CN115372672A - Workbench of probe device, control method and probe testing method - Google Patents

Abstract

The application relates to the technical field of semiconductor device detection, in particular to a workbench of probe equipment, the probe equipment, a control method and a probe testing method, wherein a longitudinal guide rail is installed on a base, an object receiving assembly is in sliding fit with the longitudinal guide rail in the vertical direction, one end of a tension spring is fixed on the object receiving assembly in the vertical direction, the other end of the tension spring is fixed on the base, a cam is located between the base and the object receiving assembly in the vertical direction, the top end of a push rod is fixed on the object receiving assembly, the bottom end of the push rod is in sliding fit with the edge of the cam, and a motor is fixedly connected with the cam; the intersection point of the edges of the two adjacent eccentric parts is positioned on the edge of the base circle part. The present application is directed to at least one of the problems described in the background of the invention, and an object of the present application is to provide a stage of a probe apparatus, a control method, and a probe testing method.

Description

Workbench for probe device, probe device, control method, and probe test method

technical field

The present application relates to the technical field of semiconductor device detection, in particular, to a workbench of a probe device, a probe device, a control method, and a probe test method.

Background technique

Probe equipment is mainly used for electrical performance testing of semiconductor chips/devices, which is the core key process to ensure that semiconductor devices can be used normally. Through the good and stable contact between the chip/device and the probe of the connection tester, the precise measurement of various electrical performance parameters is completed.

The workbench of the traditional probe equipment uses a motor to drive the eccentric cam as the lifting drive mechanism to realize the vertical lifting movement of the chip/device placed on the receiving platform, and realize the contact and separation of the chip/device and the probe . During operation, the motor drives the cam until the high point of the cam is in contact with the substrate platform, and the chip/device is in contact with the probe. When the high point is separated from the substrate platform, the chip/device is separated from the probe. When the low point is in contact with the carrier platform, the chip/device reaches the zero return position. Since the eccentric cam structure does not have a stable low point position, the zero return position of the chip/device will be inaccurate, and the chip/device will not be able to accurately return to the set origin position, which will cause the device to repeatedly return to zero in the Z direction or fail to return to zero. operation, reducing the efficiency of automatic testing.

Contents of the invention

The purpose of the present application is to provide a workbench for a probe device, a probe device, a control method, and a probe test method for at least one of the technical problems described in the background art.

In order to achieve the above object, the application adopts the following technical solutions:

One aspect of the present application provides a workbench for probe equipment, including a base, a longitudinal guide rail, an object-connecting assembly and a lifting assembly, the longitudinal guide rail is installed on the base, and the object-connecting assembly and the longitudinal guide rail are vertically connected to each other. Sliding fit in the vertical direction, the lifting assembly includes a push rod, a motor, a cam and a tension spring, one end of the tension spring is fixed to the object-connecting assembly in the vertical direction, and the other end is fixed to the base. In the vertical direction, the cam is located between the base and the object-connecting assembly, the top end of the push rod is fixed on the object-connecting assembly, and the bottom end of the push rod is slidably fitted with the edge of the cam. The motor is fixedly connected with the cam;

The cam includes a base circle part and a plurality of eccentric parts connected to the base circle part, each of the eccentric parts is evenly distributed in the circumferential direction of the base circle part, and the edges of the eccentric parts are arc-shaped and adjacent The intersection point of the edges of the two eccentric portions is located on the edge of the base circle portion.

Optionally, the object receiving assembly includes an object receiving turntable and a slider, the ejector rod and the object receiving turntable are both installed on the slider, the object receiving turntable is arranged horizontally, and the slider and the object receiving turntable are arranged horizontally. The longitudinal rails are a sliding fit in the vertical direction.

Optionally, the object receiving assembly further includes a rotating driving member installed on the slider, and the object receiving turntable is installed on the sliding block through the rotating driving member.

Optionally, the bottom end of the ejector rod is an arc-shaped end or a pointed end.

Optionally, two tension springs are included.

Another aspect of the present application provides a probe device, including the workbench of the probe device provided in the present application.

Optionally, it includes a main body platform, a substrate platform, a microscope module, a loading and unloading module, a test module, and the workbench, the microscope module is installed on the main body platform, and the workbench is located below the main body platform. The carrier platform is set on the workbench, and the microscope module, the carrier platform and the workbench are arranged in sequence from top to bottom in the vertical direction, and the loading and unloading module is fixed on the workbench in the horizontal direction. The side of the workbench, the test module is used to contact with the test item.

Another aspect of the present application provides a method for controlling a workbench of a probe device, including:

The operation of the motor in the working table of the probe device is controlled so that the cam drives the object-connecting assembly to move in the vertical direction.

Another aspect of the present application provides a probe testing method, comprising:

Judging whether the currently preset test program is completed, if not, then controlling the movement of the workbench in the probe device in the horizontal plane in the horizontal direction based on the test program, and controlling the cam to drive the The test item in the receiving platform on the top moves in the vertical direction, so that the probe test is performed after the test item is in contact with the probe, or the test item and the probe are contacted after the probe test is completed. to separate.

Optionally, before judging whether the currently preset test procedure is completed, it also includes:

Controlling the substrate platform, microscope module, test module and workbench in the probe device to perform initialization settings;

Controlling the manipulator to grab the test item in the loading and unloading module in the probe device and place it on the carrier platform;

Controlling the movement of the workbench and the microscope module so that the image of the test item obtained after the microscope is focused is displayed on the display; controlling the movement of the workbench according to the image of the test item in the display until the test item is determined The first measuring point is tested, and the probe test process parameters are obtained, and the test program corresponding to the probe test process parameters is started.

The technical solution provided by the application can achieve the following beneficial effects:

The workbench of the probe equipment, the probe equipment, the control method and the probe testing method provided in the embodiments of the present application, when in use, set the receiving platform of the probe equipment on the top of the object-connecting assembly, place the test object On the bearing platform, start the motor, and the motor drives the cam. With the rotation of the cam, the bottom end of the ejector rod slides relatively along the outer edge of the cam, and alternately passes through the high and low points on the cam. When the bottom end of the ejector rod and the When the high point of the cam is in contact, the position of the test object rises to the highest point and contacts the probe, the bottom end of the ejector rod leaves the high point of the cam, the test object is separated from the probe, and when the ejector rod contacts the low point of the cam, the test object The position of the test object is lowered to the minimum, and the position of the test object returns to zero in the vertical direction, because the low point is the common intersection point between the edges of the two adjacent eccentric parts and the edge of the base circle part, and the distance between the two adjacent eccentric parts There is only one low point between them, so the low point is an accurate and stable position on the edge of the cam, so that the position of the test item can be returned to zero in the vertical direction with higher accuracy, between two adjacent high points It is not easy to return to zero repeatedly and/or cannot return to zero, which improves the efficiency of automatic testing.

The additional technical features and advantages of the present application will be more clearly set forth in the following description, or can be understood through the specific practice of the present application.

Description of drawings

In order to more clearly illustrate the technical solutions of the specific embodiments of the present application, the following will briefly introduce the drawings that need to be used in the description of the specific embodiments. Apparently, the drawings in the following description are some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative efforts.

FIG. 1 is a schematic diagram of a partial three-dimensional structure of an embodiment of a workbench of a probe device provided in an embodiment of the present application;

Fig. 2 is a structural schematic diagram of an embodiment of the cooperation between the cam and the push rod provided in the embodiment of the present application;

FIG. 3 is a schematic three-dimensional structure diagram of an embodiment of a probe device provided in an embodiment of the present application;

FIG. 4 is a schematic flowchart of a method for controlling a workbench of a probe device provided in an embodiment of the present application;

FIG. 5 is a schematic flowchart of a probe testing method provided in an embodiment of the present application.

Reference signs:

01- Pick up carousel; 02- Longitudinal guide rail;

03-motor; 04-base;

05-cam; 06-tension spring;

07-slider; 08-eccentric part;

09-base circle; 10-ejector;

11 - low point; 12 - high point;

13-base circle; 14-circumference;

15-microscope module; 16-main platform;

17-slice platform; 18-workbench;

19-loading and loading module; 20-display.

Detailed ways

The technical solutions of the present application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, use a specific orientation construction and operation, therefore should not be construed as limiting the application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

In the description of this application, it should be noted that unless otherwise specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in this application in specific situations.

As shown in Figures 1 to 3, one aspect of the present application provides a workbench 18 of a probe device, including a base 04, a longitudinal guide rail 02, an object-connecting assembly and a lifting assembly, and the longitudinal guide rail 02 is installed on the base 04, the object-connecting assembly is slidably matched with the longitudinal guide rail 02 in the vertical direction, and the lifting assembly includes a push rod 10, a motor 03, a cam 05 and a tension spring 06, and the tension spring 06 in the vertical direction One end of which is fixed to the object-connecting assembly, the other end is fixed to the base 04, the cam 05 is located between the base 04 and the object-connecting assembly in the vertical direction, and the top end of the push rod 10 is fixed In the object-connecting assembly, the bottom end of the push rod 10 is slidingly fitted with the edge of the cam 05, and the motor 03 is fixedly connected with the cam 05;

The cam 05 includes a base circle part 09 and a plurality of eccentric parts 08 connected to the base circle part 09, each of the eccentric parts 08 is evenly distributed in the circumferential direction of the base circle part 09, and the eccentric parts 08 The edges are arc-shaped, and the intersection point of the edges of two adjacent eccentric portions 08 is located on the edge of the base circle portion 09 .

It can be understood that the shape and size of each eccentric part 08 are the same; the base circle part 09 is the part of the cam 05 including the base circle 13 and the inside of the base circle 13 , and the eccentric part 08 is the part outside the base circle 13 .

The number of eccentric parts 08 in the embodiment of the present application can be 3-5. In the embodiment of the present application, three eccentric parts 08 are preferably provided, and three low points 11 and three high points 12 are formed on the corresponding cam 05; The low point 11 is located on the edge of the base circle part 09, and the low point 11 is the intersection point of the edges of two adjacent eccentric parts 08; the high point 12 is the farthest point from the center of the base circle part 09 on the edge of the eccentric part 08; Each high point 12 is located on the circumference 14 of the same circle; when the cam 05 has a certain thickness in the direction perpendicular to the plane where the base circle 13 is located, both the low point 11 and the high point 12 can appear to be perpendicular to the plane where the base circle 13 is located. Flat lines.

The workbench 18 of the probe device provided in the embodiment of the present application, when in use, sets the receiving platform of the probe device on the top of the object-connecting assembly, places the test item on the receiving platform, starts the motor 03, and starts the motor 03 Drive the cam 05, and with the rotation of the cam 05, the bottom end of the ejector rod 10 slides relatively along the outer edge of the cam 05, alternately passing through the high point 12 and the low point 11 on the cam 05, when the bottom end of the ejector rod 10 and the cam When the high point 12 of 05 is in contact, the position of the test object rises to the highest and contacts with the probe, the bottom end of the ejector rod 10 leaves the high point 12 of the cam 05, the test object is separated from the probe, and the lower end of the ejector rod 10 and the cam 05 When the point 11 touches, the position of the test item drops to the minimum, and the position of the test item returns to zero in the vertical direction, because the low point 11 is the common intersection point of the edges of the adjacent two eccentric parts 08 and the edges of the base circle part 09 , and there is only a low point 11 between two adjacent eccentric parts 08, so the low point 11 is an accurate and stable position on the edge of the cam 05, so that the position of the test item returns to zero in the vertical direction The precision is higher, and it is not easy to repeatedly return to zero and/or fail to return to zero between two adjacent high points 12, which improves the efficiency of automatic testing.

In addition, the workbench 18 of some traditional probe equipment also adopts a guide rail screw type lifting mechanism. Due to the backlash of the screw, the movement precision in the Z direction is low, and the manufacturing cost of the mechanism is high. The feature of the guide rail screw type lifting mechanism is that the Z guide rail is used for motion guidance, and the motor 03 drives the carrying platform to move up and down through the forward and reverse connection screw, so as to realize the contact and separation of the chip/device and the probe. Since the Z-direction movement will directly affect the reliability and accuracy of the test, the accuracy requirement is relatively high, and the error must be limited within an acceptable range. In order to further improve the motion accuracy, on the one hand, it is to reduce the machining error of the lead screw, and on the other hand, it is to improve the control accuracy of the motor 03, so that the manufacturing cost of the mechanism will be doubled invisibly. However, the workbench 18 of the probe equipment used in this application uses the cam 05 mechanism instead of the guide rail lead screw type lifting mechanism, which avoids the problems of backlash in the lead screw, low Z-direction motion accuracy, and high manufacturing cost of the mechanism.

Optionally, the object receiving assembly includes an object receiving carousel 01 and a slider 07, the ejector rod 10 and the object receiving carousel 01 are installed on the slider 07, and the object receiving carousel 01 is arranged horizontally, so The sliding block 07 is slidably matched with the longitudinal guide rail 02 in the vertical direction.

Optionally, the object receiving assembly further includes a rotating driving member installed on the slider 07, and the object receiving turntable 01 is installed on the sliding block 07 through the rotating driving member.

Optionally, the bottom end of the ejector rod 10 is an arc-shaped end or a pointed end. This makes the bottom end of the push rod 10 and the edge of the cam 05 fit better.

Optionally, the workbench 18 of the probe device provided in the embodiment of the present application includes two tension springs 06 . Two tension springs 06 provide sufficient tension driving for the reset movement of the object-connecting assembly.

Another aspect of the present application provides a probe device, including the workbench 18 of the probe device provided in the embodiment of the present application.

The probe device provided by the embodiment of the present application adopts the workbench 18 of the probe device provided by the embodiment of the present application. When in use, the receiving platform 17 of the probe device is set on the top of the object assembly, and the The test item is placed on the support platform 17, the motor 03 is started, and the motor 03 drives the cam 05. With the rotation of the cam 05, the bottom end of the ejector rod 10 slides relatively along the outer edge of the cam 05, and alternately passes through the high points on the cam 05 12 and low point 11, when the bottom end of the push rod 10 is in contact with the high point 12 of the cam 05, the position of the test item rises to the highest and contacts the probe, and the bottom end of the push rod 10 leaves the high point 12 of the cam 05, The test item is separated from the probe, and when the push rod 10 is in contact with the low point 11 of the cam 05, the position of the test item drops to the minimum, and the position of the test item returns to zero in the vertical direction, because the low points 11 are two adjacent The common intersection point of the edge of the eccentric part 08 and the edge of the base circle part 09, and there is only a low point 11 between two adjacent eccentric parts 08, so the low point 11 is an accurate and stable position on the edge of the cam 05 , so that the position of the test item can be returned to zero in the vertical direction with higher accuracy, and the problem of repeated zero return and/or failure to return to zero between two adjacent high points 12 is not easy to occur, and the automatic test efficiency is improved.

Optionally, the probe device provided in the embodiment of the present application includes a main body platform 16, a substrate platform 17, a microscope module 15, a loading and unloading module 19, a test module and the workbench 18, and the microscope module 15 is installed on The main body platform 16, the workbench 18 is located below the main body platform 16, the carrier platform 17 is arranged on the workbench 18, the microscope module 15, the The sheet-bearing platform 17 and the workbench 18 are arranged in sequence, and the loading and unloading module 19 is fixed on the side of the workbench 18 in the horizontal direction, and the test module is used for contacting the test object. In the embodiment of the present application, the probe device further preferably includes a display 20 . The testing process of the probe equipment provided in the embodiment of the present application is as follows: (1) put the test item in the loading and unloading module 19, start the equipment, and reset each movement mechanism to zero, indicating that the zeroing is normal and can be tested. (2) The manipulator grabs the test item and places it on the film-supporting platform 17 , the workbench 18 and the microscope module 15 move, the microscope focuses, and the test item can be clearly seen on the display 20 . (3) The workbench 18 is moved to find the first measuring point and align the test items. (4) Determine the process parameters of the probe through the test, retrieve the test process parameters, and start the test program. (5) The test item is driven up and down by the cam 05 to complete a test; the test item can be detected by the test module. (6) After the test is completed, the tested chip/device is picked up by the manipulator and put into the loading and unloading module 19 .

As shown in Figure 4 and Figure 5, the third aspect of the present application provides a method for controlling the workbench of the probe device, the control method specifically includes the following content:

The operation of the motor in the workbench of the probe device provided in the foregoing embodiments is controlled so that the cam drives the object-connecting assembly to move in the vertical direction.

Specifically, since the cam is designed with three high point positions and three accurate and stable low point positions, the Z-direction (vertical direction) hoisting mechanism returns to zero with higher accuracy. Referring to FIG. 4, the flow of the control method of the workbench of the probe device is as follows:

(1) The cam rotates clockwise (counterclockwise) for one revolution;

(2) The grating reads the height change and period in the Z direction;

(3) software for recording;

(4) Preliminary trial of Z-direction lifting mechanism;

(5) The cam rotates, and the Z direction is lifted to the high point position recorded by the software;

(6) Test;

(7) The cam rotates, and the Z direction drops to the low point position adjacent to the previous high point recorded by the software;

(8) The worktable moves in the XY direction (horizontal plane in the horizontal direction);

(9) Repeat process (5) to process (8) to complete the test of all measured points.

On the basis of the above embodiment of the control method of the workbench of the probe device and/or the embodiments of the aforementioned probe device, the present application also provides a probe test method, which can be implemented by a controller or a processor, the control The device or processor is at least communicatively connected with the substrate platform, the microscope module, the test module, and the motors in the workbench in the probe device, so as to control the movement or operation of each component; in addition, in order to further improve the automation of the probe test method To a certain extent, the present application may also provide a manipulator, which is communicatively connected with the controller or processor, so as to move according to the instructions of the controller or processor.

Based on this, the probe testing method provided in the embodiment of the present application specifically includes the following contents:

Step 1: Judging whether the currently preset test program is completed, if not, then controlling the workbench in the probe device to move in the horizontal plane in the horizontal direction based on the test program, and controlling the cam to drive the The test item in the receiving platform on the object contact assembly moves in the vertical direction, so that the probe test is performed after the test item is in contact with the probe, or the test item and the probe are in contact with each other. Separation is performed after the probe test is completed.

Further, before step 1, the probe test method provided in the embodiment of the present application may also include the following content:

Step 01: Control the wafer-supporting platform, microscope module, test module and workbench in the probe device to perform initial settings.

Step 02: Control the manipulator to grab the test item in the loading and unloading module of the probe device and place it on the carrier platform.

Step 03: Control the movement of the workbench and the microscope module so that the image of the test item acquired after the microscope is focused is displayed on the display; control the movement of the workbench according to the image of the test item in the display until it is determined The first test point of the test item is tested, and the probe test process parameters are obtained, and the test program corresponding to the probe test process parameters is started.

Specifically, referring to Fig. 5, the flow process of the probe testing method is:

(1) Put the object to be tested (ie: the aforementioned test items, such as chips, etc.) in the loading and unloading module, start the equipment, and return to zero for each movement mechanism, indicating that the return to zero is normal and can be tested.

(2) The manipulator grabs the object to be measured and places it on the slide stage module, the workbench and the microscope module move, the microscope in the microscope module focuses, and the object to be measured can be clearly seen on the display.

(3) The workbench is moved to find the first measuring point and align the measured object.

(4) Determine the process parameters of the probe through the test, retrieve the test process parameters, and start the test program.

(5) Drive the object under test to move up and down through the multi-contact cam lifting mechanism (namely: the aforementioned lifting assembly), thereby completing a test; through the test module, the detection of the object under test can be completed.

(6) After the test is completed, the tested object (such as chip/device) is grabbed by the manipulator and put into the loading and unloading module.

It can be understood that the Z-direction lifting of the automatic probe station supporting platform is one of the key processes in the automatic testing process. Among them, whether the Z direction can quickly and accurately return to the zero position will seriously affect the efficiency of automatic testing. In addition, during the automatic test process, the probe station mainly uses the Z-direction lifting mechanism to realize the contact and separation of the chip/device and the probe of the connection tester. The contact state of the object under test and the probe directly affects the accuracy of the test data. The precision and efficiency of Z-direction lifting will directly determine the contact state and test efficiency. The automatic probe station of this application mainly adopts the multi-contact cam Z-direction lifting mechanism to realize the up and down movement of the bearing platform, which is mainly connected directly with the multi-contact cam through the motor, and then the motor rotates clockwise or counterclockwise to drive the bearing platform along the Z direction. Move toward the direction of the rail, when the cam rotates to the high point position, the object under test on the loading platform contacts with the probe to realize the electrical performance test of the object under test, the cam continues to rotate to the adjacent low point position, and the object under test and the probe are separated , the workbench moves in the X direction or the Y direction, the carrying platform moves to the next point to be measured, the cam continues to rotate to the highest point, and the object to be tested and the probe contact to realize the detection of the point to be measured. This is repeated until all the points to be measured on the object to be tested are detected. The multi-contact cam mechanism eliminates the backlash error of the traditional screw guide rail mechanism, and avoids the poor zero return accuracy of the traditional cam Z-direction lifting mechanism, which often returns to zero repeatedly or cannot be returned to zero. This application has Z-direction movement High precision, reliable zero return and so on. At the same time, the multi-contact cam mechanism has the characteristics of rotational symmetry, and the center of rotation coincides with the center of gravity of the mechanism, which eliminates the unbalanced force of the mechanism during the movement and greatly increases the reliability of the mechanism.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit it; although the application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the various embodiments of the present application. scope.

Claims (10)

1. The workbench of the probe equipment is characterized by comprising a base, a longitudinal guide rail, an object receiving assembly and a lifting assembly, wherein the longitudinal guide rail is installed on the base, the object receiving assembly is in sliding fit with the longitudinal guide rail in the vertical direction, the lifting assembly comprises a push rod, a motor, a cam and a tension spring, one end of the tension spring is fixed to the object receiving assembly in the vertical direction, the other end of the tension spring is fixed to the base, the cam is located between the base and the object receiving assembly in the vertical direction, the top end of the push rod is fixed to the object receiving assembly, the bottom end of the push rod is in sliding fit with the edge of the cam, and the motor is fixedly connected with the cam;

the cam comprises a base circle part and a plurality of eccentric parts connected to the base circle part, the eccentric parts are evenly distributed in the circumferential direction of the base circle part, the edges of the eccentric parts are arc-shaped, and the intersection point of the edges of the two adjacent eccentric parts is located on the edge of the base circle part.

2. The worktable of claim 1, wherein the object receiving assembly comprises an object receiving turntable and a sliding block, the ejector rod and the object receiving turntable are both mounted on the sliding block, the object receiving turntable is horizontally arranged, and the sliding block is in sliding fit with the longitudinal guide rail in the vertical direction.

3. The stage of the probe apparatus as claimed in claim 2, wherein the object assembly further comprises a rotational driving member mounted to the slide block, and the object turntable is mounted to the slide block through the rotational driving member.

4. The stage of the probe apparatus according to claim 1, wherein the bottom end of the lift pin is an arc-shaped end or a tip end.

5. The stage of a probe device according to any of claims 1 to 4, comprising two tension springs.

6. Probe apparatus, comprising a stage of a probe apparatus according to any of claims 1 to 5.

7. The probe device of claim 6, comprising a main body platform, a wafer bearing platform, a microscope module, a feeding and discharging module, a testing module and the workbench, wherein the microscope module is mounted on the main body platform, the workbench is located below the main body platform, the wafer bearing platform is arranged on the workbench, the microscope module, the wafer bearing platform and the workbench are sequentially arranged from top to bottom in the vertical direction, the feeding and discharging module is fixed on the side surface of the workbench in the horizontal direction, and the testing module comprises a probe of the workbench and a display connected to the microscope module and used for being in contact with a test object and displaying the test object.

8. A method for controlling a stage of a probe apparatus, comprising:

controlling a motor in a table of the probe apparatus according to any one of claims 1 to 5 to operate so that the cam moves the joint assembly in a vertical direction.

9. The probe test method is characterized by comprising the following steps:

judging whether the current preset test program is finished, if not, controlling the workbench in the probe equipment according to claim 6 or 7 to move in a horizontal plane in the horizontal direction based on the test program, and controlling the cam to drive the test article in the wafer bearing platform on the article receiving assembly to move in the vertical direction, so that the test article is in contact with the probe and then is subjected to probe test, or the test article is separated from the probe after the probe test is finished.

10. The method according to claim 9, further comprising, before the determining whether the current predetermined test procedure is completed:

controlling a wafer bearing platform, a microscope module, a test module and a workbench in the probe equipment to carry out initialization setting;

controlling a manipulator to grab a test object in a feeding and discharging module in the probe equipment and placing the test object on the wafer bearing platform;

controlling the workbench and the microscope module to move so that the test article image acquired after the microscope is focused is displayed in the display; and controlling the workbench to move according to the image of the test article in the display until a head point of the test article is determined and a test is carried out to obtain a probe test process parameter, and starting a test program corresponding to the probe test process parameter.

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