CN114877694B - Furnace cover door and annealing furnace - Google Patents

Furnace cover door and annealing furnace

Info

Publication number
CN114877694B
CN114877694B CN202210569098.7A CN202210569098A CN114877694B CN 114877694 B CN114877694 B CN 114877694B CN 202210569098 A CN202210569098 A CN 202210569098A CN 114877694 B CN114877694 B CN 114877694B
Authority
CN
China
Prior art keywords
handle
door
door plate
furnace
connecting rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210569098.7A
Other languages
Chinese (zh)
Other versions
CN114877694A (en
Inventor
孙文彬
戴建波
刘二强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Yiwen Microelectronics Technology Co ltd
Advanced Materials Technology and Engineering Inc
Original Assignee
Wuxi Yiwen Microelectronics Technology Co ltd
Advanced Materials Technology and Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Yiwen Microelectronics Technology Co ltd, Advanced Materials Technology and Engineering Inc filed Critical Wuxi Yiwen Microelectronics Technology Co ltd
Priority to CN202210569098.7A priority Critical patent/CN114877694B/en
Publication of CN114877694A publication Critical patent/CN114877694A/en
Application granted granted Critical
Publication of CN114877694B publication Critical patent/CN114877694B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00Casings; Linings; Walls; Roofs
    • F27D1/18Door frames; Doors, lids or removable covers
    • F27D1/1808Removable covers
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02Heat treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00Casings; Linings; Walls; Roofs
    • F27D1/18Door frames; Doors, lids or removable covers
    • F27D1/1858Doors

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)

Abstract

本发明的实施例提供了一种炉盖门及退火炉,涉及半导体技术领域。该炉盖门及退火炉包括门板、把手组件和定位组件,门板可转动地设置于设备平台上,把手组件可转动地设置于门板上,门板和把手组件的转动平面位于同一平面;定位组件连接于门板和把手组件之间,定位组件用于在门板封闭退火炉的炉体的情况下对门板进行定位,其能够提升操作的便捷性,以解决炉盖门松动的问题。

Embodiments of the present invention provide a furnace cover door and annealing furnace, relating to the field of semiconductor technology. The furnace cover door and annealing furnace include a door panel, a handle assembly, and a positioning assembly. The door panel is rotatably mounted on an equipment platform, and the handle assembly is rotatably mounted on the door panel, with the rotational planes of the door panel and the handle assembly coplanar. The positioning assembly is connected between the door panel and the handle assembly and is used to position the door panel when the door panel encloses the annealing furnace body. This improves operational convenience and solves the problem of loose furnace cover door.

Description

Furnace cover door and annealing furnace
Technical Field
The invention relates to the technical field of semiconductors, in particular to a furnace cover door and an annealing furnace.
Background
In semiconductor and other industrial equipment, furnace lid doors form an important component of the equipment.
After the furnace cover door of the existing annealing furnace is manually closed, a clamp is also required to fasten the furnace cover door. However, the clamp is installed on the furnace cover door after the furnace cover door is closed, so that the operation is not convenient enough, and the problem that the equipment safety or the equipment process is influenced easily due to looseness of the furnace cover door is solved.
Disclosure of Invention
The invention aims to provide a furnace cover door, which can improve the convenience of operation and solve the problem of looseness of the furnace cover door.
The invention further provides an annealing furnace, which can improve the convenience of operation so as to solve the problem of loosening of a furnace cover door.
Embodiments of the invention may be implemented as follows:
The embodiment of the invention provides a furnace cover door, which comprises a door plate, a handle assembly and a positioning assembly, wherein the door plate is rotatably arranged on an equipment platform;
the positioning component is connected between the door plate and the handle component and is used for positioning the door plate under the condition that the door plate seals a furnace body of the annealing furnace.
Optionally, the positioning component comprises a latch hook and a latch bearing, the latch hook is connected with the handle component, and the latch bearing is used for being connected with the equipment platform;
the lock catch hook is used for being buckled with the lock catch bearing under the condition that the door plate seals the furnace body so as to position the door plate.
Optionally, the latch hook has a curved surface, and the latch bearing abuts against the curved surface when being fastened with the latch hook.
Optionally, the handle assembly includes a handle and a pull rod, the handle is rotatably disposed on the door panel, and the pull rod is connected with the handle;
the positioning assembly further comprises a nitrogen spring and a connecting rod, one end of the nitrogen spring is connected to the door plate, the other end of the nitrogen spring is connected with one end of the connecting rod, and the other end of the connecting rod is connected with the handle;
the lock catch hook is buckled with the lock catch bearing so as to deform the nitrogen spring;
And when the lock catch hook is in lock catch connection with the lock catch bearing, the nitrogen spring is deformed in a recovery mode, so that the handle rotates relative to the door plate.
Optionally, the handle assembly further comprises a connecting piece and a pin, the pin is connected with the door plate, the connecting piece is rotationally connected with the pin, and the handle, the connecting rod and the latch hook are fixedly connected with the connecting piece.
Optionally, the connecting piece is arranged between the handle and the connecting rod, and the latch hook is arranged at one side of the connecting rod away from the connecting piece;
the handle, the connecting rod and the latch hook are all connected with the connecting piece through bolts.
Optionally, the door panel has two opposite side walls, the handle is parallel to the side walls, and the pull rod is perpendicular to the side walls.
Optionally, the handle and the door plate form an included angle when the nitrogen spring is in a natural state.
Optionally, the door plate is provided with a supporting rod, the handle assembly is rotatably arranged on the supporting rod, and the positioning assembly is connected between the supporting rod and the handle assembly;
One end of the supporting rod extends to one side of the door plate and is connected with the equipment platform in a rotating mode.
The embodiment of the invention also provides an annealing furnace, which comprises the furnace cover door.
The furnace cover door and the annealing furnace have the beneficial effects that, for example, in the process of closing the furnace body, the handle assembly is moved to drive the door plate to close the furnace body, and then the handle assembly is moved again to position the door plate through the positioning assembly, so that the door plate is closely attached to the furnace body, the process of closing the furnace body is convenient, and the closing effect of the door plate on the furnace body is good.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a furnace cover door when a nitrogen spring is deformed in an embodiment of the application;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is a schematic diagram of a furnace cover door when the nitrogen spring is deformed in an embodiment of the application;
fig. 4 is a schematic structural diagram of a connector according to an embodiment of the present application.
The icons are 10-furnace cover door, 100-door plate, 110-side wall, 120-supporting rod, 121-pin shaft, 200-handle component, 210-handle, 220-pull rod, 230-connecting piece, 231-bolt hole, 232-stud hole, 300-positioning component, 310-latch hook, 311-curved surface, 320-latch bearing, 330-nitrogen spring and 340-connecting rod.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that like reference numerals and letters refer to like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
The inventor of the application discovers that after the furnace cover door of the existing annealing furnace is manually closed, a clamp is also needed to fasten the furnace cover door. However, the clamp is installed on the furnace cover door after the furnace cover door is closed, so that the operation is not convenient enough, and the problem that the equipment safety or the equipment process is influenced by the looseness of the furnace cover door is easy to occur. The embodiment provides an annealing furnace for solving the technical problems.
Referring to fig. 1 to 3, the annealing furnace provided by the application comprises a furnace body (not shown in the figure) and a furnace cover door 10, wherein the furnace cover door 10 is used for sealing the furnace body.
The furnace cover door 10 provided by the embodiment comprises a door plate 100, a handle assembly 200 and a positioning assembly 300, wherein the door plate 100 is rotatably arranged on an equipment platform, the handle assembly 200 is rotatably arranged on the door plate 100, the rotation planes of the door plate 100 and the handle assembly 200 are positioned on the same plane, the positioning assembly 300 is connected between the door plate 100 and the handle assembly 200, and the positioning assembly 300 is used for positioning the door plate 100 under the condition that the door plate 100 seals a furnace body of an annealing furnace.
It should be noted that, the furnace body is disposed on the equipment platform, and the door panel 100 is rotatably disposed on the equipment platform for closing the furnace body.
In the process of closing the furnace body, the handle assembly 200 is moved to drive the door plate 100 to close the furnace body, and then the handle assembly 200 is moved again to position the door plate 100 through the positioning assembly 300, so that the door plate 100 is tightly attached to the furnace body, the process of closing the furnace body is convenient, and the closing effect of the door plate 100 on the furnace body is good.
Further, the positioning assembly 300 comprises a latch hook 310 and a latch bearing 320, wherein the latch hook 310 is connected with the handle assembly 200, the latch bearing 320 is used for being connected with an equipment platform, and the latch hook 310 is used for being buckled with the latch bearing 320 under the condition that the door panel 100 seals the furnace body so as to position the door panel 100.
In the process of rotating the handle assembly 200, the latch hook 310 rotates synchronously with the handle assembly 200 until the latch hook 310 is fastened with the latch bearing 320, so that the door panel 100 is tightly attached to the furnace body, and a good sealing effect is achieved.
Further, the latch hook 310 has a curved surface 311, and the latch bearing 320 abuts against the curved surface 311 when being fastened to the latch hook 310.
It should be noted that, the curved surface 311 is a partial surface from the tip of the latch hook 310 to the inner side of the latch hook 310, the outer peripheral wall of the latch bearing 320 is used to abut against the curved surface 311, and in the case that the latch hook 310 is fastened to the latch bearing 320, the height of the curved surface 311 gradually decreases from the tip of the latch hook 310 to the inner side of the latch hook 310.
The curved surface 311 can make the hasp bearing 320 when the hasp couple 310 looks lock joint, hasp couple 310 and hasp bearing 320 are difficult for breaking away from, have promoted the stability of hasp couple 310 and hasp bearing 320 lock joint, and then have also increased the stability of door plant 100.
Further, the handle assembly 200 comprises a handle 210 and a pull rod 220, the handle 210 is rotatably arranged on the door plate 100, the pull rod 220 is connected with the handle 210, the positioning assembly 300 further comprises a nitrogen spring 330 and a connecting rod 340, one end of the nitrogen spring 330 is connected to the door plate 100, the other end of the nitrogen spring 330 is connected with one end of the connecting rod 340, the other end of the connecting rod 340 is connected with the handle 210, the latch hook 310 is buckled with the latch bearing 320 to deform the nitrogen spring 330, and the nitrogen spring 330 is restored to deform when the latch hook 310 is unbuckled with the latch bearing 320, so that the handle 210 rotates relative to the door plate 100.
It should be noted that the pull rod 220 is used for holding by a human hand, one end of the nitrogen spring 330 is hinged with the door panel 100, and the other end of the nitrogen spring 330 is hinged with one end of the connecting rod 340.
In the process of opening the door panel 100, the pull rod 220 is rotated upwards, so that the handle 210 drives the connecting rod 340 to synchronously rotate upwards, the latch hook 310 is separated from the latch bearing 320, the nitrogen spring 330 is restored to be deformed, when the nitrogen spring 330 is in a natural state, the handle 210 and the door panel 100 are not easy to rotate relatively, at the moment, the pull rod 220 is rotated upwards again, the door panel 100 is rotated upwards, and the door panel 100 is unblocked from the furnace body. In the process of closing the door plate 100, the pull rod 220 is firstly rotated downwards, so that the door plate 100 seals the furnace body, then the pull rod 220 is rotated downwards, the connecting rod 340 is driven to synchronously rotate, the nitrogen spring 330 is deformed until the latch hook 310 is buckled with the latch bearing 320, and the door plate 100 is pressed on the furnace body, so that the sealing effect is enhanced.
In this embodiment, the handle 210 is disposed at an angle to the door panel 100 when the nitrogen spring 330 is in a natural state.
When the door plate 100 is released from closing the furnace body, the handle 210 and the door plate 100 are arranged at an included angle by utilizing the nitrogen spring 330, so that the pull rod 220 and the door plate 100 can be staggered, and the operation of personnel is facilitated.
In addition, the handle assembly 200 further includes a connecting member 230 and a pin (not shown) connected to the door panel 100, the connecting member 230 is rotatably connected to the pin, and the handle 210, the connecting rod 340, and the latch hook 310 are fixedly connected to the connecting member 230.
In this embodiment, the connecting piece 230 is a cylinder, the pin is coaxially inserted in the center of the connecting piece 230 and connected with the door panel 100, the handle 210, the connecting rod 340 and the latch hook 310 are fixedly connected with the connecting piece 230, and in the process of rotating the handle 210, the connecting rod 340, the latch hook 310 and the connecting piece 230 synchronously rotate along with the handle 210.
Optionally, the connecting piece 230 is disposed between the handle 210 and the connecting rod 340, the latch hook 310 is disposed on a side of the connecting rod 340 away from the connecting piece 230, and the handle 210, the connecting rod 340 and the latch hook 310 are all connected with the connecting piece 230 through bolts.
It should be noted that referring to fig. 4, two bolt holes 231 are respectively formed on two opposite planes of the connecting piece 230, a stud hole 232 is also formed on the connecting piece 230 in a penetrating manner for penetrating a stud, the handle 210 is fixedly connected with the connecting piece 230 through the two bolt holes 231 on one side of the connecting piece 230, and the connecting rod 340 and the latch hook 310 are fixedly connected with the connecting piece 230 through the two bolt holes 231 on the other side of the connecting piece 230.
In this embodiment, the door panel 100 has two opposite side walls 110, the handle 210 is parallel to the side walls 110, and the pull rod 220 is perpendicular to the side walls 110.
By limiting the positional relationship between the handle 210, the pull rod 220 and the side wall 110, the space occupied by the handle 210 and the pull rod 220 can be reduced as much as possible, and the space utilization rate can be improved.
In addition, the door panel 100 is provided with a support bar 120, the handle assembly 200 is rotatably disposed on the support bar 120, the positioning assembly 300 is connected between the support bar 120 and the handle assembly 200, and one end of the support bar 120 extends to one side of the door panel 100 and is rotatably connected with the equipment platform.
In this embodiment, the number of the support rods 120 includes two, the two support rods 120 are respectively disposed on the two side walls 110, one end of each support rod 120 is provided with a pin 121, the support rods 120 are rotatably connected with the equipment platform through the pins 121, the number of the handle assemblies 200 and the positioning assemblies 300 also includes two, the two handle assemblies 200 are respectively disposed on one sides of the two side walls 110, the two handle assemblies 200 share one pull rod 220, and the two positioning assemblies 300 are respectively disposed on one sides of the two side walls 110. The pins on the handle assembly 200 are connected to the corresponding support bars 120 and the nitrogen springs 330 are also hinged to the corresponding support bars 120.
During the rotation of the pull rod 220, one end of the support rod 120 rotates on the equipment platform, thereby causing the door panel 100 to be opened or closed.
In summary, the embodiment of the invention provides the furnace cover door 10 and the annealing furnace, in the process of opening the door plate 100, the pull rod 220 is rotated upwards, so that the handle 210 drives the connecting rod 340 to rotate upwards synchronously, the latch hook 310 is separated from the latch bearing 320, the nitrogen spring 330 recovers deformation, when the nitrogen spring 330 is in a natural state, the handle 210 and the door plate 100 are not easy to rotate relatively, at the moment, the pull rod 220 is rotated upwards again, and the door plate 100 is rotated upwards until the door plate 100 releases the sealing of the furnace body. In the process of closing the door plate 100, the pull rod 220 is firstly rotated downwards to enable the door plate 100 to close the furnace body, then the pull rod 220 is rotated downwards to drive the connecting rod 340 to synchronously rotate, the nitrogen spring 330 is deformed until the lock catch hook 310 is buckled with the lock catch bearing 320, so that the door plate 100 is pressed on the furnace body, and the closing effect is enhanced.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. The furnace cover door is characterized by comprising a door plate, a handle assembly and a positioning assembly, wherein the door plate is rotatably arranged on an equipment platform, the handle assembly is rotatably arranged on the door plate, and the rotation planes of the door plate and the handle assembly are positioned on the same plane;
the positioning component is connected between the door plate and the handle component and is used for positioning the door plate under the condition that the door plate seals a furnace body of the annealing furnace;
The positioning assembly comprises a latch hook and a latch bearing, wherein the latch hook is connected with the handle assembly, and the latch bearing is used for being connected with the equipment platform;
the lock catch hook is used for being buckled with the lock catch bearing under the condition that the door plate seals the furnace body so as to position the door plate;
the handle assembly comprises a handle and a pull rod, the handle is rotatably arranged on the door plate, and the pull rod is connected with the handle;
the positioning assembly further comprises a nitrogen spring and a connecting rod, one end of the nitrogen spring is connected to the door plate, the other end of the nitrogen spring is connected with one end of the connecting rod, and the other end of the connecting rod is connected with the handle;
the lock catch hook is buckled with the lock catch bearing so as to deform the nitrogen spring;
And when the lock catch hook is in lock catch connection with the lock catch bearing, the nitrogen spring is deformed in a recovery mode, so that the handle rotates relative to the door plate.
2. The furnace lid door of claim 1, wherein the latch hook has a curved surface, the latch bearing abutting the curved surface when latched with the latch hook.
3. The furnace lid door of claim 1, wherein the handle assembly further comprises a connector and a pin, the pin is connected with the door panel, the connector is rotatably connected with the pin, and the handle, the connecting rod, and the latch hook are fixedly connected with the connector.
4. The furnace lid door of claim 3, wherein the connector is disposed between the handle and the connecting rod, and the latch hook is disposed on a side of the connecting rod facing away from the connector;
the handle, the connecting rod and the latch hook are all connected with the connecting piece through bolts.
5. The furnace lid door of claim 1, wherein the door panel has two opposing side walls, the handle is parallel to the side walls, and the pull rod is perpendicular to the side walls.
6. The furnace lid door of claim 1, wherein the handle is disposed at an angle to the door panel when the nitrogen spring is in a natural state.
7. The furnace lid door of claim 1, wherein the door panel is provided with a support bar, the handle assembly is rotatably arranged on the support bar, and the positioning assembly is connected between the support bar and the handle assembly;
One end of the supporting rod extends to one side of the door plate and is connected with the equipment platform in a rotating mode.
8. An annealing furnace comprising a furnace lid door according to any one of claims 1 to 7.
CN202210569098.7A 2022-05-24 2022-05-24 Furnace cover door and annealing furnace Active CN114877694B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210569098.7A CN114877694B (en) 2022-05-24 2022-05-24 Furnace cover door and annealing furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210569098.7A CN114877694B (en) 2022-05-24 2022-05-24 Furnace cover door and annealing furnace

Publications (2)

Publication Number Publication Date
CN114877694A CN114877694A (en) 2022-08-09
CN114877694B true CN114877694B (en) 2025-09-23

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Country Status (1)

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Citations (2)

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Publication number Priority date Publication date Assignee Title
CN213090478U (en) * 2020-09-22 2021-04-30 天津市中达电热设备有限公司 Furnace door spring pressing device
CN215761126U (en) * 2021-08-13 2022-02-08 杭州申昊科技股份有限公司 Door opening and closing mechanism

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US4290372A (en) * 1978-08-21 1981-09-22 Kubota, Ltd. Furnace door having sealing structure for sealing between furnace door and furnace frame
CN106979690A (en) * 2016-12-27 2017-07-25 扬州弗纳斯工业炉有限公司 A kind of rail mounted fire door retaining mechanism
CN108332211A (en) * 2018-04-12 2018-07-27 江苏海事职业技术学院 A kind of incinerator compression obturator
CN109348662B (en) * 2018-11-22 2023-11-24 武汉银桥南海光电有限公司 Locking sealing structure capable of being opened and closed for cabinet door of communication cabinet
CN212955253U (en) * 2020-08-03 2021-04-13 成都蓉东汽配模具有限公司 A box type heating furnace
CN214582495U (en) * 2021-03-19 2021-11-02 锦州天晟重工有限公司 Automatic opening and closing device for observation door of closed submerged arc furnace

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
CN213090478U (en) * 2020-09-22 2021-04-30 天津市中达电热设备有限公司 Furnace door spring pressing device
CN215761126U (en) * 2021-08-13 2022-02-08 杭州申昊科技股份有限公司 Door opening and closing mechanism

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