversely arranged all the time, the lifting bearing 34 and the rotating bearing 35 are positioned on the same horizontal line with the connecting frame 36, and the lifting bearing 34 only moves vertically downwards and does not turn over any more; until returning to the initial position a.

The whole lifting flip process is simple to operate, safe and controllable, and the whole lifting flip action can be completed after one key is opened only by controlling the guide seat 25 of the connecting shaft 22 to move along the path track of the preset guide groove 311. The whole lifting process is stable, reliable and safe, and the matching is accurate; by arranging the two lead screws 32 and the speed reducer 42, the first gear 43 and the second gear 44 form a stable transmission component with a triangular structure, so that the whole gear and the chain 45 are in a tensioning state in the whole transmission process, and transmission faults are not easy to occur.

A simple fixing unit 10 is formed by a base 11, a top plate 12 and a shield 13; and then forms a guide support combination with the guide plate 31, the guide rod 33 and the screw rod 32 in the guide unit 30, which has simple structure and accurate guide fit, thus the integral action of the lifting flip cover is realized quickly, the cavity cover 50 can be protected from the influence of the screw rod 32 and the lubricating oil on the screw block 24, and the device is safe and reliable.

The flip mechanism is suitable for opening and overturning the cavity cover 50 in the microwave plasma chemical vapor deposition equipment, and after opening the cavity cover 50 and overturning, the material taking and placing is more convenient, the cavity body is also convenient to clean, and the cleaning efficiency can be improved. Meanwhile, as the cavity cover 50 can be subjected to flip operation, impurities, dust and the like can not fall on the workbench directly when the inside of the cavity cover 50 is cleaned, and the cavity cover 50 is cleaned more conveniently, so that the cleaning difficulty of the cavity cover 50 is solved.

The foregoing detailed description of the embodiments of the invention has been presented only to illustrate the preferred embodiments of the invention and should not be taken as limiting the scope of the invention. All equivalent changes and modifications within the scope of the present invention are intended to be covered by the present invention.

Claims

1. A lift flip mechanism, comprising:

the screw rod is controlled to rotate so as to drive the connecting shaft to drive the hoop to move along the height direction of the screw rod, and the rotating component drives the connecting shaft to move along the route of the guide groove, so that the hoop can move in a lifting mode or can turn over while lifting;

the lower section part and the upper section part of the guide groove are straight line sections which are arranged in a staggered way, and the middle part of the guide groove is an inclined section which is connected with the upper section part and the lower section part and is obliquely arranged towards one side of the central axis of the guide plate;

the spiral direction component is arranged on one side of the guide plate, which is close to the anchor ear, and comprises a lifting bearing, a rotating bearing and a connecting frame for connecting the lifting bearing and the rotating bearing;

the connecting frame has a certain length;

the turning angle of the anchor ear is the same as the change angle of the connecting frame relative to the horizontal and transverse included angle;

the lifting bearing and the connecting shaft are coaxially arranged, and the lifting bearing slides on a track parallel to the height direction of the screw rod through the connecting shaft and the anchor ear;

2. The lift flip mechanism of claim 1, wherein the angle of flip of the anchor ear is equal to the angular variation of the rotation of the swivel assembly relative to its initial position.

3. A flip-top mechanism as claimed in claim 1 or 2, wherein said lower section is disposed on a side of said guide plate;

4. A flip-top mechanism according to claim 3, wherein the length of the straight section of the lower section is greater than the length of the straight section of the upper section; and the lower section part is overlapped with one of the lead screws along the length direction of the connecting shaft.

5. A flip-top mechanism as claimed in any one of claims 1-2 and 4, wherein said lifting shaft is driven by said carriage to move linearly upwards as it rotates when said carriage increases from 0 ° to a horizontal transverse position until said lifting bearing, said rotational bearing and said carriage connecting line overlap with a track along which said lifting bearing slides.

6. The lift flip mechanism of claim 5, wherein the diameter of the lift bearing is greater than the diameter of the swivel bearing;

7. The lifting flip mechanism of claim 6, wherein a guide seat is arranged at the end of the rotary bearing, the guide seat is matched with the guide groove, and the guide seat drives the rotary bearing to move along a track where the guide groove is located.

8. A lifting and flip mechanism as claimed in any one of claims 1-2, 4, 6-7 wherein the guide plate and the lead screw are vertically arranged in parallel and the lead screw is arranged adjacent to one side of the anchor ear.

9. The lift flip mechanism of claim 8, wherein the guide unit further comprises a guide bar disposed in parallel with the lead screw, the guide bar being disposed between the guide plate and the lead screw;

10. The lifting and flip mechanism according to any one of claims 1-2, 4, 6-7, 9, further comprising a fixing unit including a base, a top plate, and a shield, both ends of the guide plate and the screw being connected to the base and the top plate, respectively;

11. The lift flip mechanism of claim 10, further comprising a drive unit disposed within the shield and including a servo motor, a speed reducer and a transmission assembly, the servo motor and the speed reducer being suspended from the top plate; the drive assembly is configured above the top plate.

12. The lift flip mechanism of claim 11, wherein said transmission assembly comprises a first gear coupled to said speed reducer, a second gear coupled to said lead screw, and a chain coupling said first gear and said second gear.