CN114571613A - Crystal adjusting device for crystal cutting equipment and crystal cutting equipment - Google Patents
Crystal adjusting device for crystal cutting equipment and crystal cutting equipment Download PDFInfo
- Publication number
- CN114571613A CN114571613A CN202210454029.1A CN202210454029A CN114571613A CN 114571613 A CN114571613 A CN 114571613A CN 202210454029 A CN202210454029 A CN 202210454029A CN 114571613 A CN114571613 A CN 114571613A
- Authority
- CN
- China
- Prior art keywords
- crystal
- rotary table
- adjusting
- driving
- cutting equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 127
- 238000005520 cutting process Methods 0.000 title claims abstract description 75
- 239000000463 material Substances 0.000 claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000005096 rolling process Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000003750 conditioning effect Effects 0.000 claims 2
- 101100008048 Caenorhabditis elegans cut-4 gene Proteins 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a crystal adjusting device for crystal cutting equipment and the crystal cutting equipment, wherein the structure of the crystal adjusting device for the crystal cutting equipment comprises a circumferential adjusting part, and the circumferential adjusting part can rotate circumferentially; a pitch adjustment unit; the pitching adjusting part is connected with the circumferential adjusting part and synchronously and circumferentially rotates with the circumferential adjusting part, and the pitching adjusting part can swing; and a loading part; and the pitching adjusting part is connected with the lifting adjusting part and moves synchronously with the lifting adjusting part, and the lifting adjusting part is used for loading materials to be cut. The crystal adjusting device for the crystal cutting equipment and the crystal cutting equipment can solve the problems of low efficiency and large error of the existing crystal cutting equipment during crystal adjustment.
Description
Technical Field
The application relates to the technical field of material cutting, in particular to a crystal adjusting device for crystal cutting equipment and the crystal cutting equipment.
Background
The crystal cutting equipment can be divided into multi-line cutting, single-line cutting, inner circle cutting, outer circle cutting and the like according to the cutting mode. In the processing of intraocular lenses, and in particular third generation semiconductor materials, the cutting of the crystal is an important step in the processing of the crystal, and during the cutting of the crystal, the requirements for the crystal orientation arise. Due to the anisotropy of the crystal, people have different crystal orientation precision requirements on the use of various crystals, and different crystal faces have different hardness, elastic modulus and breaking strength in the cutting process, so that the thickness difference and the warping rate of the cut material are greatly different.
On the existing crystal cutting process line, most of cutting equipment does not have the function of crystal orientation adjustment. Some devices are additionally provided with a crystal adjusting mechanism, but the crystal adjusting mechanism cannot meet the technological use requirements of users due to the limitation of adjusting angles and adjusting ranges or the fact that the locking mechanism cannot be locked and is easy to misplace; the other equipment is used as the matching equipment of the equipment under the on-line condition, namely the equipment is used as a reference during material sticking, and the accurate positioning cannot be realized; and in the processing process, firstly, a wafer is cut out, after the off-line crystal orientation angle test is carried out, a crystal orientation adjusting mechanism on the cutting equipment is adjusted according to the tested crystal orientation angle, the wafer is cut out after the crystal is installed in an oriented mode again, and after the off-line crystal orientation detection verification, if the crystal orientation precision meets the requirement, subsequent batch cutting can be carried out. The whole cutting process is complicated, and errors caused by different manual operation levels exist, so that the wafer direction accuracy consistency of wafers cut by different crystals is poor, the material waste is serious, and the cutting efficiency is low.
Disclosure of Invention
In view of this, an object of the present application is to provide a crystal adjusting device for a crystal cutting apparatus and a crystal cutting apparatus, so as to solve the problem of low efficiency and large error in crystal adjustment of the existing crystal cutting apparatus.
According to a first aspect of the present invention, there is provided a crystal adjusting device for a crystal cutting apparatus, wherein the crystal adjusting device for the crystal cutting apparatus comprises: a circumferential adjustment portion that is capable of circumferential rotation; a pitch adjustment unit; the pitching adjusting part is connected with the circumferential adjusting part and synchronously and circumferentially rotates with the circumferential adjusting part, and the pitching adjusting part can swing; and a loading part; and the pitching adjusting part is connected with the lifting adjusting part and moves synchronously with the lifting adjusting part, and the lifting adjusting part is used for loading materials to be cut.
Preferably, the circumferential adjustment portion includes: a mounting table formed with a central through hole; the mounting table is sleeved on the rotating shaft, and the rotating shaft is connected with the pitching adjusting part; and the first driving part is arranged on the mounting table and used for driving the rotating shaft to rotate in the circumferential direction.
Preferably, the driving part includes: the first screw is arranged on the mounting table; the first driving nut is arranged on the first screw rod and moves along the axial direction of the first screw rod; the rotating shaft is provided with a fixed wheel, the first shifting block is connected with the wheel surface of the fixed wheel, and the first driving nut is arranged in the first shifting block and used for driving the first shifting block; and the circumferential adjusting knob is arranged at the end part of the first screw rod and used for driving the first screw rod to rotate.
Preferably, the bottom of the mounting table is provided with a rolling part, and the rolling part comprises: the bottom of the mounting table is provided with a plurality of needle grooves which are distributed on the circumference; and a needle roller installed in the needle groove, the needle roller being in contact with the pitching adjustment portion.
Preferably, the circumferential adjusting part further comprises a braking part, one end of the braking part is connected with the pitching adjusting part, and the other end of the braking part is in force-adjustable contact with the mounting table.
Preferably, the pitch adjustment part includes: the upper rotary table is connected with the circumferential adjusting part, and the lower surface of the upper rotary table is formed into an arc-shaped guide surface; the lower rotary table is movably connected with the upper rotary table, and an arc-shaped matching surface capable of being matched with the upper rotary table is formed on the upper surface of the lower rotary table; and the second driving part is connected with the upper rotary table and is used for driving the lower rotary table to perform curvilinear motion relative to the upper rotary table.
Preferably, the second driving part includes: the upper rotary table and the lower rotary table are provided with through grooves for penetrating through the second screw rod; the second driving nut is arranged on the second screw rod and moves along the axial direction of the second screw rod; the second shifting block is arranged in the through groove of the lower rotary table, and the second driving nut is arranged in the second shifting block and used for driving the second shifting block; and the pitching adjusting knob is arranged at one end of the second screw rod and is used for driving the second screw rod to rotate.
Preferably, the pitch adjustment part further includes: the first clamping guide strip is formed into an arc shape along the length direction, is arranged between the upper rotary table and the lower rotary table and is used for movably clamping the upper rotary table and the lower rotary table; and the locking handle is arranged on the lower rotary table and partially penetrates through the lower rotary table to be contacted with the first clamping guide bar.
Preferably, the loading part includes: the connecting seat is connected with the pitching adjusting part and is provided with a dovetail groove; the material sticking plate is provided with a material sticking groove and used for sticking the material to be cut; the fixed guide rail is connected with the material sticking plate and can be matched with the dovetail groove; and the second clamping guide strip is arranged in the dovetail groove and is in contact with the fixed guide rail, a threaded hole is formed in the outer part of the connecting seat, and the threaded hole is communicated with the second clamping guide strip.
According to a second aspect of the present invention, a crystal cutting apparatus is provided, wherein the crystal cutting apparatus includes a feeding mechanism, a cutting mechanism, a crystal orientation detection mechanism, and the crystal adjusting device for the crystal cutting apparatus as described above, the feeding mechanism is connected to the circumferential adjusting part and is configured to drive the crystal adjusting device for the crystal cutting apparatus to move towards the cutting mechanism, and the crystal orientation detection mechanism is configured to detect a crystal orientation of the material to be cut.
According to the crystal adjusting device for the crystal cutting equipment and the crystal cutting equipment, the circumferential adjusting part can perform circumferential adjustment, the pitching adjusting part is connected with the circumferential adjusting part and can perform pitching adjustment through swinging, so that the material carrying part connected with the pitching adjusting part can realize circumferential and pitching adjustment to adjust the crystal orientation of the material to be cut, and the problems of low efficiency and large error in crystal adjusting of the existing crystal cutting equipment can be effectively solved.
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic view of a crystal adjusting device for a crystal cutting apparatus according to the present invention.
FIG. 2 is a schematic view of another angle of the crystal adjusting device for the crystal cutting equipment according to the present invention.
FIG. 3 is a schematic structural diagram of a portion of a crystal adjusting device for a crystal cutting apparatus according to the present invention.
FIG. 4 is a schematic view of a rolling part of a crystal adjusting device for a crystal cutting apparatus according to the present invention.
FIG. 5 is a schematic structural diagram of another part of a crystal adjusting device for a crystal cutting apparatus according to the present invention.
FIG. 6 is a schematic structural diagram of another angle part of the crystal adjusting device for the crystal cutting equipment according to the present invention.
FIG. 7 is a schematic view of another angle of the crystal adjusting device for the crystal cutting apparatus according to the present invention.
FIG. 8 is a schematic view of another angle of the crystal adjusting device for the crystal cutting apparatus according to the present invention.
Reference numerals: 1-a circumferential adjustment; 11-a mounting table; 12-a rotating shaft; 121-a fixed wheel; 13-a first drive; 131-a first screw; 132-a first drive nut; 133-a first paddle; 134-circumferential adjustment knob; 135-bearing seats; 14-a baffle; 15-a rolling section; 151-needle roller groove; 152-rolling needles; 16-a braking component; 2-a pitch adjustment section; 21-an upper turntable; 22-a lower turntable; 23-a second drive section; 231-a second screw; 232-a second drive nut; 233-a second shifting block; 234-pitch adjustment knob; 24-through slots; 25-a first clip guide; 26-locking a handle; 3-a material loading part; 31-a connection seat; 311-dovetail groove; 312-a threaded hole; 32-a sticky plate; 321-a viscous groove; 33-fixed guide rails; 34-a second clip guide; 4-waiting for cutting.
Detailed Description
The following detailed description is provided to assist the reader in obtaining a thorough understanding of the methods, devices, and/or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and/or systems described herein will be apparent to those skilled in the art in view of the disclosure of the present application. For example, the order of operations described herein is merely an example, which is not limited to the order set forth herein, but rather, variations may be made in addition to operations which must occur in a particular order, which will be apparent upon understanding the disclosure of the present application. Moreover, descriptions of features known in the art may be omitted for the sake of clarity and conciseness.
The features described herein may be embodied in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and/or systems described herein that will be apparent after understanding the disclosure of the present application.
Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on," "connected to," coupled to, "over," or "overlying" another element, it may be directly "on," "connected to," coupled to, "over," or "overlying" the other element, or one or more other elements may be present therebetween. In contrast, when an element is referred to as being "directly on," "directly connected to," directly coupled to, "directly over" or "directly overlying" another element, there may be no intervening elements present.
As used herein, the term "and/or" includes any one of the associated listed items and any combination of any two or more of the items.
Although terms such as "first", "second", and "third" may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections should not be limited by these terms. Rather, these terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section referred to in the examples described herein may be termed a second element, component, region, layer or section without departing from the teachings of the examples.
For ease of description, spatial relationship terms such as "above … …," "upper," "below … …," and "lower" may be used herein to describe one element's relationship to another element as illustrated in the figures. Such spatial relationship terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "upper" relative to other elements would then be oriented "below" or "lower" relative to the other elements. Thus, the term "above … …" includes both an orientation of "above … …" and "below … …" depending on the spatial orientation of the device. The device may also be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein should be interpreted accordingly.
The terminology used herein is for the purpose of describing various examples only and is not intended to be limiting of the disclosure. The singular forms also are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and "having" specify the presence of stated features, quantities, operations, elements, components, and/or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and/or combinations thereof.
Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, may be expected. Thus, the examples described herein are not limited to the particular shapes shown in the drawings, but include changes in shape that occur during manufacturing.
The features of the examples described herein may be combined in various ways that will be apparent after understanding the disclosure of the present application. Further, while the examples described herein have a variety of configurations, other configurations are possible, as will be apparent after understanding the disclosure of the present application.
As shown in fig. 1 to 8, according to a first aspect of the present invention, a crystal adjustment device for a crystal cutting apparatus is provided, which includes a circumferential adjustment portion 1, a pitching adjustment portion 2, and a loading portion 3.
In the following description, a specific structure of the above-described components of the crystal adjusting device for a crystal dicing apparatus and a connection relationship of the above-described components will be specifically described with reference to fig. 1 to 8.
As shown in fig. 1 and 2, in the embodiment, the bottom of the circumferential adjustment part 1 is connected with the top of the pitching adjustment part 2, so that when the circumferential adjustment part 1 rotates, the pitching adjustment part 2 can rotate synchronously with the circumferential adjustment part 1. The top of the material loading part 3 is connected with the bottom of the pitching adjusting part 2, when the pitching adjusting part 2 rotates, the material loading part 3 rotates synchronously with the pitching adjusting part 2, and when the pitching adjusting part 2 swings due to pitching adjustment, the material loading part 3 swings synchronously with the pitching adjusting part 2. The material to be cut 4 is loaded below the material loading part 3, and when the material loading part 3 rotates or swings, the crystal orientation of the material to be cut 4 is adjusted.
Preferably, as shown in fig. 1 to 3, in an embodiment, the circumferential direction adjustment part 1 may include a mounting table 11, a rotation shaft 12, and a first driving part 13. The mount 11 may be a member having an upper portion formed as a square plate, a middle portion formed as a cylindrical barrel, and a lower portion formed as a circular plate, with central axes of the three portions being collinear and opened with a central through hole passing through the three portions along the central axes. The rotating shaft 12 is arranged in a central through hole of the mounting table 11, and the bottom end of the rotating shaft is fixedly connected with the top of the pitching adjusting part 2. The first driving portion 13 is mounted on the mounting platform 11, and a portion thereof penetrates through the mounting platform 11 and is connected to the rotating shaft 12 for driving the rotating shaft 12 to rotate circumferentially.
Further, preferably, in an embodiment, the first driving part 13 may include a first screw 131, a first driving nut 132, a first dial 133, and a circumferential adjustment knob 134. As shown in fig. 1 to 3, the first driving part 13 is installed between the square plate and the circular plate of the installation stage 11. The mounting table 11 is provided with a notch at one side of the cylindrical barrel facing the first driving part 13, for the first driving part 13 to contact with the rotating shaft 12 inside.
Specifically, as shown in fig. 3, in the embodiment, two rectangular bearing seats 135 are respectively disposed at two axial sides of the first screw 131, the first screw 131 is inserted through the two bearing seats 135, and the first driving nut 132 is disposed between the two bearing seats 135. The two bearing blocks 135 are fixedly connected to the upper surface of the circular plate of the mounting table 11, thereby fixing the first driving part 13. The rotating shaft 12 is fixedly connected with a fixed wheel 121 at a height corresponding to the first screw 131, and a first dial 133 is fixedly connected with a wheel surface of the fixed wheel 121 facing the first screw 131. The first shifting block 133 may be a rectangular plate, and rectangular pillars are perpendicularly extended from four corners of the rectangular plate, and the first driving nut 132 may be a cylindrical member having a cylindrical surface with a threaded through hole, and the diameter of the cylindrical member is smaller than the distance between the rectangular pillars of the first shifting block 133, so that the first driving nut 132 may be disposed between the rectangular pillars of the first shifting block 133, and the rectangular plate of the first shifting block 133 is connected to the wheel surface of the fixed wheel 121 through screws. A cylindrical circumferential adjustment knob 134 is coaxially coupled to an end of the first screw 131, and when the circumferential adjustment knob 134 is screwed, the first screw 131 is rotated in synchronization therewith.
When the first screw 131 is driven by screwing the circumferential adjusting knob 134, the first screw 131 does not move axially but only rotates circumferentially due to the restriction of the bearing seat 135, and the first driving nut 132 installed on the first screw 131 moves linearly in the axial direction of the first screw 131. During the movement of the first driving nut 132, it will contact the inner side surface of the first shifting block 133 and will apply a force to the first shifting block 133 along the tangential direction of the fixed wheel 121, thereby driving the fixed wheel 121 to rotate and thus indirectly driving the rotating shaft 12 to rotate circumferentially.
Further, preferably, as shown in fig. 1 to 3, in the embodiment, the circumferential direction adjustment portion 1 further includes a brake member 16. The braking member 16 may be an L-shaped block having one end fixedly connected to the upper surface of the pitch adjusting part 2 and the other end having a lower surface contacting the upper surface of the circular plate of the mounting table 11. And an adjusting screw communicated with the upper surface of the pitching adjusting part 2 is further arranged at the middle section position of one end of the braking part 16, which is contacted with the mounting table 11, in a penetrating way, and is used for adjusting the force of the braking part 16, which is contacted with the mounting table 11. When the adjusting screw is tightened, the braking member 16 abuts against the upper surface of the circular plate of the mount table 11, thereby increasing the frictional force, so that the rotation of the pitch adjusting portion 2 is hindered, and the circumferential rotation of the rotating shaft 12 is indirectly prevented.
Preferably, as shown in fig. 1 to 3, in the embodiment, the first driving part 13 further includes a baffle 14. The barrier 14 may be a rectangular plate member, and may have a length equal to the distance between the back surfaces of the two bearing blocks 135 and a width equal to the height of the bearing blocks 135. The two ends of the baffle plate 14 can be respectively fixed to the two bearing seats 135 through screws, so that the baffle plate 14 covers the side portions of the two bearing seats 135, thereby preventing dust or other impurities from entering the inside of the mounting table 11 through the notch of the mounting table 11, and protecting the first screw 131, the first driving nut 132 and other portions between the two bearing seats 135.
Preferably, as shown in fig. 4, in the embodiment, a rolling part 15 may be provided at the bottom of the mounting table 11, that is, by providing a rolling body on the lower surface of the mounting table 11, the friction between the mounting table 11 and the pitching adjusting part 2 is reduced, and the rotation of the circumferential adjusting part 1 is smoother. Specifically, a plurality of kidney-shaped needle roller slots 151 may be formed in the lower surface of the circular plate of the mounting table 11, the length direction of the needle roller slots 151 may be the radial direction of the circular plate, and the needle roller slots 151 are uniformly circumferentially arranged on the lower surface of the circular plate. The needle roller 152 is installed in the needle groove 151 to contact the upper surface of the pitch adjustment part 2, thereby reducing friction.
Preferably, as shown in fig. 1, 2, 5 and 6, in an embodiment, the pitch adjustment part 2 may include an upper turn table 21, a lower turn table 22, and a second driving part 23. The upper turntable 21 may be a member whose upper portion is formed in a rectangular parallelepiped structure and whose lower surface is formed in an arc-shaped guide surface, which may be an inwardly recessed arcuate surface, and the lower turntable 22 may be a member whose lower portion is formed in a rectangular parallelepiped structure having the same size as the upper turntable 21 and whose upper surface is formed as a fitting surface that can be fitted with the guide surface of the upper turntable 21, which may be an outwardly protruding arcuate surface, so that the lower turntable 22 can be fitted with the upper turntable 21. The second driving portion 23 is fixedly connected to the upper turntable 21 for driving the lower turntable 22 to move along an arc-shaped guide surface in a curve relative to the upper turntable 21.
Specifically, in the embodiment, the center of the upper surface of the upper turntable 21 is fixedly connected to the rotating shaft 12, and may be a disk structure provided with a flange-like flange at the bottom of the rotating shaft 12 as shown in fig. 4, and is connected to the upper surface of the upper turntable 21 by a screw through the structure. The upper rotary table 21 and the lower rotary table 22 are movably connected, and the lower surface of the upper rotary table 21 is an arc-shaped surface which can play a role in guiding, so that the lower rotary table 22 can move along the guide surface when being driven by the second driving part 23, and the upper part of the pitching adjusting part 2 is fixed while the lower part swings.
Further, preferably, as shown in fig. 5 and 6, in an embodiment, the second driving part 23 may include a second screw 231, a second driving nut 232, a second dial 233, and a pitch adjustment knob 234. The second screw 231 penetrates through the middle of the pitch adjusting portion 2 along the tangential direction of the moving direction of the lower turntable 22, a through groove 24 may be formed in the middle of the upper turntable 21 and the lower turntable 22, the through groove 24 located in the upper turntable 21 and the through groove 24 located in the lower turntable 22 are spliced together to form a rectangular groove (not shown in the partial drawing of the through groove 24 located in the upper turntable 21), and the second screw 231 penetrates through the through groove 24 along the length direction of the through groove 24 and is connected with the outer surface of the upper turntable 21 in a screw manner through a bearing seat. The second driving nut 232 is located in the through slot 24 and mounted on the second screw 231, which may be a cylindrical member with a threaded through hole on the cylindrical surface. The second driving block 233 is installed in the through groove 24 of the lower turn table 22, and the second driving block 233 may be a rectangular plate member, and four rectangular supports vertically protruded at four corners of the rectangular plate member, a portion of the rectangular plate member being connected to the bottom of the through groove 24 of the lower turn table 22 by a screw, and the four rectangular supports confining the second driving nut 232 therebetween. The cylindrical pitch adjustment knob 234 is coaxially coupled to the end of the second screw 231, and when the pitch adjustment knob 234 is screwed, the second screw 231 is synchronously rotated.
When the rotating pitch adjusting knob 234 is screwed to drive the second screw rod 231, the second screw rod 231 is limited by the bearing seats at the two ends to only rotate, the second driving nut 232 mounted on the second screw rod 231 moves along the axial direction of the second screw rod 231, and during the movement, the second driving nut 232 contacts with the inner surface of the second shifting block 233 and drives the second shifting block 233 to move, so that the lower turntable 22 is indirectly driven to do curvilinear motion.
Preferably, as shown in fig. 1, 5 and 6, in an embodiment, the pitch adjustment part 2 may further include a first clip guide 25 and a locking handle 26. The first clip guide 25 may be formed in an arc shape in a length direction, the arc shape being parallel to the arc surfaces of the upper and lower turn tables 21 and 22, and the first clip guide 25 is formed in an inverted trapezoid shape in cross section and has an inwardly depressed right-angle notch formed at a right-angle side of a top thereof. Further, two first clamping guide bars 25 may be provided, and the two first clamping guide bars 25 are both disposed between the upper rotary table 21 and the lower rotary table 22, located on both sides of the pitch adjusting portion 2, and embedded between the upper rotary table 21 and the lower rotary table 22, so as to perform a wedge function on one hand and a guiding function on the other hand. The inclined plane of first clamp gib 25 and the lower surface of last revolving stage 21 are formed with the gomphosis structure, and the face that is formed with the right angle breach of first clamp gib 25 then forms with the upper surface of lower revolving stage 22 has the gomphosis structure for it is fixed on vertical direction with lower revolving stage 22 to go up revolving stage 21, and does not influence revolving stage 22 down and carry out curvilinear motion for last revolving stage 21, and the activity joint is realized through first clamp gib 25 to go up revolving stage 21 and lower revolving stage 22 promptly. The locking handle 26 is mounted on the side of the lower turntable 22 close to the first clamp guide 25, and a portion of the locking handle is inserted through the lower turntable 22 and abuts against the side of one of the first clamp guide 25 where a right-angle notch is formed. When the locking handle 26 is screwed clockwise, the portion penetrating the lower rotary table 22 moves toward the inside of the lower rotary table 22 and presses the first clamping guide 25, increasing the friction force of the first clamping guide 25, and further hindering the relative movement between the upper rotary table 21 and the lower rotary table 22, so that the lower portion of the pitch adjusting part 2 cannot swing. Preferably, the number of the locking handles 26 can be two, and the two locking handles 26 can be in contact with the same first clamping guide strip 25, so that the stress on the first clamping guide strip 25 is more uniform, and the braking effect of the first clamping guide strip is enhanced.
Preferably, as shown in fig. 7 and 8, in an embodiment, the loading part 3 may include a connection seat 31, a sticker plate 32, a fixing rail 33, and a second clip guide 34. The connection holder 31 may be a rectangular parallelepiped member and formed at a bottom surface thereof with a dovetail groove 311 communicating with the outside. Specifically, as shown in fig. 8, the connecting seat 31 may be formed by splicing a T-shaped block having an acute-angle protrusion formed on a bottom surface thereof and two symmetrical L-shaped blocks, and a gap formed by splicing the two L-shaped blocks and the T-shaped block is a dovetail groove 311. The adhesive plate 32 is used for adhering the material to be cut 4, and the top thereof may be formed into a rectangular parallelepiped, and the bottom thereof is formed into an adhesive groove 321 matching the shape of the material to be cut 4, and may be, as shown in the embodiment, the material to be cut 4 is formed into a cylindrical shape, and the adhesive groove 321 is formed into an arch shape matching the same. The bonding fit can avoid the material carrying part 3 from obstructing the cutting process when the material to be cut 4 is cut. The top surface of the binder plate 32 is also fixedly connected with a fixed guide rail 33, and the length direction of the fixed guide rail 33 is parallel to the length direction of the binder groove 321. The fixed rail 33 may be a T-shaped block formed with both shoulders beveled as shown in fig. 8 so that the top of the fixed rail 33 can be fitted into the dovetail groove 311. The second clip guide 34 may be a right-angled triangular bar, which is provided in the dovetail groove 311 as a part forming the dovetail groove 311 so that the fixed rail 33 can be completely fitted. As shown in fig. 7, a plurality of threaded holes 312 are formed in an outer surface of the connecting seat 31 on a side close to the second clamping guide bar 34, and the plurality of threaded holes 312 are all communicated with the inside of the dovetail groove 311 and lead to a side surface of the second clamping guide bar 34, so that when the screw is screwed into the threaded hole 312, the screw abuts against the side surface of the second clamping guide bar 34 and presses the second clamping guide bar 34 in a direction toward the fixed guide rail 33, thereby increasing a friction force between the second clamping guide bar 34 and the fixed guide rail 33, and further fixing a relative position between the adhesive plate 32 and the connecting seat 31 by the friction force.
In addition, according to a second aspect of the present invention, there is provided a crystal cutting apparatus, comprising a feeding mechanism, a cutting mechanism, a crystal orientation detecting mechanism, and a crystal adjusting device for the crystal cutting apparatus as described above, wherein the feeding mechanism is connected to the circumferential direction adjusting portion 1, and may be a rotating shaft 12 connected to the feeding mechanism through a connecting hole on a top surface thereof, the rotating shaft 12 can still rotate circumferentially when connected to the feeding mechanism, and the mounting table 11 is fixedly connected to the feeding mechanism through a screw. The feeding mechanism is used for driving the crystal adjusting device for the crystal cutting equipment to move towards the cutting mechanism, and the crystal orientation detection mechanism is used for detecting the crystal orientation of the material to be cut 4.
When the material sticking device is used, in the first step, the material to be cut 4 is stuck to the material sticking groove 321, after the material to be cut 4 and the material sticking plate 32 are firmly solidified, the fixed guide rail 33 is inserted into the dovetail groove 311 of the connecting seat 31, and then the screw is screwed into the threaded hole 312 to lock the fixed guide rail 33. And secondly, screwing the circumferential adjusting knob 134 to enable the circumferential adjusting part 1 to rotate so as to drive the material to be cut 4 to rotate, adjusting the crystal orientation of the material to be cut 4 to meet the process precision requirement, and locking the braking part 16. Thirdly, the pitching adjusting knob 234 is screwed to enable the pitching adjusting part 2 to drive the material to be cut 4 to swing, the spatial posture of the material to be cut 4 is adjusted, the crystal orientation of the material to be cut 4 is adjusted to meet the requirement of process precision, and then the two locking handles 26 are locked. And step four, detecting the crystal orientation of the material to be cut 4 through a crystal orientation detection mechanism, comparing the crystal orientation with a standard sheet, starting batch cutting when the crystal orientation meets the process precision requirement of the material to be cut 4, and otherwise repeating the debugging processes from the step one to the step four again to correct and confirm.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present application, and are used for illustrating the technical solutions of the present application, but not limiting the same, and the scope of the present application is not limited thereto, and although the present application is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope disclosed in the present application; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present application and are intended to be covered by the appended claims. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. A crystal adjusting device for crystal cutting equipment is characterized in that the crystal adjusting device for the crystal cutting equipment comprises:
a circumferential adjustment portion that is capable of circumferential rotation;
a pitch adjustment unit; the pitching adjusting part is connected with the circumferential adjusting part and synchronously and circumferentially rotates with the circumferential adjusting part, and the pitching adjusting part can swing; and
a material loading part; and the pitching adjusting part is connected with the lifting adjusting part and moves synchronously with the lifting adjusting part, and the lifting adjusting part is used for loading materials to be cut.
2. The crystal conditioning device for crystal cutting equipment according to claim 1, wherein the circumferential conditioning portion comprises:
a mounting table formed with a central through hole;
the mounting table is sleeved on the rotating shaft, and the rotating shaft is connected with the pitching adjusting part; and
the first driving part is arranged on the mounting table and used for driving the rotating shaft to rotate in the circumferential direction.
3. The crystal adjusting device for the crystal cutting equipment according to claim 2, wherein the driving part comprises:
the first screw is arranged on the mounting table;
the first driving nut is arranged on the first screw rod and moves along the axial direction of the first screw rod;
the rotating shaft is provided with a fixed wheel, the first shifting block is connected with the wheel surface of the fixed wheel, and the first driving nut is arranged in the first shifting block and used for driving the first shifting block; and
and the circumferential adjusting knob is arranged at the end part of the first screw rod and used for driving the first screw rod to rotate.
4. The crystal adjusting device for the crystal cutting equipment as claimed in claim 2 or 3, wherein the bottom of the mounting table is provided with a rolling part, and the rolling part comprises:
the bottom of the mounting table is provided with a plurality of needle grooves which are distributed on the circumference; and
and the needle roller is arranged in the needle roller groove and is contacted with the pitching adjusting part.
5. The crystal adjusting device for the crystal cutting equipment as claimed in claim 2 or 3, wherein the circumferential adjusting part further comprises a braking part, one end of the braking part is connected with the pitching adjusting part, and the other end of the braking part is in force-adjustable contact with the mounting table.
6. The crystal adjusting device for crystal cutting equipment according to claim 1, wherein the pitch adjusting section includes:
the upper rotary table is connected with the circumferential adjusting part, and the lower surface of the upper rotary table is formed into an arc-shaped guide surface;
the lower rotary table is movably connected with the upper rotary table, and an arc-shaped matching surface capable of being matched with the upper rotary table is formed on the upper surface of the lower rotary table; and
and the second driving part is connected with the upper rotary table and is used for driving the lower rotary table to perform curvilinear motion relative to the upper rotary table.
7. The crystal adjusting device for the crystal cutting equipment according to claim 6, wherein the second driving part comprises:
the upper rotary table and the lower rotary table are provided with through grooves for penetrating through the second screw rod;
the second driving nut is arranged on the second screw rod and moves along the axial direction of the second screw rod;
the second shifting block is arranged in the through groove of the lower rotary table, and the second driving nut is arranged in the second shifting block and used for driving the second shifting block; and
and the pitching adjusting knob is arranged at one end of the second screw rod and is used for driving the second screw rod to rotate.
8. The crystal adjusting device for crystal cutting equipment according to claim 6 or 7, wherein the pitch adjusting section further comprises:
the first clamping guide strip is formed into an arc shape along the length direction, is arranged between the upper rotary table and the lower rotary table and is used for movably clamping the upper rotary table and the lower rotary table; and
and the locking handle is arranged on the lower rotary table and partially penetrates through the lower rotary table to be in contact with the first clamping guide bar.
9. The crystal adjusting device for the crystal cutting equipment as claimed in claim 1, wherein the material loading part comprises:
the connecting seat is connected with the pitching adjusting part and is provided with a dovetail groove;
the material sticking plate is provided with a material sticking groove and used for sticking the material to be cut;
the fixed guide rail is connected with the material sticking plate and can be matched with the dovetail groove; and
the second presss from both sides the conducting strip, set up in the dovetail, with the fixed guide contacts, the screw hole is seted up to the outside of connecting seat, the screw hole accesss to the second presss from both sides the conducting strip.
10. A crystal cutting device, characterized in that, the crystal cutting device comprises a feeding mechanism, a cutting mechanism, a crystal orientation detection mechanism and the crystal adjusting device for the crystal cutting device as claimed in any one of claims 1 to 9, the feeding mechanism is connected with the circumferential adjusting part and is used for driving the crystal adjusting device for the crystal cutting device to move towards the cutting mechanism, and the crystal orientation detection mechanism is used for detecting the crystal orientation of the material to be cut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210454029.1A CN114571613A (en) | 2022-04-24 | 2022-04-24 | Crystal adjusting device for crystal cutting equipment and crystal cutting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210454029.1A CN114571613A (en) | 2022-04-24 | 2022-04-24 | Crystal adjusting device for crystal cutting equipment and crystal cutting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114571613A true CN114571613A (en) | 2022-06-03 |
Family
ID=81779298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210454029.1A Pending CN114571613A (en) | 2022-04-24 | 2022-04-24 | Crystal adjusting device for crystal cutting equipment and crystal cutting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114571613A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116877880A (en) * | 2023-08-09 | 2023-10-13 | 菲尔德精工科技(南通)有限公司 | Industrial camera adjusting frame |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB628508A (en) * | 1947-05-06 | 1949-08-30 | Standard Telephones Cables Ltd | Improvements in or relating to machines for cutting crystalline material |
| US20150165646A1 (en) * | 2013-12-13 | 2015-06-18 | Eco Power (Wuxi) Co., Ltd | Sapphire wafer squaring machine with double swing cutter heads |
| CN104786379A (en) * | 2015-04-09 | 2015-07-22 | 中国电子科技集团公司第四十五研究所 | Angle adjusting device for workpiece mounting table of multi-wire cutting machine |
| CN109591211A (en) * | 2019-01-03 | 2019-04-09 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Crystal-cut device and method |
| CN111844492A (en) * | 2020-08-05 | 2020-10-30 | 常州顺钿精密科技有限公司 | Crystal cutting device |
| CN212762865U (en) * | 2020-06-05 | 2021-03-23 | 唐山晶玉科技股份有限公司 | Horizontal position adjusting device of workbench of multi-wire cutting machine |
-
2022
- 2022-04-24 CN CN202210454029.1A patent/CN114571613A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB628508A (en) * | 1947-05-06 | 1949-08-30 | Standard Telephones Cables Ltd | Improvements in or relating to machines for cutting crystalline material |
| US20150165646A1 (en) * | 2013-12-13 | 2015-06-18 | Eco Power (Wuxi) Co., Ltd | Sapphire wafer squaring machine with double swing cutter heads |
| CN104786379A (en) * | 2015-04-09 | 2015-07-22 | 中国电子科技集团公司第四十五研究所 | Angle adjusting device for workpiece mounting table of multi-wire cutting machine |
| CN109591211A (en) * | 2019-01-03 | 2019-04-09 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Crystal-cut device and method |
| CN212762865U (en) * | 2020-06-05 | 2021-03-23 | 唐山晶玉科技股份有限公司 | Horizontal position adjusting device of workbench of multi-wire cutting machine |
| CN111844492A (en) * | 2020-08-05 | 2020-10-30 | 常州顺钿精密科技有限公司 | Crystal cutting device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116877880A (en) * | 2023-08-09 | 2023-10-13 | 菲尔德精工科技(南通)有限公司 | Industrial camera adjusting frame |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5352249A (en) | Apparatus for providing consistent, non-jamming registration of semiconductor wafers | |
| US5676360A (en) | Machine tool rotary table locking apparatus | |
| US5700297A (en) | Apparatus for providing consistent, non-jamming registration of notched semiconductor wafers | |
| JP4887630B2 (en) | Glass substrate positioning device and end surface grinding device | |
| CN101957306A (en) | Detector | |
| CN114571613A (en) | Crystal adjusting device for crystal cutting equipment and crystal cutting equipment | |
| CN201697735U (en) | A self-balancing symmetrical loading device | |
| JP4938231B2 (en) | Flatness measuring instrument | |
| US8910534B2 (en) | Rotation adjusting mechanism and adjusting machine using the same | |
| CN115768595B (en) | Glass plate manufacturing method and manufacturing device thereof | |
| JPH0729402U (en) | Parallelism measuring device | |
| CN112524436A (en) | Leveling mechanism for bearing rotary table device and attitude simulation rotary table | |
| CN108205290B (en) | Workpiece leveling device based on laser displacement sensor | |
| CN217620206U (en) | Clamping device and bearing equipment | |
| CN109459230A (en) | A kind of rotation detection jig of cutter | |
| JP3221751B2 (en) | X-ray diffraction goniometer | |
| JP2000009663A (en) | Crystal orientation-measuring device | |
| JP2000254829A (en) | Slide device and adjustment method for slide device | |
| CN223390538U (en) | Wafer clamping mechanism and wafer cleaning device | |
| CN114952670A (en) | Clamping device and bearing equipment | |
| JP2000343371A (en) | Workpiece positioning device in shearing machine | |
| CN113195140B (en) | Cutting equipment | |
| CN2864584Y (en) | Measuring device for two-dimensional processing surface of rotary table workpiece | |
| CN219156047U (en) | Positioning device | |
| JP5263784B2 (en) | Viscosity measurement device for thin film liquid |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |