CN115289111A - Flange for photovoltaic cell production equipment - Google Patents

Flange for photovoltaic cell production equipment Download PDF

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Publication number
CN115289111A
CN115289111A CN202210847066.9A CN202210847066A CN115289111A CN 115289111 A CN115289111 A CN 115289111A CN 202210847066 A CN202210847066 A CN 202210847066A CN 115289111 A CN115289111 A CN 115289111A
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China
Prior art keywords
groove
flange
main body
sealing
body part
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Granted
Application number
CN202210847066.9A
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Chinese (zh)
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CN115289111B (en
Inventor
陈小芬
刘彩球
刘创龙
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Shenzhen Kecai Precision Technology Co ltd
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Shenzhen Kecai Precision Technology Co ltd
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Priority to CN202210847066.9A priority Critical patent/CN115289111B/en
Publication of CN115289111A publication Critical patent/CN115289111A/en
Application granted granted Critical
Publication of CN115289111B publication Critical patent/CN115289111B/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B1/00—Devices for securing together, or preventing relative movement between, constructional elements or machine parts
    • F16B1/02—Means for securing elements of mechanisms after operation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10—Reaction chambers; Selection of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/061—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with positioning means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • F27D99/0073—Seals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Gasket Seals (AREA)

Abstract

The invention relates to a flange for a photovoltaic cell production facility, for sealing a furnace tube, the flange comprising: the extension, preceding flange, the rear flange, the sealing member, the extension is kept away from the one side of the inner wall of boiler tube is followed the sunken recess that is formed with of second direction, the one end of sealing member extends into in the recess, observe along the third direction, the sealing member extend into the one end of recess with the recess is in be formed with first local clearance in the second direction, the sealing member extend the one end of recess with the preceding flange is in be formed with second local clearance in the first direction, the sealing member extend the one end of recess with the rear flange is in be formed with third local clearance in the first direction to release the deformation of sealing member in first direction and second direction, reduce the influence of sealing member thermal deformation to sealed effect.

Description

Flange for photovoltaic cell production equipment
Technical Field
The invention relates to the technical field of sealing elements, in particular to a flange for photovoltaic cell production equipment.
Background
With the rapid development of the semiconductor industry, the precision requirement of the chip is higher and higher, and the diffusion furnace is a very critical link in the wafer production link. The main use of the diffusion process is to dope semiconductor wafers at high temperatures, i.e. to diffuse elemental phosphorus, boron into silicon wafers, thereby changing and controlling the type, concentration and distribution of impurities in the semiconductor in order to create regions of different electrical properties.
Published chinese utility model patent, application No. CN214250565U, patent name: the utility model provides a water-cooling flange for diffusion furnace, application date: 20201231, this utility model discloses a through set up a sealing washer that does not contact with the boiler tube direct contact between front water-cooling flange and back water-cooling flange and realize the sealed of boiler door. However, boron is oxidized to form boron trioxide during the diffusion process, the boron trioxide is easily dissolved in water to generate boric acid, and the severe reaction phenomenon is accompanied, so that the water vapor in the furnace tube needs to be removed before the diffusion furnace works. The flange is cooled by water cooling, the sealing performance of water cooling equipment needs to be improved, water cannot be sputtered into the furnace pipe in the operation process, a drying inspection process needs to be added, and the cost is improved. Meanwhile, when the diffusion furnace works, the internal temperature reaches 1100 ℃, and the sealing ring can deform under the high-temperature and high-pressure environment, so that the sealing effect is reduced.
Therefore, it is necessary to provide a flange for a photovoltaic cell production apparatus, which not only maintains a dry environment, but also avoids the sealing effect from being reduced due to the deformation of the sealing ring caused by high temperature and high pressure.
Disclosure of Invention
The invention aims to provide a flange for photovoltaic cell production equipment, which not only needs to maintain a dry environment, but also needs to avoid the reduction of the sealing effect caused by the deformation of a sealing ring due to high temperature and high pressure.
According to an aspect of the present invention, there is provided a flange for a photovoltaic cell production apparatus for sealing a furnace tube, the flange comprising:
the extension part extends along a second direction vertical to the extension direction of the furnace tube and is formed on the furnace door of the furnace tube;
the front flange is abutted against one surface of the extension part in a first direction parallel to the extension direction of the furnace tube and covers the furnace door of the furnace tube;
a rear flange abutting against the other surface of the extension portion in the first direction;
one surface of the extension part, which is far away from the inner wall of the furnace tube, is recessed along the second direction to form a groove, one end of the sealing part extends into the groove and is abutted against the groove, and the other end of the sealing part extends out of the groove and is abutted against the front flange and the rear flange respectively;
viewed along a third direction perpendicular to the first direction and the second direction respectively, a first local gap is formed between one end, extending into the groove, of the sealing element and the groove in the second direction, a second local gap is formed between one end, extending out of the groove, of the sealing element and the front flange in the first direction, and a third local gap is formed between one end, extending out of the groove, of the sealing element and the rear flange in the first direction.
Preferably, one surface of the extension part, which is abutted against the front flange, is recorded as a first surface, one surface of the extension part, which is abutted against the rear flange, is recorded as a second surface, one surface of the extension part, which is far away from the inner wall of the furnace tube, is recorded as a third surface, and the third surface is located between the first surface and the second surface;
the gas in the furnace tube is released to the outside of the furnace tube along the first surface, the third surface and the first path of the surface, abutted to the sealing element, of the front flange in sequence;
the flange further comprises:
a first drying member disposed on the first path.
More preferably, the seal comprises:
the first main body part extends into the groove and is abutted with the groove;
the groove includes:
the first groove wall is abutted with one surface, close to the front flange, of the first main body part in the first direction;
the second groove wall is abutted with one surface, deviating from the front flange, of the first main body part in the first direction;
a groove bottom abutting the first body portion in the second direction;
the gas in the furnace tube is released to the outside of the furnace tube along the first surface, the third surface, the first groove wall, the groove bottom, the second groove wall and the second path of the surface of the rear flange, which is abutted against the sealing element,
the flange further comprises:
and a second drying member disposed on the second path.
Preferably, the gas in the furnace tube is released to the outside of the furnace tube along a part of the first surface and the third surface close to the front flange, the first groove wall, the groove bottom, the second groove wall, another part of the third surface far from the front flange and a third path of the second surface in sequence,
the flange further comprises:
and a third drying member disposed on the third path.
More preferably, the first drying member, the second drying member and the third drying member are made of alumina.
More preferably, the seal further comprises:
the second main body part extends out of the groove and is integrally formed with the first main body part, and the second main body part is respectively abutted with the front flange and the rear flange;
the third main body part extends out of the groove and is integrally formed with the second main body part, a first gap is formed between the third main body part and the front flange at an interval, a second gap is formed between the third main body part and the rear flange at an interval, the first drying piece is arranged in the first gap, and the second drying piece is arranged in the second gap;
in the second direction, the rear flange and the outer wall of the furnace tube are arranged at intervals to form a third gap, and the third drying piece is arranged in the third gap.
More preferably, the seal further comprises:
a first inclined surface formed on a surface of the first main body portion abutting against the groove bottom, the first local gap being formed between the first inclined surface and the groove bottom;
the second inclined plane is formed on one surface, abutted to the front flange, of the second main body part, and the second local gap is formed between the second inclined plane and the front flange;
and a third inclined surface formed on a surface of the second main body portion, which is abutted against the rear flange, wherein a third local gap is formed between the third inclined surface and the rear flange.
Preferably, an included angle between the first inclined surface and the bottom of the groove is marked as A; one surface of the second main body part, which is abutted against the front flange, is marked as a first abutting surface, and an included angle between the second inclined surface and the first abutting surface is marked as B; one surface of the second main body part, which is abutted against the rear flange, is recorded as a second abutting surface, and an included angle between the third inclined surface and the second abutting surface is recorded as C, so that the following relation is satisfied:
3.5°≤A≤5.5°；
2.3°≤B≤6.5°；
2.3°≤C≤6.5°。
more preferably, the flange further comprises:
a first seal ring disposed between the first body portion and the second groove wall; a first sealing groove is formed in the first main body part in a concave mode, the first sealing ring is arranged in the first sealing groove, and the first sealing groove is connected with the first inclined surface;
a surface of the second main body part, which is abutted against the front flange, is marked as a first abutting surface, and the second seal ring is arranged between the second main body part and the first abutting surface; a second sealing groove is formed in the second main body part in a concave mode, the second sealing ring is arranged in the second sealing groove, and the second sealing groove is connected with the second inclined surface;
a surface of the second main body portion, which is abutted against the rear flange, is marked as a second abutting surface, and the third seal ring is arranged between the second main body portion and the second abutting surface; the second main body part is concavely provided with a third sealing groove, the third sealing ring is arranged in the third sealing groove, and the third sealing groove is connected with the third inclined surface.
More preferably, the flange further comprises:
the bolts are screwed along the first direction, so that the sealing element is respectively abutted with the front flange, the rear flange and the groove;
a reinforcement portion formed on the first abutting surface and located between the second inclined surface and the first main body portion;
and the positioning groove is formed on the rear flange, and the reinforcing part extends into the positioning groove.
The invention has the following beneficial effects:
the sealing element is arranged on the extending part, the groove is formed in the extending part, the groove extends into the groove, the groove limits the deformation of the sealing element in the first direction, so that the sealing element can only deform in the second direction, a first local gap configured in the second direction is formed at one end, extending into the groove, of the sealing element, the deformation of the sealing element in the second direction is released, and the influence of the thermal deformation of the sealing element on the sealing effect is reduced; the second local gap and the third local gap which are arranged along the first direction are formed on the sealing element so as to release the deformation of the sealing element in the first direction, and the influence of the thermal deformation of the sealing element on the sealing effect is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic cross-sectional view of a flange for a photovoltaic cell production facility according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a first path according to an embodiment of the present invention;
FIG. 3 is a second schematic path diagram according to an embodiment of the invention;
FIG. 4 is a schematic diagram of a third path according to an embodiment of the present invention;
the reference numbers illustrate: 100. a flange for a photovoltaic cell production apparatus; 200. a furnace tube; 10. an extension portion; 210. a furnace door; 20. a front flange; f1, a first direction; 30. a rear flange; 40. a seal member; 220. an inner wall; 230. an outer wall; 110. a groove; 51. a first local gap; 52. a second local gap; 53. a third local gap; 11. a first side; 12. a second face; 13. a third surface; l1, a first path; 61. a first drying member; 41. a first main body portion; 111. a first slot wall; 112. a second slot wall; 113. the bottom of the tank; l2, a second path; 62. a second drying member; l3, third path; 63. a third drying member; 42. a second main body portion; 43. a third main body portion; 54. a first gap; 55. a second gap; 56. a third gap; 71. a bolt; 44. a first inclined plane; 45. a second inclined plane; 46. a third bevel; 421. a first abutting surface; 422. a second abutting surface; 64. a first seal ring; 47. a first seal groove; 65. a second seal ring; 48. a second seal groove; 66. a third seal ring; 49. a third seal groove; 67. a reinforcing portion; 68. and (7) positioning a groove.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully hereinafter with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1-4, the present embodiment provides a flange 100 for a photovoltaic cell production facility, the assembly comprising: extension 10, front flange 20, rear flange 30, seal 40.
Specifically, the flange 100 for a photovoltaic cell production facility is used for sealing a furnace tube 200, and the furnace tube 200 refers to the furnace tube 200 of a diffusion furnace for boron diffusion in a high-temperature and high-pressure environment in a semiconductor diffusion process. The furnace 200 includes a furnace door 210, the furnace door 210 refers to an opening of the furnace 200, and a quartz boat carrying a semiconductor enters the furnace 200 through the furnace door 210. The furnace tube 200 further includes an inner wall 220, and the ambient temperature of the inner wall 220 is relatively high, which may be up to 1100 ℃ in the diffusion process.
In this embodiment, in order to reduce the temperature of the sealing ring, the extending portion 10 is formed at the position of the furnace door 210 of the furnace tube 200 to extend along a second direction, the second direction is perpendicular to the extending direction of the furnace tube 200, the extending direction of the furnace tube 200 can be understood as the longitudinal direction of the furnace tube 200, and the quartz boat carrying the semiconductor is fed into the furnace tube 200 through the furnace door 210 and along the extending direction of the furnace tube 200. By arranging the extending portion 10 extending along the second direction and arranging the sealing member 40 at one side of the extending portion 10 departing from the inner wall 220 of the furnace tube 200, the sealing member 40 is farther away from the center of the furnace tube 200, the heat radiation effect is reduced, and the temperature of the sealing member 40 is reduced.
Specifically, in a first direction F1, the front flange 20 abuts against one surface of the extension portion 10, the rear flange 30 abuts against the other surface of the extension portion 10, the first direction F1 refers to a direction parallel to the extension direction of the furnace tube 200, the sealing member 40 is clamped between the front flange 20 and the rear flange 30, and the front flange 20 covers the furnace door 210 of the furnace tube 200;
in this embodiment, in order to avoid the sealing effect of the sealing element 40 from being reduced by thermal deformation, the groove 110 is recessed along the second direction on the surface of the extension portion 10 away from the inner wall 220 of the furnace tube 200, one end of the sealing element 40 extends into the groove 110, the sealing element 40 abuts against the groove 110, and the other end of the sealing element 40 extends out of the groove 110 and abuts against the front flange 20 and the rear flange 30, respectively.
Specifically, referring to fig. 1, when viewed in a third direction (not shown), a first partial gap 51 is formed between one end of the sealing member 40 extending into the groove 110 and the groove 110 in the second direction, a second partial gap 52 is formed between one end of the sealing member 40 extending out of the groove 110 and the front flange 20 in the first direction F1, and a third partial gap 53 is formed between one end of the sealing member 40 extending out of the groove 110 and the rear flange 30 in the first direction F1. Wherein the third direction is perpendicular to the first direction F1 and the second direction, respectively. Since the groove 110 is two opposite groove walls in the first direction F1, the deformation of the sealing member 40 in the first direction F1 is limited by the two groove walls, so that the sealing member 40 can only be deformed in the second direction, and the deformation of the sealing member 40 in the second direction is released by forming the first local gap 51 arranged in the second direction at the end of the sealing member 40 extending into the groove 110, thereby reducing the influence of the thermal deformation of the sealing member 40 on the sealing effect. By forming the second partial gap 52 and the third partial gap 53 on the sealing member 40, which are arranged along the first direction F1, to release the deformation of the sealing member 40 in the first direction F1, the influence of the thermal deformation of the sealing member 40 on the sealing effect is reduced.
Specifically, in the flange 100 for a photovoltaic cell production apparatus, which is formed by the extension portion 10, the front flange 20, the rear flange 30, and the sealing member 40, high-temperature and high-pressure gas in the furnace tube 200 can be released to the outside of the furnace tube 200 along only three paths, which are a first path L1, a second path L2, and a third path L3.
The surface of the extension portion 10 abutting against the front flange 20 is referred to as a first surface 11, the surface of the extension portion 10 abutting against the rear flange 30 is referred to as a second surface 12, the surface of the extension portion 10 away from the inner wall 220 of the furnace tube 200 is referred to as a third surface 13, and the third surface 13 is located between the first surface 11 and the second surface 12. Referring to fig. 2, a path along which the gas in the furnace tube 200 is released to the outside of the furnace tube 200 sequentially along the first surface 11, the third surface 13, and the contact surface of the front flange 20 and the sealing member 40 is referred to as a first path L1.
Wherein the sealing member 40 includes: extends into the recess 110 and abuts the recess 110 against the first body portion 41. The groove 110 includes: first slot wall 111, second slot wall 112, slot bottom 113. In the first direction F1, the first groove wall 111 abuts a surface of the first body portion 41 close to the front flange 20, and the second groove wall 112 abuts a surface of the first body portion 41 away from the front flange 20. In the second direction, the groove bottom 113 abuts the first body portion 41. Referring to fig. 3, a path along which the gas in the furnace tube 200 is released to the outside of the furnace tube 200 sequentially along the first surface 11, the third surface 13, the first groove wall 111, the groove bottom 113, the second groove wall 112, and the contact surface of the rear flange 30 and the sealing member 40 is referred to as a second path L2.
Referring to fig. 4, a path along which the gas in the furnace tube 200 is released to the outside of the furnace tube 200 sequentially along a portion of the first surface 11 and the third surface 13 close to the front flange 20, the first groove wall 111, the groove bottom 113, the second groove wall 112, another portion of the third surface 13 far from the front flange 20, and the second surface 12 is denoted as a third path L3.
Further, in order to prevent the water vapor outside the furnace tube 200 from entering the first path L1 and reacting with the boron trioxide generated by oxidation in the furnace tube 200 to generate boric acid, the flange 100 for photovoltaic cell production equipment further includes: and a first drying member 61 disposed on the first path L1.
Further, in order to prevent the water vapor outside the furnace tube 200 from entering the second path L2 and reacting with the boron trioxide generated by oxidation in the furnace tube 200 to generate boric acid, the flange 100 for a photovoltaic cell production apparatus further includes: and a second drying member 62 disposed on the second path L2.
Further, in order to prevent the water vapor outside the furnace tube 200 from entering the third path L3 and reacting with the boron trioxide generated by oxidation in the furnace tube 200 to generate boric acid, the flange 100 for photovoltaic cell production equipment further includes: and a third drying part 63 disposed on the third path L3.
The first drying part 61, the second drying part 62 and the third drying part 63 are all made of alumina, the melting point of the alumina is as high as 2054 ℃, and the alumina can be used as a drying agent for the flange 100 of the photovoltaic cell production equipment to prevent water vapor from entering the first path L1, the second path L2 and the third path L3.
More preferably, the seal 40 further comprises: a second body portion 42 and a third body portion 43.
Specifically, the second body portion 42 extends out of the groove 110 from an end of the first body portion 41 away from the inner wall 220, and is integrally formed with the first body portion 41, and the second body portion 42 abuts against the front flange 20 and the rear flange 30, respectively, which can also be understood as that the front flange 20 and the rear flange 30 clamp the second body portion 42. The third main body portion 43 extends out of the groove 110 from one end of the second main body portion 42 away from the inner wall 220, and is integrally formed with the second main body portion 42, a first gap 54 is formed between the third main body portion 43 and the front flange 20 at an interval, a second gap 55 is formed between the third main body portion 43 and the rear flange 30 at an interval, and in the second direction, a third gap 56 is formed between the rear flange 30 and the outer wall 230 of the furnace tube 200 at an interval.
Specifically, in order to facilitate the arrangement of the first drying member 61, the second drying member 62 and the third drying member 63, the first drying member 61 is arranged in the first gap 54, so that the water vapor outside the furnace tube 200 is prevented from entering the first path L1 at the end of the first path L1. The second drying member 62 is disposed in the second gap 55, so that the water vapor outside the furnace tube 200 is prevented from entering the second path L2 at the end of the second path L2. The third drying member 63 is disposed in the third gap 56, so that the water vapor outside the furnace tube 200 is prevented from entering the second path L2 at the end of the second path L2.
In a particular embodiment, the seal 40 further comprises: a first inclined surface 44, a second inclined surface 45, and a third inclined surface 46.
Specifically, the first inclined surface 44 is formed at an end of the first body portion 41 abutting against the groove bottom 113, and the first local gap 51 is formed between the first inclined surface 44 and the groove bottom 113. The second inclined surface 45 is formed on a surface of the second body portion 42 that contacts the front flange 20, and the second partial gap 52 is formed between the second inclined surface 45 and the front flange 20. The third inclined surface 46 is formed on a surface of the second body portion 42 that abuts the rear flange 30, and the third partial gap 53 is formed between the third inclined surface 46 and the rear flange 30. Recording the included angle between the first inclined surface 44 and the groove bottom 113 as A; one surface of the second main body part 42, which is in contact with the front flange 20, is marked as a first contact surface 421, and an included angle between the second inclined surface 45 and the first contact surface 421 is marked as B; a surface of the second body portion 42 that abuts against the rear flange 30 is denoted as a second abutment surface 422, and an included angle between the third inclined surface 46 and the second abutment surface 422 is denoted as C, which satisfies the relation:
3.5°≤A≤5.5°；
2.3°≤B≤6.5°；
2.3°≤C≤6.5°。
when the above relational expression is satisfied, the strain of the seal member 40 caused by the high temperature is released to the first partial gap 51 formed by the first inclined surface 44 and the groove bottom 113, the second partial gap 52 formed between the second inclined surface 45 and the front flange 20, and the third partial gap 53 formed between the third inclined surface 46 and the rear flange 30, and the seal effect is prevented from being deteriorated by the thermal strain of the seal member 40.
Most preferably, in the present embodiment, the angle between the first inclined surface 44 and the groove bottom 113 is a =4 °, the angle between the second inclined surface 45 and the first abutment surface 421 is B =5 °, and the angle between the third inclined surface 46 and the second abutment surface 422 is C =5 °.
In an embodiment, in order to further improve the sealing effect, the flange 100 for a photovoltaic cell production apparatus further includes: a first seal 64, a second seal 65 and a third seal 66.
Specifically, the first sealing ring 64 is disposed between the first main body portion 41 and the second groove wall 112, the first main body portion 41 is recessed to form a first sealing groove 47, the first sealing ring 64 is disposed in the first sealing groove 47, and the first sealing groove 47 is connected to the first inclined surface 44, so as to improve the sealing effect of the second path L2 and the third path L3.
Specifically, a surface of the second main body portion 42 abutting against the front flange 20 is referred to as a first abutting surface 421, the second seal ring 65 is disposed between the second main body portion 42 and the first abutting surface 421, the second main body portion 42 is concavely formed with a second seal groove 48, the second seal ring 65 is disposed in the second seal groove 48, and the second seal groove 48 is connected to the second inclined surface 45, so as to improve the sealing effect of the first path L1.
Specifically, a surface of the second body portion 42 that contacts the rear flange 30 is referred to as a second contact surface 422, and the third seal ring 66 is disposed between the second body portion 42 and the second contact surface 422; the second main body 42 is concavely formed with a third seal groove 49, the third seal ring 66 is disposed in the third seal groove 49, and the third seal groove 49 is connected to the third inclined surface 46 to improve the sealing effect of the second path L2.
The first seal ring 64, the second seal ring 65, and the third seal ring 66 are made of a high-temperature-resistant elastic material such as polytetrafluoroethylene or fluororubber, and in the present embodiment, the first seal ring 64, the second seal ring 65, and the third seal ring 66 are made of polytetrafluoroethylene. The first seal groove 47 is an annular groove 110 formed in the seal member 40, and may be formed by machining a recess in a surface of the first body portion 41 adjacent to the rear flange 30. The second seal groove 48 is an annular groove 110 formed in the front flange 20 and may be machined by cutting a recess in the front flange 20 on a side thereof adjacent the seal 40. The third seal groove 49 is an annular groove 110 formed in the second body portion 42 and may be machined to form a recess in a surface of the second body portion 42 adjacent to the rear flange 30. The first sealing ring 64 is arranged in the first sealing groove 47, the second sealing ring 65 is arranged in the second sealing groove 48, the third sealing ring 66 is arranged in the third sealing groove 49, and the sealing groove is filled with the sealing ring through the elasticity of the sealing ring, so that the size matched with the sealing groove can be selected according to actual conditions when the sealing ring is adopted, and the first path L1, the second path L2 and the third path L3 are blocked after the sealing ring is extruded and deformed.
More preferably, the flange 100 further comprises: bolt 71, reinforcement 67, and positioning groove 68.
The reinforcing portion 67 is formed on the first contact surface 421, and the reinforcing portion 67 is located between the second inclined surface 45 and the first main body portion 41; a positioning groove 68 is formed on the front flange 20, and the reinforcement 67 extends into the positioning groove 68. The reinforcement portion 67 not only serves to reinforce the structural strength of the seal 40, but also serves to position the seal.
Specifically, the bolts 71 are tightened in the first direction F1 to bring the seal 40 into abutment with the front flange 20, the rear flange 30, and the groove 110, respectively. The reinforcement portion 67 is matched with the positioning groove 68 on the front flange 20, at this time, the first main body portion 41 just extends into the groove 110 and contacts with the groove bottom 113, and is screwed in the first direction F1 through the bolt 71, so that the front flange 20 and the rear flange 30 clamp the sealing element 40, and a lever is formed by taking the reinforcement portion 67 as a fulcrum, as shown in fig. 1, in the process that the bolt 71 is screwed leftwards in the first direction F1, the sealing element 40 takes the reinforcement portion 67 as a fulcrum, and the first main body portion 41 serves as a resistance arm and presses rightwards around the fulcrum, so that the first main body portion 41 abuts against the groove bottom 113 and the second groove wall 112 at the same time, and the sealing effect is improved.
Therefore, by providing the groove 110 extending along the second direction on the extension portion 10 and extending the sealing member 40 into the groove 110, the groove 110 limits the deformation of the sealing member 40 in the first direction F1, so that the sealing member 40 can only be deformed along the second direction, and by forming the first local gap 51 configured along the second direction at the end of the sealing member 40 extending into the groove 110, the deformation of the sealing member 40 in the second direction is released, and the influence of the thermal deformation of the sealing member 40 on the sealing effect is reduced; by forming the second partial gap 52 and the third partial gap 53 on the sealing member 40, which are arranged along the first direction F1, to release the deformation of the sealing member 40 in the first direction F1, the influence of the thermal deformation of the sealing member 40 on the sealing effect is reduced.
The above embodiments are merely illustrative of several embodiments of the present invention, which are described in more detail and detail, but not construed as limiting the scope of the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. A flange for a photovoltaic cell production facility for sealing a furnace tube, the flange comprising:
the extension part extends along a second direction vertical to the extension direction of the furnace tube and is formed on the furnace door of the furnace tube;
the front flange is abutted against one surface of the extension part in a first direction parallel to the extension direction of the furnace tube and covers the furnace door of the furnace tube;
a rear flange abutting against the other surface of the extension portion in the first direction;
one surface of the extension part, which is far away from the inner wall of the furnace tube, is recessed along the second direction to form a groove, one end of the sealing part extends into the groove and is abutted against the groove, and the other end of the sealing part extends out of the groove and is abutted against the front flange and the rear flange respectively;
and observing along a third direction which is respectively vertical to the first direction and the second direction, wherein a first local gap is formed between one end, extending into the groove, of the sealing element and the groove in the second direction, a second local gap is formed between one end, extending out of the groove, of the sealing element and the front flange in the first direction, and a third local gap is formed between one end, extending out of the groove, of the sealing element and the rear flange in the first direction.
2. The flange for photovoltaic cell production equipment according to claim 1, wherein a surface of the extension portion abutting against the front flange is denoted as a first surface, a surface of the extension portion abutting against the rear flange is denoted as a second surface, a surface of the extension portion away from the inner wall of the furnace tube is denoted as a third surface, and the third surface is located between the first surface and the second surface;
the gas in the furnace tube is released to the outside of the furnace tube along the first surface, the third surface and the first path of the surface, abutted to the sealing element, of the front flange in sequence;
the flange further comprises:
a first drying member disposed on the first path.
3. The flange for a photovoltaic cell production apparatus according to claim 2, wherein the sealing member comprises:
the first main body part extends into the groove and is abutted with the groove;
the groove includes:
the first groove wall is abutted with one surface, close to the front flange, of the first main body part in the first direction;
the second groove wall is abutted with one surface, deviating from the front flange, of the first main body part in the first direction;
a groove bottom abutting the first body portion in the second direction;
the gas in the furnace tube is released to the outside of the furnace tube along the first surface, the third surface, the first groove wall, the groove bottom, the second groove wall and the second path of the surface of the rear flange, which is abutted against the sealing element,
the flange further comprises:
and a second drying member disposed on the second path.
4. A flange for a photovoltaic cell production apparatus according to claim 3,
the gas in the furnace tube is released to the outside of the furnace tube along a part of the first surface and the third surface close to the front flange, the first groove wall, the groove bottom, the second groove wall, the other part of the third surface far away from the front flange and a third path of the second surface in sequence,
the flange further comprises:
and a third drying member disposed on the third path.
5. The flange for a photovoltaic cell production apparatus according to claim 4, wherein the first desiccant member, the second desiccant member, and the third desiccant member are each made of alumina.
6. The flange for a photovoltaic cell production apparatus according to claim 4, wherein the sealing member further comprises:
the second main body part extends out of the groove and is integrally formed with the first main body part, and the second main body part is respectively abutted with the front flange and the rear flange;
the third main body part extends out of the groove and is integrally formed with the second main body part, a first gap is formed between the third main body part and the front flange at an interval, a second gap is formed between the third main body part and the rear flange at an interval, the first drying piece is arranged in the first gap, and the second drying piece is arranged in the second gap;
in the second direction, the rear flange and the outer wall of the furnace tube are arranged at intervals to form a third gap, and the third drying piece is arranged in the third gap.
7. A flange for a photovoltaic cell production apparatus according to claim 6, wherein the sealing member further comprises:
a first inclined surface formed on a surface of the first main body portion abutting against the groove bottom, the first local gap being formed between the first inclined surface and the groove bottom;
the second inclined plane is formed on one surface, abutted to the front flange, of the second main body part, and the second local gap is formed between the second inclined plane and the front flange;
and a third inclined surface formed on a surface of the second main body portion, which is abutted against the rear flange, wherein a third local gap is formed between the third inclined surface and the rear flange.
8. A flange for a photovoltaic cell production apparatus according to claim 7,
the included angle between the first inclined plane and the bottom of the groove is marked as A; one surface of the second main body part, which is abutted against the front flange, is marked as a first abutting surface, and an included angle between the second inclined surface and the first abutting surface is marked as B; one surface of the second main body part, which is abutted against the rear flange, is recorded as a second abutting surface, and an included angle between the third inclined surface and the second abutting surface is recorded as C, so that the following relation is satisfied:
3.5°≤A≤5.5°；
2.3°≤B≤6.5°；
2.3°≤C≤6.5°。
9. the flange for a photovoltaic cell production apparatus according to claim 7, further comprising:
a first seal ring disposed between the first body portion and the second groove wall; a first sealing groove is formed in the first main body part in a concave mode, the first sealing ring is arranged in the first sealing groove, and the first sealing groove is connected with the first inclined surface;
a surface of the second main body part, which is abutted against the front flange, is marked as a first abutting surface, and the second seal ring is arranged between the second main body part and the first abutting surface; a second sealing groove is formed in the second main body part in a concave mode, the second sealing ring is arranged in the second sealing groove, and the second sealing groove is connected with the second inclined surface;
a third sealing ring, a surface of the second main body part, which is abutted against the rear flange, is marked as a second abutting surface, and the third sealing ring is arranged between the second main body part and the second abutting surface; the second main body part is concavely provided with a third sealing groove, the third sealing ring is arranged in the third sealing groove, and the third sealing groove is connected with the third inclined surface.
10. The flange for a photovoltaic cell production apparatus according to claim 1, further comprising:
bolts are screwed along the first direction, so that the sealing element is respectively abutted with the front flange, the rear flange and the groove;
a reinforcement portion formed on the first abutting surface and located between the second inclined surface and the first main body portion;
a locating slot formed on the rear flange, the reinforcement extending into the locating slot.
CN202210847066.9A 2022-07-07 2022-07-07 Flange for photovoltaic cell production equipment Active CN115289111B (en)

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