CN115523307A - Slot valve device - Google Patents

Abstract

The invention relates to a slot valve device used in chip manufacturing, which comprises a cavity surrounded by a top plate, a bottom plate, side plates on both sides and end plates at both ends, and a passage through the cavity is arranged on both sides of the cavity. and channel 2, there is a liftable support frame in the cavity, a valve plate is provided on the side of the support frame facing channel 2, a sealing ring is provided on the surface of the valve plate, and a drive valve plate is provided between the valve plate and the support frame to seal channel 2 Sealed cylinder, the bottom of the cavity is equipped with a lifting cylinder that drives the support frame up and down, the top plate is installed on the top of the cavity, the side of the valve plate facing the sealed cylinder is provided with a notch, and the extending end of the piston rod of the sealed cylinder is provided with a cylinder joint. Insert it into the notch, and the connecting screw passes through the valve plate to be threaded with the cylinder joint; the upper corner of the support frame away from the valve plate is provided with a chamfered surface, and the corresponding side plate is provided with a guide block matching the chamfered surface. The device is used in wafer processing, and the sealing ring is easy to replace, and at the same time, the sealing is good and the use is reliable.

Description

A slot valve device

technical field

The invention relates to a device used in the chip manufacturing process, in particular to a slot valve device arranged between a transfer device and a process device.

Background technique

With the miniaturization of semiconductors, among various issues that affect wafer productivity, especially suppression of contamination (particles) and removal of contamination sources by replacing them in the shortest time after generation have become important factors for improving productivity. For this reason, when the wafer is processed in the process equipment, it is necessary to evacuate the process equipment to avoid the influence of pollutants. For this reason, a slot valve device is used, which is used between the transfer device and the process device, and its function is to provide a transfer channel for the wafer from the transfer device to the process device. After the wafer is transferred, the channel is closed, which has Good sealing ensures that a high vacuum environment can be formed in the process device.

The trough valve device in the prior art mainly includes a cavity with a rectangular cross section, which is surrounded by a top plate, a bottom plate, side plates on both sides and end plates at both ends, and there are through cavities on both sides of the cavity. Channel 1 and Channel 2 of the body, there is a liftable support frame in the cavity, a valve plate is provided on the side of the support frame facing Channel 1 and Channel 2, and an O-shaped sealing ring is provided on the surface of the valve plate, between the valve plate and the support frame There is a sealing cylinder for driving the sealing channel 1 or channel 2 of the valve plate, and a lifting cylinder is provided at the bottom of the cavity to drive the support frame up and down. The lifting cylinder pushes the valve plate to rise, and at the same time, the sealing cylinder pushes the valve plate to move, so that the sealing ring seals channel one and channel two, thereby achieving sealing.

Its disadvantages are: because the sealing ring is prone to failure during frequent use and needs to be replaced regularly, the sealing ring in the existing trough valve device is difficult to install and disassemble. In order to replace the sealing ring, it is necessary to disassemble the trough valve device as a whole. For maintenance, the total maintenance time required is long, which affects the efficiency of equipment use.

Contents of the invention

The purpose of the present invention is to provide a groove valve device, which makes it easy to replace the sealing ring, and at the same time, it has good sealing and is reliable in use.

The object of the present invention is achieved in this way: a slit valve device includes a cavity with a rectangular cross section, the cavity is surrounded by a top plate, a bottom plate, side plates on both sides and end plates at both ends, the cavity There are channel 1 and channel 2 that run through the cavity on both sides. There is a support frame that can be lifted up and down in the cavity. There is a sealing cylinder for driving the sealing channel 2 of the valve plate in between, and a lifting cylinder for driving the supporting frame to lift is arranged at the bottom of the cavity. A notch is provided on the side of the valve plate facing the sealed cylinder, and a cylinder joint is provided at the protruding end of the piston rod of the sealed cylinder. The upper corner of the support frame away from the valve plate is provided with a beveled surface, and the corresponding side plate is provided with a wedge-shaped guide block. When the lifting cylinder lifts the support frame to the sealing position, the beveled surface just contacts the guide block.

The trough valve device of the present invention is installed between the transmission device and the process device, and the outer port of the channel 2 is sealed and connected with the process device. When working, the lifting cylinder can push the support frame to move up and down, and the support frame drives the valve plate to move up and down at the same time. When the valve plate is lowered, it can give way to channel 1 and channel 2 that run through the cavity, so that the manipulator of the transfer device can pass through channel 1 and channel 2 and extend into the process device to take out the wafer or place the wafer in the process device Inside, after the manipulator leaves, the lifting cylinder rises to push the valve plate to the height of channel 1 and channel 2. At this time, the sealing cylinder moves to push the valve plate to channel 2, and the sealing ring seals on the outer peripheral edge of channel 2. When the lifting cylinder lifts the support frame up to the sealing position, the beveled surface just touches the guide block, so that the sealing ring can be fully pressed against the edge of channel 2 to achieve a good seal, which can convert the upward thrust of the lifting cylinder In order to ensure the sealing pressure, the process device can be vacuumed after sealing, and the wafer can be processed in a vacuum state. Because the piston rod of the cylinder usually cannot withstand the side thrust, when the sealing cylinder moves, the reaction force will push the piston rod extension end of the lifting cylinder sideways, and the beveled surface cooperates with the guide block to just offset this side thrust. Ensure that the lifting cylinder can work reliably for a long time. When disassembling and replacing the sealing ring, the top cover can be removed. After loosening the connecting screws, the valve plate can be pulled out directly from the upper part, and then reset after replacing the sealing ring. It is very convenient to disassemble. The device can be used in wafer processing.

As a further improvement of the present invention, the notch is in a figure-eight shape with a large bottom and a small top, the cylinder joint is T-shaped, and the upper part of the notch matches the T-shaped notch. The eight-shaped notch makes it easy for the valve plate to be separated from the cylinder joint, so that the valve plate can be taken out more conveniently, and the cylinder joint is T-shaped for easy positioning and installation.

As a further improvement of the present invention, a handle screw is provided on the upper side of the valve plate. The handle screw further facilitates the removal of the valve plate.

As a further improvement of the present invention, there are two lifting cylinders correspondingly, and three sealing cylinders are arranged at intervals along the length direction of the valve plate.

As a further improvement of the present invention, a notch is provided on the support frame corresponding to the sealed cylinder, and the sealed cylinder is embedded and installed in the notch. This structure can greatly reduce the thickness of the device and make its structure more compact.

Description of drawings

Figure 1 is a schematic diagram of the three-dimensional structure of the present invention.

Fig. 2 is a front view of the present invention.

Fig. 3 is a view along the line A-A of Fig. 2 .

Fig. 4 is a first schematic diagram of the internal three-dimensional structure of the present invention.

Fig. 5 is a second schematic diagram of the internal three-dimensional structure of the present invention.

Fig. 6 is the installation drawing of support frame, lifting cylinder and sealing cylinder.

Fig. 7 is a plan view of the supporting frame, lifting cylinder and sealing cylinder corresponding to Fig. 6 .

Fig. 8 is a diagram of the installation structure of the sealing oil cylinder and the valve plate.

In the figure, 1 bottom plate, 2 end plate, 3 top plate, 4 side plate, 5 channel one, 6 lifting cylinder, 7 connecting screw, 8 support frame, 9 sealing cylinder, 10 channel two, 11 sealing ring, 12 valve plate, 13 Cavity, 14 guide block, 15 beveled surface, 16 handle screw, 17 cylinder joint, 18 notch, 19 mounting hole.

detailed description

As shown in Figure 1-8, it is a slot valve device, which includes a cavity 13 with a rectangular cross-section. The cavity 13 is surrounded by a top plate 3, a bottom plate 1, side plates 4 on both sides and end plates 2 at both ends. The two sides of the cavity 13 are provided with a channel one 5 and a channel two 10 passing through the cavity 13, the cavity 13 is provided with a liftable support frame 8, and the support frame 8 is provided with a valve plate 12 on the side facing the channel two 10, The surface of the valve plate 12 is provided with a sealing ring 11, between the valve plate 12 and the support frame 8, a sealing cylinder 9 for driving the sealing channel 2 10 of the valve plate 12 is provided, and the bottom of the cavity 13 is provided with a lifting cylinder 6 for driving the support frame 8 to lift. The axis of the sealing cylinder 9 and the axis of the lifting cylinder 6 are arranged perpendicular to each other, the top plate 3 is detachably installed on the top of the cavity 13, the valve plate 12 is provided with a notch 18 facing the side of the sealing cylinder 9, and the piston rod extension end of the sealing cylinder 9 A cylinder joint 17 is provided, and the cylinder joint 17 is inserted into the notch 18, and the connecting screw 7 passes through the installation hole 19 on the valve plate 12 from the upper part to be threadedly connected with the cylinder joint 17; the support frame 8 is away from the upper corner of the side of the valve plate 12 A beveled surface 15 is provided, and a wedge-shaped guide block 14 is provided on the corresponding side plate 4. When the lifting cylinder lifts the support frame 8 to the sealing position, the beveled surface 15 just contacts the guide block 14.

The notch 18 is in a figure-eight shape with a big bottom and a small top, and the cylinder joint 17 is T-shaped, and the top of the notch 18 matches the notch 18 of the T shape.

A handle screw 16 is provided on the upper side of the valve plate 12 .

There are two lifting cylinders 6 correspondingly, and three sealing cylinders 9 are arranged at intervals along the length direction of the valve plate 12 .

The support frame 8 is provided with a gap corresponding to the sealing cylinder 9, and the sealing cylinder 9 is embedded and installed in the gap.

The trough valve device of the present invention is installed between the transmission device and the process device, and the outer port of channel 2 10 is sealed and connected with the process device. During operation, the lifting cylinder 6 can push the support frame 8 to move up and down, and the support frame 8 drives the valve plate 12 Simultaneously moving up and down, when the valve plate 12 descends, the channel 1 5 and channel 2 10 passing through the cavity 13 can be released, so that the manipulator of the transmission device can pass through the channel 1 5 and channel 2 10, and extend into the inside of the process device, Take out the wafer or place the wafer in the process device. After the manipulator leaves, the lifting cylinder 6 rises to push the valve plate 12 to the height of channel 1 5 and channel 2 10. At this time, the sealing cylinder 9 moves to move the valve The plate 12 is pushed towards the second channel 10 , and the sealing ring 11 is sealed on the outer peripheral edge of the second channel 10 . When the lifting cylinder lifts the support frame 8 up to the sealing position, the beveled surface 15 just contacts the guide block 14, so that the sealing ring 11 can be fully pressed against the edge of the channel 2 10 to achieve a good seal, and the lifting cylinder can The upward thrust of 6 is converted into a sealing pressing force, and after sealing, the process device can be evacuated, and the wafer can be processed in a vacuum state. Because the piston rod of the air cylinder cannot usually bear the side thrust, therefore, when the sealing cylinder 9 moves, the reaction force will push the piston rod extension end of the lifting cylinder 6 sideways, and the beveled surface 15 cooperates with the guide block 14, which can just offset this. The lateral thrust ensures that the lifting cylinder 6 can work reliably for a long time. When disassembling and replacing the sealing ring 11, the top cover can be removed, and after the connecting screw 7 is loosened, the valve plate 12 can be directly extracted from the top, and reset after replacing the sealing ring 11, the dismounting is very convenient. The device can be used in wafer processing.

The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, those skilled in the art can make some replacements and modifications to some of the technical features according to the disclosed technical content without creative work. Deformation, these replacements and deformations are all within the protection scope of the present invention.

Claims (5)

1. A trough valve device, comprising a cavity with a rectangular cross-section, the cavity is surrounded by a top plate, a bottom plate, side plates on both sides and end plates at both ends, and the two sides of the cavity are provided with through the cavity Channel 1 and Channel 2, there is a liftable support frame in the chamber, a valve plate is provided on the side of the support frame facing Channel 2, a sealing ring is provided on the surface of the valve plate, and a driving valve plate seal is provided between the valve plate and the support frame. The sealing cylinder of channel 2, the bottom of the cavity is equipped with a lifting cylinder that drives the support frame to lift up and down. One side of the sealed cylinder is provided with a notch, and the protruding end of the piston rod of the sealed cylinder is provided with a cylinder joint, and the cylinder joint is inserted into the notch, and the connecting screw passes through the valve plate from the upper part and is threadedly connected with the cylinder joint; the support frame The upper corner of the side away from the valve plate is provided with a beveled surface, and the corresponding side plate is provided with a wedge-shaped guide block. When the lifting cylinder lifts the support frame up to the sealing position, the beveled surface just contacts the guide block. 2. A slotted valve device according to claim 1, characterized in that: the notch is in a figure-eight shape with a large bottom and a small top, the cylinder joint is T-shaped, and the upper part of the notch matches the T-shaped notch. 3. A slotted valve device according to claim 1, characterized in that: a handle screw is provided on the upper side of the valve plate. 4. A slotted valve device according to any one of claims 1-3, characterized in that there are two corresponding lifting cylinders, and three sealing cylinders are arranged at intervals along the length direction of the valve plate. 5 . The slotted valve device according to claim 4 , wherein a notch is provided on the support frame corresponding to the sealing cylinder, and the sealing cylinder is embedded and installed in the notch. 5 .

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