CN115621177A - A flower basket elevator for storing silicon wafers - Google Patents

A flower basket elevator for storing silicon wafers Download PDF

Info

Publication number
CN115621177A
CN115621177A CN202211190963.3A CN202211190963A CN115621177A CN 115621177 A CN115621177 A CN 115621177A CN 202211190963 A CN202211190963 A CN 202211190963A CN 115621177 A CN115621177 A CN 115621177A
Authority
CN
China
Prior art keywords
feeding
support
conveying
conveyor belt
silicon wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211190963.3A
Other languages
Chinese (zh)
Inventor
马永强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shaoxing Smecta Technology Information Consulting Co ltd
Original Assignee
Shaoxing Smecta Technology Information Consulting Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shaoxing Smecta Technology Information Consulting Co ltd filed Critical Shaoxing Smecta Technology Information Consulting Co ltd
Priority to CN202211190963.3A priority Critical patent/CN115621177A/en
Publication of CN115621177A publication Critical patent/CN115621177A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • H10P72/3402
    • H10P72/3202
    • H10P72/3218
    • H10P72/3221
    • H10P72/3302
    • H10P72/3411
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Warehouses Or Storage Devices (AREA)

Abstract

本发明提供一种用于存储硅晶片的花篮提升机,包括若干用于存储硅晶片的存储花篮、机架、进料输送带、出料输送带、至少一组用于进料的输送轮组和至少一组用于出料的输送轮组、提升机构、上料机构、中转架、支架,所述进料输送带和用于进料的输送轮组依次衔接,所述出料输送带和用于出料的输送轮组依次衔接。在硅晶片上料机装片前,先将空的存储花篮通过机械手等辅助工具抓至中转架的送料输送带上,然后将中转架通过AGV小车装载在支架上,空的存储花篮通过送料输送带送入进料输送带,存储满的存储花篮从上方的输送轮组进入出料输送带,再由出料输送带送入中转架的回料输送带上,然后通过AGV小车将中转架运输至下一道工序处。

Figure 202211190963

The invention provides a flower basket hoist for storing silicon wafers, comprising several storage flower baskets for storing silicon wafers, a frame, a feeding conveyor belt, a discharging conveyor belt, and at least one set of conveying wheels for feeding and at least one set of conveying wheels for discharging, a lifting mechanism, a feeding mechanism, a transfer frame, and a support, the feeding conveyor belt and the conveying wheel set for feeding are sequentially connected, and the discharging conveyor belt and The conveying wheels used for discharging are connected sequentially. Before the silicon wafer loading machine is loaded, the empty storage flower basket is first grasped by auxiliary tools such as manipulators to the feeding conveyor belt of the transfer frame, and then the transfer frame is loaded on the bracket by the AGV trolley, and the empty storage flower basket is conveyed by feeding The belt is sent to the feeding conveyor belt, and the full storage flower basket enters the discharging conveyor belt from the upper conveying wheel set, and then is sent to the return conveyor belt of the transfer frame by the discharging conveyor belt, and then the transfer frame is transported by the AGV trolley to the next process.

Figure 202211190963

Description

一种用于存储硅晶片的花篮提升机A flower basket elevator for storing silicon wafers

技术领域technical field

本发明涉及机械自动化技术领域,具体为一种用于存储硅晶片的花篮提升机。The invention relates to the technical field of mechanical automation, in particular to a basket lifter for storing silicon wafers.

背景技术Background technique

制作太阳能电池主要是以半导体材料为基础,其工作原理是利用光电材料吸收光能后发生光电子转换反应,根据所用材料的不同。The production of solar cells is mainly based on semiconductor materials. Its working principle is to use photoelectric materials to absorb light energy and undergo photoelectron conversion reactions, depending on the materials used.

太阳能电池是人们未来发电的一种重要方式,采用晶体硅制造的太阳能电池是目前光伏行业的主流技术。目前太阳能电池制造过程中,包含有多个工序,如硅片清洗、制绒等。Solar cells are an important way for people to generate electricity in the future. Solar cells made of crystalline silicon are currently the mainstream technology in the photovoltaic industry. At present, the manufacturing process of solar cells includes multiple processes, such as silicon wafer cleaning and texturing.

在进行上述工序前需要装硅片装入专用篮具,然后将篮具运往下一道工序加工,随着自动化设备的普及,市面上也出现了采用机械手的方式将硅晶片抓取至花篮中存储,但是当存储完一个花篮时,该花篮以及待上料的花篮都要人工或小车完成搬运,始终无法形成循环、快速、自动化的上料、下料、中转过程。Before carrying out the above process, it is necessary to load silicon wafers into a special basket, and then transport the basket to the next process for processing. With the popularization of automation equipment, there are also robots on the market that use robots to grab silicon wafers and store them in flower baskets. , but when a flower basket is stored, the flower basket and the flower basket to be loaded must be transported manually or by a trolley, and it is always impossible to form a cyclic, fast, and automatic loading, unloading, and transfer process.

发明内容Contents of the invention

(一)解决的技术问题(1) Solved technical problems

针对现有技术的不足,本发明提供了一种用于存储硅晶片的花篮提升机,解决了上述背景技术中提出的问题。Aiming at the deficiencies of the prior art, the present invention provides a flower basket lifter for storing silicon wafers, which solves the problems raised in the background art above.

(二)技术方案(2) Technical solution

为实现以上目的,本发明通过以下技术方案予以实现:一种用于存储硅晶片的花篮提升机,包括若干用于存储硅晶片的存储花篮、机架、进料输送带、出料输送带、至少一组用于进料的输送轮组和至少一组用于出料的输送轮组、提升机构、上料机构、中转架、支架,所述进料输送带和用于进料的输送轮组依次衔接,所述出料输送带和用于出料的输送轮组依次衔接,且位于进料输送带和用于进料的输送轮组的上方,所述机架上设置横向设置有气缸一,所述气缸一可带动用于出料的输送轮组横向移动,所述上料机构用于将硅晶片上料至存储花篮内,所述提升机构可将用于进料的输送轮组上的存储花篮提升至用于出料的输送轮组上,所述提升机构包括一对丝杠模组一、提升体、连杆和支撑块,所述丝杠模组一设置在机架上,且用于带动提升体竖向升降,所述连杆竖向设置在提升体上,所述支撑块的一端铰接在连杆上,所述连杆上设置有用于带动支撑块转动的驱动器,所述支架设置在机架位于进料输送带、出料输送带的进料出料端,所述支架用于支撑中转架,所述中转架上设置有可与进料输送带、出料输送带衔接的送料输送带、回料输送带,所述支架上设置有用于驱动送料输送带、回料输送带转动的驱动机构。In order to achieve the above object, the present invention is achieved through the following technical solutions: a flower basket hoist for storing silicon wafers, including several storage flower baskets for storing silicon wafers, a frame, a feed conveyor belt, a discharge conveyor belt, At least one set of conveying wheels for feeding and at least one set of conveying wheels for discharging, a lifting mechanism, a feeding mechanism, a transfer frame, a support, the feeding conveyor belt and the conveying wheels for feeding The groups are successively connected, the discharge conveyor belt and the conveying wheel set for discharging are connected in sequence, and are located above the feed conveyor belt and the conveying wheel set for feeding, and the cylinder is arranged horizontally on the frame 1. The cylinder one can drive the conveying wheel set for discharging to move laterally, the feeding mechanism is used to load silicon wafers into the storage flower basket, and the lifting mechanism can move the conveying wheel set used for feeding The storage flower basket on the top is lifted to the conveying wheel set for discharging, the lifting mechanism includes a pair of lead screw modules one, lifting body, connecting rod and support block, and the lead screw module one is set on the frame , and is used to drive the lifting body to lift vertically, the connecting rod is vertically arranged on the lifting body, one end of the supporting block is hinged on the connecting rod, and the connecting rod is provided with a driver for driving the supporting block to rotate, The support is arranged on the frame at the feed and discharge end of the feed conveyor belt and the discharge conveyor belt, and the support is used to support the transfer frame, and the transfer frame is provided with a The feeding conveyor belt and the return conveyor belt are connected, and a driving mechanism for driving the feed conveyor belt and the return conveyor belt to rotate is arranged on the support.

优选的,所述输送轮组包括支撑架、若干滚轮、电机,若干滚轮沿着输送方向依次转动连接在支撑架上,若干滚轮通过传动皮带传动啮合,所述电机与滚轮同轴相连,用于进料的输送轮组的支撑架固定在机架上,用于出料的输送轮组的支撑架设置在气缸一的输出端上。Preferably, the conveying wheel set includes a support frame, several rollers, and a motor, and the several rollers are sequentially connected to the support frame along the conveying direction. The supporting frame of the feeding conveying wheel set is fixed on the frame, and the supporting frame of the conveying wheel set used for discharging is arranged on the output end of the cylinder one.

优选的,所述存储花篮内竖向设置有若干排用于存储硅晶片的支撑板,每排支撑板横向等间距布置,每块支撑板的顶端设置有向上弯折的弯折部。Preferably, several rows of support plates for storing silicon wafers are vertically arranged in the storage flower basket, each row of support plates is arranged at equal intervals in the transverse direction, and the top of each support plate is provided with an upwardly bent bending portion.

优选的,所述上料机构包括输送板、丝杠模组二,所述丝杠模组二用于带动输送板朝着存储花篮方向移动,所述输送板上用于放置硅晶片,所述输送板为带有若干间隙槽的梳子状,其间隙槽与支撑板交错布置。Preferably, the feeding mechanism includes a conveying plate and a lead screw module 2, the lead screw module 2 is used to drive the conveying plate to move toward the direction of the storage basket, the conveying plate is used to place silicon wafers, and the conveying plate is used to place silicon wafers. The conveying plate is comb-shaped with several gap slots, and the gap slots and the support plates are alternately arranged.

优选的,所述支架包括支架一和支架二,所述支架一、支架二固定对称设置,且中转架的两端可支撑在支架一、支架二上,所述支架一上设置有用于驱动送料输送带、回料输送带转动的驱动机构。Preferably, the bracket includes a bracket one and a bracket two, the first bracket and the second bracket are fixed and symmetrically arranged, and the two ends of the transfer frame can be supported on the first bracket and the second bracket, and the first bracket is provided with a The driving mechanism for the rotation of the conveyor belt and the return conveyor belt.

优选的,所述驱动机构包括驱动齿轮一、驱动齿轮二以及两个电机,所述驱动齿轮一、驱动齿轮二转动连接在支架一上,两个所述电机设置在支架一上且分别与驱动齿轮一、驱动齿轮二相连,所述送料输送带和回料输送带的转轴上同轴连接有带轮一和带轮二,当中转架落在支架一和支架二上时,带轮一、带轮二分别与驱动齿轮一、驱动齿轮二啮合。Preferably, the driving mechanism includes a driving gear 1, a driving gear 2 and two motors, the driving gear 1 and the driving gear 2 are rotatably connected to the bracket 1, and the two motors are arranged on the bracket 1 and are connected to the driving gear respectively. Gear one and driving gear two are connected, and the rotating shafts of the feeding conveyor belt and the return conveyor belt are coaxially connected with pulley one and pulley two. The second pulley meshes with the first driving gear and the second driving gear respectively.

优选的,所述支架一和支架二上分别设置有两个浮动对中单元,四个浮动对中单元用于将中转架的位置对准至指定位置。Preferably, two floating centering units are respectively arranged on the first bracket and the second bracket, and four floating centering units are used to align the position of the transfer frame to a designated position.

(三)有益效果(3) Beneficial effects

本发明提供了一种用于存储硅晶片的花篮提升机。具备以下有益效果:The present invention provides a basket lifter for storing silicon wafers. Has the following beneficial effects:

1、该用于存储硅晶片的花篮提升机,在硅晶片上料机装片前,先将空的存储花篮通过机械手等辅助工具抓至中转架的送料输送带上,然后将中转架通过AGV小车装载在支架上,空的存储花篮通过送料输送带送入进料输送带,然后从进料输送带进入位于下方的输送轮组上,利用上料机构将硅晶片一一放入存储花篮中,在上料过程中通过提升机构将存储花篮逐步向上提升至位于上方的输送轮组上,存储满的存储花篮从上方的输送轮组进入出料输送带,再由出料输送带送入中转架的回料输送带上,然后通过AGV小车将中转架运输至下一道工序处,有效解决了各工序之间距离远的问题;且中转架上存储花篮一进一出的设计,大大提升了各工序的工作效率,无需停车。1. The flower basket hoist used to store silicon wafers, before the silicon wafer feeder is loaded, first grabs the empty storage flower baskets to the feeding conveyor belt of the transfer frame through manipulators and other auxiliary tools, and then passes the transfer frame through the AGV The trolley is loaded on the bracket, and the empty storage flower basket is sent to the feeding conveyor belt through the feeding conveyor belt, and then enters the lower conveying wheel set from the feeding conveyor belt, and the silicon wafers are put into the storage flower basket one by one by using the feeding mechanism , during the feeding process, the storage flower basket is gradually lifted upwards to the upper conveying wheel set through the lifting mechanism, and the full storage flower basket enters the discharge conveyor belt from the upper conveying wheel set, and then is sent to the transfer by the discharge conveyor belt on the return conveyor belt of the frame, and then transport the transfer frame to the next process by the AGV trolley, which effectively solves the problem of the long distance between each process; and the design of storing flower baskets on the transfer frame, one in and one out, greatly improves the The working efficiency of each process is improved without stopping.

附图说明Description of drawings

图1为本发明的整体轴测图;Fig. 1 is an overall axonometric view of the present invention;

图2为本发明的存储花篮上料状态示意图;Fig. 2 is a schematic diagram of the feeding state of the storage flower basket of the present invention;

图3为本发明的进料输送带和出料输送带示意图;Fig. 3 is a schematic diagram of a feed conveyor belt and a discharge conveyor belt of the present invention;

图4为本发明的提升机构示意图;Fig. 4 is a schematic diagram of a lifting mechanism of the present invention;

图5为本发明的输送轮组示意图;Fig. 5 is a schematic diagram of the conveying wheel set of the present invention;

图6为本发明的中转架与机架衔接图;Fig. 6 is a connection diagram between the transfer frame and the frame of the present invention;

图7为本发明的中转架示意图;Figure 7 is a schematic diagram of the transfer frame of the present invention;

图8为本发明的中转架与支架一、支架二对应图;Fig. 8 is a corresponding diagram of the transfer frame of the present invention, the first bracket and the second bracket;

图9为本发明支架一、支架二的结构示意图;Fig. 9 is a schematic structural view of the first bracket and the second bracket of the present invention;

图10为本发明的存储花篮轴测示意图;Fig. 10 is an axonometric schematic diagram of the storage flower basket of the present invention;

图11为本发明的存储花篮剖视图。Fig. 11 is a sectional view of the storage flower basket of the present invention.

图中:1机架、2存储花篮、3进料输送带、4出料输送带、5输送轮组、51支撑架、52滚轮、53电机、6气缸一、7提升机构、71丝杠模组一、72提升体、73连杆、74支撑块、8输送板、9丝杠模组二、10硅晶片、11中转架、12送料输送带、13回料输送带、14支架一、15支架二、16带轮一、17带轮二、18驱动齿轮一、19驱动齿轮二、20电机、21浮动对中单元、22固定夹轮、23活动夹轮、24气缸三、25转动臂、26夹板、27气缸四、28支撑板、29弯折部。In the figure: 1 frame, 2 storage flower basket, 3 feeding conveyor belt, 4 discharging conveyor belt, 5 conveying wheel set, 51 support frame, 52 roller, 53 motor, 6 cylinder one, 7 lifting mechanism, 71 lead screw mold Group 1, 72 lifting body, 73 connecting rod, 74 support block, 8 conveying plate, 9 lead screw module 2, 10 silicon wafer, 11 transfer frame, 12 feeding conveyor belt, 13 returning conveyor belt, 14 bracket 1, 15 Bracket two, 16 pulley one, 17 pulley two, 18 driving gear one, 19 driving gear two, 20 motor, 21 floating centering unit, 22 fixed clip wheel, 23 movable clip wheel, 24 cylinder three, 25 rotating arm, 26 splints, 27 cylinder four, 28 support plates, 29 bending parts.

具体实施方式detailed description

本发明实施例提供一种用于存储硅晶片的花篮提升机,如图1-11所示,包括若干用于存储硅晶片10的存储花篮2、机架1、进料输送带3、出料输送带4、至少一组用于进料的输送轮组5和至少一组用于出料的输送轮组5、提升机构7、上料机构、中转架11、支架。The embodiment of the present invention provides a flower basket hoist for storing silicon wafers, as shown in Figure 1-11, including a number of storage flower baskets 2 for storing silicon wafers 10, a frame 1, a feeding conveyor belt 3, and a Conveyor belt 4, at least one set of conveying wheels 5 for feeding and at least one set of conveying wheels 5 for discharging, lifting mechanism 7, feeding mechanism, transfer frame 11, and support.

进料输送带2和出料输送带4的输送方向相反。用于进料的输送轮组5和用于出料的输送轮组5的输送方向相反。用于进料的输送轮组5和用于出料的输送轮组5各有两组,两组输送轮组5并排设置。The conveying directions of the feeding conveyor belt 2 and the discharging conveyor belt 4 are opposite. The conveying direction of the conveying wheel set 5 used for feeding and the conveying wheel set 5 used for discharging are opposite. There are two sets of conveying wheel sets 5 for feeding and two sets of conveying wheel sets 5 for discharging, and two sets of conveying wheel sets 5 are arranged side by side.

如图4所示,进料输送带3和用于进料的输送轮组5依次衔接,出料输送带4和用于出料的输送轮组5依次衔接,且位于进料输送带3和用于进料的输送轮组5的上方,出料输送带4和进料输送带3上下对应,两组用于出料的输送轮组5和两组用于进料的输送轮组5上下一一对应。As shown in Figure 4, the feed conveyor belt 3 and the conveyor wheel set 5 for feeding are sequentially connected, and the discharge conveyor belt 4 is sequentially connected with the conveyor wheel set 5 for discharging, and are located between the feed conveyor belt 3 and the conveyor wheel set 5. Above the conveyor wheel set 5 for feeding, the discharge conveyor belt 4 and the feed conveyor belt 3 correspond up and down, two sets of conveyor wheels 5 for discharge and two sets of conveyor wheels 5 for feeding up and down One to one correspondence.

如图4-5所示,机架1上设置横向设置有气缸一6,气缸一6可带动用于出料的输送轮组5横向移动,上料机构用于将硅晶片10上料至存储花篮2内,提升机构7可将用于进料的输送轮组5上的存储花篮2提升至用于出料的输送轮组5上,当提升机构7带动存储花篮2上升时,利用气缸一6将输送轮组5往外带动,防止存储花篮2上升时干涉到输送轮组5。As shown in Figure 4-5, cylinder one 6 is arranged horizontally on the frame 1, and cylinder one 6 can drive the conveying wheel set 5 for discharging to move laterally, and the feeding mechanism is used to feed the silicon wafer 10 to the storage In the flower basket 2, the lifting mechanism 7 can lift the storage flower basket 2 on the conveying wheel set 5 used for feeding to the conveying wheel set 5 used for discharging. When the lifting mechanism 7 drives the storage flower basket 2 to rise, use the cylinder one 6. Drive the conveying wheel set 5 outward to prevent the storage flower basket 2 from interfering with the conveying wheel set 5 when rising.

如图4所示,具体的,输送轮组5包括支撑架51、若干滚轮52、电机53,若干滚轮52沿着输送方向依次转动连接在支撑架51上,若干滚轮52的一端同轴连接有齿轮,若干齿轮通过传动皮带传动啮合,电机53与滚轮52同轴相连,电机用于驱动若干个滚轮52转动。用于进料的输送轮组5的支撑架51固定在机架1上,用于出料的输送轮组5的支撑架51设置在气缸一6的输出端上。气缸一6可带动该支撑架51往外移动。As shown in Figure 4, concretely, conveying wheel group 5 comprises support frame 51, several rollers 52, motor 53, and several rollers 52 rotate and connect on the support frame 51 successively along conveying direction, and one end of several rollers 52 is connected with coaxial Gears, several gears are meshed through transmission belt transmission, motor 53 is coaxially connected with roller 52, and motor is used to drive several rollers 52 to rotate. The support frame 51 of the conveying wheel set 5 used for feeding is fixed on the frame 1, and the support frame 51 of the conveying wheel set 5 used for discharging is arranged on the output end of the cylinder one 6. Cylinder one 6 can drive the support frame 51 to move outward.

如图4-5所示,提升机构7包括一对丝杠模组一71、提升体72、连杆73和支撑块74,丝杠模组一71设置在机架1上,丝杠模组一71为现有的升降机构,由丝杠、导轨、滑座、联轴器、电机等组件构成,具体不再赘述。丝杠模组一71用于带动提升体72竖向升降,提升体72与丝杠模组一71上的滑座相连,连杆73竖向设置在提升体72上,支撑块74的一端铰接在连杆73上,连杆73上设置有用于带动支撑块74转动的驱动器。驱动器可为电机,当驱动器为电机时,电机与支撑块74的转轴相连。驱动器也可以为气缸,当驱动器为气缸时,气缸的底端铰接在连杆73上,气缸的输出端与支撑块74铰接。支撑块74常态下向外展开,与连杆73形成三角状态,支撑块74的顶端用于支撑存储花篮2。支撑块74在提升过程中始终保持向外展开状态,提升结束返回初始位时,通过驱动器带动支撑块74向上转动,使其竖向方向避免与下层花篮2接触。As shown in Figure 4-5, the lifting mechanism 7 includes a pair of lead screw module one 71, a lifting body 72, a connecting rod 73 and a support block 74, the lead screw module one 71 is arranged on the frame 1, and the lead screw module one A 71 is an existing lifting mechanism, which is made of components such as a leading screw, a guide rail, a slide seat, a shaft coupling, a motor, and will not be described in detail. The leading screw module one 71 is used to drive the lifting body 72 to lift vertically, the lifting body 72 is connected with the sliding seat on the leading screw module one 71, the connecting rod 73 is vertically arranged on the lifting body 72, and one end of the supporting block 74 is hinged On the connecting rod 73 , a driver for driving the supporting block 74 to rotate is arranged on the connecting rod 73 . The driver can be a motor, and when the driver is a motor, the motor is connected to the rotating shaft of the support block 74 . The driver can also be a cylinder, and when the driver is a cylinder, the bottom end of the cylinder is hinged on the connecting rod 73, and the output end of the cylinder is hinged with the support block 74. The support block 74 expands outward under normal conditions, forming a triangular state with the connecting rod 73 , and the top of the support block 74 is used to support the storage flower basket 2 . The support block 74 keeps outwardly unfolded during the lifting process, and when the lifting is finished and returns to the initial position, the driver drives the support block 74 to rotate upwards so that its vertical direction avoids contact with the flower basket 2 on the lower floor.

如图10-11所示,存储花篮2内竖向设置有若干排用于存储硅晶片10的支撑板28,每排支撑板28横向等间距布置,一排支撑板28上可支撑一块硅晶片10。每块支撑板28的顶端设置有向上弯折的弯折部29。弯折部29可防止硅晶片10滑出存储花篮2外。As shown in Figures 10-11, several rows of support plates 28 for storing silicon wafers 10 are vertically arranged in the storage flower basket 2, and each row of support plates 28 is arranged at equal intervals in the horizontal direction, and one row of support plates 28 can support a silicon wafer 10. A top end of each support plate 28 is provided with an upwardly bent bent portion 29 . The bending portion 29 can prevent the silicon wafer 10 from sliding out of the storage flower basket 2 .

如图1-2所示,上料机构包括输送板8、丝杆模组二9,丝杆模组二9用于带动输送板8朝着存储花篮2方向移动,输送板8上用于放置硅晶片10,输送板8上的硅晶片10通过自动化的机械手抓取。输送板8为带有若干间隙槽的梳子状,其间隙槽与支撑板28交错布置。输送板8在丝杆模组二9的带动下降硅晶片10输送至存储花篮2内的支撑板28上,然后提升机构7带动存储花篮2上升存储花篮支撑板21上下两块间距的距离,然后输送板8在丝杆模组二9的带动下退出存储花篮2外。As shown in Figure 1-2, the feeding mechanism includes a conveying plate 8 and a screw module 2 9. The screw module 2 9 is used to drive the conveying plate 8 to move toward the storage flower basket 2, and the conveying plate 8 is used to place Silicon wafer 10, the silicon wafer 10 on the transport plate 8 is grasped by an automated robot. The conveying plate 8 is comb-shaped with several gap slots, and the gap slots and support plates 28 are alternately arranged. The conveying plate 8 lowers the silicon wafer 10 driven by the screw module 2 9 and transports it to the support plate 28 in the storage basket 2, and then the lifting mechanism 7 drives the storage basket 2 to lift the storage basket support plate 21 by the distance between the upper and lower two pieces of the storage basket, and then The conveying plate 8 withdraws from the outside of the storage flower basket 2 under the drive of the screw mandrel module 2 9 .

如图6所示,支架设置在机架1位于进料输送带3、出料输送带4的进料出料端,支架用于支撑中转架11,中转架11上设置有可与进料输送带3、出料输送带4衔接的送料输送带12、回料输送带13,支架上设置有用于驱动送料输送带12、回料输送带13转动的驱动机构。As shown in Figure 6, the support is arranged on the frame 1 at the feed and discharge end of the feed conveyor belt 3 and the discharge conveyor belt 4. The support is used to support the transfer frame 11, and the transfer frame 11 is provided with a The feed conveyor belt 12 and the return conveyor belt 13 connected with the belt 3 and the discharge conveyor belt 4 are provided with a drive mechanism for driving the feed conveyor belt 12 and the return conveyor belt 13 to rotate.

如图6-7所示,支架包括支架一14和支架二15,支架一14、支架二15固定对称设置,支架一14和支架二15通过地脚螺栓固定在机架1的进出料口处。且中转架11的两端可支撑在支架一14、支架二15上,当中转架11架设在支架一14和支架二15上时,送料输送带12与进料输送带3衔接在一起,回料输送带13与出料输送带4衔接在一起。As shown in Figure 6-7, the bracket includes bracket one 14 and bracket two 15, bracket one 14 and bracket two 15 are fixed and symmetrically arranged, and bracket one 14 and bracket two 15 are fixed at the inlet and outlet of the frame 1 by anchor bolts . And the two ends of transfer frame 11 can be supported on support one 14, support two 15, when transfer frame 11 was erected on support one 14 and support two 15, feeding conveyor belt 12 is joined together with feed conveyor belt 3, returns The material conveyor belt 13 is connected with the discharge conveyor belt 4.

支架一14上设置有用于驱动送料输送带12、回料输送带13转动的驱动机构。A drive mechanism for driving the feed conveyor belt 12 and the return conveyor belt 13 to rotate is provided on the support one 14 .

如图8-9所示,具体的,驱动机构包括驱动齿轮一18、驱动齿轮二19以及两个电机20,驱动齿轮一18、驱动齿轮二19转动连接在支架一14上,两个电机20设置在支架一14上且分别与驱动齿轮一18、驱动齿轮二19相连,送料输送带12和回料输送带13包括一个传送皮带和带动皮带转动的转轴,送料输送带12和回料输送带13的转轴上同轴连接有带轮一16和带轮二17,带轮一16、带轮二17均为齿轮,当中转架11落在支架一14和支架二15上时,带轮一16、带轮二17分别与驱动齿轮一18、驱动齿轮二19啮合。As shown in Figures 8-9, specifically, the driving mechanism includes a driving gear one 18, a driving gear two 19 and two motors 20, and the driving gear one 18 and the driving gear two 19 are rotatably connected to the bracket one 14, and the two motors 20 Be arranged on the bracket one 14 and link to each other with the driving gear one 18 and the driving gear two 19 respectively, the feed conveyor belt 12 and the return conveyor belt 13 include a conveyor belt and a rotating shaft that drives the belt, the feed conveyor belt 12 and the return conveyor belt The rotating shaft of 13 is coaxially connected with pulley one 16 and pulley two 17, and pulley one 16, pulley two 17 are all gears, and when intermediate frame 11 falls on support one 14 and support two 15, pulley one 16, pulley two 17 meshes with driving gear one 18, driving gear two 19 respectively.

如图9所示,支架一14和支架二15上分别设置有两个浮动对中单元21,四个浮动对中单元21用于将中转架11的位置对准至指定位置。当AGV小车将中转架11放置在支架一14和支架二15上时,由于中转架11位置会有偏移,通过四个浮动对中单元21调整中转架11的位置,使中转架11上的送料输送带12和回料输送带13对准机架1上的进料输送带3和出料输送带4。浮动对中单元21可用型号为MACM4-20PV-X115。As shown in FIG. 9 , two floating centering units 21 are respectively provided on the first bracket 14 and the second bracket 15 , and four floating centering units 21 are used to align the position of the transfer frame 11 to a designated position. When the AGV car places the transfer frame 11 on the bracket one 14 and the bracket two 15, because the position of the transfer frame 11 will be offset, the position of the transfer frame 11 is adjusted by four floating centering units 21, so that the position on the transfer frame 11 The feed conveyor belt 12 and the return conveyor belt 13 are aligned with the feed conveyor belt 3 and the discharge conveyor belt 4 on the frame 1 . The available model of the floating centering unit 21 is MACM4-20PV-X115.

支架一14和支架二15上设置有用于夹紧中转架11前后两端的夹紧机构。The first bracket 14 and the second bracket 15 are provided with clamping mechanisms for clamping the front and rear ends of the transfer frame 11 .

如图8-9所示,夹紧机构包括一对固定夹轮22和一对活动夹轮23、气缸三24、转动臂25,两个固定夹轮22分别转动连接在支架一14和支架二15上,两个转动臂25的中部分别转动连接在支架一14和支架二15上,活动夹轮23转动连接在转动臂25的一端,且与固定夹轮22前后对应,两个气缸三24的底端分别铰接在支架一14和支架二15上,气缸三24的输出端与转动臂25远离活动夹轮23的一端铰接。As shown in Figures 8-9, the clamping mechanism includes a pair of fixed clamp wheels 22, a pair of movable clamp wheels 23, a cylinder three 24, and a rotating arm 25. The two fixed clamp wheels 22 are respectively rotatably connected to bracket one 14 and bracket two. On 15, the middle part of two pivoting arms 25 is pivotally connected on support one 14 and support two 15 respectively, and movable clip wheel 23 is pivotally connected on an end of pivoting arm 25, and is corresponding with fixed clip wheel 22 before and after, and two cylinders three 24 The bottom end of the cylinder is respectively hinged on the support one 14 and the support two 15, and the output end of the cylinder three 24 is hinged away from an end of the movable clamp wheel 23 with the rotating arm 25.

常态下,固定夹轮22和活动夹轮23之间的间距大于中转架11的纵向宽度,当中转架11架设在支架一14和支架二15上并通过浮动对中单元21矫正位置后,活动夹轮23在气缸三24的带动下夹紧中转架11,使中转架11夹持在固定夹轮22和活动夹轮23之间。Under normal conditions, the distance between the fixed clamp wheels 22 and the movable clamp wheels 23 is greater than the longitudinal width of the intermediate frame 11, and the intermediate frame 11 is erected on the first bracket 14 and the second bracket 15 and corrected by the floating centering unit 21. The clip wheel 23 clamps the transfer frame 11 under the drive of the cylinder three 24, so that the transfer frame 11 is clamped between the fixed clip wheel 22 and the movable clip wheel 23.

如图9所示,支架一14和支架二15上设置有用于夹紧中转架11左右两端的固定机构,固定机构包括四组气缸四27和夹板26,分别两两设置在支架一14和支架二15上。气缸四27横向设置在支架一14和支架二15上,夹板26设置在气缸四27的输出端上且与中转架11的左右两端相对应。当气缸四27动作带动夹板26将中转架11的横向两侧夹紧后,固定夹轮22和活动夹轮23夹持住中转架11纵向前后两侧。防止中转架11在工作过程中位移。As shown in Figure 9, bracket one 14 and bracket two 15 are provided with fixing mechanisms for clamping the left and right ends of the transfer frame 11. The fixing mechanisms include four groups of cylinders four 27 and splints 26, which are arranged on bracket one 14 and bracket respectively. Two 15 on. Cylinder four 27 is horizontally arranged on support one 14 and support two 15, and splint 26 is arranged on the output end of cylinder four 27 and corresponds to the left and right ends of transfer frame 11. After cylinder 4 27 moves and drives splint 26 to clamp the lateral sides of transfer frame 11, the fixed clamping wheels 22 and movable clamping wheels 23 clamp the transfer frame 11 longitudinally front and rear sides. Prevent the transfer frame 11 from shifting during work.

工作原理:步骤一,先将空的存储花篮2通过机械手等辅助工具抓至中转架11的送料输送带12上,然后将中转架11通过AGV小车装载在支架一14和支架二15上。步骤二,空的存储花篮2通过送料输送带12送入机架1上的进料输送带3。步骤三,进料输送带3将存储花篮2传送至位于下方的输送轮组5上。步骤四,输送板8在丝杆模组二9的带动下将硅晶片10送至存储花篮2内的支撑板28上,每输送一块硅晶片10后,提升机构7提升存储花篮2一定高度。步骤五,存储花篮2内装满后,提升机构7将存储花篮2提升至位于上方的输送轮组5的滚轮52上方。在提升之前,上方的输送轮组5在气缸一6的带动下向外移动。待存储花篮2到达其上方时,输送轮组5复位支撑存储花篮2。步骤六,位于上方的输送轮组5将存储花篮2输送至出料输送带4上。步骤七,装满硅晶片10的存储花篮2从出料输送带4送入中转架11的回料输送带13上。步骤八,通过AGV小车将中转架11运输至下一道工序处。有效解决了各工序之间距离远的问题;且中转架11上存储花篮2一进一出的设计,大大提升了各工序的工作效率,无需停车。Working principle: Step 1, first grab the empty storage flower basket 2 onto the feeding conveyor belt 12 of the transfer frame 11 through auxiliary tools such as manipulators, and then load the transfer frame 11 on the first bracket 14 and the second bracket 15 through the AGV trolley. Step 2, the empty storage flower basket 2 is sent to the feeding conveyor belt 3 on the frame 1 through the feeding conveyor belt 12 . Step 3, the feeding conveyor belt 3 transfers the storage flower basket 2 to the conveying wheel set 5 located below. Step 4, the delivery plate 8 sends the silicon wafer 10 to the support plate 28 in the storage flower basket 2 under the drive of the screw module 2 9, and after each silicon wafer 10 is transported, the lifting mechanism 7 lifts the storage flower basket 2 to a certain height. Step 5, after the storage flower basket 2 is full, the lifting mechanism 7 lifts the storage flower basket 2 above the roller 52 of the conveying wheel set 5 located above. Before lifting, the conveying wheel group 5 above moves outwards under the drive of cylinder one 6. When the storage flower basket 2 reaches its top, the delivery wheel set 5 resets to support the storage flower basket 2 . Step 6, the conveying wheel set 5 located above conveys the storage flower basket 2 to the discharge conveyor belt 4 . Step 7, the storage basket 2 filled with silicon wafers 10 is sent from the output conveyor belt 4 to the return conveyor belt 13 of the transfer rack 11 . Step eight, transport the transfer frame 11 to the next process by the AGV trolley. The problem of long distances between the various processes is effectively solved; and the design of storing flower baskets 2 on the transfer frame 11 one in and one out greatly improves the working efficiency of each process without parking.

尽管已经示出和描述了本发明的实施例,对于本领域的普通技术人员而言,可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型,本发明的范围由所附权利要求及其等同物限定。Although the embodiments of the present invention have been shown and described, those skilled in the art can understand that various changes, modifications and substitutions can be made to these embodiments without departing from the principle and spirit of the present invention. and modifications, the scope of the invention is defined by the appended claims and their equivalents.

Claims (7)

1. A basket elevator for storing silicon wafers is characterized in that: the silicon wafer storage and transportation device comprises a plurality of storage flower baskets (2) for storing silicon wafers (10), a rack (1), a feeding conveyer belt (3), a discharging conveyer belt (4), at least one group of conveying wheel sets (5) for feeding and at least one group of conveying wheel sets (5) for discharging, a lifting mechanism (7), a feeding mechanism, a transfer frame (11) and a support, wherein the feeding conveyer belt (3) is sequentially connected with the conveying wheel sets (5) for feeding, the discharging conveyer belt (4) is sequentially connected with the conveying wheel sets (5) for discharging, the feeding mechanism is positioned above the feeding conveyer belt (3) and the conveying wheel sets (5) for feeding, a cylinder I (6) is transversely arranged on the rack (1), the cylinder I (6) can drive the conveying wheel sets (5) for discharging to transversely move, the feeding mechanism is used for feeding the silicon wafers (10) into the storage flower baskets (2), the lifting mechanism (7) can lift the storage flower baskets (2) on the conveying wheel sets (5) for feeding to the conveying wheel sets (5) for discharging, the lifting module (7) comprises a pair of screw rod bodies (71) and a lifting module (72) and a pair of screw rods (71) and a lifting module body (72) for driving the lifting module (1) and lifting module (71), the connecting rod (73) is vertically arranged on the lifting body (72), one end of the supporting block (74) is hinged to the connecting rod (73), a driver used for driving the supporting block (74) to rotate is arranged on the connecting rod (73), the support is arranged at the feeding and discharging end of the feeding conveying belt (3) and the discharging conveying belt (4) of the rack (1), the support is used for supporting the transfer frame (11), the feeding conveying belt (12) and the returning conveying belt (13) which can be connected with the feeding conveying belt (3) and the discharging conveying belt (4) are arranged on the transfer frame (11), and a driving mechanism used for driving the feeding conveying belt (12) and the returning conveying belt (13) to rotate is arranged on the support.
2. The basket elevator for storing silicon wafers as set forth in claim 1, wherein: conveying wheelset (5) are including support frame (51), a plurality of gyro wheel (52), motor (53), and a plurality of gyro wheel (52) rotate in proper order along direction of delivery and connect on support frame (51), and a plurality of gyro wheel (52) pass through the driving belt transmission meshing, motor (53) and gyro wheel (52) are coaxial continuous, are used for support frame (51) of conveying wheelset (5) of feeding to fix on frame (1), and support frame (51) of conveying wheelset (5) for the ejection of compact sets up on the output of cylinder (6).
3. The basket elevator for storing silicon wafers as set forth in claim 1, wherein: a plurality of rows of supporting plates (28) used for storing the silicon wafers (10) are vertically arranged in the storage flower basket (2), each row of supporting plates (28) are transversely arranged at equal intervals, and the top end of each supporting plate (28) is provided with a bending part (29) which is bent upwards.
4. The basket elevator for storing silicon wafers as set forth in claim 3, wherein: the feeding mechanism comprises a conveying plate (8) and a second screw rod module (9), the second screw rod module (9) is used for driving the conveying plate (8) to move towards the direction of the storage flower basket (2), the conveying plate (8) is used for placing silicon wafers (10), the conveying plate (8) is in a comb shape with a plurality of clearance grooves, and the clearance grooves are arranged in a staggered mode with the supporting plate (28).
5. The basket lift for storing silicon wafers as set forth in claim 1, wherein: the support comprises a first support (14) and a second support (15), the first support (14) and the second support (15) are fixedly and symmetrically arranged, two ends of the transfer frame (11) can be supported on the first support (14) and the second support (15), and a driving mechanism for driving the feeding conveying belt (12) and the returning conveying belt (13) to rotate is arranged on the first support (14).
6. The basket lift for storing silicon wafers as set forth in claim 5, wherein: actuating mechanism includes drive gear (18), drive gear two (19) and two motor (20), drive gear (18), drive gear two (19) rotate to be connected on support one (14), two motor (20) set up on support one (14) and link to each other with drive gear one (18), drive gear two (19) respectively, coaxial coupling has band pulley one (16) and band pulley two (17) in the pivot of pay-off conveyer belt (12) and feed back conveyer belt (13), when transfer rack (11) fell on support one (14) and support two (15), band pulley one (16), band pulley two (17) mesh with drive gear one (18), drive gear two (19) respectively.
7. The basket elevator for storing silicon wafers as set forth in claim 5, wherein: two floating centering units (21) are respectively arranged on the first support (14) and the second support (15), and the four floating centering units (21) are used for aligning the position of the middle rotating frame (11) to a specified position.
CN202211190963.3A 2022-09-28 2022-09-28 A flower basket elevator for storing silicon wafers Pending CN115621177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211190963.3A CN115621177A (en) 2022-09-28 2022-09-28 A flower basket elevator for storing silicon wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211190963.3A CN115621177A (en) 2022-09-28 2022-09-28 A flower basket elevator for storing silicon wafers

Publications (1)

Publication Number Publication Date
CN115621177A true CN115621177A (en) 2023-01-17

Family

ID=84860416

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211190963.3A Pending CN115621177A (en) 2022-09-28 2022-09-28 A flower basket elevator for storing silicon wafers

Country Status (1)

Country Link
CN (1) CN115621177A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110113508A (en) * 2010-04-09 2011-10-17 (유)에스엔티 Wafer Transfer Device
CN206697459U (en) * 2017-03-09 2017-12-01 昆山豪恩特机器人自动化科技有限公司 Photovoltaic solar etches channel blanking machine
CN109326547A (en) * 2018-11-16 2019-02-12 罗博特科智能科技股份有限公司 Flower basket inner circulation device
CN111081821A (en) * 2020-01-08 2020-04-28 苏州映真智能科技有限公司 Automatic silicon wafer rewinding method for solar cell silicon wafer
CN212725261U (en) * 2020-06-30 2021-03-16 无锡市泰瑞电子设备制造有限公司 Transfer conveying line suitable for semiconductor wafer storage flower basket
CN113035761A (en) * 2021-03-05 2021-06-25 苏州市中辰昊科技有限公司 A silicon chip basket of flowers dispatch platform for double track material loading

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110113508A (en) * 2010-04-09 2011-10-17 (유)에스엔티 Wafer Transfer Device
CN206697459U (en) * 2017-03-09 2017-12-01 昆山豪恩特机器人自动化科技有限公司 Photovoltaic solar etches channel blanking machine
CN109326547A (en) * 2018-11-16 2019-02-12 罗博特科智能科技股份有限公司 Flower basket inner circulation device
WO2020098560A1 (en) * 2018-11-16 2020-05-22 罗博特科智能科技股份有限公司 Flower basket internal circulation device
CN111081821A (en) * 2020-01-08 2020-04-28 苏州映真智能科技有限公司 Automatic silicon wafer rewinding method for solar cell silicon wafer
CN212725261U (en) * 2020-06-30 2021-03-16 无锡市泰瑞电子设备制造有限公司 Transfer conveying line suitable for semiconductor wafer storage flower basket
CN113035761A (en) * 2021-03-05 2021-06-25 苏州市中辰昊科技有限公司 A silicon chip basket of flowers dispatch platform for double track material loading

Similar Documents

Publication Publication Date Title
CN103681420B (en) A kind of graphite boat automatic loading and unloading sheet system for tubular type PECVD
CN109733868B (en) Automatic feeding device for positioning aluminum disc
CN110465763B (en) Cell panel and bus bar welding equipment
CN107622966B (en) Intelligent transmission system for flower basket of photovoltaic silicon crystal battery piece
CN209374422U (en) A kind of automation loading and unloading system
CN219040495U (en) Photovoltaic cell piece equipment of arranging
CN203055881U (en) Silicon wafer automatic loading and unloading device for PECVD equipment
CN113035761A (en) A silicon chip basket of flowers dispatch platform for double track material loading
CN116393471B (en) Battery tray cleaning equipment
CN103035555A (en) Silicon wafer automatic loading and unloading device for PECVD equipment
CN115158940A (en) A three-dimensional storage warehouse for spindle counterweight screening
CN211719568U (en) Silk screen loading and unloading device
CN116259564A (en) A cleaning system for photovoltaic silicon wafers
CN108870938A (en) Full automatic atmospheric tunnel type apparatus for baking
CN217296254U (en) A small container welding conveyor line
CN115621177A (en) A flower basket elevator for storing silicon wafers
CN113385798B (en) A frame welding production line
CN220028097U (en) Battery tray cleaning equipment
CN110459645B (en) Welding method of battery plate and bus bar
CN218385246U (en) Battery preparation integrated system
CN218469601U (en) High-efficient loading attachment of electricity core preheater and contain its electricity core preheater
CN217780062U (en) Automatic staggered feeding and discharging mechanism
CN118387592A (en) Super-pulling assembly section production line
CN218069810U (en) Transfer device for silicon wafer storage flower basket
CN218069809U (en) Silicon wafer feeding device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Country or region after: China

Address after: 312000 No. 42-1, Houchengwan, Chengwan Village, Keyan Street, Keqiao District, Shaoxing City, Zhejiang Province

Applicant after: Zhejiang Yiweitong Intelligent Technology Co.,Ltd.

Address before: 312000 No. 42-1, Houchengwan, Chengwan Village, Keyan Street, Keqiao District, Shaoxing City, Zhejiang Province

Applicant before: Shaoxing Smecta Technology Information Consulting Co.,Ltd.

Country or region before: China

CB02 Change of applicant information
RJ01 Rejection of invention patent application after publication

Application publication date: 20230117

RJ01 Rejection of invention patent application after publication