CN1156829A - Device transfer mechanism for IC test handler - Google Patents
Device transfer mechanism for IC test handler Download PDFInfo
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- CN1156829A CN1156829A CN 95117241 CN95117241A CN1156829A CN 1156829 A CN1156829 A CN 1156829A CN 95117241 CN95117241 CN 95117241 CN 95117241 A CN95117241 A CN 95117241A CN 1156829 A CN1156829 A CN 1156829A
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Abstract
A device trasfer mechanism includes a circular-orbit rotation table with multiple pockets that stores the devices by a unit of n pieces on the disk-shaped rotation table, and at least three arms each of which has a contact arm with a suction section that sucks the devices by a unit of n pieces at the tip of each arm. A rotation storage arm can be additionally provided to transfer the devices by arranging multiple arms with pockets that store devices 71 by a unit of n pieces at the tip of each arm.
Description
The present invention relates to a kind of IC and test processing device system mechanism, it is sent to the contact portion that is used for electric test to the IC device from supply tray, then the IC device is sent to storage tray from contact portion.
The device connecting gear of processing device system of prior art test to(for) IC describes with reference to Fig. 6,7 and 8.This system comprises supply buffer portion 40, heat insulation wall 54, equal hot cell 110, swivel arm 120, measure portion 70, storage buffer portion 50, and many boats (boat) connecting gear (100).As a kind of transmission---driving method, use drive source for this purpose, for example pulse motor and servomotor, and the combination of belt, gear and screw mechanism.
As shown in Figure 8, the suction that is used for IC device 71 partly is set at the end of pivot arm 120, and it comprises the suction pads 82 that holds IC device 71, suction arm 80 and last/following driving mechanism 84.Adjusting air pressure 83 from the vacuum pressure/atmospheric pressure of the injector that is used for the control of outside suction is connected in suction arm 80, and is supplied to suction pads 82.Device 71 is held by means of the air pressure in the suction pads 82 and is discharged.Utilize cylinder or solenoid and by control signal 85 drive on/following driving mechanism more than 84, down stroke carrying device 71.
In the inside of thermoshield wall 54 are the constant temperature enclosures with thermal insulation structure, are set to the temperature of needs, are used for device is carried out heating and cooling, in measure portion 70 device are measured then.For wanting measured device to maintain constant temperature, need in constant temperature enclosure, keep device greater than a preset time.Thereby, provide this preset time with equal hot cell.In the inside of heat insulation wall 54, its structure is so arranged, and makes boat 100 to pass through, thereby supplies with and memory device.
When here, device is placed into constant temperature enclosure and the time interval of device between when reaching constant temperature be called as " soaking time ".In addition, the time between the time of the electrical test of finishing device and next device on-test is known as " index time " (index time).Time between the device electrical test begins and finishes is called as " test period ".In addition, the summation of index time and test period is known as " cycle length ".Also have, from supply tray, be fetched into the interval that device is put into the device test period of storage tray from device and be called " output time ".
The transmission of device 71 utilizes a kind of mechanism of boat that comprises to carry out.The groove 13 that one or several device is housed is positioned on the boat 100, is moved and transmits by means of one group of boat.The boat conveyer is used for utilizing rotating and makes boat 100 motions, and for every path of boat 100 connecting gear is arranged all.Path is being supplied with buffer portion 40 beginnings, and its distance is through path 201,205,206,207,208 and return.
The one group of boat 100 that is transported (have on it according to the device configuration (DIP, SOP, QFP, etc.) groove that forms), even when the device configuration changes, also can be easily with other boat replacement.Supply with bumper portion 40 and comprise Y supply arm 41, X supply arm 42, and supply tray 43.Suction part 45 is set at the not end of Y supply arm 41.At first mobile Y supply arm 41 of transfer operation and X supply arm 42 so that utilize suction to hold device from the top of supply tray 43, take device to the position of the groove of the boat 100 that is positioned at position 200 then.And the release device falls it.Supply with regularly for each, repeat this operation.
After the device 71 on the boat 100 of position 200 is passing through thermoshield wall 54 by the horizontal transport mechanism drive by path 201, be brought to equal hot cell 110.All hot cell 110 is to be used to provide the time, i.e. the buffer of soaking time is so that heat and cool to predetermined temperature to device 71 in constant temperature enclosure.The inside in this equal hot cell has many boats 100, and purpose is in order not reduce the index time of IC treating apparatus.As shown in Figure 7, the boat 100 that is brought to equal hot cell 110 moves upward by path 202 singly, shifts to adjacent path 203, and 204 move down along the path, and arrives the suction part 121a of the supply arm position of pivot arm 120 on road 205.
Four arms are arranged on pivot arm 120.End at each arm has suction part 121a, 121b, 121c and 121d.The first arm in the supply position of pivot arm 120 drives suction part 121a downwards, and utilizes suction to pick up to be positioned at the device 71 of the groove on the boat 100, and moves upward.Device 71 on pivot arm 120 second arms is simply as a standby device.
The 3rd arm in the measuring position of pivot arm 120 moves downward the device 71 at suction part 121c, and device 71 is put on the contact of measure portion 70, carries out electrical test there.After finishing electrical test, the 3rd arm is mentioned device by suction, moves upward then.Here, in measure portion 70, the lead-in wire of the device 71 that receives by pivot arm 120 form and electrode between connection so that carry out electrical test and measurement, thereby carry out various electrical tests.
The 4th arm at the pivot arm 120 of memory location reduces the device 71 at suction part 121d, and makes in its groove that drops on boat 100, and by after the path 205 and 206, boat 100 is empty.4 above-mentioned arms are a kind of revolving connecting gears, and it finishes the attraction of wanting device measured or that measured, discharge device after the measurement of device and the measurement, are rotated and turn to next processing in each cycle at once.
The boat 100 that is positioned at the suction part 121d that device 71 is housed arrives the position 210 of storage Y arm 51 by the transmission on the path 207 after finishing measurement.Storage buffer portion 50 comprises storage Y arm 51, storing X arm 52, and storage tray 53.End at storage Y arm 51 does not have suction part 55.Using suction part 55 after the 210 usefulness suction lift devices of position, transfer operation is used to transmit storage Y arm 51 and storing X arm 52, and after device 71 is taken to the precalculated position of storage tray 53, device 71 is dropped in the groove of storage tray 53.This storage operation repeats.
As mentioned above, because transfer step is too much, device connecting gear of the prior art, all the structure in hot cell 110 is complicated.And, because many like this transmission drive units are arranged, make that the cost of mechanism is very high.In addition, all hot cell 110 requires big installing space and big constant temperature enclosure, and these all are undesirable.
In addition, in the prior art, because device transmits by being contained on the boat 100, make the transport process of boat 100 increase, this has caused unwanted mechanism, and treating apparatus is also not necessarily suitable reliably for requiring lasting in this mechanism.In addition, one in 4 arms of pivot arm 120 is not used, and this has increased the cost of its suction part.
In addition, the mechanism that is used to change the quantity that is stored in the boat 100 in the equal hot cell 110 is not easy to be changed.Therefore, it is used to store many boats, even in order also to guarantee constant temperature time under the short situation of the test period of device.Yet, owing to this set, can not change neatly for the boat number of various devices, and may provide, and also be not easy in the operation greater than required soaking time according to the best of different tests time.
Therefore, the objective of the invention is to, a kind of device connecting gear of processing ease simple in structure is provided, thereby improves reliability, for example the mean down time (MTBF).
Another object of the present invention is that not lowering efficiency by means of reducing cost provides a kind of device connecting gear that can improve cost-performance.
Another object of the present invention also is, the less installing space of a kind of needs is provided and soaking time is easily changed according to the test period of relevant device.
Fig. 1,2 and 3 explanations are by the device of the unresolved the problems referred to above of the present invention.In order to utilize the present invention to address the above problem, the a plurality of grooves 13 that are similar to depression are set on a plate-like turntable 12, be used for several be unit memory device 71 so that from supply buffer side 40 receiving devices 71, the rotating disk 12 with circular orbit is used for a device 71 and sends contact arm 14 to.
For from turntable 12 receiving devices 71, the contact arm in circular orbit is provided with three arms at least.Contact arm 14 has suction part 15 at its end, and it is that unit holds device 71 with several, simultaneously, other device 71 is sent to rotation access arm 16 or round access arm 216.
Rotate access arm 16 and have a plurality of arms, be used for, be provided with a plurality of grooves 13 of similar depression at the end of each arm from contact arm 14 receiving devices 71, be used for several be unit memory device 71, simultaneously, other device 71 sent to stores buffer portion 50.
In addition, come and go access arm 216 and have several arms, and be provided with the groove 13 that is similar to depression at the end of arm, being used for several is that unit stores the device 71 from contact arm 14.Then, device 71 is transmitted to bumper portion 50 by moving this arm.After transmitting these devices, arm return its can be again from the position of contact arm 14 receiving devices 71.In this way, come and go access arm 216 and carry out back and forth movement.
As control device at this connecting gear intermediate station 12, a kind of method of controlling rotation is arranged, it rotates with both forward and reverse directions, and the angle of increase equals a groove 13 or m groove 13.Utilize said method, come mask placement device, can realize to adopt neatly being used for the device that the different soaking time of measured device is wanted in heating and cooling by means of job-hopping or counter-rotating.
By means of the groove that some toroidals are set, turntable 12 has the buffer action of the soaking time that increases the heating and cooling device, and the effect of device being passed to contact arm 14.In addition, by means of controlling rotary drive mechanism and job-hopping or, can realizing having the function of different soaking times by means of oppositely.
When contact arm 14 has three arms, realize device being sent to the device receiving unit, measuring position and drain position by means of the rotating mechanism that allows three arm rotation 120 degree angles.When access arm 16 has three arms, realize device is sent to device receiving position and memory location by means of the rotating mechanism that allows to rotate 120 degree angles.
Fig. 1 is the calcspar of first embodiment that utilizes the IC connecting gear of three pivot arms with band circular orbit of the present invention.
Fig. 2 is the calcspar of second embodiment that utilizes the IC connecting gear of three pivot arms with band circular orbit of the present invention.
Fig. 3 is the structure of the 3rd embodiment with IC connecting gear of band two pivot arms of circular orbit and a round access arm.
Fig. 4 is the structural drawing that has two suction part 45a and 45b in the present invention on the Y supply arm.
Fig. 5 has two suction part 45a and 45b and at the structural drawing of the corresponding groove of turntable side on the Y supply arm.
Fig. 6 is the calcspar of the IC connecting gear of routine.
Fig. 7 explanation is all transfer operations in hot cell 110 in the IC connecting gear of the routine of Fig. 6.
Fig. 8 illustrates the structure of suction part.
Referring now to these description of drawings first embodiment of the present invention.This example is the device connecting gear of IC test treating apparatus, and its uses turntable 12 to be used for heating/cooling, and rotation contact arm 14 is used for measuring, and rotates access arm 16 and be used for storing, and they all have the device of operating in circular orbit.Fig. 1 has shown this device transmission mechanism.
Native system comprises that is supplied with 70, one rotations of 14, one measure portion of 12, one contact arms of 54, one turntables of 40, one thermoshield walls of buffer portion access arm 16, and a storage buffer portion 50.In this structure, supply with buffer portion 40, that uses in storage buffer portion 50 and thermoshield wall 54 and the conventional system is identical.
Supply with impact damper 40 and comprise 41, one X supply arms 42 of a Y supply arm and a supply tray 43.Suction part 45 is arranged on the end of Y supply arm 41.The device supply side is used for being arranged in the groove 13 that some devices on the supply tray 43 are put into turntable 12 in order.After suction part 45 being moved to a precalculated position above the supply tray 43 by means of Y supply arm 41 and X supply arm 42, underproof device 71 to be raised, and be transported to the top of the groove 13 of turntable 12 by suction, be released then and fall.
The rotating operation of turntable 12 regularly is such, and after device was placed to receiver side and is mentioned from supply with side channel by suction and rise, it was moved to the position of next groove by means of rotation.In other words, the rotation of it and contact arm 14 is moved asynchronously.As a result, turntable 12 not only provides a kind of device of rotation driving, and simple in structure.When the configuration of device changes, be designed to replace rotating disk 12.
At the end of contact arm 14, be provided with suction part 15a, 15b and 15c.The first arm 14a in the supply position of contact arm 14 reduces by making suction part 15a, mentions device on the groove on the turntable 12 by means of suction, and rises and keep device.
The second arm 14b in the measuring position of contact arm 14 reduces the device on suction part 15b, and it is placed on the contact of measure portion 70, begins to carry out electrical test then, and test is mentioned device by suction after finishing, and raises and maintains.
The 3rd arm 14c in the memory location of contact arm 14 reduces the device on the suction part 15c, discharges and it is dropped on the groove of rotation access arm 16.By this effect, utilize to make contact arm 14 rotate 120 degree simply just can to finish the supply of device and remove.In addition, because there is not otiose arm, just simplified the structure of connecting gear.
At the end of rotation access arm 16, be provided with the groove 17a of recess, 17b and 17c are used for memory device.At the first arm 16a of the device receiving position that rotates access arm 16 device of groove 17a reception from contact arm 14.
At the second arm 16b of mid point of rotation access arm 16, though also do not work, it only provides and makes device return stand-by period of normal temperature, especially after high temperature and low-temperature test.This is because when device is brought to rapid big temperature difference existence outside, can make the degradation of IC assembly once in a while.Perhaps, when storage tray 53 was not durable, it has made device return the effect of normal temperature.
The 3rd arm 16c in the device stores arm position that rotates access arm 16 utilizes the device on the suction conveying trough 17c with Y access arm 51.By this effect, rotate 120 degree by rotation access arm 16, device is sent to Y access arm position, and empty arm is turned back to contact arm 14.Thereby therefore the motion that can not waste arm shortens the delivery time and simple in structure.
By above explanation as can be known, have one by means of making rotation access arm 16 oppositely shorten the device of output time.In this case, it can be applied to such situation, does not wherein need the temperature normalizing time, because the temperature difference between constant temperature enclosure and ambient temperature is very little, or it does not need heating to use.
The distribution 50 of storage buffer part is by Y access arm 51, and X access arm 52 and storage tray 53 constitute.Suction part 55 is arranged on the end of Y access arm 51.By means of Y access arm 51 and X access arm 52, suction part 55 is moved on to after the top of rotation access arm 16, the storage side draught of device is lived device, shifts to storage tray 53 then, discharges and falls device.
In this example, contact arm 14 comprises three arms, and but, the number of arm can be 4, and for example prior art is such.In addition, can be several arms as required.In general, arm is many more, then causes expensive more and heavy more.With reference to the description of drawings second embodiment of the present invention.An example of the present invention is a kind of device connecting gear of the IC of being used for test treating apparatus, and when rotation access arm 16 had two arms, it used three circular orbit devices.This device describes with reference to Fig. 2.
This system comprises supply buffer portion 40, thermoshield wall 54, turntable 12, contact arm 14, measure portion 70, rotation access arm 16 and storage buffer portion 50.In this structure, three arms of the rotation access arm 16 in first embodiment are reduced to two arms, and this is unique difference.With this rotation access arm 16, its structure is simpler, and can reduce output time.
With reference to these description of drawings third embodiment of the present invention.As example of the present invention, a kind of device connecting gear of the IC of being used for test treating apparatus is so constructed, and making can be by means of using the back and forth movement that comes and goes access arm 216 to replace access arm to come carrying device 71.Be explained with reference to accompanying drawing.
This system comprises supply buffer portion 40, thermoshield wall 54, and turntable 12, contact arm 14, measure portion 70 comes and goes access arm 216, and memory buffer unit part 50.In this structure, rotation access arm 16 usefulness among first embodiment come and go access arm 216 and replace, and this is unique difference.
In round access arm 216, the end that is provided with at arm is that unit stores the recess grooves 13 from the device 71 of contact arm 14 with several.By means of arm is moved, device is sent to storage buffer portion 50.Finish after device transmits, arm turns back to the position from contact arm 14 receiving devices again.Utilize this mode, come and go access arm 2 and carry out back and forth movement.Equally, in this round access arm 216, it is relatively simple for structure, and output time can reduce.
With reference to the description of drawings another embodiment of the present invention.In the above-described embodiments, the suction part 45 that is used for the device supply of Y supply arm 41 is that the example of one situation has been illustrated, but as shown in Figure 4, for the structure of Y supply arm 41, a kind of structure with two suction part 45a and 45b is arranged.Utilize this structure, mention two devices 71 in the supply tray with the suction of two suction part 54a and 54b simultaneously, shift to turntable 12 then.
After this,,, when they are placed on the turntable 12, and wait for that the Y of Y supply arm 41 controls by two-stage to displacement after turntable 12 lateral movements, make and put next device at every turn after the Y direction is moved as first control method.In this way, can reduce the back and forth movement time of Y supply arm 41 and X supply arm 42, thereby device can high speed be supplied to turntable 12.
As second control method, device 71 is placed in first, second groove simultaneously, and does not need the stand-by period.In other words, by means of the rotation transmission of control turntable 12, device 71 is transferred to the position of two grooves, divides the Y of two-stage control Y supply arm 41 transmission to move distance then.After this, turntable 12 should return the original position.In this case, compare with first control method, device 71 is supplied with turntable 12 at faster speed.
As a result, the back and forth movement of Y supply arm 41 has been reduced half.In this case, this method can adapt to high speed cycling time, because the device service time is approximately 1/2nd.Equally, from the above mentioned, the suction part of Y supply wall 41 can become several by two, and can be filled up similarly.In addition, about Y access arm 51 sides, several suction parts can be set and be filled (implement) by means of the opposite operation of Y supply arm 41.
In the explanation of superincumbent first, second and the 3rd embodiment, pick up one with suction part 45 and want the example of underproof device to describe with reference to Fig. 5.Yet, several devices, for example two or four etc. can once be held and be discharged, and corresponding groove 13 can correspondingly be constituted, and can be filled up similarly.In addition, about Y access arm 51, suction partly is set to several units, and is filled up similarly, can adapt to higher rate of circulation.
In superincumbent implementation column 1,2 and 3 the explanation, turntable 12 is placed on device in all grooves by means of once rotating a groove.Yet, a kind of method that shortens output time is arranged, promptly when surplus being arranged, make useless stand-by period optimization about turntable 12 in the test period length of measure portion 70 and for soaking time.That is, control turntable 12 like this, make and satisfy soaking time by means of skip slots 13.When reverse, the stand-by period of turntable 12 can be utilized several grooves to arrive contact arm 14 and control turntable 12 and oppositely realize optimization.In this way, turntable 12 can the response cycle time and soaking time under top condition, be utilized.
As follows by the above-mentioned effect of the present invention that all becomes:
Turntable has the effect that pooling feature is provided, and by means of the groove that several annulars are set, and is that unit makes the ring ring rotation with the groove, just can obtain to be used to the soaking time that heats or cool off.In addition, just can easily control soaking time according to the device test period by means of this rotation of control and by means of the job-hopping mask placement device, thus easy to use.
And, a rotating drive mechanism as drive unit only is installed, thereby simple in structure, improve MTBF, conserve space and reducing cost.It also has owing to requiring less space to make the less advantage of constant temperature enclosure.
The circular orbit method of available rotation 120 degree of the transmission that the device of contact arm 14 is supplied with and discharged realizes.For this reason, driving method only need be provided with a device of rotation driving, and has advantage of simple structure.
At rotation access arm 16, utilize the tumbler ring rail set and be transferred to the suction position of Y access arm 51, receive device from contact arm 14.To this, driving method only need be provided with a device of rotation driving, and this further simplifies the structure.
By means of Colaesce described three kinds of tumbler ring rail methods are set, and control the rotation of presetting, the present invention has the effect of the device transmission that realizes minimum output time.In addition, the present invention has the effect with the transposition time carrying device of the best.
Claims (4)
1. one kind is used for the device connecting gear that IC tests treating apparatus, comprising:
Be a plurality of grooves (13) that the unit storage will underproof device (71) being used for of go up being provided with of a dish type turntable (12) with several, described rotating disk (12) transmits described device (71) to a contact arm (14), and is set for and supplies with buffer portion (40) from one and receive described device (71);
At least three arms are set up, each of described arm has the described contact arm (14) that has suction part (15), described suction part (15) be that unit holds described device (71) at the end of each described arm with several, so as from described turntable (12) with several the devices (71) that be the unit reception from the supply buffer portion (40) of a described device of supply (71).
2. device connecting gear as claimed in claim 1, wherein said turntable (12) is along the angle of angle of rotating a groove (13) forward or backwards or m groove of rotation (13).
3. device connecting gear as claimed in claim 1, wherein in order to receive described device (71) from described contact arm (14), several arms so are provided, make that the end that is provided with at each arm is the groove (13) of unit memory device (71) with several, and provide one to rotate access arm (16) at storage buffer portion (50), be used for transmitting other device (71).
4. as the device connecting gear of claim 1 or 2, also comprise round access arm (216), it carries out back and forth movement, and described device is sent to storage buffer portion (50).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95117241 CN1156829A (en) | 1995-09-26 | 1995-09-26 | Device transfer mechanism for IC test handler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 95117241 CN1156829A (en) | 1995-09-26 | 1995-09-26 | Device transfer mechanism for IC test handler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1156829A true CN1156829A (en) | 1997-08-13 |
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ID=5081187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 95117241 Pending CN1156829A (en) | 1995-09-26 | 1995-09-26 | Device transfer mechanism for IC test handler |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1156829A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102633107A (en) * | 2012-03-20 | 2012-08-15 | 杭州长川科技有限公司 | Reversing device for integrated circuit |
| CN107226350A (en) * | 2016-03-23 | 2017-10-03 | 精工爱普生株式会社 | Electronic component handling apparatus and electronic component inspection device |
| CN107324049A (en) * | 2017-06-30 | 2017-11-07 | 郭克女 | A kind of optoelectronic detecting device provided with auxiliary absorbing |
| CN107472900A (en) * | 2017-06-30 | 2017-12-15 | 中山诺顿科研技术服务有限公司 | Photoelectric detection equipment with auxiliary absorption |
-
1995
- 1995-09-26 CN CN 95117241 patent/CN1156829A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102633107A (en) * | 2012-03-20 | 2012-08-15 | 杭州长川科技有限公司 | Reversing device for integrated circuit |
| CN102633107B (en) * | 2012-03-20 | 2015-01-28 | 杭州长川科技有限公司 | Reversing device for integrated circuit |
| CN107226350A (en) * | 2016-03-23 | 2017-10-03 | 精工爱普生株式会社 | Electronic component handling apparatus and electronic component inspection device |
| CN107226350B (en) * | 2016-03-23 | 2019-09-20 | 精工爱普生株式会社 | Electronic component handling apparatus and electronic component inspection device |
| CN107324049A (en) * | 2017-06-30 | 2017-11-07 | 郭克女 | A kind of optoelectronic detecting device provided with auxiliary absorbing |
| CN107472900A (en) * | 2017-06-30 | 2017-12-15 | 中山诺顿科研技术服务有限公司 | Photoelectric detection equipment with auxiliary absorption |
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