CN114877694A

CN114877694A - Furnace cover door and annealing furnace

Info

Publication number: CN114877694A
Application number: CN202210569098.7A
Authority: CN
Inventors: 孙文彬; 戴建波; 刘二强
Original assignee: Advanced Materials Technology and Engineering Inc
Current assignee: Advanced Materials Technology and Engineering Inc
Priority date: 2022-05-24
Filing date: 2022-05-24
Publication date: 2022-08-09
Anticipated expiration: 2042-05-24
Also published as: CN114877694B

Abstract

The embodiment of the invention provides a furnace cover door and an annealing furnace, and relates to the technical field of semiconductors. The furnace cover door and the annealing furnace comprise a door plate, a handle assembly and a positioning assembly, wherein the door plate is rotatably arranged on an equipment platform, the handle assembly is rotatably arranged on the door plate, and the rotating planes of the door plate and the handle assembly are positioned on the same plane; the positioning assembly is connected between the door plate and the handle assembly, and the positioning assembly is used for positioning the door plate under the condition that the door plate seals the furnace body of the annealing furnace, so that the convenience of operation can be improved, and the problem that the furnace cover door is loose is solved.

Description

Furnace cover door and annealing furnace

Technical Field

The invention relates to the technical field of semiconductors, in particular to a furnace cover door and an annealing furnace.

Background

In semiconductor and other industrial equipment, furnace doors form an important component of the equipment.

After a furnace cover door of the existing annealing furnace is manually closed, a clamp is needed to fasten the furnace cover door. However, the clamp is installed on the furnace cover door after the furnace cover door is closed, so that the operation is not convenient enough, and the problem that the equipment safety or the equipment process is influenced because the furnace cover door is loosened easily exists.

Disclosure of Invention

The invention aims to provide a furnace cover door, which can improve the convenience of operation and solve the problem of looseness of the furnace cover door.

The invention also aims to provide an annealing furnace, which can improve the convenience of operation so as to solve the problem of furnace cover door looseness.

Embodiments of the invention may be implemented as follows:

the embodiment of the invention provides a furnace cover door which comprises a door plate, a handle assembly and a positioning assembly, wherein the door plate is rotatably arranged on an equipment platform, the handle assembly is rotatably arranged on the door plate, and the rotating planes of the door plate and the handle assembly are positioned on the same plane;

the positioning assembly is connected between the door plate and the handle assembly and used for positioning the door plate under the condition that the door plate seals the furnace body of the annealing furnace.

Optionally, the positioning assembly includes a latch hook and a latch bearing, the latch hook is connected to the handle assembly, and the latch bearing is used for connecting to the equipment platform;

the lock catch hook is used for being buckled with the lock catch bearing under the condition that the door plate seals the furnace body, so that the door plate is positioned.

Optionally, the latch hook has a curved surface, and the latch bearing abuts against the curved surface when being fastened to the latch hook.

Optionally, the handle assembly includes a handle and a pull rod, the handle is rotatably disposed on the door panel, and the pull rod is connected to the handle;

the positioning assembly further comprises a nitrogen spring and a connecting rod, one end of the nitrogen spring is connected to the door panel, the other end of the nitrogen spring is connected with one end of the connecting rod, and the other end of the connecting rod is connected with the handle;

the lock catch hook is buckled with the lock catch bearing so as to enable the nitrogen spring to deform;

when the lock catch hook and the lock catch bearing are unlocked, the nitrogen spring recovers deformation, so that the handle rotates relative to the door panel.

Optionally, the handle assembly further comprises a connecting piece and a pin, the pin is connected with the door panel, the connecting piece is rotatably connected with the pin, and the handle, the connecting rod and the latch hook are fixedly connected with the connecting piece.

Optionally, the connecting piece is arranged between the handle and the connecting rod, and the latch hook is arranged on one side of the connecting rod, which is far away from the connecting piece;

the handle, the connecting rod and the lock catch hook are all connected with the connecting piece through bolts.

Optionally, the door panel has two opposite side walls, the handle is parallel to the side walls, and the pull rod is perpendicular to the side walls.

Optionally, the handle and the door panel are arranged at an included angle when the nitrogen spring is in a natural state.

Optionally, a support rod is arranged on the door panel, the handle assembly is rotatably arranged on the support rod, and the positioning assembly is connected between the support rod and the handle assembly;

one end of the supporting rod extends to one side of the door plate and is rotatably connected with the equipment platform.

The embodiment of the invention also provides an annealing furnace, which comprises the furnace cover door.

The beneficial effects of the furnace cover door and the annealing furnace of the embodiment of the invention comprise, for example: at the in-process that seals the furnace body, remove the handle subassembly and drive the door plant and seal the furnace body, remove the handle subassembly once more afterwards and fix a position the door plant through locating component for the door plant is comparatively closely laminated on the furnace body, and the process of sealing the furnace body is comparatively convenient, and can make the door plant better to the sealed effect of furnace body.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

FIG. 1 is a schematic structural view of a furnace cover door when a nitrogen spring is deformed in an embodiment of the present application;

FIG. 2 is an enlarged view of portion A of FIG. 1;

FIG. 3 is a schematic structural view of a furnace cover door when a nitrogen spring recovers deformation in the embodiment of the present application;

fig. 4 is a schematic structural diagram of a connecting member in an embodiment of the present application.

Icon: 10-a furnace cover door; 100-a door panel; 110-a side wall; 120-a support bar; 121-a pin shaft; 200-a handle assembly; 210-a handle; 220-a pull rod; 230-a connector; 231-bolt holes; 232-pin hole; 300-a positioning assembly; 310-latch hooks; 311-curved surface; 320-a shackle bearing; 330-nitrogen spring; 340-connecting rod.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

The inventor of the application finds that after the furnace cover door of the existing annealing furnace is manually closed, a clamp is required to fasten the furnace cover door. However, the clamp is arranged on the furnace cover door after the furnace cover door is closed, so that the clamp is not convenient and fast to operate, and the problem that the equipment safety or the equipment process is influenced due to the looseness of the furnace cover door is easy to occur. The present embodiment provides an annealing furnace to solve the above technical problems.

Referring to fig. 1 to 3, the present application provides an annealing furnace including a furnace body (not shown) and a furnace cover door 10, wherein the furnace cover door 10 is used for closing the furnace body.

The furnace cover door 10 provided by the embodiment comprises a door plate 100, a handle assembly 200 and a positioning assembly 300, wherein the door plate 100 is rotatably arranged on an equipment platform, the handle assembly 200 is rotatably arranged on the door plate 100, and the rotating planes of the door plate 100 and the handle assembly 200 are positioned on the same plane; the positioning assembly 300 is connected between the door panel 100 and the handle assembly 200, and the positioning assembly 300 is used to position the door panel 100 in a state where the door panel 100 encloses the body of the annealing furnace.

It should be noted that the furnace body is disposed on the equipment platform, and the door panel 100 is rotatably disposed on the equipment platform for closing the furnace body.

At the in-process that seals the furnace body, remove handle subassembly 200 and drive door plant 100 and seal the furnace body, remove handle subassembly 200 once more afterwards and fix a position door plant 100 through locating component 300 for door plant 100 is for laminating closely on the furnace body, and the process of sealing the furnace body is comparatively convenient, and can make door plant 100 better to the sealed effect of furnace body.

Further, the positioning assembly 300 comprises a latch hook 310 and a latch bearing 320, the latch hook 310 is connected with the handle assembly 200, and the latch bearing 320 is used for connecting with the equipment platform; the latch hooks 310 are used for being fastened with the latch bearings 320 under the condition that the door panel 100 encloses the furnace body, so as to position the door panel 100.

In the process of rotating the handle assembly 200, the latch hook 310 rotates synchronously with the handle assembly 200 until the latch hook 310 is fastened with the latch bearing 320, so that the door panel 100 is attached to the furnace body, and a good sealing effect is achieved.

Further, the latch hook 310 has a curved surface 311, and the latch bearing 320 abuts against the curved surface 311 when being fastened to the latch hook 310.

It should be noted that the curved surface 311 is a partial surface from the tip of the latch hook 310 to the inner side of the latch hook 310, the outer peripheral wall of the latch bearing 320 is used for abutting against the curved surface 311, and when the latch hook 310 is fastened to the latch bearing 320, the height of the curved surface 311 gradually decreases from the tip of the latch hook 310 to the inner side of the latch hook 310.

The curved surface 311 is disposed such that when the latch bearing 320 is fastened to the latch hook 310, the latch hook 310 is not easily separated from the latch bearing 320, which improves the fastening stability between the latch hook 310 and the latch bearing 320, and further increases the stability of the door panel 100.

Further, the handle assembly 200 includes a handle 210 and a pull rod 220, the handle 210 is rotatably disposed on the door panel 100, and the pull rod 220 is connected to the handle 210; the positioning assembly 300 further comprises a nitrogen spring 330 and a connecting rod 340, wherein one end of the nitrogen spring 330 is connected to the door panel 100, the other end of the nitrogen spring 330 is connected with one end of the connecting rod 340, and the other end of the connecting rod 340 is connected with the handle 210; the latch hook 310 is fastened with the latch bearing 320 to deform the nitrogen spring 330; when the latch hook 310 is released from the latch bearing 320, the nitrogen spring 330 is deformed to rotate the handle 210 relative to the door 100.

It should be noted that the pull rod 220 is used for being held by a human hand, one end of the nitrogen spring 330 is hinged with the door panel 100, and the other end of the nitrogen spring 330 is hinged with one end of the connecting rod 340.

In the process of opening the door panel 100, the pull rod 220 is rotated upwards, so that the handle 210 drives the connecting rod 340 to synchronously rotate upwards, the latch hook 310 is separated from the latch bearing 320, and the nitrogen spring 330 restores to deform; when the nitrogen spring 330 is in a natural state, the handle 210 and the door panel 100 are not easy to rotate relatively, and at the moment, the pull rod 220 is rotated upwards, the door panel 100 rotates upwards, and the door panel 100 releases the sealing of the furnace body. In the process of closing the door panel 100, the pull rod 220 is rotated downwards first to seal the door panel 100 to the furnace body, and then the pull rod 220 is rotated downwards to drive the connecting rod 340 to rotate synchronously, so that the nitrogen spring 330 deforms until the latch hook 310 is fastened with the latch bearing 320, and the door panel 100 is pressed on the furnace body to enhance the sealing effect.

In this embodiment, the handle 210 is disposed at an angle to the door panel 100 when the nitrogen spring 330 is in a natural state.

When the door plate 100 is removed from the sealing of the furnace body, the handle 210 is arranged at an included angle with the door plate 100 by using the nitrogen spring 330, so that the pull rod 220 can be staggered with the door plate 100, and the operation of personnel is facilitated.

In addition, the handle assembly 200 further includes a connecting member 230 and a pin (not shown), the pin is connected to the door panel 100, the connecting member 230 is rotatably connected to the pin, and the handle 210, the connecting rod 340, and the latch hook 310 are fixedly connected to the connecting member 230.

In this embodiment, the connecting member 230 is cylindrical, the pin is coaxially inserted through the center of the connecting member 230 and connected to the door panel 100, the handle 210, the connecting rod 340 and the latch hook 310 are all fixedly connected to the connecting member 230, and in the process of rotating the handle 210, the connecting rod 340, the latch hook 310 and the connecting member 230 synchronously rotate along with the handle 210.

Optionally, the connecting member 230 is disposed between the handle 210 and the connecting rod 340, and the latch hook 310 is disposed on a side of the connecting rod 340 away from the connecting member 230; the handle 210, the connecting rod 340 and the latch hook 310 are all connected with the connecting member 230 through bolts.

Please refer to fig. 4, two bolt holes 231 are respectively formed on two opposite planes of the connecting member 230, and a pin hole 232 is also formed through the connecting member 230 for passing a pin therethrough; the handle 210 is fixedly connected to the connecting member 230 through two bolt holes 231 on one side of the connecting member 230, and the connecting rod 340 and the latch hook 310 are fixedly connected to the connecting member 230 through two bolt holes 231 on the other side of the connecting member 230.

In this embodiment, the door panel 100 has two opposite sidewalls 110, the handle 210 is parallel to the sidewalls 110, and the pull rod 220 is perpendicular to the sidewalls 110.

By limiting the position relationship between the handle 210 and the pull rod 220 and the side wall 110, the occupied space of the handle 210 and the pull rod 220 can be reduced as much as possible, and the space utilization rate is improved.

In addition, the door panel 100 is provided with a support rod 120, the handle assembly 200 is rotatably arranged on the support rod 120, and the positioning assembly 300 is connected between the support rod 120 and the handle assembly 200; one end of the support rod 120 extends to one side of the door panel 100 and is rotatably connected to the equipment platform.

In this embodiment, the number of the support rods 120 includes two, the two support rods 120 are respectively disposed on the two side walls 110, one end of each support rod 120 is provided with a pin shaft 121, and the support rods 120 are rotatably connected with the equipment platform through the pin shafts 121; the number of the handle assemblies 200 and the positioning assemblies 300 also includes two, the two handle assemblies 200 are respectively arranged at one side of the two side walls 110, and the two handle assemblies 200 share one pull rod 220; the two positioning members 300 are respectively disposed at one side of the two sidewalls 110. The pins of the handle assembly 200 are connected to the corresponding support rods 120, and the nitrogen springs 330 are hinged to the corresponding support rods 120.

During the rotation of the lever 220, one end of the support bar 120 rotates on the equipment platform, thereby allowing the door panel 100 to be opened or closed.

In summary, the embodiment of the invention provides the furnace cover door 10 and the annealing furnace, in the process of opening the door panel 100, the pull rod 220 is rotated upwards, so that the handle 210 drives the connecting rod 340 to rotate upwards synchronously, the latch hook 310 is separated from the latch bearing 320, and the nitrogen spring 330 is deformed again; when the nitrogen spring 330 is in a natural state, the handle 210 and the door panel 100 are not easy to rotate relatively, and at the moment, the pull rod 220 is rotated upwards, so that the door panel 100 rotates upwards until the door panel 100 releases the sealing of the furnace body. In the process of closing the door panel 100, the pull rod 220 is firstly rotated downwards to enable the door panel 100 to seal the furnace body, then the pull rod 220 is rotated downwards to drive the connecting rod 340 to synchronously rotate, the nitrogen spring 330 deforms until the latch hook 310 is fastened with the latch bearing 320, so that the door panel 100 is pressed on the furnace body, and the sealing effect is enhanced; this scheme is because handle subassembly 200 and locating component 300 all set up on door plant 100, and the personnel's of being convenient for on the one hand operate, and on the other hand also makes door plant 100 can play better sealed effect to the furnace body.

The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims

1. A furnace cover door, characterized in that it comprises a door panel, a handle assembly and a positioning assembly, the door panel is rotatably arranged on an equipment platform, the handle assembly is rotatably arranged on the door panel, the door panel and the rotation plane of the handle assembly is located on the same plane;

The positioning assembly is connected between the door panel and the handle assembly, and the positioning assembly is used for positioning the door panel when the door panel closes the furnace body of the annealing furnace.

2 . The furnace cover door according to claim 1 , wherein the positioning assembly comprises a lock hook and a lock bearing, the lock hook is connected with the handle assembly, and the lock bearing is used for 2 . connect with the device platform;

The lock hook is used for engaging with the lock bearing when the door panel closes the furnace body, so as to position the door panel.

3 . The furnace cover door according to claim 2 , wherein the lock hook has a curved surface, and the lock bearing abuts against the curved surface when the lock hook is engaged with the lock hook. 4 .

4. The furnace cover door according to claim 2, wherein the handle assembly comprises a handle and a pull rod, the handle is rotatably arranged on the door panel, and the pull rod is connected with the handle;

The positioning assembly also includes a nitrogen gas spring and a connecting rod, one end of the nitrogen gas spring is connected to the door plate, the other end of the nitrogen gas spring is connected to one end of the connecting rod, and the other end of the connecting rod is connected to the handle connection;

the lock hook is fastened with the lock bearing to deform the nitrogen gas spring;

When the lock hook is released from the lock bearing, the nitrogen gas spring recovers and deforms, so that the handle rotates relative to the door panel.

5 . The furnace cover door according to claim 4 , wherein the handle assembly further comprises a connecting piece and a stud, the stud is connected with the door panel, and the connecting piece and the stud rotate. 6 . The handle, the connecting rod and the locking hook are all fixedly connected with the connecting piece.

6 . The furnace cover door according to claim 5 , wherein the connecting piece is disposed between the handle and the connecting rod, and the locking hook is disposed on the connecting rod away from the connecting piece. 7 . side;

The handle, the connecting rod and the locking hook are all connected with the connecting piece by bolts.

7 . The furnace cover door according to claim 4 , wherein the door panel has two opposite side walls, the handle is parallel to the side walls, and the pull rod is perpendicular to the side walls. 8 .

8 . The furnace cover door according to claim 4 , wherein the handle is arranged at an angle with the door panel when the nitrogen gas spring is in a natural state. 9 .

9 . The furnace cover door according to claim 1 , wherein a support rod is provided on the door panel, the handle assembly is rotatably disposed on the support rod, and the positioning assembly is connected to the support. 10 . between the lever and the handle assembly;

One end of the support rod extends to one side of the door panel and is rotatably connected with the equipment platform.

10. An annealing furnace, characterized by comprising the furnace cover door according to any one of claims 1-9.