CN114613714A - But leveling pressure device and paster equipment thereof - Google Patents

But leveling pressure device and paster equipment thereof Download PDF

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Publication number
CN114613714A
CN114613714A CN202210082320.0A CN202210082320A CN114613714A CN 114613714 A CN114613714 A CN 114613714A CN 202210082320 A CN202210082320 A CN 202210082320A CN 114613714 A CN114613714 A CN 114613714A
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CN
China
Prior art keywords
assembly
component
pressurizing
leveling
plate
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Pending
Application number
CN202210082320.0A
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Chinese (zh)
Inventor
戚国强
邹贵生
杨友志
刘磊
刘元
王文淦
许建磊
王帅奇
潘兵
吴永超
黄辰潇
杜荣葆
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Quick Intelligent Equipment Co ltd
Tsinghua University
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Quick Intelligent Equipment Co ltd
Tsinghua University
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Application filed by Quick Intelligent Equipment Co ltd, Tsinghua University filed Critical Quick Intelligent Equipment Co ltd
Priority to CN202210082320.0A priority Critical patent/CN114613714A/en
Publication of CN114613714A publication Critical patent/CN114613714A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Presses And Accessory Devices Thereof (AREA)

Abstract

The invention relates to the technical field of paster equipment, in particular to a leveling and pressurizing device and paster equipment thereof, wherein the leveling and pressurizing device comprises: the invention adopts the design that the leveling component is matched with the first sliding block, so that the first pressurizing component can use the second working surface as a reference when in a floating connection state, force the first working surface to be attached to the second working surface in a downward pressing mode by using the second working surface as a reference, thereby establishing the position of the first pressurizing component, and after the position is established, the leveling component is switched to a fixed connection state to complete leveling operation, thereby ensuring that the first working surface and the second working surface are parallel to each other.

Description

But leveling pressure device and paster equipment thereof
Technical Field
The invention relates to the technical field of paster equipment, in particular to a leveling and pressurizing device, and further relates to paster equipment comprising the leveling and pressurizing device.
Background
Along with the development of electronic products, electronic parts become more and more fine, and the importance of packaging technology becomes more and more, at present, a chip mounter used in the field of chip bonding and packaging mainly comprises a driving unit and two pressurizing components, wherein when the chip mounter works, a chip and a substrate are placed between the two pressurizing components, and then the driving unit drives the pressurizing components to pressurize the chip so as to realize sintering bonding between the chip and the substrate;
in order to prevent the common problem of pressure deviation during chip bonding, a leveling device is usually provided in a chip mounter in the prior art, however, the conventional leveling device mainly utilizes a spherical leveling structure to level, but only can perform passive leveling and cannot perform active leveling operation, so that the problem of pressure deviation still easily occurs during chip bonding.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to solve the problem that a chip mounter in the prior art is prone to pressure deviation during chip bonding, a leveling pressurizing device is provided, and in addition, the invention also provides a chip mounting device comprising the leveling pressurizing device.
The technical scheme adopted by the invention for solving the technical problems is as follows: a trimmable pressure apparatus, comprising:
the guide rail is arranged on the frame;
a first pressing component having a first working surface;
the second pressurizing assembly is provided with a second working surface opposite to the first working surface, and the first pressurizing assembly is arranged on the rack or/and the guide rail;
the first sliding block is matched with the guide rail and is arranged on the guide rail in a sliding manner;
the driving unit is used for driving the first pressurizing assembly to move close to or away from the second pressurizing assembly;
the first leveling component is used for connecting the first pressurizing component to the first sliding block and has a floating connection state and a fixed connection state;
when the first leveling assembly is in a floating connection state and the first pressurizing assembly is close to the second pressurizing assembly, the first pressurizing assembly drives the first sliding block to move through the first leveling assembly, and the first leveling assembly allows the first pressurizing assembly to be self-adaptively adjusted in position along with the contact of the first working surface and the second working surface, so that the first working surface is attached to the second working surface;
when the first leveling component is in a fixed connection state, the position of the first pressurizing component is fixed on the first sliding block.
When the leveling mechanism is used for leveling, the first leveling component is in a floating connection state, the first pressurizing component is not fixed in position, the second pressurizing component is fixed in position, a certain parallelism deviation exists between the first working surface and the second working surface, then certain pressure is applied to the first pressurizing component, the first pressurizing component is self-adaptive to adjust the position along with the contact with the second working surface until the first working surface and the second working surface are tightly attached, and then the first leveling component is used for fixing the position of the first pressurizing component, so that the first working surface and the second working surface are guaranteed to be parallel to each other.
Further, the first leveling assembly comprises a first connector and a first fastener;
the first connecting piece is fixedly connected with the first pressurizing assembly and is provided with a first mounting hole;
the first fastener penetrates through the first mounting hole and is used for detachably fixing the first connecting piece on the first sliding block; a first gap is reserved between the outer peripheral wall of the part of the first fastener in the first mounting hole and the inner peripheral wall of the first mounting hole;
due to the existence of the first gap, when the first fastener is not fixed, the first connecting piece and the first pressurizing assembly on the first connecting piece can move in the range constrained by the first gap, so that the position of the first pressurizing assembly can be finely adjusted, and after the position of the first pressurizing assembly is established, the first fastener is screwed down, so that the position of the first pressurizing assembly is fixed on the first sliding block, and the first working surface and the second working surface are ensured to be parallel to each other.
In order to prevent the first pressurizing assembly from being tilted again after being leveled, furthermore, first leveling assemblies are arranged on two sides of the first pressurizing assembly, guide rails are arranged on two sides of the first pressurizing assembly on the rack, the first sliding blocks are arranged on the guide rails in a sliding mode, and the first leveling assembly is connected with the first sliding block on the side where the first leveling assembly is located; through the design of the first leveling assemblies on the two sides and the first sliding block, the two sides of the first pressurizing assembly are balanced in stress, and therefore the first pressurizing assembly is prevented from being inclined in the working process.
In order to improve the detection accuracy of the pressure sensor, furthermore, an installation surface is arranged at one end, away from the second working surface, of the second pressurizing assembly, a pressure sensor is arranged between the installation surface and the rack, the pressure sensor is fixedly installed on the rack, and a second sliding block matched with the pressure sensor is installed on the guide rail in a sliding mode;
the second leveling component is used for connecting the second pressurizing component to the second sliding block and has a floating connection state and a fixed connection state;
when the second leveling component is in a floating connection state and the second pressurizing component is close to the pressure sensor, the second pressurizing component drives the second sliding block to move through the second leveling component, and the second leveling component allows the second pressurizing component to be self-adaptively adjusted in position along with the contact between the mounting surface and the stress surface of the pressure sensor, so that the mounting surface and the stress surface are attached;
when the second leveling component is in a fixed connection state, the position of the second pressurizing component is fixed on the second sliding block;
when the leveling is carried out, the second leveling component is in a floating connection state, the position of the second pressurizing component is not fixed, the position of the pressure sensor is fixed, a certain parallelism deviation exists between the mounting surface and the stress surface of the pressure sensor, then a certain pressure is applied to the second pressurizing component, the second pressurizing component adjusts the position in a self-adaptive mode along with the contact with the stress surface until the mounting surface and the stress surface are tightly attached, and then the second leveling component is used for fixing the position of the second pressurizing component, so that the mounting surface and the stress surface are parallel to each other, and the detection accuracy of the pressure sensor is improved.
Further, the second leveling assembly comprises a second connector and a first fastener;
the second connecting piece is fixedly connected with the second pressurizing assembly and is provided with a second mounting hole;
the second fastener penetrates through the second mounting hole and is used for detachably fixing the second connecting piece on the second sliding block; a second gap is reserved between the outer peripheral wall of the part of the second fastener in the second mounting hole and the inner peripheral wall of the second mounting hole;
due to the existence of the second gap, when the second fastener is not fixed, the second connecting piece and the first pressurizing assembly on the second connecting piece can move in the range constrained by the second gap, so that the position of the second pressurizing assembly can be finely adjusted, and after the position of the second pressurizing assembly is established, the second fastener is screwed down, so that the position of the second pressurizing assembly is fixed on the second sliding block, and the mounting surface and the stress surface are ensured to be parallel to each other.
In order to prevent the second pressurizing assembly from being tilted again after being leveled, further, second leveling assemblies are arranged on two sides of the second pressurizing assembly, guide rails are arranged on two sides of the second pressurizing assembly on the rack, second sliding blocks are arranged on the guide rails in a sliding mode, and the second leveling assemblies are connected with the second sliding blocks on the sides of the second leveling assemblies; through the design of the second leveling assemblies on the two sides and the second sliding block, the two sides of the second pressurizing assembly are balanced in stress, and therefore the second pressurizing assembly is prevented from being inclined in the working process.
In order to improve the uniformity of the force application on the first pressurizing assembly, further, the driving unit comprises a driving mechanism and a balance force application mechanism;
the balance force application mechanism comprises a ball pair assembly and an elastic buffer assembly with elasticity, the output end of the driving mechanism is in transmission connection with the ball pair assembly through the elastic buffer assembly, and the ball pair assembly is in transmission connection with the first pressurizing assembly;
the elastic buffer component can play a role in buffering by utilizing the elasticity of the elastic buffer component, so that the pressure applied to the chip is controlled more accurately; after the pressure of the driving mechanism is transmitted to the elastic buffering component, the elastic buffering component transmits the pressure to the ball pair component, and the ball pair component can concentrate the pressure dispersed by the elastic buffering component to one point of the center, so that the balance of applying the pressure to the first pressurizing component is ensured, and the problem of pressure unbalance loading caused by manufacturing and assembling errors of the elastic buffering component is prevented.
In order to facilitate manufacturing and assembly, the elastic buffer assembly further comprises a fixed plate, a movable plate, a guide rod and an elastic element;
the output end of the driving mechanism is fixedly connected with the fixed plate, the movable plate is fixedly connected with the ball pair assembly, one of the fixed plate and the movable plate is fixedly connected with the guide rod, the other one of the fixed plate and the movable plate is connected with the guide rod in a sliding mode along the moving direction of the first sliding block, and the elastic element is located between the movable plate and the fixed plate.
In order to realize the transmission connection of the ball pair assembly between the elastic buffer assembly and the first pressurizing assembly, the ball pair assembly further comprises a ball pair plate I, a central ball, a ball pair plate II and a limiting plate, the central ball is positioned between the ball pair plate I and the ball pair plate II, one end of the limiting plate is provided with a reset hole, and the other end of the limiting plate is fixedly connected with the ball pair plate II;
a reset rod is installed on the ball auxiliary plate I or the movable plate, the reset rod is inserted into the reset hole, and a third gap is reserved between the outer peripheral wall of the reset rod positioned in the reset hole and the inner peripheral wall of the reset hole;
one of the first ball auxiliary plate and the second ball auxiliary plate is fixedly connected with the movable plate, and the other one of the first ball auxiliary plate and the second ball auxiliary plate is fixedly connected with the first pressurizing assembly;
the third gap is arranged, so that on one hand, when the first pressurizing assembly pressurizes, the pressure applied to the first ball auxiliary plate by the elastic buffer assembly can be realized, and the pressure is totally and intensively transferred to the second ball auxiliary plate by the central ball and then transferred to the first pressurizing assembly by the second ball auxiliary assembly; on the other hand, when the first pressurizing assembly resets, the first ball subplate pulls the limiting plate through the resetting rod, so that the second ball subplate and the central ball move along the resetting direction along with the first pressurizing assembly; meanwhile, the limiting plate and the reset rod limit the relative positions of the first ball auxiliary plate and the second ball auxiliary plate, and the central ball can be restrained between the first ball auxiliary plate and the second ball auxiliary plate.
The invention also provides a piece mounting device which comprises the leveling and pressurizing device.
The invention has the beneficial effects that: the leveling and pressurizing device adopts the design that the leveling component is matched with the first sliding block, so that when in a floating connection state, the first pressurizing component can force the second working surface of the first working surface to be attached by pressing down on the basis of the second working surface, the position of the first pressurizing component is determined, and after the position is determined, the leveling component is switched to a fixed connection state to complete leveling operation, so that the first working surface and the second working surface are ensured to be parallel to each other.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic view of a trimmable pressure apparatus of the present invention;
FIG. 2 is a schematic sectional view taken along line A-A in FIG. 1;
FIG. 3 is an enlarged partial schematic view of B in FIG. 2;
FIG. 4 is a schematic cross-sectional view taken along line C-C of FIG. 2;
FIG. 5 is an exploded view of the first pressing assembly of the present invention connected to the first slider via the leveling assembly;
FIG. 6 is a three-dimensional schematic view of the first pressing assembly of the present invention coupled to the first slider via the leveling assembly;
FIG. 7 is a three-dimensional schematic view of the spring-damper assembly and ball-subassembly of the present invention as assembled;
FIG. 8 is a two-dimensional schematic view of the elastomeric cushioning component and ball sub assembly of the present invention as assembled;
FIG. 9 is a schematic cross-sectional view taken along line D-D of FIG. 8;
FIG. 10 is a schematic cross-sectional view taken along line E-E of FIG. 9;
FIG. 11 is an enlarged partial schematic view of F in FIG. 10;
FIG. 12 is a schematic view of the installation of the second compression assembly;
FIG. 13 is a schematic sectional view taken along line G-G in FIG. 12;
FIG. 14 is an enlarged partial schematic view of H in FIG. 13;
FIG. 15 is a schematic sectional view taken along line K-K in FIG. 13;
in the figure: 1. a first pressurizing assembly 1-1, a first working surface;
2. a second pressurizing assembly 2-1, a second working surface 2-2 and a mounting surface;
3. the leveling device comprises a first leveling component 3-1, a first connecting piece 3-11, a first mounting hole 3-2, a first fastening piece 3-3 and a first gap;
4. 4-1 parts of an elastic buffer component, 4-2 parts of a fixed plate, 4-21 parts of a movable plate, 4-3 parts of a third threaded hole, 4-4 parts of a guide rod, 4-5 parts of an elastic element and a limiting nut;
5. 5-1 parts of ball pair assembly, 5-2 parts of ball pair plate I, 5-3 parts of central ball, 5-4 parts of ball pair plate II, 5-41 parts of limiting plate, 5-5 parts of reset hole, 5-6 parts of reset rod and a third gap;
6. the device comprises a driving mechanism 6-1, a motor 6-2, a screw rod 6-3, a transmission nut 6-4, a nut base plate 6-5, a third connecting piece 6-6 and a third sliding block;
7, a second leveling component, 7-1, a second connecting piece, 7-11, a second mounting hole, 7-2, a second fastening piece, 7-3 and a second gap;
8. a second slide block 8-1 and a second threaded hole;
9. a pressure sensor 9-1 and a stress surface;
10. a guide rail 11, a frame;
12. a first slide block 12-1 and a first threaded hole.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic diagrams illustrating the basic structure of the present invention only in a schematic manner, and thus show only the constitution related to the present invention, and directions and references (e.g., upper, lower, left, right, etc.) may be used only to help the description of the features in the drawings. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the claimed subject matter is defined only by the appended claims and equivalents thereof.
As shown in fig. 1-11, a trimmable pressure apparatus includes:
the guide rail 10 is fixedly arranged on the frame 11;
a first pressing assembly 1 having a first working surface 1-1;
the second pressing assembly 2 is provided with a second working surface 2-1 opposite to the first working surface 1-1, and the first pressing assembly 1 is arranged on the frame 11 or/and the guide rail 10;
the first sliding block 12 is matched with the guide rail 10 and is arranged on the guide rail 10 in a sliding mode;
the driving unit is used for driving the first pressurizing assembly 1 to move close to or away from the second pressurizing assembly 2 along the linear direction;
and a first leveling member 3 for connecting the first pressing member 1 to the first slider 12, and having a floating connection state and a fixed connection state; when the first leveling component 3 is in a floating connection state and the first pressurizing component 1 is close to the second pressurizing component 2, the first pressurizing component 1 drives the first sliding block 12 to move through the first leveling component 3, and the first leveling component 3 allows the first pressurizing component 1 to be self-adaptively adjusted in position along with the contact of the first working surface 1-1 and the second working surface 2-1, so that the first working surface 1-1 is attached to the second working surface 2-1; when the first leveling component 3 is in a fixed connection state, the first pressing component 1 is fixed on the first sliding block 12.
As shown in fig. 5 and 6, the first leveling member 3 in this embodiment includes a first connecting member 3-1 and a first fastening member 3-2; the first connecting piece 3-1 is fixedly connected with the first pressurizing assembly 1 and is provided with a first mounting hole 3-11; the first fastener 3-2 penetrates through the first mounting hole 3-11 and is used for detachably fixing the first connecting piece 3-1 on the first sliding block 12; as shown in fig. 3, a first gap 3-3 is left between the outer peripheral wall of the first fastening piece 3-2 at the position inside the first mounting hole 3-11 and the inner peripheral wall of the first mounting hole 3-11; the cross section of the first mounting hole 3-11 can be oval, round, oblong or square, and the like, and the first mounting hole 3-11 with a round cross section is specifically adopted in the implementation;
in this embodiment, the first connecting member 3-1 may be integrally formed with the first sliding block 12, or the first connecting member 3-1 is fixedly connected with the first sliding block 12 by a mechanical connection;
specific implementations of the first fastener 3-2 for detachably securing the first connector 3-1 include, but are not limited to, the following:
firstly, a first fastener 3-2 adopts a screw, a first threaded hole 12-1 matched with the first fastener 3-2 is formed in a first sliding block 12, the first fastener 3-2 penetrates through a first mounting hole 3-11 and then is in threaded connection with the first threaded hole 12-1, and the aperture of the first mounting hole 3-11 is larger than that of the first threaded hole 12-1; when the first pressing component 3-2 is not screwed, the first pressing component 1 can move in a range restricted by the first gap 3-3 so as to carry out fine position adjustment, after the position of the first pressing component 1 is established, the first pressing component 3-2 is screwed again so that the nut of the first pressing component 3-2 is abutted against the first connecting component 3-1, and the position of the first pressing component 1 is fixed on the first sliding block 12;
the second way is that the first fastener 3-2 comprises a stud and a nut, the stud is fixed on the first slide block 12 through welding, clamping, threaded connection, integral forming and the like, and penetrates through the first mounting hole 3-11 to be in threaded connection with the nut; when the nut is not tightened, the first pressure component 1 can move in a range limited by the first clearance 3-3 so as to carry out fine position adjustment; the nut, when tightened, abuts against the first connecting member 3-1, thereby fixing the position of the first presser assembly 1 on the first slider 12.
The two sides of the first pressurizing assembly 1 are both provided with first leveling assemblies 3, guide rails 10 are arranged on the machine frame 11 and positioned on the two sides of the first pressurizing assembly 1, first sliding blocks 12 are slidably mounted on the guide rails 10, and the first leveling assemblies 3 are connected with the first sliding blocks 12 on the sides where the first leveling assemblies are positioned; through the design of the first leveling component 3 and the first sliding block 12 on the two sides, the two sides of the first pressurizing component 1 are forced to be balanced in stress, so that the first pressurizing component 1 is prevented from being inclined due to lateral load in the working process;
as shown in fig. 7 to 11, the driving unit in this embodiment includes a driving mechanism 6 and a balanced urging mechanism;
the balance force application mechanism comprises a ball pair assembly 5 and an elastic buffer assembly 4 with elasticity, the output end of the driving mechanism 6 is in transmission connection with the ball pair assembly 5 through the elastic buffer assembly 4, and the ball pair assembly 5 is in transmission connection with the first pressurizing assembly 1.
The elastic buffer component 4 comprises a fixed plate 4-1, a movable plate 4-2, a guide rod 4-3 and an elastic element 4-4; the output end of the driving mechanism 6 is fixedly connected with the fixed plate 4-1, the movable plate 4-2 is fixedly connected with the ball pair assembly 5, one end of the elastic element 4-4 is abutted against the movable plate 4-2, the other end is abutted against the fixed plate 4-1, in the embodiment, the fixed plate 4-1 is fixedly connected with the guide rod 4-3, the guide rod 4-3 penetrates through the movable plate 4-2 and is slidably connected with the movable plate 4-2 along the moving direction of the first sliding block 12, the guide rod 4-3 is in threaded connection with the limit nut 4-5, the limit nut 4-5 is abutted against the end face of the movable plate 4-2, which is far away from the fixed plate 4-1, so that the fixed plate 4-1, the guide rod 4-3 and the movable plate 4-2 form a whole to prevent the movable plate 4-2 from falling off the guide rod 4-3, meanwhile, the distance between the fixed plate 4-1 and the movable plate 4-2 can be changed by screwing the limit nut 4-5, so that the elastic force of the elastic element 4-4 can be adjusted; or, in this embodiment, the movable plate 4-2 is fixedly connected to the guide rod 4-3, the guide rod 4-3 penetrates through the fixed plate 4-1 and is slidably connected to the fixed plate 4-1 along the moving direction of the first slider 12, the guide rod 4-3 is threadedly connected to the limit nut 4-5, and the limit nut 4-5 abuts against an end face of the fixed plate 4-1, which is far away from the movable plate 4-2.
In order to improve the buffering performance, the elastic element 4-4 adopts a plurality of springs, the springs and the guide rods 4-3 are respectively provided with a plurality of springs and are in one-to-one correspondence, the springs are sleeved outside the guide rods 4-3 corresponding to the springs to prevent the springs from being inclined, and the springs between the fixed plate 4-1 and the movable plate 4-2 are circumferentially distributed at intervals around the center of the ball pair assembly 5 to improve the uniformity of pressure distribution; in the embodiment, four springs are specifically adopted, the four springs are distributed at four corners of a square, and the circle center of a circumscribed circle where the square is located and the sphere center of the central ball 5-2 are coincided with the central line of the first pressurizing assembly 1;
in the embodiment, after the pressure of the driving mechanism 6 is transmitted to the spring, the spring can play a role of buffering, then the spring transmits the pressure to the ball pair component 5, and the ball pair component 5 can concentrate the pressure dispersed by each spring to a point at the center, so that the balance of the pressure applied to the first pressurizing component 1 is ensured, and the problem of pressure unbalance loading caused by errors of spring manufacturing and assembly is prevented; therefore, the first leveling component 3 and the balance force application mechanism jointly ensure the stress uniformity of the chip during bonding, and the applied pressure without unbalance load can also prevent the first pressure component 1 after leveling from being inclined.
In the embodiment, the ball pair assembly 5 comprises a first ball pair plate 5-1, a central ball 5-2, a second ball pair plate 5-3 and a limiting plate 5-4, wherein the central ball 5-2 is positioned between the first ball pair plate 5-1 and the second ball pair plate 5-3, in order to prevent the central ball 5-2 from falling off, the first ball pair plate 5-1 and the second ball pair plate 5-3 are respectively provided with a sunken part, and two ends of the central ball 5-2 are respectively positioned in the sunken parts of the first ball pair plate 5-1 and the second ball pair plate 5-3;
one of the first ball auxiliary plate 5-1 and the second ball auxiliary plate 5-3 is fixedly connected with the movable plate 4-2, and the other one is fixedly connected with the first pressurizing assembly 1; taking the first ball auxiliary plate 5-1 fixedly connected with the second movable plate 4-2 as an example, the second ball auxiliary plate 5-3 is fixedly connected with the first pressurizing assembly 1, and in order to facilitate improvement of the uniformity of the force application of the first pressurizing assembly 1, the first ball auxiliary plate 5-1 is preferably fixed at the middle position of the second movable plate 4-2;
one end of the limiting plate 5-4 is provided with a reset hole 5-41, and the other end of the limiting plate is fixedly connected with the ball auxiliary plate II 5-3; a reset rod 5-5 is fixed on the first ball subplate 5-1 or the movable plate 4-2, the reset rod 5-5 is inserted into the reset hole 5-41, and as shown in fig. 11, a third gap 5-6 is left between the outer peripheral wall of the reset rod 5-5 positioned in the reset hole 5-41 and the inner peripheral wall of the reset hole 5-41;
the reset rod 5-5 is fixed on the first ball subplate 5-1 or the movable plate 4-2 in a threaded connection mode, a clamping connection mode, a welding mode or an integral forming mode and the like; the reset rod 5-5 can also be replaced by a fastener, for example, a screw is used, a third threaded hole 4-21 matched with the reset rod 5-5 is formed in the first ball auxiliary plate 5-1 or the movable plate 4-2, and the reset rod 5-5 penetrates through the reset hole 5-41 and then is in threaded connection with the third threaded hole 4-21.
The third gap 5-6 is arranged, so that on one hand, when the first pressurizing assembly 1 pressurizes, the pressure applied to the first ball auxiliary plate 5-1 by the elastic buffer assembly 4 can be realized, and the pressure is totally and intensively transmitted to the second ball auxiliary plate 5-3 by the central ball 5-2 and then transmitted to the first pressurizing assembly 1 by the second ball auxiliary plate 5-3; on the other hand, when the first pressurizing assembly 1 is reset, the first ball auxiliary plate 5-1 pulls the limiting plate 5-4 through the reset rod 5-5, so that the second ball auxiliary plate 5-3 and the central ball 5-2 move along with the first pressurizing assembly 1 in the resetting direction; meanwhile, the arrangement of the limiting plate 5-4 and the reset rod 5-5 also limits the relative positions of the first ball auxiliary plate 5-1 and the second ball auxiliary plate 5-3, and plays a role in restraining the central ball 5-2; in addition, the third gap 5-6 is arranged, so that the balance force application mechanism is not rigidly connected with the first pressurizing assembly 1, and the leveling of the first pressurizing assembly 1 is not influenced.
In the embodiment, the driving mechanism 6 comprises a motor 6-1, a screw rod 6-2, a transmission nut 6-3 and a nut substrate 6-4, a third connecting piece 6-5 is fixed on the nut substrate 6-4, a third sliding block 6-6 matched with the guide rail 10 is slidably mounted on the guide rail 10, and the third connecting piece 6-5 and the third sliding block 6-6 are fixedly connected through a screw, specifically, the connecting structure between the third sliding block 6-6 and the third connecting piece 6-5 is the same as the connecting structure between the first sliding block 12 and the first connecting piece 3-1; the output end of the motor 6-1 is in transmission connection with the screw rod 6-2, the screw rod 6-2 is in thread transmission connection with the transmission nut 6-3, the axial direction of the screw rod 6-2 is parallel to the sliding direction of the first sliding block 12, the transmission nut 6-3 is fixedly connected with the nut substrate 6-4, and the nut substrate 6-4 is fixedly connected with the fixed plate 4-1; the motor 6-1 drives the screw rod 6-2 to rotate, the transmission nut 6-3 feeds, the nut base plate 6-4 and the fixed plate 4-1 are driven by the transmission nut 6-3 to displace, the fixed plate 4-1 is transmitted to the movable plate 4-2 through the elastic element 4-4, and finally the movable plate 4-2 drives the first pressurizing assembly 1 to reciprocate through the ball pair assembly 5; it should be noted that, in the present embodiment, the driving mechanism 6 may also adopt an air cylinder, an electric push rod, etc.
The working principle of the leveling pressurizing device in the embodiment is as follows:
the first working surface 1-1 of the first pressure assembly 1 and the second working surface 2-1 of the second pressure assembly 2 are machined before leveling to ensure the flatness of the first working surface 1-1 and the second working surface 2-1;
when leveling, the first fastening piece 3-2 is loosened, the first leveling component 3 is in a floating connection state, the position of the first pressurizing component 1 is not fixed, the pressure sensor 9 supports the second pressurizing component 2, the position of the second pressurizing component 2 is fixed, a certain parallelism deviation exists between the first working surface 1-1 and the second working surface 2-1, then the motor 6-1 drives the screw rod 6-2 to feed the transmission nut 6-3 downwards to apply a certain pressure to the first pressurizing component 1, the first pressurizing component 1 is self-adaptively adjusted along with the contact with the second working surface 2-1 until the first working surface 1-1 and the second working surface 2-1 are tightly attached, then the first fastening piece 3-2 is screwed down to fix the position of the first pressurizing component 1, so that the first working surface 1-1 and the second working surface 2-1 are mutually parallel, the leveling device has the advantages of convenience in operation and good effect, is particularly suitable for desktop-level small equipment, can continuously work only by once leveling, does not need to be leveled in every work, and is time-saving and labor-saving.
When the device works, the motor 6-1 drives the screw rod 6-2 to enable the transmission nut 6-3 to feed downwards, the spring can play a role in buffering after pressure is transmitted to the spring, then the spring transmits the pressure to the ball pair assembly 5, the ball pair assembly 5 can concentrate the pressure dispersed by each spring to a central point, the balance of the pressure applied to the first pressurizing assembly 1 is ensured, and therefore the first leveling assembly 3 and the balance force application mechanism jointly ensure the uniformity of stress of a chip during bonding;
therefore, the first leveling component 3 ensures that the first working surface 1-1 and the second working surface 2-1 are always kept in a parallel state, the balance force application mechanism ensures the balance of the applied pressure to the first pressure component 1, the first pressure component and the second pressure component work cooperatively to realize the uniformity of the stress during chip bonding, and the common problem of pressure deviation during chip bonding is prevented.
Example 2
As shown in fig. 12 to 15, embodiment 2 differs from embodiment 1 in that: in order to improve the detection accuracy of the pressure sensor 9, one end, far away from the second working surface 2-1, of the second pressurizing assembly 2 is provided with an installation surface 2-2, the pressure sensor 9 is arranged between the installation surface 2-2 and the rack 11, the pressure sensor 9 is fixedly installed on the rack 11, and the guide rail 10 is provided with a second sliding block 8 matched with the guide rail in a sliding manner; the second leveling component 7 is used for connecting the second pressurizing component 2 to the second sliding block 8 and has a floating connection state and a fixed connection state;
when the second leveling component 7 is in a floating connection state and the second pressurizing component 2 is close to the pressure sensor 9, the second pressurizing component 2 drives the second slider 8 to move through the second leveling component 7, and the second leveling component 7 allows the second pressurizing component 2 to be self-adaptively adjusted in position along with the contact of the mounting surface 2-2 and the stress surface 9-1 of the pressure sensor 9, so that the attachment of the mounting surface 2-2 and the stress surface 9-1 is realized;
when the second leveling component 7 is in a fixed connection state, the position of the second pressurizing component 2 is fixed on the second sliding block 8;
the second leveling component 7 in this embodiment comprises a second connecting piece 7-1 and a first fastening piece 3-2; the second connecting piece 7-1 is fixedly connected with the second pressurizing assembly 2 and is provided with a second mounting hole 7-11; the second fastening piece 7-2 passes through the second mounting hole 7-11 and is used for detachably fixing the second connecting piece 7-1 on the second sliding block 8; as shown in fig. 14, a second gap 7-3 is left between the outer peripheral wall of the part of the second fastening piece 7-2 located in the second mounting hole 7-11 and the inner peripheral wall of the second mounting hole 7-11; the cross section of the second mounting hole 7-11 can be oval, round, oblong or square, and the like, and the second mounting hole 7-11 with a round cross section is specifically adopted in the implementation;
in this embodiment, the second connecting member 7-1 may be integrally formed with the second slider 8, or the second connecting member 7-1 is fixedly connected to the second slider 8 by mechanical connection;
specific implementations of the second fastener 7-2 for detachably securing the second connector 7-1 include, but are not limited to, the following:
firstly, a second fastening piece 7-2 adopts a screw, a second threaded hole 8-1 matched with the screw is formed in the second sliding block 8, the second fastening piece 7-2 penetrates through a second mounting hole 7-11 and then is in threaded connection with the second threaded hole 8-1, and the aperture of the second mounting hole 7-11 is larger than that of the second threaded hole 8-1; when the second fastening piece 7-2 is not tightened, the second pressing component 2 can move within the range limited by the first gap 3-3 so as to perform fine position adjustment, and after the position of the second pressing component 2 is established, the second fastening piece 7-2 is tightened again so that the nut of the second fastening piece 7-2 is pressed against the second connecting piece 7-1, so that the position of the second pressing component 2 is fixed on the second sliding block 8;
the second fastener 7-2 comprises a stud and a nut, the stud is fixed on the second sliding block 8 through welding, clamping, threaded connection, integral forming and the like, and is in threaded connection with the nut after penetrating through the second mounting hole 7-11; when the nut is not tightened, the second pressing component 2 can move within the range restricted by the second gap 7-3 so as to carry out fine position adjustment; the nut is tightly pressed against the second connecting piece 7-1 when being screwed, so that the position of the second pressure assembly 2 is fixed on the second sliding block 8;
in order to prevent the second pressurizing assembly 2 from being tilted again after being leveled, in the embodiment, the second leveling assembly 7 and the second sliding block 8 are arranged on both sides of the second pressurizing assembly 2, the second sliding block 8 is connected with the guide rail 10 on the side where the second sliding block is located in a sliding manner, and the second leveling assembly 7 is connected with the second sliding block 8 on the side where the second sliding block is located; through the design of the second leveling component 7 and the second sliding block 8 on the two sides, the two sides of the second pressurizing component 2 are forced to be balanced in stress, and therefore the second pressurizing component 2 is prevented from being inclined in the working process.
In the embodiment, the first sliding block 12, the second sliding block 8 and the third sliding blocks 6 to 6 on the same side are all arranged on the same guide rail 10, so that the complexity of the structure can be reduced, and the problem of jamming possibly caused by installation errors and the like can be avoided.
In this embodiment, the first pressing component 1 and the second pressing component 2 are arranged up and down, that is, the first pressing component 1 is located above the second pressing component 2, the second pressing component 2 is located above the pressure sensor 9, and after the second pressing component 2 is leveled, the mounting surface 2-2 of the second pressing component 2 can directly abut against the stressed surface 9-1 of the pressure sensor 9.
The leveling principle of the second pressurizing assembly 2 in the present embodiment is as follows:
the flatness of the mounting surface 2-2 of the second pressurizing assembly 2 is ensured by a machining method before leveling;
when leveling, the second fastening piece 7-2 is unscrewed, the second leveling component 7 is in a floating connection state, the position of the second pressurizing component 2 is not fixed, the position of the pressure sensor 9 is fixed, a certain parallelism deviation exists between the mounting surface 2-2 and the stress surface 9-1 of the pressure sensor 9, then the driving mechanism 6 applies a certain downward pressure to the second pressurizing assembly 2, manually or in other ways, the second pressurizing assembly 2 adjusts the position adaptively along with the contact with the stress surface 9-1 until the mounting surface 2-2 and the stress surface 9-1 are tightly attached, then, the position of the second pressurizing assembly 2 is fixed by tightening the second fastening piece 7-2, thereby ensuring that the mounting surface 2-2 and the stress surface 9-1 are parallel to each other, and improving the detection accuracy of the pressure sensor 9.
When the chip is bonded, the chip is placed between the first pressurizing assembly 1 and the second pressurizing assembly 2, the driving unit drives the first pressurizing assembly 1 to press the chip downwards so as to realize sintering bonding between the chip and the substrate, and the pressure sensor 9 performs pressure detection in the process.
Example 3
A patch device comprising the trimmable pressure apparatus of embodiment 1 or embodiment 2 above.
In light of the foregoing description of the preferred embodiment of the present invention, it is to be understood that numerous changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims (10)

1. The flattening pressurizing device is characterized in that: the method comprises the following steps:
the guide rail (10) is arranged on the frame (11);
a first pressing assembly (1) having a first working surface (1-1);
a second pressing assembly (2) which is provided with a second working surface (2-1) opposite to the first working surface (1-1), wherein the first pressing assembly (1) is arranged on the frame (11) or/and the guide rail (10);
the first sliding block (12) is matched with the guide rail (10) and is arranged on the guide rail (10) in a sliding mode;
the driving unit is used for driving the first pressurizing assembly (1) to move close to or away from the second pressurizing assembly (2);
and a first leveling assembly (3) for connecting the first pressing assembly (1) to the first slider (12) and having a floating connection state and a fixed connection state;
when the first leveling component (3) is in a floating connection state and the first pressurizing component (1) is close to the second pressurizing component (2), the first pressurizing component (1) drives the first sliding block (12) to move through the first leveling component (3), and the first leveling component (3) allows the first pressurizing component (1) to be self-adaptively adjusted along with the contact of the first working surface (1-1) and the second working surface (2-1), so that the first working surface (1-1) and the second working surface (2-1) are attached;
when the first leveling component (3) is in a fixed connection state, the position of the first pressing component (1) is fixed on the first sliding block (12).
2. The levelable pressure device of claim 1, wherein: the first leveling component (3) comprises a first connecting piece (3-1) and a first fastening piece (3-2);
the first connecting piece (3-1) is fixedly connected with the first pressurizing assembly (1) and is provided with a first mounting hole (3-11);
the first fastening piece (3-2) penetrates through the first mounting hole (3-11) and is used for detachably fixing the first connecting piece (3-1) on the first sliding block (12); a first gap (3-3) is reserved between the outer peripheral wall of the part of the first fastening piece (3-2) located in the first mounting hole (3-11) and the inner peripheral wall of the first mounting hole (3-11).
3. The levelable pressure device of claim 2, wherein: the both sides of first pressurization subassembly (1) all dispose first leveling subassembly (3), the both sides that lie in first pressurization subassembly (1) on frame (11) all have guide rail (10), equal slidable mounting has on guide rail (10) first slider (12), first leveling subassembly (3) are connected with first slider (12) of its place side.
4. The levelable pressure device of claim 1, wherein: one end, far away from the second working surface (2-1), of the second pressurizing assembly (2) is provided with a mounting surface (2-2), a pressure sensor (9) is arranged between the mounting surface (2-2) and the rack (11), the pressure sensor (9) is fixedly mounted on the rack (11), and a second sliding block (8) matched with the guide rail (10) is slidably mounted on the guide rail (10);
the second leveling component (7) is used for connecting the second pressurizing component (2) to the second sliding block (8) and has a floating connection state and a fixed connection state;
when the second leveling component (7) is in a floating connection state and the second pressurizing component (2) is close to the pressure sensor (9), the second pressurizing component (2) drives the second slider (8) to move through the second leveling component (7), and the second leveling component (7) allows the second pressurizing component (2) to be self-adaptively adjusted along with the contact of the mounting surface (2-2) and the stress surface (9-1) of the pressure sensor (9), so that the mounting surface (2-2) is attached to the stress surface (9-1);
when the second leveling component (7) is in a fixed connection state, the position of the second pressing component (2) is fixed on the second sliding block (8).
5. The levelable pressure device of claim 4, wherein: the second leveling component (7) comprises a second connecting piece (7-1) and a first fastening piece (3-2);
the second connecting piece (7-1) is fixedly connected with the second pressurizing assembly (2) and is provided with a second mounting hole (7-11);
the second fastening piece (7-2) penetrates through the second mounting hole (7-11) and is used for detachably fixing the second connecting piece (7-1) on the second sliding block (8); a second gap (7-3) is reserved between the outer peripheral wall of the part, located in the second mounting hole (7-11), of the second fastening piece (7-2) and the inner peripheral wall of the second mounting hole (7-11).
6. The levelable pressure device of claim 4, wherein: the both sides of second pressurization subassembly (2) all are configured with second leveling subassembly (7), the both sides that lie in second pressurization subassembly (2) on frame (11) all have guide rail (10), equal slidable mounting is on guide rail (10) second slider (8), second leveling subassembly (7) are connected with second slider (8) of its place side.
7. The levelable pressure device of claim 1, wherein: the driving unit comprises a driving mechanism (6) and a balance force application mechanism;
the balance force application mechanism comprises a ball pair assembly (5) and an elastic buffering assembly (4), the output end of the driving mechanism (6) is in transmission connection with the ball pair assembly (5) through the elastic buffering assembly (4), and the ball pair assembly (5) is in transmission connection with the first pressurizing assembly (1).
8. The levelable pressure device of claim 7, wherein: the elastic buffer assembly (4) comprises a fixed plate (4-1), a movable plate (4-2), a guide rod (4-3) and an elastic element (4-4);
the output end of the driving mechanism (6) is fixedly connected with the fixed plate (4-1), the movable plate (4-2) is fixedly connected with the ball pair assembly (5), one of the fixed plate (4-1) and the movable plate (4-2) is fixedly connected with the guide rod (4-3), the other one of the fixed plate (4-1) and the movable plate (4-2) is in sliding connection with the guide rod (4-3) along the moving direction of the first sliding block (12), and the elastic element (4-4) is located between the movable plate (4-2) and the fixed plate (4-1).
9. The levelable pressure device of claim 7, wherein: the ball pair assembly (5) comprises a first ball pair plate (5-1), a central ball (5-2), a second ball pair plate (5-3) and a limiting plate (5-4), wherein the central ball (5-2) is positioned between the first ball pair plate (5-1) and the second ball pair plate (5-3), one end of the limiting plate (5-4) is provided with a reset hole (5-41), and the other end of the limiting plate is fixedly connected with the second ball pair plate (5-3);
a first ball auxiliary plate (5-1) or a movable plate (4-2) is provided with a reset rod (5-5), the reset rod (5-5) is inserted into the reset hole (5-41), and a third gap (5-6) is reserved between the outer peripheral wall of the reset rod (5-5) positioned in the reset hole (5-41) and the inner peripheral wall of the reset hole (5-41);
one of the first ball auxiliary plate (5-1) and the second ball auxiliary plate (5-3) is fixedly connected with the movable plate (4-2), and the other one is fixedly connected with the first pressurizing assembly (1).
10. A patch device, characterized by: comprising a trimmable pressing device as claimed in any of claims 1 to 9.
CN202210082320.0A 2022-01-24 2022-01-24 But leveling pressure device and paster equipment thereof Pending CN114613714A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210082320.0A CN114613714A (en) 2022-01-24 2022-01-24 But leveling pressure device and paster equipment thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210082320.0A CN114613714A (en) 2022-01-24 2022-01-24 But leveling pressure device and paster equipment thereof

Publications (1)

Publication Number Publication Date
CN114613714A true CN114613714A (en) 2022-06-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210082320.0A Pending CN114613714A (en) 2022-01-24 2022-01-24 But leveling pressure device and paster equipment thereof

Country Status (1)

Country Link
CN (1) CN114613714A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117182841A (en) * 2023-09-08 2023-12-08 深圳市镭恩特自动化技术有限公司 Pressurizing mechanical device for pasting piezoelectric ceramic plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117182841A (en) * 2023-09-08 2023-12-08 深圳市镭恩特自动化技术有限公司 Pressurizing mechanical device for pasting piezoelectric ceramic plate
CN117182841B (en) * 2023-09-08 2024-05-10 深圳市镭恩特自动化技术有限公司 Pressurizing mechanical device for pasting piezoelectric ceramic plate

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