CN115518926A - A cleaning and drying device for residual fluorine oil on the surface of integrated circuits - Google Patents

Abstract

The invention provides a cleaning and drying device for residual fluorine oil on the surface of an integrated circuit, which comprises a box body (1) and is characterized in that: install a set of fan (3) on case lid (1 a), be equipped with duct (2) in box (1), duct (2) below be equipped with correspond complex latch device (5) with washing tray (4), be equipped with in box (1) of latch device (5) below washing tank (6), be equipped with in washing tank (6) and correspond distribution elevating platform (7) with washing tray (4), still be equipped with on washing tank (6) and correspond complex to wind channel device (8) with washing tray (4), be equipped with extraction fan (8) on box (1) of washing tank (6) one side. In the whole cleaning process, the cleaning effect can be ensured, meanwhile, the separation of the solvent and operators is realized, and the air drying mode is adopted to replace a high-temperature drying mode, so that the potential safety hazard is avoided.

Description

A cleaning and drying device for residual fluorine oil on the surface of integrated circuits

Technical field:

The invention relates to the field of cleaning equipment, in particular to a cleaning and drying device for residual fluorine oil on the surface of integrated circuits.

Background technique:

With the increase in the demand for leak detection tests, the conventional manual cleaning of fluorine oil on the surface of the circuit has shown the disadvantages of low cleaning efficiency and poor cleaning effect, and there are potential safety hazards. Now the cleaning method is improved, and a semi-sealed one-way air supply cleaning device is designed. The cleaning process mainly includes immersion → air drying.

Because the solution used in the rough leak test is a perfluorinated solution, which does not have volatile characteristics, after the test is over, it will remain on the surface of the tested circuit in large quantities. Clean up.

The most commonly used solvent for cleaning fluorine oil is a volatile and flammable fat-soluble solvent—anhydrous ethanol. In the conventional cleaning method, the first step is to immerse the circuit in a container containing anhydrous ethanol, and let it stand for a while. The fluorine oil is fully dissolved and diffused into absolute ethanol, and the circuit is taken out; the second step is to place the circuit under the blower device, and the blower device blows out high-temperature air to air-dry the surface of the circuit.

Invention content:

The purpose of the present invention is to overcome the deficiencies in the prior art and provide a cleaning and drying device for residual fluorine oil on the surface of integrated circuits.

The application provides the following technical solutions:

A cleaning and drying device for residual fluorine oil on the surface of an integrated circuit, which includes a box body, and is characterized in that a group of fans are installed on the box cover, and a duct is arranged in the box body, and the bottom of the duct corresponds to the cleaning tray. Cooperating clamping device, a cleaning tank is provided in the box below the clamping device, and a lifting platform corresponding to the cleaning tray is arranged in the cleaning tank, and an air duct device corresponding to the cleaning tray is also provided on the cleaning tank , There is an exhaust fan on the box on one side of the cleaning tank.

On the basis of above-mentioned technical scheme, also can have following further technical scheme:

A set of air guide holes communicating with the duct is arranged on the box cover.

The air duct device includes a group of air deflectors, on which a group of air ducts are arranged, and on the air ducts, a group of protruding cavities connected in sequence are arranged, and each protruding cavity is provided with an air guide block, so A group of connecting columns are also pierced on the above-mentioned group of air deflectors, and the guard plates corresponding to the air guide plates are connected at both ends of the connecting columns, and guide rods are pierced on the guard plates, and the two ends of the guide rods are connected with the box wall Connection, there is a jacking device on the box wall that is connected with the guard plate.

The set of protruding cavities are distributed at intervals on the left and right sides of the air duct.

The air guide block is in the shape of an inverted droplet with a round top and a pointed bottom.

An exhaust channel is connected to one end of the exhaust fan.

Two jacking devices with opposite output directions are connected to each guard plate.

Advantages of the invention:

In the whole cleaning process of the present invention, while ensuring the cleaning effect, the isolation of the solvent and the operator can be realized, and the high-temperature drying method is replaced by an air-drying method, which effectively avoids potential safety hazards.

Description of drawings:

Fig. 1 is a schematic perspective view of the present invention;

Fig. 2 is a schematic diagram of Fig. 1 after removing the fan;

Fig. 3 is the schematic diagram after Fig. 2 removes box cover;

Fig. 4 is the schematic diagram after removing duct in Fig. 3;

Fig. 5 is a schematic structural view of the air duct device in Fig. 4;

Fig. 6 is a structural schematic diagram of the air guide block in the air duct device;

Fig. 7 is a schematic structural view of the cleaning tank, lifting platform and cleaning tray;

Fig. 8 is a schematic diagram when the lifting platform rises and falls;

Fig. 9 is a schematic diagram of the installation position of the clamping device;

Figure 10 is a schematic diagram of the installation position of the exhaust fan;

Fig. 11 is a schematic diagram of the cleaning tank, lifting platform and air duct device installed in the bottom box.

detailed description:

As shown in Figure 1-11, a cleaning and drying device for residual fluorine oil on the surface of integrated circuits, which includes a box 1,

The box 1 includes a bottom box 1b, a second box 1c is added on the bottom box 1b, and a gasket is installed on the corresponding seam of the bottom box 1b and the second box 1c (Fig. Not shown in ), the box cover 1a is hinged on the second layer box body 1c.

A group of fans 3 is installed on the case cover 1a, a group of air inlet holes 1d is arranged on the case cover 1a below the fans 3, and a duct 2 is installed in the second layer of the box body 1c below the air holes 1d. A clamping device 5 is respectively installed on both sides of the air outlet at the lower end of the duct 2 . The clamping device 5 includes a housing 5a, a cylinder is installed in the housing 5a, and a lock tongue 5b with one end protruding from the housing 5a is installed at the end of the output shaft of the cylinder. The lock tongue 5b is correspondingly matched with the handle 4a of the cleaning tray 4 mentioned below.

A cleaning tank 6 is installed at the bottom of the bottom casing 1b, and dehydrated alcohol is stored in the cleaning tank 6, and a lifting platform 7 is installed at the bottom of the cleaning tank 6 below the dehydrated alcohol liquid level, and the lifting platform 7 is a prior art The multi-stage lift oil cylinder, its structure is prior art so do not go into details here. A leak-proof sealing ring corresponding to the adjacent level is installed on each level of lifting platform.

An exhaust fan 9 is installed on the bottom casing 1b on one side of the cleaning tank 6, and one end of the exhaust fan is connected with an exhaust channel not shown in the figure. A movable air channel device 8 is installed in the casing above the cleaning tank 6 .

The air duct device 8 includes a set of air deflectors 8a, on which a set of sunken air ducts 8b are arranged, and each air duct 8b is provided with a set of sunken air guide plates 8a connected in turn. The above protruding cavities 8c, the set of protruding cavities 8c are distributed at intervals on the left and right sides of the air duct 8b. The upper end of the protruding cavity 8c is arc-shaped, and the lower end gradually narrows. An air guide block 8d is distributed in each protruding cavity 8c, and the upper surface of the air guide block 8d is flush with the surface of the air guide plate 8a. The wind guide block 8d is in the shape of an inverted drop with a round top and a pointed bottom. Through the setting of the air guide block and the protruding cavity, after the wind enters the air channel from the air inlet above the air guide plate, it smoothly flows out of the air channel from the air outlet below the air guide plate. However, due to the arc-shaped upper end of the protruding cavity and the drop-shaped air guide block, most of the wind flowing in from the air outlet below the wind plate will turn and flow downward under the guidance of the two, so that only a small amount of wind Can overflow from the air intake above the wind deflector, negligible.

A connecting column (not shown in the figure) is respectively pierced in the mounting holes 8t at the four corners of the group of air deflectors 8a, and the two ends of the connecting column are connected with guards corresponding to the air deflectors 8a. Plate 8g. Thus, a group of wind deflectors are connected together to form a rectangular structure. A guide rod 8h distributed along the width direction of the box body 1 is also pierced on the thickness end face of the guard plate 8g, and the two ends of the guide rod 8h are connected and fixed with the box wall.

The guard plate 8g below the guide rod 8h is also provided with two connection holes 8k distributed parallel to the guide rod 8h. The open ends of the two connection holes 8k are distributed on the left and right sides of the guard plate 8g. A jacking device 8e (air cylinder or oil cylinder) is connected to the corresponding box wall of 8k, and the output end of the jacking device 8e is connected to one end of the connection hole 8k through a connecting plate, and the output directions of the two jacking devices 8e are opposite .

Through the output of the jacking device 8e, a set of wind deflectors can form a rectangular structure and move along the guide rods. The diameter of the connecting hole 8k is larger than that of the cylinder body of the jacking device 8e, so that the cylinder body of the jacking device 8e can retract into the connecting hole 8k. Since the opening ends of the connecting holes 8k are distributed on the left and right sides of the guard plate 8g, the output directions of the two jacking devices 8e connected to each guard plate 8g are opposite.

work process:

Open the case cover and place the cleaning tray 4 carrying integrated circuits to be cleaned on the upper surface of a rectangular structure formed by a group of wind deflectors. At this time, the structure is located directly below the air outlet of the duct, and then close the case cover. Start the clamping device 5 to make the lock tongue protrude and insert it under the handle of the cleaning tray 4, then the jacking device starts to drive the rectangular structure to move to leak out the cleaning tank 6, and then the lifting platform 7 rises until the highest level supports the cleaning tray 4. tray 4, and then start the clamping device 5 to retract the lock tongue 5b, and then the lifting platform 7 descends to immerse the cleaning tray 4 under the liquid surface of absolute ethanol and let it stand for 15s. And the lifting platform 7 rises to the highest point again, the clamping device 5 controls the dead bolt 5b to be inserted below the handle of the cleaning tray 4, then the lifting platform retracts, and the jacking device drives a group of wind deflectors to form a rectangular structure and moves to Clean the bottom of the tray 4, then retract the bolt 5b, start the fan 3 to blow air for 15 seconds to dry the integrated circuits in the cleaned tray 4, then stop the fan 3, and finally open the case cover 1a to take out the integrated circuits. The exhaust fan 8 is working all the time during the whole cleaning process.

Claims (7)

1. The utility model provides a washing drying device of integrated circuit surface residual fluorine oil, it includes box (1), its characterized in that: install a set of fan (3) on case lid (1 a), be equipped with duct (2) in box (1), duct (2) below be equipped with correspond complex latch device (5) with washing tray (4), be equipped with washing tank (6) in box (1) of latch device (5) below, be equipped with in washing tank (6) and correspond distribution elevating platform (7) with washing tray (4), still be equipped with on washing tank (6) and correspond complex to air duct device (8) with washing tray (4), be equipped with extraction fan (8) on box (1) of washing tank (6) one side.

2. The apparatus for cleaning and drying the fluorine oil remaining on the surface of the integrated circuit according to claim 1, wherein: the box cover (1 a) is provided with a group of air guide holes (1 d) communicated with the duct (2).

3. The apparatus for cleaning and drying residual fluorine oil on the surface of an integrated circuit according to claim 1, wherein: air duct device (8) including a set of aviation baffle (8 a), be equipped with a set of wind channel (8 b) on aviation baffle (8 a), be equipped with a set of outstanding chamber (8 c) that communicate in proper order on wind channel (8 b), all be equipped with air guide block (8 d) in every outstanding chamber (8 c), a set of aviation baffle (8 a) on still wear to be equipped with a set of spliced pole, connect at the both ends of spliced pole and correspond complex backplate (8 g) with aviation baffle (8 a), wear to be equipped with guide arm (8 h) on backplate (8 g), guide arm (8 h) both ends and tank wall connection are equipped with on the tank wall and are connected complex jacking device (8 e) with backplate (8 g).

4. A cleaning and drying apparatus for residual fluorine oil on the surface of an integrated circuit according to claim 3, wherein: the group of protruding cavities (8 c) are distributed on the left side and the right side of the air duct (8 b) at intervals.

5. The cleaning and drying apparatus for residual fluorine oil on the surface of an integrated circuit according to claim 3 or 4, wherein: the air guide block (8 d) is in a shape of inverted water drops with a round upper part and a pointed lower part.

6. The apparatus for cleaning and drying the fluorine oil remaining on the surface of the integrated circuit according to claim 1, wherein: one end of the exhaust fan (9) is connected with an exhaust passage.

7. The apparatus for cleaning and drying the residual fluorine oil on the surface of the integrated circuit according to claim 5, wherein: each guard plate (8 g) is connected with two jacking devices (8 e) with opposite output directions.

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