CN115534146A - An IC chip manufacturing process capable of reducing defective rate - Google Patents

Abstract

The invention relates to the field of IC chip manufacturing, in particular to an IC chip manufacturing process capable of reducing the rate of defective products, comprising a support base, the top of the support base is fixedly equipped with a regulating and moving device, and the regulating and moving device A support transmission mechanism is fixedly installed at the inner bottom, and an auxiliary collection device is fixedly installed at the side end of the support transmission mechanism, and the auxiliary collection device includes a soft nylon brush, a second gear, an extension bracket, a first absorption cavity, a rotating Nylon brushes, circular arc isolation plates, contact rubber strips, spiral blades, the second absorption cavity, the Unicom transmission cavity, the third gear, the fourth gear and connecting support shafts, the first absorption cavity and the second absorption cavity The bodies are respectively fixedly installed at both ends of the bottom of the Unicom transmission cavity. Through the setting of the supporting transmission mechanism and the auxiliary collecting device, the purpose of preventing debris from splashing when the wafer disk is cut is achieved, and the defective rate of chips during cutting is reduced.

Description

An IC chip manufacturing process capable of reducing defective rate

technical field

The invention relates to the field of IC chip manufacturing, in particular to an IC chip manufacturing process capable of reducing defective rate.

Background technique

IC chip is a kind of miniature electronic device or component. It adopts a certain process to interconnect the transistors, diodes, resistors, capacitors, inductors and other components and wiring required in a circuit, and make them in one or several small semiconductor chips. On a wafer or a dielectric substrate, and then packaged in a package, it becomes a microstructure with the required circuit functions. There are still some problems in the production of existing IC chips, such as:

When the existing IC chip slicing device is in use, since there is no anti-splash device around the dicing knife, when the dicing knife cuts the wafer, the debris will splash around. When the debris moves from the wafer at a high speed, It is likely to leave scratches on other areas of the wafer to be cut, causing the wafers in other areas to be scrapped or worn out, which significantly increases the defective rate of IC chips. Therefore, a device is needed to solve the above problems. Make improvements.

Contents of the invention

Aiming at the problems in the prior art, the invention provides an IC chip manufacturing process which can reduce the defective rate.

The technical solution adopted by the present invention to solve the technical problem is: an IC chip manufacturing process that can reduce the defective rate, including a support base, the top of the support base is fixedly equipped with a regulating and moving device, and the regulating and moving device The inner bottom end of the inner bottom is fixedly installed with a supporting transmission mechanism, and the side end of the supporting transmission mechanism is fixedly installed with an auxiliary collection device, which is characterized in that: the auxiliary collection device includes a contact nylon soft brush, a second gear, an extension bracket, a first Absorption cavity, rotating nylon brush, circular arc isolation plate, contact rubber strip, spiral blade, second absorption cavity, Unicom transmission cavity, third gear, fourth gear and connecting support shaft, the first absorption cavity and the second absorption cavity are respectively fixedly installed at both ends of the bottom of the Unicom transmission cavity, the arc isolation plate is fixedly installed between the first absorption cavity and the second absorption cavity, and the extension brackets are respectively fixed on The front top ends of the first absorption cavity and the second absorption cavity, the second gear is rotatably mounted on the opposite side end of the extension bracket, and the contact nylon soft brush is fixedly mounted on the opposite side end of the second gear, The contact rubber strip is fixedly installed on the bottom ends of the first absorption cavity and the second absorption cavity, and the connecting support shaft is rotatably installed at the center of the side ends of the first absorption cavity and the second absorption cavity. The nylon brush is fixedly installed on the connecting support shaft, the fourth gear is fixedly installed on the connecting support shaft, and the third gear is engaged with the top end of the fourth gear, and the spiral blade rotates through the second absorption cavity and is fixedly installed on third gear.

Specifically, the supporting transmission mechanism includes a contact guide device and an auxiliary retractable device, and the auxiliary retractable device is fixedly installed on the top end of the contact guide device.

Specifically, the contact guide device includes a moving contact guide rod, a connecting side plate, a support sleeve, a limit spring, a moving plate, a guide transmission cavity, a first gear, a cutting blade, a first transmission gear, and a transmission tooth belt. , the second transmission gear and the output motor, the support sleeve is symmetrically and fixedly installed on the bottom of the front end of the connecting side plate, the limit spring is fixedly installed on the inner top of the support sleeve, and the moving plate is slidably inserted into the support The inner bottom end of the casing, and the moving contact guide rod slides through the connecting side plate and the supporting sleeve and is fixedly installed on the moving board, and the guide transmission cavity is symmetrically and fixedly installed on the rear side of the moving board. The first gear is fixedly mounted on the center of both sides of the cutting blade, the cutting blade is fixedly mounted on the output motor, and the output motor is fixedly mounted on the side end of the connecting side plate close to the support sleeve, and the first transmission gear is fixed Installed on the outer ring of the cutting blade close to the output motor, the transmission toothed belt is engaged with the outer ring of the first transmission gear, and the second transmission gear is engaged with the inner end of the transmission toothed belt away from the first transmission gear.

Specifically, the auxiliary retractable device includes a water storage tank, a U-shaped movable plunger, a return spring, a plugging head, a supporting connecting frame, a transmission pipeline, a first spray head, a second spray head, and a divergent transmission pipe, The water storage tank is fixedly installed on the top of the support connecting frame, the U-shaped movable insertion rod is slidably inserted into the center of the top of the water storage tank, and the plugging head is fixedly installed on the bottom end of the U-shaped mobile insertion rod close to the support connection frame , the return spring is fixedly installed between the plugging head and the water storage tank, the transmission pipeline is fixedly installed between the water storage tank and the supporting connection frame, and the first sprinkler head is fixedly installed at the end of the transmission pipeline away from the support connection frame At the bottom end, the branching transmission pipe is fixedly installed on the side end of the transmission pipeline away from the first shower head, and the second shower head is fixedly installed on the bottom end of the branching transmission pipe.

Specifically, the connecting side plate is fixedly installed inside the top end of the regulating and moving device, the support connecting frame is fixedly installed on the top end of the connecting side plate close to the moving contact guide rod, and the side end of the Unicom transmission cavity is away from the helical blade The second gear is fixedly installed on the top of the side end of the connecting side plate away from the support sleeve, the second gear meshes with the first gear, and the connecting support shaft is fixedly installed on the center of the side end of the second transmission gear close to the cutting blade.

Specifically, the radius of rotation of the contact rubber strip is lower than the bottom end of the helical blade, and the insides of the communicating transmission cavity, the first absorbing cavity and the second absorbing cavity are all set in a hollow state, and the communicating transmitting cavity The cavity, the first absorption cavity and the second absorption cavity communicate with each other, and the rotation radius of the contact nylon soft brush is higher than the central axis of the cutting blade.

Specifically, the bottom end of the guide transmission cavity is flush with the bottom end of the contact rubber strip, water outlets are provided on both sides of the interior of the second shower head, and water outlets are provided at the bottom end of the first shower head. The water outlet, the first spray head and the second spray head are evenly aligned vertically with the cutting blades.

Specifically, the moving contact guide rod is vertically aligned with the bottom of one end of the U-shaped moving insertion rod away from the return spring, the cutting blade is separated from the guiding transmission cavity by 1 cm, and the top of the guiding transmission cavity is inclined at 20° It is set that the end of the guide transmission cavity away from the support sleeve is vertically flush with the front ends of the first absorption cavity and the second absorption cavity, and the opposite side end of the contact nylon soft brush is attached to the surface of the cutting blade.

A kind of IC chip manufacturing device that can reduce defective rate, its manufacturing process comprises the following steps:

S1. First place the wafer on the inner base of the support base, then pair and connect the entire support transmission mechanism with the inside of the control and movement device, and then start the control and movement device to drive the support and transmission mechanism to move. At this time, the The output motor starts to drive the cutting blade to rotate. When the internal feeding of the moving device is adjusted, the cutting blade can be driven to contact with the wafer, and the required part can be cut off. At the same time, through the elasticity of the limit spring, the guide transmission cavity can be allowed to move upwards, so that the debris can be prevented from splashing when the cutting blade is cutting, and the debris can be prevented from wearing down the wafers in other areas;

S2. After that, when the cutting blade is rotating, it can also transmit power to the connecting support shaft through the transmission toothed belt, the first transmission gear and the second transmission gear, so that the connection support shaft rotates at the same time, and when the connection support shaft rotates, it can drive The rotating nylon brush rotates at the inner bottom of the first absorption cavity and the second absorption cavity, so that the debris on the inner wall of the first absorption cavity and the second absorption cavity can be removed to prevent the debris from being trapped in the first absorption cavity. At the same time, when the connecting support shaft rotates, the fourth gear and the third gear can also drive the helical blade to rotate, so that the helical blade can rotate inside the second absorption chamber, and the crushed The debris is transmitted to the external drainage equipment to realize the timely transmission of debris.

Beneficial effects of the present invention:

1. Through the setting of the supporting transmission mechanism, the cutting work of the chip can be carried out. The auxiliary alignment device is fixedly installed inside the supporting transmission mechanism, so that when the supporting transmission mechanism moves downward, the auxiliary alignment device will first contact with the wafer surface Contact, the auxiliary alignment device is fixedly installed with an isolation protection device, so that it can prevent debris from splashing during cutting, and reduce the probability of debris wearing the wafer, and a trigger device is fixed inside the supporting transmission mechanism, so that When the support transmission mechanism is in contact with the wafer, the transmission and drainage device inside the support transmission mechanism can be activated, so that the coolant inside the transmission and drainage device will flow to contact with the cutting knife inside the support transmission mechanism, preventing the cutting knife from overheating Phenomenon, improve the cutting durability of the cutting knife.

Second, through the setting of the auxiliary collection device, the collection and transmission of debris can be carried out. The self-adaptive rotating device is fixed and installed inside the auxiliary collecting device, so that the supporting transmission mechanism can drive the adaptive rotating device to rotate at the same time when cutting. At the same time, the self-adaptive rotating device fits the cutting knife inside the supporting transmission mechanism, so that the debris on the cutting knife can be swept away, and an internal cleaning device is fixedly installed inside the auxiliary collection device, and the internal cleaning device and the supporting transmission mechanism The matching connection of the internal transmission device is such that when the supporting transmission mechanism is started, it can also drive the internal cleaning device to rotate inside the auxiliary collection device, so that the cleaning work can be completed inside the auxiliary collection device. At the same time, through the internal cleaning device and the auxiliary collection device The drainage device inside the collection device is connected so that when the internal cleaning device is activated, the drainage device can be activated at the same time to complete the debris diversion work.

Description of drawings

The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

Fig. 1 is a schematic diagram of the main structure of the present invention;

Fig. 2 is a structural schematic diagram of a supporting transmission mechanism of the present invention;

Fig. 3 is a schematic diagram of a partially cut-away structure of the contact guide device of the present invention;

Fig. 4 is a schematic diagram of the structure of the side end of the contact guide device of the present invention;

Fig. 5 is a schematic diagram of the cutaway structure of the auxiliary retractable device of the present invention;

Figure 6 is a schematic structural view of the auxiliary retractable device of the present invention;

Fig. 7 is a schematic structural view of the auxiliary collecting device of the present invention;

Fig. 8 is a schematic diagram of the structure of the rear end of the auxiliary collection device of the present invention.

In the figure: 1-support transmission mechanism, 2-auxiliary collection device, 3-regulation and movement device, 4-support base, 11-contact guide device, 12-auxiliary retractable device, 111-moving contact guide rod, 112-connection Side plate, 113-support sleeve, 114-limit spring, 115-moving plate, 116-guide transmission cavity, 117-first gear, 118-cutting blade, 119-first transmission gear, 1110-transmission gear Belt, 1111-second transmission gear, 1112-output motor, 121-reservoir, 122-U-shaped movable plunger, 123-return spring, 124-blocking head, 125-supporting connecting frame, 126-transmission pipe, 127 -First spray head, 128-Second spray head, 129-Different transmission pipe, 21-Contact nylon soft brush, 22-Second gear, 23-Extended bracket, 24-First absorption chamber, 25- Rotating nylon brush, 26-arc isolation plate, 27-contact rubber strip, 28-spiral blade, 29-second absorption cavity, 210-unicom transmission cavity, 211-third gear, 212-fourth gear, 213 -Connect the support shaft.

detailed description

In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

As shown in Fig. 1-Fig. 8, a kind of IC chip manufacturing process that can reduce defective product rate described in the present invention, comprises support base 4, and the top of support base 4 is fixedly installed with control mobile device 3, and control mobile device The inner bottom end of 3 is fixedly installed with supporting transmission mechanism 1, and the side end of supporting transmission mechanism 1 is fixedly installed with auxiliary collection device 2, and it is characterized in that: auxiliary collection device 2 includes contact nylon soft brush 21, second gear 22, extension bracket 23. The first absorption cavity 24, the rotating nylon brush 25, the arc isolation plate 26, the contact rubber strip 27, the spiral blade 28, the second absorption cavity 29, the Unicom transmission cavity 210, the third gear 211, and the fourth gear 212 and connecting support shaft 213, the first absorption cavity 24 and the second absorption cavity 29 are respectively fixedly installed at both ends of the bottom of the Unicom transmission cavity 210, and the arc isolation plate 26 is fixedly installed between the first absorption cavity 24 and the second absorption cavity Between the two absorption chambers 29, the extension brackets 23 are respectively fixedly installed on the front top ends of the first absorption chamber 24 and the second absorption chamber 29, and the second gear 22 is rotatably installed on the opposite side ends of the extension brackets 23, contacting Nylon soft brush 21 is fixedly mounted on the opposite side end of the second gear 22, the contact rubber strip 27 is fixedly mounted on the bottom of the first absorption cavity 24 and the second absorption cavity 29, and the connecting support shaft 213 is rotatably mounted on the first At the center of the side ends of the absorption cavity 24 and the second absorption cavity 29, the rotating nylon brush 25 is fixedly mounted on the connection support shaft 213, the fourth gear 212 is fixedly mounted on the connection support shaft 213, and the third gear 211 meshes with the second At the top of the four gears 212 , the helical blade 28 rotates through the second absorption cavity 29 and is fixedly installed on the third gear 211 .

Specifically, the supporting transmission mechanism 1 includes a contact guide device 11 and an auxiliary retractable device 12, the auxiliary retractable device 12 is fixedly installed on the top of the contact guide device 11, and communicates with the auxiliary retractable device 12 through an external circulation supply device, This makes it possible to add cutting fluid to the interior of the auxiliary retracting device 12 in a circular manner.

Specifically, the contact guide device 11 includes a moving contact guide rod 111, a connecting side plate 112, a support sleeve 113, a limit spring 114, a moving plate 115, a guide transmission cavity 116, a first gear 117, a cutting blade 118, a second A transmission gear 119, a transmission toothed belt 1110, a second transmission gear 1111 and an output motor 1112. The support sleeve 113 is symmetrically and fixedly installed on the bottom of the front end of the connecting side plate 112, and the limit spring 114 is fixedly installed on the inner top of the support sleeve 113. , the moving board 115 is slidably inserted into the inner bottom of the supporting sleeve 113, and the moving contact guide rod 111 slides through the connecting side plate 112 and the supporting sleeve 113 and is fixedly installed on the moving board 115, and the guiding transmission cavity 116 is symmetrical Fixedly installed on the rear side of the movable board 115, the first gear 117 is fixedly installed on the center of both sides of the cutting blade 118, the cutting blade 118 is fixedly installed on the output motor 1112, and the output motor 1112 is fixedly installed on the connecting side plate 112 close to the support sleeve On the side end of the pipe 113, the first transmission gear 119 is fixedly installed on the outer ring of the cutting blade 118 close to the output motor 1112, the transmission toothed belt 1110 is engaged on the outer ring of the first transmission gear 119, and the second transmission gear 1111 is engaged on the outer ring of the output motor 1112. The drive toothed belt 1110 is away from the inner end of the first drive gear 119, and the limit distance that the moving plate 115 can move downwards does not exceed the inside of the support sleeve 113, so that the guide transmission cavity 116 can be prevented from moving and falling off.

Specifically, the auxiliary retractable device 12 includes a water storage tank 121, a U-shaped movable insertion rod 122, a return spring 123, a plugging head 124, a support connecting frame 125, a transmission pipe 126, a first spray head 127, a second spray head 128 and directional transfer pipe 129, the water storage tank 121 is fixedly installed on the top of the support connecting frame 125, the U-shaped mobile insertion rod 122 is slidably inserted in the top center of the water storage tank 121, and the plugging head 124 is fixedly installed on the U-shaped mobile insertion rod 122 is close to the bottom end of the support connecting frame 125, the return spring 123 is fixedly installed between the plugging head 124 and the water storage tank 121, the transmission pipe 126 is fixedly installed between the water storage tank 121 and the supporting connection frame 125, the first spray head 127 Fixedly installed on the bottom end of the transmission pipe 126 away from the support connecting frame 125, the branching transmission pipe 129 is fixedly installed on the side end of the transmission pipe 126 away from the first shower head 127, and the second shower head 128 is fixedly installed on the side end of the branching transmission pipe 126. The bottom end of the pipe 129 is fixedly installed on the top of the side end away from the plugging head 124 through the water storage tank 121 with a restricting sleeve frame suitable for the U-shaped movable insertion rod 122, so as to prevent the U-shaped movable insertion rod 122 from appearing when it rises. Caton phenomenon.

Specifically, the connecting side plate 112 is fixedly installed inside the top end of the regulating and moving device 3 , the support connecting frame 125 is fixedly installed on the top end of the connecting side plate 112 close to the moving contact guide rod 111 , and the side of the Unicom transmission cavity 210 away from the spiral blade 28 The end is fixedly installed on the top of the side end of the connecting side plate 112 away from the support sleeve 113, the second gear 22 meshes with the first gear 117, and the connecting support shaft 213 is fixedly installed on the center of the side end of the second transmission gear 1111 near the cutting blade 118, When the second transmission gear 1111 is rotating, it can drive the connecting support shaft 213 to rotate at the same time to complete the transmission of power.

Specifically, the radius of rotation of the contact rubber strip 27 is lower than the bottom end of the helical blade 28, and the insides of the Unicom transmission cavity 210, the first absorption cavity 24, and the second absorption cavity 29 are all set in a hollow state, and the communication transmission cavity Body 210, the first absorbing chamber 24 and the second absorbing chamber 29 communicate with each other, and the radius of rotation of the contact nylon soft brush 21 is higher than the central axis of the cutting blade 118, which can prevent the contact nylon soft brush 21 from appearing with the cutting blade 118 when rotating. The phenomenon of rotational interference.

Specifically, the bottom end of the guide transmission cavity 116 is flush with the bottom end of the contact rubber strip 27, the inner sides of the second spray head 128 are provided with water outlets, and the bottom end of the first shower head 127 is provided with water outlets. , the first shower head 127 and the second shower head 128 are evenly aligned vertically to the cutting blade 118 , so that the cutting fluid can flow accurately onto the cutting blade 118 and improve the cooling performance of the cutting blade 118 .

Specifically, the moving contact guide rod 111 is vertically aligned with the bottom of one end of the U-shaped moving insertion rod 122 away from the return spring 123, the cutting blade 118 is spaced 1 cm from the guiding transmission cavity 116, and the top of the guiding transmission cavity 116 is inclined at 20° Setting, the end of the guide transmission cavity 116 away from the support sleeve 113 is vertically flush with the front ends of the first absorption cavity 24 and the second absorption cavity 29, and the opposite side end of the contact nylon soft brush 21 is attached to the surface of the cutting blade 118 , when the contact nylon soft brush 21 is rotating, the debris adhering to the cutting blade 118 surface can be swept downwards.

A kind of IC chip manufacturing device that can reduce defective rate, its manufacturing process comprises the following steps:

S1. First place the wafer on the inner base of the support base 4, then pair and connect the entire support transmission mechanism 1 with the inside of the control and control mobile device 3, and then start the control and control mobile device 3 to drive the support and transmission mechanism 1 to move, At this time, the output motor 1112 can be started to drive the cutting blade 118 to rotate. When the feed operation is performed inside the moving device 3, the cutting blade 118 can be driven to contact with the wafer, and the required part can be cut off. When the cutting blade 118 When descending, the guide transmission cavity 116 will contact the wafer in advance, and at the same time, through the elasticity of the limit spring 114, the guide transmission cavity 116 can be allowed to move upward, so that debris can be prevented from splashing when the cutting blade 118 is cutting , to prevent debris from wearing out wafers in other areas;

S2. Afterwards, when the cutting blade 118 is rotating, it can also transmit power to the connection support shaft 213 through the transmission toothed belt 1110, the first transmission gear 119 and the second transmission gear 1111, so that the connection support shaft 213 rotates at the same time. When the connection support When the shaft 213 rotates, it can drive the rotating nylon brush 25 to rotate at the inner bottom of the first absorption chamber 24 and the second absorption chamber 29, so that the inner walls of the first absorption chamber 24 and the second absorption chamber 29 can Debris is removed to prevent debris from accumulating inside the first absorption cavity 24 and the second absorption cavity 29. At the same time, when the connecting support shaft 213 rotates, the fourth gear 212 and the third gear 211 can also drive the helical blade 28 Rotate, so that the helical blade 28 can rotate inside the second absorption cavity 29, and transfer the debris to the drainage equipment outside, so as to realize the work of timely conduction of the debris.

Working principle: When in use, first place the wafer tray to be cut on the base inside the support base 4, and then start the regulating and moving device 3 to drive the connecting side plate 112 to move and feed. At this time, the output The motor 1112 starts to drive the cutting blade 118 to rotate. When the connecting side plate 112 moves downward, it can drive the cutting blade 118 to contact the wafer disk to perform the work of cutting the wafer disk. At this time, the guide transmission cavity 116 maintains the normal state , the limit spring 114 will drive the guide transmission cavity 116 downward to exceed the bottom end of the cutting blade 118, so that when the cutting blade 118 moves downward, the guide transmission cavity 116 will contact the wafer disk in advance. At this time, when When the cutting blade 118 cuts the wafer disk, it covers the slit of the wafer disk by guiding the transmission cavity 116, so that the debris generated by cutting can be prevented from splashing around, and the yield rate of the chip during production can be improved. At this time, By guiding the end of the transmission cavity 116 away from the support sleeve 113 to align with the first absorption cavity 24 and the second absorption cavity 29, the end of the second absorption cavity 29 close to the spiral blade 28 can be connected to the external absorption device, Then start the absorption device, so that the gas inside the first absorption cavity 24 and the second absorption cavity 29 can be absorbed, and the debris is fed to the inside of the absorption device. , so that the transmission direction of debris can be limited, and the absorption efficiency of the first absorption cavity 24 and the second absorption cavity 29 can be improved. At the same time, when the guide transmission cavity 116 moves upward, it can also drive the moving contact guide rod 111 Rising, so that the extruded U-shaped movable plunger 122 moves upwards, and the plugging head 124 is fixedly installed on the bottom of the U-shaped movable plunger 122, so that the U-shaped movable plunger 122 can drive the plugging head 124 when rising. It is separated from the center of the bottom end of the water storage tank 121, so that the cutting fluid inside the water storage tank 121 can be released, causing the cutting fluid to flow to the first shower head 127 and the second shower head through the inside of the transmission pipe 126 and the diverting transmission pipe 129 128, at this time, through the bottom of the first shower head 127 and the inner sides of the second shower head 128, there are water outlet holes, and the first shower head 127 and the second shower head 128 are connected with the cutting The blades 118 are vertically aligned, so that the cutting fluid inside the first shower head 127 will flow to the top of the cutting blade 118, so that the temperature of the cutting blade 118 can be cooled, and the cutting fluid can pass through the inner sides of the second shower head 128 and the cutting blade 118. The two sides of the two sides are close together, so that the cutting liquid flowing out of the second shower head 128 will flow down along the surface of the cutting blade 118, so that the cutting blade 118 can be cooled, and the debris attached to the side end of the cutting blade 118 will be removed. At the same time, when the debris enters the interior of the first absorption cavity 24 and the second absorption cavity 29, it is fixedly installed in the first absorption cavity 24 and the second absorption cavity through the communication transmission cavity 210 body 29, so that the interior of the first absorption cavity 24 and the second absorption cavity 29 can communicate, thereby facilitating the first absorption cavity The debris inside the body 24 is conducted to the inside of the second absorption cavity 29. At this time, when the cutting blade 118 rotates, the first transmission gear 119 can also be driven to rotate, and the transmission toothed belt 1110 is engaged between the first transmission gear 119 and the second transmission gear 119. On the outer ring of the second transmission gear 1111, the first transmission gear 119 can drive the second transmission gear 1111 to rotate at the same time when rotating, and the first absorption cavity 24 and the second absorption cavity 29 are fixedly installed by connecting the support shaft 213 to rotate through the first absorption cavity 24 and the second absorption cavity 29 On the second transmission gear 1111, when the second transmission gear 1111 is rotating, it can drive the connecting support shaft 213 to rotate, and when the connecting support shaft 213 is rotating, it can drive the rotating nylon brush 25 between the first absorption cavity 24 and the second absorption cavity. The inner bottom of the two absorption chambers 29 rotates so that the debris on the inner walls of the first absorption chamber 24 and the second absorption chamber 29 can be swept away to prevent debris from accumulating in the first absorption chamber 24 and the second absorption chamber. On the inner wall of the cavity 29, at this time, the fourth gear 212 and the third gear 211 can also be driven to rotate by connecting the support shaft 213 when rotating, and the third gear 211 rotates through the second absorption cavity 29 and is suitable for the spiral blade 28. Matching connection, so that the third gear 211 can drive the spiral blade 28 to rotate inside the top of the second absorption cavity 29 when rotating, so that the debris at the top of the second absorption cavity 29 can be moved away from the second absorption cavity 29 One end of the first absorbing cavity 24 transmits and diverts water, and the radius of rotation of the rotating nylon brush 25 is lower than the bottom end of the helical blade 28, so that the rotating nylon brush 25 can be prevented from interfering with the helical blade 28 while rotating, and at the same time, the cutting blade 118 when rotating, can drive the first gear 117 and the second gear 22 to rotate simultaneously, and the second gear 22 can drive the inner side that contacts nylon soft brush 21 to rotate on the outer surface of cutting blade 118 when rotating, so that the cutting blade 118 can be cut The debris attached on the blade 118 sweeps and removes. At this time, the radius of rotation of the soft nylon brush 21 is higher than the support shaft of the cutting blade 118, so that the soft nylon brush 21 can be prevented from interfering with the cutting blade 118 when rotating. At the same time, space 1 centimeter between the opposite side ends of the guide transmission cavity 116 and the cutting blade 118, and the top of the guide transmission cavity 116 is provided with a 20° slope, so that the contact nylon soft brush 21 is cleaned on the cutting blade 118. When there is debris, the debris will fall down from the gap between the guide transmission cavity 116 and the cutting blade 118, so that the debris can enter the guide transmission cavity 116 for diversion work and complete the work.

The basic principles, main features and advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above-mentioned embodiments, and the descriptions in the above-mentioned embodiments and specification only illustrate the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention will also There are various changes and improvements, and these changes and improvements all fall within the scope of protection of the present invention. The protection scope of the present invention is defined by the appended claims and their equivalents.

Claims (9)

1. An IC chip manufacturing device capable of reducing defective rate comprises a supporting base (4), wherein a regulating and controlling moving device (3) is fixedly mounted at the top end of the supporting base (4), a supporting transmission mechanism (1) is fixedly mounted at the bottom end inside the regulating and controlling moving device (3), an auxiliary collecting device (2) is fixedly mounted at the side end of the supporting transmission mechanism (1), and the IC chip manufacturing device is characterized in that: the auxiliary collecting device (2) comprises a contact nylon soft brush (21), a second gear (22), an extension bracket (23), a first absorption cavity (24), a rotary nylon brush (25), an arc isolation plate (26), a contact rubber strip (27), a spiral blade (28), a second absorption cavity (29), a communication transmission cavity (210), a third gear (211), a fourth gear (212) and a connecting support shaft (213), wherein the first absorption cavity (24) and the second absorption cavity (29) are respectively and fixedly arranged at two ends of the bottom of the communication transmission cavity (210), the arc isolation plate (26) is fixedly arranged between the first absorption cavity (24) and the second absorption cavity (29), the extension bracket (23) is respectively and fixedly arranged at the top ends of the front sides of the first absorption cavity (24) and the second absorption cavity (29), the second gear (22) is rotatably arranged at the opposite side ends of the extension bracket (23), the contact nylon soft brush (21) is fixedly arranged at the opposite side ends of the second gear (22), the contact rubber strip (27) is fixedly arranged at the bottom end of the first absorption cavity (24) and the center of the second absorption cavity (29), rotate nylon brush (25) fixed mounting on connecting support shaft (213), fourth gear (212) fixed mounting is on connecting support shaft (213), just third gear (211) meshing is at the top of fourth gear (212), helical blade (28) rotate and run through second absorption cavity (29) fixed mounting on third gear (211).

2. The apparatus for manufacturing IC chips according to claim 1, wherein: the supporting transmission mechanism (1) comprises a contact guide device (11) and an auxiliary winding and unwinding device (12), and the auxiliary winding and unwinding device (12) is fixedly installed on the top end of the contact guide device (11).

3. The apparatus of claim 2, wherein: the contact guiding device (11) comprises a movable contact guide rod (111), a connecting side plate (112), a supporting sleeve (113), a limiting spring (114), a movable inserting plate (115), a guide transmission cavity (116), a first gear (117), a cutting blade (118), a first transmission gear (119), a transmission toothed belt (1110), a second transmission gear (1111) and an output motor (1112), wherein the supporting sleeve (113) is symmetrically and fixedly installed at the bottom of the front end of the connecting side plate (112), the limiting spring (114) is fixedly installed at the top end of the supporting sleeve (113), the movable inserting plate (115) is slidably inserted at the bottom end of the supporting sleeve (113), the movable contact guide rod (111) is slidably and penetratingly connected with the side plate (112) and the supporting sleeve (113) and is fixedly installed on the movable inserting plate (115), the guide transmission cavity (116) is symmetrically and fixedly installed at the rear side of the movable inserting plate (115), the first gear (117) is fixedly installed at the centers of the two sides of the cutting blade (118), the cutting blade (118) is fixedly installed on the output motor (1112), the output motor (1112) is fixedly installed at the side end of the connecting side plate (119), and the outer ring (113) is close to the output motor (1112), the transmission toothed belt (1110) is meshed with the outer ring of the first transmission gear (119), and the second transmission gear (1111) is meshed with one end, far away from the first transmission gear (119), of the transmission toothed belt (1110).

4. The apparatus of claim 3, wherein: the auxiliary retraction device (12) comprises a water storage tank (121), a U-shaped movable insertion rod (122), a return spring (123), a sealing head (124), a support connecting frame (125), a transmission pipeline (126), a first spray head (127), a second spray head (128) and a branch transmission pipeline (129), the water storage tank (121) is fixedly installed at the top end of the support connecting frame (125), the U-shaped movable insertion rod (122) is inserted in the center of the top end of the water storage tank (121) in a sliding mode, the sealing head (124) is fixedly installed at the bottom end, close to the support connecting frame (125), of the U-shaped movable insertion rod (122), the return spring (123) is fixedly installed between the sealing head (124) and the water storage tank (121), the transmission pipeline (126) is fixedly installed between the water storage tank (121) and the support connecting frame (125), the first spray head (127) is fixedly installed at the bottom end, far away from the support connecting frame (125), of the transmission pipeline (126), the branch transmission pipeline (129) is fixedly installed at the bottom end, far away from the first spray head (128), and the second spray head (129) are fixedly installed at the bottom end of the transmission pipeline (126).

5. The apparatus of claim 4, wherein: the connecting side plate (112) is fixedly installed inside the top end of the regulating and controlling moving device (3), the supporting connecting frame (125) is fixedly installed on the top end, close to the movable contact guide rod (111), of the connecting side plate (112), the lateral end, deviating from the spiral blade (28), of the communicating transmission cavity (210) is fixedly installed at the top of the lateral end, far away from the supporting sleeve (113), of the connecting side plate (112), the second gear (22) is meshed with the first gear (117), and the connecting supporting shaft (213) is fixedly installed at the center of the lateral end, close to the cutting blade (118), of the second transmission gear (1111).

6. The apparatus for manufacturing IC chips according to claim 5, wherein: the rotating radius of the contact rubber strip (27) is lower than the bottom end of the spiral blade (28), the interiors of the communicating and transmitting cavity (210), the first absorption cavity (24) and the second absorption cavity (29) are all arranged in a hollow state, the communicating and transmitting cavity (210), the first absorption cavity (24) and the second absorption cavity (29) are communicated, and the rotating radius of the contact nylon soft brush (21) is higher than the central shaft of the cutting blade (118).

7. The apparatus of claim 6, wherein: the bottom of direction transmission cavity (116) and the bottom parallel and level of contact rubber strip (27), the delivery port has been seted up to the inside both sides of second shower head (128), the delivery port has been seted up to the bottom of first shower head (127), first shower head (127) and the even cutting blade (118) of second shower head (128) are aimed at perpendicularly.

8. The apparatus of claim 7, wherein: the bottom of one end of a U-shaped movable insertion rod (122) away from a return spring (123) is vertically aligned with the movable contact guide rod (111), the interval between a cutting blade (118) and a guide transmission cavity (116) is 1 cm, the top end of the guide transmission cavity (116) is in 20-degree slope arrangement, one end of the guide transmission cavity (116) away from a support sleeve (113) is vertically flush with the front ends of a first absorption cavity (24) and a second absorption cavity (29), and the opposite side end of a contact nylon soft brush (21) is attached to the surface of the cutting blade (118).

9. The apparatus as claimed in claim 7, wherein the manufacturing process comprises the steps of:

s1, a wafer is placed on an inner base of a supporting base (4), the supporting transmission mechanism (1) is integrally connected with the inside of a regulating and controlling moving device (3) in a matching mode, the regulating and controlling moving device (3) is started to drive the supporting transmission mechanism (1) to move, at the moment, an output motor (1112) can be started to drive a cutting blade (118) to rotate, when the inside of the regulating and controlling moving device (3) is fed, the cutting blade (118) can be driven to be in contact with the wafer, a needed part can be cut off, when the cutting blade (118) descends, a guide transmission cavity (116) can be in contact with the wafer in advance, meanwhile, the guide transmission cavity (116) can be allowed to move upwards through the elasticity of a limiting spring (114), so that the scrap anti-splashing work can be carried out when the cutting blade (118) cuts, and the scraps are prevented from abrading the wafers in other areas;

s2, then, when the cutting blade (118) rotates, power can be transmitted to the connecting supporting shaft (213) through the transmission toothed belt (1110), the first transmission gear (119) and the second transmission gear (1111) to enable the connecting supporting shaft (213) to rotate simultaneously, when the connecting supporting shaft (213) rotates, the rotating nylon brush (25) can be driven to rotate at the bottom ends of the inner portions of the first absorption cavity (24) and the second absorption cavity (29), debris on the inner walls of the first absorption cavity (24) and the second absorption cavity (29) can be removed, the debris can be prevented from being accumulated inside the first absorption cavity (24) and the second absorption cavity (29), and meanwhile, when the connecting supporting shaft (213) rotates, the spiral blade (28) can be driven to rotate through the fourth gear (212) and the third gear (211), so that the spiral blade (28) can rotate inside the second absorption cavity (29), the debris can be transmitted to external drainage equipment, and timely conduction of the debris can be achieved.

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