CN114434399A - A workbench for mask pattern measurement that is convenient for surface cleaning - Google Patents

Abstract

The invention discloses a mask plate pattern measuring workbench convenient for surface cleaning, which comprises a base, a motor, a discharge hole and a workbench body, wherein the base is provided with a plurality of grooves; a worm is arranged in the base, and a discharge hole is formed in the left side of the inside of the worm; further comprising: the output end of the motor is connected with a worm, a worm wheel disc is arranged on the outer wall of the left side of the worm, the shaft end of the worm wheel disc is fixed to the rear side of the rotary disc, and the rotary disc is arranged below the elastic filter screen. This mask slice pattern measuring workstation convenient to surface cleaning is provided with the worm, drives the worm through the motor and carries out the in-process of rotation, and the top of worm will drive the rolling disc and rotate, so make rolling disc top 1 will extrude the elasticity filter screen to the surface edge swing joint's of carousel push pedal will carry out the round trip movement in the inside of discharge gate, so the convenience is concentrated the dust and is collected.

Description

A workbench for mask pattern measurement that is convenient for surface cleaning

technical field

The invention relates to the technical field of mask pattern measurement, in particular to a workbench for mask pattern measurement which is convenient for surface cleaning.

Background technique

In the process of patterning the mask, a measurement table needs to be used. There are many types of existing measurement tables, but there are still some shortcomings:

Publication No. CN214895519U discloses a workbench for measuring the contact resistance of relay contacts. The device is connected by a placing plate and a supporting plate, and under the action of the placing plate, it is convenient to place and fix the tools or parts used for detection. The sliding connection between the rod and the chute, under the action of the slider and the expansion spring, facilitates the sliding and stretching of the clamping rod on the chute, thereby facilitating the disassembly and fixing of the placement plate on the support plate. When placing different workpieces, it can be It can be quickly replaced to improve its use range. In the process of using the existing measuring table, it is inconvenient to clean the impurities on its surface to a certain extent, which causes the impurities to adhere to the mask plate, and in the process of use, the The device cannot properly clamp the mask to a certain limit, so during the processing, it may be offset to a certain extent, and the existing workbench cannot properly clamp the mask to a certain limit. hold.

Therefore, we propose a workbench for mask pattern measurement that is convenient for surface cleaning, which can well solve the above problems.

SUMMARY OF THE INVENTION

The purpose of the present invention is to provide a mask pattern measurement workbench which is convenient for surface cleaning, so as to solve the problem that the workbench on the market cannot well perform certain limit clamping on the mask plate proposed by the above-mentioned background technology. In the process of processing, it may be offset to a certain extent, and the existing worktable cannot well perform a certain limit clamping of the mask plate.

In order to achieve the above purpose, the present invention provides the following technical solutions: a workbench for mask pattern measurement that is convenient for surface cleaning, comprising a base, a motor, a discharge port and a workbench body;

Wherein, the inner position of the base is provided with a worm, and the left side of the worm is provided with a discharge port;

Wherein, the top position of the base is fixedly provided with a workbench body;

Also includes:

The output end of the motor is connected with a worm, and the left outer wall of the worm is provided with a worm wheel, and the position of the shaft end of the worm wheel is fixed on the rear side of the turntable, and the front surface edge of the turntable is movably connected with a worm wheel. a support rod, the other end of the support rod is connected to the inner side of the push plate, and the push plate is arranged at the inner side of the discharge port;

One end of the top end of the worm extending out of the interior of the base is fixed with a rotating disk, and the rotating disk is arranged below the elastic filter screen.

Preferably, the top of the rotating disk is in contact with the lower inclined surface of the elastic filter screen, and the elastic filter screen forms an elastic sliding structure between the rotating disk and the inner wall above the base, so it is convenient for the rotating disk to operate on the elastic filter screen. move.

Preferably, the inner side of the elastic filter mesh penetrates the outer side of the bottom end of the worktable body, and the top position of the worm is integrally arranged with the rotating plate, so that the worm can drive the rotating plate to rotate to a certain extent.

Preferably, the worm and the worm wheel are in meshing connection, and the bearings at both ends of the worm wheel are connected to the inner wall of the base, so that the worm will drive the worm wheel to rotate stably.

Preferably, the two ends of the support rod are movably connected with the outer surface of the turntable and the inner side of the push plate, and the push plate forms a back-and-forth sliding structure between the support rod and the inner wall of the discharge port, so as to facilitate the push plate It moves stably inside the discharge port.

Preferably, a threaded rod is connected to the outer bearing of the left end of the worktable body, and the outer side of the threaded rod is arranged on the inner side of the casing clamp plate, and the upper and lower ends of the outer side of the casing clamp plate are connected with pull ropes. The other end of the pulling rope is connected with the elastic rotating rod through the fixed pulley, the outer side of the middle part of the elastic rotating rod is nested inside the fixed gear, the outer side of the fixed gear is provided with a limit tooth plate, and the limit tooth plate is far away from One side of the fixed gear is arranged on the outer side of the guide rod, so as to facilitate stable limit clamping of the mask plate.

Preferably, the outer side of the threaded rod and the inner side of the casing clamp plate are threadedly connected, and there is relative movement between the movement direction of the casing clamp plate and the movement direction of the limiting tooth plate. Therefore, it is convenient for the sleeve clamp plate and the limit tooth plate to limit and clamp the mask plate.

Preferably, the limit tooth plate forms a sliding structure between the guide rod and the inner wall of the worktable body, and the elastic rotating rod forms a linkage structure between the pull rope and the casing splint, so it is convenient for the elastic rotating rod to rotate stably .

Compared with the prior art, the beneficial effect of the present invention is that the setting structure is as follows:

(1) The workbench for mask pattern measurement, which is convenient for surface cleaning, is provided with a worm. During the process of driving the worm to rotate by the motor, the top of the worm will drive the rotating disk to rotate, so that the top 1 of the rotating disk will be squeezed. The elastic filter mesh is pressed, so that the elastic filter mesh will move back and forth continuously under the workbench body, so it is convenient to collect the impurities on the top surface of the elastic filter mesh, and the worm will drive the worm wheel to rotate, so The other end of the worm wheel will drive the turntable to rotate, and the push plate that is movably connected at the edge of the outer surface of the turntable will move back and forth inside the discharge port, so it is convenient to collect dust in a centralized manner;

(2) The worktable for mask pattern measurement, which is convenient for surface cleaning, is provided with a threaded rod. By rotating the threaded rod, the threaded rod will rotate on the outside of the worktable body, so that the threaded rod will drive the casing. The splint moves. During the movement of the casing splint, the casing splint will drive the elastic rotating rod to rotate to a certain extent through the pull rope, so that the elastic rotating rod will drive the fixed gear to rotate, so that the outer side of the fixed gear will rotate. The limit tooth plate will be driven to move stably inside the worktable body through the guide rod, so it is convenient to limit and clamp the mask plate set on the top of the worktable body through the sleeve clamp plate and the limit tooth plate.

Description of drawings

Fig. 1 is the front view sectional structure schematic diagram of the present invention;

Fig. 2 is the enlarged schematic diagram of a place in Fig. 1 of the present invention;

Fig. 3 is the top view sectional structure schematic diagram of the turntable of the present invention;

4 is a schematic top view sectional structure diagram of a workbench body according to the present invention;

FIG. 5 is a schematic diagram of the cross-sectional structure at A-A in FIG. 4 of the present invention.

In the figure: 1. Base; 2. Motor; 3. Worm; 4. Worm wheel; 5. Turntable; 6. Support rod; 7. Push plate; 8. Outlet; 9. Rotating disc; 10. Elastic filter ; 11, worktable body; 12, threaded rod; 13, casing splint; 14, pull rope; 15, elastic rotating rod; 16, fixed gear; 17, limit tooth plate; 18, guide rod.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described implementation regulations are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

1-5, the present invention provides a technical solution: a workbench for mask pattern measurement that is convenient for surface cleaning, comprising a base 1, a motor 2, a discharge port 8 and a workbench body 11; wherein, the base 1 The internal position of the worm is provided with a worm 3; the worm 3 and the worm wheel 4 are meshed and connected, and the two ends of the worm wheel 4 are connected to the inner wall of the base 1; and the left side of the worm 3 is provided with a discharge port 8; wherein, The top position of the base 1 is fixedly provided with a workbench body 11; it also includes: the output end of the motor 2 is connected with a worm 3, and the left outer wall of the worm 3 is provided with a worm wheel 4, and the position of the shaft end of the worm wheel 4 is fixed on the turntable 5, the front surface edge of the turntable 5 is movably connected with a support rod 6, and the two ends of the support rod 6 are movably connected with the outer surface of the turntable 5 and the inner side of the push plate 7, and the push plate 7 passes through the support rod 6. A back-and-forth sliding structure is formed with the inner wall of the discharge port 8; the other end of the support rod 6 is connected to the inner side of the push plate 7, and the push plate 7 is arranged on the inner side of the discharge port 8; A rotating disk 9 is fixed at one end, and the rotating disk 9 is arranged at the lower position of the elastic filter screen 10; An elastic sliding structure is formed between the inner walls. The inner side of the elastic filter screen 10 penetrates the outer side of the bottom end of the worktable body 11 , and the top position of the worm 3 and the rotating disk 9 are integrally arranged. 1-3, first, in the process of starting the motor 2, the output end of the motor 2 will drive the worm 3 to rotate, so that the top of the worm 3 will rotate the disk 9 to rotate, because the top of the rotating disk 9 and the The lower slope of the elastic filter screen 10 is in contact with each other, so that the elastic filter screen 10 will slide on the inner wall above the base 1, so that the elastic filter screen 10 will impact the bottom end of the workbench body 11, so it is convenient for work. The impurities on the top of the table body 11 will fall to the top of the elastic filter screen 10, and the impurities on the top of the elastic filter screen 10 will flow to the inside of the discharge port 8, and during the rotation of the worm 3, the worm 3 will Drive the worm wheel 4 to rotate, so that the shaft end of the worm wheel 4 will drive the turntable 5 to rotate to a certain extent. During the rotation of the turntable 5, the turntable 5 will drive the push plate 7 through the movably connected support rod 6. The inside of the discharge port 8 slides to a certain extent. Through the above setting, it is convenient for the impurities in the discharge port 8 to be collected in a certain degree.

A threaded rod 12 is connected to the outer bearing of the left end of the worktable body 11; and the outer side of the threaded rod 12 is arranged on the inner side of the casing splint 13, the upper and lower ends of the outer side of the casing splint 13 are connected with a pulling rope 14, and the other end of the pulling rope 14 is connected to the elastic rotating rod 15 through the fixed pulley. The outer side of the middle part of the elastic rotating rod 15 is nested on the inner side of the fixed gear 16, the outer side of the fixed gear 16 is provided with a limit tooth plate 17, and the side of the limit tooth plate 17 away from the fixed gear 16 is arranged on the outer side of the guide rod 18. The limiting tooth plate 17 forms a sliding structure through the guide rod 18 and the inner wall of the worktable body 11 , and the elastic rotating rod 15 forms a linkage structure through the pulling rope 14 and the casing splint 13 . 1, 4 and 5, firstly, by rotating the threaded rod 12, the threaded rod 12 will rotate on the outside of the worktable body 11, and when the threaded rod 12 rotates, the threaded rod 12 will rotate. 12 will drive the casing splint 13 to slide inside the workbench body 11. During the movement of the casing splint 13, the upper and lower sides of the casing splint 13 will drive the elastic rotating rod 15 to rotate through the pull rope 14. , so that the fixed gear 16 nested on the middle and outer side of the elastic rotating rod 15 rotates, so that the limit tooth plate 17 meshed and connected on the outer side of the fixed gear 16 will move, so that the limit tooth plate 17 will The guide rod 18 moves stably inside the table body 11 , and the limit tooth plate 17 and the casing clamp plate 13 move relative to each other, so it is convenient to hold the mask plate on the top of the table body 11 in a certain limit.

Working principle: First, by rotating the threaded rod 12, the threaded rod 12 will rotate on the outside of the table body 11, and when the threaded rod 12 rotates, the threaded rod 12 will drive the casing splint 13 to work The inside of the table body 11 slides. When the casing splint 13 is moving, the limit tooth plate 17 will move stably inside the table body 11 through the guide rod 18, and the limit tooth plate 17 will move stably through the guide rod 18. The relative movement with the casing splint 13 is convenient for a certain limit clamping of the mask plate on the top of the worktable body 11; First, in the process of starting the motor 2, the output end of the motor 2 will drive the worm 3 to rotate. , so that the top of the worm 3 will rotate the disk 9 to rotate. Since the top of the rotating disk 9 is in contact with the lower slope of the elastic filter screen 10, the elastic filter screen 10 will slide on the inner wall above the base 1, and the worm 3 will drive the worm wheel 4 to rotate, so that the shaft end of the worm wheel 4 will drive the turntable 5 to rotate to a certain extent. When the turntable 5 rotates, it is convenient for the impurities inside the discharge port 8 to be concentrated to a certain extent. collect.

Contents not described in detail in this specification belong to the prior art known to those skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it is still possible to modify the technical solutions described in the foregoing embodiments, or to perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (8)

1. A workbench for mask pattern measurement that is convenient for surface cleaning, comprising a base (1), a motor (2), a discharge port (8) and a workbench body (11); Wherein, a worm (3) is arranged at the inner position of the base (1), and a discharge port (8) is opened on the left side of the inside of the worm (3); Wherein, the top position of the base (1) is fixedly provided with a workbench body (11); It is characterized in that it also includes: The output end of the motor (2) is connected with a worm (3), and the left outer wall of the worm (3) is provided with a worm wheel (4), and the position of the shaft end of the worm wheel (4) is fixed on the turntable On the rear side of (5), a support rod (6) is movably connected to the edge of the front surface of the turntable (5), and the other end of the support rod (6) is connected to the inner side of the push plate (7). The plate (7) is arranged on the inner side of the discharge port (8); One end of the top end of the worm (3) protruding from the inside of the base (1) is fixed with a rotating disk (9), and the rotating disk (9) is arranged below the elastic filter screen (10). 2. A workbench for mask pattern measurement which is convenient for surface cleaning according to claim 1, characterized in that: the top of the rotating disk (9) is in contact with the position of the lower slope of the elastic filter screen (10). The elastic filter screen (10) forms an elastic sliding structure between the rotating disk (9) and the inner wall above the base (1). 3. A workbench for mask pattern measurement convenient for surface cleaning according to claim 1, characterized in that: the inner side of the elastic filter screen (10) penetrates the outer side of the bottom end of the workbench body (11), and the The top position of the worm (3) and the rotating disk (9) are integrally arranged. 4. A workbench for mask pattern measurement that is convenient for surface cleaning according to claim 1, characterized in that: the worm (3) and the worm wheel (4) are meshed and connected, and the worm wheel (4) The bearings at both ends of 4) are connected to the inner wall of the base (1). 5. A workbench for mask pattern measurement that is convenient for surface cleaning according to claim 1, characterized in that: the two ends of the support rod (6) and the outer surface of the turntable (5) and the push plate (7) ) are movably connected, and the push plate (7) forms a back-and-forth sliding structure between the support rod (6) and the inner wall of the discharge port (8). 6. A workbench for mask pattern measurement convenient for surface cleaning according to claim 1, characterized in that: a threaded rod (12) is connected to the outer bearing of the left end of the workbench body (11), and the The outer side of the threaded rod (12) is arranged on the inner side of the casing splint (13), the upper and lower ends of the outer side of the casing splint (13) are connected with a pull rope (14), and the other end of the pull rope (14) The fixed pulley is connected with the elastic rotating rod (15), the outer side of the middle part of the elastic rotating rod (15) is nested inside the fixed gear (16), and the outer side of the fixed gear (16) is provided with a limit tooth plate ( 17), the side of the limiting tooth plate (17) away from the fixed gear (16) is arranged on the outer side of the guide rod (18). 7. A workbench for mask pattern measurement that is convenient for surface cleaning according to claim 6, characterized in that: a threaded connection is made between the outside of the threaded rod (12) and the inside of the casing clamp (13). , the movement direction of the sleeve clamp plate (13) and the movement direction of the limiting tooth plate (17) are relative movement. 8 . The mask pattern measurement workbench according to claim 6 , wherein the limit tooth plate (17) passes through the connection between the guide rod (18) and the workbench body (11). 9 . A sliding structure is formed between the inner walls, and a linkage structure is formed between the elastic rotating rod (15) and the casing splint (13) through the pulling rope (14).

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