CN115663588A - Heat radiator for high power laser instrument - Google Patents
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Abstract
本发明涉及高功率激光器散热技术领域,特别涉及一种高功率激光器的散热装置。该装置包括板体和激光器模块,激光器模块用于安装激光器以及为激光器散热,激光模块安装在板体上;板体内部设置有流体通道,沿板体厚度方向投影,每个激光器模块的投影均与流体通道的投影部分重合,且重合的部分面积相同,板体设置有进液口和出液口,流体通道分别与进液口和出液口连通,冷却液通过进液口和出液口不断流经流体通道,以对激光器模块进行散热;激光器模块包括热沉和热管,热沉固定在板体上,热管的第一端穿设于热沉中,热管的第二端穿过板体进入流体通道中。本发明提供了一种高功率激光器的散热装置,能够实现多个激光器模块均匀散热。
The invention relates to the technical field of heat dissipation for high-power lasers, in particular to a heat dissipation device for high-power lasers. The device includes a board and a laser module. The laser module is used to install the laser and dissipate heat for the laser. The laser module is installed on the board. There is a fluid channel inside the board, which is projected along the thickness direction of the board. The projection of each laser module is uniform. It coincides with the projection part of the fluid channel, and the area of the overlapped part is the same. The plate body is provided with a liquid inlet and a liquid outlet. The fluid channel is connected with the liquid inlet and the liquid outlet respectively, and the cooling liquid passes through the liquid inlet and the liquid outlet. Continuously flow through the fluid channel to dissipate heat from the laser module; the laser module includes a heat sink and a heat pipe, the heat sink is fixed on the board, the first end of the heat pipe is passed through the heat sink, and the second end of the heat pipe passes through the board into the fluid path. The invention provides a heat dissipation device for a high-power laser, which can realize uniform heat dissipation of multiple laser modules.
Description
技术领域technical field
本发明涉及高功率激光器散热技术领域,特别涉及一种高功率激光器的散热装置。The invention relates to the technical field of heat dissipation for high-power lasers, in particular to a heat dissipation device for high-power lasers.
背景技术Background technique
高功率激光器的工作原理为通过半导体将电能转化为光能,对于由半导体制成的激光器来说,其光电转换效率为50~60%,其余电能会产生热量。若半导体激光器所产生的热量不能及时排出,将导致PN结温度显著升高,进而导致半导体激光器的阈值电流变高,量子效率显著下降,器件的电光转换效率降低,从而产生更多的热量。The working principle of high-power lasers is to convert electrical energy into light energy through semiconductors. For lasers made of semiconductors, the photoelectric conversion efficiency is 50-60%, and the remaining electrical energy will generate heat. If the heat generated by the semiconductor laser cannot be discharged in time, the temperature of the PN junction will increase significantly, which will lead to a higher threshold current of the semiconductor laser, a significant decrease in quantum efficiency, and a decrease in the electro-optical conversion efficiency of the device, thereby generating more heat.
相关技术中,利用水冷板以循环水冷的方式对激光器进行散热。水冷板内部为空腔,空腔中循环通入所述冷却液。但是,受空腔形状的限制,该散热方式会导致散热不均匀,当半导体激光器散热不均匀时,芯片的有源区会产生热应力,出现“smile”效应,影响激光器输出光束的质量。In related technologies, a water-cooled plate is used to dissipate heat from a laser in a water-circulating manner. The interior of the water cooling plate is a cavity, and the cooling liquid is circulated in the cavity. However, limited by the shape of the cavity, this heat dissipation method will lead to uneven heat dissipation. When the heat dissipation of the semiconductor laser is uneven, thermal stress will be generated in the active area of the chip, and the "smile" effect will appear, which will affect the quality of the output beam of the laser.
因此,针对以上不足,急需一种高功率激光器的散热装置。Therefore, in view of the above deficiencies, there is an urgent need for a heat dissipation device for high-power lasers.
发明内容Contents of the invention
本发明提供了一种高功率激光器的散热装置,能够实现多个激光器模块均匀散热。The invention provides a heat dissipation device for a high-power laser, which can realize uniform heat dissipation of multiple laser modules.
本发明实施例提供了一种高功率激光器的散热装置,包括板体和多个激光器模块,所述激光器模块用于安装激光器以及为所述激光器散热,所述激光模块安装在所述板体上;An embodiment of the present invention provides a heat dissipation device for a high-power laser, including a board body and a plurality of laser modules, the laser module is used to install the laser and dissipate heat for the laser, and the laser module is installed on the board ;
所述板体内部设置有流体通道,沿所述板体厚度方向投影,每个所述激光器模块的投影均与所述流体通道的投影部分重合,且重合的部分面积相同,所述板体设置有进液口和出液口,所述流体通道分别与所述进液口和所述出液口连通,冷却液通过所述进液口和所述出液口不断流经所述流体通道,以对所述激光器模块进行散热;The inside of the board is provided with a fluid channel, which is projected along the thickness direction of the board. The projection of each of the laser modules overlaps with the projection of the fluid channel, and the overlapped parts have the same area. The board is set There are liquid inlets and liquid outlets, the fluid passages communicate with the liquid inlets and the liquid outlets respectively, and the cooling liquid continuously flows through the fluid passages through the liquid inlets and the liquid outlets, to dissipate heat from the laser module;
所述激光器模块包括热沉和热管,所述热沉固定在所述板体上,所述热管的第一端穿设于所述热沉中,所述热管的第二端穿过所述板体进入所述流体通道中。The laser module includes a heat sink and a heat pipe, the heat sink is fixed on the board, the first end of the heat pipe is passed through the heat sink, and the second end of the heat pipe passes through the board body into the fluid channel.
在一种可能的设计中,所述流体通道的进液口处、支路汇聚处、和弯度大于预设值处设置有湍流缓冲仓,所述湍流缓冲仓的宽度和深度均大于所述流体通道,所述湍流缓冲仓用于减小所述冷却液的液压。In a possible design, a turbulence buffer chamber is provided at the liquid inlet of the fluid channel, at the junction of the branches, and at the place where the curvature is greater than a preset value, and the width and depth of the turbulence buffer chamber are larger than that of the fluid channel. channel, the turbulence buffer chamber is used to reduce the hydraulic pressure of the coolant.
在一种可能的设计中,所述热管靠近所述热沉安装激光器的面,以提高导热速率。In a possible design, the heat pipe is installed close to the surface of the heat sink where the laser is installed, so as to increase the heat conduction rate.
在一种可能的设计中,所述热管上设置有密封模块,所述第二端由所述密封模块的第一面穿入,由所述密封模块的第二面穿出,所述第一面和所述第二面相邻,所述板体设置有贯穿孔,穿出所述第二面的所述第二端由所述贯穿孔进入所述流体通道,所述第二面安装在所述板体上以密封所述贯穿孔。In a possible design, the heat pipe is provided with a sealing module, the second end penetrates through the first surface of the sealing module, and passes through the second surface of the sealing module, and the first The surface is adjacent to the second surface, the plate body is provided with a through hole, the second end passing through the second surface enters the fluid channel through the through hole, and the second surface is installed on on the board to seal the through hole.
在一种可能的设计中,所述第二面设置有第一密封圈,所述第一密封圈用于增加所述第二面和所述贯穿孔之间的密封性。In a possible design, the second surface is provided with a first sealing ring, and the first sealing ring is used to increase the sealing performance between the second surface and the through hole.
在一种可能的设计中,所述热沉和所述密封模块之间存在间距,所述热沉和所述密封模块之间连接有热管,所述热管具有可塑性,通过调整所述热管消除所述热沉和所述密封模块之间的相互作用。In a possible design, there is a distance between the heat sink and the sealing module, and a heat pipe is connected between the heat sink and the sealing module. The heat pipe has plasticity, and the heat pipe is adjusted to eliminate the interaction between the heat sink and the sealing module.
在一种可能的设计中,在所述流体通道的内壁设置有多个扰流件,多个所述扰流件沿所述流体通道的中轴线设置,所述扰流件用于使所述冷却液进行扰流运动以使所述冷却液更快地带走热量,所述扰流件还用于降低所述冷却液对板体的冲击。In a possible design, a plurality of spoilers are arranged on the inner wall of the fluid passage, and the plurality of spoilers are arranged along the central axis of the fluid passage, and the spoilers are used to make the The cooling liquid performs a turbulence movement so that the cooling liquid can take away heat faster, and the turbulence element is also used to reduce the impact of the cooling liquid on the plate body.
在一种可能的设计中,所述扰流件包括条形翅片、菱形翅片和柱形翅片中的至少一种。In a possible design, the spoiler includes at least one of strip fins, diamond fins and column fins.
在一种可能的设计中,所述板体包括可拆装的第一层体和第二层体,安装所述第一层体和所述第二层体形成所述板体和所述流体通道,拆分所述第一层体和所述第二层体以清洗所述流体通道。In a possible design, the plate body includes a detachable first layer body and a second layer body, and the first layer body and the second layer body are installed to form the plate body and the fluid channels, the first layer and the second layer are disassembled to clean the fluid channels.
在一种可能的设计中,所述第一层体和所述第二层体间设置有第二密封圈,所述第二密封圈设置在所述流体通道外围,所述第二密封圈用于增加所述第一层体和所述第二层体之间的密封性。In a possible design, a second sealing ring is arranged between the first layer and the second layer, the second sealing ring is arranged on the periphery of the fluid channel, and the second sealing ring is used for To increase the sealing between the first layer and the second layer.
本发明与现有技术相比至少具有如下有益效果:Compared with the prior art, the present invention has at least the following beneficial effects:
在本实施例中,流体通道为弯曲的通道,流体通道流经每个激光器模块中心位置的下方,并且,每个激光器模块下方的流体通道的面积相等。如此设置,每个半导体激光器的散热面积相等。热管的第一端穿设于热沉中,第二端插入流体通道中,如此设置,能够进一步地将热沉的热量导入流体通道的冷却液中,进而热量被冷却液带出。综上,在水冷循环散热和热管散热的共同作用下,能够确保多个激光器模块的均匀散热。In this embodiment, the fluid channel is a curved channel, the fluid channel flows below the center of each laser module, and the area of the fluid channel below each laser module is equal. In this way, the heat dissipation area of each semiconductor laser is equal. The first end of the heat pipe is passed through the heat sink, and the second end is inserted into the fluid channel. Such arrangement can further lead the heat of the heat sink into the cooling liquid in the fluid channel, and then the heat is carried out by the cooling liquid. To sum up, under the joint effect of water cooling cycle heat dissipation and heat pipe heat dissipation, uniform heat dissipation of multiple laser modules can be ensured.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are For some embodiments of the present invention, those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1是本发明实施例提供的一种高功率激光器的散热装置的结构示意图;FIG. 1 is a schematic structural view of a heat dissipation device for a high-power laser provided by an embodiment of the present invention;
图2是本发明实施例提供的一种板体的内部结构示意图;Fig. 2 is a schematic diagram of the internal structure of a panel provided by an embodiment of the present invention;
图3是本发明实施例提供的一种激光器模块的结构示意图;Fig. 3 is a schematic structural diagram of a laser module provided by an embodiment of the present invention;
图4是本发明实施例提供的一种激光器模块的俯视结构示意图;Fig. 4 is a schematic top view of a laser module provided by an embodiment of the present invention;
图5是本发明实施例提供的另一种板体的内部结构示意图。Fig. 5 is a schematic diagram of the internal structure of another board body provided by an embodiment of the present invention.
图中:In the picture:
1-激光器模块;1 - laser module;
11-热沉;11 - heat sink;
12-热管;12 - heat pipe;
13-密封模块;13 - sealing module;
131-第一密封圈;131-the first sealing ring;
2-板体;2-board body;
21-流体通道;21 - fluid channel;
211-湍流缓冲仓;211-turbulence buffer chamber;
212-扰流件;212 - spoiler;
22-进液口;22-liquid inlet;
23-出液口;23-liquid outlet;
24-第一层体;24 - the first layer of body;
25-第二层体;25 - second body;
26-贯穿孔。26 - Through hole.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例,基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the protection of the present invention. scope.
在本发明实施例的描述中,除非另有明确的规定和限定,术语“第一”、“第二”仅用于描述的目的,而不能理解为指示或暗示相对重要性;除非另有规定或说明,术语“多个”是指两个或两个以上;术语“连接”、“固定”等均应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或一体地连接,或电连接;可以是直接相连,也可以通过中间媒介间接相连。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the embodiments of the present invention, unless otherwise specified and limited, the terms "first" and "second" are only used for the purpose of description, and cannot be understood as indicating or implying relative importance; unless otherwise specified Or to explain, the term "plurality" refers to two or more; the terms "connection", "fixation" and so on should be understood in a broad sense, for example, "connection" can be a fixed connection or a detachable connection, or Connected integrally, or electrically; either directly or indirectly through an intermediary. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
本说明书的描述中,需要理解的是,本发明实施例所描述的“上”、“下”等方位词是以附图所示的角度来进行描述的,不应理解为对本发明实施例的限定。此外,在上下文中,还需要理解的是,当提到一个元件连接在另一个元件“上”或者“下”时,其不仅能够直接连接在另一个元件“上”或者“下”,也可以通过中间元件间接连接在另一个元件“上”或者“下”。In the description of this specification, it should be understood that the orientation words such as "up" and "down" described in the embodiments of the present invention are described from the angles shown in the drawings, and should not be interpreted as a description of the embodiments of the present invention. limited. Furthermore, in this context, it also needs to be understood that when it is mentioned that an element is connected "on" or "under" another element, it can not only be directly connected "on" or "under" another element, but can also To be indirectly connected "on" or "under" another element through an intervening element.
如图1至图5所示,本发明实施例提供了一种高功率激光器的散热装置,包括板体2和多个激光器模块1,激光器模块1用于安装激光器以及为激光器散热,激光模块安装在板体2上;As shown in Figures 1 to 5, the embodiment of the present invention provides a heat dissipation device for a high-power laser, including a
板体2内部设置有流体通道21,沿板体2厚度方向投影,每个激光器模块1的投影均与流体通道21的投影部分重合,且重合的部分面积相同,板体2设置有进液口22和出液口23,流体通道21分别与进液口22和出液口23连通,冷却液通过进液口22和出液口23不断流经流体通道21,以对激光器模块1进行散热;There is a
激光器模块1包括热沉11和热管12,热沉11固定在板体2上,热管12的第一端穿设于热沉11中,热管12的第二端穿过板体2进入流体通道21中。The
在本实施例中,在本实施例中,流体通道21为弯曲的通道,流体通道21流经每个激光器模块1中心位置的下方,并且,每个激光器模块1下方的流体通道21的面积相等。如此设置,每个半导体激光器的散热面积相等。热管12的第一端穿设于热沉11中,第二端插入流体通道21中,如此设置,能够进一步地将热沉11的热量导入流体通道21的冷却液中,进而热量被冷却液带出。综上,在水冷循环散热和热管散热的共同作用下,能够确保多个激光器模块1的均匀散热。In this embodiment, in this embodiment, the
可以理解的是,板体2的制备材料可以是导热性良好的材料,优选铝合金。热沉11的制备材料可以是导热性优异的黄铜。It can be understood that the
需要说明的是,热管12贯穿整个热沉11,热管12的第一端既可以穿出热沉11,也可以不穿出热沉11。It should be noted that the
在本发明的一些实施例中,流体通道21的进液口22处、支路汇聚处、和弯度大于预设值处设置有湍流缓冲仓211,湍流缓冲仓211的宽度和深度均大于流体通道21,湍流缓冲仓211用于减小冷却液的液压。In some embodiments of the present invention, a
为了流经每个激光器模块1的底部,流体通道21设计成一条或多条蜿蜒的通道,在通道弯度较大的位置会形成湍流漩涡,湍流漩涡会产生气泡,流体通道21内的气泡不仅会降低冷却液和板体2的热传导效率,还会产生气泡腐蚀现象,降低第一层体24和第二层体25之间的密封可靠性。在进液口22处、支路汇聚处和弯度较大的位置设置湍流缓冲仓211,空间突然变大的湍流缓冲仓211使原本容易产生湍流的区域水流平稳,防止湍流和气泡形成。In order to flow through the bottom of each
此外,进液口22处、支路汇聚处和弯度较大的位置液压较大,较大液压下的冷却液会冲击流体通道21内壁,即板体2,进而会导致板体2局部变形,影响光学器件工作性能,增加了激光光束整形、耦合、准直等技术的难度。空间突然增大的湍流缓冲仓211使液压减弱,进而减小冷却液对流体通道21内壁的冲击,避免了板体2局部变形以及由板体2局部变形而引起的其他不利影响。In addition, the hydraulic pressure at the
在本实施例中,弯度较大的位置设置有湍流缓冲仓211,冷却液由湍流缓冲仓211流出后进入流体通道21,该段流体通道21的上部安装有激光器模块1。缓冲液由空间较大的湍流缓冲仓211进入空间较小的流体通道21,冷却液会充满流体通道21,使流体通道21中的冷却液充分接触激光器模块1底部的板体2和热管12,提高散热的效率。In this embodiment, a
需要说明的是,预设值可以通过实验或计算机模拟确定,具体预设值与冷却液的类型、流体通道21的形状尺寸和冷却液的流速相关。It should be noted that the preset value can be determined through experiments or computer simulations, and the specific preset value is related to the type of cooling liquid, the shape and size of the
在本发明的一些实施例中,热管12靠近热沉11安装激光器的面,以提高导热速率。In some embodiments of the present invention, the
在本实施例中,热管12尽量靠近热沉11安装激光器的面,即热管12尽量靠近热源,如此设置,能够更快地导热散热。优选地,热管12与热沉11安装激光器的面相切。In this embodiment, the
在本发明的一些实施例中,热管12上设置有密封模块13,第二端由密封模块13的第一面穿入,由密封模块13的第二面穿出,第一面和第二面相邻,板体2设置有贯穿孔26,穿出第二面的第二端由贯穿孔26进入流体通道21,第二面安装在板体2上以密封贯穿孔26。In some embodiments of the present invention, the
在本实施例中,板体2设置有贯穿孔26,贯穿孔26连通流体通道21,热管12通过贯穿孔26进入流体通道21。为了避免流体通道21中的冷却液由贯穿孔26溢出,在热管12上设置密封模块13,热管12密封穿入密封模块13的第一面,密封穿出密封模块13的第二面,第二面与贯穿孔26密封连接,从而实现了通过密封模块13密封贯穿孔26的效果。In this embodiment, the
在本发明的一些实施例中,第二面设置由第一密封圈131,第一密封圈131用于增加第二面和贯穿孔26之间的密封性。In some embodiments of the present invention, the second surface is provided with a first sealing ring 131 , and the first sealing ring 131 is used to increase the sealing performance between the second surface and the through
为了增加第二面和贯穿孔26之间的密封性,在第二面上设置第一密封圈131以增加第二面和贯穿孔26之间的密封性。In order to increase the sealing performance between the second surface and the through
在本发明的一些实施例中,热沉11和密封模块13之间存在间距,热沉11和密封模块13之间连接有热管12,热管12具有可塑性,通过调整热管12消除热沉11和密封模块13之间的相互作用。In some embodiments of the present invention, there is a distance between the
在本实施例中,如果热沉11和密封模块13靠的过近的话,无法保证二者在互不影响的情况下水平安装在板体2上,或者即便安装在板体2上,也无法精确保证安装的平整度,无法保证平整度的话,会影响激光的精度,还会影响密封模块13和板体2的密封可靠性。为了防止热沉11和密封模块13互相影响,增加二者之间的距离,连接二者的热管12具有一定可塑性,通过热管12的协调,使热沉11和密封模块13能够平整地安装在板体2上。In this embodiment, if the
在本发明的一些实施例中,在流体通道21的内壁设置有多个扰流件212,多个扰流件212沿流体通道21的中轴线设置,扰流件212用于使冷却液进行扰流运动以使冷却液更快地带走热量,扰流件212还用于降低冷却液对板体2的冲击。In some embodiments of the present invention, a plurality of
在本实施例中,在流体通道21内壁设置多个扰流件212,能够扰动冷却液,使冷却液更快地带走来自热沉11的热量。此外,扰流件212还局部减慢了冷却液的流速和液压,进而减少了冷却液对流体通道21的内壁的冲击。In this embodiment, a plurality of
在本发明的一些实施例中,扰流件212包括条形翅片、菱形翅片和柱形翅片中的至少一种。In some embodiments of the present invention, the
在本实施例中,优选菱形翅片。In this embodiment, diamond-shaped fins are preferred.
在本发明的一些实施例中,板体2包括可拆装的第一层体24和第二层体25,安装第一层体24和第二层体25形成板体2和流体通道21,拆分第一层体24和第二层体25以清洗流体通道21。In some embodiments of the present invention, the
在本实施例中,第一层体24和第二层体25可拆分,拆分后便于清洗内部流体通道21,并且,拆分后便于安装热管12。具体地,拆分第一层体24和第二层体25,将热管12穿过贯穿孔26,热管12具有可塑性,穿过贯穿孔26后调整热管12到适合的弯度,然后合并第一层体24和第二层体25。In this embodiment, the
在本发明的一些实施例中,第一层体24和第二层体25间设置有第二密封圈,第二密封圈设置在流体通道21外围,第二密封圈用于增加第一层体24和第二层体25之间的密封性。In some embodiments of the present invention, a second sealing ring is arranged between the
在本实施例中,密封圈可以设置在第一层体24上,也可以设置在第二层体25上,具体地,在第一层体24或第二层体25上加工与第二密封圈匹配的凹槽,将第二密封圈放入凹槽中,通过密封螺纹孔将第一层体24和第二层体25安装在一起。第二密封圈将流体通道21包围,安装后使第一层体24和第二层体25之间保持密封。In this embodiment, the sealing ring can be arranged on the
最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: it can still be Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent replacements are made to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.
Claims (10)
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| CN113054527A (en) * | 2021-03-16 | 2021-06-29 | 北京工业大学 | Heat radiator for high power semiconductor laser |
| CN217115150U (en) * | 2022-03-15 | 2022-08-02 | 青岛益恩圣塑胶有限公司 | Array copper-tungsten alloy heat sink laser |
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| CN113054527A (en) * | 2021-03-16 | 2021-06-29 | 北京工业大学 | Heat radiator for high power semiconductor laser |
| CN217115150U (en) * | 2022-03-15 | 2022-08-02 | 青岛益恩圣塑胶有限公司 | Array copper-tungsten alloy heat sink laser |
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