CN115741451A - Ceramic disc grinding machine, floating type grinding mechanism and working method of floating type grinding mechanism - Google Patents

Abstract

The invention provides a ceramic disc grinding machine, a floating type grinding mechanism and a working method thereof, wherein the working method comprises the following operation steps: s1, a grinding head moves downwards to a lower limiting position; s2, debugging for the first time; s3, moving the grinding head upwards to an upper limiting position; s4, grinding; s5, finishing grinding; s6, repeating the steps S3-S5. In the grinding process of the floating type grinding mechanism, the PLC monitors the pressure in real time and compensates the pressure through the electric proportional valve, at the moment, the grinding head is floated, the grinding pressure is stable, the grinding path is outward diffused along the original point in a spiral line mode, the residual film on the surface of the ceramic disc can be uniformly ground, and the surface texture of the ceramic disc is smooth.

Description

Ceramic disk grinding machine, floating grinding mechanism and working method thereof

technical field

The invention relates to the technical field of semiconductor cleaning equipment, in particular to a ceramic disc grinder, a floating grinding mechanism and a working method thereof.

Background technique

The existing customer site is to manually polish the ceramic disc, which has the following technical defects: when manual grinding, the force on the ceramic disc is uneven, and the surface finish of the product is not good; in addition, the work efficiency of manual grinding is low and takes a long time.

Therefore, how to design a floating grinding mechanism for ceramic disc grinding machines that can replace manual grinding has become an urgent problem to be solved.

Contents of the invention

Aiming at the problems existing in the prior art, the present invention provides a ceramic disc grinder, a floating grinding mechanism and a working method thereof, so as to solve at least one of the above-mentioned technical problems.

The technical solution of the present invention is: a floating grinding mechanism of a ceramic disc grinding machine, including a Z-axis bottom plate arranged along the vertical direction, a support seat is arranged on the Z-axis bottom plate, a cylinder is arranged on the support seat, and the cylinder The piston is arranged downwards, and the piston end of the cylinder is provided with a pressure sensor. The pressure sensor is installed on the Z-axis slider, and the Z-axis slider is also provided with a first servo motor. The output end of the first servo motor is arranged downwards. The output end of the servo motor is connected to the grinding head through the grinding head shaft; the side of the cylinder body of the cylinder is provided with an encoder pull plate, and the Z-axis slider is provided with a drawstring displacement encoder, and the head of the drawstring displacement encoder is connected to the encoder. Pull plate connection; the air source is connected to the upper port and the lower port of the cylinder in two ways, one way is connected to the lower port of the cylinder through the pressure reducing valve, the speed control valve, and the two-position two-way solenoid valve in turn, and the other way is through the electrical proportional The valve and the two-position three-way solenoid valve are connected to the upper interface of the cylinder, and one port of the two-position three-way solenoid valve is connected to the accumulator; the first servo motor, pull rope displacement encoder, pressure sensor, two-position two-way solenoid valve, The electric proportional valve and the two-position three-way solenoid valve are connected to the PLC controller.

The present invention adopts the pressure sensor to feed back the pressure of the cylinder to the PLC controller, and controls each solenoid valve in the air circuit system through the PLC controller; the pull rope displacement encoder feeds back and records the position of the grinding head and sends it to the PLC controller, and through the PLC controller Grinding by controlling the speed of the grinding head improves work efficiency and solves the technical defects of low efficiency and time-consuming manual grinding.

The invention provides a working method of a floating grinding mechanism of a ceramic disc grinder, comprising the following steps:

S1. The grinding head moves down to the lower limit position,

The lifting part of the grinding head of the floating grinding mechanism moves downward to the lower limit position due to its own weight G1 without ventilation;

S2. First commissioning,

T1. The pressure at the lower end of the cylinder is adjusted, the two-position two-way solenoid valve is energized, the gas from the gas source enters the lower end interface of the cylinder through the pressure reducing valve, the speed control valve, and the two-position two-way solenoid valve in sequence, and the pressure of the pressure relief valve is adjusted so that The pressure when the lifting part of the grinding head is balanced is P1, at this time P1=G1; T2. The actual pressure adjustment of the pressure reducing valve, the actual pressure of the pressure reducing valve is recorded as P2, so that P2-P1≥0MPa, the difference The range is 0.01-0.1MPa, any value can be selected within the difference range according to the needs, so that the lifting part of the grinding head can move upward;

T3. Adjust the rising speed of the cylinder,

Adjust the flow rate of the speed control valve so that the speed of the cylinder rises smoothly, and the pressure adjustment of the lower end of the cylinder is completed;

T4. The upper end pressure of the cylinder is adjusted, the two-position three-way solenoid valve is energized, the gas of the gas source enters the upper end interface of the cylinder through the electric proportional valve and the two-position three-way solenoid valve in turn, and then the PLC controller adjusts the electric proportional valve through the electric signal. The cross-sectional area of the spool, thereby adjusting the size of the pressure, the pressure at this time is recorded as P3, so that P3-(P2-P1)=P, P is the set pressure of the pressure sensor, and P is set to 0.1-0.5kg/cm2;

S3. The grinding head moves upward to the upper limit position,

During use, the two-position two-way solenoid valve on the air circuit at the lower end of the cylinder is always energized, so that the lifting part of the grinding head rises to the upper limit position;

S4. Grinding,

U1. Move the grinding head to the origin, which is the center of the ceramic disc;

U2. The first servo motor controls the rotation of the grinding head, and the speed range is 0-600rpm, which can be set according to needs;

U3. The nozzle starts to spray water;

U4. The two-position three-way solenoid valve on the air circuit of the upper interface of the cylinder is energized, and the grinding head is slowly pressed down, and starts grinding when it touches the ceramic disc;

U5. The grinding path is to spread out along the origin in a helical manner;

S5. End of grinding,

V1. The two-position three-way solenoid valve is powered off, the grinding head rises and returns to the stop point, which can be used to replace the grinding head and ceramic disc.

V2. The nozzle stops spraying water;

V3. Replace the ceramic disc;

S6. Repeat the above steps S3-S5.

In the floating grinding mechanism of the present invention, during the grinding process, the rising and falling position of the grinding head is controlled by the air cylinder. During grinding, the grinding head is floating and not in complete hard contact. When the grinding pressure in the actual process and the screen When the designed pressure is inconsistent, the PLC controller monitors the pressure in real time and compensates the pressure through the electric proportional valve. The automatic micro-adjustment of the electric proportional valve makes the grinding pressure stable, and the grinding path spreads out along the origin in the form of a spiral , the remaining film on the surface of the ceramic disc can be evenly ground off, making the surface texture of the ceramic disc smooth, which solves the technical defects of uneven force on the ceramic disc and poor surface finish of the product during manual grinding.

Description of drawings

Fig. 1 is a three-dimensional view of the floating grinding mechanism of the present invention.

Fig. 2 is a gas circuit control diagram of the floating grinding mechanism of the present invention.

Fig. 3 is a top view of the installation structure of the ceramic disc grinding machine of the present invention.

In the figure: 1. Grinding head; 2. Grinding head holder; 3. Z-axis slider; 4. First support; ;9. Second support; 10. Z-axis bottom plate; 11. Encoder pull plate; 12. Cylinder mounting plate; 13. Cylinder; 14. First servo motor; 15. Reducer; 16. Motor mounting seat; 17. Coupling; 18. Round nut; 19. Tapered roller bearing; 20. Grinding head bearing seat; 21. Grinding head shaft; 22. Grinding head shaft transition plate; 23. Ceramic disc; 24. Two-position two-way solenoid valve ;25. Speed control valve; 26. Pressure reducing valve; 27. Air source; 28. Electric proportional valve; 29. Two-position three-way solenoid valve; 30. Nozzle; 31. Stop point; 32. Y-axis screw; 33 .X-axis lead screw; 34. Origin.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings.

Referring to Figures 1-3, the structures, proportions, sizes, etc. shown in the drawings attached to this manual are only used to match the content disclosed in the manual, for those who are familiar with this technology to understand and read, and are not intended to limit the scope of this manual. The restrictive conditions for the implementation of the invention, so it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size shall still be implemented without affecting the effect and the purpose of the present invention. fall within the scope covered by the technical content disclosed in the present invention. At the same time, terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description and are not used to limit this specification. The practicable scope of the invention and the change or adjustment of its relative relationship shall also be regarded as the practicable scope of the present invention without any substantial change in the technical content.

Embodiment 1. A working method of a floating grinding mechanism of a ceramic disc grinding machine, with reference to FIG. 2 , comprising the following steps: S1. The grinding head moves downward to the position of the lower limit, and the lifting part of the grinding head of the floating grinding mechanism moves In the case of ventilation, due to its own weight G1, it moves downward to the lower limit position, and the cylinder 13 adopts a low-friction cylinder;

S2. First commissioning,

T1. The lower end pressure of the cylinder is adjusted, the two-position two-way solenoid valve 24 is energized, and the gas of the gas source 27 enters the lower end interface of the cylinder 13 through the pressure reducing valve 26, the speed control valve 25, and the two-position two-way solenoid valve 24 in sequence, and the pressure reduction is adjusted. The pressure of the pressure valve 26 makes the pressure when the lifting part of the grinding head is balanced is P1, and now P1=G1;

T2. The actual pressure adjustment of the pressure reducing valve. The actual pressure of the pressure reducing valve 26 is recorded as P2, so that P2-P1≥0MPa, and the difference is 0.05MPa, so that the lifting part of the grinding head can move upward;

T3. Adjust the rising speed of the cylinder, adjust the flow rate of the speed control valve 25, make the speed of the cylinder 13 rise gently, and complete the adjustment of the lower end pressure of the cylinder 13;

T4. The upper end pressure of the cylinder is adjusted, the two-position three-way solenoid valve 29 is energized, the gas of the gas source 27 enters the upper end interface of the cylinder 13 through the electric proportional valve 28 and the two-position three-way solenoid valve 29 in turn, and then the PLC controller passes the electric signal Adjust the cross-sectional area of the spool of the electric proportional valve 28, thereby adjusting the size of the pressure. The pressure at this time is recorded as P3, so that P3-(P2-P1)=P, P is the set pressure of the pressure sensor 8, and the value of P is 0.2kg /cm2;

S3. The grinding head moves upward to the upper limit position,

During use, the two-position two-way solenoid valve 24 on the air circuit at the lower end of the cylinder 13 is always energized, so that the lifting part of the grinding head rises to the upper limit position;

S4. Grinding,

U1. Make the grinding head 1 move to the origin 34, which is the center of circle of the ceramic disc 23;

U2. The first servo motor 14 controls the rotation of the grinding head 1, and the speed range is 0-600rpm, which can be set as required;

U3. The nozzle 30 starts to spray water;

U4. The two-position three-way solenoid valve 29 on the air circuit of the upper interface of the cylinder 13 is energized, and the grinding head 1 is slowly pressed down, and starts grinding when it touches the ceramic disc 23;

U5. The grinding path is to spread out along the origin in a helical manner;

S5. End of grinding,

V1. The two-position three-way solenoid valve 29 is powered off, the grinding head 1 rises and returns to the stop point 32, which can be used to replace the grinding head 1 and the ceramic disc 23,

V2. The nozzle 30 stops spraying water;

V3. Replace the ceramic disc 23;

S6. Repeat the above steps S3-S5. In the floating grinding mechanism of the present invention, during the grinding process, the rising and falling position of the grinding head is controlled by the air cylinder. During grinding, the grinding head is floating and not in complete hard contact. When the grinding pressure in the actual process and the screen When the designed pressure is inconsistent, the PLC controller monitors the pressure in real time and compensates the pressure through the electric proportional valve. The automatic micro-adjustment of the electric proportional valve makes the grinding pressure stable, and the grinding path spreads out along the origin in the form of a spiral , the remaining film on the surface of the ceramic disc can be evenly ground off, making the surface texture of the ceramic disc smooth, which solves the technical defects of uneven force on the ceramic disc and poor surface finish of the product during manual grinding.

Embodiment 2, a floating grinding mechanism of a ceramic disc grinding machine, referring to Fig. 1, Fig. 2, Fig. 3, includes a Z-axis bottom plate 10 arranged along the vertical direction, and a support seat is arranged on the Z-axis bottom plate 10, A cylinder 13 is arranged on the support base, and the piston of the cylinder 13 is arranged downwards. A pressure sensor 8 is arranged at the piston end of the cylinder 13. The pressure sensor 8 is installed on the Z-axis slider 3, and the Z-axis slider 3 is also provided with a first Servo motor 14, the output end of the first servo motor 14 is arranged downwards, the output end of the first servo motor 14 is connected to the grinding head 1 through the grinding head shaft 21, and the ceramic disc 23 to be processed is arranged on the lower workbench of the grinding head 1; The material of the grinding head 1 is sandpaper polishing sheet and cauliflower cloth; the side of the cylinder body of the cylinder 13 is provided with an encoder pull plate 11, and the Z-axis slider 3 is provided with a drawstring displacement encoder 5, and the drawstring displacement encoder 5 The head is connected to the encoder pull plate 11; the air source 27 is connected to the upper end interface and the lower end interface of the cylinder 13 in two ways, and one way is connected through the pressure reducing valve 26, the speed control valve 25, and the two-position two-way solenoid valve 24 in sequence. The lower end interface of the cylinder 13, the other way is connected to the upper end interface of the cylinder 13 through the electric proportional valve 28 and the two-position three-way solenoid valve 29, and one port of the two-position three-way solenoid valve 29 is connected to the accumulator; the first servo motor 14 , rope displacement encoder 5, pressure sensor 8, two-position two-way solenoid valve 24, electric proportional valve 28, two-position three-way solenoid valve 29 are all connected to the PLC controller. The present invention adopts the pressure sensor to feed back the pressure of the cylinder to the PLC controller, and controls each solenoid valve in the air circuit system through the PLC controller; the rope displacement encoder feeds back and records the position of the grinding head and sends it to the PLC controller, and the grinding head does not touch Grinding starts when the ceramic disc is reached, and an alarm will be issued; the speed of the grinding head is controlled by the PLC controller for grinding, which improves the work efficiency and solves the technical defects of low efficiency and long time-consuming manual grinding.

Embodiment 3. On the basis of Embodiment 2, the Z-axis base plate 10 is provided with a linear guide rail pair arranged in parallel. The linear guide rail pair includes a guide rail 7 and a slider moving along the guide rail 7. The Z-axis slider 3 is installed On the slider; the support seat includes a first support 4 and a second support 9 above the first support 4, wherein the first support 4 is installed on the Z-axis slider 3, and the first support 4 is provided with a motor mounting seat 16, The stay rope displacement encoder 5 and the first servo motor 14 are all installed on the motor mount 16 . The invention adopts the slider to drive the Z-axis slider and the first servo motor to move along the guide rail, and drives the grinding head through the first servo motor installed on the motor mounting seat.

Embodiment 4. On the basis of Embodiment 3, the second support 9 is a fixed support seat, and the second support 9 is provided with a cylinder mounting plate 12, and the encoder pull plate 11 and the cylinder 13 are all installed on the cylinder mounting plate 12 superior. The present invention fixes and installs the cylinder body part of the cylinder through the second support.

Embodiment 5. On the basis of Embodiment 3, the pressure sensor 8 is installed on the motor mounting base 16 through the sensor transition plate 6 . The present invention uses a pressure sensor to move along the guide rail along with the Z-axis slider.

Embodiment 6. On the basis of Embodiment 5, a speed reducer 15 is also provided between the first servo motor 14 and the motor mounting base 16, and the output end of the first servo motor 14 is connected to the input end of the speed reducer 15 to reduce the speed. The output end of the machine 15 is connected to the grinding head shaft 21 through a coupling 17 . The present invention adopts the reducer to reduce the rotating speed of the grinding head shaft.

Embodiment 7. On the basis of Embodiment 6, the Z-axis slider 3 is also provided with a grinding head bearing seat 20, and two tapered roller bearings 19 used in pairs are arranged in the grinding head bearing seat 20. The head shaft 21 passes through the tapered roller bearing 19 upwards and is connected with the shaft coupling 17 . The invention adopts two tapered roller bearings used in pairs, which can bear combined radial and axial loads.

Embodiment 8. On the basis of Embodiment 7, the end of the grinding head shaft 21 exposed from the tapered roller bearing 19 is provided with an external thread section, and the external thread section is screwed with the round nut 18 respectively. The end of the grinding head shaft 21 away from the first servo motor 14 is provided with a grinding head shaft transition plate 22 , the grinding head 1 is installed on the grinding head holder 2 , and the grinding head holder 2 is installed on the grinding head shaft transition plate 22 . The invention adopts the counterbore shaft shoulder and the round nut of the grinding head bearing seat to respectively limit the two side end faces of the tapered roller bearing.

Embodiment 9. A ceramic disc grinder, referring to FIG. 3 , includes a floating grinding mechanism, the Z-axis bottom plate 10 of the floating grinding mechanism is installed on the first screw nut of the Y-axis screw 32, and the Y-axis screw 32 Installed on the second lead screw nut of the X-axis lead screw 33, the Y-axis lead screw 32 is driven by the second servo motor, the X-axis lead screw 33 is driven by the third servo motor, and the second servo motor and the third servo motor are connected The PLC controller controls the working path of the grinding head 1; one side of the grinding head 1 is provided with a nozzle 30, the center of the ceramic disc 23 to be processed is the origin 34, and the outer ring side of the ceramic disc is provided with a stop point 31 . The present invention uses a PLC controller to control the first servo motor, the second servo motor, and the third servo motor to control the working path of the grinding head, so as to realize the outward diffusion of the grinding path along the origin in a helical manner.

The above are only preferred embodiments of the present invention, and it should be pointed out that for those of ordinary skill in the art, some improvements and modifications can also be made without departing from the principle of the present invention, and these improvements and modifications should also be considered Be the protection scope of the present invention.

Claims (10)

1. A floating type grinding mechanism of a ceramic disk grinder including a Z-axis base plate (10) arranged along a vertical direction, characterized in that: a supporting seat is arranged on the Z-axis bottom plate (10), an air cylinder (13) is arranged on the supporting seat, a piston of the air cylinder (13) is arranged downwards, a pressure sensor (8) is arranged at the piston end of the air cylinder (13), the pressure sensor (8) is installed on the Z-axis sliding block (3), a first servo motor (14) is further arranged on the Z-axis sliding block (3), the output end of the first servo motor (14) is arranged downwards, the output end of the first servo motor (14) is connected with the grinding head (1) through a grinding head shaft (21), and a ceramic disc (23) to be processed is arranged on a working table below the grinding head (1); an encoder pulling plate (11) is arranged on one side of the cylinder body of the air cylinder (13), a pull rope displacement encoder (5) is arranged on the Z-axis sliding block (3), and the head of the pull rope displacement encoder (5) is connected with the encoder pulling plate (11); the first servo motor (14), the pull rope displacement encoder (5) and the pressure sensor (8) are all connected with a PLC controller.

2. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 1, wherein: the Z-axis base plate (10) is provided with guide rails (7) which are arranged in parallel, and the Z-axis sliding block (3) is arranged on the sliding block (7); the supporting seat comprises a first support (4) and a second support (9) arranged above the first support (4), wherein the first support (4) is arranged on the Z-axis sliding block (3), a motor mounting seat (16) is arranged on the first support (4), and the stay cord displacement encoder (5) and the first servo motor (14) are arranged on the motor mounting seat (16).

3. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 2, wherein: the second support (9) is a fixed support seat, an air cylinder mounting plate (12) is arranged on the second support (9), and the encoder pulling plate (11) and the air cylinder (13) are both mounted on the air cylinder mounting plate (12).

4. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 2, wherein: the pressure sensor (8) is arranged on the motor mounting seat (16) through the sensor transition plate (6).

5. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 4, characterized in that: still be provided with speed reducer (15) between first servo motor (14) and motor mount pad (16), the input of speed reducer (15) is connected to the output of first servo motor (14), and the output of speed reducer (15) passes through shaft coupling (17) and connects grinding head axle (21).

6. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 5, characterized in that: the Z-axis sliding block (3) is further provided with a grinding head bearing seat (20), 2 tapered roller bearings (19) used in pairs are arranged in the grinding head bearing seat (20), and a grinding head shaft (21) penetrates through the tapered roller bearings (19) upwards and then is connected with the coupler (17).

7. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 6, characterized in that: and the end of the grinding head shaft (21) exposed out of the tapered roller bearing (19) is provided with external thread sections which are screwed with the round nuts (18) respectively.

8. A floating grinding mechanism of a ceramic disk grinder as claimed in claim 6, characterized in that: one end of the grinding head shaft (21) far away from the first servo motor (14) is provided with a grinding head shaft transition plate (22), the grinding head clamping seat (2) is installed on the grinding head shaft transition plate (22), and the grinding head (1) is installed on the grinding head clamping seat (2).

9. A ceramic disk grinding machine is characterized in that: the floating type grinding mechanism comprises the floating type grinding mechanism as claimed in the claims 1-8, wherein a Z-axis bottom plate (10) of the floating type grinding mechanism is installed on a first lead screw nut of a Y-axis lead screw (32), the Y-axis lead screw (32) is installed on a second lead screw nut of an X-axis lead screw (33), the Y-axis lead screw (32) is driven by a second servo motor, the X-axis lead screw (33) is driven by a third servo motor, the second servo motor and the third servo motor are both connected with a PLC (programmable logic controller), and the working path of the grinding head (1) is controlled by the PLC; a nozzle (30) is arranged on one side of the grinding head (1).

10. A working method of a floating type grinding mechanism of a ceramic disc grinding machine is characterized in that: the method comprises the following steps:

s1, the grinding head moves downwards to a position of lower limit,

the lifting part of the grinding head of the floating grinding mechanism moves downwards to a lower limit position due to the weight G1 of the lifting part under the condition of no ventilation; the cylinder (13) adopts a low-friction cylinder;

s2, debugging for the first time,

t1, adjusting the pressure of the lower end of the air cylinder,

the two-position two-way electromagnetic valve (24) is electrified, gas of a gas source (27) sequentially passes through the pressure reducing valve (26), the speed control valve (25) and the two-position two-way electromagnetic valve (24) to enter a lower end interface of the air cylinder (13), the pressure of the pressure reducing valve (26) is adjusted, the pressure when the lifting part of the grinding head is balanced and not moved is P1, and at the moment, P1= G1;

t2, actual use pressure adjustment of the pressure reducing valve,

the pressure actually used by the pressure reducing valve (26) is recorded as P2, so that the pressure P2-P1 is more than or equal to 0MPa, the difference range is 0.01-0.1MPa, and a value can be selected within the difference range as required, so that the lifting part of the grinding head can move upwards;

t3, adjusting the ascending speed of the air cylinder,

the flow of the speed control valve (25) is adjusted to ensure that the speed is gentle when the air cylinder (13) rises, and the pressure adjustment of the lower end of the air cylinder (13) is completed;

t4, adjusting the pressure of the upper end of the air cylinder,

the two-position three-way electromagnetic valve (29) is electrified, gas of the gas source (27) sequentially passes through the electric proportional valve (28) and the two-position three-way electromagnetic valve (29) and enters an upper end port of the air cylinder (13), then the PLC adjusts the pressure of the electric proportional valve (28) through electric signals, the pressure at the moment is marked as P3, P3- (P2-P1) = P is enabled to be set as the pressure of the pressure sensor (8), and the P is set to be 0.1-0.5kg/cm < 2 >;

s3, the grinding head moves upwards to an upper limit position,

in the using process, a two-position two-way electromagnetic valve (24) on a lower end interface air passage of the air cylinder (13) is electrified all the time, so that the lifting part of the grinding head rises to the upper limit position;

s4, grinding the mixture,

u1. moving the grinding head (1) to an origin (34), the origin (34) being the center of the ceramic disc (23);

u2. the first servo motor (14) controls the grinding head (1) to rotate, the rotating speed range is 0-600rpm, and the rotating speed is set as required;

u3. nozzle (30) begins spraying water;

5363 a two-position three-way electromagnetic valve (29) on the air path of the upper end port of the U4. air cylinder (13) is electrified, the grinding head (1) is slowly pressed down, and grinding is started when the grinding head touches the ceramic disc (23);

u5. abrasive path is outward diffusing in a spiral along the origin;

s5, finishing the grinding,

v1, the two-position three-way solenoid valve (29) is de-energized, the polishing head (1) is raised and retreated to the stopping point (32) for replacing the polishing head (1) and the ceramic disc (23),

v2, stopping water spraying of the nozzle (30);

v3. replacing the ceramic disc (23);

s6, repeating the steps S3-S5.

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